JP2011242610A - Photographic lens, and inspection device including the same - Google Patents

Photographic lens, and inspection device including the same Download PDF

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JP2011242610A
JP2011242610A JP2010114767A JP2010114767A JP2011242610A JP 2011242610 A JP2011242610 A JP 2011242610A JP 2010114767 A JP2010114767 A JP 2010114767A JP 2010114767 A JP2010114767 A JP 2010114767A JP 2011242610 A JP2011242610 A JP 2011242610A
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JP5506535B2 (en
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Hirotaka Oshio
裕隆 大塩
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Tochigi Nikon Corp
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Abstract

PROBLEM TO BE SOLVED: To provide a photographic lens having minimal aberration fluctuation caused by magnification fluctuation, and having high optical performance, and to provide an inspection device including the photographic lens.SOLUTION: A photographic lens includes in order from an object side: a first lens group G1 having positive refractive power; a second lens group G2 having positive refractive power; wherein the first lens group includes a first-a lens group G1a having positive refractive power, a diaphragm SP and a first-b lens group having positive refractive power. The first-a lens group includes a positive lens L1 with a convex surface directed to the object side, a positive lens L2 with a convex surface directed to the object side, and a negative lens L3 with a strong concave surface directed to the image side. The first-b lens group includes a negative meniscus lens L4 with a concave surface directed to the object side, and a positive lens L5. The second lens group includes a biconcave lens L6 and a positive meniscus lens L7 with a convex surface directed to the image side. In the case of focusing from an object at infinity to an object at a close distance, the first lens group and the second lens group move toward the object side by different moving amount respectively, so as to increase a distance between the first lens group and the second lens group. The photographic lens satisfies appropriately set conditions.

Description

本発明は、撮影レンズ及びこの撮影レンズを備えた検査装置に関する。   The present invention relates to a photographic lens and an inspection apparatus including the photographic lens.

近年、シートや印刷面などの外観検査に用いられる撮影レンズは、検査対象物や撮像素子の高精細化に伴い、使用する撮影レンズに対する高性能化が要求されている。具体的には、解像力の向上をはじめとして、撮像素子の大型化に伴うイメージサイズの拡大、像面湾曲、歪曲収差の大幅な低減などが要求されている。また、検査対象物の大きさが多様化し、それに対応する外観検査装置も多種必要になっている。このような要求に応えるため、変倍可能な撮影レンズが知られている(例えば、特許文献1,2参照)。特許文献1に記載の撮影レンズは、倍率変動範囲内で像面湾曲と歪曲収差とが良好に補正されたものである。特許文献2に記載の撮影レンズは、倍率変動範囲内で軸上色収差と倍率色収差とが良好に補正されたものである。   2. Description of the Related Art In recent years, taking lenses used for visual inspection of sheets, printed surfaces, and the like have been required to have higher performance with respect to taking lenses to be used as inspection objects and image sensors have become higher in definition. Specifically, there is a demand for an increase in image size, a curvature of field, a significant reduction in distortion, and the like accompanying an increase in the size of the image sensor, including an improvement in resolution. In addition, the sizes of inspection objects are diversified, and various appearance inspection apparatuses corresponding to the sizes are required. In order to meet such a demand, a photographic lens capable of zooming is known (see, for example, Patent Documents 1 and 2). The photographic lens described in Patent Document 1 is a lens in which the curvature of field and the distortion are well corrected within the magnification variation range. The photographic lens described in Patent Document 2 is a lens in which axial chromatic aberration and chromatic aberration of magnification are well corrected within a magnification variation range.

特開2000−284172号公報JP 2000-284172 A 特開2005−189727号公報JP 2005-189727 A

しかしながら、従来の撮影レンズでは、倍率変動に伴う球面収差及びコマ収差の変動を抑制することが困難となるため、使用倍率によっては像の解像力が劣化するという問題があった。   However, in the conventional photographing lens, it is difficult to suppress the variation in spherical aberration and coma due to the variation in magnification, so that there is a problem that the resolution of the image deteriorates depending on the magnification used.

本発明は、このような問題に鑑みてなされたものであり、構成レンズ枚数を抑えつつ、使用倍率範囲内で球面収差、軸上色収差、倍率色収差等の諸収差が良好に補正され、さらに倍率変動に伴う収差変動が小さく、像の中心から周辺にわたり高い光学性能を有する撮影レンズ及びこの撮影レンズを備えた検査装置を提供することを目的とする。   The present invention has been made in view of such problems, and various aberrations such as spherical aberration, axial chromatic aberration, and lateral chromatic aberration are satisfactorily corrected within a usable magnification range while suppressing the number of constituent lenses. An object of the present invention is to provide a photographic lens having a small aberration variation due to the variation and having high optical performance from the center to the periphery of an image, and an inspection apparatus including the photographic lens.

このような目的を達成するため、本発明は、物体側より順に並んだ、正の屈折力を持つ第1レンズ群と、正の屈折力を持つ第2レンズ群とを有する撮影レンズにおいて、前記第1レンズ群は、物体側から順に並んだ、正の屈折力を持つ第1aレンズ群と、絞りと、正の屈折力を持つ第1bレンズ群とを有し、前記第1aレンズ群は、物体側から順に並んだ、物体側に凸面を向けた正レンズと、物体側に凸を向けた正レンズと、像側に強い凹面を向けた負レンズとを有し、前記第1bレンズ群は、物体側から順に並んだ、物体側に凹面を向けた負メニスカスレンズと、正レンズとを有し、前記第2レンズ群は、物体側から順に並んだ、両凹レンズと、像側に凸面を向けた正メニスカスレンズとを有し、無限遠物体から近距離物体に焦点合わせをする際に、前記第1レンズ群と前記第2レンズ群との間隔が増大するように、前記第1レンズ群及び前記第2レンズ群が異なる移動量で光軸に沿って物体側に移動し、前記第2レンズ群を構成する両凹レンズの像側の曲率半径をRmとし、前記第2レンズ群を構成する正メニスカスレンズの物体側の曲率半径をRpとしたとき、次式 |(Rm+Rp)/(Rm−Rp)| < 0.25 の条件を満足する。   In order to achieve such an object, the present invention provides a photographing lens having a first lens group having a positive refractive power and a second lens group having a positive refractive power, which are arranged in order from the object side. The first lens group includes a 1a lens group having a positive refractive power, arranged in order from the object side, a stop, and a 1b lens group having a positive refractive power, and the 1a lens group includes: A positive lens having a convex surface facing the object side, a positive lens having a convex surface facing the object side, and a negative lens having a strong concave surface facing the image side, arranged in order from the object side, A negative meniscus lens having a concave surface facing the object side, and a positive lens arranged in order from the object side, and the second lens group has a biconcave lens arranged in order from the object side, and a convex surface on the image side. With a positive meniscus lens to focus on objects from infinity to short distances The first lens group and the second lens group move toward the object side along the optical axis with different movement amounts so that the distance between the first lens group and the second lens group increases. When the radius of curvature on the image side of the biconcave lens constituting the second lens group is Rm, and the radius of curvature on the object side of the positive meniscus lens constituting the second lens group is Rp, the following formula | (Rm + Rp) /(Rm−Rp)|<0.25 is satisfied.

なお、本発明の撮影レンズにおいて、前記第2レンズ群のd線(波長587.56nm)における屈折力をΦ2とし、前記第2レンズ群を構成する両凹レンズと正メニスカスレンズとの間に形成される空気レンズのd線における屈折力をΦ2Aとしたとき、次式 −0.65 < Φ2/Φ2A < −0.08 の条件を満足することが好ましい。   In the photographic lens of the present invention, the refractive power at the d-line (wavelength 587.56 nm) of the second lens group is Φ2, and it is formed between the biconcave lens and the positive meniscus lens constituting the second lens group. When the refractive power at the d-line of the air lens is Φ2A, it is preferable to satisfy the following condition: −0.65 <Φ2 / Φ2A <−0.08.

また、本発明の撮影レンズにおいて、前記第1bレンズ群を構成する正レンズは、像側に凸面を向けた正メニスカスレンズであることが好ましい。   In the photographing lens of the present invention, it is preferable that the positive lens constituting the 1b lens group is a positive meniscus lens having a convex surface facing the image side.

また、本発明の撮影レンズにおいて、無限遠物体に焦点合わせをした際の前記撮影レンズ全系のd線における屈折力をΦiとし、前記第1レンズ群のd線における屈折力をΦ1とし、前記第2レンズ群のd線における屈折力をΦ2としたとき、次式 0.7 < Φ1/Φi < 1.2 及び 0.07 < Φ2/Φ1 < 0.37の条件を満足することが好ましい。   In the photographic lens of the present invention, the refractive power of the entire photographic lens system at the d-line when focusing on an object at infinity is Φi, the refractive power of the first lens group at the d-line is Φ1, When the refractive power at the d-line of the second lens group is Φ2, it is preferable to satisfy the following conditions: 0.7 <Φ1 / Φi <1.2 and 0.07 <Φ2 / Φ1 <0.37.

また、本発明の撮影レンズにおいて、前記第1bレンズ群のd線における屈折力をΦ1bとし、前記第1bレンズ群を構成する負メニスカスレンズのd線における屈折力をΦ1mとしたとき、次式 −1.0 < Φ1b/Φ1m < −0.4 の条件を満足することが好ましい。   In the photographic lens of the present invention, when the refractive power at the d-line of the 1b lens group is Φ1b and the refractive power at the d-line of the negative meniscus lens constituting the 1b lens group is Φ1m, It is preferable that the condition of 1.0 <Φ1b / Φ1m <−0.4 is satisfied.

また、本発明の撮影レンズにおいて、近距離物体に焦点合わせをした際の前記撮影レンズ全系のd線における屈折力をΦnとし、無限遠物体から近距離物体に焦点合わせをする際の前記第1レンズ群と前記第2レンズ群との間隔の変化をΔDとしたとき、次式 |(Φn−Φi)/ΔD| < 0.35 の条件を満足することが好ましい。   In the photographic lens of the present invention, the refractive power at the d-line of the entire photographic lens system when focusing on a short-distance object is Φn, and the focusing is performed from an infinite object to a short-distance object. When the change in the distance between the first lens group and the second lens group is ΔD, it is preferable to satisfy the following condition: | (Φn−Φi) / ΔD | <0.35.

また、本発明の検査装置は、物体からの光を所定の位置に結像させる上記撮影レンズを備えている。   The inspection apparatus of the present invention includes the above-described photographing lens that forms an image of light from an object at a predetermined position.

本発明によれば、構成レンズ枚数を抑えつつ、使用倍率範囲内で球面収差、軸上色収差、倍率色収差等の諸収差が良好に補正され、さらに倍率変動に伴う収差変動が小さく、像の中心から周辺にわたり高い光学性能を有する撮影レンズ及びこの撮影レンズを備えた検査装置を提供することができる。   According to the present invention, various aberrations such as spherical aberration, axial chromatic aberration, and lateral chromatic aberration are satisfactorily corrected within the working magnification range while suppressing the number of constituent lenses, and further, the variation in aberration due to the variation in magnification is small and the center of the image is reduced. It is possible to provide an imaging lens having high optical performance from the periphery to the periphery and an inspection apparatus including the imaging lens.

第1実施例に係る撮影レンズの構成及び無限遠合焦状態から近距離合焦状態への合焦変化における各レンズ群の移動の様子を示す断面図を示す。FIG. 3 is a cross-sectional view illustrating a configuration of a photographic lens according to a first example and a state of movement of each lens unit in a focus change from an infinitely focused state to a short-distance focused state. 第1実施例に係る撮影レンズにおいて、無限遠物体に焦点合わせをした際の諸収差図である。FIG. 6 is a diagram illustrating various aberrations when focusing on an object at infinity in the photographing lens according to the first example. 第1実施例に係る撮影レンズにおいて、近距離物体に焦点合わせをした際の諸収差図である。FIG. 7 is a diagram illustrating various aberrations when focusing on a short-distance object in the photographing lens according to the first example. 第2実施例に係る撮影レンズの構成及び無限遠合焦状態から近距離合焦状態への合焦変化における各レンズ群の移動の様子を示す断面図を示す。Sectional drawing which shows the mode of a structure of the photographic lens which concerns on 2nd Example, and the mode of a movement of each lens group in the focus change from an infinite focus state to a short distance focus state is shown. 第2実施例に係る撮影レンズにおいて、無限遠物体に焦点合わせをした際の諸収差図である。FIG. 10 is a diagram illustrating various aberrations when focusing on an object at infinity in the photographing lens according to Example 2. 第2実施例に係る撮影レンズにおいて、近距離物体に焦点合わせをした際の諸収差図である。FIG. 10 is a diagram illustrating various aberrations when focusing on a short-distance object in the photographing lens according to Example 2. 第3実施例に係る撮影レンズの構成及び無限遠合焦状態から近距離合焦状態への合焦変化における各レンズ群の移動の様子を示す断面図を示す。Sectional drawing which shows the mode of the structure of the imaging lens which concerns on 3rd Example, and the mode of a movement of each lens group in the focus change from an infinite focus state to a short-distance focus state is shown. 第3実施例に係る撮影レンズにおいて、無限遠物体に焦点合わせをした際の諸収差図である。FIG. 12 is a diagram illustrating various aberrations when focusing on an object at infinity in the photographing lens according to the third example. 第3実施例に係る撮影レンズにおいて、近距離物体に焦点合わせをした際の諸収差図である。FIG. 11 is a diagram illustrating various aberrations when focusing on a short-distance object in the photographing lens according to the third example. 本発明に係る撮影レンズを用いた検査装置の要部概略図である。It is a principal part schematic diagram of the inspection apparatus using the photographic lens concerning the present invention.

以下、本実施形態について、図面を参照しながら説明する。図1に示すように、本実施形態に係る撮影レンズは、物体側より順に並んだ、正の屈折力を持つ第1レンズ群G1と、正の屈折力を持つ第2レンズ群G2とを有する。第1レンズ群G1は、物体側から順に並んだ、正の屈折力を持つ第1aレンズ群G1aと、絞りSPと、正の屈折力を持つ第1bレンズ群G1bとを有し、第1aレンズ群G1aは、物体側から順に並んだ、物体側に凸面を向けた正レンズL1と、物体側に凸面を向けた正レンズL2と、像側に強い凹面を向けた負レンズL3とを有し、第1bレンズ群G1bは、物体側から順に並んだ、物体側に凹面を向けた負メニスカスレンズL4と、像側に凸面を向けた正メニスカスレンズL5とを有する。   Hereinafter, the present embodiment will be described with reference to the drawings. As shown in FIG. 1, the photographing lens according to the present embodiment includes a first lens group G1 having a positive refractive power and a second lens group G2 having a positive refractive power, which are arranged in order from the object side. . The first lens group G1 includes, in order from the object side, a first a lens group G1a having a positive refractive power, a stop SP, and a first b lens group G1b having a positive refractive power. The group G1a includes, in order from the object side, a positive lens L1 having a convex surface facing the object side, a positive lens L2 having a convex surface facing the object side, and a negative lens L3 having a strong concave surface facing the image side. The first-b lens group G1b includes a negative meniscus lens L4 having a concave surface facing the object side and a positive meniscus lens L5 having a convex surface facing the image side, which are arranged in order from the object side.

このように本実施形態に係る撮影レンズの第1レンズ群G1は、略クセノター型のレンズである。クセノター型のレンズは、絞りSPの前後で屈折力の対称性が高く、その対称性により歪曲収差や倍率色収差などの補正が容易である。また、絞りSPの後方に配置させた負メニスカスレンズL4により、像の周辺に至るまでコマ収差を良好に補正することができる。   As described above, the first lens group G1 of the photographing lens according to the present embodiment is a substantially xenoter type lens. The xenoter lens has high refractive power symmetry before and after the stop SP, and correction of distortion aberration, lateral chromatic aberration, and the like is easy due to the symmetry. Further, the coma aberration can be favorably corrected up to the periphery of the image by the negative meniscus lens L4 disposed behind the stop SP.

また、本実施形態に係る撮影レンズの第2レンズ群G2は、物体側から順に並んだ、両凹レンズL6と、像側に凸面を向けた正メニスカスレンズL7とを有し、これら両凹レンズL6と正メニスカスレンズL7とにより負の屈折力を持つ空気レンズを形成することにより、非点収差と倍率色収差を補正することができる。そしてこの構成により、後述する条件式(1)の効果を最大限に発揮することができる。   The second lens group G2 of the photographing lens according to the present embodiment includes a biconcave lens L6 and a positive meniscus lens L7 having a convex surface facing the image side, which are arranged in order from the object side. Astigmatism and lateral chromatic aberration can be corrected by forming an air lens having negative refractive power with the positive meniscus lens L7. And by this structure, the effect of conditional expression (1) mentioned later can be exhibited to the maximum.

さらに、本実施形態に係る撮影レンズは、無限遠物体から近距離物体に焦点合わせをする際に、第1レンズ群G1と第2レンズ群G2との間隔が増大するように、第1レンズ群G1及び第2レンズ群G2が異なる移動量で光軸に沿って物体側に移動することにより、使用倍率範囲内で諸収差の変動を抑制することが可能となる。   Furthermore, the photographing lens according to the present embodiment has the first lens group so that the distance between the first lens group G1 and the second lens group G2 increases when focusing from an object at infinity to an object at a short distance. By moving the G1 and the second lens group G2 toward the object side along the optical axis with different movement amounts, it becomes possible to suppress fluctuations in various aberrations within the use magnification range.

そして、上記構成の下、本実施形態に係る撮影レンズは、第2レンズ群G2を構成する両凹レンズL6の像側の曲率半径をRmとし、第2レンズ群G2を構成する正メニスカスレンズL7の物体側の曲率半径をRpとしたとき、以下の条件式(1)を満足する。   In the photographic lens according to this embodiment having the above-described configuration, the radius of curvature of the image side of the biconcave lens L6 constituting the second lens group G2 is Rm, and the positive meniscus lens L7 constituting the second lens group G2 is used. When the radius of curvature on the object side is Rp, the following conditional expression (1) is satisfied.

|(Rm+Rp)/(Rm−Rp)| < 0.25 …(1)   | (Rm + Rp) / (Rm−Rp) | <0.25 (1)

上記条件式(1)は、第2レンズ群G2を構成する両凹レンズL6の像側の曲率半径と、第2レンズ群G2を構成する正メニスカスレンズL7の物体側の曲率半径との適切な範囲を示すものである。この条件式(1)の上限値を上回ると、これらレンズL6,L7により第2レンズ群G2内に形成される空気レンズが適切な形状をとることができず、メリジオナル像面の湾曲が大きくなりすぎて、非点収差の補正が困難となる。また、軸外光線の前記空気レンズに対する入射角と射出角とが適切な角度から大きく外れるため、コマ収差が増大し補正が困難となる。   Conditional expression (1) is an appropriate range between the radius of curvature on the image side of the biconcave lens L6 constituting the second lens group G2 and the radius of curvature on the object side of the positive meniscus lens L7 constituting the second lens group G2. Is shown. If the upper limit of conditional expression (1) is exceeded, the air lens formed in the second lens group G2 by these lenses L6 and L7 cannot take an appropriate shape, and the curvature of the meridional image plane becomes large. Thus, correction of astigmatism becomes difficult. In addition, since the incident angle and the exit angle of off-axis rays with respect to the air lens are greatly deviated from appropriate angles, coma increases and correction is difficult.

なお、本実施形態の効果を確実にするため、条件式(1)の上限値を0.20にすることが好ましい。   In order to secure the effect of the present embodiment, it is preferable to set the upper limit of conditional expression (1) to 0.20.

また、本実施形態に係る撮影レンズにおいて、第2レンズ群G2のd線における屈折力をΦ2とし、第2レンズ群G2を構成する両凹レンズL6と正メニスカスレンズL7との間に形成される空気レンズのd線における屈折力をΦ2Aとしたとき、以下の条件式(2)を満足することが好ましい。   In the photographic lens according to the present embodiment, the refractive power at the d-line of the second lens group G2 is Φ2, and the air formed between the biconcave lens L6 and the positive meniscus lens L7 constituting the second lens group G2. When the refractive power at the d-line of the lens is Φ2A, it is preferable that the following conditional expression (2) is satisfied.

−0.65 < Φ2/Φ2A < −0.08 …(2)   −0.65 <Φ2 / Φ2A <−0.08 (2)

上記条件式(2)は、第2レンズ群G2の屈折力と、第2レンズ群G2内に形成される空気レンズの屈折力との適切な範囲を示すものである。この条件式(2)の下限値を下回ると、第2レンズ群G2におけるペッツバール和が大きくなりすぎ、像面湾曲がアンダーに大きくなり良好に補正することが困難となる。また、この条件式(2)の上限値を上回ると、第2レンズ群G2のパワーバランスが大きく崩れ、正の方向に大きな歪曲収差が発生するうえ、倍率色収差も増大するため、これらを良好に補正することが困難となる。   Conditional expression (2) represents an appropriate range between the refractive power of the second lens group G2 and the refractive power of the air lens formed in the second lens group G2. If the lower limit value of conditional expression (2) is not reached, the Petzval sum in the second lens group G2 becomes too large, and the field curvature becomes too large, making it difficult to correct well. If the upper limit value of the conditional expression (2) is exceeded, the power balance of the second lens group G2 is greatly lost, large distortion occurs in the positive direction, and chromatic aberration of magnification also increases. It becomes difficult to correct.

なお、本実施形態の効果を確実にするため、条件式(2)の下限値を−0.56にすることが好ましい。また、本実施形態の効果を確実にするため、条件式(2)の上限値を−0.11にすることが好ましい。   In order to secure the effect of the present embodiment, it is preferable to set the lower limit of conditional expression (2) to −0.56. In order to secure the effect of the present embodiment, it is preferable to set the upper limit of conditional expression (2) to −0.11.

また、本実施形態に係る撮影レンズにおいて、無限遠物体に焦点合わせをした際の撮影レンズ全系のd線における屈折力をΦiとし、第1レンズ群G1のd線における屈折力をΦ1とし、第2レンズ群G2のd線における屈折力をΦ2としたとき、以下の条件式(3),(4)を満足することが好ましい。   In the photographic lens according to the present embodiment, the refractive power at the d-line of the entire photographic lens system when focusing on an object at infinity is Φi, the refractive power at the d-line of the first lens group G1 is Φ1, When the refractive power of the second lens group G2 at the d-line is Φ2, it is preferable that the following conditional expressions (3) and (4) are satisfied.

0.7 < Φ1/Φi < 1.2 …(3)
0.07 < Φ2/Φ1 < 0.37 …(4)
0.7 <Φ1 / Φi <1.2 (3)
0.07 <Φ2 / Φ1 <0.37 (4)

上記条件式(3)は、無限遠物体に焦点合わせをした際の撮影レンズ全系の屈折力と、第1レンズ群G1の屈折力との適切な範囲を示すものである。この条件式(3)の下限値を下回ると、相対的に第1レンズ群G1の屈折力が弱くなりすぎて、球面収差がアンダーに大きくなりすぎるうえ、第1レンズ群G1の大型化を招く。また、この条件式(3)の上限値を上回ると、相対的に第1レンズ群G1の屈折力が強くなりすぎて、負の方向に大きな歪曲収差が発生し補正が困難となる。   Conditional expression (3) shows an appropriate range between the refractive power of the entire photographing lens system and the refractive power of the first lens group G1 when focusing on an object at infinity. If the lower limit of conditional expression (3) is not reached, the refractive power of the first lens group G1 becomes relatively weak, the spherical aberration becomes excessively large, and the size of the first lens group G1 is increased. . If the upper limit value of conditional expression (3) is exceeded, the refractive power of the first lens group G1 becomes relatively strong, and a large distortion occurs in the negative direction, making correction difficult.

なお、本実施形態の効果を確実にするため、条件式(3)の下限値を0.8にすることが好ましい。また、本実施形態の効果を確実にするため、条件式(3)の上限値を1.1にすることが好ましい。   In order to secure the effect of the present embodiment, it is preferable to set the lower limit of conditional expression (3) to 0.8. In order to secure the effect of the present embodiment, it is preferable to set the upper limit of conditional expression (3) to 1.1.

上記条件式(4)は、無限遠物体に焦点合わせをした際の第1レンズ群G1の屈折力と、第2レンズ群G2の屈折力との適切な範囲を示すものである。この条件式(4)の下限値を下回ると、相対的に第2レンズ群G2の屈折力が弱くなりすぎて、倍率色収差が増大するうえ、無限遠物体から近距離物体に焦点合わせを行う際の第1レンズ群G1と第2レンズ群G2との間隔の変化を大きくしなければならないため、撮影レンズ全体の大型化を招く。また、この条件式(4)の上限値を上回ると、絞りSPに対して前後の屈折力の対称性が大きく崩れるため、歪曲収差及び倍率色収差の補正が困難となる。   Conditional expression (4) shows an appropriate range of the refractive power of the first lens group G1 and the refractive power of the second lens group G2 when focusing on an object at infinity. If the lower limit of conditional expression (4) is not reached, the refractive power of the second lens group G2 becomes relatively weak, the lateral chromatic aberration increases, and when focusing from an object at infinity to a near object is performed. Since the change in the distance between the first lens group G1 and the second lens group G2 must be increased, the overall size of the photographing lens is increased. If the upper limit of conditional expression (4) is exceeded, the symmetry of the refractive power before and after the stop SP is greatly lost, making it difficult to correct distortion and lateral chromatic aberration.

なお、本実施形態の効果を確実にするため、条件式(4)の下限値を0.09にすることが好ましい。また、本実施形態の効果を確実にするため、条件式(4)の上限値を0.31にすることが好ましい。   In order to secure the effect of the present embodiment, it is preferable to set the lower limit of conditional expression (4) to 0.09. In order to secure the effect of the present embodiment, it is preferable to set the upper limit of conditional expression (4) to 0.31.

また、本実施形態に係る撮影レンズにおいて、第1bレンズ群G1bのd線における屈折力をΦ1bとし、第1bレンズ群G1bを構成する負メニスカスレンズL4のd線における屈折力をΦ1mとしたとき、以下の条件式(5)を満足することが好ましい。   In the photographing lens according to the present embodiment, when the refractive power at the d line of the first b lens group G1b is Φ1b and the refractive power at the d line of the negative meniscus lens L4 constituting the first b lens group G1b is Φ1m, It is preferable that the following conditional expression (5) is satisfied.

−1.0 < Φ1b/Φ1m < −0.4 …(5)   −1.0 <Φ1b / Φ1m <−0.4 (5)

上記条件式(5)は、第1bレンズ群G1bの屈折力と、第1bレンズ群G1bを構成する負メニスカスレンズL4の屈折力との適切な範囲を示すものであり、特にコマ収差を良好に補正するための重要な条件である。この条件式(5)の下限値を下回ると、負メニスカスレンズL4から射出される光線の光軸に対する角度が小さくなり、正弦条件違反量が負の方向に大きくなる。そのため、コマ収差の補正が困難となる。また、この条件式(5)の上限値を上回ると、負メニスカスレンズL4から射出される光線の光軸に対する角度が大きくなり、正弦条件違反量が正の方向に大きくなる。そのため、コマ収差の補正が困難となる。   Conditional expression (5) shows an appropriate range between the refractive power of the first lens group G1b and the refractive power of the negative meniscus lens L4 constituting the first lens group G1b. This is an important condition for correction. If the lower limit of conditional expression (5) is not reached, the angle of the light beam emitted from the negative meniscus lens L4 with respect to the optical axis decreases, and the sine condition violation amount increases in the negative direction. This makes it difficult to correct coma. If the upper limit of conditional expression (5) is exceeded, the angle of the light beam emitted from the negative meniscus lens L4 with respect to the optical axis increases, and the sine condition violation amount increases in the positive direction. This makes it difficult to correct coma.

なお、本実施形態の効果を確実にするため、条件式(5)の下限値を−0.9にすることが好ましい。また、本実施形態の効果を確実にするため、条件式(5)の上限値を−0.5にすることが好ましい。   In order to secure the effect of the present embodiment, it is preferable to set the lower limit of conditional expression (5) to −0.9. In order to secure the effect of the present embodiment, it is preferable to set the upper limit of conditional expression (5) to −0.5.

また、本実施形態に係る撮影レンズにおいて、近距離物体に焦点合わせをした際の撮影レンズ全系のd線における屈折力をΦnとし、無限遠物体から近距離物体に焦点合わせをする際の第1レンズ群G1と第2レンズ群G2との間隔の変化をΔDとしたとき、以下の条件式(6)を満足することが好ましい。   In the photographic lens according to the present embodiment, the refractive power at the d-line of the entire photographic lens system when focusing on a short-distance object is Φn, and the focusing is performed from an infinite object to a short-distance object. When the change in the distance between the first lens group G1 and the second lens group G2 is ΔD, the following conditional expression (6) is preferably satisfied.

|(Φn−Φi)/ΔD| < 0.35 …(6)   | (Φn−Φi) / ΔD | <0.35 (6)

上記条件式(6)は、焦点合わせをした際の撮影レンズ全系の屈折力と、焦点合わせをする際の第1レンズ群G1と第2レンズ群G2との間隔の変化との適切な範囲を示すものである。この条件式(6)の上限値を上回ると、焦点合わせをした際に、像面湾曲及びコマ収差を補正しきれず、倍率範囲内で良好な光学性能を得ることが困難となる。   Conditional expression (6) is an appropriate range between the refractive power of the entire photographic lens system at the time of focusing and the change in the distance between the first lens group G1 and the second lens group G2 at the time of focusing. Is shown. If the upper limit of conditional expression (6) is exceeded, it is difficult to correct curvature of field and coma when focusing, and it becomes difficult to obtain good optical performance within the magnification range.

なお、本実施形態の効果を確実にするため、条件式(6)の上限値を0.24にすることが好ましい。   In order to secure the effect of the present embodiment, it is preferable to set the upper limit of conditional expression (6) to 0.24.

なお、本実施形態に係る撮影レンズは、レンズ系が2つの可動群(すなわち、第1レンズ群G1及び第2レンズ群G2)から構成されているが、各レンズ群の間に他のレンズ群を付加したり、あるいはレンズ系の像側又は物体側に隣接させて他のレンズ群を付加することも可能である。   In the photographic lens according to the present embodiment, the lens system is composed of two movable groups (that is, the first lens group G1 and the second lens group G2), but other lens groups are provided between the lens groups. Or another lens group can be added adjacent to the image side or the object side of the lens system.

続いて、図10を参照しながら、上記構成の撮影レンズを備えた検査装置について説明する。この検査装置は、例えばFPD(フラットパネルディスプレイ)、プリント基板、電子部品、シート等の検査対象物を、上記構成の撮影レンズを介して撮影し、得られた画像に基づいて、検査対象物の欠陥を検査するものである。具体的には、図10に示すように、検査装置1は、検査対象物10と、例えばCCD、CMOS等からなる撮像素子11上に検査対象物10の画像を結像させる上記構成の撮影レンズ12と、画像処理装置13と、モニター14とを有する。画像処理装置13において、入力された画像データ又は撮像素子11からの電気信号に対して所定の信号処理を施し、撮影された検査対象物10の欠陥を検出し、その位置を特定することができる。また、モニター14を介して、取得した画像データを出力することが可能である。なお、検査対象物10、撮像素子11の具体例を記載したが、本発明はこれら具体例に限定されるものではない。   Next, an inspection apparatus provided with the photographic lens having the above configuration will be described with reference to FIG. This inspection apparatus images, for example, an inspection object such as an FPD (flat panel display), a printed circuit board, an electronic component, a sheet, or the like through the imaging lens having the above-described configuration, and based on the obtained image, It is to inspect for defects. Specifically, as illustrated in FIG. 10, the inspection apparatus 1 includes a photographic lens having the above-described configuration that forms an image of the inspection object 10 on the inspection object 10 and an image sensor 11 made of, for example, a CCD or a CMOS. 12, an image processing device 13, and a monitor 14. In the image processing device 13, predetermined signal processing is performed on the input image data or the electrical signal from the image sensor 11, the defect of the photographed inspection object 10 is detected, and the position thereof can be specified. . The acquired image data can be output via the monitor 14. In addition, although the specific example of the test object 10 and the image pick-up element 11 was described, this invention is not limited to these specific examples.

以上のように本発明を分かりやすくするため、実施形態の構成要件を付して説明したが、本発明がこれに限定されるものではないことは言うまでもない。   As described above, in order to make the present invention easy to understand, the configuration requirements of the embodiment have been described, but it goes without saying that the present invention is not limited to this.

以下、本実施形態に係る各実施例について、図面に基づいて説明する。なお、図1、図4及び図7は、各実施例に係る撮影レンズの構成及び無限遠合焦状態から近距離合焦状態への合焦変化における各レンズ群の移動の様子を示す断面図である。各実施例に係る撮影レンズは、いずれも上述のように、物体側より順に並んだ、正の屈折力を持つ第1レンズ群G1(第1〜5レンズ成分L1〜L5)と、正の屈折力を持つ第2レンズ群G2(第6、7レンズ成分L6、L7)とを有し、第1レンズ群G1は、物体側から順に並んだ、正の屈折力を持つ第1aレンズ群G1aと、絞りSPと、正の屈折力を持つ第1bレンズ群G1bとを有し、第2レンズ群G2は、物体側から順に並んだ、両凹レンズである第6レンズ成分L6と、像側に凸面を向けた正メニスカスレンズである第7レンズ成分L7とを有して構成され、無限遠物体から近距離物体に焦点合わせをする際に、第1レンズ群G1及び第2レンズ群G2が異なる移動量で像面に対して光軸に沿って物体側に移動し、第1レンズ群G1と第2レンズ群G2との間隔が増大するように変化する。   Hereinafter, each example according to the present embodiment will be described with reference to the drawings. 1, 4, and 7 are cross-sectional views illustrating the configuration of the photographic lens according to each embodiment and the movement of each lens group in the focus change from the infinite focus state to the short distance focus state. It is. As described above, the photographic lenses according to the respective examples are arranged in order from the object side, and have a first lens group G1 (first to fifth lens components L1 to L5) having positive refractive power and positive refraction. The first lens group G1 includes a first lens group G1a having positive refractive power and arranged in order from the object side. The second lens group G2 (sixth and seventh lens components L6 and L7) having power The aperture stop SP and the first lens group G1b having positive refractive power, and the second lens group G2 are arranged in order from the object side, a sixth lens component L6 that is a biconcave lens, and a convex surface on the image side The first lens group G1 and the second lens group G2 move differently when focusing from an infinite object to a short-distance object. The first lens unit moves to the object side along the optical axis with respect to the image plane by the amount 1 and the distance between the second lens group G2 is changed so as to increase.

以下、表1〜表3を示すが、これらは第1実施例〜第3実施例における各諸元の表である。[全体諸元]において、fは撮影レンズ全系のd線における無限遠合焦時の焦点距離を、βは撮影レンズのd線における倍率を、Fnoはd線におけるFナンバーを、2ωは画角を、Yは像高を示す。[レンズデータ]において、面番号は光線の進行する方向に沿った物体側からのレンズ面の順序(第0面は物体面に対応)を、rは各面番号に対応する曲率半径を、dは各面番号に対応する光軸上のレンズ厚及び空気間隔(第0面に記載の値は物体面から第1面までの空気間隔に相当)を、ndは各面番号に対応する硝材のd線の屈折率を、νdは各面番号に対応する硝材のd線を基準とするアッベ数を示す。なお、曲率半径の「∞」は平面又は開口を示す。また、空気の屈折率「1.00000」の記載は省略する。   Tables 1 to 3 are shown below, but these are tables of specifications in the first to third examples. In [Overall specifications], f is the focal length at infinity focusing on the d-line of the entire photographic lens system, β is the magnification of the photographic lens at the d-line, Fno is the F-number at the d-line, and 2ω is the image. The angle indicates Y and the image height. In [Lens data], the surface number is the order of the lens surfaces from the object side along the direction in which the light beam travels (the 0th surface corresponds to the object surface), r is the radius of curvature corresponding to each surface number, d Is the lens thickness on the optical axis corresponding to each surface number and the air interval (the value described on the 0th surface corresponds to the air interval from the object surface to the first surface), and nd is the glass material corresponding to each surface number. The refractive index of the d-line, and νd, the Abbe number based on the d-line of the glass material corresponding to each surface number. The curvature radius “∞” indicates a plane or an opening. The description of the refractive index “1.00000” of air is omitted.

また、表中では、[合焦時における可変間隔データ]において、fは撮影レンズ全系のd線における無限遠合焦時の焦点距離を、βは撮影レンズのd線における倍率を、D0は物体面から第1面までの空気間隔を、Di(但し、iは整数)は第i面と第(i+1)面の可変間隔を、Bfはバックフォーカスを示す。[群データ]において、Gは群番号、群初面は各群の最も物体側の面番号を、群焦点距離は各群の焦点距離(d線)を、レンズ構成長は各群の最も物体側のレンズ面から最も像側のレンズ面までの光軸上での距離を示す。[条件式]において、上記の条件式(1)〜(6)及びこれらに対応する値を示す。   In the table, in [Variable interval data at the time of focusing], f is the focal length at the time of focusing on infinity in the d-line of the entire taking lens system, β is the magnification of the taking lens at the d-line, and D0 is The air space from the object surface to the first surface, Di (where i is an integer) is the variable space between the i-th surface and the (i + 1) -th surface, and Bf is the back focus. In [Group Data], G is the group number, the first surface of the group is the surface number of the most object side of each group, the group focal length is the focal length (d-line) of each group, and the lens configuration length is the most object of each group The distance on the optical axis from the lens surface on the side to the lens surface closest to the image side is shown. In [Conditional Expression], the conditional expressions (1) to (6) and values corresponding thereto are shown.

なお、表中において、焦点距離f、曲率半径r、面間隔d、その他の長さの単位は、一般に「mm」が使われている。但し、光学系は比例拡大又は比例縮小しても同等の光学性能が得られるので、単位は「mm」に限定されることなく、他の適当な単位を用いることが可能である。   In the table, “mm” is generally used as the focal length f, radius of curvature r, surface interval d, and other length units. However, since the same optical performance can be obtained even if the optical system is proportionally enlarged or reduced, the unit is not limited to “mm”, and other appropriate units can be used.

以上の表の説明は、全ての実施例において同様とし、その説明を省略する。   The description of the above table is the same in all embodiments, and the description is omitted.

(第1実施例)
第1実施例に係る撮影レンズついて、図1〜図3及び表1を用いて説明する。図1に示すように、第1実施例に係る撮影レンズにおいて、第1aレンズ群G1aは、物体側から順に並んだ、物体側に凸面を向けた正メニスカスレンズL1と、物体側に凸を向けた正メニスカスレンズL2と像側に凹面を向けた負メニスカスレンズL3との接合レンズL23とからなる。第1bレンズ群G1bは、物体側から順に並んだ、物体側に凹面を向けた負メニスカスレンズL4と、像側に凸面を向けた正メニスカスレンズL5とからなる。第2レンズ群G2は、物体側から順に並んだ、両凹レンズL6と、像側に凸面を向けた正メニスカスレンズL7とからなる。
(First embodiment)
The taking lens according to the first embodiment will be described with reference to FIGS. As shown in FIG. 1, in the photographing lens according to the first example, the first-a lens group G1a is arranged in order from the object side, and a positive meniscus lens L1 having a convex surface facing the object side, and a convex surface facing the object side. The positive meniscus lens L2 and a cemented lens L23 of a negative meniscus lens L3 having a concave surface facing the image side. The 1b lens group G1b is composed of a negative meniscus lens L4 having a concave surface facing the object side and a positive meniscus lens L5 having a convex surface facing the image side, which are arranged in order from the object side. The second lens group G2 includes a biconcave lens L6 arranged in order from the object side, and a positive meniscus lens L7 having a convex surface directed to the image side.

以下の表1に、第1実施例における各諸元の値を示す。なお、表1における面番号1〜14は、図1に示す面1〜14に対応している。   Table 1 below shows the values of each item in the first embodiment. The surface numbers 1 to 14 in Table 1 correspond to the surfaces 1 to 14 shown in FIG.

(表1)
[全体諸元]
f = 1.00
Fno = 4.00
2ω = 50.02°
Y = 0.47

[レンズデータ]
面番号 r d nd νd
0 D0
1 0.62382 0.05246 1.65160 58.6
2 0.94840 0.01786
3 0.28624 0.09488 1.72916 54.6
4 2.10459 0.02009 1.59551 39.2
5 0.20342 0.11162
6 ∞ 0.13060 (絞りSP)
7 -0.18958 0.02567 1.59551 39.2
8 -0.31717 0.01005
9 -0.97941 0.06697 1.72916 54.6
10 -0.31379 D10
11 -2.26623 0.01898 1.67270 32.2
12 2.26623 0.01882
13 -3.27852 0.06362 1.65160 58.6
14 -0.65048 Bf

[合焦時における可変間隔データ]
無限遠 至近距離
f、β 1.00 -0.7
D0 ∞ 2.03271
D10 0.00558 0.14620
Bf 0.66541 1.27582

[群データ]
群番号 群初面 群焦点距離 レンズ構成長
G1 1 1.14 0.53020
G2 7 3.99 0.10142

[条件式]
Rm = 0.441
Rp = -0.305
Φ2 = 0.251
Φ2A= -0.497
Φ1 = 0.878
Φi = 1.000
Φ1b= 0.685
Φ1m= -1.169
Φn = 0.969
ΔD = 0.141

条件式(1) |(Rm+Rp)/(Rm−Rp)| = 0.18
条件式(2) Φ2/Φ2A = -0.51
条件式(3) Φ1/Φi = 0.88
条件式(4) Φ2/Φ1 = 0.29
条件式(5) Φ1b/Φ1m = -0.59
条件式(6) |(Φn−Φi)/ΔD| = 0.22
(Table 1)
[Overall specifications]
f = 1.00
Fno = 4.00
2ω = 50.02 °
Y = 0.47

[Lens data]
Surface number r d nd νd
0 D0
1 0.62382 0.05246 1.65160 58.6
2 0.94840 0.01786
3 0.28624 0.09488 1.72916 54.6
4 2.10459 0.02009 1.59551 39.2
5 0.20342 0.11162
6 ∞ 0.13060 (Aperture SP)
7 -0.18958 0.02567 1.59551 39.2
8 -0.31717 0.01005
9 -0.97941 0.06697 1.72916 54.6
10 -0.31379 D10
11 -2.26623 0.01898 1.67270 32.2
12 2.26623 0.01882
13 -3.27852 0.06362 1.65160 58.6
14 -0.65048 Bf

[Variable interval data at the time of focusing]
Infinity Close distance f, β 1.00 -0.7
D0 ∞ 2.03271
D10 0.00558 0.14620
Bf 0.66541 1.27582

[Group data]
Group number Group first surface Group focal length Lens construction length G1 1 1.14 0.53020
G2 7 3.99 0.10142

[Conditional expression]
Rm = 0.441
Rp = -0.305
Φ2 = 0.251
Φ2A = -0.497
Φ1 = 0.878
Φi = 1.000
Φ1b = 0.685
Φ1m = -1.169
Φn = 0.969
ΔD = 0.141

Conditional expression (1) | (Rm + Rp) / (Rm−Rp) | = 0.18
Conditional expression (2) Φ2 / Φ2A = -0.51
Conditional expression (3) Φ1 / Φi = 0.88
Conditional expression (4) Φ2 / Φ1 = 0.29
Conditional expression (5) Φ1b / Φ1m = -0.59
Conditional expression (6) | (Φn−Φi) /ΔD|=0.22

表1に示す諸元の表から、第1実施例に係る撮影レンズでは、上記条件式(1)〜(6)を全て満たすことが分かる。   From the table of specifications shown in Table 1, it can be seen that the photographic lens according to Example 1 satisfies all the conditional expressions (1) to (6).

図2は、第1実施例に係る撮影レンズの、無限遠物体に焦点合わせをした際の諸収差図(具体的には、球面収差図、非点収差図、歪曲収差図、倍率色収差図及びコマ収差図)である。また、図3は、第1実施例に係る撮影レンズの、近距離物体に焦点合わせをした際の諸収差図(具体的には、球面収差図、非点収差図、歪曲収差図、倍率色収差図及びコマ収差図)である。各収差図において、dはd線(波長587.56nm)を、gはg線(波長435.83nm)を、CはC線(波長656.27nm)を、FはF線(波長486.13nm)に対する諸収差を、Yは像高を示す。また、球面収差図において、点線は正弦条件違反量を、実線は球面収差を示す。また、非点収差図において、点線はメリジオナル像面を、実線はサジタル像面を示す。以上の収差図の説明は、他の実施例においても同様とし、その説明を省略する。   FIG. 2 is a diagram of various aberrations (specifically, spherical aberration diagram, astigmatism diagram, distortion aberration diagram, magnification chromatic aberration diagram, and magnification aberration diagram) of the taking lens according to the first example when focusing on an object at infinity. (Coma aberration diagram). FIG. 3 is a diagram showing various aberrations (specifically, spherical aberration diagram, astigmatism diagram, distortion aberration diagram, chromatic aberration of magnification) of the taking lens according to the first example when focusing on a short distance object. Figure and coma aberration diagram). In each aberration diagram, d is d-line (wavelength 587.56 nm), g is g-line (wavelength 435.83 nm), C is C-line (wavelength 656.27 nm), and F is various aberrations with respect to F-line (wavelength 486.13 nm). Y represents the image height. In the spherical aberration diagram, the dotted line represents the sine condition violation amount, and the solid line represents the spherical aberration. In the astigmatism diagram, the dotted line indicates the meridional image plane, and the solid line indicates the sagittal image plane. The explanation of the above aberration diagrams is the same in the other examples, and the explanation is omitted.

各収差図から明らかなように、第1実施例に係る撮像レンズは、無限遠物体から近距離物体までの倍率範囲において、収差の変動が少なく、像全域で諸収差が良好に補正されていることが分かる。   As is clear from each aberration diagram, the imaging lens according to the first example has a small variation in aberration in the magnification range from an object at infinity to an object at a close distance, and various aberrations are well corrected over the entire image. I understand that.

(第2実施例)
第2実施例について、図4〜図6及び表2を用いて説明する。図4に示すように、第2実施例に係る撮影レンズにおいて、第1aレンズ群G1aは、物体側から順に並んだ、物体側に凸面を向けた正メニスカスレンズL1と、物体側に凸面を向けた正メニスカスレンズL2と像側に凹面を向けた負メニスカスレンズL3との接合レンズL23とからなる。第1bレンズ群G1bは、物体側から順に並んだ、物体側に凹面を向けた負メニスカスレンズL4と、像側に凸面を向けた正メニスカスレンズL5とからなる。第2レンズ群G2は、物体側から順に並んだ、両凹レンズL6と、像側に凸面を向けた正メニスカスレンズL7とからなる。
(Second embodiment)
A second embodiment will be described with reference to FIGS. 4 to 6 and Table 2. FIG. As shown in FIG. 4, in the photographing lens according to the second example, the 1a lens group G1a is arranged in order from the object side, and is a positive meniscus lens L1 having a convex surface facing the object side, and a convex surface facing the object side. The positive meniscus lens L2 and a cemented lens L23 of a negative meniscus lens L3 having a concave surface facing the image side. The 1b lens group G1b is composed of a negative meniscus lens L4 having a concave surface facing the object side and a positive meniscus lens L5 having a convex surface facing the image side, which are arranged in order from the object side. The second lens group G2 includes a biconcave lens L6 arranged in order from the object side, and a positive meniscus lens L7 having a convex surface directed to the image side.

以下の表2に、第2実施例における各諸元の値を示す。なお、表2における面番号1〜14は、図4に示す面1〜14に対応している。   Table 2 below shows the values of each item in the second embodiment. The surface numbers 1 to 14 in Table 2 correspond to the surfaces 1 to 14 shown in FIG.

(表2)
[全体諸元]
f = 1.00
Fno = 4.00
2ω = 50.00°
Y = 0.47

[レンズデータ]
面番号 r d nd νd
0 D0
1 0.53167 0.04400 1.74320 49.3
2 0.75003 0.00700
3 0.26551 0.08500 1.71300 53.9
4 2.55609 0.01600 1.59551 39.2
5 0.18201 0.09800
6 ∞ 0.12400 (絞りSP)
7 -0.17539 0.02300 1.59551 39.2
8 -0.26509 0.00300
9 -1.03827 0.06600 1.61800 63.4
10 -0.27001 D10
11 -2.19293 0.01700 1.74950 35.3
12 2.19293 0.01850
13 -1.77295 0.04900 1.74320 49.3
14 -0.64658 Bf

[合焦時における可変間隔データ]
無限遠 至近距離
f、β 1.00 -0.7
D0 ∞ 2.08374
D10 0.00500 0.15200
Bf 0.71825 1.28460

[群データ]
群番号 群初面 群焦点距離 レンズ構成長
G1 1 1.02 0.46600
G2 7 10.74 0.08450

[条件式]
Rm = 0.456
Rp = -0.564
Φ2 = 0.093
Φ2A= -0.764
Φ1 = 0.980
Φi = 1.000
Φ1b= 0.898
Φ1m= -1.039
Φn = 0.987
ΔD = 0.147

条件式(1) |(Rm+Rp)/(Rm−Rp)| = 0.11
条件式(2) Φ2/Φ2A = -0.12
条件式(3) Φ1/Φi = 0.98
条件式(4) Φ2/Φ1 = 0.09
条件式(5) Φ1b/Φ1m = -0.86
条件式(6) |(Φn−Φi)/ΔD| = 0.09
(Table 2)
[Overall specifications]
f = 1.00
Fno = 4.00
2ω = 50.00 °
Y = 0.47

[Lens data]
Surface number r d nd νd
0 D0
1 0.53167 0.04400 1.74320 49.3
2 0.75003 0.00700
3 0.26551 0.08500 1.71300 53.9
4 2.55609 0.01600 1.59551 39.2
5 0.18201 0.09800
6 ∞ 0.12400 (Aperture SP)
7 -0.17539 0.02300 1.59551 39.2
8 -0.26509 0.00300
9 -1.03827 0.06600 1.61800 63.4
10 -0.27001 D10
11 -2.19293 0.01700 1.74950 35.3
12 2.19293 0.01850
13 -1.77295 0.04900 1.74320 49.3
14 -0.64658 Bf

[Variable interval data at the time of focusing]
Infinity Close distance f, β 1.00 -0.7
D0 ∞ 2.08374
D10 0.00500 0.15200
Bf 0.71825 1.28460

[Group data]
Group number Group first surface Group focal length Lens construction length G1 1 1.02 0.46600
G2 7 10.74 0.08450

[Conditional expression]
Rm = 0.456
Rp = -0.564
Φ2 = 0.093
Φ2A = -0.764
Φ1 = 0.980
Φi = 1.000
Φ1b = 0.898
Φ1m = -1.039
Φn = 0.987
ΔD = 0.147

Conditional expression (1) | (Rm + Rp) / (Rm−Rp) | = 0.11
Conditional expression (2) Φ2 / Φ2A = -0.12
Conditional expression (3) Φ1 / Φi = 0.98
Conditional expression (4) Φ2 / Φ1 = 0.09
Conditional expression (5) Φ1b / Φ1m = -0.86
Conditional expression (6) | (Φn−Φi) /ΔD|=0.09

表2に示す諸元の表から、第2実施例に係る撮影レンズは、上記条件式(1)〜(6)を全て満たすことが分かる。   From the table of specifications shown in Table 2, it can be seen that the photographic lens according to Example 2 satisfies all the conditional expressions (1) to (6).

図5は、第2実施例に係る撮影レンズの、無限遠物体に焦点合わせをした際の諸収差図である。また、図6は、第2実施例に係る撮影レンズの、近距離物体に焦点合わせをした際の諸収差図である。各収差図から明らかなように、第2実施例に係る撮像レンズは、無限遠物体から近距離物体までの倍率範囲において、収差の変動が少なく、像全域で諸収差が良好に補正されていることが分かる。   FIG. 5 is a diagram illustrating various aberrations of the photographic lens according to Example 2 when focusing on an object at infinity. FIG. 6 is a diagram illustrating various aberrations of the photographing lens according to Example 2 when focusing on a short-distance object. As is apparent from each aberration diagram, the imaging lens according to the second example has a small variation in aberration in the magnification range from an object at infinity to an object at a close distance, and various aberrations are well corrected throughout the entire image. I understand that.

(第3実施例)
第3実施例について、図7〜図9及び表3を用いて説明する。図7に示すように、第3実施例に係る撮影レンズにおいて、第1aレンズ群G1aは、物体側から順に並んだ、物体側に凸面を向けた正メニスカスレンズL1と、物体側に凸面を向けた正メニスカスレンズL2と、像側に凹面を向けた負メニスカスレンズL3とからなる。第1bレンズ群G1bは、物体側から順に並んだ、物体側に凹面を向けた負メニスカスレンズL4と、像側に凸面を向けた正メニスカスレンズL5とからなる。第2レンズ群G2は、物体側から順に並んだ、両凹レンズL6と、像側に凸面を向けた正メニスカスレンズL7とからなる。
(Third embodiment)
A third embodiment will be described with reference to FIGS. As shown in FIG. 7, in the photographing lens according to the third example, the 1a lens group G1a includes a positive meniscus lens L1 arranged in order from the object side and having a convex surface facing the object side, and a convex surface facing the object side. A positive meniscus lens L2 and a negative meniscus lens L3 having a concave surface facing the image side. The 1b lens group G1b is composed of a negative meniscus lens L4 having a concave surface facing the object side and a positive meniscus lens L5 having a convex surface facing the image side, which are arranged in order from the object side. The second lens group G2 includes a biconcave lens L6 arranged in order from the object side, and a positive meniscus lens L7 having a convex surface directed to the image side.

以下の表3に、第3実施例における各諸元の値を示す。なお、表3における面番号1〜15は、図7に示す面1〜15に対応している。   Table 3 below shows values of various specifications in the third example. In addition, the surface numbers 1-15 in Table 3 respond | correspond to the surfaces 1-15 shown in FIG.

(表3)
[全体諸元]
f = 1.00
Fno = 4.00
2ω = 50.02°
Y = 0.47

[レンズデータ]
面番号 r d nd νd
0 D0
1 0.40604 0.05960 1.81600 46.6
2 1.00505 0.00202
3 0.27963 0.04445 1.77250 49.6
4 0.32514 0.02626
5 0.43126 0.01717 1.75520 27.5
6 0.19977 0.11415
7 ∞ 0.12627 (絞りSP)
8 -0.20497 0.01616 1.60342 38.0
9 -0.34204 0.01212
10 -0.98489 0.05758 1.77250 49.6
11 -0.30073 D11
12 -3.82920 0.01616 1.75520 27.5
13 2.37480 0.01699
14 -1.72091 0.03535 1.77250 49.6
15 -0.69694 Bf

[合焦時における可変間隔データ]
無限遠 至近距離
f、β 1.00 -1.0
D0 ∞ 1.65008
D11 0.00500 0.22431
Bf 0.71825 1.54294

[群データ]
群番号 群初面 群焦点距離 レンズ構成長
G1 1 1.10 0.47578
G2 8 5.81 0.06850

[条件式]
Rm = 0.421
Rp = -0.581
Φ2 = 0.172
Φ2A= -0.769
Φ1 = 0.910
Φi = 1.000
Φ1b= 0.897
Φ1m= -1.127
Φn = 0.965
ΔD = 0.220

条件式(1) |(Rm+Rp)/(Rm−Rp)| = 0.16
条件式(2) Φ2/Φ2A = -0.22
条件式(3) Φ1/Φi = 0.91
条件式(4) Φ2/Φ1 = 0.19
条件式(5) Φ1b/Φ1m = -0.80
条件式(6) |(Φn−Φi)/ΔD| = 0.16
(Table 3)
[Overall specifications]
f = 1.00
Fno = 4.00
2ω = 50.02 °
Y = 0.47

[Lens data]
Surface number r d nd νd
0 D0
1 0.40604 0.05960 1.81600 46.6
2 1.00505 0.00202
3 0.27963 0.04445 1.77250 49.6
4 0.32514 0.02626
5 0.43126 0.01717 1.75520 27.5
6 0.19977 0.11415
7 ∞ 0.12627 (Aperture SP)
8 -0.20497 0.01616 1.60342 38.0
9 -0.34204 0.01212
10 -0.98489 0.05758 1.77250 49.6
11 -0.30073 D11
12 -3.82920 0.01616 1.75520 27.5
13 2.37480 0.01699
14 -1.72091 0.03535 1.77250 49.6
15 -0.69694 Bf

[Variable interval data at the time of focusing]
Infinity Close distance f, β 1.00 -1.0
D0 ∞ 1.65008
D11 0.00500 0.22431
Bf 0.71825 1.54294

[Group data]
Group number Group first surface Group focal length Lens construction length G1 1 1.10 0.47578
G2 8 5.81 0.06850

[Conditional expression]
Rm = 0.421
Rp = -0.581
Φ2 = 0.172
Φ2A = -0.769
Φ1 = 0.910
Φi = 1.000
Φ1b = 0.897
Φ1m = -1.127
Φn = 0.965
ΔD = 0.220

Conditional expression (1) | (Rm + Rp) / (Rm−Rp) | = 0.16
Conditional expression (2) Φ2 / Φ2A = -0.22
Conditional expression (3) Φ1 / Φi = 0.91
Conditional expression (4) Φ2 / Φ1 = 0.19
Conditional expression (5) Φ1b / Φ1m = -0.80
Conditional expression (6) | (Φn−Φi) /ΔD|=0.16

表3に示す諸元の表から、第3実施例に係る撮影レンズは、上記条件式(1)〜(6)を全て満たすことが分かる。   From the table of specifications shown in Table 3, it can be seen that the photographic lens according to the third example satisfies all the conditional expressions (1) to (6).

図8は、第3実施例に係る撮影レンズの、無限遠物体に焦点合わせをした際の諸収差図である。また、図9は、第3実施例に係る撮影レンズの、近距離物体に焦点合わせをした際の諸収差図である。各収差図から明らかなように、第3実施例に係る撮像レンズは、無限遠物体から近距離物体までの倍率範囲において、収差の変動が少なく、像全域で諸収差が良好に補正されていることが分かる。   FIG. 8 is a diagram illustrating various aberrations of the photographic lens according to Example 3 when focusing on an object at infinity. FIG. 9 is a diagram illustrating various aberrations when the photographing lens according to Example 3 is focused on a short-distance object. As is clear from each aberration diagram, the imaging lens according to the third example has a small variation in aberration in the magnification range from an object at infinity to an object at a short distance, and various aberrations are corrected well over the entire image. I understand that.

G1 第1レンズ群
G1a 第1aレンズ群
G1b 第1bレンズ群
G2 第2レンズ群
SP 絞り
Li 物体側からi番目のレンズ
Lij 物体側からi番目のレンズとj番目のレンズからなる接合レンズ
1 検査装置
10 検査対象物
11 撮像素子
12 撮影レンズ
13 画像処理装置
14 モニター
G1 1st lens group G1a 1a lens group G1b 1b lens group G2 2nd lens group SP Aperture Li i-th lens from object side Lij Joint lens consisting of i-th lens and j-th lens from object side 1 Inspection device DESCRIPTION OF SYMBOLS 10 Inspection object 11 Image sensor 12 Shooting lens 13 Image processing apparatus 14 Monitor

Claims (7)

物体側より順に並んだ、正の屈折力を持つ第1レンズ群と、正の屈折力を持つ第2レンズ群とを有する撮影レンズにおいて、
前記第1レンズ群は、物体側から順に並んだ、正の屈折力を持つ第1aレンズ群と、絞りと、正の屈折力を持つ第1bレンズ群とを有し、
前記第1aレンズ群は、物体側から順に並んだ、物体側に凸面を向けた正レンズと、物体側に凸面を向けた正レンズと、像側に強い凹面を向けた負レンズとを有し、
前記第1bレンズ群は、物体側から順に並んだ、物体側に凹面を向けた負メニスカスレンズと、正レンズとを有し、
前記第2レンズ群は、物体側から順に並んだ、両凹レンズと、像側に凸面を向けた正メニスカスレンズとを有し、
無限遠物体から近距離物体に焦点合わせをする際に、前記第1レンズ群と前記第2レンズ群との間隔が増大するように、前記第1レンズ群及び前記第2レンズ群が異なる移動量で光軸に沿って物体側に移動し、
前記第2レンズ群を構成する両凹レンズの像側の曲率半径をRmとし、前記第2レンズ群を構成する正メニスカスレンズの物体側の曲率半径をRpとしたとき、次式
|(Rm+Rp)/(Rm−Rp)| < 0.25
の条件を満足することを特徴とする撮影レンズ。
In a photographic lens having a first lens group having a positive refractive power and a second lens group having a positive refractive power, arranged in order from the object side,
The first lens group includes, in order from the object side, a 1a lens group having a positive refractive power, a stop, and a 1b lens group having a positive refractive power,
The first-a lens group includes a positive lens having a convex surface facing the object side, a positive lens having a convex surface facing the object side, and a negative lens having a strong concave surface facing the image side, which are arranged in order from the object side. ,
The first b lens group includes a negative meniscus lens arranged in order from the object side and having a concave surface facing the object side, and a positive lens.
The second lens group includes a biconcave lens arranged in order from the object side, and a positive meniscus lens having a convex surface facing the image side,
When focusing from an object at infinity to an object at a short distance, the first lens group and the second lens group move differently so that the distance between the first lens group and the second lens group increases. To move to the object side along the optical axis,
When the radius of curvature on the image side of the biconcave lens constituting the second lens group is Rm, and the radius of curvature on the object side of the positive meniscus lens constituting the second lens group is Rp, the following expression | (Rm + Rp) / (Rm−Rp) | <0.25
A photographic lens characterized by satisfying the above conditions.
前記第2レンズ群のd線(波長587.56nm)における屈折力をΦ2とし、前記第2レンズ群を構成する両凹レンズと正メニスカスレンズとの間に形成される空気レンズのd線における屈折力をΦ2Aとしたとき、次式
−0.65 < Φ2/Φ2A < −0.08
の条件を満足することを特徴とする請求項1に記載の撮影レンズ。
The refractive power at the d-line (wavelength 587.56 nm) of the second lens group is Φ2, and the refractive power at the d-line of the air lens formed between the biconcave lens and the positive meniscus lens constituting the second lens group. When Φ2A, the following formula −0.65 <Φ2 / Φ2A <−0.08
The photographic lens according to claim 1, wherein the following condition is satisfied.
前記第1bレンズ群を構成する正レンズは、像側に凸面を向けた正メニスカスレンズであることを特徴とする請求項1又は2に記載の撮影レンズ。   3. The photographic lens according to claim 1, wherein the positive lens constituting the first lens group is a positive meniscus lens having a convex surface facing the image side. 無限遠物体に焦点合わせをした際の前記撮影レンズ全系のd線における屈折力をΦiとし、前記第1レンズ群のd線における屈折力をΦ1とし、前記第2レンズ群のd線における屈折力をΦ2としたとき、次式
0.7 < Φ1/Φi < 1.2
0.07 < Φ2/Φ1 < 0.37
の条件を満足することを特徴とする請求項1〜3のいずれか一項に記載の撮影レンズ。
The refractive power at the d-line of the entire photographing lens system when focusing on an object at infinity is Φi, the refractive power at the d-line of the first lens group is Φ1, and the refraction at the d-line of the second lens group. When the force is Φ2, the following expression 0.7 <Φ1 / Φi <1.2
0.07 <Φ2 / Φ1 <0.37
The photographic lens according to claim 1, wherein the following condition is satisfied.
前記第1bレンズ群のd線における屈折力をΦ1bとし、前記第1bレンズ群を構成する負メニスカスレンズのd線における屈折力をΦ1mとしたとき、次式
−1.0 < Φ1b/Φ1m < −0.4
の条件を満足すること特徴とする請求項1〜4のいずれか一項に記載の撮影レンズ。
When the refractive power at the d-line of the first b lens group is Φ1b and the refractive power at the d-line of the negative meniscus lens constituting the first b lens group is Φ1m, the following expression −1.0 <Φ1b / Φ1m <− 0.4
The photographic lens according to claim 1, wherein the following condition is satisfied.
近距離物体に焦点合わせをした際の前記撮影レンズ全系のd線における屈折力をΦnとし、無限遠物体に焦点合わせをした際の前記撮影レンズ全系のd線における屈折力をΦiとし、無限遠物体から近距離物体に焦点合わせをする際の前記第1レンズ群と前記第2レンズ群との間隔の変化をΔDとしたとき、次式
|(Φn−Φi)/ΔD| < 0.35
の条件を満足することを特徴とする請求項1〜5のいずれか一項に記載の撮影レンズ。
The refractive power at the d-line of the entire photographing lens system when focusing on a short distance object is Φn, and the refractive power at the d-line of the entire photographing lens system when focusing on an object at infinity is Φi, When the change in the distance between the first lens group and the second lens group when focusing from an object at infinity to a short distance object is ΔD, the following expression | (Φn−Φi) / ΔD | <0. 35
The photographic lens according to claim 1, wherein the following condition is satisfied.
物体からの光を所定の位置に結像させる請求項1〜6のいずれか一項に記載の撮影レンズを備えたことを特徴とする検査装置。   An inspection apparatus comprising the photographing lens according to claim 1, wherein light from an object is imaged at a predetermined position.
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JP5655164B2 (en) * 2011-12-27 2015-01-14 富士フイルム株式会社 Imaging lens and imaging apparatus
JP2018087932A (en) * 2016-11-30 2018-06-07 株式会社栃木ニコン Imaging lens, optical device, and method of manufacturing tabular member
CN108196353A (en) * 2014-03-28 2018-06-22 三星电机株式会社 Camera lens module

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JP5655164B2 (en) * 2011-12-27 2015-01-14 富士フイルム株式会社 Imaging lens and imaging apparatus
JPWO2013099211A1 (en) * 2011-12-27 2015-04-30 富士フイルム株式会社 Imaging lens and imaging apparatus
CN108196353A (en) * 2014-03-28 2018-06-22 三星电机株式会社 Camera lens module
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JP2018087932A (en) * 2016-11-30 2018-06-07 株式会社栃木ニコン Imaging lens, optical device, and method of manufacturing tabular member

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