JP2011165962A - Epitaxial growth substrate, semiconductor device, and epitaxial growth method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To reduce the occurrence of end cracks in a group-III nitride semiconductor layer from the vicinity of the orientation flat, when the group-III nitride semiconductor layer is grown heteroepitaxially on a silicon substrate. <P>SOLUTION: The silicon substrate having a (111) plane which has orientation flat, in a direction in which the <110> direction rotates counterclockwise about the rotation axis of the <111> direction by an angle ϕ of 30°, 90°, and 150° as a principal surface is used as the substrate for heteroepitaxial growth; and a buffer layer made of the group-III nitride semiconductor is formed. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to an epitaxial growth substrate on which a compound semiconductor is epitaxially grown, and a semiconductor device configured using the compound semiconductor formed on the epitaxial growth substrate. The present invention also relates to an epitaxial growth method performed when forming this semiconductor device.

  Group III nitride semiconductors typified by GaN are widely used as materials for light-emitting elements and power elements such as blue and green LEDs (light-emitting diodes) and LDs (laser diodes) because of their wide band gaps. Yes. When manufacturing a semiconductor device such as LSI using silicon or the like, a large-diameter wafer obtained by cutting out a large-diameter bulk crystal is used, whereas in such a compound semiconductor, a large-diameter (for example, 4 It is difficult to obtain a bulk crystal having an inch diameter or more. For this reason, when manufacturing a semiconductor device using such a compound semiconductor, a wafer obtained by heteroepitaxially growing the compound semiconductor on a substrate made of a different material is generally used. Further, a pn junction and a heterojunction constituting the LED and LD can be obtained by further epitaxial growth thereon.

  For example, sapphire, SiC, and the like are known as a substrate material on which a GaN single crystal can be grown. These materials are relatively easy to obtain large-diameter bulk crystals, and by appropriately selecting the plane orientation, GaN can be heteroepitaxially grown on a substrate made of these crystals. A wafer on which the GaN single crystal is formed can be obtained. However, since a substrate made of these materials is expensive, use of a cheaper silicon (Si) single crystal substrate is also under study.

  For example, Patent Document 1 describes a semiconductor substrate having a configuration in which a multilayer structure of a group III nitride semiconductor is formed on a Si single crystal substrate. At this time, since the lattice constant of silicon and the lattice constant of GaN are different, crystal defects (dislocations), cracks, and the like due to this lattice mismatch may occur in the formed group III nitride semiconductor. In order to mitigate the influence of this lattice mismatch, the active layer material and the Si single crystal substrate between the active layer (a layer directly involved in device operation) that is required to have a particularly high quality and the active layer material and Si In some cases, a buffer layer that relaxes the lattice mismatch is inserted. Patent Document 1 describes that (111) is used as the plane orientation of the Si single crystal substrate in such a case, and a high-quality group III nitride semiconductor layer is obtained thereon via an AlGaInN multilayer film. .

JP 2007-258230 A

  Usually, the Si wafer used as the Si single crystal substrate has an outer diameter of 2 inches or more, and a plan view and a sectional view in the AA direction are shown in FIG. The shape is a substantially disk shape, but in order to specify the orientation of the wafer during the manufacturing process of the semiconductor device using this, a part of the periphery thereof is not a circular arc shape but a linear shape (Orientation flat: hereinafter abbreviated as orientation flat) is formed. In the plan view of FIG. 6, this orientation flat exists on the right side. An example of the cross-sectional shape of the end portion of the Si wafer is shown enlarged on the right side of the cross-sectional view in FIG. Most semiconductor processing apparatuses recognize the orientation of the Si wafer by detecting this orientation flat, and appropriately carry and install the wafer. Such an orientation flat is standardized by the SEMI standard or the like, and speaking of a Si wafer, the main surface is the (100) surface or the (111) surface, and the orientation flat shown in FIG. 6 is the (110) surface. Is normal.

  The crack described in Patent Document 1 means that the crack is generated on the main surface of the substrate. That is, until now, the in-plane crack due to the size of lattice mismatch between the Si single crystal substrate and the group III nitride semiconductor layer has been a major problem.

  The inventors have developed a technique for obtaining a nitride semiconductor layer having good crystallinity and no cracks in the surface on a (111) -plane silicon substrate. However, attention has not been paid to cracks at the edge of the substrate. As a result of examining the cracks at the edge of the substrate, the inventor has found that the edge cracks are particularly frequently generated in the group III nitride semiconductor layer near the orientation flat. Furthermore, when a semiconductor element is formed in the group III nitride semiconductor layer, the end crack may further develop due to stress during the manufacturing process or after the manufacturing, which may have adverse effects such as cracking. .

  That is, even when the group III nitride semiconductor is heteroepitaxially grown on the silicon substrate through an optimum buffer layer so as not to generate in-plane cracks, the substrate end, particularly in the vicinity of the orientation flat, enters the group III nitride semiconductor layer. There was a problem that cracks occurred. Furthermore, it has been difficult to change the growth conditions so as not to generate in-plane cracks and to suppress the occurrence of end cracks.

  The present invention has been made in view of such problems, and an object thereof is to provide an invention that solves the above problems.

In order to solve the above problems, the present invention has the following configurations.
An epitaxial growth substrate of the present invention is an epitaxial growth substrate comprising a silicon single crystal substrate having a (111) plane as a main surface and a buffer layer made of a group III nitride semiconductor and formed on the silicon single crystal substrate. In the silicon single crystal substrate, the orientation flat is rotated at any angle of 25 to 35 °, 85 to 95 °, or 145 to 155 ° in the circumferential direction from the position corresponding to the (110) plane. It is formed.
In the epitaxial growth substrate of the present invention, the buffer layer includes a layer made of aluminum nitride (AlN).
In the epitaxial growth substrate of the present invention, the buffer layer includes a superlattice structure.
The semiconductor device of the present invention includes the epitaxial growth substrate and an active layer made of a group III nitride semiconductor formed on the epitaxial growth substrate.
The semiconductor device according to the present invention is characterized in that an operation current flows in a direction parallel to the main surface in the active layer.
The epitaxial growth method of the present invention is an epitaxial growth method in which a buffer layer made of a group III nitride semiconductor and an active layer made of a group III nitride semiconductor are sequentially formed on a silicon single crystal substrate on which an orientation flat is formed, In the in-plane direction of the buffer layer, the orientation flat in the silicon single crystal substrate is formed so as to form an end crack parallel to the straight portion constituting the orientation flat.
In the epitaxial growth method of the present invention, a buffer layer made of a group III nitride semiconductor and an active layer made of a group III nitride semiconductor are formed on a silicon single crystal substrate having an orientation flat formed and having a (111) plane as a main surface. In the epitaxial growth method of sequentially forming, in the silicon single crystal substrate, the orientation flat is any one of 25 to 35 °, 85 to 95 °, and 145 to 155 ° in a circumferential direction from a portion corresponding to the (110) plane. It is characterized by being formed at a position rotated by an angle of.

  Since the present invention is configured as described above, when a group III nitride semiconductor is heteroepitaxially grown on a silicon substrate, it occurs in the group III nitride semiconductor layer from the vicinity of the orientation flat without changing the growth conditions. End cracks can be reduced.

It is a figure which shows the orientation flat direction in the silicon single crystal substrate used in the epitaxial growth board | substrate which concerns on embodiment of this invention. It is sectional drawing which shows the structure of the semiconductor device formed using the epitaxial growth board | substrate based on embodiment of this invention. It is the external appearance photograph which looked at the wafer used as the Example of this invention from the orientation flat direction upper side. It is the external appearance photograph which looked at the wafer used as the 1st comparative example from the orientation flat direction upper side. It is the external appearance photograph which looked at the wafer used as the 2nd comparative example from the orientation flat direction upper side. It is the top view and sectional drawing which show the form of a silicon single crystal substrate.

  Hereinafter, an epitaxial growth substrate according to an embodiment of the present invention will be described. A semiconductor device formed using this epitaxial growth substrate is a HEMT (High Electron Mobility Transistor) using a heterojunction of GaN and AlGaN. In general, when a semiconductor device is used, individual semiconductor elements (HEMT elements) obtained by dicing a wafer after a manufacturing process, or a packaged form thereof are used. However, it is not limited to such a form here, and what is in the state of the wafer before dicing is also included in this semiconductor device.

  In this epitaxial growth substrate, a buffer layer made of a group III nitride semiconductor is formed on a Si substrate. Here, the Si substrate is a substrate whose main surface is the (111) plane of a Si single crystal having a diamond structure. Moreover, as shown in FIG. 6, it is a substantially disk shape provided with an orientation flat (orientation flat). Here, the substrate surface orientation shown in the drawing, that is, the direction of the normal line of the main surface of the (111) plane Si substrate is the <111> direction, and the orientation flat direction of the (110) plane orientation flat (which constitutes the orientation flat) If the <110> direction is defined as the <110> direction, the counterclockwise angle φ between the <110> direction in the substrate plane and the orientation flat direction is 30 °, 90 °, as shown in FIG. , 150 °. These directions are crystallographically equivalent due to the symmetry of the (111) plane, and the same applies to the clockwise angle. That is, the orientation flat direction in the Si substrate used here is a direction obtained by rotating the <110> direction by any angle of 30 °, 90 °, and 150 ° with the <111> direction as the rotation axis, and configures the orientation flat portion. The straight line is perpendicular to these directions. That is, the orientation flat is a place rotated from the portion corresponding to the (110) plane by any one of 30 °, 90 °, and 150 ° in the circumferential direction. Exactly this angle is in the range of 30 ° ± 5 °, 90 ° ± 5 °, 150 ° ± 5 °. These angular deviations of about ± 5 ° are acceptable in manufacturing and do not significantly affect the effects of the present invention.

  FIG. 2 shows a cross-sectional structure of the epitaxial growth substrate 10. The buffer layer 20 is formed on the Si substrate 11 having the above structure, and the HEMT is formed in the active layer 30 formed on the buffer layer 20. The active layer 30 includes a channel layer 31 and an electron supply layer 32, and an electron layer that constitutes an operating current in the HEMT is formed near the interface between the channel layer 31 and the electron supply layer 32. This operating current flows in a region between a source electrode and a drain electrode (both not shown) formed on the electron supply layer 32, and flows through a gate electrode (not shown) formed between the source electrode and the drain electrode. The on / off state is set by the potential. The buffer layer 20 is inserted between the active layer 30 and the Si substrate 11 in order to mitigate the effect of lattice mismatch between the active layer 30 and the Si substrate 11 and increase the crystallinity of the active layer 30. Thereby, the characteristics of the HEMT in which the element operation is performed in the active layer 30 can be improved.

  The Si substrate 11 is a single crystal of the above-described form, and has a conductivity type of pn, and the specific resistance is not particularly limited, and various types can be applied. A B-doped p-type substrate or a P- or As-doped n-type substrate has a specific resistance in the range of, for example, 0.001 Ω · cm to 100,000 Ω · cm. Other impurities are not particularly limited. The edge part (bevel part) is shape | molded in the shape shown by the right of sectional drawing in FIG. The effects of the present invention are exhibited regardless of whether or not the bevel portion is polished. However, when the flatness of the bevel portion is lowered without polishing, it is more preferable not to perform the polishing process because stress is dispersed and cracks are unlikely to progress. The thickness of the Si substrate 11 is about 700 μm, for example. The manufacturing method of the Si substrate 11 is arbitrary, and is obtained by, for example, the CZ method or the FZ method. However, the orientation flat is formed as described above, and the direction of the substrate surface (main surface of the substrate) and the orientation flat direction are set as described above.

  The buffer layer 20 is configured by epitaxially growing an initial growth layer 21 and a superlattice laminate 22 sequentially. Both layers are made of a group III nitride semiconductor. In the case of the HEMT structure, since it is necessary to suppress the leakage current in the vertical direction, the buffer layer is preferably semi-insulating. Insulating properties can be improved by introducing impurities such as Fe, C, and Mg. It is most desirable to dope C in order to suppress contamination of the active layer with impurities.

  The initial growth layer 21 is made of, for example, aluminum nitride (AlN) and has a thickness of about 100 nm, for example. Among group III elements, Ga and In easily react with Si, so that defects are likely to occur. Due to these defects, defects are also likely to occur in a layer epitaxially grown thereon. For this reason, AlN which does not contain Ga and In is particularly preferably used. However, particularly high purity is not required, and impurities such as Si, H, O, B, Mg, As, and P may be included at an addition rate of 1% or less including Ga and In. As described above, the buffer layer 20 is formed in order to mitigate the effect of lattice mismatch between the active layer 30 and the Si substrate 11, and in this, the initial growth layer 21 is formed thereon. By suppressing the reaction between the layer to be formed (superlattice laminate 22 and the like) and the Si substrate 11, it is formed to increase the crystallinity of the layer formed thereon.

The superlattice laminate 22 has a configuration (superlattice structure) in which a large number of first layers 221 and second layers 222 are periodically laminated by epitaxial growth. The effect of the buffer layer 20 to alleviate the occurrence of defects due to lattice mismatch between the Si substrate 11 (Si) and the active layer 20 (Group III nitride semiconductor) is mainly brought about by the superlattice laminate 22. . The first layer 221 is made of, for example, AlN similar to the initial growth layer 21, and the second layer 222 is made of, for example, mixed crystal Al _1-x Ga _x N. Here, the band gap of the first layer 221 (AlN) is 6.2 eV, and the band gap of GaN is 3.5 eV. Since the band gap of the second layer 222 (Al _1-x Ga _x N) is a value between these according to x, the band gap of the second layer 222 is smaller than the band gap of the first layer 221. In order to increase the vertical breakdown voltage of the HEMT, it is preferable to increase the band gap difference between the first layer 221 and the second layer 222. For this reason, it is preferable to set 0.5 ≦ x <1 in the second layer and increase the difference in composition from the first layer 221. Here, when x <0.5, the effect of relaxing the lattice mismatch is insufficient, and crystal defects and cracks are likely to occur in the active layer 30. In addition, when Al is contained, C that increases the resistivity is easily taken into the crystal lattice and the electrical effect is increased, so that the second layer 222 is not made of GaN (x <1). preferable.

For example, another layer made of mixed crystal AlGaN can be inserted between the initial growth layer 21 and the superlattice laminate 22.

  The first layer 221 having a large band gap suppresses the tunnel current and contributes to enhancing the insulation in the buffer layer 20. On the other hand, the second layer 222 having a lattice constant close to that of the active layer 30 contributes to suppressing cracks and wafer warpage. For this reason, these film thicknesses are appropriately set in consideration of these effects. Specifically, when the first layer 221 is AlN, the thickness is preferably in the range of 2 to 10 nm as the thickness in which the tunnel current is suppressed and cracks are not easily generated. The second layer 222 is thicker than this and is preferably 40 nm or less. The first film layer 221 and the second layer 222 are alternately stacked, and the total number of stacked layers is as long as the lattice mismatch between the Si substrate 11 and the active layer 30 is alleviated and the insulating property of the buffer layer 20 can be secured. For example, the total number of stacked layers is 50 or more. However, the thickness and composition of each of these layers in the superlattice laminate 22 need not be constant.

The configuration of the active layer 30 is appropriately set according to the configuration of the semiconductor device using the active layer 30. Here, the channel layer 31 and the electron supply layer 32 are sequentially formed on the buffer layer 20. The channel layer 31 is made of GaN, and is a high-purity layer having a thickness of, for example, about 0.75 μm. The electron supply layer 32 is an n-type layer of Al _1-x Ga _x N (x = 0.73). is there. These are the same as those used in a commonly known GaN-based HEMT. On the electron supply layer 32 side of the channel layer 31, it is preferable to reduce the impurity concentration particularly in terms of element operation of the HEMT. For example, the C concentration is preferably 4 × 10 ¹⁶ cm ⁻³ or less. However, from the viewpoint of compensating for n-type impurities in GaN, the C concentration is preferably 1 × 10 ¹⁵ cm ⁻³ or more.

  The configuration of the active layer 30 can be the same as that of a semiconductor device using a generally known group III nitride semiconductor.

  The above configuration can be formed on the Si substrate 11 by a well-known MOCVD (organic chemical vapor deposition) method or MBE (molecular beam epitaxy) method.

  The layer thickness of the layer made of group III nitride is appropriately set from the device characteristics, but it is not necessary to be uniform on the wafer, and the thickness may be reduced at the periphery of the substrate, for example. In this case, the stress at the edge of the substrate is suppressed, and the generation of cracks is suppressed. In addition, in order to prevent stress concentration in the peripheral portion, the planarity of the substrate surface is deteriorated only in the peripheral portion, or another film such as an oxide film or a nitride film is inserted to make the group III nitride film polycrystalline. It is also possible to make it.

  In the above configuration, the orientation flat direction in the Si substrate 11 is such that the buffer layer 20. The influence on the active layer 30 and the like will be described below.

  As shown in FIG. 1, a 6-inch diameter (111) Si substrate formed by rotating an orientation flat from a position corresponding to the (110) plane by an angle of 30 °, 90 °, and 150 ° in the circumferential direction. A wafer (Example) after forming a buffer layer and an active layer thereon, a similar wafer (Comparative Example 1) in the case of using a conventional Si substrate having an orientation flat (110) plane, and the above rotation direction The appearance of a similar wafer (Comparative Example 2) in the case of using a Si substrate with a 20 ° angle was observed, and the generated end cracks were compared.

Here, the Si substrate was a 6-inch diameter wafer manufactured by the CZ method (B dope) having a specific resistance of 0.01 Ω · cm and a thickness of 650 μm. The end face of the wafer has the shape shown in FIG. 6, and t = 300 μm and θ = 22 ° in FIG. The initial growth layer is 100 nm thick AlN, the first layer in the superlattice stack is 4 nm thick AlN, the second layer is 25 nm thick Al _0.15 Ga _0.85 N, and the first layer in the superlattice stack is The total number of the second layers was 75 in total. The channel layer was 0.75 μm thick GaN, and the electron supply layer was 18 nm thick n-type Al _0.27 Ga _0.73 N. The C concentration actually measured by SIMS (secondary ion mass spectrometry) is 1 × 10 ¹⁹ cm ⁻³ in the superlattice laminate, and 0.8 to 3.0 × 10 ¹⁶ m ⁻ on the electron supply layer side of the channel layer. ³ .

  When manufacturing a wafer having this configuration, the MOCVD method using hydrogen and nitrogen as carrier gases was used. Trimethylgallium (TMG) and trimethylaluminum (TMA) were used as Group III materials, and ammonia was used as Group V (nitrogen) materials. In the growth of each layer, the gas pressure and the substrate temperature were optimized as shown in Table 1, respectively. Here, in the formation of the channel layer, the conditions are changed in the initial stage (buffer layer side) and the final stage (electron supply layer side). The gas composition and flow rate were appropriately set according to the composition of each layer. These conditions were the same in Example, Comparative Example 1, and Comparative Example 2. For this reason, Example, Comparative Example 1 and Comparative Example 2 are all the same except for the orientation flat of the Si substrate.

  FIG. 3 is an appearance photograph of the wafer of the example viewed from obliquely above the orientation flat side using an optical microscope with the growth layer side up, at two locations (A, B) on the orientation flat. 2 is a similar external photograph with respect to Comparative Example 1. 3 and 4, the upper side of the bevel portion (side surface of the orientation flat portion of the Si wafer) is a growth layer (buffer layer, active layer) formed by epitaxial growth, and in the growth layer, the upward direction in the figure is The direction is away from the orientation flat on the wafer surface. FIG. 3 is a photograph of an orientation flat formed at a position rotated by 90 ° in the circumferential direction in the examples. The same appearance was observed in the examples of 30 ° and 150 °.

  On the growth layer side, the end crack appears as a linear bright part. In both figures, A is an appearance photograph of a portion where there are few end cracks, and B is an appearance photograph of a portion where there are many end cracks. The edge cracks seen here reflect the fact that the growth layer (buffer layer, active layer) is a single crystal, and each has a linear shape.

  In the example (FIG. 3), in B, many end cracks are observed particularly in a region near the bevel portion. However, in both A and B, the end crack does not progress to the upper side (the side away from the orientation flat) in the figure. In particular, particularly in B, the end cracks extending in the horizontal direction (direction parallel to the orientation flat) are clear.

  On the other hand, in the case of Comparative Example 1 (FIG. 4), more end cracks are observed in both A and B than in the Example (FIG. 3). The end cracks extending in the horizontal direction, which were characteristic in the embodiment (FIG. 3), are not seen in either, but instead, the end cracks extending in the vertical direction are clear in both cases.

  It is clear that this crack adversely affects the operation of the HEMT element and its reliability even when the HEMT element itself is not destroyed. However, edge cracks that exist only in the vicinity of the orientation flat are unlikely to have such adverse effects, and cracks have such adverse effects when they propagate from the orientation flat (the periphery of the wafer) to the entire wafer surface. In FIGS. 3 and 4, such an adversely affecting crack is an end crack that propagates upward in the drawing.

  From this viewpoint, when the example (FIG. 3) and the comparative example 1 (FIG. 4) are viewed, it is the end crack that propagates in the vertical direction in the comparative example 1 (FIG. 4). On the other hand, it is the end crack that propagates in the horizontal direction in the embodiment (FIG. 3) that has little adverse effect.

  3 and 4, there are many end cracks that progress in an oblique direction. Since the growth layer is a single crystal, the end cracks that propagate in the oblique direction also grow linearly in the same manner as the end cracks that propagate in the horizontal and vertical directions. Further, due to the symmetry of the crystal, when there is an end crack that propagates in an oblique direction, there also exists an end crack that propagates symmetrically in the left-right direction. For this reason, in any appearance photograph, there are many points where end cracks extending in an oblique direction intersect each other. There are many phenomena in which the progress of the end cracks stops at the intersecting points. This is due to the cancellation of the internal stress that causes the generation of the end cracks obliquely progressing from the left-right direction at this intersecting location. For this reason, there is a low possibility that the end crack itself that propagates in the oblique direction propagates to the entire surface of the wafer.

  However, in Comparative Example 2 (FIG. 5) in which the orientation flat direction is rotated by 20 ° from Comparative Example 1, cracks that propagate vertically are not seen, but many cracks that greatly develop in the oblique direction are seen, and end cracks The effect of crossing and disappearing is not sufficient. The number of end cracks themselves is also larger than in the example (FIG. 3). Moreover, in the comparative example 2, the edge part crack extended in the horizontal direction like the example was seen is not seen. Moreover, the reason why there are cracks that greatly progress in the oblique direction is that there are few cracks that extend symmetrically in the left-right direction and intersect. For this reason, the progress of this crack is difficult to stop. On the other hand, in the example (FIG. 3), the left-right symmetry of the end cracks extending in the oblique direction is high, and there are an equal number of end cracks extending in the oblique direction in the left-right direction. Therefore, the progress is likely to stop. This is due to the high left-right symmetry of the crystal viewed from the orientation flat direction in the examples.

  As in the embodiment (FIG. 3), when the end crack that extends in the horizontal direction is near the orientation flat, the end crack that progresses in the oblique direction intersects the end crack that progresses in the horizontal direction and the progress is The phenomenon of stopping also occurs. The fact that the number of end cracks that propagate in the oblique direction in the examples is smaller than those in Comparative Examples 1 and 2 is considered to be due to this phenomenon. On the other hand, as in Comparative Example 1 (FIG. 4), when a large number of end cracks extending in the vertical direction are seen, these end cracks do not cross each other. May progress to That is, the end crack that propagates in the vertical direction is hard to stop and has the strongest adverse effect. The result of Comparative Example 2 is between these, and the number of cracks that progress in the oblique direction is not sufficiently reduced as compared with the Examples. In addition, regardless of the presence or absence of cracks that progress in the horizontal direction, the comparison between Comparative Example 2 and Example shows higher left-right symmetry as viewed from the orientation flat direction, and the probability that end cracks that progress in the diagonal direction intersect each other is higher. It is clear that a high embodiment is preferred.

When the electrical characteristics of the channel layer 1 in the example were evaluated by the Hall effect measurement method, the sheet resistance was 465Ω at the wafer center, and the electron mobility was a good value of 1510 cm ² / V / sec. . The wafer was convex on the back side, but the amount of warpage was as small as 60 μm. As a result, a HEMT element operation region can be formed in the active layer, and good operation could be confirmed.

  As described above, the example in which the end cracks extending in the vertical direction are not seen, and the end cracks growing in the horizontal direction is seen instead is the comparative example 1 and comparative example 2 in the operation and reliability of the HEMT device. Was also confirmed to be preferable.

  It is obvious that the above phenomenon occurs not only in the orientation flat part but also in the entire outer peripheral part of the wafer (Si substrate). However, since the portion other than the orientation flat portion around the wafer has an arc shape, the surface direction at the wafer end portion continuously changes. In other words, the surface corresponding to the orientation flat of the example, the (110) surface which is the orientation flat of Comparative Example 1, and the portion where the surface corresponding to the orientation flat of Comparative Example 2 is exposed at the end are substantially on the outer periphery of the wafer other than the orientation flat portion. Very few. For this reason, in the peripheral part other than the orientation flat part, for example, as shown in FIG. 4, many end cracks that propagate in the vertical direction are not seen, and this situation does not depend on the orientation direction set. That is, the above phenomenon is not substantially a problem except for the orientation flat portion.

  On the other hand, since the orientation flat portion has a linear shape, the above phenomenon appears most remarkably. That is, by setting the orientation flat portion as in the embodiment, a remarkable effect can be obtained.

  As described above, when the orientation flat is provided in a direction rotated by any one of 30 °, 90 °, and 150 ° in the circumferential direction from the position corresponding to the (110) plane, the end portion that extends in the horizontal direction No cracks are generated and no end cracks are generated in the vertical direction. When the orientation flat is set to the <110> direction, end cracks are generated in the vertical direction and no end cracks are generated in the horizontal direction. . When the orientation flat is set in a direction other than these, end cracks are generated in an intermediate manner. Among these, it is clear from the above examination that it is most preferable that the end cracks extending in the horizontal direction are generated and the end cracks extending in the vertical direction are not generated. That is, when a (111) plane Si wafer is used, the orientation flat is provided in a direction rotated by 30 °, 90 °, or 150 ° in the circumferential direction from a location corresponding to the (110) plane. Is most preferred. At this time, from the above result, it is possible to reduce the influence of the end crack without changing the growth conditions of the buffer layer and the active layer.

  If there is a crack in the area where the HEMT is formed, problems such as an obstacle to the operating current flowing in the horizontal direction with respect to the substrate surface, or a breakdown voltage is reduced by forming a leak path around the crack, etc. Will occur. Therefore, the configuration of the embodiment is particularly effective when configuring a semiconductor device in which an operating current flows parallel to the main surface of the substrate.

  In the above configuration, the plane orientation of the Si substrate 11 is (111). However, in the case of heteroepitaxial growth, it may be preferable to offset the plane orientation from (111) by an angle within 1 °, for example. is there. When this offset amount is small, it is clear that the above-described effect that the influence of the end crack is reduced when the orientation flat is in the above-described direction can be obtained. Therefore, here, the case where the substrate surface is the (111) surface includes the case where the substrate surface is slightly offset from the (111) surface in this way.

  Further, in the above example, when the (0001) direction of a group III nitride semiconductor having a wurtzite structure is grown on the Si substrate 11 having the (111) plane in the diamond structure as a main surface, the orientation flat ( 110) It was shown that it is preferable to provide in a direction rotated by any angle of 25 to 35 °, 85 to 95 °, and 145 to 155 ° in the circumferential direction from the position corresponding to the surface. Similar settings are possible in other cases. For example, a group III nitride semiconductor having a wurtzite structure can be grown even on a Si substrate whose main surface is a plane with another orientation (for example, (100) plane, (110) plane, etc.). Even in this case, the orientation flat direction can be set so that the growth layer (buffer layer or the like) has fewer end cracks that propagate in the direction perpendicular to the orientation flat. This orientation flat direction can be set according to the plane orientation of the Si substrate and the plane orientation of the group III nitride semiconductor grown thereon. Thereby, it is possible to reduce an adverse effect on the semiconductor device. Actually, since the plane orientation of a group III nitride semiconductor that grows with good crystallinity on a Si substrate having a specific plane orientation is limited, it depends on the plane orientation of the Si substrate and the type of the group III nitride semiconductor. The optimum orientation flat direction is set. As described above, this orientation flat direction is a direction in which an end crack parallel to the straight portion constituting the orientation flat is formed. By using an epitaxial growth method in which an active layer is formed on an epitaxial growth substrate in which a buffer layer is formed on a Si substrate having the orientation flat direction, a semiconductor device in which adverse effects of end cracks are suppressed can be obtained. That is, in the epitaxial growth method of the present invention, when there is an end crack due to lattice mismatch with the substrate, the adverse effect caused by the end crack is reduced.

  In the above example, the buffer layer 20 is composed of the initial growth layer 21 and the superlattice laminate 22. However, as long as the active layer 30 having good crystallinity is obtained, the buffer layer configuration is as follows. Is optional. For example, only the initial growth layer may be used without using the superlattice laminate, or only the superlattice laminate may be used without using the initial growth layer. It is also possible to use a gradient composition buffer. The configuration of the buffer layer depends on the degree of lattice mismatch between Si and the material constituting the active layer, the chemical reactivity of the material comprising Si and the active layer, the degree of insulation required for the buffer layer, etc. Set as appropriate.

  Furthermore, the above configuration is not limited to the combination of the Si substrate and the group III nitride semiconductor, and the same applies to the case where heteroepitaxial growth with lattice mismatch exists on the substrate provided with the orientation flat. In particular, it is difficult to obtain high-quality bulk crystals such as group III nitride semiconductors, and it is effective to use the same epitaxial growth substrate for materials from which high-quality crystals can be obtained by heteroepitaxial growth. It is.

DESCRIPTION OF SYMBOLS 10 Epitaxial growth substrate 11 Si substrate 20 Buffer layer 21 Initial growth layer 22 Superlattice laminated body 30 Active layer 31 Channel layer 32 Electron supply layer 221 First layer 222 Second layer

Claims (7)

An epitaxial growth substrate comprising: a silicon single crystal substrate having a (111) plane as a main surface; and a buffer layer made of a group III nitride semiconductor and formed on the silicon single crystal substrate,
The silicon single crystal substrate is formed at a position where the orientation flat is rotated from the portion corresponding to the (110) plane by any angle of 25 to 35 °, 85 to 95 °, or 145 to 155 ° in the circumferential direction. An epitaxial growth substrate characterized by the above.   The epitaxial growth substrate according to claim 1, wherein the buffer layer includes a layer made of aluminum nitride (AlN).   The epitaxial growth substrate according to claim 1, wherein the buffer layer includes a superlattice structure.   A semiconductor device comprising: the epitaxial growth substrate according to any one of claims 1 to 3; and an active layer made of a group III nitride semiconductor formed on the epitaxial growth substrate.   5. The semiconductor device according to claim 4, wherein an operation current is passed in the active layer in a direction parallel to the main surface. 6. An epitaxial growth method for sequentially forming a buffer layer made of a group III nitride semiconductor and an active layer made of a group III nitride semiconductor on a silicon single crystal substrate on which an orientation flat is formed,
An epitaxial growth method comprising: forming an orientation flat in the silicon single crystal substrate so that an end crack parallel to a straight line constituting the orientation flat is formed in an in-plane direction of the buffer layer. In this epitaxial growth method, a buffer layer made of a group III nitride semiconductor and an active layer made of a group III nitride semiconductor are sequentially formed on a silicon single crystal substrate having a (111) plane as a main surface on which an orientation flat is formed. And
In the silicon single crystal substrate, the orientation flat is formed at a position rotated from the portion corresponding to the (110) plane in the circumferential direction by any angle of 25 to 35 °, 85 to 95 °, or 145 to 155 °. An epitaxial growth method characterized by: