JP2011230316A - Filter, manufacturing method of filter, fluid jetting head and fluid jetting apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a filter which has a high capturing capacity and is small in channel resistance.SOLUTION: The filter which captures foreign substances present in a fluid has an inflow surface and an outflow surface of the fluid, and is equipped with both a substrate which has a plurality of bends formed to project towards at least either of the inflow surface and the outflow surface and openings which are formed in the bends to face in a different direction from the projection direction of the bends and make the inflow surface side of the substrate communicate with the outflow surface side.

Description

  The present invention relates to a filter, a filter manufacturing method, a fluid ejecting head, and a fluid ejecting apparatus.

  The ink jet recording head is provided with a filter to prevent bubbles and foreign matter from entering the ink flow path.

JP 2008-023820 A JP 2009-196292 A

  As the above-mentioned filter, for example, a filter having a high capturing ability and a low flow resistance is required.

  An object of the present invention is to provide a filter having a high capturing ability and a small flow path resistance, a filter manufacturing method, a fluid ejecting head, and a fluid ejecting apparatus.

  The filter according to the present invention is a filter that captures foreign matter present in a fluid, and has a fluid inflow surface and an outflow surface, and projects toward at least one of the inflow surface and the outflow surface. The substrate having a plurality of curved portions formed on the curved portion is formed on the curved portion so as to face a direction different from the protruding direction of the curved portion, and the inflow surface side and the outflow surface side of the substrate are communicated with each other. And an opening.

  According to such a configuration, the plurality of curved portions formed on the substrate are provided so as to protrude toward at least one of the inflow surface and the outflow surface, and the curved portion has a protruding direction of the curved portion. Since the opening part which connects the inflow surface side and the outflow surface side is provided so that it may face in a different direction, a fluid can be distribute | circulated from an opening part, capturing a foreign material in a curved part. As a result, a filter having a high capturing ability and a small channel resistance can be obtained.

In the filter, the opening is preferably directed in a direction orthogonal to the protruding direction.
According to such a structure, since an opening part is orient | assigned to the direction orthogonal to the protrusion direction of a curved part, the distribution | circulation of a foreign material can be prevented efficiently. Thereby, a filter having a high capturing ability is obtained.

In the filter, it is preferable that a plurality of the openings are provided in each of the curved portions.
According to such a configuration, since a plurality of openings are provided in each curved portion, the flow path resistance of the fluid can be reduced accordingly. Thereby, a filter with small flow path resistance can be obtained.

In the above filter, two of the plurality of openings are preferably provided to face each other.
According to such a configuration, since two of the plurality of openings are provided to face each other, the fluid can easily flow. Thereby, a filter with small flow path resistance can be obtained.

  A filter manufacturing method according to the present invention is a filter manufacturing method that allows a recording fluid to pass through and captures foreign substances present in the fluid, and shears a part of each of a plurality of predetermined regions of a substrate. And a plurality of openings that press the punches to the plurality of predetermined regions so that the plurality of predetermined regions are convexly curved on one surface of the substrate, and communicate the front side and the back side of the substrate. And an opening forming step for forming the substrate.

  According to such a configuration, a plurality of openings that connect the front surface side and the back surface side of the substrate can be formed in one step by pressing the punch against a predetermined region of the substrate. Thereby, a filter having a high capturing ability and a small channel resistance can be efficiently manufactured by a simple process.

In the opening forming step, the filter preferably shears a part of the predetermined region linearly.
According to such a configuration, since a part of the predetermined area is sheared linearly, the opening can be easily oriented in a direction orthogonal to the protruding direction of the predetermined area. Thereby, a filter having a high capturing ability can be manufactured.

In the opening forming step, the filter preferably shears a plurality of portions of the predetermined region.
According to such a configuration, since a plurality of portions of the predetermined region are sheared, openings are formed in the plurality of portions for each predetermined region. Thereby, a filter with low flow resistance can be manufactured.

  A fluid ejection head according to the present invention includes a plurality of nozzle openings for ejecting fluid, a flow path for supplying the fluid to the nozzle openings, and the fluid ejection head that is disposed in the flow path and allows the fluid to pass through the fluid. And a filter according to the present invention that captures foreign substances present.

  According to such a configuration, by providing the filter in the flow path in the fluid ejecting head, it is possible to effectively capture the foreign matter existing in the fluid flowing in the flow path while keeping the flow path resistance low. Is possible. Thereby, clogging of the nozzle opening can be prevented and ejection failure can be eliminated.

In the fluid ejecting head, it is preferable that the curved portion is provided so as to protrude toward the upstream side in the fluid flow direction.
According to such a configuration, the curved portion is provided so as to protrude toward the upstream side in the fluid flow direction, so that foreign matters in the fluid are easily captured by the curved portion. Thereby, clogging of the nozzle opening can be prevented more reliably.

In the fluid ejecting head, it is preferable that the curved portion is provided so as to protrude toward the downstream side in the fluid flow direction.
According to such a configuration, since the curved portion is provided so as to protrude toward the downstream side in the fluid flow direction, the fluid can easily flow along the curve. Thereby, a fluid ejecting head with high ejection performance can be obtained.

  The fluid ejecting apparatus according to the present invention includes a fluid ejecting head that ejects fluid from a plurality of nozzle openings, a fluid reservoir that stores the fluid supplied to the fluid ejecting head, and the fluid reservoir to the nozzle opening. It is provided with the flow path which supplies a fluid, and the filter of this invention which is arrange | positioned in the said flow path and permeate | transmits the said fluid and capture | acquires the foreign material which exists in this fluid.

  According to such a configuration, since the filter of the present invention is provided in the flow path connected to the nozzle opening, it is possible to effectively remove foreign matters while keeping the flow path resistance low. Clogging can be prevented. As a result, a high-quality fluid ejecting apparatus that can perform good discharge without causing defective discharge can be obtained.

1 is a plan view showing an overall configuration of a printer according to an embodiment of the present invention. FIG. 3 is a cross-sectional view illustrating the configuration of a recording head in the printer according to the embodiment. FIG. 2 is a schematic diagram illustrating a configuration of a main part around a recording head according to an embodiment. The figure which shows the structure of the filter which concerns on this embodiment. The top view which shows the structure of a part of filter which concerns on this embodiment. The figure explaining the manufacturing process of the filter concerning this embodiment. Sectional drawing which shows the modification of this embodiment. Sectional drawing which shows the comparative example and modification of this embodiment. Sectional drawing which shows the modification of this embodiment.

  Embodiments of the present invention will be described below with reference to the drawings. In each drawing used for the following description, the scale of each member is appropriately changed to make each member a recognizable size. First, a printer that is an embodiment of a fluid ejecting apparatus according to the invention will be described. FIG. 1 is a plan view showing the overall configuration of the printer.

  A printer 100 according to the present embodiment includes a printer main body 5, a main tank 6 (fluid storage unit) made of an ink cartridge, and a carriage 4 on which a sub tank 2 and a recording head 3 (fluid ejection head unit) are mounted. It is configured.

  The printer body 5 stores (accommodates) a carriage moving mechanism (not shown) that reciprocates the carriage 4, a paper feed mechanism (not shown) that conveys recording paper (not shown), and ink to be supplied to the recording head 3. The main tank 6 is provided.

  The carriage moving mechanism includes a guide shaft 8 installed in the width direction of the printer body, a pulse motor 9, a drive pulley 10 that is rotationally driven by the pulse motor 9 connected to the rotation shaft of the pulse motor 9, and a drive pulley. 10 is an idle pulley 11 provided on the opposite side of the printer body 5 in the width direction, and a timing belt 12 that is bridged between the drive pulley 10 and the idle pulley 11 and connected to the carriage 4. It is configured.

  By driving the pulse motor 9 under such a configuration, the carriage 4 reciprocates in the main scanning direction along the guide shaft 8. The paper feed mechanism includes a paper feed motor and a paper feed roller (not shown) that is driven to rotate by the paper feed motor. The paper feed mechanism is linked to the recording (printing / printing) operation of the recording paper. It is designed to send out sequentially.

  FIG. 2 is a cross-sectional view illustrating the configuration of the recording head in the printer 100 of this embodiment. As shown in FIG. 2, the recording head 3 in this embodiment includes an introduction needle unit 17, a head case 18, a flow path unit 19, and an actuator unit 20 as main components.

  Two ink introduction needles 22 are mounted side by side on the upper surface of the introduction needle unit 17 with the filter 50 interposed. The sub tanks 2 are respectively attached to these ink introduction needles 22. An ink introduction path 23 corresponding to each ink introduction needle 22 is formed inside the introduction needle unit 17.

  The upper end of the ink introduction path 23 communicates with the ink introduction needle 22 via the filter 50, and the lower end communicates with the case flow path 25 formed inside the head case 18 via the packing 24.

  The sub tank 2 is molded from a resin material such as polypropylene. The sub-tank 2 is formed with a recess that becomes the ink chamber 27, and the ink chamber 27 is partitioned by attaching a transparent elastic sheet 26 to the opening surface of the recess.

  In addition, a needle connection portion 28 into which the ink introduction needle 22 is inserted projects downward from the lower portion of the sub tank 2. The ink chamber 27 in the sub-tank 2 has a shallow mortar shape, and an opening on the upstream side of the connection channel 29 communicating with the needle connection portion 28 is located slightly below the vertical center on the side surface. Is facing. A tank section filter (not shown) is provided on the upstream side of the ink chamber 27. A seal member 31 into which the ink introduction needle 22 is liquid-tightly fitted is fitted in the internal space of the needle connection portion 28.

  The sub tank 2 is provided with an ink inlet (not shown) communicating with the ink chamber 27. An ink supply tube 34 that supplies ink stored in the main tank 6 is connected to the ink inlet, and the ink that has passed through the ink supply tube 34 flows into the ink chamber 27. The printer 100 according to this embodiment includes two main tanks 6, and each is connected to the corresponding sub tank 2 via the ink supply tube 34. The number of main tanks 6 is not limited to this.

  The elastic sheet 26 shown in FIG. 2 can be deformed into a direction in which the ink chamber 27 is contracted and a direction in which the ink chamber 27 is expanded. In addition, the ink pressure fluctuation is absorbed by the damper function due to the deformation of the elastic sheet 26. That is, the sub tank 2 functions as a pressure damper by the action of the elastic sheet 26. Accordingly, the ink is supplied to the recording head 3 side in a state where the pressure fluctuation is absorbed in the sub tank 2.

  The head case 18 is a synthetic resin hollow box-like member. The flow path unit 19 is joined to the lower end surface of the head case 18, and the actuator unit 20 is accommodated in the accommodating space 37 formed therein. The introduction needle unit 17 is attached in a state where the packing 24 is interposed on the upper end surface opposite to the side.

  A case channel 25 is provided inside the head case 18 so as to penetrate the height direction. The upper end of the case flow path 25 communicates with the ink introduction path 23 of the introduction needle unit 17 via the packing 24.

  Further, the lower end of the case channel 25 communicates with the common ink chamber 44 in the channel unit 19. Therefore, the ink introduced from the ink introduction needle 22 is supplied to the common ink chamber 44 side through the ink introduction path 23 and the case flow path 25.

  FIG. 3 is a schematic diagram illustrating a main configuration around the recording head 3 for explaining the present embodiment. As shown in FIG. 3, it has a synthetic resin head case 18, a flow path unit 19 is joined to the lower end surface of the head case 18, and an actuator unit 20 is accommodated inside the head case. The ink introduction path 23 is connected to the upper end surface side opposite to the 19 side.

  A case channel 25 is provided inside the head case 18 so as to penetrate the height direction. The upper end of the case flow path 25 communicates with the ink introduction path 23, and the lower end communicates with the common ink chamber 44 in the flow path unit 19. Therefore, the ink introduced from the ink introduction path 23 is supplied to the common ink chamber 44 side through the case flow path 25.

  The actuator unit 20 includes a plurality of piezoelectric vibrators 38 arranged in a comb-like shape, a fixed plate 39 joined to the piezoelectric vibrators, and wiring for supplying drive signals from the printer main body side to the piezoelectric vibrators 38. It is comprised from the flexible cable 40 as a member. Each piezoelectric vibrator 38 has a fixed end portion bonded to the fixed plate 39 and a free end portion protruding outward from the tip surface of the fixed plate 39. That is, each piezoelectric vibrator 38 is mounted on the fixed plate 39 in a so-called cantilever state.

  The fixed plate 39 supports the piezoelectric vibrator 38 and is made of, for example, stainless steel having a thickness of about 1 mm. The actuator unit 20 is housed and fixed in the housing space 37 by bonding the back surface of the fixed plate 39 to the inner wall surface of the case that defines the housing space 37.

  The flow path unit 19 is formed by integrating the flow path unit constituent members including the vibration plate 41, the flow path substrate 42, and the nozzle substrate 43 in a stacked state. 45 and a member that forms a series of ink flow paths from the pressure chamber 46 to the nozzle opening 47a. The pressure chamber 46 is formed as a long and narrow chamber in a direction orthogonal to the direction in which the nozzle openings 47a are arranged (nozzle row direction), and is cast with the piezoelectric vibrators 38 facing each other.

  The common ink chamber 44 communicates with the ink introduction path 23 and is a chamber into which ink from the sub tank side is introduced. The ink introduced into the common ink chamber 44 is distributed and supplied to each pressure chamber 46 through the ink supply port 45.

  The nozzle substrate 43 arranged at the bottom of the flow path unit 19 is a thin metal plate having a plurality of nozzle openings 47a arranged in a row at a pitch (for example, 180 dpi) corresponding to the dot formation density. A plurality of nozzle openings 47a are formed on the surface of the nozzle substrate 43, and the nozzle openings 47a are configured by the surface of the nozzle substrate 43 on which such nozzle openings 47a are formed.

  The flow path substrate 42 is manufactured by subjecting a silicon wafer, which is a crystalline base material, to anisotropic etching. The vibration plate 41 is a double-structured composite plate material in which an elastic film is laminated on a metal support plate such as stainless steel. An island portion 48 to which the tip surface of the piezoelectric vibrator 38 is joined is formed in a portion corresponding to the pressure chamber 46 of the vibration plate 41 by removing the support plate in an annular shape by etching or the like. This part functions as a diaphragm part. That is, the diaphragm 41 is configured such that the elastic film around the island portion 48 is elastically deformed in accordance with the operation of the piezoelectric vibrator 38.

  The vibration plate 41 seals one opening surface of the flow path substrate 42 and functions as a compliance portion 49. As for the portion corresponding to the compliance portion 49, like the diaphragm portion, the support plate is removed by etching or the like to make only the elastic film.

  In such a recording head 3, when driving vibration is supplied to the piezoelectric vibrator 38 through the flexible cable 40, the piezoelectric vibrator 38 expands and contracts in the longitudinal direction of the element, and accordingly, the island portion 48 approaches the pressure chamber 46. Move in the direction of moving or moving away. As a result, the volume of the pressure chamber 46 changes, and the pressure in the ink in the pressure chamber 46 changes. The ink droplet D is ejected from the nozzle 47 by this pressure fluctuation.

  FIG. 4A is a plan view showing the configuration of the filter 50. FIG. 4B is a diagram showing a configuration along the AA cross section of FIG. FIG. 4C is an enlarged view showing a part of the filter 50.

  As shown in FIGS. 4A to 4C, the filter 50 allows the ink to pass therethrough and captures foreign substances (substances) present in the ink. The filter 50 includes a substrate S provided with a curved portion C and an opening H. The filter 50 is fixed to the inner wall surface of the ink introduction needle 22, for example.

  The substrate S is formed using, for example, stainless steel (SUS). The thickness of the board | substrate S is formed in the range of 10-20 micrometers, for example. A plurality of curved portions C are formed on the substrate S. The curved portion C is formed to be curved so as to protrude toward the surface Sa of the substrate S, for example. A part of the curved portion C is in a state of being sheared with respect to the substrate S. An opening H is formed in this sheared portion.

  The plurality of curved portions C are formed over almost the entire surface of the substrate S, for example. These curved portions C are arranged in a line at a predetermined pitch, for example, and a plurality of rows of the curved portions C are provided. Moreover, in this embodiment, it is provided so that the bending part C may be arrange | positioned in the position which shifted | deviated by half pitch between the row | line | columns of the adjacent bending part C. FIG. Of course, the arrangement of the curved portion C is not limited to the above example, and for example, a configuration arranged in a matrix may be used.

  The opening H is formed so that the front surface Sa of the substrate S communicates with the back surface Sb of the substrate S. The opening H is, for example, a direction different from the protruding direction of the curved portion C (direction perpendicular to the surface Sa of the substrate S), in this embodiment, for example, a direction orthogonal to the protruding direction of the curved portion C (a direction parallel to the surface Sa). ). For this reason, for example, when the substrate S is viewed from the surface Sa side as shown in FIG. 4A, the opening H is arranged to be hidden by the curved portion C.

  Moreover, as shown in FIG.4 (c), the opening part H is formed, for example in trapezoid shape. The shape of the opening H is not limited to a trapezoidal shape, and may be another shape. Examples of such a shape include an ellipse, a rhombus, a parallelogram, and a polygon. The opening area of the opening H is set according to, for example, the thickness of the substrate S, the type of ink, and the like.

FIG. 5 is a diagram illustrating an installation state of the filter 50.
For example, as shown in FIG. 5A, the substrate S can be arranged so that the protruding direction of the curved portion C is upstream in the ink flow direction. In this case, the ink flows into the surface Sa side of the substrate S, flows through the opening H to the back surface Sb, and flows out from the back surface Sb side. Thus, the surface Sa of the substrate S becomes the ink inflow surface, and the back surface Sb becomes the ink outflow surface.

  Further, for example, as shown in FIG. 5B, the curved portion C may be disposed so that the protruding direction is on the downstream side in the ink flow direction. In this case, the ink flows into the back surface Sb side of the substrate S, flows through the opening Sa to the front surface Sa, and flows out from the front surface Sa side. As described above, the back surface Sb of the substrate S is an ink inflow surface, and the surface Sa is an ink outflow surface.

Next, a method for manufacturing the filter 50 will be described. FIG. 6A to FIG. 6F are diagrams for explaining the manufacturing process of the filter 50.
As shown in FIG. 6A, first, a dieless material 502 made of PET (polyethylene terephthalate) having a thickness of 20 μm is disposed, and a stainless steel substrate S having a thickness of 15 μm is placed thereon.

  Next, the punch unit PU is disposed on the surface Sa of the substrate S. The punch unit PU has a base 503s and a punch 503, for example, as shown in FIG. Here, for example, the punch unit PU is arranged while aligning the positions of the punch 503 and the predetermined area AR of the substrate S. The base 503s is formed in a flat plate shape, for example. The punch 503 is provided on one surface of the base portion 503s, and is formed so as to protrude from the flat surface of the base portion 503s.

  A pair of punches 503 are provided on the side of the first surface 503a, the second surface 503b formed in a trapezoidal shape perpendicular to the flat surface of the base 503s, and the first surface 503a. And a third surface 503c. The dimension of the outer shape of the punch 503 corresponds to the dimension and shape of the curved portion C of the filter 50, for example. 6 (a) to 6 (f) show a state in which one punch 503 is provided on the base 503a for the sake of simplicity of explanation, in practice, a plurality of punches 503 are formed. ing.

  Next, as shown in FIG. 6B, the punch 503 is driven into a predetermined area AR of the substrate S (opening forming step). By this driving, a part SH of the predetermined area AR of the substrate S is sheared linearly along the shape of the second surface 503b of the punch 503, for example. At the same time, the curved portion C is formed by being bent so as to be curved convexly from the sheared portion SH to the back surface Sb of the substrate S in the predetermined region AR. In addition, the opening H is formed by the sheared portion SH and the curved portion C. As described above, since a plurality of punches 503 are formed in the base portion 503s of the punch unit PU, a plurality of openings H are simultaneously formed in the substrate S in this process. Then, as shown in FIG. 6C, the substrate S having the curved portion C and the opening S is obtained by extracting the punch 503 of the punch unit PU from the substrate S.

  As the dieless material 502, PC (polycarbonate), POM (poly sweat tar), ABS (ABS resin), PPS (polyphenine sulfide), or the like can be used. Various selections can be made according to the pitch of the openings H or the like.

  Thus, according to the present embodiment, the plurality of curved portions C formed on the substrate S are provided so as to protrude toward at least one of the inflow surface Sa (or Sb) and the outflow surface Sb (or Sa). Since the opening C is provided in the bending portion C so as to face the inflow surface side and the outflow surface side so as to face a direction different from the protruding direction of the bending portion C. The fluid can be circulated from the opening H while capturing the water. Thereby, the filter 50 having a high capturing ability and a small flow path resistance is obtained.

The technical scope of the present invention is not limited to the above-described embodiment, and appropriate modifications can be made without departing from the spirit of the present invention.
For example, in the above-described embodiment, the configuration in which one opening H is provided for each bending portion C has been described as an example, but the present invention is not limited thereto. For example, as shown in FIGS. 7A and 7B, a configuration in which two openings H are provided for one bending portion C may be employed.

  In the configuration shown in FIGS. 7A and 7B, the curved portion C is formed so as to protrude in a U shape with respect to the substrate S. The curved portion C is formed, for example, in a band shape, and openings H1 and H2 are formed at both ends in the width direction (direction orthogonal to the longitudinal direction), respectively. The openings H1 and H2 are arranged to face each other. The front surface Sa and the back surface Sb of the substrate S communicate with each other at two locations of the openings H1 and H2.

  When forming such a curved portion C, for example, a punch unit PU as shown in FIG. 7C is used. The punch 503 provided in the punch unit PU includes a first surface 503e formed to project in a band shape so as to be curved with respect to the base portion 503s, and a second surface 503b formed on the side of the first surface 503e. have. By driving this punch unit PU into the substrate S, two locations SH1 and SH2 in a predetermined region (region where the curved portion C is formed) of the substrate S along the second surface 503b (see FIG. 7B). Can be sheared. In this way, the curved portion C and the openings H1 and H2 can be formed.

  In this manner, since the plurality of openings H1 and H2 are provided for one curved portion C, the ink flow path resistance can be reduced accordingly. Thereby, the filter 50 with small flow path resistance can be obtained. Further, since the openings H1 and H2 are provided to face each other, the fluid can be easily flowed. Thereby, the flow path resistance can be further reduced.

  Here, for example, as shown in FIG. 8A, in the filter 500 in which the through hole H33 having the first opening area (R1) is formed by punching, a frictional resistance is generated between the inner wall of the through hole H33. Ink passes through the filter 500. For this reason, the pressure loss of the ink per opening area will become large.

  On the other hand, in the above configuration, since the plurality of openings H1 and H2 having the second opening area (R2) are provided, as shown in FIG. It passes through the filter 50 in contact with the edge portions of H1 and H2. For this reason, since the frictional resistance between the ink and the filter 50 when passing through the filter 50 is suppressed, the pressure loss of the ink per opening area is reduced as compared with the configuration shown in FIG. Will do.

  Moreover, in the said embodiment, although demonstrated taking the example of the structure by which the curved part C was formed over the substantially whole surface of the board | substrate S, it is not restricted to this, The curved part C is formed in a part of board | substrate S, for example. The formed structure may be used. For example, as shown in FIG. 9, the curved portion C may be formed in the peripheral portion of the filter 50, and the opening Ha may be formed in the central portion of the filter 50. In this case, the opening H provided in the curved portion C at the peripheral edge is directed toward the center of the substrate S. According to this configuration, the ink can be rectified by the opening H provided at the peripheral edge.

  Moreover, in the said embodiment, although the filter 50 demonstrated and demonstrated as an example the structure which has the board | substrate S of one sheet, it is not restricted to this, For example, it is the structure which has the some board | substrate S as the filter 50, It doesn't matter. In this case, a plurality of substrates S can be stacked in the ink distribution direction. About arrangement | positioning of the some board | substrate S, it is good also as a structure which each board | substrate S is contacting, and you may arrange | position and talk about board | substrates S.

  H, H1, H2 ... opening S ... substrate C ... curved portion PU ... punch unit Sa ... front surface (inflow surface or outflow surface) Sb ... back surface (outflow surface or inflow surface) SH ... shearing portion 2 ... sub tank 3 ... recording head 50 ... Filter 100 ... Printer AR ... Predetermined area

Claims (11)

A filter that captures foreign substances present in the fluid,
A substrate having a plurality of curved portions formed so as to protrude toward at least one of the inflow surface and the outflow surface, and the inflow surface and the outflow surface of the fluid;
A filter comprising: an opening that is formed in the curved portion so as to face a direction different from the protruding direction of the curved portion and communicates the inflow surface side and the outflow surface side of the substrate. The filter according to claim 1, wherein the opening is directed in a direction orthogonal to the protruding direction. The filter according to claim 1, wherein a plurality of the openings are provided in each of the curved portions. The filter according to claim 3, wherein two of the plurality of openings are provided to face each other. A method of manufacturing a filter that allows a recording fluid to pass through and captures foreign matter present in the fluid,
Each of the plurality of predetermined areas of the substrate is sheared and a punch is pressed to each of the predetermined areas such that the plurality of the predetermined areas are convexly curved on one surface of the substrate. The manufacturing method of the filter including the opening part formation process which forms the several opening part which connects the surface side and back surface side of this. The method for manufacturing a filter according to claim 5, wherein in the opening forming step, a part of the predetermined region is sheared linearly. The method for manufacturing a filter according to claim 5 or 6, wherein in the opening forming step, a plurality of portions of the predetermined region are sheared. A plurality of nozzle openings for ejecting fluid;
A flow path for supplying the fluid to the nozzle opening;
A fluid ejection head comprising: the filter according to any one of claims 1 to 4, which is disposed in the flow path, allows the fluid to pass therethrough, and captures foreign matter existing in the fluid. The fluid ejecting head according to claim 8, wherein the curved portion is provided so as to protrude toward the upstream side in the flow direction of the fluid. The fluid ejecting head according to claim 8, wherein the curved portion is provided so as to protrude toward the downstream side in the fluid flow direction. A fluid ejecting head for ejecting fluid from a plurality of nozzle openings;
A fluid reservoir for storing the fluid to be supplied to the fluid ejection head;
A flow path for supplying the fluid from the fluid reservoir to the nozzle opening;
A fluid ejecting apparatus comprising: the filter according to any one of claims 1 to 7, which is disposed in the flow path, allows the fluid to pass therethrough, and captures foreign matter existing in the fluid.

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