JP2011185704A - Humidity sensor module - Google Patents

Humidity sensor module Download PDF

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JP2011185704A
JP2011185704A JP2010050466A JP2010050466A JP2011185704A JP 2011185704 A JP2011185704 A JP 2011185704A JP 2010050466 A JP2010050466 A JP 2010050466A JP 2010050466 A JP2010050466 A JP 2010050466A JP 2011185704 A JP2011185704 A JP 2011185704A
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humidity sensor
wiring board
electrode pads
humidity
wiring
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Atsushi Tondokoro
淳 遁所
Satoshi Waga
聡 和賀
Takashi Sato
崇 佐藤
Shinya Yokoyama
進矢 横山
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Alps Alpine Co Ltd
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Alps Electric Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a thin humidity sensor module having a waterproof function. <P>SOLUTION: The humidity sensor module is equipped with: a wiring board 20 provided in the state where a plurality of wiring conductors 21 are covered with an insulating layer 22 and a plurality of the electrode pads connected to a plurality of the wiring conductors 21 in a continuity state are exposed from the insulating layer 22; the humidity sensor package 30 having a humidity sensor element, an IC circuit board, a humidity suction port 31 for guiding the open air to the humidity sensor element, the sealing resin for sealing the IC circuit board and SMD terminals and mounted on the surface of the wiring board 20 by the electrical connection of a plurality of the SMD terminals and a plurality of the electrode pads corresponding to the wiring board 20; and the waterproof resin 50 for covering the sensor peripheral circuit part on the wiring board 20 and covering a plurality of the SMD terminals of the humidity sensor package 30 and a plurality of the electrode pads of the wiring board 20 in the state where the humidity suction port 31 is opened. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

本発明は、湿度センサとその周辺回路部品を同一基板上に搭載した湿度センサモジュールに関する。   The present invention relates to a humidity sensor module in which a humidity sensor and its peripheral circuit components are mounted on the same substrate.

環境変化測定に用いられるセンサは、近年、時計や携帯電話等の小型電子機器にも搭載できるように、小型薄型化に加えて防水性が要求されるようになってきた。一般的に、センサ及びその周辺回路を構成する電子部品は水に濡れると電気的に短絡し、破壊されるおそれがあると考えられている。具体的に湿度センサの防水構造としては、例えば特許文献1に記載されるように、湿度センサの周囲を透湿性防水防塵膜で覆ったものが知られている。   In recent years, sensors used for environmental change measurement have been required to be waterproof in addition to being small and thin so that they can be mounted on small electronic devices such as watches and mobile phones. In general, it is considered that the electronic components constituting the sensor and its peripheral circuits are electrically short-circuited and may be destroyed when wet. Specifically, as a waterproof structure of a humidity sensor, for example, as described in Patent Document 1, a structure in which the periphery of a humidity sensor is covered with a moisture-permeable waterproof and dustproof film is known.

特開平2−107958号公報Japanese Patent Laid-Open No. 2-107958 WO2009/119349WO2009 / 119349

しかし、特許文献1のように透湿性防水防塵膜で湿度センサの周囲を覆う構造を用いると、該透湿性防水防塵膜を設けるためのスペースが必要となって大型化を招き、小型電子機器に搭載することが難しい。また特許文献2には圧力センサ基板の外周に合成樹脂製のケースを設けて圧力センサパッケージを防水構造にすることが記載されているが、この外装ケースによる防水構造も特許文献1と同様に小型薄型化には不利である。このように従来は、小型電子機器に搭載可能な小型薄型で防水機能を有する湿度センサが存在しなかった。   However, if a structure that covers the periphery of the humidity sensor with a moisture-permeable waterproof and dust-proof film as in Patent Document 1 is used, a space for providing the moisture-permeable waterproof and dust-proof film is required, leading to an increase in size, and a small electronic device. It is difficult to install. Further, Patent Document 2 describes that a case made of a synthetic resin is provided on the outer periphery of the pressure sensor substrate to make the pressure sensor package a waterproof structure. It is disadvantageous for thinning. Thus, conventionally, there has been no small and thin humidity sensor having a waterproof function that can be mounted on a small electronic device.

本発明は、上記課題に鑑み、小型薄型で防水機能を有する湿度センサモジュールを提供することを目的とする。   In view of the above problems, an object of the present invention is to provide a small and thin humidity sensor module having a waterproof function.

本発明は、湿度センサパッケージとその周辺回路部品を防水樹脂で覆うだけで容易に防水機能が得られることに着目して完成されたものである。   The present invention has been completed in view of the fact that a waterproof function can be easily obtained simply by covering the humidity sensor package and its peripheral circuit components with a waterproof resin.

すなわち、本発明は、複数の配線導体を絶縁層で被覆し、該複数の配線導体と導通接続する複数の電極パッドを前記絶縁層から露出させた状態で設けた配線基板と、湿度を検知可能な湿度センサ素子、この湿度センサ素子と電気的に接続したIC回路基板、前記湿度センサ素子に外気を導く吸湿口、この吸湿口を開口させたまま少なくとも前記IC回路基板を封止する封止樹脂、及び、前記湿度センサ素子の吸湿口を開口させた面とは異なる面に配置されて前記IC回路基板と電気的に接続した複数のSMD端子を有し、前記複数のSMD端子と前記配線基板の対応する複数の電極パッドとの電気的接続により該配線基板に表面実装された湿度センサパッケージと、前記配線基板上に配置され、該配線基板の複数の電極パッドの少なくとも1つと電気的に接続したセンサ周辺回路部品と、前記配線基板上で、このセンサ周辺回路部品を覆い、かつ、前記吸湿口を開口させたまま前記湿度センサパッケージの複数のSMD端子及び前記配線基板の複数の電極パッドを覆う防水樹脂と、を備えたことを特徴としている。   That is, the present invention is capable of detecting the humidity, and a wiring board in which a plurality of wiring conductors are covered with an insulating layer, and a plurality of electrode pads electrically connected to the plurality of wiring conductors are exposed from the insulating layer. Humidity sensor element, an IC circuit board electrically connected to the humidity sensor element, a moisture suction port for introducing outside air to the humidity sensor element, and a sealing resin for sealing at least the IC circuit board with the moisture suction port open And a plurality of SMD terminals arranged on a surface different from a surface where the moisture absorption port of the humidity sensor element is opened and electrically connected to the IC circuit board, the plurality of SMD terminals and the wiring board A humidity sensor package surface-mounted on the wiring board by electrical connection with the corresponding electrode pads, and disposed on the wiring board, and at least one of the electrode pads on the wiring board Sensor peripheral circuit components electrically connected to the wiring board, and a plurality of SMD terminals of the humidity sensor package and the wiring board on the wiring board, covering the sensor peripheral circuit parts and opening the moisture absorption port. And a waterproof resin covering the plurality of electrode pads.

前記防水樹脂は、前記吸湿口を露出させ、かつ、前記複数のSMD端子及び前記配線基板の対応する複数の電極パッドと前記センサ周辺回路部品を完全に覆う厚さで、設けられていることが好ましい。この態様によれば、防水樹脂の厚さ制御により、吸湿口を開口させたまま、複数のSMD端子及び配線基板の対応する電極パッドとセンサ周辺回路部品を完全に覆うことが容易である。   The waterproof resin is provided with a thickness that exposes the moisture absorption port and completely covers the plurality of SMD terminals and the corresponding electrode pads of the wiring board and the sensor peripheral circuit component. preferable. According to this aspect, by controlling the thickness of the waterproof resin, it is easy to completely cover the plurality of SMD terminals, the corresponding electrode pads of the wiring board, and the sensor peripheral circuit components while the moisture absorption port is opened.

前記配線基板には、フレキシブル配線基板を用いることが実際的である。   It is practical to use a flexible wiring board as the wiring board.

本発明によれば、湿度センサパッケージの複数のSMD端子と配線基板の対応する複数の電極パッドの電気的接続によるセンサ実装部と配線基板上に実装したセンサ周辺回路部品とが防水樹脂により保護されて露出しないので、これら電気系への浸水を回避でき、小型薄型で防水機能を有する湿度センサモジュールを提供できる。   According to the present invention, the sensor mounting portion by electrical connection of the plurality of SMD terminals of the humidity sensor package and the corresponding plurality of electrode pads of the wiring board and the sensor peripheral circuit components mounted on the wiring board are protected by the waterproof resin. Therefore, it is possible to provide a humidity sensor module having a small and thin waterproof function.

本発明を適用した湿度センサモジュールの一実施形態を示す斜視図である。It is a perspective view which shows one Embodiment of the humidity sensor module to which this invention is applied. 図1の防水樹脂を省略して示す湿度センサモジュールの斜視図である。It is a perspective view of the humidity sensor module which abbreviate | omits and shows waterproofing resin of FIG. 図2の湿度センサモジュールを上から見て示す部分拡大平面図である。FIG. 3 is a partially enlarged plan view showing the humidity sensor module of FIG. 2 as viewed from above. 図1のIV−IV線に沿う断面図である。It is sectional drawing which follows the IV-IV line of FIG. 湿度センサパッケージの外観斜視図である。It is an external appearance perspective view of a humidity sensor package. 図5の封止樹脂を省略して示す湿度センサパッケージの斜視図である。FIG. 6 is a perspective view of a humidity sensor package in which the sealing resin of FIG. 5 is omitted. 図6の湿度センサパッケージを上から見て示す平面図である。It is a top view which shows the humidity sensor package of FIG. 6 seeing from the top.

図1及び図2は本発明を適用した湿度センサモジュールの一実施形態を示す斜視図、図3は湿度センサモジュールを上から見て示す平面図、図4は図1のIV−IV線に沿う断面図である。湿度センサモジュール10は、配線基板20上に実装した湿度センサパッケージ30及びその周辺回路部品40を防水樹脂50によって被覆した防水機能付き湿度センサモジュールである。防水樹脂50は、図2及び図3では図示省略されている。   1 and 2 are perspective views showing an embodiment of a humidity sensor module to which the present invention is applied, FIG. 3 is a plan view showing the humidity sensor module as viewed from above, and FIG. 4 is taken along line IV-IV in FIG. It is sectional drawing. The humidity sensor module 10 is a humidity sensor module with a waterproof function in which the humidity sensor package 30 mounted on the wiring board 20 and its peripheral circuit components 40 are covered with a waterproof resin 50. The waterproof resin 50 is not shown in FIGS.

配線基板20は、複数の配線導体21を絶縁層22で被覆した柔軟性を有する変形自在の薄型基板であって、狭小スペースに組み込む場合にも自由度が高くなっている。本実施形態では、配線基板20として、配線方向に延長させた細長矩形状のフレキシブル配線基板を用いている。複数の配線導体21には、その延長方向の一端部側に、湿度センサパッケージ30と電気的に接続する複数の電極パッド(センサ実装用電極パッド)23a及びセンサ周辺回路部品40の各々と電気的に接続する複数の電極パッド(回路部品実装用電極パッド)23bが形成され、他端部側に、外部接続に用いる複数の電極パッド(外部接続電極パッド)23cが形成されている。これら複数の電極パッド23a、23b、23cはいずれも、絶縁層22内の対応する配線導体21に電気的に接続し、基板表面20aに露出している。   The wiring board 20 is a deformable thin board having flexibility in which a plurality of wiring conductors 21 are covered with an insulating layer 22, and has a high degree of freedom when incorporated in a narrow space. In the present embodiment, an elongated rectangular flexible wiring board extended in the wiring direction is used as the wiring board 20. The plurality of wiring conductors 21 are electrically connected to each of a plurality of electrode pads (sensor mounting electrode pads) 23a and sensor peripheral circuit components 40 electrically connected to the humidity sensor package 30 on one end side in the extending direction. A plurality of electrode pads (circuit component mounting electrode pads) 23b are formed, and a plurality of electrode pads (external connection electrode pads) 23c used for external connection are formed on the other end side. All of the plurality of electrode pads 23a, 23b, and 23c are electrically connected to the corresponding wiring conductors 21 in the insulating layer 22 and exposed to the substrate surface 20a.

湿度センサパッケージ30は、図5ないし図7に詳細を示すように、湿度を検知する湿度センサ素子32と、この湿度センサ素子32を保護し、該湿度センサ素子32に外気を導入する吸湿口31を設けた保護部材311と、該湿度センサ素子32と電気的に接続したIC回路基板350と、吸湿口31を開口させた面とは異なる面に設けた金属導体からなる複数のSMD(Surface Mount Device)端子37とを備え、吸湿口31及び複数のSMD端子37を露出させた状態で湿度センサ素子32及びIC回路基板350を、例えばエポキシ樹脂等からなる封止樹脂36で覆ったモールドパッケージである。図6及び図7では、パッケージ上面を構成する封止樹脂36を図示省略して示してある。   As shown in detail in FIGS. 5 to 7, the humidity sensor package 30 includes a humidity sensor element 32 that detects humidity, and a moisture suction port 31 that protects the humidity sensor element 32 and introduces outside air into the humidity sensor element 32. A plurality of SMDs (Surface Mounts) made of a metal conductor provided on a surface different from the surface where the moisture absorption port 31 is opened, and an IC circuit board 350 electrically connected to the humidity sensor element 32. Device) and a mold package in which the humidity sensor element 32 and the IC circuit board 350 are covered with a sealing resin 36 made of, for example, epoxy resin or the like in a state where the moisture suction port 31 and the plurality of SMD terminals 37 are exposed. is there. 6 and 7, the sealing resin 36 constituting the upper surface of the package is not shown.

上記湿度センサ素子32、吸湿口31を形成する保護部材311、複数の電気配線部33及び電極パッド34は、センサチップ基板310上に備えられ、このセンサチップ基板310と、電極パッド354、355を有するIC回路基板350とは、単一の支持基板300上に配置されている。   The humidity sensor element 32, the protective member 311 that forms the moisture absorption port 31, the plurality of electrical wiring portions 33, and the electrode pads 34 are provided on the sensor chip substrate 310, and the sensor chip substrate 310 and the electrode pads 354 and 355 are provided. The IC circuit board 350 having the circuit board 350 is disposed on a single support board 300.

図示実施形態では、センサ上面(図示上方向)に吸湿口31を開口させ、この吸湿口31と180°反対側となるセンサ下面に複数のSMD端子37を配置してある。複数のSMD端子37と配線基板20の対応する電極パッド(センサ実装用電極パッド)23aの電気的接続により、湿度センサパッケージ30は配線基板20の表面20aに実装される。実装には、例えば半田や導電性接着剤等を用いることができる。   In the illustrated embodiment, a moisture absorption port 31 is opened on the upper surface of the sensor (upward in the drawing), and a plurality of SMD terminals 37 are arranged on the lower surface of the sensor that is 180 ° opposite to the moisture absorption port 31. The humidity sensor package 30 is mounted on the surface 20 a of the wiring board 20 by electrical connection of the plurality of SMD terminals 37 and corresponding electrode pads (sensor mounting electrode pads) 23 a of the wiring board 20. For example, solder or a conductive adhesive can be used for mounting.

周辺回路部品40は、例えば外部電源から与えられた供給電圧を所定電圧まで降下させて湿度センサ素子32への入力電圧を生成する降圧回路などを、フィルタコンデンサや抵抗のような複数の電子部品41、42、43で構成している。各電子部品41、42、43は、例えば半田や導電性接着剤等により、配線基板20の対応する電極パッド(回路部品実装用電極パッド)23bと電気的に接続され、配線基板20に対して湿度センサパッケージ30と同一面に実装されている。この周辺回路部品40の種類及び数は限定されない。   The peripheral circuit component 40 includes, for example, a step-down circuit that generates an input voltage to the humidity sensor element 32 by dropping a supply voltage supplied from an external power source to a predetermined voltage, and a plurality of electronic components 41 such as filter capacitors and resistors. , 42, 43. Each electronic component 41, 42, 43 is electrically connected to a corresponding electrode pad (circuit component mounting electrode pad) 23 b of the wiring substrate 20 by, for example, solder or conductive adhesive, and is connected to the wiring substrate 20. The humidity sensor package 30 is mounted on the same surface. The type and number of peripheral circuit components 40 are not limited.

防水樹脂50は、例えばエポキシ樹脂からなり、少なくとも、センサ実装部である複数のSMD端子37及び複数の電極パッド23aと周辺回路部品40(電子部品41〜43)とを完全に覆っている。防水樹脂50の厚みは、湿度センサパッケージ30の吸湿口31は露出させ、かつ、複数のSMD端子37及び複数の電極パッド23aと周辺回路部品40を完全に覆うように制御(設定)してある。この防水樹脂50により、湿度センサパッケージ30の複数のSMD端子37、配線基板20の複数の電極パッド23a、23b及び周辺回路部品40は水に濡れることがなく、これらが腐食して起こる断線及び浸水による複数のSMD端子37間の短絡を回避できる。これにより、信頼性及び耐久性が向上する。   The waterproof resin 50 is made of, for example, an epoxy resin and completely covers at least the plurality of SMD terminals 37 and the plurality of electrode pads 23a which are sensor mounting portions and the peripheral circuit components 40 (electronic components 41 to 43). The thickness of the waterproof resin 50 is controlled (set) so that the moisture suction port 31 of the humidity sensor package 30 is exposed and the plurality of SMD terminals 37, the plurality of electrode pads 23a, and the peripheral circuit component 40 are completely covered. . The waterproof resin 50 prevents the plurality of SMD terminals 37 of the humidity sensor package 30, the plurality of electrode pads 23 a and 23 b of the wiring board 20, and the peripheral circuit component 40 from getting wet with water. The short circuit between the plurality of SMD terminals 37 can be avoided. Thereby, reliability and durability are improved.

センサチップ基板310は、例えばSi層の表面に絶縁膜を有するシリコン基板からなる。保護部材311は、湿度センサ素子32上に突出形成されていて、該湿度センサ素子32の感湿部のみを吸湿口31から外気に露出させる。この保護部材311はSiからなる。保護部材311及び吸湿口31の形状は任意である。複数の電気配線部33は、一端部が湿度センサ素子32にそれぞれ電気的に接続され、他端部に電極パッド34がそれぞれ設けられている。湿度センサ素子32は、具体的には例えば、吸収または放出した水分量に応じて誘電率が変化する高分子感湿材料を感湿体とし、その誘電率変化を静電容量変化として検出する静電容量型、あるいは、吸収または放出した水分量に応じた電気抵抗変化を検出する抵抗型を用いることができる。本実施形態の湿度センサ素子32は、湿度変化によらず出力が一定の基準部と湿度変化に応じて出力が変動する感湿部とを備えた静電容量型である。湿度センサ素子の感湿部は、湿度検知のために水分に強い高分子感湿材料を選定して形成されているので、水に濡れても動作上の不具合を招くおそれがない。   The sensor chip substrate 310 is made of a silicon substrate having an insulating film on the surface of the Si layer, for example. The protective member 311 is formed so as to protrude on the humidity sensor element 32 and exposes only the moisture sensitive portion of the humidity sensor element 32 to the outside air from the moisture suction port 31. This protective member 311 is made of Si. The shape of the protection member 311 and the moisture absorption port 31 is arbitrary. One end of each of the plurality of electrical wiring portions 33 is electrically connected to the humidity sensor element 32, and an electrode pad 34 is provided on the other end. Specifically, the humidity sensor element 32 uses, for example, a polymer moisture sensitive material whose dielectric constant changes according to the amount of absorbed or released moisture as a moisture sensitive body, and detects the change in the dielectric constant as a capacitance change. A capacitance type or a resistance type that detects a change in electrical resistance according to the amount of absorbed or released moisture can be used. The humidity sensor element 32 of the present embodiment is a capacitance type that includes a reference portion whose output is constant regardless of humidity change and a moisture sensitive portion whose output varies according to humidity change. Since the moisture-sensitive part of the humidity sensor element is formed by selecting a moisture-sensitive polymer moisture-sensitive material for humidity detection, there is no possibility of causing operational problems even when wet.

IC回路基板350は、湿度センサ素子32の出力変化を検出する制御回路基板である。複数の電極パッド354は、導電性ワイヤー38を介して、対応するセンサチップ基板310の複数の電極パッド34と電気的に接続され、外部接続用の電極パッド355は、導電性ワイヤー39を介して、支持基板300の表面に設けたコンタクト導体307と電気的に接続されている。コンタクト導体307は、支持基板300の表裏面を貫通するスルーホール導体を介して、支持基板300の裏面に設けたSMD端子37に導通接続している。   The IC circuit board 350 is a control circuit board that detects an output change of the humidity sensor element 32. The plurality of electrode pads 354 are electrically connected to the plurality of electrode pads 34 of the corresponding sensor chip substrate 310 through the conductive wires 38, and the electrode pads 355 for external connection are connected through the conductive wires 39. The contact conductor 307 provided on the surface of the support substrate 300 is electrically connected. The contact conductor 307 is conductively connected to the SMD terminal 37 provided on the back surface of the support substrate 300 through a through-hole conductor that penetrates the front and back surfaces of the support substrate 300.

上記センサチップ基板310及びIC回路基板350を接着固定した支持基板300において、その表面高さが最も高くなるのは保護部材311の上面であり、導電性ワイヤー38、39の表面高さは保護部材311の上面よりも低くなっている。つまり、保護部材311の上面を除いてセンサチップ基板310及びIC回路基板350は、封止樹脂36で完全に覆われている。   In the support substrate 300 to which the sensor chip substrate 310 and the IC circuit substrate 350 are bonded and fixed, the surface height is highest on the upper surface of the protection member 311, and the surface heights of the conductive wires 38 and 39 are the protection member. It is lower than the upper surface of 311. That is, the sensor chip substrate 310 and the IC circuit substrate 350 are completely covered with the sealing resin 36 except for the upper surface of the protective member 311.

このモールドパッケージである湿度センサパッケージ30を用いることで、湿度センサの配線基板20への表面実装が可能となり、吸湿口31を除いた湿度センサパッケージ30及びその周辺回路部品40を防水樹脂50で被覆するだけで防水機能が得られる。湿度センサパッケージ30の実寸は、例えば、縦2.5mm、横2.3mm、厚さ1mm程度である。   By using the humidity sensor package 30 which is this mold package, it becomes possible to mount the humidity sensor on the wiring board 20, and the humidity sensor package 30 excluding the moisture absorption port 31 and its peripheral circuit components 40 are covered with the waterproof resin 50. Waterproof function is obtained just by doing. The actual size of the humidity sensor package 30 is, for example, about 2.5 mm long, 2.3 mm wide, and 1 mm thick.

本湿度センサモジュール10は、湿度センサパッケージ30のIC回路基板350及びSMD端子37と周辺回路部品40が封止樹脂36及び防水樹脂50により防水され、さらに、配線基板20の配線導体21も絶縁層22で被覆されて防水されており、湿度センサパッケージ30の感湿部が水に濡れることがあっても動作上問題がない。よって、湿度センサモジュール10を電子機器に搭載する際、図1に示すように、配線基板20の上下を例えばゴム製のパッキンPで挟むことで閉じ合わせて密閉し、水分に曝される領域Aと水分に曝されない領域Bとに分離して使用することができる。あるいは、上記パッキンは用いずに、電子機器内の図示しない接続端子と電極パッド(外部接続電極パッド)23cとを接続した後、該接続部分を防水樹脂で覆って使用してもよい。   In this humidity sensor module 10, the IC circuit board 350 and SMD terminal 37 of the humidity sensor package 30 and the peripheral circuit component 40 are waterproofed by the sealing resin 36 and the waterproof resin 50, and the wiring conductor 21 of the wiring board 20 is also an insulating layer. Even if the moisture sensitive part of the humidity sensor package 30 gets wet with water, there is no problem in operation. Therefore, when the humidity sensor module 10 is mounted on an electronic device, as shown in FIG. 1, the upper and lower sides of the wiring board 20 are closed and sealed by sandwiching them with, for example, rubber packing P, and exposed to moisture. And the region B that is not exposed to moisture can be used separately. Alternatively, without using the packing, after connecting a connection terminal (not shown) in the electronic device and an electrode pad (external connection electrode pad) 23c, the connection portion may be covered with a waterproof resin.

以上のように本実施形態によれば、配線基板20上に湿度センサパッケージ30及びその周辺回路部品40を実装し、かつ、これら電子部品を防水樹脂50で覆ったので、簡単な構成で、狭小スペースにも搭載可能な小型薄型の防水機能を有する湿度センサモジュール10を実現できた。本実施形態の湿度センサモジュールの寸法例を上げると、例えば、縦6mm、横30mm、厚さ1mm程度である。   As described above, according to the present embodiment, the humidity sensor package 30 and its peripheral circuit components 40 are mounted on the wiring board 20, and these electronic components are covered with the waterproof resin 50. The humidity sensor module 10 having a small and thin waterproof function that can be mounted in a space was realized. When the dimension example of the humidity sensor module of this embodiment is raised, it is about 6 mm in length, 30 mm in width, and 1 mm in thickness, for example.

10 湿度センサモジュール
20 配線基板(フレキシブル配線基板)
20a 基板表面
21 配線導体
22 絶縁層
23a 電極パッド(センサ実装用電極パッド)
23b 電極パッド(回路部品実装用電極パッド)
23c 電極パッド(外部接続用電極パッド)
30 湿度センサパッケージ(湿度センサ)
31 吸湿口
32 湿度センサ素子
33 電気配線部
34 電極パッド
36 封止樹脂(パッケージ)
37 SMD端子
38、39 導電性ワイヤー
40 周辺回路部品
41、42、43 電子部品
50 防水樹脂
300 支持基板
307 コンタクト導体
310 センサチップ基板
311 保護部材
350 IC回路基板
354、355 電極パッド
10 Humidity sensor module 20 Wiring board (flexible wiring board)
20a Substrate surface 21 Wiring conductor 22 Insulating layer 23a Electrode pad (electrode pad for sensor mounting)
23b Electrode pad (Electrode pad for mounting circuit components)
23c Electrode pad (external connection electrode pad)
30 Humidity sensor package (humidity sensor)
31 Moisture Absorption Port 32 Humidity Sensor Element 33 Electrical Wiring Section 34 Electrode Pad 36 Sealing Resin (Package)
37 SMD terminal 38, 39 Conductive wire 40 Peripheral circuit component 41, 42, 43 Electronic component 50 Waterproof resin 300 Support substrate 307 Contact conductor 310 Sensor chip substrate 311 Protective member 350 IC circuit substrate 354, 355 Electrode pad

Claims (3)

複数の配線導体を絶縁層で被覆し、該複数の配線導体と導通接続する複数の電極パッドを前記絶縁層から露出させた状態で設けた配線基板と、
湿度を検知する湿度センサ素子、この湿度センサ素子と電気的に接続したIC回路基板、前記湿度センサ素子に外気を導く吸湿口、この吸湿口を開口させたまま少なくとも前記IC回路基板を封止する封止樹脂、及び、前記湿度センサ素子の吸湿口を開口させた面とは異なる面に配置されて前記IC回路基板と電気的に接続した複数のSMD端子を有し、前記複数のSMD端子と前記配線基板の対応する複数の電極パッドとの電気的接続により該配線基板に表面実装された湿度センサパッケージと、
前記配線基板上に配置され、該配線基板の複数の電極パッドの少なくとも1つと電気的に接続したセンサ周辺回路部品と、
前記配線基板上で、このセンサ周辺回路部品を覆い、かつ、前記吸湿口を開口させたまま前記湿度センサパッケージの複数のSMD端子及び前記配線基板の複数の電極パッドを覆う防水樹脂と、
を備えたことを特徴とする湿度センサモジュール。
A wiring board that covers a plurality of wiring conductors with an insulating layer, and that is provided with a plurality of electrode pads that are conductively connected to the plurality of wiring conductors exposed from the insulating layer;
A humidity sensor element that detects humidity, an IC circuit board that is electrically connected to the humidity sensor element, a moisture suction port that guides outside air to the humidity sensor element, and at least the IC circuit board is sealed with the moisture suction port open. A plurality of SMD terminals that are disposed on a surface different from a surface where the moisture absorption port of the sealing resin and the humidity sensor element is opened and electrically connected to the IC circuit board; and the plurality of SMD terminals A humidity sensor package surface-mounted on the wiring board by electrical connection with a corresponding plurality of electrode pads of the wiring board;
A sensor peripheral circuit component disposed on the wiring board and electrically connected to at least one of the plurality of electrode pads of the wiring board;
On the wiring board, a waterproof resin that covers the sensor peripheral circuit components and covers the plurality of SMD terminals of the humidity sensor package and the plurality of electrode pads of the wiring board with the moisture absorption opening opened.
A humidity sensor module comprising:
請求項1記載の湿度センサモジュールにおいて、前記防水樹脂は、前記吸湿口を露出させ、かつ、前記複数のSMD端子及び前記配線基板の対応する複数の電極パッドと前記センサ周辺回路部品を完全に覆う厚さで、設けられている湿度センサモジュール。 2. The humidity sensor module according to claim 1, wherein the waterproof resin exposes the moisture absorption port and completely covers the plurality of SMD terminals and the corresponding electrode pads of the wiring board and the sensor peripheral circuit component. Humidity sensor module provided in thickness. 請求項1または2記載の湿度センサモジュールにおいて、前記配線基板としてフレキシブル配線基板を用いた湿度センサモジュール。 The humidity sensor module according to claim 1 or 2, wherein a flexible wiring board is used as the wiring board.
JP2010050466A 2010-03-08 2010-03-08 Humidity sensor module Withdrawn JP2011185704A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016011941A (en) * 2013-11-11 2016-01-21 日本特殊陶業株式会社 Sensor
WO2016132590A1 (en) * 2015-02-19 2016-08-25 シャープ株式会社 Capacitance-sensing humidity sensor
JP2016180601A (en) * 2015-03-23 2016-10-13 アルプス電気株式会社 Humidity detection unit
CN109827277A (en) * 2019-02-28 2019-05-31 深圳市晨北科技有限公司 A kind of air humidifying device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016011941A (en) * 2013-11-11 2016-01-21 日本特殊陶業株式会社 Sensor
WO2016132590A1 (en) * 2015-02-19 2016-08-25 シャープ株式会社 Capacitance-sensing humidity sensor
JP2016180601A (en) * 2015-03-23 2016-10-13 アルプス電気株式会社 Humidity detection unit
CN109827277A (en) * 2019-02-28 2019-05-31 深圳市晨北科技有限公司 A kind of air humidifying device
CN109827277B (en) * 2019-02-28 2024-06-07 深圳市晨北科技有限公司 Air humidifying device

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