JP2010509766A - ダイヤモンドを備える堅牢な放射線検出器 - Google Patents
ダイヤモンドを備える堅牢な放射線検出器 Download PDFInfo
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- JP2010509766A JP2010509766A JP2009535870A JP2009535870A JP2010509766A JP 2010509766 A JP2010509766 A JP 2010509766A JP 2009535870 A JP2009535870 A JP 2009535870A JP 2009535870 A JP2009535870 A JP 2009535870A JP 2010509766 A JP2010509766 A JP 2010509766A
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- 230000005855 radiation Effects 0.000 title claims abstract description 72
- 239000010432 diamond Substances 0.000 title claims abstract description 69
- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 66
- 239000000758 substrate Substances 0.000 claims abstract description 123
- 239000004020 conductor Substances 0.000 claims abstract description 41
- 239000000463 material Substances 0.000 claims abstract description 39
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims abstract description 19
- 229910052796 boron Inorganic materials 0.000 claims abstract description 19
- 239000007772 electrode material Substances 0.000 claims abstract description 7
- 238000000034 method Methods 0.000 claims description 55
- 229910052751 metal Inorganic materials 0.000 claims description 20
- 239000002184 metal Substances 0.000 claims description 20
- 238000001020 plasma etching Methods 0.000 claims description 16
- 238000000151 deposition Methods 0.000 claims description 10
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- 229910052750 molybdenum Inorganic materials 0.000 claims description 6
- 230000008021 deposition Effects 0.000 claims description 5
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- 238000004519 manufacturing process Methods 0.000 claims description 4
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- 239000004065 semiconductor Substances 0.000 description 6
- 230000005684 electric field Effects 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
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- 238000013461 design Methods 0.000 description 4
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- 238000004544 sputter deposition Methods 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
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- 239000010931 gold Substances 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- FGIUAXJPYTZDNR-UHFFFAOYSA-N potassium nitrate Chemical compound [K+].[O-][N+]([O-])=O FGIUAXJPYTZDNR-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
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- 229910052802 copper Inorganic materials 0.000 description 1
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- 230000004907 flux Effects 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000002829 nitrogen Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
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- 235000010333 potassium nitrate Nutrition 0.000 description 1
- 239000004323 potassium nitrate Substances 0.000 description 1
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- 239000007787 solid Substances 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-N sulfuric acid Substances OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000001429 visible spectrum Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/26—Measuring radiation intensity with resistance detectors
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- High Energy & Nuclear Physics (AREA)
- Molecular Biology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Measurement Of Radiation (AREA)
- Light Receiving Elements (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GBGB0622695.5A GB0622695D0 (en) | 2006-11-14 | 2006-11-14 | Robust radiation detector comprising diamond |
| PCT/IB2007/054583 WO2008059428A2 (en) | 2006-11-14 | 2007-11-12 | Robust radiation detector comprising diamond |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2010509766A true JP2010509766A (ja) | 2010-03-25 |
| JP2010509766A5 JP2010509766A5 (enExample) | 2010-12-02 |
Family
ID=37605274
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009535870A Ceased JP2010509766A (ja) | 2006-11-14 | 2007-11-12 | ダイヤモンドを備える堅牢な放射線検出器 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US8242455B2 (enExample) |
| EP (1) | EP2087377A2 (enExample) |
| JP (1) | JP2010509766A (enExample) |
| GB (1) | GB0622695D0 (enExample) |
| WO (1) | WO2008059428A2 (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020204516A (ja) * | 2019-06-17 | 2020-12-24 | 株式会社東芝 | 検出素子および検出器 |
| JP2023512076A (ja) * | 2020-01-31 | 2023-03-23 | ボード オブ リージェンツ,ザ ユニバーシティ オブ テキサス システム | 中性子検出器、ホウ素を中性子変換層として用いたその製造方法及びコンフォーマルドーピング |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB0816769D0 (en) * | 2008-09-12 | 2008-10-22 | Warwick Ventures | Boron-doped diamond |
| EP2368138A1 (en) * | 2008-12-05 | 2011-09-28 | BAE Systems PLC | Radiation detector for detecting differnent types of radiation |
| FR2965937B1 (fr) * | 2010-10-07 | 2013-05-03 | Commissariat Energie Atomique | Systeme in situ de mesure directe du rayonnement alpha et procede associe pour la quantification de l'activite des radionucleides emetteurs alpha en solution |
| GB2489041A (en) * | 2011-03-18 | 2012-09-19 | Diamond Detectors Ltd | Diamond microelectrode for electrochemical use |
| GB201104579D0 (en) * | 2011-03-18 | 2011-05-04 | Element Six Ltd | Diamond based electrochemical sensors |
| WO2014040650A1 (en) | 2012-09-17 | 2014-03-20 | Element Six Limited | Diamond microelectrode |
| US9529098B2 (en) | 2013-09-30 | 2016-12-27 | Uchicago Argonne, Llc | X-ray monitoring optical elements |
| US9274245B2 (en) | 2014-05-30 | 2016-03-01 | Baker Hughes Incorporated | Measurement technique utilizing novel radiation detectors in and near pulsed neutron generator tubes for well logging applications using solid state materials |
| CN104752532B (zh) * | 2015-01-17 | 2017-01-25 | 王宏兴 | 一种半导体器件的三维电极结构及其制备方法和应用 |
| RU2618580C1 (ru) * | 2015-11-03 | 2017-05-04 | Акционерное общество "Государственный научный центр Российской Федерации Троицкий институт инновационных и термоядерных исследований" (АО "ГНЦ РФ ТРИНИТИ") | Чувствительный элемент с кольцевым контактом для алмазного детектора |
| RU2639587C1 (ru) * | 2016-08-04 | 2017-12-21 | Акционерное общество "Государственный научный центр Российской Федерации Троицкий институт инновационных и термоядерных исследований" (АО "ГНЦ РФ ТРИНИТИ") | Погружной детектор альфа-частиц на основе алмазного чувствительного элемента с трехмерным массивом электродов |
| CN106784044B (zh) * | 2016-12-26 | 2018-09-07 | 哈尔滨工业大学 | 一种三维结构金刚石紫外探测器及其制备方法 |
| EP3428692B1 (de) * | 2017-07-10 | 2021-03-10 | Siemens Healthcare GmbH | Röntgendetektor mit zwischeneinheit und auswerteebene |
| CN108089223B (zh) * | 2018-02-12 | 2024-05-07 | 中国工程物理研究院激光聚变研究中心 | 一种中子探测装置及系统 |
| WO2020142975A1 (en) * | 2019-01-10 | 2020-07-16 | Shenzhen Xpectvision Technology Co., Ltd. | Semiconductor radiation detector |
| CN111725336B (zh) * | 2019-03-21 | 2022-02-01 | 中国科学院宁波材料技术与工程研究所 | 探测介质及其制备方法、金刚石探测器 |
| US10954607B1 (en) * | 2019-10-22 | 2021-03-23 | Euclid Techlabs, Llc | High-efficiency transmission-mode diamond scintillator for quantitative characterization of X-ray beams |
| CN112670358B (zh) * | 2020-12-23 | 2021-08-03 | 东南大学苏州研究院 | 金刚石基紫外探测器及其制备方法 |
| CN215114917U (zh) * | 2021-06-22 | 2021-12-10 | 苏州纳格光电科技有限公司 | 一种监测温度变化器件 |
| CN114335238B (zh) * | 2021-12-02 | 2024-01-30 | 航天科工(长沙)新材料研究院有限公司 | 一种金刚石粒子探测器电极结构及其制备方法 |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05175359A (ja) * | 1991-12-20 | 1993-07-13 | Fujitsu Ltd | ダイヤモンド多層配線基板の製造方法 |
| JPH0694837A (ja) * | 1990-08-17 | 1994-04-08 | De Beers Ind Diamond Div Ltd | 放射検出器 |
| JPH08297166A (ja) * | 1995-04-26 | 1996-11-12 | Rikagaku Kenkyusho | 放射光位置モニターとその位置検出方法 |
| JPH10226589A (ja) * | 1997-02-14 | 1998-08-25 | Sumitomo Electric Ind Ltd | ダイヤモンドヒートシンクの製造方法 |
| JPH10509509A (ja) * | 1994-08-02 | 1998-09-14 | インペリアル カレッジ オブ サイエンス,テクノロジー アンド メディシン | 電離放射線検出器 |
| JP2001318155A (ja) * | 2000-02-28 | 2001-11-16 | Toshiba Corp | 放射線検出器、およびx線ct装置 |
| JP2002217449A (ja) * | 2001-01-16 | 2002-08-02 | Canon Inc | 横型受光素子 |
| JP2004273848A (ja) * | 2003-03-10 | 2004-09-30 | Hamamatsu Photonics Kk | ホトダイオードアレイおよびその製造方法並びに放射線検出器 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5429436A (en) * | 1994-07-05 | 1995-07-04 | Art's-Way Manufacturing Co., Inc. | Unibody vertical forage mixer with weighing mechanism |
| FR2757685B1 (fr) * | 1996-12-24 | 1999-05-14 | Commissariat Energie Atomique | Dispositif de detection de rayonnements ionisants a semi-conducteur de haute resistivite |
| US5757007A (en) | 1997-04-04 | 1998-05-26 | Eg&G Instruments, Inc. | Segmented electrode radiation detector |
| US6429436B1 (en) | 1998-09-22 | 2002-08-06 | Kabushiki Kaisha Toshiba | Radiographic flat panel detector |
| GB0006318D0 (en) | 2000-03-15 | 2000-05-03 | De Beers Ind Diamond | Radiation detector |
| EP1292726B8 (en) | 2000-06-15 | 2008-10-29 | Element Six (PTY) Ltd | Single crystal diamond prepared by cvd |
| AU6624601A (en) | 2000-06-15 | 2001-12-24 | De Beers Ind Diamond | Thick single crystal diamond layer method for making it and gemstones produced from the layer |
| WO2003062854A2 (de) * | 2002-01-25 | 2003-07-31 | Gesellschaft für Schwerionenforschung mbH | Detektor zur erfassung von teilchenstrahlen und verfahren zur herstellung desselben |
| GB0220767D0 (en) | 2002-09-06 | 2002-10-16 | Diamanx Products Ltd | Diamond radiation detector |
| US7446601B2 (en) * | 2003-06-23 | 2008-11-04 | Astronix Research, Llc | Electron beam RF amplifier and emitter |
| GB2404780A (en) | 2003-08-07 | 2005-02-09 | Element Six Ltd | Neutron detector |
| JP5096747B2 (ja) * | 2006-03-02 | 2012-12-12 | 株式会社神戸製鋼所 | ビーム検出部材およびそれを用いたビーム検出器 |
| WO2007109535A2 (en) * | 2006-03-16 | 2007-09-27 | Kansas State University Research Foundation | Non-streaming high-efficiency perforated semiconductor neutron detectors, methods of making same and measuring wand and detector modules utilizing same |
| US7692156B1 (en) * | 2006-08-23 | 2010-04-06 | Radiation Monitoring Devices, Inc. | Beam-oriented pixellated scintillators for radiation imaging |
-
2006
- 2006-11-14 GB GBGB0622695.5A patent/GB0622695D0/en not_active Ceased
-
2007
- 2007-11-12 EP EP07827060A patent/EP2087377A2/en not_active Withdrawn
- 2007-11-12 WO PCT/IB2007/054583 patent/WO2008059428A2/en not_active Ceased
- 2007-11-12 US US12/513,814 patent/US8242455B2/en not_active Expired - Fee Related
- 2007-11-12 JP JP2009535870A patent/JP2010509766A/ja not_active Ceased
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0694837A (ja) * | 1990-08-17 | 1994-04-08 | De Beers Ind Diamond Div Ltd | 放射検出器 |
| JPH05175359A (ja) * | 1991-12-20 | 1993-07-13 | Fujitsu Ltd | ダイヤモンド多層配線基板の製造方法 |
| JPH10509509A (ja) * | 1994-08-02 | 1998-09-14 | インペリアル カレッジ オブ サイエンス,テクノロジー アンド メディシン | 電離放射線検出器 |
| JPH08297166A (ja) * | 1995-04-26 | 1996-11-12 | Rikagaku Kenkyusho | 放射光位置モニターとその位置検出方法 |
| JPH10226589A (ja) * | 1997-02-14 | 1998-08-25 | Sumitomo Electric Ind Ltd | ダイヤモンドヒートシンクの製造方法 |
| JP2001318155A (ja) * | 2000-02-28 | 2001-11-16 | Toshiba Corp | 放射線検出器、およびx線ct装置 |
| JP2002217449A (ja) * | 2001-01-16 | 2002-08-02 | Canon Inc | 横型受光素子 |
| JP2004273848A (ja) * | 2003-03-10 | 2004-09-30 | Hamamatsu Photonics Kk | ホトダイオードアレイおよびその製造方法並びに放射線検出器 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020204516A (ja) * | 2019-06-17 | 2020-12-24 | 株式会社東芝 | 検出素子および検出器 |
| JP7059228B2 (ja) | 2019-06-17 | 2022-04-25 | 株式会社東芝 | 検出素子および検出器 |
| JP2023512076A (ja) * | 2020-01-31 | 2023-03-23 | ボード オブ リージェンツ,ザ ユニバーシティ オブ テキサス システム | 中性子検出器、ホウ素を中性子変換層として用いたその製造方法及びコンフォーマルドーピング |
| JP7674749B2 (ja) | 2020-01-31 | 2025-05-12 | ボード オブ リージェンツ,ザ ユニバーシティ オブ テキサス システム | 中性子検出器、ホウ素を中性子変換層として用いたその製造方法及びコンフォーマルドーピング |
Also Published As
| Publication number | Publication date |
|---|---|
| US20100155615A1 (en) | 2010-06-24 |
| WO2008059428A2 (en) | 2008-05-22 |
| GB0622695D0 (en) | 2006-12-27 |
| WO2008059428A3 (en) | 2008-12-18 |
| US8242455B2 (en) | 2012-08-14 |
| EP2087377A2 (en) | 2009-08-12 |
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