JP2011150882A - Electron beam generating apparatus, and photoelectric surface housing cartridge used therefor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an electron beam generating apparatus capable of increasing a movable distance of a photoelectric surface by moving the photoelectric surface to a predetermined position without using any bellows, reducing cost, and reducing the size of the apparatus. <P>SOLUTION: The electron beam generating apparatus 1 includes a photoelectric surface housing cartridge 2, a film breaker 32, and a cathode plug moving rod 3. The photoelectric surface housing cartridge 2 is a cylindrical member, and sealing films 15, 16 are fitted to openings of the cylindrical member. A cathode plug holding ring 11 is mounted to the cylindrical member, and a cathode plug 10 mounted with the photoelectric surface is held by the cathode plug holding ring 11. Coupling means for coupling the cathode plug 10 and the cathode plug moving rod 3 are provided thereon, and the cathode plug 10 can be taken out of the photoelectric surface housing cartridge 2 by using the cathode plug moving rod 3. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

The present invention relates to an electron beam generator and a photocathode containing cartridge used therein.

As a conventional technique of an electron beam generator and a photocathode housing cartridge used therein, there is one in which a photocathode is attached to the tip of a bellows (see, for example, Patent Document 1).

A conventional electron beam generator 300 and a photocathode containing cartridge 301 used therein will be described with reference to FIG. This photocathode accommodating cartridge 301 is obtained by vacuum-sealing the photocathode 302, and the photocathode 302 is attached to the tip of the bellows 303 via a substrate. A metal film 304 is attached to the opening of the photocathode accommodating cartridge 301 so as to face the photocathode 302, and the opening is sealed. The photocathode accommodating cartridge 301 is held by a slider 305.

The electron beam generator 300 includes a film breaker 306 for breaking the metal film 304 of the photocathode accommodating cartridge 301.

When the photocathode containing cartridge 301 is pushed out toward the film breaker 306 in an integrated state with the slider 305, the metal film 304 of the photocathode containing cartridge 301 collides with the apex of the conical surface portion of the film breaker 306 in the closed state. Then, a hole is made in the metal film 304 by the conical surface portion. When the slider 305 is further pressed, the semi-conical surface portion of the film breaker 306 is opened, and the metal film 304 is pushed away to the side surface side of the end portion of the photocathode housing cartridge 301.

Next, the photocathode 302 is inserted into the through hole of the positioning plate through the space formed by the open semi-conical surface portion of the film breaker 306, and the photocathode 302 is positioned. In this state, the photocathode 302 is irradiated with laser light, and electrons are emitted from the photocathode 302 to generate an electron beam.
JP 2003-45368 A

As described above, the conventional electron beam generator 300 and the photocathode accommodating cartridge 301 used therein are provided with the bellows 303 for attaching the photocathode 302 in the cartridge 301. Therefore, in the conventional electron beam generator 300 and the photocathode housing cartridge 301 used therefor, when the photocathode 302 in the photocathode housing cartridge 301 is moved, the moving distance is determined by the extendable length of the bellows 303. In order to move the photocathode 302 over a long distance, another long bellows for moving the photocathode accommodating cartridge itself is indispensable. However, since the bellows 303 is the most expensive among the components of the photocathode accommodating cartridge 301, the cost of the photocathode accommodating cartridge 301 is high, and another long bellows is required. There is a problem that the cost of the entire generator 300 is increased, the structure is further complicated, and the apparatus is enlarged.

The problem to be solved by the present invention is to solve the problems that the electron beam generator and the photocathode-accommodating cartridge used in the electron beam generator are high in cost, complicated in structure, and large in size.

The electron beam generator of the present invention includes a cathode plug to which a photocathode is attached, a photocathode holding ring that detachably holds the cathode plug, and a cylindrical member to which the photocathode holding ring is attached. , A photocathode housing cartridge configured to have a pair of sealing films attached to one and the other openings of the cylindrical member and vacuum-sealing the inside, and a slider for holding the photocathode housing cartridge And a moving means for moving at least one of the film breaker or slider that breaks the sealing film to break one of the sealing films with the film breaker, and breaking through the other of the sealing film and coupling to the cathode plug, A cathode plug moving rod for moving the cathode plug from one opening of the cylindrical member to the outside of the photocathode housing cartridge. Use rod has a removable coupling means with each other.

The connecting means for the cathode plug can be a female screw formed at the bottom of the cathode plug, and the connecting means for the cathode plug moving rod can be a male screw formed at the tip of the cathode plug moving rod.

The cathode plug coupling means may be a key hole formed in the cathode plug, and the cathode plug moving rod coupling means may be a rod engageable with the key hole.

The photocathode can be a transmissive photocathode, a part of the cathode plug moving rod can be constituted by an insulating pipe, and an optical fiber can be arranged over the entire length inside the cathode plug moving rod.

The photocathode containing cartridge of the present invention includes a cathode plug to which a photocathode is attached, a photocathode holding ring that detachably holds the cathode plug, and a cylindrical member to which the photocathode holding ring is attached. And a pair of sealing films that are attached to one and the other openings of the cylindrical member and vacuum-seal the inside. The cathode plug has a cylindrical shape that breaks through the other sealing film. Coupling means is provided for coupling to the cathode plug moving rod that enters the interior of the member.

The coupling means of the cathode plug can be a female screw formed at the bottom of the cathode plug, and can be screwed into a male screw formed at the tip of the cathode plug moving rod.

The coupling means of the cathode plug can be a key hole formed in the cathode plug, and can be engaged with a rod provided on the cathode plug moving rod.

In the present invention, when the photocathode is to be taken out of the photocathode housing cartridge, the coupling means provided on the cathode plug and the coupling means provided on the cathode plug moving rod are coupled, and the cathode plug is used for holding the photocathode. Remove from the ring and move the cathode plug moving rod linearly in the extension direction of this rod.

Therefore, in the present invention, since the photocathode can be moved over a long distance without using a long bellows, the cost can be reduced, the structure can be simplified, and the apparatus can be downsized.

It is explanatory drawing of embodiment of the electron beam generator of this invention. It is a figure which shows the operation | movement procedure which takes out a cathode plug from the photocathode accommodation cartridge of the electron beam generator of this invention. It is explanatory drawing of the electron beam generator with which multiple photocathode accommodation cartridges of this invention were attached. It is explanatory drawing of embodiment of the photocathode accommodation cartridge of this invention. It is explanatory drawing of the 1st example of the cathode plug used for the photocathode accommodation cartridge of this invention. It is explanatory drawing of the 1st example of the rod for cathode plug movement used for the photocathode accommodation cartridge of this invention. It is explanatory drawing of the 1st example of the ring for cathode plug holding | maintenance used for the photocathode accommodation cartridge of this invention. 8 is a perspective view of the cathode plug 10, the cathode plug moving rod 3, the cathode plug holding ring 11, and the cathode plug holding ring lid 112 shown in FIGS. It is explanatory drawing of the 2nd example of the cathode plug used for the photocathode accommodation cartridge of this invention, and the rod for cathode plug movement. FIG. 10 is an explanatory diagram of a method of coupling the cathode plug and the cathode plug moving rod shown in FIG. 9. It is explanatory drawing of the 3rd example of the cathode plug used for the photocathode accommodation cartridge of this invention. It is explanatory drawing of the ring for cathode plug holding | maintenance holding the cathode plug shown in FIG. It is explanatory drawing of the 1st example of the electron beam generator with which the transmission type photocathode was used for the photocathode of the photocathode accommodation cartridge of this invention. It is explanatory drawing of the 2nd example of the electron beam generator with which the transmission type photocathode was used for the photocathode of the photocathode accommodation cartridge of this invention. It is explanatory drawing of the transmission electron microscope which used the electron generator shown in FIG. 14 as an electron gun. It is explanatory drawing of the conventional electron generator and the photocathode accommodation cartridge used for it.

Hereinafter, a preferred embodiment of an electron beam generator 1 according to the present invention and a photocathode containing cartridge 2 used therein will be described in detail with reference to FIGS. In addition, the same code | symbol is attached | subjected to the same element and the overlapping description is abbreviate | omitted.

FIG. 1 is a view of an apparatus according to an embodiment of an electron beam generator 1 of the present invention observed from a direction orthogonal to a linear movement direction of a slider 30 (a white arrow in the figure). The electron beam generator 1 includes a photocathode containing cartridge 2 held in a slider 30, a membrane breaker 32, an extrusion pipe 31 that pushes the photocathode containing cartridge 2 to the position of the film breaker 32, and a cathode plug The moving rod 3 is provided. The photocathode containing cartridge 2 has a cylindrical member including a cylindrical container 12 and flanges 13 and 14 provided at both ends of the container 12, and one and the other openings of the cylindrical member have The sealing films 15 and 16 for vacuum-sealing the inside of the photocathode accommodating cartridge 2 are attached. In this cylindrical member, a cathode plug holding ring 11 is attached by an attachment member 17, and the cathode plug 10 to which the photocathode is attached is held by the cathode plug holding ring 11. The cathode plug 10 and the cathode plug moving rod 3 are provided with coupling means described in detail in FIGS. 5 to 11, and the cathode plug 10 is connected to one of the photocathode accommodating cartridges 2 using the cathode plug moving rod 3. It is comprised so that it can be moved to the exterior from an opening part. Details of the photocathode accommodating cartridge 2 and the cathode plug moving rod 3 are shown in FIGS. 4 to 12 and will be described later.

  An operation procedure for taking out the cathode plug 10 from the photocathode accommodating cartridge 2 will be described with reference to FIGS.

  First, as shown in FIG. 1, the bottom of the slider 30 is pushed by the push pipe 31, and the slider 30 and the photocathode accommodating cartridge 2 are moved to the film breaker 32 side. In this case, the film breaker 32 may be moved to the photocathode housing cartridge 2 side. When the sealing film 15 attached to one opening of the photocathode cartridge 2 and the film breaker 32 come into contact with each other, the sealing film 15 is broken by the film breaker 32. Further, when the slider 30 and the photocathode accommodating cartridge 2 are moved to the membrane breaker 32 side, the lever 34 is operated at the tip of the slider 30 and the membrane breaker 32 is opened, a space through which the cathode plug 10 can pass is secured ( FIG. 2 (a)). When the cathode plug moving rod 3 is linearly moved in the direction of the cathode plug 10, the sealing film 16 attached to the other opening of the photocathode accommodating cartridge 2 is broken by the tip of the cathode plug moving rod 3. (FIG. 2B). Then, the cathode plug moving rod 3 is advanced into the photocathode housing cartridge 2, the tip of the cathode plug moving rod 3 is brought into contact with the bottom of the cathode plug 10, and the cathode plug moving rod 3 and the cathode plug 10 are connected. It couple | bonds by the coupling means explained in full detail in FIGS. 5-8 (FIG.2 (c)). Thereafter, the cathode plug 10 is removed from the cathode plug holding ring 11 using the cathode plug moving rod 3, taken out from one opening of the photocathode accommodating cartridge 2, and irradiated with laser light through the space of the membrane breaker 32. It is moved to the position (FIG. 2 (d)).

In the present invention, a plurality of photocathode accommodating cartridges 2 may be mounted in the electron beam generator 1 as shown in FIG.

FIG. 3 shows the apparatus of the embodiment in which a plurality of photocathode accommodating cartridges 2 are mounted in the electron beam generator 1 from a direction orthogonal to the linear movement direction of the film breaker 32 (open arrow in the figure). FIG. As shown in FIG. 3, the electron beam generator 1 includes a cartridge box 40 in which a plurality of photocathode accommodating cartridges 2 are accommodated in a chamber. Each photocathode containing cartridge 2 is held in a slider 30 and attached in a cartridge box 40. A film breaker 32 that breaks the sealing film 15 attached to one opening of the photocathode accommodating cartridge 2 is disposed in the laser beam irradiation side chamber of the cartridge box 40. Both ends of the membrane breaker 32 are supported and sealed by bellows 33. On the side opposite to the laser beam irradiation side of the cartridge box 40, the cathode plug moving rod 3 is arranged so as to be linearly movable in the direction of the cathode plug 10 and to be rotatable around the central axis of the rod 3. . When an arbitrary photocathode containing cartridge 2 is selected by rotation of the cartridge box 40 and the film breaker 32 is moved to the photocathode containing cartridge 2 side, one sealing film of the selected photocathode containing cartridge 2 is maintained while maintaining the degree of vacuum. You can break 15. The operation procedure for taking out the cathode plug 10 from the photocathode accommodating cartridge 2 using the cathode plug moving rod 3 is the same as the procedure shown in FIGS.

FIG. 3 shows an example in which the membrane breaker 32 is moved when a plurality of photocathode-accommodating cartridges 2 are mounted in the electron beam generator, but this is described in Patent Document 1 of the prior art. In this way, the photocathode containing cartridge 2 may be moved together with the slider 30 to the film breaker 32 side.

  Thus, in the embodiment of the present invention, the cathode plug 10 can be moved using the cathode plug moving rod 3 without using the bellows, so that the movable distance can be increased, Cost can be reduced, the structure can be simplified, and the apparatus can be downsized.

Next, preferred embodiments of the photocathode accommodating cartridge 2 and the cathode plug moving rod 3 used in the electron beam generator 1 according to the present invention will be described in detail with reference to FIGS.

FIG. 4 is a diagram for explaining the arrangement relationship of each component and member of the embodiment of the photocathode accommodating cartridge 2 of the present invention. The photocathode containing cartridge 2 has a cylindrical member composed of a cylindrical container 12 made of, for example, UV transmissive glass, and flanges 13 and 14 made of, for example, Kovar provided at both ends of the container 12. is doing. Sealing films 15 and 16 for vacuum-sealing the inside of the photocathode accommodating cartridge 2 are attached to one and the other openings of the cylindrical member. The sealing films 15 and 16 may be metallic films having a thickness of about 30 μm, for example, Kovar thin films. Inside the photoelectric housing cartridge 2, a cathode plug holding ring 11 is attached to a cylindrical container 12 via an attachment member 17. The cathode plug 10 to which the photocathode is attached is held by a cathode plug holding ring 11.

FIG. 5 is a structural diagram of the cathode plug 10 according to the first embodiment. The cathode plug 10 is made of a member made of Mo, Ni, Cu, SUS316L, or the like. The cathode plug 10 has a female thread 102 formed on one bottom, and has a bottomed cylindrical shape. Two fixing rods 101 are fitted into the cylindrical peripheral surface of the cathode plug 10.

FIG. 6 is a view of the first embodiment of the cathode plug moving rod 3 observed from a direction orthogonal to the central axis of the rod 3. A male screw 21 that can be screwed with a female screw 102 formed on one bottom of the cathode plug 10 is formed at the tip of the cathode plug moving rod 3. The cathode plug moving rod 3 is connected to a straight line / rotation introducing machine, moves linearly in the extending direction of the cathode plug moving rod 3, and can rotate about the central axis of the rod 3. .

FIG. 7 is a structural diagram of the lid and the main body of the first embodiment of the cathode plug holding ring 11 for holding the cathode plug 10 shown in FIG. The cathode plug holding ring 11 is formed of a hollow cylindrical member having a wall portion 111 at one end. The wall 111 is provided with an opening 1111 through which the cylindrical cathode plug 10 and the two fixing rods 101 can be inserted. Further, the wall 111 is formed with an anti-rotation convex portion 114 for preventing rotation of the fixing rod 101 fitted in the cathode plug 10 at a position opposed to each other with the opening 1111 interposed therebetween. Plate springs 113 for pressing the fixing rod 101 against the inner surface of the cathode plug holding ring 11 are provided on the wall 111 between the convex portion 114 and the opening 1111 through which the fixing rod 101 can be inserted. Yes. The cathode plug holding ring lid 112 attached to the other end of the cathode plug holding ring 11 has an opening 1121 through which the cathode plug 10 having a cylindrical shape and the two fixing rods 101 can be inserted in the same manner as the wall portion 111. Is provided.

FIG. 8 is an exploded view of the cathode plug 10, the cathode plug moving rod 3, the cathode plug holding ring 11, and the cathode plug holding ring lid 112. The cathode plug 10 and the cathode plug moving rod 3 are coupled by screwing a female screw 102 formed at one bottom of the cathode plug 10 and a male screw 21 formed at the tip of the cathode plug moving rod 3. Is done. A cathode plug holding ring lid 112 is attached to the cathode plug holding ring 11.

When the cathode plug 10 in which the fixing rod 101 is fitted is attached to the cathode plug holding ring 11, first, the cathode plug 10 and the fixing rod 101 are inserted into the cathode plug holding ring 11 and rotated. Then, the fixing rod 101 abuts against the rotation preventing projection 114 and is pressed against the inner surface of the cathode plug holding ring 11 by the leaf spring 113. Thus, the cathode plug 10 is firmly fixed and held on the cathode plug holding ring 11.

When the cathode plug 10 in which the fixing rod 101 is fitted is removed from the cathode plug holding ring 11, first, the cathode plug moving rod 3 is linearly moved in the extending direction of the rod 3 and the tip of the rod 3 is moved. The male screw 21 is brought into contact with the female screw 102 of the cathode plug 10, and the cathode plug moving rod 3 is rotated around the central axis of the rod 3 so that the male screw 21 and the female screw 102 are screwed together. At this time, since the fixing rod 101 fitted into the cylindrical peripheral surface of the cathode plug 10 having a cylindrical shape is in contact with the rotation preventing convex portion 113, the cathode plug 10 can be prevented from being swung. Thereafter, the cathode plug moving rod 3 is rotated around the central axis of the rod 3 in the opposite direction to the above, and the cathode plug 10 and the fixing rod 101 are moved to the wall 111 of the cathode plug holding ring 11. It is aligned with the opening 1111 and the opening 1121 of the cathode plug holding ring lid 112, and is removed from the cathode plug holding ring 11 through the opening 1111 or the opening 1121.

FIG. 9 is a structural diagram of the second embodiment of the cathode plug 10 and a view of the cathode plug moving rod 3 observed from a direction perpendicular to the central axis of the rod 3. Also in the second embodiment, as in the first embodiment shown in FIG. 5, the cathode plug 10 is made of a member having a cylindrical shape made of Mo, Ni, Cu, SUS316L or the like, and has a cylindrical shape. Two fixing rods 101 are fitted into the cylindrical peripheral surface of the cathode plug 10. In the second embodiment, one end of the cathode plug 10 is made hollow, and a keyhole 103 is formed in the surrounding cylindrical portion. Two cathode plug fixing rods 22 are provided at the tip of the cathode plug moving rod 3. Also in the second embodiment, the cathode plug moving rod 3 is connected to a straight line / rotation introducing machine, moves linearly in the extending direction of the cathode plug moving rod 3, and moves around the central axis of the rod 3. Can be rotated.

The structure of the cathode plug holding ring 11 for detachably holding the cathode plug 10 of the second embodiment shown in FIG. 9 is the same as that of the first embodiment of the cathode plug holding ring 11 shown in FIG. The form in which the cathode plug 10 is fixed and held to the cathode plug holding ring 11 is the same as that of the first embodiment.

When the cathode plug 10 fitted with the fixing rod 101 shown in FIG. 9 is removed from the cathode plug holding ring 11, it is necessary to couple the cathode plug 10 and the cathode plug moving rod 3. FIG. 10 is a diagram showing a procedure for coupling the cathode plug 10 and the cathode plug moving rod 3. First, the cathode plug moving rod 3 is linearly moved in the extending direction of the rod 3, and the cathode plug fixing rod 22 is inserted into the key hole 103 of the cathode plug 10 (see FIGS. 10A and 10B). Thereafter, the cathode plug moving rod 3 is rotated around the central axis of the rod 3, and the cathode plug fixing rod 22 is moved along the key hole 103 (see FIG. 10C). The moving rod 3 is linearly moved in a direction opposite to the extending direction of the rod 3, and the cathode plug fixing rod 22 is brought into contact with the end of the key hole 103 of the cathode plug 10 to hold the cathode plug 10 and the cathode plug. The use ring 11 is coupled (see FIG. 10D). At this time, the fixing rod 101 fitted in the cylindrical peripheral surface of the cathode plug 10 having a cylindrical shape is in contact with the rotation preventing projection 114 in the cathode plug holding ring 11. The surroundings can be prevented. Thereafter, the cathode plug moving rod 3 is rotated around the central axis of the rod 3 in the opposite direction to the above, so that the cathode plug 10 and the fixing rod 101 are opened in the wall 111 of the cathode plug holding ring 11. 1111 and the opening 1121 of the cathode plug holding ring lid 112 are aligned and removed from the cathode plug holding ring 11 through the opening 1111 or the opening 1121.

  FIG. 11 is a structural diagram of a third embodiment of the cathode plug 10. Also in this first embodiment, the cathode plug 10 is made of a member having a cylindrical shape made of Mo, Ni, Cu, SUS316L, etc., as in the first embodiment shown in FIG. 5, and has a cylindrical shape. Two fixing rods 101 are fitted into the cylindrical peripheral surface of the plug 10. In the third embodiment, a plurality of ball plunger fixing grooves 104 are provided on the cylindrical peripheral surface of the cathode plug 10 having a cylindrical shape. The coupling means for the cathode plug 10 and the cathode plug moving rod 3 may be the same as that of the first embodiment shown in FIGS. 5 and 6, or the same as that of the second embodiment shown in FIG. There may be.

FIG. 12 is a structural view of a second embodiment of the cathode plug holding ring 11 for holding the cathode plug 10 having a plurality of ball plunger fixing grooves 104 on the cylindrical peripheral surface shown in FIG. . The cathode plug holding ring 11 of the second embodiment is formed of a hollow cylindrical member, and a fixing rod fitted into the cylindrical peripheral surface of the cathode plug 10 on the inner peripheral surface of the hollow cylindrical member. An anti-rotation groove 118 into which 101 is inserted is formed. A plurality of ball plungers 115 are attached to the inner peripheral surface of the hollow cylindrical member of the cathode plug holding ring 11 at a position facing the ball plunger fixing groove 104 of the cathode plug 10. The hard ball 116 is attached so as to protrude into the hollow portion of the hollow cylindrical member. A spring 117 is inserted into the ball plunger 115, and the hard ball 116 is pressed in a direction protruding from the inside of the ball plunger 115. Thus, when the hard ball 116 is pressed from the protruding side, it enters the ball plunger 115 with the pressure.

When the cathode plug 10 in which the fixing rod 101 is fitted is attached to the cathode plug holding ring 11, the cathode plug 10 is inserted into the rotation preventing groove 118 of the cathode plug holding ring 11 while inserting the fixing rod 101. 10 is inserted into the cathode plug retaining ring 11. At this time, the hard ball 116 of the ball plunger 115 attached to the cathode plug holding ring 11 is pressed against the cylindrical peripheral surface of the cathode plug 10 and enters the ball plunger 115. When the ball plunger fixing groove 104 of the cathode plug 10 reaches the position of the hard ball 116 of the ball plunger 115, the hard ball 116 is pushed out by a spring and fitted into the ball plunger fixing groove 104. As a result, the cathode plug 10 is fixed and held on the cathode plug holding ring 11.

When the cathode plug 10 in which the fixing rod 101 is fitted is removed from the cathode plug holding ring 11, it is the same as the first embodiment shown in FIGS. 5 and 6 or the second embodiment shown in FIG. 9. By the method, the cathode plug 10 in which the fixing rod 101 is fitted is joined to the cathode plug moving rod 3. At this time, since the fixing rod 101 is inserted into the rotation preventing groove 118 of the cathode plug holding ring 11, the cathode plug 10 can be prevented from being swung around. When the cathode plug moving rod 3 is linearly moved in the extending direction of the rod 3, the hard ball 116 of the ball plunger 115 and the ball plunger fixing groove 104 are disengaged, and the fixing rod 101 is moved around the cylinder. The cathode plug 10 fitted in the surface can be removed from the cathode plug holding ring 11.

  The present invention is usually used in a reflective photocathode (irradiating excitation light on the photocathode surface), but may be used in a transmissive photocathode. In this case, examples of electron beam generators 100 and 200 are shown in the figure. 13 and 14. The transmission type photocathode is attached to the cathode plug 10.

  FIG. 13 is a diagram of the electron beam generator 100 according to the first embodiment using a transmission type photocathode as a photocathode, as observed from a direction orthogonal to the linear movement direction of the slider 30. Also in the first embodiment of the electron beam generating apparatus 100 using a transmission type photocathode as the photocathode, the electron beam generating apparatus 100 includes the photocathode accommodating cartridge 2 held in the slider 30 and the film breaker 32. And an extruding pipe for extruding the photocathode containing cartridge 2 to the position of the membrane breaker 32, and a cathode plug moving rod 3, and the photocathode containing cartridge 2 has a cylindrical member. Sealing films 15 and 16 for vacuum-sealing the inside of the photocathode housing cartridge 2 are attached to one and the other openings of the photocathode housing cartridge 2. The ring 11 and the cathode plug 10 held by the cathode plug holding ring 11 are incorporated. The cathode plug 10 and the cathode plug moving rod 3 are provided with coupling means described in detail in FIGS. 5 to 11, and the cathode plug 10 is connected to one of the photocathode accommodating cartridges 2 using the cathode plug moving rod 3. It is comprised so that it can be moved to the exterior from an opening part.

In the first embodiment of the electron beam generator 100 using a transmissive photocathode, the transmissive photocathode is attached to the cathode plug 10, and excitation light such as laser light is received inside the cathode plug moving rod 3. Passing through. Excitation light is guided into the cathode plug moving rod 3 through a vacuum window 51 that separates the atmosphere and vacuum. The cathode plug moving rod 3 is divided into a front end side and a rear end side, and both are connected via an insulating pipe 53 such as a ceramic pipe. The rear end side of the cathode plug moving rod 3 is connected to a linear / rotary introduction machine 55. A condensing lens 52 that condenses the light guided from the vacuum window 51 is disposed near the tip of the cathode plug moving rod 3. The excitation light guided from the vacuum window 51 passes through the cathode plug moving rod 3, is condensed by the condensing lens 52, and is irradiated onto the photoelectric surface from the back surface of the transmission type photoelectric surface. When the condensing lens 52 is not used, the beam size is determined by the beam size of the excitation light or the inner diameter in the cathode plug moving rod 3. As described above, when the transmission type photocathode is used, the alignment of the irradiation of the excitation light to the photocathode becomes easier than the reflection type.

  FIG. 14 is a view of the second embodiment of the electron beam generator 200 using a transmissive photocathode as a photocathode, as observed from a direction orthogonal to the linear movement direction of the slider 30. Also in the second embodiment of the electron beam generating apparatus 200 using the transmission type photocathode, the electron beam generating apparatus 200 includes the photocathode accommodating cartridge 2 held in the slider 30, the film breaker 32, the photoelectric detector. An extrusion pipe for extruding the surface accommodating cartridge 2 to the position of the membrane breaker 32 and a cathode plug moving rod 3 are provided. The photocathode accommodating cartridge 2 has a cylindrical member, and one of the cylindrical members and Sealing films 15 and 16 for vacuum-sealing the inside of the photocathode accommodating cartridge 2 are attached to the other opening, and the cathode plug holding ring 11, A cathode plug 10 held in the cathode plug holding ring 11 is incorporated. The cathode plug 10 and the cathode plug moving rod 3 are provided with coupling means described in detail in FIGS. 5 to 11, and the cathode plug 10 is connected to one of the photocathode accommodating cartridges 2 using the cathode plug moving rod 3. It is comprised so that it can be moved to the exterior from an opening part. In the second embodiment of the electron beam generator 200 using a transmissive photocathode, the transmissive photocathode is attached to the cathode plug 10, and an optical fiber 50 is disposed inside the cathode plug moving rod 3. An optical fiber vacuum connector 54 that guides excitation light is connected to the end portion 50. As in the first embodiment of the electron beam generator 100 using the transmission type photocathode shown in FIG. 13, the cathode plug moving rod 3 is divided into two at the front end side and the rear end side. Are connected through an insulating pipe 53. The rear end side of the cathode plug moving rod 3 is connected to a linear / rotary introduction machine 55. The light guided from the optical fiber vacuum connector 54 is applied to the photocathode from the back surface of the transmissive photocathode via the optical fiber 50. This structure eliminates the need for alignment of the irradiation of excitation light onto the photocathode. A bundle fiber in which a plurality of optical fibers are bundled can be used. As a result, light can be guided more efficiently even with a light source having poor light condensing performance as compared with lasers such as LEDs and lamps.

  In the first and second embodiments of the electron beam generators 100 and 200 using the transmission type photocathode shown in FIGS. 13 and 14, a part of the cathode plug moving rod 3 is used for insulation such as a ceramic pipe. There is a pipe. As a result, it is possible to electrically insulate the photocathode that is normally applied with a negative high voltage and the linear / rotational introducer 55 connected to the cathode plug moving rod 3. In addition, as a method of electrically insulating the linear / rotation introducing machine 55 connected to the photocathode and the cathode plug moving rod 3 without using an insulating pipe such as a ceramic pipe, the cathode plug itself is set to a negative height. There is a method in which the cathode plug moving rod 3 is detached from the cathode plug 10 by setting the electrode to which a voltage is applied. When this method is used, the problem of discharge is reduced and it becomes more practical.

  FIG. 15 shows an embodiment in which the transmissive photocathode photocathode containing cartridge 2 of the second embodiment of the electron beam generator 200 shown in FIG. 14 is used as an electron gun of a transmission electron microscope.

  FIG. 15 is a view of a transmission electron microscope using a photocathode-containing cartridge 2 of a transmission photocathode as an electron gun as an electron gun, as observed from a direction orthogonal to the direction of the electron beam. The optical fiber vacuum connector 54 of the electron beam generator 200 is connected to the excitation light source 60 via the optical fiber 50. On the electron beam exit side of the electron beam generator 200, an extraction electrode 56, a magnetic lens 57, a sample 58, and a detection unit 59 are provided. The electron beam emitted from the transmission type photocathode is accelerated by the extraction electrode 56 and focused on the sample 58 by the magnetic lens 57. The transmission electrons emitted from the sample 58 are measured by a detection unit 59 such as a camera to obtain a transmission electron image. The present invention can be used not only in a transmission electron microscope but also in a scanning electron microscope. Further, a transmission electron microscope can be used as a time-resolved electron microscope by using a pulse laser as an excitation light source.

  In this embodiment, since the bellows is not used, the photocathode, the film breaker 32, and the linear / rotation introducing device 55 can be electrically insulated, and a DC high voltage can be applied.

  DESCRIPTION OF SYMBOLS 1,100,200 ... Electron beam generator, 2 ... Photocathode accommodation cartridge, 3 ... Cathode plug moving rod, 10 ... Cathode plug, 11 ... Cathode plug holding ring, 12 ... Container, 13 ... Flange, 14 ... Flange 15 ... sealing film, 16 ... sealing film, 17 ... mounting member, 21 ... male screw, 22 ... cathode plug fixing rod, 30 ... slider, 31 ... extrusion pipe, 32 ... membrane breaker, 33 ... bellows, 34 ... Lever, 40 ... Cartridge box, 50 ... Optical fiber, 51 ... Vacuum window, 52 ... Condensing lens, 53 ... Insulating pipe, 54 ... Vacuum connector for optical fiber, 55 ... Linear / rotary introducer, 56 ... Extraction electrode, 57 ... magnetic lens, 58 ... sample, 59 ... detector, 60 ... excitation light source, 101 ... fixing rod, 102 ... female screw, 103 ... keyhole, 04: groove for fixing ball plunger, 111: wall portion, 112: ring lid for holding cathode plug, 113: leaf spring, 114: convex portion for preventing rotation, 115: ball plunger, 116: hard ball, 117: spring, 118 ... Rotation preventing groove, 1111 ... opening, 1121 ... opening

Claims (7)

A cathode plug to which a photocathode is attached, a photocathode holding ring for detachably holding the cathode plug, a cylindrical member to which the photocathode holding ring is attached, and one and the other of the cylindrical members A photocathode-accommodating cartridge configured to have a pair of sealing films attached to the opening and vacuum-sealing the inside;
Holding means for holding the photocathode containing cartridge;
Moving means for moving at least one of the film breaker or the holding means for breaking the sealing film and breaking one of the sealing films with the film breaker;
Cathode plug moving rod that breaks through the other of the sealing film and is coupled to the cathode plug, and moves the cathode plug from one opening of the cylindrical member to the outside of the photocathode housing cartridge;
With
The electron beam generator according to claim 1, wherein the cathode plug and the cathode plug moving rod have coupling means detachable from each other. The coupling means of the cathode plug is a female screw formed at the bottom of the cathode plug, and the coupling means of the cathode plug moving rod is a male screw formed at the tip of the cathode plug moving rod. Item 2. The electron beam generator according to Item 1. 2. The electron beam generator according to claim 1, wherein the coupling means of the cathode plug is a key hole formed in the cathode plug, and the coupling means of the cathode plug moving rod is a rod engageable with the key hole.   2. The photocathode is a transmissive photocathode, the cathode plug moving rod is partly composed of an insulating pipe, and an optical fiber is disposed over the entire length of the cathode plug moving rod. The electron beam generator of any one of thru | or 3. A cathode plug to which a photocathode is attached, a photocathode holding ring for detachably holding the cathode plug, a cylindrical member to which the photocathode holding ring is attached, and one and the other of the cylindrical members And a pair of sealing films that are attached to the opening and vacuum-seal the inside,
The photocathode-accommodating cartridge, wherein the cathode plug is provided with coupling means for coupling to a cathode plug moving rod that penetrates the other side of the sealing film and enters the cylindrical member. . 6. The photocathode according to claim 5, wherein the coupling means of the cathode plug is a female screw formed at the bottom of the cathode plug and can be screwed into a male screw formed at the tip of the cathode plug moving rod. Containment cartridge. 6. The photocathode accommodating cartridge according to claim 5, wherein the coupling means of the cathode plug is a key hole formed in the cathode plug, and is engageable with a rod provided on the cathode plug moving rod.

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