JP2003346692A - Sample chamber of x-ray microscope - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a sample chamber which ensures an electron accelerating space, can easily adjust an optical position and makes exchange of a sample easy in a novel X-ray microscope that an X-ray image of the sample is converted to an electron image to observe it. <P>SOLUTION: The sample chamber is formed as a vacuum container equipped with a laser introducing hole 13, through which laser is introduced through a transparent thick plate 12, a hand hole 15 capable of being opened and closed and a vacuum connecting hole 16 and having a bore adapted to an anode in an electron accelerating space, is equipped with a sample position adjusting mechanism for grasping a sample holder to adjust a position and a target position adjusting mechanism for grasping a target for emitting X-rays by receiving a laser beam to adjust a position in the interior thereof and is installed on a front surface of an objective of an X-ray microscope to arrange the target at a proper position in the electron accelerating space and adjust the position of the target so as to exactly irradiate a sample with X-ray emitted. <P>COPYRIGHT: (C)2004,JPO

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention observes an X-ray image by irradiating an X-ray and accelerating and enlarging and projecting an electron image generated corresponding to a shadow formed on a photoelectric conversion surface. It relates to an X-ray microscope.

[0002]

2. Description of the Related Art Conventionally, an X-ray microscope has been used as a measuring instrument capable of obtaining a high-resolution transmission image of an object using an X-ray having a short wavelength and a high transmission power as a light source. However, in the method of enlarging and converging the X-ray beam itself using an X-ray imaging element for enlarging an image, the focal length of the X-ray enlarging optical system becomes long, so that the apparatus becomes large, and the image enlarging ratio is adjusted. It is necessary to use an optical microscope to specify the observation position, etc. In addition, since the light-collecting efficiency is poor, a strong X
There is a problem that a line light source is required.

Further, in a projection magnification method in which a sample is placed near an X-ray light source and a projected image of transmitted X-rays is observed, it is impossible to avoid penumbra caused by the size of the X-ray source and diffraction blur caused by the sample. , The practical limit of resolution is 0.1-0.2
It was about μm, and there was a great restriction on the measurement object. Furthermore, the contact method, in which the sample is brought into close contact with the photosensitive plate, irradiated with X-rays, developed, and the developed image is magnified and observed with an optical system, does not use an X-ray magnifying optical system. High resolution images can be easily obtained in principle because the plates are in close contact with each other and blurring is small.However, since the photosensitive plates are taken out of the vacuum vessel and developed, and then observed with another optical microscope, etc. Requires work and is not instantaneous.

[0004] To overcome the disadvantages of the conventional X-ray microscope, the present applicant has already filed Japanese Patent Application No. 2001-23.
According to 5678 and Japanese Patent Application No. 2001-316191, a sample is brought into close contact with the photoelectric conversion surface, X-rays are irradiated from behind, electrons generated are drawn out from the photoelectric conversion surface, enlarged, imaged on the electron detection element surface, and formed as a visible image. A new type of X-ray microscope apparatus to be presented is disclosed. In the disclosed X-ray microscope, as shown in FIG. X, a sample is placed on a photoelectric conversion element surface, electrons generated by applying X-rays transmitted through the sample to the photoelectric conversion element are extracted by a strong electric field, and accelerated. After that, the electron flow is magnified by an electronic image magnifying device, projected on the electron beam detecting element surface, visualized and displayed on a monitor.

The disclosed X-ray microscope enlarges an X-ray transmission image by a principle similar to that of an electron microscope, and can obtain a high-resolution X-ray transmission image in real time without the need for development or the like. it can. Further, in the disclosed apparatus, X transmitted through the sample
Since the lines are converted into electrons by the photoelectric conversion element, a gray-scale image reflecting the difference in X-ray absorption capacity can be created, and observation using soft X-rays is also possible. For this reason, the amount of information of the acquired X-ray image has increased remarkably, and living body observation can be performed.

In this X-ray microscope, the distance between the cathode and the anode needs to be as short as possible in order to place the sample in a high electric field region and perform effective electron acceleration. Further, in order to secure the intensity of the X-rays to be irradiated, it is preferable to arrange the X-ray generation source as close as possible to the sample. Furthermore, since the characteristics of the sample that can be observed differ depending on the type of X-rays to be irradiated, it is preferable that the X-ray wavelength can be selected. The X-rays can travel freely even in the atmosphere and irradiate the sample, but the electron beam path after being converted into an electron beam corresponding to the X-ray image by the photoelectric conversion surface is in a high vacuum. There must be. However, since the photoelectric conversion surface is thin and brittle, it cannot withstand the pressure difference between the atmosphere and vacuum. In addition, since the sample to be observed must be set in close contact with the photoelectric conversion surface, it is necessary to remove the photoelectric conversion surface for processing when replacing the sample.

[0007]

SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to secure an electron acceleration space and easily adjust an optical position so as to be used for constructing the disclosed new X-ray microscope. And to provide a sample chamber that facilitates sample exchange.

[0008]

In order to solve the above problems, a shadow image formed by irradiating a sample with X-rays is converted into an electronic image by a photoelectric conversion plate and enlarged to observe the sample. The X-ray microscope sample chamber of the present invention used for the X-ray microscope has a laser beam introduction hole for introducing a laser through a transparent thick plate, a hand hole that can be opened and closed, and a vacuum connection hole. It is formed as a vacuum vessel having a sample position adjustment mechanism for gripping and adjusting the position of the sample holder and a target position adjustment mechanism for adjusting the position by gripping a target that receives a laser beam and emits X-rays. Attach the target to the front of the objective lens of the X-ray microscope to place the target in the proper position in the electron acceleration space, and adjust the position of the target to accurately irradiate the sample with X-rays generated. As characterized by the.

When the sample chamber of the present invention is used, a sample holder in which a sample slide formed by mounting a sample on a photoelectric conversion plate is set at the tip is prepared, the vacuum in the electron acceleration space is broken, a hand hole is opened, and the sample holder is opened. Attach the holder to the sample position adjustment mechanism, place the sample in the appropriate position in the electron acceleration space, then set the target at the laser irradiation position by the target position adjustment mechanism, evacuate the electron acceleration space and the sample chamber, and The position can be finely adjusted, and when a target is irradiated with laser light through the laser light introduction hole, an X-ray transmission image can be observed.

In this sample chamber, when the sample is removed, the electron traveling area and the X-ray traveling area are returned to the atmospheric pressure together, and when the sample is mounted, both areas are evacuated together. Since a large difference does not occur in the pressure applied to both sides of the sample slide to be performed, the fragile sample slide can be prevented from being damaged. In order to form a magnetic field for the objective lens in the electron acceleration space, this X-ray microscope arranges a pole piece of an electromagnetic coil on a cylindrically concave side surface, forms an anode surface on the bottom of the cylinder, and prepares a sample. The tip of the holder is used as the cathode, and the space where the cathode and anode face each other is used as the electron acceleration space.In order to perform electron acceleration effectively, insert the sample holder deep into the cylindrical recess to reduce the distance between the anode and cathode. Need to be smaller.
In the present invention, the sample position adjusting mechanism allows the sample holder to be inserted from a hole adapted to the anode to an appropriate position in the cylindrical recess forming the electron acceleration space. Further, the sample position adjusting mechanism can finely adjust the sample so as to be positioned on the optical axis of the X-ray microscope.

Further, since X-rays generated from an X-ray target are widely diffused, in order to irradiate a sample with strong X-rays, X-rays are required.
It is preferable that the line target is arranged as close to the sample as possible. However, since it is necessary to extract the sample from the electron acceleration space when exchanging the sample, if the configuration for fixing the X-ray target is used, the sample cannot be arranged in the vicinity of the sample. According to the present invention, the X-ray target is retracted by the target position adjusting mechanism to enable the exchange of the sample, and the X-ray target is arranged at an appropriate position close to the sample holder, and further finely adjusted to the irradiation position of the laser beam. it can.

In the X-ray microscope sample chamber of the present invention, when further adjusting the X-ray microscope, the target position adjusting mechanism is retracted from the optical axis so that the adjusting electron beam generator can be set. May be configured. The adjustment and performance inspection of the X-ray microscope are performed as pre-shipment adjustment in a manufacturing factory, performance check at the time of installation on site, and adjustment at the time of starting the apparatus and at regular intervals. For such adjustment work, for example, a laser beam generator used for observation, such as a free electron laser generator, may not be used. In such a case, it is convenient to provide a relatively simple electron gun on the optical axis in the X-ray microscope and to adjust the objective lens, the projection lens, the deflection coil and the like using the electron beam.

Therefore, members such as an electron gun for generating an electron beam and an electromagnetic coil for shaping the electron beam are provided at positions facing the objective lens in the sample chamber so that the electron beam travels on the optical axis. can do. When such a configuration is adopted, it is necessary to retreat from the optical axis so that the target position adjusting mechanism does not hinder the electron beam traveling. The evacuation from the optical axis may be performed by removing the target position adjusting mechanism or the target holding member, or may be performed by a mechanism that moves in a direction perpendicular to the optical axis.

Further, the sample position adjusting mechanism may be fixed to the front surface of the objective lens, and is provided so as to be movable toward the objective lens such as to move on a rail provided on the wall of the container. Is also good. In addition, it is preferable to provide a stage for setting the sample holder, and to adjust the position by moving the stage in a direction perpendicular to the axis by the fine movement device. In addition, it is necessary to supply a high negative voltage to make the sample holder a cathode that forms the electron acceleration space, and the wall of the through hole into which the sample holder is inserted is formed of a conductive material, and externally through the wall. In order to supply the high voltage to the sample holder and insulate the wall from the outer shell provided with the housing ground, it is necessary to form the peripheral edge of the wall with an insulating material. It is preferable to use an aromatic polyimide resin having excellent insulating properties, dimensional stability, workability, and the like as the insulating material.

Further, it is preferable to provide a high-voltage introduction terminal on the side of the sample chamber so as to supply a negative voltage to the sample holder. If high-voltage electric wires are wired inside the material, it is difficult to secure insulation. However, if they are routed in a vacuum space, there is an advantage that connection wiring and insulation become easy. In the present invention, the target position adjusting mechanism may be configured to be able to move along a rail provided on a wall of the container, and to adjust a position where the target is irradiated with the laser beam by gripping the target. it can. The X-ray target is eroded in the process of irradiating the laser beam to generate X-rays, and eventually a hole is opened. For example, by gripping a target material formed in a cylindrical shape, the target can be rotated and translated. If the irradiation position is shifted at appropriate intervals, stable X-ray emission can be achieved by always receiving a laser beam on a fresh surface. Needless to say, the target may be a flat plate.

Further, since the X-rays emitted from the target have a wide wavelength distribution, when observing an X-ray transmission image of the sample at a specific wavelength, an optical filter for selecting the X-ray wavelength between the target surface and the sample holder. It is preferable to configure so as to be able to interpose. The wavelength selection filter may be mounted on the target position adjustment mechanism and move together with the target.

The hand hole used when exchanging the sample holder may be provided on the end face of the sample chamber, or may be provided on the side face of the sample chamber. A transparent plate may be fitted into the lid of the handhole to observe the inside of the sample chamber so that the position adjustment and the state during operation can be confirmed. The laser beam may be introduced through the transparent plate of the handhole. In this case, the laser introduction hole can be omitted. Furthermore, the outer shell of the sample chamber, like the outer shell of the objective lens unit and the projection lens unit, should be made of a highly magnetically permeable material such as Permalloy (trade name) to prevent an external magnetic field from entering the inside. Is preferred.

[0018]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to embodiments. 1 is a cross-sectional view of the X-ray microscope sample chamber of the present embodiment when cut perpendicular to the axis, and FIG. 2 is a cross-sectional view of an example of a state where the sample chamber is incorporated in the X-ray microscope, cut along a plane including the axis. FIG. 3 is an enlarged sectional view showing a portion of the sample position adjusting mechanism. However, the sample position adjustment device is shown in FIG.
3 and FIG. 3 show a type that is fixed on a wall, whereas FIG. 2 shows a type that moves on a rail. The sample chamber 1 is attached to an end surface of an electronic image magnifying apparatus housing 5 in which an objective lens 51 and a projection lens 52 are stored.
A deflection coil 53, an optical axis adjusting element 54, and an electron beam detecting element 55 for detecting an electronic image and visualizing an X-ray image are provided downstream of the electronic image enlarging apparatus housing 5.

The optical axis adjusting element 54 is provided on the optical axis and detects an electron beam. The optical axis adjusting element 54 is used to adjust the traveling axis of the electron beam.
When used for observing a line image, noise is superimposed and it is difficult to obtain a clear image. Therefore, in order to observe the X-ray image, the electron beam is deflected by the deflection coil 53 and made incident on the electron beam detecting element 55 placed at a position deviated from the axis, so that the influence of the X-ray is eliminated before the observation. I do. Deflection coil 5
3 are provided in series to deflect the electron beam sufficiently large so as to be surely incident on the electron beam detecting element 55. During X-ray image observation, the electron beam path passing through these regions is maintained at a high vacuum. Note that a shutoff valve 56 is provided between the objective lens 51 and the projection lens 52. When the vacuum in the sample chamber 1 is broken for the purpose of exchanging the sample, the shutoff valve 56 is shut off to maintain the vacuum in the area below the projection lens 52, and the work and time required to evacuate again at the time of startup are eliminated, thereby improving work efficiency. Has been improved.

The sample chamber 1 has a thick outer shell wall 1 as a vacuum vessel.
1, a laser beam introducing nozzle 13 for introducing a laser beam to a side wall of the casing through a transparent thick plate 12, and a hand hole 15 having a transparent thick plate 14 which can be opened and closed.
, A vacuum connection nozzle 16, and a high voltage introduction terminal protection housing 17
Is provided. The housing 11 of the sample chamber 1 is provided with an opening 18 toward an anode 57 on an end face attached to the end face of the electronic image magnifying apparatus housing 5, and a peripheral portion of the opening 18 presses a flange portion of the anode 57. To stop. Further, inside the sample chamber case 11, a sample position adjusting device 20 that adjusts the position by holding the sample holder 19 and an X-ray target 21 that receives laser light and emits X-rays are held and positioned. A target position adjusting device 22 for adjustment is provided.

When the sample position adjusting device 20 is of a type fixed to a wall surface as shown in FIGS. 1 and 3, it is fixed to the peripheral portion of the opening 18. The sample position adjusting device 20 is provided with a movable stage 23, two fine movement devices 24 arranged so that their axes intersect, and a spring 25 arranged in the middle thereof to urge the movable stage 23 so as to always attract the movable stage 23. Thereby, the position can be adjusted in a direction perpendicular to the axis. The adjustment knob of the fine movement device 24 is the housing 1
1 and can be operated by a person.
Further, an electric motor may be used in place of the adjustment knob so that it can be operated remotely. The sample position adjusting device 2
When 0 is a type that can move on a rail 31 laid in the axial direction on the inner wall of the housing 11, the fine movement device 24 and the spring 25 are also configured to move together with the main body.

At the center of the movable stage 23, a through hole into which the sample holder 19 is inserted is provided.
Reference numeral 6 is formed of a conductive material. The outside of the wall portion 26 is formed of an insulating material such as a polyimide resin. The conductive wall 26 is connected to the high voltage terminal 27 and the conductor 28, and applies a negative voltage supplied from the external conductor 29 to the sample holder 19. When a negative voltage is supplied, the tip end surface of the sample holder 19 becomes a cathode, generates an electric field in cooperation with the grounded anode 57, and generates an electron accelerating space 58.
The position of the cathode can be adjusted by adjusting the length of the sample holder 19. A plurality of communication holes 30 are provided in the movable stage 23, and ventilation is performed to maintain the sample chamber 1 and the electron acceleration space 58 at almost the same pressure at any time.

The target position adjusting device 22 includes a housing 11
It is installed so as to run on rails 32 laid in the axial direction on the inner wall of the vehicle, and moves by remote control. The X-ray target 21 can be set on the gripping device of the target position adjusting device 22 and be translated and rotated so that the X-ray is always irradiated on a new portion. The X-ray transmission filter 33 for selecting the wavelength of the X-ray to be transmitted is an X-ray target
1 and the sample holder 19. The target position adjusting device 22 can be removed and removed from the rail 32 as needed. Further, it is preferable that the components mounted on the carriage are shifted from the optical axis position so that the adjusting device can be set at the optical axis position.

The laser light emitted from the laser generator 34 is guided to the vicinity of the X-ray microscope device by several reflecting mirrors 35 and passes through a reflecting mirror 37 and a converging lens 38 mounted on a laser position adjusting device 36. And the laser light introduction nozzle 1
Then, the light passes through the transparent thick plate 12 and is irradiated on the surface of the X-ray target 21. Note that a free electron laser device can be used as the laser generator 34. A hand hole 15 is provided on the side surface of the housing 11 for convenience such as removal, attachment, and adjustment of internal devices. It is preferable that the transparent thick plate 14 is fitted into the opening and closing window of the handhole 11 so that the inside of the housing 11 can be observed. When the handhole 15 is provided on the side surface of the housing 11, the laser light introduction nozzle 13 may be omitted, and the laser light may be introduced through the transparent thick plate 14 of the handhole.

The flange 3 provided on the end face of the housing 11
Although 9 can be a handhole, in this case also, it is preferable to provide a viewing window on the side surface of the housing 11 so that the inside can be observed. The sample exchange of the X-ray microscope is performed using the sample chamber 1. At the time of exchanging the sample, in a state where the space after the projection lens 52 is shut off by the shutoff valve 56 and the vacuum is maintained, the lid of the hand hole 15 of the sample chamber 1 is opened to open to the atmosphere, and the sample holder 19 is removed from the sample stage 23.
The observed sample is removed, the sample holder 19 on which a new sample slide is mounted is returned to the sample stage 23, the lid of the handhole 15 is closed, the sample chamber 1 is evacuated, and X-rays are irradiated to observe an enlarged image. I do.

FIG. 4 is a cross-sectional view showing the relationship between a sample position adjusting device and a target position adjusting device which are fixed to a wall in front of the electron acceleration space, and FIG. 5 is a perspective view of an X-ray target. A sample position adjusting device 20 is fixedly mounted on the front surface of the electron acceleration space 58 so as to be adjustable by the fine movement device 24. The target position adjusting device 22 includes a carriage 40, a target stand 41, and a filter holder 42. The target stand 41 supports the cylindrical X-ray target 21 and can translate in the axial direction of the X-ray target 21 and rotate around the axis. The filter holder 42 connects the X-ray filter 33 to the X-ray target 21 and the sample holder 1.
Support between 9 The carriage 40 is guided by a rail 32 provided on the inner wall of the sample chamber housing 11, and can move the X-ray target 21 and the X-ray filter 33 in the optical axis direction of the X-ray microscope. Further, the X-ray target 21 and the X-ray filter 33 can be retracted in a direction perpendicular to the optical axis.

After properly arranging the sample position adjusting device 20, the target position adjusting device 22 to which the X-ray target 21 and the X-ray filter 33 are attached is moved to the sample position adjusting device 20.
And a laser beam is emitted from the laser beam introduction nozzle 13. When the surface of the X-ray target 21 is irradiated with strong laser light, laser plasma is generated and X-rays are generated. The X-ray filter 33 selects the wavelength of the X-ray according to the purpose, and irradiates the X-ray to a sample slide set inside a hole of the sample holder 19. Since the surface of the X-ray target 21 is worn by the laser beam, as shown in FIG. 5, the X-ray target 21 is rotated by the target stand 41 and further translated in the axial direction to avoid the wear spot 43 and the laser is applied to a new surface. Let light hit. It goes without saying that the X-ray target 21 is not limited to a cylindrical shape but may be a flat plate or a curved plate.

FIG. 6 is a cross-sectional view showing the relationship between a sample position adjusting device and a target position adjusting device which move on a rail laid on the inner wall surface of the sample chamber outer shell 11 in the optical axis direction. The sample position adjusting device 20 includes a carriage 44, a surface plate 45 fixed thereon, and a sample stage 46 that holds the sample holder 19. The carriage 44 is used for the sample chamber housing 11.
Is guided in the direction of the optical axis of the X-ray microscope by being guided by the rail 31 provided on the inner wall of the sample, the tip of the sample holder 19 is disposed at a predetermined distance from the anode 57, and the electron acceleration space 58 is formed.

The sample stage 46 is pressed against the surface of the surface plate 45 by a spring 47, and can be appropriately moved in a plane perpendicular to the optical axis by a fine movement device 48 which can be remotely operated. The fine movement device 48 is provided in two sets so that the directions of the axes do not coincide with each other, and a spring (not shown) is disposed in the middle of the fine movement device 48 to urge the sample stage 46 so as to pull the sample stage 46, thereby eliminating play. The fine position adjustment is performed by pushing and pulling. When a sample position adjusting device of this type is used, since the electron acceleration space is open to the sample chamber, no pressure difference occurs between the front and back of the sample slide regardless of the state of the pressure in the sample chamber 1.
The breakage of a fragile sample slide composed of a photoelectric conversion film having a thin film structure can be prevented. Note that the target position adjusting device 22 may have the same configuration as that shown in FIG.

The optical axis of the X-ray microscope is sometimes adjusted in a manufacturing factory or the like, so that a powerful laser generator cannot always be used. Therefore, it is convenient that the optical axis can be adjusted using an electron beam generated by an electron gun instead of an electron beam generated by X-rays. FIG. 7 is a cross-sectional view showing a state when an electron gun used for adjustment of an X-ray microscope and a performance test is set. The performance test and the like of the X-ray microscope are performed using an electron gun 62 attached to an end face of the sample chamber 1 facing the electronic image magnifying housing 5 with a separate valve 61 interposed therebetween. A condenser lens 63 is provided in the sample chamber downstream of the separate valve 61, and a pair of deflection coils 64 are further provided.

A telescopic telescopic protection tube 65 made of a conductive material is provided downstream of the deflecting coil 64. The telescopic extension tube is engaged with a mouthpiece 66 inserted in the sample holder 19 by locking the extended end. The cylindrical body for protecting the electron beam from the electric field generated in the sample chamber 1 is connected to the sample holder 19.
It can be stretched up to. The separate valve 61 is closed when the sample chamber 1 is opened to the atmosphere to maintain the vacuum in the electron gun 62, and has an action to quickly restart the cloud bottom. The electron beam emitted from the electron gun 62 passes through the separate valve 61 and
The beam is made thinner by 3 to improve the quality of the beam, and the traveling direction of the electron beam is further adjusted by the deflection coil 64, and then enters the sample holder 19 through the nested protection tube 65.

When observing an X-ray image, the X-ray target and the X-ray filter are arranged on the optical axis.
Is arranged on the optical axis, the target position adjusting device is X
The line target and the X-ray filter need to be retracted from the optical axis position. Note that the target position adjusting device itself may be removed from the rail and removed. Optical axis adjustment, with the sample slide removed, so that the electron beam emitted from the electron gun 62 is directly incident on an electronic image magnifying mechanism composed of an objective lens and a projection lens, using a beam position sensor, The electron beam from the electron gun 62 passes through the hole of the sample holder 19 and is aligned with the axis of the electronic image magnifying mechanism.

On the other hand, in order to correctly form an X-ray image on the electron beam detecting element and to confirm the magnification of the image, it is necessary to use an electron beam generated at the sample position. Therefore,
A sample slide is set at the tip of the sample holder 19, and an X-ray target is arranged inside the sample holder 19, X-rays are generated by an electron beam emitted from the electron gun 62, and the generated X-rays are applied to the sample slide. Irradiation generates electrons, and the electron beam is preferably configured to be observed through an electron acceleration space or an electron image magnifying mechanism.

In order to prevent the magnetic field from leaking from the outside and disturbing the trajectory of the electron beam, the casing outer shell 11 has a magnetic permeability such as Permalloy (trade name) like the casing 5 of the electronic image enlarging apparatus. It is preferable to use a high material. Although FIG. 7 shows the sample position adjusting device 20 of a type fixed to a wall surface, the arrangement method of the electron gun 62 and the like does not change even when a sample position adjusting device of a type moving on a rail is used.

[0035]

As described above, the X-ray microscope sample chamber of the present invention irradiates a sample with X-rays in order to secure an electron accelerating space, easily adjust the optical position, and facilitate the exchange of the sample. By applying the resulting shadow image to a new X-ray microscope that converts it into an electronic image with a photoelectric conversion plate and observes it in an enlarged manner, it has become possible to more easily use a high-performance X-ray microscope. .

[Brief description of the drawings]

FIG. 1 is a cross-sectional view of a sample chamber of an X-ray microscope according to one embodiment of the present invention, which is cut perpendicular to an axis.

FIG. 2 is a cross-sectional view of an example of a state where the sample chamber of the present embodiment is incorporated in an X-ray microscope, cut along a plane including an axis.

FIG. 3 is an enlarged sectional view showing an example of a sample position adjusting mechanism used in the present embodiment.

FIG. 4 is a cross-sectional view showing a case where X-ray irradiation is performed using the sample position adjusting mechanism of FIG.

FIG. 5 is a perspective view illustrating an example of an X-ray target used in the present embodiment.

FIG. 6 is an enlarged sectional view showing another example of the sample position adjusting mechanism used in the present embodiment.

FIG. 7 is a partial cross-sectional view showing a state where an adjusting electron beam generator is incorporated in the sample chamber of the present embodiment.

FIG. 8 is a conceptual diagram illustrating a configuration of an X-ray microscope to which the present invention is applied.

[Explanation of symbols]

1 Sample room 5 Electronic image magnifier housing 11 outer shell wall 12 Transparent thick plate 13 Laser light introduction nozzle 14 Transparent thick plate 15 Handhole 16 Vacuum connection nozzle 17 High voltage introduction terminal protection case 18 opening 19 Sample holder 20 Sample position adjustment device 21 X-ray target 22 Target position adjustment device 23 Movable stage 24 Fine movement device 25 spring 26 Through hole wall 27 High voltage terminal 28 conductor 29 External conductor 30 communication hole 31, 32 rails 33 X-ray transmission filter 34 Laser generator 35 Reflector 36 Laser position adjusting device 37 Reflector 38 Convergent lens 39 flange 40 Target position adjustment device trolley 41 Target Stand 42 Filter Holder 43 Wear spot 44 Sample Position Adjustment Dolly 45 surface plate 46 Sample stage 47 spring 48 Fine movement device 51 Objective lens 52 Projection lens 53 deflection coil 54 Optical axis adjustment element 55 electron beam detector 56 Shut-off valve 57 Anode 58 Electron acceleration space 61 Separate valve 62 electron gun 63 condenser lens 64 deflection coil 65 Nesting type protection tube 66 mouthpiece

   ────────────────────────────────────────────────── ─── Continuation of front page    (72) Inventor Sadao Fujii             118 Futatsuka, Noda City, Chiba Prefecture Kawasaki Heavy Industries             Noda Factory Co., Ltd. (72) Inventor Mikio             118 Futatsuka, Noda City, Chiba Prefecture Kawasaki Heavy Industries             Noda Factory Co., Ltd. (72) Inventor Keiji Yada             4-25-11 Kitanakayama, Izumi Ward, Sendai City, Miyagi Prefecture F term (reference) 2G001 AA01 AA07 BA08 BA11 CA01                       CA07 GA01 GA06 GA16 HA09                       HA13 JA02 LA01 QA01                 5C001 AA01 AA02 CC08                 5C033 DD10

Claims (13)

[Claims] 1. An X-ray apparatus for observing a sample by converting a shadow formed by irradiating X-rays into an electronic image and enlarging it.
In a line microscope, a vacuum vessel having a laser light introduction hole for introducing a laser through a transparent thick plate, a hand hole that can be opened and closed, and a vacuum connection hole and a hole that is compatible with the anode in the electron acceleration space, and further has a sample inside. Equipped with a sample position adjustment mechanism that adjusts the position by gripping the holder and a target position adjustment mechanism that adjusts the position by gripping the target that receives the laser beam and emits X-rays. An X-ray microscope sample chamber, wherein the X-ray microscope is mounted so that the target is arranged at an appropriate position in the electron acceleration space, and the position of the target is adjusted so that X-rays generated accurately irradiate the sample. . 2. When adjusting the X-ray microscope,
By retracting the target position adjustment mechanism from the optical axis,
2. The X-ray microscope sample chamber according to claim 1, wherein the adjustment electron beam generator is configured to be set therein. 3. The sample position adjusting mechanism is fixed to the hole so as to cover the front surface of the anode, and includes a stage having a through hole for setting the sample holder, and the fine movement device is attached to the stage. 3. An X-ray microscope sample chamber according to claim 1, wherein the position can be finely adjusted in a plane perpendicular to the optical axis. 4. The sample position adjustment mechanism moves toward the anode, and has a through hole for setting the sample holder, and finely adjusts the position in a plane perpendicular to the optical axis by a fine movement device attached thereto. 3. The X-ray microscope sample chamber according to claim 1, further comprising a stage that can be operated. 5. The sample position adjusting mechanism moves along a rail provided on a wall of the container, and mounts a stage having a through-hole for setting the sample holder. 5. The X-ray microscope sample chamber according to claim 4, wherein the position can be finely adjusted in a plane perpendicular to the optical axis. 6. The X-ray microscope sample chamber according to claim 3, wherein a through-hole portion for setting the sample holder is formed of an aromatic polyimide resin. 7. The apparatus according to claim 3, wherein the sample chamber is further provided with a high-voltage introduction terminal so that a negative voltage for forming the electron acceleration space can be supplied to the sample holder via the stage. 7. The X-ray microscope sample chamber according to any one of 6. 8. The target position adjusting mechanism moves along a rail provided on a wall of the container, grips the target, and adjusts a position on the surface of the target where the laser light is irradiated. The X-ray microscope sample chamber according to any one of claims 1 to 7, wherein: 9. The X-ray microscope sample chamber according to claim 8, wherein the target has a cylindrical shape. 10. The X-ray microscope sample chamber according to claim 1, wherein an X-ray wavelength selection filter is mounted between the target and the sample holder. 11. The X-ray microscope sample according to claim 1, wherein the hand hole is provided on a side surface of the vacuum vessel and includes a transparent thick plate, which also serves as the laser light introducing hole. Room. 12. The X-ray microscope sample chamber according to claim 1, wherein the outer shell is formed of a material having high magnetic permeability. 13. The X-ray microscope sample chamber according to claim 1, further comprising a position adjusting mechanism for adjusting a position of the sample chamber with respect to an optical path of the laser light to be introduced.