JP2012000563A - Fluid delivery device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To wash the internal place of a cylinder where sludge is easy to accumulate even if the cylinder is not disassembled.SOLUTION: This fluid delivery device 20 is equipped with the cylinder 50 and a piston 52. The piston 52 has a piston body, a seal material, and a flow channel valve, and the piston body has a communication flow channel. The communication flow channel allows a drive fluid chamber 60 to communicate with a delivery fluid chamber 62. The seal material is provided to the outer periphery of the piston body and seals the space between the inner surface of the cylinder 50 and the piston body. The fluid channel valve is provided in the communication flow channel and opens so as to enable a drive fluid to pass through the communication flow channel when the difference between the pressure of the drive fluid and a delivery fluid exceeds a threshold value.

Description

  The present invention relates to a fluid delivery device, and more particularly, to a fluid delivery device capable of cleaning a portion where residue residue easily collects without disassembling a cylinder.

  Patent Document 1 discloses a supercritical water reaction apparatus in which a raw material liquid is introduced into a reactor containing supercritical water and processed by a supercritical water reaction. In this supercritical water reactor, a plurality of cylinder pumps are arranged in parallel. These cylinder pumps are pumps for feeding the raw material liquid into the reactor. These cylinder pumps have a cylinder and a piston movable within the cylinder. The raw material liquid is accommodated in a raw material liquid chamber that is partitioned by the piston and one end of the cylinder. The drive fluid is accommodated in a drive fluid chamber partitioned by the piston and the other end of the cylinder. The piston is moved by the pressure of the driving fluid stored in the driving fluid chamber to push out the raw material liquid in the raw material liquid chamber from the outlet on the one end side of the cylinder. The raw material liquid is continuously fed into the reactor by a switching operation in which the raw material liquid is pushed out by at least one cylinder pump of the plurality of units and the raw material liquid is introduced into at least one cylinder pump in the meantime. Yes.

  According to the supercritical water reactor disclosed in Patent Document 1, maintenance can be facilitated and economic efficiency can be improved.

  Patent document 2 discloses a pressure supply apparatus. This pressurization supply device is provided with a cylinder pump and a change-over valve. The cylinder pump includes a partition wall, a pair of cylinders, a pair of pistons, a liquid supply pipe, and a liquid discharge pipe. The cylinder is formed on both sides of the partition wall. Pistons are provided in both cylinders and connected by rods. The rod penetrates the partition wall. The liquid supply pipe is connected to a position close to the partition walls of both cylinders. The liquid supply pipe is connected to both cylinders via an introduction-side check valve. The liquid discharge pipe is connected to a position away from the partition wall by a width dimension of the piston or more in both cylinders. The liquid discharge pipe is connected to both cylinders via a discharge check valve. The switching valve supplies pressurized water by switching to the pressurizing chambers of both cylinders.

  According to the pressure supply apparatus disclosed in Patent Document 2, water can be mixed in the raw material liquid at an arbitrary ratio while pressurizing the raw material liquid, and at the same time, the discharge check valve can be cleaned.

JP 2000-271468 A JP 2001-123961 A

  However, the supercritical water reactor disclosed in Patent Document 1 and the pressurized supply apparatus disclosed in Patent Document 2 have a problem in that residue residue tends to accumulate in a portion of the cylinder where the raw material liquid enters and exits. . In the supercritical water reactor disclosed in Patent Document 1, the “portion where the raw material liquid enters and exits” refers to the raw material liquid chamber. The “part where the raw material liquid enters and exits” in the pressure supply apparatus disclosed in Patent Document 2 is a part of the cylinder between the piston and the partition wall. In these portions, there are often places where the flow of the raw material liquid is stagnant. A moat is accumulated in such a place. Once the residue remains, it is necessary to disassemble and clean the cylinder pump in order to clean it. The operation of disassembling and cleaning the cylinder pump is a complicated operation.

  The present invention has been made to solve such a problem, and the object of the present invention is to provide a fluid delivery system capable of cleaning a portion where the residue in the inside tends to collect without disassembling the cylinder. To provide an apparatus.

  The fluid delivery device of the present invention will be described with reference to the drawings. Note that the use of the reference numerals in the figure in this column is intended to assist understanding of the contents of the invention, and is not intended to limit the contents to the illustrated range.

  In order to solve the above-described problem, according to one aspect of the present invention, the fluid delivery devices 20 and 320 include cylinders 50 and 350 and pistons 52 and 352, respectively. The cylinders 50 and 350 contain a driving fluid and a delivery fluid. The pistons 52 and 352 divide the cylinders 50 and 350 into a driving fluid chamber 60 where the driving fluid enters and exits and a delivery fluid chamber 62 where the delivery fluid enters and exits. The pistons 52 and 352 move along the inner surfaces of the cylinders 50 and 350 in the cylinders 50 and 350 by receiving forces from the driving fluid and the delivery fluid. The pistons 52 and 352 have piston main bodies 130, 230, and 430, a sealing material 134, and a flow path valve 132. The piston main bodies 130, 230, and 430 have communication channels 140, 290, and 440. The communication channels 140, 290, and 440 communicate the drive fluid chamber 60 and the delivery fluid chamber 62. The sealing material 134 is provided on the outer periphery of the piston main bodies 130, 230, and 430. The sealing material 134 seals between the inner surface of the cylinder 50 and the piston main bodies 130, 230, and 430. The flow path valve 132 is provided in the communication flow paths 140, 290, and 440. The flow path valve 132 opens so that the drive fluid can pass through the communication flow paths 140, 290, 440 when the difference between the pressure of the drive fluid and the pressure of the delivery fluid exceeds a threshold value.

  According to this, when the pressure of the driving fluid continues to rise due to the movement of the piston 52 being stopped, the difference between the pressure of the driving fluid and the pressure of the delivery fluid will eventually exceed the threshold value. When the difference between the pressure of the driving fluid and the pressure of the delivery fluid exceeds the threshold value, the flow path valve 132 is opened. When the flow path valve 132 is opened, the driving fluid can pass through the communication flow paths 140, 290, and 440. Then, the driving fluid passes through the communication channels 140, 290, 440 and flows out to the delivery fluid chamber 62. Since the driving fluid flows out into the delivery fluid chamber 62, the delivery fluid chamber 62 of the cylinders 50 and 350 is washed by the driving fluid. As a result, it is possible to clean a portion where the residue in the inside tends to collect without disassembling the cylinder.

  Moreover, it is desirable that the above-described communication flow paths 140 and 290 include root portions 150, 260 and 280 and branch portions 152 and 282. A flow path valve 132 is accommodated in the root portions 150, 260, and 280. The root portions 150, 260, and 280 have an opening 160 that faces the drive fluid chamber 60. The branch portions 152 and 282 are radially branched from the root portions 150, 260 and 280.

  Alternatively, it is desirable that the branch portions 152 and 282 have an opening 192 that faces the inner surface of the cylinder 50.

  When the openings 192 of the branch portions 152 and 282 face the inner surface of the cylinder 50, the driving fluid that has passed through the branch portions 152 and 282 flows out into the delivery fluid chamber 62 through the gap between the piston bodies 130 and 230 and the inner surface of the cylinder 50. Will be. As a result, the driving fluid flows in a portion where the residue is easily collected, such as a gap between the piston main bodies 130 and 230 and the inner surface of the cylinder 50. Since the driving fluid flows through the portion where the residue is likely to accumulate, the portion where the residue is likely to accumulate is often cleaned. Since the portion where the residue is easily collected is cleaned well, the portion where the residue is likely to collect can be effectively cleaned as compared with the case where other portions are well cleaned.

  According to the present invention, there is an effect that it is possible to clean a portion in which residue residue easily collects without disassembling the cylinder.

It is a flowchart of the injection | throwing-in unit concerning 1st Embodiment of this invention. It is sectional drawing of the fluid delivery apparatus concerning 1st Embodiment of this invention. It is an AA arrow line view of FIG. It is an enlarged view of the delivery fluid side unit part concerning a 1st embodiment of the present invention. It is a BB arrow line view of FIG. It is sectional drawing of the piston concerning 1st Embodiment of this invention. It is a partially broken view of the piston main body concerning 1st Embodiment of this invention. It is a conceptual diagram which shows the flow path of purified water. It is a flowchart of the collection | recovery unit concerning 2nd Embodiment of this invention. It is sectional drawing of the fluid delivery apparatus concerning 3rd Embodiment of this invention. It is a partially broken figure of the piston concerning 3rd Embodiment of this invention. It is sectional drawing of the piston main body concerning the 1st modification of this invention. It is CC sectional drawing of FIG. It is a perspective view of the piston main body concerning the 2nd modification of this invention. It is a photograph which shows the inside of the delivery fluid inlet-and-outlet member after performing test washing | cleaning using the piston main body concerning the 2nd modification of this invention. It is a photograph which shows the inside of the delivery fluid inlet-and-outlet member after performing test washing | cleaning using the piston main body for a comparison.

  Hereinafter, the present invention will be described in detail with reference to the drawings. In the following description, the same parts are denoted by the same reference numerals. Their names and functions are also the same. Therefore, detailed description thereof will not be repeated.

<First embodiment>
Hereinafter, a first embodiment of the present invention will be described in detail with reference to the drawings. First, the input unit according to the present embodiment will be described. FIG. 1 is a flowchart of the input unit according to the present embodiment. The charging unit according to this embodiment can be used for hydrothermal synthesis.

  The charging unit according to the present embodiment includes a first fluid delivery device 20, a second fluid delivery device 22, a raw material tank 24, a four-way valve 26, a purified water tank 28, a pressure feed pump 30, and a switching valve 32. The first discharge valve 34, the second discharge valve 36, the drain tank 38, the solution supply line 40, the third discharge valve 43, and the fourth discharge valve 45 are provided.

  The first fluid delivery device 20 and the second fluid delivery device 22 are supplied with a raw material solution (this raw material solution is a delivery fluid in this embodiment) at a predetermined high pressure (30 MPa in this embodiment) and a hydrothermal synthesis device (not shown). Is a pump for supplying In the present embodiment, the first fluid delivery device 20 and the second fluid delivery device 22 have the same structure. Specific structures of the first fluid delivery device 20 and the second fluid delivery device 22 will be described later.

  The raw material tank 24 is a tank that stores a raw material solution. A raw material solution is supplied from the raw material tank 24 to the first fluid delivery device 20 and the second fluid delivery device 22 by a pump (not shown). The specific composition of the raw material solution is not particularly limited. An example of the raw material solution is an aqueous metal salt solution.

  The four-way valve 26 switches the flow path of the raw material solution from the raw material tank 24 between the first fluid delivery device 20 and the second fluid delivery device 22. The four-way valve 26 is also a valve for switching the flow path of the raw material solution to the hydrothermal synthesizer (not shown) between the first fluid delivery device 20 and the second fluid delivery device 22. At some point, the four-way valve 26 guides the raw material solution flowing out from the raw material tank 24 to the first fluid delivery device 20. At the same time, the four-way valve 26 guides the raw material solution discharged from the second fluid delivery device 22 to the hydrothermal synthesis device. At another time, the four-way valve 26 guides the raw material solution flowing out from the raw material tank 24 to the second fluid delivery device 22. At the same time, the four-way valve 26 guides the raw material solution discharged from the first fluid delivery device 20 to the hydrothermal synthesis device.

  The purified water tank 28 is a tank that stores purified water (this purified water is the driving fluid in the present embodiment). The pressure feed pump 30 supplies the first fluid delivery device 20 and the second fluid delivery device 22 with the above-described predetermined high pressure (that is, 30 MPa in this embodiment). The purified water serves as a drive source for the first fluid delivery device 20 and the second fluid delivery device 22 to discharge the raw material solution.

  The switching valve 32 switches the flow path from the purified water tank 28 to the first fluid delivery device 20 or the second fluid delivery device 22. At some time, the switching valve 32 guides the purified water sucked from the purified water tank 28 by the pressure pump 30 to the first fluid delivery device 20. At another time, the switching valve 32 guides the purified water sucked from the purified water tank 28 by the pressure pump 30 to the second fluid delivery device 22.

  The first discharge valve 34 closes or opens the flow path from the first fluid delivery device 20 to the drain tank 38. The second discharge valve 36 closes or opens the flow path from the second fluid delivery device 22 to the drain tank 38. The drainage tank 38 stores the purified water discharged from the first fluid delivery device 20 and the second fluid delivery device 22. The solution supply line 40 is a tube that supplies a raw material solution to a hydrothermal synthesizer (not shown). The third discharge valve 43 is provided in the middle of the solution supply line 40. The fourth discharge valve 45 is provided in the middle of a pipe branched from the solution supply line 40 (the end of this pipe reaches a waste liquid tank (not shown)). The third discharge valve 43 opens and closes the solution supply line 40. The fourth discharge valve 45 opens and closes a flow path formed by a pipe branched from the solution supply line 40.

  Next, the first fluid delivery device 20 according to the present embodiment will be described. As described above, in the case of the present embodiment, the first fluid delivery device 20 and the second fluid delivery device 22 have the same structure, and thus the description of the second fluid delivery device 22 is omitted. FIG. 2 is a cross-sectional view of the first fluid delivery device 20 according to the present embodiment.

  The first fluid delivery device 20 includes a cylinder 50 and a piston 52. The cylinder 50 stores the raw material solution and purified water. The piston 52 divides the inside of the cylinder 50 into a driving fluid chamber 60 and a delivery fluid chamber 62. The driving fluid chamber 60 is a space where purified water enters and exits. The delivery fluid chamber 62 is a space where the raw material solution enters and exits. The piston 52 can move while sliding along the inner surface of the cylinder 50.

  The cylinder 50 includes a tube 54, a driving fluid side unit 55, and a delivery fluid side unit 56. The driving fluid side unit 55 is attached to one end of the tube 54. The purified water enters from the outside of the cylinder 50 through the drive fluid side unit 55. The purified water exits from the cylinder 50 through the drive fluid side unit 55. The delivery fluid side unit 56 is attached to the other end of the tube 54. The raw material solution enters from the outside of the cylinder 50 through the delivery fluid side unit 56. The raw material solution exits from the cylinder 50 through the delivery fluid side unit 56.

  FIG. 3 is an AA arrow view of FIG. The drive fluid side unit 55 will be described with reference to FIGS. 2 and 3. The drive fluid side unit 55 includes a drive fluid inlet / outlet member 70, a plug 72, and a lock nut 74.

  The driving fluid inlet / outlet member 70 is a member that is directly attached to one end of the tube 54. A through hole 80 passes through the driving fluid inlet / outlet member 70. The through hole 80 communicates with the inside of the tube 54. In the case of this embodiment, the portion of the inside of the tube 54 that is closer to the driving fluid inlet / outlet member 70 than the piston 52 and the through hole 80 that communicates with the portion are the driving fluid chamber 60. The driving fluid inlet / outlet member 70 is provided with a driving fluid inlet 82, a driving fluid outlet 84, and a proximity switch mounting hole 86. A proximity switch is attached to the proximity switch mounting hole 86. In the present embodiment, this proximity switch is referred to as a driving fluid side proximity switch 88. The driving fluid inlet 82 and the driving fluid outlet 84 communicate with the through hole 80 described above. Therefore, the purified water supplied from the pressure feed pump 30 to the first fluid delivery device 20 enters the delivery fluid chamber 62 via the drive fluid inlet 82. The purified water is discharged out of the delivery fluid chamber 62 via the drive fluid outlet 84.

  The plug 72 closes the end of the through hole 80. The plug 72 has a hole. This hole is closed by a member (not shown). The lock nut 74 is attached to the drive fluid inlet / outlet member 70 so as to cover the plug 72.

  FIG. 4 is an enlarged view of the delivery fluid side unit 56 portion in FIG. 5 is a BB arrow view of FIG. The delivery fluid side unit 56 will be described with reference to FIGS. 4 and 5. The delivery fluid side unit 56 includes a delivery fluid inlet / outlet member 90, a stirring blade 92, a cylinder core 94, a shaft 96, a thrust bearing 98, a drain plug 100, a bearing receiver 102, and a lock nut 104. .

  The delivery fluid inlet / outlet member 90 is a member that is directly attached to one end of the tube 54. A through hole 110 passes through the delivery fluid inlet / outlet member 90. The through hole 110 communicates with the inside of the tube 54. In the present embodiment, the portion of the inside of the tube 54 that is closer to the delivery fluid inlet / outlet member 90 than the piston 52 and the through-hole 110 that communicates with the portion are the delivery fluid chamber 62. The delivery fluid inlet / outlet member 90 is provided with a delivery fluid inlet 112, a delivery fluid outlet 114, and a proximity switch mounting hole 116. The delivery fluid inlet 112 and the delivery fluid outlet 114 communicate with the through hole 110 of the delivery fluid inlet / outlet member 90. Therefore, the raw material solution flowing out from the raw material tank 24 and guided to the first fluid delivery device 20 enters from the outside of the delivery fluid chamber 62 through the delivery fluid inlet 112. The raw material solution exits from the inside of the delivery fluid chamber 62 via the delivery fluid outlet 114. A proximity switch is attached to the proximity switch mounting hole 116. In the present embodiment, this proximity switch is referred to as a delivery fluid side proximity switch 89.

  A stopper 118 is provided on the portion of the delivery fluid inlet / outlet member 90 that surrounds the stirring blade 92 on the inner surface of the through hole 110. The stopper 118 serves to limit the movement range of the piston 52 within the tube 54. By providing the stopper 118, the piston 52 and the stirring blade 92 are prevented from colliding with each other.

  The stirring blade 92 is disposed in the through hole 110 of the delivery fluid inlet / outlet member 90 described above. As described above, since the through hole 110 of the delivery fluid inlet / outlet member 90 communicates with the inside of the tube 54, the raw material solution in the delivery fluid chamber 62 is stirred when the stirring blade 92 rotates.

  The cylinder core 94 is disposed at a position farther from the stirring blade 92 when viewed from the delivery fluid chamber 62. The cylinder core 94 supports the shaft 96.

  The shaft 96 passes through the cylinder core 94. The shaft 96 is rotatable within the cylinder core 94. The shaft 96 gives torque to the stirring blade 92. A hole 120 passes through the center of the shaft 96. The rest of the raw material solution can be discharged from the hole 120. The drain plug 100 is inserted into one end of the hole 120. The drain plug 100 closes the hole 120 while it is not necessary to discharge the raw material solution from the hole 120. In order to close the hole 120, the drain plug 100 has a long shaft that penetrates the hole 120. In FIG. 4, the tip of the shaft reaches the delivery fluid chamber 62.

  The tip of the bearing receiver 102 is inserted into the cylinder core 94. The bearing receiver 102 supports the shaft 96 and the thrust bearing 98.

  The lock nut 104 is attached to the delivery fluid inlet / outlet member 90 so as to cover the cylinder core 94. The lock nut 104 presses the cylinder core 94 so that the cylinder core 94 does not come out of the through hole 110 of the delivery fluid inlet / outlet member 90.

  FIG. 6 is a sectional view of the piston 52. The structure of the piston 52 will be described with reference to FIG. The piston 52 according to the present embodiment includes a piston main body 130, a flow path valve 132, an O-ring 134, and a flow path plug 136.

  The piston main body 130 is a member that divides the inside of the tube 54 into a driving fluid chamber 60 and a delivery fluid chamber 62. The flow path valve 132 opens when the difference between the pressure of purified water and the pressure of the raw material solution exceeds a threshold value. As will be described later, the flow path valve 132 is accommodated in the root portion 150 of the communication flow path 140. Thereby, when the flow path valve 132 is opened, the purified water can pass through the communication flow path 140. The O-ring 134 is a sealing material provided on the outer periphery of the piston main body 130 in the present embodiment. The O-ring 134 closes the outer peripheral surface of the piston main body 130 and the inner peripheral surface of the tube 54. The flow path plug 136 will be described later.

  FIG. 7 is a partially cutaway view of the piston main body 130. The configuration of the piston main body 130 will be described with reference to FIG. The piston body 130 has a communication channel 140 and a channel groove 142. The communication flow path 140 is a flow path for driving fluid that connects the driving fluid chamber 60 and the delivery fluid chamber 62. The channel groove 142 is provided on the surface of the outer peripheral surface of the piston main body 130 that contacts the stopper 118. The flow channel 142 serves as a flow channel for purified water that has passed between the inner peripheral surface of the cylinder 50 and the outer peripheral surface of the piston main body 130 to flow into the delivery fluid chamber 62.

  The communication channel 140 has a root portion 150, a branch portion 152, and a trunk portion 154. A flow path valve 132 is accommodated in the root portion 150.

  The root portion 150 has a driving fluid side opening 160, an opening side female screw portion 162, a taper portion 164, a tube portion 166, and a branching root portion 168. The driving fluid side opening 160 faces the driving fluid chamber 60. Thereby, the purified water in the driving fluid chamber 60 can flow into the root portion 150. The opening-side female thread portion 162 is provided at the back of the driving fluid-side opening 160 when viewed from the driving fluid chamber 60. A female screw is formed in the opening-side female screw portion 162. The tapered portion 164 is provided at the back of the opening-side female screw portion 162 when viewed from the driving fluid chamber 60. The inner diameter of the taper portion 164 decreases as the taper portion 164 moves away from the opening-side female screw portion 162. The cylindrical portion 166 is provided behind the tapered portion 164 when viewed from the driving fluid chamber 60. The inner diameter of the cylindrical portion 166 is constant. The inner peripheral surface of the cylindrical portion 166 is smooth. The branch root 168 is provided at the back of the cylindrical portion 166 when viewed from the driving fluid chamber 60. The branch root 168 is formed with a female screw.

  As shown in FIG. 7, the branch portion 152 branches radially from the branch root portion 168 of the root portion 150 in four directions. The branch portion 152 has a delivery fluid side opening 192. The delivery fluid side opening 192 faces the inner peripheral surface of the tube 54. The position of the delivery fluid side opening 192 is closer to the delivery fluid chamber 62 than the O-ring 134 when viewed from the drive fluid chamber 60. As is clear from FIG. 7, in the present embodiment, the direction in which the branch portion 152 extends from the center of the piston body 130 is different from the direction in which the flow channel 142 from the center of the piston body 130 extends. . In the present embodiment, the angle formed by the direction in which the branch portion 152 extends from the center of the piston body 130 and the direction in which the flow channel 142 extends from the center of the piston body 130 is π / 4 radians.

  The trunk portion 154 continues to the root portion 150. The inner diameter of the trunk portion 154 is slightly larger than the inner diameter of the branch root 168 of the root portion 150. In the case of this embodiment, the flow path plug 136 described above is screwed into the trunk portion 154. The flow path plug 136 has a plug hole 180. This plug hole 180 is a flow path through which purified water flows, similar to the branch portion 152.

  With reference to FIG. 6 again, the configuration of the flow path valve 132 will be described. The flow path valve 132 includes a valve body 170, a valve seat 172, a fixing member 174, a spring 176, and a reaction force member 178. The valve body 170 is accommodated in the cylindrical portion 166. As described above, the inner peripheral surface of the cylindrical portion 166 is smooth. Thereby, the valve body 170 is movable in the central axis direction of the cylindrical portion 166 in the cylindrical portion 166. The valve seat 172 is pressed against the tapered portion 164 by the fixing member 174. As a result, the valve seat 172 is fixed in the root portion 150. The fixing member 174 has a male screw. The male screw meshes with the female screw of the opening-side female screw part 162. As a result, the fixing member 174 is also fixed in the root portion 150. The spring 176 is accommodated in a section from the tube portion 166 to the branch root portion 168 in the root portion 150. The spring 176 is only accommodated in the section, and is not fixed to the inner peripheral surface of the section. The reaction force member 178 has a male screw. The male screw meshes with the female screw of the branch root 168. Thereby, the reaction force member 178 is fixed in the root portion 150.

  The valve body 170 and the valve seat 172 are members that block or allow purified water to pass through by being brought into close contact with each other or separated from each other. The spring 176 presses the valve body 170 against the valve seat 172. The reaction force member 178 supports the reaction force received by the spring 176 from the valve body 170.

  Next, a method for supplying the raw material solution to the hydrothermal synthesizer using the charging unit configured as described above will be described with reference to FIG. Note that various controls are required to supply the raw material solution to the hydrothermal synthesizer using the charging unit configured as described above, and these controls are automatically controlled by a sequencer or the like even if manually controlled. It may be. In the following description, a case where a sequencer (not shown) controls the input unit will be described as an example.

  It is assumed that the feed fluid chamber 62 of the second fluid delivery device 22 is filled with the raw material solution in a full or nearly full state in advance. It is assumed that the second discharge valve 36 is closed.

  First, the sequencer controls the four-way valve 26 so that the material tank 24 can communicate with the first fluid delivery device 20. The sequencer also controls the first discharge valve 34 to open. In addition, the sequencer controls these so that the third discharge valve 43 is opened and the fourth discharge valve 45 is closed. When the material tank 24 communicates with the first fluid delivery device 20, the material solution flowing out from the material tank 24 is supplied to the first fluid delivery device 20 by a pump (not shown). The raw material solution flows into the delivery fluid chamber 62 of the first fluid delivery device 20. At this time, the sequencer drives the shaft 96 of the first fluid delivery device 20 to rotate the stirring blade 92. When the stirring blade 92 rotates, the raw material solution in the delivery fluid chamber 62 is stirred. Thereby, the fine particles in the raw material solution are uniformly dispersed. When the raw material solution flows into the delivery fluid chamber 62 of the first fluid delivery device 20, the piston 52 is pushed by the raw material solution. When the piston 52 is pushed by the raw material solution, purified water is discharged from the driving fluid chamber 60. Since the first discharge valve 34 is open, the purified water discharged from the drive fluid chamber 60 is discharged to the drain tank 38.

  While the raw material solution flows into the first fluid delivery device 20, the pressure delivery pump 30 supplies predetermined high-pressure purified water to the drive fluid chamber 60 of the second fluid delivery device 22. Since purified water is supplied to the driving fluid chamber 60, the pressure of the purified water acts on the piston 52. Since the pressure of the purified water acts on the piston 52, the piston 52 moves toward the delivery fluid side unit 56. Since the piston 52 moves toward the delivery fluid side unit 56, the raw material solution is discharged from the delivery fluid chamber 62. In the case of the present embodiment, the four-way valve 26 is provided, the third discharge valve 43 is open, and the fourth discharge valve 45 is closed, so that from the raw material tank 24 to the first fluid delivery device 20 When communicating, the second fluid delivery device 22 communicates with the hydrothermal synthesis device. Since the raw material solution is pushed by the piston 52 and discharged from the second fluid delivery device 22, the pressure of the raw material solution is a high pressure close to the pressure of purified water. Therefore, it is possible to supply the raw material solution into the high-pressure hydrothermal synthesizer.

  Thereafter, when the piston 52 of the first fluid delivery device 20 approaches the driving fluid side proximity switch 88 attached to the driving fluid inlet / outlet member 70, the driving fluid side proximity switch 88 detects the piston 52. The drive fluid side proximity switch 88 transmits a signal indicating that the piston 52 has been detected to the sequencer. On the other hand, since the piston 52 of the second fluid delivery device 22 approaches the delivery fluid side proximity switch 89 of the delivery fluid inlet / outlet member 90, the delivery fluid side proximity switch 89 detects the piston 52. The delivery fluid side proximity switch 89 transmits a signal indicating that the piston 52 has been detected to the sequencer. The sequencer that has received these signals controls the four-way valve 26. Thereby, the material tank 24 communicates with the second fluid delivery device 22 and the first fluid delivery device 20 communicates with the hydrothermal synthesis device. When the four-way valve 26 is controlled, the sequencer controls the first discharge valve 34 to be closed and the second discharge valve 36 to be opened. The raw material solution is continuously supplied from the raw material tank 24. The pump 30 continues to supply purified water at a predetermined high pressure. Thereby, the raw material solution is supplied from the first fluid delivery device 20 to the hydrothermal synthesis device, and the raw material solution is supplied from the raw material tank 24 to the second fluid delivery device 22. Thereafter, the above-described operation is repeated. As a result, the raw material solution continues to be supplied to the hydrothermal synthesizer.

  Next, a method for cleaning the inside of the first fluid delivery device 20 and the second fluid delivery device 22 according to the present embodiment will be described.

  It is assumed that the piston 52 approaches the delivery fluid side proximity switch 89 and the delivery fluid side proximity switch 89 detects this. When the inside of the tube 54 is not washed, the four-way valve 26 is controlled at this time as described above. On the other hand, when the inside of the tube 54 is washed, the four-way valve 26 is not controlled at this time. Further, when the inside of the tube 54 is washed, the sequencer controls the third discharge valve 43 and the fourth discharge valve 45 to be opened at this time.

  If the four-way valve 26 is not controlled, the movement of the piston 52 is stopped by the stopper 118. When the pumping pump 30 continues to supply purified water while the movement of the piston 52 is stopped by the stopper 118, the pressure applied by the purified water to the valve body 170 of the piston 52 gradually increases. As a result of the increased pressure, when the force applied to the valve body 170 from the purified water becomes larger than the force with which the spring 176 and the raw material solution press the valve body 170 against the valve seat 172, the valve body 170 moves away from the valve seat 172. . When the valve body 170 is separated from the valve seat 172, the purified water passes through the root portion 150.

  A portion of the purified water that has passed through the root portion 150 flows out to the branch portion 152. The purified water that has flowed through the branch portion 152 is ejected to the outer periphery of the piston main body 130 of the piston 52. The outer peripheral surface of the piston main body 130 of the piston 52 is surrounded by the inner surface of the tube 54 and the inner surface of the through hole 110. As a result, the purified water that has flowed through the branch portion 152 flows through the gap between the inner surface of the tube 54 and the inner surface of the through hole 110 and the outer peripheral surface of the piston main body 130 toward the delivery fluid outlet 114. Thereby, the gap is cleaned. The purified water flows out through the flow channel 142 to the delivery fluid outlet 114. The purified water that has flowed out into the delivery fluid chamber 62 is mixed with the raw material solution and then discharged from the delivery fluid outlet 114 to the outside of the delivery fluid inlet / outlet member 90.

  The purified water that has passed through the root portion 150 and has not flowed into the branch portion 152 passes through the plug hole 180 in the flow path plug 136. The opening of the plug hole 180 faces the delivery fluid chamber 62. As a result, the purified water that has passed through the plug hole 180 flows out into the delivery fluid chamber 62. This purified water is also discharged out of the delivery fluid inlet / outlet member 90 from the delivery fluid outlet 114. FIG. 8 is a diagram showing the flow path of the purified water at this time. The white arrow shown by FIG. 8 shows the flow path of purified water. The purified water discharged out of the delivery fluid inlet / outlet member 90 is discharged to a drain tank (not shown) through the solution supply line 40 and the fourth discharge valve 45.

<Description of effects>
As described above, the first fluid delivery device 20 and the second fluid delivery device 22 according to this embodiment can wash the inside of the delivery fluid chamber 62 with purified water that has flowed out from the outer peripheral surface of the piston 52. The reason why the inside of the delivery fluid chamber 62 can be cleaned is to satisfy the following requirements. The first requirement is that the communication channel 140 is provided in the piston body 130. The second requirement is that the flow path valve 132 is opened so that purified water can pass through the communication flow path 140.

  Further, the first fluid delivery device 20 and the second fluid delivery device 22 according to the present embodiment can clean the gap between the inner peripheral surface of the tube 54 and the inner peripheral surface of the through hole 110 and the outer peripheral surface of the piston 52. . The reason why such a gap can be cleaned with purified water is to satisfy the following requirements in addition to the requirements described above. The first requirement is that purified water passes through the branch portion 152 of the communication channel 140 and flows out into the gap between the inner peripheral surface of the tube 54 and the inner peripheral surface of the through hole 110 and the outer peripheral surface of the piston 52. It is. The second requirement is that purified water that has passed through the gap between the inner peripheral surface of the tube 54 and the inner peripheral surface of the through hole 110 and the outer peripheral surface of the piston 52 flows out into the delivery fluid chamber 62.

  In the present embodiment, the direction in which the branch portion 152 extends from the center of the piston main body 130 is different from the direction in which the flow channel 142 extends from the center of the piston main body 130. Thereby, compared with the case where the branch part 152 and the flow-path groove 142 are extended in the same direction, the distance from the delivery fluid side opening 192 to the flow-path groove 142 can be lengthened. Since the distance is increased, the first fluid delivery device 20 and the second fluid delivery device 22 according to the present embodiment can enhance the cleaning effect of purified water.

<Second Embodiment>
Hereinafter, a second embodiment of the present invention will be described in detail with reference to the drawings. First, the collection unit according to this embodiment will be described.

  FIG. 9 is a flowchart of the collection unit according to the present embodiment. The recovery unit according to the present embodiment can be used for recovering a product produced by a hydrothermal synthesizer (not shown). The collection unit according to this embodiment includes the first fluid delivery device 20 described in the first embodiment and the second fluid delivery device 22 described in the first embodiment.

  The delivery fluid inlet 112 of the first fluid delivery device 20 and the delivery fluid inlet 112 of the second fluid delivery device 22 are connected to the hydrothermal synthesizer (not shown) through a reaction product supply line 200. The delivery fluid outlet 114 of the first fluid delivery device 20, the delivery fluid outlet 114 of the second fluid delivery device 22, and the product tank 206 are connected by a reaction product recovery line 204. A first opening / closing valve 225 is provided in the middle of the reaction product recovery line 204. A second on-off valve 227 is provided in the middle of the pipe branched from the reaction product recovery line 204 (the end of this pipe reaches a waste liquid tank not shown). The first on-off valve 225 opens or closes the reaction product recovery line 204. The second on-off valve 227 opens and closes a flow path formed by a pipe branched from the reaction product recovery line 204.

  The collection unit according to this embodiment includes a four-way valve 26. The four-way valve 26 switches the flow path of the reaction product (product) supplied from the hydrothermal synthesizer between the first fluid delivery device 20 and the second fluid delivery device 22. The four-way valve 26 is also a valve that switches the flow path of the reaction product to the product tank 206 between the first fluid delivery device 20 and the second fluid delivery device 22. At some point, the four-way valve 26 guides the product discharged from the hydrothermal synthesizer to the first fluid delivery device 20. At the same time, the four-way valve 26 guides the product discharged from the second fluid delivery device 22 to the product tank 206. At another time, the four-way valve 26 guides the product discharged from the hydrothermal synthesizer to the second fluid delivery device 22. At the same time, the four-way valve 26 guides the product discharged from the first fluid delivery device 20 to the product tank 206.

  The driving fluid inlet 82 of the driving fluid chamber 60 of the first fluid delivery device 20, the driving fluid inlet 82 of the driving fluid chamber 60 of the second fluid delivery device 22, and the filling water tank 208 are respectively connected to the low-pressure water supply path 210 and Connected to the high-pressure water supply path 212. The low-pressure water supply path 210 is provided with a low-pressure pump 214 that supplies low-pressure water to the driving fluid chamber 60. A valve 216 is provided in the middle of the low-pressure water supply path 210. The high-pressure water supply passage 212 is provided with a high-pressure pump 218 that supplies high-pressure water to the driving fluid chamber 60. A valve 220 is provided in the middle of the high-pressure water supply path 212.

  Next, a method for recovering the reaction product from the hydrothermal synthesizer side using the recovery unit configured as described above will be described. As in the case of the first embodiment, various controls are required for recovering the reaction product using the recovery unit. These controls are automatically performed by a sequencer or the like even if the control is performed manually. Control may also be used. In the following description, a case where an operator operates the collection unit will be described as an example.

  First, at the beginning of operation, the low pressure pump 214 is driven to supply low pressure water from the filling water tank 208 into the drive fluid chamber 60 of the first fluid delivery device 20. When purified water is filled in the drive fluid chamber 60, the operator closes the valve 216 and stops the low-pressure pump 214. The operator opens the first on-off valve 225 and closes the second on-off valve 227.

  Next, when the operator operates the four-way valve 26, the reaction product supply line 200 leads to the delivery fluid chamber 62 of the first fluid delivery device 20. When the reaction product supply line 200 leads to the delivery fluid chamber 62, the reaction product is supplied from the hydrothermal synthesizer to the delivery fluid chamber 62 of the first fluid delivery device 20. The pressure in the reaction product supply line 200 is significantly higher than the pressure in the driving fluid chamber 60. Thereby, the reaction product is filled in the delivery fluid chamber 62, and the piston 52 moves. The purified water in the driving fluid chamber 60 is discharged to the drain tank 224 through the relief valve 222. Since it passes through the relief valve 222, even if purified water is discharged into the drain tank 224, the pressure in the hydrothermal synthesizer does not drop rapidly. When the inside of the delivery fluid chamber 62 is full or nearly full, the operator operates the four-way valve 26 (which leads from the first fluid delivery device 20 to the product tank 206), and the valve 220 of the high-pressure water supply passage 212 is opened. The valve 220 that leads to the first fluid delivery device 20 is opened, and the high-pressure pump 218 is activated. Thereby, high-pressure water is supplied from the filling water tank 208 to the driving fluid chamber 60 of the first fluid delivery device 20. When high-pressure water is supplied to the driving fluid chamber 60, the pressure of the high-pressure water acts on the piston 52, and the piston 52 moves toward the delivery fluid chamber 62. As the piston 52 moves toward the delivery fluid chamber 62, the reaction product is pushed out from the delivery fluid outlet 114 toward the product tank 206. While the reaction product is supplied from the delivery fluid outlet 114 to the product tank 206, the reaction product in the delivery fluid chamber 62 is stirred by the stirring blade 92. This prevents the reaction product from being precipitated in the delivery fluid chamber 62.

  When the reaction product has been extruded from the delivery fluid chamber 62, the operator operates the four-way valve 26 (which leads from the second fluid delivery device 22 to the product tank 206), and the valve 220 of the high-pressure water supply passage 212 is opened. Among them, the valve 220 that communicates with the first fluid delivery device 20 is closed, and the valve 220 that communicates with the second fluid delivery device 22 among the valves 220 is opened. Thereby, the high-pressure water supplied from the high-pressure pump 218 starts to be supplied to the driving fluid chamber 60 of the second fluid delivery device 22. The reaction product begins to be fed by pressure from the hydrothermal synthesizer to the delivery fluid chamber 62 of the first fluid delivery device 20. The reaction product is pushed out from the delivery fluid outlet 114 of the second fluid delivery device 22 toward the product tank 206. During the extrusion supply, the reaction product in the delivery fluid chamber 62 of the second fluid delivery device 22 is stirred by the stirring blade 92. Thereby, it is avoided that the reaction product precipitates in the delivery fluid chamber 62 of the second fluid delivery device 22.

  Next, a method of cleaning the inside of the first fluid delivery device 20 and the second fluid delivery device 22 in the recovery unit configured as described above will be described.

  Suppose that the piston 52 approaches the stopper 118 (a method for detecting that the piston 52 approaches the stopper 118 is not particularly limited. For example, an operator hears and detects that the noise of the high-pressure pump 218 has increased. It may be) When cleaning the inside of the delivery fluid chamber 62, the operator does not operate the four-way valve 26 at this time. On the other hand, the operator closes the first on-off valve 225 and opens the second on-off valve 227 at this time.

  If the four-way valve 26 is not operated, the movement of the piston 52 remains stopped by the stopper 118. When the high-pressure pump 218 continues to supply purified water while the movement of the piston 52 is stopped by the stopper 118, the pressure applied by the purified water to the valve body 170 of the piston 52 gradually increases. As a result of the increased pressure, when the force applied to the valve body 170 from the purified water becomes larger than the force with which the spring 176 and the raw material solution press the valve body 170 against the valve seat 172, the valve body 170 moves away from the valve seat 172. . When the valve body 170 is separated from the valve seat 172, the purified water passes through the root portion 150. The subsequent operation is the same as in the first embodiment. Since the first on-off valve 225 is closed and the second on-off valve 227 is opened, the purified water passing through the reaction product recovery line 204 flows to a waste liquid tank (not shown).

<Description of effects>
As described above, the reaction product is supplied to the delivery fluid chamber 62 of the first fluid delivery device 20 and the high-pressure water is alternately supplied to the driving fluid chamber 60, so that hydrothermal synthesis can be performed without using an inline filter. The reaction product can be recovered from the apparatus to the product tank 206. Similarly to the first embodiment, the first fluid delivery device 20 and the second fluid delivery device 22 according to this embodiment can clean the inside of the delivery fluid chamber 62 with purified water flowing out from the outer peripheral surface of the piston 52. . Further, the first fluid delivery device 20 and the second fluid delivery device 22 according to the present embodiment can clean the gap between the inner peripheral surface of the tube 54 and the inner peripheral surface of the through hole 110 and the outer peripheral surface of the piston 52. .

<Third embodiment>
Hereinafter, a third embodiment of the present invention will be described in detail with reference to the drawings. The dosing unit according to the present embodiment includes two fluid delivery devices 320 instead of the first fluid delivery device 20 and the second fluid delivery device 22 described in conjunction with the explanation of the first embodiment. Other points of the input unit according to the present embodiment are the same as those of the input unit according to the first embodiment. Therefore, detailed description thereof will not be repeated here.

  FIG. 10 is a cross-sectional view of the fluid delivery device according to the present embodiment. A fluid delivery device 320 according to the present embodiment will be described with reference to FIG. The fluid delivery device 320 includes a cylinder 350 and a piston 352. The cylinder 350 accommodates the raw material solution and purified water. The piston 352 divides the inside of the cylinder 350 into a driving fluid chamber 60 and a delivery fluid chamber 62. The piston 352 can move in the cylinder 350 while sliding along the inner surface thereof.

  The cylinder 350 includes a tube 354, a driving fluid side unit 55, and a delivery fluid side unit 356. The driving fluid side unit 55 and the delivery fluid side unit 356 are attached to both ends of the tube 354, respectively. The raw material solution enters from the outside of the cylinder 350 through the delivery fluid side unit 356. The raw material solution goes out of the cylinder 350 through the delivery fluid side unit 356.

  The delivery fluid side unit 356 according to this embodiment includes a plug 72 and a lock nut 74. The distal end of the plug 72 is inserted into the opposite end of the tube 354 on the side opposite to the drive fluid side unit 55. The lock nut 74 is attached to the tube 354 so that the plug 72 does not fall out of the tube 354.

  The plug 72 of the delivery fluid side unit 356 is provided with a hole penetrating therethrough. This hole communicates with the inside of the tube 354. A three-way valve 42 is connected to one end of the plug 72. The three-way valve 42 communicates with a hole that penetrates the plug 72. By switching the three-way valve 42, the delivery fluid can be introduced into the delivery fluid chamber 62 or the delivery fluid can be caused to flow out from the delivery fluid chamber 62. The piston 352 being moved by being pushed by purified water stops at the plug 72.

  In the case of the present embodiment, the portion of the inside of the tube 354 that is closer to the driving fluid inlet / outlet member 70 than the piston 352 and the through hole 80 that communicates with the portion are the driving fluid chamber 60. A portion of the inside of the tube 354 closer to the delivery fluid side unit 356 than the piston 352 is a delivery fluid chamber 62.

  A male screw is provided at one end of the tube 354 opposite to the drive fluid side unit 55. A female screw is provided on the inner periphery of the lock nut 74 of the delivery fluid side unit 356. The lock nut 74 of the delivery fluid side unit 356 is attached to the tube 354 by screwing the female screw of the lock nut 74 into the male screw of the tube 354.

  FIG. 11 is a partially cutaway view of the piston 352. The structure of the piston 352 will be described with reference to FIG. The piston 352 according to this embodiment includes a piston main body 430, a flow path valve 132 accommodated in the piston main body 430, and an O-ring 134.

  The piston main body 430 is a member that divides the inside of the tube 354 into a driving fluid chamber 60 and a delivery fluid chamber 62. The piston body 430 includes a communication channel 440 and a channel groove 442. The communication flow path 440 is a flow path for driving fluid that connects the driving fluid chamber 60 and the delivery fluid chamber 62. A flow path valve 132 is accommodated in the communication flow path 440. The flow path groove 442 is provided on the surface of the outer periphery of the piston body 430 that faces the delivery fluid chamber 62. The number of flow channel grooves 442 according to the present embodiment is eight.

  The structure of the communication channel 440 according to this embodiment is the same as that of the root portion 150 according to the first embodiment. Therefore, detailed description thereof will not be repeated here.

  Incidentally, as shown in FIG. 10, in the case of this embodiment, a pressure sensor 360 is attached in the middle of a pipe connected to the driving fluid inlet 82 of the driving fluid side unit 55.

  The operation of the making unit according to the present embodiment is the same as that of the making unit according to the first embodiment. However, instead of detecting the piston 52 by the delivery fluid side proximity switch 89, it is detected that the pressure of the purified water detected by the pressure sensor 230 has exceeded the threshold value, so that the piston 352 hits the plug 72. Since the operation of the making unit according to the present embodiment is the same as that of the making unit according to the first embodiment, detailed description thereof will not be repeated here.

<Description of effects>
As described above, the fluid delivery device 320 according to the present embodiment can clean the inside of the delivery fluid chamber 62 with the purified water flowing out from the outer peripheral surface of the piston 352. The reason why the inside of the delivery fluid chamber 62 can be cleaned is to satisfy the following requirements. The first requirement is that the communication channel 440 is provided in the piston body 430. The second requirement is that the flow path valve 132 is opened so that purified water can pass through the communication flow path 440.

<Description of modification>
The first fluid delivery device 20, the second fluid delivery device 22, and the fluid delivery device 320 described above are illustrated to embody the technical idea of the present invention. The first fluid delivery device 20, the second fluid delivery device 22, and the fluid delivery device 320 described above can be variously modified within the scope of the technical idea of the present invention.

  For example, the number of branch portions 152 is not limited to the number shown in FIG. Further, the angles formed by the branch portions 152 do not have to be uniform. That is, many branch portions 152 facing in a certain direction may be provided.

  In addition, the charging unit described above includes two fluid delivery devices. As a result, when the raw material solution in one fluid delivery device is supplied to the hydrothermal synthesizer and decreases, the raw material solution can be continuously supplied from the other fluid delivery device. However, the dosing unit may comprise only one fluid delivery device. Further, the recovery unit may include one fluid delivery device.

  Further, when the plug hole 180 is provided in the flow plug 136, a shaft longer than this may be used instead of the shaft 96 in the first embodiment. By using such a shaft, the air inside the plug hole 180 can also be extracted efficiently.

  Further, the length of the flow channel 142 is not particularly limited. That is, the channel groove 442 does not have to have a length that reaches the vicinity of the center of the piston main body 130.

  Further, the flow path plug 136 may not have the plug hole 180. In this case, all the purified water that has passed through the trunk portion 154 flows out from the branch portion 152.

  In the recovery unit according to the second embodiment, the fluid delivery device 320 according to the third embodiment may be used instead of the first fluid delivery device 20 and the second fluid delivery device 22.

  Moreover, the attachment form of a proximity switch is not limited to what was mentioned above. For example, instead of providing a proximity switch mounting hole in the drive fluid inlet / outlet member 70, a pair of proximity switches (not shown) are installed outside the first fluid delivery device 20, the second fluid delivery device 22, or the fluid delivery device 320. Then, the positions of the pistons 52 and 352 may be detected. In this case, an example of the position detection mechanism of the pistons 52 and 352 is as follows. First, rods (not shown) are attached to the pistons 52 and 352. A magnet (not shown) is attached to the tip of the bar. The rod passes through the plug 72 of the drive fluid side unit 55 (in this case, in order to penetrate the rod, the plug 72 is provided with a hole larger than that shown in the figure, and the hole and the rod The gap between and is sealed). Therefore, the magnet at the tip of the bar is outside the plug 72. The bar can move as the pistons 52 and 352 move. As a result, the magnet moves with the movement of the pistons 52 and 352. One of the pair of proximity switches described above is disposed around the magnet when the pistons 52 and 352 are closest to the drive fluid side unit 55. The other is arranged around the magnet when the piston 52 contacts the stopper 118 or around the magnet when the piston 352 contacts the plug 72 of the delivery fluid side unit 356.

  The specific form of the piston body is not limited to the form shown in FIG. FIG. 12 is a cross-sectional view of a piston body 230 according to a modification. 13 is a cross-sectional view taken along the line CC of FIG. A piston main body 230 according to this modification will be described with reference to FIGS. 12 and 13.

  The piston main body 230 is a member that divides the inside of the cylinder 50 into a driving fluid chamber 60 and a delivery fluid chamber 62 as in the piston main body 130 described above. The piston main body 230 according to this modification includes a driving fluid side member 240 and a delivery fluid side member 242.

  The driving fluid side member 240 has a convex portion 250 and an outer peripheral groove 252. An O-ring 134 is fitted in the outer circumferential groove 252. A valve accommodation hole 260 passes through the center of the convex portion 250. The valve accommodation hole 260 includes a driving fluid side opening 160, an opening side female screw part 162, a taper part 164, a cylindrical part 166, and an inner back side female screw part 268. The inner back side female screw portion 268 is a portion provided with a female screw provided at the back of the cylindrical portion 166 when viewed from the driving fluid chamber 60.

  The delivery fluid side member 242 has a recess 270, a flow channel 142, and a flow channel hole 272. A branch root 280 is provided at the center of the recess 270. From the branch root 280, the drive fluid passage 282 diverges radially. As shown in FIG. 13, eight drive fluid paths 282 are provided. An opening at one end of the driving fluid passage 282 is provided on the inner peripheral surface of the branch root 280. The opening at the other end of the driving fluid path 282 is provided on the outer peripheral surface of the delivery fluid side member 242.

  The piston main body 230 is assembled by inserting the convex portion 250 of the driving fluid side member 240 into the concave portion 270 of the delivery fluid side member 242. When the convex portion 250 of the driving fluid side member 240 is inserted into the concave portion 270 of the delivery fluid side member 242, the opening of the inner back side internal thread portion 268 of the driving fluid side member 240 becomes the branch root in the concave portion 270 of the delivery fluid side member 242. It will face 280. Thereby, the communication flow path 290 concerning this modification is formed. The valve accommodation hole 260 of the driving fluid side member 240 and the branching root portion 280 of the delivery fluid side member 242 are the root portions of the communication channel 290. The driving fluid passage 282 of the delivery fluid side member 242 is a branch portion of the communication passage 290. In this case, the channel hole 272 is a trunk portion of the communication channel 290.

  Incidentally, the flow passage hole 272 is not necessarily required in the piston main body 230. Without the channel hole 272, all purified water that has passed through the root portion of the communication channel 290 exits the piston body 230 from the branch portion. Since all the purified water comes from the branch portion, the cleaning power of the purified water is improved.

  FIG. 14 is a partially cutaway view of a piston body 330 according to another modification. The structure of the piston main body 330 will be described with reference to FIG. The piston main body 330 according to this modification includes a driving fluid side member 240 and a delivery fluid side member 342.

  The delivery fluid side member 342 has four flow channel grooves 142. The delivery fluid side member 342 has four drive fluid paths 282. A distribution groove 284 is provided in a portion of the outer periphery of the delivery fluid side member 342 corresponding to the outlet of the drive fluid path 282. Since the distribution groove 284 is provided, the purified water discharged from the drive fluid path 282 passes through the distribution groove 284 and reaches the entire outer periphery of the piston main body 330. Since purified water spreads over the entire outer periphery of the piston body 330, the cleaning effect can be enhanced.

[Test cleaning]
Next, the results of the test cleaning will be described. In the test cleaning, the operation of performing cleaning once during the delivery of the raw material solution for about 10 minutes is performed twice. An O-ring 134 is attached to an unused piston body 330, the piston body 330 is assembled into an unused cylinder 50, and the above-described operation is performed. An unused comparison piston body is assembled into an unused cylinder 50, and the above operation is performed. Did the operation again. Thereafter, the piston main body 330 and the comparative piston main body were respectively taken out from the cylinder 50, and the appearance thereof was compared with the inside of the delivery fluid inlet / outlet member 90. The piston body for comparison is not provided with any flow path, no flow path groove 142 is provided, and no distribution groove 284 is provided. 330 is the same member.

  FIG. 15 is a photograph showing the inside of the delivery fluid inlet / outlet member 90 after performing the above-described test cleaning using the piston body 330. FIG. 16 is a photograph showing the inside of the delivery fluid inlet / outlet member 90 after performing the above-described test cleaning using the comparative piston main body. There is no residue in the delivery fluid inlet / outlet member 90 in which the piston body 330 is incorporated, whereas in the delivery fluid inlet / outlet member 90 in which the comparative piston body is incorporated, mud residue is seen.

  As is apparent from the test cleaning result, when the piston main body 330 is used, a portion where a residue such as a gap between the bottom of the delivery fluid chamber 62 and the cylinder 50 and the piston main body 330 tends to accumulate can be cleaned well.

20 First fluid delivery device 22 Second fluid delivery device 24 Raw material tank 26 Four-way valve 28 Purified water tank 30 Pressure feed pump 32 Switching valve 34 First discharge valve 36 Second discharge valve 38 Drain tank 40 Solution supply line 42 Three-way valve 43 First 3 exhaust valve 45 4th exhaust valve 50, 350 cylinder 52, 352 piston 54, 354 tube 55 drive fluid side unit 56, 356 delivery fluid side unit 60 drive fluid chamber 62 delivery fluid chamber 70 drive fluid inlet / outlet member 72 plugs 74, 104 Lock nut 80, 110 Through hole 82 Driving fluid inlet 84 Driving fluid outlet 86, 116 Proximity switch mounting hole 88 Driving fluid side proximity switch 89 Delivery fluid side proximity switch 90 Delivery fluid inlet / outlet member 92 Stirring blade 94 Cylinder core 96 Shaft 98 Thrust Bearing 100 Drain plug 112 Delivery fluid inlet 114 Delivery fluid outlet 118 Stopper 120 Hole 130, 230, 330, 430 Piston body 132 Channel valve 134 O-ring 136 Channel plug 140, 290, 440 Communication channel 142, 442 Channel groove 150 Root portion 152 Branch portion 154 Trunk portion Minute 160 Driving fluid side opening 162 Opening side female thread portion 164 Tapered portion 166 Tube portion 168, 280 Branching root portion 170 Valve body 172 Valve seat 174 Fixing member 176 Spring 178 Reaction force member 180 Plug hole 192 Delivery fluid side opening 200 Reaction product Supply line 204 Reaction product recovery line 206 Product tank 208 Filled water tank 210 Low-pressure water supply path 212 High-pressure water supply path 214 Low-pressure pump 216, 220 Valve 218 High-pressure pump 222 Relief valve 224 Drain tank 225 First on-off valve 227 First 2 Open / close valve 2 30 Pressure sensor 240 Driving fluid side members 242 and 342 Delivery fluid side member 250 Convex portion 252 Outer peripheral groove 260 Valve housing hole 268 Inner inner side female screw portion 270 Concave portion 272 Flow passage hole 282 Driving fluid passage 284 Distribution groove 320 Fluid delivery device 360 Pressure Sensor

Claims (3)

A cylinder containing the driving fluid and the delivery fluid;
The inside of the cylinder is divided into a driving fluid chamber through which the driving fluid enters and exits and a sending fluid chamber through which the sending fluid enters and exits, and by receiving a force from the driving fluid and the sending fluid, A fluid delivery device comprising a piston moving along an inner surface,
The piston is
A piston body having a communication channel for communicating the driving fluid chamber and the delivery fluid chamber;
A seal member provided on an outer periphery of the piston body, and sealing between an inner surface of the cylinder and the piston body;
A flow path valve provided in the communication flow path and opened to allow the drive fluid to pass through the communication flow path when a difference between the pressure of the drive fluid and the pressure of the delivery fluid exceeds a threshold value. A fluid delivery device. The communication channel is
A root portion containing the flow path valve and having an opening facing the drive fluid chamber;
The fluid delivery device according to claim 1, further comprising a branch portion that branches radially from the root portion.   The fluid delivery device according to claim 2, wherein the branch portion has an opening facing an inner surface of the cylinder.

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