JP2011183323A - Coating method and coating apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a coating method removing foreign matter without changing suction pressure and discharge pressure of a constant delivery pump. <P>SOLUTION: The coating apparatus includes first and second switch valves (7, 8) installed in a channel for suctioning a coating liquid by a constant delivery pump (11), a discharge part (13) for applying the coating liquid sent from the constant delivery pump (11), a first to a third detection parts (4, 5, 6) for detecting foreign matter, a constant flow pump (3) installed between a supply tank (1) and the first detection part (4), and a control part (16) for carrying out operation by operating the constant flow pump (3) and at the same time switching the second switch valve (8) to return the coating liquid (2) to the coating liquid supply tank (1), calculating the time taken for the foreign matter to reach the first and the second switch valves (7, 8) based on the time from the moment the foreign matter is detected by the second detection part (5) to the moment the foreign matter is detected by the third detection part (6), determining whether the foreign matter which reaches the first switch valve (7) is foams or not, and discharging the coating liquid containing foams outside by switching the first switch valve (7) in the case the first detection part (4) detects foreign matter. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a coating method in which a coating liquid is applied to a coating object by a discharge unit.

In recent years, the required accuracy of coating film unevenness prevention has become much higher than before due to the high performance of flat display panels, semiconductors, color filters, and batteries.
Moreover, since the coating liquid to be used is also becoming expensive, it is desired to reduce the amount of waste.

Patent Document 1 describes a coating apparatus shown in FIG.
This is a device that sucks up the coating liquid 102 in the coating liquid tank 101 by a pump 104 through a pipe 103 and applies the coating liquid toward the object to be coated 111 with a nozzle 108. It is configured as follows so that the coating object 111 is not coated and uneven coating occurs.

A filter 105, a sack bag 106, and a bubble detection unit 107 are interposed in the supply path of the coating liquid from the pump 104 to the nozzle 108.
The filter 105 removes foreign matter by filtering the coating liquid 102 flowing to the nozzle 108. The suck bag 106 prevents dripping by sucking the tip of the nozzle 108. Reference numeral 110 denotes a nozzle driving unit that moves the nozzle 108.

  After the foreign matter mixed in the coating liquid is filtered by the filter 105 and the bubble detection unit 107 detects the bubble, the dropping number counting unit 109 causes the nozzle 108 to move after the bubble detection unit 107 detects the bubble. When the number of drops of the coating liquid 102 dropped onto the coating object 111 is counted and it is detected that the number of drops of the coating liquid 102 dropped onto the coating object 111 has reached a specified number, the nozzle 108 is moved to the nozzle The drive unit 110 is configured to be moved to a place different from the application target 111 so that the coating liquid 102 containing more bubbles is not dropped on the application target 111.

JP 2005-136185 A

In the case of coating a flat display panel or the like, a coating liquid is discharged from a nozzle using a fixed discharge pump in order to realize a coating film having a desired uniform film thickness.
However, in the configuration of Patent Document 1 or the like, the filter 105 for removing foreign matter exists between the pump 104 and the nozzle 108, so that the coating liquid is discharged from the pump 108 due to clogging of the filter 105 due to foreign matter. The pressure changes and the coating solution cannot be satisfactorily applied.

  In addition, as shown by the phantom line in FIG. 8, there is a filter 105 b for the purpose of removing foreign matter between the coating liquid tank 101 and the pump 104, but suction when the coating liquid is sucked into the pump 104. Since the pressure changes, the pump 104 may fail.

  Furthermore, when the bubble detection unit 107 detects bubbles, the number of drops of the coating liquid containing bubbles reaching the nozzle 108 is calculated. However, in the case of foreign matter having a specific gravity smaller than that of the coating liquid, such as bubbles, the piping is horizontal. If the direction is not the direction, for example, if the pipe is vertical and the coating solution flows upward, the bubbles move faster than the coating solution, and if the coating solution flows downward, the bubbles move slower than the coating solution. The coating liquid containing bubbles does not reach the nozzle 108 as calculated because the coating liquid does not move at the same speed as the coating liquid, so that the coating liquid 102 containing bubbles does not drop onto the coating object 111. There is a problem that it is difficult to control.

  The present invention can improve the quality of coating by removing foreign matters, bubbles, etc. without changing the suction pressure / discharge pressure of the pump, minimize the disposal of expensive coating liquid, and reduce the cost. An object of the present invention is to provide a coating method and a coating apparatus capable of lowering the temperature.

  The coating method of the present invention includes a step of sucking a coating liquid from a coating liquid supply tank through a first switching valve and a second switching valve by a metering discharge pump, and the coating liquid supply tank and the first switching valve. A step of detecting foreign matter in the coating liquid by the first detection unit interposed in the liquid supply pipe between the first and second switching valves when the foreign matter in the coating liquid is detected by the first detection unit And switching the coating liquid back to the coating liquid supply tank through the first filter for foreign matter filtration, and the second detection unit and the third detection unit in the coating liquid downstream of the first detection unit. A step of detecting a foreign matter, a step of measuring a time from when the foreign matter is detected by the second detection unit to a time of detection by the third detection unit, and the first and second foreign matters from the measured time. Calculating a time to reach the first switching valve, and reaching the first switching valve A step of determining whether the foreign matter is a bubble, a step of switching the first switching valve to discharge the coating liquid containing the bubble to the outside, and a coating liquid is applied to the application target by a discharge unit with a fixed discharge pump And a step of performing.

  Further, the coating apparatus of the present invention includes first and second switching valves interposed in series with a liquid feed pipe for sucking a coating liquid from a coating liquid supply tank by a quantitative discharge pump, and the quantitative discharge pump. A first detection unit that detects a foreign substance that is interposed in a liquid supply pipe between the coating liquid supply tank and the first switching valve and that passes through. And a second detector for detecting a foreign substance that is interposed in a liquid supply pipe between the first detector and the first switching valve, and between the second detector and the first switching valve. A third detection unit that detects a foreign substance that is interposed in the liquid supply piping and a liquid supply piping that is interposed between the coating liquid supply tank and the first detection unit, and detects the coating liquid as a first detection unit. A constant flow rate pump to be fed to the unit, and the coating liquid supply to the metering discharge pump by switching the second switching valve When the foreign substance in the coating liquid is detected by the liquid feed pipe to be collected in the tank and the first detector, the constant flow pump is operated and the second switching valve is switched to supply the coating liquid to the coating liquid supply tank. The time until the foreign substance is detected by the third detector after the second detector detects the foreign substance is measured, and the time from which the foreign substance reaches the first and second switching valves is measured. And determining whether or not the foreign matter that has reached the first switching valve is a bubble, and switching the first switching valve to discharge the coating liquid containing the bubble to the outside. Features. It is preferable that the liquid feeding pipes connecting the second detection unit, the third detection unit, the first switching valve, and the second switching valve are arranged on the same straight line. The first detection unit, the second detection unit, and the third detection unit have both optical and capacitance detection methods, and the control unit controls the optical detection result and the capacitance. By comparing the detection results of the equations to determine whether the foreign object is a bubble, the foreign object can be determined more accurately. The volume of the coating liquid between the second detection unit and the third detection unit, the volume of the coating liquid between the third detection unit and the first switching valve, and the first switching valve and the second switching Since the volume of the coating liquid between the valves is the same, a part of the control unit can be simplified.

  According to this configuration, it is possible to improve the quality of the application by removing foreign matters without changing the suction pressure / discharge pressure of the metering discharge pump, and to minimize the disposal of expensive application liquid, Cost can be reduced.

The block diagram of the coating device in embodiment which performs the coating method of this invention Flowchart of the first half of the control unit in the same embodiment Flowchart of the latter half of the control unit in the same embodiment The figure which shows the time of attraction | suction with the fixed amount discharge pump in the embodiment The figure which shows the time of the foreign material detection in the embodiment The figure which shows the case where the foreign material in the same embodiment contains a bubble The figure which shows the case where the foreign material in the same embodiment does not contain a bubble Configuration diagram of coating apparatus described in Patent Document 1

Hereinafter, the coating method of the present invention will be described based on specific embodiments.
FIG. 1 shows a coating apparatus used for carrying out the coating method of the present invention.
The coating liquid supply tank 1 in which the coating liquid 2 is stored is connected to a constant flow rate pump 3 through a pipe, and further downstream the first detection unit 4 and the second detection unit 5 in order via the pipe. The 3rd detection part 6, the 1st three-way valve 7 as a 1st switching valve, and the 2nd three-way valve 8 as a 2nd switching valve are connected. A first valve 10, a fixed discharge pump 11, a second valve 12, and a discharge unit 13 are connected in order to the pipe on the discharge unit 13 side connected to the second three-way valve 8.

  Note that the pipes connecting the second detection unit 5 to the second three-way valve 8 are arranged on the same straight line, and preferably arranged in the vertical direction. With this arrangement, the moving speed of the foreign matter in the coating liquid 2 is constant. The constant volume discharge pump 11 sucks the coating liquid 2 from the coating liquid supply tank 1 with the first valve 10 opened and the second valve 12 closed, and then the first valve 10 is closed and the second valve 12 is closed. With the valve 12 opened, a predetermined amount of the coating liquid 2 is discharged from the discharge unit 13.

  The coating liquid 2 is applied to the second three-way valve 8 on the downstream side of the first three-way valve 7 through a first filter 9 arranged for filtering foreign matter in the liquid of the coating liquid 2. A liquid feed pipe 31 returning to the supply tank 1 is connected, and the flow of the coating liquid 2 is switched to the discharge unit 13 side or switched to the coating liquid supply tank 1 side by switching the second three-way valve 8. Can do.

  The first three-way valve 7 is connected to a storage tank 15 for storing the coating liquid 2 containing air bubbles through a second filter 14 arranged for filtering foreign substances in the coating liquid 2. A liquid feed pipe 32 is connected, and the flow of the coating liquid 2 can be switched to the second three-way valve 8 side or the storage tank 15 side by switching the first three-way valve 7.

  The first detection unit 4, the second detection unit 5, and the third detection unit 6 include both optical detection units and electrostatic capacitance type detection units. Detects foreign substances such as bubbles, gel-like substances, and particles. The detection signals of the first detection unit 4, the second detection unit 5, and the third detection unit 6 are sent to the control unit 16.

  The control unit 16 stores a storage unit 17 that stores a detection signal of the foreign matter detected by the second detection unit 5 and until the third detection unit 6 detects the foreign matter detected by the second detection unit 5. A measuring unit 18 for measuring the time of time, a time for the foreign matter to move from the third detecting unit 6 to the first three-way valve 7 from the time measured by the measuring unit 18, and a second time from the first three-way valve 7 to the second From the calculation unit 19 that calculates the time to move to the three-way valve 8, the foreign matter detected by the third detection unit 6 from the detection signal stored in the storage unit 17 and the time measured by the measurement unit 18, A determination unit 20 for determining whether or not there is provided.

In this embodiment, the measurement unit 18 is provided with a first timer 18a, a second timer 18b, a third timer 18c, and a fourth timer 18d.
Based on the process of apply | coating to the application target object 30, the structure of the control part 16 is demonstrated in detail.

2 shows the first half of the flowchart of the control unit 16, and FIG. 3 shows the second half of the flowchart of the control unit 16.
In step S1, as shown in FIG. 4, the second valve 12 is closed, the first valve 10 is opened, and the first three-way valve 7 and the second three-way valve 8 are switched to the discharge unit 13 side. The suction operation of the fixed discharge pump 11 is started. The flow of the coating liquid 2 at this time is shown by a thick line in FIG. When the suction operation of the fixed discharge pump 11 is started, the coating liquid 2 passes through the first detection unit 4 from the coating liquid supply tank 1.

In step S <b> 2, the first detection unit 4 monitors whether the coating liquid 2 contains foreign matter. If no foreign object is detected by the first detection unit 4, the process proceeds to step S3.
In step S <b> 3, it is checked whether the fixed amount discharge pump 11 has finished the predetermined amount of suction operation of the coating liquid 2. When the suction operation of the predetermined amount of the coating liquid 2 is finished, the process proceeds to step S4. If the suction operation of the predetermined amount of coating liquid 2 has not been completed, the process returns to step S2.

In step S4, the first valve 10 is closed and the second valve 12 is opened.
In step S <b> 5, the discharge operation of the fixed discharge pump 11 is started, and the application from the discharge unit 13 to the application target 30 is started.

  In step S6, it is checked whether or not the dispensing operation of the predetermined amount of the coating liquid 2 has been completed, and the completion of the discharge operation of the predetermined amount of the coating liquid 2 is awaited. When it is detected that the discharge operation of the coating liquid 2 has been completed, the second valve 12 is closed in step S7, and the coating operation is ended.

In step S2, if a foreign object is detected by the first detector 4, step S9 shown in FIG. 3 is executed.
In step S9, after stopping the suction operation of the quantitative discharge pump 11, the first valve 10 is closed.

In step S10, the constant flow pump 3 is operated to switch the second three-way valve 8 to the coating liquid supply tank 1 side.
The flow of the coating liquid 2 at this time is shown by a thick line in FIG. When the constant flow pump 3 is operated, the coating liquid 2 flows at a constant speed in the pipe. Due to this flow, the foreign matter detected by the first detection unit 4 passes through the second detection unit 5.

  In step S <b> 11, it is checked whether the second detection unit 5 has detected a foreign object. When the second detection unit 5 detects a foreign object, the detection signal of the second detection unit 5 is stored in the storage unit 17, and the process proceeds to step S12.

  In step S12, the first timer 18a is started. At this time, due to the flow of the coating liquid 2, the foreign matter detected by the second detection unit 5 in step S <b> 11 passes through the third detection unit 6.

Next, in step S13, it is checked whether the third detection unit 6 has detected a foreign object.
If no foreign object is detected by the second detection unit 5 in step S11, step S13 is skipped and step S13 is executed.

  If the third detector 6 detects a foreign object in step S13, the foreign object is collated in step S14. Specifically, the detection signal of the second detection unit 5 stored in the storage unit 17 and the detection signal detected by the third detection unit 6 in step S13 are collated by the discrimination unit 20, and collation is performed. The time when the foreign matter moved from the second detection unit 5 to the third detection unit 6 is acquired from the first timer 18 a and stored in the storage unit 17.

  Next, in step S15, the calculation unit 19 calculates the time for the foreign matter detected by the third detection unit 6 in step S13 to reach the first three-way valve 7 from the travel time stored in the storage unit 17 in step S14. Then, the second timer 18b is started.

In step S16, it is checked whether the second timer 18b is up.
If no foreign matter is detected in step S11, step S12 is skipped and step S13 is executed.

If no foreign object is detected in step S13, step S16 is executed by skipping steps S14 and S15.
In step S16, when it is detected that the second timer 18b has timed up, in step S17, the determination unit 20 determines whether the foreign matter that has reached the first three-way valve 7 is a foreign matter containing bubbles. To do. Here, if it is determined that the foreign matter that has reached the first three-way valve 7 is a foreign matter containing bubbles, step S18 is executed.

The determination unit 20 determines a foreign object as follows.
In the case of bubbles, since the specific gravity of the bubbles is smaller than that of the coating liquid 2, the bubbles move in the pipe faster than the flow of the coating liquid 2. For this reason, if the movement time of the foreign substance stored in the storage unit 17 in step S14 is shorter than the time required for the coating liquid 2 to move from the second detection unit 5 to the third detection unit 6, it can be determined as a bubble. The flow of the coating liquid 2 in the case of a foreign substance containing bubbles is shown in FIG. 6 with a thick line, and the flow of the coating liquid 2 in the case of a foreign substance not containing bubbles is shown in FIG.

  The coating liquid 2 that has reached the pipe on the storage tank 15 side is filtered for foreign substances other than bubbles by the second filter 14, and the coating liquid 2 containing bubbles is stored in the storage tank 15. The coating liquid 2 containing bubbles stored in the storage tank 15 can be used again as the coating liquid 2 after removing the bubbles by vacuum defoaming or the like.

  In step S18, the first three-way valve 7 is switched to the storage tank 15 side, the third timer 18c is started, and then step S19 is executed. In the third timer 18c, a time for the foreign matter to pass through the inside of the first three-way valve 7 and reach the piping on the storage tank 15 side is set.

  In step S16, if it is not detected that the second timer 18b has timed up, step S19 is executed by skipping step S17 and step S18.

Next, in step S19, it is checked whether the third timer 18c has timed up.
If it is determined in step S16 that the second timer 18b has not timed out, step S17 and step S18 are skipped and step S19 is executed. In step S19, when it is detected that the third timer 18c has timed up, the first three-way valve 7 is switched to the discharge unit 13 side in step S20.

  Next, in step S21, it is checked whether there is any other foreign matter being detected. Specifically, the foreign matter detected by the first detection unit 4 passes through the inside of the first three-way valve 7 and does not reach the storage tank 15 side, or passes through the inside of the second three-way valve 8. The determination unit 20 determines whether there is any foreign matter that has passed through and has not reached the pipe on the coating liquid supply tank 1 side. If it is determined in step S21 that there is no other foreign matter being detected, the constant flow pump 3 is stopped in step S22, and both the first three-way valve 7 and the second three-way valve 8 are connected to the discharge unit 13. Switch to the side.

Next, in step S23, the first valve 10 is opened, the suction operation of the metering discharge pump 11 is resumed, and the process returns to step S3.
If it is determined in step S17 that the foreign matter is not a bubble, the foreign matter that has reached the first three-way valve 7 from the movement time stored in the storage unit 17 in step S14 in step S24 is the second three-way valve. The time required to reach 8 is calculated by the calculation unit 19 and the measurement unit 18 starts the fourth timer 18d.

  Next, in step S25, it is checked whether or not the time-up of the fourth timer 18d has been detected. If time-up is detected, step S21 is executed by skipping step S18, step S19, and step S20.

  If the time-up of the third timer 18c is not detected in the above step S19, or if it is determined in step S21 that there is another foreign object being detected, the time-up of the fourth timer 18d in the above-described step S25. Is not detected, it is checked in step S8 whether the first detection unit 4 has detected a foreign object. If the first detection unit 4 detects a foreign object in step S8, step S9 is executed. If the first detection unit 4 has not detected a foreign object in step S8, step S11 is executed after skipping step S9 and step S10.

  According to this configuration, the first filter 9 is provided in the pipe between the second three-way valve 8 and the coating liquid supply tank 1, and the second pipe is provided in the pipe between the first three-way valve 7 and the storage tank 15. Since the foreign matter in the coating liquid 2 can be removed without inserting the first and second filters 9 and 14 into the piping from the coating liquid supply tank 1 to the discharge unit 13, the fixed amount of the filter 14 is provided. The suction pressure / discharge pressure of the discharge pump 11 is not changed, and the quality of application can be improved.

  In addition, the coating liquid 2 containing bubbles can be temporarily stored in the storage tank 15 and removed later by vacuum defoaming or the like to be used again as a coating liquid. Since the foreign matter is filtered by the first filter 9 and the coating liquid supply tank 1 returns, the disposal of the expensive coating liquid 2 can be minimized and the cost can be reduced.

  In the above description, the volume of the coating liquid 2 between the second detection unit 5 and the third detection unit 6 and the volume of the coating liquid 2 between the third detection unit 6 and the first three-way valve 7 are described. Although the case where the volume and the volume of the coating liquid 2 between the first three-way valve 7 and the second three-way valve 8 are different has been described, the coating liquid 2 between the second detection unit 5 and the third detection unit 6 is described. , The volume of the coating liquid 2 between the third detector 6 and the first three-way valve 7, and the volume of the coating liquid 2 between the first three-way valve 7 and the second three-way valve 8 are the same. In some cases, the time for the foreign object to move from the second detection unit 5 to the third detection unit 6, the time for the foreign substance to move from the third detection unit 6 to the first three-way valve 7, and the first three-way valve 7 Since the time for moving to the second three-way valve 8 is the same, the processing for calculating the time for the foreign matter to reach the first three-way valve 7 in step S15 and the foreign matter in step S24 are the second three-way valve. And it is possible to eliminate the process of calculating the time to reach the valve 8, it is possible to simplify the configuration of the control unit 16, the processing time can be shortened.

  Further, when it is determined whether or not the foreign matter that has reached the first three-way valve 7 in step S17 is a foreign matter containing bubbles, the moving time of the foreign matter stored in the storage unit 17 in step S14 is the first time the coating liquid 2 is Although it has been described that bubbles are determined to be less than the time required to move from the second detection unit 5 to the third detection unit 6, in addition to this, since the bubbles are spherical in the coating solution 2, the optical type By detecting the size of the foreign matter with, it is possible to calculate the capacitance when the foreign matter is a bubble. Therefore, it is possible to make a more reliable judgment of the bubble by comparing it with the detection value of the capacitance type. it can.

  In addition, transparent foreign objects that are difficult to detect with an optical method can be detected with a capacitance type, and foreign substances that are difficult to detect with an electrostatic method can be detected with an optical method. Can be detected.

  In the above-described embodiment, the optical sensor that detects an air bubble and the electrostatic capacity sensor that detects the air bubble are provided. Even when bubbles are detected by such a sensor, a better result can be obtained than in the prior art.

  The present invention can be applied to the manufacture of flat display panels such as plasma display panels and organic EL display panels, the manufacture of semiconductors, the manufacture of color filters for liquid crystal displays, the manufacture of batteries such as solar cells and lithium ion batteries, and the like.

DESCRIPTION OF SYMBOLS 1 Application liquid supply tank 2 Application liquid 3 Constant flow pump 4 1st detection part 5 2nd detection part 6 3rd detection part 7 1st three-way valve 8 2nd three-way valve 9 1st filter 10 1st Valve 11 constant discharge pump 12 second valve 13 discharge unit 14 second filter 15 storage tank 16 control unit 17 storage unit 18 measurement unit 18a first timer 18b second timer 18c third timer 18d fourth timer 19 calculation unit 20 Discriminating unit 30 Application object 31, 32 Liquid supply piping

Claims (5)

A step of sucking the coating liquid from the coating liquid supply tank through the first switching valve and the second switching valve with a metering discharge pump;
Detecting foreign matter in the coating liquid by a first detection unit interposed in a liquid feeding pipe between the coating liquid supply tank and the first switching valve;
A step of switching the second switching valve to return the coating solution to the coating solution supply tank through the first filter for filtering foreign matter when the first detection unit detects foreign matter in the coating solution;
Detecting foreign matter in the coating liquid at the second detection unit and the third detection unit downstream of the first detection unit;
A step of measuring a time from when the foreign object is detected by the second detection unit until it is detected by the third detection unit;
Calculating a time for the foreign matter to reach the first and second switching valves from the measured time;
Determining whether the foreign matter that has reached the first switching valve is a bubble;
Switching the first switching valve to discharge the coating liquid containing bubbles to the outside;
A coating method comprising: applying a coating liquid to a coating object by a discharge unit using a fixed discharge pump. A first and a second switching valve interposed in series with a liquid feed pipe for sucking a coating liquid from a coating liquid supply tank by a fixed discharge pump;
A discharge unit that applies the coating liquid sent from the metering discharge pump to a coating object;
A first detection unit that detects foreign substances that are interposed in a liquid supply pipe between the coating liquid supply tank and the first switching valve;
A second detection unit that detects foreign substances that are interposed in the liquid supply pipe between the first detection unit and the first switching valve;
A third detection unit for detecting foreign matter that is interposed in the liquid supply pipe between the second detection unit and the first switching valve;
A constant flow pump that is interposed in a liquid feed pipe between the coating liquid supply tank and the first detection unit and sends the coating liquid to the first detection unit;
A liquid feed pipe for collecting the coating liquid heading to the metering discharge pump in the coating liquid supply tank by switching a second switching valve;
When the first detection unit detects foreign matter in the coating liquid, the constant flow pump is operated and the second switching valve is switched to return the coating liquid to the coating liquid supply tank.
The time from when the second detector detects a foreign object to when the third detector detects the foreign object is measured, and from this measured time, the time for the foreign object to reach the first and second switching valves is calculated. ,
And a controller that determines whether the foreign matter that has reached the first switching valve is a bubble and switches the first switching valve to discharge the coating liquid containing the bubble to the outside. 3. The coating apparatus according to claim 2, wherein the second detection unit, the third detection unit, the first switching valve, and the liquid supply pipe connecting the second switching valve are arranged on the same straight line. The first detection unit, the second detection unit, and the third detection unit have both optical and capacitance detection methods, and the control unit controls the optical detection result and the capacitance. The coating apparatus according to claim 2, wherein the detection result of the equation is compared to determine whether the foreign matter is a bubble. The volume of the coating liquid between the second detection unit and the third detection unit, the volume of the coating liquid between the third detection unit and the first switching valve, and the first switching valve and the second switching The coating apparatus according to claim 2, wherein the volume of the coating liquid between the valves is the same.

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