JP2011043441A5 - - Google Patents
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- Publication number
- JP2011043441A5 JP2011043441A5 JP2009192503A JP2009192503A JP2011043441A5 JP 2011043441 A5 JP2011043441 A5 JP 2011043441A5 JP 2009192503 A JP2009192503 A JP 2009192503A JP 2009192503 A JP2009192503 A JP 2009192503A JP 2011043441 A5 JP2011043441 A5 JP 2011043441A5
- Authority
- JP
- Japan
- Prior art keywords
- probe
- base portion
- contact
- beam portion
- covers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000523 sample Substances 0.000 claims 3
- 230000003014 reinforcing effect Effects 0.000 claims 1
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009192503A JP5386272B2 (ja) | 2009-08-21 | 2009-08-21 | プローブカード |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009192503A JP5386272B2 (ja) | 2009-08-21 | 2009-08-21 | プローブカード |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011043441A JP2011043441A (ja) | 2011-03-03 |
| JP2011043441A5 true JP2011043441A5 (enExample) | 2012-07-26 |
| JP5386272B2 JP5386272B2 (ja) | 2014-01-15 |
Family
ID=43830972
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009192503A Active JP5386272B2 (ja) | 2009-08-21 | 2009-08-21 | プローブカード |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5386272B2 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5777997B2 (ja) * | 2011-03-07 | 2015-09-16 | 日本特殊陶業株式会社 | 電子部品検査装置用配線基板およびその製造方法 |
| WO2022208708A1 (ja) * | 2021-03-31 | 2022-10-06 | 日本電子材料株式会社 | プローブカード |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007127481A (ja) * | 2005-11-02 | 2007-05-24 | Japan Electronic Materials Corp | プローブカードの製作方法 |
| JP5414158B2 (ja) * | 2007-06-13 | 2014-02-12 | 日本電子材料株式会社 | コンタクトプローブの製造方法 |
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2009
- 2009-08-21 JP JP2009192503A patent/JP5386272B2/ja active Active