CN103636294A - Plasma generating method and generating device - Google Patents
Plasma generating method and generating device Download PDFInfo
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- CN103636294A CN103636294A CN201280031442.1A CN201280031442A CN103636294A CN 103636294 A CN103636294 A CN 103636294A CN 201280031442 A CN201280031442 A CN 201280031442A CN 103636294 A CN103636294 A CN 103636294A
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- dielectric tube
- fluid
- plasma generating
- service pipe
- water service
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
- C01B13/10—Preparation of ozone
- C01B13/11—Preparation of ozone by electric discharge
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
- H05H1/2443—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube
- H05H1/245—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube the plasma being activated using internal electrodes
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/20—Electrodes used for obtaining electrical discharge
- C01B2201/22—Constructional details of the electrodes
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/60—Feed streams for electrical dischargers
- C01B2201/64—Oxygen
Abstract
The invention provides a plasma generating method and a generating device that cause an electrical discharge to occur between a fluid and a dielectric tube. A method for generating plasma with an electrical discharge within a dielectric tube by applying a voltage to a supplied gas, wherein: a water passage pipe is positioned within or above the dielectric tube; a high voltage electrode is arranged on the outer side of the dielectric tube; and a grounding electrode is arranged in a fluid that is discharged through the water passage pipe and into the dielectric tube while remaining at a distance from the inner perimeter of the dielectric tube. An electrical discharge is caused to occur either between the inner wall of the dielectric tube and the fluid, or between the inner wall of the dielectric tube and the water passage pipe, by applying a voltage to the high voltage electrode and the grounding electrode connected to a power source device. Additionally, the connections of the dielectric tube, the water passage pipe, and an inlet which introduces the supplied gas, is formed to have the structure of an aspirator.
Description
Technical field
The present invention relates to produce plasma generating method and the generating apparatus of electric discharge between fluid and dielectric.
Background technology
In recent years, in upper and lower water processing establishment, chemical plant, medicine factory, bakery and confectionery etc., for carry out bacterium class, Mycophyta and yeast etc. the odorous substance such as sterilization, aldehyde, sulphur compound, nitrogen compound deodorization, ight soil and dyestuff waste liquid decolouring, make the harmful substances such as organic solvent innoxious, used ozone generating-device.
This technology, normally with discharge type ozone generator generation ozone, is mixed with the needed water of processing in the gas-liquid mixed portion of diffuser, injector, static mixer etc., thereby makes the technology of gas-liquid contact.
But ozone is the allotrope of oxygen, and be very unsettled gas, so can resolve into oxygen at normal temperatures.Therefore, be difficult to preserve, need to, compare with the processing that utilizes chlorine to carry out using the scene of ozone to generate meanwhile, have the high such problem of processing cost.
For this problem, following ozone equipment for treating water has been proposed: the center of inside at porous ceramic pipe is placed high-voltage electrode, between porous ceramic pipe and high-voltage electrode, form gas passage, grounding electrode is placed in outside at porous ceramic pipe, and the lateral surface at this porous ceramic pipe directly forms the path of pending water, by being connected high-voltage high-frequency power supply or high voltage pulse power supply between these high-voltage electrodes and grounding electrode, in this gas passage, generate ozone (for example,, with reference to patent documentation 1).
But, the in the situation that of above-mentioned ozone equipment for treating water, center of inside at porous ceramic pipe is placed high-voltage electrode, what apply is high voltage or the pulse high-voltage that adopts high-voltage high-frequency power supply or high voltage pulse power supply, in order to produce stable electric discharge, need the accurate location of high-voltage electrode and the dense dielectric coated processing of electrode surface, and need the expensive pulse power.
In addition, on the other hand, a kind of water treatment facilities has been proposed, it has the cavitation erosion generating unit being arranged at for the back segment of the pressurization part of pressurized delivered processed water, and by high voltage side electrode and ground connection lateral electrode, formed to electrode, described cavitation erosion generating unit has the nozzle that the internal diameter of water-filled pipe is dwindled, and for generation of cavitation erosion bubble, described to being oppositely arranged near the back segment of electrode and cavitation erosion generating unit, by applying high voltage between to electrode, produce discharge plasma, process decomposition or the processing such as synthetic of the substances to be processed such as organic substance contained in water, wherein, the mode that forms creeping discharge with the inner face of the water-filled pipe along cavitation erosion generating unit inside on pipeline surface to electrode (for example configures, with reference to patent documentation 2).
But, the in the situation that of above-mentioned plasma generating equipment, moltenly in advance be stored in gas in processed liquid because cavitation erosion produces bubble, carry out the electric discharge on gas-liquid interface, be difficult at random adjustments of gas amount, in the situation that processed liquid is degassed, do not produce cavitation erosion bubble, in addition, beyond the region that generates cavitation erosion bubble, do not discharge, therefore have and be difficult to such problem that maximizes.
Prior art document
Patent documentation
Patent documentation 1: TOHKEMY 2002-126769 communique
Patent documentation 2: TOHKEMY 2009-119347 communique
Summary of the invention
The problem that invention will solve
In view of the above problems, what the inventor furtherd investigate found that, by producing electric discharge on one side by fluid on one side in dielectric tube, can be with flow control arbitrarily fluid and gas arbitrarily arbitrarily, in addition,, by forming suction structure, can make gas be dissolved in efficiently in fluid, and in gas phase and liquid phase, produce plasma, thereby a kind of plasma generating method and generating apparatus are provided.
The method of dealing with problems
For plasma generating method of the present invention and generating apparatus, its first aspect relates to a kind of plasma generating method, it is by utilize electric discharge in dielectric tube to generate the method for plasma to the gas exerts voltage of supplying with, it is characterized in that, high-voltage electrode is arranged on the outside of this dielectric tube, under the gapped state of interior all tools of this dielectric tube, the fluid being discharged in this dielectric tube is arranged to grounding electrode, by being applied to voltage, this high-voltage electrode being connected with supply unit and this grounding electrode produce electric discharge between the inwall of this dielectric tube and this fluid.
In addition, the plasma generating method that second aspect present invention relates to is characterised in that, is configured in inside or the top of this dielectric tube to the water service pipe of discharging fluid in described dielectric tube.
A third aspect of the present invention relates to a kind of plasma generating method, it is by utilize electric discharge in dielectric tube to generate the method for plasma to the gas exerts voltage of supplying with, it is characterized in that, high-voltage electrode is arranged on the outside of this dielectric tube, the water service pipe passing through at the internal configurations fluid of this dielectric tube, under the gapped state of interior all tools of this dielectric tube, the fluid being discharged in this dielectric tube by water service pipe is arranged to grounding electrode, by being applied to voltage, this high-voltage electrode being connected with supply unit and this grounding electrode produce electric discharge between the inwall of this dielectric tube and this water service pipe.
In addition, the plasma generating method that fourth aspect present invention relates to is characterised in that, the amount of described gas and the amount of fluid supplied with are that gas liquid ratio is below 0.5, the plasma generating method that fifth aspect present invention relates to is characterised in that, the described gas of supply is at least containing the gas of aerobic, the arbitrary gas in non-active gas.
And, the plasma generating method that sixth aspect present invention relates to is characterised in that, use has passed through to produce the fluid of part of described electric discharge as again to the fluid of discharging in described dielectric tube, or the fluid that has passed through to produce the part of described electric discharge is sent back to the upstream side of described water service pipe again, this fluid is circulated, in addition, the plasma generating method that seventh aspect present invention relates to is characterised in that, have described dielectric tube, described water service pipe, the link of the introducing port that the described gas of supplying with imports forms the linking part of suction structure, in the gap of the fluid of discharging at the outlet from this water service pipe and the inside of this dielectric tube, produce strong negative pressure, by cavitating, make to be dissolved in fluid because of the gas that electric discharge produces.In addition, a eighth aspect of the present invention relates to a kind of generating apparatus, it is characterized in that, this generating apparatus comprises: arranged outside has the dielectric tube of high-voltage electrode; Be disposed at the water service pipe of inside or the top of this dielectric tube; Grounding electrode, it is arranged to the gapped state of interior all tools of this dielectric tube and is discharged to the fluid contact in this dielectric tube; And the supply unit that connects this high-voltage electrode and this grounding electrode.
The generating apparatus that ninth aspect present invention relates to is characterised in that, described high-voltage electrode is arranged on the outside of the described dielectric tube of described dielectric tube and the overlapping part of described water service pipe, the generating apparatus that tenth aspect present invention relates to is characterised in that, described grounding electrode be arranged on the inside of described dielectric tube or the described fluid of discharging from described dielectric tube in.
In addition, the generating apparatus that the present invention the tenth relates in one aspect to is characterised in that, with the coated described grounding electrode of insulating compound, the generating apparatus that the present invention the 12 aspect relates to is characterised in that, described insulating compound is glass.
In addition, the generating apparatus that the present invention's the tenth three aspects: relates to is characterised in that, described dielectric tube is at least any in pottery or glass.
In addition, the generating apparatus that the present invention the 14 aspect relates to is characterised in that, any in pottery, glass, resin, metal of described water service pipe forms, and the generating apparatus that the present invention the 15 aspect relates to is characterised in that, described resin is fluorine-type resin.
In addition, the generating apparatus that the present invention the 16 aspect relates to is characterised in that, it has the fluid that has passed through to produce the part of described electric discharge is sent back to the structure that the upstream side of described water service pipe circulates fluid again, the generating apparatus that the present invention the 17 aspect relates to is characterised in that, described dielectric tube, described water service pipe, the gas introduction port that is arranged at this dielectric tube form suction structure.
The effect of invention
According to plasma generating method of the present invention and generating apparatus, can obtain the effect of following excellence.
(1) plasma generating method of the application of the invention and device, can be to pending fluid direct irradiation plasma, or near the irradiation plasma of fluid.
(2) because the gas of supplying with is containing aerobic, thereby can produce a large amount of ozone, can directly to fluid, supply with a large amount of ozone, can generate OH free radical isoreactivity kind simultaneously.
(3) by controlling importing to gas in dielectric tube and the gas liquid ratio of fluid, can make the ozone gas generating by discharging be dissolved in fluid efficiently.
(4) by forming suction structure, the fluid that can discharge at the outlet from water service pipe and the gap of dielectric tube inside produce strong negative pressure, by cavitation erosion, can make more efficiently ozone gas be dissolved in fluid.
Accompanying drawing explanation
[Fig. 1] is the flow chart of the experimental provision of first embodiment of the invention.
[Fig. 2] is the figure that the plasma generating equipment of first embodiment of the invention is shown.
[Fig. 3] is the photo that the experimental result of first embodiment of the invention is shown.
[Fig. 4] is the schematic diagram of the plasma generating equipment of second embodiment of the invention.
[Fig. 5] is the curve chart that the generation ozone concentration of each discharge time in embodiment 1 and the variation of dissolved ozone concentration are shown.
[Fig. 6] is the flow chart of the experimental provision of embodiment 1.
[Fig. 7] illustrates gas liquid ratio in embodiments of the invention 2～embodiment 5 and comparative example 1 and the curve chart of the relation between dissolved efficiency.
[Fig. 8] is the figure that the plasma generating equipment in embodiment 6 is shown.
[Fig. 9] is the curve chart that the generation ozone concentration of each discharge time in embodiment 6 and the variation of dissolved ozone concentration are shown.
[Figure 10] is the curve chart that the generation ozone concentration of each discharge time in embodiment 7 and the variation of dissolved ozone concentration are shown.
[Figure 11] is the photo that the experimental result in embodiment 8 is shown.
[Figure 12] is the curve chart of variation that the generation ozone concentration of each discharge time in embodiment 9 is shown.
[Figure 13] is the figure that the plasma generating equipment in embodiment 10 is shown.
[Figure 14] is the photo that the experimental result in embodiment 10 is shown.
[Figure 15] is the schematic diagram of the generating apparatus in embodiment 10.
[Figure 16] is the curve chart of variation of generation ozone amount that be shown each discharge time of embodiment 11 and comparative example 2～comparative example 4.
[Figure 17] is the curve chart of variation that the methylenum careuleum decolouring amount of each discharge time in embodiment 11 and comparative example 2～comparative example 4 is shown.
[Figure 18] is the figure that the plasma generating equipment in embodiment 12 is shown.
[Figure 19] is the photo that the experimental result in embodiment 12 is shown.
[Figure 20] is the schematic diagram of the plasma generating equipment in embodiment 12.
[Figure 21] is the curve chart that the generation ozone concentration of each discharge time in embodiment 12 and the variation of dissolved ozone concentration are shown.
[Figure 22] illustrates gas liquid ratio in embodiments of the invention 13～embodiment 16 and comparative example 5 and the curve chart of the relation between dissolved efficiency.
[Figure 23] is the figure that the plasma generating equipment in embodiment 17 is shown.
[Figure 24] is the curve chart that the generation ozone concentration of each discharge time in embodiment 17 and the variation of dissolved ozone concentration are shown.
[Figure 25] is the curve chart that the generation ozone concentration of each discharge time in embodiment 18 and the variation of dissolved ozone concentration are shown.
[Figure 26] is the photo that the experimental result in embodiment 19 is shown;
[Figure 27] is the curve chart of variation that the generation ozone concentration of each discharge time in embodiment 20 is shown.
Symbol description
1 dielectric tube
2 water service pipes
3 high-voltage electrodes
4 grounding electrodes
5 power supplys
6 gas introduction tubes
7 oxygen
Embodiment
(execution mode 1)
Below, based on Fig. 2, Fig. 8, the first execution mode in the present invention is described, but self-evidently, the invention is not restricted to present embodiment.
In Fig. 2, plasma generating equipment of the present invention consists of dielectric tube 1, water service pipe 2, high-voltage electrode 3, grounding electrode 4, power supply 5, gas introduction tube 6, and has formed suction structure.
Import the fluid of water service pipe 2 as long as carry out forced feed by difference of height or pump etc., fluid is as liquid or the gas that contains liquid steam for example.The fluid being imported into passes through in the inside of dielectric tube 1 by water service pipe 2, but in order to produce discharge plasma being provided with between the inwall of dielectric tube 1 of part of high-voltage electrode 3 and fluid, preferably fluid is not attached to the inwall of the dielectric tube 1 of the part that is provided with high-voltage electrode 3.But, even if fluid is attached to the inwall of dielectric tube 1, due to the importing of gas, in fluid, form the gas compartment, therefore also produce discharge plasma.
The speed of fluid can arbitrary decision, and the electric discharge frequency that the frequency meter of power supply 5 that can be based on by used is calculated is set as the corresponding flow velocity of object with pending fluid.In order to make the gas dissolutions such as ozone that generate by discharging in fluid, the ratio of the amount of fluid and gas is preferably gas liquid ratio below 0.5.In addition, by forming as shown in Figure 2 suction structure, the fluid of discharging by the outlet from water service pipe 2 produces strong negative pressure in the inner space of dielectric tube 1, and by the cavitation erosion producing at this outlet, dissolved efficiency is increased.
High-voltage electrode 3 is wound in the outside of dielectric tube 1, grounding electrode 4 is arranged at the inside center of dielectric tube 1, and be connected with power supply 5 respectively, by convection cell when importing gases from gas introduction tube 6, apply voltage, circle-shapedly between the inwall of dielectric tube 1 of part of high-voltage electrode 3 and fluid produce electric discharge being provided with.
As shown in Figure 2, grounding electrode 4 is arranged at the inside of dielectric tube 1, or as shown in Figure 8, be arranged at the fluid of discharging from dielectric tube 1, and in the situation that the inside of dielectric tube 1 is provided with grounding electrode 4, due to the gap smaller of high-voltage electrode 3 and grounding electrode 4, therefore occur compared with strong electric field and easily electric discharge.But, in the situation that the such large fluid of conductance of seawater for example, even if grounding electrode 4 is arranged at the fluid of discharging from dielectric tube 1, also produces compared with strong electric field and easily electric discharge.Therefore, the position of grounding electrode 4 can be determined according to the character of fluid.
In addition, the material of grounding electrode 4 is as long as select the metals such as copper or stainless steel according to the character of fluid, in the situation that as electronic unit cleaning etc., metal ingredient is difficult to stripping, as long as coated insulation compound, the preferably few glass of dielectric constant stripping low and in fluid on grounding electrode 4.
The material of dielectric tube 1 can adopt pottery or the glass with plasma-resistance, thermal endurance, ozone resistance, preferably the low glass of dielectric constant.
The material of water service pipe 2 can be selected arbitrarily, if the high material of insulating properties, owing to also can bringing into play dielectric effect, therefore as long as selected arbitrarily based on dielectric constant, can adopt pottery, glass, the resin of plasma-resistance, ozone resistance, excellent in te pins of durability, preferred glass, fluorine-type resin.In addition, also the metal material that conductivity is high can be used, in the situation that using metal material, stronger electric field can be on dielectric tube 1, produced, therefore easily electric discharge.In addition, in the situation that water service pipe 2 adopts metal material, as long as be arranged at water service pipe 2 self by electrode 4 is set, can save the trouble of making.
The gas being imported into can carry out forced feed by air blast or high-pressure gas cylinder etc., also can utilize the negative pressure of generation when convection cell carries out water flowing to supply with voluntarily, in any situation, all by gas introduction tube 6, imports to the inside of dielectric tube 1.Gas can be determined arbitrarily according to the object of pending fluid, but in order to generate ozone or OH free radical isoreactivity kind, can be at least to contain the gas of aerobic 7.In addition, in the situation that the molten gas having containing aerobic 7 in advance in the fluid being imported into also can be used non-active gas.
(execution mode 2)
Below, based on Fig. 4, Figure 13, Figure 15, the second execution mode of the present invention is described, but self-evidently, the invention is not restricted to present embodiment.
The formation of plasma generating equipment is identical with the first execution mode, and therefore the description thereof will be omitted.
As shown in figure 13, water service pipe 2 is positioned on the same center of circle of dielectric tube 1, and the outlet of water service pipe 2 is disposed at the more downstream of 3 of high-voltage electrodes, and 3 of described high-voltage electrodes are arranged on dielectric tube 1.
In this plasma generating equipment, be to produce electric discharge being provided with between the inwall of dielectric tube 1 of part of high-voltage electrode 3 and fluid substantially, but fluid also can be present in the inwall of the dielectric tube 1 of the part that is provided with high-voltage electrode 3.Electric discharge is because the region strengthening at electric field produces, therefore, as shown in figure 13, if configure the outlet of water service pipe 2 near the downstream of inwall of dielectric tube 1 that is provided with high-voltage electrode 3, as shown in figure 15, will between the inwall of dielectric tube 1 and fluid, produce stronger electric field, thereby produce electric discharge.
As shown in Figure 4, electric discharge in the situation that fluid and the inwall of dielectric tube 1 that is provided with the part of high-voltage electrode 3 produce, in order to continue closely to produce stable electric discharge, need between dielectric tube 1 and fluid, keep certain intervals, therefore can load rectifier or on water service pipe 2, pressure maintaining valve etc. is set in the inside of water service pipe 2.On the other hand, as shown in figure 15, in the situation that configure the outlet of water service pipe 2 and produce electric discharge near being provided with the downstream of inwall of dielectric tube 1 of part of high-voltage electrode 3, because the outlet of water service pipe 2 is fixed, therefore fluid and the interval of inwall of dielectric tube 1 that is provided with the part of high-voltage electrode 3 are fixed, even if there is no rectifier or pressure maintaining valve etc. on water service pipe 2, also can between the inwall of dielectric tube 1 and fluid, continue to produce stable electric discharge.In addition, when dielectric tube 1 is applied to enough voltage, also can produce stronger electric field, the electric discharge that produces gas-liquid interface between the gas in fluid and liquid in the inside of water service pipe 2.
The outlet of water service pipe 2 in this case and the distance of inwall of dielectric tube 1 that is provided with the part of high-voltage electrode 3 must be the length of electric discharge expansion, this length can be determined by the interval between the internal diameter of dielectric tube 1 and the external diameter of water service pipe 2, for example, in the situation that the external diameter of the internal diameter of dielectric tube 1 and water service pipe 2 be spaced apart 0.5mm, so long as the outlet of water service pipe 2 and the distance of inwall that is provided with the dielectric tube 1 of high-voltage electrode 3 are in 20mm, can between the inwall of dielectric tube 1 and the fluid of discharging from the outlet of water service pipe 2, produce electric discharge.In addition, if use porous ceramic in water service pipe 2, from the hole exuded fluid of Porous, produce electric discharge being provided with between the inwall of dielectric tube 1 of part of high-voltage electrode 3 and the fluid that oozes out from Porous, therefore can eliminate the trouble that makes fluid rectification.The material of water service pipe 2 can be selected arbitrarily, if the high material of insulating properties, also can bring into play dielectric effect, therefore can be selected arbitrarily based on dielectric constant, pottery, glass, the resin that can adopt plasma-resistance, ozone resistance, excellent in te pins of durability, preferably adopt glass, fluorine-type resin.In addition, also can use the metal material that conductivity is high, the in the situation that of metal material, can on dielectric tube 1, produce strong electric field, therefore electric discharge becomes easy.In addition, in the situation that water service pipe 2 is set as to metal material, as long as be arranged at water service pipe 2 self by electrode 4 is set, can save the trouble of making.
Embodiment
Photograph taking and row's ozone concentration and molten test of depositing ozone concentration while in the present invention, using above-mentioned execution mode to carry out electric discharge.The assay method of test is shown below.
(1) generate the mensuration of ozone concentration
Gas phase ozone concentration instrument: East Asia DKK company manufactures OZ-30
On water reception tank top, insert ozone concentration sensor, utilize gas phase ozone concentration instrument to measure.
(2) molten mensuration of depositing ozone concentration
The molten ozone concentration instrument of depositing: East Asia DKK company manufactures OZ-20
In circulating slot, drop into the molten ozone concentration sensor of depositing, measure.
[embodiment 1]
Fig. 1 illustrates the flow chart of experimental provision.Experimental provision possesses: plasma generating equipment, receive the processing water of discharging from plasma generating equipment and on water surface top, be equipped with the water reception tank (water yield 6L) of ozone concentration sensor, be connected and running water is circulated with pipe with this water reception tank, the molten circulating slot (water yield 2L) of depositing ozone concentration sensor in water surface bottom, is equipped with and, utilize magnetic drive pump and silicone tube, from circulating slot, be connected with plasma generating equipment, with nylon tube, the gas introduction port of plasma generating equipment and oxygen cylinder linked together.As shown in Figure 2, plasma generating equipment main body is glass system, and form suction structure, water service pipe 2 (external diameter 7mm, internal diameter 5mm) be configured in dielectric tube 1 (external diameter 10mm, internal diameter 8mm) concentric circles top, the high-voltage electrode 3 that the copper strips of width 10mm is made is wound in the outside of dielectric tube 1, and make from the outlet of water service pipe 2 centered by the position of side 10mm becomes downstream, by the stainless steel grounding electrode 4 of diameter 1mm from being inserted into water service pipe 2 and dielectric tube 1 near gas introduction port, high-voltage electrode 3 is connected with power supply 5 with grounding electrode 4, then start magnetic drive pump, flow velocity with 8L/min makes running water circulation, on the other hand, one side is the air quantity importing oxygen 7 with 3L/min from oxygen cylinder, apply voltage (9kV on one side, 6kHz) discharge, and the observation of discharging and ozone concentration and molten mensuration of depositing ozone concentration.Its result as shown in Fig. 3 (photo), Fig. 4 (schematic diagram), is observed the electric discharge of purple between the inwall of dielectric tube 1 and running water.In addition we know, if produce electric discharge under the existence of oxygen, generate ozone, as the evidence that has produced electric discharge, as shown in Figure 5, the generation ozone concentration from electric discharge starts 30 minutes is 1000ppm, and the molten ozone concentration of depositing is 0.47ppm.
[embodiment 2]
As shown in Figure 6, do not make running water circulation, but water flowing is continuously set as 4L/min (gas liquid ratio 0.5) by the air quantity of oxygen 7, in addition, carries out similarly to Example 1, has measured the molten ozone concentration of depositing.As shown in Figure 7, ozone dissolved efficiency is 21% to its result.
[embodiment 3]
The air quantity of oxygen 7 is set as to 2.4L/min, in addition, carries out similarly to Example 2, measured the molten ozone concentration of depositing.As shown in Figure 7, ozone dissolved efficiency is 27% to its result.
[embodiment 4]
The air quantity of oxygen 7 is set as to 0.8L/min, in addition, carries out similarly to Example 2, measured the molten ozone concentration of depositing.As shown in Figure 7, ozone dissolved efficiency is 48% to its result.
[embodiment 5]
The air quantity of oxygen 7 is set as to 0.4L/min, in addition, carries out similarly to Example 2, measured the molten ozone concentration of depositing.As shown in Figure 7, ozone dissolved efficiency is 67% to its result.
[embodiment 6]
As shown in Figure 8, the grounding electrode 4 of being made by stainless steel wire (diameter 1mm) is arranged on water reception tank, in addition, carries out similarly to Example 1, measured ozone concentration and the molten ozone concentration of depositing.As shown in Figure 9, the generation ozone concentration from electric discharge starts 30 minutes is 527ppm to its result, and the molten ozone concentration of depositing is 0.18ppm.
[embodiment 7]
The size of water service pipe 2 is made as to (external diameter 7mm, internal diameter 6mm), with the glass of thickness 0.5mm is coated, electrode is set, in addition, carry out similarly to Example 1, measured ozone concentration and the molten ozone concentration of depositing.As shown in figure 10, the generation ozone concentration from electric discharge starts 30 minutes is 700ppm to its result, and the molten ozone concentration of depositing is 0.38ppm.
[embodiment 8]
By the gas setting that imports to plasma generating equipment, be argon gas, in addition, carry out similarly to Example 1.Its result, as shown in Figure 11 (photo) and Fig. 4 (schematic diagram), has been observed the electric discharge of purple between the inwall of dielectric tube 1 and running water.
[embodiment 9]
The material of the water service pipe of plasma generating equipment 2 is set as to PFA (tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer) resin, stainless steel metal, in addition, carry out similarly to Example 1, as the evidence that produces electric discharge, measured generation ozone concentration.As shown in figure 12, the generation ozone concentration from electric discharge starts 30 minutes is respectively 956ppm, 1043ppm to its result.
[embodiment 10]
As shown in figure 13, outlet at the water service pipe 2 of side 15mm configuration downstream from being arranged at the central part of high-voltage electrode 3 of dielectric tube 1, and will to import gas setting be argon gas, in addition, discharge similarly to Example 1, and carried out observation and ozone concentration and the molten mensuration of depositing ozone concentration of electric discharge.Its result, as shown in Figure 14 (photo), Figure 15 (schematic diagram), has been observed the electric discharge of purple between the inwall of dielectric tube 1 and the outer wall of water service pipe 2 and running water.
[embodiment 11]
To import gas setting is oxygen 7, the mode that the methylenum careuleum concentration of take is 5mg/L is added in running water, in addition, carries out similarly to Example 10, accumulation is generated to ozone amount and be shown in over time in Figure 16, methylenum careuleum decolouring amount is shown in Figure 17 over time.
[comparative example 1]
The air quantity of oxygen 7 is set as to 4.8L/min, in addition, carries out similarly to Example 1, measured the molten ozone concentration of depositing.As shown in Figure 7, ozone dissolved efficiency is 18% to its result.
[comparative example 2]
Added the t-BuOH as OH free radical replenishers, and to make its concentration be 0.1mM, in addition, carry out similarly to Example 11, accumulation is generated to ozone amount and be shown in over time in Figure 16, methylenum careuleum decolouring amount is shown in Figure 17 over time.From this result, no matter generate ozone whether on an equal basis, by adding t-BuOH, percent of decolourization all declines, and this is implying by this plasma generating equipment and is generating OH free radical.
[comparative example 3]
Added the t-BuOH as OH free radical replenishers, and to make its concentration be 1mM, in addition, carry out similarly to Example 11, accumulation is generated to ozone amount and be shown in over time in Figure 16, methylenum careuleum decolouring amount is shown in Figure 17 over time.From this result, no matter generate ozone whether on an equal basis, by adding t-BuOH, percent of decolourization all declines, and this is implying by this plasma generating equipment and is generating OH free radical.
[comparative example 4]
Added the t-BuOH as OH free radical replenishers, and to make its concentration be 10mM, in addition, carry out similarly to Example 11, accumulation is generated to ozone amount and be shown in over time in Figure 16, methylenum careuleum decolouring amount is shown in Figure 17 over time.From this result, no matter generate ozone whether on an equal basis, by adding t-BuOH, percent of decolourization all declines, and this is implying by this plasma generating equipment and is generating OH free radical.
[embodiment 12]
As shown in figure 18, plasma generating equipment main body is glass system, and form suction structure, water service pipe 2 (external diameter 7mm, internal diameter 5mm) be disposed at dielectric tube 1 (external diameter 10mm, internal diameter 8mm) concentric circles top, the copper strips of width 10mm high-voltage electrode 3 processed is wound in to the outside of dielectric tube 1, and make from the outlet of water service pipe 2 centered by upstream the position of side 25mm becomes, by the stainless steel grounding electrode 4 of diameter 1mm from inserting water service pipe 2 and dielectric tube 1 near gas introduction port, high-voltage electrode 3 is connected with power supply 5 with grounding electrode 4, then start magnetic drive pump, flow velocity with 8L/min makes running water circulation, on the other hand, one side is the air quantity importing oxygen 7 with 3L/min from oxygen cylinder, apply voltage (9kV on one side, 6kHz), discharge, observation and ozone concentration and the molten mensuration of depositing ozone concentration of electric discharge have been carried out.Its result as shown in Figure 19 (photo), Figure 20 (schematic diagram), is observed the electric discharge of purple between the inwall of dielectric tube 1 and running water.In addition we know, if produce electric discharge under the existence of oxygen, will generate ozone, as the evidence that produces electric discharge, as shown in figure 21, the generation ozone concentration from electric discharge starts 30 minutes is 990ppm, and the molten ozone concentration of depositing is 0.45ppm.
[embodiment 13]
As shown in Figure 6, do not make running water circulation, but water flowing is continuously set as 4L/min (gas liquid ratio 0.5) by the air quantity of oxygen 7, in addition, carries out similarly to Example 1, has measured the molten ozone concentration of depositing.As shown in figure 22, ozone dissolved efficiency is 21% to its result.
[embodiment 14]
The air quantity of oxygen 7 is set as to 2.4L/min, in addition, carries out similarly to Example 13, measured the molten ozone concentration of depositing.As shown in figure 22, ozone dissolved efficiency is 26% to its result.
[embodiment 15]
The air quantity of oxygen 7 is set as to 0.8L/min, in addition, carries out similarly to Example 13, measured the molten ozone concentration of depositing.As shown in figure 22, ozone dissolved efficiency is 50% to its result.
[embodiment 16]
The air quantity of oxygen 7 is set as to 0.4L/min, in addition, carries out similarly to Example 13, measured the molten ozone concentration of depositing.As shown in figure 22, ozone dissolved efficiency is 73% to its result.
[embodiment 17]
As shown in figure 23, the grounding electrode 4 of being made by stainless steel wire (diameter 1mm) is arranged on water reception tank, in addition, carries out similarly to Example 12, measured ozone concentration and the molten ozone concentration of depositing.Its result, as shown in figure 24, the generation ozone concentration from electric discharge starts 30 minutes is 534ppm, the molten ozone concentration of depositing is 0.19ppm.
[embodiment 18]
The size of water service pipe 2 is set as to (external diameter 7mm, internal diameter 6mm), with the glass of thickness 0.5mm is coated, electrode is set, in addition, carry out similarly to Example 12, measured ozone concentration.Its result, as shown in figure 25, the generation ozone concentration from electric discharge starts 30 minutes is 685ppm, the molten ozone concentration of depositing is 0.37ppm.
[embodiment 19]
By the gas setting that imports plasma generating equipment, be argon gas, in addition, carry out similarly to Example 12.Its result as shown in Figure 26 (photo) and Figure 20 (schematic diagram), has been observed the electric discharge of purple between the inwall of dielectric tube 1 and water service pipe 2 outer walls.
[embodiment 20]
The material of the water service pipe of plasma generating equipment 2 is set as to PFA (tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer) resin, stainless steel metal, in addition, carry out similarly to Example 12, as the evidence that has produced electric discharge, measured generation ozone concentration.Its result, as shown in figure 27, the generation ozone concentration from electric discharge starts 30 minutes is respectively 281ppm, 348ppm.
[comparative example 5]
The air quantity of oxygen 7 is set as to 4.8L/min, in addition, carries out similarly to Example 1, measured the molten ozone concentration of depositing.As shown in figure 22, ozone dissolved efficiency is 17% to its result.
Claims (17)
1. a plasma generating method, it is by the gas exerts voltage of supplying with, and utilize the electric discharge in dielectric tube and generate plasma, wherein,
High-voltage electrode is arranged at the outside of this dielectric tube, under the gapped state of interior all tools of this dielectric tube, the fluid being discharged in this dielectric tube is arranged to grounding electrode, and between the inwall of this dielectric tube and this fluid, produce electric discharge by this high-voltage electrode being connected with supply unit and this grounding electrode are applied to voltage.
2. plasma generating method according to claim 1, wherein,
To the water service pipe of described dielectric tube discharge fluid, be disposed at inside or the top of this dielectric tube.
3. a plasma generating method, it is by the gas exerts voltage of supplying with, and utilize the electric discharge in dielectric tube and generate plasma, wherein,
High-voltage electrode is arranged at the outside of this dielectric tube, the water service pipe passing through at the internal configurations fluid of this dielectric tube, under the gapped state of interior all tools of this dielectric tube, to the fluid of discharging in this dielectric tube, grounding electrode being set by water service pipe, and by being applied to voltage, this high-voltage electrode being connected with supply unit and this grounding electrode produce electric discharge between the inwall of this dielectric tube and this water service pipe.
4. according to the plasma generating method described in any one in claim 1～3, wherein,
The amount of described gas and the amount of fluid supplied with are that gas liquid ratio is below 0.5.
5. according to the plasma generating method described in any one in claim 1～4, wherein,
The described gas of supplying with is at least containing the gas of aerobic, the arbitrary gas in non-active gas.
6. according to the plasma generating method described in any one in claim 1～4, wherein,
The fluid of part that use has passed through to produce described electric discharge, or is sent the fluid that has passed through to produce the part of described electric discharge back to the fluid of discharging in described dielectric tube again as again to the upstream side of described water service pipe, this fluid is circulated.
7. according to the plasma generating method described in any one in claim 1～6, wherein,
The link with the introducing port of the described gas that described dielectric tube, described water service pipe, importing are supplied with forms the linking part of suction structure,
The fluid of discharging at the outlet from this water service pipe and the gap of this dielectric tube inside produce strong negative pressure, make the gas producing by discharging be dissolved in fluid by cavitating.
8. a plasma generating equipment, it comprises:
Arranged outside has the dielectric tube of high-voltage electrode;
Be disposed at the water service pipe of inside or the top of this dielectric tube;
Grounding electrode, it is arranged to the gapped state of interior all tools of this dielectric tube and is discharged to the fluid contact in this dielectric tube; And
The supply unit that connects this high-voltage electrode and this grounding electrode forms.
9. plasma generating equipment according to claim 8, wherein,
Described high-voltage electrode is arranged on the outside of the described dielectric tube of described dielectric tube and the overlapping part of described water service pipe.
10. plasma generating equipment according to claim 8 or claim 9, wherein,
Described grounding electrode be arranged on the inside of described dielectric tube or the described fluid of discharging from described dielectric tube.
Plasma generating equipment in 11. according to Claim 8～10 described in any one, wherein,
With the coated described grounding electrode of insulating compound.
12. plasma generating equipments according to claim 11, wherein,
Described insulating compound is glass.
Plasma generating equipment in 13. according to Claim 8～12 described in any one, wherein,
Described dielectric tube is at least any in pottery or glass.
Plasma generating equipment in 14. according to Claim 8～13 described in any one, wherein,
Any in pottery, glass, resin, metal of described water service pipe made.
15. plasma generating equipments according to claim 14, wherein,
Described resin is fluorine-type resin.
Plasma generating equipment in 16. according to Claim 8～15 described in any one, it has the structure that the upstream side that the fluid that has passed through to produce the part of described electric discharge is sent back to described water service pipe again makes Fluid Circulation.
Plasma generating equipment in 17. according to Claim 8～16 described in any one, wherein,
Described dielectric tube, described water service pipe, the gas introduction port that is arranged at this dielectric tube form suction structure.
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011100623 | 2011-04-28 | ||
| JP2011-100623 | 2011-04-28 | ||
| JP2011100622 | 2011-04-28 | ||
| JP2011-100622 | 2011-04-28 | ||
| PCT/JP2012/061343 WO2012147911A1 (en) | 2011-04-28 | 2012-04-27 | Plasma generating method and generating device |
Publications (1)
| Publication Number | Publication Date |
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| CN103636294A true CN103636294A (en) | 2014-03-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201280031442.1A Pending CN103636294A (en) | 2011-04-28 | 2012-04-27 | Plasma generating method and generating device |
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| Country | Link |
|---|---|
| JP (1) | JPWO2012147911A1 (en) |
| KR (1) | KR20140029462A (en) |
| CN (1) | CN103636294A (en) |
| SG (1) | SG194658A1 (en) |
| TW (1) | TW201309105A (en) |
| WO (1) | WO2012147911A1 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111657822A (en) * | 2020-06-24 | 2020-09-15 | 海信(广东)厨卫系统有限公司 | Dish washing machine and control method thereof |
| CN111700560A (en) * | 2020-06-24 | 2020-09-25 | 海信(广东)厨卫系统有限公司 | Dish washing machine and control method thereof |
| CN113321265A (en) * | 2020-07-24 | 2021-08-31 | 西安交通大学 | Plasma activated water preparation device and method |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013206767A (en) * | 2012-03-29 | 2013-10-07 | Asahi Organic Chemicals Industry Co Ltd | Plasma generation method and device |
| WO2015181945A1 (en) * | 2014-05-30 | 2015-12-03 | 富士機械製造株式会社 | Plasma irradiation method and plasma irradiation device |
| CN108112152A (en) * | 2017-12-20 | 2018-06-01 | 国网陕西省电力公司电力科学研究院 | Volume discharge generation device and its method in a kind of temperature control water |
| WO2020003344A1 (en) * | 2018-06-25 | 2020-01-02 | 東芝三菱電機産業システム株式会社 | Active gas generation device and film formation treatment unit |
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| JPS51103890A (en) * | 1975-03-11 | 1976-09-14 | Mitsubishi Electric Corp | OZONHATSUSE ISOCHI |
| JPH02157091A (en) * | 1988-12-09 | 1990-06-15 | Shimon Kk | Apparatus for treating water with ozone |
| JPH0372995A (en) * | 1989-08-11 | 1991-03-28 | Senichi Masuda | Ozone water manufacturing device |
| JP2001187390A (en) * | 1999-12-28 | 2001-07-10 | Daido Steel Co Ltd | Process and device for purifying liquid |
| JP3995654B2 (en) * | 2001-09-10 | 2007-10-24 | リー，ハグ−ジョー | Ozone water generator using underwater discharge in insulator discharge system |
| JP4322728B2 (en) * | 2004-03-16 | 2009-09-02 | 株式会社東芝 | Water treatment system |
| JP5067802B2 (en) * | 2006-12-28 | 2012-11-07 | シャープ株式会社 | Plasma generating apparatus, radical generating method, and cleaning and purifying apparatus |
| JP5182989B2 (en) * | 2008-03-07 | 2013-04-17 | 株式会社豊田自動織機 | Liquid plasma film forming apparatus, liquid plasma electrode, and film forming method using liquid plasma |
| JP5360966B2 (en) * | 2009-01-28 | 2013-12-04 | 国立大学法人愛媛大学 | Liquid plasma generator and liquid plasma generation method |
| JP5189033B2 (en) * | 2009-06-17 | 2013-04-24 | 三菱電機株式会社 | Ozone supply method |
-
2012
- 2012-04-27 SG SG2013079777A patent/SG194658A1/en unknown
- 2012-04-27 WO PCT/JP2012/061343 patent/WO2012147911A1/en active Application Filing
- 2012-04-27 JP JP2013512462A patent/JPWO2012147911A1/en active Pending
- 2012-04-27 TW TW101115153A patent/TW201309105A/en unknown
- 2012-04-27 KR KR1020137031135A patent/KR20140029462A/en not_active Application Discontinuation
- 2012-04-27 CN CN201280031442.1A patent/CN103636294A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111657822A (en) * | 2020-06-24 | 2020-09-15 | 海信(广东)厨卫系统有限公司 | Dish washing machine and control method thereof |
| CN111700560A (en) * | 2020-06-24 | 2020-09-25 | 海信(广东)厨卫系统有限公司 | Dish washing machine and control method thereof |
| CN113321265A (en) * | 2020-07-24 | 2021-08-31 | 西安交通大学 | Plasma activated water preparation device and method |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20140029462A (en) | 2014-03-10 |
| TW201309105A (en) | 2013-02-16 |
| WO2012147911A1 (en) | 2012-11-01 |
| JPWO2012147911A1 (en) | 2014-07-28 |
| SG194658A1 (en) | 2013-12-30 |
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Application publication date: 20140312 |