JP2011023123A - Static eliminator and conveying device equipped with the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To enhance capacity of static elimination through restraint of maldistribution of positive and negative ions. <P>SOLUTION: The static eliminator 40a with a plurality of discharge electrodes 41 set in parallel each for generating ions by corona discharge includes a control part so structured that polarities of the ions generated at each discharge electrode 41 are independently changed over, and at the same time, polarities of ions are changed over for each plurality of adjacent pieces of discharge electrodes 41, so that a boundary of the polarity of a positive block where positive ions 5a are generated and a negative block where negative ions 5b are generated is to move along a direction where the plurality of discharge electrodes 41 are set in parallel in accordance with elapse of time. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a static eliminator and a transport device including the same, and more particularly to a static eliminator for removing static electricity generated in a glass substrate when transporting a glass substrate constituting a liquid crystal display panel, and a transport device including the static eliminator. It is about.

  The liquid crystal display panel includes a TFT substrate provided with a thin film transistor (hereinafter referred to as “TFT”) as a switching element, for example, for each pixel which is the minimum unit of an image. When manufacturing this TFT substrate, for example, it is necessary to convey the glass substrate to the next process by a conveyor called a disk conveyer, so friction between the back surface of the glass substrate and the contact surface of the conveyor, etc. As a result, the glass substrate may be charged. Here, when the glass substrate is charged, the TFT formed on the glass substrate is easily destroyed. Therefore, in the manufacture of the TFT substrate, for example, ions generated by a static eliminator called an ionizer are transferred to the glass during the transportation of the glass substrate. It is effective to remove static electricity generated on the glass substrate by supplying it to the surface of the substrate and neutralizing the charging of the glass substrate.

  For example, in Patent Document 1, in an ionizer that generates ions by corona discharge by applying a high voltage to a plurality of discharge electrodes, the plurality of discharge electrodes are divided into, for example, two groups of discharge electrodes, and discharges belonging to individual groups. It is described that an alternating voltage having the same phase is applied to the electrodes all together and an alternating voltage having a different phase is applied to each group.

JP 2007-287334 A

  However, in the ionizer of Patent Document 1, positive and negative ions generated at each discharge electrode are almost uniformly distributed and reach the surface of the charged object, so that there is positional and temporal uneven distribution of positive and negative ions on the surface of the charged object. Although it can be said that the charge is eliminated, the charge of the substrate is neutralized for each ion generated in each discharge electrode, so that the ability to remove static electricity is reduced, and there is a possibility that the removal of static electricity becomes insufficient.

  This invention is made | formed in view of this point, The place made into the objective is to suppress the uneven distribution of positive / negative ion, and to improve the capability to remove static electricity.

  In order to achieve the above object, the present invention switches the polarity of ions generated by a plurality of discharge electrodes independently of each other and switches the polarity of ions for each of a plurality of adjacent discharge electrodes. A control unit configured to move the boundary of the polarity between the positive block where ions are generated and the negative block where negative ions are generated along the alignment direction of the electrodes as time elapses is provided. .

  Specifically, the static eliminator according to the present invention is a static eliminator in which a plurality of discharge electrodes for generating ions by corona discharge are provided side by side, and the polarities of the ions generated by the respective discharge electrodes are independent from each other. The polarity of the ions is switched for each of the plurality of adjacent discharge electrodes, and the polarity boundary between the positive block where positive ions are generated and the negative block where negative ions are generated is changed over time. A control unit configured to move along a direction in which the plurality of discharge electrodes are arranged is provided.

  According to said structure, since the polarity of the ion produced | generated by each discharge electrode switches mutually independently by a control part, it becomes possible to form various ion generation patterns. The control unit also switches the polarity of the ions for each of the plurality of discharge electrodes, and the polarity boundary between the positive block where positive ions are generated and the negative block where negative ions are generated is the alignment of the electrodes. Since the region moves along the direction with time, the region where the positive ions generated in the positive block gather and the region where the negative ions generated in the negative block gather along the alignment direction of the electrodes with time. A moving ion generation pattern is specifically configured. In this ion generation pattern, the region where the positive ions gather and the region where the negative ions gather move as time passes, so that the uneven distribution of positive and negative ions is suppressed, and the positive and negative ions are In each collected region, ions are collected for a plurality of adjacent discharge electrodes, so that the ability to remove electricity is improved as compared with the case where ions are generated independently at each discharge electrode. Therefore, it is possible to suppress the uneven distribution of positive and negative ions and improve the ability to eliminate static electricity.

  The control unit may be configured such that the polarity boundary moves from one end to the other end in a direction in which the plurality of discharge electrodes are arranged.

  According to the above configuration, the control unit causes the polarity boundary between the positive block in which positive ions are generated and the negative block in which negative ions are generated to move from one end to the other end in the electrode alignment direction. Since the region moves with time, the ion generation pattern in which the region where positive ions gather and the region where negative ions gather moves from one end to the other end of the electrode alignment direction over time is specifically configured Is done.

  The said control part may be comprised so that the said polarity boundary may periodically reciprocate the predetermined range along the direction in which the said several discharge electrode was located in a line.

  According to the above configuration, the control unit causes the polarity boundary between the positive block in which positive ions are generated and the negative block in which negative ions are generated to periodically pass through a predetermined range along the electrode alignment direction. Therefore, an ion generation pattern in which a region where positive ions gather and a region where negative ions gather periodically moves in a predetermined range along the electrode alignment direction as time passes is specifically configured. The

  The said control part may be comprised so that the said several adjacent number may change periodically with progress of the said time.

  According to the above configuration, the control unit periodically changes the number of adjacent discharge electrodes that generate ions of the same polarity among the plurality of discharge electrodes. When the gathered area and the area where negative ions gather move periodically over a predetermined range along the electrode alignment direction over time, the width of the area where positive ions gather and the negative ions gather. Specifically, an ion generation pattern in which the width of the region is periodically changed is configured.

  The said control part may be comprised so that the said several adjacent number may become fixed with progress of the said time.

  According to the above configuration, since the number of the plurality of adjacent discharge electrodes that generate ions of the same polarity among the plurality of discharge electrodes is constant with time, the control unit collects positive ions. When the region and the region where negative ions gather periodically move along a predetermined range along the electrode alignment direction over time, the width of the region where positive ions gather and the region where negative ions gather Specifically, an ion generation pattern having a constant width is formed.

  Each of the discharge electrodes may be connected to a power source that switches the polarity of the voltage by switching the polarity of the voltage applied to the discharge electrode.

  According to the above configuration, each discharge electrode is connected to a power source that switches the polarity of the applied voltage to switch the polarity of the ions, so that a plurality of discharge electrodes in which the polarities of the ions are switched independently of each other are specified. Constructed.

  Each discharge electrode may be connected to a power supply that applies a positive voltage to each discharge electrode or a switching element that switches the polarity of the ions by connecting to a power supply that applies a negative voltage to each discharge electrode. Good.

  According to the above configuration, each discharge electrode is connected to a power source to which a positive voltage is applied or to a power source to which a negative voltage is applied, so that a switching element that switches the polarity of ions is connected. A plurality of discharge electrodes whose polarities are switched independently of each other are specifically configured.

  The transport device according to the present invention includes a plurality of shafts provided so as to extend in parallel to each other, and a plurality of cylindrical rollers attached to the respective shafts. A plurality of discharge electrodes provided above the roller conveyor and generating ions by corona discharge and arranged along the direction in which each shaft extends, A transport device for transporting the substrate to be processed while supplying ions generated by the discharge electrodes to the surface of the substrate to be processed, wherein the polarities of the ions generated by the discharge electrodes are switched independently of each other. In addition, the polarity of the ions is switched for each of the plurality of adjacent discharge electrodes, and the polarity of the positive block in which positive ions are generated and the negative block in which negative ions are generated Wherein the boundary is provided with a configured controlled unit to move along a direction aligned with said plurality of discharge electrodes over time.

  According to said structure, since the polarity of the ion produced | generated by each discharge electrode switches mutually independently by a control part, it becomes possible to form various ion generation patterns. The control unit also switches the polarity of the ions for each of the plurality of discharge electrodes, and the polarity boundary between the positive block where positive ions are generated and the negative block where negative ions are generated is the alignment of the electrodes. Since it moves along the direction as time passes, the area where positive ions generated in the positive block gather and the negative ions generated in the negative block gather on the surface of the substrate to be transported by the roller conveyor. Ions are supplied in an ion generation pattern in which the region moves along the alignment direction of the electrodes with time. In this ion generation pattern, the region where positive ions gather and the region where negative ions gather over time, that is, along with the transfer of the substrate to be processed, Since it moves along the direction orthogonal to the transport direction of the processing substrate, the uneven distribution of positive and negative ions on the surface of the substrate to be processed is suppressed, and in each region where positive and negative ions gather on the surface of the substrate to be processed, Since ions are collected for a plurality of adjacent discharge electrodes, the ability to remove electricity is improved as compared with the case where ions are generated independently at each discharge electrode. Therefore, it is possible to suppress the uneven distribution of positive and negative ions and improve the ability to eliminate static electricity.

  The control unit may be configured such that the polarity boundary moves from one end to the other end in a direction in which the plurality of discharge electrodes are arranged.

  According to the above configuration, the control unit causes the polarity boundary between the positive block in which positive ions are generated and the negative block in which negative ions are generated to move from one end to the other end in the electrode alignment direction. Since it moves with the progress, the boundary between the area where positive ions gather and the area where negative ions gather together with the surface of the substrate to be transported by the roller conveyor. Ion is supplied in an ion generation pattern that moves from one end to the other end in a direction orthogonal to the transport direction of the material, so that it is generated on the substrate to be processed regardless of the position of the multiple rollers supported by each shaft. The static electricity thus removed is removed on average and efficiently so as not to be biased with respect to the substrate.

  The plurality of rollers supported by the shafts are arranged so as to overlap each other along the transport direction of the substrate to be processed, and the control unit is configured so that the polarity boundary is in a direction in which the plurality of discharge electrodes are arranged. The predetermined range may be configured to periodically reciprocate around the position where the rollers overlap.

  According to the above configuration, the polarity boundary between the positive block where positive ions are generated and the negative block where negative ions are generated is positioned by the control unit so that each roller overlaps a predetermined range along the electrode alignment direction. Since the substrate periodically reciprocates to the center, the boundary between the area where positive ions gather and the area where negative ions gather is related to the surface of the substrate to be transported by the roller conveyor. Then, ions are supplied in an ion generation pattern that periodically reciprocates around a position where each roller overlaps in a predetermined range along a direction orthogonal to the transport direction of the substrate to be processed, so that a plurality of supported by each shaft When a large amount of static electricity is generated at the position of the roller, the static electricity generated on the substrate to be processed is averagely and efficiently removed so as not to be biased with respect to the substrate.

  The plurality of rollers supported by the shafts are arranged so as to overlap each other along the transport direction of the substrate to be processed, and the control unit is configured so that the polarity boundary is in a direction in which the plurality of discharge electrodes are arranged. The predetermined range may be configured to reciprocate periodically between the overlapping positions of the rollers.

  According to the above configuration, the control unit causes the polarity boundary between the positive block in which positive ions are generated and the negative block in which negative ions are generated at a position where each roller overlaps a predetermined range along the electrode alignment direction. The boundary between the area where positive ions gather and the area where negative ions gather together with the surface of the substrate to be transported by the roller conveyor. The ions are supplied in an ion generation pattern that periodically reciprocates between the overlapping positions of each roller in a predetermined range along the direction orthogonal to the transport direction of the substrate to be processed, so that a plurality of supported by each shaft When a large amount of static electricity is generated between the positions of the rollers, the static electricity generated on the substrate to be processed is averagely and efficiently removed so as not to be biased with respect to the substrate.

  According to the present invention, the polarity of ions generated by a plurality of discharge electrodes is switched independently of each other, and the polarity of ions is switched for each of a plurality of adjacent discharge electrodes to generate positive ions. And a negative block where negative ions are generated, the polarity boundary between the negative block and the negative electrode is controlled to move along the electrode alignment direction over time. The ability to remove static electricity can be improved.

It is a perspective view of the conveying apparatus 50a which concerns on Embodiment 1. FIG. It is a cross-sectional view of the conveying apparatus 50a. It is sectional drawing of the to-be-processed substrate 20 conveyed with the conveying apparatus 50a. It is an image figure of ion generation pattern Pa of the ion generated with the static elimination apparatus 40a which comprises the conveying apparatus 50a. It is an image figure of the ion generation pattern Pb of the ion generated with the static elimination apparatus 40a. It is an image figure of the ion generation pattern Pc of the ion generated with the static elimination apparatus 40a. It is an image figure of the ion generation pattern Pd of the ion generated with the static elimination apparatus 40a. It is an image figure of the ion generation pattern Pe of the ion generated with the static elimination apparatus 40a. It is an image figure of the ion generation pattern Pf of the ion generated with the static elimination apparatus 40a. It is an image figure of the ion generation pattern Pg of the ion generated with the static elimination apparatus 40a. It is an image figure of the ion generation pattern Ph of the ion generated with the static elimination apparatus 40a. It is an image figure of the ion generation pattern Pi of the ion generated with the static elimination apparatus 40a. It is a cross-sectional view of the conveying apparatus 50b which concerns on Embodiment 2.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. The present invention is not limited to the following embodiments.

Embodiment 1 of the Invention
FIGS. 1-12 has shown Embodiment 1 of the static elimination apparatus which concerns on this invention, and a conveying apparatus provided with the same. Specifically, FIG. 1 is a perspective view of the transfer device 50a of the present embodiment, and FIG. 2 is a cross-sectional view thereof. FIG. 3 is a cross-sectional view of the substrate 20 to be processed which is transferred by the transfer apparatus 50a.

  First, a specific configuration of the substrate to be processed 20 transported by the transport device 50a will be described.

  The substrate to be processed 20 is a substrate for manufacturing a TFT substrate by multi-chamfering. As shown in FIG. 3, for example, a glass substrate 10 of 2850 mm × 3050 mm × 0.7 mm and an insulating substrate in each panel constituent unit 10, a plurality of gate lines (not shown) provided so as to extend in parallel to each other, a plurality of source lines (not shown) provided so as to extend in parallel to each other in a direction orthogonal to each gate line, And a plurality of TFTs 15 provided at each intersection of the gate line and each source line.

As shown in FIG. 3, the TFT 15 includes, for example, a gate electrode 11 that is a protruding portion of each gate line, a gate insulating film 12 provided so as to cover the gate electrode 11, and the gate insulating film 12. A semiconductor layer 13 provided in an island shape so as to overlap the gate electrode 11, and a source electrode 14 a and a drain electrode 14 b provided on the semiconductor layer 13 so as to overlap the gate electrode 11 and to face each other. Yes. Here, the semiconductor layer 13 includes a lower intrinsic amorphous silicon layer 13a and an upper n ⁺ amorphous silicon layer 13b provided so as to expose a channel region of the intrinsic amorphous silicon layer 13a. Further, the source electrode 14a is, for example, a protruding portion to the side of each source line.

  The processed substrate 20 is formed by forming an interlayer insulating film so as to cover each TFT 15 on the insulating substrate 10 in each panel constituent unit, and then forming a plurality of pixel electrodes in a matrix on the interlayer insulating film. A TFT mother substrate in which a plurality of TFT substrates are arranged in a matrix form.

  In the present embodiment, the substrate 20 to be processed is exemplified by a mother substrate on which the TFT 15 is formed (an intermediate body of the TFT mother substrate), but the substrate to be processed is a glass substrate before the entire TFT is formed, It may be a TFT mother substrate or a liquid crystal display panel assembly in which a TFT mother substrate and a CF mother substrate are bonded together.

  Next, a specific configuration of the transport device 50a will be described.

  As shown in FIGS. 1 and 2, the transport device 50 a includes a roller conveyor 30 for transporting the substrate 20 to be processed and a static eliminating device 40 a provided above the roller conveyor 30.

  As shown in FIG. 1, the roller conveyor 30 is provided so as to extend parallel to each other between a pair of side wall portions 31 provided in an elongated plate shape so as to extend in parallel to each other, and between the pair of side wall portions 31, respectively. A plurality of shafts 32 configured to be rotatable by a drive motor and the like, and a plurality of resin-made cylindrical rollers 33 fixed to the respective shafts 32, and the rotation of the respective rollers 33 in accordance with the rotation of the respective shafts 32. Thus, the substrate 20 to be processed is transferred. Here, the interval between the pair of side wall portions 31 is, for example, about 3 m, the interval between the plurality of shafts 32 is, for example, about 20 cm to 30 cm, and the interval between the plurality of rollers 33 is, for example, about 40 cm to 50 cm. It is.

  As shown in FIG. 2, the static eliminator 40a includes a plurality of discharge electrodes 41 provided in a line to generate positive ions 5a or negative ions 5b (see FIG. 1) by corona discharge, respectively. A cover member 42 provided with a plurality of nozzles N for discharging and supplying ions 5 generated at each discharge electrode 41 to the surface of the substrate to be processed 20 and a positive voltage applied to each discharge electrode 41. A first high-voltage power supply 46 for applying, a first wiring 43 provided so as to extend in the electrode alignment direction (lateral direction in the figure) and connected to the first high-voltage power supply 46, and each discharge electrode 41 is negative A second high-voltage power supply 47 for applying a voltage; a second wiring 44 provided so as to extend in the electrode alignment direction (lateral direction in the figure); and connected to the second high-voltage power supply 47; The first wiring 43 or the second wiring 44 Subsequently, a plurality of switching elements 45 for switching the polarity of the ions 5 generated at each discharge electrode 41 and a control unit 49 (see FIG. 1) for controlling the operation of each switching element 45 are provided. Yes.

  The controller 49 switches the polarity of the ions 5 generated at each discharge electrode 41 independently of each other, and switches the polarity of the ions 5 for each of the plurality of adjacent discharge electrodes 41 to generate positive ions 5a. The polarity boundary L between the block Ba and the negative block Bb where the negative ions 5b are generated is configured to move along the alignment direction of the electrodes as time elapses. For example, the ion generation pattern Pa shown in FIGS. To Pi.

Here, FIGS. 4 to 12 are image diagrams of ion generation patterns Pa to Ph of ions generated by the static eliminator 40a, respectively. 4 to 12, the vertical axes N _{1 to} N ₁₀ (N ₈ ) indicate the positions of the nozzles N provided with the discharge electrodes 41, and the horizontal axes T _{1 to} T ₅ indicate the elapsed time. The marks of + and − surrounded by ◯ indicate the polarities of ions below each nozzle N (N _{1 to} N ₁₀ ). The transport speed of the substrate 20 is about 5 m / sec ～40M / _sec, the distance T 1 through T ₅ is about 1 millisecond to 10 seconds. More specifically, when the transport speed of the substrate to be processed 20 is about 10 m / min, the interval between T _{1 to} T ₅ is about 16.7 milliseconds.

In the ion generation pattern Pa, as illustrated in FIG. 4, the control unit 49 causes the waveform polarity boundary L between the positive block Ba where the positive ions 5 a are generated and the negative block Bb where the negative ions 5 b are generated to align the electrodes. When a predetermined range along the direction (nozzles N _{1 to} N ₅ / nozzles N _{6 to} N ₁₀ ) is periodically reciprocated around the overlapping position of each roller 33, the same polarity among the plurality of discharge electrodes 41. Since the number of the plurality of adjacent ions 5 that generate the ions 5 periodically changes from 2 to 8 over time, a region (Ba) where positive ions 5a gather on the surface of the substrate 20 to be processed. And a region (Bb) where the negative ions 5b are gathered, the boundary (L) periodically reciprocates around a position where each roller 33 overlaps along a predetermined range along the direction perpendicular to the substrate transport direction as the substrate is transported. Move and positive One 5a is gathered width of the area (Ba), and the width of the negative ions 5b is gathered area (Bb) is to vary periodically. According to this ion generation pattern Pa, when a large amount of static electricity is generated at the positions of the plurality of rollers 33 supported by each shaft 32, the static electricity generated in the substrate to be processed 20 is not biased with respect to the substrate. It can be removed on average and efficiently.

In the ion generation pattern Pb, as shown in FIG. 5, the control unit 49 causes the polarity boundary L of the waveform between the positive block Ba where the positive ions 5 a are generated and the negative block Bb where the negative ions 5 b are generated to align the electrodes. When a predetermined range along the direction (nozzles N _{1 to} N ₅ / nozzles N _{6 to} N ₁₀ ) is periodically reciprocated around the overlapping position of each roller 33, the same polarity among the plurality of discharge electrodes 41. Since the number of the plurality of adjacent ions 5 that generate the same number of ions 5 is constant with respect to the passage of time, the number of adjacent ions (Ba) and the negative ions 5b are increased on the surface of the substrate 20 to be processed. The boundary (L) with the gathered region (Bb) periodically reciprocates around a position where each roller 33 overlaps along a predetermined range along the direction orthogonal to the substrate transport direction as the substrate is transported. Ion 5a The width of waiting area width (Ba), and negative ions 5b is gathered area (Bb) is constant. According to this ion generation pattern Pb, when a large amount of static electricity is generated at the positions of the plurality of rollers 33 supported by each shaft 32, the static electricity generated in the substrate to be processed 20 is not biased with respect to the substrate. It can be removed on average and efficiently.

In the ion generation pattern Pc, as shown in FIG. 6, the control unit 49 causes the zigzag polarity boundary L between the positive block Ba where the positive ions 5 a are generated and the negative block Bb where the negative ions 5 b are generated to When a predetermined range (nozzles N _{1 to} N ₄ / nozzles N _{5 to} N ₈ ) along the alignment direction is periodically reciprocated around the overlapping position of each roller 33, among the plurality of discharge electrodes 41, they are the same as each other. Since the number of adjacent ions that generate polar ions 5 periodically changes from 2 to 8 over time, a region (Ba) where positive ions 5a gather on the surface of the substrate 20 to be processed. ) And the region (Bb) where the negative ions 5b gather, a predetermined range along the direction orthogonal to the substrate transport direction with the substrate transport is periodically centered around the position where the rollers 33 overlap. As it reciprocates So that the width of the region where the positive ions 5a gathered (Ba), and negative ions 5b is gathered area (Bb) is periodically varied. According to this ion generation pattern Pc, when a large amount of static electricity is generated at the positions of the plurality of rollers 33 supported by each shaft 32, the static electricity generated in the substrate to be processed 20 is not biased with respect to the substrate. It can be removed on average and efficiently.

In the ion generation pattern Pd, as shown in FIG. 7, the control unit 49 causes the zigzag polarity boundary L between the positive block Ba where the positive ions 5a are generated and the negative block Bb where the negative ions 5b are generated to When a predetermined range (nozzles N _{1 to} N ₄ / nozzles N _{5 to} N ₈ ) along the alignment direction is periodically reciprocated around the overlapping position of each roller 33, among the plurality of discharge electrodes 41, they are the same as each other. Since the number of the plurality of adjacent ions that generate the polar ions 5 is constant at four over time, the region (Ba) where the positive ions 5a gather on the surface of the substrate 20 to be processed and the negative ions 5b. The boundary (L) with the region (Bb) where the rollers 33 gather is periodically reciprocated around a position where each roller 33 overlaps along a predetermined range along the direction orthogonal to the substrate transport direction as the substrate is transported. Positive ion 5 Width of of gathered area (Ba), and negative ions 5b is gathered area (Bb) is constant. According to this ion generation pattern Pd, when a large amount of static electricity is generated at the positions of the plurality of rollers 33 supported by each shaft 32, the static electricity generated in the substrate to be processed 20 is not biased with respect to the substrate. It can be removed on average and efficiently.

In the ion generation pattern Pe, as shown in FIG. 8, the control unit 49 causes the waveform polarity boundary L between the positive block Ba where the positive ions 5 a are generated and the negative block Bb where the negative ions 5 b are generated to align the electrodes. When a predetermined range along the direction (nozzles N _{1 to} N ₅ / nozzles N _{6 to} N ₁₀ ) is periodically reciprocated between overlapping positions of the rollers 33, the same polarity among the plurality of discharge electrodes 41. Since the number of the plurality of adjacent ions 5 that generate the ions 5 periodically changes from 2 to 8 over time, a region (Ba) where positive ions 5a gather on the surface of the substrate 20 to be processed. And a region (Bb) where the negative ions 5b are gathered are periodically reciprocated between the overlapping positions of the rollers 33 in a predetermined range along the direction orthogonal to the substrate transport direction as the substrate is transported. While moving, positive Io 5a is the width of the gathered area width (Ba), and negative ions 5b is gathered area (Bb) is to vary periodically. According to this ion generation pattern Pe, when a large amount of static electricity is generated between the positions of the plurality of rollers 33 supported by each shaft 32, the static electricity generated in the substrate to be processed 20 is not biased with respect to the substrate. Can be removed on average and efficiently.

In the ion generation pattern Pf, as shown in FIG. 9, the control unit 49 causes the polarity boundary L of the waveform between the positive block Ba where the positive ions 5 a are generated and the negative block Bb where the negative ions 5 b are generated to align the electrodes. When a predetermined range along the direction (nozzles N _{1 to} N ₅ / nozzles N _{6 to} N ₁₀ ) is periodically reciprocated between overlapping positions of the rollers 33, the same polarity among the plurality of discharge electrodes 41. Since the number of the plurality of adjacent ions 5 that generate the same number of ions 5 is constant with respect to the passage of time, the number of adjacent ions (Ba) and the negative ions 5b are increased on the surface of the substrate 20 to be processed. The boundary (L) with the gathered area (Bb) periodically reciprocates between the overlapping positions of the rollers 33 in a predetermined range along the direction orthogonal to the substrate transport direction as the substrate is transported. Ion 5a gathers The width of the region width of (Ba), and negative ions 5b gathered area (Bb) is constant. According to this ion generation pattern Pf, when a large amount of static electricity is generated between the positions of the plurality of rollers 33 supported by each shaft 32, the static electricity generated in the substrate to be processed 20 is not biased with respect to the substrate. Can be removed on average and efficiently.

In the ion generation pattern Pg, as shown in FIG. 10, the control unit 49 causes the zigzag polarity boundary L between the positive block Ba where the positive ions 5 a are generated and the negative block Bb where the negative ions 5 b are generated to When a predetermined range (nozzles N _{1 to} N ₅ / nozzles N _{6 to} N ₁₀ ) along the alignment direction is periodically reciprocated between the overlapping positions of the rollers 33, the plurality of discharge electrodes 41 are the same as each other. Since the number of adjacent ions that generate polar ions 5 periodically changes from 2 to 8 over time, a region (Ba) where positive ions 5a gather on the surface of the substrate 20 to be processed. ) And the region (Bb) where the negative ions 5b are gathered, a predetermined range along the direction orthogonal to the substrate transport direction is periodically transferred between the overlapping positions of the rollers 33 along with the substrate transport. As it reciprocates So that the width of the region where the positive ions 5a gathered (Ba), and negative ions 5b is gathered area (Bb) is periodically varied. According to this ion generation pattern Pg, when a large amount of static electricity is generated between the positions of the plurality of rollers 33 supported by each shaft 32, the static electricity generated in the substrate to be processed 20 is not biased with respect to the substrate. Can be removed on average and efficiently.

In the ion generation pattern Ph, as shown in FIG. 11, the control unit 49 causes the zigzag polarity boundary L between the positive block Ba where the positive ions 5a are generated and the negative block Bb where the negative ions 5b are generated to When a predetermined range (nozzles N _{1 to} N ₅ / nozzles N _{6 to} N ₁₀ ) along the alignment direction is periodically reciprocated between the overlapping positions of the rollers 33, the plurality of discharge electrodes 41 are the same as each other. Since the number of the plurality of adjacent ions that generate the polar ions 5 is constant at five over time, the region (Ba) where the positive ions 5a gather on the surface of the substrate 20 to be processed and the negative ions 5b. The boundary (L) with the region (Bb) where the rollers 33 gather is periodically reciprocated between the overlapping positions of the rollers 33 in a predetermined range along the direction orthogonal to the substrate transport direction as the substrate is transported. Positive ion 5 Width of of gathered area (Ba), and negative ions 5b is gathered area (Bb) is constant. According to this ion generation pattern Ph, when a large amount of static electricity is generated between the positions of the plurality of rollers 33 supported by each shaft 32, the static electricity generated in the substrate to be processed 20 is not biased with respect to the substrate. Can be removed on average and efficiently.

In the ion generation pattern Pi, as shown in FIG. 12, the control unit 49 causes the zigzag polarity boundary L between the positive block Ba where the positive ions 5a are generated and the negative block Bb where the negative ions 5b are generated to Since it moves from one end (nozzle N ₁ ) in the alignment direction toward the other end (nozzle N ₈ ) with time, a region (Ba) in which positive ions 5 a gather on the surface of the substrate to be processed 20 and negative ions The boundary (L) with the region (Bb) where 5b is gathered moves from one end to the other end in a direction orthogonal to the substrate transport direction as the substrate is transported. According to this ion generation pattern Pi, regardless of the position of the plurality of rollers 33 supported by each shaft 32, the static electricity generated in the substrate to be processed 20 can be averaged so as not to be biased with respect to the substrate, and It can be removed efficiently.

  As described above, according to the static eliminator 40a of this embodiment and the transport device 50a including the same, the polarity of the ions 5 generated at each discharge electrode 41 is switched independently from each other by the control unit 49. A simple ion generation pattern. The control unit 49 switches the polarity of the ions 5 for each of the plurality of discharge electrodes 41 so that the polarity of the positive block Ba where the positive ions 5a are generated and the polarity of the negative block Bb where the negative ions 5b are generated. Since the boundary L moves along the alignment direction of the electrodes with time, the region where the positive ions 5a generated in the positive block Ba gather on the surface of the substrate 20 to be transported by the roller conveyor 30 and the negative Ions can be supplied in the ion generation patterns Pa to Pi in which the region where the negative ions 5b generated in the block Bb gather together moves along the electrode alignment direction. And in this ion generation pattern Pa-Pi, the area | region where the positive ion 5a gathered, and the area | region where the negative ion 5b gathered are the alignment direction of an electrode with progress of time, ie, conveyance of the to-be-processed substrate 20. That is, since it moves along the direction orthogonal to the transport direction of the substrate 20 to be processed, the uneven distribution of positive and negative ions on the surface of the substrate 20 to be processed can be suppressed, and positive and negative on the surface of the substrate 20 to be processed can be suppressed. In each region in which the ions are collected, ions are collected for a plurality of adjacent discharge electrodes 41, so that the ability to remove static electricity can be improved as compared with the case where ions are generated individually at each discharge electrode. Therefore, it is possible to suppress the uneven distribution of positive and negative ions and improve the ability to remove static electricity.

<< Embodiment 2 of the Invention >>
FIG. 13 is a cross-sectional view of the transport device 50b of this embodiment. In the following embodiments, the same portions as those in FIGS. 1 to 12 are denoted by the same reference numerals, and detailed description thereof is omitted.

  In the first embodiment, the configuration in which the switching element 45 is connected to each discharge electrode 41 and the polarity of ions generated in each discharge electrode 41 is switched is illustrated. However, in this embodiment, each discharge electrode 41 has a switching function. The structure which connects the high voltage | pressure power supply 48 and switches the polarity of the ion generated with each discharge electrode 41 is illustrated.

  As shown in FIG. 13, the transport device 50 b includes a roller conveyor 30 for transporting the substrate 20 to be processed and a static eliminator 40 b provided above the roller conveyor 30.

  As shown in FIG. 13, the static eliminator 40b has a plurality of discharge electrodes 41 arranged in a line to generate positive ions 5a or negative ions 5b by corona discharge, and is generated at each discharge electrode 41. A plurality of nozzles N for discharging and supplying ions to the surface of the substrate 20 to be processed are connected to the cover member 42 provided on the lower surface and each discharge electrode 41, and a positive voltage is applied to each discharge electrode 41. A plurality of high-voltage power supplies 48 each having a built-in switching function for generating positive ions 5a by applying a negative voltage or generating negative ions 5b by applying a negative voltage, and a control unit for controlling the operation of each high-voltage power supply 48 49 (see FIG. 1).

  According to the static eliminator 40b of the present embodiment and the transport device 50b including the same, the polarities of the ions 5 generated by the plurality of discharge electrodes 41 are switched independently of each other, and the plurality of discharge electrodes 41 are adjacent to each other. The polarity of the ion 5 is switched every time, and the polarity boundary L between the positive block Ba where the positive ion 5a is generated and the negative block Bb where the negative ion 5b is generated moves along the alignment direction of the electrodes as time passes. Since the control unit 49 configured as described above is provided, as in the first embodiment, it is possible to suppress the uneven distribution of positive and negative ions and improve the ability to eliminate static electricity.

  In each said embodiment, although the glass substrate was illustrated as a to-be-processed substrate conveyed with a conveying apparatus, this invention is applicable also to conveyance and static elimination of a resin substrate.

  As described above, the present invention can suppress the uneven distribution of positive and negative ions and improve the ability to eliminate static electricity, and thus is useful for manufacturing a liquid crystal display panel using a large glass substrate.

Ba Positive block Bb Negative block L Boundary 5 Ion 5a Positive ion 5b Negative ion 20 Substrate 30 Transfer device 32 Shaft 33 Roller 40a, 40b Discharge device 41 Discharge electrode 45 Switching element 46 First high voltage power supply 47 Second high voltage power supply 48 High voltage Power supply 49 Control unit 50a, 50b Conveying device

Claims (11)

Each of the static elimination devices provided with a plurality of discharge electrodes that generate ions by corona discharge,
The polarity of the ions generated at each discharge electrode is switched independently of each other, and the polarity of the ions is switched for each of the plurality of adjacent discharge electrodes to generate positive blocks and negative ions that generate positive ions. A static eliminator comprising: a controller configured to move a polarity boundary with a negative block that moves along a direction in which the plurality of discharge electrodes are arranged with time. The static eliminator according to claim 1,
The static eliminator, wherein the controller is configured such that the polarity boundary moves from one end to the other end in a direction in which the plurality of discharge electrodes are arranged. The static eliminator according to claim 1,
The static eliminator, wherein the control unit is configured to periodically reciprocate within a predetermined range in which the boundary of the polarity is along a direction in which the plurality of discharge electrodes are arranged. The static eliminator according to claim 3,
The static eliminator characterized in that the control unit is configured such that the number of the plurality of adjacent ones changes periodically with the passage of time. The static eliminator according to claim 3,
The static eliminator, wherein the control unit is configured such that the number of the plurality of adjacent units becomes constant with the passage of time. In the static elimination apparatus as described in any one of Claims 1 thru | or 5,
A discharger, wherein a power source for switching the polarity of the voltage applied to each discharge electrode to switch the polarity of the ions is connected to each discharge electrode. In the static elimination apparatus as described in any one of Claims 1 thru | or 5,
Each discharge electrode is connected to a power source that applies a positive voltage to each discharge electrode or a switching element that switches the polarity of the ions by connecting to a power source that applies a negative voltage to each discharge electrode. The static eliminator characterized by this. A roller conveyor having a plurality of shafts provided so as to extend in parallel to each other, and a plurality of cylindrical rollers attached to the respective shafts, and conveying a substrate to be processed by rotation of each roller;
A plurality of discharge electrodes provided above the roller conveyor, each of which generates ions by corona discharge and arranged along the direction in which each shaft extends, and a static eliminator,
A transport device that transports the substrate to be processed while supplying ions generated by the discharge electrodes to the surface of the substrate to be processed.
The polarity of the ions generated at each discharge electrode is switched independently of each other, and the polarity of the ions is switched for each of the plurality of adjacent discharge electrodes to generate positive blocks and negative ions that generate positive ions. A transport apparatus comprising: a control unit configured to move a polarity boundary with a negative block that moves along a direction in which the plurality of discharge electrodes are arranged over time. In the conveying apparatus described in Claim 8,
The said control part is comprised so that the boundary of the said polarity may move toward the other end from the one end of the direction where the said several discharge electrode was located in a line, The conveying apparatus characterized by the above-mentioned. In the conveying apparatus described in Claim 8,
The plurality of rollers supported by the shafts are arranged so as to overlap each other along the transport direction of the substrate to be processed,
The control unit is configured to periodically reciprocate a predetermined range along the direction in which the plurality of discharge electrodes are arranged around a position where each of the rollers overlaps, with the polarity boundary. Conveying device. In the conveying apparatus described in Claim 8,
The plurality of rollers supported by the shafts are arranged so as to overlap each other along the transport direction of the substrate to be processed,
The control unit is configured to periodically reciprocate between a position where the rollers overlap in a predetermined range in which the boundary of the polarity is along the direction in which the plurality of discharge electrodes are arranged. Conveying device.

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