JP2011105533A - Lid for quartz glass crucible, quartz glass crucible, and method for handling the crucible - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for handling a quartz glass crucible by which the quartz glass crucible is handled in a contamination-free state by surely avoiding the intrusion of foreign matter into the crucible until the time when the crucible is actually used, the quartz glass crucible is handled in such a state that the inner surface of the crucible is not contaminated, in a process for filling polycrystalline silicon or a dopant, and further, a method for filling a dopant or the like into the quartz glass crucible is easily performed. <P>SOLUTION: A lid 3 is used for closing a bottomed cylindrical quartz glass crucible 1 which is constituted of a bowl-shaped bottom part 101 and a peripheral wall part 102 that is extended from the bottom part 101 and opened on the side separated from the bottom part 101. The lid 3 for the quartz glass crucible 1 is freely attached to or detached from the edge part 2 on the opening side of the peripheral wall part 102 of the quartz glass crucible 1. Further, the lid 3 has an openable and closable insertion part 7 for inserting a dopant into the crucible 1. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention relates to a quartz glass crucible, particularly a quartz glass crucible used in a pulling process for producing single crystal silicon, and in particular, during the storage and transportation of the produced quartz glass crucible, filling of polycrystalline silicon, dopants such as boron and phosphorus. A structure for avoiding the entry of foreign matter into the inner surface of the crucible during filling of the crucible is provided. In addition, in the process of filling the quartz glass crucible with a dopant or the like, a structure that facilitates the filling work is provided.

In manufacturing single crystal silicon, the quartz glass crucible used for melting polycrystalline silicon, which is the raw material, is inspected after cleaning and manufactured, and the acceptable products are packaged and shipped. Is common.
By the way, with the increase in purity of semiconductor materials, it is important to suppress various contaminations during the production of single crystal silicon. This is because if the inside of the quartz glass crucible is contaminated with dust or the like, dislocations that are linear crystal defects due to contamination of the obtained single crystal silicon occur, and a single crystal cannot be obtained. Therefore, in order to minimize the contamination inside the quartz glass crucible and pull up the single crystal using the quartz glass crucible in a clean environment, the inside of the crucible should be filled with ultrapure water before use. Close attention is paid to contamination, such as cleaning with Therefore, first, it is important to prevent contamination by dust or the like even during the period from shipment to use of the manufactured crucible. The term “clean environment” as used herein refers to a condition of Class 10000 (less than 10,000 particles of 0.5 micron existing in 0.0283 m ³⁾ as defined by the Federal Standard 209E in the United States. It refers to a very clean environment.

  The dust that causes contamination includes dust floating in the atmosphere, quartz powder that is a raw material powder that adheres to the outer surface of the crucible when a quartz glass crucible is manufactured by the rotary mold method, and the like. The rotational mold method is a general method for producing a quartz glass crucible. In this production method, the quartz powder deposited on the inner surface of the rotational mold is heated from the mold space side to be vitrified. During the heating and melting, the air in the quartz powder deposition layer is sucked from the mold side to reduce the pressure, and vacuuming is performed to remove the bubbles in the glass layer, thereby substantially reducing the bubbles. The inner wall part which consists of the knowledge which does not contain or a glass layer is formed. At this time, quartz powder that has not been heated and melted remains on the mold side of the crucible, that is, on the outer surface side, and this quartz powder enters the inner surface of the crucible, causing contamination.

  In recent years, the size of a silica glass crucible has been gradually increased in order to increase the production efficiency of single crystal silicon. For example, a large crucible having a diameter of 50 cm or more has a considerable weight (about 50 cm in diameter). 85 kg), it is not easy for one worker to handle, and for example, there is a problem that it is easily contaminated during operations such as inspection after crucible manufacture and bagging. Further, when the number of workers is increased, labor and cost are required, which causes a problem from the viewpoint of productivity.

  In order to solve such a problem, the quartz glass crucible is mechanically wrapped in a clean state after cleaning the quartz glass crucible, and the cleaned quartz glass crucible is automatically wrapped in the clean state. An apparatus is proposed in US Pat.

JP 2000-219207 A

  By lapping using the apparatus described in Patent Document 1, it has become possible to store the cleaned quartz glass crucible in a clean state, and in particular, avoid contamination during shipping or transportation. However, since an expensive apparatus is required and lapping cannot be reused, the cost required to prevent contamination in the crucible has been enormous. Further, in the process after removing the wrapping, that is, the process of filling the crucible with single crystal silicon and the process of filling the dopant, etc., foreign matter such as dust is mixed in the crucible and the inside of the crucible is contaminated. It is easy. Therefore, there is a demand for providing a way to avoid contamination in the quartz glass crucible at a low cost.

  Therefore, the present invention is inexpensive and reliably prevents foreign matter from entering the quartz glass crucible until the actual use time of the crucible and at the time of actual use, and enables handling of the crucible without contamination. The purpose is to.

The gist configuration of the present invention is as follows.
(1) A lid for sealing a bottomed cylindrical quartz glass crucible comprising a bowl-shaped bottom part and a peripheral wall part extending from the bottom part and opening to the side away from the bottom part,
The lid of the quartz glass crucible is detachably attached to the opening side edge of the peripheral wall of the quartz glass crucible, and includes an openable / closable insertion portion for inserting the dopant into the crucible. Features a lid for quartz glass crucible.

(2) The lid according to (1), wherein the insertion portion is a hole that allows the inside and outside of the lid to communicate with each other, and a detachable seal adhered to the hole. Lid.

(3) The lid for a silica glass crucible according to the above (1) or (2), which has an identifier.

(4) The lid for a quartz glass crucible, wherein at least a part of the lid is transparent in the lid according to (1), (2) or (3).

(5) The lid for a silica glass crucible according to any one of (1) to (4), wherein at least a part of the insertion portion is transparent.

(6) When manufacturing single crystal silicon, a waiting period from when polycrystalline silicon is charged into a quartz glass crucible until melting of the polycrystalline silicon is any one of (1) to (5). A method for handling a quartz glass crucible, wherein the lid described above is attached to an edge portion on the opening side of the peripheral wall portion of the quartz glass crucible.

(7) In the method for handling a silica glass crucible according to (6), after the waiting period, before the polycrystalline silicon is melted, the insertion portion is opened, and a dopant is filled through the insertion portion. The method for handling a quartz glass crucible further comprising a step of closing the insertion portion. The “dopant” here is an impurity doped in a semiconductor, and an N-type semiconductor or a P-type semiconductor can be formed by implanting such dopant into polycrystalline silicon.

  According to the present invention, since the intrusion of the quartz powder adhering to the outer surface of the quartz glass crucible obtained by the rotational molding method into the inner surface of the crucible, and hence the entry of foreign matter into the quartz glass crucible, is reliably avoided, The quartz glass crucible can be handled in a state where the inner surface is not contaminated during the period from the shipment to the polycrystalline silicon melting step. In addition, the quartz glass crucible can be handled in a state where the inner surface is not contaminated in the step of filling polycrystalline silicon, dopant, or the like. Furthermore, the filling operation can be facilitated in the step of filling the dopant and the like.

(A) And (b) is radial sectional drawing which shows the lid | cover and crucible according to this invention, (c) is a perspective view of the lid | cover shown to (a) and (b), (d) is It is a perspective view which shows the state which peeled off the seal | sticker of the lid | cover shown to (c). FIG. 6 is a perspective view showing another lid according to the present invention. FIG. 6 is a perspective view showing another lid according to the present invention. FIG. 6 is a perspective view showing another lid according to the present invention. (A) And (b) is radial direction sectional drawing of another lid | cover and crucible according to this invention, (c) is a perspective view of the lid | cover shown to (a) and (b). (A) And (b) is radial direction sectional drawing of another lid | cover and crucible according to this invention, (c) is a perspective view of the lid | cover shown to (a) and (b). It is the figure which attached the crucible which attached the lid | cover to the pulling apparatus of a single crystal. It is a flowchart which shows the handling of a crucible. It is process drawing which shows the handling of a crucible. It is process drawing which shows the handling of a crucible. (A) is a radial direction sectional view of a lid and a crucible for comparison, and (b) is a perspective view of the lid shown in (a).

Hereinafter, a quartz glass crucible equipped with a lid of the present invention will be described in detail with reference to the drawings. FIG. 1A shows a radial cross section of the crucible before mounting the lid of the present invention, and FIG. 1B shows a radial cross section of the crucible after mounting the lid. Here, the “radial section of the crucible” refers to a section cut in the radial direction at an arbitrary position passing through the central shaft plug of the crucible.
In the figure, reference numeral 1 denotes a crucible 1 made of quartz glass (hereinafter simply referred to as a crucible), reference numeral 101 denotes a bowl-shaped bottom portion 101 of the crucible 1, and reference numeral 102 extends from the bottom portion 101. The peripheral wall part 102 opened to the side away from the bottom part 101 is shown. Further, the lid 3 is attached to the edge 2 on the opening side of the peripheral wall portion 102 of the crucible 1. The lid 3 has a disk shape similar to the edge 2 on the opening side of the peripheral wall 102, and has a flange portion 4 that is in close contact with the outer peripheral end 2 a of the edge 2 on the opening side of the peripheral wall 102 of the crucible 1. That is, as shown in FIG. 1B, the lid 3 is attached to the edge 2 on the opening side of the peripheral wall portion 102 of the crucible 1 when the flange portion 4 is in close contact with the outer peripheral end 2a. Here, it is preferable that the diameter of the flange portion 4 is equal to or slightly smaller than the outer diameter of the crucible 1 in order to close the edge portion 2 on the opening side of the peripheral wall portion 102 without gaps. Furthermore, the lid 3 is made of a flexible material such as ABS resin, urethane resin, polyethylene, polypropylene, vinyl chloride, acrylic resin, fluorine resin, polycarbonate, etc., so that the lid 3 is bent outward in the radial direction at the time of wearing. Therefore, it is preferable that the flange portion 4 can be pressed against the outer peripheral end 2a by using the restoring force in order to securely attach and detach the lid 3.

  When the lid 3 having such a configuration is attached to the edge 2 on the opening side of the peripheral wall portion 102 of the crucible 1, the lid 3 comes into close contact with the outer peripheral end 2 a and the peripheral end surface 2 b of the edge 2 on the opening side of the peripheral wall portion 102. The edge 2 on the opening side of the peripheral wall portion 102 is surely closed and quartz powder, dust, etc. adhering to the outer surface of the crucible 1 can be prevented, for example, from being guided by wrapping. Therefore, it is possible to reliably avoid the entry of foreign matter into the crucible.

The lid 3 is provided with a hole 5 that communicates the inside and outside of the lid 3, and a seal-like opening / closing portion 6 for opening and closing the hole 5 is attached to the hole 5. The insertion part S is constituted by the shaped opening / closing part 6. The seal 6 shown in FIG. 1 is detachable. By peeling the handle portion 6a shown in FIG. 1C from the starting point, the hole 5 is exposed as shown in FIG. The inside and outside will communicate. By connecting the hole 5 to the inside and outside, the dopant or the like can be filled into the crucible 1 through the hole 5 without removing the lid 3. Since it is not necessary to remove the lid 3, the risk of contamination of the crucible 1 can be effectively reduced. Thereafter, since the opening / closing part 6 has a removable seal shape, the crucible 1 is sealed by sticking again on the hole 5 and closing the hole 5, thereby preventing contamination in the crucible 1. It becomes possible.
On the other hand, for example, when the above-described insertion portion 7 is not provided in the lid 3, it is necessary to attach and detach the lid 3 every time the dopant is filled in the crucible 1 after filling with polycrystalline silicon. Such attachment / detachment work can be performed only by a plurality of persons, so that productivity is lowered. However, as described above, by providing the insertion portion 7 including the hole 5 and the opening / closing portion 6 in the lid 3, it is possible to easily fill the crucible with the dopant and the like without removing the lid 3. In addition, the work of opening and closing the opening / closing part 6 and filling the dopant and the like through the holes 5 can be carried out sufficiently by one person, so there is no concern about a decrease in productivity.

  2-4 are other lids 3A, 3B, 3C according to the present invention. As shown in FIG. 2, the lid 3 </ b> A has a circular slide-type opening / closing part 6 </ b> A attached to the hole 5, or as shown in FIG. 3, the lid 3 </ b> B has a section-shaped slide type on the hole 5. It is also possible to adopt a configuration in which an opening / closing portion 6B is attached, or a configuration in which a rectangular circular folding opening / closing portion 6C is attached to the lid 3C on the hole 5 as shown in FIG.

  Moreover, as shown in FIG. 5, it is also possible to make the above-described flange portion 4 bend in two steps toward the crucible side to have a step shape extending radially outward. The bent portion is composed of a first bent portion 4a on the radially inner side and a second bent portion 4b on the radially outer side with respect to the first bent portion 4a. As shown in FIG. 5B, when the lid 3 </ b> D having such a configuration is attached to the edge 2 on the opening side of the peripheral wall 102 of the crucible 1, the lid 3 </ b> D is attached to the edge 2 on the opening side of the peripheral wall 102. While being in close contact with the outer peripheral end 2a and the peripheral end surface 2b, the edge portion 2 on the opening side of the peripheral wall portion 102 is reliably closed, and the area where the lid 3D contacts the crucible 1 is reduced. By doing so, even if the lid 3D is moved relative to the crucible 1 by vibration during transportation or the like, the crucible 1 and / or the lid 3D are abraded due to friction between the lid 3D and the lid 3D is generated. Since the area where the crucible 1 and the crucible 1 are in contact with each other is small, the amount of generated abrasion powder is reduced in proportion to the area, and the entry of foreign matter into the crucible 1 can be more effectively avoided. .

  Further, as shown in FIG. 5, the lid 3D has a shape protruding outward, so that a large space 3a in the crucible can be secured, and polycrystalline silicon is piled up during the production of single crystal silicon described later. This is advantageous when charging. Since the lid 3D has a transparent and lens shape on the upper surface 8 of the lid 3D, even if polysilicon or a dopant is inserted into the crucible 1 and the lid 3D is attached to the crucible 1, This is extremely effective in knowing the details of the state in the crucible 1 at the time of manufacture. At this time, from the viewpoint of not impairing the function of the upper surface 8 of the lid 3D as a lens, the hole 5 and the opening / closing portion 6 for filling the dopant are preferably provided on the side surface of the lid 3 as shown in FIG.

  Alternatively, as shown in FIG. 6, the lid 3E may have a cup shape protruding outward, and a bead 9 may be provided on the inner surface for the purpose of strengthening the lid 3E. The bead 9 is provided by bead processing (also called stringing processing). Of course, it should be noted that other processing may be performed for the purpose of reinforcing the lid.

In addition, it is preferable to assign an identifier such as a barcode or QR code to the lid 3 described above. Even if the bar code is dug into the quartz glass crucible and can be identified, the polycrystalline silicon 10 in the crucible 1 is mounted after the crucible 1 to which the lid 3 is attached is mounted on the single crystal pulling apparatus M as shown in FIG. Since the crucible 1 is heated by a heater for heating and melting, there is a problem that the crucible 1 cannot be identified from the outside by the lot. Therefore, it is assumed that the quartz glass crucible is heated by a heater if the above configuration is adopted, a barcode is given to the lid 3, and the lid 3 is attached to the crucible 1 and attached to the pulling device M. In addition, the crucible 1 can be identified. By the way, if a bar code sticker is pasted on a conventional wrapping sheet, it can be moved alone, but for example, because polycrystalline silicon is put in the crucible, once the wrapping sheet is peeled off, there is a disadvantage that it cannot be reused. . Furthermore, since the wrapping sheet dissolves when the crucible 1 is heated using the heater of the pulling device M, it cannot be used for identifying the crucible 1 after heating.
In addition, it is very effective in manufacturing to attach an identifier capable of incorporating electronic data such as an IC tag, which is rapidly spreading recently, to the lid 3. This is because it is possible to write electronic data into an IC tag simply by attaching an identifier that can contain electronic data such as an IC tag to the lid 3 and sending an electric signal from the outside. Based on such electronic data, This is because the material to be charged can be easily identified. Thereby, management of the crucible 1 becomes easy, and handling of the desired crucible 1 becomes easy. In addition, an identifier that can incorporate electronic data such as an IC tag can be reused many times, which is preferable from the viewpoint of manufacturing cost reduction.

  In addition, when removing the lid 3 attached to the edge 2 on the opening side of the peripheral wall portion 102 of the crucible 1 and using the crucible 1 for use, for example, the lid attached when the crucible 1 is filled with polycrystalline silicon (Si) When removing 3, it is preferable that the crucible 1 is inverted once and the edge on the opening side of the peripheral wall portion is vertically downward, and then the lid 3 is removed. Thus, by making the edge on the opening side of the peripheral wall portion of the crucible 1 when the lid 3 is removed downward, intrusion of foreign matter such as quartz powder or dust attached to the surface of the lid 3 can be avoided. .

The lid for the quartz glass crucible can be used repeatedly by washing. Since current sheets are difficult to clean, they are usually disposable. And since a lid | cover is washable, the cleanliness can be raised and provided. Here, as the cleanliness of the lid, it is preferable that the adhesion amount of the metal component on at least the inner surface of the lid is 0.05 ng / cm ² or less in order to increase the cleanliness of the inner surface of the crucible.
The cleanliness of the lid can be measured by applying a hydrogen chloride (HCL) aqueous solution to the surface to be measured such as the inner surface of the lid, collecting the coating solution, and inductively coupled plasma mass spectrometry (ICP-MS). . Here, the metal elements to be measured are Na, K, Li, Al, Ca, Co, Cr, Cu, Fe, Mg, Mn, Ni, Ti, Zn, Zr, Ba, and P.

  Next, general steps up to the start of melting of polycrystalline silicon will be described with reference to the flowchart of FIG. First, for example, raw materials necessary for manufacturing single crystal silicon such as packaged polycrystalline silicon and dopant, and a quartz glass crucible and a carbon crucible for melting the raw materials are prepared. Subsequently, the property regarding the contamination etc. of the crucible inner surface which removes the wrapping which has wrapped the outer surface of the quartz glass crucible is inspected. When a problem such as contamination is not detected and the inspection passes, the quartz glass crucible is set in the carbon crucible. Then, the above-described raw material such as single crystal silicon is opened and inspected for its properties. When the inspection is passed, single crystal silicon is filled in the quartz glass crucible. Next, it is possible to immediately fill the dopant or the like, but if necessary, it is possible to wait for a time before filling the dopant or the like. The quartz glass crucible and the carbon crucible can be immediately incorporated into the pulling device for melting after filling with the dopant, etc., but if necessary, the silica glass crucible and the carbon crucible may be temporarily put on standby before being incorporated into the pulling device. Is possible. The case where the lid 3 according to the present invention is used will be described below based on the basic steps shown in the above-described flowchart.

By using the lid 3E according to the present invention, the following crucible can be handled. That is, as shown in FIG. 8, when manufacturing single crystal silicon, first, as shown in FIG. 9A, the crucible 1 shipped with the lid 3E attached is shown in FIG. 9B. After removing the lid 3E as shown in FIG. 9C, the polycrystalline silicon 10 is inserted into the crucible 1 as shown in FIG. 9C, and immediately, as shown in FIG. 9D, the peripheral wall portion 102 of the crucible 1 is inserted. A lid 3E is attached to the edge 2 on the opening side. Thereafter, the inside of the crucible 1 is shut off from the outside by the attachment of the lid 3E and stored in the state shown in FIG. 9 (e), so that a waiting period until the polycrystalline silicon 10 is melted is set in the crucible 1. The raw material silicon can be kept in a state not contaminated.
Thereafter, as shown in FIG. 10, when filling the dopant, first, as shown in FIG. 10 (a), the seal-like opening / closing part 6 stuck on the hole 5 of the lid 3E is peeled off to open the hole. 5 is exposed, and as shown in FIG. 10B, the dopant is filled through the exposed holes 5. And as shown in FIG.10 (c), in order to ensure sealing performance and prevent contamination, the opening-and-closing part 6 is stuck on the hole 5. FIG. By storing the crucible 1 in the state shown in FIG. 10C where the inside of the crucible 1 is cut off from the outside, a waiting period until the polycrystalline silicon 10 is melted is a state in which the raw silicon and the dopant in the crucible 1 are not contaminated. Can be held in. The filled dopant can be silicon nitride, carbon, etc., depending on the properties desired for the single crystal silicon.

  Here, at least a part of the lid 3 is made transparent or semi-transparent so that it can be visually recognized that the raw material silicon has been charged into the crucible 1 with the quartz glass crucible lid 3 attached. It is preferable that Of course, the entire lid 3 can be made of a transparent material. Thus, if the inside of the crucible 1 is easy to visually recognize, it is convenient to distinguish between a crucible charged with a silicon raw material and an empty crucible. Alternatively, it is preferable that at least a part of the opening / closing part 6 is made transparent or semi-transparent so as to form an observation window through the hole 5. Of course, the entire opening / closing part 6 can also be made of a transparent material. Thus, if the inside of the crucible 1 is easy to visually recognize, it is convenient to distinguish between a crucible charged with a silicon raw material and an empty crucible. As a material for making the lid 3 and / or the opening / closing part 6 transparent or translucent, polyethylene (PE), polypropylene (PP), or the like is suitable.

  The above description shows only a part of the embodiment of the present invention, and these configurations can be combined alternately or various changes can be made without departing from the gist of the present invention.

(Experiment 1)
Next, when the lid having the insertion portion shown in FIG. 6 is mounted on the edge of the peripheral wall of the crucible on the opening side, the number of quartz powders mixed into the inner surface of the crucible and the single crystal before filling with the single crystal silicon The number of successful conversions was investigated. Further, as a comparison, Table 1 shows the results of the same investigation for the case where the crucible is covered with a wrapping sheet and for the case where the edge on the opening side of the peripheral wall of the crucible is opened as it is. .

  Here, the number of quartz powder mixed in the inner surface of the crucible was transferred to the pulling process of single crystal silicon production, and the quartz powder that had adhered to the inner surface of the crucible by removing the lid before filling with polycrystalline silicon. And the number of quartz pieces. The unit of the number is “pieces”. The number of successful single crystallizations is the number of high-quality single crystals obtained by one pulling.

（※）測定条件：単結晶シリコン製造の引上げ工程への搬送後確認

(*) Measurement conditions: Confirmation after transfer to the pulling process of single crystal silicon production

(Experiment 2)
Next, when the lid having the insertion portion shown in FIG. 6 is attached to the edge on the opening side of the peripheral wall portion of the crucible, single crystal silicon is filled, and the target resistivity of the TOP portion of the crystal region to be the product is The number of quartz powders mixed in the inner surface of the crucible and the crystal yield after the boron having an amount of 10 Ωcm was filled as a dopant were investigated. Further, as a comparison, the same investigation was performed for the case where a lid having no insertion portion as shown in FIG. 11 was adopted and the case where the peripheral edge of the peripheral wall of the crucible was opened as it was. The survey results are shown in Table 2.

（※）測定条件：原料溶解後に表面に浮遊した石英粉を確認（10バッチ分を集計）

(*) Measurement conditions: Confirmation of quartz powder floating on the surface after melting the raw materials (total for 10 batches)

DESCRIPTION OF SYMBOLS 1 Crucible 101 Bottom part 102 Peripheral wall part 2 Opening edge part 2a of peripheral wall part Outer peripheral edge 2b of opening part of peripheral wall part Peripheral end surface 3, 3A, 3B, 3C, 3D of opening edge part of peripheral wall part 3E (for quartz glass crucible) Lid 4 Flange part 5 Holes 6, 6A, 6B, 6C Opening / closing part 7, 7A, 7B, 7C Insertion part 8 Upper surface of the lid 9 Bead 10 Polycrystalline silicon

Claims (7)

A lid for sealing a bottomed cylindrical quartz glass crucible consisting of a bowl-shaped bottom part and a peripheral wall part extending from the bottom part and opened to the side away from the bottom part,
The lid of the quartz glass crucible is detachably attached to the opening side edge of the peripheral wall of the quartz glass crucible, and includes an openable / closable insertion portion for inserting the dopant into the crucible. Features a lid for quartz glass crucible.   2. The lid for a quartz glass crucible according to claim 1, wherein the insertion portion is a hole for communicating the inside and outside of the lid, and a detachable seal stuck on the hole.   The lid for a silica glass crucible according to claim 1 or 2, further comprising an identifier.   The lid for a silica glass crucible according to any one of claims 1 to 3, wherein at least a part of the lid is transparent.   The lid for a silica glass crucible according to any one of claims 1 to 4, wherein at least a part of the insertion portion is transparent.   When producing single crystal silicon, the waiting period until the polycrystalline silicon is melted after charging the polycrystalline silicon into the quartz glass crucible is the lid according to any one of claims 1 to 5. A method for handling a quartz glass crucible, which is mounted on an opening edge of the peripheral wall of the quartz glass crucible.   The method for handling a quartz glass crucible according to claim 6, wherein after the waiting period, before melting the polycrystalline silicon, the insertion part is opened, and a dopant is filled through the insertion part. A method for handling a quartz glass crucible, further comprising a step of closing the insertion portion.

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