JP2010533964A5 - - Google Patents
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- Publication number
- JP2010533964A5 JP2010533964A5 JP2010502411A JP2010502411A JP2010533964A5 JP 2010533964 A5 JP2010533964 A5 JP 2010533964A5 JP 2010502411 A JP2010502411 A JP 2010502411A JP 2010502411 A JP2010502411 A JP 2010502411A JP 2010533964 A5 JP2010533964 A5 JP 2010533964A5
- Authority
- JP
- Japan
- Prior art keywords
- independent
- well
- main
- dependent
- relating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 230000001419 dependent effect Effects 0.000 description 2
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102007017212A DE102007017212A1 (de) | 2007-04-12 | 2007-04-12 | Verfahren und Vorrichtung zur Kühlung eines Gases |
| PCT/DE2008/000557 WO2008125078A2 (de) | 2007-04-12 | 2008-04-02 | Verfahren und vorrichtung zur kühlung eines gases |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2010533964A JP2010533964A (ja) | 2010-10-28 |
| JP2010533964A5 true JP2010533964A5 (de) | 2011-05-26 |
Family
ID=39744194
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010502411A Withdrawn JP2010533964A (ja) | 2007-04-12 | 2008-04-02 | ガスの冷却のための方法および装置 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20100140510A1 (de) |
| EP (1) | EP2132507A2 (de) |
| JP (1) | JP2010533964A (de) |
| CN (1) | CN102066860A (de) |
| DE (2) | DE102007017212A1 (de) |
| WO (1) | WO2008125078A2 (de) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9336915B2 (en) | 2011-06-17 | 2016-05-10 | General Electric Company | Target apparatus and isotope production systems and methods using the same |
| JP5864165B2 (ja) * | 2011-08-31 | 2016-02-17 | ギガフォトン株式会社 | ターゲット供給装置 |
| WO2015086258A1 (en) | 2013-12-13 | 2015-06-18 | Asml Netherlands B.V. | Radiation source, metrology apparatus, lithographic system and device manufacturing method |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB912478A (en) * | 1962-12-04 | 1962-12-05 | Petrocarbon Dev Ltd | Improvements in methods and apparatus for liquefying gases |
| CH527398A (fr) * | 1966-04-01 | 1972-08-31 | Nautchno Izsledovatelski Sekto | Procédé de liquéfaction de néon, installation pour sa mise en oeuvre et application du procédé |
| US4765813A (en) * | 1987-01-07 | 1988-08-23 | Air Products And Chemicals, Inc. | Hydrogen liquefaction using a dense fluid expander and neon as a precoolant refrigerant |
| US5105305A (en) * | 1991-01-10 | 1992-04-14 | At&T Bell Laboratories | Near-field scanning optical microscope using a fluorescent probe |
| US5249424A (en) * | 1992-06-05 | 1993-10-05 | Astronautics Corporation Of America | Active magnetic regenerator method and apparatus |
| US5512106A (en) * | 1993-01-27 | 1996-04-30 | Sumitomo Heavy Industries, Ltd. | Surface cleaning with argon |
| JPH0882413A (ja) * | 1994-09-13 | 1996-03-26 | Toshiba Corp | 凝縮装置 |
| US6835944B2 (en) * | 2002-10-11 | 2004-12-28 | University Of Central Florida Research Foundation | Low vapor pressure, low debris solid target for EUV production |
| GB0406615D0 (en) * | 2004-03-24 | 2004-04-28 | Air Prod & Chem | Process and apparatus for liquefying hydrogen |
| JP5100990B2 (ja) * | 2004-10-07 | 2012-12-19 | ギガフォトン株式会社 | 極端紫外光源装置用ドライバーレーザ及びｌｐｐ型極端紫外光源装置 |
-
2007
- 2007-04-12 DE DE102007017212A patent/DE102007017212A1/de not_active Withdrawn
-
2008
- 2008-04-02 EP EP08734447A patent/EP2132507A2/de not_active Withdrawn
- 2008-04-02 WO PCT/DE2008/000557 patent/WO2008125078A2/de active Application Filing
- 2008-04-02 US US12/450,219 patent/US20100140510A1/en not_active Abandoned
- 2008-04-02 CN CN2008800111030A patent/CN102066860A/zh active Pending
- 2008-04-02 JP JP2010502411A patent/JP2010533964A/ja not_active Withdrawn
- 2008-04-02 DE DE112008000917T patent/DE112008000917A5/de not_active Withdrawn
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