JP2000258057A - Method and device for drying part - Google Patents

Abstract

PROBLEM TO BE SOLVED: To quickly dry parts without carrying out hot-air drying and causing a stain. SOLUTION: In a method that rotates parts 3 for drying, a plurality of exhaust vents 7 are provided on a bottom surface 1a or a side surface at a bottom-surface side in a drying tank 1 for accommodating a pallet 2 where the parts 3 are accommodated, and exhaust is made from the exhaust vent 7 while the pallet 2 is being rotated with the center as a rotary axis, thus forming the current of air toward the bottom surface from the upper surface of the drying tank 1, drying the parts 3 in the pallet 2, and hence quickly drying the parts by the centrifugal force of rotation and eddy-shaped air current without generating a stain.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a component drying method and a component drying apparatus for drying components such as optical components.

[0002]

2. Description of the Related Art In the manufacture of optical components such as lenses and prisms, it is necessary to remove an adhesive such as an abrasive, a pitch, a wax, etc. after polishing the optical components. For this reason, cleaning is performed after polishing. Before coating the surface of an optical component such as a lens with an optical thin film or before assembling the optical component, cleaning is performed to remove dust, dust, hand oil, and oil. In this cleaning step, dirt is removed with an aqueous cleaning liquid, and then the cleaning liquid is rinsed with water or pure water,
Finally, drying is performed.

FIGS. 7 and 8 show a dryer 200 described in Japanese Patent Application Laid-Open No. 6-208093 for performing such drying after washing. As shown in FIG. 7, the drier 200 includes a drying chamber 210 and a
10 and a drive chamber 230 partitioned therein.

[0004] In the driving chamber 230, a motor 240 and a pulley 250 which is rotated by driving of the motor 240 are arranged. A rotating shaft 260 extends upward from the pulley 250, and extends through the partition wall 220 into the drying chamber 210. In the upper part of the rotating shaft 260,
A pair of arms 270 is attached, and each arm 2
The carrier holder 280 is attached to 70. Each carrier holder 280 is a lens carrier 29 shown in FIG.
0 is held.

As shown in FIG. 8, the lens carrier 290 is formed in a rectangular frame shape and has a plurality of holding claws 291 for holding the lens 300 in an upright state. They are held in parallel.

[0006] In the drying by the dryer 200, the lens carrier 290 on which the washed lenses 300 are arranged is held by the carrier holder 280 in the drying chamber 210. At this time, the lens carrier 290 is held by each of the pair of carrier holders 280 to maintain the rotational balance. Then, the motor 240 is driven to rotate the rotary shaft 260,
The carrier holder 280 is rotated at a high speed via the arm 270. Accordingly, the lens 300 in the lens carrier 290 also rotates at a high speed, and water adhering to the lens 300 is shaken off by centrifugal force, and drying without stains is performed.

FIG. 9 shows a processing apparatus for cleaning and drying a magnetic head described in Japanese Patent Application Laid-Open No. 9-22505. This processing apparatus sequentially performs ultrasonic cleaning, spin drying, and hot air drying, and the magnetic head is transferred to each step while being housed in the carrier 310.

The ultrasonic cleaning is performed in a cleaning tank 330. The cleaning tank 330 is filled with a hydrocarbon organic solvent 320, and an ultrasonic vibrator 340 is provided on the bottom surface. The cleaning tank 330 is connected to a preliminary tank 350 having a heater 351 by a pump 352.
The organic solvent 320 at a constant temperature is always supplied.

The spin drying is performed in a chamber 360, and a receiving base 361 for holding the carrier 310 in an inclined state is provided in the chamber 360, and the receiving base 361 is connected to a motor 362 outside the chamber 360. Have been. An exhaust port 3 for exhausting the organic solvent scattered by spin drying together with air is provided in the chamber 360.
63 is open.

[0010] The hot air drying includes a receiving base 371 for holding the carrier 310 and a chamber 370 surrounding the receiving base 371. The chamber 370 has a fan 372 for generating an air flow and a heater 373 for heating the air.
The hot air is blown onto the carrier 310 from the bottom of the chamber 370 to dry the magnetic head held by the carrier 310.

In this processing apparatus, the magnetic head is ultrasonically cleaned together with the carrier 310 by the organic solvent 320 in the cleaning tank 330, and thereafter, the chamber 360 for spin drying is cleaned.
The carrier 310 is transported inside.

In the chamber 360, the carrier 310 is rotated at a high speed while the carrier 310 is held in an inclined manner on the receiving base 361. In this high-speed rotation, the organic solvent attached by the washing is brought to the outside of the magnetic head by centrifugal force, and is scattered by the wind force during rotation. The carrier 310 is provided with fins (not shown), and the wind generated by the fins raises the magnetic head, so that the wind also hits the portion that was in contact with the stationary state, thereby scattering the organic solvent.
In the hot air drying, the organic solvent is dried by hot air of 50 ° C. or more.

[0013]

However, in the drying according to Japanese Patent Application Laid-Open No. 6-208093, since the lens carrier 290 is mounted on the carrier holder 280 provided on the pair of arms 270 and rotated, the radius of rotation is large. The device becomes large. For this reason, the driving system for rotating the motor becomes large, and large power is required. In order to obtain a rotational balance, two carrier holders 280 are required.
It is necessary to always carry the lens carrier 290 on both of them, and the operation is troublesome.

In spin drying in a processing apparatus according to Japanese Patent Application Laid-Open No. 9-22505, a dedicated carrier 310 provided with fins is used to lift a magnetic head during rotation, eliminate liquid pools in gaps, and prevent drying spots. In need of. The dedicated carrier 310 has a complicated shape, is difficult to manufacture, and increases the cost. Further, the carrier 310 is inclined during rotation, but the inclined receiving base 361 is inclined.
Fixing the carrier 310 to the carrier is troublesome, takes time, and deteriorates workability.

Further, since the drying is performed by warm air after spin drying, members for drying such as a heater and a blower for generating warm air are required, and the apparatus becomes complicated. Further, since a flammable organic solvent is introduced into a warm air atmosphere, safety equipment such as a gas concentration measuring instrument and a digestive organ is required, which further complicates the apparatus.

The present invention has been made in view of such conventional problems, and is a component drying method capable of drying components such as optical components after cleaning in a short time without stains. The purpose is to provide. Another object of the present invention is to provide a drying apparatus which has a simple structure, is small in size, is inexpensive and has high safety when drying a component such as an optical component by rotation.

[0017]

According to a first aspect of the present invention, there is provided a drying method for drying a component while rotating the component, wherein a bottom of a pallet containing the component is accommodated in a drying tank. A plurality of exhaust ports are provided on the side surface on the bottom surface side, and the pallet is evacuated from the exhaust port while rotating about the center of the pallet as a rotation axis, thereby forming a flow of air from the upper surface of the drying tank to the bottom surface, thereby forming a pallet. Characterized by drying the parts.

According to the present invention, the liquid adhering at the time of washing is blown off to the outside of the pallet by the centrifugal force for rotating the pallet storing the parts. During this rotation, the air in the drying tank is forcibly exhausted from a plurality of exhaust ports provided on the bottom surface or the side surface on the bottom surface side of the drying tank. This forced exhaust generates a spiral air flow in the drying tank, which is strongly blown to the parts and the pallet, and quickly evaporates a small amount of liquid remaining in the gap between the parts and the pallet to dry. can do.

By exhausting air from the bottom surface or the side surface on the bottom side of the drying tank as described above, the pressure in the drying tank is reduced, and a downflow due to the reduced air pressure is generated from the upper surface of the drying tank toward the bottom surface. The downflow can be made into a high-speed spiral air flow in accordance with the pallet rotation force. For this reason, it is possible to blow a stronger wind speed than normal rotation drying or hot air drying onto the component, and it is possible to finish the stain-free drying in a short time.

According to a second aspect of the present invention, there is provided a pallet for storing parts, a rotating means for rotating the pallet about the center thereof as a rotation axis, a drying tank for storing the pallet, and a bottom surface or a bottom side in the drying tank. And a plurality of exhaust ports provided on a side surface of the drying tank, and an exhaust mechanism for exhausting the inside of the drying tank.

In the present invention, since the rotating means rotates the pallet around the center of the pallet as a rotation axis, even a single pallet can be rotated at a high speed with good rotational balance. For this reason, the rotating means, which is a driving source for rotation, can be reduced in size, and can be driven with small power.

In addition, since the drying is performed by utilizing the centrifugal force due to the rotation and the flow of the spiral air generated in the drying tank, there is no need for heating at the time of drying and no need for blowing. For this reason, a heater and a blower become unnecessary, and a simple structure can be achieved.

Further, when drying the flammable liquid,
Since a flammable gas volatilized at the time of drying is forcibly exhausted without using a heater serving as a kind of fire, the flammable gas concentration does not increase and the device can be used safely.

[0024]

DESCRIPTION OF THE PREFERRED EMBODIMENTS (Embodiment 1) FIGS.
1 shows a first embodiment of the present invention, in which a drying tank 1 and a pallet 2
, A rotating means 6 for rotating the holding member 5, an exhaust port 7 provided in the drying tank 1, and an exhaust port 7
And an exhaust mechanism 8 connected to the

The drying tank 1 has a rectangular parallelepiped or cylindrical shape (in the illustrated embodiment, a rectangular parallelepiped), and has an open upper surface. The lid 10 is put on the opened upper surface.
The lid 10 has an opening 10a.
0 a is formed so as to have an opening smaller than the size of the pallet 2.

The holding member 5 has a rectangular plate shape and is rotatably provided in the drying tank 1. The pallet 2 is held on the upper surface of the holding member 5. To hold the pallet 2 on the holding member 5, a hook 5 a is rotatably provided on the opposite side surface of the holding member 5, and the hook 5 a is turned to rotate the pallet 2.
Is pressed against the holding member 5.
The holding of the pallet 2 on the holding member 5 is performed by the pallet 2
A screw member may be screwed into the screw hole from the holding member 5 side, and a bolt is erected on the holding member 5, and the bolt is passed through the hole provided in the pallet 2. ,
A wing nut may be screwed into the penetrating end, and may be changed as appropriate.

The rotating means 6 includes a motor 6a provided outside the drying tank 1 and a rotating shaft 6b extending from the motor 6a into the drying tank 1 and connected to the holding member 5.
Rotates, the holding member 5 rotates at high speed in the drying tank 1. The rotation speed of the holding member 5, that is, the rotation speed of the pallet 2, is desirably about 150 to 2500 rpm.

The exhaust port 7 is provided on the bottom surface 1a of the drying tank 1. As shown in FIG. 2, the exhaust ports 7 are provided at four corners of the bottom surface 1 a of the drying tank 1 so as to be located outside the pallet 2 on the bottom surface of the drying tank 1. Since the exhaust port 7 is located outside the pallet 2 and the opening 10a of the lid 10 is smaller than the pallet 2 as described above, the exhaust port 7 enters the drying tank 1 from the opening 10a. The air toward the exhaust port 7 can pass above the pallet 2.

In order to generate a spiral air flow, the exhaust port 7 may be provided at at least two opposing positions of the drying tank 1, and the shape may be circular, rectangular, or any other shape.

The exhaust mechanism 8 includes an exhaust pipe 8a connected to the exhaust port 7 and an exhaust device 8b connected to the exhaust pipe 8a. When the exhaust device 8b is driven, the air in the drying tank 1 is exhausted. The air is exhausted from the port 7, and this exhaust generates a spiral air flow in the drying tank 1. In this case, the wind speed at the exhaust port 7 is desirably 5 m / s or more per exhaust port 7.

FIG. 3 shows the pallet 2. The pallet 2 has a plate shape having a rectangular outer shape, and storage holes 4 for individually storing optical components 3 such as lenses are regularly penetrated in a multi-row shape. The storage hole 4 is a mortar-shaped through hole in which the diameter of the lower end opening is smaller and becomes larger toward the upper end opening. The diameter of the lower end opening is set so as not to obstruct the inflow and outflow of the liquid, and is, for example, 1.0 mm or more. By putting the optical components 3 into each of the mortar-shaped storage holes 4, the optical components do not come into contact with each other, so that the optical components 4 can be dried without being damaged.

The pallet 2 is fixed on the holding member 5, and rotates integrally with the rotation of the holding member 5. In this case, the pallet 2 rotates with its center coinciding with the rotation axis of the holding member 5, and FIG.
Is a rotation axis of the motor. As described above, since the center of the pallet 2 rotates about the rotation axis 11, 1
Even a single pallet can be rotated at a high speed with good rotational balance, and the rotating means 6 can reduce the size of the motor 6a and can be driven with small power.

Since the storage hole 4 has a mortar shape, the storage hole 4 has an opening angle θ with respect to the rotation axis 11 of the pallet 2. With such an angle θ, the liquid adhering to the optical component 3 is easily scattered to the outside of the pallet 2 from the upper and lower openings along the wall surface of the storage hole 4 due to the centrifugal force of rotation. . For this reason, liquid drainage and drying properties are improved. Further, the storage hole 4 does not have a corner portion where a liquid pool is generated, and the liquid can move quickly when the pallet 2 rotates. Angle θ for this
Is preferably at least 10 ° or more with respect to the rotation axis.

The pallet 2 is covered with a cap 12 for preventing falling off. The drop-off prevention lid 12 is a net-like one so that the liquid can flow out of the storage hole 4. By covering the fall prevention cover 12 on the pallet 2, the optical component 3 stored in the storage hole 4 can be prevented from falling or falling off. The fall-off prevention lid 12 is sized to cover all the storage holes 4 of the pallet 2, and its four corners are fixed to the pallet 2 by fastening members such as screws 13.

The pallet 2 is made of a material or resin obtained by coating a metal with resin. The fall-off prevention lid 12 is made of a resin or a material in which a metal net is coated with a resin, thereby preventing the optical component 3 from being damaged even if it comes into contact with the optical component 3. If the optical component 3 has a diameter between the upper end opening and the lower end opening of the storage hole 4,
Various shapes such as a lens shape, a flat plate shape, and a prism shape can be used. Pallet 2
Can be changed to a circle, polygon, or other shapes.

FIG. 4 shows a washing / drying treatment apparatus incorporating the drying tank 1 of this embodiment, and shows one washing tank 21 and
It is provided with three rinsing tanks 22, 23 and 24 and one drying tank 1. Cleaning tank 21 and rinsing tanks 22, 23, 24
Ultrasonic transducers 25 are respectively arranged on the bottom surfaces of. The washing tank 21 and the first rinsing tank 22 are connected to a filter 26 for filtering the overflowed surfactant and rinsing liquid and a circulation pump 27 for feeding back the filtered surfactant and rinsing liquid. On the other hand, when the rinsing liquid overflows in the second and third rinsing tanks 23 and 24, a new rinsing liquid is supplied from below the tanks.

The cleaning tank 21 is filled with a surfactant, and performs cleaning while applying ultrasonic vibration. The rinsing tanks 22, 23, and 24 are filled with ion exchange water (or pure water) as a rinsing liquid, and perform rinsing while applying ultrasonic vibration. In these washing and rinsing, the pallet 2 is attached to the swing member 28 and is immersed in a surfactant or a rinsing liquid. Therefore, cleaning and rinsing are performed by both swinging and ultrasonic vibration.

As the final rinsing liquid in the rinsing tank 24, alcohols and hydrocarbon solvents can be used. Further, the number of washing tanks and rinsing tanks can be appropriately increased or decreased according to the production tact, the amount of dirt attached, and other conditions.

In the cleaning and drying treatment apparatus described above, the cleaning tank 21
The water-based ultrasonic cleaning removes oil, dust, dust, abrasives, and the like adhering to the optical component 3. Then, the surfactant is replaced by ion-exchanged water or pure water by being sequentially transported through the rinsing tanks 22, 23, and 24. After rinsing, the pallet 2 is transported into the drying tank 1. In the drying tank 1, high-speed rotational drying for a predetermined time is performed by driving the rotating means 6 and the exhaust mechanism 8. In this high-speed rotation drying, the driving time can be controlled by a timer or the like.

In the drying tank 1, the liquid adhering to the pallet 2 and the optical component 3 is shaken off by the centrifugal force of rotation, and dried in a short time to a stain-free state by a spiral air flow generated by the exhaust. Is done. As the rinse liquid used in the rinse tanks 22, 23, 24 can be dried without stains even at an ion-exchanged water level (1 MΩ or more) due to the spin-off drying by rotation, and the hydrocarbon system of the second and third petroleums can be used. Even a solvent can be dried.

In this embodiment, since the pallet 2 containing the optical components 3 is rotated at a high speed and the spiral air flow caused by the exhaust from the exhaust port 7 is brought into contact with the pallet 2, heating by hot air is not required. In addition, it is possible to dry at room temperature, to dry optical components having low heat resistance without damage, and to improve safety against ignition. In addition, the structure can be simple, and the center of the pallet is set as the rotation axis, so that the drying tank and the rotating means can be downsized.

(Embodiment 2) FIGS. 5 and 6 show Embodiment 2 in which the same members as those in Embodiment 1 are denoted by the same reference numerals and correspond to each other.

In this embodiment, a plurality of exhaust ports 9 are provided on the side surface 1b of the drying tank 1. The plurality of exhaust ports 9 are provided on each side surface 1b of the drying tank 1 as shown in FIG. The exhaust port 9 on each side surface 1b is provided so as to be located on the bottom surface 1a side of the drying tank 1 as shown in FIG. 5, so that it is lower than the pallet 2 and the holding member 5. By providing the exhaust ports 9 on the respective side surfaces 1b on the side of the bottom surface 1a in this manner, it is possible to blow the spiral airflow generated by the exhaust from the exhaust ports 9 to the optical component 3 located at a position higher than the exhaust ports 9. it can.

In order to efficiently generate such a spiral air flow, it is preferable to dispose the exhaust port 9 at a position shifted toward the rotational direction of the pallet 2 from the center of each side surface 1b. That is, when the pallet 2 rotates clockwise as shown by the arrow in FIG.
b, the exhaust port 9 is located downstream of the center position in the rotation direction.
Is preferably provided.

[0045]

(Embodiment 1) In this embodiment, FIGS.
The drying tank 1 shown in FIG. 4 is used for drying, and the washing and drying treatment apparatus shown in FIG. 4 is used. Garbage, dust,
The lens to which the fingerprint is attached is stored in the pallet 2 and the cleaning tank 2
1 and then rinsed sequentially in rinse tanks 22, 23, and 24. 200 rpm, 800 r in the drying tank 1
Drying was performed at a rotation speed of 1500 rpm. As the lenses, 49 concave lenses having a diameter (φ) of 8 mm were stored in the storage holes 4 of the pallet 2.

As the cleaning liquid for the cleaning tank 21, an aqueous cleaning agent (trade name “EE1120” (Olympus Optical Industry Co., Ltd.)
Was washed at a liquid temperature of 30 ° C. and ultrasonic cleaning (48 kHz, 600 W) for 90 seconds. In the rinsing tanks 22, 23, 24, ion-exchanged water (1
Liquid temperature of 25 ° C., ultrasonic cleaning (48
(KHz, 300 W), and rinsing was performed in each tank for 90 seconds.

After the above washing and rinsing, drying was performed in the drying tank 1 and the results of rotational drying speed and drying quality are shown in Table 1. In addition, No. in the same table. No. 4 is a drying quality in the case of washing with the above-mentioned aqueous detergent in the same manner, rinsing with the above-mentioned ion-exchanged water, pulling up, and then drying with hot air at 80 ° C. for 3 minutes.

[0048]

[Table 1]

From Table 1, it can be seen that drying can be performed at a rotation speed of 800 rpm, a wind speed of the exhaust port 7 of 5 m / s, and 90 seconds.
On the other hand, when there is no exhaust from the exhaust port 7, the rotation speed is 800
At rpm, a part of the liquid remains, and sufficient drying properties cannot be obtained. In addition, the rotation speed is 1500 rpm, and the exhaust port wind speed is 5 m
In the case of / s, drying can be completed in 30 seconds. When the rotation speed is increased (when the exhaust port wind speed is 5 m / s),
At 1500 rpm, the drying time can be reduced by 60 seconds compared to 800 rpm.

Further, even in the purity of ion-exchanged water in which spots are generated in the pull-up hot air drying, no spots are observed in the rotary drying. This is because the attached water is shaken off from the lens surface by the rotation, and droplets that become dry residues do not exist on the lens surface and the pallet.

Further, by exhausting air from the exhaust port 7 at a wind speed of 5 m / s, water droplets that cannot be dried only by rotation can be dried at room temperature in a short time. Even if the number of rotations is reduced, it is possible to dry at room temperature for the same time.
And the drying device can be downsized.

(Embodiment 2) 3 m on one side with dust and dust attached
After storing the m-shaped triangular prism in the pallet 2 and washing it in the washing tank 21, it was rinsed in the rinsing tanks 22, 23, and 24 sequentially. Then, using the drying tank 1 shown in FIGS. 5 and 6,
Drying was performed at a rotation speed of 200 rpm or more. In this embodiment, the pallet 2 was loaded with 49 triangular prisms for processing. Further, the liquid under the cleaning and rinsing conditions is the same as in the first embodiment. Table 2 shows the results.

[0053]

[Table 2]

From Table 2, it can be seen that drying can be performed at a rotation speed of 800 rpm, a wind speed of the exhaust port 9 of 5 m / s, and 90 seconds.
As in the case of the lens of Example 1, in the case of the prism, when there is no exhaust from the exhaust port, sufficient drying properties cannot be obtained at 800 rpm. Further, when the rotation speed is 1500 rpm and the wind speed of the exhaust port 9 is 5 m / s, the drying can be completed in 30 seconds, the drying speed can be increased, and the wind speed of the exhaust port 9 can be reduced to 5 m / s.
By setting s, the drying time can be shortened. Therefore, even if the position of the exhaust port 9 is changed as shown in FIGS. 5 and 6, the same dryness as in the first embodiment can be obtained.
Also, the pallet 2 used in the first embodiment can obtain the same drying property as a lens even when a triangular prism is put in and dried, and therefore, optical components of various shapes can be obtained by using a rotating pallet of the same shape. Can be washed.

As is clear from the above description, the present invention includes the following inventions.

(1) In a drying method in which an optical component is dried while being rotated, a plurality of exhaust ports are provided on a bottom surface or a side surface on the bottom surface in a drying tank containing a pallet containing the optical component. A component drying method comprising: drying the optical components in a pallet by forming a flow of air from the upper surface to the lower surface of the drying tank by exhausting air from the exhaust port while rotating the center of the pallet as a rotation axis.

According to the present invention, the optical component can be dried in a short time without spots by the centrifugal force due to the rotation and the spiral air flow.

(2) a pallet for storing optical components;
A rotating means for rotating the pallet about its center as a rotation axis, a drying tank for storing the pallet, a plurality of exhaust ports provided on a bottom surface or a bottom side surface in the drying tank; A component drying device, comprising: an exhaust mechanism that exhausts air.

According to the present invention, the pallets can be rotated in a well-balanced manner when the optical parts are dried, the rotating means can be miniaturized, and a heater or a blower is not required. it can.

[0060]

As described above, according to the first aspect of the present invention, the components in the pallet are dried by the centrifugal force for rotating the pallet and the spiral air flow generated in the drying tank. Drying without stains can be completed in a short time.

According to the second aspect of the present invention, the pallet can be rotated at a high speed in a well-balanced manner, the rotating means as a driving source thereof can be reduced in size, and a heater and a blower are not required, so that a simple structure can be achieved. it can.

[Brief description of the drawings]

FIG. 1 is a partial sectional view of a drying tank according to a first embodiment.

FIG. 2 is a sectional view taken along line AA of FIG.

FIG. 3 shows a pallet, (a) is a partial sectional view thereof,
(B) is a plan view.

FIG. 4 is a sectional view of a cleaning / drying processing apparatus to which the present invention is applied.

FIG. 5 is a partial sectional view of a drying tank according to a second embodiment.

6 is a sectional view taken along line BB in FIG.

FIG. 7 is a partially broken perspective view of a conventional drying device.

8 is a perspective view of a lens carrier used in the device of FIG.

FIG. 9 is a sectional view of another conventional apparatus for performing washing and drying.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Drying tank 2 Pallet 3 Optical component 6 Rotating means 7 9 Exhaust port 8 Exhaust mechanism

 ──────────────────────────────────────────────────続 き Continuing on the front page F term (reference) 2H006 DA07 2H042 AA03 3B116 AA03 AA46 AB33 AB44 BB02 BB83 CC01 CC03 3L113 AA04 AB08 AC07 AC19 AC46 AC49 AC63 AC65 AC72 AC76 AC78 AC79 AC83 AC90 BA01 CA11 CA15 CB34 CB35 DA13 DA10 DA10 DA10 DA10 DA21 DA24

Claims (2)

[Claims] 1. A drying method for drying a component while rotating the component, wherein a plurality of exhaust ports are provided on a bottom surface or a side surface on a bottom surface in a drying tank containing a pallet in which the component is stored, and the pallet is placed at the center thereof. A component drying method, comprising: exhausting air from the exhaust port while rotating as a rotation axis to form a flow of air from an upper surface to a lower surface of the drying tank to dry components in a pallet. 2. A pallet for storing parts, rotating means for rotating the pallet about its center as a rotation axis,
A drying tank for storing the pallet, a plurality of exhaust ports provided on a bottom surface or a side surface on the bottom side in the drying tank, and an exhaust mechanism for exhausting the drying tank are provided. Parts drying equipment.