JP2011033324A - Drying device and cleaning drying device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a drying device capable of simplifying the operation of a process for drying a cleaned object such as an optical element. <P>SOLUTION: The drying device comprises a rotary drying part 4 having a rotor 44 rotating around a shaft inside, a holding tool 5 having a holding part for holding the cleaned object and a holding tool body for storing the holding part and removable from the rotor 44, and a rotation fitting mechanism 11 for fitting the rotor 44 and the holding tool 5 by the rotation movement of the holding tool 5 to the rotor 44. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention relates to a drying apparatus and a cleaning / drying apparatus.

Conventionally, when a coating layer is formed on the outer surface of an optical element, the optical element is washed to remove various deposits adhering to the outer surface. Further, following such washing, the liquid used for washing is removed and dried.
When the liquid used for cleaning is dried while remaining on the outer surface of the optical element, a stain is generated on the outer surface of the optical element. Since such stains adversely affect optical properties such as light transmission and reflection, a drying method capable of effectively removing the liquid used for cleaning is required.

  As an example of a drying apparatus for drying an optical element, for example, Patent Document 1 describes a drying jig for an optical component (optical element). The drying jig described in Patent Document 1 is a flat drying jig for mounting a cleaned optical element on a spin drying device (rotary drying unit), and an optical component on one side of the flat plate. At least one optical component insertion portion having an opening through which the optical component insertion portion has a bottom portion as an optical component placement portion, and a part of the bottom portion includes the flat plate. A through-hole penetrating to the opposite side of the opening is formed, the cross-sectional shape of all the through-holes at the bottom of the optical component insertion portion is circular, and when m and n are integers, the optical component Insertions are formed in the drying jig in a matrix of m rows and n columns.

  This drying jig does not require skilled work that requires long-time worker training, and has good work efficiency when using optical components such as washed multilayer filters for modules. The module can be washed and dried in a satisfactory state so that the function of the module can be satisfactorily exhibited.

JP 2005-24236 A

  However, in the drying jig described in Patent Document 1, it is difficult to automate the work of mounting the drying jig containing a large number of optical elements on the rotating body of the rotary drying unit, and it requires manual work. There was a problem.

  The present invention has been made in view of the above-described circumstances, and an object of the present invention is to provide a drying apparatus and a cleaning / drying apparatus that can simplify the operation of a drying process of an object to be cleaned such as an optical element.

  In order to solve the above problems, the present invention proposes the following means.

  The drying apparatus of the present invention includes a rotary drying unit having a rotor that rotates about an axis, a holding unit that holds an object to be cleaned, and a holding jig body that stores the holding unit. A detachable holding jig, and a rotation fitting mechanism for fitting the rotor and the holding jig by rotating the holding jig with respect to the rotor.

According to the present invention, the object to be cleaned is held by the holding portion, and the holding jig main body in which the holding portion is accommodated can be attached to the rotor. At this time, the rotor and the holding jig are fitted only by rotating the holding jig with respect to the rotor by the rotation fitting mechanism. Thereby, even if the rotor rotates about the axis, the holding jig is favorably supported with respect to the rotor.
In addition, since the rotor rotates about the axis inside the rotary drying unit, centrifugal force is generated radially outward of the rotor in the holding jig that is rotationally fitted to the rotor. For this reason, the foreign material adhering to the outer surface of the object to be cleaned held by the holding jig is detached from the object to be cleaned. Further, liquid components remaining on the outer surface of the object to be cleaned are also detached from the object to be cleaned, so that the object to be cleaned is dried. As a result, it is possible to simplify the operation of the process of drying the object to be cleaned.

Further, in the drying apparatus of the present invention, the rotation fitting mechanism is formed on the other of the rotor and the holding jig main body, and the convex portion formed on one of the rotor and the holding jig main body. It is preferable to have a concave portion into which the convex portion is fitted by a rotation operation of the holding jig with respect to the rotor.
In this case, by rotating the holding jig with respect to the rotor, the convex portion and the concave portion are fitted, and the holding jig is fixed to the rotor. As a result, since the holding jig is supported without being detached from the rotor when the rotor rotates about the axis, it is possible to suitably apply centrifugal force to the object to be cleaned.

In addition, the drying apparatus of the present invention further includes a rotary conveyance unit that holds the holding jig and rotates the holding jig around a predetermined axis and can insert the holding jig into the rotary drying unit. It is preferable that the main body has a gripping part that is gripped by the rotary conveyance part.
In this case, the gripping portion of the holding jig is gripped by the rotary conveyance unit, and the holding jig rotates around a predetermined axis. Accordingly, since the holding jig can be rotated with respect to the rotor, the operation of fitting the holding jig with respect to the rotor by the rotation fitting mechanism can be automated.

Further, the drying apparatus of the present invention provides the chucking in which the rotary conveyance unit is provided with two or more gripping members that can reciprocate in the radial direction around the predetermined axis and that can rotate about the predetermined axis. It is preferable that the holding part has an engaging part that can be frictionally engaged with each of the holding members.
In this case, the rotary conveyance unit can hold the holding unit with the chucking unit. At this time, the gripping member moves in the radial direction and comes into contact with the engaging portion, and the gripping portion is supported by the frictional force generated between the gripping member and the engaging portion. As a result, the rotary transport unit can grip and transport the holding jig with a simple operation.

Further, the drying device of the present invention can be engaged with the groove formed on the other of the holding portion and the holding jig main body, and the groove formed on one of the holding portion and the holding jig main body. It is preferable to further include a ridge.
In this case, the relative rotational position of the holding portion and the holding jig main body can be uniquely determined at the position where the groove portion and the ridge portion are engaged. Since the holding portion and the holding jig main body are positioned and the holding jig main body and the rotor are supported by the rotation fitting mechanism, the object to be cleaned and the rotor can be arranged in a suitable positional relationship.

In the drying apparatus of the present invention, it is preferable that the holding portion and the holding jig main body are integrated.
In this case, since the holding portion and the holding jig main body are integrated, it is possible to suppress blurring between the holding portion and the holding jig main body caused by vibration or the like in the rotation operation around the rotor axis. Furthermore, since the number of parts required for the holding jig can be suppressed, the number of steps for manufacturing the holding jig can also be reduced.

The cleaning / drying apparatus of the present invention preferably includes the above-described drying apparatus and a cleaning tank in which a cleaning agent for cleaning the object to be cleaned is supplied within a movable range of the rotary conveyance unit.
In this case, the object to be cleaned can be cleaned in the cleaning tank provided in the drying device, and further, the object to be cleaned can be transported to the cleaning tank by the rotary transport unit. For this reason, it is possible to automate the cleaning and drying of the object to be cleaned.

Moreover, it is preferable that the cleaning / drying apparatus of the present invention further includes a rinsing tank in which a rinsing liquid for rinsing the cleaning agent attached to the object to be cleaned is supplied within a movable range of the rotary conveyance unit.
In this case, the object to be cleaned can be rinsed in the rinsing tank provided in the drying apparatus, and the object to be cleaned can be transported to the rinsing tank by the rotary transport unit. For this reason, cleaning, rinsing and drying of the object to be cleaned can be automated.

In the cleaning and drying apparatus of the present invention, it is preferable that the cleaning tank also serves as a rinsing tank to which a rinsing liquid for rinsing the cleaning agent attached to the object to be cleaned is supplied.
In this case, the cleaning tank also serves as the rinsing tank, and the cleaning liquid supplied to the cleaning tank can be replaced with the rinsing liquid. As a result, the number of parts required for cleaning and rinsing is reduced, and the time required for transporting the holding jig from the cleaning tank to the rinsing tank becomes unnecessary, so the time required for a series of processes from cleaning to drying is reduced. Can be reduced.

  According to the drying device and the cleaning / drying device according to the present invention, the holding jig and the rotor can be operated in a simplified manner by including the rotation fitting mechanism that rotates the holding jig around the axis and fits and fixes the holding jig to the rotor. Therefore, the operation of the drying process of the object to be cleaned such as an optical element can be simplified.

It is a side view which shows the washing-drying apparatus of 1st embodiment of this invention. It is a side view which shows the holding jig in the washing | cleaning drying apparatus. It is a top view which shows the holding jig. It is a side view which shows the structure of a part of drying apparatus in the washing | cleaning drying apparatus. It is a top view which shows a part of structure of the drying apparatus. It is a top view which shows the structure of the adapter provided in the drying apparatus. It is a side view of the adapter. It is a side view which shows the modification of the holding jig. It is a top view which shows the holding jig of FIG. It is a top view which shows the structure of the adapter corresponding to the modification shown in FIG. It is a side view of the adapter shown in FIG. It is a side view which shows the other modification of the holding jig. It is a top view which shows the holding jig of FIG. It is a top view which shows the structure of the adapter corresponding to the modification shown in FIG. It is a side view of the adapter shown in FIG. It is a side view which shows the holding jig in the washing | cleaning drying apparatus of 2nd embodiment of this invention. It is a top view of the holding jig. It is a side view which shows the structure of the holding part in the washing | cleaning drying apparatus. It is a bottom view of the holding part. It is a side view which shows the modification of the holding jig main body in the washing | cleaning drying apparatus. It is a bottom view of the holding jig main body shown in FIG. It is a top view which shows the modification of the holding part in the washing | cleaning drying apparatus.

(First embodiment)
Hereinafter, a drying apparatus and a cleaning / drying apparatus according to a first embodiment of the present invention will be described with reference to FIGS. In this embodiment, the drying apparatus and the cleaning / drying apparatus according to the present invention will be described by taking an example of a cleaning / drying apparatus that cleans an optical element such as a lens, a reflecting mirror, and a prism, which is an object to be cleaned. It is not limited to.

  FIG. 1 is a view showing a cleaning / drying apparatus 1 equipped with the drying apparatus of the present embodiment. As shown in FIG. 1, a cleaning / drying apparatus 1 includes a cleaning apparatus 3 for cleaning an optical element 2 (see FIG. 2) to be cleaned, a drying apparatus 4 for drying the optical element, and this drying. A holding jig 5 that is detachable from the apparatus is provided.

  In addition, the cleaning / drying apparatus 1 of the present embodiment conveys the above-described holding jig 5 between the input section 6 and the holding jig 5 between the input section 6, the cleaning apparatus 3, and the drying apparatus 4. For this purpose, a rotary conveyance unit 7 is provided inside the housing 10.

  Although not a configuration essential to the present invention, the cleaning / drying apparatus 1 includes a hood (not shown) made of metal, resin, or the like that covers the outer surface of the housing 10, and a dustproof mechanism 9 having a HEPA filter defined in JIS Z 8122. It is preferable to have a configuration that suppresses foreign matter such as dust from entering the inside of the cleaning / drying apparatus 1 and adhering to the outer surface of the optical element 2 by filtering outside air through the dustproof mechanism 9. .

  2 and 3 are views showing the configuration of the holding jig 5 according to the present embodiment, FIG. 2 is a side view of the holding jig 5, and FIG. 3 is a plan view of the holding jig 5. As shown in FIGS. 2 and 3, the holding jig 5 includes a holding portion 51 for holding the optical element 2 and a holding jig main body 52 on which the holding portion is fixedly supported. The holding jig main body 52 includes an annular base 53 made of stainless steel, a support portion 54 that is erected on the base 53 and supports the holding portion 51, and is fixed to the support 53. A substantially parallel annular gripping portion 55 is provided.

  Further, the base 53 is provided with three substantially cylindrical convex portions 56a, 56b, and 56c formed so as to protrude radially outward from the peripheral edge portion at every 120 degrees along the circumferential direction. It has been. The convex portions 56 a, 56 b and 56 c are formed integrally with the base 53.

  The inner peripheral surface of the gripping portion 55 is a substantially flat surface having a slip stopper, and is an engagement portion 57 that engages with a gripping member of a chucking portion described later. Further, the center O of the circular engaging portion is in a positional relationship where the holding jig 5 is located in a region inside the base 53 when the holding jig 5 is viewed from the gripping portion 55 side.

  Further, the holding part 51 is provided with a pair of holding grooves 51 a and 51 b facing each other in order to hold the optical element 2. Each of the holding grooves 51a and 51b is arranged in an appropriate positional relationship corresponding to the size and shape of the optical element. For example, as shown in the figure, the circular optical element 2 is formed so that two spaced points at the edge of the optical element 2 are fitted in the pair of holding grooves 51a and 51b, respectively. Yes.

  Returning to FIG. 1, the loading unit 6 is a place for setting the holding jig 5 holding the optical element 2, and a mounting table 8 on which the base 53 of the holding jig 5 is stably installed is provided. It has been. Although not essential to the present invention, the mounting table 8 may be provided with a positioning mechanism 8a for positioning and supporting the holder.

  The cleaning device 3 is a device that performs cleaning and rinsing by immersing the optical element 2 held by the holding jig 5 in a cleaning solution or a rinsing solution. The cleaning device 3 includes a tank unit 33 for storing the cleaning liquid 31 or the rinsing liquid 32, a cleaning rinsing tank 34 that can store the cleaning liquid 31 or the rinsing liquid 32, and the cleaning liquid 31 or the rinsing liquid 32 from the tank unit 33 to the cleaning rinsing tank 34. And a liquid supply unit 35 for feeding the liquid.

  The tank unit 33 is provided with a cleaning liquid tank 33 a for storing the cleaning liquid 31 and a rinsing liquid tank 33 b for storing the rinsing liquid 32. For example, detergent liquid or functional water in which carbon dioxide, hydrogen, ozone or the like is dissolved is stored in the cleaning liquid tank 33a, and pure water is supplied as the rinsing liquid 32 to the rinsing liquid tank 33b.

  In addition, as such a cleaning rinse tank 34, what was equipped with the ultrasonic transducer | vibrator for performing ultrasonic cleaning can be employ | adopted, for example. Further, a cleaning tank provided exclusively for cleaning instead of the cleaning rinse tank 34 and a rinse tank provided exclusively for rinsing are provided, and the liquid supply unit 35 includes a cleaning tank and a rinse tank. The cleaning liquid 31 or the rinsing liquid 32 may be supplied to each.

  The drying device 4 is a device for removing the cleaning liquid 31, the rinsing liquid 32, and the like attached to the outer surface of the optical element 2 by centrifugal force generated by rotating the optical element 2. The drying device 4 is provided with a rotary drying unit 41 that rotates and dries the optical element 2, and a liquid discharge path (not shown) for discharging a liquid such as a cleaning liquid and a rinse liquid stored in the rotary drying unit 41. Yes.

  FIG. 4 is a side view showing a partial configuration of a part of the drying apparatus according to the present embodiment. FIG. 5 is a top view of the rotary drying unit 41. The rotary drying unit 41 includes a cylindrical drying tank 42, a rotor 44 disposed inside the drying tank 42 and having a substantially disk shape, the center of which is connected to one end of the rotor shaft 43, and the other end of the rotor shaft 43. A drive unit 45 that is connected and rotates the rotating shaft is provided.

  As shown in FIG. 4, the drive unit 45 is provided with a motor 46 that generates a rotational force and a power transmission path 47 that transmits the rotational force from the motor 46 to the rotation shaft. The power transmission path 47 includes pulleys 47a and 47b provided on the motor 46 and the rotor shaft 43, and a belt 47c wound around the pulleys 47a and 47b.

  The rotary drying unit 41 is provided with a rotational position detection unit 48 for detecting the rotational position of the rotor 44. An appropriate position detection mechanism can be employed for the rotational position detection unit 48. For example, a detection plate 48 having a disk shape protruding from the rotor shaft 43 in the radial direction of the rotor shaft 43 and partially formed with a notch or a hole. In addition, a configuration including a contact sensor or an optical sensor (not shown) that is fixed to the drying tank 42 or the housing 10 and generates a signal according to the position of the notch or hole can be employed.

  As shown in FIGS. 4 and 5, three adapters 60 a, 60 b, and 60 c are arranged on the rotor 44 at intervals of 120 degrees around the rotor shaft 43. The adapters 60a, 60b, and 60c are arranged at an equal distance in the radial direction from the rotor shaft 43, and adjusted so that the center of gravity of the rotor 44 including other heavy objects is located on the rotor shaft 43.

  The three adapters 60a, 60b, and 60c are not shown in the figure, and have the same weight as the adapter 60a for fitting the holding jig 5 and the weight when the optical jig 2 is held in a prescribed number. The adapters 60b and 60c for fitting the balance are set separately. This balance is used to adjust the weight of the holding jig 5 and can be changed to an appropriate weight according to the weight of the holding jig 5.

  FIG. 6 is a plan view showing the configuration of the adapter of this embodiment. FIG. 7 is a side view showing the configuration of the adapter. As shown in FIG. 6, the adapters 60a, 60b, and 60c are formed in a substantially annular shape when viewed from above. Further, as shown in FIG. 7, concave portions 61a, 61b, 61c which are rotationally fitted to the convex portions 56a, 56b, 56c formed on the holding jig main body 52 described above, and the convex portions 56a which are erected on the concave portions. , 56b, 56c are respectively provided with guides 62 for guiding the recesses 61a, 61b, 61c to the concave portions 61a, 61b, 61c, and a slide rail 63 having a closed annular projection inside each of the concave portions 61a, 61b, 61c.

  The recesses 61a, 61b, 61c are formed approximately equal to the outer diameter of the projections 56a, 56b, 56c of the holding jig main body 52, and the projections 56a, 56b, 56c can be slidably engaged. Yes. The guide 62 is formed perpendicularly to the recesses 61 a, 61 b, 61 c from the opening end portions 64 a, 64 b, 64 c of the recesses 61 a, 61 b, 61 c, and the boundary between the opening ends 64 a, 64 b, 64 c and the guide 62. The part is preferably smooth. Further, the slide rail 63 has a smooth sliding surface 63 a that can slide in contact with the base 53 of the holding jig main body 52.

  As described above, the rotation fitting mechanism 11 is configured by the convex portions 56 a, 56 b, 56 c of the holding jig 5 and the adapter 60.

  As shown in FIGS. 4 and 5, the upper surface opening of the drying tank 42 is sealed with a cover 70. A circular hole 71 is formed in the cover 70, and a positional relationship is reached through the hole 71 so as to reach the adapters 60a, 60b, and 60c. Further, the size of the hole 71 is such that the holding jig 5 can be taken in and out of the drying tank 42.

  In addition, a base end 73 of a lid 72 that opens and closes the hole 71 is connected to the cover 70 so as to be swingable. Further, an air cylinder 75 that expands and contracts is interposed between the lid intermediate portion 74 and the peripheral portion 76 of the cover 70, and the lid 72 is opened and closed by the expansion and contraction operation of the air cylinder 75.

  Although the liquid discharge path is not shown in the drawing, an appropriate configuration can be adopted in which the drying tank 42 and the external drain tank 80 (see FIG. 1) communicate with each other. For example, a pipe line having one end opened in the bottom surface of the drying tank 42 and the other end opened in the drainage tank 80 can be used. In addition, it is good also as a structure which replaces with the waste liquid tank 80 and has the flow path opened to the waste liquid tank provided outside this washing | cleaning drying apparatus 1. FIG.

  Returning to FIG. 1, a rotary transport main body 90 that holds and rotates the holding jig 5 and a rotary transport main body 90 are fixed to the rotary transport unit 7, and the rotary transport main body 90 can be freely moved in the housing 10. The conveyance part 100 to be made is provided. A chucking portion 92 having gripping members 92 a, 92 b, and 92 c that are disposed at the tip of the rotating shaft 91 at intervals of 120 degrees around the axis of the rotating shaft 91 and that move forward and backward in the radial direction of the rotating shaft 91. And a rotation drive unit 93 that rotates the rotation shaft 91 is provided. The gripping members 92a, 92b, and 92c come into contact with the engaging portion 57 provided on the gripping portion 55 of the holding jig 5 and can be frictionally engaged.

  The transport unit 100 is provided with a motor 101 that moves the rotary transport main body 90 forward and backward along each of three axes orthogonal to each other. Further, the transport unit 100 is disposed in a positional relationship in which at least the chucking unit 92 moves forward and backward so as to be able to enter and exit the hole 71 of the rotary drying unit 41, and rotates between the input unit 6, the cleaning device 3, and the drying device 4. The transport body 90 is transported.

  Further, an appropriate configuration can be adopted as the driving method of the transport unit 100. For example, a configuration including a ball screw 102 or the like that is rotated by the motor 101 along each of the above-described axes, and a ball nut (not shown) that is provided in the rotary conveyance main body 90 and is screwed to the ball screw 102 or the like can be given.

  The transport unit 100 is provided with a detection mechanism (not shown) for detecting the position of the rotary transport main body 90. An appropriate configuration can be employed for this detection mechanism. For example, when the above-described ball screw type conveyance unit is employed, a method of including a sensor for detecting the rotation amount of the motor 101 may be employed. it can. Alternatively, the detection mechanism may be a method of detecting the position of the rotary transport main body 90 by providing a contact sensor with which the transported rotary transport main body 90 or the holding jig 5 can contact, or a light emitting unit that emits light and this light There may be a method of detecting that the rotary conveyance main body 90 or the holding jig 5 has reached a predetermined position by providing an optical sensor mechanism having a light receiving portion that receives the light receiving portion.

  In addition, the rotation conveyance part 7 can be equipped with the safety device which detects that the pressing force more than a regulation value produced with respect to the holding jig 5 grade | etc., And stops the drive.

The operation of the drying apparatus of the present embodiment having the above-described configuration will be described with reference to FIGS. 1 to 3.
First, the operator attaches the optical element 2 to the holding portion 51 as shown in FIG. In the present embodiment, the optical element 2 is inserted along the holding grooves 51 a and 51 b of the holding part 51, and the holding part 51 supports three spaced points on the edge of the optical element 2. In this way, a plurality of optical elements are mounted on the holding portion, and the holding jig is arranged on the mounting table of the drying apparatus main body.
The operator installs the holding jig 5 on the positioning mechanism 8 a on the mounting table 8.

  Since the positioning mechanism 8a of the present embodiment has the same configuration as the adapters 60a, 60b, and 60c, concave portions that are fitted into the convex portions 56a, 56b, and 56c of the holding jig 5 are provided. The operator inserts the holding jig 5 inside the guide of the positioning mechanism 8a and installs it on the slide rail, and further rotates the holding jig 5 counterclockwise as viewed from above with respect to the positioning mechanism 8a. Thus, the convex portions 56a, 56b, and 56c are fitted into the concave portions.

  This operation may be performed manually by an operator, but can also be automated by an appropriate transport robot or the like in the manufacturing process of the optical element 2. At this time, since the positioning mechanism 8 a is arranged on the mounting table 8, the holding jig 5 can be reliably installed on the mounting table 8 even by a transfer robot or the like, and the holding jig 5 can be prevented from falling.

  Subsequently, a conveying step S <b> 1 is started in which the holding jig 5 installed on the mounting table 8 is conveyed to the cleaning rinse tank 34 by the rotary conveying unit 7. First, the rotary transport body 90 is transported to the mounting table 8 by the transport unit 100 in the rotary transport unit 7. Subsequently, as shown in FIGS. 2 and 3, the gripping members 92 a, 92 b and 92 c of the chucking portion are inserted inside the gripping portion 55 of the holding jig 5. When the detection mechanism detects that the grip members 92a, 92b, and 92c have been inserted inside the grip portion 55, the operation of the transport portion 100 is stopped and the movement of the rotary transport body 90 is stopped.

  Subsequently, the chucking portion 92 of the rotary transport main body 90 is driven, and each of the gripping members 92 a, 92 b, 92 c moves radially outward about the rotation shaft 91. Each of the gripping members 92a, 92b, and 92c abuts on the engaging portion 57 inside the gripping portion 55, and the chucking portion 92 is driven so that the gripping members 92a, 92b, and 92c are pressed and fixed to the engaging portion 57. Is done. At this time, the gripping members 92 a, 92 b, 92 c move relative to the gripping portion 55 in the process of moving the gripping members 92 a, 92 b, 92 c so as to be evenly spaced apart from the rotation shaft 91 in the radial direction. The gripping members 92a, 92b, and 92c are slid slightly so that the gripping portions 55 are pressed evenly. As a result, the center O of the annular gripping portion 55 and the rotation shaft 91 of the rotary transport body 90 are positioned so as to coincide.

  The holding jig 5 held by the rotary conveyance main body 90 is removed from the positioning mechanism 8a by the conveyance unit 100. First, the rotation shaft 91 rotates 30 degrees clockwise as viewed from above, and the projections 56a, 56b, 56c of the holding jig 5 and the recesses of the positioning mechanism 8a are disengaged. Thereafter, the holding jig 5 is pulled vertically upward with respect to the positioning mechanism 8 a by the transfer unit 100, and then the holding jig 5 is transferred to the cleaning rinse tank 34.

  In the cleaning rinse tank 34, a well-known cleaning method, for example, ultrasonic cleaning or the like is performed on the optical element 2 held by the holding jig 5. First, the cleaning liquid 31 is supplied to the cleaning rinse tank 34 by the liquid supply unit 35, and the holding jig 5 holding the optical element 2 is immersed in the cleaning liquid 31, and a predetermined cleaning process is started. At this time, the rotary conveyance unit 7 still holds the holding jig 5.

  When the predetermined cleaning process is completed, the liquid supply unit 35 is driven to discharge the cleaning liquid 31 inside the cleaning rinse tank 34, and the rinse liquid 32 is supplied to the cleaning rinse tank 34 by the liquid supply unit 35. S2 is started. The supplying step of the rinsing liquid 32 is performed immediately after the cleaning liquid 31 is discharged, and the optical element 2 is preferably immersed in the rinsing liquid 32 before the cleaning liquid 31 attached to the outer surface of the optical element 2 evaporates. At this time, the rotary conveyance unit 7 still holds the holding jig 5.

  When the cleaning liquid 31 on the outer surface of the optical element 2 is replaced with the rinsing liquid 32 and the predetermined rinsing step S2 is completed, the holding jig 5 is pulled up from the cleaning rinsing tank 34 by the transport section 100 and the liquid supply section 35 is driven. Then, the rinse liquid 32 inside the cleaning rinse tank 34 is discharged. The cleaning liquid 31 and the rinsing liquid 32 are preferably discarded for each cleaning process and the rinsing process. However, the cleaning liquid 31 and the rinsing liquid are provided with a cleaning liquid regenerating mechanism or a rinsing liquid regenerating mechanism including an appropriate filtration / purification process. It can be considered that impurities contained in the liquid 32 are removed and reused.

  The holding jig 5 pulled up from the cleaning rinse tank 34 by the transport unit 100 is immediately transported to the rotary drying unit 41 of the drying device 4 and the drying step S3 is started. The holding jig 5 is inserted into the inside of the drying tank 42 from the hole 71 of the rotary drying unit 41 and is installed on an adapter 60 a provided on the rotor 44. More specifically, the holding jig 5 is inserted along the rotation shaft 91 so that the convex portions 56a, 56b, and 56c of the holding jig 5 are positioned between the guides 62 erected on the adapter 60a. The

  Subsequently, the conveyance unit 100 stops at a position where the base 53 of the holding jig 5 and the sliding surface 63a of the sliding rail 63 in the adapter 60a contact each other. Further, the rotation drive unit 93 rotates the rotation shaft 91 counterclockwise as viewed from above, whereby the chucking portion 92 rotates about the rotation shaft 91 and is frictionally engaged with the gripping members 92a, 92b, and 92c of the chucking portion 92. The holding jig 5 is rotated around the rotation shaft 91 by rotating the grip portion 55 thus formed. As a result, the holding jig 5 is rotated counterclockwise with respect to the rotor 44 and is rotationally fitted to the rotor 44 via the adapter 60a.

  After the holding jig 5 is rotationally fitted to the rotor 44, the chucking portion 92 is driven to release the pressure on the engaging portion 57 by the gripping members 92a, 92b, 92c. Subsequently, the grip members 92 a, 92 b, and 92 c are separated from the engaging portion 57. In this state, the rotary transport main body 90 moves in the direction in which the rotary transport main body 90 is taken out from the hole 71 by the transport unit 100, and the rotary transport main body 90 retreats out of the drying tank 42 in a state where the holding jig 5 is fitted to the rotor 44. Thus, the rotational fitting is completed.

  When it is detected that the rotary transport main body 90 is pulled up to a predetermined position and the retraction is completed, the air cylinder 75 connected to the cover 70 and the lid 72 is extended. Then, the lid 72 is closed in the closing direction. Turn to seal the hole 71. After the hole 71 is sealed by the lid 72, the motor 46 is driven to rotate the rotor shaft 43 via the power transmission path 47. At this time, it is preferable that the rotation of the rotor shaft 43 be set between 1000 rpm and 2000 rpm. However, considering the strength of the optical element 2, the holding jig 5, and the weight balance of the rotor 44, etc. It is also possible to increase the speed.

  At this time, since the centrifugal force in the direction away from the rotor shaft 43 is generated in the holding jig 5 and the optical element 2 held by the holding jig 5 by the rotation of the rotor 44, the centrifugal force is attached to the outer surface of the optical element 2. The rinsing liquid 32 and the like are detached from the optical element 2 and moved to the inner wall surface of the drying tank 42, dropped by gravity and stored at the bottom of the drying tank 42, and then to the drainage tank 80 (or waste liquid tank) through the liquid discharge path. And discharged.

  When the predetermined drying process as described above is completed, the motor 46 is driven to decelerate. When the rotational speed of the rotor shaft 43 has sufficiently decreased, the rotational position of the rotor 44 is subsequently detected by the rotational position detector 48, and the rotor 44 is placed in a predetermined initial position, that is, the adapter 60a vertically below the hole 71 of the cover 70. Is positioned and fixed at the position where is located. Subsequently, the air cylinder 75 is contracted, the lid 72 is pulled by the air cylinder 75, and the sealing of the hole 71 by the lid 72 is released. Subsequently, the transport unit 100 of the rotary transport unit 7 is driven with the lid 72 opened, and the rotary transport main body 90 is inserted into the hole 71 and stopped at the position where the chucking unit 92 is inserted into the grip unit 55. . Further, as described above, the grip portion 55 is gripped by the grip members 92 a, 92 b, and 92 c of the chucking portion 92.

  Subsequently, the rotation shaft 91 rotates by 30 degrees clockwise when viewed from above. Then, the convex portions 56a, 56b, and 56c of the holding jig main body 52 are removed from the concave portions 61a, 61b, and 61c of the adapter 60a. Further, the rotary transport main body 90 is pulled up by the transport unit 100, and the holding jig main body 52 is pulled out of the drying tank 42 through the hole 71. Thus, the drying step S3 is completed.

  The rotary conveyance unit 7 that has grasped the grasping part 55 of the holding jig 5 conveys the holding jig 5 to the next process (not shown). Examples of the next process include an inspection process of the optical element 2 held by the holding unit 51 of the holding jig 5 or a finishing process by hand wiping.

  As described above, according to the cleaning / drying apparatus 1 having the drying apparatus 4 of the present embodiment, the holding jig 5 is rotated around the rotation shaft 91 and is fitted and fixed to the rotor 44. The holding jig 5 and the rotor 44 can be suitably fixed by operation. Therefore, it is possible to simplify the drying step S3 of the object to be cleaned such as the optical element 2, and it is possible to securely fix the holding jig 5 and the rotor 44.

  In addition, by providing the rotation conveyance unit 7 that can rotate the holding jig 5 around the rotation axis 91, the operation of rotating and fitting the holding jig 5 to the adapter 60a of the rotor 44 can be automated.

  Further, since the gripping members 92a, 92b, 92c provided in the chucking portion 92 and the engaging portion 57 provided in the holding jig main body 52 are frictionally engaged, the rotary conveying portion 7 is provided with the holding jig. 5 can be gripped and conveyed by a simple operation.

  Further, since the holding portion 51 is integrated as a part of the holding jig main body 52, there is no deviation between the holding portion 51 and the holding jig main body 52. Therefore, even if the rotor 44 rotates at a high speed, the holding portion The blur between 51 and the holding jig main body 52 does not occur. Furthermore, since the holding part 51 and the holding jig main body 52 are integrated, the man-hours for manufacturing the holding jig 5 may be reduced compared to manufacturing the holding part 51 and the holding jig main body 52 separately. it can.

  Further, since the mounting table 8, the cleaning rinse tank 34, and the rotary drying unit 41 are disposed within the movable range of the rotary transport unit 7, a series of processes from the setting of the holding jig 5 to the mounting table 8 to the drying step S3. The process can be automated.

  In addition, since the cleaning and rinsing are sequentially performed in the same cleaning rinsing tank 34, the number of parts required for cleaning and rinsing is reduced and the holding jig is transported from the cleaning tank to the rinsing tank. Therefore, the time required for a series of steps from washing to drying can be reduced.

(Modification 1)
Below, the modification of the holding jig main body and adapter of this embodiment is demonstrated with reference to FIGS.
8 and 9 are views showing the holding jig main body of this modification, FIG. 8 is a side view, and FIG. 9 is a plan view. In this modification, as shown in FIGS. 8 and 9, the base 53 of the holding jig main body 52 includes gripping portions 156a, 156b, and 156c in place of the convex portions 56a, 56b, and 56c. As shown in FIGS. 10 and 11, adapters 160a, 160b, and 160c with which the holding portions 156a, 156b, and 156c are rotationally fitted are provided instead of the adapters 60a, 60b, and 60c.
The adapters 160a, 160b and 160c have the same shape and size. Hereinafter, the adapter 160a will be described with reference to FIGS.

  FIG. 10 is a plan view of the adapter 160a. FIG. 11 is a side view of the adapter 160a. The adapter 160a is provided with convex portions 161a, 161b, 161c having thicknesses that can be inserted into the concave portions of the holding portions 156a, 156b, 156c instead of the concave portions 61a, 61b, 61c of the adapter 60a. The convex portions 161a, 161b, and 161c are formed by being curved in the circumferential direction of the annular adapter 160a.

  In this modification, a guide 162 is erected on the base end side of the convex portions 161a, 161b, 161c instead of the guide 62 of the adapter 60a.

  Even in the above-described configuration, the concave shape of the holding portions 156a, 156b, and 156c can be rotationally fitted to the convex portions 161a, 161b, and 161c by rotating the holding jig 5 with respect to the adapter 160a. The holding jig 5 can be fixed to the rotor 44.

(Modification 2)
Below, the other modification of the holding jig main body and adapter of this embodiment is demonstrated with reference to FIGS.
12 and 13 are views showing a holding jig body of this modification. In this modification, as shown in FIGS. 12 and 13, instead of the convex portions 56 a, 56 b, 56 c provided on the base 53 of the holding jig main body 52, the base 53 becomes a long hole along the circumferential direction. Concave portions 256a, 256b, and 256c are formed. The rotor 44 is provided with adapters 260a, 260b, and 260c shown instead of the adapters 60a, 60b, and 60c.

  The adapters 260a, 260b and 260c have the same shape and size. Hereinafter, the adapter 260a will be described with reference to FIGS. FIG. 14 is a plan view of the adapter 260 a, and FIG. 15 is a side view of the adapter 15. The adapter 260a is provided with convex portions 261a, 261b, and 261c that are curved along the circumferential direction of the adapter so as to fit into the concave portions 256a, 256b, and 256c in place of the concave portions 61a, 61b, and 61c of the adapter 60a. Yes. Further, the same guide 162 as that of the first modification is provided.

  Even in the rotation fitting mechanism configured as described above, the convex portions 261a, 261b, and 261c are inserted into the concave portions 256a, 256b, and 256c, and the concave portions 256a, 256b, 256c and the convex portions 261a, 261b, and 261c are fitted, whereby the holding jig 5 is fixed to the rotor 44 via the adapter 260a. Since this rotation fitting mechanism can suitably fix the holding jig and the rotor with a simplified operation similar to the rotation fitting mechanism described above, the operation of the drying process of the object to be cleaned such as an optical element is performed. Can be simplified.

(Second Embodiment)
Next, a drying apparatus and a cleaning / drying apparatus according to a second embodiment of the present invention will be described with reference to FIGS. In each embodiment described below, portions having the same configuration as that of the drying apparatus according to the first embodiment described above are denoted by the same reference numerals and description thereof is omitted. 16 and 17 are views showing the holding jig main body 352 of the present embodiment, and FIGS. 18 and 19 are views showing the holding portion 351 of the present embodiment.

  In the drying apparatus of this embodiment, the holding unit 351 shown in FIG. 16 and the holding jig main body 352 shown in FIG. 18 are provided as separate bodies, and the holding unit 351 and the holding jig main body 352 are combined to hold the holding jig 350. The configuration differs from the first embodiment in that it is used as the first embodiment.

  As shown in FIG. 16, in the holding jig main body 352, columnar support portions 354 a, 354 b, and 354 c are erected on the base 53 in place of the support portion 54 and connected to the grip portion 55. An annular intermediate support portion 355 connected to each of the support portions 354a, 354b, and 354c is fixed to an intermediate portion of the support portions 354a, 354b, and 354c. Further, as shown in FIG. 17, a net portion 356 having a gap smaller than the diameter of the optical element held by the holding jig is provided on the bottom surface of the holding jig body. The net part is preferably net-like or slit-like, and in this embodiment, a stainless mesh is welded so as to cover the base 53.

  As shown in FIGS. 18 and 19, the holding portion 351 has holding grooves 51 a and 51 b for holding the optical element 2, and the holding portion 351 is further formed in the mesh portion 355 inside the holding jig main body 352. It has an annular bottom 359 for installation.

  Even in such a configuration, the holding jig main body 352 is gripped and conveyed by the rotary conveyance unit 7, and the holding jig main body 352 is rotationally fitted to the adapter 60 a provided in the rotor 44 of the drying tank 42. The Then, since the holding jig and the rotor can be suitably fixed by the simplified operation as in the first embodiment, the operation of the drying process of the object to be cleaned such as the optical element 2 can be simplified. it can.

  Further, by making the holding portion 351 and the holding jig main body 352 separate from each other, an appropriate holding portion is selected from the holding portions corresponding to a plurality of objects to be cleaned and attached to the holding jig main body 352. Can be used. As a result, the holding jig main body 352 can be shared with an appropriate holding portion.

(Modification 3)
Below, the modification of the holding jig of this embodiment is demonstrated with reference to FIG. 20 thru | or FIG.
In the present modification, as shown in FIGS. 20 and 21, the holding jig main body 352 is provided with a pair of ridge portions 357 for positioning the rotation position of the holding portion 351. In addition, the holding portion 351 is provided with an annular bottom portion 359 having a groove portion 358 that can be engaged with the ridge portion.

With such a configuration, the rotation position of the holding portion 351 relative to the holding jig main body 352 can be uniquely determined by the rotation position where the groove portion 358 engages with the protruding portion 357. Accordingly, the holding jig 352 is mounted on the holding jig main body 352 and is conveyed by the rotary conveying section 7 of the holding jig main body 352, or the holding jig main body 352 is rotationally fitted to the adapter 60a of the rotor 44 and rotated and dried. The position of the holding portion 351 can be prevented from being displaced. As a result, it is possible to prevent the object to be cleaned such as the optical element 2 from dropping from the holding portion 351.
In addition, the orientation of the optical element 2 in the drying process can always be constant with respect to the rotor shaft 43, and as a result, the quality after washing and drying can be made constant.

One or more ridges 357 may be provided with respect to the holding jig main body, and a plurality of the ridges 357 are arranged as reinforcements of the support portions 354a, 354b, and 354c. The arrangement of the groove portions 358 can be changed so as to correspond.

  As mentioned above, although embodiment of this invention was explained in full detail with reference to drawings, the concrete structure is not restricted to this embodiment, The design change etc. of the range which does not deviate from the summary of this invention are included.

  For example, in the operation of the rotary drying unit according to the embodiment of the present invention, a method using a centrifugal force by rotating the rotor 44 is adopted, but in addition to this, the inside of the drying tank 42 is depressurized, A method of introducing dry air into the inside of the drying tank 42 or a drying method such as heating the inside of the drying tank within a range that does not affect the durability of the optical element 2 can be combined. Drying can be performed quickly.

  Further, in the present invention, the operation of rearranging the balance arranged on the rotor 44 is omitted, but this can be done manually by the operator, or the balance can be appropriately adjusted from the balance place (not shown) by the rotary transport unit 7. Can be carried and installed on the adapters 60b and 60c on the rotor 44.

  In the first embodiment of the present invention, one of the three adapters 60a, 60b and 60c is used for fitting the optical element holder, and the other two are used for fitting the balance. However, the present invention is not limited to this, and the same effect as that of the present invention can be achieved even when the balance is directly fixed to the rotor 44.

1 Washing and drying device 2 Optical element (object to be washed)
DESCRIPTION OF SYMBOLS 4 Drying device 5,350 Holding jig 7 Rotation conveyance part 11 Rotation fitting mechanism 31 Cleaning liquid 32 Rinse liquid 34 Cleaning rinse tank 41 Rotation drying part 44 Rotor 51,351 Holding part 52,352 Holding jig main body 55 Holding part 56a, 56b, 56c, 161a, 161b, 161c, 261a, 261b, 261c Convex part 57 Engaging part 61a, 61b, 61c, 256a, 256b, 256c concave part 91 Rotating shaft (predetermined axis)
92a, 92b, 92c Gripping member 92 Chucking part 156a, 156b, 156c Gripping part 357 Projection part 358 Groove part

Claims (9)

A rotary drying section having a rotor that rotates about an axis inside;
A holding jig for holding an object to be cleaned and a holding jig main body in which the holding part is accommodated, and a holding jig that is detachable from the rotor;
A drying apparatus comprising: a rotation fitting mechanism for fitting the rotor and the holding jig by a rotation operation of the holding jig with respect to the rotor. The rotational fitting mechanism is
A convex portion formed on one of the rotor and the holding jig body;
The drying apparatus according to claim 1, further comprising: a concave portion formed on the other of the rotor and the holding jig main body and into which the convex portion is fitted by a rotation operation of the holding jig with respect to the rotor. A rotating conveyance unit capable of gripping the holding jig and rotating it around a predetermined axis and inserting the holding jig into the rotary drying unit;
The drying apparatus according to claim 1, wherein the holding jig main body has a gripping portion that is gripped by the rotary conveyance unit. The rotating transport unit is
Having a chucking portion provided with two or more gripping members capable of reciprocating in a radial direction around the predetermined axis and capable of rotating around the predetermined axis;
The gripping part is
The drying apparatus according to claim 3, wherein each of the gripping members has an engaging portion that can be frictionally engaged. A groove formed in one of the holding part and the holding jig body;
The drying device according to any one of claims 1 to 4, further comprising: a protrusion formed on the other of the holding portion and the holding jig main body and engageable with the groove portion.   The drying apparatus according to claim 1, wherein the holding unit and the holding jig main body are integrated. A drying apparatus according to any one of claims 1 to 6;
A cleaning / drying apparatus including a cleaning tank in which a cleaning agent for cleaning the object to be cleaned is supplied within a movable range of the rotary conveyance unit.   The cleaning / drying apparatus according to claim 7, further comprising a rinsing tank in which a rinsing liquid for rinsing the cleaning agent attached to the object to be cleaned is supplied within a movable range of the rotary conveyance unit. The washing tank is
The cleaning / drying apparatus according to claim 7, which also serves as a rinsing tank to which a rinsing liquid for rinsing the cleaning agent attached to the object to be cleaned is supplied.

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