JP2011122743A - Sheath for burning - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a sheath for burning, preventing deterioration of mechanical strength and reducing a difference of heat capacity of a bottom plate and a main face of a burned object, as a storage container used when a ceramic electronic component etc. is burned. <P>SOLUTION: The sheath 11 for burning is equipped with: the bottom plate 2 having one main face on which the burned object is placed; a sidewall plate 5 provided around the bottom plate 2; and an adjustment plate 9 arranged to come into contact with the other main face of the bottom plate 2 and having through-holes 3a, 3b formed in the vicinity of the center and on the periphery. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention relates to a sheath used for firing an electronic component.

  Conventionally, a firing sheath has been used as a storage container used when firing an electronic component or the like using ceramic. The ceramic electronic component is manufactured in a state of a parent substrate in which a plurality of sub-substrates constituting the ceramic electronic component are arranged, and the parent substrate is disposed on the bottom of the sheath for firing. The sheath sheath is composed of a bottom portion on which the substrate is placed and a side wall portion disposed on the peripheral edge of the bottom portion. Patent document 1 is disclosed as a storage container which is such a sheath for baking.

  The configuration of the storage container of Patent Document 1 will be described with reference to FIGS. 9 and 10. 9 is a perspective view of the sheath 101, and FIG. 10 is a sectional view thereof. As shown in FIG. 9, the sheath 101 includes a bottom plate 103 and a side wall 105 protruding upward from the bottom plate 103. Then, an object to be heated such as a ceramic electronic component is placed on the one main surface 120 of the bottom plate 103. A plurality of recesses 107 are formed on the other main surface 122 of the bottom plate 103. The recess 107 can disperse the stress applied to the central portion of the bottom plate 103 during the heating to the side wall 105 side, thereby preventing the deformation of the bottom plate 103 and the object to be heated.

JP 2000-18840 A

  By the way, when a ceramic electronic component parent substrate formed by arranging a plurality of sub-substrates is placed on a firing sheath and heated or fired in a firing furnace or the like, a plurality of firing sheaths are located near the center in the firing furnace. Since they are arranged in a stacked manner, they are heated from the side of the firing sheath by the heat source inside the firing furnace. Therefore, when the firing furnace is heated up to a predetermined firing temperature, the peripheral portion of the firing sheath is closer to the heat source than the central portion, so that the peripheral portion has a shorter temperature rising time than the central portion and the temperature is lowered. The temperature drop time is shortened. For this reason, there is a problem in that the center portion and the edge portion of the parent substrate placed on the sheath for firing are in different firing states, resulting in variations in electrical characteristics and mechanical strength as electronic components.

  Patent Document 1 describes a structure in which a cross section of the bottom plate 3 of the firing sheath 1 is formed in a tapered shape or a recess 111 is formed in the bottom plate 3. By changing the thickness of the bottom plate, the heat capacity distribution in the bottom plate can be made uniform to some extent. However, as shown in FIG. 10, the center portion of the bottom plate is thin and the peripheral portion is thick. Further, there was a problem that the mechanical strength of the bottom plate was weakened and the sheath for baking was damaged.

  Therefore, an object of the present invention is to provide a sheath for firing that can reduce the difference in heat capacity between the objects to be fired without deteriorating mechanical strength.

In order to solve the above-mentioned problems, the sheathing sheath according to the present invention has a bottom plate on which a material to be fired is placed on one main surface, a side wall plate provided around the bottom plate, and the other main surface of the bottom plate. And an adjustment plate that is disposed so as to be in contact with each other and in which a plurality of through holes are formed.

  By using the adjustment plate arranged so as to be in contact with the bottom plate of the firing sheath as described above, the difference in heat capacity in the main surface of the bottom plate and the object to be fired without deteriorating the mechanical strength of the firing sheath. Can be reduced.

  Further, the through holes may be formed such that the arrangement density of the plurality of through holes in the adjustment plate becomes lower as the side plate is approached, and the size of the through holes is closer to the side wall plate. The through hole may be formed to be smaller.

  In this case, by lowering the arrangement density of the through holes in the peripheral part than the center part of the adjusting plate or by reducing the size of the through holes, the center part of the bottom plate and the object to be fired is compared with the case where there is no through hole. The difference between the temperature rising time or the temperature falling time at the peripheral edge can be reduced, and the difference in heat capacity between the bottom plate and the main surface of the object to be fired can be reduced.

  Further, the bottom plate and the adjustment plate may be formed of different materials.

  In this case, by forming the adjustment plate using a material that has a heat capacity such that the difference between the temperature rising time or the temperature falling time in the central portion and the peripheral portion of the bottom plate and the object to be fired is reduced, The difference in heat capacity in the main surface can be reduced.

  Further, an adjusting member may be disposed inside at least one of the through holes.

  When you want to adjust the heat capacity partially in the area of the bottom plate, you can finely adjust the heat capacity by arranging the adjusting member in the predetermined through hole, the heat capacity in the main surface of the bottom plate and the object to be fired This difference can be further reduced.

  Moreover, the area | region which formed the said through-hole may be contained in the mounting area | region of the said to-be-baked material when planarly viewed from the one main surface of the said baseplate.

  In this case, since at least a part of the region in which the through hole is formed is disposed immediately below the mounting region of the object to be fired, the amount of heat applied to the material to be fired during firing can be directly adjusted. It is possible to reduce the difference in heat capacity in the main surface.

  Furthermore, a side wall part may be arrange | positioned in the peripheral part of the main surface facing the main surface arrange | positioned so that the said bottom plate of the said adjustment plate may be contacted.

  In this case, since the heat capacity is increased at the side wall, the difference in heat capacity between the bottom plate and the main surface of the object to be fired can be further reduced.

  According to the present invention, it is possible to reduce the difference in heat capacity between the bottom plate of the firing sheath and the main surface of the object to be fired without deteriorating the mechanical strength of the firing sheath.

It is a general | schematic perspective view of the sheath for baking which concerns on the 1st Embodiment of this invention. It is sectional drawing of the sheath for baking which concerns on the 1st Embodiment of this invention. It is a top view of the adjustment board in the sheath for baking which concerns on the 1st Embodiment of this invention. It is a top view of the adjustment board in the sheath for baking which concerns on the 2nd Embodiment of this invention. It is sectional drawing in the sheath for baking which concerns on the 3rd Embodiment of this invention. It is a top view of the adjustment board in the sheath for baking which concerns on the 4th Embodiment of this invention. It is sectional drawing in the sheath for baking which concerns on the 5th Embodiment of this invention. It is a top view of the adjustment board in the sheath for baking which concerns on the 5th Embodiment of this invention. It is a general | schematic perspective view of the conventional sheath. It is sectional drawing of the conventional sheath for baking.

Hereinafter, embodiments of a sheath for firing according to the present invention will be described with reference to the accompanying drawings.
First Embodiment FIGS. 1 to 3
The configuration of the first embodiment according to the present invention is shown in FIGS. FIG. 1 is a schematic perspective view of the firing sheath 11, FIG. 2 is a cross-sectional view taken along the line AA ′ in FIG. 1, and FIG. 3 is a plan view of the adjustment plate in the firing sheath 11.

  As shown in FIG. 1, the firing sheath 11 of the first embodiment is composed of a bottom plate 2 and a side wall plate 5 arranged so as to extend upward from the peripheral portion of the surface 6 which is one main surface of the bottom plate 2. Has been. The bottom plate 2 and the side wall plate 5 are made of alumina or the like. And on the surface 6 of the bottom plate 2, a parent substrate 7, which is an object to be fired, is disposed. The parent substrate 7 has a rectangular shape with a side length of about 10 cm to 13 cm, and a plurality of sub-substrates of about several cm square are arranged in a lattice shape. Further, in the present embodiment, the parent substrate 7 is formed by alternately laminating insulator layers made of a ceramic dielectric material containing barium titanate and the like and wiring electrodes formed on the insulator layers. Low temperature co-sintered multilayer ceramic substrate formed by co-firing layers and wiring electrodes, but resin multilayer with a single ceramic substrate or multiple mounting components mounted on the surface It may be a substrate or the like.

  FIG. 2 shows a cross-sectional view of the firing sheath 11, but the adjustment plate 9 is arranged so as to contact the back surface 8 which is the other main surface of the bottom plate 2. In the present embodiment, the adjustment plate 9 is made using the same alumina as the bottom plate 2. FIG. 3 shows a plan view of the adjustment plate 9, but through holes 3 are provided at predetermined locations of the adjustment plate 9. Further, although the adjustment plate 9 and the bottom plate 2 are fixed using an adhesive, the adjustment plate 9 may be fixed to the bottom plate 2 with screws or the like.

In the first embodiment, a circular through hole 3a is formed near the center of the main surface of the adjusting plate 9, and a through hole 3b smaller than the through hole 3a is disposed around the through hole 3a. As in this embodiment, by disposing the large through hole 3a in the central portion of the adjustment plate 9, the heat capacity at the central portion of the bottom plate 2 is reduced, and the small through hole 3b is disposed in the peripheral portion of the adjustment plate 9. This increases the heat capacity at the peripheral edge of the bottom plate 2. Thereby, the difference in the heat capacity between the center portion and the peripheral portion of the bottom plate is reduced, and the difference between the heating time and the cooling time at the time of baking in the central portion and the peripheral portion of the sheath 11 can be reduced. The variation in electrical characteristics and the variation in mechanical strength due to the difference in the firing state in the main surface can be reduced. Furthermore, in the present embodiment, since the adjustment plate is simply disposed so as to come into contact with the bottom plate, the mechanical strength of the sheath is not reduced.
Second Embodiment FIG. 4
The configuration of the second embodiment according to the present invention is shown in FIG. FIG. 4 is a plan view of the adjustment plate 29 in the sheath for firing according to the second embodiment. The adjustment plate 29 in the present embodiment also has a function of adjusting the heat capacity of the pod for firing by being attached so as to be in contact with the back surface of the bottom plate. In addition, since the general perspective view of the sheath for firing in this embodiment is the same as that in FIG. 1 and the sectional view is only partially different from that in FIG.

In the adjustment plate 29 according to the second embodiment, three types of through holes 23 having different sizes are arranged so that the sizes of the through holes 23 decrease from the central portion toward the peripheral portion of the adjustment plate 29. By arranging the largest through hole 23a at the center of the adjustment plate 29, the second largest through hole 23b around the through hole 23a, and the smallest through hole 23c around the through hole 23b, the unit of the adjustment plate 29 The arrangement density of the through holes per area decreases as the distance from the central portion approaches the peripheral portion. Therefore, it is possible to finely adjust the heat capacity at the central portion and the peripheral portion of the firing sheath, and without reducing the mechanical strength of the firing sheath, variation in electrical characteristics of the electronic components formed on the parent substrate and Variation in mechanical strength can be reduced.
[Third Embodiment FIG. 5]
The configuration of the third embodiment according to the present invention is shown in FIG. FIG. 5 is a cross-sectional view of a scab 31 for firing in the third embodiment. The adjustment plate 39 in the present embodiment also has a function of adjusting the heat capacity of the pod for firing by being attached so as to contact the back surface 38 of the bottom plate 32. Note that an overview perspective view of the firing sheath 31 is the same as FIG. 1, and a plan view of the adjustment plate 39 is only partially different from FIG.

In the adjustment plate 39 according to the third embodiment, the size of the through hole 33 having a different size decreases from the central portion toward the peripheral portion of the adjustment plate 39, similarly to the adjustment plate 9 according to the first embodiment. Are arranged as follows. And the adjustment member 40 is arrange | positioned inside the through-hole 33a. The adjusting member 40 is disposed so as to be in contact with the side wall of the through hole 33a, and is fixed to the side wall portion with an adhesive. In addition, you may join the adjustment member 40 and the adjustment board 39 with attachment members, such as a screw, instead of an adhesive agent. By using a material different from the adjustment plate 39, particularly a material having a different heat capacity, as the adjustment member 40, the difference in heat capacity in the main surface direction of the bottom plate 32 can be reduced. In addition, when the firing sheath 31 and the main surface of the parent substrate 37 are fired without being uniformly heated due to temperature variations depending on the location in the firing furnace in the horizontal direction or the height direction, the predetermined through hole is used. By arranging the adjusting member 40 only on the surface, the temperature variation can be reduced, and the variation in the electrical characteristics and mechanical strength of the electronic component can be reduced. In the cross-sectional view shown in FIG. 5, the adjustment member 40 is disposed in the entire inside of the through hole 33 a. However, the adjustment member 40 may be disposed only in a part in the thickness direction of the through hole 33 a. . By adopting such a structure, the difference in heat capacity between the main surfaces of the bottom plate 32 and the parent substrate 37 can be further reduced.
[Fourth Embodiment FIG. 6]
The configuration of the fourth embodiment according to the present invention is shown in FIG. FIG. 6 is a plan view of the adjustment plate 49 in the sheath for firing according to the fourth embodiment. The adjustment plate 49 in the present embodiment also has a function of adjusting the heat capacity of the sheath sheath by being attached so as to be in contact with the back surface of the bottom plate. Note that an outline perspective view of the sheath for baking is the same as that in FIG. 1, and a cross-sectional view is only partially different from that in FIG.

The adjustment plate 49 in the fourth embodiment has the same shape as the adjustment plate 9 in the first embodiment, and a large through hole 43a is arranged at the center of the adjustment plate 49, and a small through hole 43b is arranged around the through hole 43a. is doing. In the plan view shown in FIG. 6, the parent substrate 47 arranged on one main surface of the bottom plate is indicated by a dotted line. In the present embodiment, since the region where the through-holes 43 are formed is included in the region where the parent substrate 47 is placed, the difference in heat capacity between the center portion and the peripheral portion of the bottom plate and the parent substrate 47 is reduced. Therefore, variations in electrical characteristics and mechanical strength of the electronic components constituting the parent substrate 47 can be further reduced. The arrangement of the through holes 43 may be changed according to variations in the heat capacity of the parent substrate 47, and all the through holes 43 may be arranged immediately below the parent substrate 47.
[Fifth Embodiment FIGS. 7 and 8]
The configuration of the fifth embodiment according to the present invention is shown in FIGS. FIG. 7 is a cross-sectional view of the firing sheath 51 in the fifth embodiment, and FIG. 8 is a plan view of the adjustment plate 59 in the firing sheath 51. The adjustment plate 59 in this embodiment also has a function of adjusting the heat capacity of the pod for firing by being attached so as to be in contact with the back surface of the bottom plate 52. Note that an overview perspective view of the sheath for sheath 51 is the same as FIG.

  The adjustment plate 59 in the fifth embodiment has a shape similar to that of the adjustment plate 9 in the first embodiment. A large through hole 53a is formed at the center of the adjustment plate 59, and a small through hole 53b is formed around the through hole 53a. It is arranged. In the present embodiment, the side wall 58 is disposed on the peripheral edge of the adjustment plate 59. The side wall portion 58 has a function of assisting the adjustment function of the heat capacity by the through hole 53. Even if the side wall portion 58 is formed integrally with the adjustment plate 59, the side wall portion 58 is formed separately from the adjustment plate 59 and the adhesive or the like. You may form so that it may join by. The side wall portion 58 has an effect of increasing the heat capacity particularly at the peripheral edge portion of the bottom plate 52, and the heat capacity can be effectively adjusted in the case of a large sized sheath. The side wall portion 58 does not need to be disposed on the entire periphery of the bottom plate 52, but is disposed only on the opposite side portion of the bottom plate 52, the height from the back surface of the bottom plate 52 is partially changed, or the adjustment plate 59. The heat capacity can be adjusted more finely by using different materials.

  In addition, embodiment in this invention is not limited to the said form, You may change suitably in order to acquire a desired characteristic. For example, the through hole formed in the adjustment plate may be rectangular, and the shape of the through hole may be partially changed in one adjustment plate. Further, the adjustment plate does not have to be the same size as the bottom plate, and may be shifted from the vicinity of the center of the bottom plate.

11, 31, 51 ・ ・ ・ Sheath sheath 2, 32, 52 ・ ・ ・ Bottom plate 3, 23, 33, 43, 53 ・ ・ ・ Through hole 5, 35, 55 ・ ・ ・ Side wall plate 7, 37, 47, 57... Parent substrate 9, 29, 39, 49, 59... Adjustment plate 40... Adjustment member 58.

Claims (7)

On the other hand, a bottom plate for placing the object to be fired on the main surface;
A side wall plate provided around the bottom plate;
An adjustment plate disposed so as to be in contact with the other main surface of the bottom plate and having a plurality of through holes;
A pod for firing characterized by comprising:   2. The firing sheath according to claim 1, wherein the through holes are formed so that an arrangement density of the plurality of through holes in the adjustment plate becomes lower as the side plate is approached.   The sheath hole according to claim 1 or 2, wherein the through hole is formed so that a size of the through hole becomes smaller as the side wall plate is approached.   The pod for firing according to any one of claims 1 to 3, wherein the bottom plate and the adjustment plate are formed of different materials.   The pod for firing according to any one of claims 1 to 4, wherein an adjustment member is disposed in at least one of the through holes.   6. The firing according to claim 1, wherein when viewed in plan from one main surface of the bottom plate, a region in which the through hole is formed is included in a placement region of the object to be fired. Saya.   The side wall part is arrange | positioned in the peripheral part of the main surface opposite to the main surface arrange | positioned so that the said bottom plate of the said adjustment plate may be contacted, The baking for any one of Claim 1 thru | or 6 characterized by the above-mentioned. Saya.