JP2010167408A - Intermittent coating apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To simplify an apparatus structure and to eliminate the need of a long period of time for adjustment. <P>SOLUTION: The intermittent coating apparatus has a casing 16, a valve device 17 and a volume adjusting device 28 and intermittently supplies a coating liquid to a die D. The valve device 17 includes: a valve seat 19 provided on the boundary of the branching space 16a and die side space 16b of the casing 16; a valve body 20 provided so as to be freely moved back and forth between an open valve end position A positioned inside the die side space and separated from the valve seat 19 and a closed valve end position B to be reached in a closed valve state as it is by being internally fitted to the valve seat 19 without liquid leakage in the middle of movement to the branching space; and an operation unit 21 for the valve body, for moving the valve body 20 forward to the open valve end position A or moving it backward to the closed valve end position B between the open valve end position A and the closed valve end position B. The valve body 20 is formed so as to be moved forward for extrusion from the closed valve end position A in the closed valve state as it is and moved backward for suction to the closed valve end position B. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention alternately forms a coating area and a non-coating area on a base material by repeatedly discharging and stopping from the die when the coating liquid is discharged from the die and applied to the base material. The present invention relates to an intermittent coating apparatus. Coating is performed by relatively moving the base material and the die. For example, there are a case where the base material is run and the die is stopped, and a case where the base material is stopped and the die is run.

  Conventionally, there exists a thing of patent document 1 in an intermittent coating apparatus. As shown in the schematic diagram of FIG. 14, the intermittent coating apparatus 1 includes a die D for coating the substrate W with the coating liquid M, a pressure feeding unit 2 for pumping the coating liquid M to the die D, and a die D. Suction / pressure feeding means 4 in which the piston 4b is inserted into the cylinder 4a communicating with the die side liquid supply path 3a between the die D and the intermittent valve Va so as to be pushed and pulled freely. A first on-off valve V1 that communicates between the die side liquid supply path 3a and the inside of the cylinder 4a, a second on-off valve V2 that communicates between the inside of the cylinder 4a and the escape path 7 outside the die side liquid supply path 3a, And a control device 8 for controlling the pressure feeding means 4 and the like. The pressure feeding means 2 includes a tank T, a pump P that pumps the coating liquid M in the tank T, and an on-off valve Vb that recirculates the coating liquid M when not pumped to the die D to the tank T. The intermittent coating apparatus 1 sucks the coating liquid from the die side liquid supply path 3a into the cylinder 4a by the piston 4b pulled by the suction / pressure feeding means 4 when the intermittent valve Va is closed, and the intermittent valve Va. When opening, the piston 4b pushed by the suction / pressure feeding means 4 pressures (arrows) the coating liquid M from the inside 4a of the cylinder to the die side liquid supply path 3a.

  The control device 8 shows commands for the operation tool 6 of the suction / pressure feeding means 4, the intermittent valve Va, the on-off valve Vb of the pressure feeding means 2, the first on-off valve V1, and the second on-off valve V2, in the timing chart of FIG. It is something like that. That is, in the coating time zone J in which the coating area C is formed on the substrate W, the intermittent valve Va is instructed to be kept open, and the on-off valve Vb is instructed to be kept closed. In the coating suspension time zone K in which the non-coating area G is formed on the substrate W, the intermittent valve Va is instructed to be kept closed, and the on-off valve Vb is instructed to be kept open.

  When the intermittent coating apparatus 1 opens the intermittent valve Va in order to form the coating area C on the substrate W, the die side liquid supply path from the cylinder 4a while pushing and moving the piston 4b of the suction / pressure feeding means 4 is used. 3a until the coating liquid M is being pumped (arrow B in FIG. 14) (in the middle of the time zone Ja in FIG. 15 and when the intermittent valve Va is switched from opening to reaching time T1). Supplies the coating liquid M to the die-side liquid supply passage 3a by opening the first on-off valve V1 and closing the second on-off valve V2, and closes the first on-off valve V1 and reaches the second on the way. 2 Open the on-off valve V2, and after this time, excess coating liquid M pumped from the cylinder 4a of the suction / pumping means 4 passes through the escape path 7 to the tank T outside the die side liquid supply path 3a. The thickness of the coating film on the start end Ct side in the coating area C can be adjusted. To have. The time T1 for switching between opening and closing of the first on-off valve V1 and the second on-off valve V2 is appropriately set according to various coating conditions.

  Further, when the intermittent valve Va is closed in order to form the non-coating area G on the substrate W, the piston 4b that draws and moves the coating liquid M in the die side liquid supply path 3a is pulled into the cylinder. The coating liquid M coming out from the discharge port Da of the die D to the end Cb of the coating area C is sucked into the inside of the die D by suctioning to 4a (arrow a in FIG. 14).

Japanese Patent No. 4092462

  By the way, in the conventional intermittent coating apparatus 1, the control object of the control device 8 is the operation tool 6 of the suction / pressure feeding means 4, the intermittent valve Va, the on-off valve Vb of the pressure feeding means 2, the first on-off valve V1, and the second on-off valve. V2 has a problem that the apparatus is complicated due to the large number of control objects, and that it takes a lot of time to adjust the operation timing of each control object to be performed in order to achieve optimum intermittent coating. . In particular, in order to adjust the thickness of the coating film on the start end Ct side in the coating area C and set the thickness of the subsequent coating film to a predetermined dimension, the opening / closing operation of the intermittent valve Va, the suction / pumping means 4 It is necessary to keep the deviation of the start operation of pushing and moving the piston 4b and the switching operation of the opening and closing of the first on-off valve V1 and the second on-off valve V2 within a very short time (for example, 100 to 500 microseconds), Adjustment takes a lot of time.

  In order to solve the above problem, an object of the present invention is to provide an intermittent coating apparatus that has a simple apparatus structure and does not require much time for adjustment.

  In order that the apparatus structure is simple and does not require much time for adjustment, the means adopted by the present invention as set forth in claim 1 is to apply the coating liquid M to the discharge port Da as shown in FIGS. Provided between the die D and the pressure-feeding means 12 and intermittently supplying the coating liquid M to the die D and unnecessary coating. In the intermittent coating apparatus provided with the intermittent supply device 14 for returning the liquid M to the reflux path 15, the intermittent supply device 14 includes a casing 16 and a valve device 17, and the casing 16 has a pressure feeding means 12 inside thereof. And a branch space 16a that communicates with the reflux path 15 and a die side space 16b that communicates with the branch space 16a and communicates with the die D. The valve device 17 includes the branch space 16a and the die side space 16b of the casing 16. At the boundary of In the middle of the movement toward the branch space 16a from the valve opening end position A, which is located in the die side space 16b and is separated from the valve seat 19, and is closed without liquid leakage. A valve body 20 provided so as to be movable back and forth between the valve closing end position B that moves in the valve state, and the valve opening 20 between the valve opening end position A and the valve closing end position B. And a valve body operating device 21 that moves forward toward the position A or moves backward toward the valve closing end position B, and can advance for extruding from the valve closing end position B while the valve body 20 is closed (see FIG. 5). ) And the valve closing end position B (see FIG. 4).

  In the first aspect of the present invention, the coating liquid fed from the pressure feeding means to the branch space of the casing of the valve device is opened by the valve body being advanced to the valve opening end position by the valve body operating device. In the coating time zone where the valve is in the state, it is applied by passing through the gap between the valve seat and the valve body in the open state, the space on the die side and the die and discharging from the die discharge port. The supply to the die is stopped in the coating suspension time period in which the apparatus device is retracted to the valve closing end position and is in the valve closing state.

  Further, in the present invention according to claim 1, when the valve body advances from the valve closing end position toward the valve opening end position, the valve body advances for extrusion from the valve closing end position and the valve closing ends. In the final period of the coating suspension time period to reach the position, the coating liquid filling volume in the die side space under the valve closing condition is decreased by the valve body that moves forward while remaining in the die side space and the die in the coating suspension state. In the initial region of the coating time zone in which the valve body reaches the valve opening end position, the coating liquid supplied from the pumping means is pumped to the die. Then, the coating liquid is discharged from the die discharge port to form the start end of the coating area. In the continuation range of the coating time zone when the valve body is stopped at the valve open end position, the coating liquid that is pumped from the pumping means is stably supplied to the die and continues to be discharged from the die discharge port. To form the coating area of the substrate. Conversely, when the valve body moves backward from the valve opening end position toward the valve closing end position, the initial stage of the coating suspension time period during which the valve body moves backward for suction through the valve closing start position and reaches the valve closing end position. In the area, the coating liquid filling volume in the die side space under the valve-closed condition is increased with the receding valve body, and the coating liquid remaining on the die immediately after the coating suspension is sucked to the die side space side. Then, the coating liquid coming out from the die discharge port to the end forming portion of the coating area of the base material is sucked into the die, and the end of the coating area is formed with good liquid drainage at the die discharge port. .

  Furthermore, in the present invention described in claim 1, since the coating liquid that is pumped from the pumping means to the branch space can be pumped at a flow rate that always returns to the reflux path, the flow rate is larger than the flow rate required for coating. It is possible to always increase the coating liquid pressure in the branch space through which the flow rate of the fluid passes, and when the valve body further advances from the valve closing end position to the valve opening end position, the die is removed from the branch space where the coating liquid pressure is high. The coating liquid can be rapidly supplied to the die through the side space.

  In order to make it possible to adjust the film thickness of the coating film, the means adopted by the present invention according to claim 2 is that the valve seat 19 is an annular seal attached to the casing 16 as shown in FIGS. The valve body 48 is formed by connecting a valve closing stroke region 48b near the die side space 16b and a valve opening stroke region 48d near the branch space 16a, and the valve closing stroke region 48b is connected to the valve closing stroke region 48b. An outer peripheral surface 48a having a dimension capable of ensuring the forward movement for extrusion and the backward movement for suction by bringing the entire periphery into contact with the seat 19 is formed along the forward and backward direction, and contacts the valve seat 19 in the valve opening stroke region 48d. The flow rate adjusting liquid passing portion 48c extending in the forward / backward direction so as to open to the die side space 16b and the branch space 16a is provided, and the liquid passing portion 48c is moved as it moves toward the die side space 16b side. More flow through Is intermittent coating apparatus according to claim 1, wherein the formation of the urchin liquid passing portion 48c.

  In the present invention described in claim 2, since the flow rate of the coating liquid can be increased as the valve element is advanced toward the die side space with the opening stroke area facing the valve seat. By changing the valve opening end position, which is the stop position of the valve body, the flow rate of the coating liquid supplied to the die can be adjusted, and the coating film thickness of the coating area formed on the substrate can be optimized. .

  According to the third aspect of the present invention, as shown in FIGS. 2 and 9, the valve body operating device 21 extends from the valve body 20 (48) and passes through the casing 16. A shaft 24, a drive source 22 composed of an electric servo motor capable of positioning control and speed control, and a valve element provided between the valve shaft 24 and the drive source 22 to transmit the rotational force of the electric servo motor to the valve shaft 24. 20 (48) and a power transmission mechanism 23 for moving the valve body 20 (48) forward and backward, and between each valve opening time A and the valve closing end position B in the time period from the start to the stop of the valve body 20 (48). It is an intermittent coating apparatus of Claim 1 or 2 which enabled it to set now the relationship with each progress position of the valve body 20 (48) in it.

  The intermittent coating apparatus according to the first aspect of the present invention has a simple configuration in which one valve element is advanced and retracted from the valve opening end position to the valve closing end position by the valve element operation device, and the discharge of the coating liquid is stopped. In the final period of the coating pause time zone where the coating liquid is pushed out to the vicinity of the die discharge port, and in the coating time zone during which the coating liquid is discharged to form the starting edge of the coating area on the substrate In order to form the initial area operation, the continuous operation of the coating time zone in which the coating liquid is continuously discharged from the die discharge port to form the coating area on the base material, and the end of the coating area on the base material The operation of the final zone in the coating time zone, which prepares to stop the supply of the coating liquid to the die discharge port, and the coating liquid discharged to form the end of the coating zone on the substrate Stop the discharge of the coating liquid from the die outlet in order to form the initial region operation during the coating suspension time zone to be sucked into the substrate and the non-coating region of the base material It is possible to repeat and continuous operation of the Engineering pause time period continuously, has excellent effect of the adjustment of the timing of these operations easier with the apparatus can be structured easily.

  The intermittent coating apparatus according to the second aspect of the present invention is formed on the base material by changing the valve opening end position, which is the stop position of the valve body, and adjusting the flow rate of the coating liquid supplied to the die. The coating film thickness in the coating area can be optimized.

  The intermittent coating apparatus according to the third aspect of the present invention includes each elapsed position of the valve body between the valve opening end position and the valve closing end position, and each elapsed time in a time zone from the start to the stop of the valve body. Therefore, it is possible to obtain a moving state of the valve body that performs the initial region operation in the coating time zone and the initial zone operation in the coating suspension time zone in an optimal state.

1 shows a first embodiment of an intermittent coating apparatus according to the present invention (hereinafter referred to as “the present invention intermittent coating apparatus”), and FIG. Is an enlarged view of a portion b in FIG. (A), and FIG. (C) is an enlarged view of a portion c in FIG. It is a fragmentary sectional view showing the principal part in a 1st embodiment, and shows the mode that valve body 20 is located in valve opening end position A. It is a fragmentary sectional view showing the principal part in a 1st embodiment, and shows the state where valve body 20 is located in valve closing start position H1. It is a fragmentary sectional view showing the principal part in a 1st embodiment, and shows the state where valve body 20 retreats from valve closing start position H1 (two-dot chain line) to valve closing end position B (solid line). It is a fragmentary sectional view showing the principal part in a 1st embodiment, and shows the state where valve body 20 advances from valve closing end position B (two-dot chain line) to valve closing end position H2 (solid line). It is a timing chart which shows operation | movement of the valve body 20 in 1st Embodiment. It is a fragmentary sectional view which shows the principal part in 2nd Embodiment of this invention intermittent coating apparatus, Comprising: The mode which the valve body 38 is located in the valve opening position A is shown. It is a fragmentary sectional view showing the neighborhood of valve device 37 in a 2nd embodiment, and Drawing (A) shows valve body 38 from valve-closing start position H1 (two-dot chain line) to valve-closing end position B (solid line). FIG. 4B shows a state where the valve body 38 has moved backward from the valve closing position B (two-dot chain line) to the valve closing end position H2 (solid line). It is a fragmentary sectional view which shows the principal part in 3rd Embodiment of this invention intermittent coating apparatus, Comprising: The state which the valve body 48 is located in the valve opening end position A is shown. It is a fragmentary sectional view showing the neighborhood of valve device 47 in a 3rd embodiment, and Drawing (A) shows valve body 48 from valve-closing start position H1 (two-dot chain line) to valve-closing end position B (solid line). (B) shows a state in which the valve body 48 has advanced from the valve closing end position B (two-dot chain line) to the valve closing end position H2 (solid line). The valve body 48 in 3rd Embodiment is expanded and shown, Comprising: FIG. (A) is a front view, FIG. (B) is the front view which carried out the longitudinal cross-section, FIG. (C) is a bottom view. The valve body 48 of the different aspect in 3rd Embodiment is expanded and shown, Comprising: A figure (A) is a front view, A figure (B) is a front view which carried out the longitudinal cross-section, A figure (C) is a bottom view. is there. The valve body 48 of the further different aspect in 3rd Embodiment is expanded and shown, Comprising: A figure (A) is a front view, A figure (B) is a bottom view. It is the schematic of the conventional intermittent coating apparatus. It is a timing chart of the conventional intermittent coating apparatus.

(First embodiment)
The present invention intermittent coating apparatus 11 according to the first embodiment shown in FIG. 1 to FIG. 8 includes a die D for discharging the pumped coating liquid M from the discharge port Da to the substrate W, and a coating liquid. A pressure feeding means 12 for feeding M, and a gap between the die D and the pressure feeding means 12 for intermittently supplying the coating liquid M to the die D and supplying the unnecessary coating liquid M not supplied to the die D to the reflux path 15 includes an intermittent supply device 14 that returns to 15 and a control device 18 that controls the valve body operating device 21 of the intermittent supply device 14. The form of coating using the intermittent coating apparatus 11 of the present invention is performed by relative movement of the base material W and the die D. For example, the mode in which the base material W travels and the die D is stopped (the former mode) and There is a mode (the latter mode) in which the substrate D is stopped and the die D is run. As an example of the former mode, although not shown in the figure, the coating liquid discharged from the discharge port Da of the fixed die D is applied to the surface of the base material W that is wound around a backup roll that is rotationally driven at a constant speed. There is something to coat. As an example of the latter aspect, there is one in which a coating liquid M discharged from the discharge port Da of the die D moving along the surface of the substrate W is applied to the surface of the substrate W fixed to the fixed platen. . As the substrate W, a continuous material such as a plastic film is selected in the former mode, and a material cut into an appropriate length such as a glass plate is selected in the latter mode. As the coating liquid M, a liquid applied to a battery electrode or a liquid crystal plate is selected. As the posture of the die D, illustration is omitted except when the discharge direction of the discharge port Da is oriented horizontally, but the discharge direction of the discharge port Da may be directed downward or upward, which is optimal depending on the coating conditions. Is selected. The selection of the posture of the die D is performed in conjunction with the selection of the former aspect or the latter aspect.

  As shown in FIG. 1, the die D has a liquid channel Dd for dispersion such as a coat hanger and a manifold De formed at the boundary between the two lip members Db and Dc that are separably joined. A slit-like discharge port Da is opened at the tip of the boundary. The die D is adapted to be able to cope with various coating conditions by adjusting a gap dimension (for example, 50 to 1500 μm) between the lip members Db and Dc which is the thickness of the discharge port Da.

  The pressure feeding means 12 includes a tank T for storing the coating liquid M and a pump P for pressure-feeding the coating liquid M in the tank T to the die D as in the prior art. The pressure feeding means 12 and the die D are joined by a liquid feeding path 13 via an intermittent feeding device 14, and the pressure feeding means 12 and the intermittent feeding device 14 are connected by a pressure feeding means side liquid feeding path 13b, and the intermittent feeding device 14 and the die D are connected. Are connected by the die side liquid supply path 13a. The reflux path 15 extends from the intermittent supply device 14 and is joined to the tank T so as to return the unnecessary coating liquid M. A pressure gauge PG1 (see FIG. 2) for detecting the pressure in the liquid supply path 13a is provided in the die-side liquid supply path 13a as necessary.

  As shown in FIG. 2, the intermittent supply device 14 includes a casing 16 and a valve device 17. Inside the casing 16, a branch space 16 a communicating with the pressure feeding means 12 and the reflux path 15, and a branch space 16 a can be communicated. A die side space 16b communicating with the die D is formed. The casing 16 may be easily cleaned on the inside by allowing the casing 16 to be divided and joined in place. The branch space 16a and the die-side space 16b communicate with each other when the valve device 17 is in the open state (see FIG. 2), and do not communicate with each other when the valve device 17 is in the closed state (see FIG. 4). . A pressure regulating valve 27 is provided between the branch space 16a and the reflux path 15 as necessary, and the detected pressure value m of the pressure gauge PG2 that detects the pressure in the branch space 16a and the set pressure value set by the setting device. The pressure control valve 27 is operated so as to reduce the difference of n so that the pressure of the coating liquid M in the branch space 16a becomes a set pressure value.

  As shown in FIG. 2, the valve device 17 includes an annular valve seat 19 provided at the boundary between the branch space 16a of the casing 16 and the die side space 16b, and an opening degree from the valve seat 19 located in the die side space 16b. A valve closing end position B (in which the valve seat 19 is fitted in the valve seat 19 without leaking in the middle of the movement from the valve opening end position A that is separated by F toward the branch space 16a and moves while the valve is closed (sitting state). 4), a valve body 20 provided to be movable back and forth, a valve body operating device 21 for moving the valve body 20 back and forth, and a valve shaft 24 connecting the valve body 20 and the valve body operating device 21; It has. As shown in FIG. 4, the valve body 20 is in a valve closing start position H1 indicated by a two-dot chain line (when the valve body 20 is retracted from the valve opening end position A toward the valve closing end position B, the valve closing state is From the first starting position) to the valve closing end position B indicated by the solid line in the closed state, the suction moving dimension L1 can be retracted (moved to the arrow e) by a two-dot chain line as shown in FIG. The valve closing end position H2 indicated by the solid line from the valve closing end position B shown in the solid line (the valve closing state is ended when the valve body 20 advances from the valve closing end position B toward the valve opening end position A). (The position to be moved) can be pushed forward (moved to the arrow d) by the pushing movement dimension L2. Depending on the structure of the valve seat 19, the valve closing start position H1 and the valve closing end position H2 may be different positions or the same position.

  The valve seat 19 includes an annular seal made of an O-ring fitted in an annular groove (not shown) provided in the casing 16, a single-acting seal, a U-shaped seal jacket, and a V-shaped corrosion-resistant spring. For example, a ring seal (registered trade name) manufactured by Busak + Shamban or the like can be used. The valve seat 19 closes the valve device 17 when an outer peripheral surface 20a (described later) of the valve body 20 comes into contact with the seal portion 19s.

  As shown in FIG. 2, the valve body 20 is formed in a solid short columnar shape or a cup shape that is centered before opening the branch space 16 a side, and an outer peripheral surface 20 a is formed on the inner periphery of the valve seat 19. It is fitted into the formed circular seal portion 19s without leakage and is in a closed state (see FIGS. 4 and 5), and is attached to and detached from one end 24a of the valve shaft 24 that penetrates the solid portion. The valve shaft 24 is joined by a fastener 26 such as a nut fitted thereto. The valve shaft 24 passes through the casing 16 through the seal 25 and reaches the valve body operating device 21. The dimension along the advancing / retreating direction of the valve body 20 is a dimension that can secure the suction movement dimension L1 (see FIG. 4) and the extrusion movement dimension L2 (see FIG. 5). When the valve body 20 is located at the valve opening end position A that is separated from the valve seat 19 at the opening degree F, the valve body 20 is loosely fitted to the casing inner peripheral surface 16d forming the die side space 16b, and the casing inner peripheral surface An annular liquid passage is formed between 16d and 16d. As shown in FIG. 4, the valve body 20 of the present example has a seal portion 19 s of the valve seat 19 on the branch space side of the outer peripheral surface 20 a while retreating from the valve opening end position A (see FIG. 2) toward the branch space 16 a. When the end face 20b is brought into contact, the valve closing start position H1 is obtained. On the contrary, as shown in FIG. 5, the valve body 20 moves the branch space side end surface 20 b side of the outer peripheral surface 20 a to the seal portion 19 s of the valve seat 19 while moving forward from the valve closing end position B toward the die side space 16 b. When contacted, the valve closing end position H2 is reached.

  The valve body operating device 21 is provided between a drive source 22 composed of an electric servo motor capable of positioning control and speed control, and between the drive source 22 and the valve shaft 24, and the rotation of the electric servo motor which is the drive source 22. A power transmission mechanism 23 that transmits force to the valve shaft 24 to move the valve body 20 forward and backward, and a control device 18 (see FIG. 1) that issues a control command to the drive source 22 are provided. Although not shown, the power transmission mechanism 23 is connected to the pinion gear joined to the output shaft of the electric servo motor, which is the drive source 22, and the valve shaft 24. The pinion gear meshes with each other along the valve body advance / retreat direction. A gear mechanism combined with a slidable rack gear, a crank joined to an output shaft of an electric servomotor as a drive source 22, a slider coupled to the valve shaft 24 and slidable along the valve body advancement and retraction direction, A link mechanism or the like with very little play is combined, which is a combination of a crank and a connecting shaft that connects the slider with a rotating chain.

  The valve-body operating device 21 is operated at a valve-opening end position A which is a stop position of the valve body 20 by positioning control of an electric servo motor which is a drive source 22 that receives a control command issued by the control device 18 (see FIG. 1). Each position (see FIG. 2) and valve closing end position B (see FIG. 4) can be set to an optimum position. Further, the valve element operating device 21 can change the setting of the valve opening end position A and the valve closing end position B of the valve element 20, and the opening F of the valve element 20 at the valve opening end position A (see FIG. 2). The valve body 20 shown in the branch space side end face 20b to the seal portion 19s of the valve seat 19 along the valve body advance / retreat direction), and the suction movement dimension L1 and the extrusion movement dimension L2 of the valve body 20 are intermittently applied. The dimensions can be adjusted to suit the requirements.

  Further, the valve element operating device 21 can change the speed of the valve element 20 when the valve element 20 advances and retreats by controlling the speed of the electric servo motor that is the drive source 22 that receives the control command issued by the control device 18. That is, as shown in FIG. 6, the valve element operating device 21 advances the valve element 20 from the valve closing end position B, which is the starting position, toward the valve opening end position A, which is the stopping position (arrow d in FIG. 5). For example, the time required for the final zone Rc of the coating suspension time zone R and the initial zone Qa of the coating time zone Q, for example, The relationship between each elapsed time from activation in the time zone of 10 milliseconds) and each passage position of the valve body 20 in the forward movement path from activation to stop can be changed, and the relationship between each elapsed time and each passage position Can be set arbitrarily, and the starting speed Ct side in the coating area C (see FIG. 1) is good by setting the moving speed at each passing position of the valve body 20 to an optimum value according to the coating conditions. It can be formed in any state. In addition, the optimal value of the moving speed of the valve body 20 according to the coating conditions may be obtained in advance by performing a coating test.

  Further, the valve element operating device 21 moves the valve element 20 backward from the valve opening end position A, which is the starting position, toward the valve closing end position B, which is the stop position, by controlling the speed of the electric servo motor that is the drive source 22. When moving (in the direction of the arrow e in FIG. 3), the backward movement time Y from the start to the stop shown in FIG. 6 (that is, the final period Qc of the coating time zone Q and the coating pause time zone R Arbitrary setting of the relationship between each elapsed time from the start in the time zone of the initial region Ra, for example, 7 milliseconds, and each passing position of the valve body 20 in the backward movement path from the start to the stop By setting the moving speed at each passing position of the valve body 20 to an optimum value according to the coating conditions, the coating liquid M (shown in FIG. 1) that reaches the terminal Cb in the coating area C is obtained. The portion surrounded by a broken line E in FIG. And smoothly sucked into the interior, are as termination Cb side can be formed in a good condition.

  The control device 18 gives a command to the electric servo motor of the drive source 22 capable of positioning control and speed control of the valve body operating device 21 of the valve device 17. With respect to the drive source 22 of the valve device 17, the control device 18 has the opening F of the valve body 20 at the valve opening end position A and the suction movement dimension L1 and the pressing movement dimension L2 of the valve body 20 at the valve closing end position B. The circuit is configured so that the set value can be changed according to the coating conditions, and each elapsed time from the start of the valve body 20 between the valve opening end position A and the valve closing end position B, and the valve opening end position The circuit is configured so that the relationship between the passage position of the valve body 20 between A and the valve closing end position B can be arbitrarily set, and the moving speed of each passage position of the valve body 20 can correspond to the coating conditions. ing.

  In the intermittent coating apparatus 11 according to the present embodiment configured as described above, the control device 18 controls the drive source 22 of the valve element operating device 21, and as shown in FIG. Coating time zone Q (see FIG. 6) for forming coating area C by discharging coating liquid M onto substrate W, and coating for forming non-coating area G without discharging coating liquid M The work suspension time zones R (see FIG. 6) are alternately formed. The coating liquid M pumped from the pumping means 12 to the branch space 16a of the casing 16 of the intermittent supply device 14 is advanced to the valve opening end position A by the valve operating device 21 as shown in FIG. In the coating time zone Q (see FIG. 6), the gap between the valve body 20 and the valve seat 19 (opening F), the die side space 16b and the die D are passed through the die discharge port Da and discharged to the substrate W. In contrast, in the coating suspension time zone R in which the valve body 20 is retracted to the valve closing end position B (see FIG. 4) by the valve body device 21, the supply to the die D is stopped.

  As shown in FIG. 5, the valve body 20 moves forward (arrow d) from the valve closing end position B indicated by a two-dot chain line to the valve opening end position A shown in FIG. In the final region Rc of the coating suspension time zone R (see FIG. 6) where the body 20 moves from the valve closing end position B by the movement dimension L2 for extrusion to the valve closing end position H2, the die side space under the valve closing condition By reducing the coating liquid filling volume in 16b, the stopped coating liquid M remaining in the die side space 16b is pumped in the direction of the arrow f in the liquid feeding path 13a. It is extruded into the inside and ready for coating. Subsequently, in the initial region Qa of the coating time zone Q (see FIG. 6) in which the valve body 20 further advances (arrow d) through the valve closing end position H2 and reaches the valve opening end position A (see FIG. 2). The coating liquid M pumped from the pumping means 12 to the branch space 16a passes through the gap (opening F) between the valve body 20 and the valve seat 19 and the die side space 16b and is discharged from the die discharge port Da. The base W is formed near the start end Ct of the coating area C. In the continuation region Qb of the coating time zone Q in which the valve body 20 that has stopped reaching the valve opening end position A (see FIG. 2) is continuously opened, the coating region C is formed on the substrate W.

  Conversely, during the valve closing operation in which the valve body 20 shown in FIG. 2 moves backward (arrow e) from the valve opening end position A to the valve closing end position B shown in FIG. 6)), after the valve body 20 has been rapidly retracted, the valve body 20 is subsequently retracted for suction by the suction movement dimension L1 from the valve closing start position H1 shown in FIG. In the initial region Ra of the coating suspension time zone R leading to B, the coating liquid filling volume in the die-side space 16b under the valve closing condition is increased, and the coating remaining on the die D immediately after the coating suspension. Coating that passes from the discharge port Da of the die D to the end Cb of the coating area C by passing the liquid M through the liquid feeding path 13a in the direction of the arrow g and sucking it toward the die side space 16b. The liquid M (the portion surrounded by the broken line E in FIG. 1C) is sucked into the die D, and the entire width of the die discharge port Da is sucked. Over the solution break good to the end Cb of the coating zone C can be formed sharply so that the straight line along the longitudinal direction of the discharge port Da (transverse to the substrate W).

  Since the intermittent coating apparatus 11 of the present invention can supply the coating liquid pumped from the pumping means 12 to the branch space 16a by always increasing the excess flow rate of refluxing to the reflux path 15, it can be supplied more than the flow rate required for coating. It becomes possible to constantly increase the coating liquid pressure in the branch space 16a through which a large amount of flow passes, and the valve body 20 further advances from the valve closing end position H2 (FIG. 5) to the valve opening end position A (see FIG. 2). In this case, the coating liquid M can be quickly supplied from the branch space 16a having a high coating liquid pressure to the die D through the die side space 16b.

  The intermittent coating device 11 of the present invention has a simple configuration in which one valve body 20 of the valve device 17 is advanced and retracted from the valve opening end position A to the valve closing end position B by the valve element operating device 21. The initial period Qa of the coating time zone Q in which the coating liquid M is discharged from the die discharge port Da and the operation of the final period Rc of the coating pause time zone R, which is a preparation for forming the start edge Ct of the coating zone C in W , The operation in the continuous region Qb of the coating time zone Q in which the coating liquid M is continuously discharged from the die discharge port Da to form the coating region C of the substrate W, and the coating on the substrate W The operation of the end Qc of the coating time zone Q in which the discharge of the coating liquid M from the die discharge port Da is stopped to form the end Cb of the work area C and the discharging coating liquid M inside the die D In order to form the initial region Ra of the coating suspension time zone R to be sucked into the substrate and the non-coating region G of the substrate W, coating from the die discharge port Da is performed. Since the operation of the continuation region Rb of the coating suspension time zone R that stops the discharge of the liquid M can be continuously repeated, the device structure can be simplified and the timing of these operations can be easily adjusted. Have

(Second Embodiment)
In the intermittent coating apparatus 31 of the present invention according to the second embodiment shown in FIGS. 7 and 8, the valve device 37 is greatly different from the valve device 17 of the first embodiment, and the other parts are the first. The same reference numerals as in FIGS. 1 to 5 showing the first embodiment in FIG. 7 and FIG. 8 denote the corresponding parts.

  The valve device 37 includes a valve seat 39 provided at the boundary between the branch space 16 a of the casing 16 and the die side space 16 b, a valve body 38, and a valve body operating device 21 for moving the valve body 38 back and forth. The valve body 38 includes an O-ring formed in a short cylindrical main body portion 38a, a water passing portion 38c extending from the short cylindrical portion 38a to the branch space 16a, and an annular groove recessed in the outer peripheral surface of the main body portion 38a. Or an annular seal portion 38b with an internal seal or a Rotobari seal (registered trademark) or the like, and the outer diameter dimension of the water flow portion 38c is reduced toward the branch space 16a. When the valve is opened, a liquid passage having a small water passage resistance is formed between the water passage portion 38c and the valve seat 39. The valve seat 39 is formed in a ring shape projecting from the inner surface 16d of the casing 16 so that the annular seal portion 38b of the valve body 38 can be fitted into the circular through hole 39a formed inside without leaking. .

  The valve element operating device 21 pushes and pulls the valve rod 24 joined to the valve element 38, and the valve element 38 starts to close the valve as shown by a two-dot chain line as shown in FIG. 8A. While the valve H is in the closed state, the suction movement dimension L1 can be retracted (moved to the arrow e) from the position H1 to the valve closing end position B indicated by the solid line, and as shown in FIG. Extrusion forward movement (movement to the arrow d) can be performed by the movement dimension L2 for extrusion from the valve closing end position B indicated by the dotted line to the valve closing end position H2 indicated by the solid line while the valve is closed. The valve closing start position H1 and the valve closing end position H2 may be different positions or the same position depending on the structure of the annular seal portion 48h of the valve body 48.

(Third embodiment)
The present invention intermittent coating apparatus 41 according to the third embodiment shown in FIG. 9 to FIG. 14 is different from the first embodiment in the valve device 47, and other parts are the first embodiment. 9 to FIG. 14, the same reference numerals as those in FIG. 1 to FIG. 5 showing the first embodiment denote corresponding parts.

  The valve device 47 includes an annular valve seat 19 provided at the boundary between the branch space 16a of the casing 16 and the die side space 16b, a valve body 48, and a valve body operating device 21 for moving the valve body 48 back and forth. As shown in FIG. 10 (A), the advancing / retreating range of the body 48 is the suction movement dimension L1 from the valve closing start position H1 indicated by the two-dot chain line to the valve closing end position B indicated by the solid line while being closed. As shown in FIG. 5B, the valve closing end position H2 indicated by the solid line from the valve closing end position B indicated by the alternate long and two short dashes line as shown in FIG. Up to the pushing movement dimension L2, the pushing forward movement (movement to the arrow d) can be performed. Depending on the structure of the valve seat 19, the valve closing start position H1 and the valve closing end position H2 may be different positions or the same position.

  As in the first embodiment, the valve seat 19 is formed by an annular seal attached to the casing 16, for example, from an O-ring fitted into an annular groove (not shown) recessed in the casing 16. Can be used as the annular seal.

  The valve body 48 is formed by connecting a valve closing stroke region 48b near the die side space 16b and a valve opening stroke region 48d near the branching space 16a, and the valve seat 19 is in contact with the entire circumference of the valve closing stroke region 48b. A plurality of liquid passage portions 48c that can be opened and communicated with the die side space 16b and the branch space 16a without contacting the valve seat 19 in the valve opening stroke region 48d. Is provided. The outer peripheral surface 48a of the valve closing stroke region 48b has dimensions sufficient to ensure the suction movement dimension L1 and the pushing movement dimension L2 along the advancing and retreating direction of the valve body 48. As the valve body 48 advances toward the die side space 16b, the plurality of liquid passing portions 48c pass through all the liquid passing portions 48c from the branch space 16a and flow into the die side space 16b. The flow rate is formed so as to increase.

  As shown in FIG. 11, the valve opening stroke region 48d of the valve body 48 is composed of a plurality of liquid passing portion forming leg portions 48e extending at equal intervals from the valve closing stroke region 48b, and adjacent leg portions 48e. 48e is formed between the leg portions 48e, 48e, and the hollow space 48f is formed on the inner side surrounded by the leg portions 48e, 48e, so as to open the branch space 16a and communicate with the respective fluid passage portions 48c. Has been. When the valve body 48 is in the flow rate adjustment state shown in FIG. 9, the arc-shaped outer surface of each liquid passage portion forming leg 48 e abuts the valve seat 19, and the opened liquid passage portion 48 c has the valve seat 19. It does not come into contact with. The valve body 48 in the flow rate adjustment state passes the coating liquid M pressure-fed to the branch space 16a through the inner hollow part 48f (see FIG. 11) and the part opened to the die side space 16b in each liquid passing part 48c. Then, it can be guided to the die side space 16b and supplied to the die D. The valve body 48 advances (arrow d) in the direction toward the die side space 16b and passes through the valve opening stroke region 48d as the opening area of each liquid passing portion 48c opening in the die side space 16b increases. The flow rate of the coating liquid to be increased can be increased.

  As shown in FIG. 12, each fluid passing portion 48c formed in the valve opening stroke region 48d of the valve body 48 is recessed in a part of the outer peripheral surface 48a extending from the valve closing stroke region 48b, and is directed toward the branch space 16a. The depth dimension h in the radial direction can be increased as the distance increases. Further, as shown in FIG. 13, each liquid passing portion 48c formed in the valve opening stroke region 48d of the valve body 48 has a frustoconical shape so that the radius of the outer peripheral surface becomes smaller toward the branch space 16a side. It is also possible to form it.

  As shown in FIG. 9, the valve device 47 is applied as it advances (arrow d) in the direction toward the die side space 16 b with the valve seat 19 facing the valve closing stroke region 48 b of the valve body 48. Since the flow rate of the working fluid can be increased, it is formed on the substrate W by changing the valve opening end position A which is the stop position of the valve body 48 and adjusting the flow rate of the coating fluid supplied to the die D. The coating film thickness of the coating area C to be applied can be set to an optimum value.

DESCRIPTION OF SYMBOLS 11 ... This invention intermittent coating apparatus, 12 ... Pressure feed means, 13 ... Liquid feed path, 13a ... Die side liquid feed path, 13b ... Pressure feed means side liquid feed path, 14 ... Intermittent supply apparatus, 15 ... Return path, 16 ... Casing, 16a ... Branch space, 16b ... Die side space, 17 ... Valve device, 18 ... Control device, 19 ... Valve seat, 20 ... Valve body, 20a ... Outer peripheral surface, 20b ... Valve closing stroke region, 20c ... Liquid passing part , 20d ... Valve opening stroke area, 21 ... Valve body operating device, 22 ... Driving source, 23 ... Power transmission mechanism, 24 ... Valve shaft, 25 ... Seal, 26 ... Fastener, 27 ... Pressure regulating valve, A ... Open Valve position, B ... Valve closing position, Rb ... Continuation zone, C ... Coating zone, Cb ... Termination, Ct ... Start end, D ... Die, Da ... Discharge port, F ... Valve body opening, G ... Non-coating Work area, H: Open / close branch position, L: Dimensions for suction / pumping, M ... Coating liquid, P ... Pump, Q ... Coating time zone, Qa ... Initial area, Q ... Continuous area, Qc ... Terminal area, R ... Coating stop time zone, Ra ... Initial area, Rb ... Continuous area, Rc ... Terminal area, T ... Tank, 31 ... Intermittent coating apparatus of the present invention, 37 ... Valve apparatus, DESCRIPTION OF SYMBOLS 38 ... Valve body, 38a ... Main part, 38b ... Water flow part, 38c ... Annular seal part, 39 ... Valve seat, 39a ... Through-hole, 41 ... This invention intermittent coating apparatus, 47 ... Valve apparatus, 48 ... Valve body, 48a ... outer peripheral surface, 48b ... valve closing stroke region, 48c ... liquid passing portion, 48d ... valve opening stroke region, 48e ... leg portion, 48f ... hollow portion, h ... depth dimension

Claims (3)

A die that discharges the coating liquid from the discharge port, a pressure feeding means that pumps the coating liquid, and a gap between the die and the pressure feeding means. The coating liquid is intermittently supplied to the die and is unnecessary. In the intermittent coating device provided with an intermittent supply device for returning the gas to the reflux path,
The intermittent supply device includes a casing and a valve device,
The casing is formed therein with a branch space communicating with the pressure feeding means and the reflux path, and a die side space communicating with the die while being able to communicate with the branch space,
The valve device includes a valve seat provided at a boundary between the branch space of the casing and the die-side space, and a valve seat that is located in the die-side space and moves away from the valve seat to the branch space. A valve body that is fitted in the valve seat without leakage and moves in the closed state until it can move forward and backward, and the valve body from the open end position to the closed end position. A valve body operating device that moves forward toward the valve open end position or retreats toward the valve close end position, and is capable of advancing for extrusion from the valve closed end position while the valve body is in a closed state and is closed An intermittent coating device characterized by being formed so that it can be retracted to the end position. The valve seat is formed by an annular seal attached to the casing;
The valve body is formed by connecting a valve closing stroke area closer to the die side space and a valve opening stroke area closer to the branch space. An outer peripheral surface having a dimension capable of securing the backward movement for suction is formed along the forward / backward direction, and extends in the forward / backward direction so that it can be opened in the die side space and the branch space without contacting the valve seat in the valve opening stroke area. 2. The intermittent coating apparatus according to claim 1, wherein a liquid passing part for adjusting the flow rate is provided, and the liquid passing part is formed so that the flow rate passing through the liquid passing part increases as it moves toward the die side space. .   The valve body operating device is provided between a valve shaft and a drive source, a valve shaft extending from the valve body and penetrating the casing, a drive source including an electric servo motor capable of positioning control and speed control A power transmission mechanism that transmits the rotational force of the electric servo motor to the valve shaft to move the valve element back and forth, and closes each valve from the opening end position to each elapsed time in the time period from start to stop of the valve element. The intermittent coating apparatus according to claim 1 or 2, wherein a relation with each passage position of the valve body between the valve end positions can be arbitrarily set.

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