JP2011063779A - Surface treatment apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To obtain a surface treatment apparatus that reliably treats one side of a film. <P>SOLUTION: The surface treatment apparatus includes a housing 2 for treating, in its inside, the surface of a film 1 as a material to be treated, a mixed gas supply part 3 as a source of a mixed gas containing fluorine gas, a mixed gas supply pipe 4 connected to a predetermined part of the housing 2 and for supplying a mixed gas thereto from the mixed gas supply part 3, rolls 5, a feeding roll 6 having the film 1 wound therearound and feeding the film 1 to the rolls 5, a take-up roll 7 that takes up the film 1 fed via the rolls 5, and a detoxifying part 9 that recovers the mixed gas from the inside of the housing 2 via a gas discharge pipe 8 for removing the fluorine gas and detoxifying the mixed gas. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a surface treatment apparatus that performs surface treatment of an object to be treated with fluorine gas.

  Conventionally, surface treatment apparatuses have been known. For example, an apparatus described in Patent Document 1 below can be given. The apparatus of Patent Document 1 includes an extrusion means, a film surface activation means provided with fluorine gas supply pipes at regular intervals on both sides in the width direction of a rectangular parallelepiped housing in which an inlet and an outlet are formed above and below, and an antifogging agent. An apparatus for producing a synthetic resin antifogging film for agriculture, comprising a coating means, a vertical dryer, and a film take-up roll.

Japanese Patent No. 3324037

  In the apparatus described in Patent Document 1, single-sided processing can be performed by spraying fluorine gas from one side to the object to be processed in the housing. However, since the fluorine gas wraps around to the back surface, it may be impossible to perform processing on only one side.

  Therefore, an object of the present invention is to provide a surface treatment apparatus capable of reliably performing one-side treatment.

(1) The surface treatment apparatus of the present invention has a contact surface that contacts in a state where the sheet-like object to be processed is bent, and a roll unit that conveys the object to be processed along the contact surface; A surface treatment chamber for surface treatment by blowing a mixed gas containing fluorine gas supplied from a gas source onto one surface of the object to be treated on the roll unit, and between the surface treatment chamber and the object to be treated And a gas collection chamber for collecting the mixed gas leaked from the tank.

  According to the configuration of (1) above, it is possible to provide a surface treatment apparatus that can perform single-side treatment reliably and easily. Further, since the gas collection chamber collects the mixed gas leaked from between the surface treatment chamber and the object to be treated, a surface treatment apparatus capable of safe operation can be provided.

(2) In the surface treatment apparatus according to (1), the surface treatment chamber is formed inside a substantially rectangular parallelepiped long member having an opening on the roll side, and the inside of the long member. And a first rectifying member having a flow path that rectifies at least in the width direction of the object to be processed. Preferably, a mixed gas supply pipe for supplying the mixed gas from the gas source is connected to the mixed gas dispersion chamber.

  According to the configuration of (2) above, the object to be processed is obtained by the mixed gas that has passed through the first rectifying member from the mixed gas dispersion chamber and is uniformly ejected in the width direction of the object to be processed in the surface treatment chamber. The surface of an object can be processed more uniformly and with high efficiency.

(3) In the surface treatment apparatus according to (1) or (2), the gas collection chamber is formed inside another elongate member having an opening surrounding the periphery of the opening of the surface treatment chamber. It is preferred that

(4) As another aspect, in the surface treatment apparatus according to (1) or (2), the gas collection chamber has a cylindrical body having an opening adjacent to the opening of the surface treatment chamber. It may be formed inside.

  According to the configuration of (3) or (4) above, the mixed gas leaked from between the surface treatment chamber and the object to be treated can be reliably collected.

(5) In the surface treatment apparatus of (1) to (4) above, the gas collection chamber is formed by partitioning the inside of the gas collection chamber, and at least uniformly ejected in the width direction of the object to be processed. It is preferable that a second rectification member having a flow path for rectification is provided, and a gas discharge pipe for discharging the collected gas to the outside is connected to the gas collection chamber.

  According to the configuration of (5) above, the gas flow on the surface of the object to be processed is prevented from drifting via the second rectifying member, and leaked from between the surface treatment chamber and the object to be processed. Since the mixed gas can be sucked in uniformly, it is possible to operate safely while processing the surface of the object to be processed more uniformly.

(6) In the surface treatment apparatus according to (1) to (5), the roll unit includes a main roll that faces the surface treatment chamber, and the axial length of the main roll is the substantially rectangular parallelepiped. It is preferably longer than the width of the long member, and the width of the substantially rectangular parallelepiped long member is wider than the width of the workpiece.

  According to the configuration of (6) above, by bringing one side of the object to be processed into close contact with the main roll, it is possible to prevent the mixed gas from flowing into the contact part with the one side of the object to be processed. As a result, it is possible to perform surface treatment only on the other side (surface treatment chamber side) of the workpiece.

(7) In the surface treatment apparatus of said (1)-(6), it is preferable that the opening part of the said surface treatment chamber has a shape along the surface of the said roll part. Furthermore, a slidable member such as Teflon (registered trademark) may be provided in the side opening of the surface treatment chamber.

  According to the configuration of (7) above, since the distance between the object to be processed and the opening of the surface treatment chamber can be set to a predetermined distance, it is possible to further suppress the drift of the gas flow when the mixed gas leaks from the side opening. As a result, the surface of the object to be processed can be more uniformly processed. In addition, since a slidable member such as Teflon (registered trademark) is provided in the side opening of the surface treatment chamber, the processing chamber, the roll unit, and the like can be obtained by using the thickness of the slidable member. It is possible to prevent the non-uniformity in the flow rate of the mixed gas due to leaking in the roll axis direction at the side when the mixed gas leaks from the processing chamber to the gas collection chamber. It is possible to further reduce the processing unevenness at the width direction end of the workpiece.

(8) In the surface treatment apparatus according to (1) to (7), it is preferable that the first rectifying member or the second rectifying member is made of a mesh member or a porous member.

  According to the configuration of (8) above, the above-described effects can be surely achieved.

1 is a schematic configuration diagram of a surface treatment apparatus according to a first embodiment of the present invention. It is a partially expanded view of the surface treatment apparatus of FIG. (A) is AA arrow sectional drawing of the housing in the surface treatment apparatus of FIG. 1, (b) is BB arrow sectional drawing of the housing in the surface treatment apparatus of FIG. It is a block diagram which shows schematic structure of the mixed gas supply part in the surface treatment apparatus of FIG. It is a schematic block diagram of the surface treatment apparatus which concerns on 2nd Embodiment of this invention. FIG. 6 is a partially enlarged view of the surface treatment apparatus of FIG. 5. It is a schematic block diagram of the housing of the surface treatment apparatus which concerns on the Example of this invention. It is a schematic block diagram of the surface treatment apparatus which concerns on the modification of 1st Embodiment.

<First Embodiment>
Hereinafter, a surface treatment apparatus according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a schematic configuration diagram of a surface treatment apparatus according to the first embodiment of the present invention. FIG. 2 is a partially enlarged view of the surface treatment apparatus of FIG. 3A is a cross-sectional view taken along the line AA of the housing of FIG. 2, and FIG. 3B is a cross-sectional view taken along the line BB of the housing of FIG.

  The surface treatment apparatus 1000 according to the present embodiment includes a housing 2 for surface-treating a film 1 that is an object to be processed, a mixed gas supply unit 3 that is a gas source of a mixed gas containing fluorine gas, and a housing. 2, the mixed gas supply pipe 4 that supplies the mixed gas from the mixed gas supply unit 3, the roll unit 5, and the film 1 are wound, and the film 1 can be sent out to the roll unit 5. A mixed gas is recovered from the inside of the housing 2 via a gas feed pipe 6, a take-up roll 7 capable of winding the film 1 sent via the roll unit 5, and a gas discharge pipe 8, and fluorine gas And an abatement part 9 that removes and detoxifies. In the following, each part will be described in detail as necessary.

  As shown in the cross-sectional view of FIG. 2, the housing 2 has a substantially rectangular parallelepiped long member 2a having an opening 21a on the roll 5 side and a top plate 2c on the side opposite to the opening 21a. A substantially rectangular parallelepiped elongated member 2b provided inside the elongated member 2a, having an opening 22a on the roll portion 5 side and closed on the opposite side of the opening 22a by a top plate 2c. ing. A mixed gas supply pipe 4 is connected to the inside of the long member 2b via a top plate 2c, and a surface treatment chamber 21 for surface-treating the film 1 is formed. The long member 2a And the elongated member 2b are connected to a gas discharge pipe 8 through a top plate 2c, and a gas collection chamber 22 for collecting the mixed gas leaked from the surface treatment chamber 21 is formed. Note that the length of the surface treatment chamber 21 in the longitudinal direction is configured to be wider than the width of the film 1 as shown in FIG. Thereby, the process nonuniformity of the width direction edge part of the film 1 can be reduced.

  In the surface treatment chamber 21, there is a dispersion means for dispersing the mixed gas supplied into the surface treatment chamber 21, and a rectifying member 24 that partitions the surface treatment chamber 21 and forms a mixed gas dispersion chamber 23. Is provided. The rectifying member in the present specification is a mesh member formed using a metal mesh or a metal wire, or a porous member made of a sintered body or formed with a large number of through holes. The film 1 has a flow path that rectifies the gas so that the gas is uniformly ejected in the width direction. Here, the rectifying member may have a flow path that rectifies the gas not only in the width direction of the film 1 but also in the length direction of the film 1 so that the gas is uniformly ejected. A mixed gas supply pipe 4 is directly connected to the mixed gas dispersion chamber 23. By using such a mixed gas dispersion chamber 23, it is possible to eject the gas flow through the rectifying member 24 while preventing the gas flow from drifting, and to flow uniformly to the opening 21 a of the surface treatment chamber 21 at least in the width direction. is there. The opening 21a is formed to have a shape along the surface of the main roll 5a.

  In the gas collection chamber 22, an annular rectifying member 26 that partitions the internal space of the gas collection chamber 22 and forms a gas collection small chamber 25 is provided. If the gas collecting small chamber 25 is used, the gas flow can be uniformly sucked through the rectifying member 26 so as not to drift, and the gas leaking from the surface treatment chamber 21 can be discharged through the gas discharge pipe 8. Can be discharged to the outside.

  As shown in FIG. 4 (the arrow indicates the direction of gas flow), the mixed gas supply unit 3 includes a fluorine gas tank 31 in which fluorine gas is stored, and a mass flow rate of fluorine gas supplied from the fluorine gas tank 31. A mass flow controller for fluorine gas (hereinafter referred to as “fluorine gas MFC”) 32, an oxygen gas tank 33 in which oxygen gas is stored, and a mass flow rate of oxygen gas supplied from the oxygen gas tank 33 are controlled with high accuracy. A mass flow controller for oxygen gas (hereinafter referred to as “oxygen gas MFC”) 34 that is controlled with high accuracy, and a vacuum generator (hereinafter referred to as “vacuum generator”) that sucks fluorine gas by generating a vacuum using the flow rate of the supplied oxygen gas. VG) 35 and a mixer 36 for mixing fluorine gas and oxygen gas. A mixed gas is supplied to the surface treatment chamber 21 of the housing 2 from the mixed gas supply unit 3 having such a configuration.

  The roll unit 5 includes a main roll 5 a that is longer in the axial direction than the width of the film 1, and guide rolls 5 b and 5 c. Further, by using the guide rolls 5b and 5c, it becomes possible to change the area (length) in which the film 1 contacts the main roll 5a by using the guide rolls 5b and 5c. The length can be extended along the circumference of the main roll 5a, and strong processing can be performed without changing the processing speed (film traveling speed). In that case, you may change the rectification | straightening member 24 installed in this surface treatment chamber into the shape in alignment with the circumferential shape of the main roll 5. FIG. The film 1 can be adhered to the surface of the main roll 5a. Here, as a modified example, the roll unit 5 may have only the main roll 5a without using the guide rolls 5b and 5c. In addition, by making one side of the film 1 adhere to the main roll 5a, it is possible to prevent the mixed gas from flowing into a contact portion with the one side of the film 1. As a result, it is possible to perform surface treatment only on the surface treatment chamber 21 side of the film 1.

  The gas discharge pipe 8 has a part branched in two in the middle of the part connected to the abatement part 9, and exhaust pumps 10 and 11 are provided in the middle of the two pipes. It has been. Thereby, even if one of the exhaust pumps 10 and 11 breaks down, the exhaust can be performed with the other one, so that the safety is high.

  Next, the operation of the surface treatment apparatus 1000 according to this embodiment will be described. First, the exhaust pumps 10 and 11 are operated, and the air in the gas collection chamber 22 including the gas collection small chamber 25 is continuously discharged through the gas discharge pipe 8. In particular, the amount of gas discharged from the gas collection chamber 22 is adjusted to form a gas flow in the surface treatment chamber 21 of the housing 2 (a gas flow from the mixed gas dispersion chamber 23 toward the opening 21a). Next, the mixed gas supply unit 3 is operated. Specifically, the oxygen gas is supplied to the VG 35 while controlling the mass flow rate from the oxygen gas tank 33 with high accuracy using the oxygen gas MFC 34 shown in FIG. At this time, a vacuum is generated inside using the flow rate of oxygen gas, and a mixed gas having a predetermined mixing ratio is created while controlling the mass flow rate from the fluorine gas tank 31 with high accuracy using the MFC 32 for fluorine gas. Next, the prepared mixed gas is supplied to the mixer 36 to make the concentration uniform. Subsequently, the mixed gas is supplied into the mixed gas dispersion chamber 23 in the surface treatment chamber 21 of the housing 2 through the mixed gas supply pipe 4. The mixed gas supplied into the mixed gas dispersion chamber 23 can be uniformly dispersed without flowing through the gaps of the mesh member 24 and flow through the surface treatment chamber 21. That is, the mixed gas supplied into the surface treatment chamber 21 flows uniformly dispersed from the mixed gas dispersion chamber 23 toward the opening 21a. After sufficiently filling the surface treatment chamber 21 with the mixed gas in this way, the feed roll 6 and the take-up roll 7 are operated, and the film 1 is placed between the opening 21 a and the main roll 5 a in the surface treatment chamber 21 of the housing 2. The film is fed in between, and the surface treatment of one side of the film is uniformly performed.

  At this time, by preventing the gas from drifting by the rectifying member 26 in the gas collection chamber 22, the mixed gas is widely captured and guided into the gas collection chamber 22, and the mixed gas is passed through the gas discharge pipe 8. Is discharged to the abatement part 9 to make it harmless. Thereby, the surface treatment apparatus 1000 which can be drive | operated safely can be provided.

  According to the said structure, there exist the following effects. That is, it is possible to provide a surface treatment apparatus 1000 that can reliably and easily perform one-side treatment. Further, since the gas collection chamber 22 collects the mixed gas leaked from between the surface treatment chamber 21 and the film 1 to be processed, the surface treatment apparatus 1000 capable of safe operation can be provided.

  Further, the surface (one side) of the film 1 to be processed is made more uniform and high by the fluorine gas that is uniformly dispersed in the surface treatment chamber 21 through the flow straightening member 24 from the mixed gas dispersion chamber 23. It can be processed with efficiency.

  Further, since the gas collection chamber 22 is a substantially rectangular parallelepiped long member having an opening 22a surrounding the opening 21a of the surface treatment chamber 21, the surface treatment chamber 21, the film 1, It is possible to reliably collect the mixed gas leaking from between the two.

  Further, the gas collection chamber 22 is partitioned to form a gas collection chamber 25 and a gas discharge pipe 8 for discharging the collected gas to the outside is connected to the gas collection chamber 25. Therefore, the mixed gas leaked from between the surface treatment chamber 21 and the film 1 can be sucked in uniformly while preventing the gas flow on the surface of the film 1 from drifting through the rectifying member 26. As a result, the apparatus can be operated safely while processing the surface of the film 1 more uniformly.

  In addition, since the end of the cross section of the opening 21a in the axial direction of the main roll 5a is formed in a shape along the surface of the main roll 5a, the distance between the film 1 and the opening 21a of the surface treatment chamber 21 is increased. Since the distance can be set to a predetermined distance, it is possible to further suppress the drift of the gas flow when the mixed gas leaks from the opening 21a. As a result, the surface of the film 1 can be treated more uniformly.

  In addition, since the width of the surface treatment chamber 21 is wider than the width of the film 1 that is the object to be processed, processing unevenness at the end in the width direction of the film 1 can be reduced.

  Here, in the present embodiment, the case where the surface of the object to be processed is treated using a mixed gas containing oxygen gas is shown, but as a modification, nitrogen gas or / and other may be used instead of oxygen gas. A mixed gas containing the above gas may be used.

Second Embodiment
Next, a surface treatment apparatus according to a second embodiment of the present invention will be described with reference to FIGS. FIG. 5 is a schematic configuration diagram of a surface treatment apparatus according to the second embodiment of the present invention. FIG. 6 is a partially enlarged view of the surface treatment apparatus of FIG. In addition, the part of the codes | symbols 41 and 43-51 in this embodiment are the same as that of the part of the codes | symbols 1 and 3-11 of the said 1st Embodiment in order, and description may be abbreviate | omitted.

  The surface treatment apparatus 2000 according to the present embodiment is different from the first embodiment in that a surface treatment unit 42 having cylindrical bodies 60, 61, 62 is provided instead of the housing 2. Other portions are the same as those in the first embodiment.

  The cylindrical body 60 is a substantially rectangular parallelepiped member having an opening 60 a longer than the width of the film 41 in the axial direction of the main roll 45 a and is provided so as to be sandwiched between the cylindrical bodies 61 and 62. In addition, a surface treatment chamber 63 is formed inside the cylindrical body 60, and a rectifying member 65 that partitions the surface treatment chamber 63 and forms a mixed gas dispersion chamber 64 is provided. A mixed gas supply pipe 44 is directly connected to the mixed gas dispersion chamber 64 so that the mixed gas from the mixed gas supply unit 43 is supplied. One or more mixed gas supply pipes 44 may be provided, and when two or more mixed gas supply pipes 44 are provided, it is preferable that they are arranged at equal intervals.

  The cylindrical body 61 is a member having the same configuration as that of the cylindrical body 60, and a gas collection chamber 66 is formed inside the cylindrical body 61, and the gas collection chamber 66 is partitioned to partition the gas collection chamber 66. A rectifying member 68 is provided. The cylindrical body 62 is a member having the same configuration as that of the cylindrical body 60, and a gas collection chamber 69 is formed inside the cylindrical body 62, and the gas collection chamber 69 is partitioned to provide gas. A rectifying member 71 forming a collection chamber 70 is provided. A gas discharge pipe 48 is directly connected to each of the gas collecting small chambers 67 and 70. During operation of the apparatus, after collecting the mixed gas leaking from the surface treatment chamber 63 of the cylindrical body 60, the abatement part 49 can be discharged. One or more gas discharge pipes 48 may be provided, and when two or more gas discharge pipes 48 are provided, it is preferable that the gas discharge pipes 48 be arranged at equal intervals.

  Next, the operation of the surface treatment apparatus according to this embodiment will be described. First, as in the first embodiment, the exhaust pumps 50 and 51 are operated, and the air in the gas collection chambers 66 and 69 including the gas collection small chambers 67 and 70 is discharged via the gas discharge pipe 48. Keep going. In particular, the amount of gas discharged from the gas collection chambers 66 and 69 is adjusted to form a gas flow in the surface treatment chamber 63 of the cylindrical body 60 (a gas flow from the mixed gas dispersion chamber 64 toward the opening 60a). . Next, as in the first embodiment, the mixed gas supply unit 43 is operated, and the fluorine gas is introduced into the mixed gas dispersion chamber 64 in the surface treatment chamber 63 of the cylindrical body 60 via the mixed gas supply pipe 44. A mixed gas of oxygen and oxygen gas is supplied. The mixed gas supplied into the mixed gas dispersion chamber 64 can flow uniformly through the surface treatment chamber 63 without being unevenly distributed through the gap of the rectifying member 65. That is, the mixed gas supplied into the surface treatment chamber 63 flows uniformly dispersed from the mixed gas dispersion chamber 64 toward the opening 60a. After the surface treatment chamber 63 is sufficiently filled with the mixed gas in this way, the feed roll 46 and the take-up roll 47 are operated to feed the film 41 between the opening 60a and the main roll 45a in the cylindrical body 60. The surface treatment of one side of the film 41 is uniformly performed.

  At this time, by preventing the gas from drifting by the rectifying members 68 and 71 in the gas collection chambers 66 and 69, the mixed gas is widely captured and guided into the gas collection chambers 66 and 69, and the gas discharge pipe The mixed gas is discharged to the detoxifying section 49 through 48 to make it harmless. Thereby, the surface treatment apparatus 2000 which can be drive | operated safely can be provided.

  According to the said structure, there can exist an effect similar to 1st Embodiment. Here, in the present embodiment, the case where the surface of the object to be processed is treated using a mixed gas containing oxygen gas is shown, but as a modification, nitrogen gas or / and other may be used instead of oxygen gas. A mixed gas containing the above gas may be used.

  Next, the present invention will be described using examples. Here, the surface of the fluorine gas is applied to one surface (treated surface) of the film using a surface treatment device (Example) provided with the flow regulating member according to the present invention and a surface treatment device (Comparative Example) not provided. The treatment modification was performed, and the contact angle of pure water on both sides of the obtained film was measured to evaluate the uniformity of the surface treatment modification. This verifies the effect of the rectifying member. In addition, the said pure water contact angle measurement was performed on the conditions of 9 microliters of purified water at room temperature and room | chamber interior atmosphere using the measuring apparatus (G-1) by Elma Sales Co., Ltd.

  For the verification film, polyimide film (Kapton (registered trademark) 100H manufactured by Toray DuPont Co., Ltd .: thickness 25 μm, width 520 mm, length 550 m), polyethylene film (thickness 100 μm, width 500 mm, length 550 m), Was used. In addition, the uniformity evaluation of the surface treatment modification of the film was carried out with a film running speed of 50 m / min, a flow rate of a mixed gas of oxygen gas and fluorine gas (fluorine gas concentration 1%) of 6 L / min (1 in the surface treatment chamber 1 It was carried out on the film obtained as a film that can be substituted for about 1 minute. In addition, the analysis of the processed surface of each film after processing is performed by setting the film 10 m after the start of running to 0 (reference point) every 150 m in the length direction and 0 to which no gas discharge pipe is connected. The pure water contact angle measurement was performed 10 times at each point every 10 cm in the width direction, and the average value was calculated. Moreover, the analysis of the non-processed surface in each film after a process was the same as that of the process surface except having measured every 25 cm in the width direction. Here, the apparatus configuration in each example is as follows.

(Device of Example 1)
In this example, an apparatus almost the same as the surface treatment apparatus shown in the first embodiment was used. However, the surface treatment apparatus according to this example is (1) the surface treatment chamber 101 instead of the mixed gas supply pipe 4 connected to the surface treatment chamber 21 (mixed gas dispersion chamber 23) in the first embodiment. (2) gas collection chamber 22 (gas collection in the first embodiment), using a mixed gas supply pipe 84 (see FIG. 7) provided at the center of the (mixed gas dispersion chamber similar to the mixed gas dispersion chamber 23) Instead of the gas discharge pipes 8 connected to the plurality of small chambers 25), two gas discharge pipes 88 (FIG. 7) provided at the side of the gas collection chamber 102 (the same gas collection small chamber as the gas collection small chamber 25). Is different from the surface treatment apparatus 1000 according to the first embodiment. In addition, the part of the code | symbol 81, 82, 82a, 82b, 82c, 85a, 101, 102 in FIG. 7 which showed a part of surface treatment apparatus of a present Example is the code | symbol 1, 2, in 1st Embodiment in order. Since it is the same as the parts 2a, 2b, 2c, 5a, 21, and 22, the description may be omitted. Moreover, since the part which is not illustrated in FIG. 7 is the same as that of the first embodiment, the description may be omitted.

  Specific dimensions of main parts of the surface treatment apparatus are as follows. In the surface treatment chamber 101, the width (length in the longitudinal direction) is 600 mm, the length in the short direction is 150 mm, the shortest distance from the surface of the main roll 85a to the rectifying member 84 is 50 mm, and the opening from the surface of the main roll 85a The distance to the edge is about 1 mm. In the gas collection chamber 102, the width (length in the longitudinal direction) is 700 mm, the height from the surface of the main roll 85a to the outer edge position of the opening is about 10 mm, and from the surface of the main roll 85a to the inner edge position of the opening. The distance is about 1 mm. In the main roll 85a, the width (length in the longitudinal direction) is 900 mm.

  The rectifying member in the surface treatment chamber 101 is a sintered metal filter that generates a pressure resistance value with respect to the flow rate of about 30 kPa over the entire area with respect to the set flow rate. Moreover, the rectifying member in the gas collection chamber 102 was a sintered metal filter having an exhaust flow rate such that the wind speed at the opening was 1 m / s.

(Device of Comparative Example 1)
The apparatus was the same as the surface treatment apparatus according to Example 1 except that the flow regulating member in the surface treatment chamber was removed.

(Device of Comparative Example 2)
The apparatus was the same as the surface treatment apparatus according to Example 1 except that the rectifying member in the gas collection chamber was removed.

  The contact angle measurement results for evaluating the uniformity of the surface treatment modification in the films obtained using the apparatuses of Example 1 and Comparative Examples 1 and 2 are shown below.

  According to the apparatus of Example 1, it can be seen that the film is processed so that the uniformity of the surface treatment modification of the film is higher than when the apparatuses of Comparative Examples 1 and 2 are used. Therefore, it can be understood that the use of the rectifying member has the uniformity effect of the surface treatment modification. Moreover, it can be seen from Tables 1 and 2 that by using the main roll 85a, single-sided treatment is reliably achieved (the non-film-treated surfaces are not surface-modified).

  The present invention can be changed in design without departing from the scope of the claims, and is not limited to the above-described embodiments, examples, or modifications. For example, the arrangement of the mixed gas supply pipe and the gas discharge pipe in the first embodiment is as shown in FIG. 3, but it is not always necessary to have such a configuration, and a configuration that can supply gas uniformly to the surface treatment chamber. It only has to be.

  Further, instead of the fluorine gas tank, oxygen gas tank, nitrogen gas tank of the gas supply unit in each of the above embodiments or modifications, a fluorine gas generator, an oxygen gas generator, which generates fluorine gas, oxygen gas, nitrogen gas on the spot, A nitrogen gas generator may be used.

  Moreover, in each said embodiment or modification, you may make the conveyance direction of a film into the direction which goes to the sending roll side from the winding roll side.

  Moreover, in each said embodiment or modification, the material (for example, material with which nickel plating or the surface coated nickel plating or fluororesin) which has corrosion resistance of fluorine gas is used for the part which fluorine gas touches. preferable.

  Further, in the second embodiment, the case where there are two gas collection chambers has been shown. However, as long as the leaked mixed gas can be collected sufficiently, only one or more gas collection chambers are provided. Good. Further, the mesh member in the gas collection chamber in each of the above embodiments may not be provided.

  Moreover, in each said embodiment or modification, it is provided in the chamber which is a closed room, and it may be comprised so that a surface treatment apparatus can be remotely operated from the outside. Thereby, the surface treatment apparatus can be operated more safely.

  Moreover, as a modification of the first embodiment, as shown in FIG. 7, a structure that can surface-treat the opposite surface side of the film 1 downstream of the guide roll 5 c of the first embodiment (in the first embodiment). It is good also as the surface treatment apparatus 3000 which provides the site | part of the codes | symbols 2-5, 7-11, and the site | part of the same code | symbol 122-125, 127-131 in order, and can perform the surface treatment of both surfaces of a film. Note that similar modifications can be made in the second embodiment. Moreover, each embodiment may be combined and surface treatment of both surfaces of a film may be sufficient.

  Moreover, you may provide slidable members, such as a Teflon (trademark), in the side opening part of the surface treatment chamber in the said 1st, 2nd embodiment or an Example. By utilizing the thickness of the slidable member, it is easy to set the interval between the surface treatment chamber and the roll portion to a predetermined interval, and when the mixed gas leaks from the surface treatment chamber to the gas collection chamber, the side surface In this case, it is possible to prevent non-uniformity in the flow rate of the mixed gas due to leakage in the roll axis direction, and it is possible to further reduce the processing unevenness at the width direction end of the workpiece.

1, 41, 81 Film 2, 122 Housing 2a, 2b, 2d, 82a, 82b, 82d Long member 60, 61, 62 Cylindrical body 2c, 82c Top plate 3, 43, 123 Mixed gas supply unit 4, 44 , 84, 124 Mixed gas supply pipe 5, 45, 125 Roll unit 5a, 45a, 85a, 125a Main roll 5b, 5c, 45b, 45c, 125b, 125c Guide roll 6, 46 Delivery roll 7, 47, 127 Winding roll 8, 48, 88, 128 Gas exhaust pipes 9, 49, 139 Detoxifying parts 10, 11, 50, 51, 130, 131 Exhaust pumps 21, 63, 101 Surface treatment chambers 21a, 22a, 60a Opening parts 22, 66, 69, 102 Gas collection chambers 23, 64 Mixed gas dispersion chambers 24, 26, 65, 68, 71 Rectifying members 25, 67, 70 Gas collection chambers MFC for 1 fluorine gas tank 32 fluorine gas
33 Oxygen gas tank 34 MFC for oxygen gas
36 Mixer 42 Surface treatment unit 1000, 2000, 3000 Surface treatment device

Claims (8)

A roll portion that has a contact surface that contacts the sheet-like object to be processed in a bent state, and conveys the object to be processed along the contact surface;
A surface treatment chamber for performing surface treatment by blowing a mixed gas containing fluorine gas supplied from a gas source onto one surface of the object to be treated on the roll unit;
A surface treatment apparatus comprising: a gas collection chamber that collects a mixed gas leaked from between the surface treatment chamber and the workpiece. The surface treatment chamber is formed in a substantially rectangular parallelepiped long member having an opening on the roll portion side, and a mixed gas dispersion chamber for partitioning the inside of the long member and dispersing the mixed gas. And a first rectifying member having a flow path for rectifying so as to be uniformly ejected at least in the width direction of the object to be processed.
The surface treatment apparatus according to claim 1, wherein a mixed gas supply pipe that supplies the mixed gas from the gas source is connected to the mixed gas dispersion chamber.   The said gas collection chamber is formed in the inside of another elongate member which has the opening part surrounding the circumference | surroundings of the opening part of the said surface treatment chamber, The Claim 1 or 2 characterized by the above-mentioned. Surface treatment equipment.   The said gas collection chamber is what is formed in the inside of the cylindrical body which has the opening part provided adjacent to the opening part of the said surface treatment chamber, The Claim 1 or 2 characterized by the above-mentioned. Surface treatment equipment. A gas collecting chamber is formed by partitioning the inside of the gas collecting chamber, and a second rectifying member having a flow path for rectifying at least in the width direction of the workpiece is provided. ,
The surface treatment apparatus according to claim 1, wherein a gas discharge pipe for discharging the collected gas to the outside is connected to the gas collection chamber. The roll unit has a main roll facing the surface treatment chamber;
The axial length of the main roll is longer than the width of the substantially rectangular parallelepiped member,
The surface treatment apparatus according to any one of claims 1 to 5, wherein a width of the elongated member having a substantially rectangular parallelepiped is wider than a width of the workpiece.   The surface treatment apparatus according to claim 1, wherein the opening of the surface treatment chamber has a shape along the surface of the roll part. The surface treatment apparatus according to claim 1, wherein the first rectifying member or the second rectifying member is a mesh member or a porous member.

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