JP2011221471A - Positive radiation-sensitive composition, interlayer dielectric eilm and method for forming the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a positive radiation-sensitive composition that has good radiation sensitivity, and from which high light transmittance, voltage retention, and good developability and pattern forming property capable of reacting on changes in cured film formation condition are provided to an interlayer dielectric film obtained, the interlayer dielectric film formed from the composition and a method for forming the interlayer dielectric film.SOLUTION: The present invention is a positive radiation-sensitive composition including: a polymer (A) having a structure unit containing a group expressed in the following formula (1) in the same or different polymer molecule and having a structure unit containing an epoxy group; a photo-acid generator (B); and a long-chain alkyl group-containing compound (C).

Description

  The present invention is formed from a positive radiation-sensitive composition suitable as a material for forming an interlayer insulating film of a display element such as a liquid crystal display element (LCD) or an organic EL display element (OLED), and the composition. The present invention relates to an interlayer insulating film and a method for forming the interlayer insulating film.

  The display element is generally provided with an interlayer insulating film for the purpose of insulating between wirings arranged in layers. As the material for forming the interlayer insulating film, positive radiation-sensitive compositions are widely used because the number of steps for obtaining a necessary pattern shape is small and a material having sufficient flatness is preferable. The positive radiation sensitive composition used for forming such an interlayer insulating film is required to have good radiation sensitivity and the like, and the interlayer insulating film obtained therefrom is required to have excellent heat resistance.

  In recent years, display devices such as a liquid crystal display device and an organic EL display device tend to have a large screen, high brightness, high definition, high speed response, thinning, and the like. Therefore, the radiation-sensitive composition for forming an interlayer insulating film used for the display element of the display device has high sensitivity to radiation and the like, and the formed interlayer insulating film has a high voltage holding ratio and high light transmission. There is a demand for superior performance such as having a high rate.

  As a component of a positive radiation sensitive composition that meets such various requirements, acrylic resins are widely used. For example, JP 2004-4669 A discloses a crosslinking agent, an acid generator, and itself. Has a protective group that is insoluble or hardly soluble in an alkaline aqueous solution, but can be cleaved by the action of an acid, and contains a resin that becomes soluble in an alkaline aqueous solution after the protective group is cleaved. A positive chemically amplified resist composition has been proposed. Japanese Patent Application Laid-Open No. 2004-264623 proposes a radiation-sensitive resin composition comprising an acetal structure and / or a ketal structure and a resin containing an epoxy group and an acid generator. Yes.

  However, when forming an interlayer insulating film using the conventional radiation-sensitive resin composition as described above, for example, when prebaking is performed at a relatively low temperature after coating, or due to apparatus trouble in the development process, the development time is extended. In some cases, the developability, and thus the pattern formability may deteriorate. That is, the conventional radiation-sensitive resin composition cannot sufficiently cope with various changes in the conditions for forming a cured film in an actual production site, and there is room for improvement in this respect.

JP 2004-4669 A JP 2004-264623 A

  The present invention has been made based on the circumstances as described above, and the object thereof is a cured film having excellent radiation sensitivity, and an interlayer insulating film to be obtained having high light transmittance and voltage holding ratio. By providing a positive-type radiation-sensitive composition having excellent developability and pattern-forming properties that can cope with changes in formation conditions, an interlayer insulating film formed from the composition, and a method for forming the interlayer insulating film is there.

（式（１）中、Ｒ^１及びＲ^２は、それぞれ独立して、水素原子、アルキル基、シクロアルキル基又はアリール基であり、これらのアルキル基、シクロアルキル基又はアリール基の水素原子の一部又は全部が置換基で置換されていてもよい（但し、Ｒ^１及びＲ^２が共に水素原子である場合はない）。Ｒ^３は、アルキル基、シクロアルキル基、アラルキル基、アリール基又は−Ｍ（Ｒ^３ｍ）_３で表される基（ＭはＳｉ、Ｇｅ又はＳｎであり、Ｒ^３ｍはアルキル基である。）であり、これらの水素原子の一部又は全部が置換基で置換されていてもよい。Ｒ^１とＲ^３とが連結して環状エーテル構造を形成してもよい。）

（式（２）中、Ｘは、炭素数６〜２０の２価の直鎖状脂肪族炭化水素基である。Ｙ^１及びＹ^２は、それぞれ独立して、単結合、エステル結合、アミド結合又はウレタン結合である。Ｒ^４及びＲ^５は、それぞれ独立して、水素原子、炭素数１〜６のアルキル基、スルホ基、スルホフェニル基、又は下記式（ｉ）〜（ｖｉ）のいずれかで表される基である。但し、Ｙ^１又はＹ^２が単結合のとき、このＹ^１又はＹ^２と連結するＲ^４又はＲ^５が炭素数１〜６のアルキル基である場合はない。また、Ｙ^１及びＹ^２が共に単結合であるとき、Ｒ^４及びＲ^５が共に水素原子である場合はない。）

（式（ｉ）〜（ｖｉ）中、Ｒ^６は、水素原子又は炭素数１〜６のアルキル基である。Ｒ^７は、水素原子又はメチル基である。ｍは、０〜６の整数である。但し、上記式（２）中のＹ^１又はＹ^２が単結合のとき、このＹ^１又はＹ^２と連結するＲ^４又はＲ^５におけるｍは０である。） The invention made to solve the above problems is
[A] A polymer having a structural unit containing a group represented by the following formula (1) and an epoxy group-containing structural unit in the same or different polymer molecules (hereinafter also referred to as “[A] polymer”). ,
[B] A positive-type radiation-sensitive composition containing a photoacid generator and [C] a compound represented by the following formula (2).

(In Formula (1), R ¹ and R ² are each independently a hydrogen atom, an alkyl group, a cycloalkyl group, or an aryl group, and one of the hydrogen atoms of these alkyl group, cycloalkyl group, or aryl group) Part or all may be substituted with a substituent (provided that R ¹ and R ² are not both hydrogen atoms) R ³ represents an alkyl group, a cycloalkyl group, an aralkyl group, an aryl group, or — A group represented by M (R ^3m ) ₃ (M is Si, Ge or Sn, R ^3m is an alkyl group), and some or all of these hydrogen atoms are substituted with substituents; R ¹ and R ³ may be linked to form a cyclic ether structure.)

(In the formula (2), X is .Y ¹ and ^{Y 2} is a divalent straight-chain aliphatic hydrocarbon group having 6 to 20 carbon atoms are each independently a single bond, an ester bond, an amide bond R ⁴ and R ⁵ are each independently a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, a sulfo group, a sulfophenyl group, or any one of the following formulas (i) to (vi). However, when Y ¹ or Y ² is a single bond, R ⁴ or R ⁵ linked to Y ¹ or Y ² may not be an alkyl group having 1 to 6 carbon atoms. In addition, when Y ¹ and Y ² are both single bonds, R ⁴ and R ⁵ are not both hydrogen atoms.)

(In the formulas (i) to (vi), R ⁶ is a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. R ⁷ is a hydrogen atom or a methyl group. M is an integer of 0 to 6. (However, when Y ¹ or Y ² in the formula (2) is a single bond, m in R ⁴ or R ⁵ linked to Y ¹ or Y ² is 0.)

  Since the positive radiation sensitive composition contains an [A] polymer and a [B] photoacid generator, it has excellent radiation sensitivity. In addition, the composition includes [C] a compound represented by the above formula (2) (hereinafter also referred to as “[C] long-chain alkyl group-containing compound”). According to the [C] long-chain alkyl group-containing compound, the long-chain alkyl group can improve the hydrophobicity of the cured portion with respect to the alkaline developer, and the functional group portion can improve the hydrophilicity of the uncured portion. Therefore, according to the composition, even when the cured film forming conditions are changed, the [C] long-chain alkyl group-containing compound exhibits a buffering action, and stably exhibits excellent developability and pattern formability. be able to. Moreover, the said composition has the high light transmittance and voltage holding rate of the cured film obtained by including such a [A]-[C] component at the same high level as the conventional positive radiation sensitive composition. It can be demonstrated.

（式（３）中、Ｒ^Ｂ１は、直鎖状若しくは分岐状アルキル基、シクロアルキル基又はアリール基であり、これらの基の水素原子の一部又は全部が置換基で置換されていてもよい。） [B] The photoacid generator may be a compound having an oxime sulfonate group represented by the following formula (3).

(In Formula (3), R ^B1 is a linear or branched alkyl group, a cycloalkyl group, or an aryl group, and part or all of the hydrogen atoms of these groups may be substituted with a substituent. .)

  When the composition uses the compound having the above structure as the [B] photoacid generator, the radiation sensitivity is further improved, and excellent developability and pattern forming properties can be exhibited.

  The positive radiation sensitive composition is preferably used for forming an interlayer insulating film of a display element. By using the positive radiation sensitive composition for forming an interlayer insulating film of a display element, an interlayer insulating film capable of meeting various demands for recent performance such as high light transmittance and high voltage holding ratio is obtained. be able to.

Further, the method for forming the interlayer insulating film of the display element of the present invention,
(1) The process of forming the coating film of the said positive type radiation sensitive composition on a board | substrate,
(2) A step of irradiating at least a part of the coating film formed in step (1),
(3) a step of developing the coating film irradiated with radiation in step (2), and (4) a step of heating the coating film developed in step (3).

  In this method, even if the cured film forming conditions are changed by forming a pattern by exposure, development, and heating using radiation sensitivity using the positive radiation sensitive composition, the fine and delicate An interlayer insulating film of a display element having a pattern can be formed.

  In the present specification, the “polymer” of the component [A] has the structural unit (1) in one polymer molecule and contains an epoxy group in a polymer molecule different from the one polymer molecule. It is a concept including the case of having a structural unit.

  As described above, the positive radiation-sensitive composition of the present invention contains the above [A], [B] and [C] components, thereby having excellent radiation sensitivity, and a cured film obtained. Has a high light transmittance and voltage holding ratio, and is highly compatible with changes in the cured film forming conditions, and can exhibit excellent developability and pattern formability. Therefore, the cured film obtained from the positive radiation-sensitive composition of the present invention has a fine and elaborate pattern even when the formation conditions in the manufacturing process change to a certain extent, and has a high light transmittance and voltage. Since it has a retention rate, it can be suitably used for an interlayer insulating film or the like.

It is typical sectional drawing which shows the cured film provided with a contact hole.

The positive-type radiation-sensitive composition of the present invention [A] is a structural unit containing a group represented by the following formula (1) in the same or different polymer molecule (hereinafter also simply referred to as “structural unit (1)”). .) And an epoxy group-containing structural unit, [B] a photoacid generator, and [C] a long-chain alkyl group-containing compound, and may further contain other optional components.
<[A] polymer>
[A] The polymer has the structural unit (1) and the epoxy group-containing structural unit in the same or different polymer molecules, and may have other structural units as necessary. The embodiment of the [A] polymer having the structural unit (1) and the epoxy group-containing structural unit is not particularly limited. (I) Both the structural unit (1) and the epoxy group-containing structural unit in the same polymer molecule [A] When one type of polymer molecule is present in the polymer, (ii) in one polymer molecule, the structural unit (1) is present in a different polymer molecule. In the case where [A] two polymer molecules are present in the polymer, (iii) the structural unit (1) and the epoxy group-containing structure are contained in one polymer molecule. Having both of the units, having the structural unit (1) in a different polymer molecule, and further having an epoxy group-containing structural unit in a different polymer molecule, [A] polymer When three polymer molecules are present in (iv) (i) to (iii), The addition to the polymer molecules, and the like may include a polymer molecule of one or more further alternative in the polymer [A]. In any case, the effects of the present invention can be enjoyed. Hereinafter, the structural unit (1), the epoxy group-containing structural unit, and other structural units will be described in order.

<Structural unit (1)>
In the structural unit (1), the group represented by the above formula (1) exists as a group that dissociates in the presence of an acid to generate a polar group (hereinafter, also simply referred to as “acid-dissociable group”). Therefore, the acid-dissociable group is dissociated by the acid generated from the photoacid generator upon irradiation with radiation, and as a result, the [A] polymer that has been insoluble in alkali becomes alkali-soluble. The acid dissociable group has an acetal structure or a ketal structure that is relatively stable with respect to an alkali, and these are dissociated by the action of an acid.

In the above formula (1), the alkyl group represented by R ¹ and R ² is preferably a linear or branched alkyl group having 1 to 30 carbon atoms, and an oxygen atom, sulfur atom, nitrogen atom in the alkyl chain. You may have. Specific examples of the alkyl group include, for example, methyl group, ethyl group, n-propyl group, n-butyl group, n-pentyl group, n-hexyl group, n-octyl group, n-dodecyl group, and n-tetradecyl group. A branched alkyl group such as a straight-chain alkyl group such as n-octadecyl group, i-propyl group, i-butyl group, t-butyl group, neopentyl group, 2-hexyl group, 3-hexyl group Can do.

In the above formula (1), the cycloalkyl group represented by R ¹ and R ² is preferably a cycloalkyl group having 3 to 20 carbon atoms, may be polycyclic, and has an oxygen atom in the ring. Also good. Specific examples of the cycloalkyl group include cyclopropyl group, cyclopentyl group, cyclohexyl group, cycloheptyl, cyclooctyl, bornyl group, norbornyl group, adamantyl group and the like.

In the above formula (1), the aryl group represented by R ¹ and R ² is preferably an aryl group having 6 to 14 carbon atoms, which may be a single ring or a structure in which single rings are connected, It may be a condensed ring. Specific examples of the aryl group include a phenyl group and a naphthyl group.

Some or all of the hydrogen atoms of R ¹ and R ² may be substituted with a substituent. As such a substituent, for example, a halogen atom, a hydroxyl group, a nitro group, a cyano group, a carboxyl group, a carbonyl group, a cycloalkyl group (for this cycloalkyl group, the description of the cycloalkyl group can be preferably applied. ), An aryl group (as the aryl group, the above description of the aryl group can be preferably applied), an alkoxy group (preferably an alkoxy group having 1 to 20 carbon atoms, such as a methoxy group, ethoxy Group, propoxy group, n-butoxy group, pentyloxy group, hexyloxy group, heptyloxy group, octyloxy group, etc.), acyl group (preferably an acyl group having 2 to 20 carbon atoms, for example, acetyl Group, propionyl group, butyryl group, i-butyryl group, etc.), acyloxy group (preferably An acyloxy group having 2 to 10 carbon atoms, such as an acetoxy group, an ethylyloxy group, a butyryloxy group, a t-butyryloxy group, a t-amylyloxy group, etc.), an alkoxycarbonyl group (preferably having a carbon number of 2 to 20). An alkoxycarbonyl group, for example, a methoxycarbonyl group, an ethoxycarbonyl group, a propoxycarbonyl group, etc.), a haloalkyl group (a part or all of the hydrogen atoms of the alkyl group or cycloalkyl group are substituted with halogen atoms). And examples thereof include a perfluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a fluorocyclopropyl group, and a fluorocyclobutyl group. As for the cyclic structure in the aryl group, cycloalkyl group and the like, examples of the further substituent include the above alkyl groups.

In the above formula (1), the description of R ¹ and R ² can be applied to the alkyl group, cycloalkyl group and aryl group represented by R ³ . The aralkyl group represented by R ³ in the above formula (1) is preferably an aralkyl group having 7 to 20 carbon atoms, and examples thereof include a benzyl group, a phenethyl group, a naphthylmethyl group, and a naphthylethyl group. . The group represented by ^{-M (R} _{3m) 3} of ^{R 3} in the above formula (1), for example trimethylsilanyl group, trimethylgermyl group and the like. As the substituent which may substitute part or all of the hydrogen atoms of the aralkyl group represented by R ³ or the group represented by —M (R ^3m ) ₃ , the above substituents are preferably employed. be able to.

R ¹ and R ³ may be linked to form a cyclic ether. Examples of such cyclic ethers include 2-oxetanyl group, 2-tetrahydrofuranyl group, 2-tetrahydropyranyl group, 2-dioxanyl group and the like. Some or all of the hydrogen atoms of the cyclic ether may be substituted with the above substituents.

  The structural unit (1) can have an acetal structure or a ketal structure by having a functional group that should have an acetal structure or a ketal structure by bonding to another carbon atom.

  Examples of the functional group that should have an acetal structure by bonding to the other carbon atom include 1-methoxyethoxy group, 1-ethoxyethoxy group, 1-n-propoxyethoxy group, 1-i-propoxyethoxy. Group, 1-n-butoxyethoxy group, 1-i-butoxyethoxy group, 1-sec-butoxyethoxy group, 1-t-butoxyethoxy group, 1-cyclopentyloxyethoxy group, 1-cyclohexyloxyethoxy group, 1- Norbornyloxyethoxy group, 1-bornyloxyethoxy group, 1-phenyloxyethoxy group, 1- (1-naphthyloxy) ethoxy group, 1-benzyloxyethoxy group, 1-phenethyloxyethoxy group, (cyclohexyl) (Methoxy) methoxy group, (cyclohexyl) (ethoxy) methoxy group (Cyclohexyl) (n-propoxy) methoxy group, (cyclohexyl) (i-propoxy) methoxy group, (cyclohexyl) (cyclohexyloxy) methoxy group, (cyclohexyl) (phenoxy) methoxy group, (cyclohexyl) (benzyloxy) methoxy group , (Phenyl) (methoxy) methoxy group, (phenyl) (ethoxy) methoxy group, (phenyl) (n-propoxy) methoxy group, (phenyl) (i-propoxy) methoxy group, (phenyl) (cyclohexyloxy) methoxy group , (Phenyl) (phenoxy) methoxy group, (phenyl) (benzyloxy) methoxy group, (benzyl) (methoxy) methoxy group, (benzyl) (ethoxy) methoxy group, (benzyl) (n-propoxy) methoxy group, Benzyl) (i-propo Ii) methoxy group, (benzyl) (cyclohexyloxy) methoxy group, (benzyl) (phenoxy) methoxy group, (benzyl) (benzyloxy) methoxy group, 2-tetrahydrofuranyloxy group, 2-tetrahydropyranyloxy group, 1 -A trimethylsilanyloxyethoxy group, a 1-trimethylgermyloxyethoxy group, etc. can be mentioned.

  Among these, 1-ethoxyethoxy group, 1-cyclohexyloxyethoxy group, 2-tetrahydropyranyloxy group, 1-n-propoxyethoxy group, and 2-tetrahydropyranyloxy group can be mentioned as preferable examples.

  Examples of the functional group that should have a ketal structure by bonding to the other carbon atom include 1-methyl-1-methoxyethoxy group, 1-methyl-1-ethoxyethoxy group, 1-methyl- 1-n-propoxyethoxy group, 1-methyl-1-i-propoxyethoxy group, 1-methyl-1-n-butoxyethoxy group, 1-methyl-1-i-butoxyethoxy group, 1-methyl-1- sec-butoxyethoxy group, 1-methyl-1-t-butoxyethoxy group, 1-methyl-1-cyclopentyloxyethoxy group, 1-methyl-1-cyclohexyloxyethoxy group, 1-methyl-1-norbornyloxy Ethoxy group, 1-methyl-1-bornyloxyethoxy group, 1-methyl-1-phenyloxyethoxy group, 1-methyl-1- (1-na Tiloxy) ethoxy group, 1-methyl-1-benzyloxyoxyethoxy group, 1-methyl-1-phenethyloxyethoxy group, 1-cyclohexyl-1-methoxyethoxy group, 1-cyclohexyl-1-ethoxyethoxy group, 1- Cyclohexyl-1-n-propoxyethoxy group, 1-cyclohexyl-1-i-propoxyethoxy group, 1-cyclohexyl-1-cyclohexyloxyethoxy group, 1-cyclohexyl-1-phenoxyethoxy group, 1-cyclohexyl-1-benzyl Oxyethoxy group, 1-phenyl-1-methoxyethoxy group, 1-phenyl-1-ethoxyethoxy group, 1-phenyl-1-n-propoxyethoxy group, 1-phenyl-1-i-propoxyethoxy group, Phenyl-1-cyclohexyloxyethoxy group 1-phenyl-1-phenyloxyethoxy group, 1-phenyl-1-benzyloxyethoxy group, 1-benzyl-1-methoxyethoxy group, 1-benzyl-1-ethoxyethoxy group, 1-benzyl-1-n- Propoxyethoxy group, 1-benzyl-1-i-propoxyethoxy group, 1-benzyl-1-cyclohexyloxyethoxy group, 1-benzyl-1-phenyloxyethoxy group, 1-benzyl-1-benzyloxyethoxy group, 2 -(2-Methyl-tetrahydrofuranyl) oxy group, 2- (2-methyl-tetrahydropyranyl) oxy group, 1-methoxy-cyclopentyloxy group, 1-methoxy-cyclohexyloxy group and the like can be mentioned.

  Among these, 1-methyl-1-methoxyethoxy group and 1-methyl-1-cyclohexyloxyethoxy group can be mentioned as preferable ones.

  Specific examples of the structural unit (1) having the acetal structure or ketal structure include structural units represented by the following formulas (1-1) to (1-3).

(In formulas (1-1) and (1-3), R ′ is a hydrogen atom or a methyl group. R ¹ , R ^2, and R ³ have the same meanings as those in formula (1) above.)

As a monomer having radical polymerizability that gives the structural unit (1) represented by the above formulas (1-1) to (1-3) (hereinafter also simply referred to as “acetal structure-containing monomer”). For example, 1-alkoxyalkyl (meth) acrylate, 1- (cycloalkyloxy) alkyl (meth) acrylate, 1- (haloalkoxy) alkyl (meth) acrylate, 1- (aralkyloxy) alkyl (meth) acrylate, tetrahydropyrani (Meth) acrylate-based acetal structure-containing monomers such as ru (meth) acrylate;
2,3-di (1- (trialkylsilanyloxy) alkoxy) carbonyl) -5-norbornene, 2,3-di (1- (trialkylgermyloxy) alkoxy) carbonyl) -5-norbornene, 2, 3-di (1-alkoxyalkoxycarbonyl) -5-norbornene, 2,3-di (1- (cycloalkyloxy) alkoxycarbonyl) -5-norbornene, 2,3-di (1- (aralkyloxy) alkoxycarbonyl ) Norbornene-based acetal structure-containing monomers such as -5-norbornene;
Examples thereof include styrene acetal structure-containing monomers such as 1-alkoxyalkoxystyrene, 1- (haloalkoxy) alkoxystyrene, 1- (aralkyloxy) alkoxystyrene, and tetrahydropyranyloxystyrene.

  Among these, 1-alkoxyalkyl (meth) acrylate, tetrahydropyranyl (meth) acrylate, 1-alkoxyalkoxystyrene, and tetrahydropyranyloxystyrene are preferable, and 1-alkoxyalkyl (meth) acrylate is more preferable.

Specific examples of the acetal structure-containing monomer that gives the structural unit (1) include, for example,
1-ethoxyethyl methacrylate, 1-methoxyethyl methacrylate, 1-n-butoxyethyl methacrylate, 1-isobutoxyethyl methacrylate, 1-t-butoxyethyl methacrylate, 1- (2-chloroethoxy) ethyl methacrylate, 1- (2 -Ethylhexyloxy) ethyl methacrylate, 1-n-propoxyethyl methacrylate, 1-cyclohexyloxyethyl methacrylate, 1- (2-cyclohexylethoxy) ethyl methacrylate, 1-benzyloxyethyl methacrylate, 2-tetrahydropyranyl methacrylate,
1-ethoxyethyl acrylate, 1-methoxyethyl acrylate, 1-n-butoxyethyl acrylate, 1-isobutoxyethyl acrylate, 1-t-butoxyethyl acrylate, 1- (2-chloroethoxy) ethyl acrylate, 1- (2 -Ethylhexyloxy) ethyl acrylate, 1-n-propoxyethyl acrylate, 1-cyclohexyloxyethyl acrylate, 1- (2-cyclohexylethoxy) ethyl acrylate, 1-benzyloxyethyl acrylate, 2-tetrahydropyranyl acrylate,
2,3-di (1- (trimethylsilanyloxy) ethoxy) carbonyl) -5-norbornene, 2,3-di (1- (trimethylgermyloxy) ethoxy) carbonyl) -5-norbornene, 2,3- Di (1-methoxyethoxycarbonyl) -5-norbornene, 2,3-di (1- (cyclohexyloxy) ethoxycarbonyl) -5-norbornene, 2,3-di (1- (benzyloxy) ethoxycarbonyl) -5 -Norbornene,
p or m-1-ethoxyethoxystyrene, p or m-1-methoxyethoxystyrene, p or m-1-n-butoxyethoxystyrene, p or m-1-isobutoxyethoxystyrene, p or m-1- ( 1,1-dimethylethoxy) ethoxystyrene, p or m-1- (2-chloroethoxy) ethoxystyrene, p or m-1- (2-ethylhexyloxy) ethoxystyrene, p or m-1-n-propoxyethoxy Examples include styrene, p or m-1-cyclohexyloxyethoxystyrene, p or m-1- (2-cyclohexylethoxy) ethoxystyrene, p or m-1-benzyloxyethoxystyrene. The said structural unit (1) can be used 1 type or in combination of 2 or more types.

  Among the acetal structure-containing monomers that give the structural unit (1), 1-ethoxyethyl methacrylate, 1-n-butoxyethyl methacrylate, 2-tetrahydropyranyl methacrylate, and 1-benzyloxyethyl methacrylate are preferable.

  A commercially available thing may be used for the acetal structure containing monomer which gives structural unit (1), and what was synthesize | combined by the well-known method can also be used. For example, the acetal structure-containing monomer that gives the structural unit (1) represented by the above formula (1-1) reacts (meth) acrylic acid with vinyl ether in the presence of an acid catalyst as shown below. Can be synthesized.

(In the formula, R ′, R ¹ and R ³ respectively correspond to R ′, R ¹ and R ³ in the above formula (1-1), and R ²¹ and R ²² represent —CH (R ²¹ ) (R ²² ) corresponds to R ² in the above formula (1-1).)

  [A] The content of the structural unit (1) in the polymer is not particularly limited as long as the polymer [A] is alkali-soluble by acid and exhibits the desired heat resistance of the cured film. When both the structural unit (1) and the epoxy group-containing structural unit are included in the polymer molecule, the monomer charge ratio is 5% by mass or more and 70% by mass or less with respect to all the structural units contained in the [A] polymer. Is preferable, 10 mass% or more and 60 mass% or less are more preferable, and 20 mass% or more and 50 mass% or less are especially preferable.

  On the other hand, when having a structural unit (1) in a single polymer molecule and having an epoxy group-containing structural unit in another single polymer molecule, a single polymer molecule having a structural unit (1) The content of the structural unit (1) is preferably 40% by mass or more and 99% by mass or less, more preferably 50% by mass or more and 98% by mass with respect to the total structural units contained in the polymer molecule. % Or less is more preferable, and 55 mass% or more and 95 mass% or less are especially preferable.

<Epoxy group-containing structural unit>
[A] The polymer has an epoxy group-containing structural unit together with the structural unit (1). The epoxy group-containing structural unit is a structural unit derived from an epoxy group-containing monomer having radical polymerizability. Examples of the epoxy group include an oxiranyl group (1,2-epoxy structure) and an oxetanyl group (1,3-epoxy structure). [A] When the polymer has a structural unit containing an oxiranyl group or an oxetanyl group in the molecule, the hardness of the cured film obtained from the positive radiation-sensitive composition can be improved to further improve heat resistance. it can.

Specific examples of the epoxy group-containing monomer that gives the epoxy group-containing structural unit include, for example, glycidyl acrylate, glycidyl methacrylate, acrylic acid-3,4-epoxybutyl, methacrylic acid-3,4-epoxybutyl, and acrylic. Acid-3-methyl-3,4-epoxybutyl, methacrylate-3-ethyl-3,4-epoxybutyl, acrylic acid-5,6-epoxyhexyl, methacrylic acid-5,6-epoxyhexyl, methacrylic acid 5-methyl-5,6-epoxyhexyl, methacrylic acid-5-ethyl-5,6-epoxyhexyl, acrylic acid-6,7-epoxyheptyl, methacrylic acid-6,7-epoxyheptyl,
3,4-epoxycyclohexyl methacrylate, 3,4-epoxycyclohexylmethyl methacrylate, 3,4-epoxycyclohexylethyl methacrylate, 3,4-epoxycyclohexylpropyl methacrylate, 3,4-epoxycyclohex Xylbutyl methacrylate, 3,4-epoxycyclohexylhexyl methacrylate, 3,4-epoxycyclohexyl acrylate, 3,4-epoxycyclohexylmethyl acrylate, 3,4-epoxycyclohexylethyl acrylate, 3,4 -Oxylanyl group-containing (meth) acrylic compounds such as epoxycyclohexylpropyl acrylate, 3,4-epoxycyclohexylbutyl acrylate, 3,4-epoxycyclohexylhexyl acrylate;

o-vinyl benzyl glycidyl ether, m-vinyl benzyl glycidyl ether, p-vinyl benzyl glycidyl ether, α-methyl-o-vinyl benzyl glycidyl ether, α-methyl-m-vinyl benzyl glycidyl ether, α-methyl-p-vinyl Vinyl benzyl glycidyl ethers such as benzyl glycidyl ether;
vinyl phenyl glycidyl ethers such as o-vinyl phenyl glycidyl ether, m-vinyl phenyl glycidyl ether, p-vinyl phenyl glycidyl ether;
3- (acryloyloxymethyl) oxetane, 3- (acryloyloxymethyl) -3-methyloxetane, 3- (acryloyloxymethyl) -3-ethyloxetane, 3- (acryloyloxymethyl) -3-phenyloxetane, 3- (2-acryloyloxyethyl) oxetane, 3- (2-acryloyloxyethyl) -3-ethyloxetane, 3- (2-acryloyloxyethyl) -3-ethyloxetane, 3- (2-acryloyloxyethyl) -3 -Phenyloxetane,
3- (methacryloyloxymethyl) oxetane, 3- (methacryloyloxymethyl) -3-methyloxetane, 3- (methacryloyloxymethyl) -3-ethyloxetane, 3- (methacryloyloxymethyl) -3-phenyloxetane, 3- (2-methacryloyloxyethyl) oxetane, 3- (2-methacryloyloxyethyl) -3-ethyloxetane, 3- (2-methacryloyloxyethyl) -3-ethyloxetane, 3- (2-methacryloyloxyethyl) -3 -Phenyloxetane,
2- (acryloyloxymethyl) oxetane, 2- (acryloyloxymethyl) -2-methyloxetane, 2- (acryloyloxymethyl) -2-ethyloxetane, 2- (acryloyloxymethyl) -2-phenyloxetane, 2- (2-acryloyloxyethyl) oxetane, 2- (2-acryloyloxyethyl) -2-ethyloxetane, 2- (2-acryloyloxyethyl) -2-ethyloxetane, 2- (2-acryloyloxyethyl) -2 -Phenyloxetane,
2- (methacryloyloxymethyl) oxetane, 2- (methacryloyloxymethyl) -2-methyloxetane, 2- (methacryloyloxymethyl) -2-ethyloxetane, 2- (methacryloyloxymethyl) -2-phenyloxetane, 2- (2-methacryloyloxyethyl) oxetane, 2- (2-methacryloyloxyethyl) -2-ethyloxetane, 2- (2-methacryloyloxyethyl) -2-ethyloxetane, 2- (2-methacryloyloxyethyl) -2 An oxetanyl group-containing (meth) acrylic compound such as phenyl oxetane can be used. The said epoxy group containing structural unit can be used individually or in combination of 2 or more types.

  Among the above epoxy group-containing monomers, glycidyl methacrylate, 2-methylglycidyl methacrylate, 3,4-epoxycyclohexyl methacrylate, 3,4-epoxycyclohexylmethyl methacrylate, 3- (methacryloyloxymethyl) -3-Methyloxetane and 3- (methacryloyloxymethyl) -3-ethyloxetane are preferable from the viewpoint of copolymerization reactivity with other radical polymerizable monomers and developability of the positive radiation sensitive composition.

  [A] The content of the epoxy group-containing structural unit in the polymer is not particularly limited as long as the desired heat resistance of the interlayer insulating film is exhibited, and the structural unit (1) and the epoxy group are contained in one polymer molecule. When the structural unit is included, the monomer charge ratio is preferably 10% by mass or more and 60% by mass or less, and more preferably 15% by mass or more and 55% by mass or less with respect to all the structural units contained in the [A] polymer. It is preferably 20% by mass or more and 50% by mass or less.

  On the other hand, when one polymer molecule has the structural unit (1) and the other polymer molecule has an epoxy group-containing structural unit, the entire structure contained in the other polymer molecule having the epoxy group-containing structural unit The content of the epoxy group-containing structural unit relative to the unit is preferably 20% by mass to 80% by mass, more preferably 30% by mass to 70% by mass, and more preferably 35% by mass to 65% by mass in terms of monomer charge. The following are particularly preferred:

<Other structural units>
Examples of the radical polymerizable monomer that gives other structural units include a carboxyl group or a derivative thereof, a radical polymerizable monomer having a hydroxyl group, and the like.

Examples of the radical polymer monomer having a carboxyl group or a derivative thereof include acrylic acid, methacrylic acid, crotonic acid, 2-acryloyloxyethyl succinic acid, 2-methacryloyloxyethyl succinic acid, 2-acryloyloxyethyl hexahydrophthal Acids, monocarboxylic acids such as 2-methacryloyloxyethyl hexahydrophthalic acid;
Dicarboxylic acids such as maleic acid, fumaric acid, citraconic acid, mesaconic acid, itaconic acid;
The acid anhydride of the said dicarboxylic acid etc. can be mentioned.

Examples of the radical polymerizable monomer having a hydroxyl group include
Acrylic acid hydroxyalkyl esters such as acrylic acid-2-hydroxyethyl ester, acrylic acid-3-hydroxypropyl ester, acrylic acid-4-hydroxybutyl ester, acrylic acid-4-hydroxymethylcyclohexylmethyl ester;
Methacrylic acid-2-hydroxyethyl ester, methacrylic acid-3-hydroxypropyl ester, methacrylic acid-4-hydroxybutyl ester, methacrylic acid-5-hydroxypentyl ester, methacrylic acid-6-hydroxyhexyl ester, methacrylic acid-4- Mention may be made of methacrylic acid hydroxyalkyl esters such as hydroxymethyl-cyclohexylmethyl ester.

  Among these radical polymerizable monomers having a hydroxyl group, acrylic acid-2-hydroxyethyl ester, from the viewpoint of copolymerization reactivity with other radical polymerizable monomers and heat resistance of the resulting interlayer insulating film, Acrylic acid-3-hydroxypropyl ester, acrylic acid-4-hydroxybutyl ester, methacrylic acid-2-hydroxyethyl ester, methacrylic acid-4-hydroxybutyl ester, acrylic acid-4-hydroxymethyl-cyclohexylmethyl ester, methacrylic acid -4-Hydroxymethyl-cyclohexylmethyl ester is preferred.

Examples of other radical polymerizable monomers include
Alkyl acrylates such as methyl acrylate and i-propyl acrylate;
Alkyl methacrylates such as methyl methacrylate, ethyl methacrylate, n-butyl methacrylate, sec-butyl methacrylate, t-butyl methacrylate;
Cyclohexyl acrylate, acrylate-2-methylcyclohexyl, tricyclo [5.2.1.0 ^2,6 ] decan-8-yl acrylate, acrylate-2- (tricyclo [5.2.1.0 ^{2, 6} ] Acrylic alicyclic alkyl ester such as decan-8-yloxy) ethyl, isobornyl acrylate;
Cyclohexyl methacrylate, 2-methylcyclohexyl methacrylate, tricyclo [5.2.1.0 ^2,6 ] decan-8-yl methacrylate, methacrylic acid-2- (tricyclo [5.2.1.0 ^{2, 6} ] decano-8-yloxy) ethyl, methacrylic acid alicyclic alkyl esters such as isobornyl methacrylate;
Aryl esters of acrylic acid such as phenyl acrylate and benzyl acrylate and aralkyl esters of acrylic acid;
Aryl esters of methacrylic acid such as phenyl methacrylate and benzyl methacrylate and aralkyl esters of methacrylic acid;
Dicarboxylic acid dialkyl esters such as diethyl maleate, diethyl fumarate, diethyl itaconate;
Unsaturated 5-membered ring methacrylates and unsaturated 6-membered ring methacrylates containing 1 atom of oxygen such as tetrahydrofurfuryl methacrylate, tetrahydrofuryl methacrylate, tetrahydropyran-2-methyl methacrylate;

4-methacryloyloxymethyl-2-methyl-2-ethyl-1,3-dioxolane, 4-methacryloyloxymethyl-2-methyl-2-isobutyl-1,3-dioxolane, 4-methacryloyloxymethyl-2-cyclohexyl- 2 oxygen atoms such as 1,3-dioxolane, 4-methacryloyloxymethyl-2-methyl-2-ethyl-1,3-dioxolane, 4-methacryloyloxymethyl-2-methyl-2-isobutyl-1,3-dioxolane Unsaturated heterocyclic 5-membered methacrylates containing:
4-acryloyloxymethyl-2,2-dimethyl-1,3-dioxolane, 4-acryloyloxymethyl-2-methyl-2-ethyl-1,3-dioxolane, 4-acryloyloxymethyl-2, 2-diethyl- 1,3-dioxolane, 4-acryloyloxymethyl-2-methyl-2-isobutyl-1,3-dioxolane, 4-acryloyloxymethyl-2-cyclopentyl-1,3-dioxolane, 4-acryloyloxymethyl-2- Cyclohexyl-1,3-dioxolane, 4-acryloyloxyethyl-2-methyl-2-ethyl-1,3-dioxolane, 4-acryloyloxypropyl-2-methyl-2-ethyl-1,3-dioxolane, 4- Acryloyloxybutyl-2-methyl-2-ethyl-1,3-dioxola Unsaturated five-membered heterocyclic acrylic acid esters containing oxygen 2 atoms and the like;

Vinyl aromatic compounds such as styrene, α-methylstyrene, m-methylstyrene, p-methylstyrene, p-methoxystyrene, 4-isopropenylphenol;
N-phenylmaleimide, N-cyclohexylmaleimide, N-benzylmaleimide, N-succinimidyl-3-maleimidobenzoate, N-succinimidyl-4-maleimidobutyrate, N-succinimidyl-6-maleimidocaproate, N-succinimidyl-3 -N-substituted maleimides such as maleimide propionate, N- (9-acridinyl) maleimide;
Conjugated diene compounds such as 1,3-butadiene, isoprene and 2,3-dimethyl-1,3-butadiene;
Other unsaturated compounds such as acrylonitrile, methacrylonitrile, acrylamide, methacrylamide, vinyl chloride, vinylidene chloride and vinyl acetate can be mentioned.

Among these other radical polymerizable monomers, styrene, 4-isopropenylphenol, tricyclo [5.2.1.0 ^2,6 ] decan-8-yl methacrylate, tetrahydrofurfuryl methacrylate, 1, Radical polymerizability in which 3-butadiene, 4-acryloyloxymethyl-2-methyl-2-ethyl-1,3-dioxolane, N-cyclohexylmaleimide, N-phenylmaleimide, benzyl methacrylate, etc. have the above reactive functional groups It is preferable in terms of copolymerization reactivity with the monomer and developability of the positive radiation sensitive composition.

[A] The polystyrene-reduced mass average molecular weight (hereinafter referred to as “Mw”) by GPC (gel permeation chromatography) of the polymer is preferably 2.0 × 10 ^{3 to} 1.0 × 10 ⁵ , more preferably. It is 5.0 * 10 < ³ > -5.0 * 10 < ⁴ >. [A] By making Mw of a polymer into the said range, the radiation sensitivity and alkali developability of the said positive type radiation sensitive composition can be improved.

Moreover, the number average molecular weight (hereinafter referred to as “Mn”) in terms of polystyrene by GPC (gel permeation chromatography) of the [A] polymer is preferably 2.0 × 10 ^{3 to} 1.0 × 10 ⁵ . Preferably it is 5.0 * 10 < ³ > -5.0 * 10 < ⁴ >. By setting the Mn of the copolymer within the above range, the curing reactivity at the time of curing the coating film of the positive radiation sensitive composition can be improved.

  Furthermore, the molecular weight distribution “Mw / Mn” of the [A] polymer is preferably 3.0 or less, more preferably 2.6 or less. [A] By setting Mw / Mn of the polymer to 3.0 or less, the developability of the obtained interlayer insulating film can be improved. [A] The positive-type radiation-sensitive composition containing a polymer can easily form a desired pattern shape without causing a development residue during development.

<[A] Production method of polymer>
[A] The polymer can be produced by radical copolymerization of an acetal structure-containing monomer, an epoxy group-containing monomer, and other monomers that give structural units. In the case of producing the [A] polymer containing both the structural unit (1) and the epoxy group-containing structural unit in the same polymer molecule, a mixture containing at least an acetal structure-containing monomer and an epoxy group-containing monomer May be used for copolymerization. On the other hand, when the [A] polymer having the structural unit (1) in one polymer molecule and the epoxy group-containing structural unit in a different polymer molecule is produced, at least an acetal structure-containing monomer A polymer solution containing the structural unit (1) is obtained by radical polymerization of a polymerizable solution containing, and a polymer solution containing at least an epoxy group-containing monomer is radically polymerized to have an epoxy group-containing structural unit. What is necessary is just to obtain a polymer molecule | numerator and finally mix both to make [A] polymer.

  [A] Examples of the solvent used in the polymerization reaction for producing the polymer include alcohols, ethers, glycol ethers, ethylene glycol alkyl ether acetates, diethylene glycol alkyl ethers, propylene glycol monoalkyl ethers, and propylene glycol monoalkyls. Examples include ether acetate, propylene glycol monoalkyl ether propionate, aromatic hydrocarbons, ketones, and other esters.

These solvents include
Examples of alcohols include methanol, ethanol, benzyl alcohol, 2-phenylethyl alcohol, 3-phenyl-1-propanol and the like;
Ethers such as tetrahydrofuran;
Examples of glycol ethers include ethylene glycol monomethyl ether and ethylene glycol monoethyl ether;
Examples of ethylene glycol alkyl ether acetate include methyl cellosolve acetate, ethyl cellosolve acetate, ethylene glycol monobutyl ether acetate, and ethylene glycol monoethyl ether acetate;
Examples of the diethylene glycol alkyl ether include diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, diethylene glycol ethyl methyl ether and the like;
Examples of propylene glycol monoalkyl ethers include propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monopropyl ether, propylene glycol monobutyl ether and the like;
Examples of the propylene glycol monoalkyl ether acetate include propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, propylene glycol monopropyl ether acetate, propylene glycol monobutyl ether acetate;
As propylene glycol monoalkyl ether propionate, for example, propylene monoglycol methyl ether propionate, propylene glycol monoethyl ether propionate, propylene glycol monopropyl ether propionate, propylene glycol monobutyl ether propionate and the like;

Examples of aromatic hydrocarbons include toluene and xylene;
Examples of ketones include methyl ethyl ketone, cyclohexanone, 4-hydroxy-4-methyl-2-pentanone, and the like;
Examples of other esters include methyl acetate, ethyl acetate, propyl acetate, butyl acetate, ethyl 2-hydroxypropionate, methyl 2-hydroxy-2-methylpropionate, ethyl 2-hydroxy-2-methylpropionate, Methyl hydroxyacetate, ethyl hydroxyacetate, butyl hydroxyacetate, methyl lactate, ethyl lactate, propyl lactate, butyl lactate, methyl 3-hydroxypropionate, ethyl 3-hydroxypropionate, propyl 3-hydroxypropionate, 3-hydroxypropionic acid Butyl, methyl 2-hydroxy-3-methylbutanoate, methyl methoxyacetate, ethyl methoxyacetate, propyl methoxyacetate, butyl methoxyacetate, methyl ethoxyacetate, ethyl ethoxyacetate, propyl ethoxyacetate, butyl ethoxyacetate Methyl propoxyacetate, ethyl propoxyacetate, propylpropoxyacetate, butyl propoxyacetate, methyl butoxyacetate, ethyl butoxyacetate, propylbutoxyacetate, butylbutoxyacetate, methyl 2-methoxypropionate, ethyl 2-methoxypropionate, 2-methoxypropionate Propyl acid, butyl 2-methoxypropionate, methyl 2-ethoxypropionate, ethyl 2-ethoxypropionate, propyl 2-ethoxypropionate, butyl 2-ethoxypropionate, methyl 2-butoxypropionate, 2-butoxypropionic acid Ethyl, propyl 2-butoxypropionate, butyl 2-butoxypropionate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, propyl 3-methoxypropionate, 3- Butyl toxipropionate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, propyl 3-ethoxypropionate, butyl 3-ethoxypropionate, methyl 3-propoxypropionate, ethyl 3-propoxypropionate, 3-propoxy Examples include esters such as propyl propionate, butyl 3-propoxypropionate, methyl 3-butoxypropionate, ethyl 3-butoxypropionate, propyl 3-butoxypropionate, and butyl 3-butoxypropionate.

  Among these solvents, ethylene glycol alkyl ether acetate, diethylene glycol alkyl ether, propylene glycol monoalkyl ether, propylene glycol monoalkyl ether acetate, and butyl methoxyacetate are preferable, particularly diethylene glycol dimethyl ether, diethylene glycol ethyl methyl ether, propylene glycol monomethyl ether, Propylene glycol monomethyl ether acetate and butyl methoxyacetate are preferred.

[A] As the polymerization initiator used in the polymerization reaction for producing the polymer, those generally known as radical polymerization initiators can be used. Examples of radical polymerization initiators include:
2,2′-azobisisobutyronitrile, 2,2′-azobis- (2,4-dimethylvaleronitrile), 2,2′-azobis- (4-methoxy-2,4-dimethylvaleronitrile), Azo compounds such as 2,2′-azobis (methyl 2-methylpropionate);
And organic peroxides such as benzoyl peroxide, lauroyl peroxide, t-butylperoxypivalate, 1,1′-bis- (t-butylperoxy) cyclohexane; and hydrogen peroxide.

  When a peroxide is used as the radical polymerization initiator, the peroxide may be used together with a reducing agent to form a redox initiator.

[A] In the polymerization reaction for producing the polymer, a molecular weight modifier can be used to adjust the molecular weight. Specific examples of molecular weight regulators include
Halogenated hydrocarbons such as chloroform and carbon tetrabromide;
mercaptans such as n-hexyl mercaptan, n-octyl mercaptan, n-dodecyl mercaptan, t-dodecyl mercaptan, thioglycolic acid;
Xanthogens such as dimethylxanthogen sulfide and diisopropylxanthogen disulfide;
Examples include terpinolene and α-methylstyrene dimer.

<[B] Photoacid generator>
[B] The photoacid generator is a compound that generates an acid upon irradiation with radiation. Here, for example, visible light, ultraviolet light, or far ultraviolet light can be used as the radiation. By including the [B] photoacid generator and the [A] polymer having an acid dissociable group, the composition can exhibit positive radiation sensitive characteristics. [B] The photoacid generator is not particularly limited as long as it is a compound that generates an acid (for example, carboxylic acid, sulfonic acid, etc.) by irradiation with radiation. [B] The content of the photoacid generator in the composition is also a form of a photoacid generator (hereinafter, also referred to as “[B] photoacid generator”) which is a compound as described later. [A] The form of the photoacid generator incorporated as part of the polymer or other polymer, or both forms.

  [B] Examples of the photoacid generator include oxime sulfonate compounds, onium salts, sulfonimide compounds, halogen-containing compounds, diazomethane compounds, sulfone compounds, sulfonic acid ester compounds, carboxylic acid ester compounds, and the like.

(Oxime sulfonate compound)
As said oxime sulfonate compound, the compound containing the oxime sulfonate group represented by the said Formula (3) is preferable.

As the linear or branched alkyl group for R ^B1, a linear or branched alkyl group having 1 to 10 carbon atoms is preferable. In addition, part or all of the hydrogen atoms of the linear or branched alkyl group or cycloalkyl group represented by R ^B1 may be an alkoxy group having 1 to 10 carbon atoms or an alicyclic group (7,7-dimethyl-2-oxo). It may be substituted with a bridged alicyclic group such as a norbornyl group, preferably a bicycloalkyl group. The aryl group for R ^B1 is preferably an aryl group having 6 to 11 carbon atoms, and more preferably a phenyl group or a naphthyl group. The aryl group of R ^B1 may be substituted with an alkyl group having 1 to 5 carbon atoms, an alkoxy group, a halogen atom, or the like.

  The compound containing an oxime sulfonate group represented by the above formula (3) is more preferably an oxime sulfonate compound represented by the following formula (3-1).

In the above formula (3-1), R ^B1 has the same ^{meaning as} the description of R ^B1 in the above formula (3). Z is an alkyl group, an alkoxy group, or a halogen atom. m is an integer of 0-3. When m is 2 or 3, a plurality of Z may be the same or different. The alkyl group as Z is preferably a linear or branched alkyl group having 1 to 4 carbon atoms.

  The alkoxy group as Z is preferably a linear or branched alkoxy group having 1 to 4 carbon atoms. The halogen atom as Z is preferably a chlorine atom or a fluorine atom. m is preferably 0 or 1. In particular, in the above formula (3-1), a compound in which m is 1, Z is a methyl group, and the substitution position of Z is ortho is preferable.

  Specific examples of the oxime sulfonate compound include compounds (3-i), (3-ii), (3-iii), and compounds represented by the following formulas (3-i) to (3-5v), for example. (3-iv) and compound (3-v).

  These acid generators can be used alone or in combination of two or more kinds, and can also be used in combination with other photoacid generators as the [B] component. Compound (3-i) [(5-propylsulfonyloxyimino-5H-thiophen-2-ylidene)-(2-methylphenyl) acetonitrile], compound (3-ii) [(5-octylsulfonyloxyimino-5H -Thiophen-2-ylidene)-(2-methylphenyl) acetonitrile], compound (3-iii) [(camphorsulfonyloxyimino-5H-thiophen-2-ylidene)-(2-methylphenyl) acetonitrile], compound ( 3-iv) [(5-p-toluenesulfonyloxyimino-5H-thiophen-2-ylidene)-(2-methylphenyl) acetonitrile] and compound (3-v) [(5-octylsulfonyloxyimino)-( 4-methoxyphenyl) acetonitrile] is commercially available That.

(Onium salt)
Examples of the onium salt include diphenyliodonium salt, triphenylsulfonium salt, sulfonium salt, benzothiazonium salt, and tetrahydrothiophenium salt.

  Examples of the diphenyliodonium salt include diphenyliodonium tetrafluoroborate, diphenyliodonium hexafluorophosphonate, diphenyliodonium hexafluoroarsenate, diphenyliodonium trifluoromethanesulfonate, diphenyliodonium trifluoroacetate, diphenyliodonium-p-toluenesulfonate, diphenyl Iodonium butyltris (2,6-difluorophenyl) borate, 4-methoxyphenylphenyliodonium tetrafluoroborate, bis (4-t-butylphenyl) iodonium tetrafluoroborate, bis (4-t-butylphenyl) iodonium hexafluoroarce Bis (4-tert-butylphenyl) iodonium trifluoro Tansulfonate, bis (4-t-butylphenyl) iodonium trifluoroacetate, bis (4-t-butylphenyl) iodonium-p-toluenesulfonate, bis (4-t-butylphenyl) iodonium camphorsulfonic acid, etc. Can be mentioned.

  Examples of the triphenylsulfonium salt include triphenylsulfonium trifluoromethanesulfonate, triphenylsulfonium camphorsulfonic acid, triphenylsulfonium tetrafluoroborate, triphenylsulfonium trifluoroacetate, triphenylsulfonium-p-toluenesulfonate, and triphenyl. Examples include sulfonium butyl tris (2,6-difluorophenyl) borate.

  Examples of the sulfonium salt include alkylsulfonium salts, benzylsulfonium salts, dibenzylsulfonium salts, substituted benzylsulfonium salts and the like.

  Examples of the alkylsulfonium salt include 4-acetoxyphenyldimethylsulfonium hexafluoroantimonate, 4-acetoxyphenyldimethylsulfonium hexafluoroarsenate, dimethyl-4- (benzyloxycarbonyloxy) phenylsulfonium hexafluoroantimonate, dimethyl-4- (Benzoyloxy) phenylsulfonium hexafluoroantimonate, dimethyl-4- (benzoyloxy) phenylsulfonium hexafluoroarsenate, dimethyl-3-chloro-4-acetoxyphenylsulfonium hexafluoroantimonate and the like can be mentioned.

  Examples of the benzylsulfonium salt include benzyl-4-hydroxyphenylmethylsulfonium hexafluoroantimonate, benzyl-4-hydroxyphenylmethylsulfonium hexafluorophosphate, 4-acetoxyphenylbenzylmethylsulfonium hexafluoroantimonate, benzyl-4-methoxyphenyl. Methylsulfonium hexafluoroantimonate, benzyl-2-methyl-4-hydroxyphenylmethylsulfonium hexafluoroantimonate, benzyl-3-chloro-4-hydroxyphenylmethylsulfonium hexafluoroarsenate, 4-methoxybenzyl-4-hydroxyphenyl Examples include methylsulfonium hexafluorophosphate.

  Examples of the dibenzylsulfonium salt include dibenzyl-4-hydroxyphenylsulfonium hexafluoroantimonate, dibenzyl-4-hydroxyphenylsulfonium hexafluorophosphate, 4-acetoxyphenyldibenzylsulfonium hexafluoroantimonate, and dibenzyl-4-methoxyphenylsulfonium. Hexafluoroantimonate, dibenzyl-3-chloro-4-hydroxyphenylsulfonium hexafluoroarsenate, dibenzyl-3-methyl-4-hydroxy-5-t-butylphenylsulfonium hexafluoroantimonate, benzyl-4-methoxybenzyl- Examples include 4-hydroxyphenylsulfonium hexafluorophosphate.

  Examples of substituted benzylsulfonium salts include p-chlorobenzyl-4-hydroxyphenylmethylsulfonium hexafluoroantimonate, p-nitrobenzyl-4-hydroxyphenylmethylsulfonium hexafluoroantimonate, and p-chlorobenzyl-4-hydroxyphenylmethyl. Sulfonium hexafluorophosphate, p-nitrobenzyl-3-methyl-4-hydroxyphenylmethylsulfonium hexafluoroantimonate, 3,5-dichlorobenzyl-4-hydroxyphenylmethylsulfonium hexafluoroantimonate, o-chlorobenzyl-3- Examples include chloro-4-hydroxyphenylmethylsulfonium hexafluoroantimonate.

  Examples of the benzothiazonium salt include 3-benzylbenzothiazonium hexafluoroantimonate, 3-benzylbenzothiazonium hexafluorophosphate, 3-benzylbenzothiazonium tetrafluoroborate, 3- (p-methoxy). Benzyl) benzothiazonium hexafluoroantimonate, 3-benzyl-2-methylthiobenzothiazonium hexafluoroantimonate, 3-benzyl-5-chlorobenzothiazonium hexafluoroantimonate, and the like.

  Examples of tetrahydrothiophenium salts include 4,7-di-n-butoxy-1-naphthyltetrahydrothiophenium trifluoromethanesulfonate and 1- (4-n-butoxynaphthalen-1-yl) tetrahydrothiophenium trifluoromethane. Sulfonate, 1- (4-n-butoxynaphthalen-1-yl) tetrahydrothiophenium nonafluoro-n-butanesulfonate, 1- (4-n-butoxynaphthalen-1-yl) tetrahydrothiophenium-1,1 , 2,2-Tetrafluoro-2- (norbornan-2-yl) ethanesulfonate, 1- (4-n-butoxynaphthalen-1-yl) tetrahydrothiophenium-2- (5-t-butoxycarbonyloxybicyclo) [2.2.1] Heptan-2-yl) -1,1, , 2-tetrafluoroethanesulfonate, 1- (4-n-butoxynaphthalen-1-yl) tetrahydrothiophenium-2- (6-t-butoxycarbonyloxybicyclo [2.2.1] heptan-2-yl ) -1,1,2,2-tetrafluoroethanesulfonate and the like.

(Sulfonimide compound)
Examples of the sulfonimide compound include N- (trifluoromethylsulfonyloxy) succinimide, N- (camphorsulfonyloxy) succinimide, N- (4-methylphenylsulfonyloxy) succinimide, N- (2-trifluoromethylphenylsulfonyloxy). ) Succinimide, N- (4-fluorophenylsulfonyloxy) succinimide, N- (trifluoromethylsulfonyloxy) phthalimide, N- (camphorsulfonyloxy) phthalimide, N- (2-trifluoromethylphenylsulfonyloxy) phthalimide, N -(2-fluorophenylsulfonyloxy) phthalimide, N- (trifluoromethylsulfonyloxy) diphenylmaleimide, N- (camphorsulfonyloxy) diphenyl monomer Imido, 4-methylphenylsulfonyloxy) diphenylmaleimide, N- (2-trifluoromethylphenylsulfonyloxy) diphenylmaleimide, N- (4-fluorophenylsulfonyloxy) diphenylmaleimide, N- (4-fluorophenylsulfonyloxy) Diphenylmaleimide, N- (phenylsulfonyloxy) bicyclo [2.2.1] hept-5-ene-2,3-dicarboxylimide, N- (4-methylphenylsulfonyloxy) bicyclo [2.2.1] Hept-5-ene-2,3-dicarboxylimide, N- (trifluoromethanesulfonyloxy) bicyclo [2.2.1] hept-5-ene-2,3-dicarboxylimide, N- (nonafluorobutane Sulfonyloxy) bicyclo [2.2.1] Pto-5-ene-2,3-dicarboxylimide, N- (camphorsulfonyloxy) bicyclo [2.2.1] hept-5-en-2,3-dicarboxylimide, N- (camphorsulfonyloxy) -7-oxabicyclo [2.2.1] hept-5-ene-2,3-dicarboxylimide, N- (trifluoromethylsulfonyloxy) -7-oxabicyclo [2.2.1] hept-5 -Ene-2,3-dicarboxylimide, N- (4-methylphenylsulfonyloxy) bicyclo [2.2.1] hept-5-ene-2,3-dicarboxylimide, N- (4-methylphenyl) Sulfonyloxy) -7-oxabicyclo [2.2.1] hept-5-ene-2,3-dicarboxylimide, N- (2-trifluoromethylphenylsulfonyl) Ruoxy) bicyclo [2.2.1] hept-5-ene-2,3-dicarboxylimide, N- (2-trifluoromethylphenylsulfonyloxy) -7-oxabicyclo [2.2.1] hept- 5-ene-2,3-dicarboxylimide, N- (4-fluorophenylsulfonyloxy) bicyclo [2.2.1] hept-5-ene-2,3-dicarboxylimide, N- (4-fluoro Phenylsulfonyloxy) -7-oxabicyclo [2.2.1] hept-5-ene-2,3-dicarboximide, N- (trifluoromethylsulfonyloxy) bicyclo [2.2.1] heptane-5 , 6-oxy-2,3-dicarboxylimide, N- (camphorsulfonyloxy) bicyclo [2.2.1] heptane-5,6-oxy-2,3-di Ruboxylimide, N- (4-methylphenylsulfonyloxy) bicyclo [2.2.1] heptane-5,6-oxy-2,3-dicarboxylimide, N- (2-trifluoromethylphenylsulfonyloxy) bicyclo [2.2.1] Heptane-5,6-oxy-2,3-dicarboxylimide, N- (4-fluorophenylsulfonyloxy) bicyclo [2.2.1] heptane-5,6-oxy-2 , 3-dicarboxylimide, N- (trifluoromethylsulfonyloxy) naphthyl dicarboxylimide, N- (camphorsulfonyloxy) naphthyl dicarboxylimide, N- (4-methylphenylsulfonyloxy) naphthyl dicarboxylimide, N- (Phenylsulfonyloxy) naphthyl dicarboxylimide, N- 2-trifluoromethylphenylsulfonyloxy) naphthyl dicarboxylimide, N- (4-fluorophenylsulfonyloxy) naphthyl dicarboxylimide, N- (pentafluoroethylsulfonyloxy) naphthyl dicarboxylimide, N- (heptafluoropropylsulfonyl) Oxy) naphthyl dicarboxylimide, N- (nonafluorobutylsulfonyloxy) naphthyl dicarboxylimide, N- (ethylsulfonyloxy) naphthyl dicarboxylimide, N- (propylsulfonyloxy) naphthyl dicarboxylimide, N- (butylsulfonyl) Oxy) naphthyl dicarboxylimide, N- (pentylsulfonyloxy) naphthyl dicarboxylimide, N- (hexylsulfonyloxy) naphthyl dicarbo Xylimide, N- (heptylsulfonyloxy) naphthyl dicarboxylimide, N- (octylsulfonyloxy) naphthyl dicarboxylimide, N- (nonylsulfonyloxy) naphthyl dicarboxylimide, and the like.

(Halogen-containing compounds)
Examples of the halogen-containing compound include haloalkyl group-containing hydrocarbon compounds and haloalkyl group-containing heterocyclic compounds.

(Diazomethane compound)
Examples of the diazomethane compound include bis (trifluoromethylsulfonyl) diazomethane, bis (cyclohexylsulfonyl) diazomethane, bis (phenylsulfonyl) diazomethane, bis (p-tolylsulfonyl) diazomethane, and bis (2,4-xylylsulfonyl) diazomethane. Bis (p-chlorophenylsulfonyl) diazomethane, methylsulfonyl-p-toluenesulfonyldiazomethane, cyclohexylsulfonyl (1,1-dimethylethylsulfonyl) diazomethane, bis (1,1-dimethylethylsulfonyl) diazomethane, phenylsulfonyl (benzoyl) diazomethane Etc.

(Sulfone compound)
Examples of the sulfone compound include β-ketosulfone compounds, β-sulfonylsulfone compounds, diaryl disulfone compounds, and the like.

(Sulfonate compound)
Examples of the sulfonate compound include alkyl sulfonate, haloalkyl sulfonate, aryl sulfonate, and imino sulfonate.

(Carboxylic acid ester compound)
Examples of the carboxylic acid ester compound include carboxylic acid o-nitrobenzyl ester.

Among these [B] photoacid generators, an oxime sulfonate compound is preferable from the viewpoint of radiation sensitivity and solubility in a solvent, and a compound containing an oxime sulfonate group represented by the above formula (3) is more preferable. Further, an oxime sulfonate compound represented by the above formula (3-1) is more preferable, and among them, [(5-propylsulfonyloxyimino-5H-thiophen-2-ylidene)-(2-methyl), which is commercially available. Phenyl) acetonitrile], [(5-octylsulfonyloxyimino-5H-thiophen-2-ylidene)-(2-methylphenyl) acetonitrile], [(5-p-toluenesulfonyloxyimino-5H-thiophen-2-ylidene) )-(2-methylphenyl) acetonitrile], [(camphorsulfonyl) Oxyimino -5H- thiophen-2-ylidene) - (2-methylphenyl) acetonitrile], [(5-octyl sulfonyloxy imino) - (4-methoxyphenyl) acetonitrile] are particularly preferred.
Also preferred are onium salts, more preferred are tetrahydrothiophenium salts and benzylsulfonium salts, 4,7-di-n-butoxy-1-naphthyltetrahydrothiophenium trifluoromethanesulfonate and benzyl-4-hydroxyphenylmethylsulfonium hexa Fluorophosphate is particularly preferred.

  [B] One photoacid generator may be used alone, or two or more photoacid generators may be mixed and used. The content of [B] photoacid generator in the composition is preferably 0.1 parts by mass to 10 parts by mass, and more preferably 1 part by mass to 5 parts with respect to 100 parts by mass of the polymer [A]. Part by mass. [B] When the content of the photoacid generator is within the above range, the radiation sensitivity of the composition can be optimized, and an interlayer insulating film having a high voltage holding ratio can be formed while maintaining transparency.

<[C] long-chain alkyl group-containing compound>
[C] The long-chain alkyl group-containing compound is a compound represented by the above formula (2), and specifically, X (having 6 to 20 carbon atoms, bivalent linear chain) having hydrophobicity in one molecule. And a functional group at both ends or one end.

  Such a [C] long-chain alkyl group-containing compound reacts with a part of the [A] component by using an alkali component in heating or developing solution as a catalyst, so that the hardness and density of the cured film can be improved. By improving the hardness and density of the cured film, various resistances, for example, resistance to acids, aqueous alkali solutions, organic solvents, etching gases, and the like are improved, and a remarkable effect can be exhibited in suppressing pattern defects.

  Furthermore, since the [C] component reacted with a part of the [A] component has a long-chain alkyl group exhibiting hydrophobicity, the hydrophobicity of the cured portion with respect to the alkaline developer is improved. On the other hand, since the functional group of the unreacted [C] component is hydrophilic, the hydrophilicity of the uncured portion can be exhibited. Therefore, according to the composition, the [C] long-chain alkyl group-containing compound exhibits a buffering action even when the cured film forming conditions such as pre-baking at a low temperature and an increase in development time are changed. The developability and pattern formability can be exhibited stably.

  Further, the inclusion of this [C] component has little effect on the light transmittance and voltage holding ratio of the cured film obtained, and the cured film obtained from the composition has a high light transmittance and voltage holding ratio. It can be demonstrated.

  In addition, when the carbon number of X is 5 or less, the hydrophilicity of both ends or one end is strongly expressed, so that the developing ability tends to be excessively promoted. Conversely, the carbon number of X is 21 or more. In such a case, the developability tends to be lowered, which may cause development residue.

  X is a C 6-20 divalent linear aliphatic hydrocarbon group, preferably a C 6-20 divalent alkylene group containing no unsaturated bond. In this linear aliphatic hydrocarbon group, part or all of the hydrogen atoms may be substituted.

  Specific examples of such a [C] component include compounds such as the following fatty acids, alcohols, esters, sulfonic acids, and epoxy compounds.

  Examples of the fatty acid having a divalent linear aliphatic hydrocarbon group having 6 to 20 carbon atoms include caprylic acid, pelargonic acid, capric acid, lauric acid, myristic acid, pentadecylic acid, palmitic acid, palmitoleic acid, margaric acid, Oleic acid, vaccenic acid, linoleic acid, stearic acid, linolenic acid, eleostearic acid, tuberculostearic acid, arachidic acid, arachidonic acid, decanedioic acid, hexadecanedioic acid, heptadecanedioic acid, nonadecanedioic acid, octadecanedioic acid , Pentadecanedioic acid, tridecanedioic acid, tetradecanedioic acid, cis-9-hexadecenoic acid, elaidic acid and the like.

  Examples of the divalent linear aliphatic hydrocarbon group having 6 to 20 carbon atoms include n-hexyl alcohol, n-heptyl alcohol, n-octyl alcohol, n-nonyl alcohol, n-decyl alcohol, and n-undecyl alcohol. N-dodecyl alcohol, n-heptadecanol, n-octadecanol, 1,8-octanediol, 1,9-nonanediol, 1,10-decanediol, 1,11-undecanediol, 1,12- Examples include dodecanediol, trans-9-octadecenol, oleyl alcohol, trans-2-dodecenol and the like.

  Examples of esters having a divalent linear aliphatic hydrocarbon group having 6 to 20 carbon atoms include methyl caprylate, ethyl caprylate, methyl pelargonate, ethyl pelargonate, methyl caprate, ethyl caprate, lauric acid Methyl, ethyl laurate, methyl myristate, methyl pentadecylate, methyl palmitate, methyl palmitate, methyl margarate, methyl stearate, methyl oleate, methyl vaccenate, methyl linoleate, methyl linolenate, eleostearic acid Examples thereof include methyl, methyl tuberculostearate, methyl arachidate, and methyl arachidonate.

  Examples of the sulfonic acid having a divalent linear aliphatic hydrocarbon group having 6 to 20 carbon atoms include 1-dodecanesulfonic acid, 1-undecanesulfonic acid, dodecylbenzenesulfonic acid, 1-nonanesulfonic acid, and the like. Can do.

As an epoxy compound having a divalent linear aliphatic hydrocarbon group having 6 to 20 carbon atoms (a compound in which R ⁴ and / or R ⁵ is represented by any one of the above formulas (i) to (iii)) Is
1,2-epoxytetradecane, 1,2-epoxyhexadecane, 1,2-epoxydecane, 1,2-epoxyheptadecane, 1,2-epoxynonadecane, 1,2-epoxyoctadecane, 1,2-epoxypentadecane R ⁴ and / or R ⁵ such as glycidyl stearate and glycidyl palmitate are compounds represented by the above formula (i),
1- (3,4-epoxycyclohexyl) -decane, 1- (3,4-epoxycyclohexyl) -dodecane, 1- (3,4-epoxycyclohexyl) -tetradecane, 1- (3,4-epoxycyclohexyl)- A compound wherein R ⁴ and / or R ⁵ such as hexadecane is represented by the above formula (ii);
R ⁴ and / or R ⁵ such as 3-octyl oxetane, 3-ethyl-3-octyl oxetane, 3-nonyl oxetane, 3-ethyl-3-nonyl oxetane and the like are represented by the above formula (iii). be able to.

In addition, when the [C] component is an epoxy compound (R ⁴ and / or R ⁵ is a compound represented by any one of the above formulas (i) to (iii)), the [A] Since the coalesced and this [C] component can be particularly strongly bonded, the effect of increasing the density and hydrophobicity of the cured film appears significantly. Therefore, when an epoxy compound is used as the [C] component, the changeability of the cured film forming condition of the composition is further improved, and more excellent developability and pattern formability can be exhibited.

  [C] As long-chain alkyl group-containing compounds, a compound having a urethane group obtained by a reaction between a compound having an isocyanate group and a compound having a hydroxyl group, a reaction between a compound having an amino group and a compound having a carboxyl group And compounds having an amide group, compounds having an ester group obtained by the reaction of a compound having a carboxyl group and a compound having a hydroxyl group, and the like. -1) to (2-4), and the like.

  Among the above-mentioned [C] long chain alkyl group-containing compounds, fatty acids such as palmitic acid, stearic acid and tetradecanedioic acid, and alcohols such as 1-dodecanol and 1,12-dodecanediol, particularly from the viewpoints of developability and pattern formation 1,2-epoxytetradecane, 1,2-epoxyhexadecane, glycidyl stearate, epoxy compounds such as 1,3-epoxy-2-ethyl-2-dodecane, sulfonic acid of 1-dodecanesulfonic acid, and the like are preferable.

  [C] The long chain alkyl group-containing compound can be used alone or in combination of two or more. In the radiation sensitive resin composition, the amount of the [C] long-chain alkyl group-containing compound used is preferably 0.01 to 20 parts by weight, more preferably 0.8 parts per 100 parts by weight of the [A] polymer. It is 05-15 mass parts. [C] By making the usage-amount of a long-chain alkyl group containing compound into the said range, even when cured film formation conditions change, developability and pattern formability can be exhibited effectively.

<Other optional components>
In addition to the above components [A] to [C], the positive radiation-sensitive composition of the present invention includes [D] a surfactant and [E] adhesion as long as the effects of the present invention are not impaired. Other optional components such as auxiliary agents, [F] basic compounds, and quinonediazide compounds can be contained.

<[D] Surfactant>
A surfactant can be used to further improve the film-forming property of the composition. Examples of such surfactants include fluorine-based surfactants, silicone-based surfactants, and other surfactants. When the composition contains the [D] surfactant, the surface smoothness of the coating film can be improved, and as a result, the film thickness uniformity of the formed interlayer insulating film can be further improved.

  As the fluorosurfactant, a compound having a fluoroalkyl group and / or a fluoroalkylene group in at least one of the terminal, main chain and side chain is preferable. Examples of the fluorosurfactant include 1,1,2,2-tetrafluoro n-octyl (1,1,2,2-tetrafluoro n-propyl) ether, 1,1,2,2-tetrafluoro. n-octyl (n-hexyl) ether, hexaethylene glycol di (1,1,2,2,3,3-hexafluoro n-pentyl) ether, octaethylene glycol di (1,1,2,2-tetrafluoro) n-butyl) ether, hexapropylene glycol di (1,1,2,2,3,3-hexafluoron-pentyl) ether, octapropylene glycol di (1,1,2,2-tetrafluoron-butyl) Ether, sodium perfluoron-dodecanesulfonate, 1,1,2,2,3,3-hexafluoron-decane, 1,1,2,2,3,3 , 9,10,10-decafluoro n-dodecane, sodium fluoroalkylbenzenesulfonate, sodium fluoroalkylphosphate, sodium fluoroalkylcarboxylate, diglycerin tetrakis (fluoroalkylpolyoxyethylene ether), fluoroalkylammonium iodide, fluoro Examples include alkyl betaines, fluoroalkyl polyoxyethylene ethers, perfluoroalkyl polyoxyethanols, perfluoroalkyl alkoxylates, and carboxylic acid fluoroalkyl esters.

  Commercially available fluorosurfactants include, for example, BM-1000, BM-1100 (above, BM CHEMIE), Megafuck F142D, Megafuck F172, Megafuck F173, Megafuck F183, Megafuck F178, Megafuck. F191, Megafuck F471, Megafuck F476 (above, Dainippon Ink and Chemicals), Fluorard FC-170C, Fluorard FC-171, Fluorard FC-430, Fluorard FC-431 (above, Sumitomo 3M), Surflon S- 112, Surflon S-113, Surflon S-131, Surflon S-141, Surflon S-145, Surflon S-382, Surflon SC-101, Surflon SC-102, Surflon SC-103, Surflon SC-104 Surflon SC-105, Surflon SC-106 (above, Asahi Glass Co., Ltd.), Ftop EF301, Ftop EF303, Ftop EF352 (above, Shin-Akita Kasei Co., Ltd.), Aftergent FT-100, Aftergent FT-110, Aftergent FT-140A, Aftergent FT-150, Aftergent FT-250, Aftergent FT-251, Aftergent FT-300, Aftergent FT-310, Aftergent FT-400S, Aftergent FT-218, Aftergent FT- 251 (above, Neos).

  Examples of the silicone surfactant include Torre Silicone DC3PA, Torre Silicone DC7PA, Torre Silicone SH11PA, Torre Silicone SH21PA, Torree Silicone SH28PA, Torree Silicone SH29PA, Torree Silicone SH30PA, Torree Silicone SH-190, Torree Silicone SH-193, Torrey Silicone SZ-6032, Torre Silicone SF-8428, Torre Silicone DC-57, Torre Silicone DC-190, SH 8400 FLUID (above, Toray Dow Corning Silicone), TSF-4440, TSF-4300, TSF-4445, TSF-4446, TSF-4460, TSF-4442 (GE Toshiba Silicone), organosiloxane polymer KP3 41 (Shin-Etsu Chemical Co., Ltd.).

  These [D] surfactants may be used individually by 1 type, and 2 or more types may be mixed and used for them. The content of [D] surfactant in the composition is preferably 0.01 parts by mass or more and 2 parts by mass or less, more preferably 0.05 parts by mass with respect to 100 parts by mass of the [A] polymer. Part to 1 part by mass. [D] The surface smoothness of a coating film can be improved more by making content of surfactant into the said range.

<[E] Adhesion aid>
In the positive-type radiation-sensitive resin composition, in order to improve the adhesion between an inorganic material serving as a substrate, for example, a silicon compound such as silicon, silicon oxide, and silicon nitride, a metal such as gold, copper, and aluminum and an insulating film [E] Adhesion aids that are components can be used. As such an adhesion assistant, a functional silane coupling agent is preferably used. Examples of functional silane coupling agents include silane coupling agents having reactive substituents such as carboxyl groups, methacryloyl groups, isocyanate groups, epoxy groups (preferably oxiranyl groups), thiol groups, and the like.

  Specific examples of functional silane coupling agents include trimethoxysilylbenzoic acid, γ-methacryloxypropyltrimethoxysilane, vinyltriacetoxysilane, vinyltrimethoxysilane, γ-isocyanatopropyltriethoxysilane, γ-glycidoxy Examples include propyltrimethoxysilane, γ-glycidoxypropylalkyldialkoxysilane, γ-chloropropyltrialkoxysilane, γ-mercaptopropyltrialkoxysilane, β- (3,4-epoxycyclohexyl) ethyltrimethoxysilane, and the like. . Among these, γ-glycidoxypropylalkyldialkoxysilane, β- (3,4-epoxycyclohexyl) ethyltrimethoxysilane, and γ-methacryloxypropyltrimethoxysilane are preferable.

  In the positive radiation sensitive resin composition, such an adhesion assistant is preferably 0.5 parts by mass or more and 20 parts by mass or less, more preferably 1 part by mass or more with respect to 100 parts by mass of the [A] polymer. It is used in an amount of 10 parts by mass or less. By setting the amount of the adhesion assistant in the above range, the adhesion between the formed interlayer insulating film and the substrate is improved.

<[F] Basic compound>
The basic compound can be arbitrarily selected from those used in chemically amplified resists. Examples of the basic compound include aliphatic amines, aromatic amines, heterocyclic amines, quaternary ammonium hydroxides, carboxylic acid quaternary ammonium salts, and the like. By including a basic compound in the positive radiation-sensitive composition, the diffusion length of the acid generated from the photoacid generator by exposure can be appropriately controlled, and the pattern developability should be good. Can do.

  Examples of the aliphatic amine include trimethylamine, diethylamine, triethylamine, di-n-propylamine, tri-n-propylamine, di-n-pentylamine, tri-n-pentylamine, diethanolamine, triethanolamine, and dicyclohexylamine. , Dicyclohexylmethylamine and the like.

  Examples of the aromatic amine include aniline, benzylamine, N, N-dimethylaniline, diphenylamine and the like.

  Examples of the heterocyclic amine include pyridine, 2-methylpyridine, 4-methylpyridine, 2-ethylpyridine, 4-ethylpyridine, 2-phenylpyridine, 4-phenylpyridine, N-methyl-4-phenylpyridine, 4-dimethylaminopyridine, imidazole, benzimidazole, 4-methylimidazole, 2-phenylbenzimidazole, 2,4,5-triphenylimidazole, nicotine, nicotinic acid, nicotinamide, quinoline, 8-oxyquinoline, pyrazine, Pyrazole, pyridazine, purine, pyrrolidine, piperidine, piperazine, morpholine, 4-methylmorpholine, 1,5-diazabicyclo [4,3,0] -5-nonene, 1,8-diazabicyclo [5,3,0] -7 -Undecene and the like.

  Examples of the quaternary ammonium hydroxide include tetramethylammonium hydroxide, tetraethylammonium hydroxide, tetra-n-butylammonium hydroxide, tetra-n-hexylammonium hydroxide, and the like.

  Examples of the carboxylic acid quaternary ammonium salt include tetramethylammonium acetate, tetramethylammonium benzoate, tetra-n-butylammonium acetate, and tetra-n-butylammonium benzoate.

  It is preferable that content of the basic compound in the said positive radiation sensitive composition shall be 0.001-1 mass part with respect to 100 mass parts of [A] polymers, and 0.005-0.2 mass. More preferably, it is a part. Pattern developability becomes favorable by making content of a basic compound into the said range.

<Quinonediazide compound>
A quinonediazide compound is a compound that generates a carboxylic acid upon irradiation with radiation. As the quinonediazide compound, a condensate of a phenolic compound or an alcoholic compound (hereinafter referred to as “mother nucleus”) and 1,2-naphthoquinonediazidesulfonic acid halide can be used.

  Examples of the mother nucleus include trihydroxybenzophenone, tetrahydroxybenzophenone, pentahydroxybenzophenone, hexahydroxybenzophenone, (polyhydroxyphenyl) alkane, and other mother nuclei.

  Examples of trihydroxybenzophenone include 2,3,4-trihydroxybenzophenone and 2,4,6-trihydroxybenzophenone.

  Examples of tetrahydroxybenzophenone include 2,2 ′, 4,4′-tetrahydroxybenzophenone, 2,3,4,3′-tetrahydroxybenzophenone, 2,3,4,4′-tetrahydroxybenzophenone, 2,3 , 4,2′-tetrahydroxy-4′-methylbenzophenone, 2,3,4,4′-tetrahydroxy-3′-methoxybenzophenone, and the like.

  Examples of pentahydroxybenzophenone include 2,3,4,2 ', 6'-pentahydroxybenzophenone.

  Examples of hexahydroxybenzophenone include 2,4,6,3 ', 4', 5'-hexahydroxybenzophenone and 3,4,5,3 ', 4', 5'-hexahydroxybenzophenone.

  Examples of (polyhydroxyphenyl) alkanes include bis (2,4-dihydroxyphenyl) methane, bis (p-hydroxyphenyl) methane, tris (p-hydroxyphenyl) methane, 1,1,1-tris (p-hydroxy). Phenyl) ethane, bis (2,3,4-trihydroxyphenyl) methane, 2,2-bis (2,3,4-trihydroxyphenyl) propane, 1,1,3-tris (2,5-dimethyl-) 4-hydroxyphenyl) -3-phenylpropane, 4,4 ′-[1- [4- [1- [4-hydroxyphenyl] -1-methylethyl] phenyl] ethylidene] bisphenol, bis (2,5-dimethyl) -4-hydroxyphenyl) -2-hydroxyphenylmethane, 3,3,3 ', 3'-tetramethyl-1,1'-spirobiy Den -5,6,7,5 ', 6', 7'-hexanol, 2,2,4-trimethyl -7,2 ', 4'-trihydroxy flavan like.

  Examples of other mother nuclei include 2-methyl-2- (2,4-dihydroxyphenyl) -4- (4-hydroxyphenyl) -7-hydroxychroman, 1- [1- (3- {1- (4 -Hydroxyphenyl) -1-methylethyl} -4,6-dihydroxyphenyl) -1-methylethyl] -3- (1- (3- {1- (4-hydroxyphenyl) -1-methylethyl} -4 , 6-dihydroxyphenyl) -1-methylethyl) benzene, 4,6-bis {1- (4-hydroxyphenyl) -1-methylethyl} -1,3-dihydroxybenzene, and the like.

  Among these mother nuclei, 2,3,4,4′-tetrahydroxybenzophenone, 1,1,1-tri (p-hydroxyphenyl) ethane, 4,4 ′-[1- [4- [1- [ 4-hydroxyphenyl] -1-methylethyl] phenyl] ethylidene] bisphenol is preferred.

  The 1,2-naphthoquinone diazide sulfonic acid halide is preferably 1,2-naphthoquinone diazide sulfonic acid chloride. Examples of 1,2-naphthoquinonediazide sulfonic acid chloride include 1,2-naphthoquinonediazide-4-sulfonic acid chloride and 1,2-naphthoquinonediazide-5-sulfonic acid chloride. Among these, 1,2-naphthoquinonediazide-5-sulfonic acid chloride is preferable.

  As a condensate of a phenolic compound or an alcoholic compound and 1,2-naphthoquinone diazide sulfonic acid halide, 1,1,1-tri (p-hydroxyphenyl) ethane and 1,2-naphthoquinone diazide-5-sulfonic acid Condensate with chloride, 4,4 '-[1- [4- [1- [4-hydroxyphenyl] -1-methylethyl] phenyl] ethylidene] bisphenol and 1,2-naphthoquinonediazide-5-sulfonic acid chloride A condensate with is preferred.

  In the condensation reaction of a phenolic compound or alcoholic compound (mother nucleus) and 1,2-naphthoquinonediazide sulfonic acid halide, preferably 30 mol% to 85 mol based on the number of OH groups in the phenolic compound or alcoholic compound. 1,2-naphthoquinonediazide sulfonic acid halide corresponding to mol%, more preferably 50 mol% to 70 mol% can be used. The condensation reaction can be carried out by a known method.

  Examples of the quinonediazide compound include 1,2-naphthoquinonediazidesulfonic acid amides in which the ester bond of the mother nucleus exemplified above is changed to an amide bond, such as 2,3,4-triaminobenzophenone-1,2-naphthoquinonediazide- 4-sulfonic acid amide and the like are also preferably used.

<Positive radiation sensitive composition>
The positive radiation-sensitive composition of the present invention is obtained by mixing the above-mentioned [A] polymer, [B] photoacid generator, [C] long-chain alkyl group-containing compound, and optional components as necessary. Prepared. The positive radiation-sensitive composition is preferably prepared and used in a state dissolved or dispersed in an appropriate solvent. For example, a positive radiation-sensitive composition can be prepared by mixing the [A], [B] and [C] components and optional components in a solvent in a predetermined ratio.

<Solvent>
As the solvent that can be used for the preparation of the positive radiation sensitive composition, a solvent that uniformly dissolves or disperses each component and does not react with each component is preferably used. Examples of such solvents include alcohols, ethers, diethylene glycol alkyl ethers, ethylene glycol alkyl ether acetates, propylene glycol monoalkyl ethers, propylene glycol monoalkyl ether acetates, propylene glycol monoalkyl ether propionate. , Aromatic hydrocarbons, ketones, esters and the like.

These solvents include
Examples of alcohols include benzyl alcohol and diacetone alcohol;
Examples of ethers include dialkyl ethers such as tetrahydrofuran, diisopropyl ether, di n-butyl ether, di n-pentyl ether, diisopentyl ether, and di n-hexyl ether;
Examples of diethylene glycol alkyl ethers include diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, and diethylene glycol ethyl methyl ether;
Examples of ethylene glycol alkyl ether acetates include methyl cellosolve acetate, ethyl cellosolve acetate, ethylene glycol monobutyl ether acetate, and ethylene glycol monoethyl ether acetate;
Examples of propylene glycol monoalkyl ethers include propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monopropyl ether, and propylene glycol monobutyl ether;
Examples of propylene glycol monoalkyl ether acetates include propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, propylene glycol monopropyl ether acetate, and propylene glycol monobutyl ether acetate;
Examples of propylene glycol monoalkyl ether propionates include propylene glycol monomethyl ether propionate, propylene glycol monoethyl ether propionate, propylene glycol monopropyl ether propionate, propylene glycol monobutyl ether propionate and the like;
Examples of aromatic hydrocarbons include toluene and xylene;
Examples of ketones include methyl ethyl ketone, methyl isobutyl ketone, cyclohexanone, 2-heptanone, 4-hydroxy-4-methyl-2-pentanone, etc.
Examples of esters include methyl acetate, ethyl acetate, propyl acetate, i-propyl acetate, butyl acetate, ethyl 2-hydroxypropionate, methyl 2-hydroxy-2-methylpropionate, 2-hydroxy-2-methylpropionic acid Ethyl, methyl hydroxyacetate, ethyl hydroxyacetate, butyl hydroxyacetate, methyl lactate, ethyl lactate, propyl lactate, butyl lactate, methyl 3-hydroxypropionate, ethyl 3-hydroxypropionate, protyl 3-hydroxypropionate, 3-hydroxy Butyl propionate, methyl 2-hydroxy-3-methylbutanoate, methyl methoxyacetate, ethyl methoxyacetate, propyl methoxyacetate, butyl methoxyacetate, methyl ethoxyacetate, ethyl ethoxyacetate, propyl ethoxyacetate, ethoxy Butyl acetate, methyl propoxyacetate, ethyl propoxyacetate, propylpropoxyacetate, butyl propoxyacetate, methyl butoxyacetate, ethyl butoxyacetate, propylbutoxyacetate, butylbutoxyacetate, methyl 2-methoxypropionate, ethyl 2-methoxypropionate, 2 Examples thereof include propyl methoxypropionate, butyl 2-methoxypropionate, methyl 2-ethoxypropionate, ethyl 2-ethoxypropionate and the like.

  Among these solvents, from the viewpoint of excellent solubility or dispersibility, non-reactivity with each component, and ease of coating film formation, ethers such as dialkyl ethers, diethylene glycol alkyl ethers, Ethylene glycol alkyl ether acetates, propylene glycol monoalkyl ethers, propylene glycol monoalkyl ether acetates, ketones and esters are preferred, especially diethylene glycol diethyl ether, diethylene glycol ethyl methyl ether, methyl cellosolve acetate, ethyl cellosolve acetate, propylene Glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monomethyl ether acetate, propylene glycol Noethyl ether acetate, cyclohexanone, propyl acetate, i-propyl acetate, butyl acetate, ethyl 2-hydroxypropionate, methyl 2-hydroxy-2-methylpropionate, ethyl 2-hydroxy-2-methylpropionate, methyl lactate, Ethyl lactate, propyl lactate, butyl lactate, methyl 2-methoxypropionate and ethyl 2-methoxypropionate are preferred. These solvents can be used alone or in combination.

  Among these solvents, ethers such as diisopropyl ether such as diisopropyl ether, di n-butyl ether, di n-pentyl ether, diisopentyl ether, and di n-hexyl ether are preferable, and diisopentyl ether is most preferable. . By using such a solvent, when applying the radiation-sensitive composition to a large glass substrate by the slit coating method, the drying process time is shortened, and at the same time, the coating property is further improved (coating unevenness is suppressed). Is possible.

  In addition to the preferred solvents described above, benzyl ethyl ether, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol monobutyl ether, acetonyl acetone, isophorone, caproic acid, caprylic acid, 1-octanol, 1-nonanol, if necessary High-boiling solvents such as benzyl alcohol, benzyl acetate, ethyl benzoate, diethyl oxalate, diethyl maleate, γ-butyrolactone, ethylene carbonate, propylene carbonate, phenyl cellosolve acetate, carbitol acetate and the like can also be used in combination.

  When preparing a positive radiation sensitive composition in the form of a solution or dispersion, components other than the solvent in the liquid (that is, the total amount of the components [A], [B] and [C] and other optional components) The ratio can be arbitrarily set according to the purpose of use and the desired film thickness, but is preferably 0 to 50% by mass, more preferably 10 to 40% by mass, and further preferably 15 to 35% by mass. .

<Formation of cured film such as interlayer insulation film>
Next, a method for forming a cured film such as an interlayer insulating film on the substrate using the positive radiation sensitive composition will be described.

The method is
(1) The process of forming the coating film of the said positive type radiation sensitive composition on a board | substrate,
(2) A step of irradiating at least a part of the coating film formed in step (1),
(3) a step of developing the coating film irradiated with radiation in step (2), and (4) a step of heating the coating film developed in step (3).

<(1) Step of forming a coating film of positive radiation sensitive composition on substrate>
In the step (1), after coating the positive radiation sensitive composition or the solution or dispersion on the substrate, the solvent is preferably removed by heating (prebaking) the coated surface, Form. Examples of the substrate that can be used include glass, quartz, silicon, and resin. Specific examples of the resin include polyethylene terephthalate, polybutylene terephthalate, polyethersulfone, polycarbonate, polyimide, a ring-opening polymer of cyclic olefin, and hydrogenated products thereof.

  The coating method of the composition solution or dispersion is not particularly limited, and an appropriate method such as a spray method, a roll coating method, a spin coating method (spin coating method), a slit die coating method, a bar coating method, or the like is employed. be able to. Among these coating methods, a spin coating method or a slit die coating method is preferable.

  The prebaking conditions vary depending on the type of each component, the blending ratio, and the like, but can be preferably about 60 to 120 ° C. for about 1 to 10 minutes. According to the positive radiation sensitive composition of the present invention, for example, excellent pattern forming properties can be exhibited even when the prebaking conditions are relatively low, such as 60 to 80 ° C.

<(2) Step of irradiating at least part of the coating film>
In the step (2), at least a part of the formed coating film is exposed. In this case, when a part of the coating film is exposed, it is usually exposed through a photomask having a predetermined pattern. As the radiation used for exposure, the radiation used for the photoacid generator is suitable. Among these radiations, radiation having a wavelength in the range of 190 to 450 nm is preferable, and radiation containing ultraviolet light of 365 nm is particularly preferable.

The exposure dose in this step is preferably 500 to 6,000 J / m ² , more preferably 1, as a value obtained by measuring the intensity of radiation at a wavelength of 365 nm with an illuminometer (OAI model 356, manufactured by OAI Optical Associates Inc.). it is a 500~1,800J / ^{m 2.}

<(3) Development process>
In the step (3), by developing the exposed coating film, unnecessary portions (radiation irradiated portions) are removed to form a predetermined pattern. As the developer used in the development step, an alkaline aqueous solution is preferable. Examples of alkalis include inorganic alkalis such as sodium hydroxide, potassium hydroxide, sodium carbonate, sodium silicate, sodium metasilicate, and ammonia; quaternary ammonium salts such as tetramethylammonium hydroxide and tetraethylammonium hydroxide. be able to.

  In addition, an appropriate amount of a water-soluble organic solvent such as methanol or ethanol or a surfactant can be added to such an alkaline aqueous solution. The concentration of the alkali in the alkaline aqueous solution is preferably from 0.1% by mass to 5% by mass from the viewpoint of obtaining appropriate developability. As a developing method, for example, an appropriate method such as a liquid filling method, a dipping method, a rocking dipping method, a shower method, or the like can be used. The development time varies depending on the composition of the positive radiation-sensitive composition, but is preferably about 10 to 180 seconds. According to the composition, a stable pattern can be formed without being affected by this development time even if the development time is somewhat long or short. Following such development processing, for example, after washing with running water for 30 to 90 seconds, a desired pattern can be formed by, for example, air drying with compressed air or compressed nitrogen.

<(4) Heating process>
In the step (4), by heating a patterned thin film using a heating device such as a hot plate or oven, the curing reaction of the component [A] can be promoted to obtain a cured product. The heating temperature in this step is, for example, 120 to 250 ° C. Although heating time changes with kinds of heating apparatus, for example, when performing a heating process on a hotplate, it can be set to 30 to 90 minutes when performing a heating process in an oven. The step baking method etc. which perform a heating process 2 times or more can also be used. In this manner, a patterned thin film corresponding to the target interlayer insulating film or the like can be formed on the surface of the substrate.

<Hardened film such as interlayer insulation film>
The thickness of the cured film such as an interlayer insulating film formed in this way is preferably 0.1 to 8 μm, more preferably 0.1 to 6 μm, and still more preferably 0.1 to 4 μm.

  The cured film formed from the positive radiation-sensitive composition of the present invention has an excellent pattern forming property while having a high light transmittance and a voltage holding ratio, as will be apparent from the following examples. is doing. Therefore, the cured film can be used as an interlayer insulating film, a spacer, a protective film, or the like of a display element, and is particularly preferably used as an interlayer insulating film of a display element.

  EXAMPLES Hereinafter, the present invention will be described more specifically with reference to examples. However, the present invention is not limited to the following examples.

  Hereinafter, the mass average molecular weight (Mw) and the number average molecular weight (Mn) of the polymer were measured by gel permeation chromatography (GPC) under the following conditions.

Apparatus: GPC-101 (made by Showa Denko KK)
Column: GPC-KF-801, GPC-KF-802, GPC-KF-803 and GPC-KF-804 are combined Mobile phase: Tetrahydrofuran Column temperature: 40 ° C
Flow rate: 1.0 mL / min Sample concentration: 1.0% by mass
Sample injection volume: 100 μL
Detector: Differential refractometer Standard material: Monodisperse polystyrene <Synthesis example of [A] polymer>
[Synthesis Example 1]
A flask equipped with a condenser and a stirrer was charged with 7 parts by mass of 2,2′-azobis (2,4-dimethylvaleronitrile) and 200 parts by mass of diethylene glycol ethyl methyl ether. Subsequently, 5 parts by mass of methacrylic acid, 40 parts by mass of 1-ethoxyethyl methacrylate, 5 parts by mass of styrene, 40 parts by mass of glycidyl methacrylate, 10 parts by mass of 2-hydroxyethyl methacrylate, and 3 parts by mass of α-methylstyrene dimer were charged. After that, stirring was started gently. The temperature of the solution was raised to 70 ° C., and this temperature was maintained for 5 hours to obtain a polymer solution containing the polymer (A-1). The polymer (A-1) had a polystyrene equivalent mass average molecular weight (Mw) of 9,000. Further, the solid content concentration of the polymer solution obtained here (referring to the ratio of the mass of the polymer contained in the polymer solution to the total mass of the polymer solution; the same shall apply hereinafter) is 32.1% by mass. there were.

[Synthesis Example 2]
A flask equipped with a condenser and a stirrer was charged with 7 parts by mass of 2,2′-azobis (2,4-dimethylvaleronitrile) and 200 parts by mass of diethylene glycol ethyl methyl ether. Subsequently, 5 parts by weight of methacrylic acid, 40 parts by weight of tetrahydro-2H-pyran-2-yl methacrylate, 5 parts by weight of styrene, 40 parts by weight of glycidyl methacrylate, 10 parts by weight of 2-hydroxyethyl methacrylate and 3 parts by weight of α-methylstyrene dimer Was added, and the mixture was purged with nitrogen. The temperature of the solution was raised to 70 ° C., and this temperature was maintained for 5 hours to obtain a polymer solution containing the polymer (A-2). The polymer (A-2) had a polystyrene equivalent mass average molecular weight (Mw) of 9,000. Moreover, the solid content concentration of the polymer solution obtained here was 31.3 mass%.

[Synthesis Example 3]
A flask equipped with a condenser and a stirrer was charged with 7 parts by mass of 2,2′-azobis (methyl 2-methylpropionate) and 200 parts by mass of propylene glycol monomethyl ether acetate. Subsequently, 67 parts by mass of 1-n-butoxyethyl methacrylate, 23 parts by mass of benzyl methacrylate and 10 parts by mass of methacrylic acid were charged and purged with nitrogen, and then gently stirring was started. The temperature of the solution was raised to 80 ° C., and this temperature was maintained for 6 hours to obtain a polymer solution containing the polymer (a-1). The polystyrene equivalent mass average molecular weight (Mw) of the polymer (a-1) was 9,000. Moreover, the solid content concentration of the polymer solution obtained here was 30.3% by mass.

[Synthesis Example 4]
A flask equipped with a condenser and a stirrer was charged with 7 parts by mass of 2,2′-azobis (methyl 2-methylpropionate) and 200 parts by mass of propylene glycol monomethyl ether acetate. Subsequently, 90 parts by mass of 1-benzyloxyethyl methacrylate, 6 parts by mass of 2-hydroxyethyl methacrylate, and 4 parts by mass of methacrylic acid were charged and purged with nitrogen, and then gently stirring was started. The temperature of the solution was raised to 80 ° C., and this temperature was maintained for 6 hours to obtain a polymer solution containing the polymer (a-2). The polymer (a-2) had a weight average molecular weight (Mw) in terms of polystyrene of 9,000. Moreover, the solid content concentration of the polymer solution obtained here was 31.2 mass%.

[Synthesis Example 5]
A flask equipped with a condenser and a stirrer was charged with 7 parts by mass of 2,2′-azobis (methyl 2-methylpropionate) and 200 parts by mass of propylene glycol monomethyl ether acetate. Subsequently, 85 parts by mass of tetrahydro-2H-pyran-2-yl methacrylate, 7 parts by mass of 2-hydroxyethyl methacrylate, and 8 parts by mass of methacrylic acid were charged and replaced with nitrogen, and then gently stirred. The temperature of the solution was raised to 80 ° C., and this temperature was maintained for 6 hours to obtain a polymer solution containing the polymer (a-3). The polymer (a-3) had a polystyrene equivalent mass average molecular weight (Mw) of 10,000. Moreover, the solid content concentration of the polymer solution obtained here was 29.2 mass%.

[Synthesis Example 6]
A flask equipped with a condenser and a stirrer was charged with 7 parts by mass of 2,2′-azobis (2,4-dimethylvaleronitrile) and 200 parts by mass of diethylene glycol ethyl methyl ether. Subsequently, after 52 parts by mass of glycidyl methacrylate and 48 parts by mass of benzyl methacrylate were charged and purged with nitrogen, stirring was started gently. The temperature of the solution was raised to 80 ° C., and this temperature was maintained for 6 hours to obtain a polymer solution containing the polymer (aa-1). The polymer (aa-1) had a polystyrene-reduced mass average molecular weight (Mw) of 10,000. Moreover, the solid content concentration of the polymer solution obtained here was 32.3 mass%.

[Synthesis Example 7]
A flask equipped with a condenser and a stirrer was charged with 7 parts by mass of 2,2′-azobis (2,4-dimethylvaleronitrile) and 200 parts by mass of diethylene glycol ethyl methyl ether. Subsequently, 45 parts by mass of 3,4-epoxycyclohexylmethyl methacrylate, 45 parts by mass of benzyl methacrylate, and 10 parts by mass of methacrylic acid were charged and purged with nitrogen, and then gently agitated. The temperature of the solution was raised to 80 ° C., and this temperature was maintained for 6 hours to obtain a polymer solution containing the polymer (aa-2). The polymer (aa-2) had a weight average molecular weight (Mw) in terms of polystyrene of 10,000. Moreover, the solid content concentration of the polymer solution obtained here was 33.2 mass%.

[Synthesis Example 8]
A flask equipped with a condenser and a stirrer was charged with 7 parts by mass of 2,2′-azobis (2,4-dimethylvaleronitrile) and 200 parts by mass of diethylene glycol ethyl methyl ether. Subsequently, 35 parts by mass of 1-n-butoxyethyl methacrylate, 35 parts by mass of benzyl methacrylate, and 30 parts by mass of glycidyl methacrylate were charged and purged with nitrogen, and then gently stirring was started. The temperature of the solution was raised to 80 ° C., and this temperature was maintained for 6 hours to obtain a polymer solution containing the polymer (aa-3). The polymer (aa-3) had a polystyrene equivalent mass average molecular weight (Mw) of 10,000. Moreover, the solid content concentration of the polymer solution obtained here was 32.3 mass%.

[Preparation of positive-type radiation-sensitive composition]
Each component in Table 1 used in Examples and Comparative Examples is as follows.
Component (B) Photoacid generator B-1: 4,7-di-n-butoxy-1-naphthyltetrahydrothiophenium trifluoromethanesulfonate B-2: benzyl-4-hydroxyphenylmethylsulfonium hexafluorophosphate B-3 : (5-propylsulfonyloxyimino-5H-thiophen-2-ylidene)-(2-methylphenyl) acetonitrile represented by the above compound (3-i) “IRGACURE PAG 103 manufactured by Ciba Specialty Chemicals ")
B-4: (5-octylsulfonyloxyimino-5H-thiophen-2-ylidene)-(2-methylphenyl) acetonitrile represented by the above compound (3-ii) “Ciba Specialty Chemicals” IRGACURE PAG 108 ")
B-5: (5-p-toluenesulfonyloxyimino-5H-thiophen-2-ylidene)-(2-methylphenyl) acetonitrile (Ciba Specialty Chemicals) represented by the above compound (3-iv) "IRGACURE PAG 121")
B-6: (Camphorsulfonyloxyimino-5H-thiophen-2-ylidene)-(2-methylphenyl) acetonitrile represented by the above compound (3-iii) (“CGI1380” manufactured by Ciba Specialty Chemicals) )
B-7: (5-octylsulfonyloxyimino)-(4-methoxyphenyl) acetonitrile represented by the above compound (3-v) (“CGI725” manufactured by Ciba Specialty Chemicals)
Component (C) Long chain alkyl group-containing compound C-1: Palmitic acid C-2: Stearic acid C-3: Tetradecanedioic acid C-4: 1-dodecanol C-5: 1,12-dodecanediol C-6: 1,2-epoxytetradecane C-7: 1,2-epoxyhexadecane C-8: glycidyl stearate C-9: 3-ethyl-3-nonyloxetane C-10: 1-dodecanesulfonic acid C′-1: Yoshi Herbic acid (CH ₃ (CH ₂ ) ₃ COOH)
C′-2: lignoceric acid (CH ₃ (CH ₂ ) ₂₂ COOH)
C′-3: Lignoceryl alcohol (CH ₃ (CH ₂ ) ₂₃ OH)
Component (D) Surfactant D-1: Silicone surfactant ("SH 8400 FLUID" manufactured by Toray Dow Corning Co., Ltd.)
D-2: Fluorosurfactant ("Fergent FTX-218" manufactured by Neos Co., Ltd.)
(E) Component Adhesion aid
E-1: γ-Glycidoxypropyltrimethoxysilane E-2: β- (3,4-epoxycyclohexyl) ethyltrimethoxysilane E-3: γ-methacryloxypropyltrimethoxysilane (F) component Basic compound
F-1: 4-Dimethylaminopyridine F-2: 1,5-diazabicyclo [4,3,0] -5-nonene

[Example 1]
(B-4) above as a component [B] in a solution containing the polymer (A-1) obtained in Synthesis Example 1 (amount corresponding to 100 parts by mass (solid content) of the polymer (A-1)) (5-octylsulfonyloxyimino-5H-thiophen-2-ylidene)-(2-methylphenyl) acetonitrile ("IRGACURE PAG 108" manufactured by Ciba Specialty Chemicals) represented by the compound (3-ii) 3 parts by weight, (C-1) 4 parts by weight of palmitic acid as [C] component, and [D] component as (D-1) silicone surfactant (“SH 8400 FLUID manufactured by Toray Dow Corning Co., Ltd.) 0.20 parts by mass, [E] component (E-1) 3.0 parts by mass of γ-glycidoxypropyltrimethoxysilane are mixed and filtered through a membrane filter having a pore size of 0.2 μm. And a, to prepare a positive type radiation-sensitive composition.

[Examples 2 to 10 and Comparative Examples 1 to 7]
Except having changed the kind and quantity of each component as having described in Table 1, it carried out similarly to Example 1, and prepared the positive radiation sensitive composition of Examples 2-10 and Comparative Examples 1-7.

<Physical property evaluation>
Each positive radiation sensitive composition prepared as described above was used, and the composition and various properties as a coating film or an interlayer insulating film were evaluated as follows.

(1) Radiation sensitivity Hexamethyldisilazane (HMDS) was applied onto a 550 × 650 mm chromium film and heated at 60 ° C. for 1 minute (HMDS treatment). The radiation-sensitive composition prepared as described above is applied onto the chromium-deposited glass after the HMDS treatment using a slit die coater “TR6321055-CL”, the ultimate pressure is set to 100 Pa, and the solvent is removed under vacuum. Then, the film was further pre-baked at 90 ° C. for 2 minutes to form a coating film having a thickness of 3.0 μm. Subsequently, using an MPA-600FA exposure machine manufactured by Canon Inc., the coating film was irradiated with radiation through the mask having a 60 μm line and space (10 to 1) pattern with the exposure amount as a variable. After that, the film was developed by a puddle method at 25 ° C. with an aqueous tetramethylammonium hydroxide solution having the concentration shown in Table 1. Here, the development time was 80 seconds when a developer having a tetramethylammonium hydroxide concentration of 0.40% by mass was used, and 50 seconds when a 2.38% by mass developer was used. Next, washing with running ultrapure water for 1 minute was performed, followed by drying to form a pattern on the chromium-deposited glass substrate after the HMDS treatment. At this time, the amount of exposure necessary to completely dissolve the 6 μm space pattern was examined. This value is shown in Table 1 as radiation sensitivity. It can be said that the sensitivity is good when this value is 500 J / m ² or less.

(2) Contact hole shape stability After coating on a silicon substrate using a spinner, the film was prebaked on a hot plate under two conditions of a prebaking temperature of 70 ° C. for 3 minutes and 90 ° C. for 3 minutes. A coating film was formed to a thickness of 0.0 μm. Using a PLA-501F exposure machine (extra-high-pressure mercury lamp) manufactured by Canon Inc., (1) The required exposure dose evaluated in the evaluation of radiation sensitivity was applied through a contact hole pattern mask of 10 μm × 10 μm. Exposure was performed. Next, development processing was performed at 25 ° C. by a liquid piling method using a tetramethylammonium hydroxide aqueous solution (developer) having a concentration of 0.4% by mass. The development processing time was 100 seconds. After the development processing, the coating film was washed with running ultrapure water for 1 minute and dried to form a contact hole pattern on the wafer. The shape of the formed pattern was observed with an SEM (scanning electron microscope).
When there is no difference in the contact hole pattern created under the two conditions of prebaking temperature of 70 ° C for 3 minutes and prebaking temperature of 90 ° C for 3 minutes, the shape stability of the contact hole against the temperature change of prebaking is high and developability And it can be said that the pattern formability is good. On the other hand, when the size of the contact hole changes greatly with respect to the change in the pre-bake temperature, or peeling from the substrate occurs, the shape stability of the contact hole with respect to the temperature change in the pre-bake is low, and developability and It can be said that the pattern formability is poor.
(Evaluation criteria)
The determination was made according to the following evaluation criteria with reference to a schematic cross-sectional view of the cured film 2 provided with the contact hole 3 provided on the substrate 1 shown in FIG.
・ If the contact hole shape is as shown in FIG.
When the contact hole shape was greatly enlarged as in FIG. 1B, it was judged as defective.
The shape in which the contact hole shape was cut at the bottom of the pattern as in the case of FIG. 1 (c) was determined to be defective. The results are shown in Table 1.

(3) Light transmittance A coating film was formed on a silicon substrate in the same manner as in the evaluation of radiation sensitivity. This silicon substrate was heated in a clean oven at 220 ° C. for 1 hour to obtain a cured film. The light transmittance at a wavelength of 400 nm was measured and evaluated using a spectrophotometer (150-20 type double beam (manufactured by Hitachi, Ltd.)). At this time, transparency is poor when it is less than 90%, and transparency is good when it is 90% or more. The evaluation results are shown in Table 1.

(4) Voltage holding ratio On the soda glass substrate on which the SiO ₂ film that prevents elution of sodium ions is formed on the surface of the prepared liquid composition and ITO (indium-tin oxide alloy) electrodes are further deposited in a predetermined shape After spin coating, prebaking was performed in a clean oven at 90 ° C. for 10 minutes to form a coating film having a thickness of 2.0 μm.

Subsequently, the coating film was exposed at an exposure amount of 500 J / m ² without using a photomask. Thereafter, the coating film was cured by post-baking at 230 ° C. for 30 minutes to form a cured film.

  Next, the substrate on which this pixel is formed and the substrate on which the ITO electrode is simply deposited in a predetermined shape are bonded together with a sealing agent mixed with 0.8 mm glass beads, and then Merck liquid crystal “MLC6608” is injected. Thus, a liquid crystal cell was produced.

  Next, the liquid crystal cell was placed in a constant temperature layer of 60 ° C., and the voltage holding ratio of the liquid crystal cell was measured by a liquid crystal voltage holding ratio measuring system “VHR-1A type” manufactured by Toyo Corporation. The applied voltage at this time is a square wave of 5.5 V, and the measurement frequency is 60 Hz. Here, the voltage holding ratio is a value of (liquid crystal cell potential difference after 16.7 milliseconds / voltage applied at 0 milliseconds). If the voltage holding ratio of the liquid crystal cell is 90% or less, it means that the liquid crystal cell cannot hold the applied voltage at a predetermined level for a time of 16.7 milliseconds, and the liquid crystal cannot be sufficiently aligned. There is a high risk of causing "burn-in".

  As is clear from the results in Table 1, the positive radiation sensitive compositions of Examples 1 to 10 containing the components [A], [B] and [C] were compared to Comparative Examples 1 to 1 containing no [C] component. Compared with No. 7 positive radiation sensitive composition, it was found that the contact hole had excellent shape stability and high developability and pattern formability. Moreover, it turned out that each positive type radiation sensitive composition of an Example can form the interlayer insulation film which fully satisfies the general required characteristics, such as a radiation sensitivity, a light transmittance, and a voltage holding ratio.

  As described above, the positive radiation-sensitive composition of the present invention has excellent radiation sensitivity, and the resulting interlayer insulating film has high light transmittance and voltage holding ratio, while changing the conditions for forming the cured film. It has excellent developability and pattern formability that can cope with the above. Therefore, the positive radiation sensitive composition is suitably used for forming an interlayer insulating film or the like of a display element.

1 Substrate 2 Cured film 3 Contact hole

Claims (5)

[A] a polymer having a structural unit containing a group represented by the following formula (1) and an epoxy group-containing structural unit in the same or different polymer molecules;
[B] A positive radiation sensitive composition containing a photoacid generator, and [C] a compound represented by the following formula (2).

(In Formula (1), R ¹ and R ² are each independently a hydrogen atom, an alkyl group, a cycloalkyl group, or an aryl group, and one of the hydrogen atoms of these alkyl group, cycloalkyl group, or aryl group) Part or all may be substituted with a substituent (provided that R ¹ and R ² are not both hydrogen atoms) R ³ represents an alkyl group, a cycloalkyl group, an aralkyl group, an aryl group, or — A group represented by M (R ^3m ) ₃ (M is Si, Ge or Sn, R ^3m is an alkyl group), and some or all of these hydrogen atoms are substituted with substituents; R ¹ and R ³ may be linked to form a cyclic ether structure.)

(In the formula (2), X is .Y ¹ and ^{Y 2} is a divalent straight-chain aliphatic hydrocarbon group having 6 to 20 carbon atoms are each independently a single bond, an ester bond, an amide bond R ⁴ and R ⁵ are each independently a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, a sulfo group, a sulfophenyl group, or any one of the following formulas (i) to (vi). However, when Y ¹ or Y ² is a single bond, R ⁴ or R ⁵ linked to Y ¹ or Y ² may not be an alkyl group having 1 to 6 carbon atoms. In addition, when Y ¹ and Y ² are both single bonds, R ⁴ and R ⁵ are not both hydrogen atoms.)

(In the formulas (i) to (vi), R ⁶ is a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. R ⁷ is a hydrogen atom or a methyl group. M is an integer of 0 to 6. (However, when Y ¹ or Y ² in the formula (2) is a single bond, m in R ⁴ or R ⁵ linked to Y ¹ or Y ² is 0.) [B] The positive radiation sensitive composition according to claim 1, wherein the photoacid generator has an oxime sulfonate group represented by the following formula (3).

(In Formula (3), R ^B1 is a linear or branched alkyl group, a cycloalkyl group, or an aryl group, and part or all of the hydrogen atoms of these groups may be substituted with a substituent. .)   The positive radiation-sensitive composition according to claim 1 or 2, which is used for forming an interlayer insulating film of a display element. (1) The process of forming the coating film of the positive radiation sensitive composition of Claim 3 on a board | substrate,
(2) A step of irradiating at least a part of the coating film formed in step (1),
(3) A method of forming an interlayer insulating film of a display element, comprising: a step of developing the coating film irradiated with radiation in step (2); and (4) a step of heating the coating film developed in step (3).   The interlayer insulation film of the display element formed from the positive radiation sensitive composition of Claim 3.

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