JP2011140060A - Tool for friction stirring treatment and contact material for vacuum valve - Google Patents

Tool for friction stirring treatment and contact material for vacuum valve Download PDF

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JP2011140060A
JP2011140060A JP2010003287A JP2010003287A JP2011140060A JP 2011140060 A JP2011140060 A JP 2011140060A JP 2010003287 A JP2010003287 A JP 2010003287A JP 2010003287 A JP2010003287 A JP 2010003287A JP 2011140060 A JP2011140060 A JP 2011140060A
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particles
friction stir
alloy
vacuum valve
stir processing
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Atsushi Yamamoto
敦史 山本
Takashi Kusano
貴史 草野
Haruka Sasaki
遥 佐々木
Kosuke Sasage
浩資 捧
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Toshiba Corp
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Toshiba Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To micronize Cr particles by applying friction stirring treatment to a surface of a Cu-Cr-based alloy. <P>SOLUTION: A tool for friction stirring treatment is provided with a shaft 1 fixed to a rotating device, a base 2 fixed to an end of the shaft 1, and a tip part 3 which is fixed to the base 2 and has a stirring groove 4 on the circumference thereof diagonally crossed to the axial direction. The tip part 3, which employs one of W, Mo, W-Re, and Mo-Re as a base material, and contains hard ceramic particles that is harder than the base material dispersed therein, frictionally stirs the Cu-Cr-based alloy chiefly used for a vacuum valve to micronize the Cr particles. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

本発明は、摩擦攪拌処理によりＣｕ−Ｃｒ系合金中のＣｒ粒子を微細化する摩擦攪拌処理用工具、およびこの摩擦攪拌処理により製造された真空バルブ用接点材料に関する。   The present invention relates to a friction stir processing tool for refining Cr particles in a Cu-Cr alloy by friction stir processing, and a contact material for a vacuum valve manufactured by the friction stir processing.

従来、突き合わせた接合部に回転する摩擦攪拌工具を挿入し、摩擦熱によって軟化させつつ攪拌することにより、一対の金属板を接合する方法が知られている。摩擦攪拌工具には、被接合金属材料よりも硬質のものが採用され、アルミニウム材のようなものでは工具鋼、鋼材のようなものでは多結晶ＣＢＮ（ＰＣＢＮ）が用いられている（例えば、特許文献１参照。）。   2. Description of the Related Art Conventionally, a method of joining a pair of metal plates by inserting a rotating friction stir tool into a butted joint and stirring while softening with frictional heat is known. The friction stir tool is harder than the metal material to be joined, such as tool steel for an aluminum material, and polycrystalline CBN (PCBN) for a steel material (for example, a patent). Reference 1).

一方、真空バルブ用接点材料においては、Ｃｕ−Ｃｒ系合金が多用されており、Ｃｒ粒子を微細化するほど、耐電圧特性を向上させることが知られている。Ｃｒ粒子の微細化においては、接点表面に高エネルギーの電子ビームを照射する方法がある（例えば、特許文献２参照。）。   On the other hand, Cu—Cr alloys are frequently used in contact materials for vacuum valves, and it is known that the withstand voltage characteristics are improved as the Cr particles are refined. In miniaturization of Cr particles, there is a method of irradiating a contact surface with a high energy electron beam (see, for example, Patent Document 2).

しかしながら、電子ビームでの処理では、設備、処理時間などの面から高コストとなり、工業的には困難さを伴っていた。そこで、Ｃｒ粒子の微細化に、低コストが期待できる摩擦攪拌処理を検討する必要性が出た。   However, the processing with an electron beam is costly in terms of equipment, processing time, and the like, and is difficult industrially. Therefore, it has become necessary to study a friction stir treatment that can be expected to be low in cost for the refinement of Cr particles.

特開２００６−２９７４１８号公報 （第５ページ、図１）JP 2006-297418 A (Page 5, FIG. 1) 特開平６−３４９３８７号公報 （第３ページ、図１）JP-A-6-349387 (3rd page, FIG. 1)

上記の従来の摩擦攪拌工具を用いて真空バルブ用接点材料を処理する場合においては、次のような問題がある。Ｃｕ−Ｃｒ系合金では、Ｃｒが硬質金属粒子のため、工具鋼を用いると、消耗量が大きくなる。また、ＰＣＢＮでは、消耗量を抑えることができるものの、硬質金属粒子同士の衝突により、亀裂が生じたり破損することがある。   In the case of processing the contact material for a vacuum valve using the above conventional friction stir tool, there are the following problems. In a Cu—Cr alloy, since Cr is a hard metal particle, the amount of wear increases when tool steel is used. In PCBN, although the consumption amount can be suppressed, a crack may occur or break due to collision of hard metal particles.

このため、Ｃｕ−Ｃｒ系合金を摩擦攪拌処理しても、これに耐え得る消耗量の少ない摩擦攪拌処理用工具、およびＣｒ粒子の微細化ができ、耐電圧特性の向上を図ることのできる真空バルブ用接点材料を得ることが望まれていた。なお、Ｃｒ−Ｃｒ系合金中に摩擦攪拌処理用工具が磨耗した成分が含有されることは許容する。   For this reason, even if the Cu-Cr alloy is subjected to friction stir processing, a friction stir processing tool that can withstand this, and a friction stir processing tool that can withstand a small amount, and Cr particles that can be refined, can improve the withstand voltage characteristics. It has been desired to obtain a contact material for a valve. It should be noted that the Cr—Cr-based alloy is allowed to contain a component worn by the friction stir processing tool.

本発明は上記問題を解決するためになされたもので、Ｃｕ−Ｃｒ系合金の表面に摩擦攪拌処理を施し、Ｃｒ粒子の微細化を図ることのできる摩擦攪拌処理用工具、およびその摩擦攪拌処理により製造される真空バルブ用接点材料を提供することを目的とする。   The present invention has been made to solve the above-mentioned problem. A friction stir processing tool capable of subjecting the surface of a Cu-Cr alloy to friction stir processing to reduce the size of Cr particles, and the friction stir processing. An object of the present invention is to provide a contact material for a vacuum valve manufactured by the above method.

上記目的を達成するために、本発明の摩擦拡散処理用工具は、回転装置に固定される軸部と、前記軸部の端部に固定された基部と、前記基部に固定されるとともに、外周に軸方向に対して斜めに横切る攪拌溝を設けた先端部とを備えた摩擦攪拌処理用工具であって、前記先端部は、基材にＷ、Ｍｏ、Ｗ−Ｒｅ、Ｍｏ−Ｒｅのいずれか１つの材料を用い、前記基材よりも硬い硬質セラミックス粒子を分散させていることを特徴とする。
また、本発明の真空バルブ用接点材料は、接離自在の一対の接点を有する真空バルブ用接点材料であって、前記接点は、Ｃｕ−Ｃｒ系合金であり、前記Ｃｕ−Ｃｒ系合金は、基材にＷ、Ｍｏ、Ｗ−Ｒｅ、Ｍｏ−Ｒｅのいずれか１つの材料を用い、前記基材よりも硬い硬質セラミックス粒子を分散した摩擦攪拌処理用工具により摩擦攪拌処理され、その表面の前記Ｃｒが微細化されていることを特徴とする。 In order to achieve the above object, a friction diffusion processing tool of the present invention includes a shaft portion fixed to a rotating device, a base portion fixed to an end portion of the shaft portion, a base portion fixed to the base portion, and an outer periphery. A friction stir processing tool provided with a tip portion provided with a stirring groove obliquely crossing with respect to the axial direction, and the tip portion is any of W, Mo, W-Re, and Mo-Re on the base material. One material is used, and hard ceramic particles harder than the base material are dispersed.
Further, the contact material for a vacuum valve of the present invention is a contact material for a vacuum valve having a pair of contactable and separable contacts, wherein the contact is a Cu-Cr alloy, and the Cu-Cr alloy is Using any one material of W, Mo, W-Re, and Mo-Re for the base material, the base material is subjected to friction stir processing with a tool for friction stir processing in which hard ceramic particles harder than the base material are dispersed. Cr is miniaturized.

本発明によれば、硬質の分散粒子を含有した摩擦攪拌処理用工具を用い、Ｃｕ−Ｃｒ系合金の表面を摩擦攪拌処理するので、摩擦攪拌処理用工具の消耗量が少なく、Ｃｒ粒子を微細化することができる。   According to the present invention, the friction stir processing is performed on the surface of the Cu-Cr alloy using the friction stir processing tool containing hard dispersed particles, so that the consumption amount of the friction stir processing tool is small and the Cr particles are finely divided. Can be

本発明の実施例に係る摩擦攪拌処理用工具の構成を示す図。The figure which shows the structure of the tool for friction stirring processing which concerns on the Example of this invention. 本発明の実施例に係る摩擦攪拌処理用工具の組織を説明する図。The figure explaining the structure | tissue of the tool for friction stirring processing which concerns on the Example of this invention. 本発明の実施例に係る真空バルブ用接点材料の組織を説明する図。The figure explaining the structure | tissue of the contact material for vacuum valves which concerns on the Example of this invention.

摩擦攪拌処理用工具は、Ｗ、Ｒｅ、Ｍｏを主成分とする合金または純金属に、ＰＣＢＮ、ダイヤモンド、ＷＣの粒子などの硬質セラミックス粒子からなる分散粒子を含有したものである。また、真空バルブ用接点材料は、Ｃｕ−Ｃｒ系合金であり、接離する表面が摩擦攪拌処理され、Ｃｒ粒子の微細化が図られている。以下、図面を参照して本発明の実施例を説明する。   The friction stir processing tool contains dispersed particles made of hard ceramic particles such as PCBN, diamond, and WC particles in an alloy or pure metal mainly composed of W, Re, and Mo. Further, the contact material for the vacuum valve is a Cu—Cr alloy, and the contacting / separating surfaces are subjected to a frictional stirring process so that the Cr particles are miniaturized. Embodiments of the present invention will be described below with reference to the drawings.

本発明の実施例に係る摩擦攪拌処理用工具および真空バルブ用接点材料を図１〜図３を参照して説明する。図１は、本発明の実施例に係る摩擦攪拌処理用工具の構成を示す図、図２は、本発明の実施例に係る摩擦攪拌処理用工具の組織を説明する図、図３は、本発明の実施例に係る真空バルブ用接点材料の組織を説明する図である。   A friction stir processing tool and a vacuum valve contact material according to an embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a diagram illustrating the configuration of a friction stir processing tool according to an embodiment of the present invention, FIG. 2 is a diagram illustrating the structure of the friction stir processing tool according to an embodiment of the present invention, and FIG. It is a figure explaining the structure | tissue of the contact material for vacuum valves which concerns on the Example of invention.

（摩擦攪拌処理用工具）
図１に示すように、摩擦攪拌処理用工具は、図示しない回転装置に固定される軸部１と、軸部１の端部（軸面）に固定された軸部１よりも直径の大きい円柱状の基部２と、基部２の反軸部１側の中央部に固定された基部２よりも底部の直径が小さい円錐状の先端部３とで構成されている。先端部３の外周には、軸方向に対して斜めに横切るねじ状の攪拌溝４が設けられている。攪拌溝４の幅および深さは、それぞれ１ｍｍである。先端部３の高さは６ｍｍ、底部の直径は１２ｍｍである。なお、軸部１と基部２と先端部３とは、軸線上に配置される。 (Friction stir processing tool)
As shown in FIG. 1, the friction stir processing tool includes a shaft portion 1 fixed to a rotating device (not shown), and a circle having a diameter larger than that of the shaft portion 1 fixed to an end portion (shaft surface) of the shaft portion 1. The base portion 2 includes a columnar base portion 2 and a conical tip portion 3 having a bottom diameter smaller than that of the base portion 2 fixed to the central portion of the base portion 2 on the side opposite to the shaft 1. On the outer periphery of the tip portion 3, there is provided a screw-like stirring groove 4 that crosses obliquely with respect to the axial direction. The width and depth of the stirring groove 4 are each 1 mm. The tip 3 has a height of 6 mm, and the bottom has a diameter of 12 mm. In addition, the axial part 1, the base 2, and the front-end | tip part 3 are arrange | positioned on an axis line.

また、図２に示すように、先端部３の基材５は、Ｗ、Ｍｏの純金属、またはこれらとＲｅとの合金からなっている。また、ほぼ均一に分散させる分散粒子６としては、一辺数１０μｍのＰＣＢＮ粒子、ダイヤモンド粒子、ＷＣ粒子などの硬質セラミックス粒子を含有させた。分散粒子６は、鋭角になり易いので、大きさを辺の長さで表した。分散粒子６は、基材５よりも硬質であり、また、基材５は、Ｃｕ−Ｃｒ系合金よりも硬質である。   As shown in FIG. 2, the base material 5 of the tip 3 is made of a pure metal of W or Mo, or an alloy of these and Re. Further, as dispersed particles 6 to be dispersed almost uniformly, hard ceramic particles such as PCBN particles, diamond particles, and WC particles having a side number of 10 μm were contained. Since the dispersed particles 6 are likely to have an acute angle, the size is represented by the length of the side. The dispersed particles 6 are harder than the base material 5, and the base material 5 is harder than the Cu—Cr alloy.

（摩擦攪拌処理用工具の評価方法）
軸部１の回転速度６００ｒｐｍ、移動速度１ｍｍ／ｓとし、基部２の面が被摩擦攪拌面に接する程度まで押圧しながら一方向に１００ｍｍ移動させたときの消耗量を測定した。先端部３は全周に亙って消耗するが、先端部３の高さの消耗が５％以下（０．３ｍｍ以下）のときを良好とした。 (Evaluation method of friction stir processing tool)
The amount of consumption was measured when the shaft 1 was moved 100 mm in one direction while pressing until the rotation speed of the shaft 1 was 600 rpm and the movement speed was 1 mm / s and the surface of the base 2 was in contact with the friction stir surface. The tip 3 is consumed over the entire circumference, but it is considered good when the height of the tip 3 is 5% or less (0.3 mm or less).

（Ｃｕ−Ｃｒ系合金の微細性）
図３に示すように、Ｃｕマトリックス７中に粒径数１００μｍの第１のＣｒ粒子８を分散させたＣｕ−Ｃｒ系合金の表面を摩擦攪拌処理し、微細化された第２のＣｒ粒子９の大きさを計測した。断面を走査電子顕微鏡で観察し、所定の線上に形成されたＣｕ／Ｃｒ界面の数をカウントした。そして、摩擦攪拌処理前と比較して１０倍以上の界面が形成されているものを良好とした。 (Fineness of Cu-Cr alloy)
As shown in FIG. 3, the surface of the Cu—Cr alloy in which the first Cr particles 8 having a particle size of several hundred μm are dispersed in the Cu matrix 7 is subjected to a frictional stirring treatment, and the refined second Cr particles 9 are obtained. The size of was measured. The cross section was observed with a scanning electron microscope, and the number of Cu / Cr interfaces formed on a predetermined line was counted. And the thing in which the interface of 10 times or more was formed compared with the friction stirring process before was made favorable.

以下、表１を参照して、基材５の材質、および分散粒子６の材質を種々変えたときの結果を説明する。   Hereinafter, the results when the material of the base material 5 and the material of the dispersed particles 6 are variously changed will be described with reference to Table 1.

（比較例１、実施例１）
比較例１では、先端部３の基材５にＰＣＢＮの純金属を用い、Ｃｕ−２５ｗｔ％Ｃｒ合金を摩擦攪拌処理した。第２のＣｒ粒子９は、Ｃｕ／Ｃｒの界面数が１５倍と微細化されているが、消耗率が３０％と大きかった。 (Comparative Example 1, Example 1)
In Comparative Example 1, a pure metal such as PCBN was used for the base material 5 of the tip portion 3 and a Cu-25 wt% Cr alloy was subjected to a frictional stirring treatment. The second Cr particles 9 were refined with the number of Cu / Cr interfaces being 15 times, but the consumption rate was as large as 30%.

実施例１では、先端部３の基材５にＷ−Ｒｅ合金を用い、分散粒子６としてＰＣＢＮを１０ｗｔ％含有させ、Ｃｕ−２５ｗｔ％Ｃｒ合金を摩擦攪拌処理した。その結果、消耗率は２％であり、第２のＣｒ粒子９は１１倍に微細化されていた。これは、基材５が回転し、Ｃｒ粒子８、９に衝突しても、ＰＣＢＮ粒子の方が硬く、更にＷ−Ｒｅ合金でその衝撃を吸収するので、破損による消耗が軽減されたものと推察できる。また、先端部３が円錐状であり、軸方向に対して斜めに横切る攪拌溝４を設けているので、消耗を抑えながら、攪拌溝４により攪拌が促進されたものと推察できる。   In Example 1, a W—Re alloy was used for the base material 5 of the tip 3, 10 wt% of PCBN was contained as the dispersed particles 6, and a Cu-25 wt% Cr alloy was subjected to friction stirring. As a result, the consumption rate was 2%, and the second Cr particles 9 were refined 11 times. This is because even if the base material 5 rotates and collides with the Cr particles 8 and 9, the PCBN particles are harder and the impact is absorbed by the W-Re alloy, so that consumption due to breakage is reduced. I can guess. Moreover, since the tip part 3 is conical and the stirring groove 4 that is obliquely crossed with respect to the axial direction is provided, it can be inferred that stirring was promoted by the stirring groove 4 while suppressing wear.

（実施例２〜４）
基材５に、実施例２ではＭｏ−Ｒｅ合金、実施例３ではＷ、実施例４ではＭｏを用い、分散粒子６にＰＣＢＮを１０ｗｔ％含有させ、Ｃｕ−２５ｗｔ％Ｃｒ合金を摩擦攪拌処理した。その結果、消耗率はいずれも２％であり、第２のＣｒ粒子９は１０倍以上に微細化され、良好であった。 (Examples 2 to 4)
The base material 5 was Mo-Re alloy in Example 2, W was used in Example 3, Mo was used in Example 4, 10 wt% of PCBN was contained in the dispersed particles 6, and a Cu-25 wt% Cr alloy was friction-stirred. . As a result, the consumption rate was 2% in all cases, and the second Cr particles 9 were refined 10 times or more and were good.

（実施例５、６）
実施例５では、Ｗ−Ｒｅ合金の基材５に、分散粒子６としてダイヤモンドを１０ｗｔ％含有させ、Ｃｕ−２５ｗｔ％Ｃｒ合金を摩擦攪拌処理した。また、実施例６では、Ｗ−Ｒｅ合金の基材５に、分散粒子６としてＷＣを１０ｗｔ％含有させ、Ｃｕ−２５ｗｔ％Ｃｒ合金を摩擦攪拌処理した。その結果、消耗率はいずれも２％であり、第２のＣｒ粒子９は１３倍以上に微細化され、良好であった。 (Examples 5 and 6)
In Example 5, 10 wt% of diamond as dispersed particles 6 was contained in the base material 5 of W-Re alloy, and a Cu-25 wt% Cr alloy was subjected to friction stirring. In Example 6, the W-Re alloy base material 5 was made to contain 10 wt% of WC as the dispersed particles 6, and the Cu-25 wt% Cr alloy was subjected to friction stirring. As a result, the consumption rate was 2% in all cases, and the second Cr particles 9 were refined 13 times or more and were good.

（比較例２、３、実施例７〜９）
比較例２、３、実施例７〜９では、Ｗ−Ｒｅ合金の基材５に、分散粒子６としてＰＣＢＮを２〜５０ｗｔ％含有させ、Ｃｕ−２５ｗｔ％Ｃｒ合金を摩擦攪拌処理した。その結果、ＰＣＢＮを５〜４０ｗｔ％含有させた実施例７〜９において、消耗率が５％以下であり、第２のＣｒ粒子９が１０倍以上に微細化され、良好であった。 (Comparative Examples 2 and 3, Examples 7 to 9)
In Comparative Examples 2 and 3 and Examples 7 to 9, the substrate 5 of W-Re alloy was made to contain 2 to 50 wt% of PCBN as the dispersed particles 6, and the Cu-25 wt% Cr alloy was subjected to friction stir processing. As a result, in Examples 7 to 9 containing 5 to 40 wt% of PCBN, the consumption rate was 5% or less, and the second Cr particles 9 were refined 10 times or more, which was good.

比較例２では、ＰＣＢＮが２ｗｔ％であり、第２のＣｒ粒子９を微細化することができるものの、消耗率が１５％と大きかった。比較例３では、ＰＣＢＮが５０ｗｔ％であり、工具の欠損が抑制できず、消耗率が１０％と大きかった。   In Comparative Example 2, PCBN was 2 wt%, and the second Cr particles 9 could be refined, but the consumption rate was as large as 15%. In Comparative Example 3, PCBN was 50 wt%, and tool failure could not be suppressed, and the wear rate was as large as 10%.

なお、表１には記していないが、実施例１と同様なＷ−Ｒｅ合金に、ＰＣＢＮを１０ｗｔ％含有させた工具を用い、Ｃｕ−１０ｗｔ％Ｃｒ合金、およびＣｕ−５０ｗｔ％Ｃｒ合金の摩擦研磨処理を行った。いずれの合金も、工具の消耗率が２％以下であり、第２のＣｒ粒子９の微細化を図ることができた。   Although not shown in Table 1, using a tool containing 10 wt% PCBN in the same W-Re alloy as in Example 1, friction of Cu-10 wt% Cr alloy and Cu-50 wt% Cr alloy Polishing treatment was performed. In any alloy, the wear rate of the tool was 2% or less, and the second Cr particles 9 could be refined.

このようにＣｕ−Ｃｒ系合金中の第１のＣｒ粒子８を摩擦攪拌処理によって、第２のＣｒ粒子９のように微細化することができるので、この接点を用いた真空バルブは耐電圧特性を向上させることができる。Ｃｕ−Ｃｒ系合金中には、補助成分としてＢｉ、Ｔｅ、Ｓｂなどを添加し、諸特性を向上させることもできる。   Thus, since the first Cr particles 8 in the Cu-Cr alloy can be made finer as the second Cr particles 9 by the friction stir processing, the vacuum valve using this contact has a withstand voltage characteristic. Can be improved. In the Cu—Cr alloy, Bi, Te, Sb and the like can be added as auxiliary components to improve various properties.

なお、微細化された第２のＣｒ粒子９側は、真空バルブ用接点材料の接離面となり、微量の基材５材料と分散粒子６が含有されることになる。今回の場合、その含有率は、消耗量と同様のほぼ５ｗｔ％以下となる。基材５としては、Ｗ、Ｍｏ、Ｗ−Ｒｅ合金、Ｍｏ−Ｒｅ合金があり、また、分散粒子６としては、ＰＣＢＮ、ダイヤモンド、ＷＣがあるが、先端部３の成分量から基材５に用いた材料の方の量が多いものとなる。しかしながら、この種の材料の混入で耐電圧特性を低下させるものではない。   The refined second Cr particle 9 side becomes a contact / separation surface of the contact material for the vacuum valve, and contains a small amount of the base material 5 and the dispersed particles 6. In this case, the content is about 5 wt% or less, which is the same as the consumption amount. As the base material 5, there are W, Mo, W—Re alloy, and Mo—Re alloy, and as the dispersed particles 6, there are PCBN, diamond, and WC. The amount of material used is larger. However, the withstand voltage characteristics are not lowered by mixing this kind of material.

上記実施例の摩擦攪拌処理用工具によれば、ＰＣＢＮ、ダイヤモンド、ＷＣなどの分散粒子６（硬質セラミックス粒子）を基材５中に分散させ、摩擦攪拌処理によりＣｕ−Ｃｒ系合金のＣｒ粒子８、９を微細化するので、工具の消耗量が少なく、また、低コストで真空バルブ用接点材料を製造することができる。

Figure 2011140060
According to the friction stir processing tool of the above embodiment, dispersed particles 6 (hard ceramic particles) such as PCBN, diamond and WC are dispersed in the base material 5 and Cr particles 8 of a Cu—Cr alloy are obtained by the friction stir processing. 9 is miniaturized, the amount of tool consumption is small, and a contact material for a vacuum valve can be manufactured at low cost.
Figure 2011140060

１ 軸部
２ 基部
３ 先端部
４ 攪拌溝
５ 基材
６ 分散粒子
７ Ｃｕマトリックス
８ 第１のＣｒ粒子
９ 第２のＣｒ粒子 DESCRIPTION OF SYMBOLS 1 Shaft part 2 Base part 3 Tip part 4 Stirring groove 5 Base material 6 Dispersion particle 7 Cu matrix 8 1st Cr particle 9 2nd Cr particle

Claims (6)

回転装置に固定される軸部と、
前記軸部の端部に固定された基部と、
前記基部に固定されるとともに、外周に軸方向に対して斜めに横切る攪拌溝を設けた先端部とを備えた摩擦攪拌処理用工具であって、
前記先端部は、基材にＷ、Ｍｏ、Ｗ−Ｒｅ、Ｍｏ−Ｒｅのいずれか１つの材料を用い、前記基材よりも硬い硬質セラミックス粒子を分散させていることを特徴とする摩擦攪拌処理用工具。 A shaft portion fixed to the rotating device;
A base fixed to an end of the shaft;
A friction stir processing tool provided with a tip portion provided with a stirring groove that is fixed to the base portion and obliquely crosses the axial direction on the outer periphery,
Friction stir processing characterized in that the tip portion uses any one material of W, Mo, W-Re, and Mo-Re as a base material, and hard ceramic particles harder than the base material are dispersed. Tools. 前記硬質セラミックス粒子は、ＰＣＢＮ、ダイヤモンド、ＷＣのいずれか１つであることを特徴とする請求項１に記載の摩擦攪拌処理用工具。   The friction stir processing tool according to claim 1, wherein the hard ceramic particles are any one of PCBN, diamond, and WC. 前記硬質セラミックス粒子を５〜４０ｗｔ％としたことを特徴とする請求項１または請求項２に記載の摩擦攪拌処理用工具。   The friction stir processing tool according to claim 1 or 2, wherein the hard ceramic particles are 5 to 40 wt%. 接離自在の一対の接点を有する真空バルブ用接点材料であって、
前記接点は、Ｃｕ−Ｃｒ系合金であり、
前記Ｃｕ−Ｃｒ系合金は、基材にＷ、Ｍｏ、Ｗ−Ｒｅ、Ｍｏ−Ｒｅのいずれか１つの材料を用い、前記基材よりも硬い硬質セラミックス粒子を分散した摩擦攪拌処理用工具により摩擦攪拌処理され、その表面の前記Ｃｒが微細化されていることを特徴とする真空バルブ用接点材料。 A contact material for a vacuum valve having a pair of contactable and separable contacts,
The contact is a Cu-Cr alloy,
The Cu—Cr alloy is rubbed by a friction stir processing tool in which hard ceramic particles harder than the base material are dispersed using any one of W, Mo, W—Re, and Mo—Re as a base material. A contact material for a vacuum valve, characterized in that the Cr on the surface is agitated and refined. 前記Ｃｕ−Ｃｒ系合金中に、前記Ｗ、前記Ｍｏ、前記Ｗ−Ｒｅ、前記Ｍｏ−Ｒｅのいずれか１つの金属が含有されていることを特徴とする請求項４に記載の真空バルブ用接点材料。   5. The contact for a vacuum valve according to claim 4, wherein the Cu-Cr alloy contains one of the metals W, Mo, W-Re, and Mo-Re. material. 前記Ｃｒは、１０〜５０ｗｔ％含有されていることを特徴とする請求項４または請求項５に記載の真空バルブ用接点材料。   The contact material for a vacuum valve according to claim 4 or 5, wherein the Cr is contained in an amount of 10 to 50 wt%.
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JP2013031863A (en) * 2011-08-01 2013-02-14 Sumitomo Electric Ind Ltd Tool for friction stir welding
CN103920984A (en) * 2014-04-03 2014-07-16 长春三友汽车部件制造有限公司 Combined type stirring, rubbing and welding head manufactured by using double materials and manufacturing process thereof
WO2019213474A1 (en) * 2018-05-04 2019-11-07 Mazak Corporation Low-cost friction stir processing tool
CN113245688A (en) * 2021-06-22 2021-08-13 宁波齐云新材料技术有限公司 Friction stirring head special for low-carbon alloy steel
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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013031863A (en) * 2011-08-01 2013-02-14 Sumitomo Electric Ind Ltd Tool for friction stir welding
CN103920984A (en) * 2014-04-03 2014-07-16 长春三友汽车部件制造有限公司 Combined type stirring, rubbing and welding head manufactured by using double materials and manufacturing process thereof
US11458564B2 (en) 2017-08-31 2022-10-04 Mazak Corporation Devices, systems, and methods for increased wear resistance during low temperature friction stir processing
WO2019213474A1 (en) * 2018-05-04 2019-11-07 Mazak Corporation Low-cost friction stir processing tool
US11440133B2 (en) 2018-05-04 2022-09-13 Mazak Corporation Low-cost friction stir processing tool
CN113245688A (en) * 2021-06-22 2021-08-13 宁波齐云新材料技术有限公司 Friction stirring head special for low-carbon alloy steel
CN113245688B (en) * 2021-06-22 2021-11-02 宁波齐云新材料技术有限公司 Friction stirring head special for low-carbon steel

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