JP2011149849A - Noncontact displacement measuring apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a noncontact displacement measuring apparatus that facilitates detecting a displacement of a workpiece in a short time. <P>SOLUTION: The noncontact displacement measuring apparatus includes: a measurement table 13 allowing the workpiece 12 to be placed thereon; first to third laser probes 35a to 35c measuring the displacement of the workpiece 12; and a first gate-shaped drive section 14A relatively movable from the measurement table 13 along a Y-axis, extended in a Z-axis direction, and having a gate shape having ends thereof located on both edges of the measurement table 13 in an X-axis direction. The first to third laser probes 35a to 35c irradiate the workpiece 12 with light, receives reflected light based on the light, and measures the displacement of the workpiece 12 based on the reflected light. The first gate-shaped drive section 14A has the first to third laser probes 35a to 35c arranged so as to irradiate the workpiece 12 with the light from at least two directions. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention relates to a non-contact displacement measuring apparatus that detects a displacement amount of a measurement target (workpiece) using a displacement meter.

  Conventionally, as in Patent Document 1, a laser probe (laser displacement meter) is used when measuring a three-dimensional shape of a workpiece. If it is the structure like patent document 1, only the displacement amount with respect to the surface of one direction of a workpiece | work can be detected with a laser probe.

  Therefore, a configuration using a laser probe attached to a swing-type head is conceivable. In other words, the amount of displacement of the workpiece with respect to the multi-directional surface can be detected by changing the posture of the laser probe with the head.

JP 2005-172610 A

  However, if the configuration is such that the laser probe is attached to the swing-type head, it takes much time to control the attitude of the laser probe. Also, it takes a lot of time to create a part program for use in posture control.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a non-contact displacement measuring device that can easily detect the amount of displacement of a workpiece in a short time.

  In order to achieve the above object, a non-contact displacement measuring apparatus according to the present invention includes a measurement table configured to be able to mount a measurement target, and a reflected light based on the light while irradiating the measurement target with light. And a displacement measuring unit that measures the amount of displacement of the object to be measured based on the reflected light and a relative movement from the measurement table along a first axis parallel to the measurement table, A gate formed in the shape of a gate that extends in a second axis direction orthogonal to the measurement table and has ends near both ends of the measurement table in a third axis direction orthogonal to the first axis and the second axis. And the gate-like drive unit is configured such that the displacement measurement unit can be arranged so as to irradiate the measurement target with light from at least two directions.

  With the above configuration, the non-contact displacement measuring apparatus according to the present invention irradiates the measurement target with light from at least two directions each time the gate-like driving unit is relatively moved along the first axis. Can be measured.

  The gate-like drive unit includes a movement mechanism configured to be able to move the displacement measurement unit along the shape of the gate-like drive unit, and the movement control unit moves the displacement measurement unit to a predetermined position of the movement mechanism. It is good also as a structure provided with.

  The gate-shaped drive unit includes a first support unit extending in the second axial direction, and a second support unit provided in a position extending in the second axial direction and away from the first support unit in the third axial direction. And a third support part provided to connect the upper part of the first support part and the upper part of the second support part, the first support part, the second support part, and the third support It is good also as a structure currently formed in gate shape by the part. The displacement measurement unit may be provided in at least any two of the first support unit, the second support unit, and the third support unit. The displacement measuring unit provided in at least one of the first support unit and the second support unit is configured to be movable in the third axis direction, and the displacement provided in the third support unit. The detection unit may be configured to be movable in the second axis direction.

  The gate-shaped drive unit may be formed in an arc shape extending in the second axis direction. The displacement measuring unit may be configured to be movable in an orthogonal direction orthogonal to a trajectory moving by the moving mechanism.

  ADVANTAGE OF THE INVENTION According to this invention, it is possible to provide the non-contact displacement measuring device which can detect the displacement amount of a workpiece | work easily in a short time.

It is a perspective view which shows the structure of the three-dimensional measuring apparatus (non-contact displacement measuring apparatus) which concerns on 1st Embodiment of this invention. It is a perspective view inside the 1st measurement unit 17A (2nd measurement unit 17B) of FIG. It is a perspective view inside the 3rd measurement unit 17C of FIG. It is a block diagram which shows the detail of the 1st-3rd laser probe 35a-35c of FIG. It is the block diagram which showed further the structure of the three-dimensional measuring machine 1 and computer system 2 which concern on 1st Embodiment of this invention. It is the schematic which shows operation | movement of the three-dimensional measuring apparatus (non-contact displacement measuring apparatus) which concerns on 1st Embodiment of this invention. It is a perspective view which shows the structure of the three-dimensional measuring apparatus (non-contact displacement measuring apparatus) which concerns on 1st Embodiment of this invention. It is a perspective view inside the 4th measurement unit 17D of FIG. It is the block diagram which showed further the structure of the three-dimensional measuring machine 1a and computer system 2 which concern on 2nd Embodiment of this invention. It is the schematic which shows operation | movement of the three-dimensional measuring apparatus (non-contact displacement measuring apparatus) which concerns on 2nd Embodiment of this invention.

  Next, an embodiment of the present invention will be described with reference to the drawings.

[First Embodiment]
(Configuration of non-contact displacement measuring apparatus according to the first embodiment)
FIG. 1 is a perspective view showing the entire three-dimensional measuring apparatus having the function of the non-contact displacement measuring apparatus according to the first embodiment. The three-dimensional measuring apparatus includes a non-contact type three-dimensional measuring machine 1 and a computer system 2 that drives and controls the three-dimensional measuring machine 1 and executes necessary data processing.

  The three-dimensional measuring machine 1 is configured as follows. That is, a measurement table 13 on which the measurement target 12 is placed is mounted on the gantry 11. The measurement table 13 is driven in the Y-axis direction by a Y-axis drive mechanism (not shown). Here, the Y-axis direction is a direction parallel to the measurement table 13 (first axis).

  A first gate-like drive unit 14A is provided across the side of the measurement table 13 and the upper part thereof. That is, the first gate-like drive unit 14A is configured to be relatively movable from the measurement table 13 along the Y-axis direction. The first gate-shaped drive unit 14A is formed in a gate shape that extends in the Z-axis direction and has end portions near both ends of the measurement table 13 in the X-axis direction. Here, the Z axis is an axis (second axis) orthogonal to the measurement table 13. The X axis is an axis (third axis) orthogonal to the Y axis and the Z axis.

  The first gate-like drive unit 14A includes first to third support arms (first to third support units) 14a to 14c. The first and second support arms 14a and 14b are provided at the center in the Y-axis direction of both side edges of the gantry 11 extending in the Y-axis direction. The first support arm 14a is formed to extend in the Z-axis direction. The second support arm 14b extends in the Z-axis direction and is provided at a position away from the first support arm 14a in the X-axis direction. The 3rd support arm 14c is provided so that the upper part of the 1st support arm 14a and the upper part of the 2nd support arm 14b may be connected. That is, the first gate-like drive unit 14A is formed in a gate shape from the first support arm 14a, the second support arm 14b, and the third support arm 14c.

  The first measurement unit 17A is supported on the first support arm 14a. The first measurement unit 17A moves in the Z-axis direction along the first support arm 14a by a Z-axis moving mechanism (not shown). A second measurement unit 17B is supported on the second support arm 14b. The second measurement unit 17B moves in the Z-axis direction along the second support arm 14b by a Z-axis movement mechanism (not shown). A third measurement unit 17C is supported on the third support arm 14c. The third measuring unit 17C moves in the X-axis direction along the third support arm 14c by an X-axis moving mechanism (not shown).

  The inside of the first measurement unit 17A is configured as shown in FIG. That is, the first slider 31a is provided so as to be movable in the Z-axis direction along the first support arm 14a, and the first X-axis guide 32a is integrally fixed to the first slider 31a. The first X-axis guide 32a is provided with a first support plate 33a that is slidable (movable) in the X-axis direction. The first support plate 33a includes a first CCD camera 34a that is an imaging means for image measurement, A first laser probe 35a which is a non-contact displacement meter (displacement measurement unit) is also provided. As a result, the first CCD camera 34a and the first laser probe 35a can move simultaneously in the three axial directions of X, Y, and Z while maintaining a fixed positional relationship. A first illumination device 36a for illuminating the imaging range is added to the first CCD camera 34a. The first CCD camera 34a is used not only for image measurement, but also for confirming the imaging range at the time of measurement by the first laser probe 35a. The first laser probe 35a has a first moving mechanism 40a for retracting (moving in the X-axis direction) the first laser probe 35a when the first measurement unit 17A is moved, and an optimum direction of the laser beam. Is supported by a first rotation mechanism 41a that rotates around the X axis.

  Note that the first CCD camera 34a captures an image parallel to the X axis and directed toward the second support arm 14b. The first laser probe 35a measures the displacement in the direction parallel to the X-axis direction and toward the second support arm 14b. That is, the first measurement unit 17A measures the side surface of the workpiece 12 on the first support arm 14a side.

  Similarly, the inside of the second measurement unit 17B is configured as shown in FIG. In other words, the second slider 31b is provided so as to be movable in the Z-axis direction along the second support arm 14b, and the second X-axis guide 32b is fixed integrally to the second slider 31b. The second X-axis guide 32b is provided with a second support plate 33b that is slidable (movable) in the X-axis direction. The second support plate 33b includes a second CCD camera 34b that is an imaging means for image measurement, A second laser probe 35b, which is a non-contact displacement meter (displacement measurement unit), is also provided. As a result, the second CCD camera 34b and the second laser probe 35b can move simultaneously in the three axial directions of X, Y, and Z while maintaining a fixed positional relationship. A second illumination device 36b for illuminating the imaging range is added to the second CCD camera 34b. The second CCD camera 34b is used not only for image measurement, but also for confirming the imaging range at the time of measurement by the second laser probe 35b. The second laser probe 35b has a second moving mechanism 40b for retracting the second laser probe 35b (moving in the X-axis direction) when the second measurement unit 17B is moved, and an optimum direction of the laser beam. Is supported by a second rotation mechanism 41b that rotates around the X axis.

  Note that the second CCD camera 34b captures an image parallel to the X axis and in a direction toward the first support arm 14a. The second laser probe 35b measures the displacement in the direction parallel to the X-axis direction and toward the first support arm 14a. That is, the second measurement unit 17B measures the side surface of the workpiece 12 on the second support arm 14b side.

  Further, the inside of the third measurement unit 17C is configured as shown in FIG. That is, the third slider 31c is provided so as to be movable in the X-axis direction along the third support arm 14c, and the Z-axis guide 32c is integrally fixed to the third slider 31c. The Z-axis guide 32c is provided with a third support plate 33c slidable (movable) in the Z-axis direction. The third support plate 33c is provided with a third CCD camera 34c as image pickup means for image measurement, A third laser probe 35c, which is a contact displacement meter (displacement measurement unit), is also provided. Thus, the third CCD camera 34c and the third laser probe 35c can move simultaneously in the three axial directions of X, Y, and Z while maintaining a fixed positional relationship. A third illumination device 36c for illuminating the imaging range is added to the third CCD camera 34c. The third CCD camera 34c is used not only for image measurement, but also for confirming the imaging range at the time of measurement by the third laser probe 35c. The third laser probe 35c has a third moving mechanism 40c for retracting the third laser probe 35c (moving in the Z-axis direction) when the third measurement unit 17C is moved, and an optimum direction of the laser beam. Is supported by a third rotation mechanism 41c that rotates around the Z-axis to be adapted to.

  Note that the third CCD camera 34c captures an image parallel to the Z axis and directed toward the measurement table 13. The third laser probe 35 c measures the displacement in the direction parallel to the Z-axis direction and toward the measurement table 13. That is, the third measurement unit 17 </ b> C measures the upper surface of the workpiece 12.

  FIG. 4 is a diagram showing details of the first laser probe 35a. The first laser probe 35a measures the amount of displacement of the workpiece 12. The first laser probe 35a irradiates the work 12 with light and receives reflected light based on the light. Then, the first laser probe 35a measures the displacement amount of the workpiece 12 based on the reflected light. The second and third laser probes 35b and 35c have the same configuration as the first laser probe 35a shown in FIG.

  In the first laser probe 35a, the light emitted from the semiconductor laser 51 passes through the beam splitter 52 and the quarter-wave plate 53, and then is collimated by the collimator lens 54, and the mirrors 55 and 56 and the objective lens 57 are passed through. A light spot is formed on the measurement part of the workpiece 12. The light reflected from the measurement unit of the workpiece 12 follows the reverse path of the mirrors 56 and 55, the collimating lens 54 and the quarter wavelength plate 53, is reflected by the beam splitter 52, and is divided into two parts by the edge mirror 58. . The light divided in the vertical direction is detected by the two-divided light receiving elements 59 and 60 positioned in the vertical direction.

  The detection circuit 61 outputs a signal corresponding to the amount of deviation from the focal position of the objective lens 57 to the measurement surface 62 of the workpiece 12 based on the output signals from the two-divided light receiving elements 59 and 60. The servo circuit 63 outputs a drive signal for driving the objective lens 57 to the drive mechanism 64 based on the detection output of the detection circuit 61. When the objective lens 57 moves up and down, the movable member 67 of the displacement detector 66 moves with respect to the fixed member 68. This movement amount is output as a displacement amount.

  FIG. 5 is a block diagram of the entire apparatus showing the configurations of the coordinate measuring machine 1 and the computer system 2 in more detail.

  In the first measurement unit 17A of the CMM 1, the image signal obtained by imaging the workpiece 12 with the first CCD camera 34a for image measurement is converted into a multivalued image by the A / D converter 71a. Thereafter, it is supplied to the computer 21. Illumination light necessary for imaging by the first CCD camera 34a is given by the first illumination control unit 74a controlling the first illumination device 36a based on the control of the computer 21. The displacement amount signal obtained from the first laser probe 35a is supplied to the computer 21 via the A / D converter 76a. Then, the first measurement unit 17 </ b> A including these is driven in the XYZ-axis direction by the XYZ-axis drive unit 77 that operates based on the control of the computer 21. The position of the first measurement unit 17A in the XYZ axis direction is detected by the XYZ axis encoder 78 and supplied to the computer 21.

  Further, in the second measurement unit 17B of the three-dimensional measuring machine 1, the image signal obtained by imaging the workpiece 12 with the second CCD camera 34b for image measurement is converted into a multi-value image by the A / D converter 71b. Is supplied to the computer 21. Illumination light necessary for imaging by the second CCD camera 34b is given by the second illumination control unit 74b controlling the second illumination device 36b based on the control of the computer 21. The displacement amount signal obtained from the second laser probe 35b is supplied to the computer 21 via the A / D converter 76b. Then, the second measurement unit 17B including these is driven in the XYZ-axis direction by the XYZ-axis drive unit 77 that operates based on the control of the computer 21. The position of the second measurement unit 17B in the XYZ axis direction is detected by the XYZ axis encoder 78 and supplied to the computer 21.

  Further, in the third measurement unit 17C of the three-dimensional measuring machine 1, an image signal obtained by imaging the work 12 with the third CCD camera 34c for image measurement is converted into a multi-value image by the A / D converter 71c. Is supplied to the computer 21. Illumination light necessary for imaging by the third CCD camera 34c is given by the third illumination control unit 74c controlling the third illumination device 36c based on the control of the computer 21. The displacement signal obtained from the third laser probe 35c is supplied to the computer 21 via the A / D converter 76c. Then, the third measurement unit 17 </ b> C including these is driven in the XYZ axis direction by the XYZ axis driving unit 77 that operates based on the control of the computer 21. The position of the third measurement unit 17C in the XYZ axis direction is detected by the XYZ axis encoder 78 and supplied to the computer 21.

  On the other hand, the computer 21 has a central control CPU 81, a multi-value image memory 82 connected to the CPU 81, a program storage unit 83, a work memory 84, interfaces 85, 86 and 88, and a multi-value image memory. And a display control unit 87 for displaying the multi-valued image data stored in 82 on the CRT 25. The multi-value image data stored in the multi-value image memory 82 is displayed on the CRT 25 by the display control operation of the display control unit 87.

  On the other hand, operator instruction information input from the keyboard 22, joystick 23 and mouse 24 is input to the CPU 81 via the interface 85. Further, the CPU 81 takes in the displacement detected by the first to third laser probes 35 a to 35 c and the XYZ coordinate information from the XYZ axis encoder 78. The CPU 81 executes various processes such as stage movement by the XYZ axis driving unit 77 and calculation processing of measured values based on the input information, the operator's instructions, and the program stored in the program storage unit 83. The work memory 84 provides a work area for various processes of the CPU 81.

  The measured values of the image measurement by the first to third CCD cameras 34 a to 34 c and the displacement measurement by the first to third laser probes 35 a to 35 c are output to the printer 26 via the interface 86. The interface 88 is for converting CAD data of the work 12 provided from an external CAD system or the like (not shown) into a predetermined format and inputting it to the computer system 21.

  The CPU 81 moves the first measurement unit 17A to a predetermined position of the Z-axis drive mechanism (Z-axis direction) of the first support arm 14a. Similarly, the CPU 81 moves the second measurement unit 17B to a predetermined position of the Z-axis drive mechanism (Z-axis direction) of the second support arm 14b. The CPU 81 moves the third measurement unit 17C to a predetermined position of the X-axis drive mechanism (X-axis direction) of the third support arm 14c.

  The CPU 81 moves the first measurement unit 17A and the second measurement unit 17B in the X-axis direction over a predetermined range. In addition, the CPU 81 moves the third measurement unit 17C in the Z-axis direction.

(Operation of the non-contact displacement measuring apparatus according to the first embodiment)
Next, the operation of the three-dimensional measurement apparatus (non-contact displacement measurement apparatus) according to the first embodiment will be described with reference to FIG. As shown in FIG. 6, in the three-dimensional measurement apparatus according to the first embodiment, the first to third measurement units 17A to 17C (first to third laser probes 35a to 35c) include the first gate-like drive unit 14A. The first to third support arms 14a to 14c are simultaneously moved relative to the measurement table 13 in the Y-axis direction. At each position in the Y-axis direction, each of the first to third measurement units 17A to 17C (first to third laser probes 35a to 35c) is driven in an independent direction. The first and second measurement units 17A and 17B (first and second laser probes 35a and 35b) are driven in the Z-axis direction. The third measurement unit 17C (third laser probe 35c) is driven in the direction along the X axis. That is, the three-dimensional measuring apparatus according to the first embodiment is configured to irradiate the workpiece 12 with laser light with three incident angles so as to irradiate the laser beam with three incident angles (first to third laser probes 35a to 35c). ). The first and second measurement units 17A and 17B (first and second laser probes 35a and 35b) also move in the X-axis direction over a predetermined range. The third measurement unit 17C (third laser probe 35c) also moves in the Z-axis direction over a predetermined range.

(Effects of the non-contact displacement measuring apparatus according to the first embodiment)
Next, the effect of the three-dimensional measuring apparatus (non-contact displacement measuring apparatus) according to the first embodiment will be described. Since the three-dimensional measuring apparatus according to the first embodiment is operable as described above, the displacement amount with respect to the three-direction surface of the workpiece 12 is changed every time the first gate-like drive unit 14A is moved in the Y-axis direction. It can be measured simultaneously. Furthermore, since the three-dimensional measurement apparatus according to the first embodiment can operate as described above, the control method for the measurement path, the measurement order, and the like is simplified as compared with the related art. Therefore, according to the first embodiment, measurement can be performed in a short time. Moreover, the creation time of the part program used for the control can also be shortened.

[Second Embodiment]
(Configuration of the non-contact displacement measuring device according to the second embodiment)
Next, with reference to FIG. 7, the structure of the three-dimensional measuring machine apparatus which has the function of the non-contact displacement measuring apparatus based on 2nd Embodiment of this invention is demonstrated. Note that in the second embodiment, identical symbols are assigned to configurations similar to those in the first embodiment and descriptions thereof are omitted.

  In the second embodiment, the configuration of the three-dimensional measuring machine 1a is mainly different from that of the first embodiment. The three-dimensional measuring machine 1a has a second gate-shaped drive unit 14B instead of the first gate-shaped drive unit 14A. The three-dimensional measuring machine 1a includes a fourth measurement unit 17D instead of the first to third measurement units 17A to 17C.

  Similar to the first embodiment, the second gate-like drive unit 14B has a gate shape that extends in the Z-axis direction and has ends near both ends of the measurement table 13 in the X-axis direction. On the other hand, unlike the first embodiment, the second gate-shaped drive unit 14B is formed in an arc shape extending in the Z-axis direction. As in the first embodiment, since the measurement table 13 is movable in the Y-axis direction, the second gate-like drive unit 14B is configured to be relatively movable from the measurement table 13 along the Y-axis direction. ing.

  The fourth measurement unit 17D is supported by the second gate-like drive unit 14B. The fourth measurement unit 17D moves in the circumferential direction R along the arc-shaped second gate-shaped drive unit 14B by a circumferential movement mechanism (not shown).

  The interior of the fourth measurement unit 17D is configured as shown in FIG. In other words, the fourth slider 31d is provided so as to be movable in the circumferential direction R, and the arcuate guide 32d is fixed integrally to the fourth slider 31d. The arcuate guide 32d is slidable (movable) in an orthogonal direction F perpendicular to the locus (circumferential direction R) in which the fourth support plate 33d moves by the circumferential movement mechanism. The fourth support plate 33d is provided with a fourth CCD camera 34d that is an imaging means for measuring an image and a fourth laser probe 35d that is a non-contact displacement meter. As a result, the fourth CCD camera 34d and the fourth laser probe 35d can move simultaneously in three directions of the Y-axis direction, the circumferential direction R, and the orthogonal direction F while maintaining a fixed positional relationship. A fourth illumination device 36d for illuminating the imaging range is added to the fourth CCD camera 34d. The fourth CCD camera 34d is used not only for image measurement, but also for confirming the imaging range at the time of measurement by the fourth laser probe 35d. The fourth laser probe 35d has a fourth moving mechanism 40d for retracting (moving in the orthogonal direction F) when the fourth measuring unit 17D is moved, and an optimum direction of the laser beam. Is supported by a fourth rotation mechanism 41d that rotates around the orthogonal direction F.

  Note that the fourth CCD camera 34 d captures an image in the orthogonal direction F toward the measurement table 13. The fourth laser probe 35 d measures the displacement in the orthogonal direction F toward the measurement table 13. That is, the fourth measurement unit 17D measures the surface of the workpiece 12 from multiple directions with one fourth CCD camera 34d.

  The fourth laser probe 35d has the same configuration as the first to third laser probes 35a to 35c shown in FIG.

  FIG. 9 is a block diagram of the entire apparatus showing the configurations of the coordinate measuring machine 1a and the computer system 2 in more detail.

  In the fourth measurement unit 17D of the three-dimensional measuring machine 1a, the image signal obtained by imaging the workpiece 12 with the fourth CCD camera 34d for image measurement is converted into a multi-value image by the A / D converter 71d. Thereafter, it is supplied to the computer 21. Illumination light necessary for imaging by the fourth CCD camera 34d is given by the fourth illumination control unit 74d controlling the first illumination device 36d based on the control of the computer 21. A displacement amount signal obtained from the fourth laser probe 35d is supplied to the computer 21 via the A / D converter 76d. The fourth measurement unit 17D including these is driven in three directions (Y-axis direction, circumferential direction R, and orthogonal direction F) by a three-direction drive unit 77a that operates based on the control of the computer 21. The position of the fourth measurement unit 17D in the three directions is detected by the three-way encoder 78a and supplied to the computer 21. In the computer 21, the positions represented in the three directions (Y-axis direction, circumferential direction R, and orthogonal direction F) can be converted into positions represented in the XYZ-axis directions.

  The CPU 81 moves the fourth measurement unit 17D to a predetermined position of the circumferential movement mechanism (circumferential direction R) of the second gate-shaped drive unit 14B. Further, the CPU 81 moves the fourth measurement unit 17D in the orthogonal direction F over a predetermined range.

(Operation of the non-contact displacement measuring apparatus according to the second embodiment)
Next, the operation of the three-dimensional measurement apparatus (non-contact displacement measurement apparatus) according to the second embodiment will be described with reference to FIG. As shown in FIG. 10, in the three-dimensional measurement apparatus according to the second embodiment, the fourth measurement unit 17D (fourth laser probe 35d) has a Y-axis relative to the measurement table 13 by the second gate-shaped drive unit 14B. Move relative to the direction. Then, at each position in the Y-axis direction, the fourth measurement unit 17D (fourth laser probe 35d) moves in the circumferential direction R along the arcuate shape of the second gate-shaped drive unit 14B. The fourth measurement unit 17D (fourth laser probe 35d) moves in the orthogonal direction F orthogonal to the locus (circumferential direction R) that moves by the circumferential movement mechanism.

(Effects of the non-contact displacement measuring apparatus according to the second embodiment)
Next, effects of the three-dimensional measuring apparatus (non-contact displacement measuring apparatus) according to the second embodiment will be described. Since the three-dimensional measuring apparatus according to the second embodiment is operable as described above, the workpiece 12 is moved each time the second gate-like drive unit 14B is moved in the Y-axis direction (at a predetermined position in the Y-axis direction). A plurality of displacements in the plane direction perpendicular to the Y-axis direction can be measured. Therefore, the three-dimensional measuring apparatus according to the second embodiment has the same effect as that of the first embodiment.

[Other Embodiments]
Although one embodiment of the present invention has been described above, the present invention is not limited to these embodiments, and various modifications, additions, substitutions, and the like are possible without departing from the spirit of the invention.

  For example, in the first and second embodiments, the first to fourth measurement units 17A to 17D are provided with the first to fourth CCD cameras 34a to 34d, but the first to fourth CCD cameras 34a to 34d (and it). A configuration in which the accompanying configuration) is omitted may be used. That is, the first to fourth measurement units 17A to 17D may be configured to be able to drive the first to fourth laser probes 35a to 35d.

  In the present embodiment, the first to fourth laser probes 35a to 35d have been described as non-contact displacement meters, but the first to fourth CCD cameras 34a to 34d may be non-contact displacement meters. The first to fourth measurement units 17A to 17D may have a configuration in which the first to fourth laser probes 35a to 35d (and the configuration associated therewith) are omitted.

  For example, the three-dimensional measurement apparatus (non-contact displacement measurement apparatus) according to the first embodiment includes the first to third measurement units 17A to 17C, but the first support arm 14a, the second support arm 14b, and Any configuration may be used as long as at least any two of the third support arms 14c are provided with measurement units. That is, the three-dimensional measurement apparatus has a configuration including only the first and second measurement units 17A and 17B, only the first and third measurement units 17A and 17C, or only the first and third measurement units 17A and 17C. May be. The three-dimensional measuring apparatus may be configured so that the measurement unit is arranged in the first gate-shaped driving unit 14A so that the workpiece 12 is irradiated with light from at least two directions.

  For example, in the first embodiment, the first support arm 14a includes only one first measurement unit 17A, but may be configured to further include a plurality of measurement units. The second support arm 14b is provided with only one second measurement unit 17B, but may be configured to further include a plurality of measurement units. Further, the third support arm 14c is provided with only one third measurement unit 17C, but may be configured to further include a plurality of measurement units. In the second embodiment, the second gate-like drive unit 14B is provided with only one fourth measurement unit 17D, but may be configured to further include a plurality of measurement units.

  DESCRIPTION OF SYMBOLS 1,1a ... Three-dimensional measuring machine, 2 ... Computer system, 11 ... Mount, 12 ... Workpiece, 13 ... Measurement table, 14A, 14B ... First, second drive mechanism, 14a-14c ... First to third support arm 17A to 17C ... 1st to 3rd measurement unit, 21 ... Computer, 22 ... Keyboard, 23 ... Joystick box, 24 ... Mouse, 25 ... CRT display, 26 ... Printer, 34a-34d ... 1st-4th CCD camera, 35a-35d ... 1st-4th laser probe, 36a-36d ... 1st-4th illuminating device, 40a-40d ... 1st-4th moving mechanism, 41a-41d ... 1st-4th rotation mechanism, 51 ... Semiconductor laser 52 ... Beam splitter 53 ... 1/4 wavelength plate 54 ... Collimating lens 55, 56 ... Mirror 57 ... Objective lens 58 ... Edge , 59, 60... Two-divided light receiving element, 61... Detection circuit, 63. Servo circuit, 64. Drive mechanism, 66. Displacement detector, 67. A / D converter, 74a to 74d ... illumination control unit, 77 ... XYZ axis drive unit, 77a ... 3-way drive unit, 78 ... XYZ-axis encoder, 78a ... 3-way encoder, 81 ... CPU, 82 ... multi-value image memory 83 ... Program storage unit, 84 ... Work memory, 85, 86, 88 ... I / F, 87 ... Display control unit.

Claims (7)

A measurement table configured to be able to place a measurement target;
A displacement measuring unit that irradiates light to the object to be measured and receives reflected light based on the light and measures the amount of displacement of the object to be measured based on the reflected light;
It is configured to be movable relative to the measurement table along a first axis parallel to the measurement table, spreads in a second axis direction orthogonal to the measurement table, and extends to the first axis and the second axis. A gate-shaped drive unit formed in a gate shape having ends in the vicinity of both ends of the measurement table in the third axis direction perpendicular to each other,
The gate-like drive unit is
The non-contact displacement measuring apparatus is configured to be able to arrange the displacement measuring unit so that light is irradiated from at least two directions to the measurement target. The gate-like drive unit is
A moving mechanism configured to be able to move the displacement measuring unit along the shape of the gate-shaped driving unit;
The non-contact displacement measuring apparatus according to claim 1, further comprising a movement control unit that moves the displacement measuring unit to a predetermined position of the moving mechanism. The gate-like drive unit is
A first support portion extending in the second axial direction;
A second support portion provided in a position extending in the second axial direction and away from the first support portion in the third axial direction;
A third support part provided to connect the upper part of the first support part and the upper part of the second support part,
The non-contact displacement measuring device according to claim 1, wherein the first support portion, the second support portion, and the third support portion are formed in a gate shape. The displacement measuring unit is
The non-contact displacement measuring device according to claim 3, wherein the non-contact displacement measuring device is provided on at least any two of the first support part, the second support part, and the third support part. The displacement measurement unit provided in at least one of the first support unit and the second support unit is configured to be movable in the third axis direction,
The non-contact displacement measuring device according to claim 3 or 4, wherein the displacement detection unit provided in the third support unit is configured to be movable in the second axial direction. The non-contact displacement measuring device according to claim 1, wherein the gate-shaped drive unit is formed in an arc shape extending in the second axis direction. The non-contact displacement measuring apparatus according to claim 6, wherein the displacement measuring unit is configured to be movable in an orthogonal direction orthogonal to a trajectory moved by the moving mechanism.

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