JP2011258424A - Gas charging apparatus and gas charging method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a gas charging apparatus and a gas charging method in which gas consumption can be reduced.SOLUTION: A gas inside a sealed container 2 is vacuum-exhausted through a chip pipe 3 disposed in a connection piping 5, the sealed container 2 is charged with low-pressure sealing gases through the chip pipe 3 and after the sealed container 2 is sealed by fusing the chip pipe 3, alternative gases different from the sealing gases are introduced to the connection piping 5, thereby returning the pressure in the connection piping 5 to an approximately atmospheric pressure.

Description

  The present invention relates to a gas filling apparatus and a gas filling method.

  In a panel for plasma display (PDP), it is necessary to enclose a luminescent gas in a gap between two glasses. In the filling device that fills the panel with luminescent gas, the panel is connected to the connection pipe provided at the end of the supply pipe that is the header of the luminescent gas, the supply pipe, the connection pipe, and the inside of the panel are evacuated, and then the supply pipe The luminescent gas is supplied to the panel, the luminescent gas is introduced into the panel through the connection pipe, and the panel is sealed.

  For example, as described in Patent Document 1, the connection between the panel and the connection pipe of the gas filling device is a chip capable of separating the panel from the connection pipe and sealing the panel and the connection pipe by fusing. A glass tube called a tube is used.

  Since the luminescent gas having a pressure lower than the atmospheric pressure is enclosed in the plasma display panel, the pressure in the connection pipe immediately after the luminescent gas is filled is also lower than the atmospheric pressure. In order to fill the next panel with luminescent gas, it is necessary to replace the tip tube attached to the connecting pipe, but if the pressure in the connecting pipe is below atmospheric pressure, the tip tube is removed due to the pressure difference. Is difficult. Therefore, in the conventional gas filling apparatus, after the chip tube is melted, the luminescent gas is further supplied to the connection pipe via the supply pipe, and the pressure in the connection pipe is restored to atmospheric pressure. However, since the luminescent gas supplied to the supply pipe and the connecting pipe for the return pressure is exhausted when the next panel is evacuated, the consumption of the luminescent gas increases and the manufacturing cost increases. Is pushed up.

  To reduce the consumption of luminescent gas, it seems to be sufficient to open the connection pipe to the atmosphere and restore the pressure. However, impurities such as moisture contained in the atmosphere easily adhere to the inner wall of the connection pipe. In addition, the time and energy required for evacuation required to completely remove air and impurities inside the panel and the connecting pipe are increased, which increases the cost.

  For this reason, in the conventional gas filling device, not only can the connection pipe be restored using the luminescent gas, but the luminescent gas can be blown into the interior of the new tip tube and the panel before completely connecting the tip tube. As much as possible, purging (cleaning) is performed to eliminate impurities in the air and the atmosphere.

  In a certain gas filling device, about 60% of the total consumption of luminescent gas is consumed when a vacuum-evacuated panel is filled with luminescent gas at a predetermined pressure via a supply pipe and a connection pipe, and about 35% is supplied. About 5% is consumed during the purge, because it is used for restoring the pressure of the piping and the connecting piping.

  Also, if the supply piping and the vacuum piping that is the header for vacuuming are separated and the supply piping is not evacuated, it may seem that the consumption of luminescent gas can be reduced. If the luminescent gas is left, there arises a problem that the components of the luminescent gas are separated due to the influence of heat or the like during evacuation and the composition is not constant. For this reason, in the conventional gas filling apparatus, it is necessary to evacuate not only the terminal connection piping but also the supply piping of the header portion at the same time.

JP 2008-27641 A

  In view of the above problems, it is an object of the present invention to provide a gas filling apparatus and a gas filling method that can reduce gas consumption.

  In order to solve the above problems, a gas filling device according to the present invention includes a connection pipe that can keep a tip pipe connected to a sealed container in a communicating state, a supply pipe that communicates with the connection pipe, the supply pipe, and the connection Vacuum exhaust means for evacuating the pipe, sealed gas supply means for supplying sealed gas to the connection pipe through the supply pipe at a predetermined pressure, and the connection pipe via the supply pipe differ from the sealed gas An alternative gas supply means for supplying an alternative gas is provided.

  Further, in the gas filling device of the present invention, the replacement gas supply means supplies the replacement gas to the connection pipe via the supply pipe before replacing the tip pipe, and the connection pipe is supplied with a substantially atmospheric pressure. After the tip pipe is arranged in the connection pipe, the alternative gas having a pressure higher than atmospheric pressure is introduced into the connection pipe through the supply pipe, and the air in the tip pipe is discharged. You may kick it out.

  Further, in the gas filling method according to the present invention, the gas in the enclosure is evacuated through the tip tube disposed in the connection pipe, the low-pressure enclosure gas is filled into the enclosure via the tip tube, and the chip After the tube is melted and the sealed container is sealed, an alternative gas different from the sealed gas is introduced into the connection pipe, and the connection pipe is restored to a substantially atmospheric pressure.

  In the gas filling method according to the present invention, before the gas in the enclosure is evacuated, the supply pipe for supplying the alternative gas to the connection pipe is evacuated, and the pressure of the supply pipe is within a predetermined time. By confirming that the pressure has decreased to a predetermined vacuum pressure, it can be ensured that the sealed gas and the alternative gas are not mixed and supplied.

  According to the present invention, since the alternative gas is used for the return pressure of the connection pipe and the purge of the tip pipe, the consumption of the enclosed gas can be reduced without increasing the cost for evacuation.

It is a block diagram of the gas filling apparatus which concerns on this invention.

  Embodiments of the present invention will now be described with reference to the drawings. FIG. 1 shows a gas filling apparatus 1 according to one embodiment of the present invention. The gas filling device 1 is a device that fills a plasma display panel 2, which is a sealed container in which a space is formed between two glasses, with a luminescent gas (filled gas). The luminescent gas is, for example, a gas obtained by mixing a small amount of xenon gas or the like with neon gas, and its composition must be strictly controlled.

  The gas filling device 1 includes a connection pipe 5 provided with a head 4 capable of holding a chip pipe 3 attached to an opening of a plasma display panel 2, and a supply pipe 6 serving as a header for supplying a luminescent gas to the connection pipe 5. And a vacuum pipe 7 which is a header for evacuating the connection pipe 5.

  The supply pipe 6 is connected with a luminescent gas cylinder (luminescent gas supply means) 8 for supplying luminescent gas and an alternative gas cylinder (alternative gas supply means) 9 for supplying alternative gas. The alternative gas is, for example, a relatively inexpensive gas consisting only of neon gas which is the main component of the luminescent gas.

  The vacuum pipe 7 is connected to a turbo molecular pump 10 that realizes a high vacuum and a roughly cited rotary pump 11 as vacuum exhaust means.

  The connection pipe 5 and the supply pipe 6 are connected to each other through a supply valve 12, and the connection pipe 5 and the vacuum pipe 7 are connected to each other through an exhaust valve 13 so as to communicate or be separated from each other. Further, a pressure equalizing valve 14 is provided between the supply pipe 6 and the vacuum pipe 7 so that they can communicate with each other and can be evacuated equally.

  Further, the gas filling device 1 opens and closes a light emission gas valve 15 for opening and closing a light emission gas supply passage from the light emission gas cylinder 8 to the supply pipe 6 and a gas supply passage for the alternative gas from the alternative gas cylinder 9 to the supply pipe 6. An alternative gas valve 16 is provided. Further, the luminescent gas and the alternative gas are supplied to the supply pipe 6 via the mass flow controller (control valve) 17. The mass flow controller 17 is controlled by a control device (not shown) and increases the pressure of the supply pipe 6 according to a program by adjusting the flow rate of the luminescent gas or the alternative gas.

  The turbo molecular pump 10 and the rotary pump 11 are connected to the vacuum pipe 7 via the shut-off valve 18 and evacuate the connection pipe 5 via the exhaust valve 13 and the vacuum pipe 7. A pressure gauge 19 for confirming the degree of vacuum is disposed in the vacuum pipe 7 in the vicinity of the shutoff valve 18. When the plasma display panel 2 is connected to the tip of the chip tube 3 held by the head 4 with glass paste or the like and the connection pipe 5 is evacuated, the gas inside the plasma display panel 2 can be evacuated through the chip tube 3. .

  After fully evacuating the plasma display panel 2, the gas filling device 1 closes the exhaust valve 13 and the shutoff valve 18, opens the luminescent gas valve 15 and the supply valve 12, and then passes from the luminescent gas cylinder 8 through the supply pipe 6. Then, the luminescent gas is supplied to the connecting pipe 5 until a predetermined sealing pressure is reached. When the pressure of the supply pipe 6 and the connection pipe 5 reaches a predetermined sealed pressure, the light emission gas valve 15 is closed and the supply of the light emission gas is stopped.

  When the tip tube 3 is melted by a burner (not shown), not only the tip tube 3 is cut but also the cut portion can be closed. Thereby, the luminous gas having a predetermined composition and a predetermined sealing pressure can be sealed in the internal space of the plasma display panel 2. At this time, the tip of the remaining portion of the tip tube 3 left in the head 4 is also sealed, so that the internal pressure of the connection pipe 5 is also maintained at the enclosed pressure.

  After the tip tube 3 is melted, the gas filling device 1 opens the alternative gas valve 16 to supply the alternative gas, and returns the supply pipe 6 and the connection pipe 5 to each other, that is, until those pressures become substantially atmospheric pressure. Introduce alternative gas. As a result, the operator or the robot can extract the remaining part of the tip tube 3 held by the head 4.

  If the operator or the robot replaces the tip tube 3 with a new one in order to fill the next plasma display panel 2 with gas, the gas filling device 1 opens the alternative gas valve 16 again to insert the tip tube 3 into the tip tube 3. Alternative gas (including the luminescent gas remaining in the supply pipe 6 and the connection pipe 5) is supplied. As a result, purge is performed to expel air and impurities existing inside the new tip tube 3 into the surrounding atmosphere. In addition, after the plasma display panel 2 is disposed at the tip of the chip tube 3, purging is performed before the chip tube 3 and the plasma display panel 2 are completely bonded with glass paste or the like, so that the internal space of the plasma display panel 2 can be obtained. A part of the impurities present in the gas can be expelled from the gap between the chip tube 3 and the plasma display panel 2 to reduce the load of vacuum exhaust.

  Thereafter, the chip tube 3 is bonded to the plasma display panel 2, the alternative gas valve 16 is closed, the exhaust valve 13 and the shutoff valve 18 are opened, and the supply pipe 6, the connection pipe 5 and the plasma display panel 2 are connected via the vacuum pipe 7. The inside of the system is evacuated to exhaust the gas in the system. At this time, by opening the pressure equalizing valve 14, the luminescent gas and alternative gas remaining in the supply pipe 6 are also evacuated.

  The light emission gas cylinder 8 and the alternative gas cylinder 9 are individually supplied and controlled by the light emission gas valve 15 and the alternative gas valve 16. For this reason, as long as there is no leak in the luminescent gas valve 15 or the alternative gas valve 16, the alternative gas cannot be mixed when the luminescent gas is supplied from the luminescent gas cylinder 8.

  In this embodiment, when evacuating the plasma display panel 2, first, the supply valve 12 and the exhaust valve 13 are closed, the pressure equalizing valve 14 is opened, the shut-off valve 18 is opened, and the supply pipe 6 and the vacuum pipe 7 are connected. First evacuate. When a predetermined time has elapsed since the start of evacuation, the pressure of the vacuum pipe 7 is confirmed by the pressure gauge 19. At this time, if the detected pressure of the pressure gauge 19 does not reach a predetermined degree of vacuum (decrease to a predetermined vacuum pressure), any one of the supply valve 12, the exhaust valve 13, the luminescent gas valve 15, and the alternative gas valve 16 Is likely to be leaking, so an alarm is issued.

  If the pressure detected by the pressure gauge 19 has decreased to a predetermined vacuum pressure within a predetermined time, it is evaluated that none of the supply valve 12, the exhaust valve 13, the luminescent gas valve 15 and the alternative gas valve 16 has leaked. it can. Therefore, in this case, the supply valve 12 and the exhaust valve 13 are opened, and the inside of the plasma display panel 2 is evacuated through the connection pipe 5 to prepare for the supply of the luminescent gas.

  As described above, in the present embodiment, by performing the vacuum evacuation in two stages, there is no leak in the luminescent gas valve 15 and the alternative gas valve 16, and the luminescent gas sealed in the plasma display panel 2 has an amount that cannot be ignored. Ensure that no alternative gas is mixed.

  Here, as the alternative gas, any gas can be used as long as it is different from the luminescent gas (encapsulated gas) and can be easily evacuated and inert as compared with the atmosphere. However, in consideration of a small amount of mixing, it is preferable that the alternative gas not only contains no impurities but also has a large amount that can be ignored with respect to the luminescent gas.

  In the gas filling apparatus 1 according to the present invention, the return pressure of the connection pipe 5 and the purge of the chip tube 3 and the plasma display panel 2 which are conventionally performed using the luminescent gas are performed using an alternative gas. Therefore, the total amount of the luminescent gas consumed and the alternative gas is the same as the total amount of the luminescent gas consumed in the conventional gas filling device. However, in the gas filling device 1, the consumption of expensive luminescent gas is reduced to about 60% compared to the conventional case. The remaining 40% consumes the substitute gas, but a large cost reduction is achieved by using the substitute gas that is significantly cheaper than the luminescent gas.

1. Gas filling device 2. Plasma display panel (enclosed container)
DESCRIPTION OF SYMBOLS 3 ... Tip pipe 4 ... Head 5 ... Connection piping 6 ... Supply piping 7 ... Vacuum piping 8 ... Luminescent gas cylinder (filled gas supply means)
9. Alternative gas cylinder (alternative gas supply means)
10 ... Turbo molecular pump (evacuation means)
11. Rotary pump (evacuation means)

Claims (5)

A connecting pipe that can keep the tip pipe connected to the enclosure in a communicating state;
A supply pipe communicating with the connection pipe;
A vacuum exhaust means for evacuating the supply pipe and the connection pipe;
An enclosed gas supply means for supplying an enclosed gas at a predetermined pressure to the connection pipe via the supply pipe;
A gas filling device comprising: an alternative gas supply means for supplying an alternative gas different from the sealed gas to the connection pipe via the supply pipe.   The alternative gas supply means supplies the alternative gas to the connection pipe via the supply pipe and replaces the connection pipe to a substantially atmospheric pressure before replacing the tip pipe. The gas filling device according to 1.   The alternative gas supply means, after disposing the tip pipe in the connection pipe, introduces the alternative gas having a pressure equal to or higher than the atmospheric pressure to the connection pipe via the supply pipe, The gas filling device according to claim 1, wherein the gas filling device can be driven out.   The gas in the enclosure is evacuated through the tip tube arranged in the connection pipe, the enclosure is filled with low-pressure enclosure gas through the tip tube, and the tip tube is melted to seal the enclosure. After stopping, an alternative gas different from the enclosed gas is introduced into the connection pipe, and the connection pipe is restored to a substantially atmospheric pressure.   Before the gas in the enclosure is evacuated, the supply pipe for supplying the alternative gas to the connection pipe is evacuated, and the pressure of the supply pipe drops to a predetermined vacuum pressure within a predetermined time. It confirms that, The gas filling method of Claim 4 characterized by the above-mentioned.

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