JP2011134506A - Contact device, relay using the same, and micro relay - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a contact device in which designing is easy and moreover shocks at the time of closing between contacts are alleviated without degrading opening and closing performance between the contacts and a contact pressure of the contacts can be secured, and provide a relay using the same and a micro relay. <P>SOLUTION: The contact device includes a fixed contact 10, a moving contact 21a, a moving part 2, and a base 1, and the moving part 2 includes a stopper 20a for regulating a displacement amount of the moving part 2 by contacting with a part opposed to the base 1, and a shock absorbing member 11 for absorbing shocks at the time of contact when it contacts with a stopper 20a. The shock absorbing member 11 is composed of a soft material which has a similar resistance to a rigid body at the moment it contacts with other member and deforms thereafter so that there may be almost no spring constant while in contact. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a contact device, a relay using the contact device, and a micro relay.

  Conventionally, in order to prevent contact deformation and contact sticking, a contact device having a structure for reducing the impact when the contacts are closed and securing the contact pressure of the contacts is known. For example, it is disclosed in Patent Document 1. As shown in FIG. 10A, the contact device (contact switching device) described in Patent Document 1 includes a base 700 and a fixed contact in which a base end portion is fixed to the base 700 and a fixed contact 701 a is provided at a distal end portion. A plate 701, a movable spring 703 having a base end fixed to a movable contact terminal 702, and a distal end 703b provided with a movable contact 703a contacting and separating from the fixed contact 701a, and a movable spring so as to perform an opening / closing operation between the contacts And a driving member 704 for driving 703. Then, when the contacts are closed, the operation restricting member 705 made of an insulating material that comes into contact with the movable spring 703 and opens after the contacts are closed is fixed to the fixed contact plate 701. Has been.

  The operation of the conventional example will be described below with reference to the drawings. FIG. 10B shows a state where the contacts are separated and the drive member 704 is in contact with the movable spring 703. When the drive member 704 drives the movable spring 703, as shown in FIG. 10C, first, the restriction of the operation restricting member 705 in which the tip portion 703b of the movable spring 703 protrudes from the contact surface of the fixed contact 701a. It abuts on the tip surface of the piece 705a. Subsequently, as shown in FIG. 10D, the movable contact 703a contacts the fixed contact 701a in a state where the movable spring 703 is in contact with the operation restricting member 705, and the contact is closed. Thereafter, the movable spring 703 is further driven by the drive member 704, and when the deflection becomes large, as shown in FIG. 10 (e), the distal end portion 703b is separated from the distal end surface of the regulating piece 705a, and the contact has contact pressure. Stand still.

  As described above, when the gap between the contacts is closed, the tip portion 703b of the movable spring 703 comes into contact with the restriction piece 705a of the operation restriction member 705, so that the speed of the movable spring 703 can be reduced. Thus, the contact bounce time is reduced by reducing the impact caused by the collision between the contacts when the contacts are closed. Further, since the movable spring 703 is separated from the operation restricting member 705 after the contact is closed, the contact pressure of the contact is ensured.

JP-A-6-203726

  By the way, in the above conventional example, after the contact is closed, the distal end portion 703b of the movable spring 703 is moved away from the operation regulating member 705, and the distal end portion 703b of the movable spring 703 and the regulating piece 705a of the movable regulating member 705 are separated. There must be enough space between them. For this reason, the movable spring 703 has to be overtraveled even after the contacts are closed, and it is necessary to design in consideration of the amount of overtravel, which makes it difficult to design.

  Moreover, in the said prior art example, the intrinsic surface of each contact is exposed by daringly sliding contacts using overtravel. By exposing the intrinsic surface in this way, the contact resistance at the time of closing between the contacts is reduced. However, in a micro relay or the like manufactured by a semiconductor microfabrication technique, each contact is formed very thin. Therefore, when the contacts are slid as described above, each contact is worn. Furthermore, if the intrinsic surface of each contact is exposed, the contacts may stick together, and there is a problem that the switching performance between the contacts generally deteriorates. For this reason, in the micro relay or the like, the configuration of the above-described conventional example cannot be adopted for the purpose of alleviating the impact when the contacts are closed and ensuring the contact pressure of the contacts.

  The present invention has been made in view of the above points, is easy to design, and reduces the impact at the time of closing between the contacts without degrading the opening / closing performance between the contacts. It is an object of the present invention to provide a contact device capable of ensuring pressure, a relay using the contact device, and a micro relay.

  In order to achieve the above object, the first aspect of the present invention provides a fixed contact, a movable contact that can be brought into contact with and separated from the fixed contact, a position having the movable contact and a position at which the movable contact comes into contact with the fixed contact A contact unit including a movable part swingable between and a base part provided at a distance from the movable part and provided with a fixed contact on one surface in the thickness direction. Either of them includes a stopper that regulates the amount of displacement of the movable part by abutting with the opposing part of the movable part or the base part, and shock absorption that absorbs the impact when abutting with the stopper or the movable part. The shock absorbing member is made of a soft material that has a resistance similar to a rigid body at the moment of contact with another member and is deformed so that there is almost no spring constant during the subsequent contact. And

  The invention of claim 2 is characterized in that, in the invention of claim 1, the shock absorbing member is made of polydimethylsiloxane.

  The invention of claim 3 is characterized in that, in the invention of claim 1 or 2, the shock absorbing member is arranged so as to always contact the movable portion along the swinging direction.

  According to a fourth aspect of the present invention, in the first or second aspect of the present invention, the stopper is provided in the movable portion, and a concave portion recessed in the thickness direction of the base portion is provided in a portion of the base portion that faces the stopper, The absorbing member is formed in a film shape and is disposed so as to cover the opening surface of the recess.

  According to a fifth aspect of the present invention, in the fourth aspect of the present invention, the movable part is swingable with a fulcrum protrusion provided on the movable part as a fulcrum, and a movable contact and a stopper are respectively provided at both ends sandwiching the fulcrum protrusion. A fixed contact is disposed on the base so as to face each movable contact, and the recess is filled with fluid in a space covered with the shock absorbing member, and faces each stopper in the recess. It has the flow path which mutually connects the site | parts to perform.

  According to a sixth aspect of the present invention, in the first or second aspect of the present invention, the movable portion is swingable with a fulcrum projection provided on the movable portion as a fulcrum. A stopper is provided, a fixed contact is provided on the base portion so as to face each movable contact, and a concave portion that is depressed in the thickness direction of the base portion is provided on a portion facing the stopper to absorb shock. The member includes a first shock absorbing member disposed so as to be always in contact with the movable portion along the swinging direction, and a second member disposed in a film shape so as to cover the opening surface of the recess. The recess includes an impact absorbing member, and the recess has a flow path that fills a space covered with the second impact absorbing member and connects portions of the recess facing each stopper to each other. And

  The invention of claim 7 is characterized in that, in the invention of claim 5 or 6, the concave portion is filled with a liquid having viscosity.

  An eighth aspect of the invention includes the contact device according to any one of the first to seventh aspects, and a drive device that drives the movable portion so that the movable contact comes in contact with and separates from the fixed contact. Features.

  A ninth aspect of the invention is the relay according to the eighth aspect, wherein the driving device comprises an electromagnet device that swings the movable portion by generating a magnetic field made of a magnetic material and attracting an armature provided on the movable portion. A base formed of a substrate and containing an electromagnet device and having a fixed contact on one side in the thickness direction; a frame-like frame fixed to the one side of the base; and a frame A main block having a movable part and an armature that are swingably supported, and a cover whose peripheral part is fixed to the frame on the opposite side of the base of the main block.

  According to a tenth aspect of the present invention, in the relay according to the eighth aspect, the driving device is a micro relay comprising an electromagnet device that swings the movable portion by generating a magnetic field that is made of a magnetic material and attracts the armature provided on the movable portion. And a base made of a substrate and provided with a fixed contact on one side in the thickness direction, a frame-like frame fixed to the one side of the base, and a movable part and an armature that are swingably supported by the frame. And a cover having a peripheral portion fixed to the frame on the opposite side of the base of the main block and having a storage portion for storing the electromagnet device.

  According to the first and second aspects of the present invention, the impact at the time of closing between the contacts can be mitigated by the resistance similar to the rigid body at the moment when the impact absorbing member contacts. Further, since the shock absorbing member is deformed so that there is almost no spring constant after the contact, the reaction force that separates the movable contact from the fixed contact hardly occurs, and the contact pressure of the contact can be ensured. Thus, since it is not necessary to increase the amount of overtravel or to slide the contacts as in the conventional example, the design is easy and the above-described effects can be achieved without degrading the switching performance between the contacts. Can be played.

  According to the invention of claim 3, since the acceleration of the movable portion is hindered by sliding with the impact absorbing member, the impact at the time of closing between the contacts can be greatly reduced.

  According to the fourth aspect of the present invention, since the shock absorbing member can be more effectively deformed while the shock absorbing member is in contact with the stopper, the contact pressure of the contact can be sufficiently secured.

  According to the invention of claim 5, when one contact is closed, the stopper presses the impact absorbing member, so that the fluid moves to the other contact through the flow path. Thus, when the other contact is opened, the impact absorbing member can be returned to the original state by the force with which the fluid presses the impact absorbing member. Further, the movable contact can be separated from the fixed contact by the above pressing force.

  According to the sixth aspect of the present invention, acceleration of the movable portion is hindered by sliding with the first impact absorbing member, so that the impact at the time of closing between the contacts can be greatly reduced. Furthermore, when one contact is closed, the stopper presses the second impact absorbing member, so that the fluid moves to the other contact through the flow path. Thus, when the other contact is opened, the second shock absorbing member can be returned to the original state by the force with which the fluid presses the second shock absorbing member. Further, the movable contact can be separated from the fixed contact by the above pressing force.

  According to the seventh aspect of the present invention, the force with which the fluid presses the shock absorbing member when the contacts are opened increases, so that the shock absorbing member can be returned to the original state more effectively. Further, the movable contact can be easily pulled away from the fixed contact by the above pressing force.

  According to invention of Claim 8, the relay which has an effect of any one of Claims 1 thru | or 7 is realizable.

  According to the ninth and tenth aspects of the present invention, it is possible to realize a microrelay having the effects described in any one of the first to seventh aspects.

It is a figure which shows the micro relay provided with Embodiment 1 of the contact device which concerns on this invention, (a) is sectional drawing, (b) is a bottom view of a main block. It is sectional drawing which shows the micro relay provided with Embodiment 2 of the contact device which concerns on this invention. It is sectional drawing which shows the micro relay provided with Embodiment 3 of the contact device which concerns on this invention. It is a figure which shows the micro relay provided with Embodiment 4 of the contact device which concerns on this invention, (a) is sectional drawing, (b) is a bottom view of a main block. BRIEF DESCRIPTION OF THE DRAWINGS It is a figure which shows the reference example of the contact apparatus which concerns on this invention, (a) is sectional drawing of the state in which the contacts are open, (b) is sectional drawing of the state in which the contacts are closed. It is a figure showing other composition same as the above, (a) is a sectional view in the state where the contacts are open, and (b) is a sectional view in the state where the contacts are closed. It is a figure which shows the basic form 1 of the micro relay which concerns on this invention, (a) is a disassembled perspective view, (b) is the perspective view seen from the lower side. It is a disassembled perspective view which shows the basic form 2 of the micro relay which concerns on this invention. It is sectional drawing same as the above. It is a figure which shows the conventional contact apparatus, (a) is a whole perspective view, (b)-(e) is operation | movement explanatory drawing.

  Hereinafter, in describing embodiments of a contact device according to the present invention, basic forms 1 and 2 of a microrelay including the contact device of the present invention will be described with reference to the drawings. In the following description, the vertical direction in FIG. 7A is defined as the vertical direction.

(Basic form 1)
In this basic form, as shown in FIGS. 7A and 7B, an electromagnet device 6 that generates a magnetic flux in response to an exciting current applied to a coil 62 wound around a yoke 60, and a rectangular plate-like glass substrate. A base 5 provided with a pair of fixed contacts 50 at each end in the longitudinal direction on one surface (upper surface) side in the thickness direction, a rectangular frame 31 fixed to the upper surface side of the base 5, and A movable portion 30 disposed inside the frame 31 and supported by the frame 31 via the four support spring portions 32 so as to be swingable. The movable portion 30 is supported by two contact pressure spring portions 35. In addition, two movable contact bases 34 each provided with a movable contact (not shown) and an armature (not shown) provided on the movable part 30 made of a magnetic material and driven by the electromagnet device 6 are provided. Main block having When, and a cover 4 made of a rectangular plate-shaped glass substrate peripheral portion on the opposite side of the base 5 in the main block 3 is fixed to the frame 3.

  As shown in FIG. 7A, the yoke 60 in the electromagnet device 6 has an elongated rectangular plate-shaped coil winding portion 60a around which the two coils 62 are directly wound, and a longitudinal direction of the coil winding portion 60a. A pair of leg pieces 60b that extend from both ends toward the movable part 30 and whose opposite end surfaces are excited with different polarities according to the excitation current to the coil 62, and the coil between the leg pieces 60b. A rectangular plate-shaped permanent magnet 61 arranged in the center of the winding portion 60a in the longitudinal direction and an elongated rectangular plate-like shape on the opposite side of the surface facing the permanent magnet 61 in the coil winding portion 60a. And a resin molded body 63 fixed so as to be orthogonal to the coil winding portion 60a. The yoke 60 is formed by bending or casting an iron plate such as electromagnetic soft iron, and the cross sections of both leg pieces 60b are formed in a rectangular shape.

  In the permanent magnet 61, both magnetic pole surfaces in the thickness direction are magnetized differently from each other, one magnetic pole surface is in contact with the coil winding portion 60a, and the other magnetic pole surface is flush with the tip surfaces of both leg pieces 60b. The thickness dimension is set so as to be located above. Further, each coil 62 is restricted from moving in the longitudinal direction of the coil winding portion 60a by the permanent magnet 61 and both leg pieces 60b. The resin molded body 63 is made of an insulating resin material, and the coil terminals 63a are provided so as to partially expose the longitudinal ends of one surface thereof. In each of the coil terminals 63a, a circular part forms an external connection electrode, and a rectangular part forms a coil connection part. A bump 64 made of a conductive material (for example, Au, Ag, Cu, solder, etc.) is appropriately fixed to the external connection electrode in each coil terminal 63a, but a bonding wire is used instead of fixing the bump 64. Bonding is acceptable.

  The base 5 is formed in a rectangular shape by heat-resistant glass such as Pyrex (registered trademark), and as shown in FIG. 7B, the electromagnet device 6 is accommodated through the central portion in the thickness direction. A storage hole 56 is provided therethrough, and through holes (not shown) penetrating in the thickness direction are provided in the vicinity of the four corners. Also, lands 52 are formed on both sides of the base 5 in the thickness direction and on the periphery of each through hole. Here, the lands 52 overlapping in the thickness direction of the base 5 are conductive materials (for example, Cu, Cr, Ti, Pt, Co, Ni, Au, or alloys thereof) deposited on the inner peripheral surface of the through hole. Etc.) are electrically connected by a conductor layer (not shown). Further, bumps 53 are appropriately fixed to the lands 52 on the other surface (lower surface) side in the thickness direction of the base 5. By fixing the bumps 53 to the lands 52, openings of through holes are formed on the lower surface side of the base 5. The surface is covered with bumps 53. The opening surface of each through hole is circular, and four lids 54 made of a silicon thin film covering the opening surface of each through hole and the land 52 are fixed to the upper surface of the base 5.

  As shown in FIG. 7A, each pair of fixed contacts 50 is arranged in parallel between two through holes formed at both ends in the longitudinal direction of the base 5 and spaced apart in the short direction of the base 5. It is electrically connected via a conductive pattern 51 and a land 52 formed at the periphery of the through hole adjacent in the short direction. Here, as a material of the fixed contact 50, the conductive pattern 51, and the land 52, for example, a conductive material such as Cr, Ti, Pt, Co, Cu, Ni, Au, or an alloy thereof may be employed. As the material of 53, for example, a conductive material such as Au, Ag, Cu, or solder may be employed. The through hole and the accommodation hole 56 may be formed by, for example, a sand blast method or an etching method, and the conductor layer may be formed by, for example, an electroplating method, a vacuum evaporation method, a sputtering method, or the like.

  The opening surface of the storage hole 56 has a cross shape as shown in FIG. 7B, and a lid 57 made of a silicon thin film that closes the storage hole 56 is fixed to the upper surface side of the base 5. Here, the electromagnet device 6 is inserted into the storage hole 56 in such a manner that the front end surfaces of both leg pieces 60 b of the yoke 60 face the lid body 57. In the electromagnet device 6, the permanent magnet 61 is provided in a magnetic path formed by the armature and the yoke 60 within the thickness dimension of the base 5, and the surface of the resin molded body 63 is substantially flush with the lower surface of the base 5. Yes. The lids 54 and 57 are made of a silicon thin film formed by thinning a silicon substrate by etching or polishing, and the thickness dimension is set to 20 μm. Here, the thickness dimension of the lid 57 is not limited to 20 μm, and may be appropriately set within a range of, for example, about 5 to 50 μm. Further, the lids 54 and 57 are not limited to the silicon thin film, but may be formed of a glass thin film formed by thinning a glass substrate by etching or polishing.

  As shown in FIG. 7A, the main block 3 includes a rectangular frame 31 and four support springs formed by processing a semiconductor substrate made of a silicon substrate by a semiconductor microfabrication process. It comprises a part 32, a rectangular plate-like movable part 30 arranged inside the frame 31, four contact pressure spring parts 35, and two movable contact base parts 34. For example, a rectangular plate-shaped armature made of a magnetic material such as soft iron, electromagnetic stainless steel, or permalloy is fixed to the surface of the movable portion 30 facing the base 5.

  The support spring parts 32 are formed at two locations on both sides in the short side direction of the movable part 30 so as to be separated from each other in the longitudinal direction of the movable part 30. Each support spring portion 32 has one end portion integrally connected to the frame 31 and the other end portion integrally connected to the movable portion 30. In addition, each support spring part 32 is lengthened by forming the site | part between one end part and the other end part in the planar shape in the meandering shape in the same plane. For this reason, when the movable part 30 swings, the stress concerning each support spring part 32 can be disperse | distributed, and it can prevent that each support spring part 32 is damaged.

  The movable portion 30 has a rectangular protruding piece 36 integrally extending from the center of both side edges in the short direction, and a rectangular protruding piece 37 from a portion corresponding to the protruding piece 36 on the inner peripheral surface of the frame 31. Is integrally extended. The projecting pieces 36 and 37 are such that the tip surfaces thereof face each other, and the projection provided on the tip surface of the projection piece 36 abuts on the inner peripheral surface of the recess provided on the tip surface of the projection piece 37. Thus, the movement of the movable portion 30 in the plane orthogonal to the thickness direction of the frame 31 is restricted.

  The movable contact base portion 34 is disposed between both ends of the movable portion 30 and the frame 31 in the longitudinal direction of the movable portion 30, and a movable contact made of a conductive material on a surface (lower surface) facing the base 5. Is fixed. Here, the movable contact base part 34 is supported by the movable part 30 via two contact pressure spring parts 35. In addition, since the stopper part 33 which restrict | limits the amount of armature displacement is integrally extended in the four corners of the movable part 30, respectively, the planar shape of the contact pressure spring part 35 is three sides of the outer periphery of the stopper part 33. It is formed in U shape along.

  The cover 4 is made of heat-resistant glass such as Pyrex (registered trademark), and a recess (not shown) that secures a swinging space of the movable portion 30 is formed on the surface facing the main block 3. .

  Here, a metal thin film for bonding (not shown) is formed over the entire periphery of the surface (lower surface) facing the base 5 in the frame 31, and the periphery of the surface (upper surface) facing the cover 4. A metal thin film for bonding 38a is also formed on the entire portion over the entire circumference. Further, a metal thin film 55 for bonding is formed over the entire periphery of the surface of the base 5 facing the main block 3 (upper surface), and the periphery of the surface of the cover 4 facing the main block 3 (lower surface). In addition, a bonding metal thin film (not shown) is formed over the entire circumference. Therefore, the main block 3, the cover 4, and the base 5 can be hermetically joined by pressure welding or anodic bonding, and the airtightness of the space surrounded by the base 5, the cover 4, and the frame 31 can be improved.

  Hereinafter, the operation of the basic mode will be described. When the coil 62 is energized, one end of the armature in the longitudinal direction is attracted to one leg piece 60b of the yoke 60 according to the direction of magnetization, and the movable part 30 swings, and the other end side of the movable part 30 The movable contact held by the movable contact base 34 contacts the pair of fixed contacts 50 facing each other with a predetermined contact pressure. Even if energization is stopped in this state, the attractive force is maintained by the magnetic flux generated by the permanent magnet 61, and the state is maintained as it is.

  Further, when the energization direction to the coil 62 is reversed, the other end portion of the armature in the longitudinal direction is attracted to the other leg piece 60b of the yoke 60, and the movable portion 30 swings. The movable contact held by the movable contact base 34 contacts the pair of fixed contacts 50 facing each other with a predetermined contact pressure. Even if energization is stopped in this state, the attractive force is maintained by the magnetic flux generated by the permanent magnet 61, and the state is maintained as it is.

(Basic form 2)
As shown in FIGS. 8 and 9, this basic form mainly includes a base 100, a main block 200 provided on one surface (upper surface) side in the thickness direction of the base 100, and a side opposite to the base 100 side in the main block 200. A cover 300 provided on the upper side and an electromagnet device 400 are provided.

  The base 100 is formed of, for example, a rectangular parallelepiped glass substrate. As shown in FIG. 8, a pair of transmission lines 110 are formed on both ends in the longitudinal direction on the upper surface side of the base 100. All of the transmission lines 110 are formed in a straight line, and the longitudinal direction thereof coincides with the short direction of the base 100. In addition, the pair of transmission lines 110 are arranged in a line along the short direction of the base 100. Here, a pair of external connection electrodes (not shown) are formed on both ends in the longitudinal direction on the other surface (lower surface) side in the thickness direction of the base 100. The pair of external connection electrodes are electrically connected to a pair of transmission lines 110 and through-hole wirings (not shown) penetrating the base 100 in the thickness direction.

  A plurality of fixed contacts 120 electrically connected to the transmission line 110 are formed on the upper surface side of the base 100. Each fixed contact 120 is connected to an end portion that is inside the base 100 in each transmission line 110. Therefore, a pair of fixed contacts 120 are formed on each of the left and right ends of the base 100. In each transmission line 110, an end portion that is outside the base 100 is electrically connected to the external connection electrode through the above-described through-hole wiring. The fixed contact 120 is a metal thin film made of a metal material having good conductivity such as Cu or Au, and is formed by using a sputtering method, an electroplating method, a vacuum deposition method, or the like. Further, the fixed contact 120 is not limited to a single layer structure, and may be a multilayer structure including, for example, an Au layer and a Ti layer interposed between the Au layer and the base 100.

  The main block 200 mainly includes a movable part 210 and a frame 220. The frame 220 is formed in a rectangular frame shape, and the movable portion 210 is disposed in the opening of the frame 220. Here, the opening of the frame 220 includes a rectangular first opening 230 provided at the center of the frame 220 and a second opening 231 provided at both ends in the longitudinal direction of the frame 220. Including. The second opening 231 communicates with the first opening 230 at the center in the vertical direction. The outer dimensions of the frame 220 are the same as the outer dimensions of the base 100.

  The movable part 210 has a main body part 211 disposed in the first opening 230 of the frame 220. The main body 211 is formed in a rectangular plate shape, and is disposed in the first opening 230 so that its longitudinal direction is along the longitudinal direction of the frame 220. A contact protrusion 212 is provided at each central portion of both ends in the short direction of the main body 211, and the tip thereof is disposed in the second opening 231. A movable contact 213 is provided on a surface (lower surface) of the contact protrusion 212 facing the base 100 (see FIG. 9). The movable contact 213 is configured to short-circuit between the pair of fixed contacts 120 when contacting the pair of fixed contacts 120. The movable contact 213 is a metal thin film made of a metal material such as Cu or Au, like the fixed contact 120, and is formed using a sputtering method, an electroplating method, a vacuum deposition method, or the like. Further, the movable contact 213 is not limited to a single layer structure, and may have a multilayer structure like the fixed contact 120 described above.

  On the other hand, a fulcrum protrusion 214 projects from the center of the surface (upper surface) of the main body 211 facing the cover 300. The fulcrum protrusion 214 is used as a fulcrum for the swinging operation (seesaw operation) of the movable portion 210.

  Such a movable portion 210 is integrally connected to the frame 220 by a plurality of (four in the drawing) support pieces 240. Each of the support pieces 240 is configured to integrally connect the inner side surface of the first opening 230 of the frame 220 in the longitudinal direction and the outer side surface of the main body 211 in the short direction. The four support pieces 240 are arranged so as to be point-symmetric about the center of the main body 211. Further, the support piece 240 is formed in a meandering shape so as to advance and retreat in a direction along the longitudinal direction of the main body portion 211 within a plane orthogonal to the thickness direction. As a result, the movable portion 210 is swingably supported by the frame 220. Further, each support piece 240 is formed in a meandering shape to increase the length dimension, and the stress applied to the support piece 240 when the movable portion 210 swings is dispersed.

In the main block 200 described above, the movable portion 210, the frame 220, and the support piece 240 are formed on a semiconductor substrate 25 having a thickness of, for example, about 50 μm to 300 μm, preferably about 200 μm, using a semiconductor fine processing technology such as a photolithography technology and an etching technology. It is integrally formed by patterning using it. The semiconductor substrate 25 is an SOI (two-layer SOI) substrate in which semiconductor layers made of silicon and insulating layers made of silicon oxide (SiO ₂ ) are alternately stacked.

  An armature 500 is provided on a surface (upper surface) of the main body 211 of the movable unit 210 facing the cover 300. The armature 500 is used for swinging the movable part 210 by a magnetic field generated by the electromagnet device 400. The armature 500 is formed into a rectangular plate shape by machining a magnetic material such as electromagnetic soft iron, electromagnetic stainless steel, or permalloy, and is joined to the main body 211 by a method such as adhesion, welding, heat fitting, or brazing. In addition, a reinforcing member 600 that holds the armature 500 on the movable portion 210 and reinforces the movable portion 210 is provided on the side of the movable portion 210 facing the base 100 (lower surface). In order to avoid an increase in the thickness of the micro relay due to the reinforcing member 600, the base 100 is provided with a recess 130 that avoids the reinforcing member 600 (see FIG. 9).

  The main block 200 described above is attached to the upper surface side of the base 100 by joining the frame 220 to the base 100 such that the movable contact 213 and the pair of fixed contacts 120 face each other.

  The cover 300 is formed of, for example, a glass substrate that is an insulating material, and the outer dimensions thereof are equal to the outer dimensions of the base 100. Thus, the cover 300 is formed in a size that can close the opening of the frame 220. An opening 310 that penetrates in the thickness direction is formed at the center of the surface (upper surface) opposite to the frame 220 side of the cover 300. The opening 310 is formed in a size that can accommodate the electromagnet device 400, and a closing plate 320 that closes the entire opening 310 is tightly bonded to a surface (lower surface) on the frame 220 side. The closing plate 320 is made of, for example, a silicon plate or a glass plate having a thickness of about 5 to 50 μm (preferably about 20 μm). A space surrounded by the inner peripheral surface of the opening 310 and the closing plate 320 constitutes a storage chamber of the electromagnet device 400. The cover 300 described above is joined to the surface (upper surface) of the frame 220 opposite to the base 100 side.

  The electromagnet device 400 generates a magnetic field that attracts the armature 500 and includes a permanent magnet 410 for latching the movable portion 210. The electromagnet device 400 mainly includes a yoke 420 and a pair of coils 430. The yoke 420 is integrally provided with a long rectangular plate-shaped main piece 421 and rectangular plate-shaped leg pieces 422 projecting from both ends in the longitudinal direction on the surface side (lower surface side) of the main piece 421. . Such a yoke 420 is formed by bending or forging an iron plate such as electromagnetic soft iron. The permanent magnet 410 is formed in a rectangular parallelepiped shape, and is magnetized so that one surface side and the other surface side in the thickness direction have different polarities. The permanent magnet 410 is attached to the yoke 420 such that the other surface is in contact with the central portion in the longitudinal direction of the lower surface of the main piece 421 of the yoke 420. The pair of coils 430 is disposed at each portion of the main piece 421 between each leg piece 422 and the permanent magnet 410.

  Further, the electromagnet device 400 is provided with a pair of coil terminals (not shown). By applying a voltage between the pair of coil terminals, a current flows through both coils 430. Such an electromagnet device 400 is stored in the storage chamber of the cover 300. Here, a linear wiring pattern (not shown) is formed on the surface (upper surface) of the cover 300 opposite to the main block 200 side, and a coil terminal is soldered to one end of the wiring pattern. Etc. are electrically connected.

  A drive electrode (not shown) for energizing both coils 430 is provided on the lower surface side of the base 100, and the base 100 is located at a position where the drive electrode and the other end of the wiring pattern overlap in the thickness direction. A through hole (not shown) penetrating the main block 200 and the cover 300 in the thickness direction is provided. A through-hole wiring (not shown) is formed in the through-hole, and the drive electrode and the coil terminal are electrically connected through the through-hole wiring and the wiring pattern.

  Hereinafter, the operation of the basic mode will be described. When energization of both the coils 430 is performed, one end of the armature 500 in the longitudinal direction is attracted to one leg piece 422 of the yoke 420 according to the direction of magnetization, and the main body 211 of the movable unit 210 swings. The movable contact 213 provided on the contact protrusion 212 on one end in the longitudinal direction of the main body 211 comes into contact with the pair of fixed contacts 120 facing each other with a predetermined contact pressure. Even if energization is stopped in this state, the attractive force is maintained by the magnetic flux generated by the permanent magnet 410, and the state is maintained as it is.

  Further, when the energization direction of both the coils 430 is reversed, the other end portion of the armature 500 in the longitudinal direction is attracted to the other leg piece 422 of the yoke 420, and the main body portion 211 of the movable portion 210 swings. The movable contact 213 provided on the contact protrusion 212 on the other end side in the longitudinal direction of the portion 211 comes into contact with a pair of fixed contacts 120 facing each other with a predetermined contact pressure. Even if energization is stopped in this state, the attractive force is maintained by the magnetic flux generated by the permanent magnet 410, and the state is maintained as it is.

  As described above, since the electromagnet device 400 is housed in the opening 310 of the cover 300 in this basic embodiment, the thickness of the base 100 can be reduced compared to the case where the electromagnet device 400 is housed in the base 100. it can. For this reason, the through-hole wiring for connecting the fixed contact 120 to the external connection electrode can be shortened, and the high frequency characteristics can be improved. In addition, since the distance between the electromagnet device 400 and the fixed contact 120 can be increased, the influence of the magnetic field generated by the electromagnet device 400 can be reduced.

  Hereinafter, each embodiment of a contact device according to the present invention will be described with reference to the drawings. In the drawings describing each embodiment, a microrelay including each embodiment is described, and the basic configuration thereof is the same as that of the basic embodiment 2. Therefore, the same number is attached | subjected to the part which is common in the basic form 2, and description is abbreviate | omitted. Further, in the following description, the top, bottom, left, and right in FIG. 1A are defined as the top, bottom, left, and right directions, the direction toward the front side of the paper is defined as the front direction, and the direction toward the back side of the paper is defined as the rear direction.

(Embodiment 1)
Hereinafter, a contact device according to a first embodiment of the present invention will be described with reference to the drawings. As shown in FIGS. 1A and 1B, the present embodiment includes a pair of fixed contacts 10, a pair of movable contacts 21 a that can be brought into and out of contact with each fixed contact 10, and movable contacts 21 a. A movable part 2 is provided that is swingable between a position where the movable contact 21a contacts the fixed contact 10 and a position where the movable contact 21a is separated. Furthermore, the base (base part) 1 provided with each fixed contact 10 was provided in one surface (upper surface) of the thickness direction while being provided apart from the movable part 2. In addition, the fixed contact 10 is provided in the site | part which opposes the longitudinal direction both ends (right-and-left both ends) of the movable part 2 in the base 1, respectively. In addition, the movable portion 2 of the present embodiment is configured to swing when a rectangular plate-shaped armature 500 provided on one surface (upper surface) facing the cover 300 is attracted by the electromagnet device 400.

  The movable portion 2 is provided with a rectangular plate-shaped main body 20 that is supported in a swingable manner, and spaced apart from the left and right ends of the main body 20, and a movable contact 21 a is provided on one surface (lower surface) facing the fixed contact 10. It comprises a pair of contact portions 21 each having a rectangular plate shape, and two pairs of support portions 22 that have elasticity and connect the main body portion 20 and the contact portions 21 to each other at both left and right ends of the movable portion 2.

  A fulcrum protrusion 20b that protrudes upward is integrally formed at a substantially central portion of the upper surface of the main body 20, and the fulcrum protrusion 20b serves as a fulcrum when the movable part 2 swings. Further, a pair of stoppers 20a protruding downward are integrally formed on the lower surfaces of the left and right ends of the main body portion 20 respectively. These stoppers 20a restrict the amount of displacement of the movable part 2 in the vertical direction by abutting a lower end part of the stopper 20a with a shock absorbing member 11 described later provided on the base 1 when the movable part 2 swings.

  A plurality of (two in the drawing) recesses 12 that are recessed in the thickness direction (downward) are provided at portions of the base 1 that face the stoppers 20a. And the impact-absorbing member 11 formed in the film | membrane shape is arrange | positioned so that the opening surface of each recessed part 12 may be covered. The shock absorbing member 11 is made of a soft material silicone rubber such as PDMS (polydimethylsiloxane). The shock absorbing member 11 has a resistance similar to a rigid body at the moment of contact with another member, and has a characteristic of deforming so that there is substantially no spring constant during the subsequent contact.

  Hereafter, the operation | movement at the time of closing between the contacts in this embodiment is demonstrated using Fig.1 (a). When the coils 430 are energized, one end (the right end in the figure) of the armature 500 in the longitudinal direction is attracted to one leg piece 422 of the yoke 420 according to the direction of magnetization, and the main body of the movable unit 2 20 swings. And the movable contact 21a provided in the contact part 21 of the longitudinal direction one end side (left side in the figure) of the main-body part 20 moves toward the fixed contact 10 which opposes. Here, the stopper 20a and the movable contact 21a are set in such a relationship that the movable contact 21a contacts the fixed contact 10 after the tip of the stopper 20a collides with the impact absorbing member 11. That is, the stopper 20 a gradually pushes the shock absorbing member 11 after the tip of the stopper 20 a collides with the shock absorbing member 11, so that the movable contact 21 a reaches the fixed contact 10. The support 22 is bent by the driving force, so that the movable contact 21a comes into contact with the fixed contact 10 completely.

  Here, when the stopper 20a collides with the shock absorbing member 11, the collision energy is alleviated by the characteristic of the shock absorbing member 11, that is, the characteristic having resistance similar to a rigid body at the moment of collision. Thus, the speed at which the movable contact 21a moves toward the fixed contact 10 can be reduced. Then, after the stopper 20a collides with the shock absorbing member 11, the shock absorbing member 11 is deformed so as to have almost no spring constant, so that almost no reaction force of the shock absorbing member 11 to the stopper 20a is generated. For this reason, since the shock absorbing member 11 does not push back the stopper 20a upward, the state where the movable contact 21a and the fixed contact 10 are in contact with each other is not hindered. For this reason, the contact pressure of a contact can be ensured.

  As described above, by utilizing the characteristics of the shock absorbing member 11, the contact pressure of the contact can be ensured while relaxing the impact at the time of closing between the contacts. Thus, it is possible to prevent the deformation of the contacts and the adhesion between the contacts, and to reduce the electrical loss when closing the contacts. Further, although there is overtravel as in the conventional example, the travel amount corresponding to the distance that the movable contact 21a is originally desired to be pushed is sufficient, so that the movable spring 703 must be removed from the operation restricting piece 705a as in the prior art. There is no need to consider large overtravel. Thus, since it is not necessary to increase the amount of overtravel as in the conventional example, it can be designed easily. Furthermore, unlike the conventional example, sliding between the contacts is not required, so that the switching performance between the contacts is not deteriorated.

  The shock absorbing member 11 does not have a spring constant at all, and gradually returns to the original state when the pressure applied to the shock absorbing member 11 disappears. However, since this restoring force is very weak, when opening and closing between the contacts in a short time, the impact absorbing member 11 does not return to the original state at the next closing between the contacts, and the above-described effects I can not play. Here, if the space covered with the shock absorbing member 11 in the recess 12 is a sealed space, the space is compressed when the shock absorbing member 11 is pushed by the stopper 20a. Thus, when the space between the contacts is opened, the shock absorbing member 11 can be returned to the original state by the pressure when the space changes from the compressed state to the original state. In this case, it is desirable to suppress the restoring force and the pressure of the shock absorbing member 11 to such an extent that the reaction force is not enough to pull the movable contact 21 a away from the fixed contact 10.

(Embodiment 2)
Hereinafter, a second embodiment of the contact device according to the present invention will be described with reference to the drawings. However, since the basic configuration of the present embodiment is common to that of the first embodiment, common portions are denoted by the same reference numerals and description thereof is omitted. In the present embodiment, as shown in FIG. 2, each recess 12 on one end side (front side) in the short direction of the main body portion 20 and each recess portion 12 on the other end side in the short side direction (rear side) of the main body portion 20. They are connected to each other by flow paths 12a each having an open upper surface (only the concave portion 12 on the front side in the drawing). Two film-like impact absorbing members 11 (one in the figure) that are long in the left-right direction are provided so as to cover the opening surfaces of the concave portions 12 on both the front and rear sides including the flow path 12a. In addition, each recess 12 including the flow path 12 a is filled with a fluid A (air in the present embodiment) in a space covered with the shock absorbing member 11.

  Hereinafter, the switching operation between the contacts in the present embodiment will be described with reference to FIG. In the following description, it is assumed that the right contact is closed. When energization of both coils 430 is performed, as in the first embodiment, the right end portion of the armature 500 is attracted to one leg piece 422 of the yoke 420 and the main body portion 20 of the movable portion 2 swings. Then, the right contact is opened, and the movable contact 21a provided on the left contact 21 moves toward the opposed fixed contact 10. When the left stopper 20a collides with the left end portion of the shock absorbing member 11, the left end portion of the shock absorbing member 11 bends downward, so that the fluid A filled in the left concave portion 12 is pressed and the flow path 12a passes through the fluid A. It is swept away by the recess 12 on the right side. On the other hand, in the concave portion 12 on the right side, the right end portion of the shock absorbing member 11 is pressed upward by the fluid A flowing in through the flow path 12a. For this reason, the right end portion of the shock absorbing member 11 bends upward and returns to the original state.

  As described above, the shock absorbing member 11 can be returned to the original state by the force with which the fluid A presses the shock absorbing member 11 when the contacts are opened. For this reason, it becomes possible to open and close between contacts in a short time. Further, when the impact absorbing member 11 is pressed upward, the contact portion 21 and the support portion 22 are also set up. Thus, even if the contacts are fixed to each other, the contact portion 21 and the support portion 22 are pushed upward by the above pressing force, so that the movable contact 21 a can be separated from the fixed contact 10.

(Embodiment 3)
Hereinafter, a third embodiment of the contact device according to the present invention will be described with reference to the drawings. However, since the basic configuration of the present embodiment is common to that of the first embodiment, common portions are denoted by the same reference numerals and description thereof is omitted. In the present embodiment, as shown in FIG. 3, two concave portions 12 (one in the drawing) that are long in the left-right direction are provided on one end side and the other end side in the short direction of the main body portion 20. . A film-like shock absorbing member 11 that is long in the left-right direction is disposed so as to cover the opening surface of each recess 12. Each recess 12 is filled with a fluid A (air in this embodiment) in a space covered with the shock absorbing member 11, and a central portion in the left-right direction connects the left and right ends with each other. It has become. The portion of the recess 12 that faces the stopper 20a has a structure in which the width dimension in the front-rear direction is larger than the width dimension in the front-rear direction of the flow path 12a. Further, the shock absorbing member 11 is formed so that the left and right ends facing the stopper 20a protrude upward when the contact is opened.

  Hereinafter, the opening and closing operation of the contact in this embodiment will be described with reference to FIG. In the following description, it is assumed that the right contact is closed. When power is supplied to both coils 430, the right end portion of the armature 500 is attracted to one leg piece 422 of the yoke 420 and the main body portion 20 of the movable portion 2 swings, as in the first and second embodiments. Then, the right contact is opened, and the movable contact 21a provided on the left contact 21 moves toward the opposed fixed contact 10. Here, when the left stopper 20a collides with the left end portion of the shock absorbing member 11, the left end portion of the shock absorbing member 11 bends downward, so that the fluid A filled in the left end portion of the recess 12 is pressed, and the flow path It is washed away to the right end of the recess 12 via 12a. On the other hand, at the right end portion of the recess 12, the right end portion of the shock absorbing member 11 is pressed upward by the fluid A flowing in through the flow path 12a. For this reason, the right end portion of the shock absorbing member 11 bends upward and returns to the original state.

  As described above, the shock absorbing member 11 can be returned to the original state by the force with which the fluid A presses the shock absorbing member 11 when the contacts are opened. For this reason, it becomes possible to open and close between contacts in a short time. Further, when the impact absorbing member 11 is pressed upward, the contact portion 21 and the support portion 22 are also set up. Thus, even if the contacts are fixed to each other, the contact portion 21 and the support portion 22 are pushed upward by the above pressing force, so that the movable contact 21 a can be separated from the fixed contact 10. Here, since the left and right ends of the shock absorbing member 11 are formed so as to protrude upward when the contact is opened, the force for pushing up the stopper 20a is larger than that in the second embodiment. Thus, the movable contact 21a can be separated from the fixed contact 10 more effectively.

  In the second and third embodiments, air is used as the fluid A that fills the recess 12, but other gases such as nitrogen may be used. Further, as the fluid A, a liquid having viscosity such as silicone, silicon grease, or ethylene glycol may be used.

(Embodiment 4)
Hereinafter, a contact device according to a fourth embodiment of the present invention will be described with reference to the drawings. However, since the basic configuration of the present embodiment is common to that of the first embodiment, common portions are denoted by the same reference numerals and description thereof is omitted. In this embodiment, as shown in FIGS. 4A and 4B, a plurality of impacts (four in the drawing) are provided on both the front and rear sides of the contact portion 21 so as to contact the left and right end edges of the main body portion 20, respectively. An absorbing member 13 is provided. Each of the shock absorbing members 13 is formed in the form of a film from the same material as the shock absorbing members 11 of the above-described embodiments, and upper and lower ends thereof are in contact with the lower surface of the cover 300 and the upper surface of the base 1, respectively.

  Hereinafter, the operation at the time of closing between the contacts in the present embodiment will be described with reference to FIG. When energization of both coils 430 is performed, the right end portion of the armature 500 is attracted to one leg piece 422 of the yoke 420 and the main body portion 20 of the movable portion 2 swings, as in the first to third embodiments. Then, the right contact is opened, and the movable contact 21a provided on the left contact 21 moves toward the opposed fixed contact 10. Here, since the left end edge of the main body 20 is in contact with the left shock absorbing member 13, the left end edge of the main body 20 slides with the shock absorbing member 13. Thus, the sliding of the main body portion 20 and the shock absorbing member 13 prevents the movable portion 2 from being accelerated. In addition, after the movable contact 21a and the fixed contact 10 come into contact with each other, the state where the shock absorbing member 13 is deformed by sliding with the main body 20 is maintained, so that the reaction force that pulls the movable contact 21a away from the fixed contact 10 is maintained. Will not occur. Thus, the contact pressure of the contact can be ensured.

  As described above, since the acceleration of the movable portion 2 is hindered by sliding with the shock absorbing member 13, the speed at which the movable contact 21a heads toward the fixed contact 10 can be reduced. Thus, the collision energy when closing the contacts can be greatly reduced.

  Although not shown, any one of Embodiments 2 and 3 may be combined with this embodiment. That is, the shock absorbing member 13 (first shock absorbing member) is provided between the base 1 and the cover 300, and the shock absorbing member 11 (second shock absorbing member) and the recess 12 are provided on the upper surface of the base 1. Good. In this case, the effects of the embodiments can be achieved at the same time, which is desirable.

(Reference example)
Hereinafter, a reference example of a contact device according to the present invention will be described with reference to the drawings. However, since the basic configuration of this reference example is the same as that of the first embodiment, the same parts are denoted by the same reference numerals and description thereof is omitted. In the following description, the vertical direction in FIG. 5A is defined as the vertical direction. In this reference example, as shown in FIGS. 5A and 5B, instead of providing the stopper 20a, the shock absorbing members 11, 13, and the recess 12, the shock absorbing member 14 having a function as a stopper is used as the base 1. It is provided on the upper surface. The shock absorbing member 14 is formed in a substantially rectangular parallelepiped shape from the same material as the shock absorbing members 11 and 13 of the above embodiments, and a lower end portion thereof is fixed to the upper surface of the base 1.

  Hereinafter, the operation at the time of closing between the contacts in this reference example will be described with reference to FIGS. When the movable contact 21 a moves toward the fixed contact 10, the upper end portion of the shock absorbing member 14 collides with the lower surface of the contact portion 21 before the movable contact 21 a contacts the fixed contact 10. At this time, the collision energy is alleviated by the characteristic of the shock absorbing member 11, that is, the characteristic having a resistance similar to a rigid body at the moment of collision. Thus, the speed at which the movable contact 21a moves toward the fixed contact 10 can be reduced. And after the contact part 21 collides with the impact-absorbing member 14, the impact-absorbing member 14 deform | transforms so that there may be almost no spring constant, Therefore The reaction force with respect to the contact part 21 of the impact-absorbing member 14 hardly arises. For this reason, since the shock absorbing member 14 does not push the contact portion 21 back upward, the state where the movable contact 21 a and the fixed contact 10 are in contact with each other is not hindered. For this reason, the contact pressure of a contact can be ensured.

  Of course, as shown in FIGS. 6A and 6B, the impact absorbing member 14 may be provided on the lower surface of the contact portion 21. Also in this case, since the lower end portion of the shock absorbing member 14 collides with the upper surface of the base, and then the shock absorbing member 14 is deformed so as to have almost no spring constant, the same effects as described above can be obtained.

  Note that the contact devices of the above-described embodiments and reference examples can be employed in any of the basic forms 1 and 2. When the contact device of each of the above-described embodiments and reference examples is adopted as the basic form 1, the base 5 is the base 1, the fixed contact 54 is the fixed contact 10, and the movable contact provided on the movable contact base 34 is the movable contact 21a. The movable part 30 may be replaced with the movable part 2. Further, when the contact device of each of the above embodiments and reference examples is adopted as the basic form 2, the base 100 is the base 1, the fixed contact 120 is the fixed contact 10, the movable contact 213 is the movable contact 21a, and the movable part 210 is the movable part. Each may be replaced with 2. Of course, the relay provided with the contact device of the present invention is not limited to the micro relay of the above basic form, and the contact device of the present invention may be adopted for a relay and a micro relay having other structures. . In addition, the driving device for swinging the movable portion is not limited to the electromagnetic driving type, and for example, an electrostatic driving type driving device may be adopted.

1 base (base part)
DESCRIPTION OF SYMBOLS 10 Fixed contact 11 Shock absorption member 2 Movable part 20a Stopper 21a Movable contact

Claims (10)

  A fixed contact, a movable contact that can be moved to and away from the fixed contact, a movable portion that has a movable contact and can swing between a position where the movable contact contacts the fixed contact and a position where the movable contact opens, and a distance from the movable portion And a base part provided with a fixed contact on one surface in the thickness direction, wherein at least one of the movable part and the base part has a movable part or a part facing the base part. Are provided with a stopper that regulates the amount of displacement of the movable part by abutting and an impact absorbing member that absorbs an impact when abutting by contacting the stopper or the movable part. A contact device comprising a soft material having a resistance similar to that of a rigid body at the moment of contact and deforming so that there is substantially no spring constant during the subsequent contact.   The contact device according to claim 1, wherein the shock absorbing member is made of polydimethylsiloxane.   The contact device according to claim 1, wherein the shock absorbing member is disposed so as to always contact the movable portion along the swinging direction.   The stopper is provided on the movable portion, and a concave portion that is recessed in the thickness direction of the base portion is provided in a portion of the base portion that faces the stopper, and the shock absorbing member is formed in a film shape and covers the opening surface of the concave portion. 3. The contact device according to claim 1, wherein the contact device is arranged as described above.   The movable part is swingable with a fulcrum protrusion provided on the movable part as a fulcrum, and movable contacts and stoppers are disposed at both ends sandwiching the fulcrum protrusion, and each movable contact and The fixed contact is disposed so as to face each other, and the recess has a flow path that connects the portions of the recess facing each stopper to each other, with the fluid filled in the space covered with the shock absorbing member. The contact device according to claim 4, characterized in that:   The movable part is swingable with a fulcrum protrusion provided on the movable part as a fulcrum, and movable contacts and stoppers are disposed at both ends sandwiching the fulcrum protrusion, and each movable contact and A fixed contact is disposed so as to face the concave portion, and a concave portion recessed in the thickness direction of the base portion is provided at a portion facing the stopper, and the shock absorbing member is always in contact with the movable portion along the swinging direction. And a second shock absorbing member that is formed in a film shape so as to cover the opening surface of the concave portion, and the concave portion has the second shock absorbing member. 3. The contact device according to claim 1, further comprising a flow path that fills a space covered with the absorbing member and connects portions of the recess facing each stopper to each other.   7. The contact device according to claim 5, wherein the concave portion is filled with a viscous liquid.   8. A relay comprising: the contact device according to claim 1; and a drive device that drives a movable portion so that the movable contact is in contact with and away from the fixed contact.   9. The relay according to claim 8, wherein the driving device is a micro relay including an electromagnet device that is made of a magnetic material and swings the movable portion by generating a magnetic field that attracts an armature provided on the movable portion. A base having a storage portion for storing an electromagnet device and having a fixed contact provided on one surface side in the thickness direction, a frame-like frame fixed to the one surface side of the base, and a frame that is swingably supported A micro relay comprising: a main block having a movable part and an armature; and a cover whose peripheral part is fixed to the frame on the opposite side of the base in the main block. 9. The relay according to claim 8, wherein the driving device is a micro relay including an electromagnet device that swings the movable portion by generating a magnetic field that is made of a magnetic material and attracts an armature provided on the movable portion. A base provided with a fixed contact on one surface side in the thickness direction, a frame-like frame fixed to the one surface side of the base, and a main block having a movable part and an armature that are swingably supported by the frame; A microrelay comprising a cover having a peripheral portion fixed to a frame on the opposite side of the base of the main block and having a storage portion for storing an electromagnet device.

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