JP2003131098A - Method for manufacturing color synthesis optical system, color synthesis optical system manufactured by the method and projector provided with color synthesis optical system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for manufacturing color synthesis optical system which can accurately and quickly position and fix a color synthesis prism to a fixing plate. SOLUTION: The method for manufacturing color synthesis optical system is provided with an optical axis position adjusting process S1 for adjusting light flux radiated from a light source to a reference optical axis so as to make the light flux perpendicularly enter into a light entering end face of the prism before the color composing optical system is manufactured, a plane position adjusting process S5 for detecting a plane position of the prism and previously adjusting a quite wrong plane position of the prism after obtaining the optimal reference optical axis by the optical axis position adjusting process S1, and a tilting direction position adjusting process S6 for separating the light flux radiated from the light source into a plurality of color lights R, G, B, etc., in a light guiding part in a manufacturing part, making them enter into the light entering end face of the prism, and adjusting a position of the prism relative to the fixing plate as a detecting apparatus detects the light flux composed by the prism.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention has a plurality of light incident end faces corresponding to respective color lights and a light emitting end face for combining and emitting respective color lights in order to combine and emit a plurality of color lights. A method of manufacturing a color synthesizing optical system that includes a prism and a fixing plate to which the prism is fixed, and positions and fixes the prism with respect to the fixing plate, a color synthesizing optical system manufactured by the manufacturing method, and the color. The present invention relates to a projector having a synthetic optical system.

[0002]

2. Description of the Related Art Conventionally, a color separation optical system that separates a light beam emitted from a light source into three colored light beams R, G, and B using a dichroic mirror, and a separated light beam is converted into image information for each color light beam. A three-plate type projector is known, which is provided with three light modulators that are modulated accordingly and a color combining optical system that combines the light fluxes modulated by the respective light modulators.

As the color synthesizing optical system, a fixed plate mechanically fixed to a housing for optical parts in which a color separation optical system and the like are incorporated, and a cross dichroic prism adhesively fixed to the fixed plate are known. . This cross dichroic prism is configured by bonding four triangular prisms having the same shape to each other. A reflection layer such as a dielectric film having a selective reflection characteristic of a predetermined color is formed on the substantially X-shaped bonding surface. Of the side surfaces of the cross dichroic prism in which the four triangular prisms are bonded to each other to form a quadrangular prism shape, three of the side surfaces are light incident end surfaces, and each color modulated by the light modulator arranged opposite to those side surfaces. Light is incident. The remaining one surface is a light emitting end surface, from which combined light is emitted and is enlarged and projected on the screen via the projection lens.

In such a color synthesizing optical system, in order to perform color synthesizing by the cross dichroic prism without causing pixel deviation or the like, a sticking manufacturing technique for accurately positioning the cross dichroic prism with respect to the fixed plate is required. is there. Conventionally, this pasting manufacturing technology uses an ultraviolet curable adhesive on the lower surface of the cross dichroic prism,
The fixing plate is adhered and fixed, and the following position adjustment is performed in a state where the ultraviolet curable adhesive is not cured. An image is picked up from the upper surface of the cross dichroic prism using an image pickup device such as a CCD, and the external dimensions of the imaged cross dichroic prism and the intersection line of the bonding surfaces of the triangular prisms forming the cross dichroic prism, that is, a substantially X-shaped The center position of the bonding surface is compared with the previously obtained outer dimensions of the cross dichroic prism and the reference position of the center position, and image processing such as pattern matching is used to superimpose the reference position on the fixed plate. On the other hand, a plane position adjusting method for adjusting the position of the cross dichroic prism is known. Then, after the position adjustment as described above is performed, the cross dichroic prism and the fixing plate are bonded and fixed by irradiating ultraviolet rays to cure the adhesive.

[0005]

With the recent trend toward miniaturization and higher brightness of liquid crystal projectors, the manufacturing technology for attaching the cross dichroic prism and the fixing plate that is adhesively fixed to the lower surface is required to have much higher precision. Is required. However, in the plane position adjusting method as described above, the top surface of the cross dichroic prism is moved along the plane direction, and only the position is adjusted so as to be arranged at the reference position of the cross dichroic prism acquired in advance,
In many cases, the bonding surface of the substantially X-shaped triangular prism is displaced with respect to the optical axis, and in particular, the position adjustment of the cross dichroic prism in the tilting direction cannot be accurately adjusted, and there is a problem that the adjustment accuracy is low.

An object of the present invention is to provide a method for manufacturing a color synthesizing optical system capable of accurately and quickly positioning and fixing a prism with respect to a fixed plate, a color synthesizing optical system manufactured by this manufacturing method, and this color. An object is to provide a projector having a synthetic optical system.

[0007]

In order to achieve the above object, a method of manufacturing a color combining optical system according to the present invention combines a plurality of light incident end faces corresponding to a plurality of color lights and emits the respective color lights. In order to manufacture a color combining optical system including a prism having a light emitting end face and a fixing plate to which the prism is fixed, a method for manufacturing the color combining optical system in which the prism is positioned with respect to the fixing plate. A light source that emits white light, a white light emitted from this light source is separated into a plurality of color lights, and each separated color light is introduced into the light incident end surface of the prism, and The light source, the light guide unit, and the light flux detection unit, which are implemented by a manufacturing apparatus including a light flux detection unit that detects a light flux emitted from the light emitting end surface of the prism, are set in the manufacturing apparatus. Position adjustment on the reference optical axis of An optical axis position adjusting step, a plane position adjusting step of adjusting the position of the prism so as to be arranged at a predetermined plane position serving as a reference with respect to the fixed plate, and emitting white light on the reference optical axis, A tilt direction position adjusting step of adjusting the tilt direction position of the prism with respect to the fixed plate while allowing the light beam incident on the light incident end surface of the prism to be detected by the light beam detection unit. The optical axis position adjusting step includes a light source optical axis adjusting procedure for adjusting the white light from the light source on the reference optical axis,
Based on the adjustment state of white light by the light source optical axis adjustment procedure, an autocollimator position adjustment procedure for adjusting the autocollimator to a predetermined position according to the reference optical axis, and the light guide using the position-adjusted autocollimator And a light guide section position adjustment procedure for adjusting the position of the section.

In such an invention, the method for manufacturing the color synthesizing optical system includes an optical axis position adjusting step, and the optical axis position adjusting step includes a light source optical axis adjusting step, an autocollimator position adjusting step, The light guide part position adjustment procedure is included so that the optical path of the light beam from the light source to the light guide part is aligned with the reference optical axis. By adjusting the position of the auto-collimator so that it is located on the optical axis, the light beam emitted from the auto-collimator is made to enter the light-incident end face of the prism at a right angle through the light guide section using this auto-collimator. The position of the light guide portion can be adjusted so that the light beam emitted from the light source enters the prism at a right angle to the light incident end surface. Therefore, the light flux emitted from the light source can be arranged on the reference optical axis before the color synthesizing optical system is manufactured, and the color synthesizing optical system can be manufactured with high accuracy in an optimum state. Further, after the optical axis position adjusting step, by performing the flat surface position adjusting step and the tilt direction position adjusting step, the flat plate position of the end surface orthogonal to the light incident end surface of the prism is detected by the detector, On the other hand, since it is possible to adjust the position of the prism so that it is arranged at a predetermined plane position serving as a reference,
When the prism is largely deviated from the fixed plate in advance, the position of the prism in the plane direction can be easily adjusted. Further, white light is separated into a plurality of color lights of R, G, B, etc., and is made incident on the light incident end surface of the prism, and while the light flux combined by the prism is detected by the detection device, it corresponds to each color light detected. The positions of the prisms relative to the fixed plate can be adjusted with high precision and speed by adjusting the mutual positions of the images, and the object of the present invention is achieved.

Further, the light guide section includes a color separation optical element including a plurality of polarization separation films for separating white light emitted from the light source into two types of color light, and a plurality of color separation optical elements separated by the color separation optical element. A reflecting mirror that bends a part of the colored light to guide the light to the light incident end face of the prism, and the light guide section position adjusting procedure does not pass through the reflecting mirror among the colored lights separated by the color separation optical element. On the basis of color light, a color separation optical element position adjusting step for adjusting the position of the color separation optical element on the reference optical axis, and introducing a light flux using the autocollimator for the adjusted color separation optical element, On the basis of the adjusting color synthesizing optical system attitude adjusting step for adjusting the attitude of the adjusting color synthesizing optical system which is the reference of the adjustment, and the reflecting mirror using the auto collimator, based on the attitude adjusting adjustment color synthesizing optical system. of It is preferable that a reflecting mirror posture adjustment step of adjusting the energizing.

In such a configuration, after performing the light source optical axis adjustment procedure, the color separation optical element is installed, white light is emitted onto the reference optical axis positioned in the light source optical axis adjustment procedure, and the color separation optical element is emitted. If the color separation optical element position adjustment step is performed to adjust the position of the color separation optical element so that the color light that does not pass through the reflection mirror is positioned on the predetermined optical path among the plurality of color lights separated by the element, The postures of the color synthesizing optical system for adjustment and the reflecting mirror can be adjusted by using an autocollimator in an optimum state where the separation optical element is adjusted to a predetermined position. In the adjustment color composition optical system posture adjustment step, white light is emitted from the autocollimator, is separated into a plurality of color lights by the light guide, and the color light is incident on the adjustment color composition optical system and adjusted by the autocollimator. The position of the adjusting color synthesizing optical system can be adjusted by detecting the reflected light reflected from the working color synthesizing optical system. Furthermore, by performing the reflection mirror attitude adjustment step after the adjustment color composition optical system attitude adjustment step, the color light that enters the adjustment color composition optical system via the reflection mirror among the light flux emitted from the autocollimator. Based on the above, the reflected light reflected from the color synthesizing optical system for adjustment is detected by the autocollimator, each reflecting mirror is adjusted, and the light flux emitted from the autocollimator is made incident on each light of the color synthesizing optical system for adjustment. The light can be incident on the end face at a right angle.

Further, it is preferable that the step of adjusting the position of the color separation optical element and the step of adjusting the attitude of the reflection mirror are carried out by blocking the color light other than the color light corresponding to the object of adjustment with a light shielding plate. In such a configuration, if a light blocking plate that blocks color light other than the color light corresponding to the adjustment target among the plurality of color lights separated by the color separation optical element is provided, the color separation optical element position adjustment step and reflection When the mirror attitude adjusting step is performed, it is possible to position the adjustment target corresponding to each color light in a state in which the color light other than the color light corresponding to the adjustment target is blocked by the light blocking plate and the respective color lights do not interfere with each other.

Further, there is provided a mirror attitude adjusting procedure for arranging a mirror on the optical axis of the white light adjusted by the light source optical axis adjusting procedure and adjusting the attitude of the mirror so as to be orthogonal to the optical axis. It is preferable that the auto-collimator position adjustment procedure is performed by using the reflected light of the mirror adjusted by the mirror attitude adjustment procedure. In such a configuration, a mirror for reflecting a light beam is installed on the reference optical axis positioned in the light source optical axis adjustment procedure, white light is emitted from the light source on the reference optical axis, and reflected from this mirror. By adjusting the attitude of the mirror so that the position of the white light coincides with the light beam emission position, the reflecting surface of the mirror is positioned at right angles to the reference optical axis. Therefore, when the position of the autocollimator is adjusted, the optical axis of the autocollimator can be aligned with the reference optical axis by adjusting the position of the autocollimator so as to obtain the origin in accordance with the mirror position.

After the step of adjusting the optical axis position, in order to confirm that the plurality of color lights separated by the color separation optical element are incident on the light incident end face of the prism at a right angle, the light incident on the prism is incident. A jig installation procedure for attaching an optical axis confirmation jig in which holes are provided in the end face corresponding to the end face and each hole is provided with a point sensor, and the amount of light detected by the point sensor is maximized as described above. It is preferable to provide a light amount confirmation procedure for re-adjusting the position of the light guide section.
In such a configuration, when an optical axis confirmation jig including a hole is provided on each end face corresponding to each light incident end face of the prism and a point sensor for detecting each color light passing through the hole is provided. If the light quantity confirmation procedure is provided after the optical axis position adjustment process, each color light emitted from the light source, separated into a plurality of color lights by the light guide section, and passed through the hole of the optical axis confirmation jig is pointed out. The position of the light guide section can be readjusted so that the amount of light detected by the sensor becomes maximum. Therefore, by digitizing the detected light amount of each color light,
The incident position of each color light can be accurately grasped, and the position adjustment of the light guide section can be ensured.

On the other hand, the color synthesizing optical system of the present invention is characterized by being manufactured by any one of the above-described methods for manufacturing the color synthesizing optical system in order to achieve the above object. According to the present invention, the substantially X-shaped reflecting surface of the prism is highly accurate with respect to the fixed plate by being manufactured by performing the position adjustment with high accuracy by the method for manufacturing the color combining optical system described above. It is possible to provide a color synthesizing optical system which is arranged in the above position and which can accurately synthesize light fluxes containing image information and project a good image without pixel shift.

Further, the projector of the present invention is characterized by being provided with the above-mentioned color synthesizing optical system in order to achieve the above object. According to the present invention, it is possible to enjoy a projector that exhibits substantially the same actions and effects as the actions and effects of the color combining optical system described above.

[0016]

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of the present invention will be described below with reference to the drawings. First Embodiment [1] Structure of Projector FIG. 1 shows a color combining optical system according to an embodiment of the present invention, a color separation optical system, a plurality of light modulators, a color combining optical system, and a projection optical system. The structure of a projector 100 in which an optical unit including the above is adopted is shown. This projector 10
Reference numeral 0 includes an integrator illumination optical system 110, a color separation optical system 120, a relay optical system 130, an electro-optical device 140, a color combining optical system 150, and a projection lens 160 serving as a projection optical system.

The integrator illumination optical system 110 comprises:
The light source device 111 including the light source lamp 111A and the reflector 111B, the first lens array 113, the second lens array 115, the reflecting mirror 117, and the superposing lens 1
19 and. The light flux emitted from the light source lamp 111A is aligned in the emission direction by the reflector 111B, is divided into a plurality of partial light fluxes by the first lens array 113, and is emitted by the reflection mirror 117 in the emission direction 90.
After being bent, an image is formed in the vicinity of the second lens array 115. Each of the partial light fluxes emitted from the second lens array 115 has a central axis (chief ray) at the rear stage of the superimposing lens 1.
A plurality of partial light fluxes that are incident perpendicularly to the incident surface of 19 and are emitted from the superimposing lens 119 include three liquid crystal panels 141 that form an electro-optical device 140 described later.
Superimposing on R, 141G, 141B.

The color separation optical system 120 comprises two dichroic mirrors 121 and 122 and a reflection mirror 123, and a plurality of partial light beams emitted from the integrator illumination optical system 110 by these mirrors 121, 122 and 123. Has a function of separating light into three color lights of red, green and blue. The relay optical system 130 includes the incident side lens 1
31, a relay lens 133, and a reflection mirror 135,
137, and has a function of guiding the color light separated by the color separation optical system 120, for example, blue light B to the liquid crystal panel 141B.

The electro-optical device 140 includes three liquid crystal panels 141R, 141G and 141B, which are light modulators, which use, for example, a polysilicon TFT as a switching element, and a color separation optical system. 12
Each color light separated by 0 is emitted from these three liquid crystal panels 14
1R, 141G and 141B form an optical image by being modulated according to image information. The color combining optical system 150
The cross dichroic prism 151 constituting the above is to form a color image by synthesizing images modulated for each color light emitted from the three liquid crystal panels 141R, 141G, and 141B. In the cross dichroic prism 151, a dielectric multilayer film that reflects red light and a dielectric multilayer film that reflects blue light are formed in a substantially X shape along the interfaces of the four rectangular prisms. Three color lights are combined by the dielectric multilayer film. Then, the color image combined by the cross dichroic prism 151 is emitted from the projection lens 160 and enlarged and projected on the screen.

[2] Structure of Optical Unit In such a projector 100, the optical parts constituting the integrator illumination optical system 110, the color separation optical system 120, and the relay optical system 130 are, as shown in FIG. It is housed inside the upper light guide 171 that constitutes the casing for use, and is attached inside the upper light guide 171 with a clip or the like.

The three liquid crystal panels 141R, 141G and 141B constituting the electro-optical device 140 are arranged so as to surround the side surfaces of the cross dichroic prism 151 on three sides. Specifically, as shown in FIG. 3, each liquid crystal panel 1
41R, 141G, 141B are housed in a holding frame 143, and holes 14 formed at the four corners of the holding frame 143.
The transparent resin pin 145 is inserted into the 3A together with the UV-curable adhesive to be fixed to the light incident end surface 152 of the cross dichroic prism 151 by the so-called POP (Panel On Prism) structure and fixed to the cross dichroic prism 151. Has been done. Here, the holding frame 143 is formed with a rectangular opening 143B,
Each of the liquid crystal panels 141R, 141G and 141B is exposed at the opening 143B, and this portion becomes an image forming area. That is, each liquid crystal panel 141R, 141G, 14
Each color light R, G, B is introduced into this portion of 1B, and an optical image is formed according to image information.

Further, the cross dichroic prism 15
On the lower surface of 1, the fixing plate 153 is provided with the ultraviolet curable adhesive 15
The fixing plate 153 is provided with holes 153A for screwing and fixing. This fixed plate 1
As shown in FIG. 4, the reference numeral 53 designates a spherical bulging portion 15 at the center.
3B, the lower surface of the cross dichroic prism 151 is brought into contact with the bulging portion 153B, and the uncured ultraviolet curing adhesive 154 is filled between the cross dichroic prism 151 and the fixing plate 153. The position of the prism 151 is adjusted, and after the position adjustment is completed, ultraviolet rays are irradiated from the upper surface to the lower surface of the cross dichroic prism 151 to irradiate the ultraviolet curable adhesive 154.
Cure. The fixed plate 153 has a spherical bulge 153.
B is formed because it is necessary to adjust the position in the tilting direction with respect to the optical axis.

The cross dichroic prism 151 and the liquid crystal panels 141R and 141G,
141B includes a lower light guide 172 as shown in FIG.
The screw 155 is inserted into the hole 153A of the fixing plate 153 at the front stage of the optical path of the projection lens 160, and is fixed to the lower light guide 172 that constitutes the optical component housing, and the upper light guide 171 and the lower light guide 172 are combined. The optical unit is thus configured.

The optical unit having the above-mentioned structure is as follows.
Integrator illumination optical system 110, color separation optical system 12
0 and the optical components forming the relay optical system 130 are housed in the upper light guide 171. Next, the cross dichroic prism 151 including the fixed plate 153 whose position has been adjusted is attached to the lower light guide 172,
The liquid crystal panels 141R, 141G, and 141B are attached to the light incident end surface of the cross dichroic prism 151 in a state where the fixing adhesive is uncured. Then, in a state where the upper light guide 171 and the lower light guide 172 are combined, the position of the liquid crystal panels 141R, 141G, 141B is adjusted by using the light flux emitted from the light source, and finally the adhesive is fixed and the cross is performed. Liquid crystal panels 141R and 141G for the dichroic prism 151,
141B is positioned and fixed.

[3] Structure of Color Synthesizing Optical System Manufacturing Apparatus FIGS. 6 and 7 show a manufacturing apparatus 2 for manufacturing the color synthesizing optical system 150 constituting the optical unit. The manufacturing apparatus 2 of the color synthesizing optical system 150 basically includes a manufacturing apparatus main body 30, which is a manufacturing apparatus main body, a projection unit main body 40, and a processing unit main body 50, and as shown in FIG. 6, a cross dichroic prism 151. Is installed on the manufacturing apparatus main body 30 and the color synthesizing optical system 150 is manufactured.

The manufacturing apparatus main body 30 includes an image pickup section 31 for detecting the plane position of the cross dichroic prism 151.
A prism position adjusting unit 32 for adjusting the position of the cross dichroic prism 151, a manufacturing unit 33 in which the color combining optical system 150 is incorporated, an optical axis alignment, and a white laser beam for adjusting the position of the cross dichroic prism 151 are emitted. The light source unit 37 and the autocollimator 200 for positioning the laser light emitted from the light source unit 37 on a predetermined reference optical axis set in the manufacturing unit 33. The imaging unit 3
1, the prism position adjustment unit 32, the manufacturing unit 33, the light source unit 37, and the autocollimator 200 are supported and fixed on a mounting table 35 provided at the bottom of the manufacturing apparatus main body 30. A caster 35A that allows the manufacturing apparatus main body 30 to move is provided below the mounting table 35.

The projection unit body 40 includes the screen unit 4
1 and a darkroom 42. Darkroom 42
Is a side plate 421 surrounding the screen unit 41 and a top plate 4
22 and a mounting table 43. Side plate 4
21 is provided with a transmission window 421A for transmitting the light emitted from the light source unit 37 via the manufacturing unit 33, and the projection unit main body 40 is provided below the mounting table 43.
A caster 43A is provided to make the movable. The processing section main body 50 is a computer 51 as a control device, the manufacturing apparatus main body 30 and the projection section main body 40 are electrically connected, and the manufacturing apparatus main body 30 and the projection section main body 40 are connected.
It processes signals from and controls.

(3-1) Structure of Manufacturing Apparatus Main Body The manufacturing apparatus main body 30 includes the color synthesizing optical system 1 to be manufactured.
A clamp jig 34 that supports and fixes the manufacturing unit 33 in which the 50 is incorporated is provided, and the light source unit 37 is installed below the mounting surface of the manufacturing unit 33 of the clamp jig 34. Further, above the manufacturing unit 33 of the manufacturing apparatus body 30,
Prism position adjusting unit 32 movable in three dimensions
And an image pickup section 31 for detecting the plane position of the color combining optical system 150 to be manufactured. Further, although not shown in FIG. 6, as shown in FIG. ,
A position adjustable autocollimator is provided.
Although not shown, a fixing ultraviolet light source device for fixing the cross dichroic prism 151 on the fixing plate 153 by curing the ultraviolet curing adhesive 154 is installed below the mounting table 35. .

The image pickup section 31 detects the plane position of the cross dichroic prism 151 arranged on the fixed plate 153, and the processing section body 5 arranged outside.
0 computer 51 is connected. This imaging unit 3
As shown in FIG. 6, 1 is a support portion 31A standing from the upper surface of the clamp jig 34, an arm portion 31B extending orthogonally from the support portion 31A, and a CCD fixed to the arm portion 31B. And a camera 31C. The CCD camera 31C is connected to a computer 51, which is a processing unit main body 50 arranged outside, via a video capture board (not shown). After the CCD camera 31C images the upper surface of the cross dichroic prism 151, it is converted into an image signal for a computer by this video capture board and processed by the computer 51.
As shown in FIG. 8, the prism position adjusting unit 32 is a part that adjusts the position of the cross dichroic prism 151, and the cross dichroic prism 151.
And a drive shaft portion 322 having a tip end connected to the prism grip portion 321 and a base end connected to a drive mechanism.

The prism gripping portion 321 has a planar shape that is substantially the same as the planar shape of the cross dichroic prism 151 to be held, adsorbs the upper surface of the cross dichroic prism 151, and causes the cross dichroic prism 15 to adsorb.
Adjust the position of 1. Therefore, the prism grip 321
The suction holes 321A are formed at the four corners of the contact surface with the cross dichroic prism 151. Also,
An imaging hole 321 is provided in the center so that the imaging unit 31 can detect the planar position of the cross dichroic prism 151.
B is formed. Further, an ultraviolet irradiation unit 321C is formed on this contact surface, and when the position adjustment by the prism position adjustment unit 32 is completed, the ultraviolet irradiation unit 321C irradiates ultraviolet rays, passes through the cross dichroic prism 151, and lowers the lower surface. The ultraviolet curable adhesive 154 on the side is cured.

As shown in FIG. 9, the drive shaft portion 322 is a portion which is driven by a motor or the like to adjust the posture of the prism gripping portion 321, and the cross dichroic prism 151 attracted to the prism gripping portion 321 is It can be adjusted to any position in three dimensions.

The drive shaft portion 322 is provided on the base portion 323 fixed on the mounting table 35, the plane position adjusting portion 324 movably installed on the upper surface of the base portion 323, and the tip portion of the plane position adjusting portion 324. Out-of-plane rotational position adjusting unit 32
5 and an in-plane rotational position adjusting section 326 provided at the tip of the out-of-plane rotational position adjusting section 325. The prism gripping section 32 is provided at the tip of the in-plane rotational position adjusting section 326.
1 is fixed.

The plane position adjusting section 324 is a section for adjusting the advancing / retreating position and the plane position of the cross dichroic prism 151 with respect to the fixed plate 153, and is provided slidably along the rail 323A on the base 323. The adjusting portion 324A, the engaging member 324B having a substantially rectangular frame-shaped cross section, which is fixed on the X-axis adjusting portion 324A, and the engaging member 324.
A Y-axis adjusting unit 324 slidably provided in the B rectangular frame.
C and the leg portion 32 that is erected on the Y-axis adjusting portion 324C.
4D, a Z-axis adjusting portion 324F provided at an upper tip portion of the leg portion 324D, a connecting portion 324E connecting the Z-axis adjusting portion 324F and the leg portion 324D, and a Z-axis adjusting portion 324F, And a connecting portion 324G to which the out-of-plane rotational position adjusting portion 325 is connected. The X and Y axis adjusting units 324A and 324C move in the X and Y axis directions of the mounting table 35 (directions orthogonal to the paper surface and left and right directions in FIG. 9) by a drive mechanism such as a motor (not shown). The Z-axis adjusting section 324F moves in the Z-axis direction (vertical direction in FIG. 9) with respect to the connecting section 324E by a drive mechanism such as a motor (not shown).

Here, as shown in FIG. 9, the mounting table 3
A prism mounting table 35B on which the prism to be manufactured is mounted is installed on the upper surface of the plate 5, and the above-mentioned plane position adjusting unit 324 is installed.
By using, to move the prism gripping section 321 to above the prism mounting table 35B, grip the prism to be manufactured, and further move the prism into the manufacturing section 33 for manufacturing, thereby manufacturing the color combining optical system 150. Is done.

The out-of-plane rotational position adjusting portion 325 is provided on the fixed plate 15
3 adjustment of the out-of-plane rotational position of the cross dichroic prism 151 (cross dichroic prism 1
51 is a portion for performing position adjustment in the tilt direction). The out-of-plane rotational position adjusting portion 325 is fixed to the tip end portion of the plane position adjusting portion 324 and is slidably provided so as to form an arc in the vertical direction.
25A, a substantially fan-shaped adjustment guide portion 325C attached to the first adjustment portion 325A, and a second adjustment portion 325B slidably provided along the adjustment guide portion 325C so as to form an arc in the horizontal direction. Is equipped with. Then, when a motor (not shown) provided above the first adjusting unit 325A is driven to rotate, the first adjusting unit 325A slides, and a motor (not shown) provided above the second adjusting unit 325B is rotated. The second adjuster 325B slides, and the out-of-plane rotational position of the cross dichroic prism 151 with respect to the fixed plate 153 can be adjusted with high accuracy.

The in-plane rotational position adjusting section 326 is provided on the fixed plate 15
3 is a portion for adjusting the in-plane rotational position of the cross dichroic prism 151, is attached to the lower end of the out-of-plane rotational position adjusting unit 325, and has a hole having substantially the same shape as the in-plane rotational position adjusting unit 326. It engages with a cylindrical base 326A that penetrates vertically and is rotatably provided in the circumferential direction of this base 326A. Then, by adjusting the rotational position of the in-plane rotational position adjusting unit 326, the cross dichroic prism 151 with respect to the fixed plate 153.
The in-plane rotational position of can be adjusted with high accuracy.

As shown in FIG. 10 or 11, the manufacturing section 33 includes a fixing plate 15 which constitutes a color synthesizing optical system 150.
3 and the cross dichroic prism 151 are incorporated, and the cross dichroic prism 151 is positioned and fixed with respect to the fixed plate 153. Before the color synthesizing optical system 150 is manufactured, the manufacturing unit 33
2 slit slit jig 336 for locating the optical path to the predetermined optical path, a prism 331A for separating the light flux emitted from the light source unit into R, G, B color lights, and the separated color light are arranged. 331 that guides light to the light incident end surface 152 of the cross dichroic prism 151
A light guide portion 331 composed of R and 331B and a prism 331A disposed in proximity to the prism 331A.
The light-shielding plate 339 capable of switching between transmission and blocking of each color light separated by, the mounting table 332 for mounting the color combining optical system 150, and the combined light combined by the color combining optical system 150 are projected. And a light guide portion 333 that projects the light onto a predetermined position of the main body 40.

The double slit jig 336 is a portion in which the reference optical axis of the light beam emitted from the light source unit 37 and entering the manufacturing section 33 is set, and from the light source unit 37 in accordance with this reference optical axis. The optical path to the manufacturing unit 33 can be positioned on the reference optical axis, the position of the autocollimator 200 can be adjusted according to the reference optical axis, and the total reflection unit 337 that is the first slit can be performed.
And a second slit portion 338 which is a second slit. The total reflection unit 337 is located on the luminous flux incident side of the manufacturing unit 33, and is provided with an adjusting plate 337A having a hole 337B that transmits the incident luminous flux to the manufacturing unit 33, and is installed on the adjusting plate 337A. Hole 337B
The total reflection mirror 33 that reflects the light flux that has passed through and is removable via the adjustment plate 337A.
The total reflection mirror adjustment unit 337D that adjusts 7C and the support plate 337E that supports the total reflection mirror 337C are provided. The second slit portion 338 is disposed so as to face the total reflection unit 337, and the total reflection unit 3 is provided.
The hole 3 is formed so that the light flux passing through the hole 337B of the adjusting plate 337A of the hole 37 can pass through the second slit portion 338.
A hole 338A having substantially the same shape as 37B is formed.

The prism 331A is formed integrally with three prisms for separating the R, G, and B color lights,
Screws are fixed to both ends of the prism 331A, and the plane direction of the prism 331A is adjusted by adjusting the screws (see FIG.
0 horizontal direction and in-plane rotation direction) and a micro holder 334A for adjusting the forward / backward direction (vertical direction in FIG. 10) of the prism 331A via the plane direction adjusting section 334B. The prism position adjusting unit 334 is provided.

The mirrors 331R and 331B are portions for reflecting the R and B color lights separated by the prism 331A and guiding them to the light incident end surface 152 of the cross dichroic prism 151, and the mirrors 331R and 331B.
The X-axis adjustment unit 335A (horizontal position adjustment in FIG. 10), the Y-axis adjustment unit 335B (vertical position adjustment in FIG. 10), and the position adjustment in the tilt direction on the reflection surface of the mirror 331B. Performing tilt direction adjustment unit 335C
A mirror position adjustment unit 335 configured by is provided. Here, the tilt direction adjusting section 335C is composed of two adjusting sections as shown in FIG. 11, and is capable of performing precise position adjustment in the tilt direction. The light blocking plate 339 is formed of a substantially rectangular plate-shaped body,
A hole 339A for transmitting each color light separated by the prism 331A is provided, and by sliding and changing the position of the light shielding plate 339, a position where all the color light is transmitted, and R, G, B color lights are transmitted. Can be switched to four stages of positions where each can be transmitted. Further, in order to prevent reflection of light from the light shield plate 339 when the colored light is blocked, the surface of the light shield plate 339 is subjected to antireflection treatment. The mounting table 332 has a prism 331A for R,
A cross dichroic prism 1 which is a portion where the respective colored lights separated into G and B are condensed and which combines the condensed respective colored lights.
It is possible to manufacture the color synthesizing optical system 150 by placing 51 and the fixing plate 153 that is adhesively fixed on the lower surface thereof, adjusting the position of the cross dichroic prism 151 with respect to the fixing plate 153, and adhering and fixing. . Table 332
Is provided with a hole 332A for fixing the fixing plate 153. A screw is inserted into the hole 153A formed in the fixing plate 153, and the fixing plate 153 is placed in the hole 332A formed in the mounting table 332. Can be fixed. Here, as shown in FIG. 12 or 13, on the mounting table 332, the laser light emitted from the light source unit 37 is set in the manufacturing section 33 before the color synthesizing optical system 150 is manufactured. In order to position it on the reference optical axis, the dummy prism installation jig 38 and the laser optical axis jig 39 are appropriately exchanged and placed and fixed according to the purpose of use, and the prism 331A and the mirror 331R of the light guide 331, The position adjustment of 331B is performed.

The dummy prism installation jig 38 is arranged on the light emitting side of the mounting table 332, the dummy prism 385 having a reflecting film formed on each light incident end face thereof, and a fixing portion fixed to the mounting table 332. 381, an adjusting unit 382 that is connected to the fixing unit 381 by the connecting unit 383 and adjusts the position of the dummy prism 385, and a holding unit 384 that holds the dummy prism 385. The dummy prism 385 is formed so that the light incident end faces on which the reflection film is formed are orthogonal to each other with high accuracy. Fixed part 38
1 has a fixing hole 381A formed therein, and the mounting table 3
It is fixed by a screw to a hole 332B formed on the light flux emission side of 32. The adjusting unit 382 includes two adjusting units. By adjusting the two adjusting units, the tilting direction of the dummy prism 385 with respect to the light incident end face can be precisely adjusted. The grip portion 384 is formed so as to cover the light incident end surface of the dummy prism 385,
The dummy prism 385 is gripped so as to support the lower surface thereof. A hole 384 </ b> A is formed on the light incident end face so that the light beam is incident on the dummy prism 385.

The laser optical axis jig 39 has substantially the same shape as the cross dichroic prism 151, is fixed to the metallic sensor built-in portion 391 and the mounting table 332, and is substantially the same shape as the fixing plate 153. And 392. The sensor built-in portion 391 is formed with a pinhole 391A through which each color light separated by the prism 331A passes, and inside the sensor built-in portion 391, a point for detecting each color light passing through the pinhole 391A is formed. The sensor 391B is provided. Here, the point sensor 391B is connected to the computer 51 of the processing unit main body 50 arranged outside, and a process of digitizing the detected light amount of each color light is performed. The fixing plate 392 is
Like the fixing plate 153, a hole 392A for fixing to the mounting table 332 is provided, and is fixed by a screw to the hole 332A formed in the mounting table 332.

The light guiding section 333 has two shield plates 333A on the optical path between the color synthesizing optical system 150 and the projection section body 40.
The shielding plate 333A includes a color combining optical system 1
A transmission hole 333B for transmitting the combined light emitted at 50 is formed. Here, in the shield plate 333A on the light incident side of the light guide portion 333, the shield plate is adjusted so that the two transmission holes 333B can be arranged on the reference optical axis adjusted by the prism 331A and the mirror 331B. The portion 333C is provided. This shield adjustment unit 333C
As shown in FIG. 11, it is composed of two adjusting parts. By adjusting the two adjusting parts, the shield plate 3
It is possible to precisely adjust the tilting direction with respect to the plane of 33A.

The light source unit 37 has a light source for adjusting the position of the cross dichroic prism 151, and as shown in FIG. 14, is provided with a light source section main body 371 and a light guide section 372. The light source unit main body 371 is configured to house a laser light output unit 371A serving as an adjustment light source in the housing, and is a part that supplies a light flux to the manufacturing unit 33.
The light guide portion 372 is composed of a vertically extending tubular body, and an opening 372A is formed laterally at the upper end thereof, and an opening 3 is formed inside the opening 372A depending on the position of the opening 372A.
Mirror 3 arranged at approximately 45 ° with respect to the opening surface of 72A
72B is provided. The lower end portion of the light guide 372 is
A rail 372E is formed so that it can slide on the upper surface of the mounting table 35, and by appropriately moving it, the autocollimator 200 and the light source unit 37 can be switched. An opening 372C is formed on the side surface of the lower end portion and faces the laser light emitting portion. A mirror 372D is arranged inside the light guide portion 372 corresponding to the opening 372C at an angle of about 45 ° with respect to the opening surface of the opening 372C.

Utilizing such a light source unit 37,
When adjusting the color combining optical system 150 to be manufactured,
The opening 372A in the upper portion of the light guide 372 and the red light separation side end surface of the prism 331A installed in the manufacturing unit 33 face each other, and the laser light output unit 371 of the light source unit main body 371.
The light flux emitted from A is introduced into the manufacturing unit 33 from the red light separation side end face of the prism 331A.

The autocollimator 200 emits a light beam, detects the reflected light beam, and measures the inclination of the reflection target. The autocollimator 200 is arranged opposite to the red light separation side end face of the prism 331A in the manufacturing section 33. . Therefore, when the auto collimator 200 is used, the light source unit 37
The light guide unit 372 connected to is slid to set the autocollimator 200. Here, the auto collimator 2
As shown in FIG. 7, the movement and position adjustment of 00 are performed by the adjustment unit 201, and the movement and position adjustment can be performed in the three-dimensional direction. Specifically, as shown in FIG. 15, the autocollimator 200 includes a light source unit 210 that emits a light flux, an objective lens 220 that emits the light flux emitted from the light source unit 210 as parallel light rays,
A light guide section 230 for guiding the light flux emitted from the light source unit 210 and for guiding the reflected light flux;
And an eyepiece lens 240 that magnifies the reflected image.

The light source unit 210 includes an objective lens 220.
And a chart 210B in which cross-shaped transmission holes are formed, and a light source 210A that emits a light beam and is disposed at the back focus position of the. The light flux emitted from the light source 210A passes through the chart 210B and is emitted to the light guide section 230 as a light flux having a cross shape. Light guide 2
30 has a half mirror 230A arranged at about 45 ° with respect to the chart 210B of the light source unit 210,
The light beam emitted from the light source unit 210 is reflected by the half mirror 230A and is emitted as a parallel light beam by the objective lens 220. Then, the auto collimator 200
The light flux emitted from is reflected by the target reflecting surface and returns to the autocollimator 200. Auto collimator 200
Each of the color lights returned to (1) passes through a half mirror arranged in the light guide section 230, and an image can be confirmed by the eyepiece lens 240. Further, a cross-shaped scale line 240A is formed on the eyepiece lens 240, and the inclination of the reflection target can be measured from the mutual position between the image confirmed by the eyepiece lens 240 and the scale line 240A. Here, instead of the eyepiece lens 240, a 3CCD camera may be installed.
By installing the 3CCD camera, the above-mentioned reflected image can be captured, and the computer 51, which is the processing unit main body 50, can perform image detection and image processing via the video capture board. By using a 3CCD camera, it is possible to perform color light separation and highly precise adjustment.

(3-2) Structure of Projection Part Main Body In FIG. 6, the screen unit 41 constituting the projection part main body 40 is arranged inside the dark room 42 so as to face the manufacturing apparatus main body 30. The screen unit 41 is a dark room 4
The transmissive screen 41, which is disposed on the upper surface of the second mounting table 43 and serves as a projection surface of the color combining optical system 150 to be manufactured.
1 and the rear surface of the transmissive screen 411,
A CCD camera 412, which is disposed in the approximate center of the transmissive screen 411 and serves as a light flux detection unit, and the CCD camera 41.
2 is provided with a moving mechanism 413 for moving 2 along the surface of the transmissive screen 411. A position sensor 414 for detecting the white laser light output from the laser light output unit 371A is provided in the center of the lower part of the rear surface of the transmissive screen 411.
Can be moved along the surface of the transmissive screen 411 by the moving mechanism 415.

As shown in FIG. 16, the transmissive screen 411 is formed in a rectangular shape, and the side plate 42 is formed from the side surface thereof.
It is supported and fixed by four support portions 416 which are provided so as to project toward 1. In addition, the transmissive screen 411 can be configured, for example, by dispersively disposing optical beads on an opaque resin layer, and when a light beam is incident from the side where the optical beads are disposed, the optical beads become a lens. The light flux is emitted to the back surface side of the transmissive screen 411.

The CCD camera 412 and the position sensor 414 as the light flux detecting section are both based on the position of the light spot by the white laser light displayed on the transmissive screen 411, based on the cross dichroic prism 15.
The position sensor 414 detects white laser light when adjusting the position of the cross dichroic prism 151, which will be described later.
These CCD camera 412 and position sensor 4
14 can be moved by remote control by a servo control mechanism inside the mounting table 43.

(3-3) Structure of Processing Unit Main Body The manufacturing device main body 30 and the projection unit main body 40 described above are electrically connected to a computer 51 as a control device, as shown in the block diagram of FIG. . The computer 51 includes a CPU and a storage device, controls the operation of the servo mechanism of the manufacturing apparatus main body 30 and the projection unit main body 40, and controls the CCD cameras 412 and 31C via an image capturing device such as a video capture board. It is connected to the position sensor 414. Although not shown,
When the laser optical axis jig 39 is installed on the mounting table 332, it is connected to the point sensor 391B of the laser optical axis jig 39.

The image picked up by the CCD camera 31C installed in the manufacturing apparatus main body 30 is input to the computer 51 through the image capturing device, converted into an image signal suitable for the computer, and then a computer including a CPU. The prism plane position adjustment program developed on the OS for controlling the operation of 51 performs the plane position adjustment of the cross dichroic prism 151. The position of the light spot detected by the position sensor 414 is captured by the computer 51 and processed, and the position of the cross dichroic prism 151 is adjusted. In addition, each color light detected by the point sensor 391B is taken into the computer 51, and the detected light amount is converted into a numerical value.
The positions of the prism 331A and the mirror 331B that configure the first lens group 1 are adjusted.

[4] Manufacturing operation of color synthesizing optical system In the manufacturing apparatus 2 of the color synthesizing optical system 150 as described above,
The position adjustment operation of the color combining optical system 150 to be manufactured is
This is performed based on the flowchart shown in FIG. (1) First, before installing the color synthesizing optical system 150 on the mounting table 332 of the manufacturing unit 33, the luminous flux emitted from the light source unit 37 is positioned on a predetermined reference optical axis set in the manufacturing unit 33. (Process S1: optical axis position adjusting step). Specifically, it is performed based on the flowchart shown in FIG. (1-1) First, as shown in FIG. 20, in a state where the total reflection mirror 337C and the prism 331A of the light guide unit 331 which configure the total reflection unit 337 of the manufacturing unit 33 are removed,
Light guide unit 37 that connects the light source unit 37 and the manufacturing unit 33
Positioning of the reference optical axis of 2 is performed (process S11: light source optical axis adjustment procedure). That is, the laser beam output part 371A of the light source unit 37 irradiates white laser light, and the hole 337B of the adjustment plate 337A which is the 1st slit which comprises the total reflection unit 337 of the manufacturing part 33, and the 2nd slit. The mirror 372 installed in the light guide 372 so that it can pass through the hole 338A of the second slit portion 338.
Adjust the positions of B and 372D.

(1-2) Next, as shown in FIG. 10, the prism 331A of the light guide portion 331 is attached, and the white laser light emitted from the laser light output portion 371A is changed to the prism 3a.
It is reflected by the green light reflection film of 31A, and the reflected G color light is transmitted through the transmission holes 3 of the two shield plates 333A of the light guide portion 333.
The prism position adjustment unit 334 is adjusted so that the prism 331A passes through 33B (step S1).
2: Color separation optical element position adjustment step). (1-3) Next, as shown in FIG. 20, the total reflection mirror 33
7C is attached to the total reflection unit 337 (process S1
3), adjust the total reflection mirror adjustment unit 337D of the total reflection unit 337 so that the white laser light reflected by the total reflection mirror 337C is located on the optical path of the light flux emitted from the laser light output unit 371A. The position of the reflection mirror 337C is adjusted (process S14: mirror attitude adjustment procedure).

(1-4) Next, as shown in FIG. 21, the light guide 372 is slid, the autocollimator 200 is installed, and the position of the autocollimator 200 is adjusted (process S15: autocollimator position adjustment procedure). ). That is,
White light is emitted from the autocollimator 200 to the total reflection mirror 337C whose position has been adjusted in the mirror attitude adjustment step S14, and the adjustment unit 201 is adjusted so that the light flux detected by the eyepiece 240 is located at the origin. . Specifically,
As shown in FIG. 22, when the optical axis of the autocollimator 200 is not in a position orthogonal to the reflecting surface of the total reflection mirror 337C, the image IG of the reflected light detected by the autocollimator 200 is displayed on the eyepiece lens 240. It is detected at a position deviated from the formed cross-shaped scale line 240A. The position of the autocollimator 200 is adjusted by the adjusting unit 201 so that the image IG of the reflected light overlaps the cross-shaped scale line 240A, so that the optical axis of the autocollimator 200 becomes
It is arranged at a position orthogonal to the reflection surface of the total reflection mirror 337C.

(1-5) Next, as shown in FIG. 23, the dummy prism installation jig 38 is attached to the mounting table 332, the total reflection mirror 337C is removed, and the dummy prism 385 of the dummy prism 385 is removed using the autocollimator 200. Position adjustment is performed (process S16: adjustment color composition optical system attitude adjustment step). That is, the light shielding plate 339 is slid so that only the G color light is transmitted, and the white light emitted from the autocollimator 200 is reflected by the prism 331A of the light guide portion 331.
Are separated into R, G, and B color lights by the dummy prism 3
The color light reflected by 85 is only the G color light, the reflected G color light is detected, and the position of the dummy prism 385 is adjusted by the adjusting unit 382 so that the detected light is located at the origin in the same manner as above. Here, since the dummy prism 385 is formed with high precision so that the respective light incident end faces are orthogonal to each other, the positions of the reflection surfaces for the other R and B color lights are adjusted by positioning the reflection surface for the G color light. The food will be served. (1-6) Further, the position of the mirrors 331R and 331B is adjusted using the autocollimator 200 (process S1.
7: Reflecting mirror attitude adjustment step). That is, the light shielding plate 339 is slid so that only the R color light is transmitted, and the dummy prism 385 is used by using the autocollimator 200.
While detecting the R color light reflected by, the position of the mirror 331R is adjusted in the same manner as described above so that the detection light is located at the origin. Similarly, the light blocking plate 339 is slid so that only the B color light is transmitted, and the B color light reflected by the dummy prism 385 is detected using the autocollimator 200 while the mirror 331B is positioned so that the detection light is located at the origin. Adjust the position of.

(1-7) Next, as shown in FIG. 24, the dummy prism setting jig 38 is removed, and the laser optical axis jig 3 is removed.
9 is installed on the mounting table 332 (process S18: jig installation procedure), the autocollimator 200 is moved, and the light guide section 372 is slid and installed on the laser optical axis. (1-8) Each color light is detected using the point sensor 391B, and the prism 331A and the mirror 33 of the light guide 331 are detected.
The final position adjustment of 1B and 331R is performed (process S19: third optical axis adjustment procedure). That is, after sliding the light blocking plate 339 so that all color light is transmitted, white laser light is emitted from the laser light output unit 371A of the light source unit 37, and the emitted laser light is guided by the light guide unit 372. Then, the light enters the manufacturing unit 33, and R, R
It is separated into G and B color lights, and the respective color lights are separated by the laser optical axis jig 39.
Incident on. Here, each color light that has passed through the pinhole 391A is detected by the point sensor 391B of the laser optical axis jig 39.
The detected light is captured by the computer 51 and digitized. Among these, the position of the prism 331A is adjusted while checking the numerical data of the detected light of the G color light, and the prism 331A is positioned at the position where the numerically detected amount of detected light is maximum. Further, while confirming the numerical data of the detection lights of the R and B color lights, the mirror 331
The positions of R and 331B are adjusted, and the mirrors 331R and 331B are located at the positions where the digitized detected light amount becomes maximum.
To position.

(2) After the optical axis position adjusting step S1 is completed, the laser optical axis jig 39 is removed, and the color synthesizing optical system 150 to be manufactured is mounted and fixed on the mounting table 332 in the manufacturing unit 33 ( Process S2). Specifically, the fixing plate 153 is fixed to the mounting table 332 with a screw, and the ultraviolet curable adhesive 154 is applied on the fixing surface to which the cross dichroic prism 151 is fixed in an uncured state to adjust the prism position. The unit 32 holds the cross dichroic prism 151 mounted on the prism mounting table 35B and operates the computer 51 to operate the cross dichroic prism 151.
Is placed on the fixed plate 153.

(3) The computer is operated to call the model data registered in advance in the storage device for each model of the projector, and loaded into the memory of the CPU (process S3). The model data includes the designed arrangement position of the cross dichroic prism 151 to be manufactured, and when adjusting each position, the designed arrangement position is used as an initial position for adjustment. (4) The CPU of the computer 51 outputs a control command to the prism position adjustment unit 32 based on the designed position of the cross dichroic prism 151 in the model data loaded on the memory. The prism position adjustment unit 32 sets the cross dichroic prism 151 to the initial position based on this control command (process S4). (5) Cross dichroic prism 15 as described above
When the installation of No. 1 is completed, the prism plane position adjustment is performed (process S5: plane position adjustment step). Specifically, FIG.
It is performed based on the flowchart shown in.

(5-1) The CPU of the computer 51 sends a control signal to adjust the focus of the CCD camera 31C,
Prepare for detection by the CCD camera 31C (process S5)
1). Then, after preparation for detection, the upper surface of the cross dichroic prism 151 is imaged, and after the captured image is converted into an image signal via the image capturing section, the CPU of the computer 51 processes the image signal and detects the image. Yes (process S52). (5-2) The CPU of the computer 51 calculates the deviation between the previously acquired reference image and the detected image.
(Processing S53), a control command is output to the prism position adjusting unit 32 to adjust the plane position of the cross dichroic prism 151 (processing S54). Specifically, in the captured image, the plane of the substantially X-shaped reflection surface having the selective reflection characteristic of the cross dichroic prism 151 with respect to the plane position of the spherical bulging portion 153B formed on the fixed plate 153. The position is compared with the reference position of the reflection surface acquired in advance, the deviation is calculated, and the plane position of the cross dichroic prism 151 is adjusted.

(6) Next, after the plane position adjustment of the cross dichroic prism 151 as described above is completed, the position of the cross dichroic prism 151 in the tilt direction with respect to the reflecting surface is adjusted. Specifically, FIG. It is performed based on the flowchart shown in. (6-1) The CPU of the computer 51 moves the position sensor 414 to approximately the center of the projection image projected on the transmissive screen 411, and prepares for detection by the position sensor 414 (process S61). Further, white laser light is emitted from the laser light output unit 371A (process S6).
2). (6-2) The white laser light emitted from the light source unit 37 is separated into R, G, and B color lights by the light guide section 331 and then combined again by the cross dichroic prism 151, and the position sensor 414 The light spot images of all the colored lights displayed on the screen are detected (process S6).
3).

(6-3) The light spot image detected by the position sensor 414 is converted into a numerical signal by the computer 51.
The CPU of the computer 51 receives the numerical value signal from the prism position adjusting unit 3 based on the numerical value signal.
A control command is output to 2 to adjust the position of the cross dichroic prism 151 (process S64), and after the adjustment, the light spot image is detected again (process S65).

(6-4) The CPU of the computer 51 calculates the area of the light spot image while adjusting the prism position, and determines whether or not to finish the adjustment based on the calculated area (process). S66). Specifically, when the cross dichroic prism 151 is at a position displaced with respect to the reference optical axis, as shown in FIG.
The light spot images SR, SG, SB of the respective color lights of G and B are formed at positions displaced from each other, and the sum of the areas of the light spot images SR, SG, SB is greater than the area of the original light spot image SO of the white laser light. Also grows. Therefore, the light spot images SR, S
When the sum of the areas of G and SB becomes equal to the area of the original light spot image SO of the white laser light, it may be determined that the adjustment is completed.

(7) The computer 51 determines whether or not the plane position and the tilt direction position of the cross dichroic prism 151 are adjusted, and until the plane position and the tilt direction position with respect to the fixed plate 153 are acquired.
A series of work is repeated (process S7). (8) When the position adjustment of the cross dichroic prism 151 is completed, the CPU causes the prism position adjustment unit 3
2 outputs a control command to the prism position adjusting unit 32, and the prism position adjusting unit 32 irradiates the ultraviolet ray from the ultraviolet ray irradiating section 321C of the prism gripping section 321 to cure the ultraviolet ray curable adhesive 154 on the fixing plate 153. (Processing S8),
The manufacturing of the color combining optical system 150 is completed.

[5] Effects of the Embodiment According to the present embodiment as described above, there are the following effects. (1) When manufacturing the color synthesizing optical system 150, a light source optical axis adjusting step S11, which is an optical axis position adjusting step (process S1).
By performing the autocollimator position adjustment procedure S15 and the light guide section position adjustment procedures S12, S16, and S17, the white laser light emitted from the laser light output section 371A of the light source unit 37 has the reference optical axis. Each hole 337B and hole 3 of the set double slit jig 336
38A so as to pass through the mirror 37 in the light guide 372.
2B and 372D are adjusted, and by further adjusting the position of the autocollimator so that the light beam emitted from the autocollimator 200 is aligned with this reference optical axis, the autocollimator 200 is used.
The position of the light guide portion 331 can be adjusted so that the white light emitted from the light enters the light incident end surface of the cross dichroic prism 151 through the light guide portion 331 at a right angle,
The laser light emitted from the laser light output section 371A of the light source unit 37 enters the light incident end surface of the cross dichroic prism 151 at a right angle. Therefore, the optimum reference optical axis can be acquired before the color synthesizing optical system 150 is manufactured, and the color synthesizing optical system 150 can be manufactured with high accuracy.

(2) After performing the light source optical axis adjustment procedure S11, a prism 331A for separating the emitted light flux into a plurality of color lights is installed, and the light source is placed on the reference optical axis positioned in the light source optical axis adjustment procedure S11. The white light is emitted from the laser light output unit 371A of the unit 37, and the G color light of the R, G, and B color lights separated by the prism 331A is the light guide unit 33.
Since the prism 331A is adjusted and positioned so as to pass through the transmission hole 333B of the shielding plate 333A provided in No. 3, the prism 331A is positioned at a predetermined position, and the adjustment color is quickly adjusted at the optimum position. Synthetic optical system attitude adjustment step S16 and reflection mirror attitude adjustment step S
17 can be done.

(3) When the optical axis position adjusting step S1 is carried out, by carrying out the mirror attitude adjusting step S14,
A total reflection mirror 337C that reflects a light beam is installed on the reference optical axis acquired in the light source optical axis adjustment procedure S11, and a white laser is emitted from the laser light output unit 371A of the light source unit 37 onto the reference optical axis. The total reflection mirror 337C is arranged so that the position of the white laser reflected from the total reflection mirror 337C coincides with the luminous flux emission position.
It can be adjusted by 7D, and the reflection surface of the total reflection mirror 337C is positioned at right angles to the reference optical axis. Therefore, by performing the autocollimator position adjustment procedure S15 after the mirror attitude adjustment procedure S14, an image of the reflected light emitted from the autocollimator 200, reflected by the total reflection mirror 337C, and detected by the autocollimator 200 is obtained. , The position of the autocollimator 200 is adjusted so that it overlaps with the cross-shaped scale line 240A formed on the eyepiece lens 240.
Can be positioned at right angles to the reflection surface of the total reflection mirror 337C.
The optical axis of 00 can be aligned with the reference optical axis.

(4) It is placed close to the prism 331A,
Since the light blocking plate 339 for switching between transmission and blocking of the R, G, and B color lights separated by the prism 331A is provided, the adjustment color composition optical system attitude adjustment step S16 and the reflection mirror attitude adjustment step S17. When performing, the light shielding plate 339 is switched to transmit and block each color light, and the adjustment target corresponding to each color light can be positioned in a state where the color lights do not interfere with each other. (5) When the optical axis position adjusting step S1 is carried out, the adjustment color synthesizing optical system posture adjusting step S16 is provided, so that white light is emitted from the autocollimator 200, and R, G, B is emitted by the prism 331A. Of the G-color light reflected by the dummy prism 385 by the auto-collimator 200 by transmitting only the G-color light which is separated into the colored light and enters the dummy prism 385 by the light blocking plate 339. The position adjustment of 385 can be performed.

(6) Further, since the reflection mirror posture adjusting step S17 is provided, the dummy prism 38
By switching the light blocking plate 339 so as to transmit the R or B color light entering the light source 5, and making the color light enter the dummy prism 385, the reflected light reflected from the dummy prism 385 is detected by the autocollimator 200. By adjusting each mirror 331R or 331B, the light beam emitted from the autocollimator 200 can be made to enter the light incident end surface of the dummy prism 385 at a right angle.
Therefore, the laser light output section 371 of the light source unit 37
The respective color lights emitted from A and separated by the prism 331A are incident at right angles on the respective light incident end faces of the dummy prism 385. (7) After the optical axis position adjusting step S1, the light quantity confirmation step S1
9, that is, the dummy prism installation jig 38 fixed to the mounting table 332 is removed and the laser optical axis jig 39 is installed, and the white light emitted from the laser light output unit 371A of the light source unit 37 is emitted. The laser light is separated into R, G, and B color lights by the prism 331A, and each color light that has passed through the pinhole 391A of the laser optical axis jig 39 is detected by the point sensor 391B. Can be accurately grasped, and by further adjusting the positions of the prism 331A and the mirrors 331R and 331B so that the detected light amount becomes the maximum, the prism 331A and the mirrors 331R and 331B can be detected.
The position adjustment of can be made reliable.

(8) When the color synthesizing optical system 150 is manufactured, the plane position adjusting step S5 is performed to detect the image on the upper surface of the cross dichroic prism 151, and the bulging portion formed on the fixing plate 153 is detected. By comparing the plane position of the substantially X-shaped reflecting surface having the selective reflection characteristic of the cross dichroic prism 151 with respect to the plane position of 153B with the reference position of the reflecting surface acquired in advance and calculating the deviation, The position of the cross dichroic prism 151 can be adjusted so that the cross dichroic prism 151 is arranged in a plane position, and when the cross dichroic prism 151 is largely deviated from the fixed plate 153 in advance, the position of the plane can be easily adjusted. (9) Further, by performing the tilt direction position adjusting step S6, the white laser light is guided to the R, G, and B by the light guide section 331.
Cross dichroic prism 15
1. The light flux incident on the light incident end surface of No. 1 and combined by the cross dichroic prism 151 is used as the position sensor 414.
While detecting with the prism position adjusting unit 32, the cross dichroic prism 15 with respect to the fixed plate 153 is detected.
The position of the cross dichroic prism 151 can be adjusted with respect to the fixed plate 153 with high precision and speed. Further, by using the laser light output unit 371A as a light source to emit white laser light with high directivity, the transmissive screen 41
Each color light of the white laser light displayed on the display device 1 is detected as a spot, and the spot positions of the color lights are mutually adjusted, whereby the tilting direction of the cross dichroic prism 151 can be adjusted with high accuracy.

[6] Modification of Embodiments The present invention is not limited to the above-described embodiments, and includes the following modifications. In the above embodiment, the light blocking plate 339 is provided close to the prism 331A.
However, each hole 384A of the gripping portion 384 for gripping the dummy prism 385 may be provided with a shielding plate that switches light entering and blocking to the light incident end surface of the dummy prism 385. It is only necessary that each color light separated by the prism 331A can be transmitted and blocked before the light incident end surface of the dummy prism 385. Further, in the above-described embodiment, the laser light output unit 371A of the light source unit 37.
When the optical path of the white laser light emitted from the optical axis is aligned with the reference optical axis, the autocollimator 200 and the white laser light are alternately used. However, using the laser autocollimator equipped with the white laser oscillator, the white laser light is emitted. The optical path may be aligned with the reference optical axis. Further, in the above-described embodiment, when the light amount confirmation procedure S19 is performed, each color light that has passed through the pinhole 391A of the laser optical axis jig 39 is detected by the point sensor 391B mounted inside. The point sensor may be mounted on the outside of the laser optical axis jig, and each color light that has passed through the pin hole of the laser optical axis jig is guided to the outside through the mirror installed inside, and the external point sensor It may be configured to detect by.

In the above embodiment, the position of the cross dichroic prism 151 is automatically adjusted by using the computer 51. However, the position is not limited to this, and the position may be manually adjusted. In the above embodiment,
When obtaining the reference optical axis, the prism 331A of the light guide 331 is used.
Also, although the mirror 331B is manually adjusted, the position is not limited to this, and the computer 51 may be used to automatically adjust the position of the light guide section 331. In the above-described embodiment, the end determination of the position adjustment of the cross dichroic prism 151 is determined in the state where the area of the light spot is the smallest, but the present invention is not limited to this. That is, the CCD camera 412 may be used instead of the position sensor 414, and the state in which the area of the light spot is minimized may be used as the reference for the adjustment end determination. In addition, the specific structure, shape, and the like when implementing the present invention may be other structures and the like as long as the object of the present invention can be achieved.

[0073]

According to the method of manufacturing the color synthesizing optical system of the present invention as described above, when the color synthesizing optical system is manufactured, the optical axis position adjusting step, the plane position adjusting step, and the tilt direction position adjusting step are performed. By carrying out the steps, before the manufacture of the color combining optical system, in the optical axis position adjusting step, the light flux emitted from the light source is aligned with the reference optical axis, and the light flux is perpendicular to the light incident end surface of the cross dichroic prism. Position of the cross dichroic prism that has been largely deviated in advance by the plane position adjustment process, and then by the tilt direction position adjustment process, the light is emitted from the light source. The separated light flux is separated into a plurality of color lights of R, G, B, etc. in the light guide section in the manufacturing section and is made incident on the light incident end surface of the cross dichroic prism. Since the position of the cross dichroic prism can be adjusted with respect to the fixed plate while detecting the light flux combined by the beam detector, the color combining optical system can be manufactured quickly and with high efficiency. The effect is that it can be performed with precision.

[Brief description of drawings]

FIG. 1 is a schematic diagram showing a structure of an optical component casing incorporating a color combining optical system to be manufactured according to an embodiment of the present invention.

FIG. 2 is a schematic perspective view showing a structure of an optical component casing according to the exemplary embodiment.

FIG. 3 is a schematic perspective view showing a structure for mounting a light modulator on the color combining optical system in the embodiment.

FIG. 4 is a side view showing a mounting structure of the color combining optical system in the embodiment.

FIG. 5 is a schematic perspective view showing a structure of an optical component casing in the embodiment.

FIG. 6 is a side view showing a structure of a manufacturing apparatus for manufacturing the color combining optical system in the embodiment.

FIG. 7 is a plan view showing the structure of a manufacturing apparatus for manufacturing the color combining optical system in the embodiment.

8A and 8B are a side view and a plan view showing the structure of the position adjusting unit in the embodiment.

FIG. 9 is a side view showing a structure of a position adjusting unit in the embodiment.

FIG. 10 is a plan view showing a structure of a manufacturing unit in the embodiment.

FIG. 11 is a side view showing a structure of a manufacturing unit in the embodiment.

FIG. 12 is a perspective view showing a structure of a dummy prism installation jig in the embodiment.

FIG. 13 is a perspective view showing a structure of a laser optical axis jig in the embodiment.

FIG. 14 is a side view showing a structure of a laser light output unit in the embodiment.

FIG. 15 is a schematic diagram showing the structure of the autocollimator in the embodiment.

FIG. 16 is a front view showing a screen unit for displaying a light spot by laser light in the embodiment.

FIG. 17 is a block diagram showing a control structure of a processing unit main body in the embodiment.

FIG. 18 is a flowchart showing a procedure of manufacturing operation in the embodiment.

FIG. 19 is a flow chart showing a procedure of optical axis position finding in the embodiment.

FIG. 20 is a view for explaining the procedure for positioning the optical axis in the above embodiment.

FIG. 21 is a diagram for explaining the procedure for aligning the optical axis in the embodiment.

FIG. 22 is a schematic diagram showing an image detected by the autocollimator in the embodiment.

FIG. 23 is a view for explaining the procedure for positioning the optical axis in the above embodiment.

FIG. 24 is a view for explaining the procedure for positioning the optical axis in the above embodiment.

FIG. 25 is a flow chart showing a procedure of prism plane position adjustment in the embodiment.

FIG. 26 is a flowchart showing a procedure for adjusting the position of the prism tilt direction in the embodiment.

FIG. 27 is a schematic diagram showing a light spot image by a laser beam and a criterion for determining adjustment completion of prism position adjustment in the embodiment.

[Explanation of symbols]

2 manufacturing equipment 39 Laser optical axis jig (optical axis confirmation jig) 150-color synthesis optical system 151 cross dichroic prism 152 Light incident end face 153 Fixed plate 200 Auto Collimator 331 Light guide 331A prism (color separation optical element) 331R, 331B Mirror (reflection mirror) 337C Total reflection mirror (mirror) 339 light shield 371A Laser light output unit (light source) 385 Dummy prism (adjustable color combining optical system) 391A Pinhole (hole) 391B point sensor 412 CCD camera (light flux detector) 414 Position sensor (light flux detector) S1 optical axis position adjustment process S11 Light source optical axis adjustment procedure S12 Color separation optical element position adjustment step S14 Mirror posture adjustment procedure S15 Auto collimator position adjustment procedure S16 Adjusting color composition optical system attitude adjustment step S17 Reflection mirror attitude adjustment step S18 jig installation procedure S19 Light intensity check procedure S5 Plane position adjustment process S6 tilt direction position adjustment process

─────────────────────────────────────────────────── ─── Continued Front Page (51) Int.Cl. ⁷ Identification Code FI Theme Coat (Reference) G03B 33/12 G03B 33/12

Claims (7)

[Claims] 1. A color combination comprising a prism having a plurality of light incident end faces corresponding to a plurality of color lights and a light emission end face for combining and emitting the respective color lights, and a fixing plate to which the prism is fixed. A method of manufacturing a color combining optical system for positioning the prism with respect to the fixed plate to manufacture an optical system, comprising: a light source that emits white light; And a light guide section that introduces each separated color light into the light incident end surface of the prism, and a light beam detection section that detects a light beam emitted from the light output end surface of the prism. An optical axis position adjusting step of adjusting the position of the light source, the light guide section, and the light flux detecting section on a predetermined reference optical axis set in the manufacturing apparatus; Place it in a predetermined plane position And a plane position adjusting step of adjusting the position of the prism, white light is emitted on the reference optical axis, is incident on the light incident end face of the prism, and the light flux combined by the prism is detected by the light flux detection unit. However, a tilt direction position adjusting step of adjusting the tilt direction position of the prism with respect to the fixed plate is provided, and the optical axis position adjusting step is a light source light for adjusting white light from the light source on the reference optical axis. Based on the axis adjustment procedure and the adjustment state of white light by the light source optical axis adjustment procedure, the autocollimator position adjustment procedure for adjusting the autocollimator to a predetermined position according to the reference optical axis, and the position-adjusted autocollimator And a light guide portion position adjusting procedure for adjusting the position of the light guide portion using the method. 2. The method of manufacturing a color synthesizing optical system according to claim 1, wherein the light guide section includes a plurality of polarization separation films for separating white light emitted from the light source into two kinds of color light. A separation optical element and a reflection mirror that bends a part of the plurality of color lights separated by the color separation optical element and guides the light to the light incident end surface of the prism, and the light guide section position adjustment procedure includes the color separation. Among the color lights separated by the optical element, a color separation optical element position adjusting step for adjusting the position of the color separation optical element on the reference optical axis based on the color light not passing through the reflection mirror, and the adjusted color separation optical element. An adjustment color composition optical system attitude adjustment step for adjusting the attitude of the adjustment color composition optical system, which is a reference for adjustment, by introducing a light flux to the element using the autocollimator, and the attitude adjustment-adjusted color composition Based on optics Method of manufacturing a color synthesizing optical system, characterized in that a reflecting mirror posture adjustment step of adjusting an attitude of the reflecting mirror using the autocollimator. 3. The method for manufacturing a color synthesizing optical system according to claim 2, wherein the color separation optical element position adjusting step and the reflection mirror attitude adjusting step block a color light other than a color light corresponding to an adjustment target. A method for manufacturing a color synthesizing optical system, which is carried out while being shielded from light. 4. The method of manufacturing a color synthesizing optical system according to claim 1, wherein a mirror is arranged on the optical axis of the white light adjusted by the light source optical axis adjusting procedure, A mirror attitude adjusting procedure for adjusting the attitude of the mirror so as to be orthogonal to the optical axis is provided, and the autocollimator position adjusting procedure is performed by using the reflected light of the mirror adjusted by the mirror attitude adjusting procedure. A method for manufacturing a color synthesizing optical system characterized by the above. 5. The method for manufacturing a color combining optical system according to claim 1, wherein after the optical axis position adjusting step, a plurality of color lights separated by the color separating optical element are In order to confirm that the light is incident on the light incident end surface of the prism at a right angle, a jig is provided to attach an optical axis confirmation jig that has a hole on the end surface corresponding to the light incident end surface of the prism and each hole has a point sensor. A method of manufacturing a color synthesizing optical system, comprising: a tool setting procedure; and a light quantity confirmation procedure for re-positioning the light guide unit so that the detected light quantity detected by the point sensor is maximized. . 6. A color combining optical system manufactured by the method for manufacturing a color combining optical system according to claim 1. 7. A projector comprising the color synthesizing optical system according to claim 6.