JP2011062660A - Evacuation apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an evacuation apparatus capable of more efficiently performing continuous use and regeneration of a cold trap arranged in a vacuum tank than hereinafter. <P>SOLUTION: The evacuation apparatus 102 includes: an evacuation pump 11 capable of evacuating the interior of the vacuum tank 10; the cold trap 35 capable of freezing and trapping gas in the vacuum tank 10; a recessed cover part 32 arranged in the vacuum tank 10; and a flat-plane shaped washer part 33 arranged opposite to the cover part 32. As the result, a cold trap chamber 37 capable of housing the cold trap 35 therein is formed by the cover part 32 and the washer part 33. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a vacuum exhaust apparatus. In particular, the present invention relates to an improved technique for an evacuation apparatus provided with a cold trap.

  A cold trap for a freezing trap of gas (for example, water vapor) remaining in the vacuum chamber may be provided in the vacuum exhaust apparatus. Such a cold trap is constituted by, for example, a coiled pipe that circulates a cryogenic CFC-based mixed refrigerant.

  Thereby, since the water vapor frozen by the refrigerant is frozen and trapped on the surface of the pipe, the exhaust speed of the residual gas in the vacuum chamber is increased.

  By the way, various methods have been conventionally proposed as a usage form of a cold trap of an evacuation apparatus.

  For example, there is an in-vacuum tank placement type cold trap in which a cold trap is disposed in a vacuum tank (see, for example, Patent Documents 1 and 2).

  In the cold trap of this system, since the cold trap is arranged directly in the vacuum chamber, the efficiency of freezing and trapping residual gas by the cold trap is high. Therefore, the cold trap of this system has an advantage that the exhaust speed of the residual gas in the vacuum chamber can be improved.

  However, with this method, it is necessary to return the cold trap to room temperature each time air is introduced (vented) into the vacuum chamber to prevent the generation of a large amount of frost on the surface of the cold trap. Therefore, the cold trap of this method requires a long time for the temperature operation of the cold trap. In addition, since the cold trap cannot be isolated from the vacuum chamber, the cold trap can be regenerated in a short time.

  In other words, this vacuum exhaust apparatus has a difficulty in continuous use and regeneration of the cold trap (interruption of continuous use and problems of prolonged regeneration).

JP-A-8-144050 Japanese Patent No. 2675591

  The present inventor can perform continuous use and regeneration of the cold trap disposed in the vacuum chamber more efficiently than before by providing a concave lid dedicated to the cold trap in the vacuum chamber (that is, preventing interruption of continuous use). And that the playback time can be shortened). It has also been found that the presence of the lid is convenient for shielding the heat radiation from the heat source in the vacuum chamber to the cold trap.

  This invention is made | formed in view of such a situation, and it aims at providing the vacuum exhaust apparatus which can perform the continuous use and reproduction | regeneration of a cold trap arrangement | positioning type cold trap more efficiently than before. .

  In order to solve the above problems, the present invention provides a vacuum pump that can exhaust the inside of a vacuum chamber, a cold trap that can freeze and trap gas in the vacuum chamber, a concave lid portion disposed in the vacuum chamber, There is provided a vacuum evacuation device including a flat seat portion opposed to a lid portion, wherein a cold trap chamber capable of storing the cold trap is formed by the lid portion and the seat portion.

  With the above configuration, a cold trap chamber dedicated to a cold trap can be formed in the vacuum chamber, so continuous use and regeneration of the cold trap is more efficient than before without losing the features (advantages) of the cold trap placed in the vacuum chamber. Can be done.

  In the vacuum evacuation device according to the present invention, the cold trap may be exposed in the vacuum chamber when a peripheral edge of the lid part is separated from the seat part. In addition, the cold trap chamber may be formed by a peripheral edge of the lid portion contacting the seat portion.

  In this way, the cold trap chamber can be appropriately formed without impairing the characteristics (advantages) of the in-vacuum tank type cold trap.

  Moreover, in the vacuum exhaust apparatus of this invention, the wall part of the said vacuum chamber may be the said seat part.

  Thereby, the number of parts of an evacuation apparatus can be reduced.

  Further, the vacuum exhaust apparatus of the present invention may include a driving device that can generate a driving force to the lid. And the piston rod supported by the drive part of the drive device extends to the lid part so as to penetrate the wall part and cross the annular cold trap, and the tip part of the piston rod is You may connect with the said cover part.

  Moreover, in the vacuum exhaust apparatus of the present invention, the lid portion includes a flat plate disposed so as to be orthogonal to the axial direction of the piston rod, and a cylindrical wall extending in parallel to the axial direction of the piston rod from the periphery of the flat plate. And may be included. And the cyclic | annular sealing member currently pressed by the said cylindrical wall may be used for ensuring airtightness between the said cold trap chamber and the said vacuum chamber.

  As a result, when the vacuum apparatus is, for example, a batch-type film forming apparatus, the cold coil in the refrigerant circulation need not be exposed to the atmosphere when replacing the substrate (not shown) in the vacuum chamber. Therefore, it is possible to operate continuously without changing the use condition of the cold coil even when replacing the substrate.

  Furthermore, a vent valve for introducing the atmosphere only into the cold trap chamber may be provided, and the cold trap chamber may be opened to the atmosphere using the vent valve.

  Thereby, the atmosphere can be introduced only into the cold trap chamber by using the vent valve arranged in the cold trap chamber without opening the inside of the vacuum chamber to the atmosphere. As a result, the cold trap can be efficiently regenerated. Therefore, in the vacuum exhaust apparatus of this embodiment, the cold trap can be regenerated in a short time.

  Moreover, in the vacuum exhaust apparatus of the present invention, the lid portion includes a flat plate disposed so as to be orthogonal to the axial direction of the piston rod, and a cylindrical wall extending in parallel to the axial direction of the piston rod from the periphery of the flat plate. May be included. And when the said cover part leaves | separates from the said wall part, you may form annular space between the said cylindrical wall and the said wall part. Furthermore, the cold trap may be exposed in the vacuum chamber through the space.

  As a result, when the lid part moves deep inside the vacuum chamber, there is no member that blocks the cold trap in the vertical direction, and trapping of residual gas in the vacuum chamber can be efficiently performed by the cold trap. Exhaust capacity can be improved.

  Moreover, in the vacuum exhaust apparatus of this invention, you may provide the heat source distribute | arranged in the said vacuum chamber. And the said cover part may be arrange | positioned in the position which shields the thermal radiation from the said heat source at the time of use of the said cold trap.

  Thereby, even during the heat source operation in the vacuum apparatus, the cold coil gas trap can be appropriately performed without considering the heat generation of the heat source.

  ADVANTAGE OF THE INVENTION According to this invention, the vacuum exhaust apparatus which can perform the continuous use and reproduction | regeneration of a cold trap arranged in a vacuum chamber more efficiently than before is obtained.

It is the figure which showed typically an example of the vacuum apparatus provided with the vacuum exhaust apparatus of embodiment of this invention. It is sectional drawing used for description of the subpump structure of the vacuum exhaust apparatus by embodiment of this invention. It is sectional drawing used for description of the subpump structure of the vacuum exhaust apparatus by embodiment of this invention. It is the schematic diagram which showed the cold coil of FIG. 2, and its peripheral structure. It is an enlarged view of the A section of FIG.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  For convenience of the following description, the direction in which gravity acts in the vacuum apparatus 100 may be referred to as “downward”, and the opposite direction may be referred to as “upward”. In addition, such a direction perpendicular to the vertical direction may be referred to as a “horizontal direction”.

  FIG. 1 is a diagram schematically illustrating an example of a vacuum apparatus including a vacuum exhaust apparatus according to an embodiment of the present invention.

  As shown in FIG. 1, the vacuum device 100 of the present embodiment includes a vacuum chamber 10 in which appropriate vacuum processing is performed, and a vacuum exhaust device 102 that can depressurize the inside of the vacuum chamber 10.

  The vacuum chamber 10 corresponds to a vacuum film forming chamber when the vacuum apparatus 100 is used in a vacuum film forming apparatus such as a vacuum vapor deposition apparatus or a sputtering apparatus. For example, in the vacuum apparatus 100 of the present embodiment, a vapor deposition source 40 (see FIGS. 2 and 3 to be described later) containing a vapor deposition material, and a resin substrate 41 on which particles evaporated by the heat of the vapor deposition source 40 are deposited ( 2 (see FIGS. 2 and 3 to be described later) are disposed in the vacuum chamber 10. In addition, such a vapor deposition source 40 can be comprised by the heat source of the system which supplies electricity directly to a heater and a board, uses the generated heat, and the heat source of a system which directly heats an electron beam.

  Therefore, hereinafter, the configuration of the vacuum exhaust apparatus 102 of the present embodiment will be described by taking the vacuum vapor deposition apparatus 100 as an example of the vacuum apparatus 100.

  As shown in FIG. 1, the vacuum exhaust device 102 includes a roughing pump 13 (low vacuum pump) that can exhaust the interior of the vacuum chamber 10 to about several Pa, and a high degree of vacuum in which the interior of the vacuum chamber 10 is subjected to vapor deposition. A main pump 11 (high vacuum pump) capable of evacuating until the end, a main valve 20 capable of opening and closing the exhaust port of the main pump 11, a first cylinder 21 (driving device) capable of generating a driving force for opening and closing the main valve 20, Is provided.

  In the vacuum exhaust device 102, a concave (rectangular box-shaped) lid portion 32 (see FIGS. 2 and 3) disposed in the vacuum chamber 10 and constituting the cold trap chamber 37, and reciprocation to the lid portion 32. The auxiliary pump structure including the second cylinder 31 capable of generating a driving force for movement has a feature. A detailed description of such an auxiliary pump structure will be described later.

  The cold trap is a kind of vacuum pump that can adsorb and exhaust residual gas by freezing and trapping residual gas (for example, water vapor) in the vacuum chamber 10, and is extremely low temperature (saturated vapor pressure at atmospheric pressure). It can be configured by using a cooling component such as a cold coil 35 (see FIG. 4) made of a metal pipe capable of circulating a chlorofluorocarbon mixed refrigerant at a temperature lower than the temperature of, for example, about −140 ° C. to −120 ° C. .

  As the roughing pump 13, a mechanical booster pump, an oil rotary pump, a combination of these pumps, or the like can be used. As the main pump 11, an oil vapor injection type oil diffusion pump, a turbo molecular pump, or the like can be used.

  The space in the main valve 20 is an exhaust passage 20A (see FIGS. 2 and 3) between the vacuum chamber 10 and the main pump 11. The roughing pump 13 described above communicates with the exhaust passage 20 </ b> A and the vacuum chamber 10 via the roughing valve 14. When the roughing valve 14 is opened by such a roughing pump 13, the gas in the vacuum chamber 10 is exhausted by using the roughing pump 13.

  The roughing pump 13 is connected to the main pump 11 via the foreline valve 16. When the foreline valve 16 is opened, the roughing pump 13 can reduce the pressure in the main pump 11 to a pressure that allows the main pump 11 to be activated.

  Next, the sub pump structure of the vacuum exhaust apparatus 102 will be described in detail with reference to the drawings.

  2 and 3 are cross-sectional views used for explaining the sub pump structure of the vacuum exhaust apparatus according to the embodiment of the present invention. FIG. 3 illustrates a state in which the cold coil 35 (cold trap) is exposed in the vacuum chamber 10 when the concave lid portion 32 (details will be described later) is separated from the flat seat portion 33 (details will be described later). ing. FIG. 2 shows a state in which the cold coil 35 is sealed in the cold coil chamber 37 (cold trap chamber) by the lid portion 32 coming into contact with the seat portion 33.

  2 and 3, for convenience, some of the components of the vacuum exhaust device 102 (for example, the roughing valve 14) are not shown.

  First, the main pump structure of the vacuum exhaust apparatus 102 of this embodiment will be outlined.

  As shown in FIGS. 2 and 3, the main valve 20 is constituted by a valve plate 22 and a valve seat 23. The valve plate 22 is connected to the tip of the piston rod 21 </ b> B supported by the cylinder body 21 </ b> A of the first cylinder 21. When the exhaust port of the main pump 11 is closed by the main valve 20, the exhaust passage 20 </ b> A communicating with the main pump 11 and the vacuum chamber 10 through the valve plate 22 is formed in an annular shape based on the driving force of the first cylinder 21. 1 When the main valve 20 opens the exhaust port of the main pump 11, the main pump 11 and the exhaust passage 20A are separated from each other by a seal member 22C (for example, an O-ring) (see a two-dot chain line in FIGS. 2 and 3). Communicating (see solid lines in FIGS. 2 and 3).

  Such a valve structure of the main valve 20 is well known. Therefore, the detailed description of the main valve 20 is omitted here.

  Next, the sub pump structure which is a characteristic part of the vacuum exhaust apparatus 102 of this embodiment is described.

  As shown in FIG. 2, the cold coil chamber 37 is made of a metal (for example, stainless steel) concave lid 32 disposed in the vacuum chamber 10 and a metal (for example, a metal) facing the lid 32 (for example, And a flat plate-like seat portion 33 made of stainless steel, and is in contact with each other, and corresponds to an isolation chamber of the cold coil 35.

  In the vacuum evacuation device 102 of the present embodiment, the seat portion 33 is formed by the side wall portion of the vacuum chamber 10, whereby the number of parts of the vacuum evacuation device 102 can be reduced.

  The second cylinder 31 of the vacuum exhaust device 102 is a device that functions as a drive system for the lid portion 32. As shown in FIGS. 2 and 3, the cylinder body 31A (drive portion) and the piston rod 31B (drive force transmission portion). ).

  The cylinder body 31A is fixed to the side wall portion of the vacuum chamber 10 forming the seat portion 33 by an appropriate fixing means. The piston rod 31B supported by the cylinder body 31A passes through the opening 33A formed in the seat portion 33 in an airtight manner so as to intersect the coil surface of the annular (for example, an annular or rectangular frame) cold coil 35. It extends into the vacuum chamber 10 and the tip of the piston rod 31B is connected at the center of the lid 32 (exactly, the back side of a flat plate 32B described later). Thereby, the cover part 32 can be horizontally moved by expansion and contraction of the piston rod 21B.

  Specifically, as shown in FIG. 4, the cold coil 35 has a coil shape in which a metal pipe capable of circulating the chlorofluorocarbon mixed refrigerant from the refrigerator 50 extends horizontally in a plurality of stages (here, three stages). Thus, it can function as a sub pump of the vacuum exhaust apparatus 102 of this embodiment. The cold coil 35 is fixed at an appropriate position on the side wall portion of the vacuum chamber 10 (the fixing means is not shown), and the piston rod 31B passes through the inner space of the cold coil 35 in the vacuum chamber 10.

  On the other hand, when the cold coil chamber 37 (lid portion 32) is viewed in plan (when viewed from the horizontal direction), the cold coil chamber 37 (lid portion 32) has an outer dimension that can completely cover the cold coil 35. It has become.

  As shown in FIGS. 2 and 3, the lid portion 32 includes a rectangular flat plate 32B arranged so as to be orthogonal to the axial direction of the piston rod 31B, and parallel to the axial direction of the piston rod 31B from the periphery of the flat plate 32B. It includes a cylindrical and frame-like wall 32A (hereinafter referred to as “cylindrical wall 32A”) that extends. Moreover, in the vacuum exhaust apparatus 102 of this embodiment, the cylindrical wall 32A is integrally formed in the peripheral part of the flat plate 32B.

  Further, as shown in the enlarged view of the A part in FIG. 2 (FIG. 5), an annular second seal member 32C (for example, an O-ring) is disposed at the tip of the cylindrical wall 32A of the lid part 32. By this second seal member 32C, the cold coil chamber 37 in which the cold coil 35 is housed is properly vacuum-sealed, and the cold coil chamber 37 can be kept airtight.

  In this manner, as shown in FIG. 2, the cylindrical second wall 32 </ b> C pressed by the cylindrical wall 32 </ b> A is caused to contact the cold trap chamber 37 when the cylindrical wall 32 </ b> A of the lid portion 32 contacts the seat 33. And the vacuum chamber 10 are used to ensure airtightness.

  In addition, as shown in FIG. 5, a vent valve 52 is provided in a seat portion 33 (side wall portion of the vacuum chamber 10) that forms the cold coil chamber 37, whereby the cold coil 35 is defrosted using the vent valve 52 ( Regeneration by defrosting).

  Further, the tray 51 installed below the cold coil chamber 37 can receive water droplets generated during the regeneration of the cold coil 35. The water collected in the tray 51 may be drained to the outside of the cold coil chamber 37 using piping and valves (both not shown) arranged on the bottom surface of the tray 51.

  With the above configuration, the vacuum exhaust apparatus 102 of the present embodiment has the following various effects.

  First, when the stroke of the piston rod 31B is extended by the driving force of the second cylinder 31, the cylindrical wall 32A of the lid portion 32 is separated from the seat portion 33 as shown in FIG. Moves inward (opposite the seat 33). Then, an annular space 300 is formed between the cylindrical wall 32 </ b> A of the lid portion 32 and the seat portion 33, and the cold coil 35 is exposed in the vacuum chamber 10 through the space 300.

  As a result, even if a resin substrate 41 that releases a large amount of water vapor is present in the vacuum chamber 10, the cold coil 35 can be disposed close to the substrate 41, so that the vacuum chamber 10 can be quickly evacuated. . In particular, in the vacuum exhaust apparatus 102 of the present embodiment, when the lid portion 32 moves deep inside the vacuum chamber 10 in the horizontal direction, there is no member that blocks the cold coil 35 in the vertical direction, and the residual gas in the vacuum chamber 10 is removed. Traps can be efficiently performed by the cold coil 35, and the exhaust capacity of the cold coil 35 can be improved.

  Moreover, in the vacuum exhaust apparatus 102 of this embodiment, as shown in FIG. 3, the cover part 32 is arrange | positioned in the position which shields the thermal radiation from the vapor deposition source 40 (heat source) when the cold coil 35 is used. .

  Thereby, even if it is a case where the vapor deposition source 40 (heat source) exists in the vacuum chamber 10, the intensity | strength of the heat radiation to the cold coil 35 inject | emitted from the vapor deposition source 40 can be reduced using the cover part 32. effective.

  Specifically, in the evacuation apparatus 102 of the present embodiment, a projection line in which the cold coil 35 is projected from the vapor deposition source 40 even in a state where the annular space 300 is formed between the cylindrical wall 32A and the seat portion 33. As shown at 200, the cold coil 35 can be hidden from the field of view of the evaporation source 40 using the lid portion 32. Therefore, since the heat radiation from the vapor deposition source 40 is shielded (absorbed or reflected) by the lid portion 32, the temperature around the cold coil 35 can be easily maintained at an appropriate temperature (for example, about 50 ° C. or less).

  In addition, it is thought that the frozen water (ice) on the surface of the cold coil 35 does not melt | dissolve by the radiant heat from the circumference | surroundings of the cold coil 35 maintained at appropriate temperature (for example, about 50 degrees C or less).

  Thereby, dissolution of the frozen water trapped in the cold coil 35 can be prevented, and the exhaust capability of the cold coil 35 can be appropriately maintained. In addition, when the surface of the cover part 32 is finished in a mirror surface, it is convenient because the reflectance of the heat radiation can be improved.

  On the other hand, when the stroke of the piston rod 31B is contracted by the driving force of the second cylinder 31, the cylindrical wall 32A of the lid portion 32 comes into contact with the seat portion 33 as shown in FIG. Then, the cold coil chamber 37 is formed by the lid portion 32 and the seat portion 33. For this reason, the space between the vacuum chamber 10 and the cold coil chamber 37 can be made airtight by the lid portion 32 and the seat portion 33.

  Thereby, in the vacuum exhaust apparatus 102 of this embodiment, air | atmosphere can be introduce | transduced only into the cold coil chamber 37 using the vent valve 52 distribute | arranged to the cold coil chamber 37, without opening the inside of the vacuum chamber 10 to air | atmosphere. Thereby, the reproduction of the cold coil 35 can be performed efficiently (that is, in a short time).

  Moreover, in the vacuum exhaust apparatus 102 of this embodiment, when the vacuum evaporation apparatus 100 is a batch type, for example, when replacing the substrate (not shown) in the vacuum chamber 10, the cold coil 35 in the circulation of the refrigerant is brought into the atmosphere. There is no need to expose. Therefore, it is possible to operate continuously without changing the use condition of the cold coil 35 even when replacing the substrate.

  Next, the operation of the vacuum exhaust apparatus 102 of this embodiment will be described. First, an example of normal operation of the vacuum exhaust device 102 will be described.

  Here, it is assumed that the batch-type vacuum vapor deposition apparatus 100 is taken as an example, and the substrate 41 is in a state immediately after being exchanged into the vacuum chamber 10 of the vacuum vapor deposition apparatus 100.

  When the replacement of the substrate 41 in the vacuum chamber 10 is completed, the roughing valve 14 is opened after the vacuum chamber 10 is sealed. As a result, the vacuum tank 10 and the exhaust passage 20 </ b> A are decompressed by the roughing pump 13. When the pressure in the vacuum chamber 10 and the exhaust passage 20A is reduced to a predetermined degree of vacuum, the roughing valve 14 is closed.

  Next, the main valve 20 is opened. At the same time, the cold coil 35 is exposed in the vacuum chamber 10 using the lid portion 32.

  Thereby, the pressure in the vacuum chamber 10 and the exhaust passage 20 </ b> A is further reduced by the gas exhaust of the main pump 11 and the gas trap of the cold coil 35.

  When the pressure in the vacuum chamber 10 and the exhaust passage 20 </ b> A is reduced to a predetermined high vacuum state, appropriate vacuum deposition is performed on the substrate 41 in the vacuum chamber 10. In this case, the heat radiation is suitably shielded by the lid 32 so that the heat radiation emitted from the vapor deposition source 40 does not directly enter the cold coil 35. That is, even during the vacuum evaporation in the vacuum evaporation apparatus 100, the gas trap of the cold coil 35 can be appropriately performed without considering the heat generation of the evaporation source 40.

  When the vacuum deposition of the substrate 41 is finished, the main valve 20 is closed. At the same time, the cold coil chamber 37 is formed (sealed) using the lid portion 32.

  Here, since it is assumed that the main pump 11 is continuously operated, the foreline valve 16 is always open.

  Thereafter, using an appropriate vent valve (not shown), the air is introduced into the vacuum chamber 10 and the substrate 41 is replaced again.

  In this way, one cycle of the vacuum deposition process by the batch type vacuum deposition apparatus 100 is executed.

  Next, an operation example of the regeneration of the cold coil 35 of the vacuum exhaust device 102 will be described.

  The cold coil 35 is regenerated by forming (sealing) the cold coil chamber 37. When the lid portion 32 is brought into contact with the seat portion 33, the cold coil chamber 37 for storing the cold coil 35 can be formed (sealed) as described above (FIG. 2).

  In this state, the refrigerant circulation to the cold coil 35 by the refrigerator 50 is stopped, the cold coil 35 is returned to room temperature, and then the atmosphere is introduced only into the cold coil chamber 37 using the vent valve 52.

  In this case, the vacuum chamber 10 can be maintained in a reduced pressure state (airtight state). Therefore, the reproduction of the cold coil 35 can be performed in a short time.

  Next, after the cold coil 35 is regenerated, the cold coil chamber 37 is decompressed.

  The cold coil chamber 37 may be decompressed by the roughing pump 13 using an appropriate roughing valve (not shown) disposed in the cold coil chamber 37, for example.

  Next, refrigerant circulation to the cold coil 35 is started, and the cold coil 35 is cooled again to a very low temperature.

  In this way, the reproduction of the cold coil 35 is executed.

  After the regeneration of the cold coil 35, when the cylindrical wall 32A of the lid portion 32 moves away from the seat portion 33 and the cold coil 35 is exposed in the vacuum chamber 10, the inside of the vacuum chamber 10 and the exhaust passage 20A are connected to the main pump. The pressure is reduced by 11 gas exhaust and the gas trap of the cold coil 35 after regeneration.

  As described above, the evacuation apparatus 102 according to the present embodiment includes the main pump 11 that can evacuate the vacuum chamber 10, the cold coil 35 that can freeze trap the gas in the vacuum chamber 10, and the concave type disposed in the vacuum chamber 10. , And a flat seat portion 33 (in this embodiment, a side wall portion of the vacuum chamber 10) facing the lid portion 32. In the vacuum exhaust apparatus 102 of the present embodiment, the cold coil chamber 37 is formed by the lid portion 32 and the seat portion 33.

  Specifically, the cold coil chamber 37 is formed when the cylindrical wall 32 </ b> A of the lid portion 32 hits the seat portion 33. As a result, the cold coil 35 is sealed in the cold coil chamber 37.

  With the above configuration, the cold coil chamber 37 dedicated to the cold coil 35 can be formed in the vacuum chamber 10, so that the cold coil 35 can be continuously used and regenerated without impairing the features (advantages) of the cold trap 35 disposed in the vacuum chamber. Can be performed more efficiently than before.

  Further, the vacuum exhaust device 102 of the present embodiment includes a second cylinder 31 (drive device) that can generate a drive force to the lid portion 32, and the cylinder body 31 </ b> A (drive portion) of the second cylinder 31 is attached to the seat portion 33. It is arranged. The lid 32 is disposed so as to be orthogonal to the axial direction of the piston rod 31B of the second cylinder 31, and the cylindrical wall 32A extends parallel to the axial direction of the piston rod 31B from the periphery of the flat plate 32B. ,including. The piston rod 31B supported by the cylinder body 31A extends through the seat portion 33 in an airtight manner and extends to the lid portion 32 so as to intersect the coil surface of the annular cold coil 35, and the tip end portion of the piston rod 31B is The lid portion 32 (more precisely, the back side central portion of the flat plate 32B of the lid portion 32) is connected.

  When the cylindrical wall 32A of the lid portion 32 comes into contact with the seat portion 33 based on the driving force of the second cylinder 31, the annular second seal member 32C pressed by the cylindrical wall 32A is cold. It can be used to ensure airtightness between the trap chamber 37 and the vacuum chamber 10.

  Thereby, when the vacuum evaporation system 100 is a batch type, for example, when replacing a substrate (not shown) in the vacuum chamber 10, it is not necessary to expose the cold coil 35 in the circulation of the refrigerant to the atmosphere. Therefore, it is possible to operate continuously without changing the use condition of the cold coil 35 even when replacing the substrate.

  Further, the atmosphere can be introduced only into the cold coil chamber 37 by using the vent valve 52 disposed in the cold coil chamber 37 without opening the inside of the vacuum chamber 10 to the atmosphere, so that the cold coil 35 can be efficiently regenerated. it can. Therefore, in the vacuum exhaust apparatus 102 of this embodiment, the cold coil 35 can be regenerated in a short time.

  Furthermore, in the vacuum exhaust apparatus 102 of the present embodiment, the lid 32 moves in the axial direction (horizontal direction) of the piston rod 31B, so that the cylindrical wall of the lid 32 is based on the driving force of the second cylinder 31. When 32A moves away from the seat portion 33, the cold coil 35 is exposed in the vacuum chamber 10.

  In this way, in the vacuum exhaust apparatus 102 of the present embodiment, when the lid portion 32 moves deep inside the vacuum chamber 10, there is no member that blocks the cold coil 35 in the vertical direction, and the residual in the vacuum chamber 10 remains. The gas can be trapped efficiently by the cold coil 35, and the exhaust capacity of the cold coil 35 can be improved.

In particular, in the vacuum exhaust apparatus 102 of the present embodiment, when the vapor deposition source 40 (heat source) is disposed in the vacuum chamber 10, heat radiation is performed so that the heat radiation emitted from the vapor deposition source 40 does not directly enter the cold coil 35. The radiation can be conveniently shielded by the lid 32, which is convenient. That is, even during the vacuum deposition in the vacuum deposition apparatus 100, the gas trap of the cold coil 35 can be appropriately performed without considering the heat generation of the deposition source 40.
(Modification 1)
In the vacuum exhaust apparatus 102 of this embodiment, although the cold coil 35 which consists of metal piping was illustrated as an example of a cold trap, it is not restricted to this.

For example, as another example of the cold trap, a flat cold panel having a hollow for refrigerant flow may be provided. In this case, a hole for allowing the piston rod 31B to pass through may be formed in the center of the cold panel.
(Modification 2)
In the vacuum exhaust apparatus 102 of the present embodiment, the example in which the cylindrical wall 32A and the flat plate 32B are integrally configured has been described, but the present invention is not limited thereto.

For example, the cylindrical wall 32A and the flat plate 32B may be separated and connected to each other by a fixing means (screw or the like).
(Modification 3)
In the vacuum vapor deposition apparatus 100 including the vacuum exhaust apparatus 102 of the present embodiment, the vapor deposition source 40 used in the vacuum vapor deposition apparatus is described as an example of the heat source in the vacuum chamber 10, but the present invention is not limited thereto.

  For example, as another example of the heat source, there is a substrate heating apparatus that heats the substrate 41 in the vacuum chamber 10.

Moreover, even if it is vacuum apparatuses (for example, sputtering apparatus) other than the vacuum evaporation apparatus 100, the heat source which inject | emits a thermal radiation exists. Thus, the techniques described herein are also useful in shielding heat radiation from such various vacuum equipment heat sources.
(Modification 4)
In the vacuum exhaust apparatus 102 of the present embodiment, the example in which the second seal member 32C is provided at the tip of the cylindrical wall 32A has been described, but the present invention is not limited thereto.

  For example, the second seal member 32 </ b> C may be provided on the seat portion 33. That is, the annular second seal member 32 </ b> C pressed by the cylindrical wall 32 </ b> A may be used to ensure airtightness between the cold trap chamber 37 and the vacuum chamber 10.

  Moreover, although the O-ring is illustrated as the second seal member 32C, the present invention is not limited to this.

  For example, a lip type rubber seal may be used as the second seal member 32C.

  According to the evacuation apparatus of the present invention, continuous use and regeneration of the cold trap disposed in the vacuum chamber can be performed more efficiently than before. Therefore, the vacuum exhaust apparatus of the present invention can be used for an exhaust system of a vacuum apparatus.

DESCRIPTION OF SYMBOLS 10 Vacuum tank 11 Main pump 13 Roughing pump 14 Roughing valve 16 Foreline valve 20 Main valve 20A Exhaust passage 21 Cylinder body 21B of 1st cylinder Piston rod 22 of 1st cylinder 22 Valve plate 22C 1st seal member 23 Valve seat 31 Second cylinder 31A Cylinder body 31B of the second cylinder Piston rod 32 of the second cylinder 32 Lid portion 32A Cylindrical wall 32B Flat plate 32C Second seal member 33 Seat portion 33A Opening 35 Cold coil (cold trap)
37 Cold coil room (cold trap room)
40 Vapor Deposition Source 41 Substrate 50 Refrigerator 51 Saucepan 52 Vent Valve 100 Vacuum Deposition Device (Vacuum Device)
102 Vacuum exhaust apparatus 200 Projection line 300 Annular space

Claims (8)

A vacuum pump that can evacuate the vacuum chamber;
A cold trap that can freeze trap the gas in the vacuum chamber;
A concave lid disposed in the vacuum chamber;
A flat plate-like seat portion facing the lid portion;
With
An evacuation apparatus in which a cold trap chamber capable of storing the cold trap is formed by the lid and the seat.   2. The cold trap chamber is formed by exposing the cold trap to the inside of the vacuum chamber when the peripheral edge of the lid part is separated from the seat part, and forming the cold trap chamber by the peripheral edge of the lid part contacting the seat part. The evacuation apparatus according to 1.   The vacuum exhaust apparatus according to claim 1 or 2, wherein the wall portion of the vacuum chamber is the seat portion. A driving device capable of generating a driving force to the lid,
A piston rod supported by the drive portion of the drive device extends to the lid portion so as to penetrate the wall portion in an airtight manner and intersect the annular cold trap, and a tip end portion of the piston rod is formed by the lid The vacuum exhaust apparatus according to claim 3, wherein the vacuum exhaust apparatus is connected to the portion. The lid portion includes a flat plate arranged to be orthogonal to the axial direction of the piston rod, and a cylindrical wall extending in parallel to the axial direction of the piston rod from the periphery of the flat plate,
The vacuum exhaust apparatus according to claim 4, wherein an annular seal member pressed by the cylindrical wall is used to ensure airtightness between the cold trap chamber and the vacuum chamber. Provided with a vent valve that introduces air only to the cold trap chamber,
The vacuum exhaust apparatus according to claim 5, wherein the cold trap chamber is opened to the atmosphere using the vent valve. The lid includes a flat plate arranged to be orthogonal to the axial direction of the piston rod, and a cylindrical wall extending in parallel to the axial direction of the piston rod from the periphery of the flat plate,
When the lid part is separated from the wall part, an annular space is formed between the cylindrical wall and the wall part,
The vacuum exhaust apparatus according to claim 4, wherein the cold trap is exposed in the vacuum chamber through the space. A heat source arranged in the vacuum chamber;
The evacuation apparatus according to any one of claims 1 to 7, wherein the lid portion is disposed at a position that shields heat radiation from the heat source when the cold trap is used.

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