WO2011052106A1

WO2011052106A1 - Power generator

Info

Publication number: WO2011052106A1
Application number: PCT/JP2010/002670
Authority: WO
Inventors: 野村幸治
Original assignee: パナソニック株式会社
Priority date: 2009-10-29
Filing date: 2010-04-13
Publication date: 2011-05-05

Abstract

A power generator is provided with first electrodes (5) disposed on a plate-shaped first member (14), second electrodes (8) disposed on a plate shaped second member (15) in a manner so as to face the first electrodes (5) with a space therebetween, electret materials (9) disposed on the second electrodes (8), and a plurality of members (4) which are disposed between the first member (14) and the second member (15), and which bring the first member (14) and second member (15) into contact. The first member (14) rotates relative to the second member (15) in the in-plane direction thereof.

Description

Power generator

The present invention relates to a power generator, and more particularly to an electrostatic induction power generator using an electret material.

Conventionally, a small electrostatic induction generator is known. An electrostatic induction power generating device applies a charge to a variable-capacitance electrode, causes a coulomb attractive force to work between the counter electrodes due to the charge, and converts vibration energy generated by the vibration of the vibrator against this coulomb attractive force into electrical energy. The power generation is performed by converting into (see, for example, Patent Document 1).

FIG. 37 (a) is a schematic plan view of a conventional electrostatic induction power generating device disclosed in Patent Document 1, and FIG. 37 (b) is taken along line 2A-2A of the power generating device of FIG. 37 (a). FIG. 37 (c) is a schematic cross-sectional view taken along line 2B-2B of the power generation device of FIG. 37 (a).

As shown in FIGS. 37 (a) to 37 (c), this electrostatic induction power generating device is a so-called electret power generating device in which the comb-shaped electret material electrode 102 and the movable electrode 105 are spaced apart from each other by a predetermined distance. Are arranged. The movable electrode 105 and the movable substrate 104 are connected to

fixed structures

103a and 103b provided on the non-movable substrate 101 through elastic members such as

spring drivers

106a and 106b. By combining the two types of

spring drivers

106a and 106b, the movable substrate 104 can move in any direction within the XY plane. When this spring vibrates in the X-axis direction or the Y-axis direction, the overlapping area of the electret material electrode 102 holding the charge and the movable electrode 105 facing the electret material electrode 102 is increased and decreased. Changes in the amount of charge. The electrostatic induction power generation device generates power by taking out the change in the charge amount as electric energy.

In addition, as examples for explaining other power generation devices, for example, Patent Document 2 and Patent Document 3 can be cited.

JP 2008-86190 A JP 2005-529574 A JP 2009-81968 A

However, in the conventional electrostatic induction power generating device, the movable substrate vibrates only in the X-axis direction or the Y-axis direction. Therefore, this electrostatic induction power generation device has a problem that external vibrations in directions other than the X-axis direction or the Y-axis direction cannot be used for power generation.

In view of the above problems, an object of the present invention is to provide a power generation apparatus that can efficiently use multidirectional external vibrations for power generation.

In order to achieve the above object, a power generation device according to the present invention is provided with a first electrode provided on a plate-like first member, and a first electrode provided so as to face the first electrode at an interval. A second electrode provided on the second member having a shape, an electret material provided between the first electrode and the second electrode, and provided on the first electrode or the second electrode; A plurality of third members provided between the first member and the second member and in contact with the first member or the second member, wherein the first member is relative to the second member; It rotates relatively and in the in-plane direction.

The power generator of the present invention has at least a first portion and a second portion, a space defined by the first portion and the second portion, and a first portion provided in the first portion. 1 electrode, the second electrode provided to be opposed to the first electrode at an interval and provided in the second portion, and provided in the first electrode or the second electrode in the space And a third portion that contacts the first portion or the second portion, and the first portion or the second portion may be a rotary weight.

In addition, the power generation device of the present invention includes a first electrode provided on the first member, a second electrode provided on the second member so as to face the first electrode with a gap therebetween. Provided between the electrode, the first electrode and the second electrode, and provided between the first electrode or the electret material provided on the second electrode and the first member or the second member. And a third member that contacts the first member or the second member, and the first member may be a rotary weight.

In addition, the power generation device of the present invention is provided so that the first electrode provided on the plate-like first member and the first electrode are opposed to each other at an interval, and the plate-like second member is provided. The first member is a rotary weight (the first member rotates relative to the second member and in the in-plane direction thereof), and the first member The electrode may rotate relative to the second electrode and in its in-plane direction.

In order to achieve the above object, the power generator of the present invention includes a first electrode provided on a plate-like first member, a second electrode provided on a plate-like second member, and A third electrode and a fourth electrode provided on the plate-like third member, wherein the first electrode and the second electrode are provided so as to face each other with a space therebetween; The third electrode and the fourth electrode are provided so as to face each other with a space therebetween, and the second member rotates relative to the first member and in the in-plane direction.

In order to achieve the above object, the power generation device of the present invention is provided so as to face the first electrode provided on the first member with a distance from the first electrode. A second electrode provided on the member, the first member is disposed inside the second member, and the second member is movable.

In addition, the power generation device of the present invention includes a first electrode provided on the first member, a second electrode provided on the second member so as to face the first electrode with a gap therebetween. And the second member has a weight at the outer edge.

In addition, the power generation device of the present invention includes a first electrode provided on the first member, a second electrode provided on the second member so as to face the first electrode with a gap therebetween. An electrode, and the mass per unit volume of the outer edge of the second member is larger than the mass per unit volume in the vicinity of the center of the second member.

In addition, the power generation device of the present invention includes a first electrode provided on the first member, a second electrode provided on the second member so as to face the first electrode with a gap therebetween. An electrode, and the second member is more than the distance from the center of gravity of the overlapping portion of the first member and the portion projected from the top toward the first member to the vicinity of the center of the first member. The distance from the center of gravity of the member to the portion of the second member facing the vicinity of the center of the first member is longer.

According to the power generator according to the present invention, it is possible to obtain a power generator capable of efficiently using multidirectional external vibrations for power generation, as well as an electric device and a communication device equipped with such a power generator.

1 (a) to 1 (c) show a power generator according to a first embodiment of the present invention, FIG. 1 (a) is a schematic perspective view, and FIG. 1 (b) is a schematic plan view. FIG. 1C is a schematic cross-sectional view taken along the line Ic-Ic in FIGS. 1A and 1B. FIG. 2 is a diagram for explaining the operation of the power generator according to the first embodiment of the present invention. 3 (a) and 3 (b) show one step of the method for manufacturing the power generation apparatus according to the first embodiment of the present invention, FIG. 3 (a) is a schematic perspective view, and FIG. 3 (b). FIG. 4 is a schematic sectional view taken along line IIIb-IIIb in FIG. 4 (a) and 4 (b) show one step of the method for manufacturing the power generation device according to the first embodiment of the present invention, FIG. 4 (a) is a schematic perspective view, and FIG. 4 (b). FIG. 5 is a schematic sectional view taken along line IVb-IVb in FIG. 5 (a) and 5 (b) show one step of the method for manufacturing the power generation device according to the first embodiment of the present invention, FIG. 5 (a) is a schematic perspective view, and FIG. 5 (b). FIG. 6 is a schematic sectional view taken along line Vb-Vb in FIG. FIG. 6 is a schematic plan view showing the electrode shape of the power generation device according to the first modification of the first embodiment of the present invention. FIG. 7 is a schematic plan view showing the electrode shape of the power generator according to the second modification of the first embodiment of the present invention. 8 (a) and 8 (b) show a power generator according to the second embodiment of the present invention, FIG. 8 (a) is a schematic perspective view, and FIG. 8 (b) is FIG. 8 (a). It is a schematic perspective view when the member arrange | positioned at the upper part is removed among power generators shown in FIG. 9 (a) and 9 (b) show a power generator according to the second embodiment of the present invention, FIG. 9 (a) is a schematic plan view, and FIG. 9 (b) is FIG. 8 (a). FIG. 10 is a schematic sectional view taken along line IXb-IXb in FIG. It is a figure explaining operation | movement of the electric power generating apparatus which concerns on the 2nd Embodiment of this invention. 11 (a) and 11 (b) show one step of the method for manufacturing the power generation apparatus according to the second embodiment of the present invention, FIG. 11 (a) is a schematic perspective view, and FIG. 11 (b) FIG. 12 is a schematic sectional view taken along line XIb-XIb in FIG. 12 (a) and 12 (b) show one step of the method for manufacturing the power generation device according to the second embodiment of the present invention, FIG. 12 (a) is a schematic perspective view, and FIG. 12 (b). FIG. 13 is a schematic sectional view taken along line XIIb-XIIb in FIG. 13 (a) and 13 (b) show one step of the method for manufacturing the power generation apparatus according to the second embodiment of the present invention, FIG. 13 (a) is a schematic perspective view, and FIG. 13 (b) FIG. 14 is a schematic sectional view taken along line XIIIb-XIIIb in FIG. 14 (a) and 14 (b) show one step of the method for manufacturing the power generation apparatus according to the second embodiment of the present invention, FIG. 14 (a) is a schematic perspective view, and FIG. 14 (b) FIG. 15 is a schematic sectional view taken along line XIVb-XIVb in FIG. FIG. 15: is a schematic sectional drawing which shows the electric power generating apparatus which concerns on the 1st modification of the 2nd Embodiment of this invention. FIG. 16: is a schematic plan view which shows the electrode shape of the electric power generating apparatus which concerns on the 2nd modification of the 2nd Embodiment of this invention. FIG. 17 is a schematic plan view showing the electrode shape of the power generator according to the third modification of the second embodiment of the present invention. 18 (a) and 18 (b) show a power generator according to a third embodiment of the present invention, FIG. 18 (a) is a schematic perspective view, and FIG. 18 (b) is a schematic plan view. . FIG. 19A is a schematic cross-sectional view taken along line XIXa-XIXa of FIGS. 18A and 18B of the power generator according to the third embodiment of the present invention, and FIG. It is a schematic sectional drawing in case the electric power generating apparatus which concerns on this 3rd Embodiment is provided with the substantially spherical member. FIG. 20 is a diagram for explaining the operation of the power generation apparatus according to the third embodiment of the present invention. 21 (a) and 21 (b) are views for explaining the position of the center of gravity of the second member of the power generator according to the third embodiment of the present invention, and FIG. 21 (a) is a schematic perspective view. FIG. 21B is a schematic plan view. 22 (a) and 22 (b) show one step of the method for manufacturing the power generation apparatus according to the third embodiment of the present invention, FIG. 22 (a) is a schematic perspective view, and FIG. 22 (b) FIG. 22 is a schematic sectional view taken along line XXIIb-XXIIb in FIG. FIG. 23A and FIG. 23B show one process of the method for manufacturing the power generation apparatus according to the third embodiment of the present invention, FIG. 23A is a schematic perspective view, and FIG. FIG. 24 is a schematic sectional view taken along line XXIIIb-XXIIIb in FIG. 24 (a) and 24 (b) show one step of the method of manufacturing the power generation device according to the third embodiment of the present invention, FIG. 24 (a) is a schematic perspective view, and FIG. 24 (b) FIG. 25 is a schematic sectional view taken along line XXIVb-XXIVb in FIG. FIG. 25 is a schematic cross-sectional view showing a power generator according to a first modification of the third embodiment of the present invention. 26 (a) and 26 (b) show a power generator according to a second modification of the third embodiment of the present invention, FIG. 26 (a) is a schematic perspective view, and FIG. It is a schematic plan view. FIG. 27 is a schematic cross-sectional view taken along line XXVII-XXVII in FIGS. 26A and 26B of the power generator according to the second modification of the third embodiment of the present invention. FIG. 28 is a schematic plan view showing the electrode shape of the power generator according to the third modification of the third embodiment of the present invention. FIG. 29 is a schematic plan view showing the electrode shape of the power generator according to the fourth modification of the third embodiment of the present invention. 30 (a) and 30 (b) show a power generator according to a fourth embodiment of the present invention, FIG. 30 (a) is a schematic perspective view, and FIG. 30 (b) is a schematic plan view. . FIG. 31 (a) is a schematic cross-sectional view of the power generator according to the fourth embodiment of the present invention taken along line XXXIa-XXXIa in FIGS. 30 (a) and 30 (b), and FIG. 31 (b) is the present invention. It is a schematic sectional drawing in case the electric power generating apparatus which concerns on 4th Embodiment is provided with the substantially spherical member. 32 (a) and 32 (b) are diagrams for explaining the position of the center of gravity of the second member of the power generator according to the fourth embodiment of the present invention, and FIG. 32 (a) is a schematic perspective view. FIG. 32 (b) is a schematic plan view. 33 (a) and 33 (b) show a power generator according to a first modification of the fourth embodiment of the present invention, FIG. 33 (a) is a schematic perspective view, and FIG. It is a schematic plan view. FIG. 34 is a schematic sectional view taken along line XXXIV-XXXIV in FIGS. 33 (a) and 33 (b) of a power generator according to a first modification of the fourth embodiment of the present invention. FIG. 35 is a schematic plan view showing the electrode shape of the power generator according to the second modification of the fourth embodiment of the present invention. FIG. 36 is a schematic plan view showing the electrode shape of the power generator according to the third modification of the fourth embodiment of the present invention. 37 (a) to 37 (c) show a conventional power generator, FIG. 37 (a) is a schematic plan view, and FIG. 37 (b) is a schematic cross section taken along line 2A-2A in FIG. 37 (a). FIG. 37 (c) is a schematic cross-sectional view taken along line 2B-2B of FIG. 37 (a).

(First embodiment)
A power generator according to a first embodiment of the present invention will be described with reference to FIG. In addition, the materials and numerical values used in the following embodiments of the present invention merely exemplify preferred examples, and are not limited to this form. In addition, changes can be made as appropriate without departing from the scope of the idea of the present invention.

As shown in FIG. 1C, the first member 14 includes, for example, a first substrate 1 made of a stainless alloy containing chromium and nickel, a second substrate 2 that is a printed circuit board, for example, It is made of a stainless alloy containing chromium and nickel, etc., and is configured by combining with a spacer 3 having a groove. On the second substrate 2 of the first member 14, a substantially fan-shaped first electrode 5 extending from the vicinity of the center toward the outer peripheral direction as shown in FIG. A plurality are formed with an interval of. Note that a plurality of substantially fan-shaped first electrodes 5 are preferably formed from the viewpoint of power generation efficiency, but may be one.

Further, the spacer 3 which is a part of the first member 14 is held on the outer surface of the first member 14 on the surface facing the second member 15 described later, and is formed on the spacer 3. The member 4 is disposed in the groove portion so as to be in contact with the groove portion. The member 4 is preferably a substantially spherical member that can rotate. The member 4 is preferably made of a wear-resistant material or a cemented carbide material, and is usually made of a material such as Al ₂ O ₃ , Si ₃ N ₄ , ZrO ₂ or tungsten carbide. Since the member 4 is substantially spherical, the friction caused by rotation of the second member 15 is reduced, and the power generation efficiency can be improved. Further, since the member 4 is made of an abrasion resistant material or a super hard material, a structure that is more resistant to friction and has high durability can be obtained.

Further, the groove formed in the spacer 3 has a length corresponding to a certain range along the outer periphery of the first member 14 when viewed from above, and the member 4 is a substantially spherical member. It is preferable that it is movable while rotating between the ranges. Moreover, it is preferable that there are a plurality of such groove portions according to the number of members 4. Here, if the shape of the first member 14 viewed from above is a circular shape, the groove formed in the spacer 3 has an arc shape. Further, the structure in which the substantially spherical member 4 is combined with the groove portion of the spacer 3 in this way can also be called a bearing structure. The bearing structure only needs to be able to rotate the substantially spherical member 4 and may be, for example, a cylinder, and is not limited to the configuration of the present embodiment.

Further, the spacer 3 in which the member 4 is disposed in the groove portion may be formed on the second member 15 described later. In addition, the groove part does not necessarily need to be formed in the spacer 3, and should just be formed in the surface facing the 2nd member 15 mentioned later among the 1st members 14. FIG. Further, the spacer 3 only needs to be between the first member 14 and the second member 15, and does not necessarily have to be an outer edge portion. The member 4 is not limited to a substantially spherical shape, and may be a protrusion. That is, the structure which has the protrusion which contacts the 1st member 14 or the 2nd member 15 between the 1st member 14 and the 2nd member 15 may be sufficient.

As shown in FIG. 1C, the second member 15 includes a third substrate 6 made of, for example, a stainless alloy containing chromium and nickel, and a fourth substrate 7 made of, for example, a silicon substrate. It is configured by combining. The shape seen from the upper surface of the second member 15 is substantially fan-shaped as shown in FIG. 1A, and is disposed so as to face the first member 14. On the surface of the third substrate 6 that is a part of the second member 15 in the range shown in the region B of FIGS. 1A and 1B and facing the first member 14, for example, A fourth substrate 7 made of silicon is attached. Here, a plurality of second electrodes 8 are formed on the surface of the fourth substrate 7 facing the first member 14 at intervals similar to the rotation angle of the first electrode 5. ing. An electret material 9 is formed on the second electrode 8 side between the first electrode 5 and the second electrode 8. The second electrode 8 and the electret material 9 are formed on the first substrate 1 in such a shape that a part of the substantially fan-shaped stripe structure like the first electrode 5 is cut off. It is formed so as to overlap with the electrode. Reference numeral 8 in FIG. 1B is a portion where the second electrode 8 and the electret material 9 are formed, and is actually formed on the surface facing the first substrate 1.

As shown in FIGS. 1A and 1B, the first member 14 and the second member 15 are connected by a shaft 10 and a bearing 11 in the vicinity of the center of the first member 14. ing. Here, the second member 15 has a structure that can rotate relative to the first member 14 in the plane direction of the second member 15 about the shaft 10.

When the second member 15 rotates about the shaft 10, the overlapping portion between the formation portion of the first electrode 5 and the formation portion of the electret material 9 deviates, and overlaps again when shifted by a certain rotation angle. It is like that.

Here, the second member 15 may be a rotating weight, and is not limited to a fan shape. Moreover, a semicircle may be sufficient. Since the second member 15 is a rotating weight, it is easy to shake even with minute vibrations, and power generation efficiency can be improved. The rotary weight refers to the one whose center of gravity is displaced from the rotation axis. The longer the distance from the rotation axis is, the more easily affected by the centrifugal force and the easier it is to absorb vibration energy.

Here, the movement of the second member 15 when external vibration is applied to the power generation apparatus according to the first embodiment will be described with reference to FIG.

As shown in FIG. 2, the shape of the first member 14 viewed from the upper side is substantially circular, and the shape of the second member 15 viewed from the upper side is a shape obtained by removing a part of the first member 14. I am doing. The second member 15 functions as a rotary weight that can rotate in the first rotation direction 12 and the second rotation direction 13 about the shaft 10 as a central axis. Since the second member 15 is a weight, it can vibrate efficiently even with a small force.

Here, when the vibration from the outside is small, the second member 15 is directed to the first rotation direction 12 around the gravity direction (Y-axis direction), and from a certain point to the second rotation direction 13. A pendulum movement like heading. On the other hand, when the vibration from the outside is large, the second member 15 moves so as to continue to rotate in the first rotation direction 12 or the second rotation direction 13.

Further, since the first member 14 is fixed, the rotational motion corresponding to the external vibration does not occur unlike the second member 15.

Next, a mechanism of power generation when external vibration is applied to the power generation apparatus according to the first embodiment will be described.

First, when external vibration is applied to the power generation device, the second electrode 8 also rotates in the first rotation direction 12 or the second rotation direction 13 around the shaft 10 in response to the vibration of the second member 15. To do. Then, an increase or decrease occurs in the overlapping area between the first electrode 5 disposed on the fixed first member 14 and the electret material 9 that vibrates in the first rotation direction 12 or the second rotation direction 13. As a result, the charge induced in the second electrode 8 changes. Electricity is generated by taking out the current resulting from the change in the amount of electric charge as electric energy to the outside.

According to the power generation device according to the first embodiment, it is possible to take out the change in the amount of charge generated in the second electrode 8 corresponding to the rotation of the second member 15 as electric energy. Therefore, compared with the prior art, there is an effect that vibrations in all directions in the plane can be efficiently used for power generation.

Further, according to the power generation device according to the first embodiment, the variation of the gap (space) between the first electrode 5 and the electret material 9 facing the first electrode 5 is controlled by the member 4 formed on the spacer 3. be able to. In order to reduce the size and increase the power generation amount, it is necessary to reduce the distance between the first electrode 5 and the electret material 9. However, on the other hand, if the distance is shortened too much, the first electrode 5 and the electret material 9 become difficult to move due to the influence of the Coulomb force generated between the first electrode 5 and the electret material 9. There is a risk of sticking. Here, the variation of the gap between the first electrode 5 and the electret material 9 is suppressed by the member 4 formed on the spacer 3, and the first electrode 5 and the electret material 9 are prevented from sticking. Is possible.

Moreover, according to the power generation device according to the first embodiment, the second member 15 can be smoothly rotated by the member 4 formed on the spacer 3. Therefore, there is an effect that a larger amount of power generation can be obtained. In the present embodiment, the friction generated between the second member 15 and the first member 14 is reduced by the bearing structure in which the substantially spherical member 4 is disposed in the groove portion formed in the spacer 3, and the power generation efficiency is reduced. Can be improved. Furthermore, the frictional force between the first member 14 and the second member 15 can be reduced even in the state where the Coulomb attractive force is generated between the first electrode 5 and the electret material 9, It can generate electricity more efficiently. In order to prevent contact between the first electrode 5 and the electret material 9, a protrusion made of a wear-resistant material or a super hard material may be formed as the spacer 3. In addition, this protrusion may be formed on the second member 15.

Here, it is preferable that the electret material 9 is made of an insulating film such as a silicon oxide film and is covered with an insulating film having a larger tensile stress than the silicon nitride film or the like. By covering the silicon oxide film with the silicon nitride film, it is possible to make it difficult for the charge injected into the silicon oxide film portion to escape, and to improve the power generation efficiency. In order to make it difficult for the charge to escape, it is preferable that the side surface, the lower surface and the upper surface of the electret material 9 are completely covered with the silicon nitride film.

Further, the electret material 9 may be formed of, for example, a lead zirconate titanate (PZT) film instead of a silicon oxide film. Since PZT has ferroelectric properties, it becomes the electret material 9 when polarized. Since charges exist on the outermost surface of the PZT film, the center of charge is closest to the opposing electrode. As a result, the amount of charge obtained by electrostatic induction increases, and the power generation efficiency can be improved.

Here, in this embodiment, the electret material 9 is arranged on the second member 15, but the electret material 9 may be arranged on the first member 14.

In addition, although the electret material 9 hold | maintains an electric charge in an insulator, it cannot hold | maintain an electric charge exceeding the dielectric strength voltage which a material has. Therefore, it is necessary to control the thickness in accordance with the necessary charge amount. In a material with a low withstand voltage, the thickness is relatively increased, and the distance between the center of the charge and the counter electrode is relatively long, so the power generation efficiency tends to decrease. Therefore, a silicon oxide film having a high withstand voltage is effective and power generation efficiency is increased.

In order to increase the amount of power generation, the distance between the first electrode 5 and the electret material 9 should be short, and is preferably about 50 μm or less. For this purpose, the thickness is about 0.5 μm, and the distance between the first electrode 5 and the second electrode 8 made of gold, polysilicon, or the like is about 50 μm or less. Is preferred. Here, in the present embodiment, for example, the second substrate 2 on which the first electrode 5 is formed has a thickness of about 500 μm, the diameter of the substantially spherical member 4 is about 200 μm to 300 μm, and the first electrode 5 and the electret material 9 having a thickness of about 2 μm to 3 μm are preferably about 50 μm. In particular, according to the structure according to the present embodiment, the distance between the first electrode 5 and the electret material 9 can be controlled with high accuracy. For this reason, even if the distance between the first electrode 5 and the electret material 9 is as small as about 50 μm or less, sticking of both can be prevented. However, these numerical values only exemplify preferable values, and are not limited to these numerical values.

Next, a method for manufacturing the power generation apparatus according to the first embodiment of the present invention will be described with reference to FIGS.

First, as shown in FIGS. 3A and 3B, a first member 14 is formed. A first electrode 5 is formed on the second substrate 2 and held on the first substrate 1. Further, the spacer 4 is held on the outer edge portion of the first substrate 1 in a state in which a member 4 made of, for example, a spherical wear-resistant material or a super hard material is incorporated in the groove portion of the spacer 3.

Also, as shown in FIGS. 4A and 4B, the second member 15 is formed. The second member 15 has a structure for holding the fourth substrate 7 on a part of the third substrate 6. Here, it is preferable that a groove is formed in a part of the third substrate 6 and the fourth substrate 7 is fitted. The fourth substrate 7 has the shape of the portion represented by the region B in FIG. A second electrode 8 is patterned on the fourth substrate 7 as shown in FIG. 1B, and an electret material 9 is formed on the second electrode 8.

Next, as shown in FIGS. 5A and 5B, the first member 14 and the second member 15 are connected using the shaft 10 and the bearing 11. The shaft 10 and the bearing 11 are used so that the surface of the first member 14 on which the first electrode 5 is formed and the surface of the second member 15 on which the electret material 9 is formed face each other. The first member 14 and the second member 15 are connected. At this time, the third substrate 6 is connected so as to be rotatable relative to the first member 14.

(First modification of the first embodiment)
A power generation apparatus according to a first modification of the first embodiment of the present invention will be described with reference to FIG.

The power generation device according to the first modification of the first embodiment is viewed from above the first electrode 5, the second electrode 8, and the electret material 9, as compared with the power generation device according to the first embodiment. The shape is different, and the other configurations are the same.

Specifically, as shown in FIG. 4, the first electrode 5, the second electrode 8, and the electret material 9 are each formed in a spiral shape. In addition, in FIG. 4, although the spiral shape is described in the shape of a line for simplification, from the viewpoint of power generation efficiency, the first electrode 5, the second electrode 8, and the electret material 9 are respectively It has a certain width.

By arranging the first electrode 5, the second electrode 8 and the electret material 9 as described above, the electrodes are connected in a spiral shape, so there is no need for connection between the respective electrode blocks. There is an effect that it can be easily connected to the external wiring at the outer peripheral portion.

(Second modification of the first embodiment)
A power generation apparatus according to a second modification of the first embodiment of the present invention will be described with reference to FIG.

The power generation device according to the second modification of the first embodiment is viewed from above the first electrode 5, the second electrode 8, and the electret material 9, as compared with the power generation device according to the first embodiment. The shape is different, and the other configurations are the same.

Specifically, as shown in FIG. 7, the first electrode 5, the second electrode 8, and the electret material 9 may be arranged in a zigzag shape as a block shape. In other words, the block-shaped first electrode 5, the block-shaped second electrode 8, and the block-shaped electret material 9 each extend from the vicinity of the center (rotation axis) of the first member 14 toward the outer peripheral direction. A plurality of them will be arranged. Moreover, the 2nd electrode 8 and the electret material 9 are arrange | positioned so that it may overlap, and the 1st electrode 5 is arrange | positioned facing so that they may overlap.

The present invention is not limited to the above embodiment. Furthermore, it is also possible to combine each embodiment and modification suitably.

Moreover, in 1st Embodiment and its modification, although the electret material 9 demonstrated the structure arrange | positioned between the 1st electrode 5 and the 2nd electrode 8, the 1st electrode 5 and the 2nd If a charge supply mechanism capable of supplying charges from the outside is provided between the electrode 8 and the electrode 8, it is not always necessary. However, a large amount of charge needs to be supplied between the first electrode 5 and the second electrode 8. Therefore, from that point of view, it is preferable that the electret material 9 is disposed between the first electrode 5 and the second electrode 8.

(Second Embodiment)
A power generation device according to a second embodiment of the present invention will be described with reference to FIGS. 8 and 9. Moreover, in the following embodiment of this invention, the material and numerical value which are used only have illustrated the preferable example, and are not limited to this form. In addition, changes can be made as appropriate without departing from the scope of the idea of the present invention.

As shown in FIGS. 8A and 8B and FIGS. 9A and 9B, the first member 42 includes the first substrate 21, the second substrate 22, and the first member. The spacer 23 is constituted. The second member 43 includes a third substrate 25, a fourth substrate 26, and a fifth substrate 27. The third member 44 includes a sixth substrate 28, a seventh substrate 29, and a second spacer 30. Details of the first member 42, the second member 43, and the third member 44 will be described later.

As shown in FIGS. 8A, 8B, and 9A, the shapes of the first member 42 and the third member 44 viewed from above are substantially circular, respectively. The shape of the member 43 viewed from above is a shape obtained by removing a part from the first member 42 or the third member 44, and is substantially fan-shaped. FIG. 9A is a diagram in which the third member 44 is omitted.

Further, as shown in FIGS. 8A and 8B, the first member 42, the second member 43, and the third member 44 are the centers of the first member 42 and the third member 44. The shaft 38 and the bearing 39 are connected in the vicinity. Here, the second member 43 has a structure that can rotate relative to the first member 42 and the third member 44 in the plane direction of the second member 43 around the shaft 38. Have.

Here, the second member 43 is not limited to a fan shape. For example, a semicircle may be sufficient. Further, the second member 43 may be a rotary weight. Since the second member 43 is a rotary weight, it is easy to shake even a minute vibration, and the power generation efficiency is improved. The rotary weight refers to the one whose center of gravity is displaced from the rotation axis. The longer the distance from the rotation axis is, the more easily affected by the centrifugal force and the easier it is to absorb vibration energy.

Next, details of the first member 42, the second member 43, and the third member 44 will be described.

As shown in FIG. 9B, the first member 42 includes, for example, a first substrate 21 made of, for example, a stainless alloy containing chromium and nickel, a second substrate 22 that is a printed circuit board, and the like. The first spacer 23 is made of a stainless steel alloy containing chromium and nickel and has a groove. The first spacer 23 is held on the surface where the first member 42 and the second member 43 are opposed to each other and on the outer edge portion of the first member 42. Further, the member 24 is disposed in the groove portion of the first spacer 23 so as to contact the groove portion. The member 24 is preferably a substantially spherical member that can rotate. The member 24 is preferably made of a wear-resistant material or a cemented carbide material, and is usually made of a material such as Al ₂ O ₃ , Si ₃ N ₄ , ZrO _2, or tungsten carbide. Since the member 24 is substantially spherical, the second member 43 has reduced friction due to rotation and can improve power generation efficiency. In addition, since the member 24 is made of a wear-resistant material or a cemented carbide material, a structure that is more resistant to friction and has higher durability can be obtained.

Further, the groove formed in the first spacer 23 has a length corresponding to a certain range along the outer edge of the first member 42 when viewed from above, and the member 24 is a substantially spherical member. In some cases, it is preferable to be able to move while rotating between the ranges. Moreover, it is preferable that there are a plurality of such groove portions according to the number of members 24. Here, if the shape of the first member 42 viewed from above is circular, the groove formed in the first spacer 23 has an arc shape. Further, the structure in which the substantially spherical member 24 is combined with the groove portion of the first spacer 23 in this way can also be called a bearing structure. The bearing structure only needs to be able to rotate the substantially spherical member 24 and may be, for example, a cylinder, and is not limited to the configuration of the present embodiment. Further, the first spacer 23 in which the member 24 is disposed in the groove portion may be formed on the second member 43.

In addition, the groove part does not necessarily need to be formed in the 1st spacer 23, and should just be formed in the surface facing the 2nd member 43 among the 1st members 42. FIG.

Further, the first spacer 23 may be provided between the first member 42 and the second member 43 and is not necessarily an outer edge portion. The member 24 is not limited to a substantially spherical shape, and may be a protrusion. In other words, a structure having a protrusion that contacts the first member 42 or the second member 43 between the first member 42 and the second member 43 may be used.

Further, as shown in FIG. 9B, the second member 43 includes a third substrate 25 made of, for example, a stainless alloy containing chromium and nickel, and a fourth substrate 26 made of, for example, a silicon substrate. And, for example, a fifth substrate 27 made of a silicon substrate or the like. Here, the fourth substrate 26 is held on the surface of the third substrate 25 and on the side facing the first member 42. Further, the fifth substrate 27 is held on the surface of the third substrate 25 and on the side facing the third member 44. The fourth substrate 26 and the fifth substrate 27 are respectively held below the portion shown as the region B in FIGS. 8B and 9A in the substantially fan-shaped third substrate 25. Yes.

As shown in FIG. 9B, the third member 44 includes, for example, a sixth substrate 28 made of, for example, a stainless alloy containing chromium and nickel, and a seventh substrate 29, which is a printed circuit board. For example, the second spacer 30 is made of a stainless steel alloy containing chromium and nickel and has a groove. The second spacer 30 is held on the surface where the second member 43 and the third member 44 face each other and on the outer edge of the third member 44. Further, the member 31 is disposed in the groove portion of the second spacer 30 so as to contact the groove portion. The member 31 is preferably a rotatable substantially spherical member. The member 31 is preferably made of a wear-resistant material or a cemented carbide material, and is usually made of a material such as Al ₂ O ₃ , Si ₃ N ₄ , ZrO ₂ or tungsten carbide. Since the member 31 has a substantially spherical shape, the second member 43 can reduce friction due to rotation and improve power generation efficiency. Further, since the member 31 is made of a wear-resistant material or a cemented carbide material, a structure that is more resistant to friction and has high durability can be obtained.

Further, the groove formed in the second spacer 30 has a length corresponding to a certain range along the outer edge of the third member 44 when viewed from above, and the member 31 is a substantially spherical member. In some cases, it is preferable to be able to move while rotating between the ranges. Further, it is preferable that there are a plurality of such groove portions according to the number of members 31. Here, if the shape of the third member 44 viewed from above is circular, the groove formed in the second spacer 30 has an arc shape. Further, the structure in which the substantially spherical member 31 is combined with the groove portion of the second spacer 30 in this way can also be called a bearing structure. The bearing structure only needs to be able to rotate the substantially spherical member 31 and may be, for example, a cylinder, and is not limited to the configuration of the present embodiment. The second spacer 30 in which the member 31 is disposed in the groove portion may be formed on the second member 43.

The groove portion is not necessarily formed in the second spacer 30, and may be formed in a surface of the third member 44 that faces the second member 43.

Further, the second spacer 30 only needs to be between the second member 43 and the third member 44, and does not necessarily have to be an outer edge portion. The member 31 is not limited to a substantially spherical shape, and may be a protrusion. That is, a structure having a protrusion that contacts the second member 43 or the third member 44 between the second member 43 and the third member 44 may be employed.

As shown in FIGS. 8B and 9A, the surface of the second substrate 22 that is a part of the first member 42 faces the second member 43, as shown in FIGS. 8B and 9A. A plurality of substantially fan-shaped first electrodes 32 extending toward the surface are formed at intervals of a certain rotation angle. Note that a plurality of substantially fan-shaped first electrodes 32 are preferably formed from the viewpoint of power generation efficiency, but may be one.

On the surface of the fourth substrate 26, which is a part of the second member 43, facing the first member 42, the second electrode 33 is spaced at the same rotation angle as the first electrode 32. Is formed. A first electret material 34 is formed on the second electrode 33 side between the first electrode 32 and the second electrode 33. The second electrode 33 and the first electret material 34 formed on the second electrode 33 have a shape that is partly cut out of a substantially fan-shaped stripe structure like the first electrode 32, A second electrode 33 and a first electret material 34 are formed so as to overlap the first electrode 32 formed on the first member 42.

Reference numerals

13 and 14 in FIG. 9A are portions where the second electrode 33 and the first electret material 34 are formed, and are actually formed on the surface facing the first member 42. .

The surface of the fifth substrate 27, which is a part of the second member 43, that faces the third member 44 is spaced by the same rotation angle as that of the fourth electrode 37 to be described later. An electrode 35 is formed. A second electret material 36 is formed on the third electrode 35 side between the third electrode 35 and a fourth electrode 37 disposed on a third member 44 described later. The third electrode 35 and the second electret material 36 formed on the third electrode 35 have a shape in which a part of a substantially fan-shaped stripe structure such as a fourth electrode 37 described later is cut off. The third electrode 35 and the second electret material 36 are formed so as to overlap with the fourth electrode 37 formed on the third member 44. Reference numerals 15 and 16 in FIG. 9A are portions where the third electrode 35 and the second electret material 36 are formed, and are actually formed on the surface facing the third member 44. .

A fourth electrode 37 is formed on the surface of the seventh substrate 29, which is a part of the third member 44, facing the second member 43 so as to have the same shape as the first electrode 32. Has been. Here, it is preferable that a plurality of fourth electrodes 37 be formed with an interval corresponding to the rotation angle similar to that of the first electrode 32, but the interval corresponding to the rotation angle similar to that of the third electrode 35 is increased. If it is formed, it does not matter.

The second member 43 is rotated about the shaft 38 to thereby form the first electrode 32 forming portion, the fourth electrode 37 forming portion, the first electret material 34 forming portion, and the second electret. The overlapping portion with the forming portion of the material 36 moves away, and when it deviates by a certain rotation angle, it overlaps again.

In the present embodiment, the first member 42 is composed of the first substrate 21, the second substrate 22, and the first spacer 23, but the configuration of the first member 42 is the same. It is not limited. That is, it may be composed of a single substrate, or may be composed of two or more substrates or spacers. Similarly, the 2nd member 43 may be comprised by one board | substrate, and may be comprised from the 2 or more board | substrate or the spacer. Similarly, the third member 44 may be constituted by one substrate, or may be constituted by two or more substrates or spacers.

In the present embodiment, the

members

24 and 31 are formed on the first member 42 and the third member 44, respectively, but may be formed on the second member 43.

Next, the movement of the second member 43 when external vibration is applied to the power generation apparatus according to the second embodiment will be described with reference to FIG.

As shown in FIG. 10, the shape of the first member 42 and the third member 44 viewed from the upper side is substantially circular, and the shape of the second member 43 viewed from the upper side is the first member 42 or the first member 42. The shape is such that a part of the third member 44 is removed. The second member 43 is rotatable in the first rotation direction 40 and the second rotation direction 41 about the shaft 38 as a central axis. The second member 43 may be a rotary weight. Since the second member 43 is a weight, it can vibrate efficiently even with a small force.

Here, when the vibration from the outside is small, the second member 43 is directed to the first rotation direction 40 around the gravitational direction (Y-axis direction) and from a certain point to the second rotation direction 41. A pendulum movement like heading. On the other hand, when the vibration from the outside is large, the second member 43 moves so as to continue to rotate in the first rotation direction 40 or the second rotation direction 41.

In addition, since the first member 42 and the third member 44 are fixed, unlike the second member 43, the rotational motion corresponding to the external vibration does not occur.

Next, a mechanism of power generation when external vibration is applied to the power generation apparatus according to the second embodiment will be described.

First, when external vibration is applied to the power generation device, the second electrode 33 also rotates in the first rotation direction 40 or the second rotation direction 41 around the shaft 38 in response to the vibration of the second member 43. To do. Then, the first electrode 32 disposed on the fixed first member 42 and the fourth electrode 37 disposed on the third member 44 and the first rotation direction 40 or the second rotation. Since the overlapping area of the first electret material 34 and the second electret material 36 that vibrates in the direction 41 is increased or decreased, the charge induced in the first electrode 32 and the fourth electrode 37 is changed. Become. Electricity is generated by taking out the current resulting from the change in the amount of electric charge as electric energy to the outside.

According to the power generation device according to the second embodiment, it is possible to take out the change in the amount of charge generated in the first electrode 32 and the fourth electrode 37 corresponding to the rotation of the second member 43 as electric energy. . Therefore, compared with the prior art, there is an effect that vibrations in all directions in the plane can be efficiently used for power generation.

In addition, according to the power generation device according to the second embodiment, since the electrode and the electret material are arranged not only on one side of the second member 43 but also on both sides, the electrode or electret material is provided only on one side of the second member 43. There is an effect that the amount of power generation can be increased compared to when the is formed.

Moreover, according to the electric power generating apparatus which concerns on 2nd Embodiment, with the

members

24 and 31 formed in the 1st spacer 23 and the 2nd spacer 30, the 1st electrode 32 and the 1st electret material which opposes it It is possible to control the variation of the gap (space) with respect to 34. Similarly, the fluctuation of the gap between the fourth electrode 37 and the second electret material 36 facing the fourth electrode 37 can be controlled. In order to reduce the size and increase the amount of power generation, it is necessary to reduce the distance between the first electrode 32 and the first electret material 34 or the distance between the fourth electrode 37 and the second electret material 36. Become. However, on the other hand, if the distance is too short, there is a risk that the electrode and the electret material will pull each other and become difficult to move or stick due to the influence of the Coulomb force generated between the electrode and the electret material. . Here, the

members

24 and 31 formed on the first spacer 23 and the second spacer 30 suppress the fluctuation of the gap between the electrode and the electret material, and prevent the electrode and the electret material from sticking to each other. It becomes possible.

Moreover, according to the electric power generating apparatus which concerns on 2nd Embodiment, between the 4th electrode 37 and the 2nd electret material 36, the Coulomb force which arises between the 1st electrode 32 and the 1st electret material 34 The Coulomb force generated in Therefore, the first electrode 32 and the first electret material 34 can be prevented from sticking, and the fourth electrode 37 and the second electret material 36 can be prevented from sticking.

Further, according to the power generation apparatus according to the second embodiment, the second member 43 can be smoothly rotated by the

members

24 and 31 formed on the first spacer 23 and the second spacer 30. . Therefore, there is an effect that a larger amount of power generation can be obtained. In the present embodiment, a bearing structure in which a substantially spherical member is arranged in a groove formed in the spacer portion, or between the second member 43 and the first member 42 or the second member 43 and the third member. It is possible to reduce the rotational friction generated between the motor 44 and the power generation efficiency. In addition, in order to prevent a contact with an electrode and an electret material, you may form the projection part which consists of an abrasion-resistant material or a super hard material as a spacer. In addition, this protrusion may be formed on the second member 43.

Here, the first electret material 34 and the second electret material 36 are made of an insulating film such as a silicon oxide film, for example, and are covered with an insulating film having a larger tensile stress than the electret material such as a silicon nitride film. Is preferred. By covering the silicon oxide film with the silicon nitride film, it is possible to make it difficult for the charge injected into the silicon oxide film portion to escape and to improve the power generation efficiency. In order to make it difficult for the charge to escape, it is preferable that the side surface, the lower surface and the upper surface of the electret material are completely covered with the silicon nitride film.

Further, the first electret material 34 and the second electret material 36 may be formed of, for example, a lead zirconate titanate (PZT) film instead of a silicon oxide film. Since PZT has ferroelectric characteristics, it becomes an electret material when polarized. Since charges exist on the outermost surface of the PZT film, the center of charge is closest to the opposing electrode. As a result, the amount of charge obtained by electrostatic induction increases, and the power generation efficiency can be improved.

Here, in the present embodiment, the first electret material 34 and the second electret material 36 are arranged on the second member 43, but the first electret material 34 and the third member 44 are arranged on the first electret material 34 and the third member 44. The second electret material 36 may be disposed.

In addition, although the electret material is a material that retains electric charge in an insulator, it cannot retain electric charge exceeding the dielectric strength voltage of the material. Therefore, it is necessary to control the thickness in accordance with the necessary charge amount. In a material with a low withstand voltage, the thickness is relatively increased, and the distance between the center of the charge and the counter electrode is relatively long, so the power generation efficiency tends to decrease. Therefore, a silicon oxide film having a high withstand voltage is effective and power generation efficiency is increased.

Further, in order to increase the amount of power generation, the distance between the first electrode 32 and the fourth electrode 37 and the first electret material 34 and the second electret material 36 should be short, and should be about 50 μm or less. Is preferred. For this purpose, the thickness is about 0.5 μm, the distance between the first electrode 32 and the second electrode 33 made of gold, polysilicon, etc., and the thickness is 0.5 μm, respectively. It is preferable that the distance between the third electrode 35 and the fourth electrode 37, each of which is made of gold, polysilicon, or the like, is about 50 μm or less. Here, in the present embodiment, for example, the second substrate 22 on which the first electrode 32 is formed has a thickness of about 500 μm, and the seventh substrate 29 on which the fourth electrode 37 is formed has a thickness of about 500 μm. The diameter of the substantially

spherical members

24 and 31 is about 200 μm to 300 μm, the distance between the first electrode 32 and the first electret material 34 having a thickness of about 2 μm to 3 μm is about 50 μm, The distance between the electrode 37 and the second electret material 36 having a thickness of about 2 μm to 3 μm is preferably about 50 μm. In particular, according to the structure of the present invention, the distance between the electrode and the electret material can be accurately controlled. Therefore, even when the distance between the electrode and the electret material is as small as about 50 μm or less, sticking of both can be prevented. However, these numerical values only exemplify preferable values, and are not limited to these numerical values.

Next, a method for manufacturing the power generation apparatus according to the second embodiment of the present invention will be described with reference to FIGS.

First, as shown in FIGS. 11A and 11B, a first member 42 is formed. The first electrode 32 is formed on the second substrate 22 and is held on the first substrate 21. Here, it is preferable that a groove is formed in a part of the first substrate 21 and the second substrate 22 is fitted. In addition, a substantially spherical member 24 made of, for example, an abrasion-resistant material or a super hard material is incorporated in the groove portion of the first spacer 23, and is held on the outer edge portion of the first substrate 21.

Similarly, as shown in FIGS. 12A and 12B, a third member 44 is formed. A fourth electrode 37 is formed on the seventh substrate 29 and held on the sixth substrate 28. Here, it is preferable that a groove is formed in a part of the sixth substrate 28 and the seventh substrate 29 is fitted. In addition, the substantially spherical member 31 made of, for example, an abrasion-resistant material or a super hard material is incorporated in the groove portion of the second spacer 30 and is held on the outer edge portion of the sixth substrate 28.

Further, as shown in FIGS. 13A and 13B, the second member 43 is formed. The second member 43 has a structure for holding the fourth substrate 26 on a part of the third substrate 25. A fifth substrate 27 is held on the surface of the third substrate 25 opposite to the surface holding the fourth substrate 26.

Here, the fourth substrate 26 has the same shape as the portion represented as the region B in FIG. A second electrode 33 is formed on the fourth substrate 26 as shown in FIG. 9A, and a first electret material 34 is formed on the second electrode 33. Similarly, a third electrode 35 and a second electret material 36 are sequentially formed on the fifth substrate 27. The shape of the electrode formed on the fourth substrate 26 and the shape of the electrode formed on the fifth substrate 27 are substantially equal.

Next, as shown in FIGS. 14A and 14B, the first member 42, the second member 43, and the third member 44 are connected using the shaft 38 and the bearing 39. . The surface of the first member 42 on which the electrode is formed and the surface of the third member 44 on which the electrode is formed are opposed to the second member 43, respectively. Further, the second member 43 is sandwiched by the first member 42 and the third member 44, and the first member 42, the second member 43, and the third member 44 are coupled by the shaft 38 and the bearing 39. Connect. At this time, the second member 43 is connected so that it can rotate relatively in parallel to the first member 42 and the third member 44.

(First Modification of Second Embodiment)
A power generator according to a first modification of the second embodiment of the present invention will be described with reference to FIG.

The power generation device according to the first modification of the second embodiment is different from the power generation device according to the second embodiment in the arrangement of electrodes and the arrangement of electret materials, and the other configurations are the same.

On the surface of the first member 42, substantially fan-shaped first electrodes 32 as shown in FIG. 9A are formed in stripes at intervals of a certain rotation angle. Further, on the surface of the third member 44 facing the second member 43, similar to the first electrode 32, substantially fan-shaped fourth electrodes 37 are striped at intervals of a fixed rotation angle. It is formed in a shape. The first member 42 and the third member 44 are respectively fixed, and the second member 43 is rotatable relative to the first member 42 and the third member 44 in the planar direction.

Here, as shown in FIG. 15, the first member 42 and the third member 44 are fixed by being shifted by a certain rotation angle so that the first electrode 32 and the fourth electrode 37 do not just overlap. To do. More specifically, the first electrode 32, the second electrode 33, the third electrode 35, the first electret material 34, and the second electret material 36 are arranged to overlap, but only the fourth electrode 37 is provided. These are arranged so as to deviate from these.

When the electrode and the electret material are arranged as described above, as shown in FIG. 15, when the first electrode 32 and the second electrode 33 are just overlapping each other and facing each other, the third electrode 35. And the fourth electrode 37 are shifted by a certain rotation angle. Conversely, when the third electrode 35 and the fourth electrode 37 are just overlapped and opposed to each other, the first electrode 32 and the second electrode 33 are in a state of being shifted by a certain rotation angle.

According to the first modification of the second embodiment, when the first electrode 32 and the second electrode 33 are just overlapped, the force acting between the first electrode 32 and the second electrode 33. Becomes vertical and stable. On the other hand, since the third electrode 35 and the fourth electrode 37 are shifted by a certain rotation angle, the second electrode is disposed on the left and right sides of the surface facing the one of the fourth electrodes 37, respectively. The electret material 36 exists. For this reason, the force acting between one of the fourth electrodes 37 and the second electret material 36 is not in the vertical direction, but is in an unstable state. Therefore, since it is pulled to the left or right only by giving a weak vibration, the rotational movement is aided, and the power generation efficiency can be improved.

FIG. 15 shows a state in which the position of the fourth electrode 37 is completely deviated from the positions of the third electrode 35 and the second electret material 36. I do not care.

In this modification, the position of the fourth electrode 37 and the positions of the third electrode 35 and the second electret material 36 are shifted from each other. However, the position of the first electrode 32 and the second electrode The positions of 33 and the first electret material 34 may be shifted.

(Second modification of the second embodiment)
A power generation device according to a second modification of the second embodiment of the present invention will be described with reference to FIG.

Compared with the power generation device according to the second embodiment, the power generation device according to the second modification of the second embodiment has different shapes when the electrode and the electret material are viewed from above, and other structures are as follows. It is the same.

Specifically, as shown in FIG. 16, the electrodes and electret materials may be arranged in a zigzag shape as block shapes.

In other words, in the relationship between the first member 42 and the second member 43, the block-shaped first electrode 32, the block-shaped second electrode 33, and the block-shaped first electret material 34 are respectively A plurality of members 42 are arranged so as to extend from the vicinity of the center (rotating shaft) of one member 42 toward the outer peripheral direction. Moreover, the 2nd electrode 33 and the 1st electret material 34 are arrange | positioned so that it may overlap, and the 1st electrode 32 is arrange | positioned facing so that they may overlap.

Further, in the relationship between the second member 43 and the third member 44, the block-shaped third electrode 35, the block-shaped fourth electrode 37, and the block-shaped second electret material 36 are respectively third. A plurality of members 44 are arranged so as to extend from the vicinity of the center (rotation axis) of the member 44 toward the outer periphery. Moreover, the 3rd electrode 35 and the 2nd electret material 36 are arrange | positioned so that it may overlap, and the 4th electrode 37 is arrange | positioned facing so that they may overlap. FIG. 16 is a schematic plan view in which the third member 44 is omitted.

(Third Modification of Second Embodiment)
A power generation device according to a third modification of the second embodiment of the present invention will be described with reference to FIG.

Compared with the power generation device according to the second embodiment, the power generation device according to the third modification example of the second embodiment has different shapes when the electrode and the electret material are viewed from above, and other configurations are as follows. The same.

Specifically, as shown in FIG. 17, the electrode and electret material are each formed in a spiral shape. In FIG. 17, for the sake of simplicity, the spiral shape is illustrated as a line, but from the viewpoint of power generation efficiency, the electrode and the electret material each have a certain width.

By arranging the electrodes and electret material as described above, the electrodes are continuous in a spiral shape, so there is no need to connect each electrode block, and it is easy to connect to external wiring at the outermost periphery. There is an effect that can.

In addition, this invention is not limited to 2nd Embodiment and its modification. Furthermore, it is also possible to combine each embodiment and modification suitably.

Moreover, in 2nd Embodiment and its modification, the 1st electret material 34 is arrange | positioned between the 1st electrode 32 and the 2nd electrode 33, and the 2nd electret material 36 is the 3rd electrode. The configuration disposed between the first electrode 32 and the fourth electrode 37 has been described. However, between the first electrode 32 and the second electrode 33 or between the third electrode 35 and the fourth electrode 37. If there is a charge supply mechanism that can supply charges from the outside, it is not always necessary. However, a large amount of charge needs to be supplied between the electrodes. Therefore, from the viewpoint, it is preferable that the electret material is disposed between the respective electrodes.

(Third embodiment)
A power generation device according to a third embodiment of the present invention will be described with reference to FIGS. 18 and 19. Moreover, in the following embodiment of this invention, the material and numerical value which are used only have illustrated the preferable example, and are not limited to this form. In addition, changes can be made as appropriate without departing from the scope of the idea of the present invention.

18A, 18B, and 19A, the first member 65 includes a first substrate 51 and a second substrate 52. In addition, the second member 64 includes a third substrate 53 and a fourth substrate 54. Details of the first member 65 and the second member 64 will be described later.

As shown in FIGS. 18A and 18B, the shape of the first member 65 viewed from above is substantially circular, and the shape of the second member 64 viewed from above is substantially circular. It is a substantially sector shape formed of a part of a substantially circular shape having a radius larger than the radius of a certain first member 65.

Further, as shown in FIG. 18A, the first member 65 and the second member 64 are connected by a shaft 60 and a bearing 61 in the vicinity of the center of the first member 65. Here, the second member 64 has a structure rotatable about the shaft 60 in the plane direction relative to the first member 65 in the surface direction of the second member 64.

When the first member 65 and the second member 64 are connected by the shaft 60, the first member 65 is disposed in a groove part that is partially hollowed out from the second member 64. That is, when the first member 65 and the second member 64 are combined, the first member 65 is located on the inner side of the second member 64 as shown in FIG. Placed in.

Here, the second member 64 is not limited to a fan shape. For example, a semicircle may be sufficient. From the viewpoint of power generation efficiency, the second member 64 is preferably a rotary weight. The rotary weight refers to the one whose center of gravity is displaced from the rotation axis. The longer the distance from the rotation axis is, the more easily affected by the centrifugal force and the easier it is to absorb vibration energy. Since the second member 64 is a rotating weight, it is easy to shake even with minute vibrations, and power generation efficiency is improved. That is, the power generation efficiency increases as the distance that the position of the center of gravity of the second member 64 deviates from the rotation axis increases. The second member 64 may be a weight that is circular or fan-shaped when viewed from above, and whose center of gravity is offset from the rotation axis. For example, the structure which added the weight to the outer edge part of the 2nd member 64 may be sufficient.

Next, details of the first member 65 and the second member 64 will be described.

As shown in FIG. 19A, the first member 65 is a combination of a first substrate 51 made of, for example, a stainless alloy containing chromium and nickel, and a second substrate 52 that is, for example, a printed circuit board. It is configured.

Further, the second member 64 is configured by combining a third substrate 53 made of, for example, a stainless alloy containing chromium and nickel and a fourth substrate 54 that is, for example, a printed board. Here, the fourth substrate 54 is held on the surface of the third substrate 53 and on the side facing the first member 65. Further, the fourth substrate 54 is held in a portion of the third substrate 53 shown as a region B in FIGS. 18A and 18B.

As shown in FIGS. 18A and 18B, the surface of the second substrate 52, which is a part of the first member 65, faces the second member 64, as shown in FIGS. 18A and 18B. A plurality of substantially fan-shaped first electrodes 55 extending toward the surface are formed at intervals of a certain rotation angle. Note that a plurality of substantially fan-shaped first electrodes 55 are preferably formed from the viewpoint of power generation efficiency, but may be one.

On the surface of the fourth substrate 54, which is a part of the second member 64, facing the first member 65, the second electrode 56 is spaced at the same rotational angle as the first electrode 55. Is formed. An electret material 57 is formed on the second electrode 56 side between the first electrode 55 and the second electrode 56. The second electrode 56 and the electret material 57 formed on the second electrode 56 have a shape in which a part of a substantially fan-shaped stripe structure such as the first electrode 55 is cut out, and the first member. A second electrode 56 and an electret material 57 are formed so as to overlap the first electrode 55 formed on 65.

Reference numerals

6 and 7 in FIG. 18B are portions where the second electrode 56 and the electret material 57 are formed, and are actually formed on the surface facing the first member 65.

When the second member 64 rotates about the shaft 60, the overlapping portion of the formation portion of the first electrode 55 and the formation portion of the electret material 57 moves away, and overlaps again when shifted by a certain rotation angle. It has become.

In the present embodiment, the example in which the first member 65 includes the first substrate 51 and the second substrate 52 has been described. However, the configuration of the first member 65 is not limited thereto. That is, it may be composed of a single substrate, or may be composed of two or more substrates or spacers. Similarly, the second member 64 may be constituted by one substrate, or may be constituted by two or more substrates or spacers.

Further, a third member that contacts the first member 65 or the second member 64 may be disposed between the first member 65 and the second member 64. For example, the protrusion is formed as the third member on the outer edge of the first member 65 and on the surface facing the second member 64. At this time, the thickness of the protrusion is preferably larger than the thickness obtained by adding the thicknesses of the first electrode 55, the fourth substrate 54, the second electrode 56, and the electret material 57. When the third member is disposed, it is possible to prevent the first electrode 55 and the electret material 57 from sticking to each other due to the Coulomb force acting between the electrode and the electret material. This configuration is more effective particularly when the distance between the electrode and the electret material is as small as about 50 μm or less.

Furthermore, it is desirable that the third member is formed of a substantially spherical shape that can rotate. When the substantially spherical member is disposed between the first member 65 and the second member 64, the second member 64 is composed of the third substrate 53 and the fourth substrate, as shown in FIG. 54 and a spacer 58, and a groove is formed in the spacer 58. In addition, a substantially spherical member 59 is in contact with the groove.

The member 59 is preferably made of a wear-resistant material or a cemented carbide material, and is usually made of a material such as Al ₂ O ₃ , Si ₃ N ₄ , ZrO ₂ or tungsten carbide. Since the member 59 has a substantially spherical shape, the second member 64 can reduce friction due to rotation and improve power generation efficiency. Further, since the member 59 is made of a wear-resistant material or a super hard material, a structure that is more resistant to friction and has higher durability can be obtained.

Further, the groove formed in the spacer 58 has a length corresponding to a certain range along the outer edge of the first member 65 when viewed from the lower side, and the member 59 is a substantially spherical member. Is preferably movable while rotating between the ranges. Further, it is preferable that there are a plurality of such groove portions according to the number of members 59. Here, if the shape of the first member 65 viewed from above is circular, the groove formed in the spacer 58 has an arc shape. Further, the structure in which the substantially spherical member 59 is combined with the groove portion of the spacer 58 in this way can also be called a bearing structure. The bearing structure only needs to be able to rotate the substantially spherical member 59, and may be a cylinder, for example, and is not limited to the configuration of the present embodiment. Further, the spacer 58 in which the member 59 is disposed in the groove portion may be formed in the first member 65.

In addition, the groove part does not necessarily need to be formed in the spacer 58, and may be formed on the surface of the first member 65 that faces the second member 64.

Further, the spacer 58 may be provided between the first member 65 and the second member 64 and may not necessarily be the outer edge portion.

Here, the electret material 57 is preferably made of an insulating film such as a silicon oxide film, and is preferably covered with an insulating film having a larger tensile stress than the electret material 57 such as a silicon nitride film. By covering the silicon oxide film with the silicon nitride film, it is possible to make it difficult for the charge injected into the silicon oxide film portion to escape and to improve the power generation efficiency. In order to make it difficult for the charge to escape, it is preferable that the side surface, the lower surface and the upper surface of the electret material 57 are completely covered with the silicon nitride film.

Further, the electret material 57 may be formed of, for example, a lead zirconate titanate (PZT) film instead of a silicon oxide film. Since PZT has ferroelectric characteristics, it becomes an electret material when polarized. Since charges exist on the outermost surface of the PZT film, the center of charge is closest to the opposing electrode. As a result, the amount of charge obtained by electrostatic induction increases, and the power generation efficiency can be improved.

Here, in this embodiment, the electret material 57 is disposed on the second member 64, but the electret material 57 may be disposed on the first member 65.

In order to increase the power generation amount, the distance between the first electrode 55 and the electret material 57 having a thickness of about 2 μm to 3 μm is preferably short, and is preferably about 50 μm or less. For this purpose, the thickness is preferably about 0.5 μm, and the distance between the first electrode 55 and the second electrode 56 each made of gold, polysilicon, or the like is preferably about 50 μm or less. . However, these numerical values only exemplify preferable values, and are not limited to these numerical values.

Next, the movement of the second member 64 when external vibration is applied to the power generation apparatus according to the third embodiment will be described with reference to FIG.

As shown in FIG. 20, the shape of the first member 65 viewed from the upper side is substantially circular, and the shape of the second member 64 viewed from the upper side is larger than the radius of the first member 65 that is substantially circular. It is a substantially sector shape consisting of a part of a substantially circular shape with a large radius. The second member 64 is rotatable in the first rotation direction 62 and the second rotation direction 63 with the shaft 60 as a central axis. The second member 64 is preferably a rotary weight. Since the second member 64 is a weight, it can vibrate efficiently even with a small force.

Here, when the vibration from the outside is small, the second member 64 is directed to the first rotation direction 62 around the gravity direction (Y-axis direction), and from a certain point to the second rotation direction 63. A pendulum movement like heading. On the other hand, when the vibration from the outside is large, the second member 64 moves so as to continue to rotate in the first rotation direction 62 or the second rotation direction 63.

Further, since the first member 65 is fixed, the rotational motion corresponding to the external vibration does not occur unlike the second member 64.

Next, a power generation mechanism when external vibration is applied to the power generation apparatus according to the third embodiment will be described.

First, when external vibration is applied to the power generation device, the second electrode 56 also rotates in the first rotation direction 62 or the second rotation direction 63 around the shaft 60 in response to the vibration of the second member 64. To do. Then, an increase or decrease occurs in the overlapping area between the first electrode 55 disposed on the fixed first member 65 and the electret material 57 that vibrates in the first rotation direction 62 or the second rotation direction 63. Therefore, the charge induced in the first electrode 55 changes. Electricity is generated by taking out the current resulting from the change in the amount of electric charge as electric energy to the outside.

According to the power generation device according to the third embodiment, it is possible to take out the change in the amount of charge generated in the first electrode 55 corresponding to the rotation of the second member 64 as electric energy. Therefore, compared with the prior art, there is an effect that vibrations in all directions within the plane can be used for power generation.

Moreover, according to the electric power generating apparatus which concerns on 3rd Embodiment, the 2nd member 64 is substantially fan shape, and since the 2nd member 64 exists to the outer side rather than the 1st member 65, The center of gravity of the second member 64 is closer to the outer edge than the shaft 60, and there is an effect that power can be generated efficiently.

Here, the center of gravity of the second member 64 will be described in detail with reference to FIG.

FIG. 21A shows a second example in which the apex of the substantially fan-shaped second member 64 (the portion facing the vicinity of the center of the first member 65) and the center of the substantially circular first member 65 are overlapped. The member 64 is projected on the first member 65. Further, FIG. 21B shows an overlapping portion 70 between the first member 65 and the portion where the second member 64 is projected from the top toward the first member 65 as shown in FIG. ing. The center of gravity of the overlapping portion 70 is located at reference numeral 71. On the other hand, the center of gravity of the second member 64 is located at 72. Here, the distance from the top of the substantially fan-shaped second member 64 to the center of gravity 72 is longer than the distance from the top of the substantially sector-shaped overlapping portion 70 (near the center of the first member 65) to the center of gravity 71. Therefore, the center of gravity 72 of the second member 64 is closer to the outer edge than the shaft 60. Thus, the closer the center of gravity 72 of the second member 64 is to the outer edge of the second member 64, the more easily affected by the centrifugal force when the second member 64 rotates and absorbs vibration energy. It becomes easy to do. Therefore, power generation efficiency can be improved.

Next, a method for manufacturing the power generation apparatus according to the third embodiment will be described with reference to FIGS.

First, as shown in FIGS. 22A and 22B, a first member 65 is formed. A first electrode 55 is formed on the second substrate 52 and is held on the first substrate 51.

Similarly, as shown in FIGS. 23A and 23B, the second member 64 is formed. A second electrode 56 is formed on the fourth substrate 54, and an electret material 57 is formed on the second electrode 56, and is held on the third substrate 53. Here, the third substrate 53 has a structure in which a groove portion is formed by hollowing out an area equal to or larger than the area of the first member 65 from a substantially circular shape having a radius larger than that of the substantially circular first member 65. , A substantially circular shape obtained by cutting out a certain angle of the substantially circular shape. The fourth substrate 54 has a shape of a portion represented as a region B in FIG.

Next, as shown in FIGS. 24A and 24B, the first member 65 and the second member 64 are connected using the shaft 60 and the bearing 61. At this time, the surface of the first member 65 described above where the first electrode 55 is formed is opposed to the surface of the second member 64 where the second electrode 56 and the electret material 57 are formed. The second member 64 is connected so as to be rotatable in the plane direction relative to the first member 65.

(First Modification of Third Embodiment)
A power generation device according to a first modification of the third embodiment of the present invention will be described with reference to FIG.

The power generation device according to the first modification of the third embodiment is different from the power generation device according to the third embodiment in the configuration of the second member 64, and the other configurations are the same.

Specifically, as shown in FIG. 25, the configuration of the second member 64 includes a third substrate 53, a fourth substrate 54, and a weight 66. The shape of the second member 64 is the same as that of the power generation device according to the third embodiment, but is made of a material having a mass larger than that of the portion corresponding to the outer edge portion of the third substrate 53 in the third embodiment. A weight 56 is added to the outer edge of the third substrate 53. In other words, compared with the mass per unit volume in the vicinity of the rotation axis of the third substrate 53 (second member 64), the vicinity of the outer edge portion of the third substrate 53 (second member 64). It has a structure with a large mass per unit volume.

According to the first modification of the third embodiment, the center of gravity of the second member 64 is inclined in the direction of the outer edge portion, and it is easy to shake even with minute vibrations, which has the effect of improving power generation efficiency.

(Second modification of the third embodiment)
A power generation device according to a second modification of the third embodiment of the present invention will be described with reference to FIGS. 26 and 27.

The power generation device according to the second modification example of the third embodiment is different from the power generation device according to the first modification example of the third embodiment in the position of the weight 56, and the other configurations are the same. is there.

Specifically, as shown in FIG. 26A, FIG. 26B, and FIG. 27, the weight 56 is provided at a position that extends in the plane direction of the third substrate 53. Even if it is such a form, it is possible to acquire the effect similar to the electric power generating apparatus which concerns on the 1st modification of 3rd Embodiment.

(Third Modification of Third Embodiment)
A power generation device according to a third modification of the third embodiment of the present invention will be described with reference to FIG.

The power generator according to the third modification of the third embodiment is different from the power generator according to the third embodiment in the arrangement of the first electrode 55, the second electrode 56, and the electret material 57, Other configurations are the same.

Specifically, as shown in FIG. 28, the shapes of the first electrode 55, the second electrode 56, and the electret material 57 may be arranged in a zigzag shape as a block shape.

In other words, in the relationship between the first member 65 and the second member 64, each of the block-shaped first electrode 55, the block-shaped second electrode 56, and the block-shaped electret material 57 is the first member. A plurality are arranged so as to extend from the vicinity of the center (rotation axis) of 65 toward the outer peripheral direction. Further, the second electrode 56 and the electret material 57 formed thereon are arranged to face each other so as to overlap the first electrode 55.

28, the fourth substrate 54, the second electrode 56 and the electret material 57 formed thereon are arranged in the range of the region B shown in FIG. Actually, the fourth substrate 54 is disposed on the surface of the second member 64 that faces the first member 65.

(Fourth modification of the third embodiment)
A power generation device according to a fourth modification of the third embodiment of the present invention will be described with reference to FIG.

Compared with the power generation device according to the third embodiment, the power generation device according to the fourth modification of the third embodiment viewed the first electrode 55, the second electrode 56, and the electret material 57 from above. The shape is different, and the other configurations are the same.

Specifically, as shown in FIG. 29, the first electrode 55, the second electrode 56, and the electret material 57 are each formed in a spiral shape. In FIG. 29, for the sake of simplification, the spiral shape is shown in a linear shape. However, from the viewpoint of power generation efficiency, the first electrode 55, the second electrode 56, and the electret material 57 each have a certain amount. Have a width.

(Fourth embodiment)
Hereinafter, a power generator according to a fourth embodiment of the present invention will be described with reference to FIGS. 30 and 31. Moreover, in the following embodiment of this invention, the material and numerical value which are used only have illustrated the preferable example, and are not limited to this form. In addition, changes can be made as appropriate without departing from the scope of the idea of the present invention.

30A, 30B, and 31A, the first member 65 includes a first substrate 51 and a second substrate 52. The second member 64 includes a third substrate 53, a fourth substrate 54, and a weight 66. Details of the first member 65 and the second member 64 will be described later.

As shown in FIGS. 30A and 30B, the shape of the first member 65 viewed from above is substantially circular, and the shape of the second member 64 viewed from above is substantially circular. It is a substantially sector shape obtained by cutting a certain angle from one member 65.

Further, as shown in FIG. 30A, the first member 65 and the second member 64 are connected by a shaft 60 and a bearing 61 in the vicinity of the center of the first member 65. Here, the second member 64 has a structure rotatable about the shaft 60 in the plane direction relative to the first member 65 in the surface direction of the second member 64.

Here, the second member 64 is not limited to a fan shape. For example, a semicircle may be sufficient.

As shown in FIG. 31A, the first member 65 is a combination of a first substrate 51 made of, for example, a stainless alloy containing chromium and nickel, and a second substrate 52, for example, a printed circuit board. It is configured.

The second member 64 is configured by combining a third substrate 53 made of, for example, a stainless alloy containing chromium and nickel, a fourth substrate 54 that is, for example, a printed circuit board, and a weight 66. . The weight 56 is made of a material having a mass larger than that of the third substrate 53, and is added to the outer edge portion of the third substrate 53. Here, the fourth substrate 54 is held on the surface of the third substrate 53 and on the side facing the first member 65. Furthermore, the fourth substrate 54 is held in a portion shown as a region B in FIGS. 30A and 30B in the substantially fan-shaped third substrate 53.

As shown in FIGS. 30A and 30B, the surface of the second substrate 52, which is a part of the first member 65, faces the second member 64. A plurality of substantially fan-shaped first electrodes 55 extending toward the surface are formed at intervals of a certain rotation angle. Note that a plurality of substantially fan-shaped first electrodes 55 are preferably formed from the viewpoint of power generation efficiency, but may be one.

On the surface of the fourth substrate 54, which is a part of the second member 64, facing the first member 65, the second electrode 56 is spaced at the same rotational angle as the first electrode 55. Is formed. An electret material 57 is formed on the second electrode 56 side between the first electrode 55 and the second electrode 56. The second electrode 56 and the electret material 57 formed on the second electrode 56 have a shape in which a part of a substantially fan-shaped stripe structure such as the first electrode 55 is cut out, and the first member. A second electrode 56 and an electret material 57 are formed so as to overlap the first electrode 55 formed on 65. Reference numeral 6 in FIG. 30B is a portion where the second electrode 56 and the electret material 57 are formed, and is actually formed on the surface facing the first member 65.

When the second member 64 rotates about the shaft 60, the overlapping portion between the formation portion of the first electrode 55 and the formation portion of the electret material 57 deviates, and overlaps again when shifted by a certain rotation angle. It is like that.

In the present embodiment, the example in which the first member 65 includes the first substrate 51 and the second substrate 52 has been described. However, the configuration of the first member 65 is not limited to this. That is, it may be composed of a single substrate, or may be composed of two or more substrates or spacers. Similarly, the second member 64 may be constituted by one substrate, or may be constituted by two or more substrates or spacers.

Further, a third member that contacts the first member 65 or the second member 64 may be disposed between the first member 65 and the second member 64. For example, the protrusion is formed as the third member on the outer edge of the first member 65 and on the surface facing the second member 64. At this time, the thickness of the protrusion is preferably larger than the thickness obtained by adding the thicknesses of the first electrode 55, the fourth substrate 54, the second electrode 56, and the electret material 57. When the third member is disposed, it is possible to prevent the first electrode 55 and the electret material 57 from sticking to each other due to the Coulomb force acting between the electrode and the electret material. This configuration is particularly effective when the distance between the electrode and the electret material is as small as about 50 μm or less.

Furthermore, it is desirable that the third member is formed of a substantially spherical shape that can rotate. When the substantially spherical member is disposed between the first member 65 and the second member 64, the second member 64 includes the third substrate 53 and the fourth substrate, as shown in FIG. 54 and a spacer 58, and a groove is formed in the spacer 58. In addition, a substantially spherical member 59 is in contact with the groove.

Further, the groove formed in the spacer 58 has a length corresponding to a certain range along the outer edge of the first member 65 when viewed from the lower side, and the member 59 is a substantially spherical member. Is preferably movable between the ranges while rotating. Further, it is preferable that there are a plurality of such groove portions according to the number of members 59. Here, if the shape of the first member 65 viewed from above is circular, the groove formed in the spacer 58 has an arc shape. Further, the structure in which the substantially spherical member 59 is combined with the groove portion of the spacer 58 in this way can also be called a bearing structure. The bearing structure only needs to be able to rotate the substantially spherical member 59, and may be a cylinder, for example, and is not limited to the configuration of the present embodiment. Further, the spacer 58 in which the member 59 is disposed in the groove portion may be formed in the first member 65.

In addition, although the electret material is a material that retains electric charge in an insulator, it cannot retain electric charge exceeding the dielectric strength voltage of the material. Therefore, it is necessary to control the thickness in accordance with the required charge amount. In a material with a low withstand voltage, the thickness is relatively increased, and the distance between the center of the charge and the counter electrode is relatively long, so the power generation efficiency tends to decrease. Therefore, a silicon oxide film having a high withstand voltage is effective and power generation efficiency is increased.

The movement of the second member 64 when an external vibration is applied to the power generation apparatus according to the fourth embodiment and the mechanism of power generation are the same as those of the power generation apparatus according to the third embodiment, and thus description thereof is omitted. To do.

According to the power generation device according to the fourth embodiment, it is possible to take out the change in the amount of charge generated in the first electrode 55 corresponding to the rotation of the second member 64 as electric energy. Therefore, compared with the prior art, there is an effect that vibrations in all directions within the plane can be used for power generation.

Moreover, according to the electric power generating apparatus which concerns on 4th Embodiment, the 2nd member 64 is substantially fan shape, and since the outer edge part has a weight, the gravity center of the 2nd member 64 is an outer edge part rather than the axis | shaft 60. There is an effect that power can be generated efficiently.

Next, the center of gravity of the second member 64 will be described in detail with reference to FIG.

FIG. 32A shows a state in which the apex of the substantially fan-shaped second member 64 and the center of the approximately circular first member 65 are overlapped, and the second member 64 is projected onto the first member 65. Is shown. Further, FIG. 32B shows an overlapping portion 70 of the first member 65 and the portion where the second member 64 is projected from the top toward the first member 65 as shown in FIG. ing. Here, the center of gravity of the overlapping portion 70 is located at reference numeral 71. On the other hand, the center of gravity of the second member 64 is located at reference numeral 73.

Here, the distance from the top of the substantially fan-shaped second member 64 to the center of gravity 73 is longer than the distance from the top of the substantially sector-shaped overlapping portion 70 to the center of gravity 71. Therefore, the center of gravity 73 of the second member 64 is closer to the outer edge than the shaft 60. Thus, the closer the center of gravity 73 of the second member 64 is to the outer edge of the second member 64, the more easily affected by the centrifugal force when the second member 64 rotates and absorbs vibration energy. It becomes easy to do. Therefore, power generation efficiency can be improved.

(First Modification of Fourth Embodiment)
A power generation device according to a first modification of the fourth embodiment of the present invention will be described with reference to FIGS. 33 and 34.

The power generator according to the first modification of the fourth embodiment is different from the power generator according to the fourth embodiment in the configuration of the second member 64, and the other configurations are the same.

Specifically, as shown in FIGS. 33 (a), 33 (b), and 34, the weight 66 is on the surface of the third substrate 53 and opposite to the surface facing the first member 65. Arranged on the side.

According to the first modification of the fourth embodiment, the center of gravity of the second member 64 is inclined in the direction of the outer edge portion, and it is easy to shake even with minute vibrations, which has the effect of improving power generation efficiency.

(Second modification of the fourth embodiment)
A power generation device according to a second modification of the fourth embodiment of the present invention will be described with reference to FIG.

The power generation device according to the second modification example of the fourth embodiment is different from the power generation device according to the third modification example of the third embodiment in the position of the outer edge portion of the second member 64, and otherwise. The configuration of is the same.

Specifically, the outer edge portion of the second member 64 in the power generation device according to the third modification of the third embodiment is positioned outside the outer edge portion of the first member 65 when viewed from above. is doing. On the other hand, in the second modified example of the fourth embodiment, as shown in FIG. 35, the outer edge portion of the second member 64 is located at the same position or inside the outer edge portion of the first member 65. .

Also in the second modification of the fourth embodiment, it is possible to obtain the same effect as that of the power generation device according to the third modification of the first embodiment.

(Third Modification of Third Embodiment)
The power generation device according to the third modification example of the fourth embodiment is similar to the power generation device according to the fourth modification example of the third embodiment. Also in the third modification of the fourth embodiment, it is possible to obtain the same effect as that of the power generation device according to the fourth modification of the third embodiment.

Specifically, as shown in FIG. 36, the electrode and the electret material are each formed in a spiral shape. In FIG. 36, for the sake of simplification, the spiral shape is shown as a line, but from the viewpoint of power generation efficiency, the electrode and the electret material each have a certain width.

In addition, this invention is not limited to said embodiment and modification. Furthermore, it is also possible to combine each embodiment and modification suitably.

In the third embodiment, the fourth embodiment, and the modifications thereof, the configuration in which the electret material 57 is disposed between the first electrode 55 and the second electrode 56 has been described. If there is a charge supply mechanism capable of supplying charges from the outside between the first electrode 55 and the second electrode 56, it is not always necessary. However, a large amount of charge needs to be supplied between the electrodes. Therefore, from the viewpoint, it is preferable that the electret material is disposed between the respective electrodes.

The power generator according to the present invention can provide a power generator capable of efficiently using multidirectional external vibrations for power generation, as well as an electrical device and a communication device equipped with such a power generator. The present invention is useful for electrostatic induction type power generation devices and electric devices equipped with the power generation devices.

DESCRIPTION OF SYMBOLS 1 1st board | substrate 2 2nd board | substrate 3 Spacer 4 Member 5 1st electrode 6 3rd board | substrate 7 4th board | substrate 8 2nd electrode 9 Electret material 10 Shaft 11 Bearing 12 1st rotation direction 13 2nd Direction of rotation 14 first member 15 second member 21 first substrate 22 second substrate 23 first spacer 24 member 25 third substrate 26 fourth substrate 27 fifth substrate 28 sixth substrate 29 seventh substrate 30 second spacer 31 member 32 first electrode 33 second electrode 34 first electret material 35 third electrode 36 second electret material 37 fourth electrode 38 shaft 39 bearing 40 second 1st rotation direction 41 2nd rotation direction 42 1st member 43 2nd member 44 3rd member 51 1st board | substrate 52 2nd board | substrate 53 3rd board | substrate 54 4th board | substrate 55 1st electrode 56 Second electrode 57 Electre Material 58 Spacer 59 Member 60 Shaft 61 Bearing 62 First rotational direction 63 Second rotational direction 64 Second member 65 First member 66 Weight 70 Overlapping portion 71 (overlapping portion) center of gravity 72 (second portion) Center of gravity 73 (of member) Center of gravity (of second member)

Claims

A first electrode provided on a plate-like first member;
A second electrode provided on the plate-like second member, provided so as to face the first electrode at an interval;
An electret material provided between the first electrode and the second electrode, provided on the first electrode or the second electrode;
A plurality of third members provided between the first member and the second member and in contact with the first member or the second member;
The first member is a power generator that rotates relative to the second member and in an in-plane direction.
In claim 1,
The power generator according to claim 3, wherein the third member is in contact with a groove formed in the first member or the second member.
In any one of Claim 1 or 2,
An axis is formed near the center of the first member,
The shaft extends in a direction perpendicular to the in-plane direction of the first member;
The first member and the second member are power generators connected by the shaft.
In any one of claims 1 to 3,
The first electrode is a power generation device formed to extend from the vicinity of the center of the first member toward an outer peripheral direction.
In any one of claims 1 to 3,
The power generation device, wherein the first electrode is formed in a spiral shape from the vicinity of the center of the first member toward the outer periphery.
In any one of claims 1 to 3,
The first electrode is composed of a plurality of block-shaped electrodes,
The plurality of electrodes is a power generation device formed from the vicinity of the center of the first member toward the outer peripheral direction.
In any one of claims 1 to 3,
The first electrode is a power generation device in which a plurality of block-shaped electrodes are formed in a staggered arrangement.
In any one of claims 1 to 7,
The third member is a power generation device having a substantially spherical shape.
In any one of claims 1 to 7,
The third member is a power generation device made of an abrasion-resistant material.
In any one of claims 1 to 7,
The third member is a power generation device made of a super hard material.
In any one of claims 1 to 10,
The electric power generating apparatus whose space | interval between the said 1st electrode and the said 2nd electrode is 50 micrometers or less.
Having at least a first portion and a second portion;
A space defined by the first part and the second part;
A first electrode provided in the first portion;
A second electrode provided to face the first electrode at an interval and provided in the second portion;
In the space, comprising an electret material provided on the first electrode or the second electrode,
A third portion in contact with the first portion or the second portion;
The power generator according to claim 1, wherein the first part or the second part is a rotary weight.
A first electrode provided on the first member;
A second electrode provided on the second member so as to face the first electrode at an interval;
An electret material provided between the first electrode and the second electrode, provided on the first electrode or the second electrode;
A third member provided between the first member or the second member and in contact with the first member or the second member;
The power generation device, wherein the first member is a rotary weight.
A first electrode provided on a plate-like first member;
A second electrode provided on the plate-like second member, provided to face the first electrode at a distance,
The first member rotates relative to the second member and in an in-plane direction;
The first electrode is a power generation device that rotates relative to the second electrode and in an in-plane direction.
A first electrode provided on a plate-like first member;
A second electrode and a third electrode provided on the plate-like second member;
A fourth electrode provided on the plate-like third member,
The first electrode and the second electrode are provided so as to face each other with a space therebetween,
The third electrode and the fourth electrode are provided so as to face each other with a space therebetween,
The second member is a power generator that rotates relative to the first member and in an in-plane direction.
In claim 15,
The power generation device, wherein the second member is a rotary weight.
In any one of Claims 15 or 16,
The second member is a power generation device that rotates relative to the first member and the third member and in an in-plane direction.
In any one of claims 15 to 17,
A first electret material provided between the first electrode and the second electrode and on the first electrode or the second electrode;
A power generator further comprising a second electret material provided between the third electrode and the fourth electrode and provided on the third electrode or the fourth electrode.
In any one of claims 15 to 18,
Provided between the first member and the second member or between the second member and the third member, and any of the first member, the second member and the third member; A power generator further comprising a plurality of fourth members that come into contact with the heel.
In any one of claims 15 to 18,
Provided between the first member and the second member or between the second member and the third member, and any of the first member, the second member and the third member; A power generator further comprising a plurality of fourth members in contact with the grooves formed in the crab.
In claim 19 or 20,
The fourth member is a power generation device having a substantially spherical shape.
In any one of claims 19 to 21,
The fourth member is a power generation device made of a wear-resistant material.
In any one of claims 19 to 21,
The fourth member is a power generation device made of a super hard material.
A device according to any one of claims 15 to 23.
A shaft is formed on the first member,
The shaft extends in a direction perpendicular to a planar direction of the first member;
The first member, the second member, and the third member are connected to each other by the shaft.
In any one of claims 15 to 24,
The first electrode is a power generation device formed to extend from the vicinity of the center of the first member toward an outer peripheral direction.
In any one of claims 15 to 24,
The first electrode is composed of a plurality of block-shaped electrodes,
The plurality of electrodes is a power generation device formed from the vicinity of the center of the first member toward the outer peripheral direction.
In any one of claims 15 to 24,
The first electrode is a power generation device in which a plurality of block-shaped electrodes are formed in a staggered arrangement.
In any one of claims 15 to 24,
The power generation device, wherein the first electrode is formed in a spiral shape from the vicinity of the center of the first member toward the outer periphery.
In any one of claims 15 to 28,
The power generation device wherein a distance between the first electrode and the second electrode is 50 μm or less.
A first electrode provided on the first member;
A second electrode provided on the second member so as to be opposed to the first electrode at an interval;
The first member is disposed inside the second member;
The power generation device wherein the second member is movable.
In claim 30,
The power generation device, wherein the second member is a rotary weight.
32. In any one of claims 30 or 31.
The second member is a power generation device that is plate-shaped and rotates relative to the first member and in an in-plane direction.
In any one of claims 30 to 32,
A power generator further comprising an electret material provided between the first electrode and the second electrode and provided on the first electrode or the second electrode.
In any one of claims 30 to 33,
A power generation apparatus further comprising a plurality of third members provided between the first member and the second member and in contact with the first member or the second member.
In any one of claims 30 to 33,
A power generator further comprising a plurality of third members provided between the first member and the second member and in contact with a groove formed in the first member or the second member.
In claim 34 or 35,
The third member is a power generation device having a substantially spherical shape.
In any one of claims 34 to 36,
The third member is a power generation device made of an abrasion-resistant material.
In any one of claims 34 to 36,
The third member is a power generation device made of a super hard material.
In any one of claims 30 to 38,
The first member is plate-shaped, and the first member has a shaft,
The shaft extends in a direction perpendicular to the in-plane direction of the first member;
The power generation apparatus in which the first member and the second member are connected by the shaft.
In any one of claims 30 to 39,
The power generation device, wherein the first electrode is formed from the vicinity of the center of the first member toward the outer peripheral direction.
In any one of claims 30 to 39,
The first electrode is a power generation device in which a plurality of block-shaped electrodes are formed from the vicinity of the center of the first member toward the outer peripheral direction.
In any one of claims 30 to 39,
The first electrode is a power generation device in which a plurality of block-shaped electrodes are formed in a staggered arrangement.
In any one of claims 30 to 39,
The power generation device, wherein the first electrode is formed in a spiral shape from the vicinity of the center of the first member toward the outer periphery.
A first electrode provided on the first member;
A second electrode provided on the second member so as to be opposed to the first electrode at an interval;
The second member is a power generation device having a weight at an outer edge portion.
A first electrode provided on the first member;
A second electrode provided on the second member so as to be opposed to the first electrode at an interval;
The power generator with a large mass per unit volume of the outer edge portion of the second member as compared with the mass per unit volume in the vicinity of the center of the second member.
A first electrode provided on the first member;
A second electrode provided on the second member so as to be opposed to the first electrode at an interval;
The second member is more than the distance from the center of gravity of the overlapping portion of the first member and the portion where the second member is projected from above toward the first member to the vicinity of the center of the first member. A power generator having a longer distance from the center of gravity of the member to a portion of the second member facing the vicinity of the center of the first member.