JP2011233446A - Nozzle plate for manufacturing plasma display panel and method for manufacturing the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a nozzle plate for manufacturing a plasma display panel, capable of preventing an occurrence of coating failure due to wear at a nozzle outlet and also hardly causing a crack at a nozzle hole portion.SOLUTION: A plurality of nozzle holes reaching from one surface of a base plate to the other surface are arranged with an interval therebetween, and at least a part of the nozzle holes are modified in hardness higher than a periphery.

Description

  The present invention relates to a nozzle plate used for liquid or paste application in a plasma display panel manufacturing process.

The plasma display panel performs color display by generating ultraviolet rays by gas discharge and exciting the phosphor with the ultraviolet rays to emit light.
As seen in Patent Document 1 and the like, in this manufacturing process, stripe-shaped barrier ribs 21 are formed on an insulating substrate 20 as shown in FIG. Applying a paste containing is performed. In this phosphor coating process, a paste containing phosphor powder of each color of RGB is applied for each single color by a coating apparatus using the nozzle plate 1 in which a plurality of nozzle holes 22 are formed at intervals of 480 μm. .

  Specifically, the nozzle plate 1B is arranged in a direction crossing the stripe-shaped partition wall 21, and the paste B containing the phosphor powder for blue is sprayed between the partition walls 21 through the nozzle holes 22 of the nozzle plate 1B. As shown in FIG. 8B, the paste B is applied by moving the nozzle plate 1B relative to the substrate 20 in the direction of the partition wall 21 (Y-axis direction). Next, paste R containing phosphor powder for red is applied as shown in FIG. 9 using another nozzle plate 1R similarly formed at an interval of 480 μm. Further, a paste G containing phosphor powder for green is applied as shown in FIG. 10 using another nozzle plate 1G formed at intervals of 480 μm. By using the nozzle plate in this way, a component is obtained in which a paste containing phosphor powder for RGB colors is applied between the partition walls 21 at intervals of 160 μm.

  When the nozzle holes of the nozzle plates 1R, 1G, and 1B after use are observed from the outlet side of the nozzle holes, it can be seen that the nozzle holes are worn. If the use of the nozzle plate thus worn is continued and the manufacture of the above-mentioned components is continued, the size of the nozzle hole becomes large and the amount of the phosphor applied increases. However, a coating failure over the partition wall 21 occurs.

  For this reason, the wear resistance of the nozzle plate with fluorescent paint has been improved in the past by quenching the nozzle plate so that the nozzle plate is not worn and the discharge amount is not uniform. is there.

JP 2004-14479 A Japanese Patent Laid-Open No. 11-309402

  In this case, it is possible to improve the non-uniform discharge amount due to wear at the nozzle outlet, but because the nozzle plate is hard, cracks occur in the nozzle holes arranged in series due to bending and repeated strain. In the case of a manufacturing apparatus that uses a nozzle plate for mass production, the production process is interrupted when the nozzle plate is replaced, which causes a decrease in production efficiency.

  It is an object of the present invention to provide a nozzle plate that can improve the non-uniform discharge amount due to wear at the nozzle outlet and that is less susceptible to cracking in the nozzle hole portions arranged in series due to bending and repeated strain. Objective.

  In the nozzle plate for manufacturing a plasma display panel of the present invention, a plurality of nozzle holes reaching from one surface of the base plate to the other surface are arranged at intervals, and at least a part of each nozzle hole is a part of the nozzle plate. It is characterized by having a higher hardness than the periphery of the nozzle hole.

  The method of manufacturing a nozzle plate for manufacturing a plasma display panel according to the present invention includes a plurality of nozzle holes that reach one side of the base plate by irradiating a laser beam on one side of the base plate and the adjacent nozzle holes. Forming a space between the nozzle plate and the inner surface of the nozzle hole by irradiating the inner peripheral wall of the nozzle hole from the one surface of each of the base plates, thereby making the peripheral wall of the nozzle hole harder than the periphery of the nozzle hole. And a step of quenching so as to be high. Specifically, the step of quenching the peripheral wall of the nozzle hole so as to have a higher hardness than the periphery of the nozzle hole is performed by irradiating one surface of the base plate with laser light to the other surface of the base plate. Before the next nozzle hole is formed in the step of forming a plurality of nozzle holes reaching to the adjacent nozzle holes with a space therebetween. It is characterized by that.

  According to the present invention, since at least a part of each nozzle hole is modified to have a higher hardness than the periphery of the nozzle hole, the spout due to wear of the nozzle outlet is the same as the modified nozzle plate. The amount of non-uniformity can be improved, and cracks are less likely to occur in the nozzle hole portion than in the case where the entire nozzle plate is modified.

The perspective view in producing the nozzle plate of this invention AA sectional view of FIG. BB enlarged sectional view of FIG. Enlarged perspective view during processing of nozzle hole of same embodiment Enlarged cross-sectional view during processing of nozzle hole of same embodiment The enlarged plan view which looked at the nozzle hole of the embodiment from the exit side The enlarged plan view which looked at the nozzle hole of another each embodiment from the exit side Enlarged perspective view at the start and during application of a paste containing blue fluorescent paint using a nozzle plate between the partition walls Enlarged perspective view during application of paste containing red fluorescent paint using nozzle plate between partition walls Enlarged perspective view in the middle of applying paste containing green fluorescent paint using nozzle plate between partition walls

Hereinafter, the manufacturing method of the nozzle plate of the present invention will be described based on specific embodiments.
FIGS. 1 to 7 show that the nozzle plate is being processed, which is necessary when manufacturing components used in the plasma display panel.

The nozzle plate 1 shown in FIG. 1 is used when a paste containing phosphor powder is applied between the barrier ribs 21 formed at a pitch of 160 μm as described in FIG.
The base plate 2 of the nozzle plate 1 is made of SUS430 made of ferritic stainless steel. As shown in FIGS. 1 to 3, the groove 3 whose width gradually decreases from the upper surface 2a toward the rear surface 2b is formed in the longitudinal direction (X (Axial direction). A thin part 4 of about 500 μm is formed between the bottom of the groove 3 and the back surface 2 b of the base plate 2.

  A plurality of nozzle holes 5, 5,... That reach from the one surface 4a to the back surface 2b of the base plate 2 that is the other surface along the X-axis direction are formed at an interval of 480 μm. ing. The diameter of each nozzle hole 5 is about 100 μm, and specifically, it is formed as a long hole in the Y-axis direction as shown in FIG. Further, the nozzle hole 5 is formed such that the opening 4 b on one surface 4 a is larger than the opening 4 c on the back surface 2 b of the base plate 2.

The many nozzle holes 5 are formed as follows using the laser irradiation device 6.
Laser light (wavelength: 1070 nm) generated from the first laser light source 7a shown in FIG. 1 passes through the first mirror 8a, the first and second scan mirrors 9a and 9b, and further through the lenses 10 and 11. Then, the nozzle 4 is formed by irradiating the thin portion 4 and evaporating the material while scanning the second scan mirror 9b.

  When one nozzle hole 5 penetrates, the first laser light source 7a is turned off before the adjacent nozzle hole 5 (shown in phantom lines in FIGS. 4 and 5) is similarly formed by the laser irradiation device 6. The second laser light source 7b is turned on, and the laser light (wavelength: 1053 nm) from the second laser light source 7b is supplied to the second mirror 8b, the first mirror 8a, the first and second scan mirrors 9a, Irradiate the peripheral wall 5a of the nozzle hole 5 through 9b and further through the lenses 10 and 11, and as shown by hatching in FIGS. 5 and 6, only the vicinity of the outlet of the nozzle hole 5 is quenched 12 Reform.

  Even if the laser light generated from the second laser light source 7b has a high output (1 kW), the pulse width thereof is a narrow waveform on the order of picoseconds, and the first laser light source 7a used for evaporation of the material is used. The pulse width is extremely narrow compared to the laser beam generated from the laser beam, the effective output is small compared to the first laser light source 7a, and the irradiated portion is heated to the temperature required for quenching, so that the material It does not evaporate.

  When this modification is completed, the nozzle hole 5 is formed by irradiating the first laser light source 7a at a predetermined location of the adjacent nozzle hole 5 (shown in phantom lines in FIGS. 4 and 5), and then the second In the same manner, only the vicinity of the outlet of the nozzle hole 5 is quenched and modified.

This process is repeated to repeat nozzle hole drilling and modification.
When the opening 4b and the opening 4c have the same size, when the laser beam is applied to the peripheral wall 5a of the nozzle hole 5 from one surface 4a for modification, the laser beam to the peripheral wall of the nozzle hole 5 Although the irradiation range is limited, in this embodiment, since the opening 4b is larger than the opening 4c, the laser light can be irradiated to a wide range of the peripheral wall 5a of the nozzle hole 5, and the nozzle hole is wide. Range reforming can be realized.

  As described above, since at least a part of the plurality of nozzle holes 5, 5,... Has been modified to have a higher hardness than the periphery of the nozzle holes, the paste containing phosphor is applied through the nozzle holes. Even if it is executed, the shape of the nozzle hole can be maintained for a long period of time, and the occurrence of poor coating can be prevented.

  Further, since the thin-walled portion 4 of the nozzle plate 1 is left with a portion that has not been quenched, cracks are unlikely to occur in the portions of the nozzle holes arranged in series due to bending or repeated distortion, and the conventional nozzle Compared with the case where the wear resistance is improved by quenching like a plate, the number of times of replacement of the nozzle plate can be reduced, which is effective for mass production of plasma display panels.

  Further, the nozzle hole 5 is formed by irradiating one surface of the base plate with laser light, and when the nozzle hole 5 is drilled before the adjacent nozzle hole is drilled, from the same side as the side irradiated with the laser. Since the modification process is performed by irradiating with laser light, positioning is not necessary compared to the case where an adjacent nozzle hole is drilled and then the nozzle hole drilled before that is modified. Workability is good.

  In the above-described embodiment, the reforming range includes a part of the nozzle hole 5, specifically, the exit side of the nozzle plate 1, including the corner portion 13 that is the upper side of the moving direction when the nozzle plate 1 is used. Although the range on both sides was modified and the corner portion on the lower side in the moving direction was not modified, the entire circumference on the outlet side of the nozzle plate 1 may be quenched and modified. In addition, since the flow of the paste to be applied is bent at the corner portion 13 on the upper side in the moving direction, in the nozzle plate 1 not subjected to the modification treatment, the corner portion 13 is more than the corner portion on the lower side in the moving direction. Wear was seen. Therefore, it is possible to shorten the processing time of the nozzle plate 1 by selectively performing the reforming process only on the portion with much wear as described above.

  In the above embodiment, the planar shape of the outlet side of the nozzle hole 5 is a long hole, but a circle, a rectangle, and two circles are connected as shown in FIGS. Any of the long holes can be similarly implemented.

  In the above embodiment, when applying the paste containing the fluorescent paint, the nozzle plate 1 is not modified with respect to the substrate 20 on which the partition plate 21 is formed. However, the substrate 20 on which the partition wall 21 is formed may be moved with respect to the nozzle plate 1, and the substrate 20 on which the partition wall 21 is formed and the nozzle plate are moved relative to each other. It is effective for.

  The present invention contributes to mass production of plasma display panels.

DESCRIPTION OF SYMBOLS 1 Nozzle plate 2 Base plate 2a Upper surface of base plate 2b Back surface of base plate 3 Groove 4 Thin portion 4a One side of thin portion 4b Opening of one side 4a 4c Opening of back side 2b of base plate 2 5 Nozzle hole 5a Nozzle hole 5 peripheral wall 6 laser irradiation device 7a first laser light source 7b second laser light source 8a first mirror 9a, 9b first and second scan mirrors 10, 11 lens 12 quenching process

Claims (5)

A plurality of nozzle holes reaching from one surface of the base plate to the other surface are arranged at intervals, and at least a part of each nozzle hole is modified to have a higher hardness than the periphery of the nozzle hole. Nozzle plate for manufacturing plasma display panels. 2. The nozzle plate for manufacturing a plasma display panel according to claim 1, wherein an opening of one surface of the base plate is larger than an opening of the other surface of the base plate. A step of irradiating one surface of the base plate with laser light to form a plurality of nozzle holes reaching the other surface of the base plate with an interval between the adjacent nozzle holes;
Irradiating the inner peripheral wall of the nozzle hole with laser light from the one surface of each of the base plates, and quenching the peripheral wall of the nozzle hole so that the hardness is higher than the periphery of the nozzle hole; A method for producing a nozzle plate for producing a plasma display panel. The step of quenching the peripheral wall of the nozzle hole so that the hardness is higher than the periphery of the nozzle hole,
A nozzle hole is formed in a step of forming a plurality of nozzle holes reaching the other surface of the base plate by irradiating a laser beam on one surface of the base plate with an interval between the adjacent nozzle holes. The method for manufacturing a nozzle plate for manufacturing a plasma display panel according to claim 3, wherein the nozzle plate is formed on the formed nozzle holes before forming the next nozzle holes. In the step of forming a plurality of nozzle holes reaching the other surface of the base plate by irradiating one surface of the base plate with an interval between the adjacent nozzle holes, the base plate 4. The method of manufacturing a nozzle plate for manufacturing a plasma display panel according to claim 3, wherein the opening on one surface is formed larger than the opening on the other surface of the base plate.

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