JP2011190952A - Regenerator, cold storage type refrigerating machine, cryopump, and refrigerating device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a helium cooling type regenerator capable of further reducing heat loss as compared with a conventional helium cooling type regenerator. <P>SOLUTION: This helium cooling type regenerator stores cold of a working medium flowing in the main flowing direction. The helium cooling type regenerator includes a plurality of first hollow pipes and a plurality of second hollow pipes receiving a helium gas as a cold storage material inside, each hollow pipe is opened at least at its one end, the working medium can be circulated inside of the hollow pipes, the plurality of first hollow pipes and the plurality of second hollow pipes are arranged in the direction approximately vertical to the main flowing direction, and the plurality of first hollow pipes and the plurality of second hollow pipes have parts interweaved to each other to have a network structure. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a regenerator, and more particularly to a regenerator that can be used in a regenerative refrigerator.

  Regenerative refrigerators such as Gifford McMahon (GM) refrigerators, pulse tube refrigerators, Stirling refrigerators, and Solvay refrigerators generate cold temperatures ranging from as low as 100K to as low as 4K (Kelvin). It can be used for cooling a superconducting magnet or a detector, a cryopump or the like.

  For example, in a GM refrigerator, working gas such as helium gas compressed by a compressor is led to a regenerator and precooled by a regenerator material in the regenerator. Further, the working gas generates cold corresponding to expansion work in the expansion chamber, and then passes through the regenerator again and returns to the compressor. At this time, the working gas passes through the regenerator while cooling the regenerator material in the regenerator because of the next induced working gas. By making this process one cycle, cold is periodically generated.

In such a regenerative refrigerator, when it is necessary to generate an extremely low temperature of less than 30K, a magnetic material such as HoCu ₂ is used as the regenerator material of the regenerator as described above.

  Recently, it has been studied to use helium gas as a regenerator material for a regenerator (such a regenerator is also referred to as a helium-cooled regenerator). For example, Patent Document 1 discloses that a large number of thermally conductive capsules filled with helium gas are used as a regenerator material for a regenerator.

FIG. 1 shows the change in specific heat between the helium gas and the HoCu ₂ magnetic material at each temperature. As is clear from this figure, the specific heat of the helium gas having a pressure of about 1.5 MPa exceeds the specific heat of the HoCu ₂ magnetic material in an extremely low temperature range of about 10 K. Therefore, in such a temperature range, it becomes possible to perform more efficient heat exchange by using helium gas instead of the HoCu ₂ magnetic material.

  However, in practice, it is not easy to manufacture a capsule as in Patent Document 1. For example, in order for the helium gas in the capsule to have a pressure of about 1.5 MPa at 4K, a pressure of about 160 MPa is required at room temperature. Such a capsule filled with high-pressure helium cannot be easily manufactured. Moreover, if it is going to form the capsule which can endure such a high voltage | pressure, the thickness of a capsule will become thick inevitably, and thermal conductivity will fall.

  For this reason, it has been proposed to arrange elongated rod-shaped containers inside the regenerator along the temperature gradient direction of the regenerator, that is, from the high temperature end to the low temperature end (Patent Document 2). These containers have holes at the end on the low temperature side. Therefore, a helium-cooled regenerator can be configured by circulating the helium gas used as the working gas of the apparatus through the hole.

JP-A-11-37582 Japanese Patent No. 2650437

  In the helium-cooled regenerator described in Patent Document 2, it is necessary to arrange elongated rod-shaped containers along the temperature gradient direction of the regenerator. However, in such an arrangement, intrusion of heat from the high temperature side to the low temperature side tends to occur in the helium gas in each container. For this reason, heat conduction tends to occur along the temperature gradient direction of the regenerator, and there is a problem that heat loss of the regenerator increases.

  The present invention has been made in view of such a background, and an object of the present invention is to provide a helium-cooled regenerator with less heat loss than a conventional helium-cooled regenerator. To do. Moreover, it aims at providing the various apparatuses which have such a cool storage.

The present invention is a helium-cooled regenerator that stores the cold of the working gas flowing in the mainstream direction,
The helium-cooled regenerator has a plurality of first hollow tubes and a plurality of second hollow tubes in which helium gas serving as a regenerator material is accommodated.
Each hollow tube has at least one open end, and the working gas can flow inside the hollow tube,
The plurality of first hollow tubes and the plurality of second hollow tubes are arranged in a direction substantially perpendicular to the main flow direction,
The helium-cooled regenerator, wherein the plurality of first hollow tubes and the plurality of second hollow tubes have portions knitted to each other so as to have a net-like structure. Is provided.

Here, in the helium-cooled regenerator according to the present invention, the plurality of first hollow tubes extend along substantially the same first extending direction and / or the plurality of second tubes. The hollow tube extends along substantially the same second extension direction;
The first stretching direction and the second stretching direction may be different.

  In the helium-cooled regenerator according to the present invention, the first stretching direction may be substantially orthogonal to the second stretching direction.

  Further, in the helium-cooled regenerator according to the present invention, the portions knitted with respect to each other so as to have the net-like structure may be rolled in the mainstream direction.

  In addition, the helium-cooled regenerator according to the present invention may have a repetitive structure of portions knitted to each other so as to form the net-like structure along the main flow direction.

The helium-cooled regenerator according to the present invention is
Furthermore, it has a plurality of third hollow tubes in which helium gas serving as a cold storage material is accommodated,
Each third hollow tube is open at least at one end, and the working gas can flow inside the third hollow tube.
The plurality of third hollow tubes may have a portion knitted with respect to the plurality of first hollow tubes and / or the plurality of second hollow tubes.

  In the helium-cooled regenerator according to the present invention, at least one of the hollow tubes may be open at both ends.

  In the helium-cooled regenerator according to the present invention, at least one of the hollow tubes may have a flow path resistance part at an open end.

Moreover, in the present invention, a regenerative refrigerator having a regenerator as described above,
The regenerative refrigerator is provided with any one of a GM refrigerator, a pulse tube refrigerator, a Stirling refrigerator, and a Solvay refrigerator.

  Moreover, in this invention, a cryopump provided with such a cool storage type refrigerator is provided.

  In the regenerative refrigerator according to the present invention, the object to be cooled may be any one of a superconducting magnet, an X-ray detector, and an infrared detector.

Moreover, in the present invention, a refrigerating apparatus precooled by a regenerative refrigerator as described above,
A refrigeration apparatus having a dilution refrigerator, a magnetic refrigerator, a He3 refrigerator, or a JT refrigerator is provided.

  According to the present invention, it is possible to provide a helium-cooled regenerator with less heat loss compared to a conventional helium-cooled regenerator. Moreover, it becomes possible to provide various apparatuses having such a regenerator.

Is a graph showing changes in specific heat of helium gas and HoCu ₂ magnetic material at each temperature. It is the figure which showed schematically the structure of the general GM refrigerator. It is the figure which showed schematically an example of the conventional helium cooling type regenerator. 1 is a cross-sectional view schematically showing an example of a helium-cooled regenerator according to the present invention. It is the figure which showed typically an example of the hollow tube which comprises the helium cooling type regenerator by this invention. It is the figure which showed the arrangement | sequence of the hollow tube arrange | positioned on each surface in the helium cooling type regenerator by this invention. It is sectional drawing which showed schematically another example of the hollow tube which comprises the helium cooling type regenerator by this invention. It is sectional drawing which showed schematically another example of the hollow tube which comprises the helium cooling type regenerator by this invention. It is the figure which showed roughly the example of 1 structure of the pulse tube refrigerator which has the cool storage by this invention. It is the figure which showed roughly the example of 1 structure of the Stirling refrigerator which has the cool storage by this invention. It is the figure which showed roughly the example of 1 structure of the Solvay refrigerator which has the regenerator by this invention. It is the figure which showed roughly the example of 1 structure of the cryopump which has a cool storage device by this invention. It is the figure which showed roughly the example of 1 structure of the superconducting magnet apparatus which has the superconducting magnet cooled by the cool storage type refrigerator by this invention. It is the figure which showed roughly the example of 1 structure of the radiation detection apparatus which has a radiation detector cooled with the cool storage type refrigerator by this invention. It is the figure which showed roughly the example of 1 structure of the dilution refrigerator which has a cool storage type refrigerator by this invention. It is the figure which showed roughly the example of 1 structure of the magnetic refrigerator pre-cooled by the cool storage type refrigerator by this invention. It is the figure which showed roughly the example of 1 structure of the He3 refrigerator pre-cooled by the cool storage type refrigerator by this invention. It is the figure which showed roughly the example of 1 structure of the JT refrigerator pre-cooled by the cool storage type refrigerator by this invention.

  Hereinafter, the present invention will be described with reference to the drawings.

  First, in order to better understand the present invention, the configuration of a general regenerative refrigerator having a helium-cooled regenerator will be briefly described.

  FIG. 2 shows a schematic configuration diagram of a GM (Gifford McMahon) refrigerator as an example of a regenerative refrigerator.

  The GM refrigerator 1 includes a gas compressor 3 and a two-stage cold head 10 that functions as a refrigerator. The cold head 10 includes a first stage cooling unit 15 and a second stage cooling unit 50, and these cooling units are connected to the flange 12 so as to be coaxial.

  The first stage cooling unit 15 includes a hollow first stage cylinder 20, a first stage displacer 22 provided in the first stage cylinder 20 so as to be capable of reciprocating in the axial direction, and a first stage displacer 22. A first stage regenerator 30 filled in the first stage cylinder 20, a first stage expansion chamber 31 provided inside the first stage cylinder 20 on the low temperature end 23 b side, the volume of which is changed by the reciprocating motion of the first stage displacer 22, A first stage cooling stage 35 provided near the low temperature end 23b of the first stage cylinder 20; A first stage seal 39 is provided between the inner wall of the first stage cylinder 20 and the outer wall of the first stage displacer 22.

  A plurality of first-stage high-temperature side flow passages 40-1 are provided at the high-temperature end 23 a of the first-stage cylinder 20 in order to allow helium gas to flow into and out of the first-stage regenerator 30. In addition, a plurality of first-stage low-temperature side flow passages 40-2 are provided at the low-temperature end 23b of the first-stage cylinder 20 so that helium gas flows into and out of the first-stage regenerator 30 and the first-stage expansion chamber 31. It has been.

  The second-stage cooling unit 50 has substantially the same configuration as the first-stage cooling unit 15, and is provided in a hollow second-stage cylinder 51 and reciprocally movable in the second-stage cylinder 51 in the axial direction. The second stage displacer 52, the second stage regenerator 60 filled in the second stage displacer 52, and the low temperature end 53b of the second stage cylinder 51 are provided. Has a second stage expansion chamber 55 that changes, and a second stage cooling stage 85 provided in the vicinity of the low temperature end 53 b of the second stage cylinder 51. A second stage seal 59 is provided between the inner wall of the second stage cylinder 51 and the outer wall of the second stage displacer 52. A second stage high temperature side flow passage 40-3 is provided at the high temperature end 53a of the second stage cylinder 51 in order to allow helium gas to flow into and out of the first stage regenerator 30. In addition, a plurality of second-stage low-temperature side flow passages 54-2 are provided at the low-temperature end 53b of the second-stage cylinder 51 so that helium gas flows into and out of the second-stage expansion chamber 55.

  In the GM refrigerator 1, the high pressure helium gas from the gas compressor 3 is supplied to the first stage cooling unit 15 via the valve 5 and the pipe 7, and the low pressure helium gas is supplied to the first stage cooling unit. 15 is exhausted to the gas compressor 3 through the pipe 7 and the valve 6. The first stage displacer 22 and the second stage displacer 52 are reciprocated by the drive motor 8. In conjunction with this, the valve 5 and the valve 6 are opened and closed, and the timing of intake and exhaust of helium gas is controlled.

  The high temperature end 23a of the first stage cylinder 20 is set to room temperature, for example, and the low temperature end 23b is set to 20K to 40K, for example. The high temperature end 53a of the second stage cylinder 51 is set to 20K to 40K, for example, and the low temperature end 53b is set to 4K, for example.

  Next, operation | movement of the GM refrigerator 1 of such a structure is demonstrated easily.

  First, it is assumed that the first stage displacer 22 and the second stage displacer 52 are at the bottom dead center in the first stage cylinder 20 and the second stage cylinder 51, respectively, with the valve 5 closed and the valve 6 closed. .

  Here, when the valve 5 is opened and the exhaust valve 6 is closed, high-pressure helium gas flows from the gas compressor 3 into the first stage cooling unit 15. The high-pressure helium gas flows into the first stage regenerator 30 from the first stage high temperature side passage 40-1 and is cooled to a predetermined temperature by the regenerator material of the first stage regenerator 30. The cooled helium gas flows into the first stage expansion chamber 31 from the first stage low temperature side flow passage 40-2.

  Part of the high-pressure helium gas that has flowed into the first stage expansion chamber 31 flows into the second stage regenerator 60 from the second stage high temperature side flow passage 40-3. The helium gas is cooled to a lower predetermined temperature by the regenerator material of the second-stage regenerator 60 and flows into the second-stage expansion chamber 55 from the second-stage low-temperature side flow passage 54-2. As a result, the first stage expansion chamber 31 and the second stage expansion chamber 55 are in a high pressure state.

  Next, the first stage displacer 22 and the second stage displacer 52 move to the top dead center, and the valve 5 is closed. Further, the valve 6 is opened. Thereby, the helium gas in the first stage expansion chamber 31 and the second stage expansion chamber 55 changes from the high pressure state to the low pressure state, the volume expands, and the first stage expansion chamber 31 and the second stage expansion chamber 55 enter the first stage expansion chamber 31. Cold weather occurs. As a result, the first stage cooling stage 35 and the second stage cooling stage 85 are cooled.

  Next, the first stage displacer 22 and the second stage displacer 52 are moved toward the bottom dead center. Accordingly, the low-pressure helium gas passes through the reverse route described above, and cools the first-stage regenerator 30 and the second-stage regenerator 60 to the gas compressor 3 via the valve 6 and the pipe 7. Return. Thereafter, the valve 6 is closed.

  By repeating the above operation as one cycle, the first stage cooling stage 35 and the second stage cooling stage 85 absorb heat from the cooling target (not shown) thermally connected to each. Can be cooled.

Here, in the second stage cooling stage 85, for example, when it is necessary to form an extremely low temperature of less than 30K, a magnetic material such as HoCu ₂ is used as the regenerator material of the second stage regenerator 60. .

  Recently, it has also been proposed to use a so-called helium-cooled regenerator using helium gas as a regenerator material for the regenerator.

  FIG. 3 shows the configuration of a conventional helium-cooled regenerator 60A used as the second-stage regenerator 60 of the GM refrigerator 1 as shown in FIG. 2 together with the surrounding members. 3, the same reference numerals as those in FIG. 2 are attached to the same members as those in FIG.

  As shown in FIG. 3, the conventional helium-cooled regenerator 60A is used as the second-stage regenerator in the second-stage displacer 52 shown in FIG.

  The helium-cooled regenerator 60A has a large number of containers 62, each of which has an elongated rod-like shape, along the temperature gradient direction of the regenerator 60A (ie, the second stage cylinder). 51 extends from the high temperature end 53a to the low temperature end 53b). Each container 62 has a hole 65 on the low temperature end side of the second stage cylinder 51. A helium gas 68 that functions as a cold storage material exists in the container 62.

In general, helium gas has a large specific heat in the vicinity of 10K compared to a magnetic material such as HoCu ₂ , and by using helium gas as a regenerator material, a working gas (helium gas) flowing through the regenerator 60A can be increased. It can be efficiently cooled.

  However, in the regenerator 60A having such a configuration, a large number of elongated rod-like containers 62 are arranged along the temperature gradient direction of the regenerator 60A. Therefore, in the helium gas 68 in each container 62, the high temperature end 53a. Intrusion of heat is likely to occur from the low temperature side to the low temperature end 53b side. For this reason, heat conduction tends to occur along the temperature gradient direction of the regenerator 60A, and there is a problem that heat loss of the regenerator 60A increases.

On the other hand, the helium-cooled regenerator according to the present invention is
A plurality of first hollow tubes and a plurality of second hollow tubes in which helium gas serving as a cold storage material is accommodated;
Each hollow tube has at least one open end, and the working gas can flow inside the hollow tube,
The plurality of first hollow tubes and the plurality of second hollow tubes are arranged in a direction substantially perpendicular to the main flow direction,
The plurality of first hollow tubes and the plurality of second hollow tubes have portions knitted to each other so as to form a net-like structure.

  In the configuration of the regenerator according to the present invention, the hollow tubes in which helium gas serving as a regenerator material is accommodated are arranged in a direction perpendicular to the mainstream direction of the regenerator. Further, the first hollow tube and the second hollow tube are knitted to each other so as to have a net-like structure. For this reason, between the 1st hollow tube and the 2nd hollow tube, the contact area which mutually contacts becomes small, and helium gas (cool storage material) in the direction parallel to the mainstream direction in a cool storage device The heat conduction can be suppressed to be small.

  Therefore, according to the present invention, it is possible to provide a helium-cooled regenerator with less heat loss than a conventional helium-cooled regenerator.

  The present invention will be described in detail below.

  FIG. 4 schematically shows an example of a helium-cooled regenerator according to the present invention. Moreover, in FIG. 5, an example of the hollow tube which comprises a cool storage is shown typically.

  As shown in FIG. 4, the helium-cooled regenerator 160 according to the present invention is installed in the second-stage displacer 52 of the GM refrigerator 1 as an example.

  The regenerator 160 is provided with a first flow path 161 and a second flow path 162, and working gas such as helium is, for example, from the first flow path 161 toward the second flow path 162. Or it moves along the mainstream direction P in the opposite direction.

  The regenerator 160 includes a plurality of first hollow tubes 165A, a plurality of second hollow tubes 165B, and a space portion 175 corresponding to a region where these hollow tubes 165A and 165B do not exist. . In the hollow tubes 165A and 165B, helium gas serving as a cold storage material is accommodated. The working gas flows through the space 175.

  The hollow tube 165A extends in a direction substantially perpendicular to the paper surface while meandering in the vertical direction in the figure. On the other hand, the hollow tube 165B extends along the X direction of the drawing while meandering in the vertical direction of the drawing.

  As shown in FIG. 4, the regenerator 160 has a configuration in which a plurality of surfaces 180 (180-1, 180-2, 180-3... 180-n) are stacked along the mainstream direction P. Each surface 180 has an array of hollow tubes 165A, 165B. The surface 180 is a virtual plane in a direction substantially parallel to the main flow direction P.

  As shown in FIG. 5, each hollow tube 165 </ b> A, 165 </ b> B has open both ends 168 a, 168 b and an inner part 173. Therefore, the hollow tube 165 communicates with the space portion 175 via both end portions 168a and 168b. In the figure, the hollow tube 165 has a substantially cylindrical shape, but the shape of the hollow tube 165 is not limited to this. The hollow tube 165 may have a substantially square cross section, a polygonal cross section, or an elliptical cross section.

  FIG. 6 shows an exploded configuration diagram of each surface 180 stacked along the main flow direction P of the working gas. As shown in this figure, the first surface 180-1 has an array of hollow tubes 165A installed in parallel to each other and an array of hollow tubes 165B installed in parallel to each other. The hollow tube 165A is oriented in the first direction, and the hollow tube 165B is oriented in the second direction.

  Here, as shown in FIG. 6, on each surface 180 (180-1, 180-2, 180-3... 180-n), the hollow tube 165A and the hollow tube 165B are meshed with each other. It is arranged in a knitted state. Such a configuration is the same in the following second surfaces 180-2 to 180-n. That is, the regenerator 160 has a repeating structure of the surface 180-1.

  In the regenerator 160 according to the present invention configured by laminating such a network structure, the number of portions where the hollow tubes 165A and 165B are in contact with each other in the main flow direction P is extremely small. Therefore, heat transfer from the high temperature end side to the low temperature end side of the cold storage material via the hollow tubes 165A and 165B is significantly suppressed. As a result, the regenerator 160 with less heat loss is obtained.

  Here, in the example of FIG. 6, the orientation direction of the hollow tubes 165A and 165B on each surface 180 is substantially equal to the orientation direction of the hollow tubes 165A and 165B on the other surface 180. Furthermore, in the example of FIG. 6, the first direction (the extending direction of the hollow tube 165A) and the second direction (the extending direction of the hollow tube 165B) are substantially orthogonal.

  However, the configuration of FIG. 6 is an example, and the orientation direction of the hollow tubes 165A and 165B may be different for each surface 180. Further, on one surface 180, the hollow tubes 165A are not necessarily arranged in the same direction. Similarly, the hollow tubes 165B are not necessarily arranged in the same direction.

  In the example of FIG. 6, the network structure is configured by weaving the hollow tube 165B into the hollow tube 165A. However, the network structure may further include third, fourth,..., Nth hollow tubes knitted with respect to the hollow tubes 165A and / or the hollow tubes 165B.

  In FIG. 7, another structure of the hollow tube used for the regenerator 160 by this invention is shown. In the example of this figure, the hollow tube 165-2 has “flow path resistance portions” 170 at both ends 168a and 168b. Here, the “flow path resistance portion” is a general term for a portion having a function as a barrier when the working gas flows into the hollow tube as a cold storage material or when the cold storage material flows out from the hollow tube as the working gas. is there. For example, when a part of a hollow tube is narrower than other parts, such a place becomes a “flow path resistance part”.

  For example, the maximum dimension (for example, diameter) of the flow path resistance portion in the direction perpendicular to the extending axis of the hollow tube is 1 with respect to the maximum dimension (for example, diameter) in the same direction of other portions of the hollow tube. It may be about / 2 to 1/10. For example, in the example shown in FIG. 7, the maximum dimension (for example, diameter) of the flow path resistance unit 170 in the direction perpendicular to the extending axes of the both end portions 168a and 168b is the same as that of the inner portion 173 of the hollow tube 165-2. It is about 1/4 with respect to the maximum dimension (for example, diameter) in the direction.

  Such a flow path resistance unit 170 functions as a resistance to the inflow of the working gas into the hollow tube 165-2 and the outflow from the hollow tube 165-2. Therefore, in the regenerator constituted by the hollow tube 165-2, it is possible to prevent the working gas from easily flowing into the hollow tube or the helium gas inside the hollow tube from flowing out easily. Thereby, the pressure fluctuation of helium gas and the temperature fluctuation caused thereby can be suppressed.

  Although depending on the configuration aspect of the flow path resistance unit 170, in the regenerator using the hollow tube 165-2, when the operation of the regenerative refrigerator (for example, the GM refrigerator) is stabilized, the helium gas in the hollow tube is reduced. It has been estimated that the operating pressure is about 0.01 MPa to 5.0 MPa. Further, it has been estimated that the amplitude of the pressure fluctuation of the helium gas in the hollow tube is sufficiently smaller (for example, 1/10 or less) than the amplitude of the pressure fluctuation of the working gas.

  In the example of FIG. 7, the flow path resistance unit 170 is formed only at both end portions 168a and 168b of the hollow tube 165-2. However, one or more flow path resistance units may be provided on the inner side 173 side of the hollow tube 165-2.

  FIG. 8 shows another configuration of the hollow tube used in the regenerator 160 according to the present invention. In the example of this figure, the hollow tube 165-3 is sealed at one end 168b. Therefore, in the case of this hollow tube 165-3, helium gas is communicated with the space 175 via the end 168a. In the example of FIG. 8, the hollow tube 165-3 has a flow path resistance portion 170 at one end 168a. However, this is not always necessary. In addition, one or more flow path resistance units may be provided on the inner side 173 side of the hollow tube 165-3.

  Further, such a network structure may be rolled from the main flow direction P side of the working gas. Thereby, each of the first hollow tube 165A and the second hollow tube 165B constituting the network structure is flattened. In this case, the height of the network structure is reduced, more surfaces 180 can be stacked in the stacking direction, and a more efficient regenerator can be configured.

In the above description, the configuration and the effect of the present invention have been described by taking as an example the case where the regenerator material is composed of only helium gas in the regenerator. However, in the present invention, the regenerator may be composed of a plurality of regenerator materials. For example, in one regenerator, HoCu ₂ magnetic material may be used on the high temperature side, and helium may be used on the medium / low temperature side. Furthermore, a magnetic material such as GdO ₂ S ₂ may be used on the lower temperature side as the third cold storage material.

(Refrigerator having a regenerator according to the present invention)
The regenerator 160 according to the present invention can be applied to various regenerative refrigerators such as a pulse tube refrigerator, a Stirling refrigerator, and a Solvay refrigerator in addition to the GM refrigerator 1. Hereinafter, an application example to such a regenerative refrigerator will be briefly described.

(Pulse tube refrigerator)
FIG. 9 schematically shows a configuration example of a pulse tube refrigerator having a regenerator according to the present invention.

  As shown in FIG. 9, the pulse tube refrigerator 200 is a two-stage pulse tube refrigerator. The pulse tube refrigerator 200 includes a gas compressor 211, a housing part 210, and a cold head part 220 connected to the housing part 210 via a flange 221.

  The gas compressor 211 has a role of causing a working gas such as helium gas to flow into the housing part 210 and the cold head part 220 at a high pressure in a predetermined cycle, or to discharge the gas at a low pressure.

  The housing part 210 includes a housing 205, and the housing 205 accommodates a first stage reservoir 215A, a second stage reservoir 215B, heat exchangers 218a and 219a, a valve 212, a valve 213, an orifice 217, and the like. Yes. The valve 212 and the valve 213 are connected to the gas compressor 211 via the gas flow path 214.

  The cold head unit 220 includes a first-stage regenerator tube 231, a first-stage pulse tube 236, a first-stage cooling stage 230, a second-stage regenerator tube 241, a second-stage pulse tube 246 and a second-stage fixed to the flange 221. A cooling stage 240 is included.

  The first-stage regenerator tube 231 includes, for example, a stainless steel hollow cylinder 232 and a regenerator 233 installed therein. The first stage pulse tube 236 is constituted by a hollow cylinder 237 made of, for example, stainless steel. The high temperature ends 232 a and 237 a of these cylinders 232 and 237 are in contact with and fixed to the flange 221, and the low temperature ends 232 b and 237 b of these cylinders 232 and 237 are in contact with and fixed to the first stage cooling stage 230. A gas flow passage 238 is formed in the first stage cooling stage 230, and a low temperature end 237b of the first stage pulse tube 236 and a low temperature end 232b of the first stage regenerator tube 231 are connected to the heat exchanger 218b and They are connected via a gas flow path 238. The first cooling stage 230 is thermally and mechanically connected to an object to be cooled (not shown), and cold is taken out to the object to be cooled.

  The second-stage regenerator tube 241 includes, for example, a stainless steel hollow cylinder 242 and a regenerator 260 installed therein. The second stage pulse tube 246 is constituted by a hollow cylinder 247 made of, for example, stainless steel. The high temperature end 242 a of the cylinder 242 of the second stage regenerator tube 241 is in contact with and fixed to the first cooling stage 230, and the low temperature end 242 b is in contact with and fixed to the second stage cooling stage 240. The high temperature end 247 a of the cylinder 247 of the second stage pulse tube 246 is in contact with and fixed to the flange 221, and the low temperature end 247 b is in contact with and fixed to the second stage cooling stage 240. The second stage cooling stage 240 has a gas flow passage 248 formed therein, and the low temperature end 247b of the second stage pulse tube 246 and the low temperature end 242b of the second stage regenerator tube 241 are connected to the heat exchanger 219b. And a gas flow path 248. The second stage cooling stage 240 is thermally and mechanically connected to an object to be cooled (not shown), and cold is taken out to the object to be cooled.

  In the pulse tube refrigerator 200, high-pressure working gas is supplied from the gas compressor 211 to the first-stage regenerator tube 231 via the valve 212 and the gas flow path 214, and low-pressure operation is performed from the first-stage regenerator tube 231. The gas is exhausted to the gas compressor 211 through the gas flow path 214 and the valve 213. A first stage reservoir 215A is connected to the high temperature end 237a of the first stage pulse tube 236 via a heat exchanger 218a and an orifice 217. The second stage reservoir 215B is connected to the high temperature end 247a of the second stage pulse tube 246 via a heat exchanger 219a and an orifice 217. The orifice 217 serves to adjust the phase difference between the pressure fluctuation of the working gas that changes periodically and the volume change in the first-stage pulse tube 236 and the second-stage pulse tube 246.

  Next, operation | movement of the pulse tube refrigerator 200 comprised in this way is demonstrated. First, when the valve 212 is opened and the valve 213 is closed, high-pressure working gas flows from the gas compressor 211 into the first-stage regenerator tube 231. The working gas that has flowed into the first-stage regenerator tube 231 is cooled by the regenerator 233 and lowered in temperature, while passing through the gas flow path 238 from the low-temperature end 232b of the first-stage regenerator tube 231 and the first-stage pulse tube 236. Flows into the interior. At this time, the low-pressure working gas previously present in the first stage pulse tube 236 is compressed by the high-pressure working gas that has flowed. Thereby, the pressure of the working gas in the first stage pulse tube 236 becomes higher than the pressure in the first stage reservoir 215A, and the working gas passes through the orifice 217 and the gas flow path 216 and passes through the first stage reservoir 215A. Flow into.

  A part of the high-pressure working gas cooled by the first stage regenerator tube 231 also flows into the second stage regenerator tube 241. The working gas is further cooled by the regenerator 260 and lowered in temperature, and then flows from the low temperature end 242b of the second-stage regenerator tube 241 through the gas flow passage 248 into the second-stage pulse tube 246. At this time, the low-pressure working gas previously present in the second-stage pulse tube 246 is compressed by the high-pressure working gas that has flowed. As a result, the pressure of the working gas in the second stage pulse tube 246 becomes higher than the pressure in the second stage reservoir 215B, and the working gas passes through the orifice 217 and the gas flow path 216 and passes through the second stage reservoir 215B. Flow into.

  Next, when the valve 212 is closed and the valve 213 is opened, the working gas in the first-stage pulse tube 236 and the second-stage pulse tube 246 cools the regenerators 233 and 260, respectively, while the first-stage regenerator tube 231 and the second stage regenerator 241. The working gas that has passed through the second-stage regenerator tube 241 further passes through the first-stage regenerator tube 231. Thereafter, the working gas passes through the exhaust valve 213 from the high temperature end 232a of the first stage regenerator 231 and returns to the gas compressor 211. Here, the first-stage pulse tube 236 and the second-stage pulse tube 246 are connected to the first-stage reservoir 215A and the second-stage reservoir 215B via the orifice 217, respectively. The phase and the phase of the volume change of the working gas change with a constant phase difference. Due to this phase difference, cold occurs due to the expansion of the working gas at the cold end 237b of the first stage pulse tube 236 and the cold end 247b of the second stage pulse tube 246. The pulse tube refrigerator 200 functions as a refrigerator by repeating the above operation.

  Here, the regenerator according to the present invention as described above is used for the regenerator 260 in the second-stage regenerator tube 241 of the pulse tube refrigerator 200. Therefore, also in this pulse tube refrigerator 200, heat transfer from the high temperature end side to the low temperature end side of the regenerator material is significantly suppressed in the regenerator 260 in the second-stage regenerator tube 241. As a result, the regenerator 260 with less heat loss is obtained.

(Stirling refrigerator)
FIG. 10 schematically shows a configuration example of a Stirling refrigerator having a regenerator according to the present invention.

  As shown in FIG. 10, the Stirling refrigerator 300 includes a gas compressor 310 and a cold head 320 that sucks and exhausts the working gas from the gas compressor 310 via the capillary tube 301 and functions as a refrigerator.

  The gas compressor 310 includes a yoke 311, a pressure holding container 312, and a compression piston 313. The yoke 311 includes a cylindrical groove 318 serving as a cylinder of the compression piston 313, an annular groove 319 into which the movable coil 315 fixed to the compression piston 313 is inserted, and an annular permanent groove embedded in the outer inner wall of the groove 319. And a magnet 316. Although not shown in the drawing, an external power source is connected to the movable coil 315.

  The pressure holding container 312 is fixed to the yoke 311. In addition, a pressure holding space in which the compression piston 313 is accommodated and filled with helium gas is formed inside the pressure holding container 312. A piston control spring 314 is provided so as to connect the compression piston 313 and the pressure holding container 312, thereby preventing the compression piston 313 from contacting the inner wall of the pressure holding container 312.

  The cold head 320 includes a housing part 321, a cylinder 322 connected to the housing part 321, and a cooling stage 328. A displacer 323 filled with a regenerator 360 is provided inside the cylinder 322, and an expansion chamber 325 is installed at the low temperature end 322 b of the cylinder 322. The cold head 320 is provided with a displacer control spring 324 for keeping the displacer 323 at a neutral point.

  The temperature of the high temperature end 322a of the cylinder 322 is preferably set to a temperature higher than 10K, and the temperature of the low temperature end 322b of the cylinder 322 is preferably set to a temperature lower than 10K.

  Next, the operation of the Stirling refrigerator 300 will be briefly described.

  In the Stirling refrigerator 300, when an alternating current is supplied from an external power source to the movable coil 315, the compression piston 313 reciprocates in the horizontal direction of the paper surface. As a result, in the region formed by the space of the groove 319, the space of the expansion chamber 325, and the space through which the gas connecting them circulates, the isothermal compression, isovolume transfer, isothermal expansion, and isovolume transfer of helium gas are performed. A cycle of strokes is repeated. Thereby, cold is generated in the expansion chamber 325. This cold is transmitted to the object to be cooled via the cooling stage 328, and the object to be cooled can be cooled.

  Here, the regenerator 360 of the Stirling refrigerator 300 uses the regenerator according to the present invention as described above. Therefore, also in this Stirling refrigerator 300, in the regenerator 360 in the displacer 323, heat transfer from the high temperature end side to the low temperature end side of the regenerator material is significantly suppressed. As a result, the regenerator 360 with less heat loss is obtained.

(Solvay refrigerator)
FIG. 11 schematically shows a configuration example of a Solvay refrigerator having a regenerator according to the present invention.

  As shown in FIG. 11, the Solvay refrigerator 400 includes a gas compressor 411, a regenerator tube 431, a cylinder 436, a cooling stage 430, and a buffer tank 415.

  Valves 412 and 413 are installed in the gas compressor 411 via a gas pipe 414. The gas compressor 411 has a role of causing a working gas such as helium gas to flow into the regenerator tube 431 at a high pressure or exhaust at a low pressure in a predetermined cycle.

  The regenerator tube 431 has a high temperature end 432 a and a low temperature end 432 b, and a regenerator 460 is installed inside the regenerator tube 431. The high temperature end 432 a of the regenerator tube 431 is connected to the gas compressor 411 via the gas pipe 414. The low temperature end 432 b of the regenerator tube 431 is in contact with and fixed to the cooling stage 430.

  The cylinder 436 has a high temperature end 437 a and a low temperature end 437 b, and a displacer 452 is installed inside the cylinder 436. A high temperature end 437a of the cylinder 436 is connected to the buffer tank 415 via a pipe 416 provided with an orifice 417. The low temperature end 437 b of the cylinder 436 is in contact with and fixed to the cooling stage 430. The cylinder 436 is connected to the regenerator tube 431 through a flow passage 438 provided in the cooling stage 430.

  Since the basic operation of the Solvay refrigerator 400 is the same as that of the above-described pulse tube refrigerator 200, the operation will not be described here.

  The regenerator 460 of the Solvay refrigerator 400 uses the regenerator according to the present invention as described above. Therefore, also in this Solvay refrigerator 400, in the regenerator 460, heat transfer from the high temperature end side to the low temperature end side of the regenerator material is significantly suppressed. As a result, the regenerator 460 with less heat loss is obtained.

(Cryopump)
The regenerative refrigerator equipped with the regenerator according to the present invention as described above can also be used as a cryopump.

  FIG. 12 schematically shows a configuration example of such a cryopump 500.

  The cryopump 500 includes a main body portion 551 and a refrigerator unit 560 that are connected to a vacuum tank to be exhausted via an intake port.

  The main body portion 551 has a vacuum container 552, in which a shield portion 554, a cold portion of a refrigerator 560 described later, a baffle 555, a cryopanel 556, and the like are arranged. Although not shown in the figure, the vacuum vessel 552 is provided with a thermometer for measuring the temperature of the shield portion 554, the baffle 555, the cryopanel 556, and the like. In addition, the vacuum vessel 552 is provided with a safety valve or the like for allowing gas to escape outside the vacuum vessel 552 when the internal pressure of the vacuum vessel 552 rises excessively.

  The refrigerator unit 560 has a configuration similar to that of the GM refrigerator 1 described above. That is, the refrigerator unit 560 includes a compressor 561 that generates compressed working gas and a cold unit of the GM refrigerator 563. The cold part includes a first stage cooling part 570, a second stage cooling part 580 and the like.

  The first stage cooling unit 570 includes a cylinder 571. Although not shown in the drawing, the cylinder 571 is provided with a first expansion chamber and a first regenerator for adiabatically expanding the working gas supplied from the compressor 561 via the gas flow path 562. The second stage cooling unit 580 has a cylinder 581. A second expansion chamber (not shown) and a second regenerator 590 for adiabatically expanding the working gas supplied from the compressor 561 via the gas flow path 562 are provided.

  A first-stage cooling stage 575 that can be cooled to 80K or less is provided at the tip of the first-stage cooling unit 570. A second stage cooling stage 585 that can be cooled to 10K or less, for example, 4K, is provided at the tip of the second stage cooling unit 580.

  The shield part 554 has a cylindrical part 554a and a flange 554b. The flange 554b is fixed to the first cooling stage 575. Thereby, the flange 554b is in thermal contact with the first cooling stage 575, and the flange 554b and the cylindrical portion 554a are cooled to a temperature equivalent to that of the first cooling stage 575.

The baffle 555 is disposed on the intake port side of the shield part 554. The baffle 555 has an upper end and a lower end opened. The baffle 555 is formed of a hollow trapezoidal member, and a plurality of trapezoidal members having different inner diameters are combined. Further, the baffle 555 is combined so as to be in thermal contact with the shield portion 554 by a beam material (not shown) or the like. Since the shield part 554 is in thermal contact with the first cooling stage 575, the cold of the first cooling stage 575 is transmitted to the baffle 555, and the baffle 555 is cooled to about 80K, for example. The baffle 555 has a role of adjusting the direction of the gas flowing inside the main body 551 and cooling the gas. The baffle 555 condenses water vapor contained in the gas and reduces heat radiation to the cryopanel 556.

  The top of the cryopanel 556 is fixed on the second cooling stage 585, and a plurality of metal plates formed in a cap shape are spaced apart from each other on the top itself and the cylindrical portion extending downward from the top. Arranged. Since the top of the cryopanel 556 is in thermal contact with the second cooling stage 585, the cryopanel 556 is maintained at a temperature substantially equal to that of the second cooling stage 585.

  An adsorption panel is formed on the back surface of the cryopanel 556. An adsorbent such as activated carbon is fixed to the adsorption panel with an epoxy resin having good thermal conductivity. The cryopanel 556 has a function of adsorbing hydrogen, neon, helium or the like that cannot be condensed. Note that the portion where the suction panel is formed is not limited to the back surface of the cryopanel 556.

  In the cryopump 500, the regenerator according to the present invention as described above is used for the regenerator 590 of the second stage cooling unit 580. Therefore, also in this cryopump 500, the above-described effects of the present invention can be obtained.

  Here, the regenerative refrigerator having the regenerator according to the present invention can cool various objects to be cooled. Such an object to be cooled may be a radiation detector such as a superconducting magnet, X-rays or infrared rays. In addition, such an object to be cooled may be a dilution refrigerator, a magnetic refrigerator, a He3 refrigerator, a JT refrigerator, or the like that is pre-cooled by a regenerative refrigerator. Each configuration will be briefly described below.

(Superconducting magnet device)
FIG. 13 schematically shows a configuration example of a superconducting magnet device 600 having a superconducting magnet cooled by a regenerative refrigerator.

  The superconducting magnet device 600 includes a vacuum vessel 651, a regenerative refrigerator 670, and a superconducting magnet 660 that applies a magnetic field to the strong magnetic field space 661. The regenerative refrigerator 670 is installed in a state where the cold head is suspended from a top plate 652 installed in the vacuum vessel 651.

  The regenerator 670 may be a two-stage GM refrigerator. In the example of FIG. 13, the regenerator 670 has the same configuration as the GM refrigerator 1 shown in FIG. Therefore, detailed description of the configuration of the regenerative refrigerator 670 is omitted.

  The first cooling stage 685 of the regenerator 670 is thermally and mechanically connected to the oxide superconducting current lead 658 that supplies current to the superconducting coil 655 of the superconducting magnet 660 by the heat shield plate 653. The second stage cooling stage 695 of the regenerative refrigerator 670 is thermally and mechanically connected to the coil cooling stage 654 of the superconducting coil 655. The coil cooling stage 654 is in contact with the superconducting coil 655, and the superconducting coil 655 is cooled to a superconducting critical temperature or lower by the cooling from the second stage cooling stage 695.

  Note that the regenerative refrigerator 670 may be a pulse tube refrigerator, a Stirling refrigerator, a Solvay refrigerator, or the like instead of the GM refrigerator.

(Radiation detector)
FIG. 14 schematically shows a configuration example of a radiation detection apparatus having a radiation detector cooled by a regenerative refrigerator.

  The radiation detection device 700 includes a compressor 710, a regenerator 750, a radiation detector 780 fixed in contact with the cooling stage 728 of the regenerator 750, and signal processing for processing signals from the radiation detector 780. Part 790.

  The compressor 710 and the regenerative refrigerator 750 have the same configuration as the Stirling refrigerator 300 shown in FIG. Therefore, detailed description of the regenerative refrigerator 750 is omitted.

  The radiation detector 780 has various semiconductor detection elements. For example, when the radiation detector 780 includes an X-ray detection element (for example, Si detection element, Ge detection element), such a radiation detection apparatus 700 is an X-ray detection apparatus that detects X-rays. In addition, when the radiation detector 780 includes an infrared detection element (for example, an InGaAs PIN photodiode), such a radiation detection device 700 is an infrared detection device that detects infrared rays. A known signal processing circuit can be used for the signal processing unit 790, and the signal processing unit 790 is appropriately selected according to the type of the radiation detector 780.

  By cooling such a semiconductor detection element of the radiation detector 780 by the cold generated by the refrigerator 750, noise is reduced and the signal-to-noise ratio (SN ratio) is improved.

(Dilution refrigerator)
In FIG. 15, one structural example of the dilution refrigerator apparatus which has a cool storage type refrigerator is shown roughly.

  The dilution refrigerator apparatus 800 includes a pump 801 that circulates helium gas, a regenerative refrigerator (GM refrigerator) 822, and a dilution refrigerator portion 850. The regenerative refrigerator (GM refrigerator) 822 has the regenerator according to the present invention.

  The pump 801 is connected to the forward path side flow path 802 to which the trap 821 is connected and the return path side flow path 803. Therefore, the 3He gas (normally room temperature) delivered from the pump 801 passes through the trap 821, passes through the forward flow path 802, and returns to the pump 801 through the return flow path 803.

  The dilution refrigerator portion 850 includes a first heat transfer unit 824a, a fractionation chamber 806, a second heat transfer unit 809, and a mixing chamber 810.

  The fractionation chamber 806 has a role of selectively extracting 3He from a mixed solution of 3He-4He using a difference in saturated vapor pressure between 3He and 4He. The fractionation chamber 806 is held at 0.5K to 0.7K.

  The mixing chamber 810 has a concentrated phase of 100% 3He and a dilute phase of 4He-6.4% 3He in which 3He is dissolved in 4He. The two phases are separated from each other, and due to the difference in density, the upper phase is a concentrated phase (3He liquid) and the lower phase is a dilute phase (4He-6.4% 3He liquid).

  The cold head 822b of the GM refrigerator 822 is thermally connected to the first heat transfer section 824a of the dilution refrigerator section 850 by a heat transfer plate 823 connected to the cooling head 822a. Therefore, the chill of about 4K generated in the GM refrigerator 822 is transmitted to the first heat transfer unit 824a via the cooling head 822a to the heat transfer plate 823.

  The cold head 822 b and the dilution refrigerator part 850 of the GM refrigerator 822 are accommodated in a vacuum vessel 825.

  The forward-side flow path 802 is provided in the first heat exchanger 824 to the condenser 804 to the impedance 805 to the fractionation chamber 806 provided in the first heat transfer part 824a of the pump 801 to the trap 821 to the dilution refrigerator part 850. The second heat exchanger 807 to the second heat transfer unit 809 to the mixing chamber 810 are configured.

  On the other hand, the return-side flow path 803 includes a mixing chamber 810, a second heat transfer unit 809, a fractionation chamber 806, a pipe 803 a, and a pump 801. The pipe 803a accommodates the capacitors 804 to impedance 805 in the forward-side flow path 802.

  Next, the operation of the dilution refrigerator apparatus 800 configured as described above will be described.

  The 3He gas sent out by the pump 801 is sent into the forward flow path 802 via the trap 821. As described above, the first heat transfer unit 824a is cooled to about 4K by the GM refrigerator 822. For this reason, the 3He gas is pre-cooled through the first heat exchanger 824 when passing through the first heat transfer section 824a. Further, the precooled 3He gas passes through the condenser 804 to impedance 805 and is condensed / liquefied.

  The liquefied 3He is further sent to the fractionation chamber 806, and heat exchanged with the liquid stored in the fractionation chamber 806 by the second heat exchanger 807. 3He is cooled to 0.5K to 0.7K.

  Further, the liquid 3He is cooled to about 100 mK through the second heat transfer section 808 and sent to the mixing chamber 810.

  As described above, the mixing chamber 810 contains a concentrated phase of 100% 3He (upper side) and a diluted phase of 4He-6.4% 3He (lower side) in which 3He is dissolved in 4He. When 3He is introduced into the concentrated phase, heat absorption occurs when 3He dissolves into the dilute phase (lower phase). Thereby, an ultra-low temperature of several tens mK is generated in the mixing chamber 810.

  In the fractionation chamber 806, 3He moves from the lean phase in the mixing chamber 810 toward the fractionation chamber 806 in order to maintain the 3He concentration in the lean phase. Along with this, in the mixing chamber 810, 3He is continuously dissolved from the concentrated phase of 100% 3He into the diluted phase.

  Thereafter, the 3He gas passes from the return-side flow path 803, that is, the fractionation chamber 806, through the pipe 803a, and is finally collected by the pump 801. In the middle, 3He gas is heat-exchanged with 3He passing through the forward path side flow path 802 in the second heat transfer section 809 and the pipe 803a.

(Magnetic refrigerator)
In FIG. 16, one structural example of the magnetic refrigerator cooled with a cool storage type refrigerator is shown roughly.

  The magnetic refrigerator 900 communicates with the installation space of the work substance 902 via a heat pipe 903, a superconducting magnet 901 that is pulse-excited, a working substance 902 installed in a magnetic field space formed by the superconducting magnet 901, and the like. The liquid helium tank 904 is provided.

  The magnetic refrigerator 900 has a valve mechanism including a gas injection valve 906, a gas return valve 907, a bypass valve 908, and the like, and a precooling refrigerator such as a GM refrigerator via this valve mechanism. 905 is connected.

  In such a magnetic refrigerator 900, when the superconducting magnet 901 is excited and a magnetic field is applied to the work substance 902, the temperature of the work substance 902 rises. At this time, when the bypass valve 908 is closed and the gas injection valve 906 and the gas return valve 907 are opened, the cooling gas flows from the precooling refrigerator 905 to the high-temperature waste heat unit 909, and the heat of the work substance 902 is recovered.

  Thereafter, the gas injection valve 906 and the gas return valve 907 are closed, the bypass valve 908 is opened, and the excitation of the superconducting magnet is stopped. Thereby, the temperature of the working substance 902 is lowered. Further, when the temperature of the working material 902 becomes lower than the liquefaction point of helium, helium is condensed on the surface of the working material 902.

  The liquid helium generated by this condensation passes through the heat pipe 903 and falls into the liquid helium tank 904. Accordingly, the helium gas in the liquid helium tank 904 is sent to the working material 902 storage space.

  In the magnetic refrigerator 900, helium liquefaction and cooling can be performed by repeating such steps.

(He3 refrigerator)
FIG. 17 schematically shows a configuration example of the He3 refrigerator apparatus.

  The He3 refrigerator apparatus 1000 includes a regenerative refrigerator part 1006 and a He3 refrigerator part 1010.

  In addition, the He3 refrigerator apparatus 1000 includes a first heat shield 1001 surrounding the liquid He4 storage container 1002. A superconducting magnet 1020 is disposed in the container 1002. A second heat shield 1004 is disposed so as to surround the first heat shield 1001. These shields 1001 and 1004 and the container 1002 are accommodated in the outer vacuum chamber 1005 and arranged around the central hole 1003. A sample is disposed inside the central hole 1003.

The regenerative refrigerator unit 1006 is constituted by a regenerative refrigerator such as a GM refrigerator, for example.
The regenerative refrigerator portion 1006 is attached to the first turret 1007 of the outer vacuum chamber 1005. The regenerative refrigerator portion 1006 includes a first cooling stage 1008 coupled to transmit heat to the second heat shield 1004 and a second cooling coupled to transmit heat to the first heat shield 1001. And a stage 1009.

  The first cooling stage 1008 of the regenerator unit 1006 maintains the second shield 1004 at a temperature of about 50K, and the second cooling stage 1009 maintains the first heat shield 1001 at about 5K.

  The He3 refrigerator portion 1010 is attached to the second turret 1011 of the outer vacuum chamber 1005. The He3 refrigerator unit 1010 has a cooling stage 1012 arranged inside the container 1002. The first portion 1013 of the He3 refrigerator portion 1010 has a higher temperature than the cooling stage 1012 and is thermally coupled to the first heat shield 1001. The second portion 1014 is hotter than the first portion 1013 and is thermally coupled to the second heat shield 1004.

  The He3 refrigerator section 1010 is driven by a He3 compressor (not shown) that operates at room temperature.

  The second cooling stage 1009 is used to precool the He3 refrigerator part 1010 by heat transfer to the first part 1013 of the He3 refrigerator part 1010. Further, preliminary cooling may be performed by heat transfer between the first cooling stage 1008 of the regenerative refrigerator portion 1006 and the second portion 1014 of the He3 refrigerator portion 1010.

  With such a configuration, the cooling stage 1012 of the He3 refrigerator unit 1010 is cooled, and about 2.2 K of helium is condensed inside the container 1002.

(JT refrigerator)
FIG. 18 schematically shows a configuration example of a refrigerating apparatus having a regenerative refrigerator and a JT refrigerator.

  The refrigeration apparatus 1100 includes a compressor unit 1101 and a refrigeration unit 1102. The compressor unit 1101 is provided with a low stage compressor 1103 and a high stage compressor 1104. The refrigerator unit 1102 is provided with a GM refrigerator 1112 having a first heat station 1113 and a second heat station 1114, and a JT refrigerator 1111 having a JT valve 1116.

  In the compressor unit 1101, a discharge pipe 1105 is connected to the discharge side of the high stage compressor 1104, and a suction pipe 1109 is connected to the suction side of the low stage compressor 1103. An oil separator 1106 and an adsorber 1107 are provided in the discharge pipe 1105. The discharge pipe 1105 branches into two high-pressure pipes 1108 and 1110, the first high-pressure pipe 1108 is connected to the JT refrigerator 1111, and the second high-pressure pipe 1110 is connected to the GM refrigerator 1112. . The first high-pressure pipe 1108 is provided with a flow rate control valve 1135 and an on-off valve 1134 for preventing a normal temperature working gas from flowing into the refrigerator unit 1102 when the operation of the apparatus is stopped. The suction pipe 1109 is also provided with a check valve 1126 for preventing normal temperature working gas from flowing into the refrigerator unit 1102 when the operation of the apparatus is stopped.

  The JT circuit 1115 in the refrigerator unit 1102 includes a high pressure line 1117 and a low pressure line 1118, and the JT valve 1116 is provided in the high pressure line 1117. The high-pressure line 1117 is provided with a first precooling unit 1119 disposed in the first heat station 1113 and a second precooling unit 1120 disposed in the second heat station 1114. The JT circuit 1115 is provided with first to third heat recovery heat exchangers 1121 to 1123 for exchanging heat between the high pressure helium gas flowing through the high pressure line 1117 and the low pressure helium gas flowing through the low pressure line 1118. .

  The first high-pressure pipe 1108 is provided with an on-off valve 1128, and the suction pipe 1109 is provided with an on-off valve 1130.

  During the cooling operation, the on-off valve 1128 and the on-off valve 1130 are opened. As a result, the high-pressure helium gas discharged from the compressors 1103 and 1104 passes through the first heat exchanger 1121 → the first precooling unit 1119 → the second heat exchanger 1122 → the second precooling unit 1120 → the third heat exchanger 1123. After cooling in sequence, the JT valve 1116 expands to become cryogenic liquid helium and flows into the helium tank 1136. The helium gas evaporated in the helium tank 1136 flows into the suction piping 1109 of the compressors 1103 and 1104 through the low-pressure line 1118, and after being compressed by the compressors 1103 and 1104, the above-described circulation operation is repeated again.

  By such an operation, liquid helium can be cooled.

  In the above, a part of application object of the regenerator by this invention was demonstrated. However, it will be apparent to those skilled in the art that the regenerator according to the present invention can be used in various refrigerators.

  The present invention can be applied to a regenerative refrigerator such as a GM refrigerator, a pulse tube refrigerator, a Stirling refrigerator, and a Solvay refrigerator. Further, the present invention can be applied to a refrigeration apparatus configured or pre-cooled by such a regenerative refrigerator.

DESCRIPTION OF SYMBOLS 1 GM refrigerator 3 Gas compressor 5, 6 Valve 7 Piping 8 Drive motor 10 Cold head 12 Flange 15 First stage cooling part 20 First stage cylinder 22 First stage displacer 23a High temperature end 23b Low temperature end 30 First stage regenerator 31 1st stage expansion chamber 35 1st stage cooling stage 39 1st stage seal 40-1 Flow path 40-2 Flow path 40-3 Flow path 50 2nd stage cooling part 51 2nd stage cylinder 52 2nd stage displacer 53a High temperature End 53b Low temperature end 54-2 Flow path 55 Second stage expansion chamber 59 Second stage seal 60 Second stage regenerator 60A Conventional helium cooling regenerator 62 Container 65 Hole 68 Helium gas 85 Second stage cooling stage 160 Helium-cooled regenerator 161 according to the invention 161 first flow path 162 second flow path 165A, 165B hollow tube 165-2, 65-3 Hollow tube 168a, 168b End portion 170 Flow path resistance portion 173 Inner portion 175 Space portion 180-1 First surface 180-2 Second surface 180-3 Third surface 200 Pulse tube refrigerator 205 Housing 210 Housing part 211 Gas compressor 212, 213 Valve 214 Gas flow path 215A First stage reservoir 215B Second stage reservoir 217 Orifice 220 Cold head part 221 Flange 230 First stage cooling stage 231 First stage regenerator 232 Cylinder 232a, 237a High temperature end 232b, 237b Low temperature end 233 Regenerator 236 First stage pulse tube 237 Cylinder 238 Gas flow path 240 Second stage cooling stage 241 Second stage regenerator tube 242 Cylinder 242a, 247a High temperature end 242b, 247b Low temperature end 246 Second stage Pa Pipe 248 Gas flow path 247 Cylinder 260 Regenerator 300 Stirling refrigerator 301 Capillary tube 310 Gas compressor 311 Yoke 312 Holding vessel 313 Compression piston 314 Piston control spring 315 Movable coil 316 Permanent magnet 318, 319 Groove 320 Cold head 321 Housing Part 322 Cylinder 322a High temperature end 322b Low temperature end 323 Displacer 324 Displacer control spring 325 Expansion chamber 328 Cooling stage 360 Regenerator 400 Solvay refrigerator 411 Gas compressor 412, 413 Valve 414 Gas piping 415 Buffer tank 416 Piping stage 417 Piping stage 417 Cold storage pipe 432a Hot end 432b Low temperature end 436 Cylinder 437a Hot end 437b Hot end 438 Flow path 452 Displacer 460 Regenerator 500 Cryo pump 551 Main body part 552 Vacuum container 554 Shield part 554a Cylindrical part 554b Flange 555 Baffle 556 Cryopanel 560 Refrigerator part 561 Compressor 562 M Refrigerator 563 G 1st stage cooling part 571 Cylinder 575 1st stage cooling stage 580 2nd stage cooling part 581 Cylinder 585 2nd stage cooling stage 590 2nd regenerator 600 Superconducting magnet device 651 Vacuum vessel 652 Top plate 653 Heat shield plate 654 Coil cooling Stage 655 Superconducting coil 658 Oxide superconducting current lead 660 Superconducting magnet 661 High magnetic field space 670 Regenerative refrigerator 685 First stage cooling stage 695 Second stage cooling stage 700 Radiation detection device 710 Compressor 728 Cooling stage 750 Regenerative refrigerator 780 Radiation detector 790 Signal processing unit 800 Dilution refrigerator device 801 Pump 802 Outbound channel 803 Return channel 803a Piping 804 Capacitor 805 Impedance 806 Reservoir 807 Exchanger 809 Second heat transfer section 810 Mixing chamber 821 Trap 822 GM refrigerator 822a Cooling head 822b Cold head 823 Heat transfer plate 824 First heat exchanger 824a First heat transfer section 825 Vacuum container 850 Dilution refrigerator section 900 Magnetic refrigeration Machine 901 Superconducting magnet 902 Work substance 903 Heat pipe 904 Liquid helium tank 905 Precooling refrigerator 906 Gas injection valve 907 Gas return valve 908 Bypass valve 909 High temperature waste heat unit 1000 He3 refrigerator apparatus 1001 First heat shield 1002 Liquid He4 container 1003 Central hole 1004 Second heat shield 1005 Outer vacuum chamber 1006 Regenerative refrigerator part 1007 First turret 1008 First cooling stage 1009 Second cooling stage 1010 He3 refrigerator part 1011 Second Turret 1012 Cooling stage 1013 1st part 1014 2nd part 1020 Superconducting magnet 1100 Refrigeration equipment 1101 Compressor unit 1102 Refrigerator unit 1103 Low stage compressor 1104 High stage compressor 1105 Discharge piping 1106 Oil separator 1107 Adsorption Apparatus 1108, 1110 High pressure piping 1109 Suction piping 1111 JT refrigerator 1112 GM refrigerator 1113 1st heat station 1114 2nd heat station 1115 JT circuit 1116 JT valve 1117 High pressure line 1118 Low pressure line 1119 1st precooling part 1120 2nd precooling part 1121-1123 Heat exchanger for heat recovery 1126 Check valve 1128, 1130, 1134 On-off valve 1135 Flow control valve.

Claims (12)

A helium-cooled regenerator that stores the cold of working gas flowing in the mainstream direction,
The helium-cooled regenerator has a plurality of first hollow tubes and a plurality of second hollow tubes in which helium gas serving as a regenerator material is accommodated.
Each hollow tube has at least one open end, and the working gas can flow inside the hollow tube,
The plurality of first hollow tubes and the plurality of second hollow tubes are arranged in a direction substantially perpendicular to the main flow direction,
The helium-cooled regenerator, wherein the plurality of first hollow tubes and the plurality of second hollow tubes have portions knitted to each other so as to have a net-like structure. . The plurality of first hollow tubes extend along substantially the same first extending direction and / or the plurality of second hollow tubes extend substantially along the same second extending direction. Stretch along the direction,
The helium-cooled regenerator according to claim 1, wherein the first extending direction and the second extending direction are different.   The helium-cooled regenerator according to claim 2, wherein the first extending direction is substantially orthogonal to the second extending direction.   The regenerator according to any one of claims 1 to 3, wherein the portions knitted with respect to each other so as to have a net-like structure are rolled in the mainstream direction.   5. The regenerator according to claim 1, wherein the regenerator has a repetitive structure of portions knitted with respect to each other so as to form the net-like structure along the main flow direction. Furthermore, it has a plurality of third hollow tubes in which helium gas serving as a cold storage material is accommodated,
Each third hollow tube is open at least at one end, and the working gas can flow inside the third hollow tube.
The plurality of third hollow tubes have portions knitted with respect to the plurality of first hollow tubes and / or the plurality of second hollow tubes. The helium-cooled regenerator according to any one of 5.   The helium-cooled regenerator according to any one of claims 1 to 6, wherein at least one of the hollow tubes is open at both ends.   The helium-cooled regenerator according to any one of claims 1 to 7, wherein at least one of the hollow tubes has a flow path resistance portion at an open end. A regenerative refrigerator comprising the regenerator according to any one of claims 1 to 8,
The regenerative refrigerator is one of a GM refrigerator, a pulse tube refrigerator, a Stirling refrigerator, and a Solvay refrigerator.   A cryopump comprising the regenerative refrigerator according to claim 9.   The regenerative refrigerator according to claim 9, wherein the object to be cooled is any one of a superconducting magnet, an X-ray detector, and an infrared detector. A refrigerating apparatus precooled by the regenerative refrigerator according to claim 9,
The refrigeration apparatus includes a dilution refrigerator, a magnetic refrigerator, a He3 refrigerator, or a JT refrigerator.

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