JP2011227422A - Optical device and microscope utilizing optical device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical device that can offer two-dimensional resolution beyond diffraction limit.SOLUTION: An optical device (100) for observing an analyte (SA) includes: a lens (HL) that is in a shape of spherical shell with a convex surface and a concave surface and converts evanescent light generated by the analyte into transmitting light; and a polarization element (PO) that is placed on a side of the convex surface of the lens and has a polarization area transmitting light with an electric field oscillating only in a predetermined polarization direction, the polarization direction of the polarization area being arranged in axial symmetry with respect to the central axis of the polarization element (PO) as a whole.

Description

  The present invention relates to an optical device and a microscope using the optical device.

  As shown in Non-Patent Document 1, a half-cylindrical lens is known in which a cylinder that converts evanescent light, which is light exceeding the diffraction limit, into propagating light using a metal thin film is divided in half. Yes. In addition, this semi-cylindrical lens makes it possible to observe the subject with super-resolution by resolving the object smaller than the wavelength of the incident light by propagating the evanescent light.

Liu, Z .; et al. Far-field optical hyperlens manufacturing sub-diffractive-limited objects. Science 315, 1686 (2007)

However, a semi-cylindrical lens can only obtain super-resolution only on a plane that is perpendicular to the axis of the cylinder and parallel to the light detection surface. In other words, only a one-dimensional super-resolution can be obtained with a semi-cylindrical lens.
Therefore, an object is to provide an optical device capable of obtaining two-dimensional super-resolution.

  An optical apparatus according to a first aspect is an optical apparatus for observing a subject, which is a spherical shell having a convex surface and a concave surface, in which a part of a hollow sphere is cut off, and evanescent light generated from the subject is used as propagating light. A lens to be converted and a polarizing region that is disposed on the convex surface side of the lens and transmits light whose electric field vibrates only in a specific polarization direction. The polarization direction of the polarization region as a whole is axially symmetric with respect to the central axis. And a polarizing element.

  The microscope according to the second aspect includes the optical device according to the first aspect and an objective lens that collects the propagation light to create a real image on the image plane, and the subject is disposed on the concave side of the lens.

  The optical apparatus of the present invention can detect evanescent light emitted from a subject as a propagating light separated from a TE wave that is light of an unnecessary polarization component, and obtain a two-dimensional resolution exceeding the diffraction limit. It is possible.

1 is a schematic diagram of an optical device 100. FIG. (A) is a top view of polarizing element PO. (B) is a plane transmission diagram of the hyper lens HL. (C) is AA sectional drawing of the hyper lens HL of FIG.2 (b). It is a figure for demonstrating generation | occurrence | production of the evanescent light EV. It is a figure for demonstrating evanescent light. It is a flowchart which shows the formation process of a hyper lens. It is a perspective view of quartz material wafer SU in which chromium film Cr was formed. 1 is a schematic diagram of an optical device 200. FIG. 1 is a schematic diagram of an optical device 300. FIG. 1 is a schematic diagram of an optical device 400. FIG. 1 is a schematic configuration diagram of a microscope 500. FIG.

(First embodiment)
1, 2 and 3 are diagrams for explaining an optical apparatus 100 for observing a subject through evanescent light.

<Configuration of Optical Device 100>
FIG. 1 is a schematic diagram of the optical device 100. 2A is a plan view of the polarizing element PO, FIG. 2B is a plan transmission diagram of the hyper lens HL, and FIG. 2C is a plan view of the hyper lens HL of FIG. It is AA sectional drawing. FIG. 3 is a diagram for explaining evanescent light. This hyper lens has a negative dielectric constant in the radial direction at the center of the spherical shell and a positive dielectric constant in a plane perpendicular to the radial direction.

  As shown in FIG. 1, the optical device 100 includes an illumination light source IL, a polarizing element PO, a hyper lens HL, and a light receiving optical system LE. Further, the subject SA is arranged in the hyper lens HL.

The illumination light source IL emits illumination light LW11 having a predetermined diameter (shown by a dotted line in the figure), and the illumination light LW11 enters the polarization element PO. Polarizing element PO is by transmitting only T M-wave illumination light LW11 incident (Transverse Magnetic Wave), and transmits a light beam LW12. The light beam LW12 is applied to the subject SA. Scattered light or transmitted light having a structure equal to or less than the wavelength of the subject SA irradiated with the light beam LW12 becomes evanescent light. The TM component of the evanescent light is converted by the hyper lens HL into a light beam LW13 that is propagating light. The light beam LW13 enters the light receiving optical system LE and is detected. The central axis of the illumination light LW11, the central axis of the light beam LW12, and the central axis of the light beam LW13 are on the same axis. When the illumination optical system is present, the polarizing element PO is desirably present on the pupil plane of the illumination optical system.

  The optical device 100 can obtain a two-dimensional image of evanescent light by receiving a light beam having only two-dimensionally necessary polarization with the light receiving optical system LE. Since a light beam having only two-dimensionally necessary polarization is formed by the polarization element PO, the light beam incident on the polarization element PO needs to be random polarization having polarization in all directions. Therefore, the illumination light source IL needs to irradiate a randomly polarized light beam. The illumination light source IL emits a light beam having a wavelength of 365 nm, for example.

  As shown in FIG. 2A (a), the polarizing element PO has a plurality of polarizing regions HR. The polarizing element PO has a symmetry axis TJ at the center, and each polarization region HR is arranged to be axially symmetric with respect to the symmetry axis TJ. Further, the magnetic field transmission direction HH of the polarization region HR is also axially symmetric with respect to the symmetry axis TJ. The transmission direction of the magnetic field in each polarizing element PO extends in a direction perpendicular to the symmetry axis TJ. By using this polarizing element PO, a TE wave (Transverse Electric Wave) that becomes noise for imaging using the hyper lens HL is shielded, and a TM wave that is a component of propagating light converted from an evanescent wave by the hyper lens. (Transverse Magnetic Wave) is transmitted.

FIG. 2A (b) is a plan transparent view of the hyper lens HL. The hyper lens HL is a lens that can convert evanescent light (details will be described later) that is non-propagating light into propagating light. The hyper lens HL is a spherical shell-like lens in which a part of a hollow sphere is cut off, and one surface is a convex surface and the other surface is a concave surface. The convex surface is made of a silver film Ag (hatched portion in the figure), and the lower layer is made of an aluminum oxide film Al ₂ O ₃ . The lower layer of the aluminum oxide film Al ₂ O ₃ is formed of a silver film Ag. The concave surface which is the other surface of the hyper lens HL is also a part of a sphere, and the surface thereof is an aluminum oxide film Al ₂ O ₃ . A hemispherical cavity CA is formed on the concave surface side of the hyper lens HL. That is, the hyper lens HL is formed by alternately forming the silver film Ag and the aluminum oxide film Al ₂ O ₃ .

2A (c) is a cross-sectional view of the hyper lens HL of FIG. 2A (b) taken along line AA. The radius of the inner periphery of the hyper lens HL (that is, the radius of the cavity CA) is r _i, and the radius of the outer periphery is r ₀ . In the piper lens HL, for example, r ₀ is 0.8 μm, r _i is 240 nm, and 16 layers of the silver film Ag and the aluminum oxide film Al ₂ O _{3 of} the hyper lens HL are formed (understand in FIG. 2C). The thickness of each of the silver film Ag and the aluminum oxide film Al ₂ O ₃ is about 35 nm. In this case, the sum _{r a} of the thickness of each layer becomes 560 nm. Further, the magnification of the hyper lens HL is determined by the ratio _r 0 / _{r i} of the inner diameter _{r i} and outer _{r 0} of the hyper lens HL hyper lens HL. That is, the magnification of the hyper lens HL is 0.8 μm / 240 nm = about 3.3 times.

  FIG. 2B is a diagram for explaining generation of the evanescent light EV. The subject SA is disposed in the hemispherical cavity CA of the hyper lens HL.

  The light beam LW12 incident on the subject SA from the −Z-axis direction is irradiated on the subject SA. Thereafter, various lights are scattered from the subject SA. Among the scattered lights, there is evanescent light EV. The evanescent light EV is light having a wavelength equal to or shorter than the wavelength of the light beam LW12 that is incident light on the subject SA, and is not normally propagated in space, but the hyper lens HL can convert the evanescent light EV into propagating light. In FIG. 2B, the evanescent light EV is indicated by a thick dotted line. The thick solid arrow is the propagating light. This propagating light is radiated outward from the convex surface of the hyper lens HL. Of this propagating light, a light beam incident on the light receiving optical system LE (see FIG. 1) is shown as a light beam LW3. Further, the hyper lens HL has a property of converting only TM waves into propagating light.

  When the polarization of the light beam LW2 has only the necessary polarization, the evanescent light EV generated by the light beam LW2 also has only the necessary polarization. For this reason, the evanescent light EV generated by the light beam LW2 in which the polarization is formed in the polarizing element PO with respect to the symmetry axis TJ is also generated as the axially symmetric polarization.

<Principle of hyper lens>
The principle by which the hyper lens HL propagates evanescent light will be described with reference to FIG.

The relationship between the frequency and the wave number in an electromagnetic wave is called a dispersion relationship, and light, which is a kind of electromagnetic wave, is expressed by the following equation.
k = ω / c (1)
Here, ω is the angular frequency, c is the speed of light, and k is the wave number.
Further, considering a two-dimensional dispersion relationship in the lens in the case of an isotropic substance, Expression (1) is expressed as follows.
k _r ² + k _θ ² = ε (ω ² / c ² ) (2)
Here, the dielectric constant of ε lens, k _r is the wave number in the normal direction of the lens, is k _theta, the wave number in the direction perpendicular to the k _r. (See Fig. 3 (c))

FIG. 3A is a graph showing a two-dimensional dispersion relationship in an optically isotropic material. In FIG. 3A, the horizontal axis represents k _θ and the vertical axis represents kr, and Expression (2) is represented in a graph. The maximum value of the wave number k _{θ in} the optical isotropic material is | k _θ |, and the light flux whose wave number k _θ exceeds this value is not transmitted in the optical isotropic material. Light whose wavenumber k _θ exceeds | k _θ | is evanescent light.

Further, when the dielectric constant has anisotropy in the r direction and the θ direction, the dispersion relation of the TM wave can be written as follows.
(K _r ² / ε _θ ) + (k _θ ² / ε _r ) = ω ² / c ² ... (3)
Here, when ε _θ > 0 and ε _r <0, Equation (3) can be written as follows.
(K _r ² / ε _θ ) − (k _θ ² / | ε _r |) = ω ² / c ² ... (4)

FIG. 3B is a graph showing a two-dimensional dispersion relationship in a material with ε _θ > 0 and ε _r <0. FIG. 3B is a graph showing Equation (4) with k _{θ on} the horizontal axis and k _r on the vertical axis. The hyperbola in FIG. 3B represents the formula (4), and the circle represented by the dotted line represents the formula (2). The hyperbola in FIG. 3 (b), is present the value of the wave number k _r for any given wavenumber k _theta. Therefore, in a material with ε _θ > 0 and ε _r <0, it is possible to propagate evanescent light whose wave number k _θ does not propagate in an optically isotropic material and exceeds | k _θ |.

As a method for realizing an anisotropic desired dielectric constant as shown in FIG. 3C or Formula (4), there is a method of forming a lens in a layered structure. FIG. 3C shows an example of a hyper lens that is a locally uniaxial anisotropic medium. The hyperlens in FIG. 3C is not uniaxial as a whole because the layers are formed in a spherical shell shape, but since it can be considered that planar layers are locally stacked, It can be regarded as uniaxial. In FIG. 3C, the effective dielectric constant in the normal direction (r direction) on the lens surface is negative, and the effective dielectric constant in the direction perpendicular to the normal direction (θ direction) on the lens surface is positive. It is. For ordinary materials, the dielectric constant is positive. However, certain metals such as gold or silver have a dielectric constant ε _m that shows a negative value in the frequency range of visible light. When these materials are combined with a material having a positive dielectric constant ε _d , it is possible to produce a material called a metamaterial in which the signs of ε _r and ε _θ are reversed. The normal direction ε _r of the effective dielectric constant and the direction ε _θ perpendicular to the normal of the effective dielectric constant can be described by ε _m and ε _d as follows.
... (5)
... (6)


Here, p is a metal filling rate. The filling factor is the ratio of the volume of each lattice to the volume of atoms contained in the lattice, assuming that the atoms are bonded together without any gaps and all the radii of the atoms are the same length. Here, for example, when considering a multilayer film of silver Ag and aluminum oxide Al ₂ O ₃ , ε _θ and ε _r are calculated by setting ε _m to −2.4012 + 0.2488i and ε _d to 3.217. Can do. When calculating the filling factor p of the metal as 0.5, the epsilon _theta takes a positive value, epsilon _r is a negative value.

<Hyper lens fabrication method>
A method of manufacturing the hyper lens HL will be described with reference to FIGS. FIG. 4 is a flowchart showing a process of forming the hyper lens HL. FIG. 4A to FIG. 4F are views for explaining a process of forming the hyper lens HL, and are cross-sectional views taken along line BB in FIG. FIG. 5 is a schematic perspective view of the quartz material wafer SU on which the chromium film Cr is formed.

  First, in step S101 in FIG. 4, a chromium layer Cr having a circular hole HO is formed on the main surface of the quartz material wafer SU (see FIG. 4A). The chromium layer Cr is formed on one main surface of the quartz material wafer SU by performing electron beam evaporation or vacuum evaporation. The circular hole HO is formed by irradiating the chromium layer Cr with a focused ion beam.

  FIG. 5 is a schematic perspective view of the quartz material wafer SU on which the chromium film Cr is formed, and is a diagram showing FIG. 4A in three dimensions. The thickness TH1 of the quartz material wafer SU is 150 μm, and the thickness TH2 of the chromium layer Cr formed thereon is 150 nm. Further, a hole HO having a diameter DI is formed in the chromium layer Cr. The diameter DI is, for example, 50 nm.

  In step S102, the quartz material wafer SU is wet-etched through the holes HO formed in the chromium layer Cr (see FIG. 4B). Then, a hemispherical cavity CA is formed in the quartz material wafer SU. The wet etching is performed using buffered hydrofluoric acid or 55% hydrofluoric acid which is a liquid in which ammonium fluoride is mixed with hydrofluoric acid.

  In step S103, the chromium layer Cr is removed (see FIG. 4C). The chromium layer Cr is removed, for example, by etching an aqueous solution of ceric ammonium nitrate and acetic acid.

  In step S104, a silver film Ag is formed on the surface of the quartz wafer SU where the cavity CA is formed (see FIG. 4D). The silver film Ag is formed by vapor deposition or sputtering. In the formation of the silver film Ag, it is formed under a low pressure so that the surface roughness is as small as possible. The surface roughness is formed so that the mean square deviation is within 1.3 nm.

In step S105, an aluminum oxide film Al ₂ O ₃ is formed on the silver film Ag formed in step S104 (see FIG. 4E). The aluminum oxide film Al ₂ O ₃ is formed by vapor deposition or sputtering.

In step S106, it is determined whether or not a silver film Ag and an aluminum oxide film Al ₂ O ₃ should be further formed. If the number of layers of the silver film Ag and the aluminum oxide film Al ₂ O ₃ is insufficient, the process returns to step S104 to further stack the silver film Ag and the aluminum oxide film Al ₂ O ₃ . When a predetermined number of layers of the silver film Ag and the aluminum oxide film Al ₂ O ₃ are formed, the stacking of the hyper lenses HL is finished (see FIG. 4F). In the hyper lens HL used in the optical device 100, a total of 16 layers of the silver film Ag and the aluminum oxide film Al ₂ O ₃ are formed.

  The spherical shell-shaped hyperlens HL can be manufactured through the steps as described above. The crystal material around the hyper lens HL may or may not be removed. In the case of removing, the quartz material wafer SU is removed by etching.

(Second embodiment)
<Configuration of Optical Device 200>
FIG. 6 is a schematic diagram of an optical device 200 according to the second embodiment. The optical device only needs to be able to finally receive a light beam having only two-dimensionally necessary polarization in the light receiving optical system. Therefore, in the optical device 200, instead of disposing the polarizing element PO between the illumination light source IL and the subject SA as in the optical device 100, the hyper lens HL is disposed between the illumination light source IL and the subject SA. Yes. The configuration of the optical device 200 will be described with reference to FIG.

  The optical device 200 includes an illumination light source IL, a polarizing element PO, a hyper lens HL, and a light receiving optical system LE. Further, the subject SA that emits evanescent light is disposed in the hyper lens HL.

  Illumination light LW21 emitted from the illumination light source IL is applied to the subject SA. The subject SA irradiated with the illumination light LW21 emits evanescent light. The evanescent light is converted by the hyper lens HL into a light beam LW22 that is propagating light. At this time, the light beam LW22 is randomly polarized. Thereafter, the light beam LW22 enters the polarizing element PO. The polarizing element PO transmits only the TM wave of the incident light beam LW22 and transmits it as the light beam LW23. The light beam LW23 enters the light receiving optical system LE and is detected.

In the optical device 200, only the TM wave is transmitted by the polarizing element with respect to the light beam emitted from the subject SA. Therefore, the optical device 200 is effective for observing the subject SA having the property of changing the polarization characteristics.
The optical device 100 of the first example and the optical device 200 of the second example are examples in which the subject SA is irradiated with a light beam from the −Z axis direction.

(Third embodiment)
The subject SA may be irradiated with a light beam from the + Z-axis direction through the hyper lens HL. By irradiating the light flux from the + Z-axis direction, the evanescent light emitted from the + Z-axis side surface of the subject SA can be observed.

<Configuration of Optical Device 300>
FIG. 7 is a schematic diagram of the optical device 300. The optical device 300 includes an illumination light source IL, a polarizing element PO, a hyper lens HL, a light receiving optical system LE, and a light beam splitting element KB. Further, the subject SA that emits evanescent light is disposed in the hyper lens HL.

  The illumination light LW31 emitted from the illumination light source IL is reflected by the light beam splitting element KB and becomes a light beam LW32 and enters the polarization element PO. The polarizing element PO adjusts the polarization of the incident light beam LW32 and emits it as a light beam LW33. The light beam LW33 enters the hyper lens HL, passes through the hyper lens HL, and is irradiated on the subject SA. The subject SA irradiated with the light beam LW33 emits evanescent light. The evanescent light is converted into propagating light through the hyper lens HL, and is emitted from the hyper lens HL as a light beam LW34. The light beam LW34 passes through only the TM wave component by the polarizing element PO and becomes a light beam LW35. The light beam LW35 is transmitted through the light beam splitting element KB to become a light beam LW36, and enters the light receiving optical system LE.

  The light beam splitting element KB reflects or transmits the illumination light emitted from the illumination light source IL toward the subject SA, and transmits or reflects the propagation light from the subject SA. Therefore, the arrangement of the illumination light source IL and the light receiving optical system LE is switched, the illumination light LW31 is emitted from the illumination light source IL in the −Z-axis direction, and the light beam returned from the hyper lens HL is reflected by the light beam splitting element KB in the −X-axis direction. The light may be reflected by the light receiving optical system LE.

(Fourth embodiment)
<Configuration of Optical Device 400>
The optical element 300 in which the light beam is incident from above the subject SA may have another configuration. The optical device 400 will be described below.

  FIG. 8 is a schematic diagram of the optical device 400. The optical device 400 includes an illumination light source IL, a polarizing element PO, a hyper lens HL, a light receiving optical system LE, and a light beam splitting element KB. Further, the subject SA that emits evanescent light is disposed in the hyper lens HL.

  The randomly polarized illumination light LW41 emitted from the illumination light source IL is reflected by the light beam splitting element KB, becomes a light beam LW42, passes through the hyper lens HL, and enters the subject SA. The subject SA irradiated with the light beam LW42 emits evanescent light. The evanescent light passes through the hyper lens HL, and the TM wave component is converted into propagating light and emitted from the hyper lens HL as a light beam LW43. The light beam LW43 is transmitted through the light beam splitting element KB, and becomes a light beam LW44 and enters the polarizing element PO. The polarizing element PO transmits only the TM wave of the incident light beam LW44 to become the light beam LW45, and enters the light receiving optical system LE.

In the optical device 400, the arrangement of the illumination light source IL, the light receiving optical system LE, and the polarizing element PO can be used interchangeably. That is, the illumination light LW41 may be emitted from the illumination light source IL in the −Z axis direction, and the light beam returned from the hyper lens HL may be reflected by the light beam splitting element KB in the −X axis direction and received by the light receiving optical system LE.
Note that the optical device 300 of the third example and the optical device 400 of the fourth example are examples in which the subject SA is irradiated with a light beam from the + Z-axis direction.

(5th Example)
The optical apparatus described above can be used as a microscope by including an objective condensing optical system that creates a real image on an image plane of a light receiving optical system for observing a subject. The microscope 500 provided with the objective lens TL as the objective condensing optical system in the optical device 100 will be described below.

<Configuration of Microscope 500>
FIG. 9 is a schematic configuration diagram of the microscope 500. The microscope 500 is configured by incorporating an objective lens TL between the hyper lens HL and the polarizing element OP of the optical device 100 of the first embodiment. Although not particularly illustrated, the present invention can also be applied to the optical devices 200 to 400 in the same manner as the optical device 100. In these cases, it is desirable that the polarizing element PO is disposed on the pupil plane.

  The randomly polarized illumination light LW51 emitted from the illumination light source IL enters the subject SA and emits evanescent light from the subject SA. The evanescent light is converted into propagating light by the hyper lens HL and becomes a light beam LW 52 toward the objective lens TL. The light beam LW52 is diffused light, but the objective lens TL collects the light beam LW52 and directs it to the polarizing element PO as a light beam LW53. In the polarizing element PO, only the TM wave of the light beam LW53 is transmitted and directed to the light receiving optical system LE as the light beam LW54, and the light beam LW54 is detected by the light receiving optical system LE. Here, the objective lens TL is arranged so that the image plane thereof is in the light receiving optical system LE, and is arranged so that the image of the subject SA forms a real image in the light receiving optical system LE.

  The microscope 500 can resolve the subject SA beyond the diffraction limit of the wavelength of the illumination light LW51.

  Although the present invention has been described with reference to the embodiments, the present invention is not limited to these. It will be apparent to those skilled in the art that various modifications, substitutions, improvements, combinations, and the like can be made.

For example, in the above embodiment, the hyper lens HL is used in the optical device, but a super lens may be used. Super lens is an element capable of amplifying the wave number K _theta large evanescent light. There are three types of super lenses. The first type is a case where the super lens is made of a material whose dielectric constant and magnetic permeability are both negative, and has a negative refractive index and can transmit any polarized light. The second type is a case where the super lens is made of a material having a negative dielectric constant and a positive magnetic permeability, and the super lens can transmit TM wave evanescent light. The third type is a case where the super lens is configured using a material having a positive dielectric constant and a negative magnetic permeability, and the super lens can transmit evanescent light of a TE wave (Transverse Electric Wave).

  Such a super lens is a spherical shell-shaped lens as shown in FIG. 2B or the like when magnification is applied, and different metal films are alternately formed. Similar effects can be obtained if these superlenses with magnifications are arranged in place of the hyperlens HL.

  It is also possible to produce a lens that amplifies evanescent light and converts it into propagating light by combining a hyper lens and a super lens.

100, 200, 300, 400 Optical device 500 Microscope CA Cavity IL Illumination light source KB Beam spectroscopic element LE Light receiving optical system PO Polarizing element TL Objective lens

Claims (12)

In an optical apparatus for observing a subject,
A spherical shell having a convex surface and a concave surface in which a part of a hollow sphere is cut off, and a lens that converts evanescent light generated from the subject into propagating light;
The polarization region is disposed on the convex surface side of the lens, and the electric field transmits light oscillating only in a specific polarization direction. The polarization direction of the polarization region as a whole is axially symmetric with respect to the central axis. A polarizing element,
An optical device comprising: An illumination light source for illuminating the subject with illumination light;
A light receiving optical system for observing the subject,
The optical apparatus according to claim 1, wherein the illumination light source, the lens, the polarizing element, and the light receiving optical system are arranged in this order. An illumination light source that emits illumination light;
A light receiving optical system for observing the subject;
A light beam splitting element that reflects or transmits the illumination light to the subject side and transmits or reflects the propagation light from the subject; and
The illumination light is transmitted or reflected in the order of the illumination light source, the light beam splitting element, the polarizing element, and the lens,
The evanescent light from the subject becomes the propagating light and passes through the lens,
The optical apparatus according to claim 1, wherein the propagating light is arranged to be transmitted or reflected in the order of the polarizing element, the light beam splitting element, and the light receiving optical system. An illumination light source that emits illumination light;
A light receiving optical system for observing the subject;
A light beam splitting element that reflects or transmits the illumination light to the subject side and transmits or reflects the propagation light from the subject; and
The illumination light is transmitted or reflected in the order of the illumination light source, the light beam splitting element, and the lens,
The evanescent light from the subject becomes the propagating light and passes through the lens,
The optical apparatus according to claim 1, wherein the propagating light is arranged to be transmitted or reflected in the order of the light beam splitting element, the polarizing element, and the light receiving optical system.   The lens is a locally uniaxial anisotropic medium, the dielectric constant in the normal direction on the surface of the lens is negative, and the dielectric constant in the direction perpendicular to the normal direction on the surface of the lens is The optical device according to any one of claims 1 to 4, wherein the optical device is a positive hyper lens.   The optical device according to claim 5, wherein the hyper lens is formed by alternately stacking a first film having a negative dielectric constant and a second film having a positive dielectric constant.   The optical element according to claim 6, wherein the first film is made of silver, and the second film is made of aluminum oxide.   5. The first lens according to claim 1, wherein the lens has a negative dielectric constant and a positive magnetic permeability, and is a first super lens that amplifies the evanescent wave and converts it into propagating light. An optical device according to 1.   The optical device according to any one of claims 5 to 8, wherein a polarizing region of the polarizing element transmits only TM waves (Transverse Magnetic Wave).   5. The lens according to claim 1, wherein the lens is a second super lens having a positive dielectric constant and a negative magnetic permeability and amplifying the evanescent wave to convert it into propagating light. An optical device according to 1.   The optical apparatus according to claim 10, wherein a polarization region of the polarizing element transmits a TE wave (Transverse Electric Wave). An optical device according to any one of claims 5 to 11,
An objective condensing optical system that collects the propagating light and creates a real image on an image plane of a light receiving optical system for observing the subject; and
A microscope in which the subject is arranged and used on the concave surface side of the lens.