JP2011037680A - Apparatus for producing single crystal and method for producing single crystal - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an apparatus for producing a single crystal and a method for producing a single crystal by which the rotation of a grown crystal can be safely stopped while preventing wire cut or breakage of a wire rope even when abnormality occurs such as electric power failure or machine failure. <P>SOLUTION: The apparatus for producing a single crystal includes: a first rotating means for rotating a wire rope 19 having a seed crystal 17 at the tip thereof by using a rotation output of a first power supply; a first rotation stopping means for decelerating and stopping rotation of the wire rope 19; an abnormality occurrence detecting means detecting an occurrence of abnormality while the wire rope 19 is rotated; a second rotating means for rotating the wire rope 19 by using a rotation output of a second power supply; a second rotation stopping means for decelerating and stopping rotation of the wire rope 19; and a switching means that switches, upon detecting abnormality, the rotation output to be used for rotation of the wire rope 19 from the rotation output of the first power supply to the rotation output of the second power supply. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to an apparatus and a method for manufacturing a single crystal by the Czochralski method, and more particularly to a single crystal manufacturing apparatus and a single crystal capable of controlling the rotation of the single crystal even when a power failure occurs or a mechanical failure occurs. It relates to a manufacturing method.

  Conventionally, when a single crystal is produced by the Czochralski method (CZ method, MCZ method) in which a seed crystal is brought into contact with a melt of a raw material substance in a crucible and the seed crystal is rotated and pulled to grow a single crystal, There was no control of stopping the rotation of the pulled crystal. In particular, when an abnormality such as a power failure or a mechanical failure occurs, the rotation of the crystal is suddenly stopped without taking measures for the occurrence of the abnormality.

  However, when the present inventor examined the stopping of crystal rotation, when the crystal rotation is suddenly stopped when an abnormality occurs, the grown crystal is suspended especially when the rotation moment or rotation angle of the wire rope is large. It has been clarified that excessive twisting and untwisting occur in the wire rope being used, and in the worst case, the wire rope may be broken or broken, and the pulled crystal may fall.

  Therefore, in the production of a single crystal by the Czochralski method, even when an abnormality such as a power failure or mechanical failure occurs, the wire crystal can be safely rotated while preventing the wire rope from breaking or breaking. There was a need to develop a single crystal production device that could be stopped. Further, it has been demanded to develop a single crystal manufacturing method that can safely stop the rotation of the grown crystal even when an abnormality such as a power failure or a mechanical failure occurs.

  An object of the present invention is to advantageously solve the above-described problems, and the single crystal manufacturing apparatus of the present invention uses the rotational output of the first power source transmitted through the first clutch. A first rotating means for rotating a wire rope having a seed crystal at a tip thereof, a pulling means for pulling up the seed crystal and the single crystal while growing the single crystal on the seed crystal, and the first A single crystal production apparatus comprising first rotation stopping means for decelerating and stopping the rotation of the wire rope being rotated using the rotational output of the power source. An abnormality occurrence detecting means for detecting the occurrence of an abnormality when the wire rope is rotated, and a rotation of the second power source transmitted via the second clutch when the abnormality occurrence detecting means detects the occurrence of the abnormality. Using output , Second rotation means for rotating the wire rope, and second rotation for decelerating and stopping the rotation of the wire rope rotating using the rotation output of the second power source When the stopping means and the abnormality occurrence detecting means detect an abnormality, the rotation output used to rotate the wire rope is changed from the rotation output of the first power source to the rotation output of the second power source. And a switching means for switching between. In this way, if a mechanism that rotates the wire rope using the rotation output of the second power source when an abnormality occurs is provided, the crystal (wire rope) can rotate even when an abnormality such as a power failure or mechanical failure occurs. However, the crystal growth can be continued if necessary, and the rotation of the grown crystal can be stopped safely.

Here, in the single crystal manufacturing apparatus of the present invention, the second rotation stop means may decelerate and stop the rotation of the wire rope at an angular deceleration of 0.53 rad / s ² or less. If it does in this way, generation | occurrence | production of the strand break of a wire rope and a fracture | rupture can be prevented more reliably.

Furthermore, the apparatus for producing a single crystal of the present invention includes a crystal mass measuring means for measuring the mass of the pulled seed crystal and the single crystal, and a length of a wire rope that suspends the pulled seed crystal and the single crystal. Wire rope length measuring means for measuring the thickness, the mass of the seed crystal and single crystal measured by the crystal mass measuring means, and the wire rope length measured by the wire rope length measuring means, and the rotation moment of the wire rope M and a calculation means for calculating the rotation angle θ of the wire rope, and the second rotation stop means is configured such that the wire rope has a rotation moment M of 23.5 N · mm or more (M ≧ 23.5 N · and mm), the rotation angle theta: the 40 ° or more (theta ≧ 40 °) when rotating at conditions satisfying at least one of, 0.53rad / ^{s 2} or less of It is stopped by decelerating the rotation of the wire rope in the deceleration is preferred. As described above, when the rotation moment M is 23.5 N · mm or more and when the rotation angle θ is 40 ° or more, the rotation speed of the wire rope is 0.53 rad / s ² or less. If the angular deceleration is reduced, wire breakage and breakage of the wire rope can be more reliably prevented. Therefore, for example, when a heavy silicon ingot having a diameter of 450 mm is manufactured, rotation of the grown crystal can be safely stopped. If the wire rope rotation moment M is less than 23.5 N · mm (M <23.5 N · mm) and the wire rope rotation angle θ is less than 40 ° (θ <40 °), the crystal Since the wire rope is not easily broken when the rotation is stopped, the rotation speed of the wire rope can be reduced at an arbitrary angular deceleration to stop the rotation of the crystal (wire rope).

  In the method for producing a single crystal of the present invention, the seed crystal installed at the tip of the wire rope is brought into contact with the melt of the raw material, and the seed crystal is transmitted through the first clutch. A step of rotating the wire rope using a rotation output of a source and rotating the wire rope with a pulling mechanism; a step of detecting whether or not an abnormality has occurred with the abnormality occurrence detecting means during the pulling of the seed crystal; In the method for producing a single crystal, the first rotation stop means detects the first power source when no abnormality is detected by the abnormality detection means during the pulling of the seed crystal. If the occurrence of an abnormality is detected by the abnormality detection means during the pulling up of the seed crystal, the wire rope is rotated when the rotation of the wire rope being rotated using the rotation output is decelerated and stopped. The rotation output used for rotation is switched from the rotation output of the first power source to the rotation output of the second power source transmitted via the second clutch, and then the second rotation stop The means is characterized by decelerating and stopping the rotation of the wire rope that is rotated using the rotation output of the second power source. In this way, if the wire rope is rotated using the rotation output of the second power source when an abnormality occurs, the rotation of the crystal (wire rope) stops suddenly even when an abnormality such as a power failure or mechanical failure occurs. The crystal growth can be continued as needed, and the rotation of the grown crystal can be safely stopped.

Here, in the single crystal manufacturing method of the present invention, the rotation of the wire rope may be decelerated and stopped at an angular deceleration of 0.53 rad / s ² or less by the ^second rotation stopping means. If it does in this way, generation | occurrence | production of the strand break of a wire rope and a fracture | rupture can be prevented more reliably.

In the method for producing a single crystal of the present invention, when the rotation of the wire rope is stopped by the second rotation stopping means, the rotation moment M of the wire rope is 23.5 N · mm or more (M ≧ 23.5 N). Mm) and the wire rope rotation angle θ: 40 ° or more (θ ≧ 40 °) When the wire rope is rotating under the condition that satisfies at least one of the following, the angle reduction is 0.53 rad / s ² or less. The rotation of the wire rope may be decelerated and stopped at a speed. As described above, when the rotation moment M is 23.5 N · mm or more and when the rotation angle θ is 40 ° or more, the rotation speed of the wire rope is 0.53 rad / s ² or less. If the angular deceleration is reduced, wire breakage and breakage of the wire rope can be more reliably prevented. Therefore, for example, when a heavy silicon ingot having a diameter of 450 mm is manufactured, rotation of the grown crystal can be safely stopped. If the wire rope rotation moment M is less than 23.5 N · mm (M <23.5 N · mm) and the wire rope rotation angle θ is less than 40 ° (θ <40 °), the crystal Since the wire rope is not easily broken when the rotation is stopped, the rotation speed of the wire rope can be reduced at an arbitrary angular deceleration to stop the rotation of the crystal (wire rope).

  Furthermore, in the method for producing a single crystal of the present invention, it is preferable that the angular deceleration is constant.

In the present invention, “abnormality” includes not only abnormalities in the rotation output of the first power source such as a power failure or failure of the first power source, but also mechanical failures such as failure of the first rotating means. In the present invention, the rotation moment M of the wire rope can be calculated according to the following formula (I), and the rotation angle θ of the wire rope can be calculated according to the following formula (II).
M = α × W × sin (a _n ) (I)
θ = M × l / (Gr × Ip) (II)
Wherein, alpha is a constant, W is the mass of the crystals grown (seed crystal + single crystal), a _n is twisted angle of wire rope, l is the wire rope length, Gr is modulus of transverse elasticity of the wire rope, Ip is the cross-sectional secondary pole moment of the wire rope. ]

  According to the present invention, in the production of a single crystal by the Czochralski method, even when an abnormality such as a power failure or a mechanical failure occurs, the wire rope can be prevented from being broken or broken while being grown. The rotation can be stopped safely.

It is explanatory drawing which shows the structure of an example of the single crystal manufacturing apparatus of this invention. (A) is explanatory drawing which looked at a part of wire rope of the single-crystal manufacturing apparatus shown in FIG. 1 from the front, (b) is sectional drawing which follows the AA line of Fig.2 (a). . It is explanatory drawing explaining the structure of the wire rope rotation mechanism of the single crystal manufacturing apparatus shown in FIG. It is a flowchart explaining the control flow at the time of a power failure generate | occur | producing when manufacturing a single crystal using the single crystal manufacturing apparatus shown in FIG. It is a flowchart explaining the control flow in case the failure of a 1st motor generate | occur | produces when manufacturing a single crystal using the single crystal manufacturing apparatus shown in FIG.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Here, an example of the single crystal production apparatus of the present invention is, for example, a single crystal for producing a cylindrical silicon ingot having a diameter of 450 mm by the Czochralski method (CZ method or MCZ method (magnetic field application type Czochralski method)). As shown in FIG. 1, a crystal manufacturing apparatus 10, a crucible 12 for containing polycrystalline silicon as a raw material material for single crystal silicon, and a raw material material in the crucible 12 are heated in a chamber 11. A heater 14 for forming the melt 13, a crucible rotating mechanism 15 that rotates the crucible 12 provided in the lower part of the crucible 12 in the circumferential direction (clockwise as viewed from above the apparatus in FIG. 1), and a single crystal 16 A wire rope 19 to which a seed crystal holder (seed chuck) 18 for holding a seed crystal 17 for growing is attached at the tip, and the wire rope 19 to the crucible 1 The crystal is rotated and pulled up while rotating the single crystal 16, the seed crystal 17 and the seed crystal holder 18 while rotating in the direction opposite to the rotation direction (counterclockwise in FIG. 1 when viewed from above the apparatus). Mechanism 20. The single crystal manufacturing apparatus 10 includes various mechanisms or sensors as abnormality occurrence detection means for detecting occurrence of a power failure or mechanical failure, such as a power failure detection mechanism, an operation abnormality (stop or abnormally high temperature occurrence) detection mechanism, and a laser sensor. (Not shown), a crystal mass sensor (not shown) as a crystal mass measuring means for measuring the mass of the pulled seed crystal 17 and single crystal 16, and the pulled seed crystal 17 and single crystal 16 are suspended. An encoder (not shown) is also provided as a wire rope length measuring means for measuring the length of the wire rope.

Here, the wire rope 19 has, for example, a concentric twisted structure twisted angle a _n as shown in FIG. 2 (a). Specifically, as shown in FIG. 2B, the wire rope 19 has a single core wire 24 (wire diameter: d ₁ ) as shown in a cross section along the line AA in FIG. It has a structure in which six strands 25 (element diameter: d ₂ ) are twisted around.

  The crystal rotation / pull-up mechanism 20 winds up the wire rope 19 to pull up the single crystal 16, the seed crystal 17 and the seed crystal holder 18, and a wire rope winder 21 as a pulling means, and the wire rope winder 21. 3 comprises a wire rope rotating mechanism 23 (not shown in FIG. 1) as shown in FIG. 3, which rotates the wire rope 19 by rotating the housing 22 installed therein.

  The wire rope rotation mechanism 23 rotates the housing 22 by transmitting the rotation output of the power source to the housing 22 via the rotation shaft 30 of the housing 22. As shown in FIG. 3, the wire rope rotating mechanism 23 is a two-system power mechanism including a power mechanism for normal operation and a power mechanism for when an abnormality occurs (for example, when a power failure occurs or when a mechanical failure occurs). The operation of these power mechanisms is controlled by the controller 31. The wire rope rotation mechanism 23 is provided with an encoder (not shown) for detecting the rotation speed of the rotation shaft 30.

  Specifically, the wire rope rotation mechanism 23 includes a first motor 33, a first motor 33, and a first input pulley 35 to which a rotation output of the first motor 33 is input as a power mechanism for normal operation. A first electromagnetic clutch 34 provided between the first output pulley 37, the first output pulley 37 that rotates together with the rotary shaft 30, and a first input pulley 35 and a first output pulley 37 that are wound around the first output pulley 37. 1 belt 36. The wire rope rotation mechanism 23 is a power mechanism for occurrence of abnormality between the second motor 38 and the second motor 38 and the second input pulley 40 to which the rotation output of the second motor 38 is input. A second electromagnetic clutch 39 provided, a second output pulley 42 that rotates integrally with the rotary shaft 30, and a second belt 41 that is wound between the second input pulley 40 and the second output pulley 42. And an uninterruptible power supply (UPS) 43 that can supply power to the controller 31, encoder (not shown), second motor 38, second electromagnetic clutch 39, etc. even in the event of a power failure.

  In the wire rope rotation mechanism 23, during normal operation, the rotation output of the first motor 33 as the first power source is converted into the first electromagnetic clutch 34 as the first clutch and the first rotation means. Is transmitted to the rotary shaft 30 via the first input pulley 35, the first belt 36, and the first output pulley 37, and when an abnormality occurs, the rotational output of the second motor 38 as the second power source is the second output power. Is transmitted to the rotary shaft 30 via the second electromagnetic clutch 39 as the second clutch, and the second input pulley 40, the second belt 41 and the second output pulley 42 as the second rotating means.

  Here, the example of control of the wire rope rotation mechanism 23 at the time of manufacturing the single crystal 16 using this single crystal manufacturing apparatus 10 is demonstrated below.

  At the same time as the wire rope rotating mechanism 23 starts pulling up the seed crystal 17 brought into contact with the raw material melt 13 in the crucible 12 (winding the wire rope 19 with the wire rope winder 21), The casing 22 is rotated by using a power mechanism for operation, that is, the first motor 33, the first electromagnetic clutch 34, the first input pulley 35, the first belt 36, and the first output pulley 37, and thereby the wire rope 19 is rotated. For example at 10 rpm. Note that the rotation speeds of the housing 22 and the wire rope 19 can be controlled by adjusting the rotation output of the first motor 33 by the controller 31.

  The pulling up of the single crystal 16 was completed without detecting any abnormalities (such as a power failure, mechanical failure such as failure of the first motor 33, failure of the first electromagnetic clutch 34, breakage of the first belt 36). In that case, the rotation of the wire rope 19 is stopped as follows, and the rotation of the single crystal 16 is safely stopped.

  First, the mass W of the pulled single crystal 16 and the seed crystal 17 is measured by the crystal mass sensor, and the length l of the wire rope 19 that suspends the seed crystal 17 and the single crystal 16 is obtained by the encoder.

Next, in the controller 31 that also functions as a calculation means, the rotation moment M and the rotation angle θ of the wire rope are calculated using the mass W of the crystal and the length l of the wire rope.
Here, the mass of crystals (seed crystals + single crystal): W, the effective cross-sectional area of the wire rope: A (in the present ^{_{embodiment, (d 1/2) 2}} π + 6 × (d 2/2) 2 π), the wire Twisted wire angle of rope: _If an is assumed, the tensile stress σ of the wire rope is
σ = W / A
The vertical load W _n of the wire rope is
W _n = σ × A × cos (a _n )
The rotation force T of the wire rope is
T = W _n × tan (a _n )
It becomes.
Therefore, if the rotation moment M of the wire rope is constant: α and moment radius: R (wire rope radius: D / 2), the controller 31 represents the following formula:
M = α × T × R = α × W × sin (a _n )
Can be used to calculate.
Further, the rotation angle θ of the wire rope is expressed by the following equation in the controller 31 when the transverse elastic modulus of the wire rope is Gr, the cross-sectional secondary pole moment of the wire rope is Ip, and the length of the wire rope is l.
θ = M × l / (Gr × Ip)
Can be used to calculate.
The cross-sectional secondary pole moment Ip of the wire rope is expressed by the following formula when the wire diameter: d (= d ₁ = d ₂ ) and the constant determined by the twist configuration of the wire rope: γ
^{Ip = γ × π × d 4} /32
Can be expressed as Incidentally, when the wire diameters d ₁ and d ₂ are different (when d ₁ ≠ d ₂ ), the cross-sectional secondary pole moment Ip can be obtained using d ₂ .

When the wire rope 19 is rotated under a condition that satisfies at least one of the rotation moment M ≧ 23.5 N · mm and the rotation angle θ ≧ 40 °, the angle reduction is 0.53 rad / s ² or less. The rotation speed of the rotating shaft 30 (wire rope 19) is decreased so as to be the speed (the controller 31 functions as a first rotation stopping means, and the rotation output of the first motor 33 is decreased), and the rotation of the wire rope 19 is achieved. Stop. On the other hand, when the wire rope 19 is rotated under the condition that the rotation moment M <23.5 N · mm and the rotation angle θ <40 °, the controller 31 functions as the first rotation stop means, The rotation speed of the rotating shaft 30 (wire rope 19) is decreased at an arbitrary angular deceleration to stop the rotation of the wire rope 19. The angular deceleration is a negative acceleration, that is, a rate of decrease in angular velocity per unit time.

  As described above, if the crystal rotation is stopped in consideration of the rotation moment M and the rotation angle θ of the wire rope 19, it is possible to prevent the wire rope 19 from being cut and the life of the wire rope 19 from being shortened. At the same time, breakage of the wire rope 19 can be prevented and the crystal rotation can be stopped safely.

  On the other hand, when the occurrence of abnormality is detected by various sensors as abnormality occurrence detection means during the pulling of the single crystal 16, using the controller 31 that also functions as the switching means and the second rotation stop means, for example, The rotation of the wire rope 19 can be stopped as follows, and the rotation of the single crystal 16 can be stopped safely.

  As an example, when the abnormality occurrence detection means detects the occurrence of a power failure, as shown in FIG. 4, first, the power supply source to the wire rope rotation mechanism 23 is switched to the uninterruptible power supply (UPS) 43 (S1). ). At this time, since electric power is not supplied to the first motor 33 and the first electromagnetic clutch 34, the first motor 33 is stopped and the first electromagnetic clutch 34 is released.

  Next, the second motor 38 is activated by the electric power from the UPS 43, and the controller 31 rotates the second motor 38 to a rotation output at which the rotation speed of the rotating shaft 30 (the rotation speed of the wire rope 19) detected by the encoder can be maintained. The output is increased (S2). When the rotation output of the second motor 38 increases, the second electromagnetic clutch 39 is excited to connect the second motor 38 and the second input pulley 40 (S3).

Then, the controller 31 controls the rotation output of the second motor 38 and decreases the rotation speed of the rotary shaft 30 (wire rope 19) so that the angular deceleration is 0.53 rad / s ² or less. The rotation is stopped (S4). Here, in the present invention, it is preferable to reduce the rotational speed of the wire rope with a constant angular deceleration.

  As another example, when the abnormality occurrence detection unit detects the occurrence of the failure of the first motor 33, first, as shown in FIG. 5, the controller 31 releases the first electromagnetic clutch 34 (S1 ′). ).

  Next, the controller 31 activates the second motor 38 and increases the rotational output of the second motor 38 to a rotational output that can maintain the rotational speed of the rotating shaft 30 (rotational speed of the wire rope 19) detected by the encoder (S2). '). When the rotational output of the second motor 38 increases, the second electromagnetic clutch 39 is excited to connect the second motor 38 and the second input pulley 40 (S3 ').

Thereafter, the single crystal 16 is continuously pulled up while rotating the wire rope 19 using the rotation output of the second motor 38. When the pulling of the single crystal is completed (S4 ′), the rotation of the wire rope 19 is stopped in the same manner as in the case of stopping the rotation of the single crystal 16 during the normal operation described above, so that the rotation of the single crystal 16 is safe. To stop. Specifically, the controller 31 functioning as a calculation means calculates the rotation moment M and the rotation angle θ of the wire rope using the mass W of the crystal (single crystal + seed crystal) and the length l of the wire rope, and the rotation It is determined whether the wire rope is rotated under a condition satisfying at least one of moment M ≧ 23.5 N · mm and rotation angle θ ≧ 40 ° (S5 ′), and M ≧ 23.5 N · mm, θ ≧ When at least one of 40 ° is satisfied, the rotational speed of the rotating shaft 30 (wire rope 19) is decreased so that the angular deceleration is 0.53 rad / s ² or less (the controller 31 causes the second motor to 38), the rotation of the wire rope 19 is stopped (S6 ′). On the other hand, when the wire rope 19 rotates under the condition that the rotation moment M <23.5 N · mm and the rotation angle θ <40 °, the controller 31 rotates the rotation shaft 30 ( The rotation speed of the wire rope 19) is decreased and the rotation of the wire rope 19 is stopped.

  As described above, in the single crystal manufacturing apparatus 10, the rotation speed of the wire rope 19 can be controlled using the second motor 38 or the like even when an abnormality occurs such as a power failure or a mechanical failure. It is possible to safely stop the rotation of the grown single crystal 16 while preventing the 19 wires from being cut or broken.

  In addition, the single crystal manufacturing apparatus of this invention is not limited to the said example, A change can be added suitably. Specifically, the single crystal manufacturing apparatus of the present invention may include a magnetic field applicator. In addition to the electromagnetic clutch, a hydraulic clutch can be used as the clutch.

  EXAMPLES Hereinafter, although an Example demonstrates this invention further in detail, this invention is not limited to the following Example at all.

Example 1
In the single crystal manufacturing apparatus shown in FIG. 1, when a power failure occurs, the rotation speed M of the wire rope M = 69.6 N · mm and the rotation speed of the silicon single crystal rotating at the rotation angle θ = 86 ° of the wire rope The deceleration was reduced at 0.52 rad / s ² to stop the rotation of the crystal. When the state of the wire rope was visually observed after the rotation of the crystal was stopped, no wire breakage or the like occurred.

(Example 2)
In the single crystal manufacturing apparatus shown in FIG. 1, when a power failure occurs, the rotation speed M of the wire rope M = 69.6 N · mm and the rotation speed of the silicon single crystal rotating at the rotation angle θ = 86 ° of the wire rope The deceleration was reduced at 0.58 rad / s ² to stop the rotation of the crystal. When the state of the wire rope was visually observed after the rotation of the crystal was stopped, almost no wire breakage occurred.

(Example 3)
In the single crystal manufacturing apparatus shown in FIG. 1, when a power failure occurs, the rotation speed M of the wire rope M = 13.9 N · mm and the rotation speed of the silicon single crystal rotating at the rotation angle θ = 17 ° of the wire rope Deceleration was reduced at 0.73 rad / s ² to stop crystal rotation. When the state of the wire rope was visually observed after the rotation of the crystal was stopped, no wire breakage or the like occurred.

Example 4
In the single crystal manufacturing apparatus shown in FIG. 1, when a power failure occurs, the rotation speed M of the wire rope M = 13.9 N · mm and the rotation speed of the silicon single crystal rotating at the rotation angle θ = 17 ° of the wire rope The deceleration was reduced to 1.05 rad / s ² and the rotation of the crystal was stopped. When the state of the wire rope was visually observed after the rotation of the crystal was stopped, no wire breakage or the like occurred.

(Example 5)
In the single crystal manufacturing apparatus shown in FIG. 1, when a power failure occurs, the rotation speed M of the wire rope M = 13.9 N · mm and the rotation speed of the silicon single crystal rotating at the rotation angle θ = 17 ° of the wire rope The deceleration was reduced at 1.57 rad / s ² to stop the rotation of the crystal. When the state of the wire rope was visually observed after the rotation of the crystal was stopped, no wire breakage or the like occurred.

(Example 6)
In the single crystal manufacturing apparatus shown in FIG. 1, when a power failure occurs, the rotation speed M of the wire rope is 164.2 N · mm and the rotation speed of the silicon single crystal rotating at the rotation angle θ of the wire rope is 46 °. The deceleration was reduced at 0.05 rad / s ² to stop the rotation of the crystal. When the state of the wire rope was visually observed after the rotation of the crystal was stopped, no wire breakage or the like occurred.

(Example 7)
In the single crystal manufacturing apparatus shown in FIG. 1, when a power failure occurs, the rotation speed M of the wire rope is 164.2 N · mm and the rotation speed of the silicon single crystal rotating at the rotation angle θ of the wire rope is 46 °. The deceleration was reduced at 0.52 rad / s ² to stop the rotation of the crystal. When the state of the wire rope was visually observed after the rotation of the crystal was stopped, no wire breakage or the like occurred.

(Example 8)
In the single crystal manufacturing apparatus shown in FIG. 1, when a power failure occurs, the rotation speed of the wire rope is M = 23.0 N · mm, the rotation speed of the wire rope is θ = 29 °, and the rotation speed of the silicon single crystal is angular. The deceleration was reduced at 0.58 rad / s ² to stop the rotation of the crystal. When the state of the wire rope was visually observed after the rotation of the crystal was stopped, no wire breakage or the like occurred.

Example 9
In the single crystal manufacturing apparatus shown in FIG. 1, when a power failure occurs, the rotation speed M of the wire rope is 23.0 N · mm and the rotation speed of the silicon single crystal rotating at the rotation angle θ of the wire rope is 38 °. The deceleration was reduced at 0.58 rad / s ² to stop the rotation of the crystal. When the state of the wire rope was visually observed after the rotation of the crystal was stopped, no wire breakage or the like occurred.

(Comparative Example 1)
In a single crystal manufacturing device, when a power failure occurred, the rotation of the silicon single crystal rotating at a wire rope rotation moment M = 69.6 N · mm and a wire rope rotation angle θ = 86 ° was suddenly stopped. The rope broke.

  According to the single crystal production apparatus and the single crystal production method of the present invention, in the production of a single crystal by the Czochralski method, even when an abnormality such as a power failure or a mechanical failure occurs, the wire rope is broken or broken. The rotation of the grown crystal can be safely stopped while preventing the occurrence.

DESCRIPTION OF SYMBOLS 10 Single crystal production apparatus 11 Chamber 12 Crucible 13 Melt 14 Heater 15 Crucible rotation mechanism 16 Single crystal 17 Seed crystal 18 Seed crystal holder 19 Wire rope 20 Crystal rotation and pulling mechanism 21 Wire rope winder 22 Case 23 Wire rope Rotation mechanism 24 Core strand 25 Strand 30 Rotating shaft 31 Controller 33 First motor 34 First electromagnetic clutch 35 First input pulley 36 First belt 37 First output pulley 38 Second motor 39 Second electromagnetic clutch 40 Second input Pulley 41 Second belt 42 Second output pulley 43 Uninterruptible power supply

Claims (7)

A first rotating means for rotating a wire rope having a seed crystal at a tip using a rotation output of a first power source transmitted through a first clutch;
A pulling means for pulling up the seed crystal and the single crystal while growing the single crystal on the seed crystal;
In a single crystal manufacturing apparatus comprising a first rotation stopping means for decelerating and stopping the rotation of the wire rope that is rotated using the rotation output of the first power source,
The single crystal production apparatus comprises:
An abnormality occurrence detection means for detecting the occurrence of an abnormality during rotation of the wire rope;
A second rotation for rotating the wire rope using the rotation output of the second power source transmitted through the second clutch when the abnormality detection means detects the occurrence of the abnormality. Means,
Second rotation stopping means for decelerating and stopping the rotation of the wire rope being rotated using the rotation output of the second power source;
Switching means for switching the rotation output used for rotating the wire rope from the rotation output of the first power source to the rotation output of the second power source when the abnormality occurrence detection means detects an abnormality. And a single crystal manufacturing apparatus. 2. The single crystal manufacturing apparatus according to claim 1, wherein the second rotation stopping means decelerates and stops the rotation of the wire rope at an angular deceleration of 0.53 rad / s ² or less. Crystal mass measuring means for measuring the mass of the seed crystal and the single crystal pulled up;
Wire rope length measuring means for measuring the length of the wire rope that suspends the pulled seed crystal and the single crystal;
The rotation moment M of the wire rope and the rotation angle θ of the wire rope are calculated using the masses of the seed crystal and single crystal measured by the crystal mass measuring means and the length of the wire rope measured by the wire rope length measuring means. Computing means;
Further comprising
In the second rotation stopping means, the wire rope has the rotation moment M: 23.5 N · mm or more (M ≧ 23.5 N · mm) and the rotation angle θ: 40 ° or more (θ ≧ 40 °). The rotation of the wire rope is decelerated and stopped at an angular deceleration of 0.53 rad / s ² or less when rotating under a condition that satisfies at least one of the following. Single crystal manufacturing equipment. A seed crystal placed at the tip of the wire rope is brought into contact with the melt of the raw material, and the wire rope is utilized by utilizing the rotational output of the first power source transmitted through the first clutch. A step of rotating by rotating and lifting with a pulling mechanism,
During the pulling of the seed crystal, a step of detecting the presence or absence of an abnormality with an abnormality occurrence detection means;
A method for producing a single crystal comprising:
If no abnormality is detected by the abnormality occurrence detecting means during the pulling of the seed crystal, the first rotation stopping means rotates using the rotation output of the first power source. Decelerate and stop the rotation of the wire rope,
If an abnormality occurrence is detected during the pulling of the seed crystal, the rotation output used to rotate the wire rope is changed from the rotation output of the first power source to the first output. The wire that is switched to the rotation output of the second power source that is transmitted through the clutch of 2 and then rotated by the second rotation stop means using the rotation output of the second power source A method for producing a single crystal, wherein the rotation of the rope is decelerated and stopped. 5. The method for producing a single crystal according to claim 4, wherein the second rotation stopping means decelerates and stops the rotation of the wire rope at an angular deceleration of 0.53 rad / s ² or less. When the rotation of the wire rope is stopped by the second rotation stopping means, the rotation moment M of the wire rope is 23.5 N · mm or more (M ≧ 23.5 N · mm), and the rotation angle θ of the wire rope is: When the wire rope is rotating under a condition satisfying at least one of 40 ° or more (θ ≧ 40 °), the rotation of the wire rope is decelerated and stopped at an angular deceleration of 0.53 rad / s ² or less. The method for producing a single crystal according to claim 4, wherein:   The single crystal manufacturing method according to claim 5, wherein the angular deceleration is constant.

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