JP2011154968A - Organic el display device and method for manufacturing the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an organic EL display device excellent in easiness of manufacture and high resolution. <P>SOLUTION: In order to form an extraction electrode 6 that connects a TFT 3 with a reflective electrode 8, a second insulation layer 7 is formed on the extraction electrode 6 to cover a contact hole 16 that is formed on a first insulation layer 5 that is provided on the TFT 3, and an auxiliary electrode 8' is formed on the second insulation layer 7 by the same process as the reflective electrode 8 on the first insulation layer 5, and the auxiliary electrode 8' is connected with a transparent electrode 13 as a common electrode. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to an organic electroluminescence (hereinafter referred to as “EL”) display device applied to flat panel displays, projection displays, lighting, and the like, and a method for manufacturing the same.

  Research and development of organic EL elements using electroluminescence of organic materials are currently being actively conducted. In an organic EL element, an organic compound layer having at least a light-emitting layer is disposed between a first electrode and a second electrode, and energization of the organic compound layer causes holes and electrons injected from the respective electrodes to flow. Recombination occurs in the light emitting layer to produce light emission. An organic EL display device is formed by arranging a plurality of organic EL elements. In general, one electrode is used as a common electrode common to a plurality of elements, and the other electrode is used for each element using an active element such as a thin film transistor (TFT). It takes the form which drives to. At this time, on the light extraction side, in addition to a transparent conductive film such as ITO, IZO, and ZnO, a semi-transmissive film in which a metal such as Ag, Au, and Al is formed to a thickness of about 10 nm to 20 nm is used as a transparent electrode. These transparent conductive films have higher resistance than metals, and a voltage gradient is likely to occur in the transparent electrode serving as a common electrode, so that the voltage drop tends to be large. Even in the case of a semi-transmissive film made of a metal thin film, the sheet resistance increases due to the thinning of the film. Therefore, when the display area is large, the magnitude of the voltage gradient cannot be ignored. Therefore, the voltage applied to each pixel in the display area becomes non-uniform, and the shading in which the emission intensity decreases from the transparent electrode potential wiring arranged around the display area toward the center of the display area is large. Is a cause of remarkably lowering.

  As a method for solving the above-described problem, in the configuration of Patent Document 1, an auxiliary electrode is provided to reduce shading, and the auxiliary electrode is formed in the same process as the reflective electrode, thereby reducing the manufacturing process. Is described. Furthermore, a configuration is disclosed in which an insulating film is formed on the auxiliary electrode at a portion other than the connection portion between the auxiliary electrode and the cathode.

JP 2004-207217 A

  However, when the auxiliary electrode is formed in the same process as the reflective electrode, the auxiliary electrode is arranged avoiding the contact hole where the TFT and the reflective electrode are connected. Therefore, compared with the layout in the case where the auxiliary electrode is not provided, The opening must be small. For this reason, in order to improve the pixel aperture ratio and increase the display performance, it has been necessary to take a disadvantageous layout. In addition, when the auxiliary electrode is formed in a separate process from the reflective electrode in order to increase the aperture ratio, the number of processes is increased, the auxiliary electrode is thin and the film is easily peeled off, and the manufacturing cost of the organic EL display device is reduced. There has been a problem that it leads to an increase and a decrease in display quality.

  An object of the present invention is to solve the above-described problems of the conventional technology and to provide an organic EL display device excellent in manufacturability and high definition and a method for manufacturing the same.

According to a first aspect of the present invention, at least a thin film transistor on a substrate, a first insulating layer covering the thin film transistor, an extraction electrode connected to the thin film transistor through an opening of the first insulating layer, and at least the first insulating layer A second insulating layer covering the opening, a reflective electrode connected to the extraction electrode on the first insulating layer, an auxiliary electrode on the second insulating layer insulated from the reflective electrode, and the reflective electrode An organic electroluminescence display device comprising: an organic light emitting layer including a light emitting layer; and a transparent electrode that covers the organic light emitting layer and is connected to the auxiliary electrode,
The reflective electrode and the auxiliary electrode are formed in the same process.

The second aspect of the present invention includes at least a thin film transistor on a substrate, a first insulating layer covering the thin film transistor, an extraction electrode connected to the thin film transistor through an opening of the first insulating layer, and at least the first insulating layer. A second insulating layer covering the opening, a reflective electrode connected to the extraction electrode on the first insulating layer, an auxiliary electrode on the second insulating layer insulated from the reflective electrode, and the reflective electrode An organic electroluminescence display device comprising: an organic light emitting layer including a light emitting layer; and a transparent electrode that covers the organic light emitting layer and is connected to the auxiliary electrode,
The reflective electrode and the auxiliary electrode are formed in the same process.

  In the organic EL display device of the present invention, the auxiliary electrode having a low resistance connected to the transparent electrode having a relatively high resistance is disposed, so that the voltage gradient of the transparent electrode in the display region can be kept small.

  In addition, according to the present invention, since the auxiliary electrode can be formed on the contact hole connecting the reflective electrode and the TFT, the space for the auxiliary electrode avoiding the contact hole is not required, and the aperture ratio by the auxiliary electrode arrangement is reduced. Decline can be prevented. In addition, since the auxiliary electrode can be formed in the same process as the reflective electrode, it is not necessary to increase a new process only for forming the auxiliary electrode.

  In addition, since the reflective electrode and the auxiliary electrode are formed in the same process, by selecting an electrode material having good adhesion and a forming method, the reflective electrode and the auxiliary electrode are formed on the second insulating layer in the same manner as the reflective electrode formed on the first insulating layer. Even in the auxiliary electrode formed on the substrate, high adhesion can be obtained. In addition, when the adhesion layer is formed separately from the reflective electrode, the number of processes is not increased only for the auxiliary electrode, and the manufacturing is excellent.

  Therefore, according to the present invention, a high-definition organic EL display device that has a high aperture ratio and solves the problem of shading is provided by an efficient manufacturing method without increasing the number of steps.

It is sectional drawing which shows typically the structure of an example of the organic electroluminescent display apparatus by this invention. It is a top view which shows typically the structure of the organic electroluminescent display apparatus of FIG. It is a cross-sectional schematic diagram which shows the manufacturing process of the organic electroluminescence display of FIG. It is sectional drawing which shows typically the structure of the other example of the organic electroluminescent display apparatus by this invention.

  Hereinafter, embodiments of an organic electroluminescence display device according to the present invention will be described with reference to the drawings. In the present specification, well-known or publicly known techniques in the technical field are applied to portions that are not particularly illustrated or described. The present invention is not limited to the following embodiment.

  FIG. 1 is a diagram schematically showing a cross-sectional structure of a pixel according to a preferred embodiment of the organic EL display device of the present invention. FIG. 2 is a top view showing an example of the pixel layout, and the cross-sectional structure of FIG. 1 corresponds to the cross-sectional structure of A-A ′ in FIG. 2.

  In the figure, 1 is a substrate, 2 is an interlayer insulating layer, 3 is a thin film transistor (TFT), 4 is a passivation layer, 5 is a first insulating layer, 6 is a lead electrode, 7 is a second insulating layer, 8 is a reflective electrode, 8 'Is an auxiliary electrode, 11 is a third insulating layer, 12 is an organic light emitting layer, and 13 is a transparent electrode. Further, 14 is a sealing layer, 15 is a protective film, and 16 is a contact hole (opening).

  In this example, an interlayer insulating layer 2, a TFT 3, a passivation layer 4, and a first insulating layer 5 are formed on a substrate. Further, a lead electrode 6, a second insulating layer 7, a reflective electrode 8, a third insulating layer 11, an organic light emitting layer 12, a transparent electrode 13, a sealing layer 14, and a protective film 15 are formed. An auxiliary electrode 8 'is formed on the second insulating layer.

  In the present invention, the TFT 3 is formed to correspond to each pixel. In FIG. 1, one TFT is shown for each pixel, but a plurality of TFTs necessary for controlling the organic light emitting element such as a current control TFT and a drive control TFT can be provided in each pixel.

  The TFT 3 and the extraction electrode 6 are connected via a contact hole 16. Furthermore, the extraction electrode 6 is connected to the reflection electrode 8 provided for each pixel on the first insulating layer, and the reflection electrode 8 serves as a control electrode. The light emission control of each pixel is performed by controlling the voltage applied to the organic light emitting layer 12 sandwiched between the reflective electrode 8 and the transparent electrode 13.

  A second insulating layer 7 and a third insulating layer 11 are formed so as to separate the pixels. The contact hole 16 is directly covered with the second insulating layer 7, and the auxiliary electrode 8 ′ is formed on the second insulating layer 7. And the 3rd insulating layer 11 is formed so that the edge part of the reflective electrode 8 may be covered. In the present invention, the auxiliary electrode 8 'and the reflective electrode 8 are formed in the same process. For example, as shown in FIG. 2, the auxiliary electrode 8 ′ is disposed immediately above the contact hole 16, is formed in a pattern crossing between the pixels, and functions as a potential line of the transparent electrode 13 serving as a common electrode. The formation pattern of the auxiliary electrode 8 ′ is not limited to the configuration shown in FIG. 2, and it may be arranged between all the pixels or arranged in a matrix. The auxiliary electrode 8 'traverses the display area, is connected to a contact line provided outside the display area, and is supplied with a common potential supplied via a connection terminal.

  In other words, the characteristic structure of the organic EL display device of the present invention is that the auxiliary electrode 8 ′ formed in the same process as the reflective electrode 8 is laminated on the contact hole 16 via the second insulating layer 7. It is in. Other than the contact hole 16, the auxiliary electrode 8 ′ may be disposed on the second insulating layer 7. The second insulating layer 7 is not formed, and the first electrode 8 ′ is formed between the reflective electrode 8 patterns. You may arrange | position on the insulating layer 5. FIG.

  In the present invention, since the auxiliary electrode 8 ′ is formed in the same process as the reflective electrode 8, there is no need to add a new process for forming the auxiliary electrode 8 ′, and the manufacturing cost of the display device due to an increase in the number of processes is increased. It is possible to prevent an increase and a decrease in yield due to defects peculiar to the manufacturing process.

  The transparent electrode 13 is electrically connected to the auxiliary electrode 8 '. Although FIG. 1 shows a configuration in which the transparent electrode 13 and the auxiliary electrode 8 ′ are connected immediately above the contact hole 16, the connection position is not limited. The auxiliary electrode 8 ′ may be connected to the transparent electrode in the entire region, or the transparent electrode 13 is divided for each pixel or for each of a plurality of pixels, and each transparent electrode 13 is connected to the auxiliary electrode 8 ′. May be.

  A known technique can be applied as a method of connecting the transparent electrode 13 and the auxiliary electrode 8 ′. For example, when the organic light emitting layer 12 is formed, the mask is separately applied and the organic light emitting layer 12 is not formed on the auxiliary electrode 8 ′ at the portion connected to the transparent electrode 13, thereby obtaining the configuration of FIG. 1. . Alternatively, after the organic light emitting layer 12 is formed on the entire surface of the substrate, the organic light emitting layer 12 on the auxiliary electrode 8 ′ is removed by laser processing only at the connection portion with the transparent electrode 13, and then the transparent electrode 13 is formed. The configuration of FIG. 1 is obtained.

  In the configuration of the present invention, it is desirable that the end portion of the second insulating layer 7 is covered with the reflective electrode 8. Thereby, the pattern formation damage to the edge part of the 2nd insulating layer 7 at the time of reflection electrode 8 and auxiliary electrode 8 'formation can be suppressed. When the damage to the second insulating layer 7 is large, the end portion of the second insulating layer 7 may be peeled off, which may lead to a decrease in the yield of the display device.

  Further, it is desirable that the end portion of the second insulating layer 7 is covered with the third insulating layer 11. Even if peeling occurs at the end portion of the second insulating layer 7, the end peeling can be covered by covering with the third insulating layer 11.

  Furthermore, it is desirable that the end portion of the reflective electrode 8 is covered with the third insulating layer 11. The thickness of the organic light emitting layer 12 is about the same at 50 nm to 300 nm with respect to the thickness of the reflective electrode 8 of 50 nm to 300 nm. For this reason, the organic light emitting layer 12 formed on the reflective electrode 8 cannot sufficiently cover the end of the reflective electrode 8, and the transparent electrode 13 and the reflective electrode 8 to be formed next may be short-circuited. In this case, a voltage cannot be applied between the reflective electrode 8 and the transparent electrode 13, which causes a problem of non-light emitting pixels. In particular, when the organic light-emitting layer 12 is formed with high rectilinearity, for example, by heat deposition or transfer, and the transparent electrode 13 is formed by sputtering with a large wraparound, a short circuit with the transparent electrode 13 at the end of the reflective electrode 8 is performed. Is a problem.

  The extraction electrode 6 is made of a conductive material. The extraction electrode 6 plays a role of electrically connecting the TFT 3 and the reflection electrode 8, and is selected from a material and a formation process with low contact resistance and high adhesion to both. The formation pattern of the extraction electrode 6 is not limited as long as the extraction electrode 6 is electrically connected to the reflection electrode 8. The lead electrode 6 having a pattern larger than that of the reflective electrode 8 may be formed even if the reflective electrode 8 is partially connected.

  The reflective electrode 8 and the auxiliary electrode 8 'are made of a highly reflective material and are made of a conductive material. As shown in FIG. 4, adhesion layers 9 and 9 ′ that improve adhesion to the first insulating layer 5 and the second insulating layer 7 may be formed under the reflective electrode 8 and the auxiliary electrode 8 ′. Further, the potential control layers 10 and 10 ′ for improving the electron or hole injection property to the organic light emitting layer 12 may be formed on the reflective electrode 8 and the auxiliary electrode 8 ′.

  In the formation of the potential control layer 10, the lead electrode 6 connected to the TFT 3 and the potential control layer 10 can be partially connected directly without using the reflective electrode 8 to reduce the contact resistance. A portion where the extraction electrode 6 is not covered with the reflection electrode 8 is provided in the pixel, and the potential control layer 10 is formed. The contact portion between the extraction electrode 6 and the potential control layer 10 is preferably disposed below the third insulating layer 11. This is because when the potential control layer 10 serving as the electron or hole injection surface has large unevenness, the emission luminance changes due to the unevenness of the potential, and in order to avoid the unevenness of brightness due to the unevenness of the contact portion due to the thickness of the reflective electrode 8. 3 Cover with an insulating layer 11 to prevent light emission.

  In the configuration of this example, it is possible to emit one pixel in a single color, and by controlling light emission of R (red), G (green), and B (blue) with three pixels, one pixel for color display is obtained. Color display is possible.

  As described above, in the present invention, the voltage gradient of the transparent electrode 13 in the display region can be suppressed small by arranging the auxiliary electrode 8 ′ connected to the transparent electrode 13. Further, since the auxiliary electrode 8 ′ is formed in the same process as the reflective electrode 8 through the second insulating layer 7 on the contact hole 16 where the reflective electrode 8 and the TFT are connected, it is newly added only for the auxiliary electrode 8 ′. In addition, it is possible to prevent a decrease in the aperture ratio due to the arrangement of the auxiliary electrode 8 ′ without providing a simple process. Therefore, it is possible to provide an organic EL display device excellent in manufacturability and high definition.

  Each member will be described in more detail. Since the extraction electrode 6 is a conductive material and is formed in the contact hole 16 having a tapered shape, a material having a low reflectance is preferable from the viewpoint of suppressing reflection of external light, but is not limited thereto. Examples of the material include a transparent conductive film such as ITO, IZO and ZnO, and a film in which a metal such as Cr, Al, Ag, Au and Pt is formed to a thickness of about 50 to 150 nm.

  The reflective electrode 8 is a highly reflective conductive material. For example, it is preferably made of a film in which a metal such as Cr, Al, Ag, Au, or Pt is formed to a thickness of about 50 to 300 nm. This is because the higher the reflectance, the higher the light extraction efficiency. Further, these metal films have high conductivity and are excellent as electrode materials.

  The transparent electrode 13 is a conductive material having a high transmittance and serves as a light extraction electrode. Light emitted from each pixel is extracted through the transparent electrode 13. The organic EL display device of FIG. 1 is a top emission type organic EL display device. As the electrode material of the transparent electrode 13, a material having a high transmittance is preferable. For example, a transparent conductive film such as ITO, IZO, or ZnO, or a semi-transmissive film in which a metal such as Ag, Au, or Al is formed to a thickness of about 10 nm to 30 nm may be used.

  The first insulating layer 5, the second insulating layer 7, and the third insulating layer 11 are preferably made of an insulating material that is excellent in flatness. For example, photosensitive acrylic or polyimide that can be formed by applying a pattern is preferably used.

  The organic light emitting layer 12 can use at least one selected from an organic light emitting material, a hole injection material, an electron injection material, a hole transport material, and an electron transport material. The range of color selection can be expanded by doping the hole injection material or the hole transport material with an organic light emitting material, or doping the electron injection material or the electron transport material with an organic light emitting material. Furthermore, the organic light emitting layer 9 is preferably an amorphous film from the viewpoint of light emission efficiency.

  As the organic light-emitting material of each color, a triarylamine derivative, a stilbene derivative, a polyarylene, an aromatic condensed polycyclic compound, an aromatic heterocyclic compound, an aromatic heterocyclic condensed compound, a metal complex compound, or the like can be used. Moreover, these single oligo bodies or composite oligo bodies can be used. However, the configuration of the present invention is not limited to the exemplified materials.

  The organic light emitting layer may be a layer having a single function of hole injection, hole transport, electron injection, or electron transport, or a layer having a composite function. The thickness of the organic light emitting layer is preferably about 50 nm to 300 nm, and preferably about 50 nm to 150 nm. As the hole injection and transport material, a phthalocyanine compound, a triarylamine compound, a conductive polymer, a perylene compound, an Eu complex, or the like can be used, but the structure of the present invention is not limited. As an example of the electron injection and transport material, Alq3 in which a trimer of 8-hydroxyquinoline is coordinated to aluminum, an azomethine zinc complex, a distyrylbiphenyl derivative system, or the like can be used.

  The material and form of the sealing layer 14 are not particularly limited as long as the organic light-emitting element that is sensitive to moisture and oxygen can be protected from moisture and oxygen in the atmosphere. For example, an inorganic passivation film such as SiN, SiO, or SiON, a highly moisture-proof resin film, a dug glass substrate provided with a hygroscopic material, and the like can be preferably used. The protective film 15 is for protecting the sealing layer 14, and may have functions of a polarizing plate and an antireflection film for the purpose of preventing a decrease in contrast due to external light reflection. For example, an acrylic plate or a PET resin plate can be used.

  FIG. 3 shows an example of the manufacturing process of the organic EL display device of the present invention. First, the interlayer insulating film 2, the TFT 3, and the passivation layer 4 are formed on the substrate 1, and the first insulating layer 5 is formed by removing the pattern at a position to be the contact hole 16. Subsequently, the passivation layer 4 is pattern-removed at a position to be the contact hole 16. The pattern removal of the passivation layer 4 and the first insulating layer 5 may be performed simultaneously (FIG. 3A).

  Subsequently, the extraction electrode 6 is patterned at the position of the contact hole 16, and the second insulating layer 7 is formed so as to cover the contact hole 16 (FIG. 3B). Next, after the material of the reflective electrodes 8 and 8 'is formed on the entire surface, the reflective electrode 8 and the auxiliary electrode 8' are patterned by a photo process (FIG. 3C). At this time, the reflective electrode 8 may cover the pattern end of the second insulating layer 7. And the 3rd insulating layer 11 is pattern-formed so that the edge part of the reflective electrode 8 and the edge part of the 2nd insulating layer 7 may be covered (FIG.3 (d)). At this time, the end portion of the auxiliary electrode 8 ′ can be covered or exposed with the third insulating layer 11, which can be selected from the viewpoint of the connection method with the transparent electrode 13 and the protection of the auxiliary electrode 8 ′.

  In this example, for example, the first insulating layer 5, the second insulating layer 7, and the third insulating layer 11 are made of photosensitive polyimide resin (film thickness 2 μm), the extraction electrode 6 is made of ITO (film thickness 50 nm), the reflective electrode 8, and the auxiliary electrode. Ag (film thickness 150 nm) is used for the electrode 8 ′. The wiring width of the auxiliary electrode 8 ′ is 10 μm.

  By the above method, a substrate in which the auxiliary electrode 8 ′ having the same process as the reflective electrode 8 is laminated on the second insulating layer 7 on the contact hole 16 can be manufactured.

  In this example, the number of steps is increased by one to form the third insulating layer 11, but no new step has been generated for forming the auxiliary electrode 8 '. In the present invention, the effect of further suppressing the number of steps is obtained when the auxiliary electrode 8 ′ is formed of a plurality of layers, and the pixel aperture ratio is maintained by using the auxiliary electrode 8 ′ as a constituent layer. It is possible to suppress an increase in the number of processes.

  The organic light emitting layer 12 is formed on at least the reflective electrode by mask coating so that the surface of the auxiliary electrode 8 ′, which is a connection position with the transparent electrode 13, is exposed on the substrate manufactured by the above steps. Next, a transparent electrode 13 is formed so as to cover the entire organic light emitting layer 12, and the auxiliary electrode 8 'is also connected. Furthermore, by forming the sealing layer 14 and the protective film 15, the organic EL display device of FIG. 1 is obtained.

  In the configuration of the present invention, the potential gradient of the transparent electrode 13 ′ in the display region 18 can be suppressed small by the auxiliary electrode 8 ′ connected to the transparent electrode 13. That is, shading can be kept small and display quality can be improved.

  FIG. 5 is a schematic cross-sectional view showing another embodiment of the organic EL display device of the present invention. In this example, the extraction electrode 6 is formed larger than the reflection electrode 8 and is laminated via the adhesion layer 9. A potential control layer 10 is formed on the reflective electrode 8 and covers the reflective electrode 8. The potential control layer 10 covers the end portion of the second insulating layer 7, and the end portion of the potential control layer 10 is covered by the third insulating layer 11.

  The auxiliary electrode 8 ′ has the same laminated structure as the adhesion layer 9, the reflective electrode 8, and the potential control layer 10, and the ends of the auxiliary electrode 8 ′ and adhesion layer 9 ′ are covered with the potential control layer 10 ′. . The end portion of the potential control layer 10 ′ is not covered with the third insulating layer 11, and is exposed with the thickness of the auxiliary electrodes 8 ′ and 9 ′.

  The adhesion layer 9 is selected from those having high adhesion to the first insulating layer 5 or the extraction electrode 6 as a base and the reflective electrode 8 to be laminated. For example, a transparent conductive film such as ITO, IZO and ZnO, Al , Cr, W, Mo, Ti, Cu and alloys thereof can be used. The potential control layer 10 is formed in order to improve the electron or hole injection property to the organic light emitting layer 12 formed on the potential control layer 10, for example, a transparent conductive film such as ITO, IZO, ZnO or the like, an alkali metal A metal alloy containing can be used. In this example, for example, ITO (film thickness 50 nm) is formed as the adhesion layer 9 and ITO (film thickness 15 nm) is formed as the potential control layer 10. Other configurations have the same layout and pixel structure as in the example of FIG.

  In this example, the number of steps is increased by one to form the third insulating layer 11, but new steps have been generated to form the auxiliary electrode 8 ′, the adhesion layer 9 ′, and the potential control layer 10 ′. Absent. That is, by forming the auxiliary electrode 8 ′, the adhesion layer 9 ′, and the potential control layer 10 ′ together with the constituent layers of the reflective electrode 8, the adhesion layer 9, and the potential control layer 10, the pixel aperture ratio is maintained while maintaining the pixel aperture ratio. An increase in the number can be suppressed.

  In this example, the connection between the auxiliary electrode 8 ′, the adhesion layer 9 ′, the potential control layer 10 ′, and the transparent electrode 13 is performed as follows. The side surface at the end of the potential control layer 10 ′ is exposed with a step equivalent to the film thickness of the organic light emitting layer 12. Therefore, the organic light emitting layer 12 is formed so as not to cover the end side surface of the potential control layer 10 ′, and then the transparent electrode 13 is formed by a method that is easy to wrap around. Connect the side of the end. Thereby, the transparent electrode 13 is electrically connected to the auxiliary electrode 8 '. According to this method, it is not necessary to separate or remove the organic light emitting layer 12 to expose the connection portion with the transparent electrode 13.

  As a method for forming the organic light emitting layer 12, a vacuum deposition method, a transfer method, or the like can be used. As a method for forming the transparent electrode 13, a vacuum sputtering method or the like can be used.

  As described above, in the organic EL display device of the present invention, by arranging the auxiliary electrode 8 ′ connected to the transparent electrode 13, the voltage gradient of the transparent electrode 13 in the display region can be suppressed small. Further, since the auxiliary electrode 8 ′ is formed in the same process as the reflective electrode 8 through the second insulating layer 7 on the contact hole 16 where the reflective electrode 8 and the TFT 3 are connected, it is newly added only for the auxiliary electrode 8 ′. It is not necessary to provide a simple process. Furthermore, it is possible to prevent the aperture ratio from being lowered due to the arrangement of the auxiliary electrode 8 '. Therefore, it is possible to provide an organic EL display device excellent in manufacturability and high definition.

  1: substrate, 3: TFT, 5: first insulating layer, 6: extraction electrode, 7: second insulating layer, 8: reflective electrode, 8 ′: auxiliary electrode, 10: potential control layer, 11: third insulating layer , 12: organic light emitting layer, 13: transparent electrode

Claims (8)

At least a thin film transistor on a substrate, a first insulating layer covering the thin film transistor, an extraction electrode connected to the thin film transistor at an opening of the first insulating layer, and a second covering at least the opening of the first insulating layer An insulating layer; a reflective electrode connected to the extraction electrode on the first insulating layer; an auxiliary electrode on a second insulating layer insulated from the reflective electrode; and a light emitting layer on the reflective electrode An organic electroluminescence display device comprising an organic light emitting layer and a transparent electrode that covers the organic light emitting layer and is connected to the auxiliary electrode,
An organic electroluminescence display device, wherein the reflective electrode and the auxiliary electrode are formed in the same process.   The organic electroluminescence display device according to claim 1, wherein an end portion of the second insulating layer is covered with the reflective electrode.   The organic electroluminescence display device according to claim 1, wherein an end portion of the second insulating layer is covered with a third insulating layer.   4. The organic electroluminescence display device according to claim 1, wherein an end portion of the reflective electrode is covered with a third insulating layer. 5.   The organic electroluminescence display device according to claim 1, wherein an end portion of the auxiliary electrode is covered with a third insulating layer.   The organic electroluminescence display device according to claim 1, wherein a potential control layer is formed on the reflective electrode.   The organic electroluminescence display device according to claim 6, wherein the extraction electrode and the potential control layer are partially connected. At least a thin film transistor on a substrate, a first insulating layer covering the thin film transistor, an extraction electrode connected to the thin film transistor at an opening of the first insulating layer, and a second covering at least the opening of the first insulating layer An insulating layer; a reflective electrode connected to the extraction electrode on the first insulating layer; an auxiliary electrode on a second insulating layer insulated from the reflective electrode; and a light emitting layer on the reflective electrode An organic electroluminescent display device comprising an organic light emitting layer and a transparent electrode that covers the organic light emitting layer and is connected to the auxiliary electrode,
The reflective electrode and the auxiliary electrode are formed in the same process, and the method for manufacturing an organic electroluminescence display device.

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