JP2011177008A - Gas conveying device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To constitute a gas conveying device in which spark discharge between linear electrodes is prevented to avoid destruction of an electrode and an insulating film in the vicinity of the electrode. <P>SOLUTION: The linear electrodes 52 mutually parallel with a dielectric substrate 51 are arranged. These linear electrodes 52 are common connected at every four pieces in the arrangement order, and each of then is connected to an output terminal of a periodic pulse power supply 40. On the whole surface of the dielectric substrate 51, the insulating film 54, such as resin coating or silica glass coating, is formed so as to cover the linear electrode 52. Pulse voltages V<SB>1</SB>-V<SB>4</SB>of four phases are output from the periodic pulse power supply 40. Additional capacitors C<SB>PQ</SB>are connected to the respective linear electrodes 52 in series so that an output voltage of this periodic pulse power supply 40 is applied to the linear electrodes 52 via the additional capacitors C<SB>PQ</SB>. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a gas conveyance device that electrically conveys gas.

  Patent Document 1 discloses an apparatus that conveys gas by applying an alternating voltage to a plurality of linear electrodes arranged in parallel, thereby utilizing a change in gas density caused by an unequal electric field generated in the vicinity of the electrodes. ing.

  FIG. 1 is a diagram illustrating a configuration of a plurality of linear electrodes of a gas transfer device of Patent Document 1 and a power source that applies a voltage to them.

On the upper surface of the dielectric substrate 51, a plurality of linear electrodes 52 are arranged in parallel and at regular intervals. Further, the linear electrode 52 is covered with an insulating film 54 from above. The periodic pulse power supply 40 outputs four-phase pulse voltages V _{1 to} V ₄ . The linear electrodes 52 are commonly connected every four in the arrangement order, and are connected to the output terminals of the periodic pulse power supply 40, respectively.

International Publication No. 2008/099569

  In the gas conveyance device of Patent Document 1, it is effective to increase the pulse voltage output from the periodic pulse power source in order to increase the conveyance amount (air volume). However, in the gas transfer device of Patent Document 1, the periodic pulse power source is directly connected to the linear electrodes formed on the surface of the substrate and parallel to each other. In this structure, if the pulse voltage is too high, spark discharge is likely to occur between the linear electrodes, and once spark discharge occurs, the electrodes and the insulating film near the electrodes may be destroyed. In particular, there is a problem that this is promoted when the surface of the insulating film is soiled or foreign matter adheres.

  An object of the present invention is to provide a gas transport device that prevents spark discharge between linear electrodes and prevents destruction of electrodes and insulating films in the vicinity of the electrodes.

  In the above-described spark discharge, a power source that generates a periodic pulse voltage and a linear electrode are directly connected in a direct current manner, so that an amount of electric charge necessary for a discharge between the linear electrodes to reach a spark discharge is supplied. It is thought that.

The gas transfer device of the present invention is arranged in parallel or substantially in parallel with each other on a dielectric substrate and covered with an insulating film. A linear electrode;
A periodic pulse power supply that applies an n-phase pulse voltage that periodically changes over time to the linear electrode;
A capacitor inserted between the periodic pulse power source and the linear electrode.

  For example, the capacitor is composed of a capacitance generated between electrode patterns formed on different surfaces of the dielectric substrate.

  For example, the capacitor is configured by a capacitance generated by providing a dielectric between the linear electrode and a terminal electrode for supplying a voltage from the periodic pulse power source.

  For example, the dielectric is composed of an organic film.

  For example, the linear electrodes have a distance between adjacent linear electrodes in the range of 1.7 μm to 90 μm, and the periodic pulse power source generates a pulse voltage having a pulse rise time of 1 μs or less.

  For example, the pulse voltage has a value in the range of 330V to 950V.

  According to the present invention, the discharge between the linear electrodes does not lead to a spark discharge, and the breakdown of the electrode and the insulating film near the electrode due to the spark discharge is prevented.

It is a figure which shows the structure of the several linear electrode of the gas conveying apparatus of patent document 1, and the power supply which applies a voltage with respect to them. It is a figure which shows the structure of the several linear electrode and the power supply which applies a voltage with respect to them, FIG. 2 (A) is a top view of the dielectric substrate which formed the linear electrode, FIG.2 (B) is the figure It is sectional drawing. FIG. 3A is a block diagram of the entire gas transfer device, and FIG. 3B is a block diagram showing the configuration of the periodic pulse power supply 40. It is a figure showing the pulse voltage waveform of 4 phases output from the periodic pulse power supply 40 shown to FIG. 2 (A). It is a figure which shows the pulse rise time of a pulse voltage. It is a figure showing action area | region S41 and S12 between two adjacent electrodes with respect to sectional drawing of the dielectric substrate 51 shown to FIG. 2 (B). The operation area S12 in between the linear electrodes E ₁ and ^_(j) and the linear electrode E _{2 ^(j),} a diagram showing the motion of charged particles and gas molecules. FIG. 8 is an equivalent circuit when the arrayed electrode substrate portion shown in FIG. 2 is regarded as a periodic structure. FIG. 9 is an equivalent circuit diagram in which points of the same potential in FIG. 8 are connected. FIG. 10 is an equivalent circuit diagram obtained by modifying FIG. 9. FIG. 11 is a diagram illustrating a voltage applied to each element of the equivalent circuit of FIG. 10 at a time when V1 is + V volts in the time domain D. 12 (A) shows the initial stage leading to the spark discharge generating a diagram showing that effective resistance between one of both ends of the C _EE is reduced. FIG. 12B is a comparative example. FIG. 13A is a waveform diagram showing a current flowing between the linear electrodes E ₁ ⁽²⁾ and E ₂ ⁽²⁾ shown in FIG. FIG. 13B is a comparative example, and is a waveform diagram showing a current flowing between the linear electrodes E ₁ ⁽²⁾ and E ₂ ⁽²⁾ shown in FIG. It is a top view of the array electrode substrate 60 used for the gas conveyance apparatus which concerns on 2nd Embodiment. FIG. 15A is a top view of the array electrode substrate 70 used in the gas transfer device according to the third embodiment, and FIG. 15B is a bottom view thereof. FIG. 16 is a cross-sectional view of the array electrode substrate 70 illustrated in FIG. 15. It is a top view of the arrangement | sequence electrode board | substrate 80 used for the gas conveyance apparatus which concerns on 4th Embodiment. 18A and 18B are top views of the array electrode substrate 90 used in the gas transfer device according to the fifth embodiment, and FIG. 18C is a cross-sectional view thereof. It is a circuit diagram of the gas conveyance apparatus which concerns on 6th Embodiment.

<< First Embodiment >>
The gas transfer device according to the first embodiment will be described with reference to the drawings.
FIG. 2 is a diagram showing a configuration of a plurality of linear electrodes and a power source for applying a voltage to them. FIG. 2A is a plan view of a dielectric substrate on which linear electrodes are formed, and FIG. Is a cross-sectional view thereof.

On the upper surface of the dielectric substrate 51, a plurality of linear electrodes 52 are arranged in parallel and at regular intervals. The periodic pulse power supply 40 outputs four-phase pulse voltages V _{1 to} V ₄ . The linear electrodes 52 are connected in common in every four in the arrangement order, and are connected to the output terminals of the periodic pulse power supply 40, respectively. Further, the drawing direction of the connection end with respect to the periodic pulse power supply 40 is alternately switched between the odd-numbered and even-numbered linear electrodes 52.

So that the output voltage of the periodic pulse power source 40 is applied to the linear electrode 52 via an additional capacitor C _PQ, additional capacitor C _PQ is connected in series with the linear electrodes 52.

An insulating film 54 such as a resin film or a silicate glass film is formed on the entire upper surface of the dielectric substrate 51 so as to cover the linear electrode 52. With this configuration, oxidation and sulfurization of the electrode are suppressed, and stable characteristics can be maintained over a long period of time.
In FIG. 2, the + x direction is illustrated as the alignment direction of the linear electrodes 52.

FIG. 3 is a block diagram showing the configuration of the periodic pulse power supply. FIG. 3A is a block diagram of the entire gas transfer device, and FIG. 3B is a block diagram showing the configuration of the periodic pulse power supply 40. In FIG. 3A, the array electrode substrate 50 includes the dielectric substrate 51 shown in FIG. 2, the linear electrodes 52 formed on the dielectric substrate 51, connecting portions for connecting them in parallel at a predetermined interval, and an additional capacitor _CPQ. ing.

As shown in FIG. 3B, the periodic pulse power supply 40 includes a constant voltage DC power supply circuit 42, a gate driver circuit 43, and a timing signal generation circuit 41. The timing signal generation circuit 41 provides a timing signal for generating a positive voltage, and the gate driver circuit 43 switches the ground potential or + V volt voltage input from the constant voltage DC power supply circuit 42 in accordance with the timing signal, thereby generating a pulse voltage. the V ₁ ~V ₄ respectively outputted to the terminal electrodes _P 1 to P _4. This gate driver circuit can be configured with, for example, a power MOSFET as a main element.

The voltage Vi (i = 1, 2, 3, or 4) output from the gate driver circuit 43 is a periodic function of a period T, and between time t = 0 and t = T,
+ V {(T / 4) × (i−1) <t <(T / 4) × (i−1 / 2)}
0 {when other than t}
Each value of is taken. However, V is a positive voltage. By outputting such a voltage, the voltage waveform shown in FIG. 4 is repeatedly output.

FIG. 4 is a diagram showing a four-phase pulse voltage waveform output from the periodic pulse power supply 40 shown in FIG. The drive voltage of each phase is repeatedly generated in a + V volt interval across a 0 [V] interval. Adjacent phases are shifted by ¼ period. In this example, only one of the pulse voltages V _{1 to} V ₄ is output with + V volts, and + V volts are not simultaneously output from two or more terminals.

  The rise of each voltage pulse will be described with reference to FIG. In FIG. 5, the pulse rise time τ is defined as the time from 20% to 80% of the peak voltage V. The pulse rise time τ is set to be 1 μs or less.

  As described above, the time waveform of the n-phase pulse voltage is cyclically output as step pulses each of which lasts for a certain time, whereby the power supply circuit can be configured at low cost.

  Next, the operation of the gas conveyance device according to the first embodiment will be described.

  It is considered that the following processes (actions) (a) to (d) are involved in the mechanism of the flow of gas.

(A) At the rise of each pulse voltage, the electric field between the electrodes sharply increases, thereby causing discharge in the gas. Due to this discharge, gas molecules between the electrodes are ionized to generate charged particles.
(B) The charged particles derived from (a) and (d) receive a force by the electric field and are accelerated along the direction of the electric field.
(C) The accelerated charged particles collide with other gas molecules that are not ionized and give momentum to the gas molecules.
(D) Charged particles adhere to the insulating coating near the electrode.

Here, supplementary explanation will be given using the drawings.
FIG. 6 is a diagram showing action regions S41 and S12 between two adjacent electrodes with respect to the cross-sectional view of the dielectric substrate 51 shown in FIG. 2B. Of the linear electrodes arranged in parallel with each other as four sets, an arbitrary set is j, and the linear electrodes from the first phase to the fourth phase are E ₁ ^{(j) to} E ₄ ^{(j), respectively.} In this way, the action region S41 is a region on the insulating film between the linear electrode E ₄ ^(j-1) and the linear electrode E ₁ ^(j) . The action region S12 is a region on the insulating film between the linear electrode E ₁ ^(j) and the linear electrode E ₂ ^(j) .

FIGS. 7A and 7B are diagrams showing the movement of charged particles and gas molecules in the action region S12 between the linear electrode E ₁ ^(j) and the linear electrode E ₂ ^(j) . is there.

  In the process (a), at the time t1 when the voltage V1 rises as shown in FIG. 4, it is considered that the electric field rapidly increases in the action regions S41 and S12 in FIG. The dielectric barrier discharge is a discharge that occurs when the electrode is covered with a dielectric (in this embodiment, the insulating film 54). In this dielectric barrier discharge, the charged particles generated by the discharge are directed to the linear electrode by the Coulomb force received by the electric field, but cannot reach the linear electrode because the linear electrode is covered with an insulating film. , It remains attached to the dielectric surface while retaining the charge.

  The charged particles adhering to the dielectric surface generate an electric field opposite to the electric field created by the electrode. When a certain amount of charged particles are generated and attached, the electric field between the electrodes becomes sufficiently small, and the discharge (dielectric barrier discharge) stops. Therefore, the discharge stops in a very short time. For this reason, the discharge normally does not lead to a destructive discharge such as an arc discharge, and the amount of generated charge is limited to a certain amount.

  In the processes (b) and (c), as schematically shown in FIG. 7A, charged particles are generated, and the charged particles are accelerated by an electric field and collide with non-ionized gas molecules. It is done. As a result of this collision, the kinetic energy is transferred from the charged particles to the gas molecules, thereby transporting the gas. Here, when the gas to be transported is air, the charged particles are considered to be mainly monovalent positive ions and electrons obtained by ionizing nitrogen molecules in the air.

  In the step (d), as schematically shown in FIG. 7B, the charged particles attracted toward the linear electrode are considered to remain attached on the insulating film near the linear electrode. . The attached charged particles (wall charges) generate an electric field, which may work in a direction that cancels out the electric field created by the electrode depending on the time, or may work in a direction that is added to the increasing direction. In the latter case, there is an advantage that discharge is generated with higher efficiency.

  In the above description, it is not determined which direction the gas is conveyed is the + x direction or the −x direction. However, in reality, in at least one of the processes (a) to (d), a flow in one direction is considered to occur due to an asymmetry with respect to the + x direction and the −x direction. According to experiments, in many cases this flow direction was the + x direction.

  Next, specific dimensions, applied voltage, and applied voltage waveform of each part of the gas conveyance device according to the embodiment of the present invention will be described.

First, the spacing between the linear electrodes and the applied voltage will be described.
In Paschen's law, it is known that the discharge start voltage Vs is a function of the product pd of the atmospheric pressure p and the interelectrode distance d. In air, the minimum value of the discharge start voltage Vs is around pd = 0.57 mmHg · cm. At this time, the discharge start voltage is 330V. Since the withstand voltage of generally available semiconductor power devices is about 1000 V, it is desirable to set a maximum of 950 V with a margin of 5%. Therefore, the pulse voltage applied to the linear electrode is suitable as a gas transport device if it has a value within the range of 330V to 950V.

  According to Paschen's law, the condition that the discharge start voltage Vs is 950 V or less in the case of air corresponds to pd of 0.13 to 6.8 mmHg · cm. This condition corresponds to the inter-electrode distance d being 1.7 μm to 90 μm under 1 atm (p = 760 mmHg). That is, by setting the inter-electrode distance d to 1.7 μm to 90 μm, discharge is generated by a voltage (950 V or less) that is relatively easy to use, and thus the apparatus can be configured easily.

  The inter-electrode distance d is [linear electrode arrangement pitch 60 μm] − [linear electrode width 25 μm] = 35 μm.

Next, in preparation for explaining the operation of the additional capacitor _CPQ, a description will be given of a normal time when the discharge between the linear electrodes does not lead to a spark discharge (when there is no abnormality that causes a discharge).

An equivalent circuit of the array electrode substrate portion shown in FIG. 2 is shown in FIG. In FIG. 8, _CEE corresponds to the capacitance between adjacent linear electrodes, and C _PQ corresponds to the capacitance of an additional capacitor connected in series to the linear electrodes. In FIG. 8, the capacitance generated between the linear electrodes apart from each other other than the adjacent linear electrodes is ignored.

Here, for simplification of consideration, the following is considered. The number of the linear electrodes shown in FIG. 2 is 4 periods = 16, but in an actual application, the number of periods (hereinafter referred to as N) is larger, for example, N = 100. In this case, the addition of capacitor C _EE surrounded by the broken line in FIG. 8, there is almost no effect on the operation of the circuit. In the circuit shown in FIG. 8, if the initial value of the accumulated charge amount of each capacitor is zero, the potential of each part has the same periodicity as the periodic structure of the linear electrodes. Therefore, the circuit diagram shown in FIG. 8 is the same even if the points of the same potential are connected by the conductive wires as shown in FIG. From the combined capacitance between the capacitors shown in FIG. 9, the circuit diagram of FIG. 9 can be modified as shown in FIG. Four combined capacitors of N capacitors _CEE are provided, and the combined capacitors are connected to each other through terminals W1, W2, W3, and W4. Terminal W1, W2, W3 and voltage _V 1 ~V ₄ from each of the terminal electrodes _P 1 to P ₄ to W4 is applied via the combined capacitance of the capacitor _{C PQ.}

  Consider the operation when the voltage pulse shown in FIG. 4 is applied to the equivalent circuit shown in FIG. Here, it is assumed that the initial value of the accumulated charge amount of each capacitor is zero.

When all of the voltages V _{1 to} V ₄ are 0 volts, the terminal voltages of W1, W2, W3, and W4 are all 0 volts.

Next, when the voltage V ₁ applied from the terminal electrode P ₁ is + V volts, the voltage applied to each element of the equivalent circuit of FIG. 10 can be expressed as shown in FIG. At this time, if the calculation is performed while paying attention to the fact that the potentials at the points W2 and W4 are equal from the symmetry of the circuit diagram, the potential difference _VW1-W2 between W1 and _W2 is
VW1 _-W2 = (1 + 3α) V / (1 + 6α + 8α ² ) (1)
However, α = C _EE / C _PQ
It can be expressed as.

That is, a voltage proportional to the voltage value V applied to P1 is between the linear electrodes E ₁ ^(j) and E ₂ ^(j) , and the linear electrodes E ₄ ^(j−1) and E ₁ ^(j). Between. In particular,
When determining the _{C PQ} >> C _EE and so as to _{C PQ,} since it is α << 1, from the equation (1),
V _W1−W2 ≈ V (2)
Is obtained. That is, most of the voltage values applied to P ₁ are between the linear electrodes E ₁ ^(j) and E ₂ ^(j) , and the linear electrodes E ₄ ^(j−1) and E ₁ ^(j) The voltage change between the linear electrodes due to the insertion of _CPQ is negligible.

Next, the spark discharge suppressing action by providing the _CPQ will be described.
Voltage V1 applied to the terminal electrode P ₁ is considered the time of + V volts.
In an initial stage until spark discharge occurs, for example, as shown in a broken line in FIG. 12A, it is considered that an effective resistance value between both ends of the target _CEE becomes small.

Here, for comparison, the case of the conventional example is shown in FIG. In the example of FIG. 12B, a large current flows from E ₁ ⁽¹⁾ to E ₂ ⁽²⁾ via the discharge part surrounded by a broken line. As a result, the discharge may break down the entire path, or the electrode and surrounding substrate material may be destroyed or deteriorated by Joule heat or the discharge itself. This large current is considered to continue until the voltage pulse ends.

On the other hand, in the embodiment of the present invention, charges are accumulated in the capacitances C1 and C2 shown in FIG. Since the combined capacity of C1 and C2 is C _PQ / 2, the amount of charge flowing in the path indicated by the broken line is limited to about C _PQ · V / 2 at most. Therefore, the discharge does not lead to the destruction of the entire path, and the possibility of stopping at the initial stage of the discharge increases.

Here, regarding the current flowing between the linear electrodes E ₁ ⁽²⁾ and E ₂ ⁽²⁾ shown in FIGS. 12 (A) and 12 (B), the waveforms are shown in FIGS. 13 (A) and 13 (B). The figure is shown. As described above, in FIG. 13B, which is a conventional example, when a spark discharge occurs between the linear electrodes E ₁ ⁽²⁾ and E ₂ ⁽²⁾ , as in the waveform surrounded by the broken line in the figure, A large current flows during the entire period in which the voltage V ₁ is applied to E ₁ ⁽²⁾ , which causes the entire path to break down. On the other hand, in FIG. 13A, which is an embodiment of the present invention, when C1 and C2 are present, when C1 and C2 are fully charged, the current is as shown by the waveform surrounded by the broken line in the figure. Will not flow. Therefore, even if the voltage V ₁ is applied to E ₁ ⁽²⁾ , the constants of C1 and C2 are set in advance so that no current flows in the middle of the period, thereby preventing all-path destruction due to discharge. be able to.

  Thus, according to the first embodiment, spark discharge between adjacent linear electrodes can be prevented, and destruction of the electrode and the insulating film due to spark discharge can be prevented.

<< Second Embodiment >>
FIG. 14 is a plan view of the array electrode substrate 60 used in the gas transfer device according to the second embodiment. As shown in FIG. 14, the linear electrode 52 and the extraction electrode 53 are formed on the upper surface of the dielectric substrate 51. Further, an additional capacitor _CPQ is inserted between the linear electrode 52 and the extraction electrode 53, respectively. These additional capacitors _CPQ are formed in an electrode pattern on the upper surface of the dielectric substrate 51. Further, a terminal electrode 57 and a lower surface wiring 56 for connecting to a periodic pulse power source are formed on the lower surface of the dielectric substrate 51. The lower surface wiring 56 and the extraction electrode 53 are connected via the via electrode 55.

As described above, the lead electrode 53, the lower surface wiring 56, and the terminal electrode 57 are provided on the dielectric substrate 51 together with the additional capacitor _CPQ , and these are integrated as the array electrode substrate 60, so that the connection with the periodic pulse power source can be achieved. It becomes easy.

<< Third Embodiment >>
FIG. 15A is a top view of the array electrode substrate 70 used in the gas transfer device according to the third embodiment, and FIG. 15B is a bottom view thereof. The array electrode substrate 70 is a substrate in which electrode patterns are formed on both surfaces of the dielectric substrate 51, and is, for example, a so-called double-sided printed substrate. A plurality of linear electrodes 52 are arranged in parallel on the dielectric substrate 51. Each linear electrode 52 is connected to a pad electrode 58.

As shown in FIG. 15B, a counter electrode 59 is formed on the lower surface of the dielectric substrate 51. Each counter electrode 59 is connected to terminals P _{1 to} P ₄ of the periodic pulse power supply via a lead electrode.

  An insulating film covering the linear electrode 52 and the pad electrode 58 is formed on the entire upper surface of the dielectric substrate 51. In addition, an insulating film that covers the counter electrode 59 is formed on the entire bottom surface of the dielectric substrate 51 except for the terminal portions.

FIG. 16 is a cross-sectional view of the dielectric substrate 51 shown in FIG. The capacitance generated between the pad electrode 58 and the counter electrode 59 across the dielectric substrate 51 constitutes the additional capacitor _CPQ . Therefore, a circuit similar to the array electrode substrate shown in FIGS. 2 and 14 is formed.

  According to the array electrode substrate 70 shown in FIG. 16, since the capacitance is generated between the pad electrode 58 and the counter electrode 59 with the dielectric substrate 51 interposed therebetween, electrode patterns are formed on both surfaces of the dielectric substrate 51. In spite of forming, the processing of the via electrode becomes unnecessary.

<< Fourth Embodiment >>
FIG. 17 is a top view of the array electrode substrate 80 used in the gas transfer device according to the fourth embodiment. As shown in FIG. 17, the linear electrode 52 and the extraction electrode 53 are formed on the upper surface of the dielectric substrate 51. Further, an additional capacitor _CPQ is inserted between the linear electrode 52 and the extraction electrode 53. However, unlike the example shown in FIG. 14, one additional capacitor _CPQ is connected for every two linear electrodes. Unlike the additional capacitor C _{PQ of} FIG. 14 provided on the upper surface of the dielectric substrate 51, these additional capacitors C _PQ are formed on the lower surface of the dielectric substrate 51 in an electrode pattern. Further, a terminal electrode 57 and a lower surface wiring 56 for connecting to a periodic pulse power source are formed on the lower surface of the dielectric substrate 51. The lower surface wiring 56 and the extraction electrode 53 are connected via the via electrode 55.

In the example of FIG. 17, one additional capacitor _CPQ is connected for every two linear electrodes, but additional capacitors may be connected for every three or more linear electrodes. For example, one additional capacitor may be connected every ten or several tens.

  Thus, by connecting additional capacitors for each of the plurality of linear electrodes, the total number of additional capacitors can be reduced, and the formation of additional capacitors is facilitated. However, since each additional capacitor takes charge of a plurality of linear electrodes, the necessary capacity of the additional capacitor is increased, and the amount of current (charge) flowing when a discharge is generated is increased accordingly. Therefore, it is desirable to determine the number and capacity of additional capacitors to be shared within a range in which the discharge between the linear electrodes does not cause all-path destruction.

<< Fifth Embodiment >>
FIG. 18A is an assembly explanatory diagram of the array electrode substrate 90 used in the gas transfer device according to the fifth embodiment, and FIG. 18B is a completed view thereof. FIG. 18C is a cross-sectional view of FIG. The array electrode substrate 90 is a substrate in which an electrode pattern is formed on the upper surface of the dielectric substrate 51. A plurality of linear electrodes 52 are arranged in parallel on the dielectric substrate 51. Each linear electrode 52 is connected to a pad electrode 58. The plurality of linear electrodes 52 are covered with an insulating film 54. On the pad electrode 58, counter electrode 59 is disposed through the dielectric thin film 61 made of an organic sheet material such as polyimide, the counter electrode 59 is connected to the terminal electrodes P ₁ to P ₄ respectively. The pad electrode 58 and the counter electrode 59 face each other through the dielectric thin film 61 to generate a capacitance, which has the function of an additional capacitor.

<< Sixth Embodiment >>
FIG. 19 is a circuit diagram of a gas transfer device according to the fifth embodiment. As shown in FIG. 19, an additional capacitor _CPQ is inserted in series with the periodic pulse power supply line connecting the periodic pulse power supply 40 and the array electrode substrate 50.

  In this way, by inserting an additional capacitor in the power supply voltage supply line for the array electrode substrate 50, when the discharge between the linear electrodes starts, the amount of discharge current (charge) is limited, and the discharge breaks down all the way. Can be prevented.

<< Other embodiments >>
In the example described above, the wiring electrode substrate is configured by forming the electrode pattern on the dielectric substrate. However, the substrate on which the wiring electrode is formed may not be the substrate, and may be provided on the dielectric substrate.

  In the example described above, the four-phase pulse voltage is applied to the linear electrodes commonly connected every four periods. However, it is not limited to the four phases and may generally be an n-phase. That is, an n-phase pulse voltage may be applied to linear electrodes commonly connected every n cycles.

  In the example of the n-phase pulse voltage, a waveform having a width T / 4 in the + V volt section is repeatedly generated in the period T, but the width in the + V volt section may be arbitrary.

  In the first to fourth embodiments, the additional capacitor is formed by the electrode pattern on the array electrode substrate. However, a capacitor array chip in which a plurality of capacitors are formed in the chip may be mounted on the array electrode substrate.

C _EE ... Linear interelectrode capacitance C _PQ ... Additional capacitors E _{1 to} E ₄ ... Linear electrodes S12, S41 ... Action region 40 ... Periodic pulse power supply 41 ... Timing signal generation circuit 42 ... Constant voltage DC power supply circuit 43 ... Gate driver Circuits 50, 60, 70, 80, 90 ... array electrode substrate 51 ... dielectric substrate 52 ... linear electrode 53 ... extraction electrode 54 ... insulating film 55 ... via electrode 56 ... lower surface wiring 57 ... terminal electrode 58 ... pad electrode 59 ... Counter electrode 61 ... Dielectric thin film

Claims (6)

A plurality of linear electrodes that are arranged in a permutation with respect to the dielectric substrate and are covered with an insulating film, and are connected in common in each period with a constant number of phases n as a period;
A periodic pulse power supply that applies an n-phase pulse voltage that periodically changes over time to the linear electrode;
A gas conveyance device comprising: a capacitor inserted between the periodic pulse power source and the linear electrode.   The gas transfer device according to claim 1, wherein the capacitor is a capacitance generated between electrode patterns formed on different surfaces of the dielectric substrate.   The gas transfer device according to claim 1, wherein the capacitor is a capacitance generated by providing a dielectric between the linear electrode and a terminal electrode for supplying a voltage from the periodic pulse power supply. .   The gas transfer device according to claim 3, wherein the dielectric is an organic film.   The linear electrodes have an interval between adjacent linear electrodes in a range of 1.7 μm to 90 μm, and the periodic pulse power source generates a pulse voltage having a pulse rise time of 1 μs or less. 4. The gas transfer device according to any one of 4 above.   The gas transfer device according to any one of claims 1 to 5, wherein the pulse voltage has a value within a range of 330V to 950V.

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