JP2011049405A - Exposure device, method, and program - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an exposure device, a method and a program that are advantageous in recovery from an error. <P>SOLUTION: The exposure device has a body unit configured to expose a substrate and an operation unit for operating the body unit. The operation unit includes databases 11 and 12 which store information on errors occurring to the body unit, information on recovery methods corresponding to the errors, information on a plurality of kinds of evaluated value corresponding to the recovery methods, and information specifying an evaluated value used to determine a priority level of a recovery method among the plurality of kinds of evaluated value, and a control unit 15 configured to determine a priority level for an error occurring to the body unit based upon respective pieces of information stored in the databases 11 and 12 and to perform control for recovery of the body unit based upon the determined priority level. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to an exposure apparatus, method, and program.

  In Patent Document 1, when an error that the substrate position cannot be measured occurs in the pre-alignment of the exposure apparatus, the substrate position is automatically re-measured based on the information on the past substrate position, and if the error is still not resolved, A method for performing manual operation by an operator is disclosed. In addition, it has been proposed to use information on past substrate positions in order of increasing frequency by statistical processing.

  Patent Document 2 proposes a method for recovering an exposure apparatus based on an instruction returned from an operator when an error occurs in the exposure apparatus. In addition, a method is disclosed in which maintenance information of the exposure apparatus is statistically processed to obtain a change with time in the operating rate, manufacturing efficiency, and performance of the exposure apparatus. Furthermore, a storage unit that stores errors that have occurred in the past as an error log is disclosed.

JP 2001-307998 A JP 2002-289506 A

  Conventionally, in an exposure apparatus, the error recovery method (recovery method) is left to the operator's experience, and it takes time for the operator who has little experience to recover, or the error rate is low and invites another error. There was a problem such as. Further, in the statistical processing of Patent Document 1, priority is given to information on past substrate positions based on the frequency, but the operator may desire a different priority. Further, the statistical processing of Patent Document 2 can be used for production plan management, but cannot be used for an error recovery method. Furthermore, since the storage unit of Patent Document 2 is not associated with the recovery method, it cannot be used for the error recovery method.

  An object of the present invention is to provide an exposure apparatus, method, and program that are advantageous for recovery from an error.

  An exposure apparatus according to an aspect of the present invention includes a main body that exposes a substrate, and an operation unit that operates the main body. The operation unit includes information on an error that occurs in the main body, and the error. Information on the recovery method corresponding to the information, information on a plurality of types of evaluation values corresponding to the recovery method, and information for specifying an evaluation value used to determine the priority of the recovery method among the plurality of types of evaluation values And a storage unit for storing the error, and for the error generated in the main body unit, the priority order is determined based on each piece of information stored in the storage unit, and control for recovery is performed according to the determined priority order And a control unit for performing the above.

  A method according to another aspect of the present invention is a method for recovery from an error of a main body of an exposure apparatus that exposes a substrate, the step of extracting information on a recovery method corresponding to the error from a storage unit; For the extracted recovery method, a step of determining a priority order based on an evaluation value specified from among the plurality of types of evaluation values, and an operation corresponding to the recovery method according to the determined priority order And a step of performing.

  The present invention can provide, for example, an exposure apparatus, method, and program that are advantageous for recovery from an error.

It is a block diagram of the control system of exposure apparatus. 2 is a flowchart for explaining the operation of the control system of FIG. 1. It is a flowchart which shows the detail of S400 of FIG. It is a flowchart which shows the detail of S500 of FIG. It is a flowchart which shows the detail of S600 of FIG.

  The exposure apparatus of this embodiment uses a light from a light source (not shown) to expose a pattern image of an original (mask or reticle) onto a substrate (wafer or liquid crystal substrate). The exposure apparatus has a main body that exposes the substrate (also referred to as a main body section), a detection section that detects that the components constituting the main body are in a state, and an operation that is effective for recovery when the detection section detects an error state. And a control system (also referred to as a processing unit, an operation unit, or a console) 10 for performing the above.

  The main body includes an illumination optical system that illuminates the original, an original stage that supports and drives the original, a projection optical system that projects an image of the pattern on the original onto the substrate, a substrate stage that supports and drives the substrate, and other components. Other components include a focus system for aligning the substrate with the best imaging plane, an alignment system for aligning the original and the substrate, and a control system for controlling the atmosphere in the exposure chamber and the load lock chamber. Further, the other components may further include an original or substrate transport system, a pressure control system for controlling the pressure in the exposure chamber or the load lock chamber, a position detection system for detecting the position of the stage, a temperature control system, and the like.

  The detection unit is composed of various sensors (not shown) that detect the states of the components constituting the main body, and is connected to a control unit 15 (described later) of the control system 10. The state of the main body includes an error state and a normal state (or a recovery state). The error state means that the constituent elements constituting the main body do not perform the intended operation.

  FIG. 1 is a block diagram of the control system 10. The control system 10 includes databases (DB) 11 and 12 (also referred to as storage units), setting units 13 and 14, a control unit 15, a registration unit 16, an input unit 17, and a display unit 18. In the present embodiment, the control system 10 is provided in the exposure apparatus to control the main body, but may be connected to the main body of the exposure apparatus through a network (not shown).

  The control system 10 is embodied as a computer. The setting units 13 and 14, the control unit 15 and the registration unit 16 are embodied as a processor. The input unit 17 includes a keyboard, a pointing device, a voice input device, and the like. The display unit 18 is embodied as a liquid crystal display or the like.

  The DB 11 holds information on all errors that may occur in the main body of the exposure apparatus and is stored in the memory. As described above, since the DB 11 holds information on all errors, for example, it is possible to deal with errors other than the inability to measure the substrate position in pre-alignment.

  Each DB 12 holds information on a plurality of recovery methods that specify work that may be recovered from each error registered in the DB 11 in association with each error, and is stored in the memory. The plurality of restoration methods include those that can be executed by the exposure apparatus itself and those that cannot be executed by the exposure apparatus itself. Since the DB 12 also holds a recovery method that cannot be performed by the exposure apparatus itself, manual recovery work is easy for an operator with little experience.

  The DB 12 further holds information on a plurality of types of evaluation parameters (evaluation values) for evaluating each restoration method in association with each other. In this embodiment, the plurality of evaluation parameters include a success rate, a selection rate, and a work time, but are not limited thereto. The evaluation parameter information is statistical information that is updated based on a result obtained when a restoration method is actually selected in the past. Since the DB 12 holds a plurality of evaluation parameters, recovery work is easy for an operator with little experience.

  The DBs 11 and 12 may be stored in the same memory, or may be stored in different memories. The DBs 11 and 12 may be configured as one database. The DB 12 may store information on a plurality of types of recovery work performed in the past for one error. The memory includes ROM, RAM, various storage devices and storage media, and is configured to be able to communicate with the processor.

  The setting unit 13 sets and edits parameters for searching for work information in the DB 12. When the DB 12 holds a plurality of types of recovery work for a single error registered in the DB 11, the setting unit 13 sets conditions (parameters) for narrowing down a plurality of recovery methods provided to the worker. Functions as a refinement setting unit.

  In the present embodiment, the setting unit 13 sets parameters for “All”, “factory”, “line”, “recipe”, and “exposure device”, but the parameters are not limited to these. “All” sets all the information in the DB 12. “Factory” sets the factory where the exposure apparatus is installed. “Line” sets a production line. “Recipe” sets a recipe that defines processing conditions for processing a substrate. “Apparatus” sets the model of the exposure apparatus. If any parameter is not set, the setting unit 13 narrows down to information customized by the operator. In customization, the operator can set unique parameters or can be set by combining the above-mentioned parameters.

  The setting unit 14 is a priority setting unit that sets parameters for assigning priorities to the work information in the DB 12 (that is, priorities of a plurality of evaluation parameters). When the DB 12 holds a plurality of types of recovery work for a certain error registered in the DB 11, the setting unit 14 gives priority to the recovery work information provided to the worker. The setting units 13 and 14 may be configured integrally.

  In the present embodiment, the setting unit 14 sets the priority order of the evaluation parameters of “working time”, “success rate”, and “selection rate”. The working time is the time spent until the exposure apparatus is normally restored when the restoration method is implemented. The success rate is a probability that the apparatus has been normally recovered in the past when the recovery method is executed. The selection rate is the probability (frequency) that a recovery method has been selected (executed) in the past. The setting unit 14 gives priority to these parameters and enables them to be provided to the worker in the order of priority (in ascending order). If none of the parameters are set, the priority is set with the items customized by the operator.

  The control unit 15 selects and ranks the optimum recovery method (recovery work) from the results set by the setting units 13 and 14 for the information in the DBs 11 and 12.

  The control unit 15 is set to an automatic execution mode in which the exposure apparatus automatically performs the determined restoration work or a manual selection mode in which the operator manually selects an execution item.

  When the automatic execution mode is set, the control unit 15 narrows down by the setting unit 13 and sets the order of executing the plurality of recovery methods according to the priority order set by the setting unit 14. Then, the control unit 15 automatically executes a plurality of recovery methods sequentially until the error is recovered according to the order. In this case, if the error is recovered by the recovery method having the highest priority, the control unit 15 does not execute the recovery method having the priority after the next point.

  When the manual selection mode is set, the control unit 15 narrows down by the setting unit 13 and sets the order in which a plurality of recovery methods are executed according to the priority set by the setting unit 14. The recovery methods are displayed in the order set on the display unit 18.

  The control unit 15 communicates with a detection unit (not shown) and acquires the state of the exposure apparatus main body from the detection unit. Therefore, the control unit 15 can know that an error has occurred in the component of the main body and that the error has been recovered by the recovery method.

  Furthermore, the control unit 15 automatically updates the evaluation parameter information based on the restoration result when the corresponding restoration method is actually selected. Thereby, the reliability of the evaluation parameter is improved.

  The registration unit 16 allows the operator to manually edit (add, change, delete) the contents of the DB 12. The input unit 17 allows the operator to select work information and set a mode. The display unit 18 is configured to be able to display the contents of the DBs 11 and 12 (contents stored in the memory) and other information including information input by the input device 17, error information and recovery method information. ing.

  FIG. 2 is a flowchart for explaining the operation of the control system 10 in the maintenance method for maintaining the exposure apparatus. This operation is executed according to a computer program stored in the internal memory of the computer. In FIG. 2, “S” is an abbreviation of step, and the same applies to FIGS.

  First, the control unit 15 determines whether an error has occurred in the exposure apparatus based on information from a detection unit (not shown) (S100). If it is determined that an error has occurred, the error information in the DB 11 is read (extracted). (S200). Further, the corresponding work information (recovery method information) in the DB 12 is read (extracted) (S300). Next, the control unit 15 narrows down the work information based on the parameters set by the setting unit 13 (S400). Next, the control unit 15 sets the order in the recovery method according to the priority set by the setting unit 14 (S500). Next, the control unit 15 performs the set restoration work (S600). It should be noted that the order of S400 and S500 does not matter.

  FIG. 3 is a flowchart showing details of S400. In S400, the control unit 15 reads the parameters set by the setting unit 13 (S402), identifies the parameters (S406 to S412), and narrows down the information based on the identified parameters (S414 to S420). If no parameter is selected, the control unit 15 narrows down the information based on conditions customized by the worker (S422).

  FIG. 4 is a flowchart showing details of S500. In S500, the control unit 15 reads the parameters set by the setting unit 14 (S502), identifies the parameters (S504 to S508), and narrows down the information based on the identified parameters (S510 to S514). If no parameter is selected, the control unit 15 prioritizes based on conditions customized by the operator (S516).

  FIG. 5 is a flowchart showing details of S600.

  First, the control unit 15 determines whether or not the automatic execution mode is set (S602). If it is determined that it has been set (YES in S602), the control unit 15 selects the restoration method having the highest priority among the plurality of recovery methods narrowed down in FIG. 3 and given priority in FIG. 4 (S604).

  Next, the control unit 15 determines whether or not the selected recovery method is a recovery method that can be executed by the apparatus itself (S606). If it is determined that it can be executed (YES in S606), the control unit 15 automatically and sequentially executes the recovery work (S608). Next, the control unit 15 communicates with a detection unit (not shown) to determine whether the recovery has succeeded (S610). If the control unit 15 determines that the recovery has failed (NO in S610), the result of the recovery operation is reflected in the DB 12 ( S612).

  If it is determined after S612 or that the recovery method cannot be executed in S616 (NO in S616), the control unit 15 determines whether there is a recovery method with the next highest priority (S614). If it is determined that there is (YES in S614), the control unit 15 selects it (S616), and the flow returns to S606.

  On the other hand, if it is determined that the manual selection mode is set (NO in S602), the control unit 15 displays error information and a plurality of recovery method information on the display unit 18 in descending order of priority (S618).

  Next, the control unit 15 determines whether or not all the recovery methods have been selected (S619). If it is determined that the recovery method has not been selected (NO in S619), the operator displays the recovery displayed via the input device 17. It is determined whether one of the methods has been selected (S620), and the process waits until it is selected. If it is determined that it has been selected (specified) (YES in S620), the control unit 15 determines whether it is a recovery method that can be executed by the apparatus itself (S622).

  If it is determined that execution is possible (YES in S622), the control unit 15 automatically executes the recovery work (S624). Next, the control unit 15 communicates with a detection unit (not shown) to determine whether the recovery has succeeded (S630). If the control unit 15 determines that the recovery has failed (NO in S630), the result of the recovery operation is reflected in the DB 12 ( S632), the flow returns to S618.

  If it is determined in S622 that the recovery method cannot be executed (NO in S622), the control unit 15 displays the details of the selected recovery operation and an input screen for the operator to edit information in the DB 12 on the display unit 18. (S626). Next, the control unit 15 prompts the worker to perform manual recovery work (S628), and the flow proceeds to S630.

  When it is determined that the recovery is successful (YES in S610, YES in S630), the control unit 15 reflects the result of the recovery work in the DB 12 (S634). If it is determined in S614 that there is no recovery method with the next highest priority (NO in S614), if it is determined that there is no recovery method selected in S619, or after S634, the control unit 15 ends the process. To do.

  According to FIG. 5, if the automatic execution mode is selected, the burden on the operator can be reduced. In this embodiment, the operator sets the automatic execution mode or the manual execution mode in advance. However, when the automatic execution mode is not restored, the operator may shift to the manual selection mode. That is, in this case, the flow proceeds to S618 after NO in S614.

  Further, according to FIG. 5, regardless of the automatic execution mode or the manual execution mode, the statistical information (working time, success rate, selection rate) related to the recovery method is reflected in the DB 12 every time along with the success or failure of the recovery. Used for work. According to the present embodiment, even an operator with little experience can select and execute an operation that is most likely to be recovered from information based on past results. In addition, since the work time required for recovery can be confirmed, the influence on the entire production plan can be examined.

  In this embodiment, the control system 10 is incorporated in the exposure apparatus. However, the control system 10 may be shared with a plurality of exposure apparatuses via a network. In this case, the operator can not only know how to recover errors that have occurred in the past in the device, but also know how to recover errors that have occurred in other devices connected via the network. .

  Devices (semiconductor integrated circuit elements, liquid crystal display elements, etc.) use an exposure apparatus to expose a substrate (wafer, glass plate, etc.) coated with a photosensitive agent, develop a substrate, and other well-known methods And a process (device manufacturing method).

  The exposure apparatus can be applied to an application for manufacturing a device.

DESCRIPTION OF SYMBOLS 10 Control system 11, 12 Database 13, 14 Setting part 15 Control part 16 Registration part 17 Input part 18 Display part

Claims (9)

A main body for exposing the substrate;
An operation unit for operating the main body unit;
The operation unit includes:
Information on errors occurring in the main body, information on recovery methods corresponding to the errors, information on multiple types of evaluation values corresponding to the recovery methods, and priority on the recovery method among the multiple types of evaluation values A storage unit for storing information for identifying an evaluation value used for determining the ranking;
Control that determines the priority order based on each information stored in the storage unit for an error occurring in the main body unit, and performs control for recovery of the main body unit based on the determined priority order And
An exposure apparatus comprising:   The exposure apparatus according to claim 1, wherein the control unit sequentially executes control corresponding to the restoration method according to the determined priority order. The operation unit has a display unit,
The exposure apparatus according to claim 1, wherein the control unit causes the display unit to display information corresponding to a restoration method according to the determined priority order.   The exposure apparatus according to any one of claims 1 to 3, wherein the plurality of types of evaluation values include at least one of a success rate, a selection rate, and a work time.   5. The exposure apparatus according to claim 1, wherein the control unit updates information on the evaluation value based on a result of execution of work corresponding to the restoration method. 6. .   The exposure apparatus according to claim 1, wherein the control unit narrows down a restoration method for determining priority according to a set condition. Exposing the substrate using the exposure apparatus according to any one of claims 1 to 6;
Developing the substrate exposed in the step;
A device manufacturing method comprising: A method for recovery from an error in the main body, which is executed by a processing unit connected to the main body of an exposure apparatus that exposes a substrate,
Identify recovery method information corresponding to the error, multiple types of evaluation value information corresponding to the recovery method, and evaluation values used to determine the priority of the recovery method among the multiple types of evaluation values Extracting information from the storage unit; and
Determining the priority order based on the extracted pieces of information for the error;
Executing control for recovery of the main body based on the determined priority order;
A method comprising the steps of:   The program which makes a computer perform the method of Claim 8.