JP2010521696A - 3D coordinate measuring machine using reference plate - Google Patents

Abstract

The present invention relates to a three-dimensional coordinate measuring machine using a reference plate having a structure capable of accurately measuring surface coordinates of an object while correcting mechanical errors with respect to the object in real time. A measuring unit disposed above the object and installed on the X-axis stage axis so as to be movable left and right; and a reference plate disposed and fixed above the measuring unit; It is designed to measure the distance between the reference plate and the distance between the measuring unit and the object in real time, correct the mechanical error of the X-axis stage, and measure precisely. .
[Selection] Figure 1

Description

  The present invention uses a reference plate having a structure capable of accurately measuring the surface coordinates of an object, that is, the undulation of the surface of the object, while correcting a mechanical error with respect to the object in real time. This relates to a three-dimensional coordinate measuring machine. More specifically, the longer the length of the X-axis stage or X / Y-axis stage on which the measurement unit is installed, the greater the error due to machine drooping. Measure the distance between the part and the distance between the measuring part and the object in real time, compare and judge the error caused by dripping of the machine, and accurately measure the surface coordinates of the object while correcting the coordinates. The present invention relates to a three-dimensional coordinate measuring machine using a reference plate having a structure that can be used.

  Generally, in order to measure an unspecified surface object, a three-dimensional coordinate measuring machine capable of acquiring surface coordinates is essential.

  Such a three-dimensional coordinate measuring machine is a typical apparatus that can accurately measure surface coordinates ranging from several centimeters to several meters.

  The three-dimensional coordinate measuring machine employs a method in which the probe bar sequentially measures the height information of the shape while passing the surface of the object to be measured along the height direction (Z-axis) shape in a contact or non-contact manner. .

  After all, the performance of the three-dimensional coordinate measuring machine depends on how accurately the coordinate in the height direction (Z axis) can be measured in a wide area.

  However, since the conventional three-dimensional coordinate measuring machine has to move left and right on the X-axis stage to measure the surface of the object, or to move back and forth and right and left on the X / Y axis stage, There is a problem that a mechanical error due to sagging of each stage occurs as the length of each stage becomes longer.

  That is, when the length of each axis stage is 1 m, it is reported that there is a mechanical error of 3 to 5 μm (micrometer).

  The present invention has been made in consideration of the problems of the conventional three-dimensional coordinate measuring machine as described above, and the object of the present invention is to correct the mechanical error with respect to the object in real time while correcting the object. To provide a three-dimensional coordinate measuring machine using a reference plate having a structure capable of accurately measuring the surface coordinates of an object.

  A three-dimensional coordinate measuring machine using the reference plate of the present invention that solves the above-described problems is installed on the X-axis stage so as to be movable left and right on the X-axis stage. A measurement unit and a reference plate disposed and fixed above the measurement unit, and the measurement unit calculates the distance between the measurement unit and the reference plate and the distance between the measurement unit and the object in real time. It is designed to measure accurately and to correct the mechanical error of the X-axis stage to measure accurately.

  In the three-dimensional coordinate measuring machine using the reference plate according to the present invention, the error due to the machine drooping increases as the length of the X-axis stage or the X / Y-axis stage on which the measurement unit is installed increases. Measure the distance between the measuring unit and the distance between the measuring unit and the object in real time, compare and judge the error caused by the drooping of the machine, and correct the coordinates while correcting the coordinates. Therefore, reliability can be improved.

It is the block diagram which showed the three-dimensional coordinate measuring machine using the reference | standard board concerning 1st Example of this invention. It is the conceptual diagram which showed the measurement part of FIG. It is an operation | movement figure which shows the mechanical error correction | amendment of the three-dimensional coordinate measuring machine using the reference | standard board which concerns on 1st Example of this invention. It is the block diagram which showed the modification of the measurement part of FIG. It is the block diagram which showed the three-dimensional coordinate measuring machine using the reference | standard board concerning 2nd Example of this invention.

  FIG. 1 is a configuration diagram showing a three-dimensional coordinate measuring machine using a reference plate according to a first embodiment of the present invention, and FIG. 2 is a conceptual diagram showing a measuring unit of FIG.

  First, as shown in FIG. 1, the present invention uses a reference plate having a structure capable of accurately measuring the surface coordinates of the object 200 while correcting the mechanical error with respect to the object 200 in real time. This relates to the three-dimensional coordinate measuring machine 100.

  Such a three-dimensional coordinate measuring machine 100 is mainly composed of two parts, that is, a measuring unit 20 that measures the object 200 and a reference plate 10 that serves as a reference for the measuring unit 20.

  Here, the measuring unit 20 is disposed above the object 200 and is installed on the X-axis stage 30 so as to be movable left and right.

  The X-axis stage 30 has a length sufficient to move the measuring unit 20 left and right over the entire object 200, and a combination of a guide screw and a transfer screw to which the measuring unit 20 is coupled. Or it is comprised as a linear motor with which the measurement part 20 is mounted.

  Further, the reference plate 10 is spaced apart and fixed above the measurement unit 20 and has the same length as the X-axis stage 30 so that the measurement unit 20 can sense while moving left and right.

  Here, the reference plate 10 is fixed independently of the measurement unit 20 and the X-axis stage 30.

  On the other hand, the measurement unit 20 measures the distance to the reference plate 10 and the distance to the object 200 in real time, and corrects the mechanical error of the X-axis stage 30 to measure precisely. Designed.

  Such a measuring unit 20 is designed by a non-contact type that measures the surface coordinates of the object 200 using light, or a contact type that measures the surface coordinates while passing through the surface of the object 200.

  Here, in the case of the non-contact type measurement unit 20, that is, when the measurement unit 20 is designed in a non-contact type, the measurement unit 20 emits light from the light source 21 and the light source 21 as shown in FIG. The spectroscope 22 that splits the emitted light straight (that is, the straight direction when light is emitted from the light source 21) and downward, and the light that has been split downward through the spectroscope 22 is reflected and straightened. A first mirror 23 (that travels light in a straight traveling direction when light is emitted from the light source 21), and a second light that reflects light traveling straight from the spectroscope 22 and the first mirror 23 in the vertical direction. A mirror 24, a first interferometer 25a that receives light reflected upward by the second mirror 24 and measures the distance from the reference plate 10 in real time, and reflects downward from the second mirror 24 Receiving the received light 2 A second interferometer 25b that measures the distance to the surface of 0 in real time, and a receiver 26 that is connected to the central processing unit 28 and receives the indirect signals of the first and second interferometers 25a and 25b. ing.

The first interferometer 25a and the second interferometer 25b divide the light emitted from one light source 21 into two or more by an appropriate method so as to have an optical path difference, and generate interference when the wavefront is superimposed again. It is a device to observe.
That is, the light emitted from one light source 21 is separated into two, one light passes through the interior of the interferometer, and one light irradiates the object to be measured. It is a device that uses and observes.

  FIG. 3 is an operation diagram showing mechanical error correction of the three-dimensional coordinate measuring machine using the reference plate according to the first embodiment.

  First, with reference to FIG. 2, the measurement unit 20 separates the light emitted from one light source 21 into two lights through the spectroscope 22 and the first mirror 23 and directs the light toward the second mirror 24. The second mirror 24 reflects the two lights toward the first interferometer 25a and the second interferometer 25b, and the first interferometer 25a and the second interferometer 25b are connected to the reference plate 10 and the second interferometer 25b, respectively. It is designed to observe the distance by irradiating the object 200 with light.

The indirect signals observed by the first interferometer 25 a and the second interferometer 25 b are designed to be sent through the second mirror 24 to each receiver 26 connected to the central processing unit 28.
The central processing unit 28 is designed to correct the mechanical error of the X-axis stage 30 and accurately measure the surface coordinates of the object 200.

Furthermore, as shown in FIG. 3, the operation of the three-dimensional coordinate measuring machine 100 using the reference plate will be described. First, the first section (the round in FIG. 3) in which no dripping (eg, bending) of the X-axis stage 30 occurs. In the area indicated by No. 1, the distance D1 between the first interferometer 25a and the reference plate 10 is measured and designed to be memorized through the central processing unit 28.
The second interferometer 25b and the surface coordinates D2 of the object 200 are designed to be displayed through the receiver 26 and the central processing unit 28 and output in real time.

In the second section where the drooping of the X-axis stage 30 occurs (the area indicated by the circle number 2 in FIG. 3), a change amount of + Δd is generated, so the reference plate 10 measured by the first interferometer 25a is measured. The value between the unit 20 is D1 + Δd to which the amount of change is added.
This value is designed to compare and determine the D1 value measured in the first section (the area indicated by circle 1 in FIG. 3) through the central processing unit 28 and calculate + Δd.

  At the same time, the value between the object 200 and the measurement unit 20 measured by the second interferometer 25b is D2, but the amount of change is also the value measured together, so that it is substantially measured. As a value, D2-Δd is calculated.

  Therefore, the coordinate value of the measuring unit 20 and the object 200 finally displayed through the central processing unit 28 is D2−Δd + Δd, and this value is displayed and output in real time.

  Thus, according to the present invention, the Δd value, which is a mechanical error, can be corrected and accurately measured.

  FIG. 4 is a configuration diagram illustrating a modification of the measurement unit in FIG.

  As shown in FIG. 4, the measurement unit 20 has a contact type light source 21 that irradiates light, a spectroscope 22 that splits light emitted from the light source 21 straight and downward, and a downward direction through the spectroscope 22. The first mirror 23 that reflects and travels straightly into the light, the second mirror 24 that reflects light that travels straight from the spectroscope 22 and the first mirror 23 up and down, and the third mirror 27a at the upper end. And a probe bar 27 that moves up and down according to the surface shape of the target object 200 so as to maintain a state in close contact with the surface of the target object 200 and light reflected upward by the second mirror 24. The first interferometer 25a that measures the distance to the reference plate 10 in real time and the light reflected downward by the second mirror 24 are received, and the elevation distance of the probe rod 27 is measured in real time. 2 interferometer 25b and first dryer And a receiver 26 coupled to the central processing unit 28 to the indirect signal meter 25a and a second interferometer 25b can be compared receive and process respectively.

  A third mirror 27a is attached to the upper end of the probe bar 27 in order to sense the elevation change of the probe bar 27 that moves up and down depending on the surface shape of the object 200, and the second interferometer 25b is moved up and down as described above. Designed to measure.

  FIG. 5 is a configuration diagram of a three-dimensional coordinate measuring machine using a reference plate according to a second embodiment of the present invention.

  As shown in FIG. 5, the second embodiment is different from the first embodiment in that the measuring unit 20 is installed on an axis where the X-axis stage 30 and the Y-axis stage 40 that move back and forth and right and left intersect. Yes.

  Such a three-dimensional coordinate measuring machine 100 is placed on the axis of the object 200 and the X-axis stage 30 and the Y-axis stage 40 that are arranged above the object 200 and intersect so that they can move back and forth and right and left. The measuring unit 20 is provided, and the reference plate 10 is fixed above the measuring unit 20. The measuring unit 20 includes the distance between the measuring unit 20 and the reference plate 10 and the measuring unit 20 and the object 200. It is designed to measure the distance between the X axis stage 30 and the Y axis stage 40 in real time and to correct the mechanical error on the X axis stage 30 and the Y axis stage 40 for precise measurement.

  Since the configuration and operation of the three-dimensional coordinate measuring machine 100 according to the second embodiment have been described in detail with reference to the first embodiment, description thereof will be omitted.

On the other hand, the above-described examples are merely examples for explaining the present invention.
Accordingly, it is natural that those skilled in the art to which the present invention pertains and used are partially modified with reference to the detailed description of the present invention.

DESCRIPTION OF SYMBOLS 100 ... Three-dimensional coordinate measuring machine 10 ... Reference | standard board 20 ... Measuring part 21 ... Light source 22 ... Spectroscope 23 ... 1st mirror 24 ... 2nd mirror 25a ... First interferometer 25b ... Second interferometer 26 ... Receiver 27a ... Third mirror 27 ... Probe bar 28 ... Central processing unit 30 ... X-axis stage 40 ... Y Axis stage 200 ... Object

Claims (4)

In a three-dimensional coordinate measuring machine capable of measuring the surface area of an object,
An object, a measuring unit disposed above the object and installed on the X-axis stage so as to be movable left and right, and a reference plate disposed and fixed above the measuring unit Prepared,
The measurement unit accurately measures the distance between the measurement unit and the reference plate and the distance between the measurement unit and the object in real time to correct the mechanical error of the X-axis stage. A coordinate measuring machine using a reference plate characterized by being designed to measure. In a three-dimensional coordinate measuring machine capable of measuring the surface area of an object,
The object, a measurement unit that is arranged above the object and intersects with the X-axis stage and the Y-axis stage that are arranged to be movable in the front-rear and left-right directions, and is disposed above the measurement unit. And a reference plate to be fixed
The measurement unit measures the distance between the measurement unit and the reference plate and the distance between the measurement unit and the object in real time, and calculates mechanical errors on the X-axis stage and the Y-axis stage. A three-dimensional coordinate measuring machine using a reference plate, which is designed to be corrected and measured accurately.   The measuring unit irradiates light, a spectroscope that divides light emitted from the light source straightly and downwards, and reflects light that has been split downward through the spectrographs to make straight light. The first mirror, the second mirror that reflects light traveling straight from the spectroscope and the first mirror upward and downward, and the light reflected upward from the second mirror to receive the distance from the reference plate A first interferometer that measures in real time, a second interferometer that receives light reflected downward from the second mirror and measures the distance from the surface of the object in real time, and a central processing unit And a receiver for receiving indirect signals of the first and second interferometers, respectively, and a three-dimensional coordinate using the reference plate according to claim 1, Measuring machine.   The measuring unit irradiates light, a spectroscope that divides light emitted from the light source straightly and downwards, and reflects light that has been split downward through the spectrographs to make straight light. A first mirror, a second mirror that reflects light traveling straight from the spectroscope and the first mirror upward and downward, a third mirror at the top, and a state of being in close contact with the surface of the object. A first interference that receives light reflected upward by the probe mirror that moves up and down along the surface shape of the object and the reference plate and measures the distance from the reference plate in real time. A second interferometer that receives light reflected downward by the second mirror and measures the elevation distance of the probe bar in real time, and the first interferometer and the second interferometer Central processing so that each indirect signal can be received and compared. Three-dimensional coordinate measuring machine using a reference plate according to claim 1 or claim 2, characterized in that it comprises a receiver coupled to the part.

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