JP2011221308A - Vibration-type driving device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vibration-type driving device capable of reducing a load of vibrators not contributing to an output direction and suppressing lowering of output when configuring the vibration-type driving device which moves a moving body in a prescribed direction with a plurality of the vibrators.SOLUTION: The vibration-type driving device has a plurality of the vibrators located in positions where a direction of a force generated by elliptic motion varies, moves the moving body contacted through a contact member of the vibrators in a prescribed moving direction which is determined by combining forces of different directions. The device comprises pressure control means for controlling a pressure contact force between a plurality of the vibrators and the moving body. The pressure control means controls the pressure contact force against the vibrators generating a driving force toward a direction whose angle formed between a direction in which the moving body is moved is larger than a prescribed angle with a pressure contact force smaller than the pressure contact force against the vibrators generating the driving force toward the direction in which the moving body is moved.

Description

  The present invention relates to a vibration type driving device that moves a moving body in contact with a plurality of vibrating bodies in a plurality of different directions. In particular, the present invention relates to a vibration type driving device suitable for application to a mechanism for correcting camera shake of an optical device such as a camera.

Conventionally, many driving devices using a vibration type driving device such as a driving device that generates a driving force by a piezoelectric vibrating body to drive a moving body that is in frictional contact and an actuator that uses a plurality of direct acting piezoelectric vibrating bodies are used. Proposals have been made.
For example, Patent Document 1 proposes an imaging device using a vibration type driving device as shown in FIG.
FIG. 15A is a perspective view of a camera as an imaging apparatus.
As shown in FIG. 15A, three vibrating bodies (211, 212, and 213 (213 is shown in FIG. 15B)) for driving the image sensor 203 are provided.
And the back side of the moving body 204 to which the image sensor 203 is attached is configured to be received by three contact portions, one point each.
Further, the pressure contact between the ultrasonic vibrators 211 to 213 and the moving body 204 is performed by using a magnetic force such as a magnet (not shown). Reference numeral 201 denotes an image pickup apparatus main body, and 202 denotes a lens barrel portion including a lens.
Reference numerals 263P, 263Y, and 263R denote angular acceleration sensors that detect the rotational movement of the imaging apparatus.
The angular acceleration sensor detects a change in posture of the imaging device due to camera shake, etc., and generates a driving force on the vibrating body so that the signal from the image sensor 203 is not affected by camera shake. It is moved to a vertical plane.

FIG. 15B is a diagram illustrating a drive unit that drives the moving body to which the imaging element is attached. The vibrating body and position detection in the imaging apparatus of FIG. 15A when the moving body 204 is driven in the Y direction. The sensor arrangement and the direction of the driving force are shown.
The position detection sensors 222 to 224 are configured to read the scale scales attached to the opposing positions, obtain position information, and calculate the respective position information to determine the moving direction of the moving body 204.
When the force generated by the vibrating body 211 when driving in the Y direction is f1, the force generated by the vibrating body 212 is f2, and the force generated by the vibrating body 213 is f3.
f1 = 0 × F f2 = F f3 = F
The power of is to be applied.

Patent Document 2 proposes a positioning device that can be driven in a plurality of different directions using a plurality of vibrators and a load reduction method.
In Patent Document 2, when a moving body is driven in multiple directions using a plurality of vibrating bodies, the load on the vibrating body is reduced as follows.
A force parallel to the surface of the moving body is applied to at least one of the plurality of vibrating bodies for moving the moving body, and vibration perpendicular to the surface of the moving body is applied to at least one of the other moving bodies (push-up mode vibration). The load is reduced by controlling these simultaneously so that only the control is performed.
The vertical vibration period is controlled so that when a parallel force is applied to the moving body, the vibrating body that performs vertical vibration is separated from the moving body.

JP 2009-031353 A Special Table 2007-524339

In the above-mentioned conventional example of Patent Document 1, the vibrating body that applies a force in the direction in which the moving body is moved contributes to the movement of the moving body, but the vibrating body that does not contribute to the output direction is in contact with the vibrating body. There is a problem that the frictional force of the surface becomes a load and the overall output is reduced.
That is, when driving the moving body 204 in the Y direction, the vibrating bodies 212 and 213 have a driving force component in the moving direction, but the vibrating body 211 does not have a driving force in the moving direction, that is, the Y direction. The frictional force with the moving body becomes a load and the output is reduced.
On the other hand, in the thing of patent document 2, other than the vibrating body which is giving the force parallel to the surface of a moving body in order to move a moving body gives only a vibration perpendicular | vertical to the surface of a moving body, The movement load is reduced.
However, in order to sufficiently reduce the frictional force, it is necessary to generate a vibration having a large amplitude, and even the one of Patent Document 2 has a problem that the power consumption increases.

  In view of the above problems, the present invention reduces the load on a vibrating body that does not contribute to the output direction and suppresses a decrease in output when configuring a vibration type driving device that moves the moving body in a predetermined direction by a plurality of vibrating bodies. It is an object of the present invention to provide a vibration type driving device that can be used.

The vibration type driving device of the present invention includes an elastic body including at least an electro-mechanical energy conversion element and a contact portion, and includes a plurality of vibration bodies configured to generate an elliptical motion in the contact member,
The plurality of vibrators are arranged at positions where the directions of the forces generated by the elliptical motion are different, and are in contact with each other through a contact member of the vibrator in a predetermined moving direction in which the forces in the different directions are combined. A vibration type driving device for moving a moving body,
A pressurizing control means for controlling the pressurizing contact force between the contact member in the plurality of vibrating bodies and the moving body;
The pressure control means includes
The pressure contact force with respect to the vibrating body (disposed in the direction) that generates a driving force in a direction in which an angle formed with a direction in which the moving body is moved is larger than a predetermined angle,
It is configured to be controllable with a pressing contact force smaller than the pressing contact force with respect to a vibrating body generating a driving force in a direction in which the moving body is moved.

  According to the present invention, in configuring a vibration type driving device that moves a moving body in a predetermined direction by a plurality of vibrating bodies, it is possible to reduce the load of the vibrating body that does not contribute to the output direction and to suppress a decrease in output. It is possible to realize a vibration type driving device that can be realized.

The figure explaining the structure of the vibration type drive device in Example 1 of this invention. The figure which showed the basic composition at the time of driving a moving body to a linear motion direction using the vibrating body used for the dynamic type drive apparatus in Example 1 of this invention. The figure explaining the drive principle by the vibrating body of a vibration type drive device. The figure which shows the circuit structure of the driver part of the circuit which drives a vibration type drive device. The figure which shows the structure of the vibrating body containing the pressurization control means in the vibration type drive device of Example 1 of this invention. The figure which shows the relationship of the pressurization contact force of the electric current generated with the pressurization control means in the vibration type drive device of Example 1 of this invention, the vibrating body generated by an electromagnet, and a moving body. The figure which shows the structural example of the control circuit block which provided the vibrating body part in four places in the vibration type drive device of Example 1 of this invention. The figure which shows the operation | movement timing of the electric current given to the pressurization control means in the vibration type drive device of Example 1 of this invention. The figure which shows the structural example of the vibration type drive device containing the pressurization control means in Example 2 of this invention. The figure which shows the structural example of the vibration type drive device containing the pressurization control means in Example 3 of this invention. The figure which shows the relationship between the output of the vibration wave actuator in Example 3 of this invention, and an electric current. The figure which shows the drive image when driving the mobile body in the diagonal direction in Example 4 of this invention. The figure which shows the operation | movement timing of the electric current given to the pressurization control means in Example 4 of this invention. FIG. 10 is a diagram illustrating an operation of a vibration wave actuator group according to the fifth embodiment. The figure which shows the structure of the imaging device using the vibration type drive device in patent document 1 which is a prior art example.

  The mode for carrying out the present invention will be described with reference to the following examples.

[Example 1]
As a first embodiment, a configuration example of a vibration type driving device according to the present invention will be described with reference to FIGS.
FIG. 1A is a top view on the side where the vibrating body of the present embodiment is arranged and a driving force is generated in the vibration type driving device.
FIG. 1B is a bottom view of the moving body that moves in contact with the vibrating body by obtaining a driving force of the vibrating body (a side facing the vibrating body of FIG. 1A), and FIG. These are side views when the drive unit and the moving body are combined.

First, with reference to FIG. 2 to FIG. 4, a description will be given of a plurality of vibrating body portions used in the vibration type driving device of the present embodiment and a moving portion that moves in pressure contact therewith.
FIG. 2 is a diagram showing a basic configuration when the moving body is driven in the linear motion direction using the vibrating body used in the vibration type driving device.
In FIG. 2, the vibration type driving device of the present embodiment includes a piezoelectric element portion (electro-mechanical energy conversion element) 107 and a protrusion 108 that is a contact member, and is configured to be able to generate an elliptical motion on the contact member. A plurality of vibrating bodies are provided. And it is comprised so that the mobile body which is contacting via the contact member of this vibrating body may be moved.
In this embodiment, as shown in FIG. 1, the moving body needs to be movable in the XY directions, and thus has a plate shape.
FIG. 3 is a diagram for explaining the principle of driving by the vibrating body of the vibration type driving device, and shows two bending vibration modes generated by applying a voltage to the piezoelectric element.
The vibration mode in FIG. 3A represents one of the two bending vibration modes (referred to as A mode).
This A mode is a secondary bending motion in the long side direction (arrow X direction) of the rectangular vibrating body 106 and is a bending mode having three nodes parallel to the short side direction (arrow Y direction). is there.
Here, the protrusion 108 is disposed in the vicinity of a position that becomes a node by the vibration of the A mode, and the tip of the protrusion reciprocates in the arrow X direction by the vibration of the A mode.
The vibration mode shown in FIG. 3B represents the other bending vibration mode (referred to as B mode) of the two bending vibration modes.
This B mode is a primary bending vibration in the short side direction (arrow Y direction) of the rectangular vibrating body 106, and is a mode having two nodes parallel to the long side direction (arrow X direction).
Here, the nodes in the A mode and the nodes in the B mode are substantially orthogonal in the XY plane.
Further, the protrusion 108 is disposed in the vicinity of a position that becomes antinode by B-mode vibration, and reciprocates in the arrow Z direction by B-mode vibration.
By generating the above-described vibrations of the A mode and the B mode with a predetermined phase difference, an elliptical motion can be generated at the tip of the protrusion 108.
As shown in FIG. 2, a slider 116 as a driven portion is in pressure contact with the tip of the protrusion 108, and the slider 116 moves in the direction of arrow L due to the elliptical motion of the tip of the protrusion 108. can do.

FIG. 4 is a diagram showing a circuit configuration of a driver unit of a circuit for driving the vibration type driving device.
In the circuit configuration of FIG. 4, the switching circuit uses FETs 51 to 58 as switching elements.
Here, as shown in FIG. 4, when the A-phase pulse becomes Hi, the FETs 51 and 54 are turned on, and a current flows from the A-phase toward the / A-phase. Conversely, when the / A pulse becomes Hi, the FETs 53 and 52 are turned on, and a current flows from the A phase toward the A phase.
Similarly, for the B phase, the FETs 55 to 58 are turned on in accordance with a pulse signal applied to apply a voltage to the vibrating body 11.
Here, A and / A and B and / B are 180 ° out of phase, and are pulse signals having the same pulse width.
41 and 42 are impedance elements for matching the impedance with the motor.
In this example, 41 and 42 are inductance elements. Here, although not shown, there is a case where a capacitive element is provided in parallel with the vibrating body in order to match impedance.
Thus, by adding the impedance element to the positions 41 and 42, the motor can be driven with a lower voltage and higher efficiency.
In the vibration type driving device of the present embodiment, a plurality of the vibration body groups are arranged to drive one moving body.

In FIG. 1 (a), 11 (a) to 11 (d) are the vibrating body portions.
The vibrating body portion includes the following first vibrating body group and second vibrating body group.
The first vibrating body group is composed of two vibrating bodies 11 (a) and 11 (c) in which the directions of the driving forces generated by the vibrating bodies are parallel.
In addition, the second vibrating body group includes two vibrating bodies 11 (b) arranged in parallel to a position in a direction (perpendicular direction) in which the angle formed by the driving force generated by the first vibrating body group is 90 °. ), 11 (d).
In addition, this invention is not limited to the structure by arrangement | positioning of such four vibrating bodies.
For example, with the three vibrating bodies, the first vibrating body and the second vibrating body are arranged at a position where the angle between the directions of the respective driving forces becomes 120 °, and the second vibrating body and the third vibrating body May be arranged at a position where the angle formed by the direction of each driving force is 120 °.
Reference numerals 13 (a) to (c) denote position detection sensors such as encoders, and in the moving body part of FIG. 1 (b), the scale parts 14 (a) to (c) can detect the arrow direction at positions facing the sensor. Are arranged as follows.
Although details are omitted, the amount of movement of the moving body is detected from the above three position detection sensor signals, and taken as control information into a microcomputer (not shown) or the like to perform drive control.
The moving body in FIG. 1 (b) is in contact with the plurality of vibrating bodies 11 (a) to 11 (d) and moved in the direction in which the driving forces of the four vibrating bodies are combined. The structure which can move to rotation direction (theta) is taken.
Further, friction portions 15 (a) to 15 (d) having high wear resistance are provided at portions of the moving body portion 4 that face the vibrating body portions 11 (a) to 11 (d).
In the present embodiment, the friction members 15 (a) to 15 (d) are attached, but the entire moving body can be made to be a part with high wear resistance.
In FIG. 1 (c), 9 is a fixing part for fixing the vibrating bodies 11 (a) to (d), and 12 is a ball arranged between the moving body part 4 and the fixing part 9.
The ball 12 is housed in a plurality of holes arranged in the fixed portion 9, and the moving body portion 4 is freely driven in a plane when the ball rotates with the movement of the moving body portion 4, and the The fixed portion 9 is supported so as to always have a constant height. Further, the vibrating bodies 11 (a) to 11 (d) are connected to the fixed portion 9 via an elastic member described later.

With reference to FIG. 5, a configuration example of a vibrating body including a pressurization control unit that includes a magnetic force control unit that can change the magnetic force by current and controls the pressurization contact force according to the increase or decrease of the magnetic force by the magnetic force control unit will be described. To do.
In FIG. 5, reference numeral 100 denotes a vibrating body, which is configured by joining a diaphragm 106, which is an elastic body such as metal, and an electromechanical energy conversion element 107 as shown in FIG. Reference numeral 4 denotes a moving body portion made of a magnetic material.
The vibrating body 100 is connected to the vibrating body holding member 20 in a state that is devised so that the vibration of the vibrating body is not transmitted.
The vibrating body holding member 20 is provided with an electromagnet 21 so that the vibrating body 100 is attracted in the direction of the moving body portion 4 through the vibrating body 100.
Further, the vibrating body holding part 20 is connected to the fixing part 9 via the elastic member 8.
By this elastic member, the line connecting the two protrusions of the vibrating body and the moving body contact surface become parallel, and the pressing contact force obtained from the electromagnet 21 is evenly distributed between the two protrusions of the moving body 4 and the vibrating body. It is configured to be added.
Reference numeral 23 denotes a pressurizing control means, which is composed of a calculation part for determining a current value applied to the electromagnet 21 according to a required pressurizing contact force and a current generator. The pressure setting unit 24 is configured by these 21 and 23.
A controller unit 22 controls the pressure control means 23 to change the pressure contact force.

FIG. 6 shows the relationship between the current generated by the pressurizing control means 23 in this embodiment, the pressurizing contact force between the vibrating body and the moving body generated by the electromagnet 21.
As shown in Fig. 6, the generated current and the pressure contact force are in a proportional relationship. It is necessary to increase the current to increase the pressure and decrease the current to decrease the pressure. The pressure contact force to be set can be set.

A configuration example of a control circuit block provided with four vibrating body portions in the vibration type driving device of the present embodiment will be described with reference to FIG.
The pressurization setting units 24 (a) to 24 (d) are also provided in the vibrating body units 11 (a) to 11 (d), respectively, and each pressurization contact force can be controlled by the controller unit 22. It has become.
The controller unit 22 is an arithmetic processing unit such as a microcomputer, and is actually a part that controls not only the pressure control means but also the entire apparatus.
Reference numeral 61 denotes an oscillator unit, and 62, 63, 64, and 65 denote phase shifters for outputting signals having different phases to the oscillator 61. Reference numerals 66 to 69 denote switching circuit portions constituted by the circuit of FIG. 4 and are connected to the vibrating body portions 11 (a) to 11 (d) of FIG. 1.
Reference numerals 13 (a) to 13 (c) denote sensors for detecting the movement positions in the X and Y directions. For example, in the case of the sensor 13 (a), the scale portion 14 (a) shown in FIG. 1 (b) moves in the direction indicated by the arrow, so that a position signal corresponding to the movement amount is obtained.
Similarly, the sensor 13 (b) outputs a position signal corresponding to the amount of movement as the scale portion 14 (b) moves in the direction of the arrow as the sensor 13 (c) moves in the arrow direction.
The controller unit (arithmetic processing unit) 22 is configured to detect the moving position of the moving body 4 by calculating position signals obtained from the sensors 13 (a) to 13 (c).
It is determined from the result of the arithmetic processing unit 22 which state is the current position with respect to the target position, and the oscillation frequency is determined at 61 so as to reach the target position.
Then, the A-phase pulse, the / A-phase pulse, the B-phase pulse, and the / B-phase pulse input shown in FIG. 4 are input to the driver circuits 66 to 69 via the prepared 62 to 65 phase shifters. Input to each driver.

In FIG. 7, the drive unit including the vibrating body unit 11 (a) is Ma, the driving unit including the vibrating body unit 11 (b) is Mb, the driving unit including the vibrating body unit 11 (c) is Mc, and the vibrating body unit 11. The drive unit including (d) is referred to as Md.
The following four-phase signals Ma_A, Ma_ / A, Ma_B, and Ma_ / B are output from the driver unit 66 of FIG. 7 to the vibrating body unit 11 (a).
Further, from the driver portion 67 to the vibrating body portion 11 (b),
Mb_A, Mb_ / A, Mb_B, and Mb_ / B are output.
Further, from the driver portion 68 to the vibrating body portion 11 (c),
Mc_A, Mc_ / A, Mc_B, Mc_ / B are output.
Further, from the driver unit 69 to the vibrating body unit 11 (d),
Md_A, Md_ / A, Md_B, and Md_ / B are output.
Here, as a parameter for changing the speed, a driving frequency applied to each motor, a driving voltage, a phase difference of AB pulses, a pulse width of AB pulses, and the like can be selected.
Reference numerals 24 (a) to 24 (d) are pressurization control means provided in the drive units Ma to Md, respectively, and the current value is controlled by a command value given from the controller unit 22, so that the moving body and the vibrating body are in contact with each other. The pressure contact force between the members is changed.

The operation timing of the current applied to the pressurization control means in this embodiment will be described with reference to FIG.
FIG. 8 shows the relationship of the current applied to the pressure control means of each pressure setting unit in the driving direction of the moving body.
The horizontal axis is time and the vertical axis is the current value, and the current value (pressing contact force) is increased or decreased as in the interval t1 to t4 by the following operation.
Here, the operation when the movable body portion 4 in this embodiment is driven in the X direction of FIG.
The vibrating body portion 11 (a) generates a driving force in the direction of arrow Fa, and the vibrating body portion 11 (c) generates a driving force in the direction of arrow Fc.
At this time, since the vibrating body portion 11 (b) and the vibrating body portion 11 (d) cannot generate force in the driving direction, the contact force between the contact member of the vibrating body portion and the moving body portion is weakened, and the load caused by contact is reduced. The pressure control means is operated so as to reduce the pressure.
Thus, by reducing the pressurization of the vibrating body portion that does not contribute to driving, the driving force of the vibrating body portions 11 (a) and 11 (c) is transmitted to the movable body portion 4 without waste and driven in the X direction. This state is shown in the t1 section of FIG.
When it is not driven in any direction, it is desirable that the moving body and the vibrating body portion be held by a frictional force so that the position of the moving body and the vibrating body portion is not shifted by gravity or external force.
Therefore, the current applied to the electromagnet 21 by the pressure control means 23 at this time is not zero, and the current value in a state where an appropriate pressure contact force that does not move even when the gravity or the external force is applied is generated. good. This state is shown in the t2 section of FIG.

Next, when it is desired to drive in the Y direction, on the contrary, the pressure contact force is increased so as to generate a driving force in the vibrating body portions 11 (b) and 11 (d), and the vibrating body portions 11 (a) and 11 (11). In (c), it is possible to drive efficiently as in the X direction driving by reducing or reducing the pressure to zero. This state is shown in the t3 section of FIG.
The t4 section shows the same stop state as t2.
In this way, efficient driving can always be realized by controlling the magnitude of the pressure contact force according to the driving direction.
Further, when driving in an oblique direction deviating from the X and Y directions, the composition of the driving force of the vibrating body portion 11 (a) and the vibrating body portion 11 (c) is used as a force vector Fx, and similarly, the vibrating body portion 11 ( A combination of the driving force of b) and the vibrating body portion 11 (d) is defined as a force vector Fy.
Thus, the driven unit 4 can be driven in an arbitrary direction by combining the force vectors Fx and Fy.
Here, the pressure changing means is operated so that the pressure contact force with the larger driving force is increased and the pressure contact force with the smaller driving force is decreased, so that an appropriate driving force or Giving load.
When the X direction in FIG. 1A is 0 ° and the Y direction is 90 °, the ratio of Fx and Fy is set equal when driving in the 45 ° direction.
Since 11 (a) to 11 (d) at this time are four and are driven with the same force, the pressure contact force is also set to be the same.
When driving in the direction of 60 degrees, the pressure control means is also set so that the driving force of the X direction driving and the Y direction driving is 1: √3 times.
At this time, the pressurization of the vibrating body portions 11 (a) and 11 (c) used for driving in the X direction is 1 / √3 of the output that the vibrating bodies 11 (b) and 11 (d) used for driving in the Y direction can output. Set the pressure contact force to be appropriate.
As a result, the vibrating body portions 11 (a) and 11 (c) provide a necessary output and a load that does not hinder driving of the vibrating bodies 11 (b) and 11 (d) because the pressure is set low. Thus, the present driving device can be efficiently driven in an oblique direction.

Here, the relationship between the output and the pressure contact force suitable at that time is measured in advance, and the optimum pressure contact force for the X direction drive and the Y direction drive is determined for each angle. By setting the pressure contact force, it is possible to realize drive control suitable for each drive direction.
When a plurality of vibrating body groups are provided in the same drive direction as in this embodiment, the vibrating body portions 11 (a) and 11 (c) and 11 (b) and 11 (d) in the same direction are arranged. The same pressurization setting is used by using a vibrating body in which the relationship between output and pressurization is almost equal.
As a result, the same output and addition are applied to the groups 11 (a) and 11 (c) and the groups 11 (b) and 11 (d) with respect to the control that refers to the table of the relationship between the output and the pressure for each of the four. It is possible to simplify the control algorithm by sharing using the pressure relationship table.
In addition, although this embodiment shows an example using four vibrating bodies, even in a configuration using three vibrating bodies as in the conventional example, a similar pressure contact force adjusting means is provided, thereby providing a load. It becomes possible to reduce the load amount of the vibrating body.

[Example 2]
As a second embodiment, a vibration type drive including a length control unit using a laminated piezoelectric element that expands and contracts by a drive voltage, and includes a pressure control unit that controls a pressure contact force according to increase / decrease of the length by the length control unit. A configuration example of the apparatus will be described with reference to FIG.
In the first embodiment, the pressing contact force is controlled by the current applied to the electromagnet 21, but in this embodiment, the laminated piezoelectric element 27 is used as the pressing means.
Here, the configuration of the pressure control means shown in FIG. 9 will be described.
The laminated piezoelectric element 27 is provided on the base portion 9 and generates a force in the extending direction when a voltage is applied.
No. 28 changes the pressing contact force by changing the stroke due to the expansion and contraction of the laminated piezoelectric element 27, and the two projections constituting the contact member in the vibrating body 100 are parallel to the contact surface of the moving body 4. This is a spring member.
A variable voltage power supply 29 supplies a voltage for extending and contracting the piezoelectric element 27.
A voltage value generated from the power source is commanded from the controller unit 22.
Reference numeral 30 denotes a fixing member that receives the pressing contact force of the moving body 4, and 31 denotes a ball member that can move freely in the moving direction while receiving the pressing contact force.
Reference numeral 24 ′ denotes a pressurizing mechanism using the laminated piezoelectric element.
In such a configuration, the piezoelectric element exhibits a characteristic of generating a force in a direction extending according to the voltage, and the vibrating body 100 and the holding member 20 generate a pressing contact force with respect to the moving body 4. The pressure contact force at this time is determined by the voltage applied to the laminated piezoelectric element 27 measured in advance.
Since the method for controlling the pressing contact force is the same as that of the first embodiment, the description thereof is omitted. By configuring the pressurizing mechanism with the laminated piezoelectric element in this way, it is not necessary to use an electromagnet, and therefore it becomes possible to use the pressurizing adjustment mechanism even in an environment that is problematic when affected by the magnetic force.

[Example 3]
As a third embodiment, a configuration example of a vibration type driving device including a pressure control unit will be described with reference to FIG.
In the first embodiment, the controller unit 22 performs the pressurization setting by controlling the pressurization command value to the pressurization control means 23. In addition to that, drive control such as speed control of the vibration wave actuator is also performed. We carried out at the same time.
For example, when there are four vibrating body parts, four control blocks for controlling the driving of the vibrating body and four blocks for controlling the pressure control means are required.
In this embodiment, the control of the pressurizing control means performed on each vibrator is configured to be omitted by using the drive current of the vibration wave actuator as a command value.

FIG. 11 shows the relationship between the output such as the speed of the actuator (vibrating body portion) used in this embodiment and the drive current flowing in the drive circuit.
As shown in FIG. 1, when the movable body 4 is driven in the X direction, it is necessary to generate a large driving force in the vibrating bodies 11 (a) and 11 (c).
At this time, a driving voltage having a frequency of f1 in FIG. 11 is applied to the vibrating body portion, and the driving current also takes a large value due to the impedance change of the vibrating body portion.
Here, the drive current for driving the vibration wave actuator flows from the power source 32 to the drive circuit 25 via the pressurizing control means 23 as shown in FIG.
And finally, it is given to the vibrating body 100 through the flexible substrate 26 and the like, and a driving force is generated in the vibrating body.
The pressurizing control means 23 is configured such that the pressurizing contact force increases in proportion to the value of the flowing current.
Therefore, since the flowing current value is large at the frequency of f1, the pressing contact force also shows a large value.

On the contrary, the vibrating bodies 11 (b) and 11 (d) have an angle of 90 ° with the driving direction, so that only a small driving force needs to be generated.
Therefore, at this time, a driving voltage having a frequency of f2 is applied to the vibrating body, and the driving currents 11 (b) and 11 (d) have a smaller value than when the driving frequency is f1.
At that time, a small current flows through the pressure control means 23, and the pressure contact force increases in proportion to the current value, so that the pressure contact force shows a small value. .
Thus, by adopting a configuration in which a current is supplied from the power source to the drive circuit via the pressure control means 23, the pressure contact force can be automatically set to an optimum value, and the controller unit 22 bothers the pressure control. There is no need to send a command to the means, and the burden on the controller unit 22 can be greatly reduced.

[Example 4]
As a fourth embodiment, a configuration example of the vibration type driving device according to the present invention will be described with reference to FIGS.
FIG. 12 shows a driving image when the moving body 4 of the fourth embodiment is driven in an oblique direction. FIG. 13 shows current values given to the four pressurization control means and timing thereof in the fourth embodiment.
In the first embodiment, when driving in an oblique direction, the driving force of the vibrating body portion 11 (a) and the vibrating body portion 11 (c) is synthesized by the force vector Fx. Similarly, the vibrating body portion 11 (b) and the vibrating body portion 11 are combined. The composition of the driving force in (d) is defined as a force vector Fy. A driving method of driving the driven unit 4 in an arbitrary direction by combining the force vectors Fx and Fy has been implemented.
However, in such a driving method, the angle formed by the driving direction of each vibrating body portion and the moving direction of the moving body 4 is larger than 0 °, so that friction loss due to sliding occurs on the contact surface of each vibrating body portion. There is also a problem that efficiency is lowered.
In this embodiment, in order to solve such a problem, the driving force of only the vibrating body in which the angle formed in the driving direction of the vibrating body portion is close to 0 ° is controlled by controlling the driving timing of the X direction driving and the Y direction driving. And the pressure contact force of the vibrating body having an angle of close to 90 ° is reduced.
As a result, the driving is performed with the friction load reduced, and the driving in the oblique direction, that is, the driving in which the slip occurs is not performed.

Next, using FIG. 12 and FIG. 13, a current control unit capable of changing the magnitude of the current in this embodiment is provided, and the pressing contact force is controlled according to the magnitude of the current by the current control unit. An example of the configuration will be described.
In FIG. 13, the vertical axis indicates the current value applied to the pressure control means, and the larger the value, the greater the pressure contact force.
Conversely, when the current value is zero, the pressure contact force is zero.
As shown in FIG. 12, when the moving body 4 is driven in a 45 degree direction that is exactly intermediate between the X direction and the Y direction, it is first moved by a position in the Y direction (t11).
At this time, a voltage for driving is applied to the vibrating body portion 11 (b) and the vibrating body portion 11 (d), and at the same time, the current of the pressure control means is increased so as to increase the pressure contact force.

Although a voltage for driving the actuator is not shown, a four-phase driving voltage is input to each vibrating body portion that requires a driving force by the driver circuit shown in FIG.
Here, since the vibrating body portion 11 (a) and the vibrating body portion 11 (c) do not require a driving force and the setting of pressurization may be small, the current of the pressurization control means is also a small value.
Next, it is moved by a position in the X direction (t12).
At this time, a voltage for driving the vibrating body portion 11 (a) and the vibrating body portion 11 (c) is applied, and at the same time, the current of the pressure control means is increased so as to increase the pressure contact force. The vibrating body portion 11 (b) and the vibrating body portion 11 (d) do not require a driving force, and the pressure setting is small.
At timings t13 to t15 in FIG. 12, the operations at t1 and t2 are alternately repeated to realize oblique driving.
t16 is in a state of being held by the frictional force between the moving body and the vibrating body portion in the stopped state.
Accordingly, the current applied to the pressure control means at this time is not zero, but is set to a current value in a state where an appropriate pressure contact force for holding the vibrating body portion and the moving body is generated.

In the description of the present embodiment, an example of driving in the 45 degree direction is shown, so the driving timing in the X direction and the Y direction is 1: 1.
For example, when driving in the direction of 60 degrees, the same effect can be obtained by setting the driving time of the X direction driving and the Y direction driving to 1: √3.
Further, the other angles can be similarly realized by controlling the drive time ratio and the drive direction of the X direction drive and the Y direction drive.

[Example 5]
As a fifth embodiment, a vibration type drive is provided that selects and drives a member that makes pressure contact from among a plurality of vibrators according to the present invention, and selects and drives a vibrator that makes pressure contact according to the position of the moving body. A configuration example of the apparatus will be described with reference to FIG.
In the present embodiment, a large number of vibrating body portions are arranged at equal intervals in the vertical and horizontal directions.
With this configuration, the moving body can move greatly on the XY plane.
Next, the operation of moving the moving body in this example in the order of points p → q → r will be described.
Here, the name of the vibrating body is the name of the vibrating body portion where the vertical and horizontal line names overlap.
For example, the vibrating body portion at the position of the symbol P is referred to as 1B.
In the operation of moving from the point p to the point q, the following operation 1 to operation 5 are performed.
[Operation 1]: Since 2A and 2C are in contact with the moving body and the angle between the driving direction and the driving direction of the vibrating body is zero, the driving is performed with a large pressing contact force.
Since 1B and 3B are in contact with the moving body and the angle between the driving direction and the driving direction of the vibrating body is 90 °, the pressure contact force is reduced so as not to hinder driving.
[Operation 2]: 2A, 2C, 4A, and 4C are in contact with the moving body, and the angle formed by the driving direction and the driving direction of the vibrating body is zero.
3B is in contact with the moving body, and the angle formed by the driving direction and the driving direction of the vibrating body is 90 °. Therefore, the pressure contact force is reduced so as not to hinder driving.
[Operation 3]: Since 4A and 4C are in contact with the moving body and the angle between the driving direction and the driving direction of the vibrating body is zero, the driving is performed with a large pressing contact force.
3B and 5B are in contact with the moving body, and the angle formed by the driving direction and the driving direction of the vibrating body is 90 °, so the pressure contact force is reduced so as not to hinder driving.
[Operation 4]: 4A, 4C, 6A, and 6C are in contact with the moving body, and the angle formed by the driving direction and the driving direction of the vibrating body is zero.
5B is in contact with the moving body, and the angle formed by the driving direction and the driving direction of the vibrating body is 90 °, so the pressure contact force is reduced so as not to hinder driving.
[Operation 5]: 6A and 6C are in contact with the moving body, and the angle formed by the driving direction and the driving direction of the vibrating body is zero.
5B and 7B are in contact with the moving body, and the angle formed by the driving direction and the driving direction of the vibrating body is 90 °. Therefore, the pressure contact force is reduced so as not to hinder driving.
It drives so that a driving force and pressurization contact force may be controlled in the order of.

In the operation of moving from the point q to the point r, the same operation is performed as in the following operations 6 to 10.
[Operation 6]: 5B and 7B are driven with a large pressure contact force, and drives 6A and 6C are driven with a small pressure contact force.
[Operation 7]: 5B, 7B, 5D, and 7D are driven with a large pressing contact force, and 6C is driven with a small pressing contact force.
[Operation 8]: 5D and 7D are driven with a large pressure contact force, and 6C and 6E are driven with a small pressure contact force.
[Operation 9]: 5D, 7D, 5F, and 7F are driven with a large pressure contact force, and 6E is driven with a small pressure contact force.
[Operation 10]: 5F and 7F are driven with a large pressure contact force, and 6E and 6G are driven with a small pressure contact force.

In this way, a large number of vibrating body portions are arranged, a vibrating body portion that is used for driving that generates a driving force and increases a pressing contact force, and a vibrating body portion that reduces the pressing contact force so as not to become a driving load. select.
And by operating these, it becomes possible to move a mobile body to a free position in the area | region which has arrange | positioned many vibration body parts.
In the present embodiment, the parallel movement operation has been described. However, by moving the X-axis and the Y-drive as shown in the fourth embodiment, the moving body is moved in a diagonally large operating range. Is also possible.
In addition, the movable body in each of the above embodiments can be configured by a structure including a lens and can be configured to move on a plane perpendicular to the optical axis of the lens.

4: Moving body portion 8: Elastic member 9: Fixed portion 11 (a) to 11 (d): Vibrating body portion 12: Balls 13 (a) to 13 (c): Position detection sensors 14 (a) to 14 (c) ): Scale portion 15 (a) to 15 (d): friction member

Claims (11)

It has an elastic body including at least an electro-mechanical energy conversion element and a contact portion, and includes a plurality of vibrators configured to generate an elliptical motion in the contact member,
The plurality of vibrators are arranged at positions where the directions of the forces generated by the elliptical motion are different, and are in contact with each other through a contact member of the vibrator in a predetermined moving direction in which the forces in the different directions are combined. A vibration type driving device for moving a moving body,
A pressurizing control means for controlling the pressurizing contact force between the contact member in the plurality of vibrating bodies and the moving body;
The pressure control means includes
The pressure contact force with respect to a vibrating body that generates a driving force in a direction in which an angle formed with a direction in which the moving body is moved is larger than a predetermined angle,
A vibration type driving apparatus configured to be controllable with a pressing contact force smaller than the pressing contact force with respect to a vibrating body generating a driving force in a direction in which the moving body is moved.   The pressurizing control means is configured to be able to control the pressurizing contact force to a smaller pressurizing contact force as an angle formed with a direction in which the moving body is moved approaches 90 °. Item 2. The vibration type driving device according to Item 1.   The pressurization control means is configured to be capable of controlling the pressurization contact force to a greater pressurization contact force as an angle formed with a direction in which the moving body is moved approaches 0 °. Item 2. The vibration type driving device according to Item 1.   2. The vibration type driving device according to claim 1, wherein the pressurization control unit performs pressurization control with the same pressurization contact force for an angle that is equal to a direction in which the moving body is moved.   5. The pressurization control means includes a magnetic force control unit capable of changing a magnetic force by an electric current, and controls the pressurization contact force according to an increase or decrease of the magnetic force by the magnetic force control unit. The vibration type driving device according to any one of the above.   The pressurizing control means includes a length control unit using a laminated piezoelectric element that expands and contracts by a driving voltage, and controls the pressurizing contact force according to an increase or decrease in length by the length control unit. Item 5. The vibration type driving device according to any one of Items 1 to 4.   5. The pressurizing control unit includes a current control unit capable of changing a magnitude of a current, and controls the pressurizing contact force according to the magnitude of the current by the current control unit. The vibration type driving device according to any one of the above.   2. The structure according to claim 1, further comprising: selecting and driving one that makes pressure contact from among the plurality of vibrating bodies, wherein the vibrating body that makes pressure contact is selected and driven according to a position of the moving body. Vibration type drive device. The plurality of vibrating bodies include a first vibrating body group including two vibrating bodies in which directions of forces generated by the elliptical motion are parallel,
A second vibrating body group composed of two vibrating bodies arranged in parallel with the first vibrating body group and a position in a direction in which the direction of the generated force is orthogonal;
The vibration type driving apparatus according to claim 1, wherein: The plurality of vibrators include three vibrators including a first vibrator, a second vibrator, and a third vibrator, which are disposed at positions where directions of forces generated by the elliptical motion are different from each other.
The first vibrating body and the second vibrating body are arranged at a position where the angle formed by the direction of the force generated by each elliptical motion is 120 °,
The said 2nd vibrating body and the said 3rd vibrating body are arrange | positioned in the position from which the angle which the direction of the force generated by each elliptical motion makes becomes 120 degrees. 9. The vibration type driving device according to any one of 1 to 8.   11. The vibration type driving device according to claim 1, wherein the moving body includes a structure including a lens and moves on a plane perpendicular to the optical axis of the lens.

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