JP2011176146A5 - - Google Patents
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- JP2011176146A5 JP2011176146A5 JP2010039379A JP2010039379A JP2011176146A5 JP 2011176146 A5 JP2011176146 A5 JP 2011176146A5 JP 2010039379 A JP2010039379 A JP 2010039379A JP 2010039379 A JP2010039379 A JP 2010039379A JP 2011176146 A5 JP2011176146 A5 JP 2011176146A5
- Authority
- JP
- Japan
- Prior art keywords
- waveguide
- processing apparatus
- plasma processing
- stubs
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010039379A JP5663175B2 (ja) | 2010-02-24 | 2010-02-24 | プラズマ処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010039379A JP5663175B2 (ja) | 2010-02-24 | 2010-02-24 | プラズマ処理装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011176146A JP2011176146A (ja) | 2011-09-08 |
| JP2011176146A5 true JP2011176146A5 (cg-RX-API-DMAC7.html) | 2013-04-04 |
| JP5663175B2 JP5663175B2 (ja) | 2015-02-04 |
Family
ID=44688745
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010039379A Active JP5663175B2 (ja) | 2010-02-24 | 2010-02-24 | プラズマ処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5663175B2 (cg-RX-API-DMAC7.html) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102322536B (zh) | 2011-09-05 | 2012-11-07 | 上海鸿润科技有限公司 | 阀芯组件及采用该阀芯组件的阀门 |
| JP6470515B2 (ja) * | 2014-07-08 | 2019-02-13 | 株式会社日立ハイテクノロジーズ | プラズマ処理装置およびプラズマ処理方法 |
| JP6442242B2 (ja) | 2014-11-17 | 2018-12-19 | 株式会社日立ハイテクノロジーズ | プラズマ処理装置 |
| JP6388554B2 (ja) * | 2015-03-05 | 2018-09-12 | 株式会社日立ハイテクノロジーズ | プラズマ処理装置 |
| KR102864349B1 (ko) * | 2022-06-21 | 2025-09-24 | 주식회사 히타치하이테크 | 플라스마 처리 장치 및 가열 장치 |
| CN118830063A (zh) * | 2023-02-15 | 2024-10-22 | 株式会社日立高新技术 | 等离子处理装置以及等离子处理方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4837854B2 (ja) * | 2001-09-28 | 2011-12-14 | 東京エレクトロン株式会社 | 整合器およびプラズマ処理装置 |
-
2010
- 2010-02-24 JP JP2010039379A patent/JP5663175B2/ja active Active
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