JP2011151954A - Oscillating generation device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an oscillating generation device which can utilize a plurality of resonance frequencies, and has a novel technique of switching between power generation sources of different resonance frequencies. <P>SOLUTION: The oscillating generation device includes first and second cantilevers of different resonance frequencies disposed while aligning the oscillation directions and having a structure where a piezoelectric is sandwiched between counter electrodes respectively, a holding mechanism which holds the first and second cantilevers on a rotor, and a drawing electrode which is moved by a centrifugal force incident to rotation of the rotor and is switched between a state where it is connected electrically with the electrode of the first cantilever and a state where it is connected electrically with the electrode of the second cantilever. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a vibration power generator.

  Conventionally, various vibration power generation apparatuses have been proposed, and a technique for improving the amount of power generation by using resonance at the frequency of the vibration source has been proposed. Since the vibration power generator outputs a voltage by vibration, it can also be used as a sensor for detecting vibration.

  However, when the frequency of the vibration source fluctuates with time and is not constant, it is difficult to improve the amount of power generated by the vibration power generation apparatus that uses a single resonance frequency. Therefore, a vibration power generation apparatus using a plurality of resonance frequencies has been proposed. However, an external power supply is required for resonance frequency switching control.

JP 2002-369450 A JP-A-8-321642 Special table 2008-518573

  An object of the present invention is to provide a vibration power generation apparatus that can use a plurality of resonance frequencies and has a novel switching technique between power generation sources having different resonance frequencies.

  According to one aspect of the present invention, first and second cantilevers each having a structure in which a piezoelectric body is sandwiched between counter electrodes, having different resonance frequencies and arranged in a uniform vibration direction, A holding mechanism for holding the second cantilever on the rotating body, a state in which the second cantilever is moved by a centrifugal force accompanying the rotation of the rotating body, and is electrically connected to an electrode of the first cantilever; There is provided a vibration power generation device having an extraction electrode that is switched to a state of being electrically connected to an electrode of a cantilever.

  Switching between the first cantilever and the second cantilever which is the power generation source can be performed by the centrifugal force accompanying the rotation of the rotating body.

1A and 1B respectively show a schematic front view and a schematic top sectional view (top view) of a vibration power generation apparatus according to a first embodiment of the present invention and a rotating body to which the power generation apparatus is attached. FIG. 1C is a schematic side cross-sectional view of the vibration power generator of the first embodiment. 2Ap to 2Dp are schematic top views showing the manufacturing process of the power generation structure, FIGS. 2Af to 2Df are schematic front sectional views showing the manufacturing process of the power generation structure, and FIG. 2Ds is the power generation structure. It is a schematic side sectional view showing the manufacturing process of. FIG. 3 is a graph showing the relationship of the resonance frequency with respect to the length of the cantilever of the vibration power generator of the first application example. FIG. 4 is a graph showing the relationship between the frequency of rotation and the generated voltage of the vibration power generator of the first application example. FIG. 5 is a graph showing the relationship of the resonance frequency with respect to the length of the cantilever of the vibration power generator of the second application example. FIG. 6 is a graph showing the relationship between the rotation frequency and the generated voltage of the vibration power generator of the second application example. 7A and 7B are a schematic front view and a schematic top cross-sectional view, respectively, showing a vibration power generator according to a modification of the first embodiment. 8A and 8B respectively show a schematic front view and a schematic top view of a rotating body to which the vibration power generation device of the second embodiment and the power generation device are attached.

  First, the structure and operation of the vibration power generator according to the first embodiment of the present invention will be described with reference to FIGS. 1A to 1C.

  FIG. 1A shows a schematic front view of the vibration power generation apparatus EG1 and the power generation apparatus EG1 of the first embodiment attached to the rotating body 50. FIG. FIG. 1B shows a schematic top cross-sectional view (a cross-sectional view seen from above) of the vibration power generation apparatus EG1 along the one-dot chain line BB in FIG. The figure is shown. FIG. 1C shows a schematic side cross-sectional view (cross-sectional view seen from the side) of the vibration power generator EG1 along the alternate long and short dash line CC in FIG. 1A. In FIG. 1A, alternate long and short dash lines BB and CC showing the cross section are shown only at the ends in order to avoid complication of the drawing.

  As shown in FIGS. 1A and 1B, the vibration power generator EG1 is mounted on a surface 50p perpendicular to the rotating shaft 50a of the rotating body 50. The rotating shaft 50a of the rotating body 50 faces the horizontal direction, and the surface 50p forms a vertical surface (vertical surface). The rotating body 50 is a rotating member that transmits power from a power source 60 (for example, an engine), and is a vibration source that wants to extract electric power from the rotational motion.

  The description will be continued assuming that the rotating body 50 is stationary. The vibration power generator EG1 includes a plurality of power generation cantilevers 1. The power generation cantilever is simply called a cantilever. Each cantilever 1 has a length direction facing a horizontal direction along the direction of the rotation shaft 50a, a width direction facing a horizontal direction intersecting the direction of the rotation shaft 50a, and a vibration direction being a vertical vertical direction. . A plurality of cantilevers 1 having the same vibration direction are arranged in parallel on the same horizontal plane to form a cantilever group CL.

  In the illustrated embodiment, the cantilever group CL is formed by seven cantilevers 1a to 1g. The center cantilever 1d is the longest. The remaining cantilevers 1a to 1c and 1e to 1g arranged on the left and right of the central cantilever 1d are arranged in a symmetrical shape with respect to the central cantilever 1d so as to become shorter as the distance from the central cantilever 1d increases. .

  The cantilever group CL is integrally formed by connecting a plurality of cantilevers 1 at the base portion. A method for manufacturing the power generation structure 100 in which the plurality of cantilevers 1 are integrally formed will be described later with reference to FIG. FIG. 1B shows a top cross-sectional view at the height of the cantilever 1, but for the sake of easy understanding, a portion of the power generation structure 100 is shown in a top view instead of a cross-sectional view.

  FIG. 1C is a side cross-sectional view through the center cantilever 1d. The structure of the cantilever 1 and the mechanism of power generation will be described using the central cantilever 1d as a representative (the same applies to other cantilevers).

  The cantilever 1 includes a support layer 1s, a piezoelectric layer 1p, and upper and lower electrode layers 1eu and 1ed. The support layer 1s is formed using, for example, silicon, and is thickened at the tip of the cantilever to form the weight portion 1sw. The piezoelectric layer 1p is formed on the support layer 1s by, for example, lead zirconate titanate (PZT).

  The lower electrode 1ed is disposed on the support layer 1s between the support layer 1s and the piezoelectric layer 1p, and the upper electrode 1eu is disposed on the piezoelectric layer 1p so as to face the lower electrode 1ed. The upper and lower electrode layers 1eu and 1ed sandwich the piezoelectric layer 1p. When the cantilever 1 vibrates in the vertical direction (opposite direction of the electrodes), the piezoelectric layer 1p is distorted and an alternating voltage is generated between the upper and lower electrodes 1eu and 1ed. Even if there is no weight part, it is possible to perform vibration power generation by the weight of the cantilever.

  In particular, as illustrated in FIG. 1A, the vibration power generator EG1 includes a ring electrode group RE including a plurality of ring electrodes 2. Each ring electrode 2 is made of, for example, stainless steel and has a ring shape. The cantilever group CL is attached to the ring electrode group RE, and each cantilever 1 is electrically connected to the corresponding ring electrode 2. The electrical connection may be simply referred to as connection hereinafter.

  In particular, as shown in FIG. 1C, the upper electrode 1 eu is connected to the corresponding ring electrode 2 at the base of the cantilever 1. The lower electrode 1ed is disposed away from the ring electrode 2, is insulated from the ring electrode 2, and provides a reference potential.

  The base portion 1 sr of the support layer 1 s is connected by all the cantilevers 1. In particular, as shown in FIG. 1B, an exposed portion 10d of the lower electrode 1ed is formed on the further outer base portion 1sr of the left and right cantilevers 1a and 1g, and the reference potential is extracted to the outside.

  In the illustrated embodiment, the ring electrode group RE is formed by four ring electrodes 2a to 2d arranged concentrically. However, the most central (center) ring electrode 2a is not in the shape of a ring with a hole in the center, but in the shape of a disk with a closed center, but is called with the same name as the other ring electrodes 2b to 2d. I will do it.

  A central cantilever 1d is connected to the central ring electrode 2a. Cantilevers 1c and 1e disposed on the left and right outer sides from the central cantilever 1d are connected in common to the outer ring electrode 2b from the central ring electrode 2a. Cantilevers 1b and 1f disposed on the left and right outer sides of cantilevers 1c and 1e, respectively, are connected in common to ring electrode 2c that is one outer side from ring electrode 2b. Cantilevers 1a and 1g disposed on the outermost left and right sides are commonly connected to the outermost ring electrode 2d. That is, two cantilevers 1 that are arranged symmetrically and have the same length are connected to a common ring electrode 2.

  A frame-shaped inner casing member 3 surrounding the outermost ring electrode 2d holds the ring electrode group RE and the cantilever group CL. The inner casing member 3 is rotatably held by the outer casing member 4 by a ball bearing mechanism using the bearing balls 5.

  When the cantilevers 1 arranged in a symmetrical shape form a balance structure against gravity, the cantilever group CL attached to the inner casing member 3 can maintain a horizontal posture.

  The outer casing member 4 is attached in the vicinity of the edge of the surface 50p of the rotating body 50 (at a position away from the rotating shaft 50a). When the rotating body 50 rotates, the vibration power generator EG1 also rotates around the rotation shaft 50a as a whole.

  However, the cantilever group CL can maintain a horizontal posture even when the rotating body 50 rotates due to the holding by the ball bearing mechanism and the balance structure. Therefore, each cantilever 1 can be vibrated at the frequency of rotation while maintaining the vibration direction in the vertical vertical direction even while the rotating body 50 is rotating.

  The rotating body 50 is assumed to change the rotation speed within a desired rotation speed (frequency) range. When the number of rotations is equal to the resonance frequency of a certain cantilever 1, this cantilever 1 can be vibrated most effectively and good vibration power generation is performed. The length and the like of each cantilever 1 are selected so that a plurality of different frequencies included in the rotation speed range of the rotating body 50 become resonance frequencies. The longer the cantilever 1 is, the lower the resonance frequency is. Resonant frequencies of the longest cantilever 1d to the shortest cantilevers 1a and 1g are F1 to F4.

  The vibration power generator EG1 further includes an extraction electrode mechanism EE. The extraction electrode mechanism EE includes an extraction electrode 6 and a spring mechanism 7. An extraction electrode 6 is disposed between the back surface of the ring electrode group RE (the surface opposite to the cantilever group mounting side) and the inner surface of the outer casing member 4 facing the ring electrode group RE so as to be in contact with the ring electrode 2.

  The extraction electrode 6 is movably attached to the outer casing member 4 via a spring mechanism 7 including a conductive spring 7s. The spring 7 s is attached to the rotating shaft 50 a side of the rotating body 50 with respect to the extraction electrode 6. The spring mechanism 7 may include a guide structure that restricts the moving direction of the extraction electrode 6 in the radial direction of the rotating body 50. The radial direction of the rotating body 50 may be simply referred to as a radial direction hereinafter.

  When the rotating body 50 rotates, the extraction electrode 6 receives a centrifugal force and moves in the radial direction to a position that balances with the elastic force of the spring 7s. The ring electrode group RE is arranged so that the moving direction of the extraction electrode 6 passes through the center of the ring electrode group RE (the extraction electrode 6 has a radius connecting the rotation center of the rotating body 50 and the center of the ring electrode 2). Move along the direction by centrifugal force).

  When the rotating body 50 rotates at the frequency F1, the extraction electrode 6 is disposed at a position in contact with the ring electrode 2a. When the frequency of rotation rises to F2, the extraction electrode 6 moves to the outside in the radial direction and is disposed at a position in contact with the ring electrode 2b adjacent to the outside of the ring electrode 2a. Similarly, at the rotation frequencies F3 and F4, the extraction electrode 6 is disposed at a position where it contacts the ring electrodes 2c and 2d, respectively. The spring constant of the spring 7, the width of the ring electrode 2, and the interval between adjacent ring electrodes 2 are selected so that the extraction electrode 6 is disposed at a position in contact with the ring electrodes 2 a to 2 d at frequencies F1 to F4, respectively. Has been. Note that an elastic material having an elastic coefficient corresponding to an equivalent spring constant can be used as the spring member without using the spring itself.

  In this way, when the rotation speed of the resonance frequency of a certain cantilever 1 is, the extraction electrode 6 is brought into contact with the ring electrode 2 connected to the cantilever 1 and the output voltage of the cantilever 1 can be taken out to the extraction electrode 6. it can. Switching of the cantilever 1 for extracting the output voltage is automatically performed by a change in centrifugal force according to a change in the number of rotations of the rotating body 50, so that a power source for cantilever switching control is not required.

  As described above, the outer casing member 4 is fixed to the rotating body 50 and rotates, whereas the inner casing member 3 maintains the horizontal posture of the cantilever group CL. That is, the inner casing member 3 (and the member attached thereto) is relatively opposite to the rotating body 50 and the outer casing member 4 (and members attached thereto) in the direction opposite to the rotating direction of the rotating body 50, The rotating body 50 rotates at the frequency of rotation.

  On the other hand, the rotating body 50 and the outer casing member 4 (and members attached thereto) are arranged in the rotational direction of the rotating body 50 relative to the inner casing portion 3 (and members attached thereto). Rotate at the frequency of rotation.

  The ring electrode group so that the center of the relative rotational movement between the outer casing member 4 (and the member attached thereto) and the inner casing portion 3 (and the member attached thereto) is aligned with the center of the ring electrode group RE. RE is arranged.

  Therefore, during the rotation of the rotating body 50, the extraction electrode 6 that is in contact with a certain ring electrode 2 is maintained in the contact state in the circumferential direction in the same direction as the rotation of the rotating body 50. It moves (the state in which the ring electrode 2 exists is maintained at the radial position where the extraction electrode 6 is disposed). Since the center ring electrode 2a is located at the center of rotation of the extraction electrode 6 relative to the ring electrode group RE, the extraction electrode 6 does not move when it is in contact with the center ring electrode 2a. Thus, by making the ring electrode 2 into a ring shape, even if the extraction electrode 6 moves as the rotating body 50 rotates, the output voltage can be extracted while maintaining contact with the ring electrode 2.

  As described above, the center of the ring electrode group RE is arranged at the center of the rotation operation relative to the rotating body 50, and the extraction electrode extends along the radial direction connecting the rotation center of the rotating body 50 and the center of the ring electrode 2. Thus, the ring electrode 2 can be switched well, and the contact state of the extraction electrode 6 with the ring electrode 2 is maintained well during rotation.

  Two cantilevers 1c and 1e, 1b and 1f, 1a and 1g having the same resonance frequency are connected to the ring electrodes 2b to 2d, respectively. Since the two cantilevers 1 resonate at a common frequency, the generated power can be increased as compared with the case where only one cantilever 1 vibrates.

  The symmetrical arrangement of the cantilevers 1 in the cantilever group CL not only contributes to achieving a horizontal balance, but also contributes to an increase in generated power by arranging two cantilevers 1 having the same resonance frequency on the left and right. To do.

  In the state where the frequency of rotation is lower than F1, the extraction electrode 6 is disposed radially inward of the center ring electrode 2a and contacts, for example, the ring electrode 2b. However, in a state where the frequency is lower than F1, resonance of the cantilevers 1c and 1e connected to the ring electrode 2b does not occur, and the output voltage is smaller than that at the time of resonance.

  The vibration power generation apparatus EG1 of the present embodiment has this range compared to the case where only one cantilever is used because the resonance of the cantilever 1 can be used at a plurality of different frequencies, particularly in the rotation speed range of the frequencies F1 to F4. The average output voltage can be increased.

  An auxiliary extraction electrode 8 is disposed between the spring portion of the spring 7 s and the mounting portion of the outer casing member 4. The auxiliary extraction electrode 8 has a fixed radial position.

  An auxiliary ring electrode 9 is disposed at a position of the inner casing member 3 that contacts the auxiliary extraction electrode 8. The auxiliary extraction electrode 8 moves on the auxiliary ring electrode 9 in the circumferential direction while maintaining contact with the auxiliary ring electrode 9 by the rotation of the rotating body 50. The auxiliary ring electrode 9 is connected to a terminal electrode 10 u disposed on the front side (cantilever group side) surface of the inner casing member 3.

  The potential of the upper electrode 1eu of the cantilever 1 is taken out from the terminal electrode 10u through the ring electrode 2, the extraction electrode 6, the spring 7, the auxiliary extraction electrode 8, and the auxiliary ring electrode 9, and is controlled via the wiring 11u. To be supplied. On the other hand, the potential of the lower electrode 1ed is taken out from the exposed portion 10d of the lower electrode 1ed and supplied to the control unit 12 via the wiring 11d.

  The control unit 12 includes various electric circuits as necessary, such as the generated AC rectifier circuit, storage battery, and various sensors. The control unit 12 is attached to the ring electrode group RE below the cantilever group CL, and is held by the inner casing member 3 together with the ring electrode group RE and the cantilever group CL. By using the electric power generated by the cantilever group CL in the control unit 12 held by the inner casing member 3, the trouble of forming wiring for extracting electric power to the outside of the inner casing member 3 can be avoided.

  The control unit 12 also serves as a weight for maintaining the horizontal posture of the cantilever group CL, and functions as a part of the balance structure (in this way, the member attached to the inner casing member 3 and the inner casing member 3 forms a balance structure against gravity so that the cantilever vibration direction is the vertical vertical direction as a whole).

  Next, with reference to FIG. 2, the manufacturing method of the electric power generation structure 100 is demonstrated. For the sake of simplicity of illustration, a method for manufacturing a cantilever group CL formed of four cantilevers 1 that are shortened in order from the left side to the right side is illustrated. The cantilever having the shape described with reference to FIGS. 1A to 1C The group CL can be manufactured in the same manner.

  About FIG. 2A-FIG. 2D, "p" is attached | subjected to a top view, and "f" is attached to front sectional drawing (sectional drawing seen from the front direction). The front cross-sectional view is a cross-sectional view cut by a length in the middle of the upper electrode 1eu of the cantilever 1 as shown by a one-dot chain line FF in FIG. 2Ap. FIG. 2Dp shows a top view of the completed power generation structure 100.

  Please refer to FIG. 2Ap and FIG. 2Af. An SOI substrate 60 in which a silicon oxide layer 61, a silicon layer 62, a silicon oxide layer 63, a silicon layer 64, and a silicon oxide layer 65 are stacked is prepared. On the silicon oxide layer 65 of the SOI substrate 60, Ti is deposited by sputtering, for example, to a thickness of 10 nm, and Pt is deposited thereon by sputtering, for example, by a thickness of 100 nm. The Pt / Ti layer is patterned by etching to form the lower electrode 1ed.

  The lower electrode 1eu is common to all the cantilevers 1 and is formed with a length that protrudes from both ends of the left and right cantilevers 1 in the width direction of the cantilever 1. With respect to the length direction of the cantilever 1, the end on the tip end side of the cantilever 1 is formed, for example, at the same position as the end of the upper electrode 1eu so as to face the upper electrode 1eu (may be longer than this). However, as described with reference to FIG. 1C, the end of the lower electrode 1ed on the cantilever root side is formed at a position where it is not exposed to the cantilever root in order to avoid contact with the ring electrode.

  Next, covering the lower electrode 1ed, PZT is deposited on the silicon oxide layer 65 by sputtering, for example, to a thickness of 2 μm to form the piezoelectric layer 1p. Next, the entire surface of the silicon oxide film 61 on the back side of the SOI substrate 60 is removed by etching. Note that the SOI substrate 60 after the silicon oxide film 61 is removed is also referred to as an SOI substrate 60.

  Next, a resist pattern having an opening shape corresponding to the upper electrode 1eu of each cantilever 1 is formed on the piezoelectric layer 1p, Pt is deposited to a thickness of, for example, 100 nm by sputtering, and the upper electrode 1eu is formed by lift-off. . As described with reference to FIG. 1C, the end of the upper electrode 1eu on the cantilever root side is formed so as to reach the cantilever root in order to contact the ring electrode.

  Please refer to FIG. 2Bp and FIG. 2Bf. Next, a resist pattern having a groove-shaped opening along the outer shape of the power generation structure 100 and an opening corresponding to the exposed portion 10d of the lower electrode 1ed is formed on the piezoelectric layer 1p. Using this resist pattern as a mask, the piezoelectric layer 1p is etched to form grooves (indicated by broken lines) along the outer shape of the power generation structure 100 in the piezoelectric layer 1p, and the exposed portion 10d of the lower electrode 1ed. Form. The exposed portion 10d of the lower electrode 1ed is disposed further outside the cantilevers 1 at both the left and right ends. After the etching, the resist pattern is removed.

  Please refer to FIG. 2Cp and FIG. 2Cf. Next, a resist pattern (indicated by hatching) is formed on the back surface of the SOI substrate 60 to cover the weight portion 1sw at the tip of the cantilever, the cantilever base portion 1sr, and an unnecessary portion outside the power generation structure 100. Using this resist pattern as a mask, the exposed silicon layer 62 is removed by etching, leaving the cantilever support layer 1 s made of the silicon layer 64. The unetched silicon layer 62 forms the weight portion 1sw and the root portion 1sr. After the etching, the resist pattern is removed.

  Please refer to FIG. 2Dp and FIG. 2Df. Next, unnecessary portions are cut by a laser processing machine to separate the power generation structure 100. Adjacent cantilevers 1 are separated leaving a root portion 1sr. Note that grooves are already formed in the piezoelectric layer 1p by etching in order to suppress the influence of heat due to laser cutting. The SOI substrate 60 and the lower electrode 1ed are cut by a laser.

  2Ds is a side cross-sectional view passing in the middle of the cantilever 1 in the width direction as indicated by a one-dot chain line SS in FIG. 2Dp. In this way, the power generation structure 100 in which the cantilever group CL is integrally formed is formed.

  Next, a first application example using the vibration power generator of the first embodiment will be examined. The first application example assumes a rotating member that transmits the power of an automobile engine as a rotating body, and assumes that the vibration power generation device of the embodiment is used as a power source of a detection device that detects abnormal heat generation in the engine unit. ing. The control unit includes a heat sensor and a wireless device, and transmits information on the temperature detected by the heat sensor to an external control circuit using the wireless device.

  In the first application example, the width of the cantilever is 0.5 mm, the thickness (without the weight) is 0.02 mm, the weight length is 4 mm, the weight thickness is 0.5 mm, and the length of the surface electrode The thickness was 2 mm. Resonance frequency was calculated by structural analysis while changing the length of the cantilever.

  FIG. 3 is a graph showing the relationship of the resonance frequency with respect to the length of the cantilever in the first application example. The cantilever length is about 16 mm and the resonance frequency is about 39 Hz. The cantilever length is about 10 mm and the resonance frequency is about 77 Hz.

  As the cantilever group, four types of lengths of 10 mm, 12 mm, 14 mm, and 16 mm are used. Assume that the width of each cantilever is 0.5 mm, the cantilever having a resonance frequency of about 39 Hz and a length of 16 mm, and the cantilever having a resonance frequency of about 77 Hz and a length of 10 mm are arranged at intervals of 0.2 mm.

  The ring electrodes corresponding to each cantilever are also arranged with the same width and interval as the cantilever. The distance from the center in the width direction of the ring electrode corresponding to the cantilever having a length of 16 mm to the center in the width direction of the ring electrode corresponding to the cantilever having a length of 10 mm is 2.1 mm.

  Assuming that the position of the vibration power generator on the rotating body is 5 cm from the rotation axis and the weight of the extraction electrode is 5 g, when the rotation frequency is about 39 Hz, the centrifugal force applied to the extraction electrode is about 15.0 N When the frequency is about 77 Hz, the centrifugal force applied to the extraction electrode is about 58.5N.

  From a cantilever ring electrode of 16 mm in length to a ring electrode of a cantilever of 10 mm in length per 43.5 N which is the difference between a centrifugal force of 15.0 N at a frequency of about 39 Hz and a centrifugal force of 58.5 N at a frequency of 77 Hz The distance of 2.1 mm should just move the extraction electrode. Therefore, the spring constant of the spring to which the extraction electrode is attached is estimated to be about 20.7 N / mm.

  The voltage generated by the cantilever group of the first application example was calculated by piezoelectric analysis, and the relationship between the rotation frequency and the generated voltage was examined.

  FIG. 4 is a graph showing the relationship between the rotation frequency and the generated voltage. The peak of the output voltage is obtained at the resonance frequency (39 Hz, 47 Hz, 59 Hz, 77 Hz) of each cantilever. For example, when the rotation frequency is increased from a stationary state, first, a peak of the output voltage is obtained at a resonance frequency of about 39 Hz of a 16 mm long cantilever. When the frequency is further increased, the output voltage due to the cantilever having a length of 16 mm rapidly decreases, but the output voltage due to the cantilever having a length of 14 mm is gradually increased, and the peak of the output voltage is obtained again at the resonance frequency of about 47 Hz.

  By switching the cantilever according to the frequency change and using a plurality of different resonance frequencies, the average output voltage in a wide frequency range can be increased as compared with the case where only one cantilever is used.

  An output voltage of 1 V or higher is always obtained in a range from about 30 Hz (1800 rpm) slightly lower than the lowest resonance frequency to about 80 Hz (4800 rpm) slightly higher than the highest resonance frequency. This range can almost cover the engine speed when the automobile is traveling at high speed, and the electric power obtained by the vibration power generation device is, for example, a thermal sensor that detects abnormal heat generation in the engine unit (and a radio that transmits data). Can be used for power supply.

  As described above in the first application example, the electric power obtained by the vibration power generation device can be used as a power source for various devices incorporated in the vibration power generation device.

  The average output voltage can be increased by increasing the number of cantilevers having different lengths and increasing the available resonance frequencies. In addition, the total generated power can be increased by increasing the number of vibration power generators attached to the rotating body.

  Next, a second application example using the vibration power generator of the first embodiment will be examined. The second application example assumes a rotating member that conveys the rotation of the motor of the vacuum cleaner as the rotating body, and assumes that the vibration power generation device of the embodiment is used as an abnormality detection sensor that detects an abnormality in the rotational speed of the motor. ing.

  In the second application example, the width of the cantilever is 0.5 mm, the thickness (the portion without the weight) is 0.02 mm, the weight length is 1 mm, the weight thickness is 0.5 mm, and the length of the surface electrode The thickness was 1 mm. Resonance frequency was calculated by structural analysis while changing the length of the cantilever.

  FIG. 5 is a graph showing the relationship of the resonance frequency with respect to the length of the cantilever in the second application example. The cantilever length is about 3.5 mm and the resonance frequency is about 616 Hz. The cantilever length is about 2.5 mm and the resonance frequency is about 1050 Hz.

  As the cantilever group, four types of lengths of 2.5 mm, 2.75 mm, 3.0 mm, and 3.5 mm are used. These cantilevers have a width of 0.5 mm and are arranged at intervals of 0.2 mm.

  The ring electrodes corresponding to each cantilever are also arranged with the same width and interval as the cantilever. The distance from the center in the width direction of the ring electrode corresponding to the cantilever having a length of 3.5 mm to the center in the width direction of the ring electrode corresponding to the cantilever having a length of 2.5 mm is 2.1 mm.

  Assuming that the mounting position of the vibration power generator on the rotating body is 3 cm from the rotation axis and the weight of the extraction electrode is 5 g, when the rotation frequency is about 616 Hz, the centrifugal force applied to the extraction electrode is about 2.25 kN, Is about 1050 Hz, the centrifugal force applied to the extraction electrode is about 6.53 kN. The extraction electrode only needs to move a distance of 2.1 mm per 4.28 kN, which is the difference in centrifugal force between the frequency of 616 Hz and the frequency of about 1050 Hz. Therefore, the spring constant of the spring to which the extraction electrode is attached is estimated to be about 2.04 kN / mm.

  The voltage generated by the cantilever group of the second application example was calculated by piezoelectric analysis, and the relationship between the rotation frequency and the generated voltage was examined.

  FIG. 6 is a graph showing the relationship between the rotation frequency and the generated voltage. The peak of the output voltage is obtained at the resonance frequency (616 Hz, 784 Hz, 902 Hz, 1050 Hz) of each cantilever. Similar to the first application example, the average output voltage can be increased in a wide frequency range by using a plurality of different resonance frequencies.

  It is assumed that the motor of the vacuum cleaner rotates at a speed of, for example, 40000 rpm (667 Hz) to 60000 rpm (1000 Hz) during normal operation. In this rotation speed range, the output voltage is always 0.1 V or higher. Therefore, for example, when 0.1V is set as the threshold voltage and the output voltage becomes less than the threshold value 0.1V during a period in which normal operation is expected, an abnormality occurs whether the rotational speed is too high or too low. Can be determined. The control unit can include a rotation speed sensor that performs such comparison determination and a wireless device that transmits information on rotation speed abnormality detected by the rotation speed sensor to an external control circuit.

  As described above in the second application example, the output voltage of the vibration power generator can be used as a sensor for detecting the rotation state (vibration state). If necessary, the output voltage can be used for both the power supply and the sensor.

  As in the first application example, the average output voltage can be increased by increasing the number of cantilevers having different lengths. In addition, if a plurality of vibration power generation devices (sensors) are used by dividing a rotation speed range in which an abnormality is to be detected, individual vibration power generation devices (sensors) that cover the entire rotation speed range are used. The vibration power generator (sensor) can be downsized.

  Next, with reference to FIG. 7A and FIG. 7B, the vibration electric power generating apparatus of the modification of 1st Example is demonstrated. 7A and 7B are a schematic front view and a schematic top cross-sectional view, respectively, showing a vibration power generator according to a modification of the first embodiment. The vibration power generation apparatus according to the first embodiment described with reference to FIGS. 1A to 1C employs a ball bearing mechanism as a structure for rotatably holding the inner casing member 3 on the outer casing member 4. You may employ | adopt another as a flexible holding structure. The vibration power generation device of this modification uses a casing member corresponding to the magnetic levitation mechanism to hold the inner casing member 3V so as to be rotatable in a non-contact manner with respect to the outer casing member 4V.

  Next, with reference to FIG. 8A and FIG. 8B, the structure and operation | movement of the vibration electric power generating apparatus by 2nd Example are demonstrated. 8A and 8B respectively show a schematic front view and a schematic top view of the rotary power generator 50 to which the vibration power generator EG2 and the power generator EG2 of the second embodiment are attached. Note that the same reference numerals are used in the structure corresponding to the first embodiment in order to avoid the complication of the reference numerals. For example, “1” is attached to the cantilever, and each cantilever is distinguished by attaching an alphabet such as “a”.

  In the first embodiment and its modification, the cantilever posture is such that the direction of vibration during rotation of the rotating body is maintained in the vertical vertical direction by holding the inner casing member rotatably with respect to the outer casing member. Kept. However, in this structure, the cantilever posture may not be kept constant depending on the rotation state. In the second embodiment, as described below, the posture of the rotating cantilever is maintained by using a gear mechanism.

  As in the first embodiment, the rotating body 50 rotates around the rotating shaft 50a, and the vibration power generator EG2 is attached on the surface 50p perpendicular to the rotating shaft 50a. However, in the second embodiment, the vibration power generator EG2 is mounted on the rotating body 50 via the mounting mechanism IM.

  As will be described later, in the second embodiment, the vibration power generator EG2 is attached to the gear 23, and the vibration power generator EG2 includes a cantilever group CL and a ring electrode group RE. The extraction electrode mechanism EE is attached to the attachment mechanism IM side.

  The attachment mechanism IM includes a fixed base 20, a fixed gear 21, an intermediate gear 22, an attachment gear 23, a gear attachment plate 24, and a support arm 25. For ease of illustration, the intermediate gear 24 and the support arm 25 are indicated by bold lines in the view of the rotating body 50 in FIG. 8B.

  The fixed base 20 is fixed to the ground (or a device external to the rotating body 50). A fixed gear 21 coaxial with the rotation shaft 50 a of the rotating body 50 is attached to the fixed base 20. The fixed gear 21 remains stationary even when the rotating body 50 rotates.

  A gear mounting plate 24 is fixed to the surface 50 p of the rotating body 50, and the intermediate gear 22 and the mounting gear 23 are mounted on the gear mounting plate 24. The intermediate gear 22 and the mounting gear 23 have the same diameter and the same number of teeth as the fixed gear 21.

  The intermediate gear 22 meshes with the fixed gear 21, and rotates together with the rotating body 50 as a whole with the rotation of the rotating body 50, and relative to the rotating body 50 in the rotational direction of the rotating body 50. It rotates in the same direction at the same rotational speed as the rotating body 50. The attachment gear 23 meshes with the intermediate gear 22, and rotates together with the rotating body 50 as a whole with the rotation of the rotating body 50, and relative to the rotating body 50 in the rotational direction of the rotating body 50. It rotates in the opposite direction at the same rotational speed as the rotating body 50.

  The vibration power generator EG2 is attached to the attachment gear 23. In the second embodiment, the mounting gear 23 rotates on the rotator 50 in the direction opposite to the rotation direction of the rotator 50 at the same rotational speed as that of the rotator 50, thereby maintaining the attitude of the cantilever group CL constant. Can do.

  In the first embodiment, the posture of the cantilever group is kept constant by a balance using gravity. Therefore, the attitude of the cantilever was restricted to be horizontal (the vibration direction was vertically up and down). On the other hand, in the second embodiment, the cantilever group CL can be positively maintained in a desired mounting posture by the gear mechanism. Therefore, the vibration direction of the cantilever 1 can select a desired direction orthogonal to the rotation axis of the rotating body 50 and is not limited to the vertical direction. Further, the rotating shaft 50a of the rotating body 50 is not limited in the horizontal direction.

  A support arm 25 extending in the radial direction from the center is attached to the rotating body 50, and an extraction electrode mechanism EE is attached to the support arm 25. The extraction electrode 6 is held via the spring mechanism 7 attached to the spring attachment portion 25 a of the support arm 25. Along with the rotation of the rotating body 50, the spring mechanism 7 and the extraction electrode 6 rotate together with the support arm 25.

  In particular, as shown in FIG. 8B, the shaft member 23a of the attachment gear 23 protrudes to the near side of the gear member 23b (the side opposite to the rotating member 50 with respect to the gear member 23). The gear member 23b has a sheath portion 23c protruding toward the front side at the center, and the shaft member 23a penetrates the sheath portion 23c. A power generation structure mounting plate 23d is fitted into the sheath portion 23c.

  The power generation structures 100a and 100b are attached to the front side (front side) of the power generation structure attachment plate 23d, and the ring electrodes 2a to 2c are attached to the back side of the power generation structure attachment plate 23d. The ring electrode 2 forming the ring electrode group RE of the second embodiment has a ring shape with the sheath 23c passing through the center. Further, the power generation structure forming the cantilever group CL of the second embodiment is formed of a set of power generation structures 100a and 100b arranged on the left and right with the shaft member 23a and the sheath 23c interposed therebetween.

  The power generation structures 100a and 100b are arranged in a symmetrical shape with a surface passing through the axis of the attachment gear 23 interposed therebetween. The power generation structure 100a includes the cantilevers 1a to 1c so as to become longer in order on the left outer side with respect to the axis of the attachment gear 23. The power generation structure 100b includes the cantilevers 1d to 1f so as to become longer in order in the right outer side with respect to the axis of the attachment gear 23. The cantilevers 1a to 1f forming the cantilever group CL are arranged in parallel with the vibration direction aligned.

  The shortest and equal length cantilevers 1a and 1d are connected to the innermost ring electrode 2a, then the shortest and equal length cantilevers 1b and 1e are connected to the middle ring electrode 2b and are the longest and equal The long cantilevers 1c and 1f are connected to the outermost ring electrode 2c. In the second embodiment, the power generation structure mounting plate 23d interposed between the cantilever 1 and the ring electrode 2 is formed with wiring connected from each cantilever 1 to the corresponding ring electrode 2.

  The extraction electrode 6 is disposed between the back surface of the ring electrode group RE and the gear member 23b facing the ring electrode group RE. The center of the ring electrode group RE is disposed on the moving direction of the extraction electrode 6. Similar to the first embodiment, the ring electrode 2 in contact can be switched by changing the radial position of the extraction electrode 6 with a centrifugal force corresponding to the rotational speed.

  In the first embodiment (see FIG. 1B), the longest cantilever, that is, the lowest resonance frequency is arranged at the center of the ring electrode group. However, in the second embodiment, the center of the ring electrode group RE is the shaft portion of the attachment gear 23 (hereinafter, also simply referred to as the shaft portion), and therefore the shaft portion causes the extraction electrode 6 to be radially outward. Movement is restricted.

  Accordingly, in the second embodiment, the longest (low resonance frequency) cantilevers 1c and 1f are arranged on the outermost ring electrode 2c, and the shortest (high resonance frequency) cantilever 1a is arranged on the innermost ring electrode 2a. 1d. As the rotational speed increases, the extraction electrode moves from the radially inner side toward the shaft portion, and the output power from the cantilever 1 having a higher resonance frequency is taken out. It should be noted that such an arrangement of cantilevers can be employed in the vibration power generator of the first embodiment.

  In the second embodiment, the gear member 23b is formed of a conductive material, the extraction electrode 6 is brought into contact with the gear member 23b, and the gear member 23b is used as a voltage extraction wiring member from the upper electrode 1eu. In particular, as shown in FIG. 8A, the wiring 11 u is connected to the control unit 12 from the sheath 23 c of the gear member 23 b exposed at the fitting portion of the power generation structure mounting plate 23 d. As for the lower electrode 1ed, the wiring 11d connected to the exposed portion 10d of the lower electrode 1ed is connected to the control unit 12 as in the first embodiment.

  If it is a problem that the gear protrudes outside the diameter of the rotating body, the diameter of each gear is reduced and meshed with a chain or a toothed belt, or connected with a pulley and a belt. It is possible to cope with it.

  The whole including the attachment mechanism IM for attaching the vibration power generation device EG2 to the rotating body 50 can also be regarded as the vibration power generation device.

  As described above in the first and second embodiments, even if the rotational speed of the rotating body is changed by using the vibration power generation apparatus that holds a plurality of cantilevers having different resonance frequencies on the rotating body as a power generation source, Compared to the case where a single cantilever is used, the average output voltage can be improved.

  Switching of the cantilever for extracting the output voltage can be performed by moving the extraction electrode by a centrifugal force accompanying the rotation of the rotating body.

  By maintaining the posture of the cantilever on the rotating body constant using, for example, a ball bearing mechanism or a gear mechanism, the vibration direction of the cantilever can be kept constant.

  As the position of the cantilever on the rotating body is maintained, the extraction electrode and the cantilever rotate relatively. By passing through the ring-shaped ring electrode, the output voltage from the cantilever can be easily taken out to the extraction electrode.

  Although the present invention has been described with reference to the embodiments, the present invention is not limited thereto. It will be apparent to those skilled in the art that various modifications, improvements, combinations, and the like can be made.

The following additional notes are further disclosed with respect to the embodiment including the first and second examples described above.
(Appendix 1)
First and second cantilevers each having a structure in which a piezoelectric body is sandwiched between counter electrodes, having different resonance frequencies and arranged in a uniform vibration direction;
A holding mechanism for holding the first and second cantilevers on a rotating body;
A drawer that moves by centrifugal force accompanying the rotation of the rotating body and switches between a state of being electrically connected to the electrode of the first cantilever and a state of being electrically connected to the electrode of the second cantilever A vibration power generation device having an electrode.
(Appendix 2)
The vibration power generation apparatus according to appendix 1, wherein the extraction electrode is attached to a spring member that pulls the extraction electrode in a central direction of the rotating body against a centrifugal force accompanying rotation of the rotating body.
(Appendix 3)
The holding mechanism holds the first and second cantilevers in a posture in which the vibration direction is a first direction orthogonal to the rotation axis of the rotating body, and the rotating mechanism rotates the first cantilever during rotation of the rotating body. The supplementary note 1 or 2, wherein the first and second cantilevers are rotated relative to the rotating body in a direction opposite to the rotating direction of the rotating body to maintain the vibration direction in the first direction. Vibration power generator.
(Appendix 4)
Furthermore, the electrodes of the first cantilever and the electrodes of the second cantilever are electrically connected, and have ring-shaped first and second ring electrodes arranged concentrically,
The center of the rotation operation in which the first and second cantilevers are rotated by the holding mechanism during the rotation of the rotating body and the centers of the first and second ring electrodes are aligned,
The extraction electrode moves along the radial direction of the rotating body connecting the center of rotation of the rotating body and the center of the ring electrode by the centrifugal force accompanying the rotation of the rotating body, and the first ring electrode The vibration power generator according to appendix 3, wherein a state in contact with the second ring electrode and a state in contact with the second ring electrode are switched.
(Appendix 5)
Further, it has a structure in which a piezoelectric body is sandwiched between counter electrodes, has a resonance frequency equal to that of the first cantilever, and is arranged in the same vibration direction as the first and second cantilevers. The vibration power generation apparatus according to appendix 4, further comprising a third cantilever electrically connected to the ring electrode.
(Appendix 6)
The holding mechanism includes a mechanism in which an outer casing member rotatably holds the inner casing member, and the first and second cantilevers are attached to the inner casing member, and are attached to the inner casing member. The vibration power generator according to appendix 3 or 4, wherein the member and the inner casing member form a balance structure such that the vibration direction is a vertical vertical direction as a whole, and the outer casing member is attached to the rotating body. .
(Appendix 7)
A third cantilever having a structure in which each of the piezoelectric bodies is sandwiched between opposing electrodes, arranged in the same vibration direction as the first and second cantilevers, and having a resonance frequency equal to that of the first cantilevers; , Having a fourth cantilever having a resonance frequency equal to that of the second cantilever, the third and fourth cantilevers being attached to the inner casing member, and the first to fourth cantilevers being The vibration power generator according to appendix 6, which is arranged in a symmetrical shape so as to form the balance structure.
(Appendix 8)
Furthermore, it has a control unit to which the voltage output from the first and second cantilevers is supplied, the control unit is attached to the inner casing member, and the control unit forms the balance structure The vibration power generator according to appendix 6, which functions as a weight for
(Appendix 9)
The holding mechanism is coaxial with the axis of the rotating body, is stationary on the rotating body, and is mounted on the rotating body, meshes with the first gear, and is relative to the rotating body. A second gear that rotates in the same direction as the rotating body of the rotating body, and a second gear that is mounted on the rotating body and meshes with the second gear, relative to the rotating body. And a third gear that rotates in the opposite direction, and the first and second cantilevers are attached to the third gear.
(Appendix 10)
Furthermore, the vibration electric power generating apparatus of Claim 1 which has a circuit which compares the output voltage of the said 1st and 2nd cantilever taken out via the said extraction electrode with a predetermined threshold voltage.

EG1, EG2 Vibration power generator 1, 1a-1f Cantilever 1s Support layer 1sw Weight 1sr Root 1p Piezoelectric layer 1ed Lower electrode 1eu Upper electrode CL Cantilever group 2, 2a-2d Ring electrode RE Ring electrode group 3 Inner casing member 4 outer casing member 5 bearing ball 6 extraction electrode 7 spring mechanism 7s spring EE extraction electrode mechanism 8 auxiliary extraction electrode 9 auxiliary ring electrode 10u (upper electrode) terminal electrode 10d (lower electrode) exposed portions 11u, 11d wiring 12 control Unit 20 Fixing base 21 Fixed gear 22 Intermediate gear 23 Mounting gear 23a Shaft member 23b Gear member 23c Sheath 23d Power generation structure mounting plate 24 Gear mounting plate 25 Support arm 25a Spring mounting portion IM Mounting mechanism 50 Rotating body 50a Rotating shaft 50p ( Surfaces 100, 100a, 1 (perpendicular to the axis of rotation of the rotating body) 0b power generation structure

Claims (5)

First and second cantilevers each having a structure in which a piezoelectric body is sandwiched between counter electrodes, having different resonance frequencies and arranged in a uniform vibration direction;
A holding mechanism for holding the first and second cantilevers on a rotating body;
A drawer that moves by centrifugal force accompanying the rotation of the rotating body and switches between a state of being electrically connected to the electrode of the first cantilever and a state of being electrically connected to the electrode of the second cantilever A vibration power generation device having an electrode.   The holding mechanism holds the first and second cantilevers in a posture in which the vibration direction is a first direction orthogonal to the rotation axis of the rotating body, and the rotating mechanism rotates the first cantilever during rotation of the rotating body. 2. The vibration according to claim 1, wherein the first and second cantilevers are rotated relative to the rotating body in a direction opposite to a rotating direction of the rotating body to maintain the vibration direction in the first direction. Power generation device. Furthermore, the electrodes of the first cantilever and the electrodes of the second cantilever are electrically connected, and have ring-shaped first and second ring electrodes arranged concentrically,
The center of the rotation operation in which the first and second cantilevers are rotated by the holding mechanism during the rotation of the rotating body and the centers of the first and second ring electrodes are aligned,
The extraction electrode moves along the radial direction of the rotating body connecting the center of rotation of the rotating body and the center of the ring electrode by the centrifugal force accompanying the rotation of the rotating body, and the first ring electrode The vibration power generator according to claim 2, wherein a state in contact with the second ring electrode and a state in contact with the second ring electrode are switched.   The holding mechanism includes a mechanism in which an outer casing member rotatably holds the inner casing member, and the first and second cantilevers are attached to the inner casing member, and are attached to the inner casing member. The vibration power generation according to claim 2 or 3, wherein the member and the inner casing member as a whole form a balance structure in which the vibration direction is a vertical vertical direction, and the outer casing member is attached to the rotating body. apparatus.   The holding mechanism is coaxial with the axis of the rotating body, is stationary on the rotating body, and is mounted on the rotating body, meshes with the first gear, and is relative to the rotating body. A second gear that rotates in the same direction as the rotating body of the rotating body, and a second gear that is mounted on the rotating body and meshes with the second gear, relative to the rotating body. The vibration power generator according to claim 2, wherein the first and second cantilevers are attached to the third gear.

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