JP2011108386A - Vacuum valve, and manufacturing method thereof - Google Patents

Vacuum valve, and manufacturing method thereof Download PDF

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JP2011108386A
JP2011108386A JP2009259551A JP2009259551A JP2011108386A JP 2011108386 A JP2011108386 A JP 2011108386A JP 2009259551 A JP2009259551 A JP 2009259551A JP 2009259551 A JP2009259551 A JP 2009259551A JP 2011108386 A JP2011108386 A JP 2011108386A
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fixed
vacuum
energizing shaft
vacuum valve
shaft
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JP5361673B2 (en
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Hiroki Sekimori
裕希 関森
Keisei Seki
経世 関
Kiyoshi Osabe
清 長部
Hiromichi Somei
宏通 染井
Kosuke Sasage
浩資 捧
Kiyotaka Miyata
清隆 宮田
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Toshiba Corp
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Toshiba Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To smoothly form a surface of a sliver coating prepared at a connecting part of a conductive shaft, and suppress a contact resistance value. <P>SOLUTION: In a vacuum valve provided with a vacuum insulation vessel 1, a pair of contacts of free contact and separation housed in the vacuum insulation vessel 1, and an end part of a fixing side conductive shaft 4 as well as an end part of a movable side conductive shaft guided outside the vacuum insulation vessel 1, a brazing material 12 with silver as a main component placed at an end part of the conductive shaft 4 in non-contact with the same is heated in a simply sealed vacuum, and a silver coating 16 is provided at an end part of the conductive shaft 4 including an end face 4a by vapor deposition. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

本発明は、真空絶縁容器外に導出された通電軸の接触抵抗を低下し得る真空バルブおよびその製造方法に関する。   The present invention relates to a vacuum valve that can reduce the contact resistance of a current-carrying shaft led out of a vacuum insulating container and a method for manufacturing the same.

先ず、真空バルブの構成を図６を参照して説明する。図６に示すように、筒状の真空絶縁容器１の両端開口部には、固定側封着金具２と可動側封着金具３が封着されている。固定側封着金具２には、固定側通電軸４が貫通固定され、その端部に固定側接点５が固着されている。固定側接点５に対向して接離自在の可動側接点６が可動側封着金具３を貫通する可動側通電軸７端部に固着されている。可動側通電軸７の中間部と可動側封着金具３間には、伸縮自在のベローズ８が封着されている。これにより、真空絶縁容器１内の真空を保ちながら、可動側通電軸７を軸方向に移動させることができる。接点５、６の周りには、筒状のアークシールド９が真空絶縁容器１内面に固定されている。   First, the configuration of the vacuum valve will be described with reference to FIG. As shown in FIG. 6, a fixed-side sealing fitting 2 and a movable-side sealing fitting 3 are sealed at both ends of the cylindrical vacuum insulating container 1. A fixed-side energizing shaft 4 is penetrated and fixed to the fixed-side sealing fitting 2, and a fixed-side contact 5 is fixed to an end portion thereof. A movable contact 6, which can be moved toward and away from the fixed contact 5, is fixed to the end of the movable energizing shaft 7 that penetrates the movable seal 3. An expandable / contractible bellows 8 is sealed between an intermediate portion of the movable side energizing shaft 7 and the movable side sealing fitting 3. Thereby, the movable energizing shaft 7 can be moved in the axial direction while maintaining the vacuum in the vacuum insulating container 1. A cylindrical arc shield 9 is fixed to the inner surface of the vacuum insulating container 1 around the contacts 5 and 6.

真空絶縁容器１外に導出された固定側通電軸４の端面４ａには、固定側接続導体１０が接続される。固定側と同様に、真空絶縁容器１外に導出された可動側通電軸７の外周面７ａには、可動側接続導体１１が接続される。   A fixed-side connection conductor 10 is connected to the end surface 4 a of the fixed-side energizing shaft 4 led out of the vacuum insulating container 1. Similar to the fixed side, the movable side connection conductor 11 is connected to the outer peripheral surface 7 a of the movable side energizing shaft 7 led out of the vacuum insulating container 1.

そして、従来、固定側接続導体１０との接続部となる固定側通電軸４の端面４ａには、接触抵抗を抑制するため、銀被膜が設けられている。銀被膜は、図７に示すように、銀を主成分とするろう材１２を端面４ａに載置し、更にセラミックス製の重り１３を載せ、真空加熱炉でろう材１２を溶解させることにより、設けられている。可動側通電軸７の外周面７ａにも、同様の方法で銀被膜が設けられている（例えば、特許文献１参照。）。   Conventionally, a silver coating is provided on the end surface 4 a of the fixed-side conductive shaft 4 that is a connection portion with the fixed-side connection conductor 10 in order to suppress contact resistance. As shown in FIG. 7, the silver coating is formed by placing a brazing material 12 mainly composed of silver on the end face 4a, further placing a weight 13 made of ceramic, and dissolving the brazing material 12 in a vacuum heating furnace. Is provided. A silver coating is also provided on the outer peripheral surface 7a of the movable energizing shaft 7 by the same method (see, for example, Patent Document 1).

特開２０００−１８２４８５公報 （第３ページ、図１）JP 2000-182485 A (3rd page, FIG. 1)

上記の従来の真空バルブにおいては、次のような問題がある。ろう材１２に重り１３を載せて溶解させ、銀被膜を設ける方法では、銀被膜の表面が重り１３の表面状態に左右される。即ち、ろう材１２と対向する重り１３の表面の平面度や清掃状態などにより、銀被膜に斑などができる。銀被膜の表面が粗状態になると、接続導体１０、１１との接続部における接触抵抗を上昇させることになる。   The above-described conventional vacuum valve has the following problems. In the method in which the weight 13 is placed on the brazing material 12 and dissolved to provide a silver coating, the surface of the silver coating depends on the surface state of the weight 13. That is, spots or the like are formed on the silver coating depending on the flatness of the surface of the weight 13 facing the brazing material 12 or the cleaning state. When the surface of the silver coating becomes rough, the contact resistance at the connection portion with the connection conductors 10 and 11 is increased.

本発明は上記問題を解決するためになされたもので、接続部に設けられる銀被膜を滑らかな表面状態とし、接触抵抗を低下させる真空バルブおよびその製造方法を提供することを目的とする。   The present invention has been made to solve the above problems, and an object of the present invention is to provide a vacuum valve and a method for manufacturing the same, in which a silver coating provided on a connection portion is brought into a smooth surface state to reduce contact resistance.

上記目的を達成するために、本発明の真空バルブは、真空絶縁容器と、前記真空絶縁容器内に収納される接離自在の一対の接点と、前記接点に接続されるとともに、前記真空絶縁容器外に導出された通電軸の端部とを有する真空バルブにおいて、前記通電軸の端部に、これと非接触で置いたろう材を真空中で加熱し、蒸着により銀被膜を設けたことを特徴とする。   In order to achieve the above object, a vacuum valve according to the present invention includes a vacuum insulating container, a pair of contactable and separable contacts accommodated in the vacuum insulating container, and the vacuum insulating container connected to the contacts. A vacuum valve having an end portion of a current-carrying shaft led out to the end of the current-carrying shaft, a brazing material placed in non-contact with the end of the current-carrying shaft is heated in vacuum, and a silver coating is provided by vapor deposition And

本発明によれば、銀被膜を銀の蒸着により設けているので、表面を滑らかに形成することができ、接続導体との接続部の接触抵抗を低下させることができる。   According to the present invention, since the silver coating is provided by vapor deposition of silver, the surface can be formed smoothly, and the contact resistance of the connection portion with the connection conductor can be reduced.

本発明の実施例１に係る真空バルブの製造方法を示す固定側断面図。The fixed sectional side view which shows the manufacturing method of the vacuum valve which concerns on Example 1 of this invention. 本発明の実施例１に係る真空バルブ全体組立て時の製造方法を示す固定側断面図。The fixed side sectional view which shows the manufacturing method at the time of the whole vacuum valve assembly which concerns on Example 1 of this invention. 本発明の実施例１に係る真空バルブの製造方法を示す可動側断面図。The movable side sectional view which shows the manufacturing method of the vacuum valve which concerns on Example 1 of this invention. 本発明の実施例２に係る真空バルブの製造方法を示す固定側断面図。The fixed side sectional view which shows the manufacturing method of the vacuum valve which concerns on Example 2 of this invention. 本発明の実施例３に係る真空バルブの製造方法を示す固定側断面図。The fixed side sectional view showing the manufacturing method of the vacuum valve concerning Example 3 of the present invention. 真空バルブの構成を示す断面図。Sectional drawing which shows the structure of a vacuum valve. 従来方法による真空バルブの製造方法を示す固定側断面図。The fixed side sectional view which shows the manufacturing method of the vacuum valve by a conventional method.

接続導体が接続される通電軸の接続面に、真空中で銀を蒸着させ、銀被膜を設けるものである。以下、図面を参照して本発明を実施例を説明する。   Silver is vapor-deposited in a vacuum on the connection surface of the current-carrying shaft to which the connection conductor is connected, and a silver coating is provided. Embodiments of the present invention will be described below with reference to the drawings.

先ず、本発明の実施例１に係る真空バルブを図１〜図３を参照して説明する。図１は、本発明の実施例１に係る真空バルブの製造方法を示す固定側断面図、図２は、本発明の実施例１に係る真空バルブ全体組立て時の製造方法を示す固定側断面図、図３は、本発明の実施例１に係る真空バルブの製造方法を示す可動側断面図である。なお、各図において、従来と同様の構成部分については、同一符号を付した。また、真空バルブの構成は、従来と同様であるので、その詳細な説明を省略する。   First, a vacuum valve according to Embodiment 1 of the present invention will be described with reference to FIGS. FIG. 1 is a fixed side sectional view showing a manufacturing method of a vacuum valve according to Embodiment 1 of the present invention, and FIG. 2 is a fixed side sectional view showing a manufacturing method when assembling the whole vacuum valve according to Embodiment 1 of the present invention. FIG. 3 is a movable side sectional view showing the method for manufacturing the vacuum valve according to the first embodiment of the present invention. In addition, in each figure, the same code | symbol was attached | subjected about the component similar to the past. Moreover, since the structure of a vacuum valve is the same as the past, the detailed description is abbreviate | omitted.

図１に示すように、固定側においては、先ず、ろう材１２を配置したステンレス材からなる有底筒状の固定側キャップ１４を準備する。固定側キャップ１４内には、中間部に、モリブデンを主成分とする金属材からなる複数本の棒状の固定側ワイヤ１５が固定されている。固定側ワイヤ１５には、Ａｇ板からなるろう材１２が載置されている。   As shown in FIG. 1, on the fixed side, first, a bottomed cylindrical fixed side cap 14 made of a stainless material on which a brazing material 12 is arranged is prepared. In the fixed side cap 14, a plurality of rod-shaped fixed side wires 15 made of a metal material mainly composed of molybdenum are fixed in the middle part. A brazing material 12 made of an Ag plate is placed on the fixed side wire 15.

次に、端面４ａを上向きにして真空バルブを固定し、開口部を下向きにした固定側キャップ１４で固定側通電軸４の端部を覆い、開口部を固定側封着金具２に当接させ、簡易密閉する。固定側キャップ１４の内径は、固定側通電軸４の外径よりも僅かに大きい。固定側ワイヤ１５と固定側通電軸４の端面４ａ間は、僅かな隙間を有している。ろう材１２は、固定側通電軸４の外径とほぼ同様であり、０．数ｍｍの厚さである。   Next, the vacuum valve is fixed with the end face 4a facing upward, the fixed-side cap 14 with the opening facing downward covers the end of the fixed-side energizing shaft 4, and the opening is brought into contact with the fixed-side sealing fitting 2 , Simple sealing. The inner diameter of the fixed cap 14 is slightly larger than the outer diameter of the fixed energizing shaft 4. There is a slight gap between the fixed side wire 15 and the end face 4 a of the fixed side energizing shaft 4. The brazing material 12 is substantially the same as the outer diameter of the fixed-side energizing shaft 4. The thickness is several mm.

この状態を保って、温度７５０℃〜８３０℃に加熱した１０−２Ｐａ以下の真空加熱炉に搬入し、３時間保持し、ろう材１２を溶解させる。固定側ワイヤ１５は濡れ性がよく、銀蒸気を拡散させる。すると、端面４ａを含む固定側通電軸４端部には、図示一点鎖線で示すように、厚さ数μｍの銀被膜１６を設けることができる。銀被膜１６は、ろう材１２と端面４ａとが非接触であって、銀の蒸着により形成されるので、滑らかな表面とすることができる。なお、固定側キャップ１４の内容積と、ろう材１２の容量とを調整すれば、銀被膜１６の厚さを制御することができる。 While maintaining this state, it is carried into a vacuum heating furnace of 10 −2 Pa or less heated to a temperature of 750 ° C. to 830 ° C. and held for 3 hours to dissolve the brazing filler metal 12. The fixed wire 15 has good wettability and diffuses silver vapor. Then, a silver coating 16 having a thickness of several μm can be provided at the end of the stationary energizing shaft 4 including the end face 4a, as shown by a dashed line in the figure. Since the brazing material 12 and the end face 4a are not in contact with each other and the silver coating 16 is formed by vapor deposition of silver, the silver coating 16 can have a smooth surface. Note that the thickness of the silver coating 16 can be controlled by adjusting the internal volume of the fixed cap 14 and the capacity of the brazing material 12.

ここで、真空バルブの組立てにおいては、固定側部材と可動側部材をそれぞれ組立てる部分組立てと、これらの固定側部材と可動側部材とを組立てる全体組立てとの製造工程がある。   Here, in the assembly of the vacuum valve, there are manufacturing processes including a partial assembly in which the fixed side member and the movable side member are respectively assembled, and an entire assembly in which these fixed side member and the movable side member are assembled.

部分組立て時に銀被膜１６を設けた場合には、全体組立て時に再加熱を行うので、銀被膜１６が軟化し、蒸発する可能性がある。このような場合には、図２に示すように、ステンレス製の蒸発防止キャップ１７を固定側通電軸４端部に嵌め込んで、全体組立てを行うものとする。蒸発防止キャップ１７により、全体組立て後においても銀被膜１６を良好に保持することができる。なお、全体組立て時に銀被膜１６を設ける場合には、蒸発防止キャップ１７を設ける工程は不要となる。   When the silver coating 16 is provided at the time of partial assembly, since reheating is performed at the time of the entire assembly, the silver coating 16 may be softened and evaporated. In such a case, as shown in FIG. 2, the stainless steel evaporation prevention cap 17 is fitted into the end of the stationary-side energizing shaft 4 and the entire assembly is performed. The evaporation prevention cap 17 can hold the silver coating 16 well even after the entire assembly. In addition, when providing the silver film 16 at the time of whole assembly, the process of providing the evaporation prevention cap 17 becomes unnecessary.

可動側においては、図３に示すように、先ず、開口部を上向きにしたステンレス材からなる有底筒状の可動側キャップ１８を準備する。可動側キャップ１８内には、モリブデンを主成分とする金属材からなるスプリング状の可動側ワイヤ１９が置かれ、また、可動側ワイヤ１９の外周に円弧状のＡｇ板からなるろう材２０が置かれている。ろう材２０は、環状としてもよい。可動側ワイヤ１９の内径は、可動側通電軸７の外径よりも僅かに大きい。可動側キャップ１８の深さは、可動側通電軸７の端部の長さと同程度以上である。   On the movable side, as shown in FIG. 3, first, a bottomed cylindrical movable side cap 18 made of a stainless material with an opening facing upward is prepared. In the movable side cap 18, a spring-like movable side wire 19 made of a metal material mainly composed of molybdenum is placed, and a brazing material 20 made of an arc-shaped Ag plate is placed on the outer periphery of the movable side wire 19. It is. The brazing material 20 may be annular. The inner diameter of the movable side wire 19 is slightly larger than the outer diameter of the movable side energizing shaft 7. The depth of the movable side cap 18 is equal to or greater than the length of the end of the movable side energizing shaft 7.

次に、真空バルブの可動側を下向きにし、可動側通電軸７の端部をスプリング状となった可動側ワイヤ１９内に挿入し、簡易密閉する。   Next, the movable side of the vacuum valve is turned downward, and the end of the movable-side energizing shaft 7 is inserted into the movable-side wire 19 having a spring shape, and is simply sealed.

この状態を保って、固定側と同様に、温度７５０℃〜８３０℃に加熱した真空加熱炉に搬入し、３時間保持し、ろう材２０を溶解させる。これにより、外周面７ａに銀被膜を設けることができる。   In this state, the brazing material 20 is melted in a vacuum heating furnace heated to a temperature of 750 ° C. to 830 ° C. and held for 3 hours as in the fixed side. Thereby, a silver film can be provided in the outer peripheral surface 7a.

上記実施例１の真空バルブによれば、固定側通電軸４の端面４ａでは固定側キャップ１４を用い、また、可動側通電軸７の外周面７ａでは可動側キャップ１８を用いて簡易密閉し、真空加熱によりろう材１２、２０を溶解させ、端面４ａや外周面７ａに銀の蒸着による銀被膜１６を設けているので、銀被膜１６の表面を滑らかに形成することができ、接触抵抗を低下させることができる。   According to the vacuum valve of the first embodiment, the fixed-side cap 14 is used on the end surface 4a of the fixed-side energizing shaft 4, and the outer-side surface 7a of the movable-side energizing shaft 7 is simply sealed using the movable-side cap 18. Since the brazing filler metals 12 and 20 are melted by vacuum heating and the silver coating 16 is formed by vapor deposition of silver on the end face 4a and the outer peripheral surface 7a, the surface of the silver coating 16 can be formed smoothly and the contact resistance is lowered. Can be made.

上記実施例１では、ろう材１２、２０にＡｇ板を用いて説明したが、Ａｇ−２８％Ｃｕの共晶Ａｇを用いても、表面が滑らかな銀被膜１６を設けることができる。即ち、ろう材１２、２０には、Ａｇを主成分とした銀合金を用いることができる。   In Example 1 described above, an Ag plate was used for the brazing filler metals 12 and 20, but the silver coating 16 having a smooth surface can be provided even if a eutectic Ag of Ag-28% Cu is used. That is, for the brazing filler metals 12 and 20, a silver alloy mainly composed of Ag can be used.

次に、本発明の実施例２に係る真空バルブを図４を参照して説明する。図４は、本発明の実施例２に係る真空バルブの製造方法を示す固定側断面図である。なお、この実施例２が実施例１と異なる点は、真空バルブの固定側を下向きにしたことである。図４において、実施例１と同様の構成部分においては、同一符号を付し、その詳細な説明を省略する。   Next, a vacuum valve according to Embodiment 2 of the present invention will be described with reference to FIG. FIG. 4 is a fixed side sectional view showing a method for manufacturing a vacuum valve according to Embodiment 2 of the present invention. The second embodiment differs from the first embodiment in that the fixed side of the vacuum valve is directed downward. In FIG. 4, the same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

図４に示すように、開口部を上向きにし、底部にろう材１２を置いた固定側キャップ１４を準備する。そして、真空バルブの固定側を下向きにして固定側キャップ１４内に挿入し、固定側通電軸４の端部を簡易密閉する。ろう材１２と端面４ａ間は、僅かな隙間があり、非接触となっている。この状態を保って、真空加熱を行えば、端面４ａを含む固定側通電軸４の端部に銀被膜を設けることができる。   As shown in FIG. 4, the fixed side cap 14 with the opening portion facing upward and the brazing material 12 placed on the bottom portion is prepared. Then, the vacuum valve is inserted into the fixed side cap 14 with the fixed side facing downward, and the end of the fixed side energizing shaft 4 is simply sealed. There is a slight gap between the brazing filler metal 12 and the end face 4a, so that there is no contact. If this state is maintained and vacuum heating is performed, a silver coating can be provided on the end portion of the stationary energizing shaft 4 including the end face 4a.

上記実施例２の真空バルブによれば、実施例１と同様の効果が得られるほかに、実施例１との選択により、真空バルブの上下方向に左右されず、接続部に銀被膜を設けることができる。   According to the vacuum valve of the second embodiment, the same effect as that of the first embodiment can be obtained, and a silver coating is provided on the connection portion without depending on the vertical direction of the vacuum valve by selection with the first embodiment. Can do.

次に、本発明の実施例３に係る真空バルブを図５を参照して説明する。図５は、本発明の実施例３に係る真空バルブの製造方法を示す固定側断面図である。なお、この実施例３が実施例２と異なる点は、簡易密閉の方法である。図５において、実施例２と同様の構成部分においては、同一符号を付し、その詳細な説明を省略する。   Next, a vacuum valve according to Embodiment 3 of the present invention will be described with reference to FIG. FIG. 5 is a fixed side sectional view showing a method for manufacturing a vacuum valve according to Embodiment 3 of the present invention. The third embodiment is different from the second embodiment in a simple sealing method. In FIG. 5, the same components as those in the second embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

図５に示すように、固定板２１にろう材１２を置き、その上に複数本の固定側ワイヤ１５を所定の間隔を保って並べ、固定側通電軸４の端面４ａを固定側ワイヤ１５の上に載せるものである。固定側封着金具２と固定板２１間には、真空バルブを固定するための複数枚の支持板２２を設けている。この状態を保って、真空加熱を行えば、端面４ａに銀被膜を設けることができる。なお、銀被膜は、固定側ワイヤ１５が当接している部分には形成されないが、接触抵抗を大きく低下させるものではない。   As shown in FIG. 5, the brazing material 12 is placed on the fixed plate 21, a plurality of fixed-side wires 15 are arranged on the fixed plate 21 at a predetermined interval, and the end surface 4 a of the fixed-side conductive shaft 4 is placed on the fixed-side wire 15. It is to be put on. A plurality of support plates 22 for fixing the vacuum valve are provided between the fixed-side sealing fitting 2 and the fixed plate 21. If this state is maintained and vacuum heating is performed, a silver film can be provided on the end face 4a. In addition, although a silver film is not formed in the part which the fixed side wire 15 contact | abuts, a contact resistance is not reduced significantly.

上記実施例３の真空バルブによれば、実施例２と同様の効果を得ることができる。   According to the vacuum valve of the third embodiment, the same effect as that of the second embodiment can be obtained.

１ 真空絶縁容器
２ 固定側封着金具
３ 可動側封着金具
４ 固定側通電軸
４ａ 端面
５ 固定側接点
６ 可動側接点
７ 可動側通電軸
７ａ 外周面
８ ベローズ
９ アークシールド
１０ 固定側接続導体
１１ 可動側接続導体
１２、２０ ろう材
１３ 重り
１４ 固定側キャップ
１５ 固定側ワイヤ
１６ 銀被膜
１７ 蒸発防止キャップ
１８ 可動側キャップ
１９ 可動側ワイヤ
２１ 固定板
２２ 支持板 DESCRIPTION OF SYMBOLS 1 Vacuum insulated container 2 Fixed side sealing metal fitting 3 Movable side sealing metal fitting 4 Fixed side energizing shaft 4a End surface 5 Fixed side contact 6 Movable side contact 7 Movable side energizing shaft 7a Outer peripheral surface 8 Bellows 9 Arc shield 10 Fixed side connection conductor 11 Movable side connecting conductors 12, 20 Brazing material 13 Weight 14 Fixed side cap 15 Fixed side wire 16 Silver coating 17 Evaporation prevention cap 18 Movable side cap 19 Movable side wire 21 Fixed plate 22 Support plate

Claims (6)

真空絶縁容器と、
前記真空絶縁容器内に収納される接離自在の一対の接点と、
前記接点に接続されるとともに、前記真空絶縁容器外に導出された通電軸の端部とを有する真空バルブにおいて、
前記通電軸の端部に、これと非接触で置いたろう材を真空中で加熱し、蒸着により銀被膜を設けたことを特徴とする真空バルブ。 A vacuum insulation container;
A pair of contactable and separable contacts housed in the vacuum insulating container;
In a vacuum valve connected to the contact and having an end of a current-carrying shaft led out of the vacuum insulating container,
A vacuum valve, wherein a brazing material placed in non-contact with the end of the energizing shaft is heated in a vacuum, and a silver coating is provided by vapor deposition. 真空絶縁容器と、
前記真空絶縁容器内に収納される接離自在の一対の接点と、
前記接点に接続されるとともに、前記真空絶縁容器外に導出された通電軸の端部とを有する真空バルブの製造方法において、
前記通電軸の端部をキャップで覆って簡易密閉し、
前記キャップ内に、前記通電軸の端部と非接触にてろう材を配置し、
この状態を保って、真空中で加熱して前記ろう材を溶解し、
前記ろう材に含有される銀を前記通電軸の端部に蒸着させ、銀被膜を設けたことを特徴とする真空バルブの製造方法。 A vacuum insulation container;
A pair of contactable and separable contacts housed in the vacuum insulating container;
In the method of manufacturing a vacuum valve, which is connected to the contact and has an end portion of a current-carrying shaft led out of the vacuum insulating container,
Cover the end of the current-carrying shaft with a cap for easy sealing,
In the cap, a brazing material is arranged in non-contact with the end of the energizing shaft,
While maintaining this state, the brazing material is dissolved by heating in vacuum,
A method of manufacturing a vacuum valve, wherein silver contained in the brazing material is vapor-deposited on an end of the energizing shaft and a silver coating is provided. 前記通電軸は、固定側通電軸であり、
先ず、内面の中間部に棒状の固定側ワイヤを固定するとともに、この固定側ワイヤに前記ろう材を置き、且つ開口部を下向きにした固定側キャップを準備し、
次に、前記固定側通電軸を上向きに固定し、
前記固定側キャップで前記固定側通電軸の端部を覆うことを特徴とする請求項２に記載の真空バルブの製造方法。 The energizing shaft is a fixed-side energizing shaft,
First, while fixing a rod-like fixed side wire to the middle part of the inner surface, the brazing material is placed on the fixed side wire, and a fixed side cap with the opening facing downward is prepared,
Next, the fixed-side energizing shaft is fixed upward,
The method for manufacturing a vacuum valve according to claim 2, wherein an end portion of the fixed-side energizing shaft is covered with the fixed-side cap. 前記通電軸は、固定側通電軸であり、
先ず、底部に前記ろう材を置くとともに、開口部を上向きにした固定側キャップを準備し、
次に、前記固定側通電軸を下向きにし、
前記固定側キャップ内に前記固定側通電軸の端部を挿入することを特徴とする請求項２に記載の真空バルブの製造方法。 The energizing shaft is a fixed-side energizing shaft,
First, while placing the brazing material on the bottom, prepare a fixed side cap with the opening facing upward,
Next, the fixed-side energizing shaft faces downward,
The method for manufacturing a vacuum valve according to claim 2, wherein an end portion of the fixed-side energizing shaft is inserted into the fixed-side cap. 前記通電軸は、可動側通電軸であり、
先ず、スプリング状の可動側ワイヤおよびこの可動側ワイヤの外周に前記ろう材を配置するとともに、開口部を上向きにした可動側キャップを準備し、
次に、前記可動側通電軸を下向きにし、
前記可動側ワイヤ内に前記可動側通電軸の端部を挿入することを特徴とする請求項２乃至請求項４のいずれか１項に記載の真空バルブの製造方法。 The energizing shaft is a movable energizing shaft,
First, while arranging the brazing material on the outer periphery of the spring-like movable side wire and the movable side wire, prepare a movable side cap with the opening facing upward,
Next, with the movable side energizing shaft facing downward,
5. The method of manufacturing a vacuum valve according to claim 2, wherein an end portion of the movable-side energizing shaft is inserted into the movable-side wire. 前記銀被膜を部分組立て時に設けた場合には、全体組立て時に、当該部分を蒸発防止キャップで覆うことを特徴とする請求項２乃至請求項５のいずれか１項に記載の真空バルブの製造方法。   6. The method of manufacturing a vacuum valve according to claim 2, wherein when the silver coating is provided during partial assembly, the portion is covered with an evaporation preventing cap during the entire assembly. .
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