JP2011107277A - Apparatus and method of adjusting position and angle, optical apparatus, method of manufacturing the optical apparatus, optical scanner, and image forming apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide: an apparatus and a method of adjusting position and angle, which accurately adjusts the position and the angle of an oscillation mirror used for an optical apparatus provided to an optical scanner or the like mounted on an image forming apparatus such as a copy machine; the optical apparatus and a method of manufacturing the optical apparatus; an optical scanner provided with the optical apparatus; and an image forming apparatus having the optical scanner. <P>SOLUTION: This invention relates to the apparatus of adjusting position and angle, wherein the apparatus uses: a positioning and fixing part 52a for fixing a fixing member 31 to be installed at the predetermined position of the optical apparatus in a predetermined attitude at a position and an attitude which are deemed as identical with the predetermined position and the predetermined attitude; and a position and angle setting means which sets the position and the attitude of a holding member 61 which holds an oscillation mirror module 28 with respect to the fixing member 31 fixed at the position and the attitude on the positioning and fixing part 52a on X, Y, Z axes and in angles α, β, γ around these axes, respectively so that the oscillation mirror included in the oscillation mirror module 28 is positioned at the predetermined position of the optical apparatus and in the predetermined attitude in a state of being fixed to the fixing member 31. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention is provided in a display device such as an optical scanning device, an optical scanning bar code reading device, an in-vehicle laser radar device, a head-mounted display, etc. mounted on an image forming apparatus such as a copying machine, a facsimile, or a printer. Position angle adjustment device and position angle adjustment method for adjusting the position and angle of a vibration mirror module including a vibration mirror used in an optical device, such an optical device, a method for manufacturing such an optical device, an optical scanning device including such an optical device, The present invention relates to such an image forming apparatus having the optical scanning device.

  Such a vibrating mirror module (for example, see [Patent Document 1] to [Patent Document 9]) has a configuration in which a vibrating mirror whose surface forms a deflection surface and a torsion beam that pivotally supports the vibrating mirror are integrally formed. When this is used, it is possible to reduce the size as compared with the case of using a polygon mirror or a galvano mirror, and it is possible to operate at a high speed, and to achieve low noise and low power consumption. For example, it is used in such an optical scanning device, such an image forming apparatus, etc. (see, for example, [Patent Document 1] to [Patent Document 7]).

  In the case of using such a vibration mirror module, the positioning accuracy of the vibration mirror is important in order to exhibit the function of the vibration mirror satisfactorily. The position of the vibration mirror in the three axial directions in space, and these three axes It is preferable to optimize the angle around each axis. Conventionally, the structure which sets this position and angle is known (for example, refer to [patent document 1]).

  However, in such a known configuration, it is unclear how the positioning of the vibrating mirror is optimized, and it is difficult to say that the positioning accuracy of the vibrating mirror is sufficiently secured. is there.

  The present invention is provided in a display device such as an optical scanning device, an optical scanning bar code reading device, an in-vehicle laser radar device, a head-mounted display, etc. mounted on an image forming apparatus such as a copying machine, a facsimile, or a printer. POSITION ANGLE ADJUSTMENT DEVICE AND POSITION ANGLE ADJUSTMENT METHOD FOR ADJUSTING POSITION AND ANGLE OF VIBRATION Mirror MODULE INCLUDING VIBRATION MIRROR USED IN OPTICAL DEVICE WITH HIGH ACCURACY, OPTICAL DEVICE, MANUFACTURING METHOD OF OPTICAL DEVICE, AND LIGHT EQUIPPED WITH OPTICAL DEVICE It is an object of the present invention to provide a scanning device and such an image forming apparatus having the optical scanning device.

  In order to achieve the above object, the invention described in claim 1 includes: a holding member that holds a vibrating mirror module including a vibrating mirror; and a fixing member that is installed at a predetermined position in a predetermined position of the optical device. A positioning and fixing portion for fixing at a position and a position that are identified as the position and the predetermined attitude; and the vibration mirror included in the vibration mirror module in a state where the vibration mirror module is fixed to the fixing member. In the optical device, the position of the holding member holding the vibrating mirror module is set to a predetermined position in a predetermined posture with respect to the fixing member fixed to the positioning fixing portion in the position and posture. The position x on the X axis corresponding to the rotational axis direction of the vibrating mirror in the state where the ideal position and the ideal posture are occupied, and the vibration of the vibrating mirror is The position y on the Y axis corresponding to the direction orthogonal to the X axis on the mirror surface of the vibrating mirror in the stopped state, the position on the Z axis corresponding to the direction orthogonal to the X axis and the Y axis a position angle having a position angle setting means for setting each of the holding members at an angle α around the Y axis, an angle β around the X axis, and an angle γ around the Z axis. In the adjustment device.

  According to a second aspect of the present invention, in the position angle adjusting device according to the first aspect, the positioning and fixing portion is provided in the optical device, and the fixing member is installed in a predetermined position at a predetermined position of the optical device. The second urging means for fixing the fixing member to the positioning and fixing portion in the position and posture, which is equated with one urging means, is provided.

  According to a third aspect of the present invention, in the state where the position and orientation of the oscillating mirror module is set with respect to the fixed member using the position angle adjusting device according to the first or second aspect, the oscillating mirror module is used as the fixed member. The position angle adjustment method is fixed.

  According to a fourth aspect of the present invention, in the position angle adjusting method according to the third aspect of the present invention, the position angle setting means includes a first adjustment step of setting the angle α and the angle β.

  According to a fifth aspect of the present invention, in the position angle adjustment method according to the third or fourth aspect, the reference mirror set to the ideal position and the ideal posture, and light is incident on the reference mirror at an ideal position and angle. The reference light source is used, and the position on the X-axis of the light incident and reflected from the reference light source to the reference mirror and the vibration mirror replaced with the reference mirror are incident and reflected from the reference light source. It has the 2nd adjustment process which sets the said position z by the said position angle setting means so that the position on the said X-axis of light may become the same.

  According to a sixth aspect of the present invention, in the position angle adjustment method according to any one of the third to fifth aspects, the reference mirror set to the ideal position and ideal posture in a state where the vibration mirror is driven. The angle α is set so that the center position of vibration on the X-axis of the light incident on and reflected from the vibration mirror from the reference light source that makes light incident at an ideal position and angle is the ideal position. It has the 3rd adjustment process, It is characterized by the above-mentioned.

  According to a seventh aspect of the present invention, in the position angle adjustment method according to any one of the third to sixth aspects, the reference mirror set to the ideal position and ideal posture in a state where the vibration mirror is driven. A fourth adjustment step of setting the angle γ so that the vibration direction of the light incident and reflected on the vibrating mirror from the reference light source that makes light incident at an ideal position and angle is parallel to the X axis It is characterized by having.

  According to an eighth aspect of the present invention, in the position angle adjustment method according to any one of the third to seventh aspects, the light is emitted at an ideal position and angle with respect to the reference mirror set to the ideal position and the ideal posture. A fifth adjusting step is provided in which the position x and the position y are set so that light from a reference light source to be incident enters the center of the vibrating mirror.

  A ninth aspect of the present invention is the position angle adjusting method according to the eighth aspect, wherein the position angle is dependent on the position angle adjusting method according to each of the seventh, sixth, fifth and fourth aspects. In the adjustment method, the first adjustment step, the second adjustment step, the third adjustment step, the fourth adjustment step, and the fifth adjustment step are performed in order.

  According to a tenth aspect of the present invention, the vibration mirror module is positioned using the position angle adjusting device according to the first or second aspect or the position angle adjusting method according to any one of the third to ninth aspects. Further, the fixing member is in an optical device in which the fixing member is fixed at a predetermined position and a predetermined posture.

  An eleventh aspect of the present invention is the optical apparatus according to the tenth aspect, wherein the optical apparatus is subordinate to the position angle adjusting apparatus according to the second aspect, and has a first urging means.

  According to a twelfth aspect of the present invention, the vibration mirror module is positioned by using the position angle adjusting device according to the first or second aspect or the position angle adjusting method according to any one of the third to ninth aspects. Further, the present invention resides in an optical device manufacturing method for manufacturing an optical device in which the fixing member is fixed at a predetermined position and a predetermined posture.

  A thirteenth aspect of the invention includes the optical device according to the tenth or eleventh aspect and a light source of light reflected by the vibrating mirror, and deflects light emitted from the light source by driving the vibrating mirror. It is in the optical scanning device.

  According to a fourteenth aspect of the present invention, there is provided an image forming apparatus comprising: the optical scanning device according to the thirteenth aspect; and an image carrier on which a predetermined image is written by the light emitted from the optical scanning device.

  In the present invention, a holding member that holds a vibrating mirror module including a vibrating mirror and a fixing member that is installed at a predetermined position in a predetermined position of the optical device are identified with the predetermined position and the predetermined posture. A positioning and fixing portion that fixes in position and orientation, and the oscillating mirror included in the oscillating mirror module in a state in which the oscillating mirror module is fixed to the fixing member is positioned in a predetermined position at a predetermined position of the optical device. As described above, in the state where the position of the holding member holding the vibrating mirror module occupies the ideal position and the ideal posture in the optical device with respect to the fixing member fixed to the positioning and fixing portion in the position and posture. A position x on the X axis corresponding to the rotation axis direction of the vibration mirror, and the vibration mirror in a state where the vibration of the vibration mirror is stopped The holding member is set at a position y on the Y axis corresponding to the direction orthogonal to the X axis on the mirror surface, and a position z on the Z axis corresponding to the direction orthogonal to the X axis and the Y axis. Since the position angle adjusting device has position angle setting means for setting the posture of the angle at the angle α around the Y axis, the angle β around the X axis, and the angle γ around the Z axis, the vibration mirror is included. The position and angle of the oscillating mirror module can be adjusted with high accuracy. By mounting the oscillating mirror module whose position and angle are adjusted with high accuracy in the optical device, for example, deterioration of the light diameter, focus position, etc. Therefore, it is possible to provide a position angle adjusting device that can suppress or prevent the shift of the image, the shift of the scanning position, and the like, and contribute to satisfactorily exhibiting the expected function of the optical device.

  The positioning fixing unit is provided in the optical device and is identified with a first urging unit for installing the fixing member at a predetermined position in the optical device in a predetermined posture. If the second urging means for fixing at the position and posture is provided, the oscillating mirror including the oscillating mirror with respect to the fixing member positioned with high accuracy without using the urging means. It is possible to adjust the position and angle of the module with high accuracy, and by mounting the vibration mirror module whose position and angle are adjusted with high accuracy on the optical device in a state of being fixed to the fixing member, For example, it is possible to provide a position angle adjusting device that can suppress or prevent the deterioration of the light diameter, the shift of the focus position, the shift of the scanning position, etc., and contribute to the satisfactory performance of the optical device. It can be.

  The present invention is a position angle adjustment method for fixing the vibration mirror module to the fixed member in a state where the position and posture of the vibration mirror module are set with respect to the fixed member using the position angle adjusting device. The position and angle of the oscillating mirror module including the oscillating mirror can be adjusted with high accuracy and fixed to the fixing member, and the oscillating mirror module whose position and angle are adjusted with high accuracy can be fixed to the fixing member. By mounting on an optical device, for example, a position angle that can suppress or prevent the deterioration of the light diameter, the focus position shift, the scan position shift, etc., and contribute to the satisfactory performance of the optical device. An adjustment method can be provided.

  If the position angle setting means has a first adjustment step for setting the angle α and the angle β, the angle α and the angle β are set through the first adjustment step, and a vibrating mirror is included. The position and angle of the oscillating mirror module can be adjusted with high accuracy and fixed to the fixed member, and the oscillating mirror module whose position and angle are adjusted with high accuracy is mounted on the optical device while being fixed to the fixing member. Thus, for example, a position angle adjustment method that can suppress or prevent the deterioration of the light diameter, the shift of the focus position, the shift of the scanning position, etc., and contribute to the satisfactory performance of the optical device is provided. can do.

  Using a reference mirror set to the ideal position and ideal posture, and a reference light source that makes light incident on the reference mirror at an ideal position and angle, light that is incident and reflected from the reference light source to the reference mirror The position angle setting means so that the position on the X axis of the light incident and reflected from the reference light source on the vibrating mirror replaced with the reference mirror is the same as the position on the X axis If the second adjustment step for setting the position z is performed, the position z is set through the second adjustment step, and the position and angle of the vibration mirror module including the vibration mirror are adjusted with high accuracy. By mounting the vibration mirror module, which can be fixed to the fixing member and whose position and angle are adjusted with high accuracy, in the optical device in a state of being fixed to the fixing member, for example, deterioration of the light diameter Deviation of the focus position, the displacement and the like is suppressed or prevented scanning position, it is possible to provide a position angle adjusting method that can contribute to satisfactorily exhibit the desired function of the optical device.

  In a state where the vibrating mirror is driven, the reference light source that makes light incident at an ideal position and angle with respect to the reference mirror set at the ideal position and the ideal posture from the reference light source that is incident on the vibrating mirror and reflected from the reference mirror. If there is a third adjustment step for setting the angle α so that the center position of vibration on the X axis becomes an ideal position, the angle α is set and vibration is passed through the third adjustment step. The position and angle of the oscillating mirror module including the mirror can be adjusted with high accuracy and fixed to the fixed member, and the oscillating mirror module with the position and angle adjusted with high accuracy is optically fixed to the fixing member. By mounting on the device, for example, it is possible to suppress or prevent the deterioration of the light diameter, the focus position, the scanning position, etc., and to adjust the position angle that can contribute to the satisfactory performance of the optical device. Trimming methods can be provided.

  Vibration of light reflected and incident on the vibrating mirror from a reference light source that makes light incident at an ideal position and angle with respect to the reference mirror set in the ideal position and ideal posture while the vibrating mirror is driven If there is a fourth adjustment step for setting the angle γ so that the direction is parallel to the X-axis, the vibration mirror including the vibration mirror is set through the fourth adjustment step. The position and angle of the module can be adjusted with high accuracy and fixed to the fixing member, and the vibration mirror module whose position and angle are adjusted with high accuracy can be mounted on the optical device while being fixed to the fixing member. Thus, for example, it is possible to provide a position angle adjustment method that can suppress or prevent the deterioration of the light diameter, the shift of the focus position, the shift of the scanning position, and the like, and contribute to satisfactorily performing the expected function of the optical device. Can do.

  The position x and the position y are such that light from a reference light source that makes light incident at an ideal position and angle with respect to the reference mirror set to the ideal position and ideal posture enters the center of the vibrating mirror. If the fifth adjustment step is set, the position x and the position y are set through the fifth adjustment step, and the position and angle of the vibration mirror module including the vibration mirror are adjusted and fixed with high accuracy. By mounting a vibrating mirror module whose position and angle are adjusted with high precision on an optical device while being fixed to the fixing member, for example, deterioration of the light diameter, focus position It is possible to provide a position angle adjustment method that can contribute to exerting the desired function of the optical apparatus satisfactorily by suppressing or preventing the deviation and the deviation of the scanning position.

  If the first adjustment process, the second adjustment process, the third adjustment process, the fourth adjustment process, and the fifth adjustment process are performed in order, the position x, the position y, the position z, The angle α, angle β, and angle γ can all be set efficiently and reliably, and the position and angle of the vibrating mirror module including the vibrating mirror can be adjusted with high accuracy and fixed to the fixing member. By mounting a vibrating mirror module whose position and angle are adjusted with high accuracy on an optical device while being fixed to a fixed member, for example, it is possible to suppress degradation of the light diameter, shift of the focus position, shift of the scanning position, etc. In addition, it is possible to provide a position angle adjustment method that can prevent or contribute to the satisfactory performance of the optical device.

  The present invention resides in such an optical device in which the position angle adjusting device or the fixing member in which the vibrating mirror module is positioned is fixed in a predetermined position and a predetermined posture by using the position angle adjusting method. The position and angle of the oscillating mirror module including the oscillating mirror can be adjusted with high accuracy and fixed to the fixing member, and the oscillating mirror module whose position and angle are adjusted with high accuracy is fixed to the fixing member. For example, it is possible to provide an optical device capable of suppressing or preventing the deterioration of the light diameter, the focus position shift, the scan position shift, and the like, and exhibiting the desired function satisfactorily. it can.

  If the first urging means is provided, the position and angle of the oscillating mirror module including the oscillating mirror can be adjusted with high accuracy and fixed to the fixing member by using the urging means. Yes, by mounting a vibrating mirror module whose position and angle are adjusted with high accuracy while being fixed to a fixed member, for example, it is possible to suppress deterioration of the light diameter, shift of the focus position, shift of the scanning position, etc. It is possible to provide an optical device that can prevent and perform the desired function satisfactorily.

  The present invention provides an optical device for manufacturing an optical device in which the fixing member on which the oscillating mirror module is positioned is fixed at a predetermined position and a predetermined posture by using the position angle adjusting device or the position angle adjusting method. Since it is in the manufacturing method of the apparatus, the position and angle of the vibration mirror module including the vibration mirror can be adjusted with high accuracy, and the vibration mirror module whose position and angle are adjusted with high accuracy is mounted on the optical device. Thus, for example, it is possible to provide a method for manufacturing an optical device capable of suppressing or preventing the deterioration of the light diameter, the shift of the focus position, the shift of the scanning position, and the like, and exhibiting the desired function satisfactorily. .

  The present invention is an optical scanning device that has such an optical device and a light source of light reflected by the vibrating mirror, and deflects light emitted from the light source by driving the vibrating mirror. The position and angle of the oscillating mirror module including the oscillating mirror module can be adjusted with high accuracy and fixed to the fixed member, and the oscillating mirror module whose position and angle are adjusted with high accuracy are mounted in a fixed state on the fixing member. Thus, during optical scanning, for example, it is possible to suppress or prevent the deterioration of the light diameter, the focus position shift, the scan position shift, and the like, and the optical scan can be performed with high accuracy. An optical scanning device that can contribute to formation can be provided.

  The present invention resides in an image forming apparatus having such an optical scanning device and an image carrier on which a predetermined image is written by light emitted from the optical scanning device. Therefore, the position and angle of the oscillating mirror module including the oscillating mirror are provided. Can be adjusted with high accuracy and fixed to the fixed member, and the vibration mirror module whose position and angle are adjusted with high accuracy can be mounted with being fixed to the fixed member, so that the optical scanning can be performed. In addition, for example, it is possible to suppress or prevent the deterioration of the light diameter, the shift of the focus position, the shift of the scanning position, etc., and to perform the desired function well, and to improve the image quality and speed. A forming apparatus can be provided.

1 is a schematic front view of an image forming apparatus to which the present invention is applied. FIG. 2 is a perspective view showing a state before and after fixing a vibrating mirror module mounted on an optical scanning device provided in the image forming apparatus shown in FIG. 1 to a fixing member. FIG. 3 is a schematic plan view showing a structure for fixing a fixing member fixing the oscillating mirror module shown in FIG. 2 to the optical scanning device main body. It is a perspective view of the position angle adjusting device to which the present invention is applied for explaining a first adjustment step in the position angle adjusting method to which the present invention is applied. It is a top view of the position angle adjustment apparatus to which this invention is applied for demonstrating the 1st adjustment process in the position angle adjustment method to which this invention is applied. FIG. 5 is an overall perspective view of position angle setting means provided in the position angle adjusting device shown in FIG. 4. FIG. 5 is a perspective view showing a state in which a vibrating mirror module positioned by a position angle setting unit provided in the position angle adjusting device shown in FIG. 4 is fixed to a fixing member. It is a flowchart of the manufacturing method of the position angle adjustment method and optical device to which this invention is applied. It is a perspective view of a state where a reference mirror is mounted on a position angle adjusting device to which the present invention is applied in order to perform a preparation step before the first adjusting step in the position angle adjusting method to which the present invention is applied. In the state shown in FIG. 9, it is a perspective view of the position angle adjusting device to which this invention is applied for demonstrating this preparatory process. It is a perspective view of the position angle adjusting device to which the present invention is applied for explaining a second adjustment step in the position angle adjusting method to which the present invention is applied. It is a top view of the position angle adjustment apparatus to which this invention is applied for demonstrating the 2nd adjustment process in the position angle adjustment method to which this invention is applied. It is a perspective view of the position angle adjustment apparatus to which this invention is applied for demonstrating the 3rd adjustment process in the position angle adjustment method to which this invention is applied. It is a top view of the position angle adjustment apparatus to which this invention is applied for demonstrating the 3rd adjustment process in the position angle adjustment method to which this invention is applied. It is the schematic front view which showed the structure of the scanning timing detection means with which the position angle adjustment apparatus was equipped in the 3rd adjustment process. It is the conceptual diagram which showed the output by the scanning timing detection means shown in FIG. It is the conceptual diagram which showed the required time of the scan measured by the scanning timing detection means shown in FIG. It is the conceptual diagram which showed a mode that a 3rd adjustment process was performed using the required time shown in FIG. It is a perspective view of the position angle adjustment apparatus to which this invention is applied for demonstrating the 4th adjustment process in the position angle adjustment method to which this invention is applied. It is a top view of the position angle adjustment apparatus to which this invention is applied for demonstrating the 4th adjustment process in the position angle adjustment method to which this invention is applied. It is a perspective view of the position angle adjusting device to which this invention is applied for demonstrating the 5th adjustment process in the position angle adjusting method to which this invention is applied. It is a top view of the position angle adjustment apparatus to which this invention is applied for demonstrating the 5th adjustment process in the position angle adjustment method to which this invention is applied. Corresponding to FIG. 2, before and after fixing the oscillating mirror module positioned by the position angle setting means shown in the figure while being held by the holding member provided in the position angle adjusting device shown in FIG. It is the perspective view which showed the mode of.

  FIG. 1 shows an outline of an image forming apparatus to which the present invention is applied. The image forming apparatus 1 is a monochrome multifunction machine including a laser copying machine, a printer, and a facsimile machine, but is another type of copying machine such as a color machine, a facsimile machine, a printer, and these multifunction machines. May be. The image forming apparatus 1 performs image forming processing based on image data of a document read by the image forming apparatus 1 or an image signal corresponding to image information received from the outside. The image forming apparatus 1 can form an image using plain paper generally used for copying, OHP sheets, thick paper such as cards and postcards, and envelopes as sheet-like recording media. .

  The image forming apparatus 1 includes an image forming unit 4 disposed at a substantially central portion in the height direction of the main body 30, and a discharge unit serving as a paper discharge storage unit serving as a paper discharge unit disposed above the image forming unit 4. A document reading unit 3 serving as a reading unit for reading a document and positioned above the image forming unit 4 with the paper tray 2 and the paper discharge tray 2 interposed therebetween, and a paper feeding unit disposed below the image forming unit 4 A sheet feeding device 11, a control unit (not shown) that performs overall control of the image forming apparatus 1, and whether an operator performs image formation start instruction by pressing a copy button or the like, performs single-sided image formation or double-sided image formation It has an operation panel (not shown) that can perform various operations such as instructions.

  The image forming apparatus 1 is an in-body discharge type image forming apparatus that discharges paper within a housing 1 </ b> A, and a paper discharge tray 2 is positioned between the image forming unit 4 and the document reading unit 3. Thus, a sheet P as a recording medium on which an image is formed is discharged and stored on the discharge tray 2.

  The image forming unit 4 includes a photosensitive drum 5 as an image carrier that is a drum-like latent image carrier. The photosensitive drum 5 is rotated at a predetermined speed in the A direction which is counterclockwise by a main motor as a driving source (not shown).

  The image forming unit 4 is also arranged around the photosensitive drum 5 along the rotation direction A, and a charging device 6 as a charging unit that performs charging processing on the surface of the photosensitive drum 5 and an image to be formed. A writing device 7 as an optical scanning device, which is an optical device as a writing means as an exposure device for irradiating a beam L for scanning the surface of the photosensitive drum 5 charged by the charging device 6 based on image information corresponding to A developing device 8 as developing means for developing and visualizing an electrostatic latent image as a latent image formed on the surface of the photosensitive drum 5 exposed by the beam L with toner, and an electrostatic latent image on the photosensitive drum 5 A transfer device 9 as a transfer means for transferring a toner image formed by developing the toner image onto a sheet P to be transferred, and toner remaining on the surface of the photosensitive drum 5 after transfer by the transfer device 9. And a cleaning device 10 as an image bearing member cleaning means for removing the objects collected.

  The image forming unit 4 also feeds paper in this order from the upstream side in the transport direction of the paper P in the transport path B of the paper P indicated by a two-dot chain line that passes between the photosensitive drum 5 and the transfer device 9. A conveyance roller 17 that takes over the conveyance of the paper P fed from the apparatus 11 and further conveys it downstream in the conveyance direction B, and is arranged downstream of the conveyance roller 17 and upstream of the transfer device 9 in the conveyance direction B. A registration roller 14 that feeds the paper P to a transfer portion between the photosensitive drum 5 and the transfer device 9, and a downstream side of the transfer device 9 and an upstream side of the discharge tray 2 in the transport direction B; The fixing device 12 as a fixing device, a guide plate 29 for guiding the paper P after passing through the fixing device 12, and the passage of the rear end of the paper P after passing through the fixing device 12 are detected to detect the passage of the paper P. For detecting discharge to the discharge tray 2 A paper sensor 25, the paper P after passing the fixing device 12 is discharged onto the discharge tray 2 and a sheet discharging unit 13 as discharge means for discharging to the housing 1A outside.

  As shown in FIG. 1, the document reading unit 3 includes a contact glass 3E serving as a document placement table, and a light source 3A serving as a document illumination light source for scanning a document G placed on the contact glass 3E. A reading traveling body 3F provided with a reflection mirror 3B for optical path conversion, a reading optical system 3C including a lens that transmits reflected light from a document formed by the reading traveling body 3F, and light transmitted through the reading optical system 3C is incident. And an optical element 3D such as a CCD for reading this as an image signal. The document image information read by the optical element 3D is output to the control unit, digitized, and subjected to image processing.

  The paper feeding device 11 stacks the paper P and supplies the stacked paper P to the image forming unit 4. The paper feeding device 11 feeds the paper P to the image forming unit 4. A paper feed roller 11B as a feed roller that abuts on the topmost paper P among the papers P stacked on the tray 11A and feeds it toward the image forming unit 4, specifically, the registration roller 14 by rotation thereof. A separation roller 11C is provided that separates the uppermost sheet P from other sheets P and feeds it toward the conveyance roller 17 when there are a plurality of sheets P fed out by the sheet roller 11B.

  The registration roller 14 is abutted against the leading edge of the paper P fed from the paper feeding device 11 to temporarily stop the conveyance, and the positional relationship between the leading edge of the toner image on the surface of the photosensitive drum 5 and the leading edge of the paper P. The rotation is started at a predetermined timing at which the two coincide.

  The fixing device 12 can be rotated in conjunction with each other so as to be able to sandwich and convey the paper P. The fixing device 12 can rotate in conjunction with the fixing roller 12A that heats the paper P, and a heating roller 12A disposed opposite to the fixing roller 12A. A pressure roller 12B as a pressure member is provided, and the sheet P on which the toner image is transferred to the surface by the transfer device 9 is passed between the fixing roller 12A and the pressure roller 12B. At this time, heating and heating are performed. By applying pressure, the toner image is fused and fixed to the paper P.

  The photosensitive drum 5, the charging device 6, the developing device 8, and the cleaning device 10 constitute a part of the process cartridge 15. In addition to the photosensitive drum 5, the charging device 6, the developing device 8, and the cleaning device 10, the process cartridge 15 has a support body (not shown) that integrally supports them. The support is detachably provided on the main body 30.

  Therefore, the process cartridge 15 is configured such that the photosensitive drum 5, the charging device 6, the developing device 8, and the cleaning device 10 are integrally attached to and detached from the main body 30. As a result, workability such as maintenance and replacement of the photosensitive drum 5, the charging device 6, the developing device 8, and the cleaning device 10 is improved.

  The writing device 7 includes a semiconductor laser 27 as a laser diode, which is a light source device that is a light source of a laser beam that performs irradiation according to image information and the like of a document input to the control unit, and a laser beam emitted from the semiconductor laser 27. And a first optical system 18 having a coupling lens (not shown) that is a parallel light flux and an aperture (not shown) that regulates the width of the laser beam that has passed through the coupling lens.

  The writing device 7 also reflects and deflects the laser beam that has passed through the first optical system 18 toward the photosensitive drum 5 and deflects the surface of the photosensitive drum 5 on the paper surface of FIG. A vibrating mirror module 28 that forms a scanning optical system that scans in the vertical main scanning direction, and a second imaging optical system that forms an image of the laser beam deflected and scanned by the vibrating mirror module 28 on the photosensitive drum 5. The optical system 19 is provided.

  As shown in FIG. 2, the writing device 7 also assists the fixing of the vibrating mirror module 28 to the fixing member 31, and the fixing member 31 having a rectangular flat plate shape that fixes the vibrating mirror module 28 with an adhesive (not shown). For this purpose, a pair of transparent resin-made intermediate members 32 fixed to the fixing member 31 and the vibrating mirror module 28 with an ultraviolet curing adhesive (not shown), and the main body shown in FIG. And positioning means 40 shown in FIG. 3 for positioning and fixing in 30.

  The semiconductor laser 27, the first optical system 18, the vibration mirror module 28, the second optical system 19, and the fixing member 31 are each fixed to a predetermined position of the main body 30 in a predetermined posture. The predetermined position and the predetermined attitude are that the semiconductor laser 27, the first optical system 18, the vibration mirror module 28, the second optical system 19, and the fixing member 31 are respectively positioned at the predetermined position and the predetermined attitude. The writing device 7 performs the desired function well, and refers to the position and orientation at which the latent image corresponding to the image to be formed is accurately written on the photosensitive drum 5.

  The vibration mirror module 28 is a vibration element 33 that functions as a PZT drive type micro scanner composed of a silicon substrate, a reinforcing bracket 34 that reinforces the vibration element 33, and a piezoelectric element (not shown) that drives the vibration element 33. And a drive unit 35 having PZT.

  The vibration element 33 is positioned at the center of the vibration element 33 so as to be surrounded by the main body (not shown) having a rectangular frame shape, and is resonantly vibrated with respect to the main body by the drive of the drive unit 35. A vibrating portion 36 as a vibrating mirror that reflects and deflects the laser light that has passed through the optical system 18 toward the photosensitive drum 5 on the mirror surface that is the surface thereof, and scans the surface of the photosensitive drum 5 in the main scanning direction; The vibrating part 36 is connected to the main body on both sides thereof, and has a pair of torsion beams (not shown) as a pair of beam parts that are slidably supported by the main body.

  Here, the positions and orientations of the semiconductor laser 27, the first optical system 18, the vibration mirror module 28, the second optical system 19, and the fixing member 31 are such that the vibration unit 36 is a particularly ideal position among predetermined positions. Further, the position and angle when the main body 30 is positioned in a particularly ideal posture, that is, an angle among the predetermined postures are assumed to be a reference. The ideal position and ideal orientation are set with reference to the ideal position and ideal orientation of the reference mirror 70 as will be described later with reference to FIGS.

  Assuming that the vibration part 36 fixed to the fixing member 31 shown in FIG. 2 is positioned at an ideal position and an ideal angle, as shown in FIG. And the angle around each of these three axes. Specifically, the three axial directions are the Y-axis direction corresponding to the extending direction of the torsion beam, which is the rotational axis direction of the vibration unit 36, and the mirror of the vibration unit 36 in a state where the vibration of the vibration unit 36 is stopped. A state in which the vibration of the vibration unit 36 is stopped in the direction orthogonal to the Y-axis direction on the surface and corresponding to the X-axis direction corresponding to the main scanning direction, and the direction orthogonal to the X-axis direction and the Y-axis direction. And the Z-axis direction corresponding to the direction perpendicular to the mirror surface of the vibrating portion 36 in FIG. The angles around these three axes are assumed to be composed of an angle α around the Y axis, an angle β around the X axis, and an angle γ around the Z axis. The mirror surface of the vibration unit 36 is configured by a surface on the downstream side in the Z direction of the vibration unit 36.

  As shown in FIG. 3 or FIG. 2, the positioning means 40 includes a positioning reference portion 41, four boss portions 42 formed integrally with the fixing member 31, and a screw 43 screwed into each boss portion 42 and the main body 30. An urging means 44 as a first urging means for urging the fixing member 31; and a screw hole (not shown) formed in the main body 30 so as to communicate with each boss portion 42 and screwed and fastened. have.

  3A and 3B, the urging means 44 has two biasing members with one end abutting on each of the two side edges of the fixing member 31 orthogonal to each other and the other end fixed to the main body 30. A pressure spring 44a is provided.

In the configuration shown in FIG. 5A, the positioning reference portion 41 has a round hole 45 drilled in the fixing member 31 and a long hole 46 extending in the X-axis direction, and a round hole 45 projecting from the main body 30. And a pin 48 projecting from the main body 30 and slidably fitted into the long hole 46.
In the configuration shown in FIG. 5B, the positioning reference portion 41 has a contact portion 49 in which the side edge of the fixing member 31 in contact with each pressure spring 44a contacts the opposite side edge. ing.

  In this way, the positioning member 44 that urges the fixing member 31 from two different directions by the pressure spring 44a, specifically, pressurizes, for example, between the round hole 45 and the pin 47 in FIG. Even if there is a backlash between the long hole 46 and the pin 48, the fixing member 31 is always positioned at a predetermined position of the main body 30 with a high accuracy without a backlash in a predetermined posture. In this state, it is fixed to the main body 30. Since the contact position of the pressure spring 44a with the fixing member 31 is the side edge of the fixing member 31, that is, the outer periphery, the distance from the positioning reference portion 41 is increased, and the accuracy of the fixing position of the fixing member 31 is increased.

  The semiconductor laser 27 is controlled to emit light based on an image signal from the control unit. In the control unit, not only the image information from the document reading unit 3 but also a print signal and a facsimile when used as a printer. The drive control of the semiconductor laser 27 is performed by an image signal corresponding to a transmission signal when used as an apparatus. As a result, the image forming apparatus 1 has a function as a digital multifunction peripheral having functions as a printer and a facsimile machine as well as a copying machine.

  The writing device 7 having such a configuration emits light from the semiconductor laser 27 and passes through the first optical system 18, the vibrating mirror module 28, and the second optical system 19 as a beam L, and irradiates the photosensitive drum 5. Thus, a predetermined image corresponding to predetermined image information is written to form an electrostatic latent image.

  In the writing device 7, the positioning accuracy of the vibration unit 36 exhibits a function of the deflection of the light emitted from the semiconductor laser 27, which is a function of the vibration unit 36, and forms a highly accurate electrostatic latent image. Since it is important to do so, the position x on the X-axis, the position y on the Y-axis, and the position z on the Z-axis become the ideal position or approach the ideal position, respectively. It is important to optimize the angle α, the angle β, and the angle γ so that each of them becomes an ideal angle or approaches the ideal angle.

  Therefore, the vibrating mirror module 28 provided in the writing device 7 is positioned and fixed in advance with high accuracy with respect to the fixing member 31 using the position angle adjusting device 100 shown in FIGS. As shown in FIG. 2, the fixing member 31 and the writing device 7 are positioned and fixed. Since the vibration mirror module 28 is fixed to the fixing member 31 after the positioning of the vibration mirror module 28 is completed, the fixing member 31 is not shown in FIGS. 4 and 5.

  Although the illustration of the position angle adjusting device 100 is omitted as appropriate, the same configuration as that provided on the main body 30 side of the writing device 7 in the positioning unit 40 shown in FIG. 3, that is, the biasing unit 44 and the pin 47. , 48 or the abutting portion 49 and the screw hole, the interchangeability relating to the positioning of the fixing member 31 is provided with high accuracy, and the positioning is reproducible. The position angle adjusting device 100 also has high compatibility with respect to the optical path of light emitted from the semiconductor laser 27 of the writing device 7 and has reproducibility of the optical path of the writing device 7. Therefore, if the fixing member 31 on which the vibration mirror module 28 is positioned by the position angle adjusting device 100 is mounted on the writing device 7 and is positioned and fixed by the positioning means 40, the vibration mirror module 28 can be highly accurate in the writing device 7. It is fixed in the positioned state, and the writing device 7 can form an electrostatic latent image with high accuracy.

  Hereinafter, the configuration of the position angle adjustment device 100, the position angle adjustment method for positioning and fixing the vibration mirror module 28 to the fixing member 31 using the position angle adjustment device 100, and further, the vibration mirror module 28 is positioned and fixed by these. A method for manufacturing the writing device 7 in which the fixing member 31 is fixed at a predetermined position and a predetermined posture will be described. The position angle adjustment method will be described with reference to FIG. 8 as appropriate.

  As shown in FIG. 4 or FIG. 5, the position angle adjusting device 100 includes a bottom plate 50 serving as a base, a plurality of support columns 51 erected on the bottom plate 50, a base 52 supported by these support columns 51, and a bottom plate. 50, a position angle setting device 53 that adjusts and sets the position and orientation of the oscillating mirror module 28, a light source 54 as a reference light source that emits light equivalent to that of the semiconductor laser 27, and the light emitted from the light source 54. An aperture 55 that regulates the width is mainly provided. In these drawings, an auto collimator position adjusting device 56 as an auto collimator position adjusting means having an auto collimator 56 a is shown in the figure, but the position angle adjusting device 100 is not limited to this auto collimator position adjusting device 56. Each device to be described later is appropriately attached and detached according to the progress of the position angle adjustment method. The same applies to the position angle setting device 53.

  The base 52 has the positioning / fixing portion 52a having compatibility with the positioning means 40 with respect to the positioning of the fixing member 31 as described above. The positioning and fixing portion 52a is positioned at the writing device 7 so that the fixing member 31 is positioned at the writing device 7 and is positioned at the same position and posture. Fix it. Therefore, although not shown in the drawing, the positioning and fixing portion 52a is substantially the same configuration as the urging means 44, the pins 47 and 48 or the abutting portion 49, and the screw hole, for example, the urging means 44. The second urging means to be identified is provided with substantially the same arrangement. Therefore, the positioning and fixing portion 52 a has high-precision compatibility with the positioning means 40 with respect to the positioning of the fixing member 31.

  As shown in FIG. 6, the position angle setting device 53 includes a chucking 61 as a holding member that chucks and holds the vibrating mirror module 28 and a 6-axis adjustment stage 62 as a position angle setting means from above in the vertical direction. And an overall movement linear motion stage 63 for moving them.

  Even when the position angle setting device 53 is attached to or detached from the bottom plate 50, the position angle setting device 53 always occupies the same position on the bottom plate 50 when mounted on the bottom plate 50. The position angle setting device 53 keeps the chucking 61, the six-axis adjustment stage 62, and the overall movement linear motion stage 63 in a stationary state when being attached to and detached from the bottom plate 50. Therefore, even when the position angle setting device 53 is attached to or detached from the bottom plate 50, the posture of the vibrating mirror module 28 is kept unchanged with respect to the base 52 and the like. This is the same for each component attached to and detached from the position angle adjusting device 100.

  The position angle setting device 53 energizes the oscillating mirror module 28 in a state where the oscillating mirror module 28 is chucked by the chucking 61, and drives the oscillating unit 36 in the same state as that driven by the writing device 7, It can be vibrated. In the figure, the fixing member 31 is not shown.

  The chucking 61 has a spring (not shown) as a pressurizing member having a biasing force in a direction in which the vibration mirror module 28 is sandwiched. When the vibration mirror module 28 is sandwiched, the chucking 61 resists the spring biasing force. The vibrating mirror module 28 is temporarily fixed after being manually opened.

  The 6-axis adjustment stage 62 includes a γ-adjustment goniometer stage 64 that rotates the chucking 61 around the Z-axis from above, a β-adjustment goniometer stage 65 that rotates the chucking 61 around the X-axis, A Z adjustment linear motion stage 66 that moves the chucking 61 in a direction that goes straight in the Z axis direction, an X adjustment linear motion stage 67 that moves the chucking 61 in a direction that goes straight in the X axis direction, and a chucking 61 It has a Y adjustment linear motion stage 68 that moves in a direction that goes straight in the Y axis direction, and an α adjustment goniometer stage 69 that rotates the chucking 61 around the Y axis.

The rotation center of the γ adjustment goniometer stage 64 and the β adjustment goniometer stage 65 is set to coincide with the center position of the mirror surface of the vibration section 36 on the XY plane.
The six-axis adjustment stage 62 includes a general X adjustment linear motion stage, a Y adjustment linear motion stage, a Z adjustment linear motion stage, an α adjustment gonio stage, a β adjustment gonio stage, and a γ adjustment gonio stage. It is comprised suitably by these combinations.

  Therefore, the 6-axis adjustment stage 62 rotates the chucking 61 to 6 axes, that is, the X-axis direction, the Y-axis direction, the Z-axis direction, the direction rotating to the angle α, the direction rotating to the angle β, and the angle γ. The position of the chucking 61 is set at each of the positions x, y, and z in the X-axis direction, the Y-axis direction, and the Z-axis direction. , Angle β and angle γ, respectively.

  As a result, the position angle setting device 53 causes the chucking 61 so that the vibration unit 36 is positioned at a predetermined position of the writing device 7 in a predetermined posture with the vibration mirror module 28 fixed to the fixing member 31. , The oscillating mirror module 28 and the oscillating portion 36 are rotated in six axes, that is, in the X-axis direction, the Y-axis direction, the Z-axis direction, the direction rotating to the angle α, the direction rotating to the angle β, and the angle γ. In other words, the positions of the vibrating mirror module 28 and the vibrating unit 36 are set at positions x, y, and z in the X-axis direction, the Y-axis direction, and the Z-axis direction, respectively. The angle can be set for each of angle α, angle β, and angle γ.

  The linear movement stage 63 for overall movement includes the 6-axis adjustment stage 62 and the chucking 61 together with the vibration mirror module 28 positioned on the fixing member 31 and held by the chucking 61 as shown in FIG. The fixing member 31 moves from the adjustment position that can be fixed to or fixed to the positioning fixing portion 52a to the non-adjusting position where the fixing member 31 is detached from the positioning fixing portion 52a.

  The light source 54 has an ideal position, that is, an ideal incident position and an ideal angle, that is, an ideal incident angle with respect to the mirror surface of the reference mirror 70 shown in FIG. 9 and FIG. A reference laser light source for entering collimated light. The incident position and the incident angle of light with respect to the mirror surface of the vibration unit 36 in the writing device 7 are adjusted to be the same with reference to the ideal incident position and the ideal incident angle.

  The aperture 55 has a light spot diameter as small as possible so that the incident position of the light emitted from the light source 54 with respect to the mirror surface of the vibration unit 36 and the mirror surface of the reference mirror 70, in other words, the position of the center of gravity can be accurately detected. This is a pinhole aperture installed to obtain the beam spot diameter.

  In the position angle adjustment method using the position angle adjustment device 100 having such a configuration, the vibration mirror module 28 is positioned before the fixing member 31 is positioned on the positioning fixing portion 52a. As shown in FIGS. 9 and 10, the reference mirror 70 is fixed to the positioning and fixing portion 52a (FIG. 8 (S1)), and the autocollimator position adjusting device 56 shown in FIGS. In other words, calibration is performed (FIG. 8 (S2)). In this state, not the position angle setting device 53 and the vibration mirror module 28 shown in FIGS. 4 and 5, but the reference mirror 70 is positioned and fixed to the positioning fixing portion 52a.

  The reference mirror 70 has the same structure as the fixing member 31 at the portion fixed to the positioning fixing portion 52a, and the mirror surface is positioned at the ideal position and the ideal posture in a state where the reference mirror 70 is fixed to the positioning fixing portion 52a. It has come to be. As can be seen from this, in the position angle adjusting device 100 and the position angle adjusting method using the position angle adjusting device 100, the mirror surface of the vibration unit 36 is positioned and fixed at the same position and posture as the mirror surface of the reference mirror 70. It is supposed to be.

  The auto collimator 56a is positioned so that the position where light is emitted from the auto collimator 56a and the position where this light is reflected by the reference mirror 70 and incident on the auto collimator 56a are the same position (0, 0). The autocollimator position adjustment device 56 performs the adjustment so that the autocollimator 56a faces the mirror surfaces of the reference mirror 70 and the vibrating mirror module 28.

  When the positioning of the autocollimator 56a is completed, as shown in FIG. 10, the PSD 1 as the main scanning position detection means is mounted on the base 52, the light source 54 is driven, and the light emitted from the light source 54 by the PSD 71 is The position of the center of gravity of the light reflected by the reference mirror 70 on the X axis is measured, and the value is obtained and recorded (FIG. 8 (S3)).

  Next, the reference mirror 70 is removed, and the position angle setting device 53 is attached to the bottom plate 50 as shown in FIGS. 4 and 5, and the vibrating mirror module 28 is chucked by the chucking 61 to vibrate the reference mirror 70. The position where light is emitted from the autocollimator 56a and the position where this light is reflected by the reference mirror 70 and incident on the autocollimator 56a are the same position (0, 0). Thus, a first adjustment step is performed in which the angle α and the angle β are adjusted and set using the β adjustment goniometer stage 65 and the α adjustment goniometer stage 69 (FIG. 8 (S5)). At this time, it is desirable that the vibration unit 36 be in a non-driven state. 4 and 5 show a state where the PSD 71 is removed, the PSD 71 may be left attached.

  When the first adjustment process is completed, as shown in FIG. 11, the PSD 71 is mounted in the same state as shown in FIGS. 9 and 10, and the light source 54 is driven as shown in FIG. The barycentric position of the reflected light from the vibrating part 36 of the emitted light is measured by the PSD 71, and the measured value of the barycentric position on the X-axis of the reflected light when the vibrating part 36 replaced with the reference mirror 70 is used. Then, a second adjustment step is performed in which the position z is adjusted and set using the Z adjustment linear motion stage 66 so as to coincide with the measured value when the reference mirror 70 is used (FIG. 8 (S6)).

  The second adjustment step is performed so that the position z is optimized when the position z is different from the position z of the reference mirror 70, that is, when the position z is deviated. This is because a focus shift occurs. That is, as shown in FIG. 12, if the position z of the vibration part 36 is shifted in the + Z direction shown in FIG. 12 compared to the position z of the reference mirror 70, the vibration of the light emitted from the light source 54 The barycentric position of the reflected light from the part 36 is detected by the PSD 71 as having moved in the + a direction shown in FIG. Therefore, the measurement value by the PSD 71 when the light emitted from the light source 54 is reflected by the vibration unit 36 is the same as the measurement value by the PSD 71 when the light emitted from the light source 54 is reflected by the reference mirror 70. If the position z of the vibration part 36 is adjusted using the Z adjustment linear motion stage 66, the position z of the vibration part 36 becomes equal to the position z of the reference mirror 70. At this time, the vibration unit 36 needs to be in a non-driven state.

  When the second adjustment process is completed, instead of the PSD 71, as shown in FIGS. 13 and 14, a two-segment PD 72 that is a time interval measurement sensor serving as a scanning timing detection unit is emitted from the light source 54 to the base 52. The light is mounted at a position where the image height of the reflected light from the vibration unit 36 becomes 0 (FIG. 8 (S7)). As shown in FIG. 15, the two-divided PD 72 includes two photodiodes 72 a and 72 b, and is attached to the base 52 by the vibrating unit 36 for light emitted from the light source 54 after completion of the second adjustment process. The position of the center of gravity of the reflected light is set so as to coincide with the center position of the photodiodes 72a and 72b when the vibration unit 36 is not driven.

  Next, the light source 54 is driven in a state where the vibration unit 36 is driven, and the center position on the X axis of the vibration of the center of gravity position of the reflected light by the vibration unit 36 of the light emitted from the light source 54 is the ideal position, that is, A third adjustment step is performed in which the angle α is adjusted and set using the α adjustment goniometer stage 69 so as to coincide with the center position of the two photodiodes (FIG. 8 (S8)).

  The angle α is adjusted by the third adjustment step so that the angle α is optimized. When the angle α is deviated, when the drive unit 36 is driven, the reflected light reflected by the vibration unit 36 is in the main scanning direction. This is because a position shift of the scanning region in the X-axis direction corresponding to is generated, and the center position of the amplitude of the reflected light in other words is shifted. What is finally required in the writing device 7 is that the center of amplitude when the drive unit 36 is vibrated is in an ideal position, so the third adjustment step is performed.

  The angle α is also adjusted in the first adjustment step, which is performed to determine the position z in the second adjustment step. Therefore, in performing the second adjustment step, it is essential to perform the first adjustment step in advance.

  Specifically, in the third adjustment step, the time required for the forward movement and the time required for the backward movement when the reflected light from the vibration unit 36 of the light emitted from the light source 54 is vibrated by the two-divided PD 72. The angle α is adjusted using the fact that is accurately measured.

  That is, since the two-divided PD 72 includes two photodiodes 72a and 72b, even if there is a change in the intensity of the reflected light, the vibrating portion of the light emitted from the light source 54 as shown in FIG. When the beam which is the reflected light by 36 scans the two-divided PD 72 and the reflected light passes through a certain position between the two photodiodes 72a and 72b, a signal indicating this is shown in FIG. Is output as an output from the two-divided PD 72. Therefore, as shown in FIG. 17, when the reflected light vibrates, the required time A for the forward movement and the required time B for the backward movement are accurately measured. In the figure, the required time B for the backward movement is longer than the required time A for the forward movement.

  At this time, as shown in FIG. 18, when the required time A and the required time B are measured and plotted a plurality of times, the required time B for the backward movement is longer than the required time A for the forward movement. As shown in a), two peaks with required time A <required time B appear. As shown in FIG. 5B, when the angle α is adjusted so that the two peaks approach, the required peak is obtained. The difference between the time B and the required time A is reduced to the required time A≈the required time B, and the angle α is further adjusted so that the peak becomes one and the required time A = required as shown in FIG. When time B is reached, the value of angle α at this time is the value of angle α that is an ideal time interval in which required time B and required time A are equal. By adjusting the angle α in this way, the amplitude center of the reflected light coincides with the center position of the photodiodes 72a and 72, and the dynamic angle α of the vibration unit 36 is adjusted to an ideal value. It becomes.

  When the third adjustment step is completed, two line CCDs 73 as sub-scanning position detecting means are mounted on the base 52 as shown in FIGS. 19 and 20 instead of the two-divided PD 72 (FIG. 8 (S9)). . The mounting positions of the line CCDs 73 are symmetrical with respect to the amplitude center of the light emitted from the light source 54 when the reflected light from the vibrating portion 36 vibrates when the vibrating portion 36 is driven. It is a position that becomes a distance, and is a position that becomes ± the same image height at a so-called image height. Each line CCD 73 extends along the sub-scanning direction, that is, the Y-axis direction, and is used to measure the passing position of the light barycentric position in the Y-axis direction, that is, the barycentric position of the scanning line.

  Next, the light source 54 is driven in a state where the vibration unit 36 is driven, and the position of the center of gravity of the light emitted from the light source 54 in the Y-axis direction of the reflected light from the vibration unit 36 is measured by each line CCD 73. A fourth adjustment step is performed in which the angle γ is adjusted and set by using the γ adjustment goniometer stage 64 so that the measurement values obtained by (5) become the same (FIG. 8 (S10)).

  The adjustment is performed so that the angle γ is optimized by the fourth adjustment step. If the angle γ is deviated, the reflected light from the vibration unit 36 is reflected in the X-axis direction when the drive unit 36 is driven. This is because the measured values of the line CCDs 73 in the Y-axis direction corresponding to the sub-scanning direction are different from each other. Therefore, if the angle γ is adjusted and set so that the measurement values by the line CCDs 73 are the same, the reflected light from the vibration unit 36 when the drive unit 36 is driven becomes parallel to the X axis.

  When the fourth adjustment step is completed, instead of the two line CCDs 73, as shown in FIGS. 21 and 22, the microscope 74 is installed on the bottom plate 50 by a fixing means (not shown) (FIG. 8 (S11)).

  Next, the light source 54 is driven in a state where the vibration unit 36 is not driven, and the incident position of the light emitted from the light source 54 on the mirror surface of the vibration unit 36, in other words, the irradiation position is directly observed by the microscope 74. A position x and a position y are adjusted and set using the X adjustment linear motion stage 67 and the Y adjustment linear motion stage 68 so that the irradiation position coincides with the center position of the mirror surface. The adjusting step is performed (FIG. 8 (S12)).

  The fifth adjustment step adjusts so that the position x and the position y are optimized because the light emitted from the light source 54 and incident on the mirror surface of the vibration unit 36 when the position x and the position y are shifted. This is because displacement occurs and deterioration of the light diameter, so-called beam diameter, occurs. Therefore, if the position x and the position y are adjusted and set so that the light emitted from the light source 54 is incident on the center of the mirror surface of the vibration part 36, the deterioration of the beam diameter is suppressed or prevented.

  FIG. 23A shows a vibrating mirror in which the position x, the position y, the position z, the angle α, the angle β, and the angle γ are all adjusted and set and the positioning of the vibrating portion 36 is determined by the above steps. Module 28 is shown.

  In this state, if the chucking 61 is removed, the positioning of the oscillating mirror module 28 is released. Therefore, the fixing member 31 is fixed to the positioning fixing portion 52a as described above (FIG. 8 (S13)), and the intermediate member 32 is fixed. While being used, an ultraviolet curable adhesive is applied to an appropriate position among the vibrating mirror module 28, the fixing member 31, and the intermediate member 32 that are held in the chucking 61, and the adhesive is irradiated with ultraviolet rays. Then, the vibrating mirror module 28, the fixing member 31, and the intermediate member 32 that are held at the chucking 61 are adhered and fixed to each other (S14).

  Accordingly, as shown in FIG. 23B, the oscillating mirror module 28 sets the position, that is, the position x, the position y, the position z, and the posture, that is, the angle α, the angle β, and the angle γ, by the position angle adjusting device 100. In this state, the fixing member 31 is fixed.

  Next, the holding of the vibration mirror module 28 by the chucking 61 is released, and the fixing member 31 is fixed by the positioning fixing part 52a (FIG. 8 (S15)), and the fixing member 31 is positioned together with the vibration mirror module 28 by the positioning means 40. Then, it is positioned and fixed in the main body 30 and mounted and incorporated in the writing device 7 (S16 in FIG. 8). In this state, the vibration mirror module 28 and the vibration unit 36 are fixed at a predetermined position and a predetermined posture of the writing device 7.

  The position angle adjusting method and the manufacturing method of the writing device 7 described above are most preferably performed in the order described above, including the first adjusting step to the fifth adjusting step. For example, as described above, in performing the second adjustment step, it is essential to perform the first adjustment step in advance, but the other adjustment steps are also performed in a different order from the above-described order. This is because it may be necessary to perform the same adjustment process again, so that the implementation efficiency of the method may be reduced.

  The preferred embodiments of the present invention have been described above. However, the present invention is not limited to the specific embodiments, and the present invention described in the claims is not specifically limited by the above description. Various modifications and changes are possible within the scope of the above.

For example, the position angle adjustment method and the optical device manufacturing method to which the present invention is applied are performed using the positioning fixing portion in the position angle adjustment device provided separately from the optical device in the above description. May be performed using the optical device itself. In this case, the positioning / fixing portion is provided in the optical device, and the optical device including the positioning / fixing portion is configured to include a part of the position angle adjusting device in the positioning / fixing portion. In this case, it is not necessary to move the fixing member after positioning and fixing the fixing member to the vibrating mirror module, and the positioning accuracy of the vibrating mirror module and the vibrating mirror is further improved.
The adhesive used to fix the vibration mirror module and the fixing member to each other is not limited to the ultraviolet curable adhesive.

  The image forming apparatus to which the present invention is applied is not limited to a monocolor image forming apparatus capable of forming only a monocolor image, but a so-called tandem type image forming apparatus having a plurality of image carriers that carry images of different colors, In addition, a color image forming apparatus such as a so-called one-drum type image forming apparatus that sequentially forms images of respective colors on a photosensitive drum, which is an image carrier, and sequentially superimposes the respective color images to obtain a color image. The same can be applied.

  Any type of image forming apparatus may be provided with an intermediate transfer member, but unlike the image forming apparatus 1, an intermediate transfer member is not provided, and an image of each color is directly transferred onto a sheet such as a transfer sheet S. It may be. In this case, for example, the images on the plurality of image carriers are directly transferred to the sheet in the process in which the sheet is conveyed by, for example, a conveyance belt.

  The image forming apparatus may not be a copier, a printer, and a facsimile machine, but may be a single unit thereof, or may be a multi-function machine of another combination such as a copier and printer. .

  The optical device to which the present invention is applied is not limited to the optical scanning device mounted on such an image forming apparatus, but also an optical scanning device mounted on another device, an optical scanning barcode reader, and a vehicle-mounted laser. It may be used for a display device such as a radar device or a head-mounted display.

  The effects described in the embodiments of the present invention are only the most preferable effects resulting from the present invention, and the effects of the present invention are limited to those described in the embodiments of the present invention. is not.

DESCRIPTION OF SYMBOLS 1 Image forming apparatus 5 Image carrier 7 Optical apparatus, optical scanning device 28 Vibrating mirror module 31 Fixing member 36 Vibrating mirror 44 2nd urging means 52a Positioning fixing part 54 Reference light source 61 Holding member 62 Position angle setting means 70 Reference mirror 100 position angle adjustment device S5 first adjustment step S6 second adjustment step S8 third adjustment step S10 fourth adjustment step S12 fifth adjustment step

JP 2008-262186 A JP 2008-102487 A JP 2007-233235 A JP 2008-65045 A JP 2008-216911 A JP 2009-31364 A JP 2002-82303 A Japanese Patent No. 2924200 Japanese Patent No. 30111144

Claims (14)

A holding member for holding a vibrating mirror module including a vibrating mirror;
A positioning fixing unit that fixes a fixing member installed at a predetermined position in a predetermined position of the optical device at a position and an attitude that are identified with the predetermined position and the predetermined attitude;
The oscillating mirror module is held in such a manner that the oscillating mirror included in the oscillating mirror module is positioned at a predetermined position in a predetermined position of the optical device in a state where the oscillating mirror module is fixed to the fixing member. X corresponding to the rotational axis direction of the oscillating mirror in a state where the position of the holding member occupies the ideal position and the ideal posture in the optical device with respect to the fixing member fixed to the positioning and fixing portion in the position and posture. A position x on the axis, a position y on the Y axis corresponding to a direction orthogonal to the X axis on the mirror surface of the vibration mirror in a state where the vibration of the vibration mirror is stopped, the X axis, and the Y axis Is set at a position z on the Z axis corresponding to a direction orthogonal to the angle, and the posture of the holding member is set to an angle around the Y axis. , Angular beta, position angle adjusting device and a position angle setting means for setting each at an angle γ of about the Z axis around the X axis. The position angle adjusting device according to claim 1,
The positioning fixing unit is provided in the optical device and is identified with a first urging unit for installing the fixing member at a predetermined position in the optical device in a predetermined posture. And a second urging means for fixing at the position and posture.   A position angle adjusting method for fixing the vibrating mirror module to the fixed member in a state where the position and posture of the vibrating mirror module are set with respect to the fixed member using the position angle adjusting device according to claim 1. In the position angle adjustment method according to claim 3,
A position angle adjustment method comprising a first adjustment step of setting the angle α and the angle β by the position angle setting means. The position angle adjustment method according to claim 3 or 4,
Using a reference mirror set to the ideal position and ideal posture, and a reference light source that makes light incident on the reference mirror at an ideal position and angle, light that is incident and reflected from the reference light source to the reference mirror The position angle setting means so that the position on the X axis of the light incident and reflected from the reference light source on the vibrating mirror replaced with the reference mirror is the same as the position on the X axis A position angle adjustment method comprising: a second adjustment step for setting the position z by: In the position angle adjustment method according to any one of claims 3 to 5,
In a state where the vibrating mirror is driven, a reference light source that makes light incident at an ideal position and angle with respect to a reference mirror set to the ideal position and ideal posture, and the reflected light that is incident on the vibrating mirror A position angle adjustment method comprising a third adjustment step of setting the angle α so that the center position of vibration on the X axis is an ideal position. In the position angle adjustment method according to any one of claims 3 to 6,
Vibration of light reflected and incident on the vibrating mirror from a reference light source that makes light incident at an ideal position and angle with respect to the reference mirror set in the ideal position and ideal posture while the vibrating mirror is driven A position angle adjustment method comprising a fourth adjustment step of setting the angle γ so that the direction is parallel to the X axis. In the position angle adjustment method according to any one of claims 3 to 7,
The position x and the position y are such that light from a reference light source that makes light incident at an ideal position and angle with respect to the reference mirror set to the ideal position and ideal posture enters the center of the vibrating mirror. A position angle adjustment method comprising: a fifth adjustment step for setting A position angle adjustment method according to claim 8, wherein the position angle adjustment method is dependent on the position angle adjustment method according to each of claims 7, 6, 5, and 4.
A position angle adjustment method characterized by sequentially performing a first adjustment step, a second adjustment step, a third adjustment step, a fourth adjustment step, and a fifth adjustment step.   The position angle adjusting device according to claim 1 or 2, or the position angle adjusting method according to any one of claims 3 to 9, wherein the fixing member on which the vibrating mirror module is positioned is moved to a predetermined position. And an optical device fixed in a predetermined posture. The optical device according to claim 10, wherein the optical device is subordinate to the position angle adjustment device according to claim 2.
An optical device comprising first biasing means.   The position angle adjusting device according to claim 1 or 2, or the position angle adjusting method according to any one of claims 3 to 9, wherein the fixing member on which the vibrating mirror module is positioned is moved to a predetermined position. And an optical device manufacturing method for manufacturing an optical device fixed in a predetermined posture.   12. An optical scanning device comprising: the optical device according to claim 10; and a light source of light reflected by the vibration mirror, wherein the light emitted from the light source is deflected by driving the vibration mirror.   14. An image forming apparatus comprising: the optical scanning device according to claim 13; and an image carrier on which a predetermined image is written by light emitted from the optical scanning device.

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