JP2011239133A - Vibration piece, vibrator and oscillator - Google Patents

Vibration piece, vibrator and oscillator Download PDF

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JP2011239133A
JP2011239133A JP2010107982A JP2010107982A JP2011239133A JP 2011239133 A JP2011239133 A JP 2011239133A JP 2010107982 A JP2010107982 A JP 2010107982A JP 2010107982 A JP2010107982 A JP 2010107982A JP 2011239133 A JP2011239133 A JP 2011239133A
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arm
resonator element
base
section
weight
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JP5533213B2 (en
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Akinori Yamada
明法 山田
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Seiko Epson Corp
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Seiko Epson Corp
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Abstract

PROBLEM TO BE SOLVED: To provide a vibration piece capable of improving shock resistance, a vibrator having the vibration piece and an oscillator having the vibration piece.SOLUTION: A crystal vibration piece 1 comprises a base section 10, and a pair of vibration arms 11 extending from the base section 10. Each of the vibration arms 11 includes an arm section 13 that is positioned on the side of the base section 10, a weight section 14 that is positioned on the tip side further than the arm section 13 and that is wider than the arm section 13 in width, and groove sections 17 that are formed along a longitudinal direction of the vibration arms 11 on both of a principal plane 15 and 16 opposing each other. In a plane view, a coupling section 18 where the weight section 14 and the arm section 13 are coupled is formed with a curved line so as to be widened as the width of the arm section 13 comes close to the weight section 14, and also in the plane view, a connecting section 17d where a long side 17b extending in a longitudinal direction and a short side 17c extending in a direction crossing relative to the long side 17b are connected at an edge section 17a on the side of the weight section 14 in the groove sections 17 is formed with a curved line.

Description

本発明は、振動片、この振動片を備えた振動子及びこの振動片を備えた発振器に関する。   The present invention relates to a resonator element, a vibrator including the resonator element, and an oscillator including the resonator element.

特許文献１には、第１と第２の平行な振動アーム（以下、振動腕という）が延びるベース（以下、基部という）と、各振動腕の自由端を形成するフリッパー形状をした拡大部分（以下、錘部という）と、各振動腕の正面と裏面の少なくとも一方に形成された溝（以下、溝部という）と、を有し、この溝部が振動腕の自由端（先端）の方向に、錘部の開始点を越えて延びているピエゾ電子同調フォーク型共振器（以下、振動片という）が開示されている。   Patent Document 1 discloses a base (hereinafter referred to as a base) from which first and second parallel vibrating arms (hereinafter referred to as vibrating arms) extend, and a flipper-shaped enlarged portion (which forms a free end of each vibrating arm) ( Hereinafter referred to as a weight portion) and a groove (hereinafter referred to as a groove portion) formed on at least one of the front and back surfaces of each vibrating arm, and this groove portion is in the direction of the free end (tip) of the vibrating arm, A piezo electronic tuning fork type resonator (hereinafter referred to as a vibrating piece) extending beyond the starting point of the weight portion is disclosed.

特開２００９−２７７１１号公報（図１）JP 2009-27711 A (FIG. 1)

特許文献１によれば、上記振動片は、振動腕に形成された溝部が振動腕の先端の方向に、錘部の開始点を越えて延びていることから、衝撃時の溝部における応力が分散し、耐衝撃特性が向上するとされている。
しかしながら、上記振動片は、実施例の平面視（特許文献１の図１参照）において、錘部の開始点である錘部と腕部（振動腕の本体部分）との結合部が鋭角に形成されていると共に、溝部における錘部側の端部が角張って形成されている。
これらにより、上記振動片は、衝撃時において、錘部と腕部との結合部及び溝部における錘部側の端部に応力集中が発生し、上記各部分から破損する虞がある。 According to Patent Document 1, since the groove portion formed on the vibrating arm extends beyond the starting point of the weight portion in the direction of the tip of the vibrating arm, the stress in the groove portion at the time of impact is dispersed. The impact resistance is improved.
However, in the vibration piece, in the plan view of the embodiment (see FIG. 1 of Patent Document 1), the connecting portion between the weight portion, which is the starting point of the weight portion, and the arm portion (main body portion of the vibrating arm) is formed at an acute angle. In addition, the end of the groove portion on the side of the weight portion is formed to be angular.
As a result, during the impact, there is a possibility that stress concentration occurs at the end portion on the side of the weight portion of the coupling portion between the weight portion and the arm portion and the groove portion, and the vibration piece may be damaged from the above portions.

本発明は、上記課題の少なくとも一部を解決するためになされたものであり、以下の形態または適用例として実現することが可能である。   SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

［適用例１］本適用例にかかる振動片は、基部と、前記基部から延びる少なくとも１本の振動腕と、を備え、前記振動腕は、前記基部側に位置する腕部と、前記腕部より先端側に位置し前記腕部より幅が広い錘部と、互いに対向する両方の主面の少なくとも一方に、前記振動腕の長手方向に沿って形成された溝部と、を有し、平面視において、前記錘部と前記腕部との結合部が、前記腕部の幅が前記錘部に近づくに連れて広がるように曲線で形成されていると共に、平面視において、前記溝部における前記錘部側の端部の、前記長手方向に延びる長辺と前記長辺に対して交差する方向に延びる短辺との接続部が、曲線で形成されていることを特徴とする。   Application Example 1 A vibrating piece according to this application example includes a base portion and at least one vibrating arm extending from the base portion, and the vibrating arm includes an arm portion positioned on the base side, and the arm portion. A weight portion that is located on the more distal side and wider than the arm portion, and a groove portion that is formed along the longitudinal direction of the vibrating arm on at least one of both main surfaces facing each other, in plan view In addition, the connecting portion between the weight portion and the arm portion is formed in a curve so that the width of the arm portion becomes wider as the arm portion approaches the weight portion, and the weight portion in the groove portion in plan view A connecting portion between a long side extending in the longitudinal direction and a short side extending in a direction intersecting with the long side at a side end portion is formed by a curve.

これによれば、振動片は、平面視において、錘部と腕部との結合部が、腕部の幅が錘部に近づくに連れて広がるように曲線で形成されていると共に、溝部における錘部側の端部の長辺と短辺との接続部が、曲線で形成されている。
この結果、振動片は、衝撃時に錘部と腕部との結合部及び溝部における錘部側の端部に応力集中が発生し難い（応力集中が緩和される）ことから、応力集中による上記部分の破損を低減することが可能となる。
したがって、振動片は、耐衝撃特性を向上させることができる。 According to this, in the plan view, the resonator element is formed in a curve so that the joint portion between the weight portion and the arm portion spreads as the width of the arm portion approaches the weight portion, and the weight in the groove portion. A connecting portion between the long side and the short side of the end portion on the part side is formed by a curve.
As a result, in the resonator element, stress concentration is unlikely to occur at the end portion on the weight portion side in the connecting portion of the weight portion and the arm portion and the groove portion at the time of impact (stress concentration is reduced). Can be reduced.
Therefore, the vibration piece can improve the impact resistance.

［適用例２］上記適用例にかかる振動片において、前記溝部は、前記錘部側の端部が前記結合部にかかるように形成されていることが好ましい。   Application Example 2 In the resonator element according to the application example, it is preferable that the groove portion is formed so that an end portion on the weight portion side covers the coupling portion.

これによれば、振動片は、溝部における錘部側の端部が、結合部にかかるように形成されている。
この結果、振動片は、結合部の曲線形状と溝部の端部の曲線形状との相乗効果によって、結合部周辺の応力集中がさらに発生し難い（応力集中が緩和される）ことから、応力集中に伴う上記部分の破損をさらに低減することが可能となる。
加えて、振動片は、上記溝部の端部が結合部にかかるように形成されていることから、上記溝部の端部が結合部を越えて錘部にかかる場合の錘部の慣性質量の減少によるＱ値（振動の状態を現す無次元数であって、この値が大きいほど振動が安定であることを意味する）の低下と、上記溝部の端部が結合部に至らない場合（溝部の長さが短い場合）の熱弾性損失（屈曲振動する振動片の圧縮部と伸張部との間で発生する熱伝導により生じる振動エネルギーの損失）の増加と、を最も効率的に回避できる。 According to this, the resonator element is formed so that the end portion on the weight portion side in the groove portion covers the coupling portion.
As a result, the stress concentration in the resonator element is less likely to occur around the joint due to the synergistic effect of the curved shape of the joint and the curved shape of the end of the groove (stress concentration is reduced). It is possible to further reduce the breakage of the above-described part.
In addition, since the vibration piece is formed so that the end of the groove part is applied to the coupling part, the inertial mass of the weight part is reduced when the end of the groove part is applied to the weight part beyond the coupling part. When the Q value (a dimensionless number representing the state of vibration, which means that the larger this value is, the more stable the vibration) is, and the end of the groove does not reach the joint (the groove The increase in thermoelastic loss (when the length is short) (loss of vibration energy caused by heat conduction generated between the compression part and the extension part of the vibration piece that vibrates and bends) can be avoided most efficiently.

［適用例３］上記適用例にかかる振動片において、前記錘部は、前記先端側から前記基部側へ向かうに連れて、側面の段差により幅が狭くなる狭幅部を有することが好ましい。   Application Example 3 In the resonator element according to the application example described above, it is preferable that the weight portion has a narrow width portion whose width becomes narrower due to a step on a side surface from the distal end side toward the base portion side.

これによれば、振動片は、錘部が先端側から基部側へ向かうに連れて、側面の段差により幅が狭くなる狭幅部を有している。
この結果、振動片は、狭幅部がない場合と比較して、錘部（狭幅部）と腕部との幅の差を小さくできることから、結合部の曲線の曲率を大きくすることが容易となる。
したがって、振動片は、結合部に、より応力集中を発生し難くさせる（より応力集中を緩和させる）ことができる。 According to this, the resonator element has the narrow portion whose width is narrowed by the step on the side surface as the weight portion moves from the distal end side toward the base portion side.
As a result, the vibration piece can reduce the difference in width between the weight portion (narrow width portion) and the arm portion, compared to the case without the narrow width portion, so that it is easy to increase the curvature of the curve of the coupling portion. It becomes.
Therefore, the resonator element can make it difficult for stress concentration to occur at the coupling portion (more relaxed stress concentration).

［適用例４］上記適用例にかかる振動片において、前記振動腕を複数本備え、前記複数本の振動腕と、前記基部とを含んで音叉を構成することが好ましい。   Application Example 4 In the resonator element according to the application example described above, it is preferable that a plurality of the vibrating arms are provided, and the tuning fork is configured to include the plurality of vibrating arms and the base portion.

これによれば、振動片は、振動腕を複数本備え、複数本の振動腕と、基部とを含んで音叉を構成することから、応力集中による破損を低減することが可能な音叉型振動片を提供できる。   According to this, since the vibration piece includes a plurality of vibration arms and includes a plurality of vibration arms and a base, the tuning fork type vibration piece can reduce damage due to stress concentration. Can provide.

［適用例５］本適用例にかかる振動子は、適用例１ないし適用例４のいずれか一例に記載の振動片と、前記振動片を収容するパッケージと、を備えたことを特徴とする。   Application Example 5 A vibrator according to this application example includes the resonator element according to any one of Application Examples 1 to 4, and a package that accommodates the resonator element.

これによれば、振動子は、適用例１ないし適用例４のいずれか一例に記載の振動片を備えたことから、耐衝撃特性を向上させることができる。   According to this, since the vibrator includes the resonator element described in any one of the application examples 1 to 4, it is possible to improve the shock resistance characteristics.

［適用例６］本適用例にかかる発振器は、適用例１ないし適用例４のいずれか一例に記載の振動片と、前記振動片を発振させる発振回路を有する回路素子と、前記振動片及び前記回路素子を収容するパッケージと、を備えたことを特徴とする。   Application Example 6 An oscillator according to this application example includes a resonator element according to any one of application examples 1 to 4, a circuit element including an oscillation circuit that oscillates the resonator element, the resonator element, and the vibration element. And a package for accommodating a circuit element.

これによれば、発振器は、適用例１ないし適用例４のいずれか一例に記載の振動片を備えたことから、耐衝撃特性を向上させることができる。   According to this, since the oscillator includes the resonator element described in any one of Application Examples 1 to 4, it is possible to improve the shock resistance characteristics.

第１の実施形態の振動片の概略構成を示す模式図であり、（ａ）は平面図、（ｂ）は（ａ）の断面図。2A and 2B are schematic diagrams illustrating a schematic configuration of a resonator element according to the first embodiment, in which FIG. 3A is a plan view and FIG. 図１（ａ）のＢ部拡大図。The B section enlarged view of Fig.1 (a). 変形例の振動片の概略構成を示す模式平面図。FIG. 9 is a schematic plan view showing a schematic configuration of a resonator element according to a modification. 第２の実施形態の振動子の概略構成を示す模式図であり、（ａ）は平面図、（ｂ）は（ａ）の断面図。It is a schematic diagram which shows schematic structure of the vibrator | oscillator of 2nd Embodiment, (a) is a top view, (b) is sectional drawing of (a). 第３の実施形態の発振器の概略構成を示す模式図であり、（ａ）は平面図、（ｂ）は（ａ）の断面図。It is a schematic diagram which shows schematic structure of the oscillator of 3rd Embodiment, (a) is a top view, (b) is sectional drawing of (a).

以下、本発明を具体化した実施形態について図面を参照して説明する。   DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, embodiments of the invention will be described with reference to the drawings.

（第１の実施形態）
図１は、第１の実施形態の振動片の概略構成を示す模式図であり、図１（ａ）は平面図、図１（ｂ）は、図１（ａ）のＡ−Ａ線での断面図である。そして、図２は、図１（ａ）のＢ部拡大図である。 (First embodiment)
FIG. 1 is a schematic diagram illustrating a schematic configuration of the resonator element according to the first embodiment. FIG. 1A is a plan view, and FIG. 1B is a cross-sectional view taken along line AA in FIG. It is sectional drawing. FIG. 2 is an enlarged view of a portion B in FIG.

図１、図２に示すように、振動片としての水晶振動片１は、水晶の原石などから所定の角度で切り出されたウエハー状の水晶基板を基材とし、外形形状がフォトリソグラフィ技術を用いたウエットエッチングなどによって形成されている。   As shown in FIGS. 1 and 2, a quartz crystal vibrating piece 1 as a vibrating piece is based on a wafer-like quartz substrate cut out at a predetermined angle from a quartz crystal or the like, and the outer shape uses a photolithography technique. It is formed by wet etching or the like.

水晶振動片１は、略矩形状の基部１０と、基部１０から、互いに沿って延びる一対の振動腕１１と、基部１０を、振動腕１１の延びる方向に対して交差する方向（ここでは、略直交する方向）に切り欠いた一対の切り欠き部１２と、を備えている。
振動腕１１は、基部１０側に位置する腕部１３と、腕部１３より先端側に位置し腕部１３より幅が広い錘部１４と、互いに対向する両方の主面１５，１６に、振動腕１１の長手方向（振動腕１１の延びる方向）に沿って形成され、一対の振動腕１１の並ぶ方向に沿って切断した振動腕１１の断面形状（Ａ−Ａ線での断面形状）が、略Ｈ字状となる溝部１７と、を有している。 The quartz crystal resonator element 1 includes a substantially rectangular base 10, a pair of vibrating arms 11 extending from the base 10 along each other, and a direction intersecting the extending direction of the vibrating arms 11 (here, approximately A pair of cutout portions 12 cut out in a direction orthogonal to each other.
The vibrating arm 11 vibrates on the arm portion 13 positioned on the base portion 10 side, the weight portion 14 positioned on the distal end side of the arm portion 13 and wider than the arm portion 13, and both main surfaces 15 and 16 facing each other. A cross-sectional shape (a cross-sectional shape taken along the line AA) of the vibrating arm 11 formed along the longitudinal direction of the arm 11 (the extending direction of the vibrating arm 11) and cut along the direction in which the pair of vibrating arms 11 are arranged. And a groove portion 17 having a substantially H-shape.

錘部１４は、先端側から基部１０側へ向かうに連れて、両側面に設けられた段差１４ａにより、先端側よりも幅が狭くなる狭幅部１４ｂを有している。
なお、側面の段差１４ａは、平面視において、幅の広い先端側と狭幅部１４ｂとを傾斜した直線で繋ぐように形成されているが、この直線に代えて曲線（例えば、円弧状の曲線）で形成されていてもよい。 The weight portion 14 has a narrow width portion 14b whose width is narrower than that of the distal end side due to the step 14a provided on both side surfaces from the distal end side toward the base portion 10 side.
The side surface step 14a is formed so as to connect the wide front end side and the narrow width portion 14b with an inclined straight line in a plan view, but instead of this straight line, a curved line (for example, an arcuate curved line). ).

水晶振動片１は、平面視において、錘部１４と腕部１３との結合部１８が、腕部１３の幅が錘部１４に近づくに連れて広がるように曲線（例えば、円弧状の曲線）で形成されている。
それと共に、水晶振動片１は、平面視において、溝部１７における錘部１４側の端部１７ａの、溝部１７の長手方向に延びる長辺１７ｂと長辺１７ｂに対して交差する方向（ここでは、略直交する方向）に延びる短辺１７ｃとの接続部１７ｄが、角張らないように曲線（例えば、円弧状の曲線）で形成されている。
なお、短辺１７ｃは、ここでは直線で表されているが、短辺１７ｃより基部１０側に中心が位置する円弧状の曲線でもよく、両方の接続部１７ｄの曲線の曲率によっては、長さが略０となってもよい。
また、上記各曲線は、異なる曲率の複数の円弧や、スプライン曲線から構成されていてもよい。 The crystal resonator element 1 has a curved line (for example, an arcuate curve) so that the connecting portion 18 between the weight portion 14 and the arm portion 13 spreads as the width of the arm portion 13 approaches the weight portion 14 in plan view. It is formed with.
At the same time, the quartz crystal resonator element 1 has a long side 17b extending in the longitudinal direction of the groove 17 and a direction intersecting the long side 17b of the end 17a of the groove 17 on the side of the weight 14 in plan view (here, A connecting portion 17d with a short side 17c extending in a substantially orthogonal direction is formed with a curve (for example, an arcuate curve) so as not to be angular.
The short side 17c is represented here by a straight line, but may be an arcuate curve whose center is located closer to the base 10 than the short side 17c. Depending on the curvature of the curves of both connecting portions 17d, the length of the short side 17c may be long. May be substantially zero.
Each of the curves may be composed of a plurality of arcs having different curvatures or spline curves.

図２に示すように、水晶振動片１は、溝部１７における錘部１４側の端部１７ａが、結合部１８にかかるように形成されている。
換言すれば、錘部１４側の端部１７ａは、短辺１７ｃが結合部１８の範囲Ｌ（振動腕１１の延びる方向における、結合部１８を形成する曲線の始点から終点までの範囲）内に位置するように形成されている。 As shown in FIG. 2, the crystal vibrating piece 1 is formed so that the end portion 17 a on the side of the weight portion 14 in the groove portion 17 covers the coupling portion 18.
In other words, the end portion 17a on the weight portion 14 side has a short side 17c within the range L of the coupling portion 18 (the range from the start point to the end point of the curve forming the coupling portion 18 in the extending direction of the vibrating arm 11). It is formed to be located.

また、水晶振動片１は、錘部１４が狭幅部１４ｂを有しているので、狭幅部１４ｂの幅Ｗ１と腕部１３の幅Ｗ２との差が、狭幅部１４ｂが形成されない場合よりも小さくなっている。
これにより、結合部１８を形成する曲線の曲率は、狭幅部１４ｂの幅Ｗ１と腕部１３の幅Ｗ２との差が大きい場合、つまり狭幅部１４ｂが形成されない場合と比較して、結合部１８の範囲Ｌが同じであれば大きくなる。 Further, in the quartz crystal resonator element 1, since the weight portion 14 has the narrow width portion 14 b, the difference between the width W 1 of the narrow width portion 14 b and the width W 2 of the arm portion 13 is that the narrow width portion 14 b is not formed. Is smaller than
As a result, the curvature of the curve forming the coupling portion 18 is greater than that when the difference between the width W1 of the narrow width portion 14b and the width W2 of the arm portion 13 is large, that is, when the narrow width portion 14b is not formed. If the range L of the part 18 is the same, it becomes large.

図１（ａ）に戻って、水晶振動片１は、基部１０と、一対（２本）の振動腕１１とを含んで音叉を構成することで、音叉型振動片としての音叉型水晶振動片となっており、基部１０の一対の切り欠き部１２を挟んで振動腕１１側に対して反対側となる部分（切り欠き部１２より紙面下方の部分）が、パッケージなどの外部部材に、導電性接着剤などを用いて固定されるようになっている。   Returning to FIG. 1A, the crystal vibrating piece 1 includes a base 10 and a pair (two) of vibrating arms 11 to form a tuning fork, so that a tuning fork type crystal vibrating piece as a tuning fork type vibrating piece is obtained. The portion on the opposite side of the vibrating arm 11 across the pair of cutout portions 12 of the base portion 10 (the portion below the cutout portion 12 in the drawing) is electrically connected to an external member such as a package. It is designed to be fixed using an adhesive.

そして、水晶振動片１は、一対の振動腕１１に形成された図示しない励振電極に、基部１０に形成された図示しないマウント電極を経由して外部から駆動信号が印加されることにより、一対の振動腕１１が、所定の周波数（例えば、３２ｋＨｚ）で矢印Ｃ方向（一対の振動腕１１が互いに離れる方向）及び矢印Ｄ方向（一対の振動腕１１が互いに近づく方向）に交互に屈曲振動（共振）する。   The quartz crystal resonator element 1 has a pair of excitation electrodes (not shown) formed on the pair of vibrating arms 11 and a drive signal applied from the outside via a mount electrode (not shown) formed on the base 10. The resonating arm 11 is alternately bent and vibrated (resonated) at a predetermined frequency (for example, 32 kHz) in an arrow C direction (a direction in which the pair of resonating arms 11 are separated from each other) and an arrow D direction (a direction in which the pair of resonating arms 11 approach each other). )

この際、水晶振動片１は、振動腕１１に溝部１７が形成されていることで、屈曲振動によって発生する熱が、溝部１７によって拡散（熱伝導）し難くなるように構成されていることから、熱弾性損失を抑制できる。このとき、水晶振動片１は、溝部１７が長いほど熱弾性損失をより抑制できる。
また、水晶振動片１は、振動腕１１に錘部１４が形成されていることで、錘部１４の慣性質量の増加によるＱ値の向上効果により、例えば、Ｑ値を維持しながら振動腕を短くすることができる。つまり、水晶振動片１は、錘部１４によってＱ値を維持しつつ、小型化を図ることができる。
加えて、水晶振動片１は、基部１０に一対の切り欠き部１２を有することで、振動腕１１の屈曲振動に伴う基部１０の振動を吸収し、外部への振動漏れを低減することができる。 At this time, the quartz crystal resonator element 1 is configured such that the heat generated by the bending vibration is difficult to diffuse (heat conduction) by the groove portion 17 because the groove portion 17 is formed in the vibrating arm 11. , Thermoelastic loss can be suppressed. At this time, the crystal resonator element 1 can further suppress the thermoelastic loss as the groove portion 17 is longer.
Further, since the crystal vibrating piece 1 is formed with the weight portion 14 on the vibrating arm 11, for example, the vibration arm can be mounted while maintaining the Q value by the effect of improving the Q value by increasing the inertial mass of the weight portion 14. Can be shortened. That is, the quartz crystal resonator element 1 can be reduced in size while maintaining the Q value by the weight portion 14.
In addition, the quartz crystal resonator element 1 has the pair of notches 12 in the base 10, thereby absorbing the vibration of the base 10 due to the bending vibration of the vibrating arm 11 and reducing vibration leakage to the outside. .

上述したように、第１の実施形態の水晶振動片１は、平面視において、錘部１４と腕部１３との結合部１８が、腕部１３の幅が錘部１４（狭幅部１４ｂ）に近づくに連れて広がるように曲線で形成されている。
それと共に、水晶振動片１は、平面視において、溝部１７における錘部１４側の端部１７ａの、溝部１７の長手方向に延びる長辺１７ｂと、長辺１７ｂに対して交差する方向に延びる短辺１７ｃとの接続部１７ｄが、角張らないように曲線で形成されている。 As described above, the crystal resonator element 1 according to the first embodiment has the joint portion 18 between the weight portion 14 and the arm portion 13 in the plan view, and the width of the arm portion 13 is the weight portion 14 (narrow width portion 14b). It is formed with a curve so as to spread as it approaches.
At the same time, the crystal resonator element 1 has a long side 17b extending in the longitudinal direction of the groove 17 and a short side extending in the direction intersecting the long side 17b of the end 17a on the weight 14 side in the groove 17 in plan view. The connecting portion 17d with the side 17c is formed with a curve so as not to be angular.

これによって、水晶振動片１は、落下、衝突などによる衝撃が加わった時に、錘部１４と腕部１３との結合部１８及び溝部１７における錘部１４側の端部１７ａに応力集中が発生し難い（応力集中が緩和される）ことから、応力集中による上記部分の破損を低減することが可能となる。
したがって、水晶振動片１は、耐衝撃特性を向上させることができる。 As a result, when the crystal vibrating reed 1 is subjected to an impact due to dropping, collision, etc., stress concentration occurs at the connecting portion 18 between the weight portion 14 and the arm portion 13 and the end portion 17a on the weight portion 14 side in the groove portion 17. Since it is difficult (stress concentration is relaxed), it becomes possible to reduce the damage of the said part by stress concentration.
Therefore, the quartz crystal vibrating piece 1 can improve the impact resistance characteristics.

また、水晶振動片１は、溝部１７における錘部１４側の端部１７ａが、結合部１８にかかるように形成されている。換言すれば、錘部１４側の端部１７ａは、短辺１７ｃが結合部１８の範囲Ｌ内に位置するように形成されている。   Further, the crystal vibrating piece 1 is formed such that the end portion 17 a on the weight portion 14 side of the groove portion 17 covers the coupling portion 18. In other words, the end portion 17 a on the weight portion 14 side is formed such that the short side 17 c is positioned within the range L of the coupling portion 18.

これにより、水晶振動片１は、結合部１８の曲線形状と溝部１７の端部１７ａの接続部１７ｄの曲線形状との相乗効果によって、結合部１８周辺の応力集中がさらに発生し難い（応力集中が緩和される）ことから、応力集中に伴う上記部分の破損をさらに低減することが可能となる。   Thereby, the crystal resonator element 1 is less likely to generate stress concentration around the coupling portion 18 due to the synergistic effect of the curved shape of the coupling portion 18 and the curved shape of the connection portion 17d of the end portion 17a of the groove portion 17 (stress concentration). Therefore, it is possible to further reduce the breakage of the portion due to the stress concentration.

加えて、水晶振動片１は、溝部１７における錘部１４側の端部１７ａが、結合部１８にかかるように形成されていることから、溝部１７の錘部１４側の端部１７ａが、結合部１８を越えて錘部１４（狭幅部１４ｂ）にかかる場合の錘部１４の慣性質量の減少によるＱ値の低下と、溝部１７の錘部１４側の端部１７ａが、結合部１８に至らない場合（溝部１７の長さが短い場合）の熱弾性損失の増加と、を最も効率的に回避できる。   In addition, the quartz crystal resonator element 1 is formed so that the end portion 17a on the weight portion 14 side of the groove portion 17 is placed on the coupling portion 18, so that the end portion 17a on the weight portion 14 side of the groove portion 17 is coupled. The Q value is lowered due to the decrease in the inertial mass of the weight portion 14 when the weight portion 14 (narrow width portion 14 b) is passed over the portion 18, and the end portion 17 a on the weight portion 14 side of the groove portion 17 is connected to the coupling portion 18. An increase in thermoelastic loss when it does not reach (when the length of the groove portion 17 is short) can be avoided most efficiently.

また、水晶振動片１は、錘部１４が狭幅部１４ｂを有しているので、狭幅部１４ｂの幅Ｗ１と腕部１３の幅Ｗ２との差が、狭幅部１４ｂが形成されない場合よりも小さくなっている。
これにより、結合部１８を形成する曲線の曲率は、狭幅部１４ｂの幅Ｗ１と腕部１３の幅Ｗ２との差が大きい場合、つまり狭幅部１４ｂが形成されない場合と比較して、結合部１８の範囲Ｌが同じであれば大きくなる。
この結果、水晶振動片１は、結合部１８に、より応力集中を発生し難くさせる（より応力集中を緩和させる）ことができる。 Further, in the quartz crystal resonator element 1, since the weight portion 14 has the narrow width portion 14 b, the difference between the width W 1 of the narrow width portion 14 b and the width W 2 of the arm portion 13 is that the narrow width portion 14 b is not formed. Is smaller than
As a result, the curvature of the curve forming the coupling portion 18 is greater than that when the difference between the width W1 of the narrow width portion 14b and the width W2 of the arm portion 13 is large, that is, when the narrow width portion 14b is not formed. If the range L of the part 18 is the same, it becomes large.
As a result, the quartz crystal resonator element 1 can make the coupling portion 18 less likely to generate stress concentration (more relaxed stress concentration).

また、水晶振動片１は、基部１０と、一対（２本）の振動腕１１とを含んで音叉を構成することから、応力集中による破損を低減することが可能な音叉型振動片としての音叉型水晶振動片を提供できる。   Further, since the crystal vibrating piece 1 includes a base 10 and a pair (two) of vibrating arms 11 to form a tuning fork, the tuning fork as a tuning fork type vibrating piece that can reduce damage due to stress concentration. Type crystal vibrating piece can be provided.

（変形例）
ここで、第１の実施形態の変形例について説明する。
図３は、変形例の振動片の概略構成を示す模式平面図である。なお、第１の実施形態との共通部分については、同一符号を付して詳細な説明を省略し、第１の実施形態と異なる部分を中心に説明する。 (Modification)
Here, a modification of the first embodiment will be described.
FIG. 3 is a schematic plan view illustrating a schematic configuration of a resonator element according to a modification. In addition, about a common part with 1st Embodiment, the same code | symbol is attached | subjected, detailed description is abbreviate | omitted, and it demonstrates centering on a different part from 1st Embodiment.

図３に示すように、変形例の振動片としての水晶振動片２は、錘部１１４が、各腕部１３に対して腕部１３同士が対向する側の反対側に偏って形成されている。
そして、水晶振動片２は、一対の振動腕１１において、腕部１３同士が対向する側の、腕部１３の側面と錘部１１４の側面とが、狭幅部１１４ｂの側面を含めて段差の無い一体化された平面状に形成されている。
これにより、結合部１８は、腕部１３と錘部１１４との、腕部１３同士が対向する側の反対側のみに形成されることになる。 As shown in FIG. 3, in the quartz crystal resonator element 2 as the resonator element of the modified example, the weight portion 114 is formed so as to be biased to the opposite side to the side where the arm portions 13 face each other with respect to the arm portions 13. .
The quartz crystal resonator element 2 includes a pair of vibrating arms 11 in which the side surface of the arm portion 13 and the side surface of the weight portion 114 on the side where the arm portions 13 face each other are stepped including the side surface of the narrow width portion 114b. There is no integrated flat surface.
Thereby, the coupling part 18 is formed only on the opposite side of the arm part 13 and the weight part 114 to the side where the arm parts 13 face each other.

上述したように、水晶振動片２は、錘部１１４が、各腕部１３に対して腕部１３同士が対向する側の反対側に偏って形成され、一対の振動腕１１の間隔が広がることから、振動腕１１同士の振動時の干渉を容易に回避することができる。   As described above, in the crystal vibrating piece 2, the weight portion 114 is formed so as to be biased to the opposite side to the side where the arm portions 13 face each other with respect to each arm portion 13, and the interval between the pair of vibrating arms 11 is widened. Therefore, interference during vibration between the vibrating arms 11 can be easily avoided.

（第２の実施形態）
次に、第２の実施形態として、上記で説明した水晶振動片を備えた振動子について説明する。
図４は、第２の実施形態の振動子の概略構成を示す模式図であり、図４（ａ）は平面図、図４（ｂ）は、図４（ａ）のＥ−Ｅ線での断面図である。 (Second Embodiment)
Next, as a second embodiment, a vibrator provided with the crystal vibrating piece described above will be described.
4A and 4B are schematic diagrams illustrating a schematic configuration of the vibrator according to the second embodiment. FIG. 4A is a plan view, and FIG. 4B is a line EE in FIG. It is sectional drawing.

図４に示すように、振動子としての水晶振動子５は、第１の実施形態の水晶振動片１と、水晶振動片１を収容するパッケージ８０と、を備えている。
パッケージ８０は、パッケージベース８１、シームリング８２、蓋体８５などから構成されている。
パッケージベース８１は、水晶振動片１を収容できるように凹部が形成され、その凹部に水晶振動片１の図示しないマウント電極と接続される接続パッド８８が設けられている。
接続パッド８８は、パッケージベース８１内の配線に接続され、パッケージベース８１の外周部に設けられた外部接続端子８３と導通可能に構成されている。 As shown in FIG. 4, the crystal resonator 5 as a resonator includes the crystal resonator element 1 of the first embodiment and a package 80 that houses the crystal resonator element 1.
The package 80 includes a package base 81, a seam ring 82, a lid 85, and the like.
The package base 81 is formed with a recess so as to accommodate the crystal vibrating piece 1, and a connection pad 88 connected to a mount electrode (not shown) of the crystal vibrating piece 1 is provided in the recess.
The connection pad 88 is connected to the wiring in the package base 81 and is configured to be electrically connected to the external connection terminal 83 provided on the outer periphery of the package base 81.

パッケージベース８１の凹部の周囲には、シームリング８２が設けられている。さらに、パッケージベース８１の底部には、貫通穴８６が設けられている。
水晶振動片１は、パッケージベース８１の接続パッド８８に導電性接着剤８４を介して接着固定されている。そして、パッケージ８０は、パッケージベース８１の凹部を覆う蓋体８５とシームリング８２とがシーム溶接されている。
パッケージベース８１の貫通穴８６には、金属材料などからなる封止材８７が充填されている。この封止材８７は、減圧雰囲気内で溶融後固化され、パッケージベース８１内が減圧状態を保持できるように、貫通穴８６を気密に封止している。
水晶振動子５は、外部接続端子８３を介した外部からの駆動信号により水晶振動片１が励振され、所定の周波数（例えば、３２ｋＨｚ）で発振（共振）する。 A seam ring 82 is provided around the recess of the package base 81. Further, a through hole 86 is provided at the bottom of the package base 81.
The quartz crystal resonator element 1 is bonded and fixed to the connection pad 88 of the package base 81 via a conductive adhesive 84. In the package 80, a lid body 85 and a seam ring 82 that cover the concave portion of the package base 81 are seam-welded.
A through hole 86 of the package base 81 is filled with a sealing material 87 made of a metal material or the like. The sealing material 87 is solidified after being melted in a reduced pressure atmosphere, and the through hole 86 is hermetically sealed so that the inside of the package base 81 can be kept in a reduced pressure state.
The crystal resonator 5 is oscillated (resonated) at a predetermined frequency (for example, 32 kHz) when the crystal resonator element 1 is excited by an external drive signal via the external connection terminal 83.

上述したように、水晶振動子５は、耐衝撃特性が向上した水晶振動片１を備えていることから、耐衝撃特性を向上させることができる。
なお、水晶振動子５は、水晶振動片１に代えて水晶振動片２を用いても、同様の効果を奏することができる。 As described above, since the crystal unit 5 includes the crystal vibrating piece 1 with improved shock resistance, the shock resistance can be improved.
Note that the quartz resonator 5 can achieve the same effect even when the quartz crystal vibrating piece 2 is used instead of the quartz crystal vibrating piece 1.

（第３の実施形態）
次に、第３の実施形態として、上記で説明した水晶振動片を備えた発振器について説明する。
図５は、第３の実施形態の発振器の概略構成を示す模式図であり、図５（ａ）は平面図、図５（ｂ）は図５（ａ）のＦ−Ｆ線での断面図である。 (Third embodiment)
Next, as a third embodiment, an oscillator including the quartz crystal resonator element described above will be described.
5A and 5B are schematic views showing the schematic configuration of the oscillator according to the third embodiment. FIG. 5A is a plan view, and FIG. 5B is a cross-sectional view taken along the line FF in FIG. It is.

発振器としての水晶発振器６は、上記水晶振動子５の構成に回路素子をさらに備えた構成となっている。なお、水晶振動子５との共通部分については、同一符号を付して詳細な説明を省略する。
図５に示すように、水晶発振器６は、第１の実施形態の水晶振動片１と、水晶振動片１を発振させる発振回路を有する回路素子としてのＩＣチップ９１と、水晶振動片１及びＩＣチップ９１を収容するパッケージ８０と、を備えている。
ＩＣチップ９１は、パッケージベース８１の底部に固着され、Ａｕ、Ａｌなどの金属ワイヤー９２により他の配線と接続されている。
水晶発振器６は、ＩＣチップ９１の発振回路からの駆動信号により水晶振動片１が励振され、所定の周波数（例えば、３２ｋＨｚ）で発振（共振）する。 The crystal oscillator 6 as an oscillator has a configuration in which a circuit element is further provided in the configuration of the crystal resonator 5. In addition, about the common part with the crystal oscillator 5, the same code | symbol is attached | subjected and detailed description is abbreviate | omitted.
As shown in FIG. 5, the crystal oscillator 6 includes the crystal resonator element 1 according to the first embodiment, an IC chip 91 as a circuit element having an oscillation circuit that oscillates the crystal oscillator piece 1, the crystal oscillator piece 1, and the IC. And a package 80 for accommodating the chip 91.
The IC chip 91 is fixed to the bottom of the package base 81 and is connected to other wiring by a metal wire 92 such as Au or Al.
In the crystal oscillator 6, the crystal resonator element 1 is excited by a drive signal from the oscillation circuit of the IC chip 91, and oscillates (resonates) at a predetermined frequency (for example, 32 kHz).

上述したように、水晶発振器６は、耐衝撃特性が向上した水晶振動片１を備えていることから、耐衝撃特性を向上させることができる。
なお、水晶発振器６は、水晶振動片１に代えて水晶振動片２を用いても、同様の効果を奏することができる。 As described above, since the crystal oscillator 6 includes the crystal vibrating piece 1 with improved shock resistance, the shock resistance can be improved.
The crystal oscillator 6 can achieve the same effect even when the crystal resonator element 2 is used instead of the crystal oscillator piece 1.

なお、上記各実施形態及び変形例において、水晶振動片１，２の溝部１７は、両主面１５，１６に形成されているが、両主面１５，１６の少なくとも一方に形成されていればよい。
また、水晶振動片１，２の振動腕１１の数は、２本としたが、これに限定するものではなく、１本、または３本以上でもよい。
また、一対の切り欠き部１２は、なくてもよい。
また、水晶振動片１，２は、基部１０から延びる外部接続用の保持腕を備えていてもよい。 In the above-described embodiments and modifications, the groove portions 17 of the crystal vibrating pieces 1 and 2 are formed on both the main surfaces 15 and 16, but as long as they are formed on at least one of the both main surfaces 15 and 16. Good.
Moreover, although the number of the vibrating arms 11 of the crystal vibrating pieces 1 and 2 is two, it is not limited to this and may be one or three or more.
Further, the pair of notch portions 12 may be omitted.
Further, the crystal vibrating pieces 1 and 2 may include a holding arm for external connection extending from the base 10.

なお、狭幅部１４ｂ，１１４ｂは、側面の段差１４ａが１段であることにより、各振動腕１１に１つとなっているが、側面の段差１４ａを複数段にして、各振動腕１１に複数設けてもよく、なくてもよい。
また、溝部１７における錘部１４，１１４側の端部１７ａは、結合部１８に至らなくてもよい（短辺１７ｃが結合部１８の範囲Ｌより基部１０側に位置していてもよい）。 The narrow portions 14b and 114b have one step on each side of the vibrating arm 11 because the step 14a on the side surface is one step. However, the narrow portions 14b and 114b have a plurality of steps on the side surface 14a. It may or may not be provided.
Further, the end portions 17 a on the weight portions 14, 114 side of the groove portion 17 may not reach the coupling portion 18 (the short side 17 c may be located closer to the base portion 10 than the range L of the coupling portion 18).

なお、溝部１７における基部１０側の端部は、上記の錘部１４，１１４側の端部１７ａと同様の形状で形成されていることが好ましいが、この形状に限定するものではない。
また、腕部１３と基部１０との結合部は、錘部１４，１１４と腕部１３との結合部１８と同様に、腕部１３の幅が基部１０に近づくに連れて広がるように曲線で形成されていることが好ましいが、この形状に限定するものではなく、直線でテーパー状に形成されていてもよい。 In addition, although it is preferable that the edge part by the side of the base 10 in the groove part 17 is formed in the shape similar to said edge part 17a by the side of the weight parts 14 and 114, it is not limited to this shape.
Further, the joint portion between the arm portion 13 and the base portion 10 is a curved line so that the width of the arm portion 13 increases as the base portion 10 is approached, similarly to the joint portion 18 between the weight portions 14 and 114 and the arm portion 13. However, it is not limited to this shape, and it may be formed in a straight and tapered shape.

なお、上記各実施形態及び変形例では、振動片を水晶としたが、これに限定するものではなく、例えば、タンタル酸リチウム（ＬｉＴａＯ3）、四ホウ酸リチウム（Ｌｉ2Ｂ4Ｏ7）、ニオブ酸リチウム（ＬｉＮｂＯ3）、チタン酸ジルコン酸鉛（ＰＺＴ）、酸化亜鉛（ＺｎＯ）、窒化アルミニウム（ＡｌＮ）などの圧電体、または酸化亜鉛（ＺｎＯ）、窒化アルミニウム（ＡｌＮ）などの圧電体を被膜として備えたシリコンなどであってもよい。 In each of the above-described embodiments and modifications, the resonator element is made of quartz, but is not limited thereto. For example, lithium tantalate (LiTaO 3 ), lithium tetraborate (Li 2 B 4 O 7 ), Piezoelectric materials such as lithium niobate (LiNbO 3 ), lead zirconate titanate (PZT), zinc oxide (ZnO), and aluminum nitride (AlN), or piezoelectric materials such as zinc oxide (ZnO) and aluminum nitride (AlN) Silicon provided as a coating may be used.

１，２…振動片としての水晶振動片、５…振動子としての水晶振動子、６…発振器としての水晶発振器、１０…基部、１１…振動腕、１２…切り欠き部、１３…腕部、１４…錘部、１４ａ…段差、１４ｂ…狭幅部、１５，１６…主面、１７…溝部、１７ａ…端部、１７ｂ…長辺、１７ｃ…短辺、１７ｄ…接続部、１８…結合部、８０…パッケージ、８１…パッケージベース、８２…シームリング、８３…外部接続端子、８４…導電性接着剤、８５…蓋体、８６…貫通穴、８７…封止材、８８…接続パッド、９１…回路素子としてのＩＣチップ、９２…金属ワイヤー、１１４…錘部、１１４ｂ…狭幅部。   DESCRIPTION OF SYMBOLS 1, 2 ... Crystal vibrating piece as a vibrating piece, 5 ... Crystal oscillator as a vibrator, 6 ... Crystal oscillator as an oscillator, 10 ... Base, 11 ... Vibrating arm, 12 ... Notch part, 13 ... Arm part, DESCRIPTION OF SYMBOLS 14 ... Weight part, 14a ... Level difference, 14b ... Narrow part, 15, 16 ... Main surface, 17 ... Groove part, 17a ... End part, 17b ... Long side, 17c ... Short side, 17d ... Connection part, 18 ... Connection part , 80 ... Package, 81 ... Package base, 82 ... Seam ring, 83 ... External connection terminal, 84 ... Conductive adhesive, 85 ... Lid, 86 ... Through hole, 87 ... Sealing material, 88 ... Connection pad, 91 ... IC chip as a circuit element, 92 ... metal wire, 114 ... weight part, 114b ... narrow part.

Claims (6)

基部と、
前記基部から延びる少なくとも１本の振動腕と、を備え、
前記振動腕は、前記基部側に位置する腕部と、前記腕部より先端側に位置し前記腕部より幅が広い錘部と、互いに対向する両方の主面の少なくとも一方に、前記振動腕の長手方向に沿って形成された溝部と、を有し、
平面視において、前記錘部と前記腕部との結合部が、前記腕部の幅が前記錘部に近づくに連れて広がるように曲線で形成されていると共に、
平面視において、前記溝部における前記錘部側の端部の、前記長手方向に延びる長辺と前記長辺に対して交差する方向に延びる短辺との接続部が、曲線で形成されていることを特徴とする振動片。 The base,
And at least one vibrating arm extending from the base,
The resonating arm is provided on at least one of the arm portion located on the base side, the weight portion located on the distal end side of the arm portion and wider than the arm portion, and both main surfaces facing each other. And a groove formed along the longitudinal direction of
In plan view, the joint portion between the weight portion and the arm portion is formed with a curve so that the width of the arm portion spreads toward the weight portion, and
In plan view, a connecting portion between a long side extending in the longitudinal direction and a short side extending in a direction intersecting the long side of the end on the weight portion side of the groove portion is formed by a curve. Vibrating piece characterized by. 請求項１に記載の振動片において、前記溝部は、前記錘部側の端部が前記結合部にかかるように形成されていることを特徴とする振動片。   2. The resonator element according to claim 1, wherein the groove portion is formed such that an end portion on the weight portion side is placed on the coupling portion. 請求項１または請求項２に記載の振動片において、前記錘部は、前記先端側から前記基部側へ向かうに連れて、側面の段差により幅が狭くなる狭幅部を有することを特徴とする振動片。   3. The resonator element according to claim 1, wherein the weight portion includes a narrow portion whose width becomes narrower due to a step on a side surface from the distal end side toward the base portion side. Vibrating piece. 請求項１ないし請求項３のいずれか一項に記載の振動片において、前記振動腕を複数本備え、前記複数本の振動腕と、前記基部とを含んで音叉を構成することを特徴とする振動片。   4. The resonator element according to claim 1, wherein a plurality of the vibrating arms are provided, and the tuning fork includes the plurality of vibrating arms and the base portion. Vibrating piece. 請求項１ないし請求項４のいずれか一項に記載の振動片と、
前記振動片を収容するパッケージと、を備えたことを特徴とする振動子。 A vibrating piece according to any one of claims 1 to 4,
And a package for housing the resonator element. 請求項１ないし請求項４のいずれか一項に記載の振動片と、
前記振動片を発振させる発振回路を有する回路素子と、
前記振動片及び前記回路素子を収容するパッケージと、を備えたことを特徴とする発振器。 A vibrating piece according to any one of claims 1 to 4,
A circuit element having an oscillation circuit for oscillating the resonator element;
An oscillator comprising: the resonator element and a package that accommodates the circuit element.
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110063041A1 (en) * 2009-09-11 2011-03-17 Seiko Epson Corporation Resonator element, resonator, oscillator, and electronic device
WO2014208251A1 (en) * 2013-06-26 2014-12-31 株式会社大真空 Tuning fork-type piezoelectric vibrator part and tuning fork-type piezoelectric vibrator
US9178470B2 (en) 2013-07-18 2015-11-03 Seiko Epson Corporation Resonator element, resonator, oscillator, electronic device, and moving object
US9793876B2 (en) 2014-06-30 2017-10-17 Seiko Epson Corporation Resonator element, method for manufacturing resonator element, resonator, gyro sensor, electronic apparatus, and moving object

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63202113A (en) * 1987-02-17 1988-08-22 Seiko Electronic Components Ltd Coupling crystal vibrator
JPH10145179A (en) * 1996-11-13 1998-05-29 Meidensha Corp Frame-type crystal vibrator and device element using it
JP2005005896A (en) * 2003-06-10 2005-01-06 Seiko Epson Corp Piezoelectric oscillating piece, method for manufacturing piezoelectric oscillating piece, piezoelectric oscillator and electronic equipment mounted with piezoelectric oscillator
JP2005217727A (en) * 2004-01-29 2005-08-11 Daishinku Corp Piezoelectric vibration device
JP2006121441A (en) * 2004-10-21 2006-05-11 Nippon Dempa Kogyo Co Ltd Method for manufacturing crystal oscillator, and crystal oscillator
JP2007096785A (en) * 2005-09-29 2007-04-12 Kyocera Kinseki Corp Piezo-electric vibration element

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63202113A (en) * 1987-02-17 1988-08-22 Seiko Electronic Components Ltd Coupling crystal vibrator
JPH10145179A (en) * 1996-11-13 1998-05-29 Meidensha Corp Frame-type crystal vibrator and device element using it
JP2005005896A (en) * 2003-06-10 2005-01-06 Seiko Epson Corp Piezoelectric oscillating piece, method for manufacturing piezoelectric oscillating piece, piezoelectric oscillator and electronic equipment mounted with piezoelectric oscillator
JP2005217727A (en) * 2004-01-29 2005-08-11 Daishinku Corp Piezoelectric vibration device
JP2006121441A (en) * 2004-10-21 2006-05-11 Nippon Dempa Kogyo Co Ltd Method for manufacturing crystal oscillator, and crystal oscillator
JP2007096785A (en) * 2005-09-29 2007-04-12 Kyocera Kinseki Corp Piezo-electric vibration element

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110063041A1 (en) * 2009-09-11 2011-03-17 Seiko Epson Corporation Resonator element, resonator, oscillator, and electronic device
US8432087B2 (en) * 2009-09-11 2013-04-30 Seiko Epson Corporation Resonator element, resonator, oscillator, and electronic device
WO2014208251A1 (en) * 2013-06-26 2014-12-31 株式会社大真空 Tuning fork-type piezoelectric vibrator part and tuning fork-type piezoelectric vibrator
CN105191124A (en) * 2013-06-26 2015-12-23 株式会社大真空 Tuning fork-type piezoelectric vibrator part and tuning fork-type piezoelectric vibrator
US9548719B2 (en) 2013-06-26 2017-01-17 Daishinku Corporation Tuning fork type piezoelectric vibration piece and tuning fork type piezoelectric vibrator
JPWO2014208251A1 (en) * 2013-06-26 2017-02-23 株式会社大真空 Tuning fork type piezoelectric resonator element and tuning fork type piezoelectric vibrator
US9178470B2 (en) 2013-07-18 2015-11-03 Seiko Epson Corporation Resonator element, resonator, oscillator, electronic device, and moving object
US9793876B2 (en) 2014-06-30 2017-10-17 Seiko Epson Corporation Resonator element, method for manufacturing resonator element, resonator, gyro sensor, electronic apparatus, and moving object

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