JP2011174119A5 - - Google Patents
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- Publication number
- JP2011174119A5 JP2011174119A5 JP2010037922A JP2010037922A JP2011174119A5 JP 2011174119 A5 JP2011174119 A5 JP 2011174119A5 JP 2010037922 A JP2010037922 A JP 2010037922A JP 2010037922 A JP2010037922 A JP 2010037922A JP 2011174119 A5 JP2011174119 A5 JP 2011174119A5
- Authority
- JP
- Japan
- Prior art keywords
- plating layer
- microstructure
- layer
- forming
- plating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010037922A JP5744407B2 (ja) | 2010-02-23 | 2010-02-23 | マイクロ構造体の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010037922A JP5744407B2 (ja) | 2010-02-23 | 2010-02-23 | マイクロ構造体の製造方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2011174119A JP2011174119A (ja) | 2011-09-08 |
JP2011174119A5 true JP2011174119A5 (zh) | 2013-04-11 |
JP5744407B2 JP5744407B2 (ja) | 2015-07-08 |
Family
ID=44687237
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010037922A Expired - Fee Related JP5744407B2 (ja) | 2010-02-23 | 2010-02-23 | マイクロ構造体の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5744407B2 (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5627247B2 (ja) * | 2010-02-10 | 2014-11-19 | キヤノン株式会社 | マイクロ構造体の製造方法および放射線吸収格子 |
JP5804726B2 (ja) * | 2011-02-24 | 2015-11-04 | キヤノン株式会社 | 微細構造体の製造方法 |
JP6149343B2 (ja) * | 2012-03-26 | 2017-06-21 | コニカミノルタ株式会社 | 格子および格子ユニットならびにx線用撮像装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002313233A (ja) * | 2001-04-10 | 2002-10-25 | Sumitomo Metal Mining Co Ltd | ダブルテープ式アパチャーグリルの検査方法 |
ITTO20030167A1 (it) * | 2003-03-06 | 2004-09-07 | Fiat Ricerche | Procedimento per la realizzazione di emettitori nano-strutturati per sorgenti di luce ad incandescenza. |
JP5773624B2 (ja) * | 2010-01-08 | 2015-09-02 | キヤノン株式会社 | 微細構造体の製造方法 |
-
2010
- 2010-02-23 JP JP2010037922A patent/JP5744407B2/ja not_active Expired - Fee Related
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