JP2011089826A - Internal surface defect inspection apparatus of screw hole or hole - Google Patents

Internal surface defect inspection apparatus of screw hole or hole Download PDF

Info

Publication number
JP2011089826A
JP2011089826A JP2009242307A JP2009242307A JP2011089826A JP 2011089826 A JP2011089826 A JP 2011089826A JP 2009242307 A JP2009242307 A JP 2009242307A JP 2009242307 A JP2009242307 A JP 2009242307A JP 2011089826 A JP2011089826 A JP 2011089826A
Authority
JP
Japan
Prior art keywords
image
screw hole
hole
internal surface
camera
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2009242307A
Other languages
Japanese (ja)
Other versions
JP5568947B2 (en
Inventor
Ei Kosakai
映 小坂井
Masataka Toda
昌孝 戸田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aisin Corp
Original Assignee
Aisin Seiki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aisin Seiki Co Ltd filed Critical Aisin Seiki Co Ltd
Priority to JP2009242307A priority Critical patent/JP5568947B2/en
Publication of JP2011089826A publication Critical patent/JP2011089826A/en
Application granted granted Critical
Publication of JP5568947B2 publication Critical patent/JP5568947B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide an inspection apparatus for precisely inspecting internal surface defects of holes without inserting an inspection head into screw holes or holes. <P>SOLUTION: When an internal surface of the screw hole 32 is imaged by a camera 16, a wide-angle lens 12 having a wide visual field angle as an objective lens is disposed away from the opening of the screw hole by a prescribed distance. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

ねじ穴または穴の内部の表面欠陥を検査する検査装置に関する。   The present invention relates to an inspection apparatus for inspecting a surface defect inside a screw hole or a hole.

切削加工によって鋳物にねじ穴や穴を形成する際に、鋳巣がねじ穴や穴の内部表面に出現したり、切削加工の切粉がねじ穴や穴に異物として残留し、ねじ穴や穴の内部表面欠陥となることがある。   When forming a screw hole or hole in a casting by cutting, a cast hole appears on the inner surface of the screw hole or hole, or cutting chips remain in the screw hole or hole as a foreign object. May cause internal surface defects.

このような内部表面欠陥を、人による目視検査ではなく画像処理技術を用いて自動で行うものがある(例えば、特許文献1参照。)。   There is one that automatically performs such an internal surface defect using an image processing technique instead of a visual inspection by a person (for example, see Patent Document 1).

特開2009−014347号公報JP 2009-014347 A

しかしながら、ねじ穴内に検査ヘッドであるプローブを挿入するため、鋳巣以外に残留切粉が存在する場合には、プローブと残留切粉が接触してプローブの位置ずれが発生し、ねじ穴の内部表面欠陥を安定して検出できないという問題がある。   However, since the probe that is the inspection head is inserted into the screw hole, if there is residual chips other than the cast hole, the probe and the residual chips come into contact with each other, resulting in displacement of the probe and the inside of the screw hole. There is a problem that surface defects cannot be detected stably.

本発明は、上記問題点に鑑みてなされたものであり、ねじ穴または穴の内部に検査ヘッドを挿入することなく穴の内部表面欠陥を精度よく検査できる内部表面欠陥検査装置を提供することを目的とする。   The present invention has been made in view of the above problems, and provides an internal surface defect inspection apparatus capable of accurately inspecting internal surface defects of a hole without inserting an inspection head into the screw hole or the inside of the hole. Objective.

本発明の第1の課題解決手段は、被撮像対象側から順に対物レンズとしての広角レンズ、リレーレンズ、ハーフミラー、接眼レンズ、被撮像物を撮像するカメラおよび前記ハーフミラーを介して被撮像対象に光を照射する光源を有する検査ヘッドと、前記光源に電力を供給する照明用電源と、前記カメラに接続され前記カメラが撮像した画像を処理する画像処理装置と、前記照明用電源と前記画像処理装置とを制御する制御装置とを備えたねじ穴または穴の内部表面欠陥検査装置において、ねじ穴または穴の内部が前記カメラによって撮像されるときに前記広角レンズがねじ穴または穴の開口部から所定距離離れていることを特徴とする内部表面欠陥検査装置としたことである。   The first problem-solving means of the present invention includes a wide-angle lens as an objective lens, a relay lens, a half mirror, an eyepiece lens, a camera for imaging an object to be imaged, and an object to be imaged via the half mirror. An inspection head having a light source that irradiates light, an illumination power source that supplies power to the light source, an image processing device that is connected to the camera and processes an image captured by the camera, the illumination power source, and the image In a screw hole or hole internal surface defect inspection apparatus having a control device for controlling a processing device, the wide-angle lens is screw hole or hole opening when the inside of the screw hole or hole is imaged by the camera. The internal surface defect inspection apparatus is characterized by being separated by a predetermined distance.

また、第2の課題解決手段は、前記カメラが、画像の画素が正方格子配列となるようにねじ穴または穴の内部表面を撮像し、前記画像処理装置が、前記カメラから送られた直交座標系の画像情報を極座標系の画像情報に変換して原画像情報として記録し、前記極座標系の画像情報を再度直交座標系の画像情報に変換してねじ穴または穴の内部表面画像を展開画像になるように処理し、ねじ穴または穴の内部表面画像の直交座標系の画像情報をもとに深さ方向の遠近差を遠近補正し、前記広角レンズの中心ずれによって生じる画像の波状ゆがみを補正することである。   The second problem-solving means is characterized in that the camera images a screw hole or an inner surface of the hole so that the pixels of the image are in a square lattice arrangement, and the image processing device transmits orthogonal coordinates sent from the camera. System image information is converted into polar coordinate system image information and recorded as original image information, and the polar coordinate system image information is converted again into orthogonal coordinate system image information to develop a screw hole or a hole internal surface image. The depth difference in the depth direction is corrected based on the image information in the orthogonal coordinate system of the screw hole or the internal surface image of the hole, and the wavy distortion of the image caused by the center shift of the wide-angle lens is corrected. It is to correct.

また、第3の課題解決手段は、前記広角レンズの視野角が100度以上であることである。   A third problem solving means is that the viewing angle of the wide-angle lens is 100 degrees or more.

さらに、第4の課題解決手段は、前記検査ヘッドがロボットのアームに固定され、前記制御装置に制御されるロボットコントローラが前記ロボットの動きを制御することである。   Furthermore, a fourth problem solving means is that the inspection head is fixed to an arm of a robot, and a robot controller controlled by the control device controls the movement of the robot.

本発明では、視野角が大きい広角レンズを対物レンズとしているため、ねじ穴または穴の開口部から所定距離離れてねじ穴または穴の内部をカメラによって撮像でき、検査ヘッドがねじ穴または穴の内部に挿入されることがないので、検査ヘッドと残留切粉が接触して検査ヘッドの位置ずれが発生せず、ねじ穴や穴のを安定して検出できる。   In the present invention, since a wide-angle lens having a large viewing angle is used as an objective lens, the inside of the screw hole or hole can be imaged by a camera at a predetermined distance from the opening of the screw hole or hole, and the inspection head is inside the screw hole or hole. Therefore, the inspection head and the residual chips come into contact with each other, so that the inspection head is not displaced, and screw holes and holes can be detected stably.

また、画像処理装置が、カメラから送られた直交座標系の画像情報を極座標系の画像情報に変換して原画像情報とし検査領域の抽出を行った後、再度直交座標系の画像情報に変換してねじ穴または穴の内部表面画像を展開画像になるように処理するため、検査ヘッドをねじ穴または穴の内部に挿入することなく内部表面画像を撮像、画像処理が可能となる。また、ねじ穴または穴の内部表面画像の深さ方向の遠近差、すなわち、ねじ穴または穴の開口部の諸寸法に比べて同一寸法でも底部に近づくほど小さく見えるという遠近差を補正するため、内部表面欠陥の大きさも正確に検出できる。さらに、広角レンズの中心ずれによって生じる画像の波状ゆがみ、すなわち斜め直線の集合であるはずの切削痕やねじの山谷のラインの波打ちを補正するため、検出に不要な画像情報のノイズ成分を除去でき、安定して内部表面欠陥を検出できる。   In addition, the image processing apparatus converts the orthogonal coordinate system image information sent from the camera into the polar coordinate system image information to extract the inspection area as the original image information, and then converts it again into the orthogonal coordinate system image information. Thus, since the screw hole or the inner surface image of the hole is processed so as to become a developed image, the inner surface image can be taken and image processing can be performed without inserting the inspection head into the screw hole or hole. In addition, in order to correct the perspective difference in the depth direction of the inner surface image of the screw hole or hole, that is, the perspective difference that appears closer to the bottom even with the same dimension compared to the dimensions of the screw hole or hole opening, The size of internal surface defects can also be accurately detected. Furthermore, it corrects image wavy distortion caused by misalignment of the center of the wide-angle lens, that is, cutting traces that should be a set of diagonal straight lines and wavy lines in the thread valleys, eliminating noise components in image information that are not necessary for detection. , Can detect internal surface defects stably.

また、広角レンズの視野角が100度以上であるため、ねじ穴または穴の内部表面全体を照射することが可能となり、輝度むらのない画像が得られる。   In addition, since the viewing angle of the wide-angle lens is 100 degrees or more, it is possible to irradiate the screw hole or the entire inner surface of the hole, and an image without uneven brightness can be obtained.

さらに、検査ヘッドがロボットのアームに固定され、制御装置に制御されるロボットコントローラがロボットの動きを制御するため、検査ヘッドが自動的に正確に位置決めされ、ゆがみの少ない画像が得られる。   Further, since the inspection head is fixed to the robot arm and the robot controller controlled by the control device controls the movement of the robot, the inspection head is automatically and accurately positioned, and an image with less distortion is obtained.

ねじ穴の内部表面欠陥検査装置の構成図である。It is a block diagram of the internal surface defect inspection apparatus of a screw hole. 検査ヘッドを示す模式図である。It is a schematic diagram which shows an inspection head. ねじ穴または穴の特徴に応じてカメラの露光時間と高輝度スポット照明の照射光量を変化させることを示すグラフである。It is a graph which shows changing the exposure time of a camera, and the irradiation light quantity of high-intensity spot illumination according to the characteristic of a screw hole or a hole. 一定輝度で撮像したねじ穴の画像である。It is the image of the screw hole imaged with constant brightness. ねじ穴の特徴に応じてカメラの露光時間と高輝度スポット照明の照射光量を調整して撮像したねじ穴の画像である。It is the image of the screw hole which imaged by adjusting the exposure time of a camera and the irradiation light quantity of high-intensity spot illumination according to the characteristic of a screw hole. ねじ穴の内部表面欠陥検査の各過程における撮像画像および処理画像である。It is the captured image and processed image in each process of an internal surface defect inspection of a screw hole. ねじ穴の内部表面欠陥検査手順を示すフローチャートである。It is a flowchart which shows the internal surface defect inspection procedure of a screw hole. 「波状ゆがみ」を説明する模式図である。It is a schematic diagram explaining "wave-like distortion".

以下に本発明の実施形態について詳細に説明する。   Hereinafter, embodiments of the present invention will be described in detail.

図1は、本発明のねじ穴の内部表面欠陥検査装置の構成図であり、図2は、検査ヘッドを模式的に示した図である。   FIG. 1 is a configuration diagram of an internal surface defect inspection apparatus for screw holes according to the present invention, and FIG. 2 is a diagram schematically showing an inspection head.

図1、図2に示すように、本発明に係る内部表面欠陥検査装置1は、ワーク31のねじ穴(被撮像対象)32の軸線に対してその光軸が平行な広角レンズ12、高精度レンズの組合わせからなるリレーレンズ13、高輝度スポット照明(光源)17、高輝度スポット照明17からの光を屈曲してねじ穴32へ照射するハーフミラー14およびカメラ16からなる検査ヘッド11と、ねじ穴32の開口部から所定距離離して検査ヘッド11を移動させるロボット6と、ロボットを制御するロボットコントローラ5と、撮像されたねじ穴32の内部表面画像を処理する画像処理装置3と、高輝度スポット照明17に電力を供給する照明用電源4と、ロボットコントローラ5と画像処理装置3と照明用電源4とを制御する制御装置2とから構成される。   As shown in FIGS. 1 and 2, the internal surface defect inspection apparatus 1 according to the present invention includes a wide-angle lens 12 whose optical axis is parallel to the axis of a screw hole (object to be imaged) 32 of a work 31, and high accuracy. An inspection head 11 comprising a relay lens 13 comprising a combination of lenses, a high-intensity spot illumination (light source) 17, a half mirror 14 that bends light from the high-intensity spot illumination 17 and irradiates the screw holes 32, and a camera 16; The robot 6 that moves the inspection head 11 away from the opening of the screw hole 32 by a predetermined distance, the robot controller 5 that controls the robot, the image processing device 3 that processes the imaged internal surface of the screw hole 32, and the high It comprises an illumination power source 4 that supplies power to the luminance spot illumination 17, and a controller 2 that controls the robot controller 5, the image processing device 3, and the illumination power source 4. .

高輝度スポット照明17にて照射された光は、ハーフミラーによって屈曲されて高精度リレーレンズ13と広角レンズ12を透過し、ねじ穴32の内部表面を均一に照射する。ねじ穴32からの反射光は、広角レンズ12、高精度リレーレンズ13、ハーフミラー14を透過してカメラに入射し、カメラがねじ穴32の内部表面画像を撮像する。   The light emitted from the high-intensity spot illumination 17 is bent by a half mirror, passes through the high-precision relay lens 13 and the wide-angle lens 12, and uniformly illuminates the inner surface of the screw hole 32. The reflected light from the screw hole 32 passes through the wide-angle lens 12, the high-precision relay lens 13, and the half mirror 14 and enters the camera, and the camera captures an internal surface image of the screw hole 32.

検査ヘッド11は、ねじ穴32の開口部から所定距離Lだけ離れて保持され、ねじ穴32の上をあらかじめティーチングされた位置(教示位置)に移動しながら、複数のねじ穴の内部表面を撮像する。すなわち、ロボットコントローラが、制御装置2の指令によりロボットアーム6a先端に取付けられた検査ヘッド11を各教示点に移動、停止させ、検査ヘッド11が教示点に停止したときに、高輝度スポット照明17で照射されたねじ穴の内部表面を画像処理装置3の指令に基いてカメラ16で撮像する。   The inspection head 11 is held away from the opening of the screw hole 32 by a predetermined distance L, and images the inner surfaces of the plurality of screw holes while moving to the position (teaching position) previously taught on the screw hole 32. To do. That is, when the robot controller moves and stops the inspection head 11 attached to the tip of the robot arm 6a to each teaching point according to a command from the control device 2, and the inspection head 11 stops at the teaching point, the high-intensity spot illumination 17 The internal surface of the screw hole irradiated in step S is imaged by the camera 16 based on the command of the image processing apparatus 3.

撮像が完了すると、ロボットコントローラ5が検査ヘッド11を次の教示点に移動させるとともに、検査ヘッド11の移動中に、画像処理装置3が撮像された画像領域内における内部表面欠陥の有無を判定し、制御装置2に判定結果を伝送する。検査すべき全てのねじ穴32の撮像が終了すると、制御装置2が内部表面欠陥の有った教示点を表示する。   When the imaging is completed, the robot controller 5 moves the inspection head 11 to the next teaching point, and the image processing apparatus 3 determines the presence or absence of an internal surface defect in the imaged area while the inspection head 11 is moving. The determination result is transmitted to the control device 2. When the imaging of all the screw holes 32 to be inspected is completed, the control device 2 displays a teaching point having an internal surface defect.

広角レンズ12の視野角が100度以上であるため、ねじ穴32の内部表面全体を均一に照射でき、輝度むらのない画像が得られる。なお、視野角θとは、広角レンズ12の諸元の一つであり、平行に入射した入射光が何度に広がって放射されるかという角度であって、本実施形態においては、100度以上としてある。   Since the viewing angle of the wide-angle lens 12 is 100 degrees or more, the entire inner surface of the screw hole 32 can be irradiated uniformly, and an image without uneven brightness can be obtained. Note that the viewing angle θ is one of the specifications of the wide-angle lens 12 and is an angle of how much incident light that is incident in parallel is spread and emitted. In the present embodiment, the viewing angle θ is 100 degrees. As above.

また、図3のグラフに示すように、ねじ穴32の特徴(貫通ねじ穴か袋ねじ穴か、ねじ内径の違い)に応じてカメラ16の露光時間と高輝度スポット照明17の照射光量を調整することで、図5に示すように、袋ねじ穴(図5(a))であっても貫通ねじ穴(図5(b))であっても、正常面と内部表面欠陥fのコントラストが大きい画像が得られ、鋳巣や残留切粉などの欠陥を容易に識別可能となる。なお、図4は、照射光量を調整することなく一定輝度で撮像した場合であって、貫通ねじ穴(図4(b))においては、ねじの谷32bが暗くなりすぎて内部表面欠陥fとのコントラストが出なくなっている。   In addition, as shown in the graph of FIG. 3, the exposure time of the camera 16 and the amount of irradiation light of the high-intensity spot illumination 17 are adjusted according to the characteristics of the screw hole 32 (through screw hole or bag screw hole, screw inner diameter difference). Thus, as shown in FIG. 5, the contrast between the normal surface and the internal surface defect f is good regardless of whether it is a cap screw hole (FIG. 5A) or a through screw hole (FIG. 5B). Large images can be obtained, and defects such as cast holes and residual chips can be easily identified. FIG. 4 shows a case where an image is captured at a constant brightness without adjusting the amount of irradiation light. In the through screw hole (FIG. 4B), the screw valley 32b becomes too dark and the internal surface defect f. The contrast of

次に、ねじ穴32の内部表面欠陥fの検出手順について、図6の撮像画像および処理画像と図7のフローチャートとに基き説明する。   Next, the procedure for detecting the internal surface defect f of the screw hole 32 will be described based on the captured image and processed image of FIG. 6 and the flowchart of FIG.

ステップS1において、カメラ16により撮像された画像(図6(a))を画像処理装置3に取込み原画像とする。このとき、画像の画素の座標は、極座標表示となっている。   In step S <b> 1, the image captured by the camera 16 (FIG. 6A) is taken into the image processing device 3 and used as an original image. At this time, the coordinates of the pixels of the image are displayed in polar coordinates.

ステップSaからステップSeは、ねじ穴32の特徴を判別して、カメラ16の露光時間の調整と高輝度スポット照明の照射光量の調光を自動的に行うステップである。   Steps Sa to Se are steps in which the characteristics of the screw holes 32 are determined, and the exposure time of the camera 16 is adjusted and the light intensity of the high-intensity spot illumination is automatically adjusted.

まずステップSaにおいて、撮像した原画像から、穴の輪郭が閉じているか螺旋状かを認識して、被撮像対象がねじ穴か穴かを判断する(本実施形態は、ねじ穴を検査する体様であるが、本発明は、ねじ穴でない通常の穴にも適用可能なため、このステップを有する。)。   First, in step Sa, it is determined from the captured original image whether the contour of the hole is closed or helical, and it is determined whether the object to be imaged is a screw hole or a hole (this embodiment is a body for inspecting a screw hole). Although this is the case, the present invention has this step because it can be applied to ordinary holes that are not screw holes).

次いでステップSbにおいて、ねじ穴または穴の内径の特定を行う。ねじ穴の場合には、画像の中心を通るように水平に走査し、輪郭の左側端と右側端の位置から内径と中心座標とを算出する。水平方向同様、垂直、対角方向(45度斜め方向)も同様に走査して内径と中心座標とを算出し、それぞれの内径、中心座標から、平均内径、平均中心座標を算出する。穴の場合には、穴の輪郭座標から最小二乗法により内径と中心座標とを算出する。   Next, in step Sb, the screw hole or the inner diameter of the hole is specified. In the case of a screw hole, the image is scanned horizontally so as to pass through the center of the image, and the inner diameter and center coordinates are calculated from the positions of the left and right ends of the contour. Similarly to the horizontal direction, the vertical and diagonal directions (45-degree oblique direction) are similarly scanned to calculate the inner diameter and the center coordinates, and the average inner diameter and the average center coordinates are calculated from the inner diameter and the center coordinates. In the case of a hole, the inner diameter and the center coordinate are calculated from the contour coordinates of the hole by the least square method.

次いでステップScにおいて、ステップSbで得られたねじ穴32の中心付近における平均輝度を求める。袋ねじ穴であれば光が反射して中心付近の輝度が高くなり、貫通ねじ穴であれば光が透過して輝度が低くなるという現象から、袋ねじ穴か貫通ねじ穴かの判定を行う。   Next, in step Sc, the average luminance near the center of the screw hole 32 obtained in step Sb is obtained. If it is a cap screw hole, light is reflected and the brightness near the center is increased, and if it is a through screw hole, the light is transmitted and the brightness is lowered, so it is determined whether it is a cap screw hole or a through screw hole. .

ステップSdにおいて、図3のグラフに基いてカメラ16の露光時間と高輝度スポット照明17の照射光量とを決定し、ステップSeにおいて、再度ねじ穴32の内部表面を撮像する。   In step Sd, the exposure time of the camera 16 and the irradiation light quantity of the high-intensity spot illumination 17 are determined based on the graph of FIG. 3, and the internal surface of the screw hole 32 is imaged again in step Se.

なお、図面情報等をもとにねじ穴種類(袋ねじ穴、貫通ねじ穴)、ねじ穴径を既知情報として制御装置に入力しておけば、制御装置に制御される画像処理装置がカメラ16の露光時間と高輝度スポット照明17の照射光量とを自動的に決定するので、ステップSaからステップSeの過程については、省略してもよい。   If the screw hole type (cap screw hole, through screw hole) and screw hole diameter are input as known information to the control device based on the drawing information or the like, the image processing device controlled by the control device is the camera 16. Since the exposure time and the irradiation light amount of the high-intensity spot illumination 17 are automatically determined, the process from step Sa to step Se may be omitted.

次に、ステップS2において、検査領域を抽出する(図6(b))。   Next, in step S2, an inspection area is extracted (FIG. 6B).

ステップ3において、画素の座標を極座標系から直交座標系に変換し、いわゆるねじ穴の内部表面の展開画像を生成する(図6(c))。   In step 3, the pixel coordinates are converted from a polar coordinate system to an orthogonal coordinate system to generate a developed image of the inner surface of the so-called screw hole (FIG. 6C).

ステップS4において、同一寸法であってもねじ穴32の開口部側が底部側より大きく撮像されることを修正するため遠近差補正を行い、遠近補正画像を生成する(図6(d))。   In step S4, perspective correction is performed to correct that the opening side of the screw hole 32 is imaged larger than the bottom side even if the dimensions are the same, and a perspective correction image is generated (FIG. 6D).

次いでステップS5において、ねじの山谷の波状ノイズ(波状ゆがみ)を除去する。波状ノイズとは、本来斜め直線の集合(図8(a))であるはずの切削痕、ねじの山32a、ねじの谷32bが、広角レンズ12の光軸がねじ穴32の中心からずれることで波打った曲線(図6(b))になることであり、このステップにおいて、この波打ちを補正する(図6(e)、図6(f)、図6(g))。   Next, in step S5, the wave-like noise (wave-like distortion) in the threads of the screw is removed. The wavy noise is that the optical axis of the wide-angle lens 12 deviates from the center of the screw hole 32 in a cutting trace, a screw thread 32a, and a screw thread 32b that should originally be a set of oblique straight lines (FIG. 8A). In this step, the undulation is corrected (FIG. 6 (e), FIG. 6 (f), and FIG. 6 (g)).

次いでステップS6において、所定の輝度閾値によって欠陥のコントラストを2値に分ける動的2値化を行う(図6(h))。   Next, in step S6, dynamic binarization is performed in which the defect contrast is divided into two values according to a predetermined luminance threshold value (FIG. 6 (h)).

ステップS7において、内部表面欠陥部候補fk(図示せず。以下、同じ。)の抽出を行う。   In step S7, an internal surface defect candidate fk (not shown; the same applies hereinafter) is extracted.

ステップS8において、ステップS7で抽出された内部表面欠陥部候補fkの特徴量(内部表面欠陥部候補fkが内接する等価楕円の長径・短径、面積、検出位置等)を算出する。   In step S8, the feature amount of the inner surface defect candidate fk extracted in step S7 (the major and minor diameters of the equivalent ellipse inscribed by the inner surface defect candidate fk, the area, the detection position, etc.) is calculated.

ステップS9において、あらかじめ記録されている検査規格情報と内部表面欠陥部候補fkの特徴量との比較を行い、内部表面欠陥部候補fkが内部表面欠陥部fであるか正常面であるかを判定し、内部表面欠陥部fである場合には、教示点番号、内部表面欠陥位置、特徴量を制御装置2の表示部に表示する。   In step S9, the inspection standard information recorded in advance and the feature quantity of the internal surface defect candidate fk are compared to determine whether the internal surface defect candidate fk is the internal surface defect part f or the normal surface. In the case of the internal surface defect portion f, the teaching point number, the internal surface defect position, and the feature amount are displayed on the display unit of the control device 2.

次いでステップS10において、直交座標系で画像処理されてきた画像データを再度極座標系のデータに変換した画像を生成し、原画像に回帰するか確認する。   Next, in step S10, an image obtained by converting image data that has been subjected to image processing in the orthogonal coordinate system into data in the polar coordinate system is generated again, and it is confirmed whether or not the original image is returned.

ステップS11において、全検査部位の検査完了を確認して検査を終了する。   In step S11, the completion of the inspection of all inspection parts is confirmed and the inspection is terminated.

本実施形態によれば、視野角が大きい広角レンズ12を対物レンズとしているため、ねじ穴32の開口部から所定距離L離れてねじ穴32の内部表面をカメラ16によって撮像でき、検査ヘッド11がねじ穴32の内部に挿入されることがないので、検査ヘッド11と残留切粉との接触による検査ヘッド11の位置ずれが発生せず、ねじ穴32の内部表面欠陥を安定して検出できる。   According to this embodiment, since the wide-angle lens 12 having a large viewing angle is used as the objective lens, the internal surface of the screw hole 32 can be imaged by the camera 16 at a predetermined distance L from the opening of the screw hole 32, and the inspection head 11 is Since it is not inserted into the screw hole 32, the position of the inspection head 11 due to contact between the inspection head 11 and residual chips does not occur, and the internal surface defects of the screw hole 32 can be detected stably.

また、画像処理装置3が、カメラ16から送られた直交座標系の画像情報を極座標系の画像情報に変換して原画像情報とし検査領域の抽出を行った後、再度直交座標系の画像情報に変換してねじ穴32の内部表面画像を展開画像になるように処理するため、検査ヘッド11をねじ穴32の内部に挿入することなく内部表面画像を撮像、画像処理が可能となる。また、ねじ穴32の内部表面画像の深さ方向の遠近差、すなわち、ねじ穴32の開口部の諸寸法に比べて同一寸法でも底部に近づくほど小さく見えるという遠近差を補正するため、内部表面欠陥fの大きさも正確に検出できる。さらに、広角レンズ12の中心ずれによって生じる画像の波状ゆがみ、すなわち斜め直線の集合であるはずの切削痕やねじの山谷のラインの波打ちを補正するため、検出に不要な画像情報のノイズ成分を除去でき、安定して内部表面欠陥fを検出できる。   Further, after the image processing apparatus 3 converts the image information of the orthogonal coordinate system sent from the camera 16 into the image information of the polar coordinate system and extracts the inspection area as the original image information, the image information of the orthogonal coordinate system is again obtained. Therefore, the inner surface image of the screw hole 32 is processed to be a developed image, so that the inner surface image can be captured and image processed without inserting the inspection head 11 into the screw hole 32. In addition, in order to correct the perspective difference in the depth direction of the internal surface image of the screw hole 32, that is, the perspective difference in which the same size appears closer to the bottom than the dimensions of the opening of the screw hole 32, the inner surface is corrected. The size of the defect f can also be accurately detected. In addition, the image distortion caused by misalignment of the center of the wide-angle lens 12, that is, the waviness of the cutting trace and the thread crest line that should be a set of oblique straight lines, is corrected. The internal surface defect f can be detected stably.

また、広角レンズ12の視野角が100度以上であるため、ねじ穴32の内部表面全体を照射することが可能となり、輝度むらのない画像が得られる。   In addition, since the viewing angle of the wide-angle lens 12 is 100 degrees or more, it is possible to irradiate the entire inner surface of the screw hole 32, and an image without uneven brightness can be obtained.

さらに、検査ヘッド11がロボットのアーム6aに固定され、制御装置2に制御されるロボットコントローラ5がロボット6の動きを制御するため、検査ヘッド1が自動的に正確に位置決めされ、ゆがみの少ない画像が得られる。   Further, since the inspection head 11 is fixed to the arm 6a of the robot and the robot controller 5 controlled by the control device 2 controls the movement of the robot 6, the inspection head 1 is automatically and accurately positioned, and the image is less distorted. Is obtained.

1 内部表面欠陥検査装置
2 制御装置
3 画像処理装置
4 照明用電源
5 ロボットコントローラ
6 ロボット
6a アーム
11 検査ヘッド
12 広角レンズ
13 リレーレンズ
14 ハーフミラー
15接眼レンズ
16 カメラ
17 高輝度スポット照明(光源)
31 ワーク
32 ねじ穴(被撮像対象)
32a ねじの山
32b ねじの谷
f 内部表面欠陥
DESCRIPTION OF SYMBOLS 1 Internal surface defect inspection apparatus 2 Control apparatus 3 Image processing apparatus 4 Power supply for illumination 5 Robot controller 6 Robot 6a Arm 11 Inspection head 12 Wide-angle lens 13 Relay lens 14 Half mirror 15 Eyepiece 16 Camera 17 High-intensity spot illumination (light source)
31 Work 32 Screw hole (Target to be imaged)
32a Screw thread 32b Screw valley f Internal surface defects

Claims (4)

被撮像対象側から順に対物レンズとしての広角レンズ、リレーレンズ、ハーフミラー、接眼レンズ、被撮像物を撮像するカメラおよび前記ハーフミラーを介して被撮像対象に光を照射する光源を有する検査ヘッドと、前記光源に電力を供給する照明用電源と、前記カメラに接続され前記カメラが撮像した画像を処理する画像処理装置と、前記照明用電源と前記画像処理装置とを制御する制御装置とを備えたねじ穴または穴の内部表面欠陥検査装置において、ねじ穴または穴の内部が前記カメラによって撮像されるときに前記広角レンズがねじ穴または穴の開口部から所定距離離れていることを特徴とする内部表面欠陥検査装置。   An inspection head having a wide-angle lens as an objective lens, a relay lens, a half mirror, an eyepiece lens, a camera that images an object to be imaged, and a light source that emits light to the object to be imaged via the half mirror, in order from the object to be imaged side An illumination power source that supplies power to the light source, an image processing device that is connected to the camera and processes an image captured by the camera, and a control device that controls the illumination power source and the image processing device. In addition, the wide-angle lens is separated from the opening of the screw hole or hole by a predetermined distance when the inside of the screw hole or hole is imaged by the camera. Internal surface defect inspection device. 前記カメラが、画像の画素が正方格子配列となるようにねじ穴または穴の内部表面を撮像し、前記画像処理装置が、前記カメラから送られた直交座標系の画像情報を極座標系の画像情報に変換して原画像情報として記録し、前記極座標系の画像情報を再度直交座標系の画像情報に変換してねじ穴または穴の内部表面画像を展開画像になるように処理し、ねじ穴または穴の内部表面画像の直交座標系の画像情報をもとに深さ方向の遠近差を遠近補正し、前記広角レンズの中心ずれによって生じる画像の波状ゆがみを補正することを特徴とする請求項1に記載の内部表面欠陥検査装置。   The camera images a screw hole or an inner surface of the hole so that the pixels of the image are in a square lattice arrangement, and the image processing device converts the orthogonal coordinate system image information sent from the camera into polar coordinate system image information. Is recorded as original image information, the image information of the polar coordinate system is converted again to image information of the orthogonal coordinate system, and the screw hole or the inner surface image of the hole is processed to be a developed image, 2. A perspective difference in a depth direction is corrected based on image information of an orthogonal coordinate system of an inner surface image of a hole, and a wave-like distortion of an image caused by a center shift of the wide-angle lens is corrected. The internal surface defect inspection apparatus described in 1. 前記広角レンズの視野角が100度以上であることを特徴とする請求項1また2に記載の内部表面欠陥検査装置。   3. The internal surface defect inspection apparatus according to claim 1, wherein a viewing angle of the wide-angle lens is 100 degrees or more. 前記検査ヘッドがロボットのアームに固定され、前記制御装置に制御されるロボットコントローラが前記ロボットの動きを制御することを特徴とする請求項1から3のいずれか一項に記載の内部表面欠陥検査装置。   The internal surface defect inspection according to any one of claims 1 to 3, wherein the inspection head is fixed to a robot arm, and a robot controller controlled by the control device controls movement of the robot. apparatus.
JP2009242307A 2009-10-21 2009-10-21 Inspection device for internal surface defects of screw holes or holes Active JP5568947B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009242307A JP5568947B2 (en) 2009-10-21 2009-10-21 Inspection device for internal surface defects of screw holes or holes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009242307A JP5568947B2 (en) 2009-10-21 2009-10-21 Inspection device for internal surface defects of screw holes or holes

Publications (2)

Publication Number Publication Date
JP2011089826A true JP2011089826A (en) 2011-05-06
JP5568947B2 JP5568947B2 (en) 2014-08-13

Family

ID=44108218

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009242307A Active JP5568947B2 (en) 2009-10-21 2009-10-21 Inspection device for internal surface defects of screw holes or holes

Country Status (1)

Country Link
JP (1) JP5568947B2 (en)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011185682A (en) * 2010-03-05 2011-09-22 Ricoh Co Ltd Inspection method, inspection device, program, and method for manufacturing image forming apparatus
JP2012242233A (en) * 2011-05-19 2012-12-10 Sumitomo Metal Ind Ltd Pipe inner surface inspection method and pipe inner surface inspection device
JP2014142243A (en) * 2013-01-23 2014-08-07 Honda Motor Co Ltd Image processing method
JP2017015396A (en) * 2015-06-26 2017-01-19 キヤノン株式会社 Inspection method, inspection apparatus, processing apparatus, program, and recording medium
JP2017026442A (en) * 2015-07-22 2017-02-02 倉敷紡績株式会社 Article inspection method and device
JP2017150949A (en) * 2016-02-24 2017-08-31 株式会社豊田中央研究所 Inspection device and inspection method
CN110793968A (en) * 2018-08-02 2020-02-14 由田新技股份有限公司 Detection equipment for identifying pore wall defects
US10902578B2 (en) 2017-10-31 2021-01-26 Kabushiki Kaisha Toshiba Inspection system and inspection method
CN112666078A (en) * 2019-10-16 2021-04-16 由田新技股份有限公司 Detection information presentation method, detection method and detection equipment for porous structure
WO2024090490A1 (en) * 2022-10-25 2024-05-02 株式会社アイシン Hole inspection system
KR102678864B1 (en) 2023-12-08 2024-06-27 (주)기산계전 Automatic system for inspecting tap hole

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102363522B1 (en) * 2020-04-08 2022-02-24 윤상구 tap hole vision inspection device

Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5764658U (en) * 1980-09-19 1982-04-17
JPS60179852U (en) * 1984-05-07 1985-11-29 トヨタ自動車株式会社 Surface defect measurement device
JPS63184044A (en) * 1987-01-27 1988-07-29 Fuji Electric Co Ltd Apparatus for inspecting inner peripheral surface of cylindrical container
JPS63225156A (en) * 1987-03-16 1988-09-20 Toyo Seikan Kaisha Ltd Method for inspecting inner surface of container
JPH04254745A (en) * 1991-02-06 1992-09-10 Fuji Electric Co Ltd Inspecting device of quality
JPH08152417A (en) * 1994-11-30 1996-06-11 Dainippon Printing Co Ltd Device and device unit for inspection of inner surface of container
JPH1073418A (en) * 1996-08-30 1998-03-17 Mazda Motor Corp Method for detecting defect of tapped hole
JP3059756U (en) * 1998-12-10 1999-07-13 史人 日沼 Sewer sewer survey equipment
JP2001304819A (en) * 2000-04-19 2001-10-31 Nec Corp Nozzle hole measuring method and apparatus
JP2006208258A (en) * 2005-01-31 2006-08-10 Aisin Seiki Co Ltd Method and device for inspecting defect
JP2006267000A (en) * 2005-03-25 2006-10-05 Teijin Cordley Ltd Method of detecting foreign matter in hole, and detection program therefor
JP2007010620A (en) * 2005-07-04 2007-01-18 Fanuc Ltd Screw part inspection device and screw part test method
JP4066409B2 (en) * 2002-02-25 2008-03-26 株式会社ロゼフテクノロジー Tap hole inspection method and apparatus
JP2008128730A (en) * 2006-11-17 2008-06-05 Aisin Seiki Co Ltd Inspection device of inspection target
JP2008185462A (en) * 2007-01-30 2008-08-14 Toyota Motor Corp Method and apparatus for judging quality of screw
JP2009014347A (en) * 2007-06-29 2009-01-22 Toyota Motor Corp Device and method for inspecting tapped hole

Patent Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5764658U (en) * 1980-09-19 1982-04-17
JPS60179852U (en) * 1984-05-07 1985-11-29 トヨタ自動車株式会社 Surface defect measurement device
JPS63184044A (en) * 1987-01-27 1988-07-29 Fuji Electric Co Ltd Apparatus for inspecting inner peripheral surface of cylindrical container
JPS63225156A (en) * 1987-03-16 1988-09-20 Toyo Seikan Kaisha Ltd Method for inspecting inner surface of container
JPH04254745A (en) * 1991-02-06 1992-09-10 Fuji Electric Co Ltd Inspecting device of quality
JPH08152417A (en) * 1994-11-30 1996-06-11 Dainippon Printing Co Ltd Device and device unit for inspection of inner surface of container
JPH1073418A (en) * 1996-08-30 1998-03-17 Mazda Motor Corp Method for detecting defect of tapped hole
JP3059756U (en) * 1998-12-10 1999-07-13 史人 日沼 Sewer sewer survey equipment
JP2001304819A (en) * 2000-04-19 2001-10-31 Nec Corp Nozzle hole measuring method and apparatus
JP4066409B2 (en) * 2002-02-25 2008-03-26 株式会社ロゼフテクノロジー Tap hole inspection method and apparatus
JP2006208258A (en) * 2005-01-31 2006-08-10 Aisin Seiki Co Ltd Method and device for inspecting defect
JP2006267000A (en) * 2005-03-25 2006-10-05 Teijin Cordley Ltd Method of detecting foreign matter in hole, and detection program therefor
JP2007010620A (en) * 2005-07-04 2007-01-18 Fanuc Ltd Screw part inspection device and screw part test method
JP2008128730A (en) * 2006-11-17 2008-06-05 Aisin Seiki Co Ltd Inspection device of inspection target
JP2008185462A (en) * 2007-01-30 2008-08-14 Toyota Motor Corp Method and apparatus for judging quality of screw
JP2009014347A (en) * 2007-06-29 2009-01-22 Toyota Motor Corp Device and method for inspecting tapped hole

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011185682A (en) * 2010-03-05 2011-09-22 Ricoh Co Ltd Inspection method, inspection device, program, and method for manufacturing image forming apparatus
JP2012242233A (en) * 2011-05-19 2012-12-10 Sumitomo Metal Ind Ltd Pipe inner surface inspection method and pipe inner surface inspection device
JP2014142243A (en) * 2013-01-23 2014-08-07 Honda Motor Co Ltd Image processing method
US10366484B2 (en) 2015-06-26 2019-07-30 Canon Kabushiki Kaisha Inspection method, inspection apparatus, processing apparatus, and recording medium for detecting defects of a work
JP2017015396A (en) * 2015-06-26 2017-01-19 キヤノン株式会社 Inspection method, inspection apparatus, processing apparatus, program, and recording medium
JP2017026442A (en) * 2015-07-22 2017-02-02 倉敷紡績株式会社 Article inspection method and device
JP2017150949A (en) * 2016-02-24 2017-08-31 株式会社豊田中央研究所 Inspection device and inspection method
US10902578B2 (en) 2017-10-31 2021-01-26 Kabushiki Kaisha Toshiba Inspection system and inspection method
US11734811B2 (en) 2017-10-31 2023-08-22 Kabushiki Kaisha Toshiba Inspection system and inspection method
CN110793968A (en) * 2018-08-02 2020-02-14 由田新技股份有限公司 Detection equipment for identifying pore wall defects
CN112666078A (en) * 2019-10-16 2021-04-16 由田新技股份有限公司 Detection information presentation method, detection method and detection equipment for porous structure
CN112666078B (en) * 2019-10-16 2024-05-03 由田新技股份有限公司 Detection information presentation method, detection method and detection equipment for porous structure
WO2024090490A1 (en) * 2022-10-25 2024-05-02 株式会社アイシン Hole inspection system
KR102678864B1 (en) 2023-12-08 2024-06-27 (주)기산계전 Automatic system for inspecting tap hole

Also Published As

Publication number Publication date
JP5568947B2 (en) 2014-08-13

Similar Documents

Publication Publication Date Title
JP5568947B2 (en) Inspection device for internal surface defects of screw holes or holes
JP2010223621A (en) Inner surface inspection method of tubular article
JP2009216453A (en) Inner surface measuring device
JP5807772B2 (en) Defect detection apparatus and method
JP2006010392A (en) Through hole measuring system, method, and through hole measuring program
KR20160118722A (en) 3D vision inpection system
JP5388467B2 (en) Optical device defect inspection method and optical device defect inspection apparatus
JP4675436B1 (en) Surface inspection illumination / imaging system and data structure
JP4100846B2 (en) Surface texture inspection method and surface texture inspection apparatus
JP5042503B2 (en) Defect detection method
JP5281815B2 (en) Optical device defect inspection method and optical device defect inspection apparatus
JP2018205011A (en) Screw shape measurement device and method
CN111198190A (en) Optical detection system
JP2010085165A (en) Surface inspection device and surface inspection method
JP6566903B2 (en) Surface defect detection method and surface defect detection apparatus
JP2009222525A (en) Substrate inspection method and substrate inspection device
JP2014222221A (en) Inspection device of luminous body
JP5360467B2 (en) Defect inspection equipment
JP6121123B2 (en) Measuring device and measuring method
JP2002303581A (en) Panel inspection device and panel inspection method
JP6402082B2 (en) Surface imaging apparatus, surface inspection apparatus, and surface imaging method
JP5531405B2 (en) Periodic pattern unevenness inspection method and inspection apparatus
JP6676910B2 (en) Inspection device
JP2008139126A (en) Flaw detector and flaw detection method
JP2018036203A (en) Hole internal inspection device and hole internal inspection method

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20120913

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20130830

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20130903

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20131024

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20140527

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20140609

R151 Written notification of patent or utility model registration

Ref document number: 5568947

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151