JP2011058915A - Coaxial probe pin, coaxial cable, and method for manufacturing the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent deformation or unraveling of an outer conductor bared at the end of a coaxial probe pin or a coaxial cable. <P>SOLUTION: The coaxial probe pin or the coaxial cable includes: an inner conductor 2; an insulator 3 provided around the inner conductor 2; an adhesive layer 4 provided at the circumference of the insulator 3; and an outer conductor 5 composed of a plurality of wires and fixed to the circumference of the insulator 3 by the adhesive layer 4. The adhesive layer 4 is formed, for example, by winding an adhesive tape 40 comprising a material melting at a lower temperature than the insulator 3 around the circumference of the insulator 3, winding the outer conductor 5 around the circumference of the adhesive tape 40, and then melting and unifying the adhesive tape 40 by heat treatment. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a coaxial probe pin and a coaxial cable used for electrical characteristic inspection such as an IC chip and an electric circuit on a substrate, and a manufacturing method thereof.

  In recent years, with the increase in processing speed of semiconductor ICs, a coaxial probe pin (coaxial probe pin) having a shield structure or a coaxial cable serving as a probe pin is required so that a test signal having a higher frequency can be transmitted. (See Patent Document 1).

  The coaxial probe pin and the coaxial cable basically have an insulator provided around an inner conductor serving as a conductive needle, and an outer conductor made of a plurality of wires on the outer periphery of the insulator. Usually, a sheath is further provided on the outer periphery of the outer conductor.

JP 2002-257849 A

  By the way, in the coaxial probe pin, both ends are processed into a shape in which the outer conductor protrudes stepwise from the sheath covering the outer periphery of the outer conductor for terminal processing and the like.

  The exposed external conductor as described above is likely to be deformed or scattered during handling, resulting in problems in subsequent handling. Similar problems occur with coaxial cables.

  An object of the present invention is to prevent the end portion of the exposed outer conductor from being deformed or scattered.

  A first aspect of the present invention relates to a coaxial probe pin, which is an inner conductor serving as a conductive needle, an insulator provided around the inner conductor, an adhesive layer provided on the outer periphery of the insulator, and a plurality of And an external conductor provided in a state of being fixed to the outer periphery of the insulator by the adhesive layer.

  According to the above configuration, the outer conductor is fixed to the outer peripheral surface of the insulator by the adhesive layer. In particular, at the end of the coaxial probe pin, the end of the exposed outer conductor is insulated by the adhesive layer. Since it is fixed to the outer peripheral surface of the plate, it will not be deformed or scattered.

  In the above configuration, the adhesive material that becomes the adhesive layer may be wound around the outer periphery of the insulator as a tape, or may be applied as a paste to the outer peripheral surface of the insulator.

  In the coaxial probe pin, the adhesive layer is preferably made of a material that melts at a lower temperature than the insulator.

  In the above configuration, the outer conductor is fixed to the outer peripheral surface of the insulator by providing the adhesive layer material on the outer periphery of the insulator and further providing the outer conductor on the outer periphery and then melting the adhesive layer material. In this case, the insulator is not deformed or the characteristics are not deteriorated.

  A second aspect of the present invention relates to a coaxial cable, and includes an inner conductor, an insulator provided around the inner conductor, an adhesive layer provided on the outer periphery of the insulator, and a plurality of wires. And an outer conductor provided in a state of being fixed to the outer periphery of the insulator by an adhesive layer.

  In the coaxial cable, even if the outer conductor is exposed at the end or the like, the coaxial cable is not deformed or scattered.

  A third aspect of the present invention relates to a coaxial probe pin, and includes an insulator having an inner conductor serving as a conductive needle inside, and an adhesive made of a material that melts at a lower temperature than the insulator on the outer periphery of the insulator. After winding a tape and winding an outer conductor composed of a plurality of wires around the outer circumference of the wound adhesive tape, the insulator is applied to the structure including the outer conductor, the adhesive tape, and the insulator. Heat treatment is performed at a temperature lower than the melting temperature of the adhesive tape and the adhesive tape melts, whereby the adhesive tape is melted and integrated into an adhesive layer, and the outer periphery of the insulator is formed by the adhesive layer. The conductor is bonded and fixed.

  According to the above configuration, the outer conductor is fixed to the outer peripheral surface of the insulator by the adhesive layer made of the molten adhesive tape, and at the end of the coaxial probe pin, the end of the exposed outer conductor is Since it is fixed to the outer peripheral surface of the insulator by the adhesive layer, it is not deformed or scattered.

  In this case, the heat treatment for melting the adhesive tape is performed at a temperature lower than the temperature at which the insulator melts, so that the insulator is not deformed or the characteristics are not deteriorated.

  In addition, since the adhesive layer is formed by melting and integrating the adhesive tape wound around the outer periphery of the insulator, it is easy to control the thickness of each part of the adhesive layer, and an adhesive is applied to form the adhesive layer. Compared to the case, there is no variation in the thickness of the adhesive layer, and the outer conductor can be easily wound.

  A fourth aspect of the present invention relates to a method of manufacturing a coaxial probe pin. An insulator having an inner conductor serving as a conductive needle is prepared inside, and melted at a lower temperature than the insulator on the outer periphery of the insulator. Wrap an adhesive tape made of material, wind an outer conductor made of multiple wires around the wound adhesive tape, and melt around the wound outer conductor at the same temperature as the adhesive tape An external tape layer around which a tape made of a material to be wound is disposed, and the structure including the external tape layer, the external conductor, the adhesive tape, and the insulator is a temperature lower than a temperature at which the insulator melts, and By applying heat treatment at a temperature at which the adhesive tape and the external tape layer melt, the adhesive tape is melted and integrated into an adhesive layer, and the external conductor is adhered and fixed to the outer periphery of the insulator by the adhesive layer. While, characterized in that melting integrate the outer tape layer on the outer periphery of the outer conductor.

  In the above method of manufacturing a coaxial probe pin, in addition to obtaining a coaxial probe pin in which the exposed outer conductor is not deformed or scattered, a structure including an outer tape layer, an outer conductor, an adhesive tape, and an insulator is obtained. On the other hand, it is possible to perform adhesion and fixing of the outer conductor to the insulator and covering by melting and integrating the outer tape layer all at once by performing a single heat treatment, and the work process is simplified.

  Further, in this manufacturing method, the adhesive layer can have a constant thickness by using an adhesive tape, the thickness of the adhesive layer is not varied, and the degree of adhesion of the external conductor to the insulator is constant. Furthermore, since the heat treatment for melting the adhesive tape is performed at a temperature lower than the temperature at which the insulator melts, the insulator is not deformed or the characteristics are not deteriorated.

  In the method of manufacturing the coaxial probe pin, the adhesive tape is wound around the outer periphery of the insulator by a single winding in which the winding portions are adjacent to each other, or by a 1/2 wrap winding in which approximately half the width of the winding portion is sequentially overlapped. It is desirable that the surface is wound so as not to have a convex portion.

  In the above manufacturing method, as a result of the convex portion not being formed on the surface of the adhesive tape, when the outer conductor is wound around the outer periphery of the adhesive tape, the winding of each wire rod of the outer conductor rides on the step of the adhesive tape, etc. It is possible to prevent the occurrence of defects.

  Furthermore, in the manufacturing method of the coaxial probe pin, it is preferable that the adhesive tape and the outer conductor are wound in opposite spiral directions. When the winding direction of the adhesive tape and the outer conductor is the same, the force in one loosening direction may act to loosen the other in the same way. This force does not act to loosen the other, but rather one loosening will be blocked by contact with the other, thereby preventing the loosening of both.

  In the coaxial probe pin manufacturing method, when the adhesive tape and the outer conductor are wound in opposite spiral directions as described above, the winding direction of the adhesive tape and the winding of the outer conductor are further increased. The crossing angle α with the turning direction is preferably set to 80 ° <α <100 °.

  In the above method, the winding directions of the adhesive tape and the outer conductor are almost perpendicular to each other, and the force in one loosening direction is never applied in the other loosening direction. It will be possible to prevent the loosening of the air more reliably.

  According to the present invention, it is possible to prevent the outer conductor exposed at the end of the coaxial probe pin or the coaxial cable from being deformed or scattered, and the subsequent handling is not hindered.

The side view which cut and showed the half part of the coaxial probe pin which concerns on 1st Embodiment of this invention. FIG. 2 is a cross-sectional view of the coaxial probe pin of FIG. 1. The cross-sectional view of the coaxial probe pin which concerns on 2nd Embodiment of this invention. It is explanatory drawing of the manufacturing process of the coaxial probe pin of this invention, and the state which has wound the adhesive tape and the external conductor around the outer periphery of the insulator is shown.

  Hereinafter, a first embodiment of the present invention will be described with reference to the drawings. As shown in FIGS. 1 and 2, the coaxial probe pin 1 according to the present embodiment includes an inner conductor 2 serving as a conductive needle, An insulator 3 provided with the inner conductor 2 inserted through the center, an adhesive layer 4 provided on the outer periphery of the insulator 3, and an outer conductor 5 bonded and fixed to the outer periphery of the insulator 3 by the adhesive layer 4 And a sheath 6 covering the outer periphery of the outer conductor 5.

  The coaxial probe pin 1 is formed in a very fine wire shape having a length of about 20 mm in the axial direction and an outer diameter of about 0.3 mm as a whole. Projecting and exposed. The inner conductor 2 is formed of a single tungsten wire having a diameter of about 0.1 mm.

  The insulator 3 is formed of an insulating resin material such as PFA (tetrafluoroethylene perfluoroalkyl vinyl ether polymer). The insulator 3 has the inner conductor 2 inserted through the inner center.

  The adhesive layer 4 is made of a material having a melting point lower than that of the insulator 3, that is, a material that melts at a temperature lower than that of the insulator 3. The adhesive layer 4 may be formed, for example, by applying a paste-like adhesive material, but in this embodiment, as described in detail later, a resin tape (adhesive tape) that melts at a temperature lower than that of the insulator 3. ) Is wound around the outer periphery of the insulator 3 and the wound adhesive tape is melted and integrated by heating to form the adhesive layer 4.

  As an adhesive tape, polyethylene naphthalate (PEN, dielectric constant 2.8@1 KHz) or polyethylene terephthalate (PET, PET) is used because of its low dielectric constant of about 2.5 to 3.5 and easy uniform thickness. A polyester tape such as a dielectric constant of 3.2@1 KHz) is suitable.

  Other than using tape as described above, a thermoplastic adhesive, for example, “Stay Stick” (trade name: STAYSTIK, dielectric constant 3.8 to 5.6) manufactured by CSPM, USA, is applied as a paste and sprayed. Thus, the adhesive layer 4 can be obtained.

  The outer conductor 5 is formed by spirally winding 20 or more tin-plated copper alloy thin wires having a diameter of 0.03 mm. The sheath 6 is made of a material having a melting point equivalent to that of the material of the adhesive layer 4, in other words, a material that melts at a temperature similar to that of the material of the adhesive layer 4, specifically, a PET (polyethylene terephthalate) tape. It consists of

  Although the insulator 3 is solid in the first embodiment, it may be hollow as in the second embodiment shown in FIG. That is, the insulator 3 includes an inner insulating layer 3a in which the inner conductor 2 is inserted, and a plurality (six in the embodiment) of ribs 3b, 3b extending radially from the inner insulating layer 3a. ... and an outer insulating layer 3c connected to the outer end of the rib 3b, and a gap 3d penetrating in the length direction of the inner conductor 2 is formed between the ribs 3b, 3b adjacent in the circumferential direction. Yes.

  Next, the manufacturing method of the coaxial probe pin 1 having the above configuration will be described. First, the insulator 3 is formed around the inner conductor 2, and the insulator 3 having the inner conductor 2 inside is prepared.

  The adhesive layer 4 is provided on the outer periphery of the insulator 3. First, as shown in FIG. 3, an adhesive tape 40 that becomes the adhesive layer 4 is spirally wound.

  The adhesive tape 40 has a melting point lower than that of the insulator 3 and is made of a material that melts at a temperature lower than that of the insulator 3. As shown in the drawing, the adhesive tape 40 is wound in a form in which there are no convex portions on the surface by winding the winding portions adjacent to each other with almost no gap. Or you may wind in the shape which does not have a convex part on the surface by carrying out the wrap winding which the predetermined width part of a winding part overlaps sequentially like 1/2 wrap winding.

  Next, the outer conductor 5 is wound around the outer periphery of the spirally wound adhesive tape 40 in the spiral direction opposite to the adhesive tape 40. This is to prevent both the adhesive tape 40 and the outer conductor 5 from being loosened.

In this case, the crossing angle α between the winding direction Dt of the adhesive tape 40 and the winding direction Do of the outer conductor 5 is
80 ° <α <100 ° …………………… (I)
Set to. Thus, by winding the winding direction of the adhesive tape 40 and the winding direction of the outer conductor 5 at a right angle or an angle close to a right angle, both the winding state of the adhesive tape 40 and the outer conductor 5 is loosened. Not to be maintained.

  Further, a sheath 6 which is an outer tape layer made of a wound tape is provided around the wound outer conductor 5, and the sheath 6, the outer conductor 5, the adhesive tape 40, the insulator 3 and the inner conductor 2 are provided. The structure body is fed into a heating furnace, and is a temperature lower than the temperature at which the insulator 3 is melted with respect to the structure body, and the temperature at which the material tape of the adhesive tape 40 and the sheath 6 is melted (specifically, (100 to 150 ° C.).

  By the heat treatment described above, the material tape of the sheath 6 is melted and integrated on the outer periphery of the outer conductor 5, and the entire periphery of the outer conductor 5 is densely covered.

  Further, inside the outer conductor 5, the adhesive tape 40 is melted and integrated into the adhesive layer 4, and the outer conductor 5 is bonded and fixed to the outer peripheral surface of the insulator 3. Thereby, even if the end portion of the external conductor 5 protrudes from the sheath 6 (melted and solidified external tape layer) and is exposed, it is prevented from being deformed or scattered.

  Since the temperature of the heat treatment is lower than the temperature at which the insulator 3 melts, the insulator 3 does not deform or melt.

  As another embodiment, the adhesive layer 4 may be formed by spirally winding a resin tape having an adhesive on the surface around the outer periphery of the insulator 3 or winding it along the length of the insulator.

DESCRIPTION OF SYMBOLS 1 ... Coaxial probe pin 2 ... Inner conductor 3 ... Insulator 4 ... Adhesive layer 40 ... Adhesive tape 5 ... Outer conductor 6 ... Sheath

Claims (9)

An inner conductor that becomes a conductive needle;
An insulator provided around the inner conductor;
An adhesive layer provided on the outer periphery of the insulator;
An outer conductor made of a plurality of wires and fixed to the outer periphery of the insulator by the adhesive layer;
A coaxial probe pin comprising: The probe pin according to claim 1, wherein
A coaxial probe pin comprising a sheath covering the outer periphery of the outer conductor, wherein an end of the outer conductor protrudes stepwise from the end of the sheath. The probe pin according to claim 1 or 2,
The coaxial probe pin, wherein the adhesive layer is made of a material that melts at a temperature lower than that of the insulator. An inner conductor,
An insulator provided around the inner conductor;
An adhesive layer provided on the outer periphery of the insulator;
An outer conductor made of a plurality of wires and fixed to the outer periphery of the insulator by the adhesive layer;
A coaxial cable comprising: Provided with an insulator having an inner conductor that becomes a conductive needle inside,
An adhesive tape made of a material that melts at a temperature lower than that of the insulator is wound around the outer periphery of the insulator, and an outer conductor made of a plurality of wires is wound around the outer periphery of the wound adhesive tape. The structure including the outer conductor, the adhesive tape, and the insulator is subjected to a heat treatment at a temperature lower than the temperature at which the insulator melts and at the temperature at which the adhesive tape melts. Melted and integrated into an adhesive layer,
A coaxial probe pin, wherein the outer conductor is bonded and fixed to the outer periphery of the insulator by the adhesive layer. Prepare an insulator with an internal conductor to be a conductive needle inside,
An adhesive tape made of a material that melts at a lower temperature than the insulator is wound around the outer periphery of the insulator,
On the outer periphery of the wound adhesive tape, the outer conductor made of a plurality of wires is wound,
Around the wound outer conductor, an outer tape layer in which a tape made of a material that melts at the same temperature as the adhesive tape is wound is disposed,
The structure including the external tape layer, the external conductor, the adhesive tape, and the insulator is subjected to heat treatment at a temperature lower than a temperature at which the insulator melts and a temperature at which the adhesive tape and the external tape layer melt. Thus, the adhesive tape is melted and integrated to form an adhesive layer, and the external conductor is bonded and fixed to the outer periphery of the insulator by the adhesive layer, and the external tape layer is melted and integrated to the outer periphery of the external conductor. A method of manufacturing a coaxial probe pin, which is characterized. In the manufacturing method of the coaxial probe pin according to claim 6,
The adhesive tape is wound around the outer periphery of the insulator so that there are no convex portions on the surface by a single winding in which the winding portions are adjacent to each other or a wrap winding in which predetermined width portions of the winding portions are sequentially overlapped. A method for manufacturing a coaxial probe pin. In the manufacturing method of the coaxial probe pin according to claim 6 or 7,
The method of manufacturing a coaxial probe pin, wherein the adhesive tape and the outer conductor are wound in opposite spiral directions. In the manufacturing method of the coaxial probe pin according to claim 8,
The crossing angle α between the winding direction of the adhesive tape and the winding direction of the outer conductor is
80 ° <α <100 °
A method for manufacturing a coaxial probe pin, characterized in that:

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