JP2010285626A - Azeotrope-like composition - Google Patents
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本発明は、高度にフッ素化されたハイドロフルオロエ−テルをベ−スとする共沸乃至それに近い挙動を示す新規な組成物に関するものである。更に詳しくは、加工や錆止めとして金属部品に使用されているグリ−スや加工油等の脱脂及び半導体製造時のフラックス除去のために好適に使用される洗浄剤のほか、発泡剤、作動媒体、分散剤、電気絶縁剤等の用途を代替することが可能な新規な共沸様組成物に関する。 The present invention relates to a novel composition exhibiting azeotropic or close behavior based on a highly fluorinated hydrofluoroether. More specifically, in addition to cleaning agents suitably used for degreasing grease and processing oil used for metal parts as processing and rust prevention and flux removal during semiconductor manufacturing, foaming agents, working media, The present invention relates to a novel azeotrope-like composition capable of replacing applications such as a dispersant and an electrical insulating agent.
クロロフルオロカ−ボンは毒性が少なく難燃性で、化学的、熱的に安定なものが多いため、溶剤、発泡剤、冷媒等に広く使用され、フラックスや加工油等の洗浄には、クロロフルオロカ−ボン系溶剤である１,１,２−トリクロロ−１,２,２−トリフルオロエタン（ＣＦＣ−１１３、沸点約４８度）、或いは塩素系溶剤である１,１,１−トリクロロエタン等が使用されて来た。 Chlorofluorocarbons are less toxic and flame retardant, and many are chemically and thermally stable. Therefore, they are widely used in solvents, foaming agents, refrigerants, etc. 1,1,2-trichloro-1,2,2-trifluoroethane (CFC-113, boiling point of about 48 degrees), which is a fluorocarbon solvent, or 1,1,1-trichloroethane, which is a chlorine solvent Has been used.
しかし、オゾン層保護の観点からウイ−ン条約（１９８５年）やモントリオ−ル議定書(１９８７年)に基づき、わが国でもＣＦＣ−１１（トリクロロフルオロメタン）、ＣＦＣ−１２（ジクロロジフルオロメタン）、ＣＦＣ−１１３、ＣＦＣ−１１４（１,２−ジクロロテトラフルオロエタン）、ＣＦＣ−１１５（クロロペンタフルオロエタン）などのクロロフルオロカ−ボンについては、１９９５年までに生産が事実上停止された。また、塩素系溶剤については、衛生や環境面の影響が懸念されている。 However, from the viewpoint of the protection of the ozone layer, CFC-11 (trichlorofluoromethane), CFC-12 (dichlorodifluoromethane), CFC- Production of chlorofluorocarbons such as 113, CFC-114 (1,2-dichlorotetrafluoroethane), and CFC-115 (chloropentafluoroethane) was virtually stopped by 1995. In addition, regarding chlorinated solvents, there are concerns about the impact on hygiene and the environment.
それに代る低沸点溶剤として、パーフルオロブチルメチルエーテルが知られているが、パーフルオロブチルメチルエーテルは、油やフラックス等の汚れに対して洗浄性能が低く、使用できる分野が限られている。 Perfluorobutyl methyl ether is known as an alternative low-boiling solvent, but perfluorobutyl methyl ether has a low cleaning performance against dirt such as oil and flux, and the fields where it can be used are limited.
そのため、パーフルオロブチルメチルエーテルの洗浄性能を改善する試みが行われてきた。例えば、特開２０００−１４３５６８号公報にはパーフルオロブチルメチルエーテル、含臭素炭化水素及び低級アルコールよりなる共沸様組成物が提案されている。さらに、特表平１０−５１０５７９号公報には、ペルフルオロブチルメチルエーテルと、ケトン、アルコール、環状アルカン、塩素化アルカン、一部フッ素化アルコール、ＨＣＦＣなどの有機溶剤との組成物が提案されている。 Therefore, attempts have been made to improve the cleaning performance of perfluorobutyl methyl ether. For example, JP 2000-143568 A proposes an azeotrope-like composition comprising perfluorobutyl methyl ether, a bromine-containing hydrocarbon and a lower alcohol. Further, JP-A-10-510579 proposes a composition of perfluorobutyl methyl ether and an organic solvent such as ketone, alcohol, cyclic alkane, chlorinated alkane, partially fluorinated alcohol, or HCFC. .
本発明者らは、従来公知の組成物とは異なり、洗浄使用工程において蒸留操作があっても組成変化が少なく組成物の特性を維持することができ、且つ回収や再利用に好都合な共沸乃至それに近い挙動(共沸様)を示す、オゾン層を破壊する恐れが無く、塩素を含まない新規な組成物を鋭意研究した結果、本発明に到達した。 Unlike the conventionally known compositions, the present inventors can maintain the properties of the composition with little composition change even if there is a distillation operation in the washing and use process, and are azeotropic for convenient recovery and reuse. As a result of diligent research on a novel composition that does not contain the ozone layer and exhibits a behavior close to that (azeotrope-like) and does not contain chlorine, the present invention has been achieved.
本発明は、オゾン層を破壊する恐れが無く、塩素を含まないハイドロフルオロエ−テルをベ−スとして、加工や錆止めとして金属部品に使用されているグリ−スや加工油等の脱脂及び半導体製造時のフラックス除去のために好適に使用される洗浄剤ほか、発泡剤、作動媒体、分散剤、電気絶縁剤等の用途を代替することが可能な共沸乃至それに近い挙動(共沸様)を示す新規な組成物を提供する。 The present invention is based on a hydrofluoroether containing no chlorine, which has no fear of destroying the ozone layer, and is used for degreasing and semiconductors such as grease and processing oil used for metal parts as processing and rust prevention. Azeotropic or similar behavior (azeotrope-like) that can replace applications such as detergents, foaming agents, working media, dispersants, electrical insulation, etc., as well as cleaning agents that are used favorably for flux removal during manufacturing A novel composition is provided.
本発明は、８０〜９９．５重量％の１，１，２，２−テトラフルオロエチル−２，２，２−トリフルオロエチルエ−テル、及び２０〜０．５重量％の２，２，３，３，３−ペンタフルオロプロパノ−ルからなる共沸様組成物を提供する。 The present invention comprises 80-99.5% by weight of 1,1,2,2-tetrafluoroethyl-2,2,2-trifluoroethyl ether and 20-0.5% by weight of 2,2, An azeotrope-like composition comprising 3,3,3-pentafluoropropanol is provided.
本発明によれば、オゾン層を破壊する恐れが無く、塩素を含まないハイドロフルオロエ−テルをベ−スとして、共沸乃至それに近い挙動を示す新規な組成物が提供される。
本発明によれば、本発明は共沸乃至それに近い挙動を示す組成であるため、使用工程において蒸留操作があっても成分の組成変化が少なく、該組成物の特性を維持することができ、組成物の回収や再利用に好都合な組成物が提供される。
本発明によれば、炭化水素系油等の溶解性がハイドロフルオロエ−テル単独の場合よりも向上した組成物が提供される。
According to the present invention, there is provided a novel composition which has no fear of destroying the ozone layer and exhibits azeotropic or similar behavior based on a hydrofluoroether containing no chlorine.
According to the present invention, since the present invention is a composition exhibiting azeotropic or similar behavior, there is little change in composition of components even if there is a distillation operation in the use process, and the characteristics of the composition can be maintained. A composition is provided that is convenient for recovery and reuse of the composition.
According to the present invention, a composition in which the solubility of a hydrocarbon-based oil or the like is improved as compared with the case of hydrofluoroether alone is provided.
本発明は、ハイドロフルオロエ−テルとフッ素化アルコ−ルからなる共沸様組成物に関する。 The present invention relates to an azeotrope-like composition comprising a hydrofluoroether and a fluorinated alcohol.
本発明のハイドロフルオロエ−テルは、１，１，２，２−テトラフルオロエチル−２，２，２−トリフルオロエチルエ−テル（以下、ＨＦＥ３４７ｐｃ−ｆということがある）である。 The hydrofluoroether of the present invention is 1,1,2,2-tetrafluoroethyl-2,2,2-trifluoroethyl ether (hereinafter sometimes referred to as HFE347pc-f).
本発明のフッ素化アルコールは、２，２，３，３，３−ペンタフルオロプロパノ−ル（以下、ＰＦＰということがある）である。 The fluorinated alcohol of the present invention is 2,2,3,3,3-pentafluoropropanol (hereinafter sometimes referred to as PFP).
本発明の共沸様組成物は、ハイドロフルオロエ−テルの１，１，２，２−テトラフルオロエチル−２，２，２−トリフルオロエチルエ−テルと、フッ素化アルコ−ルの２，２，３，３，３−ペンタフルオロプロパノ−ルからなる共沸様組成物である。 The azeotrope-like composition of the present invention comprises hydrofluoroether 1,1,2,2-tetrafluoroethyl-2,2,2-trifluoroethyl ether and fluorinated alcohol 2,4. It is an azeotrope-like composition comprising 2,3,3,3-pentafluoropropanol.
これらの共沸様組成物の好ましい組成としては、８０〜９９．５重量％のＨＦＥ−３４７ｐｃ−ｆと２０〜０.５重量％のＰＦＰからなる共沸様組成物を挙げることができる。 Preferred examples of these azeotrope-like compositions include azeotrope-like compositions comprising 80 to 99.5% by weight of HFE-347pc-f and 20 to 0.5% by weight of PFP.
本発明において、共沸様組成物とは、共沸乃至それに近い挙動（共沸様）を示す組成物をいう。本発明の共沸様組成物においては、使用工程において蒸留操作があっても成分の組成変化が少なく共沸様組成物の特性を維持することができるため、組成物の回収や再利用に好都合である。
また、炭化水素系油等の溶解性をハイドロフルオロエ−テル単独の場合よりも向上させることができる。
In the present invention, the azeotrope-like composition refers to a composition that exhibits azeotropy or behavior close to it (azeotrope-like). In the azeotrope-like composition of the present invention, even if there is a distillation operation in the use process, the composition change of the components is small and the characteristics of the azeotrope-like composition can be maintained, so it is convenient for recovery and reuse of the composition It is.
In addition, the solubility of hydrocarbon oil and the like can be improved as compared to the case of hydrofluoroether alone.
本発明で特に好ましい共沸様組成物として、９７重量％のＨＦＥ−３４７ｐｃ−ｆと３重量％のＰＦＰからなる共沸様組成物を挙げることができる。 A particularly preferred azeotrope-like composition in the present invention is an azeotrope-like composition comprising 97% by weight of HFE-347pc-f and 3% by weight of PFP.
本発明の共沸様組成物は、必要に応じて安定化剤を含んでいてもよい。安定化剤としては、ニトロアルカン類、エポキシド類、フラン類、ベンゾトリアゾール類、フェノール類、アミン類、ホスフェイト類から選ばれる少なくとも１種を含むことができる。安定化剤としては、従来クロロフルオロカーボン類に用いられてきたものから、適宜選択して用いることができる。これらの安定化剤の配合量は、共沸様組成物に対して０．０１〜５重量％、好ましくは０．０５〜０．５重量％であることが望ましい。 The azeotrope-like composition of this invention may contain the stabilizer as needed. The stabilizer can include at least one selected from nitroalkanes, epoxides, furans, benzotriazoles, phenols, amines, and phosphates. As the stabilizer, those conventionally used for chlorofluorocarbons can be appropriately selected and used. The amount of these stabilizers to be blended is 0.01 to 5% by weight, preferably 0.05 to 0.5% by weight, based on the azeotrope-like composition.
さらに、本発明の共沸様組成物は、本発明の特徴を損なわない範囲で、必要に応じて、アルコール類、ケトン類、エーテル類、エステル類、炭化水素類、アミン類、グリコールエーテル類、シロキサン類などの他の成分を含むことができる。 Furthermore, the azeotrope-like composition of the present invention is an alcohol, a ketone, an ether, an ester, a hydrocarbon, an amine, a glycol ether, if necessary, as long as the characteristics of the present invention are not impaired. Other components such as siloxanes can be included.
本発明の共沸様組成物は、洗浄剤、発泡剤、作動媒体、分散剤、電気絶縁剤等の用途に用いることができる。
洗浄剤用途としては、金属部品、プラスチック部品、ゴム製品、ガラス製品、及びこれらを組み合わせた精密機械部品、電子部品の、微粒子や油脂などの汚染物除去用洗浄剤として、或いはドライクリーニング用洗浄剤として用いることができる。洗浄剤として用いる場合、常温洗浄法での拭い落とし、浸漬、はけ洗い、フラッシュ、スプレー、超音波洗浄、或いは、加熱洗浄法での沸騰状態での浸漬、蒸気すすぎ、蒸気洗浄等が適用でき、これらを適宜組み合わせることにより更に効果的に洗浄することができる。
分散剤用途としては、潤滑剤、撥水撥油剤、防錆剤、及び金属部品や、プラスチック部品、ガラス部品等に塗料等を均一に塗布するための媒体として、効果的に用いることができる。
The azeotrope-like composition of this invention can be used for uses, such as a cleaning agent, a foaming agent, a working medium, a dispersing agent, an electrical insulation agent.
As cleaning agents, metal parts, plastic parts, rubber products, glass products, precision machine parts combining these, and electronic parts as cleaning agents for removing contaminants such as fine particles and oils and fats, or dry cleaning agents Can be used as When used as a cleaning agent, wiping, immersion, brushing, flushing, spraying, ultrasonic cleaning, or immersion in boiling state, steam rinsing, steam cleaning, etc. can be applied. Further, these can be washed more effectively by appropriately combining them.
For use as a dispersant, it can be effectively used as a lubricant, water / oil repellent, rust preventive, and a medium for uniformly applying paint or the like to metal parts, plastic parts, glass parts, and the like.
次に実施例及び比較例を示して、本発明をより具体的に説明するが、本発明はこれらの例によって何ら制限されるものではない。 EXAMPLES Next, although an Example and a comparative example are shown and this invention is demonstrated more concretely, this invention is not restrict | limited at all by these examples.
（実施例１）
ＨＦＥ−３４７ｐｃ−ｆ（沸点５７．２℃(測定値)）約１００ｇをフラスコ（３００ｍｌ）に入れ沸騰させた。その中に任意の量のＰＦＰ（沸点約８１．０℃（測定値））を添加していき、液相の温度変化を調べた。その結果、当初５７．２℃であった沸点が５７．１℃まで低下した。このときの液相及び及びガス相の組成をガスクロマトグラフ（島津製作所製ＧＣ−１４Ａ）により分析したところ、ＨＦＥ−３４７ｐｃ−ｆが９７．０重量％、ＰＦＰ濃度は３．０重量％であった。
本実施例から、９７．０重量％のＨＦＥ−３４７ｐｃ−ｆ及び３．０重量％のＰＦＰからなる本発明の組成物は、沸点が５７．１度に低下し気相と液相の組成がほぼ同一となり、共沸様組成物となっていることがわかる。
Example 1
About 100 g of HFE-347pc-f (boiling point 57.2 ° C. (measured value)) was placed in a flask (300 ml) and boiled. An arbitrary amount of PFP (boiling point: about 81.0 ° C. (measured value)) was added thereto, and the temperature change of the liquid phase was examined. As a result, the boiling point, which was 57.2 ° C. at the beginning, dropped to 57.1 ° C. When the composition of the liquid phase and the gas phase at this time was analyzed by a gas chromatograph (GC-14A, manufactured by Shimadzu Corporation), HFE-347pc-f was 97.0% by weight and the PFP concentration was 3.0% by weight. .
From this example, the composition of the present invention consisting of 97.0% by weight of HFE-347pc-f and 3.0% by weight of PFP has a boiling point lowered to 57.1 degrees and a composition of the gas phase and the liquid phase. It turns out that it becomes almost the same and becomes an azeotrope-like composition.
本発明により、高度にフッ素化された特定のハイドロフルオロエ−テルをベ−スとする、共使用工程において蒸留操作があっても成分の組成変化が少なく、該組成物の特性を維持することができ、組成物の回収や再利用に好都合な沸乃至それに近い挙動（共沸様）を示す新規な組成物を提供することができる。
また、本発明によれば、炭化水素系油等の溶解性がハイドロフルオロエ−テル単独の場合よりも向上した新規な共沸様組成物を提供することができる。
本発明により提供される新規な共沸様組成物は、クロロフロロカーボン、或いは塩素系溶剤の代替として、加工や錆止めとして金属部品に使用されているグリ−スや加工油等の脱脂及び半導体製造時のフラックス除去のために好適に使用される洗浄剤のほか、発泡剤、作動媒体、分散剤、電気絶縁剤等の用途に好適に用いることができる。
According to the present invention, based on a specific highly fluorinated hydrofluoroether, even if there is a distillation operation in the co-use process, there is little change in the composition of the components, and the characteristics of the composition are maintained. It is possible to provide a novel composition that exhibits boiling or a behavior close to that (azeotrope-like) that is convenient for recovery and reuse of the composition.
Moreover, according to this invention, the novel azeotrope-like composition which improved the solubility of hydrocarbon oil etc. compared with the case of a hydrofluoroether single can be provided.
The novel azeotrope-like composition provided by the present invention is used for degreasing grease and processing oil used in metal parts as processing and rust prevention as an alternative to chlorofluorocarbons or chlorinated solvents, and during semiconductor manufacturing. In addition to the cleaning agent suitably used for removing the flux, it can be suitably used for applications such as a foaming agent, a working medium, a dispersing agent, and an electrical insulating agent.
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| JP5084876B2 (en) | 2012-11-28 |
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