JP2011125816A - Gas-liquid mixture stirring device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent clogging of a suction tube for introducing and mixing gas to be treated in a removing apparatus which removes and recovers a hazardous constituent in toxic gas discharged from a semiconductor manufacturing apparatus, a liquid crystal manufacturing apparatus or the like. <P>SOLUTION: This air-liquid mixture agitation apparatus mixes toxic gas G discharged from a lower end 13C of a suction tube 13 inserted into a conduit 2 with water W in the conduit 2. A flexible tube 18 is inserted into the suction tube, and a lower end 18c of the flexible tube is opposed to the lower end of the suction tube. At least the lower end of the suction tube and the lower end of the flexible tube are separated from each other to form a vibrating clearance A. As a result, with air-fuel mixture, the flexible tube vibrates, the lower end collides with an inner-peripheral surface of the suction tube, so that solid matter deposited on the lower end of the flexible tube is peeled off, thus preventing the suction tube from being clogged. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a detoxifying device for detoxifying and collecting toxic gas discharged from a semiconductor manufacturing device, a liquid crystal manufacturing device, etc., and more specifically, an intake pipe is inserted into a water conduit, The present invention relates to a gas-liquid mixing and stirring device for mixing toxic gas discharged from the lower end of the intake pipe and water in the water conduit.

Since the gas discharged from the semiconductor manufacturing line and the liquid crystal manufacturing line contains harmful gas at the same time as fine powder such as SiO ₂ and WO ₃ , it cannot be released into the atmosphere as it is. For this reason, conventionally, a toxic gas has been removed using a detoxification device, and there are the following types of detoxification devices. (For example, refer to Patent Document 1).

  An apparatus for detoxifying by mixing toxic gas introduced from an intake pipe into water, comprising a drying pipe for introducing a gas for drying the inside of the intake pipe, and a valve for controlling the inflow of the gas In the toxic gas abatement apparatus, the apparatus has a cleaning pipe for introducing a liquid for cleaning the inside of the intake pipe and a valve for controlling the inflow of the liquid, and restricts the inflow of the toxic gas when the intake pressure rises. A detoxifying apparatus in which the liquid is allowed to flow into the intake pipe and cleaned in the pipe, and then the inside of the intake pipe is dried and dried in the pipe by a pipe drying means, and then toxic gas is reintroduced.

JP 2005-296918 A

  In the conventional example, the entire inner peripheral surface of the intake pipe is appropriately washed and dried to prevent clogging of the intake pipe. However, equipment such as a drying pipe and a washing pipe is required, and cleaning and drying operations are performed. Takes time.

In view of the above circumstances, an object of the present invention is to easily prevent clogging of an intake pipe.

The present inventor has found that harmful gases such as WF ₆ (tungsten hexafluoride) and SiF ₄ (silicon tetrafluoride) react with water to form powder, and thus the water and the gas are mixed and stirred. Focusing on the fact that the powder tends to adhere to the vicinity of the lower end of the intake pipe located at a location, and in order to solve the problem, the lower end of the intake pipe may be vibrated. I thought that.

  Therefore, how the lower end portion of the intake pipe can be vibrated was examined. The abatement device vibrates by the drive of a pump or the like during operation, and the intake pipe vibrates slightly. Therefore, a flexible tube having a smaller diameter than the intake pipe is inserted into the intake pipe, and the tip portion thereof is Fixed to the intake pipe.

  Then, the tube vibrates due to the vibration of the abatement device and collides with the inner peripheral surface of the intake pipe, and repeatedly impacts and vibrates the lower end of the intake pipe. It was found that could not adhere. The present invention has been made based on the above findings.

  The present invention relates to a gas-liquid mixing and agitating device in which an intake pipe is inserted into a water conduit, and toxic gas discharged from the lower end of the intake pipe and water in the water conduit are mixed. So that the lower end of the flexible tube faces the lower end of the intake pipe, and at least the lower end of the intake pipe and the lower end of the flexible tube are separated from each other to form a vibration gap. Is formed.

  The lower end of the flexible tube of the present invention is flush with the lower end of the intake pipe. The lower end of the flexible tube of this invention is characterized by projecting from the lower end of the intake pipe. The length of the flexible tube of the present invention is the same as or longer than the vertical length of the intake pipe.

  The flexible tube of the present invention is shorter than the vertical length of the intake pipe and is provided only on the lower end side of the intake pipe. The vibration gap according to the present invention is provided over the entire length in the vertical direction of the intake pipe. The flexible tube according to the present invention is characterized in that a diameter-expanded portion that collides with water flowing through the water guide pipe is connected to the lower end portion of the flexible tube.

  According to the present invention, a flexible tube is inserted into the intake pipe so that the lower end of the flexible tube faces the lower end of the intake pipe, and at least the lower end side of the intake pipe and the flexible tube Since the vibration gap is formed by separating the lower end side of the tube, when the gas-liquid mixing and stirring device vibrates, the flexible tube vibrates and the lower end collides with the inner peripheral surface of the intake pipe. Therefore, the powder adhering to the lower end portion of the tube is peeled off. Therefore, it is possible to easily prevent clogging of the intake pipe.

It is a longitudinal section showing a 1st embodiment of the present invention. It is a principal part enlarged view of FIG. It is a longitudinal cross-sectional view which shows 2nd Embodiment of this invention.

A first embodiment of the present invention will be described with reference to FIGS.
A processing liquid, for example, water W is stored in the liquid tank 1 of the toxic gas abatement apparatus. A circulation path 5 for circulating the liquid W in the liquid tank 1 is disposed in the liquid tank 1. The circulation path 5 is provided with a gas-liquid mixing and stirring device 4 including a water guide pipe 2 and an intake pipe 13.

  The water guide pipe 2 is formed in an L shape, and an upper end thereof is connected to the circulation path 5, and a gas mixture liquid pipe 14 having a smaller diameter than the water guide pipe 2 is connected to the lower end 2 a thereof. An exhaust port 1 a for exhausting the detoxified gas (processed gas) protrudes from the upper part of the liquid tank 1.

  An intake pipe 13 is inserted into the water conduit 2, and the intake pipe 13 is, for example, an envelope pipe having a diameter (inner diameter) of 20 mm. The intake pipe 13 protrudes through the bent portion of the water guide pipe 2, and the upper end portion 13 a fixes the connection means for the supply line of the harmful gas G and the upper end portion 18 a of the flexible tube 18. Holding means is provided.

  The flexible tube 18 is, for example, a Teflon (registered trademark) pipe having a diameter (outer diameter) of 16 mm, and is slightly longer than the vertical length of the intake pipe 13. A vibration gap A is formed between the inner peripheral surface 13 b of the intake pipe 13 and the outer peripheral surface 18 a of the flexible tube 18. The vibration gap A is, for example, 2 mm, and the value is appropriately selected as necessary.

  The lower end portion 18 c of the tube 18 faces the lower end portion 13 c of the intake pipe 13, but the lower end of the tube 18 slightly protrudes from the lower end of the intake pipe 13. The protruding amount of the lower end of the tube 18 is equivalent to the impact gap A, but is appropriately selected as necessary.

  A narrow path ring 19 having a diameter larger than the diameter of the intake pipe 13 is fitted on the inner peripheral surface of the water guide pipe 2 on the lower end 2 a side. The narrow path ring 19 has a lower end portion 13 c of the intake pipe 13. An elliptical plate 20 to be held is provided.

  Next, the operation of this embodiment will be described. When the liquid W in the liquid layer 1 is sent to the circulation path 5 by a pump (not shown), the liquid W flows into the water conduit 2 and becomes a spiral flow by the action of the elliptical plate 20. The harmful gas G flowing down in the flexible tube 18 is mixed and stirred with the liquid W to form fine bubbles. The mixed gas / liquid WG is returned to the liquid tank 1 through the mixed gas / liquid pipe 14 and detoxified. Thereafter, the detoxified gas (processed gas) is sent to a production line or the like via the exhaust port 1a.

  When the detoxifying device is continuously operated, the powder generated by the reaction between the harmful gas G and the water W adheres to the lower end portion 18c of the tube 18 of the gas-liquid mixing and stirring device 4 and tends to be deposited.

  However, during the operation of the abatement apparatus, vibration is generated as the pump is driven, and the intake pipe 13 and the flexible tube 18 vibrate. At this time, since the flexible tube 18 is softer than the intake pipe 13 and easily displaced, the flexible tube 18 is greatly shaken as compared with the intake pipe 13, so that the lower end portion 18 c of the flexible tube 18 is moved radially in the vibration gap A. And the collision with the lower end 13c of the intake pipe 13 is repeated. Therefore, the powder adhering to the lower end portion 18c of the tube center portion 18 is peeled off, so that the tube 18 and the intake pipe 13 are not clogged with the powder.

  A second embodiment of the present invention will be described with reference to FIG. 3. The same reference numerals as those in FIGS. 1 and 2 have the same names and functions. The difference between this embodiment and the first embodiment is that a diameter-expanded portion 18 d that collides with water flowing in the water conduit 2 is connected to the lower end portion 18 c of the flexible tube 18. The enlarged diameter portion 18d is formed in a substantially truncated cone shape, the outer diameter of the upper end thereof is equal to the outer diameter of the lower end of the flexible tube 18, and the outer diameter of the lower end of the enlarged diameter portion 18d is the intake pipe. 13 is formed approximately equal to the outer diameter. The shape, size, and the like of the enlarged diameter portion 18d are appropriately changed as necessary.

  In this embodiment, the water W flowing in the water guide pipe 2 collides with the enlarged diameter portion 18d of the flexible tube 18, so that an impact force is applied to the lower end portion 18c of the tube 18. For this reason, the lower end portion 18c of the flexible tube 18 receives the impact force in addition to the vibration of the gas-liquid mixing and agitating device 4, so that the lower end portion 18c of the flexible tube 18 is vibrated vigorously. To do. Therefore, the lower end portion 18c of the tube 18 receives vibration stronger than the vibration in the first embodiment, so that the powder adhesion preventing effect can be further improved.

The embodiment of the present invention is not limited to the above, and may be as follows, for example.
(B) Instead of projecting the lower end of the flexible tube 18 from the lower end of the intake pipe 13, both lower ends may be positioned flush (zero projecting amount). The length may be the same instead of being longer than the length of the intake pipe 13 in the vertical direction.

C: The flexible tube 18 is shorter than the vertical length of the intake pipe 13 and only on the lower end side of the intake pipe 13, for example, the lower half of the vertical length of the intake pipe 13 The upper end portion may be fixed to the inner peripheral surface of the intake pipe 13.

Second: Instead of providing the vibration gap A over the entire length of the intake pipe 13 in the vertical direction, the vibration gap A is provided only at the lower end side, for example, the length of the lower half of the length of the intake pipe 13 in the vertical direction, In this part, the inner circumferential surface 13b of the intake pipe 13 and the outer circumferential surface 18a of the tube 18 may be brought into close contact with each other, and the vibration gap A may be omitted.

1 Liquid tank 2 Water conduit
4 Gas-liquid mixing and stirring device 13 Intake pipe 18 Flexible tube W Liquid G Toxic gas

Claims (7)

In the gas-liquid mixing and stirring device for inserting the intake pipe into the water conduit, and mixing the toxic gas discharged from the lower end of the intake pipe and the water in the water conduit,
A flexible tube is inserted into the intake pipe, and the lower end of the flexible tube is opposed to the lower end of the intake pipe.
A gas-liquid mixing and agitation device, wherein at least a lower end portion side of the intake pipe and a lower end portion side of the flexible tube are separated to form a vibration gap.   The gas-liquid mixing and stirring device according to claim 1, wherein a lower end of the flexible tube is flush with a lower end of the intake pipe.   The gas-liquid mixing and stirring device according to claim 1, wherein the lower end of the flexible tube protrudes from the lower end of the intake pipe.   4. The gas-liquid mixing and stirring device according to claim 1, wherein a length of the flexible tube is equal to or longer than a length of the intake pipe in a vertical direction.   4. The air tube according to claim 1, wherein the flexible tube is shorter than a vertical length of the intake pipe and is provided only on a lower end side of the intake pipe. Liquid mixing and stirring device.   The gas-liquid mixing and stirring device according to claim 1, wherein the vibration gap is provided over the entire length in the vertical direction of the intake pipe.   The gas-liquid according to claim 1, 2, 3, 4, 5 or 6, wherein a diameter-expanded portion where water flowing through the water conduit collides is continuously provided at a lower end portion of the flexible tube. Mixing and stirring device.

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