JP2011114206A - Fin integrated heat sink - Google Patents

Fin integrated heat sink Download PDF

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JP2011114206A
JP2011114206A JP2009269926A JP2009269926A JP2011114206A JP 2011114206 A JP2011114206 A JP 2011114206A JP 2009269926 A JP2009269926 A JP 2009269926A JP 2009269926 A JP2009269926 A JP 2009269926A JP 2011114206 A JP2011114206 A JP 2011114206A
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fin
heat sink
substrate
shape
fins
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Yoshio Fukagawa
栄生 深川
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Ryosan Co Ltd
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Ryosan Co Ltd
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  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a technique wherein, by improving a conventional corrugated fin type heat sink, a top part of each upper side projection being a fin part, does not become plane like before, as a result, wind from an upper part (vertical direction and oblique direction) sufficiently reaches a lower part of the fin part and a fixed part, the board thickness of the fin also obtains the same bending strength as before and is twice the thickness of the conventional corrugated fin, and thereby, the heat sink has the advantage of the heat conventional sink that plate fins are arranged in a substrate in parallel. <P>SOLUTION: In a corrugated fin with such a shape that the upper projection which is a fin part 1 and the lower projection which is a fixed part 2 are alternately formed by bending a plate member, a top part 3 of each upper side projection has a shape formed by a single folding. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

この発明は、半導体素子を冷却するヒートシンクに関する。   The present invention relates to a heat sink for cooling a semiconductor element.

従来、半導体素子を冷却するヒートシンクとして、図5に示すように基板90に多数の板状フィン91が列設して固着される形態のものが知られている。この形態のヒートシンクの製造方法として、基板90に列設された溝内にフィン91を嵌合した後、溝壁部92をかしめてフィン91と基板90とを固定する方法が知られている(特許文献1、図1、図5〜図7)。   2. Description of the Related Art Conventionally, as a heat sink for cooling a semiconductor element, a structure in which a large number of plate-like fins 91 are arranged and fixed on a substrate 90 as shown in FIG. As a method of manufacturing this type of heat sink, a method is known in which after fins 91 are fitted in grooves arranged in the substrate 90, the groove walls 92 are caulked to fix the fins 91 and the substrate 90 ( Patent Document 1, FIG. 1, FIGS. 5 to 7).

また、別のヒートシンクの形態として、コルゲート状(ひだ状)のフィンも知られている。これは、図6に示すように、板部材が曲折・押圧加工等により適宜折曲されて、フィン部100となる上側凸部と、固定部101となる下側凸部とが、交互に形成される形状となるものである(以下、この形状のフィンを「コルゲートフィン」ともいう)。この形態のヒートシンクの製造方法としては、コルゲートフィンをろう付けして基板103上に固着する方法や、コルゲートフィンを基板に押圧することによって固着する方法が用いられている(特許文献2、図5〜図7、0004、0005段落)。   As another heat sink, corrugated (pleated) fins are also known. This is because, as shown in FIG. 6, the plate member is appropriately bent by bending, pressing, or the like, so that the upper convex portion that becomes the fin portion 100 and the lower convex portion that becomes the fixing portion 101 are alternately formed. (Hereinafter, the fin having this shape is also referred to as “corrugated fin”). As a method of manufacturing this type of heat sink, a method of brazing corrugated fins and fixing them onto the substrate 103, or a method of fixing corrugated fins by pressing them against the substrate is used (Patent Document 2, FIG. 5). To paragraphs 7, 0004 and 0005).

特許第2715890号公報(図1、図5〜図7)Japanese Patent No. 2715890 (FIGS. 1 and 5 to 7) 特許第3602806号公報(図5〜図7、0004、0005段落)Japanese Patent No. 3602806 (paragraphs of FIGS. 5 to 7, 0004, 0005)

このような前者のヒートシンク、すなわち、基板90に多数の板状フィン91が列設されて固着される形態のものについては、フィン本体を曲折する必要はないが、これら板状のフィン91を一枚ずつ基板の溝に挿入して固着しなければならず、手間がかかる。また、フィン91を基板90に固着する際には、溝壁部92をかしめるために大きな荷重をかける必要があり、そのための設備投資がかさむという問題がある。   For the former heat sink, that is, in a form in which a large number of plate-like fins 91 are arranged and fixed to the substrate 90, it is not necessary to bend the fin body, but the plate-like fins 91 are all attached. It must be inserted and fixed into the groove of the substrate one by one, which takes time. Further, when the fin 91 is fixed to the substrate 90, it is necessary to apply a large load in order to caulk the groove wall portion 92, and there is a problem that capital investment for that purpose is increased.

一方、後者のヒートシンク、すなわち複数のフィン部100と固定部101とからなるコルゲートフィンを用いたものについては、フィン部を形成する各上側凸部の頂部102が平面状となり、屋根のようになってしまうので、上方(垂直方向や斜め方向)から風を当てて放熱する場合、その平面状頂部102に風が遮られて、下方(フィン部100下方や固定部101)へ効率よく風が当たらず、その放熱特性を下げてしまうことになる。同様に、風や水によるジェット噴射で清掃をする際にも、その天井部102に遮られて噴射が届かず、固定部101にゴミが溜まりやすい上、定期的なメンテナンスもしづらくなるという問題がある。また、これらフィン部100はその厚みが厚ければ厚いほど、放熱特性が向上する性質があるが、前者のヒートシンクではフィン91の板厚を容易に厚くすることができるのに対し、コルゲートフィンを用いた後者のヒートシンクでは、その板厚が厚いとフィン部100を曲折する工程で、曲げ強度を高めなければならず、費用がかさむという問題がある。   On the other hand, for the latter heat sink, that is, a corrugated fin composed of a plurality of fin portions 100 and a fixed portion 101, the top portion 102 of each upper convex portion forming the fin portion is flat and becomes like a roof. Therefore, when heat is radiated from the top (vertical direction or diagonal direction), if the wind is blocked by the flat top 102 and the wind efficiently hits the bottom (below the fin 100 or the fixed part 101) Therefore, the heat dissipation characteristic will be lowered. Similarly, when cleaning by jetting with wind or water, there is a problem that the ceiling part 102 blocks the jet and the jet does not reach, and the fixed part 101 tends to collect dust, and it is difficult to perform regular maintenance. is there. In addition, these fin portions 100 have a property of improving heat dissipation characteristics as the thickness increases, but the plate thickness of the fin 91 can be easily increased with the former heat sink, whereas corrugated fins are used. In the latter heat sink used, if the plate thickness is large, the bending strength must be increased in the step of bending the fin portion 100, and there is a problem that the cost is increased.

この発明は、従来技術の以上のような問題に鑑み創案されたもので、従来のコルゲートフィン型ヒートシンクを改良することによって、それが有する問題点を解決し、従来の板状フィンを基板に列設して固着されるヒートシンクの利点をも備えた技術を提供しようとするものである。   The present invention was devised in view of the above problems of the prior art, and by improving the conventional corrugated fin type heat sink, it solves the problems that it has and arranges the conventional plate fins on the substrate. The present invention intends to provide a technology that also has the advantage of a heat sink that is installed and fixed.

このため、この発明に係るフィン一体型ヒートシンクは、板部材を折曲して、フィン部となる上側凸部と、固定部となる下側凸部とが、交互に形成される形状のコルゲート状フィンにおいて、各上側凸部の頂部が、一度の折り返しで形成されるような形状であることを特徴とする。   For this reason, the fin-integrated heat sink according to the present invention is a corrugated shape in which a plate member is bent and an upper convex portion serving as a fin portion and a lower convex portion serving as a fixing portion are alternately formed. In the fin, the top portion of each upper convex portion has a shape that is formed by one turn.

本発明のフィン部となる各上側凸部は、一度の折り返しで形成されるような形状となっており、各上側凸部の頂部は、後述する実施形態例に示すように、尖っている形状(先端がアール状となるものも含む)となるので、上方からの風もフィン部下方や固定部に十分届くことになる。   Each upper convex part which becomes a fin part of the present invention has a shape that is formed by one turn, and the top part of each upper convex part is a pointed shape as shown in an embodiment described later. Therefore, the wind from above reaches the lower part of the fin part and the fixed part sufficiently.

以上説明したように、本発明に係るフィン一体型ヒートシンクによれば、フィン部である各上側凸部の頂部が、従来のような平面状とならないので、上方(垂直方向や斜め方向)からの風がフィン部下方や固定部に十分届くことになり、放熱特性が向上する上、固定部のメンテナンスやゴミ溜まりを防ぐことができる。また、その板厚も従来と同じ曲げ強度で、従来のコルゲートフィンの2倍の厚さを得ることができ、放熱特性を向上させることができる。   As described above, according to the fin-integrated heat sink according to the present invention, the top portion of each upper convex portion that is a fin portion does not have a planar shape as in the prior art, so that it is from above (vertical direction or oblique direction). The wind reaches the lower part of the fin part and the fixed part sufficiently, so that the heat radiation characteristic is improved and the maintenance of the fixed part and the accumulation of dust can be prevented. In addition, the plate thickness can be the same bending strength as the conventional one, a thickness twice that of the conventional corrugated fin can be obtained, and the heat dissipation characteristics can be improved.

本発明に係るフィンの一形態例を示し、(a)は正面図、(b)は斜視図である。An example of the fin according to the present invention is shown, (a) is a front view, and (b) is a perspective view. 図1の形態例を直方体状の基板に取り付けた状態を示す正面図である。It is a front view which shows the state attached to the rectangular parallelepiped board | substrate of the example of FIG. 本発明の実施形態例を基板にかしめて取り付ける状態を示す図であって、(a)は本形態例を基板にかしめる前の斜視図、(b)は本形態例を基板にかしめた後の斜視図である。BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a diagram showing a state in which an embodiment of the present invention is caulked to a substrate, (a) is a perspective view before caulking this embodiment to the substrate, and (b) is after caulking this embodiment to the substrate. FIG. 本発明の他の実施形態例を示し、(a)は正面図、(b)は斜視図である。FIG. 4 shows another embodiment of the present invention, where (a) is a front view and (b) is a perspective view. 従来の板状フィンを基板に列設して固着したヒートシンクを示す図であって、(a)は正面図、(b)は斜視図である。It is a figure which shows the heat sink which arranged and fixed the conventional plate-shaped fin on the board | substrate, (a) is a front view, (b) is a perspective view. 従来のコルゲートフィン型ヒートシンクを基板に取り付けた状態を示す図であり、(a)は正面図、(b)は斜視図である。It is a figure which shows the state which attached the conventional corrugated fin type heat sink to the board | substrate, (a) is a front view, (b) is a perspective view.

本願に係る発明の具体的実施形態の一例を図面に基づき説明する。以下に示すコルゲートフィン及び基板は、素材としてアルミニウムを想定しているが、形態例に示す変形自在な素材で、かつヒートシンクとして放熱特性に優れる素材であれば、銅やマグネシウム等の金属でも、さらに他の素材でもよい。なお、以下の形態例はあくまで一例に過ぎず、本願に係る発明が以下の形態例に限定されるものでないことは当然である。   An example of a specific embodiment of the invention according to the present application will be described with reference to the drawings. The corrugated fin and substrate shown below assume aluminum as a material, but if it is a deformable material shown in the form example and is a material having excellent heat dissipation characteristics as a heat sink, even a metal such as copper or magnesium, Other materials may be used. The following embodiment is merely an example, and it is natural that the invention according to the present application is not limited to the following embodiment.

図1は本発明に係るフィンの一形態例を示し、(a)は正面図、(b)は斜視図である。1はフィン部(上側凸部)、2は固定部(下側凸部)、3はフィン部の頂部を各示す。本発明に係るフィンは、従来のコルゲート状(ひだ状)フィンを改良したものになるため、以下、図6に示す従来の形態を基に説明する。   FIG. 1 shows one embodiment of the fin according to the present invention, where (a) is a front view and (b) is a perspective view. Reference numeral 1 denotes a fin portion (upper convex portion), 2 denotes a fixed portion (lower convex portion), and 3 denotes a top portion of the fin portion. Since the fin according to the present invention is an improvement over the conventional corrugated (pleated) fin, the following description will be given based on the conventional form shown in FIG.

本形態例の基になる形態は図6に示すように、板部材が折曲されて、フィン部100となる上側凸部と、固定部101となる下側凸部とが、交互に形成される形状のコルゲートフィンであるが、本形態例は、図1に示すとおり、各上側凸部の頂部3が、一度の折り返しで形成されるような形状となっており、さらに各上側凸部1を形成する板部材相互が上下にわたって(頂部から基端部まで)すべて重なるように形成されている。このため、各上側凸部、すなわち各フィン部1の頂部3は図示のように尖った状態となっている。このような形態は、従来のコルゲートフィン製造工程を利用した工程によって得ることができるが、もちろんその工程以外の工程で得られるものであっても良い。   As shown in FIG. 6, the base form of the present embodiment is formed by bending the plate member and alternately forming the upper convex portion that becomes the fin portion 100 and the lower convex portion that becomes the fixing portion 101. In this embodiment, as shown in FIG. 1, the top portion 3 of each upper convex portion is formed so as to be folded once, and each upper convex portion 1 Are formed so that all of the plate members forming the upper and lower sides overlap (from the top to the base end). For this reason, each upper convex part, ie, the top part 3 of each fin part 1, is in a pointed state as shown in the figure. Such a form can be obtained by a process using a conventional corrugated fin manufacturing process, but may of course be obtained by a process other than that process.

また、本形態例においては、固定部2となる下側凸部相互が隙間なく隣接することになり、フィンA底部に隙間のない水平面が形成される。したがって、フィンAは、この固定部2の水平面を直接放熱器に固着して、それ単体でもヒートシンクとして使用することができる。また、図2に示すように、接触面が平面となる基板4に固着させて使用させてもよい。本形態例では基板4は直方体状となっているが、その形状は特に限定されない。固着方法は、ロウ、半田、粘着テープ、接着剤等、フィン部Aと基板4とを接着させるものであれば、何を用いてもよい。また、次に記載するように、本形態例をかしめて基板に取り付けたヒートシンクとしてもよい。   Further, in the present embodiment, the lower convex portions that serve as the fixing portions 2 are adjacent to each other without a gap, and a horizontal plane having no gap is formed at the bottom of the fin A. Therefore, the fin A can be used as a heat sink by fixing the horizontal surface of the fixed portion 2 directly to the heat radiator. In addition, as shown in FIG. 2, the contact surface may be fixed to a substrate 4 having a flat surface. In the present embodiment, the substrate 4 has a rectangular parallelepiped shape, but the shape is not particularly limited. Any fixing method may be used as long as the fin portion A and the substrate 4 are bonded to each other, such as brazing, solder, adhesive tape, or adhesive. Further, as described below, the present embodiment may be a heat sink that is attached to the substrate by caulking.

図3は、本形態例に係るヒートシンクを、基板にかしめた一形態例を示す。フィンBは、フィンAの固定部2からフィン部1の基端部にわたって2列の切欠部5,6が形成された構成となっている。そして、基板にはフィンの切欠部5,6に対応する位置に突条部7,8が形成される。   FIG. 3 shows an embodiment in which the heat sink according to this embodiment is caulked on the substrate. The fin B has a configuration in which two rows of notches 5 and 6 are formed from the fixing portion 2 of the fin A to the base end portion of the fin portion 1. And the protrusion part 7 and 8 is formed in the board | substrate at the position corresponding to the notch part 5 and 6 of a fin.

次に、フィンBを基板にかしめる工程を示す。まず、図3(a)に示すように、上記基板の突条部7,8をフィンBの切欠部5,6に嵌入させ、その後、図3(b)に示すように、各フィン部1間に挟まれた突条部7,8部分を上方より押しつぶし、切欠部5,6の縁部にかしめ付けてかしめ部9,10となし、フィンBを基板4に取り付ける。   Next, a process of caulking the fin B to the substrate is shown. First, as shown in FIG. 3 (a), the protrusions 7 and 8 of the substrate are inserted into the notches 5 and 6 of the fin B, and then, as shown in FIG. The protrusions 7 and 8 sandwiched between them are crushed from above, and are caulked to the edges of the notches 5 and 6 to form caulking portions 9 and 10, and the fin B is attached to the substrate 4.

また、図4に示すように、図1に示す形態例を図4に示すような基板4にかしめる際、フィン基端部を広げて多少の隙間が生じるように設置してもよい。このようなフィンCでも、各上側凸部の頂部が一度の折り返しで形成されるような形状である点は前記形態例と同じであるため、図示のように各フィン部1の頂部3は尖った状態となり、本発明の効果を得ることができる。本形態例のヒートシンクは、図4(b)に示すように、基板4の突条部11がフィンCの固定部2間に嵌入されて形成される。   Further, as shown in FIG. 4, when the embodiment shown in FIG. 1 is caulked to the substrate 4 as shown in FIG. 4, the fin base end portion may be widened so that a slight gap is generated. Even in such a fin C, the top part of each upper part is the same as that of the above-described embodiment in that the top part of each upper convex part is formed by a single turn, so that the top part 3 of each fin part 1 is pointed as shown in the figure. Thus, the effect of the present invention can be obtained. As shown in FIG. 4B, the heat sink according to the present embodiment is formed by inserting the protrusions 11 of the substrate 4 between the fixing portions 2 of the fins C.

このような、本形態例に係るフィン一体型ヒートシンクによれば、コルゲートフィン型ヒートシンクの天井部102の平面をなくしたため、板状フィンを基板に列設してなるヒートシンク同様、上方(垂直方向や斜め方向)からの風がフィン部1下方や固定部2に十分届くことになり、その放熱特性を維持できるとともに、固定部2にゴミが溜まるのを防ぎ、そのメンテナンスもしやすくすることができる。また、フィンAのようにフィン部1が頂部3からフィン基端部まで板部材相互が上下にわたってすべて重なるように形成された形態であれば、固定部2だけでなく、板部材相互間へのゴミ溜まりを防ぎ、その部分のメンテナンスも容易にすることができる。そして、その板厚も従来の長尺状の板部材を利用し、それらを二重に重ねた構成とすることから、その曲げ強度を高めることなく、従来のコルゲートフィンの2倍の厚さを得ることができ、放熱特性を向上させることができる。   According to such a fin-integrated heat sink according to this embodiment, since the plane of the ceiling portion 102 of the corrugated fin-type heat sink has been eliminated, the upper (vertical direction or The wind from the oblique direction) can reach the lower part of the fin part 1 and the fixed part 2 sufficiently, so that the heat radiation characteristics can be maintained, and dust can be prevented from collecting in the fixed part 2, and the maintenance can be facilitated. Further, as in the case of the fin A, if the fin portion 1 is formed so that the plate members overlap each other from the top portion 3 to the fin base end portion in the vertical direction, not only the fixed portion 2 but also between the plate members. It is possible to prevent the accumulation of dust and facilitate the maintenance of the portion. And since the plate thickness also uses the conventional long plate member and has a structure in which they are double stacked, the thickness is twice that of the conventional corrugated fin without increasing the bending strength. Can be obtained, and heat dissipation characteristics can be improved.

さらに、固定部2が平面状でほぼ1つの面を形成していることから、基板4を設けず、フィン単体でヒートシンクとして使用できる他、基板4に固着して使用する場合も、フィンA〜Cが一体化されていることから、一度にフィンA〜Cを基板4に接着したり、基板4の溝に挿入することができ、手間がかからない。そして、フィンA〜Cをかしめて固着する場合の荷重も、基板90の溝壁部92をかしめるのに比べ低減できる。   In addition, since the fixing portion 2 is flat and has almost one surface, the fin 4 can be used as a heat sink without providing the substrate 4, and can be used as a heat sink by using the fin alone. Since C is integrated, the fins A to C can be bonded to the substrate 4 at a time or inserted into the grooves of the substrate 4, and it does not take time. The load when the fins A to C are caulked and fixed can also be reduced as compared with the caulking of the groove wall portion 92 of the substrate 90.

なお、本願に係る発明が上記形態例に限定されるものでないことは上記したとおりであり、例えば、フィンA〜Cの形態は他の形態であっても構わず、フィン部1及び固定部2の数や大きさ等も適宜変更可能である。また、フィンを基板4に接着、かしめ等により固着させたヒートシンクとする場合は、フィンと基板が対応している形状であれば良く、例えば、基板に溝を形成させ、フィンをその溝に嵌合させるような構成であれば、フィン固定部の形状をその溝の形状に合わせてももちろんよい。   As described above, the invention according to the present application is not limited to the above-described embodiment. For example, the fins A to C may be in other forms, and the fin portion 1 and the fixing portion 2 The number, size, etc. can be changed as appropriate. Further, in the case of a heat sink in which fins are fixed to the substrate 4 by bonding, caulking, etc., the fins and the substrate may be in a corresponding shape.For example, a groove is formed in the substrate, and the fin is fitted into the groove. Of course, the shape of the fin fixing portion may be matched to the shape of the groove as long as it is configured to match.

A〜C フィン
1 フィン部(上側凸部)
2 固定部(下側凸部)
3 頂部
4 基板
5,6 切欠部
7,8 突条部
9,10 かしめ部
11 突条部
A ~ C Fin
1 Fin part (upper convex part)
2 Fixed part (lower convex part)
3 Top
4 Board
5,6 Notch
7,8 ridge
9,10 Caulking section
11 ridge

Claims (1)

板部材を折曲して、フィン部となる上側凸部と、固定部となる下側凸部とが、交互に形成される形状のコルゲート状フィンにおいて、各上側凸部の頂部が、一度の折り返しで形成されるような形状であること特徴とするフィン一体型ヒートシンク。   In the corrugated fin having a shape in which the plate member is bent and the upper convex portion serving as the fin portion and the lower convex portion serving as the fixing portion are alternately formed, the top portion of each upper convex portion is once A fin-integrated heat sink having a shape that is formed by folding.
JP2009269926A 2009-11-27 2009-11-27 Fin integrated heat sink Pending JP2011114206A (en)

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Cited By (11)

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CN102290668A (en) * 2011-08-16 2011-12-21 台达电子企业管理(上海)有限公司 Connection shell and heat radiator using same
JP3179086U (en) * 2011-07-27 2012-10-18 クールイット システムズ インク Fluid heat exchange system
JP2013175450A (en) * 2012-01-26 2013-09-05 Aps Japan Co Ltd Heat sink
JP2016174034A (en) * 2015-03-16 2016-09-29 株式会社Ihi Semiconductor power module
US10214109B2 (en) 2013-11-28 2019-02-26 Fuji Electric Co., Ltd. Method for manufacturing cooler for semiconductor-module, cooler for semiconductor-module, semiconductor-module and electrically-driven vehicle
US10364809B2 (en) 2013-03-15 2019-07-30 Coolit Systems, Inc. Sensors, multiplexed communication techniques, and related systems
US10365667B2 (en) 2011-08-11 2019-07-30 Coolit Systems, Inc. Flow-path controllers and related systems
US11395443B2 (en) 2020-05-11 2022-07-19 Coolit Systems, Inc. Liquid pumping units, and related systems and methods
US11452243B2 (en) 2017-10-12 2022-09-20 Coolit Systems, Inc. Cooling system, controllers and methods
US11473860B2 (en) 2019-04-25 2022-10-18 Coolit Systems, Inc. Cooling module with leak detector and related systems
US11662037B2 (en) 2019-01-18 2023-05-30 Coolit Systems, Inc. Fluid flow control valve for fluid flow systems, and methods

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JPH06260571A (en) * 1993-03-09 1994-09-16 Fuji Electric Co Ltd Cooling fin
JPH0883871A (en) * 1994-09-14 1996-03-26 Sumitomo Metal Ind Ltd Channel type heat dissipation fin and production thereof
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JPS6027448U (en) * 1983-07-29 1985-02-25 ソニー株式会社 radiator
JPH06260571A (en) * 1993-03-09 1994-09-16 Fuji Electric Co Ltd Cooling fin
JPH0883871A (en) * 1994-09-14 1996-03-26 Sumitomo Metal Ind Ltd Channel type heat dissipation fin and production thereof
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Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3179086U (en) * 2011-07-27 2012-10-18 クールイット システムズ インク Fluid heat exchange system
US10365667B2 (en) 2011-08-11 2019-07-30 Coolit Systems, Inc. Flow-path controllers and related systems
US11714432B2 (en) 2011-08-11 2023-08-01 Coolit Systems, Inc. Flow-path controllers and related systems
CN102290668A (en) * 2011-08-16 2011-12-21 台达电子企业管理(上海)有限公司 Connection shell and heat radiator using same
JP2013175450A (en) * 2012-01-26 2013-09-05 Aps Japan Co Ltd Heat sink
US11661936B2 (en) 2013-03-15 2023-05-30 Coolit Systems, Inc. Sensors, multiplexed communication techniques, and related systems
US10364809B2 (en) 2013-03-15 2019-07-30 Coolit Systems, Inc. Sensors, multiplexed communication techniques, and related systems
US10214109B2 (en) 2013-11-28 2019-02-26 Fuji Electric Co., Ltd. Method for manufacturing cooler for semiconductor-module, cooler for semiconductor-module, semiconductor-module and electrically-driven vehicle
JP2016174034A (en) * 2015-03-16 2016-09-29 株式会社Ihi Semiconductor power module
US11452243B2 (en) 2017-10-12 2022-09-20 Coolit Systems, Inc. Cooling system, controllers and methods
US11662037B2 (en) 2019-01-18 2023-05-30 Coolit Systems, Inc. Fluid flow control valve for fluid flow systems, and methods
US11473860B2 (en) 2019-04-25 2022-10-18 Coolit Systems, Inc. Cooling module with leak detector and related systems
US11725890B2 (en) 2019-04-25 2023-08-15 Coolit Systems, Inc. Cooling module with leak detector and related systems
US12031779B2 (en) 2019-04-25 2024-07-09 Coolit Systems, Inc. Cooling module with leak detector and related systems
US11395443B2 (en) 2020-05-11 2022-07-19 Coolit Systems, Inc. Liquid pumping units, and related systems and methods

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