JP2011224523A - Alignment apparatus and alignment method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To solve a problem that cost taken for conventional alignment is hard to reduce.SOLUTION: The alignment apparatus includes: a camera 137 which takes images of reference nozzles of discharge heads; and a control 201 which acquires the positions of the heads based on the image results of the reference nozzles taken by the camera 137. The control 201 calculates correction to the positions of the heads based on the image results of the display patterns taken by the camera 137 at emitting light, based on kinds of the heads, from at least part of a plurality of the display pixels of an original 181 having a plurality of display pixels.

Description

  The present invention relates to an alignment apparatus, an alignment method, and the like.

  2. Description of the Related Art Conventionally, a configuration in which a plurality of ejection heads are mounted on a sub-carriage is known in a droplet ejection apparatus having an ejection head that can eject a liquid material as droplets. A sub-carriage assembly machine that assembles a plurality of ejection heads as sub-carriages is known (see, for example, Patent Document 1).

JP-A-2005-231305

Patent Document 1 describes that in a sub-carriage assembling machine, an alignment mask is used as a prototype (original) of the position of the ejection head, and positioning (alignment) of the ejection head is performed based on this prototype. Thereby, the assembly accuracy of each of the plurality of ejection heads in the sub-carriage can be kept high.
However, an alignment method using an alignment mask requires an alignment mask for each sub-carriage model and each ejection head model. For this reason, conventionally, there is a problem that it is difficult to reduce the cost of alignment.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

  Application Example 1 An imaging apparatus that images a reference mark of an object that is an alignment target, and a control unit that grasps the position of the object based on a result of the imaging apparatus imaging the reference mark. And the said control part imaged the light emission pattern when making it light-emit according to the kind of the target object with the said imaging device at least one part of the said several light emission area | region of the light-emitting device which has a some light emission area with the said imaging device. An alignment apparatus that calculates a correction amount of the position of the object based on a result.

The alignment apparatus of this application example includes an imaging device and a control unit.
The imaging device images a reference mark of an object that is an alignment target.
The control unit grasps the position of the object based on the result of imaging the reference mark by the imaging device.
In this alignment apparatus, the control unit calculates the correction amount of the position of the object based on the result of imaging the light emission pattern with the imaging apparatus. A light emission pattern is a pattern when light is emitted from at least a part of a plurality of light emitting regions of a light emitting device according to the type of an object. In the light emitting device, the light emission pattern can be changed according to the type of the object.
For this reason, in this alignment apparatus, the necessity to prepare a different mask pattern for every kind of target object can be made easy, for example.

  Application Example 2 In the alignment apparatus described above, the plurality of light emitting regions are arranged in a matrix in a plan view.

  In this application example, since the plurality of light emitting regions are arranged in a matrix, various light emitting patterns can be easily formed.

  Application Example 3 In the alignment apparatus described above, the light-emitting device includes a liquid crystal device.

  In this application example, since the light-emitting device is configured by a liquid crystal device, a plurality of light-emitting regions can selectively emit light.

  Application Example 4 At least a part of the plurality of light emitting regions of a light emitting device having a plurality of light emitting regions is selectively caused to emit light with a light emission pattern corresponding to the type of an object to be aligned, and the light emission pattern is imaged. An alignment method characterized by aligning the object based on the result obtained.

  In the alignment method of this application example, the light emitting device emits light with a light emission pattern corresponding to the type of the object, and the object is aligned based on the result of imaging the light emission pattern. According to this alignment method, the light emission pattern of the light emitting device can be changed according to the type of the object. Therefore, for example, it is possible to easily eliminate the necessity of preparing different mask patterns for each type.

FIG. 2 is a perspective view illustrating a schematic configuration of a droplet discharge device according to the present embodiment. The front view when the carriage in this embodiment is seen in the A viewing direction in FIG. The bottom view of the head unit in this embodiment. Sectional drawing in the BB line in FIG. The perspective view which shows the structure of the outline of the assembly apparatus in this embodiment. The perspective view which shows the structure of the outline of the unit conveying apparatus in this embodiment. The perspective view which shows the structure of the outline of the alignment apparatus in this embodiment. The perspective view which shows the structure of the outline of the moving apparatus in this embodiment. The top view which shows the original plate in this embodiment. The enlarged view of the C section in FIG. The block diagram which shows the structure of the outline of the assembly apparatus in this embodiment. The figure which shows the flow of the assembly method of the head unit in this embodiment.

  Embodiments will be described with reference to the drawings, taking as an example a droplet discharge device which is one of the recording devices. In addition, in each drawing, in order to make each structure the size which can be recognized, the structure and the scale of a member may differ.

As shown in FIG. 1, which is a perspective view showing a schematic configuration, the droplet discharge device 1 in the embodiment includes a work transfer device 3, a carriage 7, and a carriage transfer device 9.
The carriage 7 is provided with a head unit 13.
In the droplet discharge device 1, the liquid material is discharged from the head unit 13 as droplets while changing the relative position of the head unit 13 and the workpiece W such as a substrate in a plan view. A desired pattern can be drawn. In the figure, the Y direction indicates the moving direction of the workpiece W, and the X direction indicates a direction orthogonal to the Y direction in plan view. A direction orthogonal to the XY plane defined by the X direction and the Y direction is defined as the Z direction.

Such a droplet discharge device 1 can be applied to, for example, the manufacture of a color filter used for a liquid crystal display panel or the like, or the manufacture of an organic EL (Electro Luminescence) device.
In the case of a color filter having three color filter elements of red, green, and blue, the droplet discharge device 1 can be suitably used, for example, in a process of forming red, green, and blue colored layers on a substrate. In this case, each liquid material corresponding to each colored layer is ejected from the head unit 13 as droplets onto the work W, whereby the patterns of the red, green, and blue filter elements are drawn on the work W.
Further, in the manufacture of an organic EL device, for example, it can be suitably used in a step of forming a functional layer (organic layer) corresponding to each color for each of red, green and blue pixels. In this case, each liquid material corresponding to the functional layer of each color is ejected from the head unit 13 as droplets onto the work W, whereby the patterns of the red, green, and blue functional layers are drawn on the work W.

Here, the details of each component of the droplet discharge device 1 will be described.
As illustrated in FIG. 1, the work transfer device 3 includes a surface plate 21, a guide rail 23 a, a guide rail 23 b, and a work table 25.
The surface plate 21 is made of a material having a small coefficient of thermal expansion, such as stone, and is placed so as to extend along the Y direction. The guide rail 23 a and the guide rail 23 b are disposed on the upper surface 21 a of the surface plate 21. Each of the guide rail 23a and the guide rail 23b extends along the Y direction. The guide rail 23a and the guide rail 23b are arranged in a state where there is a gap in the X direction.

The work table 25 is provided in a state facing the upper surface 21a of the surface plate 21 with the guide rail 23a and the guide rail 23b interposed therebetween. The work table 25 is placed on the guide rail 23a and the guide rail 23b in a state of floating from the surface plate 21. The work table 25 has a placement surface 25a that is a surface on which the workpiece W is placed. The placement surface 25a is directed to the side (upper side) opposite to the surface plate 21 side. The work table 25 is guided along the Y direction by the guide rail 23a and the guide rail 23b, and is configured to be able to reciprocate on the surface plate 21 along the Y direction.
The work table 25 is configured to reciprocate in the Y direction by a moving mechanism and a power source (not shown). As the moving mechanism, for example, a mechanism using a ball screw or a linear guide may be employed. In the present embodiment, a work conveyance motor (not shown) is employed as a power source for moving the work table 25 along the Y direction. As the work transfer motor, various motors such as a stepping motor, a servo motor, and a linear motor can be adopted.
The power from the work transport motor is transmitted to the work table 25 through the moving mechanism. Thereby, the work table 25 can reciprocate along the guide rail 23a and the guide rail 23b, that is, along the Y direction. That is, the workpiece transfer device 3 can reciprocate the workpiece W placed on the placement surface 25a of the workpiece table 25 along the Y direction.

The head unit 13 includes a head plate 31 and two ejection heads 33 as shown in FIG. 2 which is a front view when the carriage 7 is viewed in the A viewing direction in FIG. The two ejection heads 33 are arranged in the X direction. Note that the number of ejection heads 33 is not limited to two, and an arbitrary number of one or more may be employed. Further, in the following, when identifying each of the two ejection heads 33, the notation of ejection head 33a and ejection head 33b is used.
As shown in FIG. 3 which is a bottom view, the discharge head 33 has a nozzle surface 35. A plurality of nozzles 37 are formed on the nozzle surface 35. In FIG. 3, the nozzles 37 are exaggerated and the number of the nozzles 37 is reduced in order to easily show the nozzles 37.

In each ejection head 33, the plurality of nozzles 37 constitute two nozzle rows 39 arranged along the Y direction. The two nozzle rows 39 are lined up with a gap in the X direction. In each nozzle row 39, the plurality of nozzles 37 are formed at a predetermined nozzle interval P along the Y direction. In each ejection head 33, the two nozzle rows 39 are shifted from each other by a distance of P / 2 in the Y direction.
In the head unit 13, the nozzle row 39 in one of the two ejection heads 33 and the nozzle row 39 in the other ejection head 33 are shifted from each other by a distance of P / 4 in the Y direction. Thereby, in the present embodiment, the density of the nozzles 37 in the Y direction is increased.

Each ejection head 33 is bonded to the head plate 31. In the present embodiment, the position of each ejection head 33 with respect to the reference mark 41 provided on the head plate 31 is corrected (aligned) within an allowable range, and then each ejection head 33 is bonded to the head plate 31. Yes. Thereby, the positional accuracy of each ejection head 33 with respect to the head plate 31 is enhanced.
In the present embodiment, two reference marks 41 are provided on the head plate 31. Hereinafter, when identifying each of the two reference marks 41, the two reference marks 41 are referred to as a reference mark 41a and a reference mark 41b, respectively.

On the other hand, a part of the plurality of nozzles 37 is set as the reference nozzle 42 in each ejection head 33. In the present embodiment, the position of each ejection head 33 is defined as the position of the reference nozzle 42 with respect to the two reference marks 41.
In the present embodiment, two reference nozzles 42 are set in each ejection head 33. In the following, when identifying each of the two reference nozzles 42, the two reference nozzles 42 will be referred to as a reference nozzle 42a and a reference nozzle 42b, respectively.
Each ejection head 33 has a base portion 43. Each ejection head 33 is bonded to the head plate 31 via a base portion 43. An engagement hole 44 is provided in the base portion 43.

In the present embodiment, two engagement holes 44 are provided in one ejection head 33. In the following, when identifying each of the two engagement holes 44, the two engagement holes 44 are referred to as an engagement hole 44a and an engagement hole 44b, respectively. Each of the two engagement holes 44 is engaged with a position correction pin to be described later.
In the present embodiment, a method of correcting the position of the ejection head 33 with respect to the head plate 31 by displacing the pin in a state where the pin is engaged with each of the two engagement holes 44 is employed. Details of the method of correcting the position of the ejection head 33 will be described later.

The ejection head 33 includes a nozzle plate 46, a cavity plate 47, a diaphragm 48, and a plurality of piezoelectric elements 49, as shown in FIG. 4 which is a cross-sectional view taken along the line BB in FIG. is doing.
The nozzle plate 46 has a nozzle surface 35. The plurality of nozzles 37 are provided on the nozzle plate 46.
The cavity plate 47 is provided on the surface opposite to the nozzle surface 35 of the nozzle plate 46. A plurality of cavities 51 are formed in the cavity plate 47. Each cavity 51 is provided corresponding to each nozzle 37 and communicates with each corresponding nozzle 37. A functional liquid 53 (liquid material) is supplied to each cavity 51 from a tank (not shown).

The diaphragm 48 is provided on the surface of the cavity plate 47 opposite to the nozzle plate 46 side. The vibration plate 48 vibrates in the Z direction (longitudinal vibration), thereby enlarging or reducing the volume in the cavity 51.
The plurality of piezoelectric elements 49 are respectively provided on the surface of the diaphragm 48 opposite to the cavity plate 47 side. Each piezoelectric element 49 is provided corresponding to each cavity 51 and faces each cavity 51 with the diaphragm 48 interposed therebetween. Each piezoelectric element 49 expands based on the drive signal. Thereby, the diaphragm 48 reduces the volume in the cavity 51. At this time, pressure is applied to the functional liquid 53 in the cavity 51. As a result, the functional liquid 53 is discharged as droplets 55 from the nozzle 37. The method of discharging the droplet 55 by the discharge head 33 is one of ink jet methods. The ink jet method is one of coating methods.

As shown in FIG. 2, the ejection head 33 having the above configuration is supported by the head plate 31 with the nozzle surface 35 protruding from the head plate 31.
As shown in FIG. 2, the carriage 7 supports the head unit 13. Here, the head unit 13 is supported by the carriage 7 with the nozzle surface 35 facing downward in the Z direction.
As described above, the functional liquid 53 can be applied to the workpiece W from the ejection head 33.
In the present embodiment, the longitudinal vibration type piezoelectric element 49 is adopted, but the pressurizing means for applying pressure to the functional liquid 53 is not limited to this, and for example, the lower electrode and the piezoelectric layer A flexural deformation type piezoelectric element in which an electrode and an upper electrode are laminated may be employed. Further, as the pressurizing means, a so-called electrostatic actuator that generates static electricity between the diaphragm and the electrode, deforms the diaphragm by electrostatic force, and ejects droplets from the nozzles can be employed. Furthermore, the structure which generate | occur | produces a bubble in a nozzle using a heat generating body, and gives a pressure to a functional liquid with the bubble may be employ | adopted.

As shown in FIG. 1, the carriage transport device 9 includes a gantry 61 and a guide rail 63.
The gantry 61 extends in the X direction and straddles the work transfer device 3 in the X direction. The gantry 61 faces the work transfer device 3 on the side opposite to the surface plate 21 side of the work table 25. The gantry 61 is supported by a pair of support columns 67. The pair of struts 67 are provided at positions facing each other in the X direction with the surface plate 21 interposed therebetween.
In the following, when identifying each of the pair of columns 67, the notations of columns 67a and columns 67b are used. Each of the support columns 67a and the support columns 67b protrudes above the work table 25 in the Z direction. Thereby, a gap is maintained between the gantry 61 and the work table 25.

The guide rail 63 is provided on the surface plate 21 side of the gantry 61. The guide rail 63 extends along the X direction, and is provided across the width of the gantry 61 in the X direction.
The carriage 7 described above is supported by the guide rail 63. In a state where the carriage 7 is supported by the guide rail 63, the nozzle surface 35 of the discharge head 33 faces the work table 25 side in the Z direction. The carriage 7 is guided along the X direction by the guide rail 63, and is supported by the guide rail 63 so as to be able to reciprocate in the X direction. In a plan view, in a state where the carriage 7 overlaps the work table 25, the nozzle surface 35 and the mounting surface 25a of the work table 25 face each other with a gap therebetween.

The carriage 7 is configured to reciprocate in the X direction by a moving mechanism and a power source (not shown). As the moving mechanism, for example, a mechanism using a ball screw or a linear guide may be employed. In the present embodiment, a carriage transport motor (not shown) is employed as a power source for moving the carriage 7 along the X direction. As the carriage conveyance motor, various motors such as a stepping motor, a servo motor, and a linear motor can be employed.
The power from the carriage transport motor is transmitted to the carriage 7 through the moving mechanism. Thus, the carriage 7 can reciprocate along the guide rail 63, that is, along the X direction. That is, the carriage conveyance device 9 can reciprocate the head unit 13 supported by the carriage 7 along the X direction.
In the droplet discharge device 1 having the above-described configuration, the droplet 55 is discharged from the discharge head 33 while the discharge head 33 and the workpiece W are relatively reciprocated while the discharge head 33 is opposed to the workpiece W. By doing so, the pattern is drawn on the workpiece W.

Here, the assembly of the head unit 13 will be described.
In the present embodiment, the head unit 13 is assembled by the assembling apparatus 100.
As shown in FIG. 5, the assembly apparatus 100 includes a surface plate 101, a unit transport apparatus 103, and an alignment apparatus 105.
The surface plate 101 is made of a material having a small coefficient of thermal expansion, such as stone.
As shown in FIG. 6, the unit conveying device 103 includes a guide rail 111a, a guide rail 111b, a first table 113, a guide rail 117a, a guide rail 117b, a second table 119, a rotating ring 121, And a third table 123. The unit transport apparatus 103 includes a first motor (not shown), a second motor, and a third motor, which will be described later.

The guide rail 111 a and the guide rail 111 b are disposed on the upper surface 101 a of the surface plate 101. Each of the guide rail 111a and the guide rail 111b extends along the T direction. The guide rail 111a and the guide rail 111b are lined up with a gap in the U direction.
Note that the T direction is a direction in which the guide rail 111a and the guide rail 111b extend. The U direction is a direction orthogonal to the T direction in plan view. A direction orthogonal to the TU plane defined by the T direction and the U direction is defined as the V direction. The direction of rotation about the axis extending along the V direction is defined as the θ direction.

The first table 113 is provided in a state of facing the upper surface 101a of the surface plate 101 with the guide rail 111a and the guide rail 111b interposed therebetween. The first table 113 is placed on the guide rail 111a and the guide rail 111b in a state of floating from the surface plate 101. The first table 113 is guided along the T direction by the guide rail 111a and the guide rail 111b, and is configured to be able to reciprocate on the surface plate 101 along the T direction.
The first table 113 is configured to reciprocate in the T direction by a moving mechanism and a first motor (not shown). As the moving mechanism, for example, a mechanism using a ball screw or a linear guide may be employed. Various motors such as a stepping motor, a servo motor, and a linear motor can be employed as the first motor.
The power from the first motor is transmitted to the first table 113 through the moving mechanism. Thereby, the 1st table 113 can reciprocate along the guide rail 111a and the guide rail 111b, ie, along the T direction.

The guide rail 117 a and the guide rail 117 b are disposed on the upper surface 113 a of the first table 113. Each of the guide rail 117a and the guide rail 117b extends along the U direction. The guide rail 117a and the guide rail 117b are arranged in a state where there is a gap in the T direction.
The second table 119 is provided in a state of facing the upper surface 113a of the first table 113 with the guide rail 117a and the guide rail 117b interposed therebetween. The second table 119 is placed on the guide rail 117a and the guide rail 117b in a state of floating from the first table 113. The second table 119 is guided along the U direction by the guide rail 117a and the guide rail 117b, and is configured to be able to reciprocate along the U direction on the first table 113.

The second table 119 is configured to reciprocate in the U direction by a moving mechanism (not shown) and a second motor. As the moving mechanism, for example, a mechanism using a ball screw or a linear guide may be employed. Various motors such as a stepping motor, a servo motor, and a linear motor can be adopted as the second motor.
The power from the second motor is transmitted to the second table 119 via the moving mechanism. Thereby, the 2nd table 119 can reciprocate along the guide rail 117a and the guide rail 117b, ie, along the U direction.

The rotating ring 121 is disposed on the upper surface 119 a of the second table 119.
The third table 123 is provided in a state of facing the upper surface 119a of the second table 119 with the rotation ring 121 interposed therebetween. The third table 123 is placed on the rotating ring 121 in a state of floating from the second table 119. The third table 123 is guided along the θ direction by the rotating ring 121 and is configured to be reciprocally rotatable along the θ direction on the second table 119.
The third table 123 has a placement surface 123a that is a surface on which the head plate 31 is placed. The placement surface 123a is directed to the side (upper side) opposite to the second table 119 side.

The third table 123 is configured to be reciprocally rotatable in the θ direction by a rotation mechanism (not shown) and a third motor. As the rotation mechanism, for example, a mechanism using a ball screw or a linear guide can be employed. Further, as the third motor, various motors such as a stepping motor, a servo motor, and a linear motor can be employed.
The power from the third motor is transmitted to the third table 123 via the rotation mechanism. Thereby, the 3rd table 123 is guided by the rotation ring 121, and can reciprocately rotate along (theta) direction.
With the above configuration, the unit transport apparatus 103 can reciprocate the head plate 31 placed on the third table 123 in each of the T direction and the U direction. The unit transport apparatus 103 can also reciprocately rotate the head plate 31 placed on the third table 123 in the θ direction.

As illustrated in FIG. 7, the alignment device 105 includes a base plate 131, a recognition device 133, and a correction device 135.
As shown in FIG. 5, the base plate 131 is provided on the side opposite to the surface plate 101 side of the unit transport apparatus 103. A gap is maintained between the surface plate 101 and the base plate 131. The unit conveying device 103 is interposed between the surface plate 101 and the base plate 131. The base plate 131 is provided at a position overlapping the unit transport device 103 in plan view.
As shown in FIG. 7, the recognition device 133 and the correction device 135 are each provided on a base plate 131.

The recognition device 133 includes a camera 137 and a support part 139. The camera 137 is supported on the base plate 131 via the support portion 139. The camera 137 is directed to the surface plate 101 side as shown in FIG.
The camera 137 faces the movable area of the third table 123. The movable area of the third table 123 is an area of a locus drawn by the third table 123 when each of the first table 113 and the second table 119 is reciprocated.
Since the camera 137 faces the movable area of the third table 123, the camera 137 can capture the workpiece placed on the third table 123 as an image.
As the camera 137, for example, a camera using an image sensor such as a charge coupled device (CCD) can be employed.

As shown in FIG. 7, the correction device 135 includes a moving device 141 and a correction unit 143. The correction unit 143 is provided on the moving device 141. The moving device 141 can reciprocate the correction unit 143 in each of the T direction and the U direction. The moving device 141 can also reciprocate the correction unit 143 in the θ direction.
As shown in FIG. 8, the moving device 141 includes a guide rail 151a, a guide rail 151b, a fourth table 153, a guide rail 157a, a guide rail 157b, a fifth table 159, a rotating ring 161, 6 tables 163. Moreover, the moving device 141 has a fourth motor (not shown), a fifth motor, and a sixth motor, which will be described later.

  The guide rail 151 a and the guide rail 151 b are disposed on the upper surface 131 a of the base plate 131. Each of the guide rail 151a and the guide rail 151b extends along the T direction. The guide rail 151a and the guide rail 151b are arranged in a state where there is a gap in the U direction.

The fourth table 153 is provided in a state of facing the upper surface 131a of the base plate 131 with the guide rail 151a and the guide rail 151b interposed therebetween. The fourth table 153 is placed on the guide rail 151a and the guide rail 151b in a state of floating from the base plate 131. The fourth table 153 is guided along the T direction by the guide rail 151a and the guide rail 151b, and is configured to reciprocate along the T direction on the base plate 131.
The fourth table 153 is configured to reciprocate in the T direction by a moving mechanism (not shown) and a fourth motor. As the moving mechanism, for example, a mechanism using a ball screw or a linear guide may be employed. Further, as the fourth motor, various motors such as a stepping motor, a servo motor, and a linear motor can be adopted.
The power from the fourth motor is transmitted to the fourth table 153 via the moving mechanism. Thereby, the 4th table 153 can reciprocate along the guide rail 151a and the guide rail 151b, ie, along the T direction.

The guide rail 157a and the guide rail 157b are disposed on the upper surface 153a of the fourth table 153. Each of the guide rail 157a and the guide rail 157b extends along the U direction. The guide rail 157a and the guide rail 157b are arranged in a state where there is a gap in the T direction.
The fifth table 159 is provided in a state of facing the upper surface 153a of the fourth table 153 with the guide rail 157a and the guide rail 157b interposed therebetween. The fifth table 159 is placed on the guide rail 157a and the guide rail 157b in a state of floating from the fourth table 153. The fifth table 159 is guided along the U direction by the guide rail 157a and the guide rail 157b, and is configured to be able to reciprocate along the U direction on the fourth table 153.

The fifth table 159 is configured to reciprocate in the U direction by a moving mechanism (not shown) and a fifth motor. As the moving mechanism, for example, a mechanism using a ball screw or a linear guide may be employed. Further, as the fifth motor, various motors such as a stepping motor, a servo motor, and a linear motor can be employed.
The power from the fifth motor is transmitted to the fifth table 159 via the moving mechanism. Accordingly, the fifth table 159 can reciprocate along the guide rails 157a and 157b, that is, along the U direction.

The rotating ring 161 is disposed on the upper surface 159 a of the fifth table 159.
The sixth table 163 is provided so as to face the upper surface 159a of the fifth table 159 with the rotation ring 161 interposed therebetween. The sixth table 163 is placed on the rotating ring 161 in a state of floating from the fifth table 159. The sixth table 163 is guided along the θ direction by the rotating ring 161 and is configured to be reciprocally rotatable along the θ direction on the fifth table 159.
The sixth table 163 has an arrangement surface 163a that is a surface on which the correction unit 143 is arranged. The arrangement surface 163a is directed to the side (upper side) opposite to the fifth table 159 side.

The sixth table 163 is configured to be reciprocally rotatable in the θ direction by a rotation mechanism (not shown) and a sixth motor. As the rotation mechanism, for example, a mechanism using a ball screw or a linear guide can be employed. As the sixth motor, various motors such as a stepping motor, a servo motor, and a linear motor can be employed.
The power from the sixth motor is transmitted to the sixth table 163 via the rotation mechanism. Accordingly, the sixth table 163 is guided by the rotating ring 161 and can reciprocate along the θ direction.
With the above configuration, the moving device 141 can reciprocate the correction unit 143 in each of the T direction and the U direction, or can reciprocate in the θ direction.

The correction unit 143 includes a support portion 171, a pin 173, and an elevating device 175.
The support part 171 is fixed to the sixth table 163.
The pin 173 is for correcting the position of the ejection head 33 with respect to the head plate 31 and engages with the engagement hole 44 of the ejection head 33. The pin 173 is supported by the support portion 171 via the lifting device 175. In the present embodiment, two pins 173 are provided. In the following, when identifying each of the two pins 173, the two pins 173 are denoted as a pin 173a and a pin 173b, respectively. The pins 173a and 173b are located outside the base plate 131 in plan view. The tips of the pins 173a and 173b are directed to the unit transport device 103 side.

The lifting device 175 is supported by the support portion 171. The pins 173a and 173b are held by the lifting device 175. The elevating device 175 can elevate and lower the pins 173a and 173b. As the lifting device 175, for example, a device combining a slider mechanism and an air cylinder may be employed. In this case, the pins 173a and 173b move up and down by the power transmitted from the air cylinder to the slider mechanism.
In addition, in a state where the pins 173a and 173b are lowered by the elevating device 175, the respective tips of the pins 173a and 173b can contact the third table 123. Therefore, the tips of the pins 173 a and 173 b can contact the head plate 31 in a state where the head plate 31 is placed on the third table 123.

  In the assembling apparatus 100 having the above configuration, a unit (hereinafter referred to as a temporary fixing unit) in which the ejection head 33 is temporarily fixed to the head plate 31 is placed on the third table 123. In the temporarily fixed unit placed on the third table 123, the position of the ejection head 33 relative to the head plate 31 is grasped based on the image recognition by the camera 137. Then, with the pin 173 engaged with the engagement hole 44 of the ejection head 33, the correction unit 143 is moved in each of the T direction and the U direction or rotated in the θ direction. The position of the ejection head 33 with respect to the head plate 31 can be corrected (aligned).

In the assembling apparatus 100, teaching is performed when the ejection head 33 is aligned. Teaching is to make the assembly apparatus 100 recognize the position of the ejection head 33 with respect to the head plate 31.
In this embodiment, every time the head unit 13 is assembled, teaching is performed before the head unit 13 is assembled. Thereby, in the positional accuracy of the ejection head 33 with respect to the head plate 31, an error derived from the assembling apparatus 100 can be reduced.
Examples of the error derived from the assembling apparatus 100 include occurrence of thermal expansion, distortion, and wear of various configurations of the assembling apparatus 100. In addition, changes in the temperature and humidity of the environment in which the assembling apparatus 100 is placed can also cause errors.
By performing teaching before assembling the head unit 13, errors resulting from the assembling apparatus 100 can be reduced.

In the present embodiment, teaching is performed based on an original plate that indicates the position of the ejection head 33 with respect to the head plate 31. The position of the ejection head 33 with respect to the head plate 31 is taught by capturing the original placed on the third table 123 as an image with the recognition device 133. As shown in FIG. 9, the original plate 181 includes two reference marks 183 corresponding to the two reference marks 41 of the head plate 31 and reference marks 185 corresponding to the two reference nozzles 42 of the ejection heads 33. Indicated.
In the following, when identifying each of the two reference marks 183, the two reference marks 183 are denoted as a reference mark 183a and a reference mark 183b, respectively. At this time, the reference mark 183a corresponds to the reference mark 41a, and the reference mark 183b corresponds to the reference mark 41b.
Further, the reference mark 185 corresponding to the reference nozzle 42a is referred to as a reference mark 185a. Similarly, the reference mark 185 corresponding to the reference nozzle 42b is denoted as the reference mark 185b.

As the original 181, a glass mask or the like in which each mark is written on a glass substrate can be generally used. In the present embodiment, a liquid crystal panel is employed as the original plate 181. An original 181 employing a liquid crystal panel has a plurality of display pixels 182 as shown in FIG. 10 which is an enlarged view of a portion C in FIG. In FIG. 10, the display pixels 182 are exaggerated for easy understanding of the configuration.
In the original 181, the plurality of display pixels 182 are arranged in a matrix in a plan view. For this reason, for example, a common master 181 can be applied between the head units 13 of different models. That is, if the display pixel 182 to be displayed is changed according to the type of the head unit 13, teaching can be performed with one original 181. As a result, it is possible to reduce the type of the original 181 for teaching, which contributes to cost reduction.

Note that it is conceivable that the head units 13 of different models have different numbers, positions, types, and the like of the discharge heads 33, and the sizes of the head plates 31 and the positions of the reference marks 41 are different. In the original plate 181 in this embodiment, the number and position of the reference mark 183 and the reference mark 185 can be changed by changing the display pixels 182 to be displayed according to the model of the head unit 13. As a result, a common master 181 can be applied between the head units 13 of different models.
As the display format of the liquid crystal panel that can be adopted as the original 181, various formats such as a transmissive type, a reflective type, and a transflective type can be adopted. As the display mode, either normally white or normally black can be adopted.

As shown in FIG. 11, the assembling apparatus 100 includes a control unit 201 that controls the operation of each of the above components. The control unit 201 includes a CPU (Central Processing Unit) 203, a drive control unit 205, and a memory unit 207. The drive control unit 205 and the memory unit 207 are connected to the CPU 203 via the bus 209.
The assembling apparatus 100 includes a first motor 211, a second motor 213, a third motor 215, a fourth motor 217, a fifth motor 219, a sixth motor 221, an input device 223, and a display device. 225.
The first motor 211, the second motor 213, and the third motor 215 are connected to the control unit 201 via the input / output interface 227 and the bus 209, respectively. The fourth motor 217, the fifth motor 219, and the sixth motor 221 are also connected to the control unit 201 via the input / output interface 227 and the bus 209, respectively. The input device 223 and the display device 225 are also connected to the control unit 201 via the input / output interface 227 and the bus 209, respectively.

The first motor 211 generates power for driving the first table 113. The second motor 213 generates power for driving the second table 119. The third motor 215 generates power for driving the third table 123.
The fourth motor 217 generates power for driving the fourth table 153. The fifth motor 219 generates power for driving the fifth table 159. The sixth motor 221 generates power for driving the sixth table 163.
The input device 223 is a device for inputting various setting conditions. The display device 225 is a device that displays setting conditions and work status. An operator who operates the assembling apparatus 100 can input various information via the input device 223 while confirming information displayed on the display device 225.
The camera 137, the lifting device 175, and the original plate 181 are also connected to the control unit 201 via the input / output interface 227 and the bus 209, respectively.

The CPU 203 performs various arithmetic processes as a processor. The drive control unit 205 controls driving of each component. The memory unit 207 includes a RAM (Random Access Memory), a ROM (Read Only Memory), and the like. In the memory unit 207, an area for storing the program software 229 in which the operation control procedure in the assembly apparatus 100 is described, a data expansion unit 231 that is an area for temporarily expanding various data, and the like are set. Examples of data developed in the data development unit 231 include model data indicating the position of the ejection head 33 with respect to the position of the head plate 31 for each model of the head unit 13, program data such as assembly processing, and the like.
The drive control unit 205 includes a motor control unit 241, an imaging control unit 243, an elevation control unit 245, an original plate control unit 247, and a display control unit 249.

The motor control unit 241 individually drives each of the first motor 211, the second motor 213, the third motor 215, the fourth motor 217, the fifth motor 219, and the sixth motor 221 based on a command from the CPU 203. Control.
The imaging control unit 243 controls imaging with the camera 137 based on a command from the CPU 203.
The lift control unit 245 controls the lift drive of the lift device 175 based on a command from the CPU 203.
The original control unit 247 controls display driving of the original 181 based on a command from the CPU 203. At this time, the master control unit 247 causes the master 181 to display a display pattern suitable for the corresponding model based on the model data.
The display control unit 249 controls driving of the display device 225 based on a command from the CPU 203.

Here, an assembling method of the head unit 13 will be described.
As shown in FIG. 12, the method for assembling the head unit 13 includes a teaching step S1 and an assembling step S2. The assembly process S2 includes an alignment process S201 and an adhesion process S202. The alignment step S201 is performed for each ejection head 33. The alignment step S201 and the bonding step S202 are performed as many times as the number of ejection heads 33 incorporated in one head unit 13.

  In the teaching step S <b> 1, first, each of the reference mark 183 a and the reference mark 183 b displayed on the original plate 181 set on the third table 123 is imaged by the camera 137. When the camera 137 captures each of the reference mark 183a and the reference mark 183b, the unit transport device 103 is driven. That is, by driving each of the first table 113, the second table 119, and the third table 123, each of the reference mark 183a and the reference mark 183b is captured in the field of view of the camera 137.

Next, each of the reference mark 185 a and the reference mark 185 b displayed on the original plate 181 is imaged by the camera 137. Imaging of the reference mark 185a and the reference mark 185b is performed as many times as the number of ejection heads 33 incorporated as the head unit 13. At this time, when the camera 137 catches each of the reference mark 185a and the reference mark 185b, the unit transport device 103 is driven.
By such teaching step S1, the position of the ejection head 33 with respect to the head plate 31 is grasped.

In the assembly step S <b> 2, the temporary fixing unit is set on the third table 123 instead of the original plate 181.
In the alignment step S <b> 201, first, each of the reference mark 41 a and the reference mark 41 b on the head plate 31 is imaged by the camera 137. At this time, when the camera 137 captures each of the reference mark 41a and the reference mark 41b, the unit transport device 103 is driven.
Next, each of the reference nozzle 42 a and the reference nozzle 42 b of the ejection head 33 is imaged by the camera 137.
Next, a displacement amount of the position of the ejection head 33 with respect to the head plate 31 is calculated based on the result of imaging the reference nozzle 42a and the reference nozzle 42b.

Based on the calculated result, when the deviation amount is within the allowable range, the alignment process S201 is completed and the process proceeds to the bonding process S202.
On the other hand, based on the calculated result, when the deviation amount is outside the allowable range, the position of the ejection head 33 is corrected (aligned).
In the alignment of the ejection head 33, first, the elevating device 175 is driven to lower the pins 173a and 173b, whereby the pins 173a and 173b are engaged with the engagement holes 44a and 44b, respectively. .
Next, the position of the ejection head 33 with respect to the head plate 31 is corrected by driving the moving device 141. At this time, by driving each of the fourth table 153, the fifth table 159, and the sixth table 163, the position of the ejection head 33 with respect to the head plate 31 is changed.

Next, each of the reference nozzle 42 a and the reference nozzle 42 b of the ejection head 33 after correcting the position is imaged by the camera 137.
Next, a displacement amount of the position of the ejection head 33 with respect to the head plate 31 is calculated based on the result of imaging the reference nozzle 42a and the reference nozzle 42b.
Then, based on the calculated result, when the deviation amount is within the allowable range, the alignment process S201 is finished and the process proceeds to the bonding process S202.
In the bonding step S202, the discharge head 33 is bonded to the head plate 31 by applying an adhesive between the head plate 31 and the base portion 43 of the discharge head 33.
The head unit 13 is assembled by the above method.

In this embodiment, the assembling apparatus 100 corresponds to an alignment apparatus, the camera 137 corresponds to an imaging apparatus, the ejection head 33 corresponds to an object, the reference nozzle 42 corresponds to a reference mark, and the original 181 is a liquid crystal apparatus. It corresponds to the light emitting device.
In the present embodiment, the master 181 employing a liquid crystal panel is driven to a display pattern corresponding to the model of the head unit 13, and the ejection head 33 can be aligned based on the result of imaging the display pattern. According to this embodiment, the display pattern of the original 181 can be changed according to the type of the head unit 13. For this reason, for example, the necessity to prepare a different mask pattern for each head unit 13 can be easily solved. As a result, it is possible to reduce the type of the original plate 181 related to teaching, so that the cost can be easily reduced.

In the present embodiment, the case where the head unit 13 includes two ejection heads 33 is illustrated. However, the number of ejection heads 33 is not limited to two, and one or more arbitrary numbers can be adopted.
Further, in the present embodiment, the case where the recognition device 133 has one camera 137 is illustrated. However, the number of cameras 137 is not limited to one, and an arbitrary number of two or more may be employed. For example, if the recognition device 133 includes two cameras 137, one of the two cameras 137 can capture the reference nozzle 42a and the other camera 137 can capture the reference nozzle 42b, which is efficient.
In this embodiment, a liquid crystal panel is used as the original 181. However, the original plate 181 is not limited to a liquid crystal panel, and various display panels such as an organic EL device and a plasma display panel may be employed.

  DESCRIPTION OF SYMBOLS 1 ... Droplet discharge device, 13 ... Head unit, 31 ... Head plate, 33 ... Discharge head, 33a, 33b ... Discharge head, 35 ... Nozzle surface, 37 ... Nozzle, 41 ... Reference mark, 41a, 41b ... Reference mark, 42 ... reference nozzle, 42a, 42b ... reference nozzle, 43 ... base portion, 44 ... engagement hole, 44a, 44b ... engagement hole, 100 ... assembly device, 103 ... unit transport device, 105 ... alignment device, 133 ... recognition 135, correction device, 137 ... camera, 141 ... moving device, 143 ... correction unit, 173 ... pin, 173a, 173b ... pin, 175 ... lifting device, 181 ... original plate, 182 ... display pixel, 183 ... reference mark, 183a, 183b ... reference mark, 185 ... reference mark, 185a, 185b ... reference mark, 201 ... control unit.

Claims (4)

An imaging device for imaging a reference mark of an object to be aligned;
A controller that grasps the position of the object based on a result of the imaging device imaging the reference mark; and
The control unit obtains a result of imaging a light emission pattern when at least a part of the plurality of light emitting regions of the light emitting device having a plurality of light emitting regions is caused to emit light according to the type of the object. Based on the correction amount of the position of the object,
An alignment apparatus characterized by that. The plurality of light emitting regions are arranged in a matrix in a plan view.
The alignment apparatus according to claim 1. The light emitting device is composed of a liquid crystal device,
The alignment apparatus according to claim 1 or 2, characterized in that: Selectively emitting at least a part of the plurality of light emitting regions of the light emitting device having a plurality of light emitting regions with a light emission pattern according to a type of an object to be aligned;
Aligning the object based on the result of imaging the emission pattern;
An alignment method characterized by that.

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