JP2011255250A - Oil atomizer, oil-atomizing method, and oil-diffusing pump - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an oil atomizer and an oil-atomizing method which can atomize oil without heating; and to provide an oil-diffusing pump using an oil atomizer.SOLUTION: The oil atomizer S includes an oil sump tank 10, an ultrasonic vibrator 20, a vibrator-controlling device 30, an oil-feeding device 40, and an oil surface level-controlling device 50. The oil surface level-controlling device 50 detects an oil surface level and the temperature of the oil and then makes control, on the basis of the detection, to keep the oil surface level and the temperature of the oil in a prescribed range in which oil can be atomized.

Description

  The present invention relates to an oil atomizing device, an oil atomizing method, and an oil diffusion pump, and more particularly to an oil atomizing device, an oil atomizing method, and an oil diffusion pump that atomize oil without directly heating the oil.

  An oil diffusion pump as a kind of vacuum pump, which is an example of a device that uses oil atomization, is a technology that transports gas molecules in a vacuum chamber by an oil jet in the pump and exhausts them by compressing them. This oil diffusion pump has a simple configuration consisting of a casing, jet, oil heater, and cooling pipe. Compared to other high vacuum pumps, it has fewer moving parts and is easy to maintain. It is used in vacuum equipment as a pump.

  In general, as shown in FIG. 5, the oil diffusion pump P includes a casing 110 capable of cooling the wall 111, oil (hydraulic oil) 143, electric heater 141, jet 116, jet nozzle 113, ejector (not shown), roughing pump ( The hydraulic oil 143 is configured to be vaporized (atomized) and is sprayed from the jet nozzle 113 onto the inner wall surface of the casing 110. By the injection of the hydraulic oil 143, the gas is splashed in the direction of the jet flow and is exhausted from the exhaust port 114. In FIG. 5, circles (◯) schematically show the state of particles in which oil is vaporized (atomized).

  Further, since the outer wall surface of the casing 110 of the oil diffusion pump P is cooled by the water cooling pipe 112, the hydraulic oil 143 attached to the inner wall is cooled and condensed, and an oil sump below the casing 110 of the oil diffusion pump P. Returning to the tank 146, it is reheated, vaporized again, and circulates.

  The vaporization of the hydraulic oil 143 is to generate oil vapor by heating the oil with the electric heater 141 or an electric heater (not shown) immersed in the oil. Since the steam is generated from the hydraulic oil 143 and the circulation cycle of the hydraulic oil 143 reaches a stable state, that is, to start up, it takes a heating time until the oil reaches a predetermined temperature. It takes 30 minutes or more to start P. And since vacuum exhaustion becomes possible only by injecting oil vapor stably, much energy (electric power) is needed for heating with heating time by electric heater 141. Since the oil temperature tends to decrease as the hydraulic oil 143 deteriorates, the energy (power consumption) increases as the hydraulic oil 143 deteriorates.

  For this reason, a power regulator connected to the heater 141 and a timer connected to the power regulator are provided, and the timer is set to turn on / off the power regulator according to the control data inputted in advance. A technique has been proposed in which the ON / OFF ratio and the cycle time set in the timer are set based on previously measured data (Patent Document 1).

  The technology of Patent Document 1 is an aspect of power consumption by intermittently cutting off the input power to the oil diffusion pump while considering the exhaust performance of the oil diffusion pump, and reducing the amount of power consumption for this cut-off time. It is expected to improve the balance between the engine performance and the exhaust performance.

JP 2007-23778 (paragraphs 0012, 0013, 0038, FIGS. 1 and 2)

  However, including the patent document 1, the conventional technique of oil vaporization by heating the heater must maintain the oil (hydraulic oil) at a predetermined temperature, and maintain the temperature during the operation of the oil diffusion pump. Power consumption increases, which is inconvenient for energy saving. Moreover, in order to maintain a circulation cycle, cooling with cooling water is always necessary, which is inconvenient for energy saving. For example, if the cooling water stops during operation, not only the pump function is stopped, but also the casing of the oil diffusion pump is abnormally heated, and the oil diffusion pump itself is damaged.

  In addition, in the case of heating, in order to stabilize the circulation cycle of the oil diffusion pump, it is necessary not only to raise the temperature up to a predetermined temperature but also to create a thermal equilibrium state. Therefore, a time for cooling to a temperature that does not damage the oil diffusion pump is required, and a predetermined time is required for starting and stopping the pump function. As described above, when a predetermined time is required for starting and stopping the operation, it is necessary to heat and cool even when there is no function as a pump function, which is inconvenient for energy saving.

  Furthermore, in the case of heating from the outside, the oil reservoir tank is heated by the heater from the bottom where the oil diffusion pump is arranged, so that a portion heated to several hundred degrees is exposed to the atmosphere side, and the atmosphere side periphery is exposed. Since it becomes hot, it is necessary to install a heat insulating material on the floor and to consider safety measures, and there are restrictions on the selection of the arrangement environment, which has the disadvantage of depriving the design of a vacuum device or the like. Although there is a technique in which a heater is provided inside the oil sump tank, the same consideration is necessary for heating the oil sump tank.

  In addition, when a large amount of air flows for some reason during the operation of the oil diffusion pump, there is a problem that a rapid reaction with high-temperature oil proceeds, causing a failure of the oil diffusion pump.

  An object of the present invention is to provide an oil atomization device, an oil atomization method, and an oil diffusion pump that can suppress the start and stop of operation and energy consumption in a short time by atomizing oil (hydraulic oil). It is in.

  According to the oil atomizing apparatus of the present invention, the above-described problem is that an oil reservoir means for storing oil, an ultrasonic oscillator means disposed in the oil reservoir means, and a vibrator control for controlling the ultrasonic oscillator means Means, oil supply means for supplying oil into the oil sump means, and oil level control means for controlling the oil level of the oil supplied into the oil sump means, the oil level control The means is solved by detecting the oil level and the oil temperature, and performing control to maintain the oil level and the oil temperature within a predetermined range in which the oil can be atomized based on the detection result.

  At this time, the oil level control means atomizes the oil from the oil level by oscillating at an oscillation frequency near the resonance point, and controls the size and amount of the lubricating oil particles by changing the amplitude and frequency of the ultrasonic waves. Configure.

  The oil supply means is configured to supply a predetermined amount of oil to the oil sump means at a predetermined temperature based on the detection result of the oil level supplied to the oil sump means and the detection result of the oil temperature.

  According to the oil atomization method of the present invention, the subject is an oil atomization method in which oil is atomized by ultrasonic waves, the detection step of detecting the oil level and oil temperature of the oil, It is solved by comprising the step of maintaining the oil level and the oil temperature within a predetermined range in which the oil can be atomized based on the detection step.

  In addition, according to the oil diffusion pump of the present invention, the problem is that, by the oil atomization device according to claim 1, the mist flow of the oil in the casing is ejected from the jet to exhaust the suction gas, Solved.

  It is preferable to arrange a heating source in the casing and pressurize the casing by thermal expansion of atomized oil (working oil) by heating of the heating source. Further, it is preferable to introduce gas into the casing and pressurize the inside of the casing or combine heating with a heating source and introduction of gas.

According to the present invention, the vibrator control means for controlling the ultrasonic wave transmission means arranged in the oil sump means, and the oil level for monitoring the oil level of the oil (working oil) supplied into the oil sump means. A control means is provided, and the oil level control means detects the oil level and the oil level, and performs control to maintain the oil level and the oil temperature in an appropriate range for atomizing the oil based on the detection result. Therefore, the oil can be atomized by the ultrasonic wave transmitting means without directly heating the conventional oil. More specifically, in the oil level control, the oil (hydraulic oil) is atomized from the oil surface by transmitting at an oscillation frequency near the resonance point, and the size and amount of the ejected oil particles are set to the amplitude of the ultrasonic transducer and Control is possible by changing the frequency.
And the energy-saving oil diffusion pump of the new system which can be exhausted with this atomized oil and has low operating cost can be provided.

Further, since the hydraulic oil is not directly heated for atomizing the hydraulic oil (hydraulic oil), the heater heating is less power consumption than the heating, which is economical. Further, there is no restriction on the selection of the arrangement environment, the degree of freedom of design in a vacuum device or the like can be secured, and at the same time, the start-up time and stop time can be extremely shortened.
Further, since the hydraulic oil in the oil sump tank is not heated, the temperature of the oil can be lowered, the deterioration of the oil can be reduced, and the surroundings are safe.
In addition, since the atomization phenomenon takes place instantaneously, the oil diffusion pump can be started and stopped in a few seconds, so that power has been continuously supplied to maintain a predetermined temperature. However, it is necessary to use electric power only when vacuuming (exhausting), that is, when operating, which can contribute to energy saving.

It is a composition sectional view showing the oil atomization device and oil diffusion pump of one embodiment of the present invention. It is a structure sectional view showing the oil atomization device and oil diffusion pump of other embodiments of the present invention. It is a composition sectional view showing the oil atomization device and oil diffusion pump of other embodiments of the present invention. It is a schematic block diagram of an oil atomizer. It is a cross-sectional view showing a conventional example of an oil diffusion pump.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings. The members, arrangements, and the like described below are not intended to limit the present invention and can be variously modified within the scope of the gist of the present invention.

  1 to 4 show an embodiment of the present invention. FIG. 1 is a structural sectional view showing an oil atomizing device and an oil diffusion pump. FIG. 2 is an oil atomizing device and an oil diffusion pump according to another embodiment. FIG. 3 is a structural sectional view showing an oil atomizing device and an oil diffusion pump of still another embodiment, and FIG. 4 is a schematic block diagram of the oil atomizing device.

Hereinafter, 1st Embodiment of the oil atomizer S which concerns on this invention is described with reference to FIG.1 and FIG.4. In this embodiment, the example which used the oil atomizer S for the oil diffusion pump P is shown.
The oil diffusion pump P has the same configuration as the conventional oil diffusion pump except for the oil atomizer S. That is, the oil diffusion pump P of the present embodiment includes a casing K that can cool the wall, an oil (hydraulic oil) 1, a jet 2, a jet nozzle 3, an ejector (not shown), a roughing pump (not shown), and the like. Then, the hydraulic oil 1 is vaporized (atomized) by the oil atomizer S and sprayed from the jet nozzle 3 onto the inner wall surface of the wall 5 of the casing K, and the jet direction of the hydraulic oil 1 causes the gas to travel in the traveling direction. The air is blown off and exhausted from the exhaust port 4. In FIG. 1, circles (◯) schematically indicate the state of particles in which oil is vaporized (atomized).

That is, the jet 2 is installed in the diffusion pump P, and the inside of the jet 2 of the diffusion pump P is filled with fine oil droplets. By ejecting fine oil droplets from the jet nozzle 3 formed in the jet 2 of the oil diffusion pump P, the gas is splashed in the traveling direction of the jet. The gas molecules are discharged from the exhaust port 4.
Although not shown, the oil diffusion pump P of the present embodiment uses an auxiliary pump. The auxiliary pump is a vacuum pump for maintaining the back pressure of the oil diffusion pump P below a critical value, and is also used as a roughing pump. Further, after confirming that oil droplets are ejected from the jet 2 so that the hydraulic oil 1 does not enter the vacuum chamber, the suction port 7 between the vacuum chamber and the oil diffusion pump P is opened. . For these, known means are used.

  And in order to produce an oil droplet, the oil atomizer S which concerns on this invention is used, and the oil atomizer S is ultrasonic vibration to the bottom face bottom of the oil sump tank 10, as shown in FIG. The child 20 is installed. Then, a high frequency voltage is applied to the ultrasonic transducer 20. The liquid level of the hydraulic oil 1 is vibrated by the ultrasonic vibrator 20. Fine oil droplets are generated from the hydraulic oil 1 on the liquid surface of the hydraulic oil 1. The inside of the jet 2 of the oil diffusion pump P is filled with fine oil droplets.

  In the present embodiment, the outer wall surface of the casing K of the oil diffusion pump P is cooled by the water cooling pipe 6. Therefore, as will be described later, when the hydraulic oil 1 is vaporized (atomized) (not when the oil is vaporized), when the heating device is used to pressurize the inside of the jet, the operation is vaporized (atomized). When the oil 1 adheres to the inner wall of the casing K, it cools and condenses more quickly, returns to the oil sump tank 10 below the casing K of the oil diffusion pump P, and is atomized (vaporized again) by the oil atomizer S. ), And it is a mechanism to circulate. Hereinafter, the embodiment of the oil atomizer S according to the present invention will be described in more detail.

  The oil atomizing apparatus S of the present embodiment includes an oil sump tank 10 as an oil sump means, an ultrasonic vibrator 20 as an ultrasonic oscillator means, a vibrator control device 30 as a vibrator control means, and an oil supply. An oil replenishing device 40 as means, an oil level control device 50 as oil level control means, and the like are main components.

  An oil sump tank 10 as oil sump means of this embodiment stores oil (operating oil) 1, and this oil sump tank 10 is installed in the jet 2 at a lower position of the casing K. Here, when the oil (operating oil) 1 is described, in general, the viscosity of the liquid greatly affects the ease of atomization of the liquid. The lower the viscosity, the easier the atomization. In order to atomize due to oil pumping and viscosity, (a) the oscillation frequency should be appropriate in the vicinity of the resonance point, and (b) the distance from the ultrasonic transducer to the oil surface in an appropriate range (C) It is necessary to appropriately control the oil temperature. Therefore, the hydraulic oil 1 used in the present embodiment is selected to have a vapor pressure as low as possible and a viscosity as low as possible.

  The ultrasonic vibrator 20 as the ultrasonic oscillating means is attached to the bottom of the oil reservoir 10 so as to be immersed in the hydraulic oil 1 of the oil reservoir 10, and the ultrasonic vibrator 20 will be described later. A high frequency voltage having a predetermined frequency is applied from the vibrator control device 30 as the vibrator control means.

  In this embodiment, the piezoelectric vibration used as the ultrasonic transducer 20 has a diameter of 20 mm and a thickness of 1.2 mm, and is excited at an oscillation frequency of 2.4 MHz. Further, the distance between the oil surface of the hydraulic oil 1 and the ultrasonic transducer 20 is maintained in the range of 30 to 50 mm. The oscillation frequency varies depending on the thickness and outer diameter of the ultrasonic transducer 20, and the particle diameter of the hydraulic oil 1 can be reduced by changing the frequency. When the distance from the ultrasonic transducer 20 to the oil surface is changed, the atomization efficiency changes greatly. When the distance exceeds a certain range, the atomization is not performed.

  That is, energy is given by vibration of the ultrasonic vibrator 20, but the size of the atomized oil particles changes at the vibration frequency. Optimum vibration is optimally set by appropriately setting the distance from the ultrasonic transducer 20 to the oil level of the hydraulic oil 1, the type of the hydraulic oil 1, the temperature of the hydraulic oil 1, and the height of the hydraulic oil 1. It is possible to produce fine atomized oil particles. In order to be used as the hydraulic oil 1 by the oil diffusion pump P, effective jetting from the jet nozzle 3 can be performed by atomizing so that the particle diameter becomes 10 μm or less.

  The vibrator control device 30 as the vibrator control means controls the ultrasonic vibrator 20 as the ultrasonic oscillation means. The vibrator control device 30 includes a vibrator oscillation circuit 32, an oscillation stop circuit 34, and an abnormal current detection circuit 36. As shown in FIGS. 1 and 4, the oscillator oscillation circuit 32 is supplied with a high frequency from a power source 38 via a power transformer 39, and is excited by applying a high frequency voltage to the ultrasonic transducer 20 at the oscillation frequency. In this case, the vibrator oscillation circuit 32 excites the ultrasonic vibrator 20 at a frequency of 2.4 MHz.

Note that the oscillation stop circuit 34 and the abnormal current detection circuit 36 illustrated in FIG. 1 are circuits that protect the vibrator oscillation circuit 32. Among these, the oscillation stop circuit 34 oscillates through the oscillation stop circuit 34 when an oil level abnormality signal (low level signal) is given from the level switch 51 described later via the liquid level drop abnormality detection circuit 52. When an oscillation stop signal is sent to the circuit 32 and a level signal in a predetermined range is input, a signal for restarting the oscillation of the ultrasonic transducer 20 is output.
The abnormal current detection circuit 36 is a circuit that detects the occurrence of an abnormal current in the ultrasonic transducer 20 and supplies an abnormality detection signal to the oscillation stop circuit 34. When receiving the abnormality detection signal, the oscillation stop circuit 34 sends an oscillation stop signal to the vibrator oscillation circuit 32 of the vibrator control device 30.

  The oil supply device 40 as oil supply means supplies oil into the oil sump tank 10, and includes a pipe body 42, an oil supply device 41, a heater 48, and a heater control circuit 49. The oil supply device 41 includes an oil supply tank 44, a pump 45, a valve 46, and a valve control circuit 47.

  The oil sump tank 10 and the oil tank 44 are communicated with each other by a pipe body 42. The valve 46 and the heater 48 are disposed between the oil sump tank 10 and the oil tank 44, and the heater 48 is connected to the oil sump tank 10. The heater control circuit 49 controls the hydraulic oil 1 to a predetermined temperature, and the valve control circuit 47 controls the valve 46 and the pump 45 to supply a predetermined amount to the oil sump tank 10. In this embodiment, the temperature of the hydraulic oil 1 in the oil sump tank 10 is detected by an oil temperature detector 53 described later, and the temperature information of the hydraulic oil 1 is sent to the heater control circuit 49 via the oil temperature abnormality detection circuit 55. It is configured to provide feedback. Thereby, the temperature of the hydraulic oil 1 to be supplied is appropriately controlled, and the temperature of the oil sump tank 10 is kept constant even when the hydraulic oil 1 is supplied.

  The oil replenishing device 40 supplies oil by a level switch 51 described later. In the present embodiment, the upper oil level of the range in which the hydraulic oil 1 can be atomized is set to a high level, and the lower limit is set to a low level. It is set in advance. When the oil supply device 40 receives the low level signal given from the level switch 51, the pump 45, the valve 46, and the heater 48 of the oil supply device 40 are controlled and driven by the valve control circuit 47 and the heater control circuit 49, Continue driving until a high level signal is received.

The oil level control device 50 as oil level control means includes a level switch 51 (float switch in the present embodiment) and an oil temperature detector 53. The level switch 51 is connected to the liquid level drop abnormality detection circuit 52, and the oil temperature detector 53 is connected to the oil temperature abnormality detection circuit 55.
The oil level control device 50 of the present embodiment controls the oil level and temperature of the hydraulic oil 1 supplied into the oil sump tank 10, and detects the oil level and oil temperature in the oil sump tank 10. Then, based on the detection result, control is performed to maintain the oil level and the oil temperature within a predetermined range in which the hydraulic oil 1 can be atomized.

  The oil sump tank 10 is provided with a position detector that can detect the upper limit position 51a and the lower limit position 51b of the oil level of the hydraulic oil 1, and detects when the level switch 51 approaches the upper limit position 51a and the lower limit position 51b. A signal is transmitted. The liquid level drop abnormality detection circuit 52 is configured to transmit an abnormality signal (low level signal) when the oil level of the hydraulic oil 1 in the oil sump tank 10 exceeds the lower limit position 51b.

  The oil temperature detector 53 detects the temperature of the hydraulic oil 1 in the oil sump tank 10, detects an abnormal temperature increase / decrease of the hydraulic oil 1, and deviates from the predetermined temperature range. Sometimes, an abnormality signal is generated by the oil temperature abnormality detection circuit 55.

  The level of the oil level of the hydraulic oil 1 in the oil sump tank 10 is detected by the level switch 51. When the oil level decreases, a predetermined amount of the hydraulic oil 1 is replenished from the oil replenishing device 40 at a predetermined temperature. A certain level is secured within an appropriate range.

  Then, the level switch 51 is set in advance so as to correspond to the upper limit position 51a and the lower limit position 51b of the oil level of the hydraulic oil 1, and is configured to be atomized within this range. Under the above conditions, when the ultrasonic vibrator 20 vibrates and emits ultrasonic waves toward the oil surface of the hydraulic oil 1, an oil column rises from the oil surface, and fine mist oil is released from the surface. The As a result, when used in the oil diffusion pump P, the inside of the jet 2 is filled with the atomized hydraulic oil 1, and the atomized oil fine particles are ejected from the jet nozzle 3, thereby serving as an exhaust pump.

When the oil temperature of the hydraulic oil 1 in the oil sump tank 10 rises above the set temperature, the oil temperature abnormality detection circuit 55 detects an abnormal oil temperature rise from the detection signal of the oil temperature detector 53 and oscillates. The stop circuit 34 is activated to stop the vibration of the ultrasonic transducer 20.
Further, when the supply of the hydraulic oil 1 is started by the oil supply device 40, the liquid level lowering abnormality detection circuit 52 operates when a timer (not shown) is operated and does not become a high level even after a preset time, An alarm signal is output to an alarm device (not shown). Thus, the ultrasonic vibrator 20 is exposed to the air so as not to oscillate, and the oil level of the oil sump tank 10 is maintained within an appropriate range in which the hydraulic oil 1 is easily atomized. .

  As is apparent from the above description, according to the present invention, the high frequency voltage is applied to the ultrasonic vibrator immersed in the hydraulic oil, and the oil is atomized from the oil surface by oscillating at an oscillation frequency near the resonance point. The size and amount of the lubricating oil particles can be controlled by changing the amplitude and frequency of the ultrasonic waves, and the atomized oil can be exhausted with the jetting oil, thereby providing a new exhaust method with low operating cost.

Next, operation | movement of the oil atomizer S which consists of the said structure is demonstrated.
When the ultrasonic transducer 20 is vibrated in the liquid, ultrasonic waves are emitted toward the liquid surface. Cavitation occurs when the liquid cannot follow the repeated pressurization and depressurization by this ultrasonic wave. When the ultrasonic vibrator 20 is vibrated at a position close to the liquid level to cause cavitation, the liquid rises in the form of a water column from the liquid surface, and the liquid is discharged as fine mist droplets from the surface. That is, the hydraulic oil 1 is atomized from the oil surface of the hydraulic oil 1 by applying high-frequency power to the ultrasonic vibrator 20 immersed in the hydraulic oil 1 and oscillating at an oscillation frequency near the resonance point.

  And when using it for the oil diffusion pump P, high atomization is performed by filling the atomized hydraulic oil 1 in the jet 2. In addition, when using the oil atomizer S for the oil diffusion pump P, the condensed oil accumulates at the bottom of the pump body and is discharged from a drain port (not shown). From this drain port, the oil may be returned to the hydraulic oil lubricating means and circulated.

  Next, FIG. 2 shows another embodiment of the present invention. Since the hydraulic oil 1 atomized by the oil atomizer S may not be accompanied by an expected pressure increase, an example of increasing the internal temperature of the jet 2 in order to increase the atmospheric pressure in the jet 2 of the oil diffusion pump P It is. In the following embodiments including this embodiment, the same members, devices, circuits, arrangements, controls and the like as those in the above embodiments are given the same reference numerals and explanations thereof are omitted.

  In the present embodiment, as shown in FIG. 2, a heater H is disposed near the intermediate position in the jet 2 to pressurize the inside of the jet 2 filled with the atomized hydraulic oil 1 as shown in FIG. is doing. Further, in the jet 2, a pressure measuring element capable of measuring the pressure in the jet 2 and a temperature measuring element capable of measuring the temperature in the jet 2 are arranged, respectively. The heater H is turned on or off or the power supply to the heater H is adjusted by the illustrated control circuit.

  The heating by the heater H here is not for atomizing the hydraulic oil 1 but for increasing the internal temperature of the jet 2, increasing the pressure, and ejecting the atomized hydraulic oil 1 from the jet nozzle 3. Therefore, the hydraulic oil 1 is not directly heated for the atomization (vaporization) of oil, the oil sump tank 10 is not heated similarly, and the heater H does not require large electric power. .

  Furthermore, FIG. 3 shows another embodiment of the present invention. As in the above embodiment, since the hydraulic oil 1 atomized by the oil atomizer S may not be accompanied by the expected pressure increase, in order to increase the atmospheric pressure in the jet 2 of the oil diffusion pump P, In the embodiment, an example of introducing gas is shown. That is, an example of positively introducing a normal temperature gas or a heated gas in order to promote a pressure increase is shown.

  In FIG. 3, reference numeral 70 denotes a gas source. From the gas source 70, gas is supplied to the jet 2 through the valve 72 and the gas adjusting device (conditioner) 74 through the introduction pipe 76. Inside the jet 2, an oil sump tank 10 having an ultrasonic transducer 20 attached to the bottom is accommodated. Therefore, it is possible to use the oil atomized by the jet 2.

Next, examples and comparative examples according to the present invention will be described.
[Illustration]
As an example, the following apparatus was used.
Exhaust port diameter 250mm
Pumping speed 2900L / sec
Ultimate pressure 6.7 × 10 −6 Pa (Pascal) or less Critical back pressure 0.3 Pa
Oil pack amount 1 × 10-3 mg / cm2 min
Required power 0.2kW
Cooling water 2.3L / min
Hydraulic oil Lion S1L
Auxiliary pump 500L / min

[Comparative example]
As a comparative example, the following apparatus was used.
Exhaust port diameter 250mm
Pumping speed 2900L / sec
Ultimate pressure 6.7 × 10 −6 Pa (Pascal) or less Critical back pressure 0.3 Pa
Oil pack amount 1 × 10-3 mg / cm2 min
Required power 1.8KW (200V)
Cooling water 2.3L / min
Hydraulic oil Lion S1L 251 ° C when vapor pressure is 133Pa (Diffusion pump operating temperature)
Auxiliary pump 500L / min

[Contrast between actual example and comparative example]
The actual power requirement is about 0.2 KW, which can be reduced by about 90% compared to 1.8 KW (at 200 V) in the comparative example. In addition, the start-up time took about 30 minutes in the comparative example, but it took only 1 minute in the actual example, and the stop time took about 30 minutes in the past, but it took only 1 minute in the actual example. This was required to be heated to about 251 ° C. when the pump was operated, but in the present invention, it can be determined that the heating is not performed.

1 oil (hydraulic oil)
2 Jet 3 Jet nozzle 4 Exhaust port 6 Cold water pipe 7 Suction port 10 Oil sump tank (oil sump means)
20 Ultrasonic transducer (ultrasonic oscillation means)
30 vibrator control device (vibrator control means)
32 Oscillator oscillation circuit 34 Oscillation stop circuit 36 Abnormal current detection circuit 40 Oil supply device (supply means)
41 Oil supply device 42 Tube 44 Oil supply tank 45 Pump 46 Valve 47 Valve control circuit 48 Heater 49 Heater control circuit 50 Oil level control device (oil level control means)
51 Float switch (level switch)
51a Upper limit position 51b Lower limit position 52 Liquid level drop abnormality detection circuit 53 Oil temperature detector 55 Oil temperature abnormality detection circuit 70 Gas source 72 Valve 74 Gas regulator (conditioner)
76 Introduction pipe P Oil diffusion pump H Heater K Casing S Oil atomizer

Claims (8)

Oil reservoir means for storing oil, ultrasonic oscillation means disposed in the oil reservoir means, vibrator control means for controlling the ultrasonic oscillation means, and oil supply for supplying oil into the oil reservoir means Means, and oil level control means for controlling the oil level of the oil supplied into the oil sump means,
The oil level control means detects the oil level and the oil temperature, and performs control to maintain the oil level and the oil temperature within a predetermined range in which the oil can be atomized based on the detection result. Oil atomizer.   The oil level control means atomizes oil from the oil surface by oscillating at an oscillation frequency near the resonance point, and controls the size and amount of lubricating oil particles by changing the amplitude and frequency of ultrasonic waves. The oil atomizer of Claim 1 characterized by these.   The oil supply means supplies a predetermined amount of oil to the oil sump means at a predetermined temperature based on the detection result of the oil level supplied to the oil sump means and the detection result of the oil temperature. Item 1. The oil atomizer according to Item 1. An oil atomization method for atomizing oil by ultrasonic waves,
And a step of detecting an oil level and an oil temperature of the oil, and a step of maintaining the oil level and the oil temperature within a predetermined range in which the oil can be atomized based on the detection step. Oil atomization method.   An oil diffusion pump according to claim 1, wherein the oil atomizing device discharges the suction gas by injecting a mist flow of oil in the casing from a jet.   6. The oil diffusion pump according to claim 5, wherein a heat source is disposed in the casing, and the inside of the casing is pressurized by thermal expansion of atomized oil by heating of the heat source.   The oil diffusion pump according to claim 5, wherein gas is introduced into the casing to pressurize the casing.   A heating source is arranged in the casing, and the inside of the casing is pressurized by thermal expansion of atomized oil by heating of the heating source, and the inside of the casing is pressurized by introducing gas into the casing. The oil diffusion pump according to claim 5.

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