JP2011083719A - Intermittent coating apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an intermittent coating apparatus which is simple in structure and easy in adjustment. <P>SOLUTION: The intermittent coating apparatus includes a casing 16, a valve device 17, and a volume adjusting device 28, and supplies a coating liquid intermittently to a die. The valve device 17 is provided with a valve sheet 19 which provided on the boundary of the branch space 16a and the die-side space 16b of the casing 16, a valve body 18 which is internally fitted to the valve sheet 19 without liquid leakage and moves in a seated state by a dimension for suction/pressure feed to be advancible/retreatable to an end position to close a valve, and an operating device 21 for the valve body. The volume adjusting device 28 is provided with an external fitting portion 29 which is installed between the branch space 16a and a return passage 15, a piston 30 which forms a liquid passage 30c between it and the external fitting portion 29 to be movably internally fitted to the external fitting portion 29, and a piston operating device 31 which advances the piston 30 to the branch space 16a when the valve body 18 advances from the end position B to close the valve to an end position A to open the valve and which retreats the piston 30 when the valve body 18 retreats from a start position to close the valve to the end position to close the valve. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention alternately forms a coating area and a non-coating area on a base material by repeatedly discharging and stopping from the die when the coating liquid is discharged from the die and applied to the base material. The present invention relates to an intermittent coating apparatus. Coating is performed by relatively moving the base material and the die. For example, there are a case where the base material is run and the die is stopped, and a case where the base material is stopped and the die is run.

  Conventionally, there exists a thing of patent document 1 in an intermittent coating apparatus. As shown in the schematic diagram of FIG. 36, the intermittent coating apparatus 1 includes a die D for coating the substrate W with the coating liquid M, a pumping means 2 for pumping the coating liquid M to the die D, and a die D. Suction / pressure feeding means 4 in which the piston 4b is inserted into the cylinder 4a communicating with the die side liquid supply passage 3a between the die D and the intermittent valve Va so as to be pushed and pulled freely. A first on-off valve V1 that communicates between the die-side liquid supply path 3a and the cylinder 4a, a second on-off valve V2 that communicates between the cylinder 4a and the escape path 7 outside the die-side liquid supply path 3a, And a control device 8 for controlling the pressure feeding means 4 and the like. The pressure feeding means 2 includes a tank T, a pump P that pumps the coating liquid M in the tank T, and an on-off valve Vb that recirculates the coating liquid M when not pumped to the die D to the tank T. The intermittent coating apparatus 1 sucks the coating liquid from the die side liquid supply path 3a into the cylinder 4a by the piston 4b pulled by the suction / pressure feeding means 4 when the intermittent valve Va is closed, and the intermittent valve Va. When opening, the piston 4b pushed by the suction / pressure feeding means 4 pressures (arrows) the coating liquid M from the inside 4a of the cylinder to the die side liquid supply path 3a.

  The control device 8 shows commands for the operation tool 6 of the suction / pressure feeding means 4, the intermittent valve Va, the on-off valve Vb of the pressure feeding means 2, the first on-off valve V1, and the second on-off valve V2, in the timing chart of FIG. It is something like that. That is, in the coating time zone J in which the coating area C is formed on the substrate W, the intermittent valve Va is instructed to be kept open, and the on-off valve Vb is instructed to be kept closed. In the coating suspension time zone K in which the non-coating zone G is formed on the substrate W, the intermittent valve Va is instructed to be kept closed, and the on-off valve Vb is instructed to be kept open.

  When the intermittent coating apparatus 1 opens the intermittent valve Va in order to form the coating area C on the substrate W, the die side liquid supply path from the cylinder 4a while pushing and moving the piston 4b of the suction / pressure feeding means 4 is used. Until the coating liquid M is pumped (arrow B in FIG. 36) to 3a (in the middle of the time zone Ja in FIG. 37, when the intermittent valve Va is switched from opening to reaching the time T1) Supplies the coating liquid M to the die-side liquid supply passage 3a by opening the first on-off valve V1 and closing the second on-off valve V2, and closes the first on-off valve V1 and reaches the second on-way 2 Open the on-off valve V2, and after this time, excess coating liquid M pumped from the cylinder 4a of the suction / pumping means 4 passes through the escape path 7 to the tank T outside the die side liquid supply path 3a. The thickness of the coating film on the start end Ct side in the coating area C can be adjusted. To have. The time T1 for switching between opening and closing of the first on-off valve V1 and the second on-off valve V2 is appropriately set according to various coating conditions.

  Further, when the intermittent valve Va is closed in order to form the non-coating area G on the substrate W, the piston 4b that draws and moves the coating liquid M in the die side liquid supply path 3a by the piston 4b is moved inside the cylinder. Suction to 4a (arrow a in FIG. 36), the coating liquid M coming out from the discharge port Da of the die D to the end Cb of the coating area C is sucked into the die D.

Japanese Patent No. 4092462

  By the way, in the conventional intermittent coating apparatus 1, the control object of the control device 8 is the operation tool 6 of the suction / pressure feeding means 4, the intermittent valve Va, the on-off valve Vb of the pressure feeding means 2, the first on-off valve V1, and the second on-off valve. V2 has a problem that the apparatus becomes complicated due to the large number of control objects, and that it takes a lot of time to adjust the operation timing of each control object to be performed in order to achieve optimum intermittent coating. . In particular, in order to adjust the thickness of the coating film on the start end Ct side in the coating area C and set the thickness of the subsequent coating film to a predetermined dimension, the opening / closing operation of the intermittent valve Va, the suction / pumping means 4 It is necessary to keep the deviation of the start operation for pushing and moving the piston 4b and the opening / closing switching operation of the first on-off valve V1 and the second on-off valve V2 within a very short time (for example, 100 to 500 microseconds), Adjustment takes a lot of time.

  In order to solve the above problems, an object of the present invention is to provide an intermittent coating apparatus that has a simple apparatus structure and does not require much time for adjustment.

  In order that the apparatus structure is simple and does not require a lot of time for adjustment, the means adopted by the present invention as set forth in claim 1 is to apply the coating liquid M to the discharge port Da as shown in FIGS. Provided between the die D and the pressure-feeding means 12 and intermittently supplying the coating liquid M to the die D and unnecessary coating. In the intermittent coating apparatus provided with the intermittent supply device 14 for returning the liquid M to the reflux path 15, the intermittent supply device 14 includes a casing 16, a valve device 17, and a volume adjusting device 28, and the casing 16 includes an inner side thereof. In addition, a branch space 16a that communicates with the pressure feeding means 12, a die side space 16b that communicates with the branch space 16a and communicates with the die D, and a reflux path side space 16c that communicates with the branch space 16a and communicates with the reflux path 15 are provided. Formed, The valve device 17 includes a valve seat 19 provided at a boundary between the branch space 16a of the casing 16 and the die side space 16b, and a valve opening end position A that is located in the die side space 16b and is separated from the valve seat 19. A valve body 18 that is fitted in the valve seat 19 without leaking in the middle of the movement toward the branch space 16a and moves in the closed state until it reaches the closed valve end position B; A valve body operating device 21 that moves the body 18 forward from the valve opening end position A to the valve closing end position B toward the valve opening end position A or backwards toward the valve closing end position B; 18 is formed so that it can advance for extruding from the valve closing end position B (see FIG. 5) and can move back for suction to the valve closing end position B (see FIG. 4). For volume adjustment of the branch space 16a, the branch space 16a and the reflux path side space 16 An outer fitting portion 29 provided between the piston 30 that forms a liquid passage 30c between the outer fitting portion 29 and is movably fitted in the outer fitting portion 19, and the valve element 18 is closed. The piston 30 is advanced toward the branch space 16a at an appropriate time when the valve body 18 is advanced from the end position B toward the valve opening end position A (see FIG. 5), and the valve element 18 is closed at the valve opening end position A or closed. The piston 30 is moved back toward the reflux path side space 16c at an appropriate time when the valve body 18 is moved backward from the valve start position H1 toward the valve closing end position B and / or at an appropriate time when the valve body 18 is stopped at the valve closing end position B. It is an intermittent coating apparatus characterized by comprising a piston operating device 31 (see FIG. 4).

  In order to maintain the coating amount in the final region of the coating time zone, the means employed by the present invention according to claim 2 is that the piston operating device 31 is the valve element 18 as shown in FIG. When the valve 30 moves backward from the valve opening end position A toward the valve closing start position H1, the piston 30 is advanced toward the branch space 16a, and then the valve body 18 moves from the valve closing start position H1 to the valve closing end. The piston 30 is retracted toward the reflux path side space 16c at an appropriate time when retreating toward the position B and / or at an appropriate time when the valve element 18 is stopped at the valve closing end position B. An intermittent coating apparatus according to claim 1.

  In order that the apparatus structure is simple and does not require a lot of time for adjustment, the means adopted by the present invention as claimed in claim 3 is to apply the coating liquid M to the discharge port Da as shown in FIGS. Provided between the die D and the pressure-feeding means 12 and intermittently supplying the coating liquid M to the die D and unnecessary coating. In the intermittent coating apparatus provided with the intermittent supply device 74 for returning the liquid M to the reflux path 15, the intermittent supply device 74 includes a casing 16, a valve device 17, and a volume adjusting device 78, and the casing 16 includes an inner side thereof. In addition, a branch space 16a that communicates with the pressure feeding means 12, a die side space 16b that communicates with the branch space 16a and communicates with the die D, and a reflux path side space 16c that communicates with the branch space 16a and communicates with the reflux path 15 are provided. Formed The valve device 17 includes a valve seat 19 provided at the boundary between the branch space 16a of the casing 16 and the die side space 16b, and a valve opening end position A that is located in the die side space 16b and is separated from the valve seat 19. A valve body 18 that is fitted in the valve seat 19 without leaking in the middle of the movement toward the branching space 16a from the valve closing end position B that is moved in the closed state, and can move forward and backward. A valve body operating device 21 that moves the valve body 18 forward from the valve opening end position A to the valve closing end position B toward the valve opening end position A or backwards toward the valve closing end position B; The body 18 is formed so as to be able to advance for extrusion from the valve closing end position B (see FIG. 25) and to be moved back for suction to the valve closing end position B (see FIG. 24). The volume of the branch space 16a is adjusted, and the branch space 16a and the reflux path 1 c is provided between the outer fitting portion 76 and the outer fitting portion 76 so as to be able to advance and retreat, and extends toward the branch space 16a to form a liquid passage 75c between the outer fitting portion 76. A piston 75 that is connected to a valve closing stroke region 75b that extends toward the region 75d and the reflux path side space 16c and can be fitted in the outer fitting portion 76 without liquid leakage, and the valve element 18 from the valve closing end position B to the valve opening end. When moving forward toward the position A, the piston 75 is moved forward toward the branch space 16a while the valve opening stroke region 75d faces the outer fitting portion 76 when the valve body 18 moves forward with the valve closed. 25), and when the valve body 18 moves forward toward the valve opening end position A with the valve opened, the piston 75 moves forward toward the branch space 16a while facing the valve closing stroke area 75b toward the outer fitting portion 76. In addition, the valve body 18 is moved to the valve opening end position A. When retreating from the valve end position B toward the valve closing end position B, when the valve body 18 retreats in the open state, the piston 75 moves toward the reflux path side space 16c while the valve closing stroke region 75b faces the outer fitting portion 76. (See FIGS. 21 and 22) and appropriate timing when the valve body 18 is retracted toward the valve closing end position B while being closed, and / or the valve body 18 is at the valve closing end position B. The piston operating device 31 is provided with the piston 75 retreating toward the reflux path side space 16c while the valve opening stroke region 75d faces the outer fitting portion 76 at an appropriate time during the stop (see FIGS. 23 and 24). Is an intermittent coating apparatus characterized by

  In order that the apparatus structure is simple and does not require much time for adjustment, the means adopted by the present invention as set forth in claim 4 is to apply the coating liquid M to the discharge port Da as shown in FIGS. Provided between the die D and the pressure-feeding means 12 and intermittently supplying the coating liquid M to the die D and unnecessary coating. In the intermittent coating apparatus provided with the intermittent supply device 84 for returning the liquid M to the reflux path 15, the intermittent supply device 84 includes a casing 16, a valve device 17, and a volume adjusting device 88, and the casing 16 includes an inner side thereof. In addition, a branch space 16 a that communicates with the pressure feeding means 12 and the reflux path 15, and a die side space 16 b that communicates with the branch space 16 a and communicates with the die D are formed. The valve device 17 includes the branch space 16 a of the casing 16. And die side Liquid leakage into the valve seat 19 during the movement from the valve seat 19 provided at the boundary of the space 16b to the branch space 16a from the valve opening end position A located in the die side space 16b and separated from the valve seat 19 The valve body 18 is provided so as to be freely reciprocated between the valve closing end position B and the valve body 18 is moved from the valve opening end position A to the valve closing end position B. Between the valve closing end position B and the valve element operating device 21 with the valve element 18 in the closed state. The volume adjusting device 88 is configured to adjust the volume of the branch space 16a and to branch the casing 16 so as to be able to move forward (see FIG. 31) and retreat for suction to the valve closing position B (see FIG. 30). Provided in the opening 16e that allows the space 16a and the outside of the casing 16 to communicate with each other. When the valve body 18 advances from the valve closing end position B toward the valve opening end position A as appropriate, the outer fitting portion 86, the piston 85 that is slidably fitted into the outer fitting portion 86 without liquid leakage, and When the piston 85 moves forward toward the branch space 16a at the timing (see FIG. 31), the valve element 18 moves backward from the valve opening end position A or the valve closing start position H1 toward the valve closing end position B. The piston operating device 31 is provided with the piston 85 retreating toward the outside of the casing 16 at an appropriate time and / or at an appropriate time when the valve body 18 is stopped at the valve closing end position B (see FIG. 30). This is an intermittent coating apparatus.

  In order to maintain the coating amount in the final region of the coating time zone, the means adopted by the present invention according to claim 5 is that the piston operating device 31 is the valve element 18 as shown in FIGS. Moves backward from the valve opening end position A toward the valve closing start position H1, the piston 85 is advanced toward the branch space 16a, and then the valve body 18 is moved from the valve closing start position H1 to the valve closing end. The piston 85 is moved backward toward the outside of the casing 16 at an appropriate time when retreating toward the position B and / or at an appropriate time when the valve element 18 is stopped at the valve closing end position B. It is an intermittent coating apparatus of Claim 4.

  In order that the apparatus structure is simple and does not require much time for adjustment, the means adopted by the present invention according to claim 6 is to apply the coating liquid M to the discharge port Da as shown in FIGS. Provided between the die D and the pressure-feeding means 12 and intermittently supplying the coating liquid to the die D and unnecessary coating liquid. In the intermittent coating apparatus provided with the intermittent supply device 94 for returning the gas to the reflux path 15, the intermittent supply device 94 includes a casing 16, a valve device 17 and a volume adjusting device 98, and the casing 16 is provided inside thereof. A branch space 16a that communicates with the pressure feeding means 12 and the reflux path 15 and a die side space 16b that communicates with the branch space 16a and communicates with the die D are formed. The valve device 17 includes the branch space 16a of the casing 16 and the die space 16b. Side space There is no liquid leakage to the valve seat 19 during the movement from the valve seat 19 provided at the boundary of 6b to the branch space 16a from the valve opening end position A located in the die side space 16b and separated from the valve seat 19. A valve body 18 provided so as to be able to advance and retreat between a valve closing end position B that is fitted and moved while being closed, and the valve body 18 from the valve opening end position A to the valve closing end position B. And a valve body operating device 21 that moves forward toward the valve opening end position A or reverse toward the valve closing end position B, and pushes forward from the valve closing end position B while the valve body 18 remains closed. 35 (see FIG. 35) and can be retracted back to the valve closing end position B (see FIG. 34). The volume adjusting device 98 is for adjusting the volume of the branch space 16a, and is a branch space of the casing 16. 16a and an opening 16e that communicates the outside of the casing 16 with each other. A fitting portion 86 and a piston 85 that is slidably fitted into the outer fitting portion 86 without fluid leakage are provided, and the piston body 85 and the valve body 18 are connected so as to be interlocked so that the valve body 18 is in the valve closing end position. When the piston 85 moves forward toward the valve opening end position A from B, the piston 85 moves forward toward the branch space 16a, and when the valve body 18 moves backward from the valve opening end position A toward the valve closing end position B. The intermittent application apparatus is characterized in that the piston 85 is moved backward toward the outside of the casing 16.

  In the present invention according to claims 1, 3, 4 and 6, the coating liquid fed from the pressure feeding means to the branch space of the casing of the intermittent supply device has a valve element which is a valve element operating device and has a valve opening end. In the coating time zone in which the valve moves forward to the valve open state, it is coated by being discharged from the die discharge port through the gap between the valve seat and the valve body in the valve open state, the die side space and the die. The supply to the die is stopped in the coating suspension time zone in which the valve body is retracted to the valve closing end position by the valve body device device and is in the valve closing state.

  In the first aspect of the present invention, when the valve body moves forward from the valve closing end position toward the valve opening end position, the valve body moves forward from the valve closing end position to the valve closing end position. In the final period of the coating suspension time zone, the coating liquid filling volume in the die side space under the valve closing condition is decreased by the valve body that moves forward while remaining in the die side space and the die in the coating suspension state. In the initial region of the coating time zone in which the valve body reaches the valve opening end position, the coating liquid supplied from the pressure feeding means is pumped to the die, The coating liquid is discharged from the discharge port to form the start end of the coating area. In the continuation range of the coating time zone when the valve body is stopped at the valve open end position, the coating liquid that is pumped from the pumping means is stably supplied to the die and continues to be discharged from the die discharge port. To form the coating area of the substrate. The coating liquid in the branch space attempts to reduce the liquid pressure as part of the valve body that moves forward moves away from the branch space, but the piston of the volume adjusting device moves in parallel with the advancement of the valve body. By trying to increase the liquid pressure while part of the piston enters the branch space as it advances toward the branch space, the coating liquid pressure in the initial area of the coating time zone is set to the start of the coating area. It becomes a pressure state suitable for forming. Conversely, when the valve body moves backward from the valve opening end position toward the valve closing end position, the initial stage of the coating suspension time period during which the valve body moves backward for suction through the valve closing start position and reaches the valve closing end position. In the area, the coating liquid filling volume in the die side space under the valve-closed condition is increased with the receding valve body, and the coating liquid remaining on the die immediately after the coating suspension is sucked to the die side space side. Then, the coating liquid coming out from the die discharge port to the end forming portion of the coating area of the base material is sucked into the die, and the end of the coating area is formed with good liquid drainage at the die discharge port. . The piston of the volume adjusting device that has advanced toward the branch space has an appropriate timing when the valve body moves backward from the valve opening end position or the valve closing start position toward the valve closing end position and / or the valve body is in the valve closing end position. Thus, the coating is not affected by retreating toward the reflux path side space at an appropriate time during the stop.

  According to the third aspect of the present invention, when the valve body advances from the valve closing end position toward the valve opening end position, the valve body moves forward from the valve closing end position to the valve closing start position. In the final period of the coating suspension time zone, the coating liquid filling volume in the die side space under the valve closing condition is decreased by the valve body that moves forward while remaining in the die side space and the die in the coating suspension state. In the initial region of the coating time zone in which the valve body reaches the valve opening end position, the coating liquid supplied from the pressure feeding means is pumped to the die, The coating liquid is discharged from the discharge port to form the start end of the coating area. The coating liquid in the branch space tries to reduce the liquid pressure as part of the valve body that moves forward leaves the branch space and leaves, but in parallel with the valve body moving forward with the valve body closed. As the valve opening stroke area of the piston of the volume adjusting device advances toward the branch space, a part of the piston enters the branch space and tries to increase the fluid pressure, so that the initial coating time zone The coating liquid pressure in the area becomes a pressure state suitable for forming the start end of the coating area. Conversely, when the valve body moves backward from the valve opening end position toward the valve closing end position, the initial stage of the coating suspension time period during which the valve body moves backward for suction through the valve closing start position and reaches the valve closing end position. In the area, the coating liquid filling volume in the die side space under the valve-closed condition is increased with the receding valve body, and the coating liquid remaining on the die immediately after the coating suspension is sucked to the die side space side. Then, the coating liquid coming out from the die discharge port to the end forming portion of the coating area of the base material is sucked into the die, and the end of the coating area is formed with good liquid drainage at the die discharge port. . When the valve body is retracted while the valve body is in the open state, the piston of the volume adjusting device is retracted toward the reflux path side space with the valve closing stroke area facing the outer fitting portion, and the valve body is in the closed state. The valve opening stroke area faces the outer fitting part at the appropriate time when retreating toward the closed valve end position and / or at the appropriate time when the valve body is stopped at the closed valve end position. By retreating, the influence on the coating can be reduced. The coating liquid that is pumped to the branch space is supplied to the valve device by closing the volume adjustment device with the valve closing stroke area of the piston facing the outer fitting portion when the valve body is in the open state. When the body is closed, the volume adjustment device is opened with the valve opening stroke area of the piston facing the outer fitting portion, and the body is returned to the return path through the return side space.

  In the present invention according to claim 4, when the valve body advances from the valve closing end position toward the valve opening end position, the valve body moves forward from the valve closing end position to the valve closing start position. In the final period of the coating suspension time zone, the coating liquid filling volume in the die side space under the valve closing condition is decreased by the valve body that moves forward while remaining in the die side space and the die in the coating suspension state. In the initial region of the coating time zone where the valve body reaches the valve opening end position, the coating liquid supplied from the pressure feeding means is pumped to the die, The coating liquid is discharged from the discharge port to form the start end of the coating area. The coating liquid in the branch space attempts to reduce the liquid pressure as part of the valve body that moves forward moves away from the branch space, but the piston of the volume adjusting device moves in parallel with the advancement of the valve body. By trying to increase the liquid pressure while part of the piston enters the branch space as it advances toward the branch space, the coating liquid pressure in the initial area of the coating time zone is set to the start of the coating area. It becomes a pressure state suitable for forming. Conversely, when the valve body moves backward from the valve opening end position toward the valve closing end position, the initial stage of the coating suspension time period during which the valve body moves backward for suction through the valve closing start position and reaches the valve closing end position. In the area, the coating liquid filling volume in the die side space under the valve-closed condition is increased with the receding valve body, and the coating liquid remaining on the die immediately after the coating suspension is sucked to the die side space side. Then, the coating liquid coming out from the die discharge port to the end forming portion of the coating area of the base material is sucked into the die, and the end of the coating area is formed with good liquid drainage at the die discharge port. . The piston of the volume adjusting device is at an appropriate time when the valve body is retracted from the valve opening end position or the valve closing start position toward the valve closing end position and / or at an appropriate time when the valve body is stopped at the valve closing end position. By retreating toward the outside of the casing, the coating is not affected.

  In the present invention according to claim 6, when the valve body moves forward from the valve closing end position toward the valve opening end position, the valve body moves forward for extrusion from the valve closing end position to the valve closing start position. In the final period of the coating suspension time zone, the coating liquid filling volume in the die side space under the valve closing condition is decreased by the valve body that moves forward while remaining in the die side space and the die in the coating suspension state. In the initial region of the coating time zone in which the valve body reaches the valve opening end position, the coating liquid supplied from the pressure feeding means is pumped to the die, The coating liquid is discharged from the discharge port to form the start end of the coating area. The coating liquid in the branch space tries to reduce the liquid pressure as part of the valve body that moves forward moves away from the branch space. By trying to increase the liquid pressure while part of the piston enters the branch space as it advances toward the branch space, the coating liquid pressure in the initial area of the coating time zone is set to the start of the coating area. It becomes a pressure state suitable for forming. Conversely, when the valve body moves backward from the valve opening end position toward the valve closing end position, the initial stage of the coating suspension time period during which the valve body moves backward for suction through the valve closing start position and reaches the valve closing end position. In the area, the coating liquid filling volume in the die side space under the valve-closed condition is increased with the receding valve body, and the coating liquid remaining on the die immediately after the coating suspension is sucked to the die side space side. Then, the coating liquid coming out from the die discharge port to the end forming portion of the coating area of the base material is sucked into the die, and the end of the coating area is formed with good liquid drainage at the die discharge port. . The piston of the volume adjusting device that has advanced toward the branch space is retracted toward the outside of the casing in conjunction with the valve element retreating from the valve opening end position toward the valve closing end position. There is no effect.

  In the present invention according to claims 1, 4 and 6, the coating liquid supplied from the pressure feeding means to the branch space can be supplied by increasing the extra flow rate of refluxing to the reflux path, which is necessary for coating. It is possible to increase the fluid pressure in the branch space through which a flow rate larger than the flow rate passes, and when the valve element moves forward to the valve opening end position, the die from the branch space where the coating fluid pressure is increased. The coating liquid can be rapidly supplied to the die through the side space.

  According to the second and fifth aspects of the present invention, as the valve body moves backward from the valve opening end position toward the valve closing start position, the gap between the valve body and the valve seat gradually narrows, and the die discharge port The supply flow rate of the coating liquid is reduced, but the volume adjustment device piston advances toward the branch space to increase the liquid pressure of the coating liquid in the branch space, thereby supplying the coating liquid. It becomes possible to prevent the flow rate from decreasing.

  In order to make it possible to adjust the thickness of the coating film, the means adopted by the present invention according to claim 7 is that the valve seat 19 is an annular seal attached to the casing 16 as shown in FIGS. The valve body 58 is formed by connecting a valve closing stroke region 58b near the die side space 16b and a valve opening stroke region 58d near the branch space 16a. An outer peripheral surface 58a is formed along the advancing / retreating direction so that the entire periphery of the seat 19 can be brought into contact with the seat 19 to ensure the forward movement for extrusion and the backward movement for suction. A flow rate adjusting liquid passing portion 58c extending in the forward / backward direction so as to open to the die side space 16b and the branch space 16a is provided, and the liquid passing portion 58c is moved as it moves toward the die side space 16b side. A lot of flow through Intermittent coating apparatus according to any one of claims 1 to 6 to form a passed through portions 58c as is.

  In the present invention according to claim 7, the flow rate of the coating liquid can be increased as the valve body is advanced toward the die side space with the valve opening stroke area facing the valve seat. Therefore, by changing the valve opening position, which is the stop position of the valve body, the flow rate of the coating liquid supplied to the die is adjusted, and the coating film thickness of the coating area formed on the base material is set to the optimum value. it can.

  The means adopted by the present invention according to claim 8 to obtain the movement state of the valve body for performing the initial region operation in the coating time zone and the initial zone operation in the coating suspension time zone in an appropriate state is shown in FIG. As shown, the operating device 21 includes a valve shaft 24 extending from the valve body 18 and penetrating through the casing 16, a drive source 22 including an electric servo motor capable of positioning control and speed control, and a valve shaft 24 and a drive. A power transmission mechanism 23 that is provided between the power sources 22 and transmits the rotational force of the electric servo motor to the valve shaft 24 to move the valve body 18 back and forth. The intermittent coating according to any one of claims 1 to 7, wherein a relation between the elapsed time and each elapsed position of the valve body 18 between the valve opening end position A and the valve closing end position B can be arbitrarily set. It is a construction device.

  The intermittent coating apparatus according to the first, third, fourth, and sixth aspects of the present invention has a simple configuration in which one valve body is advanced and retracted from a valve opening end position to a valve closing end position by a valve element operating device. Dispensing the coating liquid to form the start of the coating area on the base material, and the operation during the final period of the coating pause time when the coating liquid is pushed out to the vicinity of the die discharge port where the discharge of the working liquid is stopped The initial operation of the coating time zone to be performed, the continuous operation of the coating time zone in which the coating liquid is continuously discharged from the die discharge port to form the coating region on the substrate, and the coating region on the substrate In order to form the end of the coating area, it is necessary to prepare for stopping the supply of the coating liquid to the die discharge port. In order to form the initial area operation during the coating pause time period during which the working liquid is sucked into the die and the non-coating area of the substrate, the coating liquid is discharged from the die discharge port. It is possible to repeat and continuous operation of stopping coating pause time zone continuously, has excellent effect of the adjustment of the timing of these operations easier with the apparatus can be structured easily. Furthermore, the intermittent coating apparatus according to the present invention is configured so that the pressure of the coating liquid in the branch space is set to an appropriate pressure by the piston that advances the volume adjusting device in the initial area of the coating time zone that forms the start end of the coating area. Since it can be in a state, coating in the initial region of the coating time zone can be performed smoothly.

  In the intermittent coating apparatus according to the second and fifth aspects of the present invention, the piston of the volume adjusting device is directed toward the branch space in parallel with the valve body retreating from the valve opening end position toward the valve closing start position. By making it move forward, the coating amount in the final region of the coating time zone can be brought into an appropriate state.

  The intermittent coating apparatus according to the third aspect of the present invention provides the coating liquid to be fed to the branch space, and supplies the valve body to the valve device without returning to the reflux path when the valve body is in a valve open state. When the valve is closed, it is returned to the reflux path without being supplied to the valve device, so it is possible to achieve a pumping flow rate equivalent to the flow rate required at the time of coating. I can respond.

  The intermittent coating apparatus according to the present invention described in claim 6 can simplify the structure because the piston and the valve body are connected and interlocked by the valve body operating device.

  The intermittent coating apparatus according to the present invention described in claim 7 is formed on the substrate by changing the valve opening end position, which is the stop position of the valve body, and adjusting the flow rate of the coating liquid supplied to the die. It is possible to optimize the coating film thickness in the coating area.

  The intermittent coating apparatus according to the present invention described in claim 8 is configured such that each elapsed position of the valve body between the valve opening end position and the valve closing end position and each elapsed time in the time zone from the start to the stop of the valve body. Therefore, it is possible to obtain a moving state of the valve body that allows the initial region operation in the coating time zone and the initial region operation in the coating suspension time zone to be performed in an appropriate state.

The 1st Embodiment of the intermittent coating apparatus which concerns on this invention is shown, A figure (A) is the schematic of the whole this invention intermittent coating apparatus 11, and a figure (B) is in figure (A). FIG. 2C is an enlarged view of the portion b, and FIG. 3C is an enlarged view of the portion c in FIG. FIG. (A) is a partial sectional view showing a main part in the first embodiment, showing a state in which the valve body 18 is located at the valve opening end position A and the piston 30 is located at the volume reduction position X. Fig. (B) is a cross-sectional view of the piston 30 taken along the line bb in Fig. (A). It is a fragmentary sectional view showing the principal part in a 1st embodiment, and shows the state where valve body 18 is located in valve closing start position H1, and piston 30 is located in volume decreasing position X. It is a fragmentary sectional view showing the principal part in a 1st embodiment, Comprising: While valve body 18 retreats from valve closing start position H1 (two-dot chain line) to valve closing end position B (solid line), piston 30 is volume. The state where it retracted to the increased position Y is shown. It is a fragmentary sectional view showing the principal part in a 1st embodiment, Comprising: Valve body 18 advances from valve closing end position B (two-dot chain line) to valve closing end position H2 (solid line), and piston 30 is an intermediate position. The state where it has advanced to Z is shown. FIG. 1A shows a mode in which a piston 30 with a flow rate adjusting function is provided in the first embodiment, and FIG. (B) shows a state where the valve element 18 is located at the valve closing end position B and the piston 30 is located at the volume increasing position Y. FIG. The piston 30 with a flow rate adjusting function is shown, in which FIG. (A) is a longitudinal sectional view and FIG. (B) is a bottom view. It is a timing chart which shows operation | movement of the valve body 18 and piston 30 in 1st Embodiment, Comprising: The figure (A) and the figure (B) have shown the different control aspect. It is a fragmentary sectional view showing the neighborhood of valve device 47 in a 2nd embodiment of an intermittent application device concerning the present invention, and shows the state where valve body 48 is located in valve opening end position A. It is a fragmentary sectional view showing the neighborhood of valve device 47 in a 2nd embodiment, and Drawing (A) shows valve body 48 from valve-closing start position H1 (two-dot chain line) to valve-closing end position B (solid line). FIG. 4B shows a state in which the valve body 48 has moved backward from the valve closing end position B (two-dot chain line) to the valve closing end position H2 (solid line). It is a fragmentary sectional view which shows the vicinity of the valve apparatus 57 in 3rd Embodiment of the intermittent coating apparatus which concerns on this invention, Comprising: The state which the valve body 57 is located in the valve opening end position A is shown. It is a fragmentary sectional view showing the neighborhood of valve device 57 in a 3rd embodiment, and Drawing (A) shows valve body 58 from valve closing start position H1 (two-dot chain line) to valve closing end position B (solid line). (B) shows a state in which the valve body 58 has advanced from the valve closing end position B (two-dot chain line) to the valve closing end position H2 (solid line). The valve body 58 in 3rd Embodiment is expanded and shown, Comprising: FIG. (A) is a front view, FIG. (B) is the front view which carried out the longitudinal cross-section, FIG. (C) is a bottom view. FIG. 7 is an enlarged view showing different aspects of the valve body 58 in the third embodiment, where FIG. (A) is a front view, FIG. (B) is a longitudinal sectional front view, and FIG. (C) is a bottom view. is there. The further different aspect of the valve body 58 in 3rd Embodiment is expanded and shown, Comprising: A figure (A) is a front view, A figure (B) is a bottom view. It is the schematic which shows the whole 4th Embodiment of the intermittent coating apparatus which concerns on this invention. It is a fragmentary sectional view showing the principal part in a 4th embodiment, and shows the state where valve body 18 is located in valve opening end position A, and piston 30 is located in volume decreasing position X. It is a fragmentary sectional view showing the principal part in a 4th embodiment, and while valve body 18 retreats from valve closing start position H1 (two-dot chain line) to valve closing end position B (solid line), piston 30 is volume. The state where it retracted to the increased position Y is shown. It is a fragmentary sectional view showing the principal part in a 4th embodiment, Comprising: Valve body 18 advances from valve closing end position B (two-dot chain line) to valve closing end position H2 (solid line), and piston 30 is an intermediate position. A state of moving forward to Z is shown. It is the schematic which shows the whole 5th Embodiment of the intermittent coating apparatus which concerns on this invention. FIG. (A) is a partial sectional view showing a main part in the fifth embodiment, showing a state in which the valve body 18 is located at the valve opening end position A and the piston 75 is located at the volume reduction position X. FIG. 2B is a cross-sectional view of the piston 75 crossed along the line bb in FIG. 1A, and FIG. 2C is a cross-sectional view of the piston 75 crossed along the line cc in FIG. It is a fragmentary sectional view showing the principal part in a 5th embodiment, and shows the state where valve body 18 of a valve opening state adjoins to valve seat 19, and piston 75 is located in closed end position N3. It is a fragmentary sectional view showing the principal part in a 5th embodiment, and shows the state where valve body 18 moved back to valve closing start position H1, and piston 75 moved back to middle position N2 of an open state. It is a fragmentary sectional view showing the principal part in a 5th embodiment, Comprising: While valve body 18 retreats from valve closing start position H1 (two-dot chain line) to valve closing end position B (solid line), piston 75 is volume The state where it retracted to the increased position Y is shown. It is a fragmentary sectional view showing the principal part in a 5th embodiment, Comprising: While valve body 18 advances from valve closing end position B (two-dot chain line) to valve closing end position H2 (solid line), piston 75 is volume. The state which advanced from the increase position Y (two-dot chain line) to the intermediate position N1 of the open state is shown. It is a timing chart which shows operation | movement of the valve body 18 and piston 75 in 5th Embodiment. It is the schematic which shows the whole 6th Embodiment of the intermittent coating apparatus which concerns on this invention. It is a fragmentary sectional view showing the principal part in a 6th embodiment, and shows the state where valve body 18 is located in valve opening end position A and piston 85 is located in volume reduction position X. It is a fragmentary sectional view showing the principal part in a 6th embodiment, and shows the state where valve body 18 is located in valve closing start position H1, and piston 85 is located in volume reduction position X. It is a fragmentary sectional view showing the principal part in a 6th embodiment, Comprising: Valve body 18 retreats from valve closing start position H1 (two-dot chain line) to valve closing end position B (solid line), and piston 85 increases in volume. A state where the vehicle has moved back to the position Y is shown. It is a fragmentary sectional view showing the principal part in a 6th embodiment, Comprising: Valve body 18 advances from valve closing end position B (two-dot chain line) to valve closing end position H2 (solid line), and piston 85 is an intermediate position. The state where it has advanced to Z is shown. It is the schematic which shows the whole 7th Embodiment of the intermittent coating apparatus which concerns on this invention. It is a fragmentary sectional view showing the principal part in a 7th embodiment, and shows the state where valve body 18 is located in valve opening end position A and piston 85 is located in volume reduction position X. It is a fragmentary sectional view showing the principal part in a 7th embodiment, Comprising: Valve body 18 retreats from valve closing start position H1 (two-dot chain line) to valve closing end position B (solid line), and piston 85 increases in volume. The state where it retracted to the position Y is shown. It is a fragmentary sectional view showing the principal part in a 7th embodiment, Comprising: Valve body 18 advances from valve closing end position B (two-dot chain line) to valve closing end position H2 (solid line), and piston 85 is an intermediate position. The state where it has advanced to Z is shown. It is the schematic of the conventional intermittent coating apparatus. It is a timing chart of the conventional intermittent coating apparatus.

  An intermittent coating apparatus according to the present invention (hereinafter referred to as “the present invention intermittent coating apparatus”) will be described based on an embodiment shown in the drawings.

(First embodiment)
The present invention intermittent coating apparatus 11 according to the first embodiment shown in FIG. 1 to FIG. 8 includes a die D for discharging the pumped coating liquid M from the discharge port Da to the substrate W, and a coating liquid. A pressure feeding means 12 for feeding M, and a gap between the die D and the pressure feeding means 12 for intermittently supplying the coating liquid M to the die D and supplying the unnecessary coating liquid M not supplied to the die D to the reflux path And an intermittent supply device 14 for returning to 15. The form of coating using the intermittent coating apparatus 11 of the present invention is performed by relative movement of the base material W and the die D. For example, the mode in which the base material W is run and the die D is stopped (the former mode) There is a mode (the latter mode) in which the substrate D is stopped and the die D is run. As an example of the former mode, although not shown in the figure, the coating liquid discharged from the discharge port Da of the fixed die D is applied to the surface of the base material W that is wound around a backup roll that is rotationally driven at a constant speed. There is something to coat. As an example of the latter aspect, there is one in which the coating liquid M discharged from the discharge port Da of the die D moving along the surface of the substrate W is applied to the surface of the substrate W fixed to the fixed platen. . As the substrate W, a continuous material such as a plastic film is selected in the former mode, and a material cut into an appropriate length such as a glass plate is selected in the latter mode. As the coating liquid M, a liquid applied to a battery electrode or a liquid crystal plate is selected. As the posture of the die D, illustration is omitted except when the discharge direction of the discharge port Da is oriented horizontally, but the discharge direction of the discharge port Da may be directed downward or upward, which is optimal depending on the coating conditions. Is selected. The selection of the posture of the die D is performed together with the selection of the former aspect or the latter aspect.

  As shown in FIG. 1, the die D has a liquid channel Dd for dispersion such as a coat hanger and a manifold De formed at the boundary between the two lip members Db and Dc that are separably joined. A slit-like discharge port Da is opened at the tip of the boundary. The die D is adapted to be able to cope with various coating conditions by adjusting a gap dimension (for example, 50 to 1500 μm) between the lip members Db and Dc, which is the thickness of the discharge port Da.

  The pressure feeding means 12 includes a tank T for storing the coating liquid M and a pump P for pressure-feeding the coating liquid M in the tank T to the die D as in the prior art. The pressure feeding means 12 and the die D are joined by a liquid feeding path 13 via an intermittent feeding device 14, and the pressure feeding means 12 and the intermittent feeding device 14 are connected by a pressure feeding means side liquid feeding path 13b, and the intermittent feeding device 14 and the die D are connected. Are connected by the die side liquid supply path 13a. The reflux path 15 extends from the intermittent supply device 14 and is joined to the tank T so as to return the unnecessary coating liquid M. A pressure gauge PG2 (see FIG. 2) for detecting the pressure in the liquid supply path 13a is provided in the die-side liquid supply path 13a as necessary. The intermittent coating apparatus 11 of the present invention is provided with a relief path 38 provided with a flow rate adjusting valve 37 between the intermittent supply apparatus 14 and the pressure feeding means 12, so that the coating liquid M to be pumped from the pressure feeding means 12 to the intermittent supply apparatus 14 is provided. When the flow rate needs to be increased, an amount exceeding the capacity capable of returning to the reflux path 15 can be recirculated to the tank T via the escape path 38. The flow rate adjustment valve 37 of the escape path 38 is for adjusting the flow rate of the coating liquid to be refluxed through the escape path 38 so that the amount to be refluxed to the reflux path 15 is an optimal flow rate. The flow rate adjusting valve 37 is provided on the inflow side of the reflux path 15 (location close to the branch space 16a) so that the flow rate of the coating liquid passing through the volume adjusting device 28 described later and returning to the reflux path 15 can be adjusted. Sometimes.

  As shown in FIG. 2, the intermittent supply device 14 includes a casing 16, a valve device 17, and a volume adjusting device 28. Inside the casing 16, a branch space 16 a that communicates with the pressure feeding means 12 and the escape path 38, and a branch space A die-side space 16 b that can communicate with the die D and communicate with the die D, and a reflux-side space 16 c that communicates with the branch space 16 a and communicates with the reflux path 15 are formed. The casing 16 may be easily cleaned on the inside by allowing it to be divided and joined in place. The intermittent supply device 14 is arranged such that a valve body 18 of the valve device 17 and a piston 30 of the volume adjustment device 28 which will be described later are arranged in parallel via the branch space 16 a of the casing 16 with respect to the arrangement of the valve device 17 and the volume adjustment device 28. It is. The branch space 16a and the die side space 16b communicate with each other when the valve device 17 is in the open state (see FIG. 2), and do not communicate with each other when the valve device 17 is in the closed state (see FIG. 4). . Further, the branch space 16a and the reflux side space 16c are always in communication with each other via a liquid passage 30c described later of the volume adjusting device 28.

  As shown in FIG. 2, the valve device 17 includes an annular valve seat 19 provided at the boundary between the branch space 16a of the casing 16 and the die side space 16b, and an opening degree from the valve seat 19 located in the die side space 16b. A valve closing end position B (in which the valve seat 19 is fitted in the valve seat 19 without leaking in the middle of the movement from the valve opening end position A that is separated by F toward the branch space 16a and moves while the valve is closed (sitting state). 4), a valve body 18 provided to be movable back and forth, a valve body operating device 21 for moving the valve body 18 back and forth, and a valve shaft 24 connecting the valve body 18 and the valve body operating device 21. It has. As shown in FIG. 4, the valve body 18 is in a valve closing start position H1 indicated by a two-dot chain line (when the valve body 18 is retracted from the valve opening end position A toward the valve closing end position B, the valve closing state is From the first position to the valve closing end position B indicated by the solid line while being closed, the suction movement dimension L1 can be retracted (moved to the arrow e), and as shown in FIG. The valve closing end position H2 indicated by a solid line from the valve closing end position B indicated by (2) (when the valve body 18 advances from the valve closing end position B toward the valve opening end position A, the valve closing state is The extrusion advancement (movement to the arrow d) can be performed up to the extrusion movement dimension L2. Depending on the structure of the valve seat 19, the valve closing start position H1 and the valve closing end position H2 may be different positions or the same position.

  The valve seat 19 includes an annular seal made of an O-ring fitted in an annular groove (not shown) recessed in the casing 16, a U-shaped seal jacket and a V-shaped corrosion-resistant spring with a single-acting seal. For example, a ring seal (registered trade name) manufactured by Busak + Shamban or the like can be used. The valve seat 19 closes the valve device 17 when a later-described outer peripheral surface 18a of the valve body 18 contacts the seal portion 19s.

  As shown in FIG. 2, the valve body 18 is formed in a solid short columnar shape or a cup shape that is centered before opening the branch space 16 a side, and an outer peripheral surface 18 a is formed on the inner periphery of the valve seat 19. It is fitted into the formed circular seal portion 19s without leakage, and is closed (see FIGS. 4 and 5), and is attached to and detached from one end 24a of the valve shaft 24 penetrating the solid portion. The valve shaft 24 is joined by a fastener 26 such as a nut fitted thereto. The valve shaft 24 passes through the casing 16 through the seal 25 and reaches the valve body operating device 21. The dimension along the advancing / retreating direction of the valve body 18 is a dimension that can secure the suction movement dimension L1 (see FIG. 4) and the extrusion movement dimension L2 (see FIG. 5). When the valve body 18 is located at the valve opening end position A that is separated from the valve seat 19 at the opening degree F, the valve body 18 is loosely fitted to the casing inner peripheral surface 16d that forms the die side space 16b, and the casing inner peripheral surface An annular liquid passage is formed between 16d and 16d. As shown in FIG. 3, the valve body 18 of the present example has a seal portion 19 s of the valve seat 19 on the branch space side of the outer peripheral surface 18 a while retreating from the valve opening end position A (see FIG. 2) toward the branch space 16 a. When the end face 18b is brought into contact, the valve closing start position H1 is obtained. On the contrary, as shown in FIG. 5, the valve body 18 moves the branch space side end surface 18 b side of the outer peripheral surface 18 a to the seal portion 19 s of the valve seat 19 while moving forward from the valve closing end position B toward the die side space 16 b. When contacted, the valve closing end position H2 is reached.

  As shown in FIG. 2, the valve element operating device 21 is provided between a drive source 22 composed of an electric servo motor capable of positioning control and speed control, and between the drive source 22 and the valve shaft 24. A power transmission mechanism 23 that transmits the rotational force of an electric servo motor to the valve shaft 24 to move the valve body 18 forward and backward, and a control device 36 (see FIG. 1) that issues a control command to the drive source 22 are provided. Although not shown, the power transmission mechanism 23 is connected to the pinion gear joined to the output shaft of the electric servo motor, which is the drive source 22, and the valve shaft 24. The pinion gear meshes with each other along the valve body advancing / retreating direction. A gear mechanism combined with a slidable rack gear, a crank joined to an output shaft of an electric servomotor as a drive source 22, a slider coupled to the valve shaft 24 and slidable along the valve body advancement and retraction direction, A link mechanism or the like with very little play is combined, which is a combination of a crank and a connecting shaft that connects the slider with a rotating chain.

  The valve element operating device 21 is controlled by a positioning control of an electric servo motor, which is a drive source 22 that receives a control command issued by a control device 36 (see FIG. 1), and a valve opening end position A that is a stop position of the valve element 18. Each position (see FIG. 2) and valve closing end position B (see FIG. 4) can be set. Further, the valve element operating device 21 can change the setting of the valve opening end position A and the valve closing end position B of the valve element 18, and the opening F of the valve element 18 at the valve opening end position A (see FIG. 2). The valve body 18 is shown in the drawing, the dimension along the valve body advancing / retreating direction from the branch space side end surface 18b to the seal portion 19s of the valve seat 19, and the suction movement dimension L1 and the extrusion movement dimension L2 of the valve body 18 are intermittently applied. The dimensions can be adjusted to suit the requirements.

  Further, the valve element operating device 21 can change the speed at which the valve element 18 advances and retreats by controlling the speed of the electric servo motor that is the drive source 22 that receives the control command issued by the control device 36. That is, as shown in FIGS. 8A and 8B, the valve element operating device 21 moves the valve element 18 from the valve closing end position B, which is the starting position, to the valve opening end position A, which is the stopping position. When moving forward (moving in the direction of arrow d in FIG. 5), the forward movement time U from the start to the stop (that is, the final region Rc of the coating suspension time zone R and the initial region of the coating time zone Q) It is possible to change the relationship between each elapsed time from activation in a time zone of Qa, for example, 10 milliseconds, and each passing position of the valve body 18 in the forward movement path from activation to stop, The relationship between each elapsed time and each passing position can be arbitrarily set, and the moving speed at each passing position of the valve element 18 is set to an optimum value according to the coating conditions, so that the starting edge in the coating area C is obtained. The Ct side (see FIG. 1) can be formed in a good state.The optimum value of the moving speed of the valve element 18 according to the coating conditions may be obtained in advance by performing a coating test.

  Further, the valve element operating device 21 moves the valve element 18 backward from the valve opening end position A which is the starting position toward the valve closing end position B which is the stop position by speed control of the electric servo motor which is the driving source 22. When moving (in the direction of the arrow e in FIG. 3), the reverse movement time S from the start to the stop shown in FIGS. 8A and 8B in FIG. 8 (that is, the final region of the coating time zone Q) Qc and the required time in the initial region Ra of the coating suspension time zone R, for example, each elapsed time from the start in the time zone of 7 milliseconds) and each of the valve elements 18 in the backward movement path from the start to the stop The relation with the passing position can be arbitrarily set, and the moving speed at each passing position of the valve element 18 is set to an optimum value according to the coating condition, so that it can reach the terminal Cb in the coating area C. Coating liquid M (indicated by a broken line E in FIG. 1C) That portion) to smoothly suck the into the interior of the die D, are as termination Cb side can be formed in a good condition.

  As shown in FIG. 2, the volume adjusting device 28 adjusts the volume of the coating liquid filling space in the branch space 16a, and is an annular provided at the boundary between the branch space 16a and the reflux side space 16c of the casing 16. A piston 30 that forms a fluid passage 30c between the outer fitting portion 29 and the outer fitting portion 29 and is movably fitted in the outer fitting portion 29, a piston operating device 31 that moves the piston 30 forward and backward, A connecting rod 34 for connecting the piston 30 and the piston operating device 31 is provided. The advance / retreat range of the piston 30 by the piston operating device 31 is branched by exiting from the branch space 16a from the volume reduction position X that enters the branch space 16a and decreases the volume of the coating liquid filling space in the branch space 16a. Up to the volume increase position Y (see FIG. 4) where the volume of the coating liquid filling space in the space 16a is increased.

  By the way, as a coating condition, the length dimension Ga (dimension from the end Cb to the start end Ct of the adjacent coating areas C and C) of the non-coating area G formed on the substrate W shown in FIG. When the relative movement speed of the substrate W and the die D is increased, the valve body 18 is rapidly advanced and retracted, and the stop and supply of the coating liquid M from the valve device 17 to the die D are instantaneously performed. There is a need to do. However, the valve device 17 opens the valve body 18 from the valve closing position B (see FIG. 5) in order to resume the supply of the coating liquid M to the die D (hereinafter referred to as “coating restart”). Until the valve closing end position H2, which is a position immediately before the position A (see FIG. 2) is rapidly advanced (arrow d) to escape the end face 18b from the branch space 16a, the inside of the branch space 16a is reached. The volume of the coating liquid filling space is rapidly reduced. At this time, when the amount of decrease in the volume of the coating liquid filling space in the branch space 16a per unit time is larger than the flow rate of the coating liquid M supplied from the pumping means 12 into the branch space 16a, The pressure of the coating liquid M in the branch space 16a is rapidly reduced. Further, even when the valve device 17 reaches the valve opening end position A (see FIG. 2) through the valve closing end position H2, the coating liquid M adjacent to the valve body 18 in the branch space 16a is liquid viscosity. In addition to the rapid decrease in the pressure of the coating liquid M, even if the valve is opened, the coating liquid M at a predetermined flow rate cannot be supplied to the die D immediately after the valve is opened. This causes a problem that a predetermined coating thickness cannot be obtained on the Ct side. The coating device 11 of the present invention includes the volume adjusting device 28, thereby preventing a rapid decrease in the volume of the coating liquid filling space in the branch space 16a at the time of resuming coating, and a valve body in the branch space 16a. This is because the coating liquid M adjacent to the valve body 18 is pushed into the gap between the valve body 18 and the valve seat 19 during valve opening (that is, moving toward the valve opening end position A via the valve closing end position H2). I'm trying to solve the problem.

  Similar to the valve seat 19, the outer fitting portion 29 is an O-ring fitted in an annular groove (not shown) provided in the casing 16 or an annular seal made of the Rotobari seal (registered trademark), or the casing 16. And a short cylinder portion formed in a predetermined position integrally or separately.

  As shown in FIGS. 2A and 2B, the piston 30 is attached to the connecting rod 34 by a fastener 26 such as a nut detachably fitted to one end 34a of the connecting rod 34 penetrating the solid portion 30a. In addition to joining, a plurality of concave grooves 30b are provided on the outer peripheral surface of the solid portion 30a along the piston moving direction (the direction of the arrow k in FIG. 4 and the direction of the arrow j in FIG. 5). The solid portion 30a is slidably fitted inside, so that a liquid passage 30c is formed between the outer fitting portion 29 and the concave groove 30b. Although not shown, the piston 30 is externally fitted so as to form an annular liquid passage 30c between the outer peripheral surface of the cylindrical solid part 30a and the external fitting part 29 without providing the concave groove 30b. The part 29 may be fitted in a gap fit state. The connecting rod 34 penetrates the casing 16 through the seal 25 and reaches the piston operating device 31.

  As shown in FIGS. 6 (A) and 6 (B) and FIGS. 7 (A) and 7 (B), the piston 30 has an appropriate number of concave grooves 30b in the position close to the branch space in order to have a flow rate adjusting function. The depth dimension t in the radial direction of the region 30b-1 (see FIG. 7A) is made constant, and the radial depth dimension t of the return side space side region 30b-2 is set to the return side space 16c. It is formed to become smaller as it goes. When the volume adjusting device 28 is in a coating state in which the valve element 18 of the valve device 17 is positioned at the valve opening end position A, as shown in FIG. 6A, the coating liquid in the branch space 16a. By adjusting the volume reduction position X of the piston 30 so that the pressure of M becomes an optimum value for coating, the passage resistance of the liquid passing portion 30c formed by the piston 30 and the minimum inner diameter portion 29s of the outer fitting portion 29 is adjusted. Can be set to an optimum value.

  As shown in FIG. 4, the volume adjusting device 28 always forms a liquid passage 30 c between the outer fitting portion 29 and the piston 30, so that the volume adjusting device 28 is supplied from the pressure feeding means 12 into the branch space 16 a of the casing 16. Unnecessary coating liquid M that is not used for coating in the coming coating liquid M can be returned to the reflux side space 16c via the liquid passage 30c. If the supply flow rate of the coating liquid M supplied from the pumping means 12 into the branch space 16a of the casing 16 exceeds the flow rate that can be returned to the return path 15 via the liquid passage 30c, the excess flow rate is increased. The flow rate adjustment valve 37 of the escape path 38 may be adjusted in advance so that it can be returned to the tank T (see FIG. 1) via the escape path 38. When the supply flow rate of the coating liquid M from the pressure feeding means 12 does not exceed the flow rate that can be returned to the reflux path 15 via the liquid passage 30c, it is not necessary to provide the escape path 38. At this time, a pressure control valve (not shown) is provided on the inlet side of the reflux path 15, and the difference between the detected pressure value of the pressure gauge PG1 that detects the pressure in the branch space 16a and the set pressure value set by the setting device is reduced. It is preferable to operate the pressure control valve so that the pressure of the coating liquid M in the branch space 16a becomes the set pressure value.

  Although not shown, the power transmission mechanism 33 is connected to a pinion gear joined to an output shaft of an electric servo motor as a drive source 32 and a connecting rod 34, similarly to the power transmission mechanism 23 of the valve element operating device 21. A gear mechanism that combines a rack gear that is coupled and meshed with a pinion gear that is slidable in the piston advance and retreat direction, a crank that is joined to the output shaft of an electric servo motor that is a drive source 32, and a connecting rod 34 A link mechanism or the like having very little play is used, which is a combination of a slider that is connected and slidable in the piston advance / retreat direction, and a connecting shaft that connects the crank and the slider with a rotating chain.

  The piston operating device 31 is provided between a drive source 32 composed of an electric servo motor capable of positioning control and speed control, and between the drive source 32 and the connecting rod 34, and the rotational force of the electric servo motor as the drive source 22 is obtained. A power transmission mechanism 33 that transmits to the connecting rod 34 to move the piston 30 forward and backward and a control device 36 that issues a control command to the drive source 32 are provided. The piston operating device 31 shares the control device 36 with the valve body operating device 21, and is controlled in conjunction with the valve body operating device 21. As shown in FIG. 5, the piston operating device 31 moves forward (arrow d) from the valve closing end position B indicated by a two-dot chain line toward the valve opening end position A (see FIG. 2). At the appropriate time, the piston 30 is moved forward (arrow j) toward the branch space 16a, and the valve element 18 is closed at the valve opening end position A shown in FIG. 2 (A) or shown by a two-dot chain line in FIG. The piston 30 is returned to the reflux path side space 16c at an appropriate time when the valve body 18 is retreated from the start position H1 toward the valve closing end position B (an arrow e) and / or at an appropriate time when the valve body 18 is stopped at the valve closing end position B. It is designed to move backward (arrow k).

  The piston operating device 31 activates the piston 30 as shown in FIGS. 8A and 8B by speed control of an electric servo motor which is a drive source 32 that has received a control command issued by the control device 36. When moving forward from the volume increase position Y, which is the position, to the volume decrease position X, which is the stop position, each elapsed time from the start in the forward movement time period from the start to the stop, and the forward movement path from the start to the stop The relationship between the passage positions of the pistons 30 in each of the pistons can be changed, and the relationship between each elapsed time and each passage position can be arbitrarily set. The piston operating device 31 can set the moving speed at each passing position of the piston 30 to an optimum value according to the conditions at the time of coating (for example, the moving speed of the valve body 18 and the viscosity of the coating liquid M). Thus, as shown in FIG. 5, the rapid decrease of the volume of the coating liquid filling space in the branch space 16a due to the advance of the valve body 18 at the time of resuming the coating is prevented and the illustration is omitted. Thus, the coating liquid M adjacent to the valve body 18 is caused to flow so as to be pushed out into the gap between the valve body 18 and the valve seat 19 being opened, and the start end Ct side (see FIG. 1) in the coating area C is in a good state. Can be formed. The optimum value of the moving speed of the piston 30 according to the coating conditions may be obtained in advance by performing a coating test.

  Further, the piston operating device 31 moves the piston 30 forward (arrow j) from the volume increasing position Y (see FIG. 4) to the volume decreasing position X (see FIG. 2) when recoating is resumed. Is made the same as the moving dimension for advancing the valve body 18 from the valve closing end position B (see FIG. 5) to the valve opening end position A (see FIG. 2 (A)). The volume increasing position Y and / or the volume decreasing position X can be changed to an arbitrary position so as to have a dimension different from the moving dimension of In some cases, the amount that can be reduced can be changed. Moreover, the operating device 31 for pistons can change the starting time and stopping time of the piston 30 at the time of resuming coating to any arbitrary time other than matching the starting time and stopping time of the valve body 18. The forward movement dimension, start time, and stop time of the piston 30 may need to be changed depending on the viscosity of the coating liquid M and the flow rate of the coating liquid M supplied to the die D. It is advisable to obtain an optimum dimension and time by conducting a coating test in advance.

  Further, the valve element operating device 21 retreats the piston 30 from the volume decreasing position X, which is the starting position, toward the volume increasing position Y, which is the stopping position, by controlling the speed of the electric servo motor that is the driving source 22 (FIG. 4), the relationship between each elapsed time from the start in the reverse movement time from the start to the stop and each passing position of the piston 30 in the reverse movement path from the start to the stop can be changed. The relationship between each elapsed time and each passing position can be arbitrarily set.

  Further, when the piston operating device 31 stops supplying the coating liquid M to the die D (hereinafter referred to as “coating stop”), the piston 30 is moved from the volume decreasing position X to the volume increasing position Y. The movement dimension for moving backward (arrow k) is the same as the movement dimension for moving the valve element 18 from the valve opening end position A to the valve closing end position B. In some cases, the volume decreasing position X and / or the volume increasing position Y can be changed to an arbitrary position so as to have a dimension different from the dimension. The piston operating device 31 can change the start time and stop time of the piston 30 for suspension of coating to any different time other than matching the start time and stop time of the valve body 18. . About the starting time for the coating suspension of the piston 30 and the retreating speed, the coating liquid M (from the die discharge port Da to the terminal Cb in the coating area C of the substrate W is shown in FIG. ), The portion surrounded by the broken line E) is smoothly sucked into the die D so that the terminal Cb side can be formed in a good state. Since changes may be necessary depending on conditions such as the flow rate of the coating liquid M discharged from the die discharge port Da, an optimal time and speed may be obtained in advance by performing a coating test.

  As a mode of operation of the piston operating device 31, as shown in FIG. 8A, a time zone in which the valve body 18 is advanced from the valve closing end position B to the valve opening end position A to resume coating. The piston 30 is advanced from the volume increase position Y to the volume decrease position X in parallel with the advancement of the valve body 18 (time zone of the forward movement time U), and the valve body 18 is opened to stop coating. Of the time zone for retreating from the position A to the valve closing end position B (time zone for the backward movement time S), the time zone for retreating to the valve closing end position B via the valve closing start position H1 (of the coating pause time zone R) In the initial region Ra), the piston 30 may be retracted from the volume decrease position X to the volume increase position Y in parallel with the retraction of the valve body 18. The retraction of the piston 30 is completed after the valve body 18 is retreated toward the valve closing end position B through the valve closing start position H1 and before the late period Rc of the coating suspension time period R. In this way, it is possible to reduce the reverse speed.

  As another mode of the operation of the piston operating device 31, as shown in FIG. 8B, the time required to advance the valve body 18 from the valve closing end position B to the valve opening end position A to resume coating. Parallel to the advancement of the valve element 18 in the time zone (the initial zone Qa of the coating time zone Q) of the belt (the time zone of the forward movement time U) to advance to the valve opening end position A via the valve closing end position H2. Then, the piston 30 is advanced from the volume increasing position Y to the volume decreasing position X, and the valve body 18 is retracted from the valve opening end position A to the valve closing end position B for the suspension of coating (reverse movement time S). In the time zone until the valve closing start position H1 (the end zone Qc of the coating time zone Q), the piston 30 is activated and moved forward toward the branch space 16a. The valve body 18 starts to close from the valve opening end position A by increasing the pressure of the coating liquid M. The coating area C of the base material W is prevented by preventing a decrease in the amount of the coating liquid M to be supplied to the die D through the valve device 17 whose opening degree F gradually decreases when reaching the apparatus H1. The coating thickness of the terminal Cb is ensured, and the piston 30 is moved backward to the volume increasing position Y after the valve element 18 has passed the valve closing start position H1. Note that the positional relationship between the valve closing start position H1 and the valve closing end position H2 differs depending on the structure of the valve seat 19 as shown in FIGS. 8A and 8B. Alternatively, the valve closing start position H1 may be reversed such that the valve closing start position H1 is located on the valve closing position B side and the valve closing end position H2 is located on the valve opening position A side.

  The control device 36 is capable of positioning control and speed control of the electric servo motor of the drive source 22 capable of positioning control and speed control of the valve body operating device 21 of the valve device 17 and the piston operating device 31 of the volume adjusting device 28. A command is given to the electric servo motor of the drive source 32. With respect to the drive source 22 of the valve device 17, the control device 36 has the opening F of the valve body 18 at the valve opening end position A and the suction movement dimension L1 and the pressing movement dimension L2 of the valve body 18 at the valve closing end position B. The circuit is configured so that the set value can be changed according to the coating conditions, and each elapsed time from the start of the valve body 18 between the valve opening end position A and the valve closing end position B, and the valve opening end position A circuit is configured so that the relationship between the passage position of the valve element 18 from A to the valve closing end position B is arbitrarily set, and the moving speed of the valve element 18 at each passage position can correspond to the coating conditions. ing. Further, the control device 36 is configured to be able to change the volume increase position Y and / or the volume decrease position X, which is the stop position of the piston 30, with respect to the drive source 32 of the volume adjusting device 28, and to an arbitrary position, The relation between each elapsed time from the start of the piston 30 between the volume decrease position X and the volume increase position Y and each passage position of the piston 30 between the volume decrease position X and the volume increase position Y is arbitrarily set. Then, the circuit is configured so that the moving speed of each passage position of the piston 30 can correspond to the coating conditions. Further, the control device 36 links the start / stop of the valve body 18 of the valve device 17 and the start / stop of the piston 30 of the volume adjusting device 28 so that the valve body 18 is moved from the valve closing end position B to the valve opening end position A. The piston 30 is moved forward toward the branch space 16a at an appropriate time when moving forward, and the valve body 18 moves backward from the valve opening end position A toward the valve closing end position B via the valve closing start position H1. At the appropriate timing when the valve body 18 is moved back from the valve closing start position H1 toward the valve closing end position B and / or when the valve body 18 is stopped at the valve closing end position B. The circuit is configured to retract 30 toward the reflux path 15 side.

  In the intermittent coating apparatus 11 according to the present embodiment configured as described above, the control device 36 controls the drive source 22 of the valve element operating device 21 and the drive source 32 of the volume adjusting device 28, and FIG. As shown, a coating time zone Q (see FIG. 8) in which the coating liquid M is discharged from the discharge port Da of the die D to the substrate W to form the coating area C, and the coating liquid M is not discharged. Coating rest time zones R (see FIG. 8) for forming the non-coating area G are alternately formed. The coating liquid M pumped from the pumping means 12 to the branch space 16a of the casing 16 of the intermittent supply device 14 is advanced to the valve opening end position A by the valve body operating device 21 as shown in FIG. In the coating time zone Q (see FIG. 8), the gap between the valve element 18 and the valve seat 19 (opening F), the die-side space 16b, and the die D are discharged to the substrate W from the die discharge port Da. In contrast, in the coating suspension time zone R in which the valve element 18 is retracted to the valve closing end position B (see FIG. 4) by the valve element device 21, the supply to the die D is stopped.

  Then, as shown in FIG. 5, when the valve element 18 moves forward (arrow d) from the valve closing end position B indicated by a two-dot chain line to the valve opening end position A shown in FIG. In the final region Rc of the coating suspension time zone R (see FIG. 8) in which the body 18 moves from the valve closing end position B by the movement dimension L2 for extrusion to the valve closing end position H2, the die side space under the valve closing condition By reducing the coating liquid filling volume in 16b, the stopped coating liquid M remaining in the die side space 16b is pumped in the direction of the arrow f in the liquid feeding path 13a. It is extruded into the inside and ready for coating. Subsequently, in the initial region Qa of the coating time zone Q (see FIG. 8) in which the valve body 18 further advances (arrow d) through the valve closing end position H2 and reaches the valve opening end position A (see FIG. 2). The coating liquid M pumped from the pumping means 12 to the branch space 16a is discharged from the die discharge port Da through the gap (opening F) between the valve body 18 and the valve seat 19 and the die side space 16b. The base W is formed near the start end Ct of the coating area C. At this time, the coating liquid M in the branch space 16a attempts to reduce the liquid pressure as a part of the valve body 18 that moves forward moves away from the branch space 16a, but the forward movement time of the valve body 18 is increased. The piston 30 of the volume adjusting device 28 is moved from the volume increasing position Y to the volume decreasing position X during the time U (the sum of the final area Rc of the coating suspension time period R and the initial area Qa of the coating time period Q shown in FIG. 8). The pressure fluctuation can be reduced by moving forward (arrow j) to increase the liquid pressure while part of the piston 30 enters the branch space 16a. Further, the volume adjusting device 28 has a pressure value suitable for forming the start pressure Ct of the coating area C with the liquid pressure of the coating liquid M in the die side space 16b in the initial area Qa of the coating time zone Q. Thus, by setting the entry speed and the entry dimension of the piston 30 into the branch space 16a, the coating liquid M in the branch space 16a is optimally applied to the die D via the valve device 18 that is being opened. Can be pumped. In the continuation region Qb of the coating time zone Q in which the valve element 18 that has stopped reaching the valve opening end position A (see FIG. 2) is continuously opened, the coating region C is formed on the substrate W.

  Conversely, when the valve body 18 shown in FIG. 2 is closed (arrow e) from the valve opening end position A to the valve closing end position B shown in FIG. 8), after the valve body 18 has been rapidly retracted, the valve body 18 is subsequently retracted by the suction movement dimension L1 from the valve closing start position H1 shown in FIG. In the initial region Ra of the coating suspension time zone R leading to B, the coating liquid filling volume in the die-side space 16b under the valve closing state is increased, and the coating remaining on the die D immediately after the coating suspension. Coating that passes from the discharge port Da of the die D to the end Cb of the coating area C by passing the liquid M through the liquid feeding path 13a in the direction of the arrow g and sucking it toward the die side space 16b. The liquid M (the portion surrounded by the broken line E in FIG. 1C) is sucked into the inside of the die D, and the whole of the die discharge port Da in the width direction is sucked. Over the solution break good to the end Cb of the coating zone C can be formed sharply so that the straight line along the longitudinal direction of the discharge port Da (transverse to the substrate W).

  Since the intermittent coating apparatus 11 of the present invention can supply the coating liquid pumped from the pumping means 12 to the branch space 16a by always increasing the excess flow rate of refluxing to the reflux path 15, it can be supplied more than the flow rate required for coating. It becomes possible to always increase the coating liquid pressure in the branch space 16a through which a large amount of flow passes, and the valve body 18 further advances from the valve closing end position H2 (FIG. 5) to the valve opening end position A (see FIG. 2). In this case, the coating liquid M can be quickly supplied from the branch space 16a having a high coating liquid pressure to the die D through the die side space 16b.

  The intermittent coating device 11 of the present invention has a simple configuration in which one valve element 18 of the valve device 17 is advanced and retracted from the valve opening end position A to the valve closing end position B by the valve element operating device 21. The initial period Qa of the coating time zone Q for discharging the coating liquid M from the die discharge port Da and the operation in the final period Rc of the coating pause time zone R that is a preparation for forming the start edge Ct of the coating zone C in W , The operation in the continuous region Qb of the coating time zone Q in which the coating liquid M is continuously discharged from the die discharge port Da to form the coating region C of the substrate W, and the coating on the substrate W The operation of the end Qc of the coating time zone Q in which the discharge of the coating liquid M from the die discharge port Da is stopped to form the end Cb of the work area C and the discharging coating liquid M inside the die D In order to form the initial region Ra of the coating suspension time zone R to be sucked into the substrate and the non-coating region G of the substrate W, coating from the die discharge port Da is performed. Since the operation of the continuation region Rb of the coating suspension time zone R for stopping the discharge of the liquid M can be continuously repeated, the device structure can be simplified and the timing of these operations can be easily adjusted. Have Further, the intermittent coating apparatus 11 of the present invention advances the pressure of the coating liquid M in the branch space 16a in the initial area Qa of the coating time zone Q that forms the start end Ct of the coating area C. Since an appropriate pressure value can be obtained by the piston 30 to be applied, coating in the initial region Qa of the coating time zone Q can be performed smoothly.

(Second Embodiment)
9 and 10 are partial cross-sectional views showing an intermittent supply device 47 according to the second embodiment of the intermittent coating device 11 of the present invention, and FIG. 9 shows that the valve body 48 is located at the valve opening end position A. FIG. 10A shows a mode in which the valve body 48 is retracted from the valve closing start position H1 to the valve closing end position B, and FIG. 10B shows a mode in which the valve body 48 is closed. The mode which has advanced from the end position B to the valve closing end position H2 is shown.

  In the intermittent coating apparatus 11 of the present invention according to the present embodiment, the valve device 47 is significantly different from the valve device 17 of the first embodiment, and the volume adjusting device 28 not shown is the same as that of the first embodiment. 9 and 10, the same reference numerals as those in FIGS. 1 to 8 showing the first embodiment in FIG. 9 and FIG. 10 indicate corresponding parts.

  The valve device 47 includes a valve seat 49 provided at the boundary between the branch space 16a of the casing 16 and the die side space 16b, a valve body 48, and a valve body operating device 21 for moving the valve body 48 back and forth. The valve body 48 has an O-ring formed in a short cylindrical main body portion 48a, a water passage portion 48c extending from the short cylindrical portion 48a to the branch space 16a, and an annular groove recessed in the outer peripheral surface of the main body portion 48a. Or an annular seal portion 48h, and the outer diameter dimension of the water passage portion 48c is reduced as it goes toward the branch space 16a. When the valve is opened, a liquid passage having a small water passage resistance is formed between the water passage portion 48c and the valve seat 49. The valve seat 49 is formed in a ring shape projecting from the inner peripheral surface 16d of the casing 16 so that the annular seal portion 48h of the valve body 48 can be fitted into the circular through hole 49a formed inside without leaking. is there.

  The valve element operating device 21 pushes and pulls the valve rod 24 joined to the valve element 48 so that the valve element 48 starts to close the valve indicated by a two-dot chain line as shown in FIG. While the valve H is in the closed state, the valve can move backward by the suction movement dimension L1 (moving to the arrow e) from the valve closing end position B indicated by the solid line, as shown in FIG. Extrusion forward movement (movement to the arrow d) can be performed from the valve closing end position B indicated by the dotted line to the valve closing end position H2 indicated by the solid line while the valve is closed. The valve closing start position H1 and the valve closing end position H2 may be different positions or the same position depending on the structure of the annular seal portion 48h of the valve body 48.

(Third embodiment)
11 to 15 show an intermittent supply device 57 according to a third embodiment of the intermittent coating device 11 of the present invention.

  In the intermittent coating apparatus 11 of the present invention according to the present embodiment, the valve device 57 is significantly different from that of the first embodiment, and the volume adjusting device 28 that is not shown is substantially the same as that of the first embodiment. 11 to 15, the same reference numerals as those shown in FIGS. 1 to 8 showing the first embodiment denote the corresponding parts.

  The valve device 57 includes an annular valve seat 19 provided at a boundary between the branch space 16a of the casing 16 and the die side space 16b, a valve body 58, and a valve body operating device 21 for moving the valve body 58 forward and backward. As shown in FIG. 12 (A), the advancing / retreating range of the body 58 is set to the suction movement dimension L1 from the valve closing start position H1 indicated by the two-dot chain line to the valve closing end position B indicated by the solid line while being closed. As shown in FIG. 5B, the valve closing end position H2 indicated by the solid line while being closed from the valve closing end position B indicated by the two-dot chain line is possible. The extruding advancement (movement to the arrow d) can be performed by the extruding movement dimension L2. Depending on the structure of the valve seat 19, the valve closing start position H1 and the valve closing end position H2 may be different positions or the same position.

  As in the first embodiment, the valve seat 19 is formed by an annular seal attached to the casing 16, for example, from an O-ring fitted into an annular groove (not shown) recessed in the casing 16. Can be used as an annular seal.

  The valve body 58 is formed by connecting a valve closing stroke region 58b near the die side space 16b and a valve opening stroke region 58d near the branching space 16a, and the valve seat 19 is entirely in contact with the valve closing stroke region 58b. The outer peripheral surface 58a can be formed, and a plurality of liquid passing portions 58c that can open and communicate with the die side space 16b and the branch space 16a without contacting the valve seat 19 are provided in the valve opening stroke region 58d. ing. The outer peripheral surface 58a of the valve closing stroke region 58b has dimensions sufficient to ensure the suction moving dimension L1 and the pushing moving dimension L2 along the advancing / retreating direction of the valve body 58. As the valve body 58 moves forward toward the die side space 16b, the plurality of liquid passing portions 58c pass through all the liquid passing portions 58c from the branch space 16a and flow into the die side space 16b. The flow rate is formed so as to increase.

  As shown in FIG. 13, the valve opening stroke region 58d of the valve body 58 is composed of a plurality of liquid passing portion forming leg portions 58e extending at equal intervals from the valve closing stroke region 58b, and adjacent leg portions 58e. , 58e is formed between the legs 58e, 58e... And the hollow space 58f is formed on the inner side surrounded by the legs 58e, 58e. Has been. When the valve body 58 is in the flow rate adjustment state shown in FIG. 11, the arc-shaped outer surface of each liquid passage forming leg 58 e abuts the valve seat 19, and the opened liquid passage 58 c has the valve seat 19. It does not come into contact with. The valve body 58 in the flow rate adjustment state passes the coating liquid M pressure-fed to the branch space 16a through the inner hollow portion 58f (see FIG. 13) and the portion that opens to the die side space 16b in each liquid passing portion 58c. Then, it can be guided to the die side space 16b and supplied to the die D. The valve body 58 moves forward (arrow d) in the direction toward the die side space 16b and passes through the valve opening stroke region 58d as the opening area of each liquid passing portion 58c opening in the die side space 16b increases. The flow rate of the coating liquid to be increased can be increased.

  As shown in FIG. 14, each fluid passing portion 58c formed in the valve opening stroke region 58d of the valve body 58 is recessed in a part of the outer peripheral surface 58a extending from the valve closing stroke region 58b, and is directed toward the branch space 16a. The depth dimension h in the radial direction can be increased as the distance increases. Further, as shown in FIG. 15, each fluid passing portion 58c formed in the valve opening stroke region 58d of the valve body 58 has a frustoconical shape so that the radius of the outer peripheral surface becomes smaller toward the branch space 16a side. It is also possible to form it.

  As shown in FIG. 11, the valve device 57 is applied as it advances (arrow d) in the direction toward the die-side space 16b with the valve seat 19 facing the valve-closing stroke region 58b. Since the flow rate of the working fluid can be increased, it is formed on the substrate W by changing the valve opening end position A which is the stop position of the valve body 58 and adjusting the flow rate of the coating fluid supplied to the die D. The coating film thickness of the coating area C to be applied can be set to an optimum value.

(Fourth embodiment)
FIG. 16 thru | or FIG. 19 shows this invention coating apparatus 61 which concerns on 4th Embodiment. The coating device 61 of the present invention according to the present embodiment is the first embodiment in that the valve body 18 of the valve device 17 and the piston 30 of the volume adjusting device 28 are arranged in series so as to face each other. 1 to 8) is significantly different from the coating apparatus 11 of the present invention in which the valve body 18 and the piston 30 are arranged in parallel, and other parts are substantially the same as those of the first embodiment. In FIG. 16 to FIG. 19, the same reference numerals as those in FIG. 1 to FIG. 8 showing the first embodiment denote corresponding parts.

  As shown in FIG. 17, the intermittent supply device 14 has a die side space 16b and a reflux side space 16c formed inside a long cylindrical casing 16 so as to face each other through an intermediate branch space 16a. Further, the branching space 16a is communicated with the pressure feeding means 12 and the escape path 38 at substantially the middle thereof. Since the configuration and operation of the valve device 17 and the volume adjusting device 28 of the intermittent supply device 14 are substantially the same as those in the first embodiment, description thereof is omitted here.

  The coating device 61 of the present invention arranges the valve body 18 and the piston 30 in series by opposing the valve body 18 of the valve device 17 and the piston 30 of the volume adjusting device 28 via the branch space 16a. The piston 30 is moved forward toward the branch space 16a, and the pressure of the coating liquid M in the branch space 16a is instantaneously increased to the valve device 17 to apply the coating liquid in the branch space 16a. M can be pumped at an optimal flow rate to the die D through the valve device 18 that is open.

(Fifth embodiment)
20 to 26 show a coating apparatus 71 of the present invention according to a fifth embodiment. The coating device 71 of the present invention according to the present embodiment does not have the on-off valve function of the first embodiment (FIGS. 1 to 8) in that the volume adjusting device 78 has an on-off valve function. It differs greatly from the coating apparatus 11 of the present invention provided with the volume adjusting device 28, and the other parts are substantially the same as those of the first embodiment, and the first embodiment is shown in FIGS. The same reference numerals as those shown in FIGS. 1 to 8 denote corresponding parts.

  The coating apparatus 71 of the present invention according to the present embodiment gives the volume adjusting device 78 an on-off valve function, so that the coating liquid M pumped from the pumping means 12 to the branch space 16a can be applied in the coating time zone. As shown in FIG. 21, the pressure is fed to the die D through the valve device 17 which is opened, and the valve closing stroke region 75b of the piston 75 of the volume adjusting device 78 is fitted into the outer fitting portion 76 without liquid leakage. In the coating suspension time zone, the valve device 17 that is opened as shown in FIG. 25 stops the pumping to the die D and the piston of the volume adjusting device 78. The valve opening stroke region 75d of 75 is returned to the reflux passage 15 through a liquid passage 75c formed facing the outer fitting portion 76. The coating apparatus 71 of the present invention can make the flow rate of the coating liquid M pumped from the pumping means 12 to the branch space 16a equal to or slightly larger than the flow rate required for coating in the coating time zone, This is suitable when it is desired to suppress the flow rate returning from the branch space 16a to the reflux path 15 and the escape path 38 from the characteristics of the pressure feeding means 12 and the coating liquid M. If the escape path 38 is not provided, the flow rate of the coating liquid M to be pumped from the pumping means 12 to the branch space 16a can be made equal to the flow rate required for coating in the coating time zone, This can be met when it is desired to suppress the flow rate returned to the reflux path 15 to the limit.

  In addition, as for this invention coating apparatus 71 which concerns on this Embodiment, the flow volume of the coating liquid M pumped from the pumping means 12 to the branched space 16a may be larger than the flow volume required for coating of a coating time slot | zone. In consideration of this, an escape passage 38 having a flow rate adjusting valve 37 may be provided between the intermittent supply device 74 and the pressure feeding means 12 as necessary. The escape path 38 is for guiding the unnecessary coating liquid M generated during the coating coating time zone to the tank T or the like.

  The intermittent coating apparatus 71 of the present invention includes a die D that discharges the coating liquid M that has been fed from the discharge port Da to the substrate W, a pressure feeding unit 12 that pumps the coating liquid M, a die D, and a pressure feeding unit 12. And an intermittent supply device 74 that intermittently supplies the coating liquid M to the die D and returns the unnecessary coating liquid M that is not supplied to the die D to the reflux path 15. The die D and the pressure feeding means 12 are substantially the same as the die D and the pressure feeding means 12 of the first embodiment.

  As shown in FIG. 21, the intermittent supply device 74 includes a casing 16, a valve device 17, and a volume adjustment device 78. A die side space 16b that can communicate with the die D and communicate with the die D and a reflux side space 16c that communicates with the branch space 16a and communicates with the reflux path 15 are formed. The casing 16, the valve device 17 and the escape passage 38 are substantially the same as the casing 16, the valve device 17 and the escape passage 38 of the first embodiment.

  As shown in FIG. 21A, the volume adjusting device 78 is used for adjusting the volume of the branch space 16a, and includes an outer fitting portion 76 provided between the branch space 16a and the reflux path 15, and an outer fitting. The piston operating device 31 is provided with a piston 75 that is fitted in the portion 76 so as to be able to advance and retract, a piston operating device 31 that moves the piston 75, and a connecting rod 77 that connects the piston 75 and the piston operating device 31. The piston 75 advances and retreats from the volume decreasing position X where the piston 75 enters the branch space 16a and decreases the volume of the coating liquid filling space in the branch space 16a, and then moves out of the branch space 16a. Up to the volume increasing position Y (see FIG. 24) where the volume of the working liquid filling space is increased.

  As shown in FIGS. 21A to 21C, the piston 75 extends to the branch space 16a side and can form a fluid passage 75c with the outer fitting portion 76. A valve closing stroke region 75b that extends toward the space 16c and can be fitted into the outer fitting portion 76 without leaking is connected. In the piston 75, a valve opening stroke region 75d and a valve closing stroke region 75b are formed integrally or separately by cutting a solid bar or the like, and outer peripheral surfaces of the valve opening stroke region 75d and the valve closing stroke region 75b. 75a has the same outer diameter, and a plurality of grooves are provided on the outer peripheral surface 75a of the valve opening stroke region 75d along the piston advancing / retreating direction (arrows k and j shown in FIG. 24). Is formed. The piston 75 is a liquid passage 75c formed by slidably fitting the outer peripheral surface 75a of the valve opening stroke region 75d to the seal portion 76s of the outer fitting portion 76, and allows the branch space 16a and the reflux side space 16c to communicate with each other. Thus, the volume adjusting device 78 is opened, and the outer peripheral surface 75a of the valve closing stroke region 75d is slidably fitted into the seal portion 76s of the outer fitting portion 76, so that the branch space 16a and the reflux side space 16c can be slid. The volume adjusting device 78 is closed by disconnecting the communication.

  The piston operating device 31 is provided between a drive source 32 composed of an electric servo motor capable of positioning control and speed control, and between the drive source 32 and the connecting rod 34, and the rotational force of the electric servo motor as the drive source 22 is obtained. A power transmission mechanism 33 that transmits to the connecting rod 34 to move the piston 75 forward and backward, and a control device 73 (see FIG. 20) that issues a control command to the drive source 32 are provided. The drive source 32 and the power transmission mechanism 33 are substantially the same as the drive source 32 and the power transmission mechanism 33 of the first embodiment.

  The control device 73 issues a control command to the drive source 22 of the valve element operation device 21 and the drive source 32 of the piston operation device 31 so as to control the valve element operation device 21 and the piston operation device 31 in association with each other. It is something that is emitted. When the control device 73 advances the valve body 18 from the valve closing end position B toward the valve opening end position A, the solid line is drawn from the valve closing end position B indicated by the two-dot chain line as shown in FIG. When moving forward (arrow d) toward the valve closing end position H2 indicated by (2), the piston 75 is advanced (arrow j) from the volume increasing position Y indicated by the two-dot chain line toward the intermediate position N1 indicated by the solid line, Further, when the valve body 18 advances (arrow d) toward the valve opening end position A (see FIG. 22) past the valve closing end position H2, the piston 75 is moved to the intermediate position N2 (see FIG. 23) and closed. The end position N3 (see FIG. 22) is sequentially advanced toward the volume reduction position X (see FIG. 21) (arrow j). The piston 75 moves forward (arrow j) from the volume increase position Y to the closing end position N3 (see FIG. 22) so that the valve opening stroke region 75d of the piston 75 faces the seal portion 76s of the outer fitting portion 76. However, when it moves and reaches the closing end position N3, the branch space side end portion 75g of the valve closing stroke region 75b is made to face the seal portion 76s of the outer fitting portion 76. Further, the piston 75 moves the outer peripheral surface 75a of the valve closing stroke region 75b to the outer fitting portion during the period from the closing end position N3 to the volume reduction position X (see FIG. 21) as it moves forward (arrow j). It fits in the seal part 76s of 76 without liquid leakage.

  Further, when the control device 73 moves the valve body 18 backward (arrow e) from the valve opening end position A toward the valve closing end position B, the valve body 18 opens as shown in FIGS. While retreating (arrow e) in the state, the piston 75 is retreated (arrow k) toward the reflux path side space 16c while the valve closing stroke region 75b of the piston 75 faces the outer fitting portion 76. As shown in FIG. 24, the valve-opening stroke region 75d of the piston 75 is fitted to the outer fitting portion 76 in parallel with the valve body 18 retreating (arrow e) toward the valve-closing end position B in the valve-closed state. The piston 75 is moved backward (arrow k) toward the volume increasing position Y toward the reflux path side space 16c. As shown in FIG. 23, when the valve body 18 reaches the valve closing start position H1 in the middle of retreating, the coating liquid M is recirculated from the branch space 16a through the fluid passage 75c of the piston 75 located at the intermediate position N2. It is sent out to the side space 16c.

  The intermittent coating apparatus 71 according to the present embodiment configured as described above controls the drive source 22 of the valve body operating device 21 and the drive source 32 of the volume adjusting device 78 with the control device 73, as shown in FIG. As shown, a coating time zone Q (see FIG. 26) in which the coating liquid M is discharged from the discharge port Da of the die D to the substrate W to form the coating area C, and the coating liquid M is not discharged. Coating rest time zones R (see FIG. 26) for forming the non-coating area G are alternately formed. The coating liquid M pumped from the pumping means 12 to the branch space 16a of the casing 16 of the intermittent supply device 14 is advanced to the valve opening end position A by the valve operating device 21 as shown in FIG. In the coating time zone Q (see FIG. 26), the gap between the valve element 18 and the valve seat 19 (opening F), the die side space 16b and the die D are passed through the die discharge port Da and discharged to the substrate W. In contrast, in the coating suspension time zone R in which the valve element 18 is retracted to the valve closing end position B (see FIG. 24) by the valve element device 21, the supply to the die D is stopped.

  Then, as shown in FIG. 25, when the valve element 18 moves forward from the valve closing end position B indicated by a two-dot chain line (arrow d) to the valve opening end position A shown in FIG. In the final region Rc of the coating suspension time zone R (see FIG. 26) where the body 18 moves from the valve closing position B by the movement dimension L2 for extrusion and reaches the valve closing end position H2, the die side space under the valve closing condition. By reducing the coating liquid filling volume in 16b, the stopped coating liquid M remaining in the die side space 16b is extruded in the direction of the arrow f in the liquid feed path 13a, and the inside of the die D To prepare for coating. Subsequently, in the initial region Qa of the coating time zone Q in which the valve body 18 further advances (arrow d) past the valve closing end position H2 and reaches the valve opening end position A shown in FIG. The coating liquid M pumped to the branch space 16a passes through the gap (opening F) between the valve body 18 and the valve seat 19 and the die side space 16b and is discharged from the die discharge port Da to be applied to the substrate W. Form the working area C closer to the start edge Ct. The coating liquid M in the branch space 16a attempts to reduce the liquid pressure as part of the valve body 18 that moves forward (arrow d) retreats from the branch space 16a. During the time of U (the sum of the final region Rc of the coating suspension time zone R and the initial region Qa of the coating time zone Q shown in FIG. 26), the piston 75 of the volume adjusting device 78 has a volume increase position Y (see FIG. 25). Through the intermediate positions N1, N2 and the closing end position N3 in order to advance to the volume reduction position X (see FIG. 21) (arrow j), and the hydraulic pressure increases while a part of the piston 75 enters the branch space 16a. Thus, pressure fluctuation can be reduced. The volume adjusting device 78 is configured so that the liquid pressure of the coating liquid M in the die-side space 16b in the initial area Qa of the coating time zone Q becomes a pressure value suitable for forming the start end Ct of the coating area C. By setting the entry speed and the entry dimension of the piston 75 into the branch space 16a, the coating liquid M in the branch space 16a is pressure-fed in an optimal state to the die D through the valve device 18 being opened. be able to. In the continuation region Qb of the coating time zone Q in which the valve element 18 that has stopped reaching the valve opening end position A continues to be opened, the coating region C is formed on the substrate W.

  Conversely, during the valve closing operation in which the valve body 18 shown in FIG. 21 moves backward (arrow e) from the valve opening end position A to the valve closing end position B shown in FIG. 24, the coating time zone Q (FIG. 26), after the valve body 18 has been rapidly retracted in the final region Qc, the coating suspension time in which the valve body 18 continues to move from the valve closing start position H1 by the suction movement dimension L1 to the valve closing end position B. In the initial region Ra of the band R, the coating solution M filling volume in the die side space 16b is increased under the valve closing condition, and the coating solution M remaining in the die D immediately after the coating suspension is supplied to the liquid supply path. The coating liquid M (shown in FIG. 1) that passes from the discharge port Da of the die D to the terminal end Cb of the coating area C by passing through the inside of 13a in the direction of the arrow g and sucking toward the die side space 16b. (The portion surrounded by the broken line E in (C)) is sucked into the inside of the die D, and the entire area of the die discharge port Da in the width direction is sucked. The broken good to be formed sharp so as to end Cb of the coating region C becomes a straight line along the longitudinal direction of the discharge port Da (transverse direction of the base W).

  The intermittent coating device 71 of the present invention is similar to the intermittent coating device 11 of the first embodiment in that the valve element 18 of the valve device 17 is opened by the valve operating device 21 at the valve opening end position. The operation and coating of the final period Rc of the coating suspension time period R, which is a preparation for forming the starting end Ct of the coating area C on the substrate W, with a simple configuration for moving forward and backward from A to the valve closing end position B. In order to form an operation in the initial region Qa of the coating time zone Q in which the working liquid M is discharged from the die discharge port Da and a coating region C of the substrate W, the coating liquid M is continuously fed from the die discharge port Da. The operation of the continuation region Qb of the coating time zone Q to be discharged and the coating time zone in which the discharge of the coating liquid M from the die discharge port Da is stopped in order to form the end Cb of the coating region C on the substrate W. The operation of the final period Qc of Q and the operation of the initial region Ra of the coating suspension time period R in which the discharging coating liquid M is sucked into the die D; In order to form the non-coating area G of the substrate W, the operation of the continuous area Rb of the coating pause time period R in which the discharge of the coating liquid M from the die discharge port Da is stopped can be repeated continuously. As a result, the apparatus structure can be simplified and the timing of these operations can be easily adjusted. Further, the intermittent coating apparatus 71 of the present invention advances the pressure of the coating liquid M in the branch space 16a in the initial area Qa of the coating time zone Q that forms the start end Ct of the coating area C. Since an appropriate pressure value can be obtained by the piston 75, the coating in the initial region Qa of the coating time zone Q can be performed smoothly.

  The intermittent coating apparatus 71 of the present invention supplies the coating liquid M to be fed to the branch space 16a to the valve apparatus 17 without returning to the reflux path 15 when the valve body 18 is opened as shown in FIG. At the same time, as shown in FIG. 24, when the valve body 18 is in a closed state, it is returned to the reflux path 15 without being supplied to the valve device 17, so that it is possible to obtain a pumping flow rate equivalent to the flow rate required for coating. Therefore, it is possible to respond to the case where it is desired to suppress the flow rate returned to the reflux path 15.

(Sixth embodiment)
27 to 31 show a coating apparatus 81 according to the present invention according to a sixth embodiment. The coating apparatus 81 of the present invention according to the present embodiment is configured such that the piston 85 is slidable inside the outer fitting portion 86 provided in the opening portion 16e communicating the branch space 16a of the casing 16 and the outside of the casing 16 without leakage. At the same time, the branch body 16a of the first embodiment (FIGS. 1 to 8) is provided in that the valve body 18 of the valve device 17 and the piston 85 of the volume adjusting device 88 are arranged in series facing each other. The piston 30 is slidably fitted so as to form a liquid passage 30c in an outer fitting portion 29 provided between the valve 15 and the reflux path 15, and the valve body 18 and the piston 30 are arranged in parallel. It differs greatly from the invention coating apparatus 11, and other parts are substantially the same as those of the first embodiment, and are shown in FIGS. 1 to 8 showing the first embodiment in FIGS. The same reference numerals as the reference numerals indicate the corresponding parts That.

  The intermittent coating apparatus 81 of the present invention includes a die D that discharges the coating liquid M that has been fed from the discharge port Da to the substrate W, a pressure feeding unit 12 that pumps the coating liquid M, and a die D and a pressure feeding unit 12. And an intermittent supply device 84 that intermittently supplies the coating liquid M to the die D and returns the unnecessary coating liquid M that is not supplied to the die D to the reflux path 15. The die D and the pressure feeding means 12 are substantially the same as the die D and the pressure feeding means 12 of the first embodiment.

  As shown in FIG. 28, the intermittent supply device 84 includes a casing 16, a valve device 17, and a volume adjustment device 88. Inside the casing 16, a branch space 16 a communicating with the pressure feeding means 12 and the reflux path 15, and a branch space A die-side space 16b that can communicate with the die D and communicate with the die D is formed. A pressure control valve 82 is provided between the branch space 16a and the reflux path 15 as necessary, and the detected pressure value m of the pressure gauge PG1 that detects the pressure in the branch space 16a and the set pressure value set by the setting device. The pressure control valve 82 is operated so as to reduce the difference of n so that the pressure of the coating liquid M in the branch space 16a becomes a set pressure value. The valve device 17 is substantially the same as the valve device 17 of the first embodiment.

  As shown in FIG. 28, the volume adjusting device 88 is for adjusting the volume of the branch space 16a, and is an annular outer fitting portion provided in an opening 16e that communicates the branch space 16a of the casing 16 with the outside of the casing 16. 86, a piston 85 that is slidably fitted in the outer fitting portion 86 without leakage, a piston operating device 31 that moves the piston 85 back and forth, and a connecting rod 87 that connects the piston 85 and the piston operating device 31. And a branching range of the piston 85 by the piston operating device 31 is branched from a volume decreasing position X where a part of the piston 85 enters the branching space 16a to reduce the volume of the coating liquid filling space in the branching space 16a. Up to a volume increase position Y (see FIG. 30) where a part of the piston 85 is withdrawn from the space 16a to increase the volume of the coating liquid filling space in the branch space 16a. . As with the piston operating device 31 of the first embodiment, the piston operating device 31 includes a drive source 32 composed of an electric servomotor capable of positioning control and speed control, and between the drive source 32 and the connecting rod 34. And a power transmission mechanism 33 that transmits the rotational force of the electric servo motor that is the drive source 22 to the connecting rod 34 to move the piston 85 forward and backward, and a controller 83 that issues a control command to the drive source 32. Yes.

  Similar to the valve seat 19 of the first embodiment, the outer fitting portion 86 is an O-ring fitted in an annular groove (not shown) recessed in the casing 16 or the Rotobari seal (registered trademark). An annular seal is used.

  As shown in FIG. 28, the piston 85 is formed by cutting a solid bar material or the like, and is a fastener such as a nut that is detachably fitted to one end 87a of a connecting rod 87 that penetrates the solid portion. 26 is joined to the connecting rod 87. Although not shown, the volume adjusting device 88 is fitted with a seal such as an O-ring on the piston 85 and a seal such as an O-ring of the piston 85 on the inner peripheral surface of the outer fitting portion 86 formed in a cylindrical shape. It is also possible to configure so as to be slidably fitted without liquid leakage.

  The control device 83 is capable of positioning control and speed control of the electric servomotor of the drive source 22 capable of positioning control and speed control of the valve body operating device 21 of the valve device 17 and piston operating device 31 of the volume adjusting device 88. A command is given to the electric servo motor of the drive source 32. The control device 83 relates to the drive source 22 of the valve device 17, the opening F of the valve body 18 at the valve opening end position A, the moving dimension L1 for suction of the valve body 18 at the valve closing end position B (see FIG. 30), extrusion The circuit is configured so that the set value of the movement dimension L2 (see FIG. 31) can be changed according to the coating conditions, and from the start of the valve body 18 between the valve opening end position A and the valve closing end position B. Is arbitrarily set to each passing position of the valve body 18 between the valve opening end position A and the valve closing end position B, and the moving speed at each passing position of the valve body 18 is applied. The circuit is configured so as to cope with the construction conditions. The control device 83 is configured to change the volume increasing position Y and / or the volume decreasing position X, which is the stop position of the piston 85, to any position with respect to the drive source 32 of the volume adjusting device 88, and A relation between each elapsed time from the start of the piston 85 between the volume decrease position X and the volume increase position Y and each passage position of the piston 85 between the volume decrease position X and the volume increase position Y is arbitrarily set. The circuit is constructed so that the moving speed of each piston 85 at each passing position can correspond to the coating conditions. Further, the control device 83 links the start / stop of the valve body 18 of the valve device 17 and the start / stop of the piston 85 of the volume adjusting device 88 so that the valve body 18 is moved from the valve closing end position B to the valve opening end position A. The piston 85 is moved forward toward the branch space 16a at an appropriate time when moving forward, and the valve body 18 moves backward from the valve opening end position A to the valve closing end position B via the valve closing start position H1. The circuit is configured to retract the piston 85 toward the outside of the casing 16 at an appropriate time and / or when the valve body 18 is stopped at the valve closing end position B.

  The coating device 81 of the present invention can be configured such that the valve body 18 of the valve device 17 and the piston 85 of the volume adjusting device 88 are opposed to each other and arranged in series, thereby allowing the valve body 18 and the piston 85 to approach each other. The piston 85 is advanced toward the branch space 16a, and the pressure of the coating liquid M in the branch space 16a is instantaneously increased to the valve device 17 to open the coating liquid M in the branch space 16a. It becomes possible to pump to the die D in an optimum state via the valve device 18 inside. The coating device 81 according to the present invention has the valve body 18 and the piston 85 arranged in parallel as in the case where the valve body 18 and the piston 30 of the first embodiment (FIGS. 1 to 8) are arranged in parallel. It is also possible to arrange them in a shape.

  In the intermittent coating apparatus 81 according to the present embodiment configured as described above, the control device 83 controls the drive source 22 of the valve element operating device 21 and the drive source 32 of the volume adjusting device 88, as shown in FIG. As shown, a coating time zone Q (see FIG. 8, in which the coating liquid M is discharged from the discharge port Da of the die D to the substrate W to form a coating area C (however, FIG. 8A (B)). ) Is replaced with “position of the piston 85”), and the coating suspension time zone R in which the non-coating area G is formed without discharging the coating liquid M (see FIG. 8). Are alternately formed. As shown in FIG. 28, the coating liquid M pumped from the pumping means 12 to the branch space 16a of the casing 16 of the intermittent supply device 84 is advanced to the valve opening end position A by the valve operating device 21. In the coating time zone Q (see FIG. 8), the gap between the valve element 18 and the valve seat 19 (opening F), the die-side space 16b, and the die D are discharged to the substrate W from the die discharge port Da. On the contrary, in the coating suspension time zone R in which the valve element 18 is retracted to the valve closing end position B (see FIG. 30) by the valve element device 21, the supply to the die D is stopped.

  Then, as shown in FIG. 31, the valve body 18 is closed when the valve body 18 moves forward (arrow d) from the valve closing end position B to the valve opening end position A (see FIG. 28). In the final region Rc of the coating suspension time zone R (see FIG. 8) that moves from the valve end position B by the movement dimension L2 for extrusion to the valve closing end position H2, the coating in the die side space 16b under the valve closing state is performed. By reducing the working liquid filling volume, the coating liquid M in the stopped state remaining in the die side space 16b is extruded in the direction of the arrow f in the liquid feeding path 13a and supplied to the inside of the die D. The coating is ready. Subsequently, in the initial region Qa of the coating time zone Q in which the valve body 18 advances further (arrow d) past the valve closing end position H2 and reaches the valve opening end position A shown in FIG. The coating liquid M pumped to the branch space 16a passes through the gap (opening F) between the valve body 18 and the valve seat 19 and the die side space 16b and is discharged from the die discharge port Da to be applied to the substrate W. A portion closer to the start end Ct of the work area C is formed (see FIG. 27). The coating liquid M in the branch space 16a tries to reduce the liquid pressure as a part of the valve body 18 moving forward moves away from the branch space 16a, but the forward movement time U of the valve body 18 (FIG. The piston 85 of the volume adjusting device 88 advances from the volume increasing position Y to the volume decreasing position X during the time of the final period Rc of the coating suspension time zone R and the initial zone Qa of the coating time zone Q shown in FIG. Thus, the pressure fluctuation can be reduced by increasing and increasing the liquid pressure while part of the piston 85 enters the branch space 16a. The volume adjusting device 88 adjusts the liquid pressure of the coating liquid M in the die-side space 16b in the initial area Qa of the coating time zone Q to a pressure value suitable for forming the start end Ct of the coating area C. By setting the entry speed and the entry dimension of the piston 85 into the branch space 16a, the coating liquid M in the branch space 16a is pumped in an optimal state to the die D through the valve device 18 being opened. be able to. In the continuation region Qb of the coating time zone Q in which the valve element 18 that has stopped reaching the valve opening end position A (see FIG. 28) continues to open, the coating region C is formed on the substrate W.

  On the contrary, as shown in FIGS. 28 to 30, when the valve body 18 is closed (arrow e) from the valve opening end position A to the valve closing end position B, the coating time zone Q ( After the valve body 18 is rapidly retracted in the final region Qc of FIG. 8), the valve body 18 continues to move from the valve closing start position H1 by the suction movement dimension L1 as shown in FIG. In the initial region Ra of the coating suspension time zone R leading to B, the coating liquid filling volume in the die-side space 16b is increased under the valve closing condition, and the coating remaining on the die D immediately after the coating suspension. The liquid M passes through the liquid supply path 13a in the direction of the arrow g (FIG. 30) and is sucked to the die side space 16b side, thereby exiting from the discharge port Da of the die D to the end Cb of the coating area C. The coating liquid M (the part surrounded by the broken line E in FIG. 1C) is sucked into the die D, and the die is discharged. And good solution break over the entire width of Da, formed sharp so as to end Cb of the coating region C becomes a straight line along the longitudinal direction of the discharge port Da (transverse direction of the base W).

  Since the intermittent coating apparatus 81 of the present invention can supply the coating liquid pumped from the pumping means 12 to the branch space 16a by always increasing the excess flow rate of refluxing to the reflux path 15, it can be supplied more than the flow rate required for coating. It becomes possible to always increase the coating liquid pressure in the branch space 16a through which a large amount of flow passes, and the valve body 18 further advances from the valve closing end position H2 (FIG. 31) to the valve opening end position A (see FIG. 28). In this case, the coating liquid M can be quickly supplied from the branch space 16a having a high coating liquid pressure to the die D through the die side space 16b.

  The intermittent coating device 81 of the present invention has a simple configuration in which one valve element 18 of the valve device 17 is advanced and retracted from the valve opening end position A to the valve closing end position B by the valve element operating device 21. The operation in the final period Rc of the coating suspension time zone R (see FIG. 8), which is a preparation for forming the start end Ct (see FIG. 27) of the coating area C in W, and the coating liquid M are discharged from the die discharge port Da. The operation of the initial region Qa of the coating time zone Q to be performed and the continuation region of the coating time zone Q in which the coating liquid M is continuously discharged from the die discharge port Da in order to form the coating region C of the substrate W The operation of Qb and the operation and discharge of the end Qc of the coating time zone Q in which the discharge of the coating liquid M from the die discharge port Da is stopped in order to form the terminal Cb of the coating area C on the substrate W. For forming the non-coating area G of the base material W and the operation of the initial area Ra of the coating pause time period R in which the coating liquid M is sucked into the die D Since the operation of the continuation region Rb of the coating suspension time period R for stopping the discharge of the coating liquid M from the die discharge port Da can be continuously repeated, the structure of the apparatus can be simplified and the timing of these operations can be simplified. It has an excellent effect that can be easily adjusted. Further, the intermittent coating apparatus 81 of the present invention advances the pressure of the coating liquid M in the branch space 16a in the initial area Qa of the coating time zone Q that forms the start end Ct of the coating area C. Since an appropriate pressure value can be obtained by the piston 85, the coating in the initial region Qa of the coating time zone Q can be performed smoothly.

(Seventh embodiment)
32 to 35 show a coating apparatus 91 of the present invention according to a seventh embodiment. The coating device 91 of the present invention according to the present embodiment is the first embodiment (FIG. 5) in that the valve body 18 of the valve device 17 and the piston 85 of the volume adjusting device 98 are connected and interlocked. 1 to 8) is greatly different from the coating apparatus 11 of the present invention in which the valve body 18 of the valve device 17 and the piston 30 of the volume adjusting device 28 are individually moved, and other parts are the same as those of the first embodiment. 32 to 35, the same reference numerals as those in FIGS. 1 to 8 showing the first embodiment in FIG. 32 to FIG. 35 denote corresponding parts.

  As shown in FIG. 33, the volume adjusting device 98 is for adjusting the volume of the branch space 16a, and is an annular outer fitting portion provided in an opening 16e that allows the branch space 16a of the casing 16 to communicate with the outside of the casing 16. 86 and a piston 85 that is slidably fitted in the outer fitting portion 86 without liquid leakage, and is connected 97 so that the valve body 18 of the valve device 17 and the piston 85 are interlocked, and the valve body 18 is shown in FIG. When the valve 85 is advanced (arrow d) from the valve closing end position B to the valve opening end position A (see FIG. 33), the piston 85 is advanced toward the branch space 16a, and the valve body 18 is opened. When retreating (arrow e) from the position A (see FIG. 33) toward the valve closing end position B shown in FIG. 35, the piston 85 is retreated toward the outside of the casing 16. Since the outer fitting portion 86 and the piston 85 are substantially the same as the outer fitting portion 86 and the piston 85 provided in the coating device 81 of the present invention according to the sixth embodiment, detailed description thereof is omitted.

  As shown in FIG. 33, the connection 97 between the valve body 18 of the valve device 17 and the piston 85 of the volume adjusting device 98 is provided with an extension 24b of the valve shaft 24 connecting the valve body operating device 21 and the valve body 18. A distance between the valve body 18 and the piston 85 is maintained by a destant pipe 99 that extends from the body 18 toward the piston 85 and is externally fitted to the extension 24b, and a nut is attached to one end 24a of the extension 24a that penetrates the piston 85. The valve body 18 and the piston 85 are joined to the valve shaft 24 by tightening the fastener 26 such as the above.

  As the mode of operation of the valve element operating device 21, the valve element 18 is operated in the same manner as in the first embodiment shown in FIG. 8A, and the valve element 18 is moved to the valve opening end position A and the valve closing end position. Advance to / from B. In the intermittent coating apparatus 91 according to the present embodiment, the control device 36 controls the drive source 22 of the valve body operating device 21 to apply the coating liquid M from the discharge port Da of the die D as shown in FIG. A coating time zone Q (see FIG. 8) for forming the coating area C by discharging to the substrate W, and a coating pause time zone R (for forming the non-coating area G without discharging the coating liquid M) 8) are alternately formed. As shown in FIG. 33, the coating liquid M pumped from the pumping means 12 to the branch space 16a of the casing 16 of the intermittent supply device 94 is advanced to the valve opening end position A by the valve operating device 21. In the coating time zone Q (see FIG. 8), the gap between the valve element 18 and the valve seat 19 (opening F), the die-side space 16b, and the die D are discharged to the substrate W from the die discharge port Da. On the contrary, in the coating suspension time zone R in which the valve element 18 is retracted to the valve closing end position B (see FIG. 34) by the valve element device 21, the supply to the die D is stopped.

  Then, as shown in FIG. 35, a coating suspension time zone R in which the valve body 18 advances from the valve closing end position B indicated by the two-dot chain line by the movement dimension L2 for extrusion and reaches the valve closing end position H2 indicated by the solid line. In the final region Rc (see FIG. 8), the coating liquid M in the stopped state remaining in the die side space 16b is reduced by reducing the coating liquid filling volume in the die side space 16b under the valve closing condition. Then, the inside of the liquid supply path 13a is extruded in the direction of the arrow f and supplied to the inside of the die D to be ready for coating. Subsequently, in the initial region Qa of the coating time zone Q in which the valve body 18 further advances (arrow d) through the valve closing end position H2 and reaches the valve opening end position A (see FIG. 33), the pressure feeding means 12 The coating liquid M pumped to the branch space 16a passes through the gap (opening F) between the valve body 18 and the valve seat 19 and the die side space 16b and is discharged from the die discharge port Da to be applied to the substrate W. A portion closer to the start end Ct of the work area C is formed (see FIG. 32). The coating liquid M in the branch space 16a tries to reduce the liquid pressure as a part of the valve body 18 moving forward moves away from the branch space 16a, but the forward movement time U of the valve body 18 (FIG. The piston 85 of the volume adjusting device 98 decreases in volume from the volume increasing position Y through the intermediate position Z during the time of the final period Rc of the coating suspension time period R and the initial area Qa of the coating time period Q shown in FIG. Since the fluid pressure in the branch space 16a is increased by moving forward to the position X, the fluid pressure does not fluctuate greatly due to the cancellation of the pressure reduction by the valve body 18 and the pressure increase by the piston 85. As described above, the intermittent supply device 94 allows the piston 85 to enter the branch space 16a, so that a large fluctuation in the pressure of the coating liquid M in the branch space 16a does not occur. The start pressure Ct of the coating area C can be satisfactorily formed with the liquid pressure of the coating liquid M in the die-side space 16b in the area Qa. In the continuation region Qb of the coating time zone Q in which the valve element 18 that has stopped reaching the valve opening end position A (see FIG. 33) continues to be opened, the coating region C is formed on the substrate W.

  Conversely, when the valve body 18 shown in FIG. 33 is closed from the valve opening end position A to the valve closing end position B shown in FIG. 34, the final period of the coating time zone Q (see FIG. 8). After the valve body 18 is rapidly retracted in the region Qc, the initial region of the coating suspension time zone R in which the valve body 18 continues to move from the valve closing start position H1 by the suction movement dimension L1 to the valve closing end position B. In Ra, the coating liquid filling volume in the die side space 16b is increased under the valve closing condition, and the coating liquid M remaining in the die D immediately after the suspension of coating is indicated by an arrow in the liquid supply path 13a. The coating liquid M (broken line in FIG. 1 (C) in FIG. 1) that passes from the discharge port Da of the die D to the end Cb of the coating area C by passing in the direction g and sucking toward the die side space 16b side. The portion surrounded by E) is sucked into the inside of the die D, and the liquid breakage is good over the entire width direction of the die discharge port Da. Te is formed sharp so as to end Cb of the coating region C becomes a straight line along the longitudinal direction of the discharge port Da (transverse direction of the base W).

  The intermittent coating apparatus 91 of the present invention can supply the coating liquid pumped from the pumping means 12 to the branch space 16a by increasing the extra flow rate that is always refluxed to the reflux path 15, so that it is higher than the flow rate required for coating. It becomes possible to always increase the coating liquid pressure in the branch space 16a through which a large amount of flow passes, and the valve body 18 further advances from the valve closing start position H1 (FIG. 33) to the valve opening end position A (see FIG. 33). In this case, the coating liquid M can be quickly supplied from the branch space 16a having a high coating liquid pressure to the die D through the die side space 16b.

  The intermittent coating device 91 of the present invention has a simple configuration in which one valve element 18 of the valve device 17 is advanced and retracted from the valve opening end position A to the valve closing end position B by the valve element operating device 21. The operation in the final period Rc of the coating suspension time zone R (see FIG. 8), which is a preparation for forming the starting end Ct (see FIG. 32) of the coating area C in W, and the coating liquid M are discharged from the die discharge port Da. The operation of the initial region Qa of the coating time zone Q to be performed and the continuation region of the coating time zone Q in which the coating liquid M is continuously discharged from the die discharge port Da in order to form the coating region C of the substrate W The operation of Qb and the operation and discharge of the end Qc of the coating time zone Q in which the discharge of the coating liquid M from the die discharge port Da is stopped in order to form the terminal Cb of the coating area C on the substrate W. For forming the non-coating area G of the base material W and the operation of the initial area Ra of the coating pause time period R in which the coating liquid M is sucked into the die D Since the operation of the continuation region Rb of the coating suspension time period R for stopping the discharge of the coating liquid M from the die discharge port Da can be continuously repeated, the structure of the apparatus can be simplified and the timing of these operations can be simplified. It has an excellent effect that can be easily adjusted. Further, the intermittent coating apparatus 91 of the present invention advances the pressure of the coating liquid M in the branch space 16a in the initial area Qa of the coating time zone Q that forms the start end Ct of the coating area C. The piston 85 does not fluctuate greatly, and coating in the initial region Qa of the coating time zone Q can be performed smoothly.

(Other embodiments)
The valve device 17 of the coating device 61 of the present invention shown in FIGS. 16 to 19, the valve device 17 of the coating device 71 of the present invention shown in FIGS. 20 to 25, and the valve device 17 of the coating device 81 of the present invention shown in FIGS. The valve device 17 of the coating apparatus 91 of the present invention shown in FIGS. 32 to 35 may be replaced with the valve device 47 shown in FIGS. 9 and 10 or the valve device 57 shown in FIGS. 11 to 15. Of course it is also possible.

DESCRIPTION OF SYMBOLS 11 (61,71,81,91) ... this invention intermittent coating apparatus, 12 ... Pressure feeding means, 13 ... Liquid feeding path, 13a ... Die side liquid feeding path, 13b ... Pressure feeding means side liquid feeding path, 14 ... Intermittent supply Device, 15 ... Return path, 16 ... Casing, 16a ... Branch space, 16b ... Die side space, 16c ... Return side space, 16d ... Inner peripheral surface, 16e ... Opening, 17 ... Valve device, 18 ... Valve body, 18a ... outer peripheral surface, 18b ... branch space side end face, 19 ... valve seat, 19s ... seal part, 20 ..., 21 ... valve element operating device, 22 ... drive source, 23 ... power transmission mechanism, 24 ... valve shaft, 24a ... one end, 24b ... extension part, 25 ... seal, 26 ... fastener, 28 ... volume adjusting device, 29 ... external fitting part, 29s ... minimum inner diameter part, 30 ... piston, 30a ... solid part, 30b ... concave groove, 30b-1 ... Branch space side area, 30b-2 ... Reflux side space side , 30c ... Liquid passage, 31 ... Operating device for piston, 32 ... Drive source, 33 ... Power transmission mechanism, 34 ... Connecting rod, 36 ... Control device, 37 ... Flow control valve, 38 ... Relief path, 47 ... Valve device 48 ... Valve body, 48a ... Outer peripheral surface, 48c ... Water passage part, 48g ... Main part, 48h ... Annular seal part, 49 ... Valve seat, 49a ... Through-hole, 57 ... Valve device, 58 ... Valve body, 58a ... outer peripheral surface, 58b ... valve closing stroke region, 58c ... liquid passing portion, 58d ... valve opening stroke region, 58e ... leg portion, 58f ... hollow portion, 73 ... control device, 74 ... intermittent supply device, 75 ... piston, 75a ... outer peripheral surface, 75b ... valve closing stroke region, 75c ... fluid passage, 75d ... valve opening stroke region, 76 ... external fitting portion, 76s ... sealing portion, 77 ... connecting rod, 74a ... one end (lower end), 78 ... Volume adjusting device, 82 ... pressure adjusting device, 83 ... control device, 84 ... intermittent supply device 85 ... piston, 85a ... outer peripheral surface, 86 ... outer fitting part, 87 ... connecting rod, 87a ... one end, 94 ... intermittent supply device, 97 ... connecting part, 24b ... extension part, 98 ... volume adjusting device, 99 ... Distant pipe, A ... Valve opening end position, B ... Valve closing end position, C ... Coating area, Cb ... Termination, Ct ... Start edge, D ... Die, G ... Non-coating area, Ga ... Length dimension, H1 ... Valve closing start position, H2 ... Valve closing end position, L1 ... Moving dimension for suction, L2 ... Moving dimension for pressing, M ... Coating liquid, P ... Pump, Q ... Coating time zone, Qa ... Initial area, Qb: Continuation zone, Qc: Final zone, R: Coating pause time zone, Ra ... Initial zone, Rb ... Continuation zone, Rc ... Final zone, U ... Forward movement time, X ... Volume decrease position, Y ... Volume increase position N1, N2 ... intermediate position, N3 ... closing end position, Z ... intermediate position

Claims (8)

A die that discharges the coating liquid from the discharge port, a pressure feeding means that pumps the coating liquid, and a gap between the die and the pressure feeding means. The coating liquid is intermittently supplied to the die and is unnecessary. In the intermittent coating device provided with an intermittent supply device for returning the gas to the reflux path,
The intermittent supply device includes a casing, a valve device, and a volume adjusting device,
The casing is formed therein with a branch space communicating with the pressure feeding means, a die side space communicating with the die and communicating with the die, and a reflux path side space communicating with the branch space and communicating with the reflux path. ,
The valve device includes a valve seat provided at a boundary between the branch space of the casing and the die side space, and a valve opening end position that is located in the die side space and separates from the valve seat in the course of moving toward the branch space. A valve body fitted inside the valve seat without leakage and moving in the closed state until it moves to the closed position, and the valve body can be moved back and forth from the open position to the closed position A valve body operating device that moves forward toward the valve open end position or retreats toward the valve close end position, and is capable of advancing for extrusion from the valve closed end position while the valve body is in a closed state and is closed It is formed so that it can retreat for suction to the end position,
The volume adjusting device is for volume adjustment of the branch space, and forms a liquid passage between the outer fitting portion provided between the branch space and the reflux path side space, and the outer fitting portion. A piston that is movably fitted in the valve, and the piston is advanced toward the branch space at an appropriate time when the valve element is advanced from the valve closing end position toward the valve opening end position, and the valve element is opened. The piston is retracted toward the reflux path side space at an appropriate timing when the valve body is retracted from the valve end position or the valve closing start position toward the valve closing end position and / or at an appropriate timing when the valve body is stopped at the valve closing end position. An intermittent coating apparatus comprising an operating device for a piston.   When the valve body is retracted from the valve opening end position toward the valve closing start position, the piston operating device advances the piston toward the branch space, and then the valve body is moved to the valve closing start position. The piston is retracted toward the return path side space at an appropriate timing when the valve body is retracted from the valve position toward the valve closing end position and / or at an appropriate timing when the valve body is stopped at the valve closing end position. Item 2. An intermittent coating apparatus according to item 1. A die that discharges the coating liquid from the discharge port, a pressure feeding means that pumps the coating liquid, and a gap between the die and the pressure feeding means. The coating liquid is intermittently supplied to the die and is unnecessary. In the intermittent coating device provided with an intermittent supply device for returning the gas to the reflux path,
The intermittent supply device includes a casing, a valve device, and a volume adjusting device,
The casing is formed therein with a branch space communicating with the pressure feeding means, a die side space communicating with the die and communicating with the die, and a reflux path side space communicating with the branch space and communicating with the reflux path. ,
The valve device includes a valve seat provided at a boundary between the branch space of the casing and the die side space, and a valve opening end position that is located in the die side space and separates from the valve seat in the course of moving toward the branch space. A valve body fitted inside the valve seat without leakage and moving in the closed state until it moves to the closed position, and the valve body can be moved back and forth from the open position to the closed position A valve body operating device that advances between the valve body toward the valve-opening end position or retreats toward the valve-closing end position. It is formed so that it can retreat for suction to the end position,
The volume adjusting device is for adjusting the volume of the branch space, and is fitted with an outer fitting portion provided between the branch space and the reflux path, and is fitted into the outer fitting portion so as to be able to advance and retreat, and extends to the branch space side. A piston formed by connecting a valve opening stroke region capable of forming a fluid passage between the fitting portion and a valve closing stroke region extending to the reflux passage side space side and capable of being fitted into the outer fitting portion without liquid leakage; and the valve body. When moving forward from the valve closing end position toward the valve opening end position, when the valve element moves forward with the valve closed, the piston is advanced toward the branch space while facing the valve opening stroke region toward the outer fitting portion. At the same time, when the valve body moves forward toward the valve opening end position while the valve body is open, the piston is advanced toward the branch space with the valve closing stroke area facing the outer fitting portion, and the valve body is opened. When retreating from the valve end position toward the valve closed end position, the valve element remains open. Appropriate timing for retreating the piston toward the recirculation path side space with the valve closing stroke area facing the outer fitting portion when retreating, and retreating toward the valve closing end position while the valve body remains closed And / or a piston operating device for retreating the piston toward the reflux path side space with the valve opening stroke region facing the outer fitting portion at an appropriate time when the valve body is stopped at the valve closing end position. Intermittent coating device. A die that discharges the coating liquid from the discharge port, a pressure feeding means that pumps the coating liquid, and a gap between the die and the pressure feeding means. The coating liquid is intermittently supplied to the die and is unnecessary. In the intermittent coating device provided with an intermittent supply device for returning the gas to the reflux path,
The intermittent supply device includes a casing, a valve device, and a volume adjusting device,
The casing is formed therein with a branch space communicating with the pressure feeding means and the reflux path, and a die side space communicating with the die while being able to communicate with the branch space,
The valve device includes a valve seat provided at a boundary between the branch space of the casing and the die side space, and a valve opening end position that is located in the die side space and separates from the valve seat in the course of moving toward the branch space. A valve body fitted inside the valve seat without leakage and moving in the closed state until it moves to the closed position, and the valve body can be moved back and forth from the open position to the closed position A valve body operating device that advances between the valve body toward the valve-opening end position or retreats toward the valve-closing end position. It is formed so that it can retreat for suction to the end position,
The volume adjusting device is for adjusting the volume of the branch space, and includes an outer fitting portion provided in an opening that communicates the branch space of the casing and the outer side of the casing, and an inner portion that is slidable without leakage in the outer fitting portion. The piston to be fitted and the piston is advanced toward the branch space at an appropriate time when the valve element is advanced from the valve closing end position toward the valve opening end position, and the valve element is opened or closed. A piston operating device for retracting the piston toward the outside of the casing at an appropriate timing when the valve body is retracted from the valve start position toward the valve closing end position and / or at an appropriate timing when the valve body is stopped at the valve closing end position; An intermittent coating apparatus characterized by comprising:   When the valve body is retracted from the valve opening end position toward the valve closing start position, the piston operating device advances the piston toward the branch space, and then the valve body is moved to the valve closing start position. The piston is moved backward toward the outside of the casing at an appropriate time when the valve body is retracted from the valve position toward the valve closing end position and / or at an appropriate time when the valve body is stopped at the valve closing end position. Item 5. The intermittent coating apparatus according to item 4. A die that discharges the coating liquid from the discharge port, a pressure feeding means that pumps the coating liquid, and a gap between the die and the pressure feeding means. The coating liquid is intermittently supplied to the die and is unnecessary. In the intermittent coating device provided with an intermittent supply device for returning the gas to the reflux path,
The intermittent supply device includes a casing, a valve device, and a volume adjusting device,
The casing is formed therein with a branch space communicating with the pressure feeding means and the reflux path, and a die side space communicating with the die while being able to communicate with the branch space,
The valve device includes a valve seat provided at a boundary between the branch space of the casing and the die side space, and a valve opening end position that is located in the die side space and separates from the valve seat in the course of moving toward the branch space. A valve body fitted inside the valve seat without leakage and moving in the closed state until it moves to the closed position, and the valve body can be moved back and forth from the open position to the closed position A valve body operating device that advances between the valve body toward the valve-opening end position or retreats toward the valve-closing end position. It is formed so that it can retreat for suction to the end position,
The volume adjusting device is for adjusting the volume of the branch space, and includes an outer fitting portion provided in an opening that communicates the branch space of the casing and the outer side of the casing, and an inner portion that is slidable without leakage in the outer fitting portion. A piston to be fitted, and the piston and the valve body are connected so as to be interlocked, and when the valve body advances from the valve closing end position toward the valve opening end position, the piston is advanced toward the branch space; Further, the intermittent coating apparatus is characterized in that when the valve body is retracted from the valve opening end position toward the valve closing end position, the piston is retracted toward the outside of the casing. The valve seat is formed by an annular seal attached to the casing;
The valve body is formed by connecting a valve closing stroke area closer to the die side space and a valve opening stroke area closer to the branch space. An outer peripheral surface having a dimension capable of securing the backward movement for suction is formed along the forward / backward direction, and extends in the forward / backward direction so that it can be opened in the die side space and the branch space without contacting the valve seat in the valve opening stroke area. 7. A liquid passing part for adjusting the flow rate is provided, and the liquid passing part is formed so that the flow rate passing through the liquid passing part increases as it moves toward the die side space. The intermittent coating apparatus described.   The valve body operating device is provided between a valve shaft and a drive source, a valve shaft extending from the valve body and penetrating the casing, a drive source including an electric servo motor capable of positioning control and speed control A power transmission mechanism that transmits the rotational force of the electric servo motor to the valve shaft to move the valve body forward and backward, and each elapsed time in the time zone from starting to stopping of the valve body and closing from the valve opening end position. The intermittent coating apparatus according to any one of claims 1 to 7, wherein a relationship with each passage position of the valve body between the valve end positions can be arbitrarily set.

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